TW201144342A - Purifying method of alkylnaphthaleneformaldehyde polymer - Google Patents
Purifying method of alkylnaphthaleneformaldehyde polymer Download PDFInfo
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201144342 六、發明說明: 【發明所屬之技術領域】 有利的精製方法 【先前技術】 是有關於金屬含量降低:上= 公知有芳香馳_,其是使以單f基萘及/或二甲基 不為主成分的多環式芳香族烴與對曱醛在 在下反應而得,所得的樹職液狀環氧樹脂的相=及1 一甲苯的溶解性優異(參照專利文獻^。 ^另外,公知的方法有:使曱氧基亞甲基萘化合物、與 苯紛、m或萘料具有雜祕的化合物在二乙基硫酸 存在下反應,從而獲得具有萘與具有酚性羥基的化合物經 由亞曱基鍵結的結構的齡樹脂(參照專利文獻2)。 該些樹脂可用作半導體用塗佈劑、光阻劑用樹脂、半 導體下層膜形成樹脂。在該些用途中,為了提高良率,特 別是金屬含量成為重要的性能項目。即,在使用金屬含量 較多的樹脂時,由於半導體中殘存金屬而使半導體的電氣 特性降低,因此要求降低金屬含量。 一般認為金屬含量降低的烷基萘曱醛聚合物的製造方 法有:使含有垸基萘曱醛聚合物及有機溶劑的溶液與離子 交換樹脂接觸的方法、或藉由過濾器進行過濾的方法等。 然而’使用離子交換樹脂的方法中,在含有各種金屬 離子時’選擇離子交換樹脂存在困難,而有由於金屬的種 201144342 去除的問題、難以去除非離子性金屬的問題、而 淪沾古、、也本較大的問題。另一方面,在藉由過滤、器進行過 ,中,存在難以去除離子性金屬的問題。 τ普^,、’期望確立金屬含量降低麟基蔡Μ聚合物的 菜上較為有利的精製方法。 [先前技術文獻] [專利文獻] 專利文獻1 :曰本專利特開昭54-86593號公報 專利文獻2 :日本專利特開2〇〇4-9155〇號公報 【發明内容】 本發明的目的在於提供一種金屬含量降低的烷基举甲 酸聚合物的工業上較為有精製方法。 基#甲 本發月者等人為了解決上述課題而銳 有嶋甲略物及有機溶劑的溶: f生L谷液翻,而刊麟低各種金屬的♦量 本發明。 代』疋战 即,本發明如以下所述。 L 一種絲萘帽聚合物的精製方法,其特徵在於: 使含有烧基萘甲路聚合物及有機溶劑的溶液與酸性水容 接觸’上 =基萘曱《合物是使絲倾情反應而得。 2. 如第1項所述之精製方法,其中上述酸性 選自由鹽酸、硫酸、猶及磷酸所組成群 種^ 無機酸的水溶液。 、種以上 3. 如第1項所述之精製方法’其中上述酸性水溶液為 4 201144342 選自由乙酸、丙酸、乙二酸、丙二酸、丁二酸、反丁烯二 酸、順丁烯二酸、酒石酸、檸檬酸、曱磺酸、苯酚磺酸、 對甲苯磺酸及三氟乙酸所組成群組中的丨種以上有機酸水 溶液。 4·如第2項所述之精製方法,其中上述酸性水溶液 硫酸的水溶液。 ‘ 5. 如第3項所述之精製方法,其中上述酸 乙二酸的水溶液。 4 又馬 6. 如第1項至第5項中任一項所述之精製方法 上述有機溶劑為甲苯、2_庚_、環己酮、環細 = 丁基酮、丙二醇單曱醚乙酸略或乙酸乙醋。 丞異 7. 如第6項所述之精製方法,其中上 己酮、或丙二醇單甲醚乙酸酯。 機岭劑為環 8. 如第1項至第7項中任一項所述之精製方 上述炫基萘甲㈣合物包含下述通式⑴ 其中 [化1] 不的早元:201144342 VI. Description of the invention: [Technical field to which the invention pertains] Advantageous refining method [Prior art] There is a reduction in the metal content: upper = well-known fragrant chi _, which is a single f-naphthalene and/or dimethyl group The polycyclic aromatic hydrocarbon which is not a main component is obtained by reacting with furfural, and the obtained liquid phase epoxy resin has excellent solubility in phase = and 1-toluene (see Patent Document ^. A well-known method is: reacting a decyloxymethylene naphthalene compound, a compound having a heterogeneity with a benzene, m or a naphthalene material in the presence of diethyl sulphate, thereby obtaining a compound having naphthalene and a phenolic hydroxyl group via a sub- Age-dependent resin having a thiol-bonded structure (see Patent Document 2). These resins can be used as a coating agent for a semiconductor, a resin for a photoresist, and a semiconductor underlayer film forming resin. In these applications, in order to improve the yield In particular, the metal content is an important performance item. That is, when a resin having a large metal content is used, since the electrical properties of the semiconductor are lowered due to the residual metal in the semiconductor, it is required to lower the metal content. A method for producing an alkylnaphthylfurfural polymer having a reduced metal content is generally a method of bringing a solution containing a fluorenylnaphthaldehyde polymer and an organic solvent into contact with an ion exchange resin, or a method of filtering by a filter. However, in the method of using an ion exchange resin, it is difficult to select an ion exchange resin when various metal ions are contained, and there is a problem that the metal species 201144342 is removed, and it is difficult to remove the nonionic metal, and it is difficult to remove the nonionic metal. On the other hand, there is a problem that it is difficult to remove ionic metals by filtration, and it is difficult to remove ionic metals. [Pre-Technical Document] [Patent Document] Patent Document 1: Patent Publication No. Sho 54-86593 Patent Document 2: Japanese Patent Laid-Open No. Hei 2-9-9155 No. SUMMARY OF THE INVENTION The object of the present invention is to provide an industrially refined method for the alkylation of a formic acid polymer having a reduced metal content. In order to solve the above-mentioned problems, it is possible to dissolve the scorpion and the organic solvent: f-L-liquid is turned over, and the lining is low in various metals. The present invention is as follows. A method for purifying a silk naphthalene cap polymer, which comprises: contacting a solution containing a naphthylcarbamate polymer and an organic solvent with an acidic water content: the upper = naphthoquinone compound is obtained by reacting the silk. 2. The purification method according to Item 1, wherein the acidity is selected from the group consisting of hydrochloric acid, sulfuric acid, and phosphoric acid, and an aqueous solution of a mineral acid. The above acidic aqueous solution is 4 201144342, which is selected from the group consisting of acetic acid, propionic acid, oxalic acid, malonic acid, succinic acid, fumaric acid, maleic acid, tartaric acid, citric acid, sulfonic acid, phenolsulfonic acid, An aqueous solution of an organic acid or higher in the group consisting of p-toluenesulfonic acid and trifluoroacetic acid. 4. The purification method according to item 2, wherein the acidic aqueous solution is an aqueous solution of sulfuric acid. The purification method according to item 3, wherein the aqueous solution of the above acid oxalic acid is used. 4 Further, the method of purifying according to any one of the items 1 to 5, wherein the organic solvent is toluene, 2-g-g, cyclohexanone, cyclofine = butyl ketone, propylene glycol monoterpene ether acetate Or ethyl acetate. 7. The method of refining according to item 6, wherein the above is ketone or propylene glycol monomethyl ether acetate. The machine is a ring. The refined party according to any one of the items 1 to 7 above, wherein the stilbene naphthalene (tetra) compound comprises the following formula (1): wherein:
