201141591 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及電路板製作領域，尤其涉及一種能夠有效去 除泡泳之除泡裝置。 [0002] 【先前技術】 隨著科學技術進步，印刷電路板於電子領域得到廣泛應 用。關於電路板之應用請參見文獻Takahashi，^ Ooki, N. Nagai, A. Akahoshi, H. Mukoh, A. ❹ Wajima, M. Res. Lab, High density multilayer printed circuit board for HITACM-880 ， IEEE Trans, on Components， Packaging， and Manufacturing Technology， 1992， 15(4): 418_425 。 [0003] G 於電路板之生產過程中，通常採用蝕刻銅饀形成導電線 路。於蝕刻形成導電線路之前，需要先於銅箔表面形成 光致抗㈣層’㈣對光致抗_層騎曝光及顯影， 從而使付光致抗㈣丨層圖案化。進行顯影時，通常採用 顯影液如碳酸卸溶液進行顯影，顯影液與曝光過程中未 發生化學反應之級抗㈣發生反應，使得發生反應之 光致抗_從㈣表面_。於上狀顯雜與光致抗 敍劑層反應過程中，通常會產生大量之泡珠，隨著反應 持續進仃|生之轉逐漸增多，從而使㈣沫從顯影 機台中流出，影響正常顯影製程。 [0004] 先前技射’通轉用化學藥品來去除產生域珠，上 述之除泡化子藥會給環境帶來污染，並且價格昂貴， 不利於降低電路板之生產成本。 099116754 表單編號A0101 « c ^ 弟5頁/共28 ·5 貝 0992029780-0 201141591 【發明内容】 [0005] 有鑑於此，提供一種能夠有效之將泡沫去除之除泡裝置 實屬必要。 [0006] 以下將以實施例說明一種除泡裝置。 [0007] —種除泡裝置，其包括收容槽、處理槽、抽氣管、至少 一打泡裝置及碎泡裝置。所述收容槽用於收容帶有泡沫 之液體。所述處理槽與收容槽相連通，用於收容從收容 槽流入之泡沫及泡沫破碎後產生之液體。所述抽氣管與 處理槽相連通，用於從處理槽内抽氣以使得泡沬從收容 槽依次流入處理槽及抽氣管。所述至少一打泡裝置包括 驅動器、旋轉轴及至少一葉片，所述驅動器安裝於處理 槽，所述旋轉軸及至少一葉片位於處理槽内，所述旋轉 軸機械連接於驅動器，所述至少一葉片固定連接於旋轉 軸，所述驅動器用於驅動旋轉轴及至少一葉片轉動，所 述至少一葉片用於於驅動器之驅動下轉動從而打碎處理 槽内之泡沫。所述碎泡裝置安裝於抽氣管，且包括具有 多孔結構之碎泡層，所述碎泡層用於破碎從處理槽流入 抽氣管且與其接觸之泡洙。 [0008] 相較於先前技術，本技術方案提供之除泡裝置能夠有效 之去除泡沫，並且能夠根據需要去除泡沫之速率選擇不 同之除泡方式，具有很強之靈活性，並且能夠有效避免 除泡過程中浪費之能量。 【實施方式】 [0009] 下面結合附圖及複數實施例對本技術方案提供之除泡裝 置作進一步之詳細說明。 099116754 表單編號A0101 第6頁/共28頁 0992029780-0 201141591 [0010] 請一併參閱圖1至圖3，本技術方案第一實施例提供除泡 裝置100包括收容槽、處理槽12〇、泡珠流入管13〇、 打泡裝置140、抽氣管150、抽氣裝置16〇、碎泡裝置17〇 、泡沫高度檢測裝置180及控制器190。 [0011] ο 收容槽110用於收容帶有泡沫之液體，其可為用於收容顯 影、蝕刻或者剝膜後之藥水之槽體。本實施例中，收容 槽110為頂部具有開口 113之長方體形槽體，其具有底壁 ill及與垂直於並與底壁丨丨丨相連接之四侧壁112。具有 泡沫之液體從開口 113注入收容槽11〇中。於收容槽11〇 之一侧壁112靠近開口 113 4 — 開設有第一通孔114 。優選地，第一通孔114開設之位置應與收容槽no收容 之泡沫之位置相對應。即，收容槽11〇内液趙之液面高度 位於第一通孔114開設之位置之下，以僅使得泡沫可從第 一通孔114流出。 [0012] ο [0013] 收容槽110之形狀不限於本實施例中提舉芩形狀，其可根 據實際需要設計為其他適合收容液體之形狀。 處理槽120與收容槽11〇相鄰設置，並藉由泡沫流入管 130與收容槽11〇連通。處理槽丨2〇用於收容從收容槽u〇 流入之泡沫，並使得泡沫於處理槽12〇内進行消除處理， 以使得泡沫轉化為液體。本實施例中，處理槽120包括槽 體121及液體排放管122。槽體121大致為長方體形，其 包括頂板1211、底板1212、第一侧板1213、第二側板 1214、第三側板1215及第四側板1216。頂板1211與底 板1212相對，第一側板1213、第二側板1214、第三侧板 121 5及第四側板121 6連接於頂板1211及底板1212之間 099116754 表單編號Α0101 第7頁/共28頁 0992029780-0 201141591 ，第一側板1213、第二側板1214、第三側板1215及第四 側板1216依次相互連接，第一側板丨213與第三側板1215 相對。頂板1211、底板1212、第一側板1213、第二側板 1214 '第三側板121 5及第四側板121 6圍合形成收容腔 123。第一側板121 3與收容槽110開設有第一通孔114之 側壁11 2相對，第一側板1213開設有第二通孔（圖未示） 。第一通孔114及第二通孔用於安裝泡沫流入管13〇。第 二通孔與底板1212具有一定距離，即第二通孔與底板 1212具有高度差。泡沫流入管130安裝於收容槽no及處 理槽120之間，以將收容槽110内孓泡沫流入至處理槽 120内。本實施例中’泡沫流入管130連接於第一通孔 114及處理槽120之第二通孔之間，從而連通收容槽HQ 及處理槽12 0，使得收容槽11 〇内之泡沫可藉由泡沫流入 管130從第二通孔流入處理槽120。於第三側板1215上靠 近頂板1211之一侧開設有第三通孔1218，第三通孔1218 用於配合安裝抽氣管150。液體，排放管122設置於槽體 121靠近底板1212之一侧，其與收容腔123相連通，用於 將處理槽120内之由泡沐轉化之液體排出處理槽12〇。本 實施例中，於液體排放管122設置有閥門1221，用於控制 液體排放管122是否排放液體。液體排放管122可與其他 管路相連，將由泡沫轉化之液體供應至需要使用該液體 之裝置中。 [0014] 除泡裝置100亦可不包括泡沫流入管130，而將收容槽 11 0之一側壁11 2及處理槽1 2 0之第一側板1 21 3設置為一 體結構，並於侧壁11 2遠離底壁111之一端形成有長條形 099116754 表單編號A0101 第8頁/共28頁 0992029780-0 201141591 槽120 流入處理 [0015] ❹ [0016] Ο 打/包裝置140用於將處理槽12 , 内之泡沬打碎，以使泡沫 轉化為液體。本實施例中 丁/S裝置U0包括驅動器141 '鉍轉軸142及兩葉片143。 ! . 驅動15141用於驅動旋轉軸 142轉動。驅動器141可為 41 ‘、’ r專裝置。本實施例中，驅動 |§141女裝於槽體12ι外， 其女裝於頂板1211上。旋轉軸 142與驅動器141相互連接， lo1 ^ _ 丹穿過頂板1211延伸至槽體 轉轴獅直於頂板1211，其亦垂直於泡沐流 請參_，兩葉片143關於旋軸42對咖定設置於旋 轉軸142上，並可於旋轉賴2帶動下繞旋細撕在 直線轉動。兩葉片143於其轉動時與_接觸將泡泳打 碎轉化為液體。兩葉片143大致為長方形片狀。兩葉片 143與旋熟142所麵角為銳肖，優縣3()度至6〇度。 這樣，兩葉片143_時與祕具有較大之接觸面積，還 能使得打碎之泡洙產生之液體可沿著葉片143流下。並且 ，於葉片143旋轉時，葉片143可使得泡沫向下運動，以 防止泡珠向上移動。本實施例中，於長方形葉片143之一 侧邊1431形成有缺口 1432，形成之缺口 1432之大小與旋 轉軸142之外徑相配合，使得葉片143相對於底板1212傾 斜地固定與旋轉轴142後，缺口 1432剛好與旋轉轴142相 接觸。抽氣管150安裝於處理槽120並與收容腔123相互 連通。 099116754 表單編號A0101 第9頁/共28頁 0992029780-0 201141591 [οοπ]抽氣官150安裝於第三側板1215並藉由第三通孔1218與 收谷腔12 3相連通。抽氣管15 〇與泡沫流入管1 3 0位於處 理槽120之相對兩側。本實施例中’抽氣管15〇包括相互 連接之第一管151及第二管152。第一管151垂直於旋轉 抽142，第一官151固定於第三側板1215之第三通孔1218 。弟一管152自第一管151向頂板1211方向延伸，並超過 頂板1211所於之高度，第二管152之延伸方向平行於旋轉 轴 142。 [0018] 抽氣裝置160安裝於抽氣管15 〇之第二管丨5 2遠離第一管 151之一端。抽氣裝置160用於抽出抽氣管15〇及處理槽 120内之氣體，從而使得收容槽之泡沫從收容槽1 j 〇 藉由泡沫流入管130進入處理槽120中繼而進入抽氣管 1 50 中。 [0019] 為調整抽氣裝置160抽氣之速率，即調整從收容槽11〇向 處理槽120内流入之泡沫之速率，於抽氣管15〇内可安裝 調節閥。藉由調節調節閥，控制泡沫從收容槽11〇向處理 槽1 2 0流入之速率。 [0020] 碎泡裝置170安裝於抽氣管150，其於泡沫流入抽氣管 150並到達碎泡裝置170時，碎泡裝置17〇將泡沫轉化為 液體並從抽氣管150流回處理槽12〇内。本實施例中，碎 泡裝置170包括殼體171及碎泡層172。碎泡層172為採用 化學纖維製成之多孔海綿狀片狀結構，其具有耐化學藥 品腐蝕之性能。殼體171設置於第二管152中間，其具有 長方體形之收容空間173。於豎直方向，其兩端與第二管 152均相連通，收容空間173之兩端與抽氣管15〇相連通 099116754 表單編號Α0101 0992029780-0 第10頁/共28頁 201141591 Ο 。於垂直於第二管152之延伸方向，收容空間173之橫截 面積大於第二管152之橫截面積。碎泡層172收容於收容 空間173内，碎泡層172之設置方向垂直於第二管152之 延伸方向。碎泡層172之形狀與收容空間173之橫截面之 形狀相對應，使得碎泡層172與殼體171之内壁緊密接觸 。碎泡層172之形狀亦可為其他形狀Μ旦其橫截面應大於 第二管152之橫截面，以能夠防止碎泡層172於抽氣管 150内移動而無法起到碎泡作用。本實施例中，殼體171 設置有可拆卸之擋板174，以方便將碎泡層172放入收容 空間173内或者從收寥空間173内拿出〇擋板174可由透 明材料製成，以方便觀測碎泡層172進行過濾之情況。碎 泡層172之厚度為2至20釐来。當然，碎泡裝置17〇亦可 為其他結構，如多層平行設置之細目篩綱等。 [0021] Ο 本實施例提供之碎泡裝置170亦可僅包括每泡層172，碎 泡層172固定設置於抽氣管150之第二管152或第一管151 内，碎泡層172為圓片形 '其外徑等於第二管152之内徑 ，以確保所有流經第皆15 2之泡沐都經過碎泡層1 γ 2。 從而亦可實現於泡沫流入抽氣管150並到達碎泡裝置17〇 時，碎泡裝置170將泡沫轉化為液體從由抽氣管ι5〇流回 處理槽120内之作用。 [0022] 泡沫高度檢測裝置180用於檢測處理槽120内之泡沫高度 。本實施例中，泡沫高度檢測裝置180安裝於頂板1211並 延伸至收容腔123内’以檢測收容腔123内泡沫之高度。 泡沫高度檢測裝置18〇與控制器190相連接，並將檢測結 果傳送至控制器190。 099116754 表單編號Α0101 第11頁/共28頁 0992029780-0 201141591 [0023] 控制器190與泡沫高度檢測裝置180及打泡裝置14〇之驅 動器141相連接，用於根據泡沫高度檢測裝置18〇檢測之 信號’控制打泡裝置140係否進運轉以進行除泡。 [0024] 請參閱圖5 ’採用本實施例提供之除泡裝置1〇〇進行除泡 包括如下步驟： [0025] 首先，藉由泡沫於泡沫流入管13〇及處理槽12〇内流動除 /包。於抽氣裝置160及抽氣管150抽力之作用下，收容槽 110内尚度超過第一通孔114之經過泡沫流入管130從第 二通孔流入至處理槽12〇内。於重力之作用下，泡洙自第 二通孔向底板1212流動，於流動過程中，泡沫之間相互 摩擦並且與處理槽12〇之内壁及泡沫流入管13〇相互摩擦 ，從而使得一部分泡沫破碎轉化為液體。 [0026] 然後，當處理槽120内之泡沫達到打泡裝置14〇能夠接觸 之咼度時，採用打泡裝置140除泡。由於抽氣裝置及 抽氣管15 0抽力持續作用，當泡洙於也沫流入管丨3 〇及處 理槽120内流動除泡之速度小於泡沫讀入處理槽12〇之速 度時，處理槽120内之泡珠之高度本斷增加，當泡泳之高 度達到泡沫尚度檢測裝置18〇之設定高度值時該設定高 度應大於或者等於葉片i43最低處之高度。泡沫高度檢測 裝置180將信號傳遞至控制器19〇，控制器19〇控制打泡 裝置140之驅動器141啟動，驅動器〗41驅動旋轉軸142及 葉片143轉動。於葉片143轉動過程中，葉片143將與其 接觸之泡沐打碎，並且帶動周圍泡珠產生轉動，泡泳之 間相互摩擦，亦使得泡沫破碎。破碎之泡泳產生之液體 沿著葉片143流下。 099116754 表單編號A0101 第12頁/共28頁 0992029780-0 201141591 [0027] [0028] Ο [0029] Ο [0030] 最後，泡沫達到抽氣管150内之碎'泡裝置170時，採用碎 泡裝置170除泡。於啟動打泡裝置140後，泡沫仍於處理 槽120内仍持續升高時，其流入抽氣管150内，當泡沫升 高至碎泡裝置170時，向上升高之泡沫被碎泡裝置170阻 擋，並於流入枝碎泡裝置170之碎泡層172時使得泡沫破 碎轉化為液體沿著抽氣管150流回處理槽120内。 當處理槽120收容之泡沫轉化之液體之液面高度較高時， 可開啟液體排放管122之閥門1221，將所述液體從處理槽 120内排出。 於採用除泡裝置100進行除泡時，如果處理槽120之泡沫 流入速率較小時，處理槽120内之泡沫高度沒有達到泡沫 高度檢測裝置180之預定高度，只需泡沫於泡沫流入管 130、處理槽120之内壁進行流動便能實現除泡之效果， 則無須開啟打泡裝置140，從而可節省啟動打泡裝置140 而需要之電能。如果處理槽120之泡沫流入速率較大時， 啟動打泡裝置140，從而使得泡沫流動過程中破碎，並被 打泡裝置140打碎，從而可滿足較大速率之除泡需要。當 處理槽12 0之泡沫流入速率進一步增大時，泡沫流動、打 泡裝置140及碎泡裝置170同時作用，從而具有更高之除 泡效率。 本實施例提供之除泡裝置100，可根據不同之除泡速率之 需要設定不同之除泡方式，從而可於出泡速率較小時， 只需讓泡沫流動，從而可避免一直開起打泡裝置140而浪 費之能源。於泡沫速率較大時，才開啟打泡裝置140，並 且設置有碎泡裝置170，從而能夠滿足更大除泡速率之需 099116754 表單編號Α0101 第13頁/共28頁 0992029780-0 201141591 求。 [0031] [0032] 請-併參閱圖6至圖8 ’本技術方案第二實施例提供一種 除泡衣置2GG，其結構與本技術方案第—實施例提供之除 泡裝置1GG之結構相近。除泡裝置糊亦包括收容槽21〇 、處理槽220、泡床流入管23〇、打泡裝置24〇、抽氣管 250、抽氣裝置260、碎泡裝置27〇、泡珠高度檢測裝置 280及控制器（圖未示），其中，收容槽2ι()、處理槽 220、泡沫流入管230、拙氣管25〇、抽氣裝置26〇 、碎泡 裝置270、泡沐高度檢蜊裝置28〇及控制器之結構及設置 方式與第一實施例除泡裝置1〇〇之收容槽11()、處理槽 120、泡沫流入管130、抽氣管15〇、抽氣裝置16〇、碎泡 裝置170、泡床高度檢蜊裝置18〇及控制器19〇之結構及 設置方式均相同’打泡装置240亦包括驅動器241、旋轉 轴242及兩葉片243。不同之處在於，打泡裝置240之數 量為兩個’葉片243之形狀為具有一定弧度之彎曲片狀。 ： .· .·：： .. . 本實施例中’於處理槽220之頂板2211土間隔設置有兩打 泡裝置240。每個打泡裝置2#0之驅動器241安裝於頂板 2211並位於處理槽220外，每個驅動器241均與控制器相 互電連接。每個旋轉轴242貫穿頂板2211並延伸至處理槽 220内，旋轉軸242垂直於頂板2211。每個打泡裝置240 之兩葉片243關於旋轉轴242相互軸對稱之設置於旋轉轴 242上。每個葉片243為具有一定弧度之彎曲片狀’每個 葉片243均向驅動器241方向凸起。即每個葉片243具有 一個凹面2431及一個凸面2432，其中，該凹面2431遠離 驅動器241，該凸面2432靠近驅動器241 ° 099116754 表單編號A0101 第14頁/共28頁 0992029780-0 201141591 [0033] Ο 本實施例提供之除泡裝置2〇〇進行除泡採用如下方式：於 抽氣裝置260及抽氣管250抽力之作用下，收容槽21〇内 之泡洙流入管230至處理槽22〇内。於重力之作用下，泡 沫沿處理槽220流動，於流動過程中，泡沫之間相互摩擦 並且與處理槽220之内壁及泡沫流入管23〇相互摩擦，從 而使得一部分泡沫破碎轉化為液體。由於抽氣裝置26〇及 抽氣管250抽力持續作用，處理槽22〇内之泡沫之高度不 斷增加，當泡沫之高度達到泡沫高度檢測裝置28〇之設定 高度值時，泡沫高度檢測裝置28〇將信號傳遞至控制器， 控制器控制兩個打泡裝置2 4 〇之驅動器名4J啟動，驅動器 ο [0034] 241驅動旋轉軸242及葉片243轉動》於葉片243轉動過程 中，葉片243將與其接觸之泡沫打碎，並且帶動周圍泡沫 產生轉動，泡珠之間相互摩擦，亦使得泡洙破碎。破碎 之泡沐產生之液體沿著葉片243流下。於啟動打泡裝置 240後’泡沫仍於處理槽22〇内仍持續弁高時，其沿著抽 氣管250流入’當泡沫升高至過碎泡裝置270時，向上升 高之泡味被碎泡裝置270阻檔，碎泡裝置270使得泡沫破 碎轉化為液體沿著抽氣管150流回處理槽220内β 本實施例中設置有兩打泡裝置240，從而可進一步提高打 泡之效率。並且，打泡裝置240之葉片243設置為弧度之 f曲片狀，從而增加了泡沫與葉片243之接觸面積’並且 葉片243旋轉過程中，更有助於將泡沫向葉片243下方運 動’降低處理槽220内泡沫之高度。 打泡裝置240之個數並不限於本實施例中之兩個，打泡裝 置240之個數可根據需要設定為更複數。 099116754 表單編號A0101 第15頁/共28頁 0992029780-0 [0035] 201141591 [0036] 相較於先前技術，本技術方案提供之除泡裝置能夠有效 之去除泡沫，並且能夠根據需要去除泡沫之速率選擇不 同之除泡方式，具有很強之靈活性，並且能夠有效避免 除泡過程中浪費之能量。 [0037] 綜上所述，本發明確已符合發明專利之要件，遂依法提 出專利申請。惟，以上所述者僅為本發明之較佳實施方 式，自不能以此限制本案之申請專利範圍。舉凡熟悉本 案技藝之人士援依本發明之精神所作之等效修飾或變化 ，皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 [0038] 圖1係本技術方案第一實施例提供之除泡裝置之立體示意 圖。 [0039] 圖2係圖1沿I I - I I線之剖視圖。 [0040] 圖3係圖1中碎泡裝置沿I I I - I I I線之部分剖視圖。 [0041] 圖4係圖2沿I V- I V線之剖視圖。 [0042] 圖5係本技術方案第一實施例提供之除泡裝置用於除泡時 之示意圖。 [0043] 圖6係本技術方案第二實施例提供之除泡裝置之剖面示意 圖。 [0044] 圖7係本技術方案第二實施例提供之葉片之平面示意圖。 [0045] 圖8係圖7沿VIII-VIII線之剖視圖。 【主要元件符號說明】 [0046] 除泡裝置：100、200 099116754 表單編號A0101 第16頁/共28頁 0992029780-0 201141591 [0047]收容槽：110、210 [0048] 底壁：111 [0049] 側壁：112 [0050] 開口 ： 11 3 [0051] 第一通孔：114 [0052] 處理槽：120、220 [0053] 槽體：121 ❹ [0054] 頂板：1211、2211 [0055] 底板：1212、2212 [0056] 第一側板：1213 [0057] 第二侧板：1214 [0058] 第三側板：1215 [0059] ❹ 第四侧板：1216 [0060] 第三通孔：1218 [0061] 液體排放管：122 [0062] 閥門：1221 [0063] 收容腔：123 [0064] 泡沫流入管：130、230 [0065] 打泡裝置：140、240 099116754 表單編號A0101 第17頁/共28頁 0992029780-0 201141591 [0066] 驅動器：141、241 [0067] 旋轉轴：142、242 [0068] 葉片：143、243 [0069] 側邊：1431 [0070] 缺口 ： 1432 [0071] 抽氣管：150、250 [0072] 第一管：1 51 [0073] 第二管：152 [0074] 抽氣裝置：160、260 [0075] 碎泡裝置：170、270 [0076] 殼體：171 [0077] 碎泡層：172 [0078] 收容空間：173 [0079] 擋板：174 [0080] 泡沫高度檢測裝置：180、280 [0081] 控制器：190 [0082] 凹面：2431 [0083] 凸面：2432 099116754 