201137931 〔、發明說明： 【發明所屬之技術領域】 關於-種設置於例如熔解爐或蒸絲置中熱 子槍，肋對作為電子束產生源之陰極電極進行加執的 电子搶用燈絲及其製造方法。 ”、、 【先前技術】 開電子束的電子搶’例如專利文獻κ日本特 汗 '^公報)所記載的皮爾斯型(直式)電子搶(Pierce Π 言，皮騎型電子_從錢流電流之料軌而 =、的燈絲釋出熱電子，陰極電極對燈絲施加正電壓，可藉由 二;釋出的熱電子可藉由電場來聚焦， 電場係依與陰極電極為同電位之韋乃 耳^^)電極、以及已對鱗陰蝴 加有正電壓的陽極電極而形成。 〗行电_ 所聰㈣物，細、如第1圖⑻ w舍作;f材#/輕之合金等觸叙具絲狀的金屬線 :===屬線^長度方向的中央部分 曲線狀軸圖陶3就可成形為凹凸 腳部職。轨有被固疋於用以支撐燈絲觸之構件的 在此當利用此種燈絲100作為上逑之陰極電極的加熱源時， 201137931 j電子束被釋出的_，會在上述f曲部職經常持續地供給 交流電流’以將陰極電極足以釋出熱電子程度的熱量藉由該 曲部論供給至陰極電極。因此，彎曲部卿a係持續被保 於大致2〇ΟΟΚ至3000K的高溫。如此，若對經施予彎曲加 的彎曲部施持續加熱，則會由於加熱而在殘留於彎曲部嶋 之加工畸變中發生折返力，使得燈、絲刚容易變形。不只如此， 伴隨著此種變形而使燈絲100與陰極電極接觸，或 之中心與陰極電極之中心發生偏移，使得從電子搶釋出的電0 束之輸出變得不安定。 十 因此’為了解決因上述熱變形所造成的各種問題，思 下因應之道：⑷事先使親與陰極電極_開來，即使燈 开^不會與陰極電極產生接觸；以及(b)為了抑制因上述純 線”曲以形成如先前之第1 之形狀的燈絲之後，進一步進行退火處理。 然而/述⑻之方法軸確實可避免燈絲與陰極電極之接 觸’但疋若此等之間的距離變大的話，來自燈絲之敎電 陰極電極。在此種狀況下當為了確保定量物 關以將熱電子引進陰極電極的陰極電壓時，就會使 題。安定化，並且會誘發料發生異常放電之新問 未作:2量的束射輸出而更加提高燈絲之溫度時， =於陰㈣極之加熱的麵熱能量，就會 :、陰_極、韋乃耳特電極以及陽極電極等電子搶之;= 氣束產生部内，而從此等電子槍之構成構件釋出的 乳體枕會變多，藉此也會誘發發生異常放電的新問題。 又’上述(b)之方法藉由退火處理可減輕燈絲之崎變並抑制彎 201137931 曲折返，但另-方面，由於構成燈絲的結晶粒之各個會粗大化 而使燈職化，所財在·絲絲於_讀燈絲之支擇構 =時會使燈絲破損之虞。另外，作為抑制該經脆化後的燈絲之 手段，也可考慮將經施予如上述之退火處理過的燈絲事 於可鱗縣雜的絕緣物，且紐絲與該絕緣物 高作燈絲單搞絲於上述支撐髪。細，由於此種方法* 要另㈣絕緣物，將導致維持燈絲所需的費用增加。因此，在 上述燈絲之加熱所引起的變形本身、或是依該變形 而發生的各制題之對策中，還存在有改善的空間。 J ί Α ―種電子搶用的燈絲及其製造方法，以有 效地解決先前技術中所遭遇到的上述問題。 【發明内容】 使用^子二H於提供—種可抑制搭載於電子搶之燈絲在 使用私子搶日補加熱而變形的電子搶用的燈絲及其製造方法。 法根實施例係一種製造供電子搶用之燈絲的方 材：Γ.準備由金屬材料所構成的板材之步驟；以及 攸該板材切出至少具有—個彎曲的該燈絲之線材的步驟。 :二 成=絲相較’可抑制殘_ y曰起因於加熱而發生變化，藉此可抑制燈絲變形。 201137931 兮準備該板材之步驟亦可包含··準備已疊層於 ς。材私方向之由複數個金屬板所構成的金屬疊層板之步 敕之板材的金屬材義結晶粒之集合體，且各個社曰 =，加熱而成長。當該加熱之條件高溫化 了曰曰 ^*··^〜双啊矹霄脆化。作 <已之㈤方法’係如上所述可寺慮使用複數個 層板作為燈絲之板材。相較於使用單—金屬板之情況 : 可減薄每—張金屬板的厚度。藉此，自然地可抑制金> 會進㈣粒之粗大化，瓣此板材就魏m’ •屬板之疊 ’此方法 度方向的結晶粒之粗大化，其屬板之厚 及壽命。〈租大化甚至也可提南電子搶用燈絲之強度 上述方法中，該複數個金屬板亦可分職軋形成，且 個金屬板細各金屬板之滾軋方向彼此蚊的方式疊層。" 經滾軋形成的金屬薄板中，通f其滾軋率愈高，滾乾方向與 ，、他方向的機械強度就愈不同。例如 二 仲強度等的特性，係具有在娜方向垂直之方== 與滾軋方向平行之方向最小的傾向。另—方面，延伸特性係呈 ^在與滾軋方向垂直之方向最小，且在與滾軋方向平行之方^ 最大的傾向。考慮此點，在使驗滾軋形成之複數個金屬板的 情況時’亦可以各金屬板之滚軋方向彼此蚊的方式疊層複數 個金屬板。在此方法中，各金屬板之機械特性係互補且提高疊 層板之機械強度。甚至，可提高以從此疊層板切出所得的線= 所構成的燈絲之機械強度。 上述方法中，該複數個金屬板亦可藉由不同的金屬材料而形 201137931 成 ⑻，與朋—金屬材料構成複數個金屬板的情況相 二1二1 ΐ金屬板之結晶粒超過金屬板彼此之境界面而粗大 产而相1如’可抑制各金屬板之結晶粒超過各自金屬板之厚 結Γ可將疊層板之厚度方向的結晶粒之粗大化 限疋於、.，口日日粒所屬的金屬板之厚度。 4:法二/系可在下列前提下製造燈絲:在將燈絲搭載於 二f曲係與設置於電子搶之陰極電極相對向， =電源供給來之電流而被加熱以釋出用以加熱陰極電 此情況τ ’準備金屬疊層板之步驟亦可包含：藉 =複數個金屬板之中具有最小功函數的金屬板，而形成與陰 極电極相對向的金屬板之步驟。 所明功函數，係指從某物質之表面取出—個電子 =二換句話說，欲從某物質之表面釋出—個熱電子時^ 而U物質亚將該功函數以上之錄提供給物質内之電子。 故而，功函數大之物質，為了釋出熱電子愈要純 m需要流動更大電流。考慮此點，在燈絲之婦使用二 it複數個金屬板之中’亦可為與電子搶之陰極電極相 、°的金屬板之功函數，比其他金屬板之功函數還小者。藉此 極電極的金屬板中，會以比其他金屬板還低^溫度 發生熱％子之釋出。因而，_如習知之方法將由單—材 線材予以折彎而形成的燈絲，還可使與陰極電極相對向 」，屬板之溫度降低，甚至亦可使其他金屬板之溫度降低 迠抑制燈絲朝陰極電極側變形。 201137931 上述方法中’準備該板材之步驟，亦可包含：準備 及含鶴的合金中之至少—方的金屬板而形成的板材之步V、 由於鎮是炼點最高的金屬材料，所以即使 狀也容易保持安定。又，由於鶴具有較大的電二 成 =於，_發熱量也會變大。也就是說，鶴適合作為被要= .、，、之文疋性、及多量之發熱的構件之形成材料。冑考慮此點’， 燈絲之板材較妓由献•之合金之中的至少」金屬板形 板與鎢金屬板所====包含：準備由钽金屬 钽係以比鎮還低之溫度釋出熱電子。因而 材料之線㈣嫌細 出線材而形成峨、，還可抑軸椒溫度^。^切 可抑制因域造祕L彡，並且也觀紐狀平均壽命。 =方^，從該婦㈣該電子_麟之線材的步驟， 仏包m線放電加w從該板材切出該線材之步驟。 所^放#工’-般係指利用作為工極之金屬線盘被 加工體之_放電以去除被加卫體之 力工 _度影_予加工二：：= 之形狀，，若對從_ ^刀出作紐職放杨工，财獻觸之軸材料的選 擇見度，亚且可提高該燈絲形狀之精密度。 根據本發明之第二實施例係 一種供電子搶用的燈絲。該燈絲 201137931 =由金屬材料而形成’且具備至少具有一個料之線材 該線材具有矩形的剖面。 而 絲依=二f屬細曲加工而形成的習知燈 殘留於燈金屬線的習知燈絲相較，還可抑制 使燈絲被加執，也工畸變。因而’在使用電子搶時印 即t制在料巧曲部發錢返之情形。亦 形p。号曲之秘會_於加料發生·，藉此可抑制燈絲變 柘=絲中，該線材亦可使用包含複數個金屬板之金屬疊芦 Ϊ屬S ;該構成與使用單—金屬板的情況她，可減薄每- 藉此’可自舰抑制金屬板之厚度方向的結晶 ' 甚至也可提高電子搶膽絲之強度及壽命。 成上’5亥複數個金屬板亦可藉由不同的金屬材料而形 可抑制各金屬板之結晶粒，超過各自金屬板之 結果，可將疊層板之厚度方向的結晶粒之粗大 化，限疋於該結晶粒所屬的金屬板之厚度。 ϋ燈絲中，該金屬疊層板，亦可為组金屬板與鶴金屬板之 铺成中，比起藉由將單—材料之線材予以折彎而形 祕或猎由從單—鶴板切出線材而形成的燈絲，還可抑 身的溫度上升。因而，可抑制因加熱所造成的燈絲之 交形，並且也可延長燈絲之平均壽命。 ^燈絲中，亦可以複數個金屬板之中具有最小功函數的金 子搶之陰極電極相對向而配置的方式形成該燈絲。 該構成中，在複數個金屬板之中接近於陰極電極的金屬板中， 201137931 係以，其他麵板還低的溫度發线電子之釋丨。m而 將由單-材料所構成的線材予以折彎形成的習知燈絲 與陰極電極姆向的金屬板之溫餅低。甚至，由於也 他金屬板之溫度降低，朗可抑條絲她極電鋪變形。，、 以下的發明詳述及所附 關於本發明之優點與精神可以藉由 圖式件到進一步的瞭解。 【實施方式】 以了、’係參照第2圖及第3圖制將本發明之電子搶用燈絲 1之製造方法具體化後的一實施例。 ’、 第2圖係顯報本實施例之製造方法崎 7立賴造。如睛示，電子翻燈絲丨係由 ，四個_成之料高魅金屬所構成之具矩形的剖面的線 4。該電子搶用燈絲1係具有由在虛擬平面Pi上連續三個部位 而得之彎曲lc所構成之具凹凸曲線狀的彎曲部la，該虛擬平面 朽係包含有構成上述外周面之一個面(陰極對向面ls)。在 連繫上述三個部位之彎曲le的方向之兩端部，係折 邮 > 成有朝陰極對向面15之法線方向延伸之具直線狀的一對腳 = ib。換句話說，作為具矩形的勤之線材的電子搶用燈絲i， 年以沿者構成該外周面之四個面中之任—面的方謂曲 構成不具有順沿燈絲1之周方向的扭曲。 曰 第3圖係顯示此種電子搶用燈絲J之製造步驟。如第3 2 ’在製造上述電子搶用燈絲！時’首先準備作為該線材之 構成材料之例如由鎮所構成的金屬板P。另外，本實施例中之 201137931 =P:===面_平* _為加工 進3圖_示，由周知的線放電加工裝置聰 之加工。更砰…在以與金屬板ρ之加工面ps 父的方式而配置之由鶴等所構成的工具線電極獨盘作為 =工體^金屬板P，從加工電源爬施加有例如_至驗 的電壓。然後，此亦藉由周知的Nc (數值控制：咖 置細-邊㈣金屬板p德置，—翁照上述陰 面7上之三铸位的㈣le之形狀、㈣電子搶用燈 朝中的=部la之二次元之具凹凸曲線的形狀，使金屬板p 下、或是左右移動。順便-提，此時的金屬板p之移動速 ，(即所謂的加工進給速度）’—般為每！分鐘進給5_左右。 猎此，當工具線電極獅與金屬板p之距離變成數十_左右 夺在此等之期間會發生火花放電。此日夺，工具線電極聰1及 金屬板P之溫度會被加熱至數千度，而金屬板p之—部分會溶 解，、並且該被溶解後的金屬，t因以冷卻金屬板P以及去ς加 工粉為目的而供給的加工液之體積膨脹而從金屬板ρ上飛散。 另外，作為加工液，可使用水或煤油(kerosine)等之絕緣液。又， 工具線電極WE1，係為了避免因此種之加_引起·解或破 斷而藉由未圖示之線供給機構及線捲繞機構進行其供給以及捲 繞。如此藉由熔解金屬飛散，即可在金屬板ρ形成有加工槽。 又，一邊藉由上述NC裝置WE3進行金屬板P之位置控制，一 邊反覆進行如此加工槽之形成步驟，藉此可以包含彎曲部la在 内之形式切出用以形成電子槍用燈絲1的線材P1。201137931 [Invention: [Technical Field] The present invention relates to an electron gun that is disposed in, for example, a melting furnace or a steaming rod, and a rib to an anode electrode that is an electron beam generating source Production method. ",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The filament of the rail and the filament emits hot electrons, and the cathode electrode applies a positive voltage to the filament, which can be obtained by two; the released hot electrons can be focused by an electric field, and the electric field is based on the same potential as the cathode electrode. The ear ^^) electrode, and the anode electrode that has been positively applied to the scales and sorrows. 〗 〖Electric _ Satong (four), fine, as shown in Figure 1 (8) w She made; f material # / light alloy, etc. Touching the wire with a wire: === genus ^ The central part of the length direction of the curved axis can be formed into a concave and convex foot. The rail is fixed to the member for supporting the filament touch. When using the filament 100 as the heating source of the cathode electrode of the upper crucible, the electron beam released by the 201137931 j will continuously supply the alternating current 'in the above-mentioned f-curve position to sufficiently discharge the cathode electrode. The heat of the electron level is supplied to the cathode electrode by the curvature. Therefore, the bending portion is a It is continuously maintained at a high temperature of approximately 2 〇ΟΟΚ to 3000 K. Thus, if the bending portion to which the bending is applied is continuously heated, the retracting force occurs in the processing distortion remaining in the bending portion due to heating, so that the lamp The wire is easily deformed. Not only that, the filament 100 is brought into contact with the cathode electrode along with such deformation, or the center is offset from the center of the cathode electrode, so that the output of the electron beam released from the electron is not obtained. Tenth. Therefore, in order to solve the various problems