(式⑴中,X為-(〇CH2)t_,tW〜 9.如第1項至第7項中任-項所述之精製^了4)。 201144342 上述烷基萘曱醛聚合物包含下述通式(2)所示的單元: [化2](In the formula (1), X is -(〇CH2)t_, tW~9. The refining as described in any one of items 1 to 7). 201144342 The above alkylnaphthalene aldehyde polymer comprises a unit represented by the following formula (2): [Chemical 2]
R RR R
R---RR---R
(式(2)中’ X與上述相同;R分別獨立為氫原子或 碳數1〜碳數4的烧基)。 10.如第1項至第7項中任一項所述之精製方法,其 中上述烷基萘曱醛聚合物包含下述通式(3)所示的單元〃: [化 3] *(In the formula (2), 'X is the same as above; and R is each independently a hydrogen atom or a carbon number of 1 to a carbon number of 4). The purification method according to any one of the items 1 to 7, wherein the alkylnaphthylfurfural polymer comprises a unit represented by the following formula (3): [Chemical 3] *
ZHZH
(式(3)中’ X與上述相同;Ri分別獨立表示氫原 子或選自由碳數1〜碳數4的烷基、降莰基、環己基、三 6 201144342 環癸基、金剛烷基、十氫萘基、雙環辛基及乙烷合萘基所 組成群組中的1種以上官能基;另外’式(3)中二^示 -CO-或單鍵’ Ζ表示氧原子或硫原子;瓜為〇〜3)。 ’ 11.如第1項至第7項中任一項所述之精製方法,其 中上述烷基萘曱醛聚合物包含下述通式(4)所示的單元.(In the formula (3), 'X is the same as the above; Ri each independently represents a hydrogen atom or an alkyl group selected from a carbon number of 1 to a carbon number 4, a thiol group, a cyclohexyl group, a triple 6 201144342 cyclodecyl group, an adamantyl group, More than one functional group in the group consisting of decahydronaphthyl, bicyclooctyl and ethanenaphthyl; in addition, 'the formula (3) indicates that -CO- or a single bond 'Ζ denotes an oxygen atom or a sulfur atom ; melon is 〇~3). The purification method according to any one of the items 1 to 7, wherein the alkylnaphthylfurfural polymer comprises a unit represented by the following formula (4).
[化4] 疋. ZYR3[化4] 疋. ZYR3
(式(4)中’ X、Υ、Ζ與上述相同;R2分別獨立表 示氫原子、或碳數1〜碳數4的烴基’ R3分別獨立表示選 自由降莰基、環己基、三環癸基、金剛烧基、十氫萘基及 雙環辛基所組成群組中的1種以上官能基;1為〇〜3)。 12.如第1項至第7項中任一項所述之精製方法,其 中上述烷基萘曱醛聚合物包含下述通式(5)所示的單元: [化5] 201144342(In the formula (4), 'X, Υ, Ζ are the same as above; R2 each independently represents a hydrogen atom, or a hydrocarbon group having a carbon number of 1 to a carbon number of 'R3', respectively, independently derived from a thiol group, a cyclohexyl group, a tricyclic fluorene group. One or more functional groups in the group consisting of a group, an adamantyl group, a decahydronaphthyl group, and a bicyclooctyl group; and 1 is 〇~3). The purification method according to any one of the items 1 to 7, wherein the alkylnaphthylfurfural polymer comprises a unit represented by the following formula (5): [Chemical 5] 201144342
(yr% (式(5)中,X、Y、Z與上述相同;R4分別獨立表 示氫原子或選自由碳數1〜碳數3的烷基、降莰基、環己 基、三環癸基、金剛烷基、十氫萘基、雙環辛基及乙烷合 萘基所組成群組中的1種以上官能基;〇為1〜2,p為0 4 ) 〇 13.如第1項至第7項中任一項所述之精製方法,其 中上述烷基萘甲醛聚合物包含下述通式(6)所示的單元: [化6](yr% (in the formula (5), X, Y, and Z are the same as the above; R4 each independently represents a hydrogen atom or an alkyl group selected from a carbon number of 1 to a carbon number of 3, a decyl group, a cyclohexyl group, a tricyclodecyl group. And one or more functional groups in the group consisting of adamantyl, decahydronaphthyl, bicyclooctyl and ethanenaphthyl; 〇 is 1 to 2, p is 0 4 ) 〇 13. as in item 1 to The purification method according to any one of the items 7, wherein the alkylnaphthalene formaldehyde polymer comprises a unit represented by the following formula (6): [Chem. 6]
(式(6)中,X、Y、Z、R3與上述相同;R5分別獨 立表示氫原子或碳數1〜碳數3的煙基;q為1〜2,r為0 14.如第1項至第7項中任一項所述之精製方法,其 中上述烷基萘曱醛聚合物包含下述通式(7)所示的單元: 8 201144342 [化7](In the formula (6), X, Y, Z, and R3 are the same as defined above; and R5 each independently represents a hydrogen atom or a nicotine group having a carbon number of 1 to a carbon number of 3; q is 1 to 2, and r is 0. The purification method according to any one of item 7, wherein the alkylnaphthylfurfural polymer comprises a unit represented by the following formula (7): 8 201144342 [Chem. 7]
(式(7)中,X、R5與上述相同;s為0〜4)。 15.如第1項至第7項中任一項所述之精製方法,其 中上述烷基萘曱醛聚合物包含下述通式(8)所示的單元: [化8](In the formula (7), X and R5 are the same as above; s is 0 to 4). The purification method according to any one of the items 1 to 7, wherein the alkylnaphthylfurfural polymer comprises a unit represented by the following formula (8): [Chem. 8]
OHOH
(8) (式(8)中,X、R5、s與上述相同)。 [發明的效果] 201144342 根據本發明,可提供各種金屬的含量明顯降低的烷基 萘曱醛聚合物的精製方法。 土 ▲為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說 明如下。 ββ 【實施方式】 以下’對本發明進行詳細說明。 本發明是藉由使烷基萘甲醛聚合物溶解於有機溶劑, 並使此溶液與酸性水溶液接觸’而使含有烷基萘甲醛聚合 物及有機溶劑的溶液中所含的金屬成分轉移至水相,而精 製金屬含量降低的烷基萘甲醛聚合物。 本發明中所使用的烷基萘曱醛聚合物是至少使烧基萘 與曱醛反應而得的烷基萘甲醛聚合物,烷基萘及曱醛以外 的原料可使用苯驗、苯紛衍生物、萘盼、萘紛衍生物等。 另外,在獲得此聚合物時,例如使烷基萘及甲醛反應後, 藉由苯酚、苯酚衍生物、萘酚、萘酚衍生物等進行改質, 從而形成經由獲得目標聚合物的方法等的多階段的反應而 最終獲得的聚合物。 獲得本發明所用的聚合物時可用的烷基萘是:選自α-甲基萘、β-曱基萘、I2-二曱基萘、I3·二甲基萘、1,4-二 曱基萘、1,5-二曱基萘、1,6-二曱基萘、1,7-二甲基萘、1,8-二曱基萘、2,3-二甲基萘、2,6-二甲基萘、2,7-二甲基萘、 三甲基萘、四甲基萘、乙烷合萘、甲基乙烷合萘、環己基 萘、降莰基萘、三環癸基萘、金剛烧基萘、癸基萘及雙環 201144342 辛基萘的群财的1種、或2種以上的混合物。综合考廣 原料供應的魏性與樹難造的容易性、光學特性 了 較佳為1,5-二甲基萘、2,6-二f基萘、2,7·二甲基萘、j & 一甲基萘或乙炫合萘,其中特佳為丨,5_二甲基萘。 由於二甲基萘是萘環的2個芳香環均各具有丨個甲基 的結構,因此在酸性或鹼性觸媒存在下與曱醛縮合反^ 時,形成多官能性樹脂。將未經取代的萘或單甲基蔡、^ 萘環的僅單個芳香環進行二曱基化的丨,2_二甲基萘、^ L 二曱基萘、1,4-二曱基萘作為原料時,只要不採用如界面 反應的特殊反應形式,則無法獲得多官能性樹脂。另外, 在使用三曱基取代以上的萘化合物時,反應點變少沬 獲得多官能性樹脂。 … 本發明中所用的烷基萘曱醛聚合物較佳為包含下述 式(1)所不的結構單元。