表單編號A0101 第18頁/共28頁 0992029780-0201141591 VI. Description of the Invention: [Technical Field] The present invention relates to the field of circuit board manufacturing, and more particularly to a defoaming device capable of effectively removing bubbles. [Prior Art] With the advancement of science and technology, printed circuit boards have been widely used in the field of electronics. For the application of the circuit board, please refer to the literature Takahashi, ^ Ooki, N. Nagai, A. Akahoshi, H. Mukoh, A. ❹ Wajima, M. Res. Lab, High density multilayer printed circuit board for HITACM-880, IEEE Trans, On Components, Packaging, and Manufacturing Technology, 1992, 15(4): 418_425. [0003] G In the production process of a circuit board, a conductive copper wire is usually used to form a conductive line. Before etching to form a conductive line, it is necessary to form a photo-resistance (four) layer '(4) on the surface of the copper foil to expose and develop the photo-resistance layer, thereby patterning the photo-induced (four) germanium layer. When developing, development is usually carried out using a developing solution such as a carbonic acid unloading solution, and the developing solution reacts with a level reaction (4) which does not undergo a chemical reaction during exposure, so that the photoinduced reaction of the reaction occurs. During the reaction between the upper and the photo-induced anti-small layer, a large number of bubbles are usually produced, and as the reaction continues to increase, the growth of the raw material gradually increases, so that the (four) foam flows out of the developing machine, which affects normal development. Process. [0004] Previously, the technology was used to remove the generated domain beads, and the above-mentioned defoaming agent would pollute the environment and was expensive, which was not conducive to reducing the production cost of the circuit board. 099116754 Form No. A0101 « c ^ brother 5 pages / total 28 · 5 shells 0992029780-0 201141591 SUMMARY OF THE INVENTION [0005] In view of the above, it is necessary to provide a defoaming device capable of effectively removing foam. [0006] A defoaming device will be described below by way of examples. A defoaming device includes a receiving tank, a processing tank, an exhaust pipe, at least one foaming device, and a bubble breaking device. The receiving slot is for receiving a liquid with a foam. The processing tank communicates with the receiving groove for accommodating the foam flowing from the accommodating groove and the liquid generated after the foam is broken. The exhaust pipe is in communication with the treatment tank for pumping air from the treatment tank so that the bubble flows into the treatment tank and the suction pipe from the storage tank. The at least one foaming device comprises a driver, a rotating shaft and at least one blade, the driver is mounted on the processing tank, the rotating shaft and the at least one blade are located in the processing tank, and the rotating shaft is mechanically connected to the driver, the at least A blade is fixedly coupled to the rotating shaft, the driver is for driving the rotating shaft and the at least one blade is rotated, and the at least one blade is for rotating under the driving of the driver to break the foam in the processing tank. The blistering device is mounted to the bleed tube and includes a blister layer having a porous structure for pulverizing the blister flowing into the venting tube from the processing tank and in contact therewith. Compared with the prior art, the defoaming device provided by the technical solution can effectively remove the foam, and can select different defoaming modes according to the rate of removing the foam, has strong flexibility, and can effectively avoid the removal. Energy wasted during the bubble process. [Embodiment] The defoaming device provided by the present technical solution will be further described in detail below with reference to the accompanying drawings and the embodiments. 