caused by the above thermal deformation, think about the following: (4) Before the affinity electrode and cathode electrode are opened, even if the lamp is turned on, it will not make contact with the cathode electrode; and (b) In order to suppress the formation of the filament of the first shape as described above by the above-mentioned pure line, the annealing treatment is further performed. However, the method axis of (8) does avoid contact between the filament and the cathode electrode, but if the distance between these becomes large, the electric cathode electrode from the filament is obtained. In such a situation, it is a problem when it is necessary to ensure that the quantitative electrons are introduced into the cathode voltage of the cathode electrode. It is stable, and it will induce a new problem of abnormal discharge of the material. When the amount of the beam is increased and the temperature of the filament is increased, the surface heating energy of the cathode (four) pole will be: The electrons such as the Vernett electrode and the anode electrode are grabbed; = in the gas beam generating portion, and the number of breast pillows released from the components of the electron gun is increased, thereby causing a new problem of abnormal discharge. Further, the method of the above (b) can reduce the variation of the filament by the annealing treatment and suppress the bending of the bend 201137931, but on the other hand, since the crystal grains constituting the filament are coarsened, the lamp is used for the purpose of the lamp. ·When the silk is selected in the _ reading filament, the filament will be damaged. Further, as means for suppressing the embrittled filament, it is also conceivable that the filament which has been subjected to the annealing treatment as described above is treated as an insulator of the scale, and the filament and the insulator are made high as a filament. I’m screwing up on the above support. Fine, as this method* requires another (four) insulation, it will result in an increase in the cost of maintaining the filament. Therefore, there is still room for improvement in the deformation itself caused by the heating of the filament or the countermeasures for each of the problems caused by the deformation. J ί ― An electronic grabbing filament and its manufacturing method to effectively solve the above problems encountered in the prior art. SUMMARY OF THE INVENTION It is possible to suppress an electronically accommodating filament which is deformed by using a sneak squirting heat by using a squirrel, and a method of manufacturing the same. The Fagan embodiment is a material for manufacturing a filament for electronic grabbing: a step of preparing a sheet composed of a metal material; and a step of cutting the sheet with at least one bent wire of the filament. : The ratio of the second phase = the wire phase can be suppressed from being changed by heating, whereby the deformation of the filament can be suppressed. 201137931 步骤The steps of preparing the plate may also include preparations that have been laminated to ς. In the private direction of the material, the metal laminated plate composed of a plurality of metal plates is a combination of the metal materials and the crystal grains of the plate, and each body is heated to grow. When the heating condition is elevated, 曰曰 ^*··^~ double 矹霄 is embrittled. For example, as described above, a plurality of laminates can be used as the sheet of the filament. Compared to the case of using a single-metal plate: the thickness of each metal plate can be reduced. Thereby, it is naturally possible to suppress the coarsening of the gold > (4) grain, and the plate of the plate is a stack of the surface of the plate. The coarseness of the crystal grain in the direction of the method is the thickness and life of the plate. <The renting can even increase the strength of the filaments used by the South Electronics. In the above method, the plurality of metal sheets can also be formed by rolling, and the rolling directions of the metal sheets are laminated in a mosquito pattern. " In the thin metal sheet formed by rolling, the higher the rolling rate, the direction of the drying, and the mechanical strength of the direction. For example, the characteristics such as the secondary strength are such that the direction perpendicular to the direction of the nanometer == is the smallest in the direction parallel to the rolling direction. On the other hand, the elongation characteristic is the smallest in the direction perpendicular to the rolling direction and the largest in the direction parallel to the rolling direction. In consideration of this, in the case of a plurality of metal plates formed by rolling, it is also possible to laminate a plurality of metal plates in such a manner that the rolling directions of the respective metal plates are mutually mosquitoes. In this method, the mechanical properties of the metal sheets are complementary and the mechanical strength of the laminated sheets is increased. Further, it is possible to increase the mechanical strength of the filament formed by the line obtained by cutting out from the laminated sheet. In the above method, the plurality of metal plates may be formed by different metal materials, such as 201137931 (8), and the plurality of metal plates are formed by the metal-materials of the friends. The crystal grains of the metal plates exceed the metal plates. The interface is coarse and large, and the phase 1 such as 'can inhibit the crystal grains of each metal plate from exceeding the thickness of the respective metal plate, and the coarseness of the crystal grains in the thickness direction of the laminated plate can be limited to The thickness of the metal plate to which the grain belongs. 4: Method 2 / system can manufacture the filament under the following premise: the filament is mounted on the second f-curve and is opposite to the cathode electrode disposed on the electron grab, = the current supplied by the power source is heated to release the cathode for heating In this case, the step of preparing the metal laminated plate may include the step of forming a metal plate having a minimum work function among the plurality of metal plates to form a metal plate opposed to the cathode electrode. The function of the work means taking out from the surface of a substance - an electron = two, in other words, to release from a surface of a substance - a hot electron ^ and the substance U is to provide the substance above the work function to the substance The electronics inside. Therefore, the material with a large work function needs to flow more current in order to release the hot electrons. In consideration of this, in the case where the filament is used by the filament of the plurality of metal plates, the work function of the metal plate of the cathode electrode of the electron is also smaller than that of the other metal plates. In the metal plate of the electrode of the electrode, the heat is released at a lower temperature than the other metal plates. Therefore, as in the conventional method, the filament formed by bending the single-material wire can also be made to face the cathode electrode, the temperature of the plate is lowered, and even the temperature of the other metal plates can be lowered to suppress the filament toward The cathode electrode side is deformed. 