(8) (In the formula (8), X, R5, and s are the same as described above). [Effect of the Invention] 201144342 According to the present invention, a method for purifying an alkylnaphthylfurfural polymer having a markedly reduced content of various metals can be provided. The above and other objects, features, and advantages of the present invention will become more apparent from the aspects of the invention. Ββ [Embodiment] Hereinafter, the present invention will be described in detail. In the present invention, the metal component contained in the solution containing the alkylnaphthalene formaldehyde polymer and the organic solvent is transferred to the aqueous phase by dissolving the alkylnaphthalene formaldehyde polymer in an organic solvent and bringing the solution into contact with the acidic aqueous solution. And an alkylnaphthalene formaldehyde polymer having a reduced refined metal content. The alkylnaphthylfurfural polymer used in the present invention is an alkylnaphthalene formaldehyde polymer obtained by reacting at least a naphthyl naphthalene with furfural, and a raw material other than alkyl naphthalene and furfural can be used for benzene and benzene. , naphthene, naphthalene derivatives, and the like. In addition, when the polymer is obtained, for example, an alkylene naphthalene and formaldehyde are reacted, and then phenol, a phenol derivative, a naphthol, a naphthol derivative or the like is modified to form a method of obtaining a target polymer or the like. The multi-stage reaction results in the final polymer obtained. The alkylnaphthalene which can be used in obtaining the polymer used in the present invention is selected from the group consisting of α-methylnaphthalene, β-mercaptophthalene, I2-didecylnaphthalene, I3·dimethylnaphthalene, and 1,4-dioxyl. Naphthalene, 1,5-didecylnaphthalene, 1,6-didecylnaphthalene, 1,7-dimethylnaphthalene, 1,8-didecylnaphthalene, 2,3-dimethylnaphthalene, 2,6 - dimethylnaphthalene, 2,7-dimethylnaphthalene, trimethylnaphthalene, tetramethylnaphthalene, ethane naphthalene, methylethane naphthalene, cyclohexylnaphthalene, decylnaphthalene, tricyclodecyl One type or a mixture of two or more kinds of naphthalene, adamantyl naphthalene, decyl naphthalene, and bicyclo 201144342 octyl naphthalene. It is preferable to use 1,5-dimethylnaphthalene, 2,6-di-f-naphthalene, 2,7-dimethylnaphthalene, j to improve the easiness and optical properties of the Wei and the tree. & Monomethyl naphthalene or ethyl dahne naphthalene, of which particularly preferred is hydrazine, 5-dimethylnaphthalene. Since dimethylnaphthalene is a structure in which two aromatic rings of a naphthalene ring each have a methyl group, a polyfunctional resin is formed by condensation with furfural in the presence of an acidic or basic catalyst. An unsubstituted naphthalene or a monomethyl phthalocyanine, a single aromatic ring of a naphthalene ring, which is dithiolated, 2 - dimethylnaphthalene, 2 L-nonylnaphthalene, 1,4-dioxylnaphthalene As a raw material, a polyfunctional resin cannot be obtained as long as a special reaction form such as an interfacial reaction is not employed. Further, when a tridecyl group is used in place of the above naphthalene compound, the reaction point becomes small, and a polyfunctional resin is obtained. The alkylnaphthalene aldehyde polymer used in the present invention preferably contains a structural unit which is not represented by the following formula (1).
(式⑴中’X為-(〇CH2)t-,t為〇〜2〇11為〇〜4。)(In the formula (1), 'X is -(〇CH2)t-, and t is 〇~2〇11 is 〇~4.)
11 201144342 [化 ίο]11 201144342 [化 ίο]
(式(2)中,X與上述相同。R分別獨立為氫原子或 碳數1〜碳數4的烷基。) 本發明的包含通式(2)所示的結構單元的改質烷基萘 曱醛聚合物,可藉由使包含通式(1)所示的結構單元的聚 合物與包含下述通式(9)所示的化合物的改質劑在酸性或 鹼性觸媒下縮合反應而得。通式(9)所示的化合物特佳為 乙院合萘。 [化 11](In the formula (2), X is the same as above. R each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.) The modified alkyl group of the present invention comprising the structural unit represented by the formula (2) A naphthylfurfural polymer which can be condensed under acidic or basic catalyst by a polymer comprising a structural unit represented by the formula (1) and a modifying agent comprising a compound represented by the following formula (9) The reaction comes. The compound represented by the formula (9) is particularly preferably a naphthalene. [化11]
R RR R
R---R 12 (9) 201144342 (式(9 )中’ R與上述相同。) 本發明中所用的烷基萘曱醛聚合物亦可具有選自由下 述式(10)戶斤乔的各單元所組成群組中的結構單元。 [化 12]R---R 12 (9) 201144342 (R in the formula (9) is the same as the above.) The alkylnaphthylfurfural polymer used in the present invention may also have a group selected from the following formula (10) A structural unit in a group consisting of cells. [化 12]
(式(10)中,χ與上述相同。) 本發明的包含通式(10)所示的結構單元的改質烷基 萘曱醛聚合物,可藉由使包含通式(1)所示的結構單元的 聚合物、與包含蒽、菲、芘、乙稀合萘(acenaphthylene)、 乙烷合萘(acenaphthene)、茚、第、富勒烯等芳 的改質劑在酸性或鹼性觸媒下縮合反應而得。 矢杈類 本發明中所用的烷基萘曱醛聚合物較佳為勹 式(3)所示的結構單元。 ^ 3下述通 [化 13] 13 201144342(In the formula (10), hydrazine is the same as above.) The modified alkylnaphthylfurfural polymer containing the structural unit represented by the formula (10) of the present invention can be represented by the inclusion of the formula (1) The polymer of the structural unit and the modifier containing aryl, phenanthrene, anthracene, acenaphthylene, acenaphthene, anthracene, first, fullerene, etc. in acidic or alkaline touch The condensation reaction of the medium is obtained. The saxoquinone type of the alkylnaphthalene aldehyde polymer used in the present invention is preferably a structural unit represented by the formula (3). ^ 3 The following pass [Chemistry 13] 13 201144342