099116754 Form No. A0101 Page 6 / Total 28 Page 0992029780-0 201141591 [0010] Referring to FIG. 1 to FIG. 3 together, the first embodiment of the present invention provides a defoaming device 100 including a receiving groove, a processing tank 12, and a bubble. The bead inflow pipe 13A, the bubbler device 140, the exhaust pipe 150, the air suction device 16A, the bubble breaking device 17A, the bubble height detecting device 180, and the controller 190. [0011] ο The receiving groove 110 is for accommodating a liquid with a foam, which may be a tank for accommodating the syrup after development, etching or stripping. In this embodiment, the receiving groove 110 is a rectangular parallelepiped groove having an opening 113 at the top thereof, and has a bottom wall ill and four side walls 112 connected to and perpendicular to the bottom wall. The liquid having the foam is injected into the receiving groove 11 from the opening 113. One of the side walls 112 of the receiving groove 11 is adjacent to the opening 113 4 - a first through hole 114 is opened. Preferably, the first through hole 114 is opened at a position corresponding to the position of the foam contained in the receiving groove no. That is, the liquid level of the liquid in the receiving groove 11 is located below the position where the first through hole 114 is opened, so that only the foam can flow out from the first through hole 114. [0012] The shape of the receiving groove 110 is not limited to the shape of the lifting device in the embodiment, and may be designed to be other shapes suitable for accommodating liquid according to actual needs. The processing tank 120 is disposed adjacent to the receiving groove 11 and is connected to the receiving groove 11 by the foam inflow pipe 130. The treatment tank 2 is for accommodating the foam flowing in from the storage tank u, and the foam is subjected to elimination treatment in the treatment tank 12 to convert the foam into a liquid. In the present embodiment, the treatment tank 120 includes a tank body 121 and a liquid discharge pipe 122. The trough body 121 has a substantially rectangular parallelepiped shape, and includes a top plate 1211, a bottom plate 1212, a first side plate 1213, a second side plate 1214, a third side plate 1215, and a fourth side plate 1216. The top plate 1211 is opposite to the bottom plate 1212. The first side plate 1213, the second side plate 1214, the third side plate 121 5, and the fourth side plate 121 6 are connected between the top plate 1211 and the bottom plate 1212. 099116754 Form No. 1010101 Page 7 / Total 28 Page 0992029780 The first side panel 1213, the second side panel 1214, the third side panel 1215, and the fourth side panel 1216 are sequentially connected to each other, and the first side panel 213 is opposed to the third side panel 1215. The top plate 1211, the bottom plate 1212, the first side plate 1213, and the second side plate 1214', the third side plate 121 5 and the fourth side plate 121 6 are enclosed to form a receiving cavity 123. The first side plate 121 is opposite to the side wall 11 2 of the first through hole 114. The first side plate 1213 is provided with a second through hole (not shown). The first through hole 114 and the second through hole are used to mount the foam inflow pipe 13A. The second through hole has a certain distance from the bottom plate 1212, that is, the second through hole has a height difference from the bottom plate 1212. The foam inflow pipe 130 is installed between the receiving groove no and the processing tank 120 to inject the foam in the receiving groove 110 into the processing tank 120. In the present embodiment, the foam inflow pipe 130 is connected between the first through hole 114 and the second through hole of the processing tank 120 to communicate the receiving groove HQ and the processing groove 120, so that the foam in the receiving groove 11 can be used. The foam inflow pipe 130 flows into the treatment tank 120 from the second through hole. A third through hole 1218 is formed in a side of the third side plate 1215 near one of the top plates 1211, and the third through hole 1218 is used for fitting the air suction pipe 150. The liquid discharge pipe 122 is disposed on one side of the tank 121 near the bottom plate 1212, and communicates with the receiving cavity 123 for discharging the liquid converted from the bubble in the processing tank 120 to the processing tank 12A. In the present embodiment, the liquid discharge pipe 122 is provided with a valve 1221 for controlling whether or not the liquid discharge pipe 122 discharges liquid. The liquid discharge pipe 122 can be connected to other pipes to supply the liquid converted from the foam to the device in which the liquid is to be used. [0014] The defoaming device 100 may not include the foam inflow pipe 130, and the side wall 11 2 of the receiving groove 110 and the first side plate 1 21 3 of the processing tank 1 20 are disposed as a unitary structure, and the side wall 11 2 Far from the one end of the bottom wall 111 is formed with a long strip shape 099116754 Form No. A0101 Page 8 / Total 28 Page 0992029780-0 201141591 Slot 120 Inflow Process [0015] ❹ [0016] The tamping/packaging device 140 is used