201137931 The method of preparing the sheet in the above method may also include: step V of preparing a sheet formed of at least one of the alloys of the alloy containing the crane, and since the town is the metal material having the highest refining point, even if it is It is also easy to maintain stability. Also, since the crane has a large electric power = y, the _ heat is also increased. That is to say, the crane is suitable as a material for forming a member that is required to be =.,,,, and a large amount of heat.胄 Consider this point, the plate of the filament is at least the metal plate and the tungsten metal plate of the alloy. ==== Including: Prepare the temperature of the metal to be lower than the temperature of the town. Hot electrons. Therefore, the material line (4) is too thin to form a wire, and can also suppress the temperature of the pepper. ^Cut can inhibit the domain of the secret L彡, and also the average life expectancy. = square ^, from the woman (four) the step of the electronic _ Linzhi wire, the step of the m-line discharge plus w from the plate to cut out the wire. The method of "putting the work" is to use the _discharge of the processed body of the metal coil as the working pole to remove the force of the reinforced body _ degree shadow _ the shape of the processing two::=, if the _ ^ Knife out for the New York Yang Yanggong, the choice of the material of the financial touch shaft, and can improve the precision of the filament shape. According to a second embodiment of the present invention, a filament for electronic robbing is used. The filament 201137931 = formed of a metal material and having a wire having at least one material. The wire has a rectangular cross section. However, the conventional lamp formed by the wire processing according to the second f is a conventional filament which remains on the metal wire of the lamp, and can suppress the filament from being added and distorted. Therefore, when using the electronic grab, the t system is used to send money back. Also shaped p. The secret of the chord _ occurs in the feeding, so that the filament can be suppressed from changing to 丝 = in the wire, the wire can also be used with a metal plate comprising a plurality of metal plates; the composition and the use of a single metal plate She can thin each - so that 'the crystallization of the thickness of the metal plate can be suppressed from the ship', and even increase the strength and life of the electrons. The plurality of metal plates of the '5-thickness can be formed by different metal materials, and the crystal grains of the metal plates can be suppressed. As a result of exceeding the respective metal plates, the crystal grains in the thickness direction of the laminated plate can be coarsened. It is limited to the thickness of the metal plate to which the crystal grain belongs. In the ϋ filament, the metal laminated plate can also be laid in the group metal plate and the crane metal plate, compared to the wire by bending the single-material wire to form a secret or hunting from the single-crane plate. The filament formed by the wire can also suppress the temperature rise. Therefore, the cross shape of the filament due to heating can be suppressed, and the average life of the filament can be extended. In the filament, the filament may be formed in such a manner that the metal electrode having the smallest work function among the plurality of metal plates is disposed opposite to each other. In this configuration, among the metal plates close to the cathode electrode among the plurality of metal plates, 201137931 is used, and other panels are also low in temperature emission electrons. The conventional filament formed by bending a wire composed of a single material is lower than the temperature cake of the metal plate of the cathode electrode. Even, because of the lower temperature of his metal plate, Langke suppressed the wire and her pole was deformed. DETAILED DESCRIPTION OF THE INVENTION The advantages and spirit of the invention will become apparent from the drawings. [Embodiment] An embodiment in which the manufacturing method of the electronic snare filament 1 of the present invention is embodied by referring to Figs. 2 and 3 is described. 'Fig. 2 shows the manufacturing method of this embodiment. As the eyesight shows, the electronic turn-on filament is made up of four rectangular lines with a high-profile metal. The electronic companion filament 1 has a concave-convex curved portion 1a composed of a curved lc obtained by three consecutive portions on the imaginary plane Pi, and the imaginary plane includes one surface constituting the outer peripheral surface ( Cathode opposite face ls). At both ends of the direction in which the bending of the three portions is connected, the folding > is formed with a pair of straight legs ib extending in the normal direction of the cathode opposing surface 15. In other words, as the electronic splicing filament i having a rectangular wire, the yoke of any of the four faces constituting the outer peripheral surface of the outer peripheral surface does not have the circumferential direction of the filament 1 distortion.