(式(3)中’ X與上述相同。R1分別獨立表示氫原 子或選自由碳數1〜碳數4的烧基、降莰基、環己基、三 環癸基、金剛烧基、十氫萘基、雙環辛基及乙烧合萘基所 組成群組中的1種以上官能基。另外,式(3 )中,Y表示 -CO-或單鍵,Z表示氧原子或硫原子。m為0〜3。) 本發明的包含通式(3)所示的結構單元的聚合物,可 藉由使上述聚合物與包含下述通式(11)所示的化合物的 改質劑在酸性或鹼性觸媒下縮合反應而得。 [化 14](In the formula (3), 'X is the same as above. R1 each independently represents a hydrogen atom or a group selected from a carbon number of 1 to a carbon number of 4, a thiol group, a cyclohexyl group, a tricyclodecanyl group, an adamantyl group, and a decahydrogen group. One or more functional groups in the group consisting of a naphthyl group, a bicyclooctyl group, and an ethionyl group; wherein, in the formula (3), Y represents -CO- or a single bond, and Z represents an oxygen atom or a sulfur atom. It is 0 to 3. The polymer containing the structural unit represented by the formula (3) of the present invention can be made acidic by modifying the above polymer with a modifying agent containing a compound represented by the following formula (11). Or a condensation reaction under a basic catalyst. [Chem. 14]
(式(11)中’Y'Z'R1、!!!與上述相同。) 通式(11)所示的化合物較佳為苯酚或苯酚衍生物。 201144342 苯紛衍生物是藉由使苯齡與齒素或醇或齒化物在酸觸媒下 進行烷基化反應而得。另外,使用酯化物進行g旨交換反應 後’藉由路易斯酸觸媒等進行弗里斯重排(FHes rearrangement),而獲得介隔幾基的酮化物0 本發明中所用的院基萘曱醛聚合物較佳為包含下述通 式(4)所示的結構單元。 [化 15](Y'Z'R1, !!! in the formula (11) is the same as above.) The compound represented by the formula (11) is preferably a phenol or a phenol derivative. 201144342 Derivatives of benzene are obtained by alkylation of benzene with dentate or alcohol or dentate under acid catalyst. Further, after the exchange reaction of the ester compound is carried out, 'Fhes rearrangement is performed by a Lewis acid catalyst or the like to obtain a ketone compound having a number of partitions. The naphthylquinal aldehyde polymerization used in the present invention. The material preferably contains a structural unit represented by the following formula (4). [化15]
一(式(4)中,X、Y、Z與上述相同。R2分別獨立表 不氫原子、或碳數1〜碳數4的烴基,R3分別獨立表示選 降茨基、環己基、三環癸基、金剛院基、十氫蔡基及 雙環辛基驗成群組巾的i種社官能基。❻G〜3。) 本發明的包含通式(4)所示的結構單元的聚合物是藉 由使上述聚合物與包含下述通式(12)所示的化合物的改 質劑在酸性或鹼性觸媒下進行縮合反應而得。通式⑴) 所不的化合物較佳為苯酚衍生物。 [化 16] 201144342In the formula (4), X, Y, and Z are the same as above. R2 independently represents a hydrogen atom or a hydrocarbon group having a carbon number of 1 to a carbon number of 4, and R3 independently represents a selected group, a cyclohexyl group, and a tricyclic ring. The thiol, konjac, decandrein and bicyclooctyl group are functional groups of the group towel. ❻G~3.) The polymer of the present invention comprising the structural unit represented by the formula (4) is It is obtained by subjecting the above polymer to a condensation agent containing a compound represented by the following formula (12) under an acidic or basic catalyst. The compound which is not represented by the formula (1)) is preferably a phenol derivative. [化16] 201144342
(式(12)中,γ、Z、R2、R3、1與上述相同。) 本發明中所用的烷基萘曱醛聚合物較佳為包含下述通 式(5)所示的結構單元。 [化 17](In the formula (12), γ, Z, R2, R3 and 1 are the same as above.) The alkylnaphthylfurfural polymer used in the present invention preferably contains a structural unit represented by the following formula (5). [Chem. 17]
⑻ (式(5)中,X、Y、Z與上述相同。R4分別獨立表 示氫原子或選自由碳數1〜碳數3的烷基、降莰基、環己 基、三環癸基、金剛烷基、十氫萘基、雙環辛基及乙烷合 萘基所組成群組中的1種以上官能基。0為1〜2,ρ為〇 〜4。) 本發明的包含通式(5)所示的結構單元的聚合物是藉 由使上述聚合物與包含下述通式(13)所示的化合物的改 質劑在酸性或鹼性觸媒下縮合反應而得。 201144342 [化 18](8) (In the formula (5), X, Y, and Z are the same as above. R4 each independently represents a hydrogen atom or an alkyl group selected from a carbon number of 1 to a carbon number of 3, a decyl group, a cyclohexyl group, a tricyclodecyl group, and a diamond. One or more functional groups in the group consisting of an alkyl group, a decahydronaphthyl group, a bicyclooctyl group, and an ethanenaphthyl group. 0 is 1 to 2, and ρ is 〇~4.) The inclusion formula of the present invention (5) The polymer of the structural unit shown is obtained by condensing the above polymer with a modifying agent containing a compound represented by the following formula (13) under an acidic or basic catalyst. 201144342 [Chemistry 18]
(式(13)中,Y、Z、R4、ο、p與上述相同。) 通式(13)所示的化合物較佳為萘紛或萘紛衍生物。 萘酚衍生物或萘二醇衍生物是藉由使萘酚或萘二醇與鹵素 或醇或鹵化物在酸觸媒下進行烷基化反應而得。另外,使 用酯化物進行酯交換反應後,藉由路易斯酸觸媒等進行弗 里斯重排,而獲得介隔羰基的酮化物。 本發明中所用的烷基萘曱醛聚合物較佳為包含下述通 式(6 )所示的結構單元。 [化 19](In the formula (13), Y, Z, R4, ο, p are the same as above.) The compound represented by the formula (13) is preferably a naphthalene or naphthalene derivative. The naphthol derivative or the naphthalenediol derivative is obtained by subjecting a naphthol or a naphthalenediol to a halogenation reaction with a halogen or an alcohol or a halide under an acid catalyst. Further, after the esterification reaction is carried out using an esterified product, the ketone compound which blocks the carbonyl group is obtained by performing a Friedel rearrangement by a Lewis acid catalyst or the like. The alkylnaphthylfurfural polymer used in the present invention preferably contains a structural unit represented by the following formula (6). [Chem. 19]
(式(6)中,X、Y、Z、R3與上述相同。R5分別獨 立表示氫原子、或碳數1〜碳數3的烴基。q為1〜2,r 17 201144342 為0〜4。) 本發明的包含通式(6 )所示的結構單元的聚合物是使 上述聚合物與包含下述通式(14)所示的化合物的改質劑 在酸性或鹼性觸媒下縮合反應而得。通式(14)所示的化 合物較佳為萘紛衍生物。 [化 20](In the formula (6), X, Y, Z and R3 are the same as above. R5 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 3 carbon atoms. q is 1 to 2, and r 17 201144342 is 0 to 4. The polymer containing the structural unit represented by the formula (6) of the present invention is a condensation reaction of the above polymer with a modifying agent comprising a compound represented by the following formula (14) under acidic or basic catalyst. And got it. The compound represented by the formula (14) is preferably a naphthalene derivative. [Chem. 20]