to process the tank 12, The bubbles inside are broken to convert the foam into a liquid. In the present embodiment, the s/S device U0 includes a driver 141' 铋 rotating shaft 142 and two blades 143. The drive 15141 is for driving the rotation of the rotary shaft 142. The driver 141 can be a 41 ',' r device. In this embodiment, the driver § 141 is worn on the top plate 1211. The rotating shaft 142 and the driver 141 are connected to each other, and the lo1 ^ _ Dan extends through the top plate 1211 to the trough rotating shaft lion straight to the top plate 1211, which is also perpendicular to the bubble flow, and the two blades 143 are fixed on the rotating shaft 42 It is disposed on the rotating shaft 142, and can be rotated in a straight line under the rotation of the rotating roller. The two blades 143 contact the _ contact to break the bubble into a liquid as it rotates. The two blades 143 are substantially rectangular in shape. The angle between the two blades 143 and the rotary 142 is sharp, and the angle of the county is 3 () to 6 degrees. Thus, the two blades 143_ have a large contact area with the secret, and the liquid generated by the broken bubbles can also flow down the blades 143. Also, as the blade 143 rotates, the blade 143 can cause the bubble to move downward to prevent the bubble from moving upward. In this embodiment, a notch 1432 is formed on one side 1431 of the rectangular blade 143. The size of the notch 1432 is matched with the outer diameter of the rotating shaft 142, so that the blade 143 is fixed to the rotating shaft 142 obliquely with respect to the bottom plate 1212. The notch 1432 is just in contact with the rotating shaft 142. The air suction pipe 150 is installed in the treatment tank 120 and communicates with the accommodation chamber 123. 099116754 Form No. A0101 Page 9 of 28 0992029780-0 201141591 [οοπ] The pumping officer 150 is mounted to the third side panel 1215 and communicates with the receiving chamber 12 3 via the third through hole 1218. The suction pipe 15 and the foam inflow pipe 130 are located on opposite sides of the treatment tank 120. In the present embodiment, the 'exhaust pipe 15' includes a first pipe 151 and a second pipe 152 which are connected to each other. The first tube 151 is perpendicular to the rotary pumping 142, and the first official 151 is fixed to the third through hole 1218 of the third side plate 1215. A tube 152 extends from the first tube 151 toward the top plate 1211 and beyond the height of the top plate 1211. The second tube 152 extends in a direction parallel to the axis of rotation 142. [0018] The air extracting device 160 is installed at one end of the second pipe 丨5 2 of the air suction pipe 15 away from the first pipe 151. The air extracting device 160 is configured to extract the gas in the air suction pipe 15 and the processing tank 120, so that the foam of the receiving groove is relayed from the receiving groove 1 j 进入 into the processing tank 120 through the foam inflow pipe 130 to enter the air exhaust pipe 150. [0019] In order to adjust the rate of pumping of the air extracting device 160, that is, to adjust the rate of foam flowing from the receiving tank 11 to the processing tank 120, a regulating valve may be installed in the air suction pipe 15A. By adjusting the regulating valve, the rate at which the foam flows from the receiving groove 11 to the processing tank 120 is controlled. [0020] The bubble breaking device 170 is installed in the air suction pipe 150, and when the foam flows into the air suction pipe 150 and reaches the foaming device 170, the foaming device 17 turns the foam into a liquid and flows from the air suction pipe 150 back into the processing tank 12 . In the present embodiment, the foaming device 170 includes a housing 171 and a bubble breaking layer 172. The foam layer 172 is a porous sponge-like sheet structure made of chemical fibers, which is resistant to chemical corrosion. The housing 171 is disposed in the middle of the second tube 152 and has a rectangular parallelepiped receiving space 173. In the vertical direction, both ends thereof are in communication with the second tube 152, and both ends of the receiving space 173 are connected to the exhaust pipe 15〇. 099116754 Form No. Α0101 0992029780-0 Page 10 of 28 201141591 Ο . The cross-sectional area of the receiving space 173 is larger than the cross-sectional area of the second tube 152 in a direction perpendicular to the extending direction of the second tube 152. The blister layer 172 is received in the accommodating space 173, and the blister layer 172 is disposed in a direction perpendicular to