曰 Fig. 3 shows the manufacturing steps of this electronic grabbing filament J. Such as the 3 2 ' in the manufacture of the above electronic grabbing filament! At that time, a metal plate P composed of, for example, a town is prepared as a constituent material of the wire. Further, in the present embodiment, 201137931 = P: = = = face _ flat * _ is processed into 3, which is processed by a well-known wire electric discharge machining device. Further, the tool wire electrode formed of a crane or the like arranged in a manner similar to the processing surface ps of the metal plate ρ is used as the =work body metal plate P, and is applied from the machining power source, for example, to the test. Voltage. Then, this is also known by the Nc (numerical control: coffee set fine-edge (four) metal plate p de, - Weng Zhao said the shape of the (four) le of the three castings on the shady surface 7, (four) electronic grab lights toward the middle = The shape of the concave-convex curve of the second element of the part la causes the metal plate p to move down or left and right. By the way, the moving speed of the metal plate p at this time (the so-called machining feed speed) is generally Each minute is fed about 5_. Hunting this, when the distance between the tool wire electrode lion and the metal plate p becomes dozens _ around the spark will occur during this period. This day, the tool line electrode Cong 1 and metal The temperature of the sheet P is heated to several thousand degrees, and the portion of the metal sheet p is dissolved, and the dissolved metal, t is supplied by the purpose of cooling the metal sheet P and removing the processed powder. The volume is expanded to scatter from the metal plate ρ. In addition, as the working fluid, an insulating liquid such as water or kerosine can be used. Further, the tool wire electrode WE1 is used to avoid the increase or decrease. Broken and supplied by a wire supply mechanism and a wire winding mechanism (not shown) And winding, so that the molten metal can be scattered to form a processing groove in the metal plate ρ. Further, while the position control of the metal plate P is performed by the NC device WE3, the forming step of the processing groove is repeated. This may include the bent portion 1a to cut out the wire P1 for forming the filament 1 for the electron gun.
如此’在切出線材P1時，若使用依上述線放電加工裝置WE 201137931 而進行之線放電加工，則由於〇 當作該電子搶用燈絲i來加工了戶要是導體就不限於其硬度而可 形成材料的選擇寬度。又，由於=可擴大電子搶㈣絲1之 具備的NC裝置we3，對應早^猎由線放電加工裝置WE所 密度佳地進行金屬板p钱7燈絲1之二技形狀而精 之形狀的精密度。 " |，故可提高電子搶用燈絲1 如此藉由線放電加工裝置觀 圖㈤所示，在長度方向之中心^ ，係如第3 加工面叫陰極對向面ls)之剖面成父形成垂直於 ;所示’上述線材P1之長度方向的兩端部力= PS(陰極對細1牧雜方向騎，柯製造電； ί力力而折彎―部_形翁触的形材用= «包_部13在内的形式從金屬 ^。猎此，此種電子搶用燈絲i之製造方法可抑制其所製造 出的電子搶用燈絲i之彎曲部la因加工所引起的畸變，且 制因電子搶用燈絲i搭載於電子搶時之加熱所引起的該電子搶 用燈絲1(尤其是其彎曲部la)之變形。 、另外，如此藉由線放電加工而切出所得的燈絲丨中，如上所 述，垂直於包含其彎曲部la在内的陰極對向面ls之剖面的形 狀為矩形。此外，在構成電子搶用燈絲1之外周面的—對相對 向之面、具體而言垂直於包含彎曲部la在内之陰極對向面Is 的一對面，係形成有因線放電加工所造成的加工痕。該加工痕 係以每一預定間隔而形成有與線放電加工時之上述工具線電極 12 201137931 WE1的行進方向、即電 直的條狀之痕(所謂的m =’、之線材P1之長度方向垂 下事Γ，電子搶用燈絲1係可藉由如 ⑽，即·之剖成的燈絲 預定間隔形成有條痕。 在上述—對面以每- 其次’參照第4圖說明搭載上述 所謂的皮爾斯型電子搶1。。第4圖係顯示例置 =型略— 的電子槍用^流之料熱而發熱以軸熱電子 射方向D)，係依序配置有 集器一丨Ie_8搶嶋1之鄰邊，係配置有離子收 相==之彎曲部1a與陰極電極2係在照射方向D以 1也心4 2己如第4圖之一點鏈線所示，電子搶用燈絲 ^極祕2之各自的中心係配設在她射方向D延伸之光 昭射方職光軸A之陰極電極2的周圍。 電極4羊乃耳特電極3之鄰邊係配置有圓_狀的陽極 且陽極電極4具有與上述陰極電極2之一個面(垂直於 5相連對向的貫通孔°極電極4係與流量調節器 方向“即裔5係具有與陽極電極4之貫通孔朝照射 極電接ί，之貝通孔。在流量調節器5之外周，係從接近於陽 始 之位置起依序设置有聚焦線圈6與擺動線圈7。聚焦 、圈6及獅_ 7之各個係具有如下雜：產生磁場，贱 201137931 通過陽極電極4的電子束EB取 料3^、或是使其在;_^3^_本财為蒸鍍材 另外，此等電子搶用燈絲卜各 7以及離子收集器8係搭載於 2至4、各種線圈6、 開口係設置作為電子束EB之日::扣的框體9内。框體9之 及流量調節器5之各貫通於上述陽極侧 凸緣9a，凸緣9“系固定在 口周圍設置有 蒸鍍材料31之墓铲馮電子束£8之照射對象的 搶的框體室3〇係透過凸緣9績構成電子 上述電子搶用燈絲}係連接有仏六 1的燈絲電源21，而陰極電極2及韋電子搶用燈絲 加直流電壓的陰極電源22。陽連===有施 的加速電源23。陰極電極2、韋電加直流糕 以電子搶用燈絲i之電位成為最低'且陽極=極ξ極4係 最高的方戎，;" 電極4之電位成為 麗。Λ把加有來自陰極電源22及加速電源23之輸入電 =，皮爾斯型電子搶1G中，錢供給來自 至電子搶用燈絲丨，電子搶燈絲丨被加熱至細= 絲釋出熱電子。然後，藉由陰極電源22對電子搶用燈 妖雷^It正電位的陰極電極2 ’可依來自電子搶絲1之 紐/而ΐΐ射而被加熱，藉此同樣會釋出熱電子。藉由陰極 乃耳牲2的鱗子，係—邊依無極雜2為同電位的韋 、電極3、及對此等陰極電極2與韋乃耳特電極3施加有 ^的陽極電極4之間的電位差而被加速，一邊沿著上述光 Α飛行。然後，通過陽極電極4之貫通孔及與此貫通孔連結 14 201137931 =量調節器5之熱電子係從框體9之開口朝向蒸鍵室3 作為電子束ΕΒ。 —此時’當從陰極電極2釋出的熱電子之—部分在框體9内及 =鑛室_錢氣體縣時，該料氣體就會被陽離子化。 該Τ子係藉由上述陰極電極2與陽極電極4之間的電壓而被 加速。當該加速後的陽離子撞擊陰極電極2時，就會起因於此 而在陰極電極2形成有孔洞。因而，此種陽離子若長時間釋出 的話’則孔洞就會變大而可能在陰極電極2形成貫通孔。考慮 此種狀況，鄰接於陰極電極2並將上述離子收集器8配置抑 射方向D之相反方向Q即使在陰極電極2形成有貫通孔的纽 構成透過陰極電極2之貫通孔而朝電子搶用燈絲！釋出 ^離子，亦_子束也可藉由離子收鞋8而魏。因而 抑制因離子束而對電子搶1G所造成的損傷。 在此，本實施例的電子搶用燈絲i係如上所述，盘習 腦(參照第！ _較由於加工畸變較少，所以；^⑴ =制:熱變形。換句話說，在對電子搶用燈絲丨供^ 電电子搶用燈絲1會朝陰極電極2側位移而能比習知产 獲得抑制。因而，可驗電子搶用燈絲1與陰極電^ 2之麟(以下，稱為F_c轉）。故而，在獲得與習知 子束EB之輸出方面’只要％距離獲得縮短 緩♦ 子槍用燈絲1之加熱條件。因而，不僅加工畸變較 =緩=熱條件，故也可更妨地抑制電子搶用燈絲】之妖 枝/ —，電子搶用燈絲1與陰極電極2之F-C距離可更雒 中於St，並且可將電子搶用燈絲1之中心與陰極電極2之 虽維持於初期的位置。結果，可提高從電子搶10釋出 201137931 的電子束EB之輪出的安定性。 例i鋼輸日月本發明電子搶紐絲1之實麵1及製造 放免Γρ’且辭使用上述線 彎曲部嫩嫩切出包含上述 長度方_端二:=== :::電子搶用燈絲卜又，對直徑為〇.5-之=Γ; 曲邻/祕辭折f ^，11此麟林對應上述彎 職與聰上述卿lb之卿祕的比較 然後以下賴射條件鶴搭财實施例丨之電子搶用 =電子搶10與搭載有比較例之燈絲刚的電子搶，且計 實施例1之電子搶用燈絲！朝陰極電極2側的變形量、以及’卜 較例之燈絲1GG朝陰極電極2側的變形量。另外 電子搶10，除了燈絲不同以外，其餘為同一構成。；、 •電子束之輸出：17kW •加速電壓：20kV •陰極電壓：1.2kV • F-C 距離：4.2nun 另外作為控制來自電子槍10的電子束EB之輸出的方法 人周知者是所謂的燈絲控制以及陰極控制。此等控制方j為 所謂燈絲控制，係指將施加於燈絲1與陰極電極 、， 2 Z <間的電壓 16 201137931 即癌電屢設為—定，且藉由調整輸入於燈絲1之功率而控制 電子束EB之輪出的方法。另一方面，所謂陰極控制，係p 輸入於燈絲1之功率設為—定，調整上述陰極電壓的方法。以 iη ”貞了此等—健制方法巾主要藉由燈絲控制來驅動各電 子搶10而獲得的結果。 合电 經測定上述之變形量的結果，可確認實施例1之電子搶用卢 絲1之朝陰極電極2側的變形量比起比較例之燈絲⑽朝陰: 電極2側的飾量還要小16咖。換句話說，可確認^比 ::，」00的情況時，-距離之最小值需要4.2_: ' 错由使用實施例1之電子搶用燈絲卜F-C距離之最f 值可縮短至2.6mm。 離之取小 接著’計測從搭載有實施例！之電子搶用燈 ==電子束輸出之照射條件依存性。第5圖魏電二子 子搶下述照射條件下所照射的電子束輸出與對電 子搶用燈41之輸人功率的關係之示意圖。又第6 _ 齡在下賴射條件下賴射的電子束輸 r= Γ之輸入功率的關係之示意圖。然後，第7圖 壓而顯示在將F-C距離設為2·6_時之電 :束:!與對電子搶用燈絲1之輪入功率的關係之示意圖。另 對陰極電極2之輸人功率，係指 動於燈絲1與陰極電極2之間之電流的乘積。 ^ 為黑圈顯示將F-C距離設 仟U 3方面以黑四角顯示將％距離設 -二=果。又第7圖係分別以黑菱形顯示將陰極電壓 ❼.一的結果’然後以黑_示將陰極電壓設為 17 201137931 而得的結果’進而以黑三角顯示將陰極電壓設為14kv而得的 結果0 •電子束之最大輸出：30kW •加速電壓：20kV •陰極電壓：1.2kV • F-C 距離：2.6mm、4.2mm 順便一提，設定作為F-C距離的2.6mm與4.2mm之中， 4.2mm’係在使用以A面之第丨圖所示的習知製造方法而製造 出的比較例之燈絲日夺，為可設定作為F_c距離之最小值。 相對於此，2.6mm，係在賴以前面之第3圖卿的本實施例 之製造方法而製造出的實關之電子搶贿絲〗時，為可設定 作為上述F-C距離之最小值。在此，可將以本實施例之製造方 法而製造出的燈絲丨，與陰極電極2之距離設定得更短的理由， 係如上所述。 如第5圖所示，若電子束EB之輸出為㈣，當上述％货 “為2.6mm 對燈絲丨之輸人功率大約為83娜，相對於此When the wire rod P1 is cut out, if the wire electric discharge machining is performed by the above-described wire electric discharge machining device WE 201137931, since the electric wire is processed as the electron preempting filament i, the conductor is not limited to the hardness. The selected width of the material is formed. In addition, the NC device we3 which is equipped with the electronic robbing (4) wire 1 can be used to perform the precision of the shape of the metal plate p 7 filament 1 in accordance with the density of the wire electric discharge machining device WE. degree. " |, so it can improve the electronic grabbing filament 1 as shown by the line discharge machining device (5), in the center of the length direction ^, such as the third processing surface called the cathode opposite surface ls) Vertically; shown at the end of the above-mentioned wire P1 in the longitudinal direction of the force = PS (cathode to the fine 1 animal direction riding, Ke made electricity; LY force and bend - part _ shape Weng touch shape = The form of the package_part 13 is from the metal. In this way, the manufacturing method of the electronic grabbing filament i can suppress the distortion caused by the processing of the bent portion la of the electron-preventing filament i manufactured by the same. The electronic smashing filament i is mounted on the electronic smashing filament 1 (especially the curved portion 1a) due to heating during the electronic rush, and the resulting filament 切 is cut by wire electric discharge machining. As described above, the shape of the cross section perpendicular to the cathode opposing surface ls including the curved portion 1a is a rectangle. Further, the outer surface constituting the outer surface of the electron-collecting filament 1 is