(14) (式(14)中,Y、Z、R3、R5、q、r與上述相同。) 本發明的烷基萘曱醛聚合物較佳為包含下述通式(7) 所示的單元。 [化 21](14) In the formula (14), Y, Z, R3, R5, q, and r are the same as described above. The alkylnaphthylfurfural polymer of the present invention preferably contains the following formula (7). unit. [Chem. 21]
18 201144342 (式(7)中,X、R5與上述相同。s為0〜4。) 本發明的包含通式(7)所示的結構單元的聚合物是使 上述聚合物與包含下述通式(15)所示的化合物的改質劑 在酸性或鹼性觸媒下縮合反應而得。 [化 22]18 201144342 (In the formula (7), X and R5 are the same as above. s is 0 to 4.) The polymer of the present invention comprising the structural unit represented by the general formula (7) is such that the above polymer and the following are included The modifier of the compound represented by the formula (15) is obtained by a condensation reaction under an acidic or basic catalyst. [化22]
(式(15)中,R5、s與上述相同。) 本發明的烷基萘甲醛聚合物較佳為包含下述通式(8) 所示的單元。 [化 23](In the formula (15), R5 and s are the same as above.) The alkylnaphthalene formaldehyde polymer of the present invention preferably contains a unit represented by the following formula (8). [Chem. 23]
19 201144342 (式(8)中,X、R5、s與上述相同。) 本發明的包含通式(8)所示的結構單元的聚合物是使 上述聚合物與包含下述通式(16)所示的化合物的改質劑 在酸性或鹼性觸媒下縮合反應而得。 [化 24]19 201144342 (In the formula (8), X, R5, and s are the same as described above.) The polymer of the present invention comprising the structural unit represented by the formula (8) is such that the above polymer comprises the following formula (16) The modifier of the compound shown is obtained by condensation reaction under acidic or basic catalyst. [Chem. 24]
(式(16)中,R5、s與上述相同。) 本發明中所使用的烷基萘曱醛聚合物可在酚性羥基中 導入環氧基。具有酚性羥基的樹脂與表氣醇等含環氧基的 化合物可藉由鹼的作用而導入環氧基。 本發明中所使用的烷基萘曱醛聚合物可單獨使用,亦 可將2種以上加以混合。另外’烧基蔡曱酸·聚合物可含有 各種界面活性劑、各種交聯劑、各種酸產生劑、各種穩定 劑等。 本發明中所使用的有機溶劑若為不與水任意混和的有 機溶劑,則並無特別限定’較佳為在半導體製造製程中可 安全應用的有機溶劑。所使用的有機溶劑量相對於所使用 20 201144342 的聚二:田通常使用1重量倍〜100重量倍左右。 醚類,乙酸Ϊί劑2體例可列舉:二乙醚、二異丙醚等 3、欠正丁酯、乙酸異戊酯等酯類,甲基 2 2m 二異丁基酮、乙基異丁基酮、環己酮、環戊酮、 二:戊:等二’乙二醇單乙醚乙_、乙二醇單 乙醚乙酸r笼:7早甲醚乙酸醋(PGMEA)、丙二醇單 , ψ —醇醚乙酸酯類,正己烷、正庚烷等脂肪族 :烴類等,該等芳香族烴類,二氯甲烷、氯仿㈣ 戊酮、曱Α Λ二之肀,較佳為甲苯、2_庚酮、環己酮、環 »土異丁基酮、丙二醇單曱醚乙酸酯、乙酸乙酯等, 特佳ί環己綱、丙二醇單_乙酸睡。 混合分別可單獨使用’另外亦可將2種以上加以 ν人發明中所使用的酸性水溶液可在使通常所知的有機 =化°物、無機系化合物溶解於水中而得的水溶液中適當 冷f。例如可列舉:使鹽酸、硫酸、硝酸、磷酸等無機酸 二於水而得的水溶液,或使乙酸、丙酸、乙二酸、丙二 酉变X 丁·两允 * 一-夂、反丁烯二酸、順丁烯二酸、酒石酸、檸檬酸、 ;m巧續酸、對甲苯續酸、三氟乙酸等有機酸溶解 得的水溶液。該些酸性水溶液分別可單獨使用, 中’、可將2種以上加以組合而使用。該些酸性水溶液 ,較佳為硫酸、硝酸、及乙酸、乙二酸、酒石酸、檸檬 ^、幾j文的水洛液,更佳為硫酸、乙二酸、酒石酸、檸檬 酉文的水冷液,特佳為乙二酸的水溶液。一般認為,由於乙 21 201144342 二酸、酒石酸、檸檬酸等多元羧酸與金屬離子配位,產生 螯合效果,而可進一步去除金屬。另外,此處所用的水根 據本發明的目的’較佳為金屬含量較少的水,例如離子交 換水等。 本發明中所使用的酸性水溶液的pH值並無特別限 制,若水溶液的酸性度過大,則會對烷基萘甲醛樹脂造成 不良影響而欠佳。通常pH值範圍為〇〜5左右,更佳為pH 值為0〜3左右。 本發明中所使用的酸性水溶液的使用量並無特別限 制,若使用量過少,則必須增加用以去除金屬的萃取次數, 反之若水溶液量過多,則整體液量變多而產生操作上的問 題。水溶液的使用量通常相對於溶解於有機溶劑中的烷基 萘甲盤樹脂〉谷液,宜為10 wt% (重量百分比)〜2〇〇 wt%, 較佳為20 wt%〜100 wt%。 本發明的特徵在於:藉由使如上所述的酸性水溶液與 包含烷基萘甲醛樹脂及有機溶劑的溶液接觸而萃取金屬成 分。 。進行萃取處理時的溫度通常為2(rc〜9〇<t,較佳為 3〇°C〜80¾的範圍。萃取操作例如藉由利用攪拌等充分混 合後進行靜置而進行。II此將包含絲萘得樹脂及有機 溶劑的溶液中所含的金屬成分轉移至水相中。 —所得的混合物由於分離成包含烷基萘曱醛樹脂及有機 的冷液相與水相,因此藉由傾析等將包含垸基蔡甲搭 樹脂及有機溶綱溶液回彳卜靜置的時間並無特別限制, 22 201144342 ==過短’則包含有機溶劑的溶液相與水相的分 通常靜置的時間宜為!。分鐘以上,更佳: 數次…亦有效的是重複進行 行處=酸=液進行此種萃取處理時,較佳為,在進 仃處理後,自此水溶液進行萃取 基萘甲_脂及有機溶劑的&日收的包3坑 的液進一步進行與水的萃取處 。::利犠等充分混合後進行靜置而進 I、々編二付的浴液由於分離成包含燒基萘甲搭樹脂及有 =谷劑的减相與水相,因此藉由傾析等將包含烧基萘甲 及有機溶議溶液相回收。另外,此處所用的水根 據本發明的目的,較佳為金屬含量較少的水,例如離子交 換水等。萃取處理可僅進行1次,亦有效的是重複進行數 次混合、靜置、分離的操作。另外,萃取處理時包含炫基 蔡甲酸樹脂及有機溶劑的溶液與酸性水溶液的使用比例、 或溫度、時間等條件並無特別限制,可與和之前的酸性水 溶液的接觸處理的情況相同。 混入至如此所得的包含烷基萘f醛樹脂及有機溶劑的 溶液中的水分,可藉由實施減壓蒸留等操作而容易去除。 另外’可根據需要添加有機溶劑,將烧基萘曱駿樹脂的濃 度調整成任意濃度。 自所得的包含烷基萘曱醛樹脂及有機溶劑的溶液中僅 獲得烷基萘甲醛樹脂的方法,可藉由減壓去除或再沈澱的 23 201144342 分離、及該些方法的組合等公知的方法來進行。 實例 以下’列舉實例對本發明的實施方式進行更具體地說 明:但本發明並不限定於該些實例。以下的合成例中,藉 由 H-NMR (nuclear magnetic resonance,核磁共振)測定 來確認化合物的結構。 〈合成例〉烷基萘甲醛聚合物的合成 (二曱基萘樹脂(DMN樹脂)的合成) • DMN樹脂的合成例i 在設置了戴氏冷卻管、溫度計、攪拌翼的四口燒瓶 (2000 mL )中’在氮氣流下投入三菱瓦斯化學(Mitsubishi Gas Chemical)製造的 ι,5·二曱基萘(1,5DMN) (218 g、 1.4 mol)、三菱瓦斯化學製造的福馬林40%水溶液(42〇 g、 5.6 mol)、關東化學製造的98%硫酸(194 g),在常壓下 100°C下回流7小時。藉由乙苯稀釋後,進行中和及水洗’ 去除 >谷劑並且將1,5DMN減壓去除,而獲得淺褐色固體 (1,5DMN-R ) 250 g。GPC ( gel_permead〇n chromatography,凝膠滲透層析法)測定的結果為Mn : 550、Mw : 1130、Mw/Mn : 2.05。 (萘酚改質DMN-R的合成) •改質樹脂的合成例1 在设置了戴氏冷卻官、溫度计、授掉翼的四口燒瓶(5〇〇 mL)中,在氮氣流下添加合成例1中所得的 g)、關東化學製造的α-萘酚(71.1 g、0.49 m〇i)、對甲苯 24 201144342 石黃酸(0.36 g) ’進行4小時升溫至185°C並進行反應。進 行溶劑稀釋後,進行中和及水洗,去除溶劑並且減壓去除, 而獲得淺褐色固體(邪-1)16(^。〇?(:測定的結果為]^11: 848、Mw : 1630、Mw/Mn : 1·93,另外,羥值為 175 mgKOH/g。另外,上述NF-1是包含上述通式(1 )及通式 (5)所示結構單元的烧基萘曱酸聚合物。 — •改質樹脂的合成例2 將改質樹脂的合成例1中的α-萘酚的投入量變更為 (5〇·1 g、0.35 mol),除此以外,以與改質樹脂的合成例i 相同的方式合成,而獲得淺褐色固體(NF_2) 125g。Gpc 測疋的結果為 Μη : 871、Mw : 2174、Mw/Mn : 2.50,另 外,羥值為122mgKOH/g。 〈實例〉金屬含量降低的改質樹脂的環己酮溶液的製 造 (實例1 ) 在1000 mL容量的四口燒瓶(圓底型)中,投入將 NF-1溶解於環己_的溶液(15切%) 4〇〇 g,一邊攪拌一 邊加熱至75°C。接著,添加乙二酸水溶液(1)11值丨3)4〇〇 g ’攪拌3分鐘後,靜置丨小時^藉此分離成油相與水相, 而將水相去除1複2次此操作後,在所得的油相中投入 超純水400 g,授拌3分鐘後,靜置i小時,將水相去除。 重複3次此操作而獲得金屬含量降低的NIM環己酮溶液。 (實例2) 投入硫酸水溶液(pH值! 3) _ g代替投入實例】 25 201144342 中的乙二酸水溶液(PH偵】1、 上 P值13) 400 g ’除此以外,以相同 的方式進行處理,而獲得全思 更仔金屬含量降低的NF-1環己酮溶 製造〈實例〉金屬s量降低的改質樹脂的pgmea溶液的 (實例3 ) 在1000 mL容量的四口燒瓶(圓底型)巾投入將 ,容解於PGMEA而得的溶液(1〇桝%) _ g,一邊 f掉一邊加熱至赋。縣添加乙二酸水鎌(pH值L3) 0〇g ’麟3分鐘後,靜置卜】、時。藉此分離成油相與水 1 ’而將水相·#除。