the extending direction of the second tube 152. The shape of the bubble layer 172 corresponds to the shape of the cross section of the housing space 173 such that the bubble layer 172 is in close contact with the inner wall of the housing 171. The shape of the bubble layer 172 may also be other shapes such that its cross section should be larger than the cross section of the second tube 152 to prevent the bubble layer 172 from moving within the evacuation tube 150 to fail to function as a foam. In this embodiment, the housing 171 is provided with a detachable baffle 174 for conveniently placing the blister layer 172 into or receiving from the accommodating space 173. The damper 174 can be made of a transparent material. It is convenient to observe the case where the bubble layer 172 is filtered. The foam layer 172 has a thickness of 2 to 20 centimeters. Of course, the bubble breaking device 17 can also be other structures, such as a multi-layered parallel mesh. [0021] The foaming device 170 provided in this embodiment may also include only the foam layer 172. The foaming layer 172 is fixedly disposed in the second tube 152 or the first tube 151 of the air exhausting tube 150, and the foaming layer 172 is round. The sheet shape 'its outer diameter is equal to the inner diameter of the second tube 152 to ensure that all of the bubbles flowing through the first portion 15 2 pass through the bubble layer 1 γ 2 . It is thus also possible that when the foam flows into the evacuation tube 150 and reaches the bubble breaking device 17, the bubble breaking device 170 converts the foam into a liquid which flows from the suction pipe ι5 into the treatment tank 120. [0022] The foam height detecting device 180 is for detecting the foam height in the processing tank 120. In this embodiment, the foam height detecting device 180 is mounted on the top plate 1211 and extends into the receiving cavity 123 to detect the height of the foam in the receiving cavity 123. The bubble height detecting means 18 is connected to the controller 190 and transmits the detection result to the controller 190. 099116754 Form No. 101 0101 Page 11 / Total 28 Page 0992029780-0 201141591 [0023] The controller 190 is connected to the foam height detecting device 180 and the driver 141 of the foaming device 14 for detecting the foam height detecting device 18 The signal 'controls the bubbler 140 to operate in order to perform defoaming. [0024] Please refer to FIG. 5 'Using the defoaming device 1 provided in this embodiment to perform defoaming includes the following steps: [0025] First, by foaming in the foam inflow pipe 13 and the treatment tank 12, the flow is removed/ package. Under the action of the pumping device 160 and the suction pipe 150, the inside of the receiving groove 110 exceeds the first through hole 114 and flows into the processing tank 12 through the foam inflow pipe 130 from the second through hole. Under the action of gravity, the bubble flows from the second through hole to the bottom plate 1212. During the flow, the foams rub against each other and rub against the inner wall of the processing tank 12 and the foam inflow pipe 13 , thereby causing a part of the foam to be broken. Converted to liquid. Then, when the foam in the treatment tank 120 reaches the temperature at which the foaming device 14 is capable of contacting, the foaming device 140 is used to defoam. Since the pumping device and the exhaust pipe continue to act, the processing tank 120 is processed when the speed at which the bubble flows into the tube 3 and the processing tank 120 is less than the speed at which the foam is processed into the processing tank 12〇. The height of the bubble inside is increased. When the height of the bubble reaches the set height value of the foam detection device 18〇, the set height should be greater than or equal to the lowest height of the blade i43. The bubble height detecting device 180 transmits a signal to the controller 19, the controller 19 controls the driver 141 of the bubbler device 140 to be activated, and the driver 41 drives the rotary shaft 142 and the blade 143 to rotate. During the rotation of the blade 143, the blade 143 breaks the bubble in contact with it, and drives the surrounding beads to rotate. The friction between the bubbles causes the foam to break. The liquid produced by the broken bubble swims down the blade 143. 