opposite to the surface, specifically a pair of faces perpendicular to the cathode opposing surface Is including the curved portion la, There is a machining mark caused by the wire electric discharge machining. The machining mark is formed at every predetermined interval with a traveling direction of the above-mentioned tool wire electrode 12 201137931 WE1 at the time of wire electric discharge machining, that is, an electric straight strip-like mark (so-called The m=', the length of the wire P1 hangs down, and the electronic smashing filament 1 can be formed with a streak by a predetermined interval of the filaments as shown in (10), ie, the above-mentioned opposite - every second. Referring to Fig. 4, the above-mentioned so-called Pierce-type electrons can be mounted. The fourth figure shows that the electron guns of the electron gun are heated by the heat of the electrons in the direction of the axial heat electrons (D), and are sequentially arranged. There is a collector I _ 嶋 嶋 之 之 之 , , , , , , 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子 离子It is shown that the center of each of the electronic smashing filaments 2 is arranged around the cathode electrode 2 of the optical axis A of the light-emitting axis A extending in the direction of the radiation D. The electrode 4 is adjacent to the edge of the electrode 3 An anode having a round shape is disposed and the anode electrode 4 has a face opposite to the cathode electrode 2 described above (vertical The through-holes of the five opposite poles are connected to the flow regulator ("the 5th series has a through-hole with the anode electrode 4 and is electrically connected to the illumination pole," which is outside the flow regulator 5. The focusing coil 6 and the oscillating coil 7 are sequentially disposed from a position close to the beginning of the yang. Each of the focusing, the ring 6 and the lion -7 has the following miscellaneous: generating a magnetic field, 贱201137931 electron beam EB passing through the anode electrode 4 Retrieving 3^, or making it in; _^3^_ This is a vapor-deposited material. In addition, these electronic grabbing filaments 7 and ion collectors 8 are mounted on 2 to 4, various coils 6, and openings. The casing 9 is provided as a frame 9 of the electron beam EB: the frame 9 and the flow regulator 5 are each penetrated through the anode-side flange 9a, and the flange 9 is fixedly disposed around the port. The shovel shovel of the material 31 is smashed into the frame chamber 3 of the object to be irradiated by the electron beam of the shovel, and the electron smashing filament is connected to the filament power source 21 of the hexagram 1 and the cathode electrode 2 is connected to the cathode electrode 2 And Wei Electronics grabs the cathode power supply 22 with a filament and a DC voltage. Yanglian === There is an acceleration power supply 23 applied. Cathode electrode 2, Weidian plus DC cake The potential of the electron grab filament i becomes the lowest 'and the anode=pole bungee 4 is the highest square; " The potential of the electrode 4 becomes Li. The input voltage from the cathode power source 22 and the acceleration power source 23 is added. The Pierce-type electrons are grabbed in the 1G, and the money is supplied from the electron-collecting filament, and the electron-trapping filament is heated to the fine wire to release the hot electrons. Then, the cathode electrode 2' of the positive potential of the electron-collecting lamp by the cathode power source 22 can be heated by the electron beam from the electron-carrying wire 1, whereby the hot electrons are also released. By the scale of the cathode of the ear 2, between the system, the electrode 3 of the same potential, the electrode 3, and the anode electrode 4 to which the cathode electrode 2 and the Vernett electrode 3 are applied The potential difference is accelerated and flies along the above pupil. Then, the through hole of the anode electrode 4 and the through hole are connected. 14 201137931 = The thermoelectron of the amount adjuster 5 is directed from the opening of the frame 9 toward the steaming chamber 3 as an electron beam. - At this time, when the portion of the hot electrons released from the cathode electrode 2 is in the casing 9 and the = mine compartment, the gas is cationized. The forceps are accelerated by the voltage between the cathode electrode 2 and the anode electrode 4. When the accelerated cation hits the cathode electrode 2, a hole is formed in the cathode electrode 2 due to this. Therefore, if such a cation is released for a long period of time, the pores become large and a through hole may be formed in the cathode electrode 2. In consideration of such a situation, adjacent to the cathode electrode 2 and the ion collector 8 disposed in the opposite direction Q of the emission direction D, even if the cathode electrode 2 is formed with a through hole, the through hole of the cathode electrode 2 is formed to be electronically robbed. filament! Release the ion, and the _ beam can also be used to collect the shoe by the ion. Therefore, the damage caused by the electron beam to the 1G is suppressed. Here, the electronic snare filament i of the present embodiment is as described above, and the brain is read (refer to the first! _ less processing distortion); ^(1) = system: thermal deformation. In other words, in the electronic grab With the filament 丨 ^ 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢 抢Therefore, in terms of obtaining the output of the conventional beam EB, as long as the % distance is obtained, the heating condition for shortening the filament 1 for the sub-gun is obtained. Therefore, not only the processing distortion is slower than the thermal condition, so the suppression can be more suppressed. The electron grabbing filament] is the demon branch, and the FC distance between the electron grab filament 1 and the cathode electrode 2 can be further in St, and the center of the electron grab filament 1 and the cathode electrode 2 can be maintained at an initial stage. Position. As a result, the stability of the electron beam EB from 201137931 can be improved from the electronic grab 10. Example i steel loses the moon and the surface of the electronic grab 1 of the invention and the manufacturing exemption 'ρ' The curved part of the line is tender and cut out to include the above length square _ end two: === ::: Grab the filaments, and the diameter is 〇.5-之=Γ; 曲邻/秘辞折f ^,11 This linlin corresponds to the comparison between the above-mentioned bends and the above-mentioned secrets of Cong Qing lb and then the following conditions The electronic robbing of the example of the 搭 = 电子 = 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子 电子The amount of deformation of the