重複2次此操作後,在所得的油相中 投入超純水100 g,攪拌3分鐘後,靜置丨小時,將水相(In the formula (16), R5 and s are the same as above.) The alkylnaphthylfurfural polymer used in the present invention can introduce an epoxy group into a phenolic hydroxyl group. The epoxy group-containing compound such as a resin having a phenolic hydroxyl group and a surface alcohol can be introduced into the epoxy group by the action of a base. The alkylnaphthalene aldehyde polymer used in the present invention may be used singly or in combination of two or more kinds. Further, the alkyl phthalocyanine polymer may contain various surfactants, various crosslinking agents, various acid generators, various stabilizers, and the like. The organic solvent used in the present invention is not particularly limited as long as it is an organic solvent which is not arbitrarily mixed with water. It is preferably an organic solvent which can be safely used in a semiconductor manufacturing process. The amount of the organic solvent to be used is usually from about 1 to 100 times by weight relative to the poly 2:field used. Examples of the ethers and acetic acid oxime agents 2 include diethyl ether, diisopropyl ether, etc., esters such as n-butyl acrylate and isoamyl acetate, methyl 2 2 m diisobutyl ketone, and ethyl isobutyl ketone. , cyclohexanone, cyclopentanone, di: pentane: et al. bis-ethylene glycol monoethyl ether B, ethylene glycol monoethyl ether acetate r cage: 7 early methyl ether acetate vinegar (PGMEA), propylene glycol mono, hydrazine-alcohol ether Acetate, aliphatic such as n-hexane or n-heptane: hydrocarbons, etc., such aromatic hydrocarbons, dichloromethane, chloroform (tetra)pentanone, anthraquinone, preferably toluene, 2-heptanone , cyclohexanone, ring » soil isobutyl ketone, propylene glycol monoterpene ether acetate, ethyl acetate, etc., especially good Cyclohexyl, propylene glycol mono-acetic acid sleep. The mixture may be used alone or in combination. The acidic aqueous solution used in the invention may be suitably cooled in an aqueous solution obtained by dissolving a generally known organic compound or inorganic compound in water. . For example, an aqueous solution obtained by diluting a mineral acid such as hydrochloric acid, sulfuric acid, nitric acid or phosphoric acid with water may be used, or acetic acid, propionic acid, oxalic acid, and propylene disulfide may be changed to X butyl bis. An aqueous solution obtained by dissolving an organic acid such as enedic acid, maleic acid, tartaric acid, citric acid, m-acid acid, p-toluene acid or trifluoroacetic acid. These acidic aqueous solutions may be used singly or in combination of two or more kinds. The acidic aqueous solution is preferably sulfuric acid, nitric acid, and acetic acid, oxalic acid, tartaric acid, lemon, and several water-based liquids, more preferably water-cooled liquids of sulfuric acid, oxalic acid, tartaric acid, and lemon. Particularly preferred is an aqueous solution of oxalic acid. It is generally believed that since the polycarboxylic acid such as B 21 201144342 diacid, tartaric acid or citric acid is coordinated with a metal ion, a chelation effect is produced, and the metal can be further removed. Further, the water used herein is preferably a water having a small metal content, such as ion exchange water or the like, according to the object of the present invention. The pH of the acidic aqueous solution used in the present invention is not particularly limited, and if the acidity of the aqueous solution is too large, the alkylnaphthalene formaldehyde resin is adversely affected and is not preferable. Usually, the pH range is about 〇~5, and more preferably the pH is about 0~3. The amount of the acidic aqueous solution used in the present invention is not particularly limited. When the amount used is too small, the number of extractions for removing the metal must be increased. On the other hand, if the amount of the aqueous solution is too large, the amount of the entire liquid is increased to cause an operational problem. The amount of the aqueous solution to be used is usually 10% by weight to 2% by weight, preferably 20% by weight to 100% by weight based on the alkylnaphthalene resin in the organic solvent. The present invention is characterized in that the metal component is extracted by bringing the acidic aqueous solution as described above into contact with a solution containing an alkylnaphthalene formaldehyde resin and an organic solvent. . The temperature at the time of the extraction treatment is usually 2 (rc 〜 9 〇 < t, preferably in the range of 3 〇 ° C to 803 ⁄4. The extraction operation is carried out, for example, by thoroughly mixing by stirring or the like, followed by standing. The metal component contained in the solution containing the naphthalene resin and the organic solvent is transferred to the aqueous phase. - The resulting mixture is separated by a cold liquid phase and an aqueous phase containing an alkylnaphthalene formaldehyde resin and an organic solvent. There is no particular limitation on the time for the precipitation of the sulfhydryl-based resin and the organic solute solution. 22 201144342 == too short 'The solution phase containing the organic solvent and the aqueous phase are usually left standing. The time should be: more than minutes, more preferably: several times... it is also effective to repeat the line = acid = liquid for this extraction treatment, preferably, after the extraction process, the aqueous solution is extracted from the aqueous solution. The liquid of the package 3 pits of the amylose and the organic solvent is further subjected to the extraction with water.:: After the mixture is sufficiently mixed, the bath is allowed to stand still and I is immersed in the bath. Phase-reducing and water containing calcined naphthene and resin Therefore, the phase containing the naphthoquinone and the organic solvent solution is recovered by decantation or the like. Further, the water used herein is preferably water