099116754 Form No. A0101 Page 12 of 28 0992029780-0 201141591 [0028] [0029] Finally, when the foam reaches the broken 'bubble device 170 in the exhaust pipe 150, the bubble breaking device 170 is employed. Defoaming. After the foaming device 140 is activated, the foam continues to rise in the treatment tank 120, and it flows into the air suction pipe 150. When the foam rises to the bubble breaking device 170, the upwardly rising foam is blocked by the foaming device 170. And, when flowing into the foaming layer 172 of the branch breaking device 170, the foam is broken into liquid and flows back into the processing tank 120 along the exhaust pipe 150. When the liquid level of the foam-converted liquid contained in the treatment tank 120 is high, the valve 1221 of the liquid discharge pipe 122 can be opened to discharge the liquid from the treatment tank 120. When the defoaming device 100 is used for defoaming, if the foam inflow rate of the treatment tank 120 is small, the foam height in the treatment tank 120 does not reach the predetermined height of the foam height detecting device 180, and only foams into the foam inflow pipe 130, The effect of defoaming can be achieved by flowing the inner wall of the treatment tank 120, so that the foaming device 140 does not need to be opened, thereby saving the electric energy required to activate the foaming device 140. If the foam inflow rate of the treatment tank 120 is large, the foaming device 140 is activated to cause the foam to break during the flow and is broken by the foaming device 140, thereby satisfying the need for a large rate of defoaming. When the foam inflow rate of the treatment tank 120 is further increased, the foam flow, the bubbler device 140 and the bubble breaking device 170 act simultaneously, thereby having a higher defoaming efficiency. In the defoaming device 100 provided in this embodiment, different defoaming modes can be set according to different defoaming rates, so that when the foaming rate is small, only the foam is allowed to flow, thereby avoiding continuous blowing. The energy consumed by the device 140 is wasted. When the foam rate is large, the foaming device 140 is turned on, and the foaming device 170 is provided, so that the need for a larger defoaming rate can be met. 099116754 Form No. 1010101 Page 13 of 28 0992029780-0 201141591 [0032] Please refer to FIG. 6 to FIG. 8 'The second embodiment of the present technical solution provides a defoaming device 2GG, the structure of which is similar to the structure of the defoaming device 1GG provided by the first embodiment of the present technical solution. . The defoaming device paste also includes a receiving tank 21〇, a treatment tank 220, a bubble bed inflow tube 23〇, a bubbler device 24〇, an air suction tube 250, an air suction device 260, a bubble breaking device 27〇, a bubble height detecting device 280, and a controller (not shown), wherein the receiving groove 2i (), the processing tank 220, the foam inflow pipe 230, the xenon tube 25, the air extracting device 26, the bubble breaking device 270, the bubble height detecting device 28, and The structure and arrangement of the controller are the same as the receiving tank 11 () of the defoaming device 1 of the first embodiment, the processing tank 120, the foam inflow pipe 130, the exhaust pipe 15〇, the air suction device 16〇, the bubble breaking device 170, The structure and arrangement of the bubble bed height detecting device 18A and the controller 19' are the same. The bubbler device 240 also includes a driver 241, a rotating shaft 242, and two blades 243. The difference is that the number of the bubbler devices 240 is that the shape of the two 'blades 243 is a curved sheet having a certain curvature. : . . . . . . . . . . . In this embodiment, two foaming devices 240 are disposed at the top of the top plate 2211 of the processing tank 220. The driver 241 of each of the bubbler devices 2#0 is mounted on the top plate 2211 and outside the processing tank 220, and each of the drivers 241 is electrically connected to the controller. Each of the rotating shafts 242 extends through the top plate 2211 and into the processing tank 220, and the rotating shaft 242 is perpendicular to the top plate 2211. The two blades 243 of each of the bubbler devices 240 are disposed on the rotating shaft 242 with respect to each other with respect to the rotating shaft 242. Each of the vanes 243 is in the form of a curved sheet having a certain curvature. Each of the vanes 243 is convex toward the actuator 241. That is, each blade 243 has a concave surface 2431 and a convex surface 2432, wherein the concave surface 2431 is away from the driver 241, and the convex surface 2432 is close to the driver 241 ° 099116754 Form No. A0101 Page 14 / 28 pages 0992029780-0 201141591 [0033] Ο 本The defoaming device 2 provided in the embodiment is defoamed in such a manner