filament 1GG toward the side of the cathode electrode 2. In addition, the electron is grabbed by 10, except for the filament, the rest is the same composition;; • electron beam output: 17 kW • accelerating voltage: 20 kV • cathode voltage: 1.2 kV • FC distance 4.2nun In addition, as a method of controlling the output of the electron beam EB from the electron gun 10, it is known that the filament control and the cathode control are used. These controllers j are so-called filament control, which means that they are applied to the filament 1 and the cathode electrode, , 2 Z < voltage 16 201137931 that is, cancer is repeatedly set to determine, and by adjusting the power input to the filament 1 to control the rotation of the electron beam EB. On the other hand, the so-called cathode control, p Power input to filament 1 For the purpose of determining the above-mentioned cathode voltage, the result of the above-mentioned deformation amount is mainly determined by the filament control by the filament control, i 贞 此 健 健 健 健 健 健 健 健 健 健 健 健 健 健 健 健It can be confirmed that the amount of deformation of the electron-collecting Lusi 1 on the side of the cathode electrode 2 of the first embodiment is smaller than that of the filament (10) of the comparative example: the amount of the decoration on the side of the electrode 2 is 16 coffee. In other words, it can be confirmed that ^ Ratio::, in the case of 00, the minimum value of the distance needs to be 4.2_: ' The error can be shortened to 2.6 mm by using the electron fluctuating filament of Example 1 and the FC distance can be shortened to 2.6 mm. The measurement is carried out from the embodiment! Electronic grab light == Irradiation condition dependence of electron beam output. Fig. 5 is a schematic diagram showing the relationship between the output of the electron beam irradiated under the following irradiation conditions and the input power to the electronic capture lamp 41. In addition, the relationship between the input power of the electron beam transmission r = Γ of the 6th _ age under the downward ray condition is shown. Then, the seventh graph shows the relationship between the power of the bundle: and the wheel-in power of the electron-collecting filament 1 when the F-C distance is set to 2·6_. The input power to the cathode electrode 2 is the product of the current flowing between the filament 1 and the cathode electrode 2. ^ For the black circle display, the F-C distance is set to 仟U 3, and the black square is used to set the % distance - two = fruit. Further, Fig. 7 shows the result of the cathode voltage ❼.1 in the black diamond shape and then the result of setting the cathode voltage to 17 201137931 in black _, and then the cathode voltage is set to 14 kv in the black triangle. Result 0 • Maximum output of electron beam: 30kW • Acceleration voltage: 20kV • Cathode voltage: 1.2kV • FC Distance: 2.6mm, 4.2mm By the way, set as the FC distance of 2.6mm and 4.2mm, 4.2mm' The filament of the comparative example produced by the conventional manufacturing method shown by the figure A of the A surface is set as the minimum value of the F_c distance. On the other hand, 2.6 mm is the minimum value of the F-C distance which can be set when the electronic bribe is manufactured by the manufacturing method of the present embodiment of Fig. 3 of the foregoing. Here, the reason why the distance between the filament yoke manufactured by the manufacturing method of the present embodiment and the cathode electrode 2 can be set shorter is as described above. As shown in Figure 5, if the output of the electron beam EB is (4), when the above-mentioned % goods "is 2.6mm, the input power to the filament is about 83%, relative to this.
Γ距離為4.2麵時，對燈絲1之輸入功率大約名 :因而’可知藉由縮短上述F_c距離，即可減低對燈絲 之輸入功率大約為·。又，並不限於將電子束EB ’如第5圖所示，即使在設為⑽娜、膽 要縮釘F_C 2情況也可獲得大致相同的傾向。此可看抑 熱電子容易被拉人至因射從燈絲1釋料 從_輻射的熱到達陰極 1=::?形態係數- 18 201137931 如第6圖所示’將電子束EB之輪出設為⑺乂時 極2的輸入功率，係在將上述R距離設為4.2職= 93靡，相對於此，當將F_c距離設為2 6咖時則為刷二為 因而，可知藉由縮短上述F_C距離，可將對陰極電極2之輸入 功率減低大約桃。又如第6圖所示，即使將電子束邱 出設為0.84kW、2.8kW、5.6kw及】丄㈣之任一個 : 是設定為上述膽的情況程度，也可減低繼極電極2 :輪 入功率丄此也如上所述’可看作只要縮短了 F_c距離，就會二 口下因素而產生.從電子搶贿絲丨釋出的熱電子料被拉入 極；以及触射之形態係、數、即從燈絲β射的埶到 比例變大。又’由於空間電荷之量受到限制， =F-C距離恩大’就愈需要較高的陰極電壓，可看作 要較大的陰極電極輸入功率之一原因。 ’、、' 而 從此等第5圖、第6圖之結果可明白，藉由縮短上述 =可—邊減低對電子搶用燈絲1之輸人功率或對陰極電極2 輸入功率，一邊可獲得所期望的電子束EB之輸出。 2.=、7圖所示’即使將電子束®之輸出設為、 高’對^6kw、lukw及17kw之任一個，也是陰極電壓俞 電屋車^、41之輸人功率就愈小的值。此可看作是因只要陰極 所ίΓ的熱電子就容易被拉人至陰極電極2 曲線圖1 輪出的控制性’從第7圖所示之各 是因=斜來看也明自，陰極電騎低骑能提高。其理由 ;:極_愈低’對燈絲1之輸入功率就愈會增心 可提古^的電子束ΕΒ之輸出變化程度會緩慢化所致。因而， 如Ν電子束ΕΒ之輸出控制的精密度。 19 201137931 :’雖然===為電子搶w =制的精密度，但梢獲得所期望的電;束:束5之輸 ^要更增大對電子搶贿絲丨之輸人解 之輸出， 實施例1之電子搶用燈絲卜 彳述，若為 得所期望的電子束EB之輸出方面可減低=3離’而在獲 輸入功率。因此，也可藉由依縮短F_ :用燈絲1之 來抵銷提高電子東EB之輪出控制的精密於 用燈絲之輸入功率的增加部分。換句話戈 對電子搶 加工畸變受顺制之電子搶用燈絲！，則^^心中的 用燈絲之輸入功率，即可提高命 '肖曰大對该電子搶 午N徒呵电子束EB之輸出控制的精密度。 接著，計測出以下述照射條件驅動搭載有實施例】之 用燈絲1的電子槍10與搭載有比較例之' ^层 =電流之歷時安定性能。另外，用二== =:=r—構成。第8_顯= ^之:子搶用燈絲！的束射電流之變動程度，而第8 示比較例之電子搶用燈絲100的束射電流之變動)'二 ==_(b)中，係相以實線Lmax表: 束射電流之最大值’以實線Lmin表示其最小值，以虛=的 表1束射電流之平均值’並且以棒狀圖顯二_ !小時的束射電流之變動幅度的此等最大值與最小值之差:、、、When the Γ distance is 4.2, the input power to the filament 1 is approximately: Thus, it can be seen that the input power to the filament can be reduced by shortening the above F_c distance. Further, it is not limited to the fact that the electron beam EB' is as shown in Fig. 5, and the same tendency is obtained even when it is set to (10) Na and the constricted nail F_C 2 . It can be seen that the heat-reducing electrons are easily pulled to the cathode due to the radiation from the filament 1 to the cathode. 1=::? Shape factor - 18 201137931 As shown in Fig. 6 'The electron beam EB wheel is set The input power of the (7) 乂 time pole 2 is set to 4.2 position = 93 上述. In contrast, when the F_c distance is set to 2 6 coffee, the brush is two, so it is known that the above is shortened. The F_C distance can reduce the input power to the cathode electrode 2 by about a peach. Further, as shown in Fig. 6, even if the electron beam is set to any of 0.84 kW, 2.8 kW, 5.6 kW, and 丄 (4): the degree of the above-described biliary is set, and the relay electrode 2: the wheel can also be reduced. The power input is also as described above, 'it can be seen that as long as the F_c distance is shortened, it will be caused by two factors. The hot electron material released from the electronic bribery wire is pulled into the pole; and the form of the radiation The number, that is, the 射 from the filament β, becomes larger. Moreover, since the amount of space charge is limited, the higher the cathode voltage is required for the =F-C distance, it can be regarded as one of the reasons for the larger cathode electrode input power. ',,' and from the results of Figs. 5 and 6, it can be understood that by shortening the above-mentioned = can be reduced to the input power of the electron-collecting filament 1 or the input power to the cathode electrode 2, The desired output of the electron beam EB. 2.