having a small metal content, such as ion-exchanged water, etc., according to the object of the present invention. The extraction treatment may be carried out only once, and it is also effective to repeat the operations of mixing, standing, and separating several times. In addition, the ratio of the solution containing the thioglycolic acid resin and the organic solvent to the acidic aqueous solution during the extraction treatment, or The conditions such as temperature and time are not particularly limited, and may be the same as in the case of the contact treatment with the prior acidic aqueous solution. The water mixed in the solution containing the alkylnaphthalene f-aldehyde resin and the organic solvent thus obtained may be reduced by the implementation. It is easy to remove by pressurization and other operations. In addition, an organic solvent may be added as needed to adjust the concentration of the naphthoquinone resin to an arbitrary concentration. Only the alkane is obtained from the obtained solution containing an alkylnaphthalene formaldehyde resin and an organic solvent. The method of the naphthaldehyde formaldehyde resin can be carried out by a known method such as separation of 23 201144342 by pressure reduction or reprecipitation, and a combination of these methods. EXAMPLES Hereinafter, the embodiments of the present invention will be more specifically described by way of examples. However, the present invention is not limited to the examples. In the following synthesis examples, compounds were confirmed by H-NMR (nuclear magnetic resonance) measurement. <Synthesis Example> Synthesis of alkylnaphthalene formaldehyde polymer (synthesis of dinonylnaphthalene resin (DMN resin)) • Synthesis example of DMN resin i Four ports with a Dairy cooling tube, a thermometer, and a stirring blade In a flask (2000 mL), under the nitrogen flow, ι,5·didecylnaphthalene (1,5DMN) (218 g, 1.4 mol) manufactured by Mitsubishi Gas Chemical, and Formalin 40 manufactured by Mitsubishi Gas Chemical The % aqueous solution (42 〇g, 5.6 mol) and 98% sulfuric acid (194 g) manufactured by Kanto Chemicals were refluxed at 100 ° C for 7 hours under normal pressure. After dilution with ethylbenzene, neutralization and water washing were carried out to remove > granules and 1,5DMN was removed under reduced pressure to obtain a light brown solid (1,5DMN-R) 250 g. The results of GPC (gel_permead 〇n chromatography, gel permeation chromatography) were Mn: 550, Mw: 1130, and Mw/Mn: 2.05. (Synthesis of Naphthol-modified DMN-R) • Synthesis Example 1 of Modified Resin In a four-necked flask (5 〇〇 mL) equipped with a Dairy Cooling Officer, a thermometer, and a wing-removing blade, a synthesis example was added under a nitrogen stream. g) obtained in 1 and α-naphthol (71.1 g, 0.49 m〇i) manufactured by Kanto Chemical Co., Ltd., and p-toluene 24 201144342 (1,6 g) were heated to 185 ° C for 4 hours to carry out a reaction. After the solvent was diluted, the mixture was neutralized and washed with water, the solvent was removed, and the residue was removed under reduced pressure to give a pale brown solid (e.g.) 16 (^. 〇? (: The result of the measurement was ] ^11: 848, Mw: 1630, Mw/Mn: 1.93, and a hydroxyl value of 175 mgKOH/g. Further, the above NF-1 is a naphthoquinone acid polymer containing the structural unit represented by the above formula (1) and formula (5). - Synthetic Example 2 of the modified resin: The amount of α-naphthol in the synthesis example 1 of the modified resin was changed to (5 〇·1 g, 0.35 mol), and the modified resin was used. Synthesis Example i was synthesized in the same manner to obtain 125 g of a light brown solid (NF 2 ). The results of Gpc measurement were Μ η : 871, Mw : 2174, Mw / Mn : 2.50, and the hydroxyl value was 122 mg KOH / g. Manufacture of cyclohexanone solution of modified resin with reduced metal content (Example 1) In a 1000 mL capacity four-necked flask (round bottom type), a solution in which NF-1 was dissolved in cyclohexane (15% by weight) was charged. 4〇〇g, while stirring, heated to 75 ° C. Then, add oxalic acid aqueous solution (1) 11 value 丨 3) 4 〇〇 g 'stirring for 3 minutes, then stand for 丨 hours ^ After the oil phase and the aqueous phase were separated, and the aqueous phase was removed one by two times, 400 g of ultrapure water was added to the obtained oil phase, and after mixing for 3 minutes, the mixture was allowed to stand for 1 hour to remove the aqueous phase. This operation was repeated 3 times to obtain a NIM cyclohexanone solution with a reduced metal content. (Example 2) Aqueous sulfuric acid solution (pH value! 3) _ g instead of input example] 25 A solution of oxalic acid in PH. Upper P value 13) 400 g 'In addition to this, the treatment was carried out in the same manner, and the NF-1 cyclohexanone solution having a reduced total metal content was obtained. <Example> pgmea of the modified resin having a reduced amount of metal s The solution (Example 3) was put into a four-necked flask (round bottom type) of a 1000 mL capacity, and the solution (1%%) _g obtained by dissolving the PGMEA was heated to the side while being removed. Oxalic acid hydrazine (pH L3) 0〇g ' After 3 minutes, stand still, then. Separate into oil phase and water 1 ' and remove water phase · #. Repeat 2 times after this operation , 100 g of ultrapure water was added to the obtained oil phase, and after stirring for 3 minutes, it was left to stand for a few hours to bring the water phase.