that the bubble in the receiving tank 21 is inflow into the processing tank 22 by the suction of the air extracting device 260 and the exhaust pipe 250. Under the action of gravity, the foam flows along the treatment tank 220. During the flow, the foams rub against each other and rub against the inner wall of the treatment tank 220 and the foam inflow tube 23, thereby causing a part of the foam to be broken into a liquid. Due to the continuous action of the suction device 26 and the suction pipe 250, the height of the foam in the treatment tank 22 is continuously increased. When the height of the foam reaches the set height value of the foam height detecting device 28, the foam height detecting device 28 The signal is transmitted to the controller, the controller controls the two foaming devices 2 4 drive name 4J to start, the drive ο [0034] 241 drives the rotating shaft 242 and the blade 243 rotates" during the rotation of the blade 243, the blade 243 will be The contact foam breaks and drives the surrounding foam to rotate, and the beads rub against each other, which also causes the foam to break. The liquid generated by the broken foam flows down the blade 243. After the foaming device 240 is activated, when the foam still continues to be high in the treatment tank 22, it flows along the suction pipe 250. When the foam rises to the bubble breaking device 270, the upwardly rising bubble smell is broken. The foaming device 270 blocks the gear, and the foaming device 270 converts the foaming into liquid and flows back into the processing tank 220 along the exhaust pipe 150. In this embodiment, two foaming devices 240 are disposed, so that the efficiency of foaming can be further improved. Moreover, the blades 243 of the bubbler 240 are arranged in a curved shape of the arc, thereby increasing the contact area of the foam with the blades 243 and during the rotation of the blades 243, it is more helpful to move the foam below the blades 243. The height of the foam within the trough 220. The number of the bubbler devices 240 is not limited to two in the embodiment, and the number of the bubbler devices 240 can be set to a larger number as needed. 099116754 Form No. A0101 Page 15 of 28 0992029780-0 [0035] [0036] Compared to the prior art, the present invention provides a defoaming device capable of effectively removing foam and capable of removing the rate of foam as needed. Different defoaming methods have strong flexibility and can effectively avoid the energy wasted during the defoaming process. [0037] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS [0038] FIG. 1 is a perspective view of a defoaming device provided by a first embodiment of the present technical solution. 2 is a cross-sectional view taken along line I I - I I of FIG. 1. 3 is a partial cross-sectional view of the bubble device of FIG. 1 taken along line I I I I I I . 4 is a cross-sectional view along line I V- I V of FIG. 2. 5 is a schematic diagram of a defoaming device provided by the first embodiment of the present technical solution for defoaming. 6 is a schematic cross-sectional view of a defoaming device provided by a second embodiment of the present technical solution. 7 is a schematic plan view of a blade provided by a second embodiment of the present technical solution. 8 is a cross-sectional view taken along line VIII-VIII of FIG. 7. [Description of main component symbols] [0046] Defoaming device: 100, 200 099116754 Form No. A0101 Page 16 / Total 28 pages 0992029780-0 201141591 [0047] Storage tank: 110, 210 [0048] Bottom wall: 111 [0049] Side wall: 112 [0050] Opening: 11 3 [0051] First through hole: 114 [0052] Treatment tank: 120, 220 [0053] Tank: 121 ❹ [0054] Top plate: 1211, 2211 [0055] Base plate: 1212 2212 [0056] First side panel: 1213 [0057] Second side panel: 1214 [0058] Third side panel: 1215 [0059] ❹ Fourth side panel: 1216 [0060] Third through hole: 1218 [0061] Liquid Drain pipe: 122 [0062] Valve: 1221 [0063] Containment cavity: 123 [0064] Foam inflow pipe: 130, 230 [0065] Foaming device: 140, 240 099116754 Form No. A0101 Page 17 / 28 pages 0992029780- 0 201141591 [0066] Driver: 141, 241 [0067] Rotary shaft: 142, 242 [0068] Blade: 143, 243 [0069] Side: 1431 [0070] Notch: 1432 [0071] Exhaust pipe: 150, 250 [ 0072] First tube: 1 51 [0073] Second tube: 152 [0074] Air suction device: 160, 260 [0075] Bubble breaking device: 170, 270 [0076] Body: 171 [0077] Bubble layer: 172 [0078] Containment space: 173 [0079] Baffle: 174 [0080] Foam height detecting device: 180, 280 [0081] Controller: 190 [0082] Concave surface: 2431 [ 0083] Convex: 2432 099116754 Form No. A0101 Page 18 of 28 0992029780-0