=, 7 shows that even if the output of the electron beam® is set to "high" to any of ^6kw, lukw and 17kw, the input power of the cathode voltage Yu electric vehicle ^, 41 is smaller. value. This can be seen as a result of the fact that as long as the hot electrons of the cathode are pulled to the cathode electrode 2, the controllability of the rotation of the graph 1 is shown in Fig. 7. Electric riding low riding can improve. The reason for this: The lower the _ the lower the input power to the filament 1 will be increased. The degree of change in the output of the electron beam will be slowed down. Thus, such as the precision of the output control of the electron beam. 19 201137931 : 'Although === is the precision of the electronic grab w = system, but the tip gets the desired electricity; bundle: the bundle 5 loses ^ to increase the output of the electronic bribery The electronic grabbing lamp of the first embodiment is described as being able to reduce the input power by reducing the output of the electron beam EB by 3%. Therefore, it is also possible to offset the increase in the input power of the filament by the shortening of F_: by the filament 1 to improve the rotation control of the electronic east EB. In other words, the electronic robbing of the electronic distortion processing is affected by the electronic grabbing filament! ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Next, the time-dependent stability performance of the electron gun 10 in which the filament 1 of the embodiment was mounted and the 'layer> current of the comparative example were driven under the following irradiation conditions was measured. In addition, it is composed of two == =:=r-. The 8th _ = = ^: The child grabs the filament! The degree of fluctuation of the beam current, and the variation of the beam current of the electron-supplied filament 100 of the comparative example is shown in the figure '2==_(b), the phase is expressed by the solid line Lmax: the maximum beam current The value 'is the minimum value of the solid line Lmin, the average value of the beam current of the table 1 of the virtual = 1 and the maximum and minimum values of the fluctuation range of the beam current of the _ ! hour in the bar graph difference:,,,
•電子束之輸出：17kW• Output of electron beam: 17kW
加速電壓：20kVAcceleration voltage: 20kV
•束射電流：850mA 20 201137931 •陰極電壓：1.2kV(實施例1)、1.4kV(比較例） • F-C距離：2.6mm(實施例1)、4_2mm(比較例) •照射時間：90小時 於第8圖⑻所示之實施例1中’如上所述由於可將F_c距離 設定為2_6mm，故可設定1.2kV作為滿足上述照射條件的陰極 電壓。在此種照射條件下’當以大約90小時的時間測定束射電 流之值’則每1小時的束射電流之平均值與最大值之差最大為 5mA ’而平均值與最小值之差最小為3mA。相對於此，於第8 圖(b)所示之比較例中，由於燈絲與陰極電極之距離係設定為 4.6_，所以設定L4kV作為滿足上述照射條件的陰極電壓。 在此種照射條件下，#以大約90小時的時間測定束射電流之 值，則每1小時的束射電流之平均值與最大值之差最大為 10mA ’而平均值與最小值之差最小為4mA。 …如此’比起使用比較例之齡糸100時的變動巾昌度，可將使用 貝把例1之電子搶紐絲1時的變動幅度還減低成VI.乃。與 比較例之燈絲她’在實施例丨之電子搶用燈絲丨中之所 以如此減低變動幅度，係由於可抑制因加熱所造成_變形， 故可減低起因於通電的F_c距離之變動並可縮短f_c距離，社 ^看作係因將陰極電壓設定得較低而可提高電子束eb讀 出控制性所较。 接著 雜餘ΪΓ 1之電子搶題絲1的電子槍 煞载有比較例之燈絲100的電子搶10，以與前面之第8 同照射條件加以㈣^ 〒另外，在此所謂的财用時間，係指開始對燈絲通電之後 201137931 至燈絲斷線為止的時間。又，就實施例1之電子搶用卢絲1鱼 比較例之燈絲100的各個測定25個體的耐用時間。足、與 如第9圖所示，比較例之燈絲100的平均耐用時間為3刀 時’相對於此，實施例i之電子槍用燈絲i的平均耐用71 ^ 小時。換句話說，可明白實施例i之電子搶用燈絲i = 均耐用時間，為比較例之燈絲刚的平均耐用時間之 如此可加長平均_時間，在實施例！之電子搶用燈蜂° 由於可抑綱加熱所造成的變形，所以可抑繼電^搶轉 1中的機械性劣化，並且由於可縮短F_c轉，所以可減2 電子搶用燈絲1之輸入功率。亦即彳 ' _之溫度所致。此外， ;用時間與最短的耐用時間之差約為烟小時 實施例！之電子搶用燈絲i中，最長二=於此，在 時間之差約為200小時，故可知也㈣^時間與最短的耐用 間的耐用時間之變動。 b \子搶用燈絲1個體 舉=實施例的電子搶用燈絲1之製造方法， (1)構成形成於電子搶用燈絲〗之 屬板p切出。藉此，與藉由對例如線=的線㈣可從金 工而形成之具有彎曲部_的習^之線材施予折¥加 絲1係可抑制殘留於f曲部i 且、、，糸100相較，電子搶用燈 用電子搶ίο時，由於即使電子=的加工畸變。結果，在使 部la之内部的加工畸變也極為1 ’且絲1被加熱’殘留於彎曲 彎曲發生折返。因而，可抑制在彎曲^可抑制在彎曲部h之 燈絲I起因於加熱而變形。 。卩13之形狀發生變化、即 22 201137931 ⑺由於可抑制電子搶用燈絲i之熱變形，所 用燈絲1與陰極電極2之距離(F_C距離)。結果，可— 2電輸率、例如對燈絲1之輸人功率或對陰極電極 2之輸入功率’ 一邊可獲得所期望的電子束eb之輸出。 (3) 由於可抑制電子搶们之熱變形，_ 起Μ距離之變動，並且可縮㈣七距離。結果 屋设定得較低而提高電子束ΕΒ之輸出控制性。藉由提二 輸出s控制f ’比起使用習知燈絲刚時的電子束EB之^出攀 動巾田度，▲還可將使用本實施例之電子搶用燈絲丨時的電克仰 之輸出變動幅度減低至丨/丨.75。 (4) 由於可抑制電子搶用燈絲1之熱變形，所以可抑制該雷早 搶用燈絲1巾的機械性劣化，並且可縮短F_c距離。結= 子ί職“之神’而可抑_電子搶用燈絲 之恤度上升。猎此，與習知的燈絲1〇〇比較 燈絲1之平均咖時間延長纟川倍。 料子搶用 ⑶，知的燈絲10〇中，最長的时用時間與最短的耐用時間之 為300小時’相對於此’本實施例的電子搶用燈絲工曰中， 八取長的耐用時間與最短的耐用時間之差大約為2⑽小時 而’也可抑制電子搶用燈絲1之個體間的耐㈣間之變動。 另外，上述實施例也可適當地如下變更加以實施。 =子槍1G並不限於上述構成。例如，電子搶iq亦可 3有#焦線圈及流量調節器。 部1^成甩子搶用燈絲1之彎曲部1a的彎曲lc之個數或彎曲 ° a之形狀並不限於上述之個數及形狀。例如構成彎曲部la 23 201137931 的彎曲之數量可任意設定，並且 材P1之長度抑蚊财岐狀狀也可^朝與線 曲部la之形狀設為所謂螺旋型;"凹凸曲線狀。又，亦可將彎 按日刀12金屬板之厚度設為。.5mm ’但並不限於此，例如可 按4¾子搶10所得的輸出等進行任意變更。 p之工之條件、例如施加於卫具線電極聊與金屬板 途声i，小、或作為金屬板P之移動速度的加工進給 而ί意設=域_之雜或線放電加4置.之性能等 ^ · ^子搶用燈絲]自金屬板ρ之切出係藉由線放電加工吨 不限於此。例如也可採用水刀(讀⑽法等其他的加工 被，係指使用透過aimm至LGmm左右之孔而 工的方、GMPa左右的水進行上述金屬板p等之切斷加 的方法，例如錢被奴為50畅至__。 •又，也可刺在經加顯的水流中混人研磨材，藉此進行 加工的磨料喷射(abrasive jet)法。 钱•將金屬板P之形靖料、換句話說燈絲1之形成材料設為 鶴：亚不限於此，也可使用含鎢之合金作為燈絲之形成材料。 或疋’使用组等其他金屬材料取代鎮作為燈絲材料。由於 之功函數知比鎢(w)之功函數小，所以叙會以 釋出與其咖熱電子。例如，如㈣圖解，獲 之'、，、電子的溫度’触而言約為2肅，對鎢而言約為％徽。 因而，藉由使胁取代鎢，即可將燈絲1之溫度降低約麻。 •作為上述電子搶聰絲1之構成材料的金騎料-般為結 24 201137931 變更廿，你、—採用由早—板材所構成者，但是亦可 絲。若為此金屬板簡㈣麵4層板*形成燈 右為此種構成’财獲得如下效果。亦即· 1 =ι:金每 然地受到妳㈣调^视大化自 • =魏法形成如金㈣板之材料 方向之機械特性的機械強度 上述滾=向:=3大降伏強度及拉伸強度等，係在與 小’另， 滾軋方向平行的方^士 π w置的方向取小’且在 金屬而形成電:=:。二在單 維持於所期望程产^特疋方向有其機械強度無法 以各全口在使用上述疊層板時，較佳為 “屬板之滚軋方向彼此交又的方 為此種搆㈣除了上述(㈣，還可獲;==, 作為)叠=:=】板性可為互補’且可提高 所構成的電子搶用燈絲之機械以從登層板切出之線材 等二⑺之效果係當將彼此鄰接的金屬板彼此間，以並 叙錄方向構赫直的方式疊層時最為·。 - 25 201137931 同板;板一 疊層板中，由於鄰接的金屬板彼此間伽 構=以比起將由同—金屬材 = 結晶粒， 甚至，可將 限制為各結晶粒所屬的 的疊層板’還可抑制構成-個金屬板的 :由—晶粒所構成#金屬板之厚度而粗大化。 宜層板之厚度方向的結晶粒之粗大化， 金屬板之厚度。 1 ===的金屬板而形成疊層板時，電子搶用燈絲 函數比豆他^1丢極電極2相對向之侧的金屬板，也可由功 全屬盘的材料所構成。例如，也可使用鶴(W) ，1、鈕(Ta)金屬所構成的金屬疊層板而形成燈絲。第u圖係 用叙金屬板42與嫣金屬板以仰叠層板而形成 的只_ 2之燈絲41的構成。使用該燈絲41之電子搶1〇中， ^；^42係與陰極電極2相對向而配置，而鎢金屬板43係 -置於陰極電極2之相反側。亦即，组金屬板42係包含陰極對 ，面^燈絲4!係在雜金屬板42接合於鶴金屬板43而獲得 -Ta豐層板之後’藉由從w_Ta疊層板切出線材而形成。另外， 取代接合金屬板42、43，而藉由驗金屬熔射於鎢金屬板犯， 或f藉由將鎢金屬蒸鑛於麵金屬板幻，也可形成w_Ta叠層板。 換言之，也可從鎢金屬板43切出鎢線材，且藉由將鈕金屬熔射 於該鶴線材中而形成燈絲4卜妓，從叙金屬板42切出组線 材’且藉由將鎢金屬蒸鍍於鈕線材中而形成燈絲Μ。如上所述， 鈕係可以比鎢還低的溫度，釋出與其同量的熱電子(參照第1〇 圖）。因此，比起實施例丨之燈絲丨，實施例2可抑制燈絲41之 26 201137931 溫度上升而延長平均咖時間(平均壽命）。第u圖係顯示實施 例1之燈絲壽命與實施例2之燈絲壽命的曲顧。如第12圖所 不，實施例1之燈絲i的平均壽命為7〇〇小時，相對於此，者 施例2之燈絲41的平均壽命為838小時。因而，實施例貝 實施例1還可延長平均壽命約12倍。在此，纽係可以較低 溫度有效，地釋*熱電子，另―方面，在高溫下比起鎢在拉伸 強度方面還差。目此，在制w_Ta4層板時，可 41之充分強度，—邊可抑繼燈絲41之溫度上升。要::糸 實施例2之燈絲4卜係具有如下優點。 (9)燈絲4i係使驗金屬板a與鎮金屬板a之w_Ta叠層 ^成。在將燈絲41配置於電子槍1G時，齡屬板42係才曰目對 :地配置於陰極電極2。師、以_還_溫鱗料電子。 或二ΐί藉=單—材料之線材而形成的習知燈絲⑽、 〆曰由從早-金屬板切出線材而形成的 Π論電極2相對向的金屬板(即组金屬‘ 本身的i度：=屬二之温度上升’且可抑制燈絲41 極電極2_彡。’比起貫關1，還可抑制燈絲朝陰 形之三個以上的金屬(或金屬板)而 子搶之_電;:的料錢躺㈣姆向配置於電 3實施例之詳述’係希望能更加清楚描述 蓋各種改制。相反地，其目的是希望能涵 八相4性的鶴於本發明所欲巾請之專利範圍 27 201137931 的範嘴内。 【圖式簡單說明】 第1圖(a)係顯示被用於習知電子 立體圖。祕.标本發明—實_之打__之概略；造的 第3圖⑻至⑷係概略顯示第 的示意圖。 电子搶用燈絲之製造步驟 第4圖係顯示可供第2圖之電子 成的概略圖。 #_絲_的電子搶之構 弟5圖在顯示對第2圖之電子搶用押絲+认 輸出之__、_。 拥燈絲之輪人功率與電子束 曲線圖第。6圖係顯示對陰極電極之輸入功率與電子束輸出之關係的 第7圖係顯示陰極電極經變更時 率與電子束輸出之關係的曲線圖更才之對電子搶用燈絲之輸入功 圖。第8_、(b)係顯示電子束之安定性經評估後之結果的曲線 =圖係顯示第2圖之電子搶用燈絲之耐科間的曲線圖。 ㈣曰可_於第2圖之電子_ _之之材料的嫣 ，、、-之熱毛子輻射密度之比較的曲線圖。 金屬圖係^示在第2圖之電子搶用燈絲中使用齡屬板與组 之-Ta S層板的實施例2之電子搶用燈絲的概略構成圖。 第12圖係顯示只使用鎢金屬板之實施例丨的燈絲之壽命、鱼 使用W-Ta疊層板之實施例2的燈絲之壽命的曲線圖。 