去除。重複3次此操作而獲得金屬含量降低的NF_2pGMEA 〉谷液。 (實例4) 投入檸檬酸水溶液(pH值1.3 ) 1〇〇 g代替投入實例3 中的乙二酸水溶液(pH值1 3) 1〇〇 g,除此以外,以相同 的方式進行處理,而獲得金屬含量降低的]^1?_没(^^£八溶 液。 (實例5) 投入硫酸水溶液(pH值1.3) 1〇〇 g代替投入實例3 中的乙一酸水溶液(pH值1.3 ) 100 g,除此以外,以相同 的方式進行處理’而獲得金屬含量降低 液。 26 201144342 藉由感應搞合電聚質譜儀(inductively coupled plasma mass spectrometer,ICP-MS )測定處理前的NF-1環己酮溶 液及實例1、實例2中的各種金屬含量。將測定結果示於 表1。 [表1] 金Λ i含量(ppb) Na K Cr Fe Zn 處理刖 44.7 1.5 0.6 3.2 1.9 實例1 ^0.2 $0.2 ^0.2 ^0.2 <0.2 實例2 0.8 ^0.2 0.7 ^0.2 0.5 藉由ICP-MS測定處理前的NF_2PGMEA溶液及實例 3、實例4、實例5中的各種金屬含量。將測定結果示於表 [表2]Remove. This operation was repeated 3 times to obtain a NF 2 pGMEA > trough solution having a reduced metal content. (Example 4) An aqueous solution of citric acid (pH 1.3) was placed in the same manner except that 1 〇〇g was used instead of the aqueous solution of oxalic acid (pH 13) in Example 3, except that it was treated in the same manner. Obtaining a decrease in the metal content] ^1?_没有(^^£八溶液. (Example 5) Putting an aqueous solution of sulfuric acid (pH 1.3) 1〇〇g instead of the aqueous solution of acetic acid (pH 1.3) in Example 3 100 g In addition, the treatment is performed in the same manner to obtain a metal content reducing liquid. 26 201144342 The NF-1 ring before treatment is measured by an inductively coupled plasma mass spectrometer (ICP-MS). The ketone solution and the contents of various metals in Example 1, Example 2. The results of the measurement are shown in Table 1. [Table 1] Metal Λ i content (ppb) Na K Cr Fe Zn Treatment 刖 44.7 1.5 0.6 3.2 1.9 Example 1 ^0.2 $0.2 ^0.2 ^ 0.2 < 0.2 Example 2 0.8 ^ 0.2 0.7 ^ 0.2 0.5 The NF 2 PGMEA solution before treatment and the various metal contents in Example 3, Example 4, and Example 5 were determined by ICP-MS. 2]
Na ' 金屬> &量(ppb) 處理前 杏 Α·Ι, 16.7 IV 0.4 Lr 0.3 re 2.2 Zn 1.4 貫1列J 實例4 實例5 ^0.2 ^0.2 ^0.2 <0.2 <0.2 <0.2 <0.2 <0.2 $0.2 $0.2 0.4 $0.2 ^0.2 客0.2 各0.2 [產業上之可利用性] 本發月了在工業上較為有利地製造金屬含量降低 基萘曱酸樹脂。 —雖然本發明已以較佳實施例揭露如上,然其並非用以 限疋本發明,任何熟習此技藝者,在不脫離本發明之精神 27 201144342 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 無。 【主要元件符號說明】 無0 28Na 'metal> & quantity (ppb) before treatment, apricot, 16., 16.7 IV 0.4 Lr 0.3 re 2.2 Zn 1.4 1 column J Example 4 Example 5 ^0.2 ^0.2 ^0.2 <0.2 <0.2 <0.2 <0.2 <0.2 <0.2 $0.2 $0.2 0.4 $0.2 ^0.2 Guest 0.2 Each 0.2 [Industrial Applicability] This month, it is industrially advantageous to manufacture a naphthoic acid resin with a reduced metal content. The present invention has been disclosed in the above preferred embodiments, and is not intended to limit the invention, and may be modified and modified without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. [Simple description of the diagram] None. [Main component symbol description] None 0 28
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WO2013129313A1 (en) * | 2012-02-27 | 2013-09-06 | 三菱瓦斯化学株式会社 | Acidified mono alkyl naphthalene formaldehyde resin |
JP6466650B2 (en) | 2014-04-03 | 2019-02-06 | 信越化学工業株式会社 | Method for producing resist composition |
JP6165690B2 (en) * | 2014-08-22 | 2017-07-19 | 信越化学工業株式会社 | Method for producing composition for forming organic film |
JP6445382B2 (en) | 2015-04-24 | 2018-12-26 | 信越化学工業株式会社 | Method for producing composition for forming coating film for lithography and method for forming pattern |
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US3842038A (en) * | 1972-07-24 | 1974-10-15 | Kalle Ag | Photoconductive polymeric condensation products of formaldehyde with a multi-nuclear carbocyclic aromatic compound |
JPS61223016A (en) * | 1985-03-29 | 1986-10-03 | Mitsubishi Gas Chem Co Inc | Production of polybenzyl type xylene resin |
JPH01192586A (en) * | 1988-01-29 | 1989-08-02 | Sumitomo Deyurezu Kk | Color developer for pressure-sensitive recording paper and production thereof |
JP3147182B2 (en) * | 1991-04-16 | 2001-03-19 | 大日本インキ化学工業株式会社 | Curable prepreg and molded product obtained by curing the same |
JPH07242719A (en) * | 1994-03-04 | 1995-09-19 | Mitsubishi Gas Chem Co Inc | Production of phenolic resin |
JP4224896B2 (en) * | 1999-07-05 | 2009-02-18 | 住友化学株式会社 | Dye composition containing oligomer and dyeing or printing method using the composition |
KR100687395B1 (en) * | 1999-08-31 | 2007-02-27 | 신닛테츠가가쿠 가부시키가이샤 | Aromatic Oligomer and Use Thereof |
JP2002179751A (en) * | 2000-12-18 | 2002-06-26 | Sumitomo Bakelite Co Ltd | Method for producing aromatic hydrocarbon phenolic resin |
JP4539845B2 (en) * | 2005-03-17 | 2010-09-08 | 信越化学工業株式会社 | Photoresist underlayer film forming material and pattern forming method |
JP5407306B2 (en) * | 2007-12-07 | 2014-02-05 | 三菱瓦斯化学株式会社 | Modified dimethylnaphthalene formaldehyde resin |
JP5157560B2 (en) * | 2008-03-21 | 2013-03-06 | Jsr株式会社 | Resist underlayer film forming composition and pattern forming method using the same |
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