28 201137931 【主要元件符號說明】 1 :電子槍用燈絲 lb :腳部 Is :陰極對向面 P1 :線材 Pi :假想平面 WE1 :工具線電極 WE3 : NC裝置 100 :燈絲 100b :腳部 2 ： 陰極電極 4 ： 陽極電極 6 ： 聚焦線圈 8 ： 離子收集器 9a :凸緣 EB :電子束 30 :蒸鍍室 21 :燈絲電源 23 :加速電源 42 :钽金屬板 1 a :彎曲部 1 c : 幫曲 P :金屬板(板材）• Beam current: 850 mA 20 201137931 • Cathode voltage: 1.2 kV (Example 1), 1.4 kV (Comparative Example) • FC distance: 2.6 mm (Example 1), 4_2 mm (Comparative Example) • Irradiation time: 90 hours In the first embodiment shown in Fig. 8 (8), since the F_c distance can be set to 2-6 mm as described above, 1.2 kV can be set as the cathode voltage satisfying the above irradiation conditions. Under such irradiation conditions, 'when the value of the beam current is measured in about 90 hours', the difference between the average value and the maximum value of the beam current per hour is at most 5 mA' and the difference between the average value and the minimum value is the smallest. It is 3mA. On the other hand, in the comparative example shown in Fig. 8(b), since the distance between the filament and the cathode electrode was set to 4.6_, L4kV was set as the cathode voltage satisfying the above irradiation conditions. Under such irradiation conditions, # is used to measure the value of the beam current for about 90 hours, and the difference between the average value and the maximum value of the beam current per hour is 10 mA maximum and the difference between the average value and the minimum value is the smallest. It is 4mA. In this case, the variation range when using the electronic ray 1 of the example 1 of the comparative example can be reduced to VI. The reason why the filament of the comparative example is reduced in the electronic smashing filament enthalpy of the embodiment is that the _ deformation caused by the heating can be suppressed, so that the variation of the F_c distance due to the energization can be reduced and shortened. The f_c distance is considered to be improved by the electron beam eb readout controllability by setting the cathode voltage lower. Then, the electron gun of the electronic smashing wire 1 of the sputum 煞 1 carries the electronic smash 10 of the filament 100 of the comparative example, and is added to the same illuminating condition as the first ninth (4) 〒 〒 In addition, the so-called financial time is Refers to the time from the start of 201137931 to the disconnection of the filament after the filament is energized. Further, the durability time of 25 individuals of each of the filaments 100 of the comparative example of the electron robbing of the Lusi 1 fish of Example 1 was measured. As shown in Fig. 9, the average durability time of the filament 100 of the comparative example was 3 knives. In contrast, the filament of the electron gun of Example i had an average durability of 71 hr. In other words, it can be understood that the electronic snare filament i of the embodiment i = the average durability time, which is the average durability time of the filament of the comparative example so that the average time can be lengthened, in the embodiment! The electronic robbing lamp bee ° can suppress the mechanical deterioration caused by the heating, and can reduce the F_c rotation, so the input of the filament 1 can be reduced by 2 power. That is, the temperature of 彳 ' _ is caused. In addition, the difference between the time and the shortest durability time is about smoke hours. In the electronic smashing filament i, the longest two = this, the difference in time is about 200 hours, so it is known that (four) ^ time and the shortest durability between the durability of the change. b \Subscribing to the filament 1 individual 1. The method for manufacturing the electronic snare filament 1 of the embodiment, (1) forming a plate p formed on the electron-collecting filament. Therefore, it is possible to suppress the remaining of the f-curve portion i and the 糸100 by applying the wire to the wire member having the bent portion _ which can be formed from the metal work, for example, the wire (4). In contrast, electronic robbing lights use electronic robbing, because even electronic = processing distortion. As a result, the distortion in the inside of the portion 1a is also extremely 1' and the filament 1 is heated to remain in the bending and bend. Therefore, it is possible to suppress deformation of the filament I caused by the heating in the bending portion h due to heating. . The shape of the crucible 13 changes, that is, 22 201137931 (7) The distance between the filament 1 and the cathode electrode 2 (F_C distance) is used because the thermal deformation of the electron-preserving filament i can be suppressed. As a result, the desired output of the electron beam eb can be obtained while the electric current rate, for example, the input power to the filament 1 or the input power to the cathode electrode 2 can be obtained. (3) Since it can suppress the thermal deformation of the electrons, the _ Μ distance changes, and can shrink (four) seven distances. As a result, the house is set lower to improve the output controllability of the electron beam. By controlling the output s of the second output s, compared to the use of the electron beam EB when the conventional filament is used, it is also possible to use the electron rushing filament of the present embodiment. The output variation is reduced to 丨/丨.75. (4) Since the thermal deformation of the electronic snare filament 1 can be suppressed, the mechanical deterioration of the filament 1 can be suppressed, and the F_c distance can be shortened. Knot = sub-deal "God" and can be suppressed _ electronic robbing the filament of the degree of increase. Hunt this, compared with the conventional filament 1 灯 compare the average coffee time of the filament 1 extended 纟chuan times. Material grab (3), In the known filament 10 ,, the longest time and the shortest durability time is 300 hours. In contrast, in the electronic smashing filament process of the embodiment, the longest durability time and the shortest durability time are obtained. The difference is approximately 2 (10) hours, and the variation between the individual resistances of the electron-collecting filaments 1 can be suppressed. Further, the above-described embodiment can be appropriately modified as follows. The sub-gun 1G is not limited to the above configuration. The electronic grab iq can also have #焦焦圈 and flow regulator. The number of bends lc of the curved portion 1a of the filament 1 is not limited to the above number. For example, the number of the bends constituting the curved portion la 23 201137931 can be arbitrarily set, and the length of the material P1 can also be set to a so-called spiral type in the shape of the curved portion 1a; Also, you can bend the thickness of the metal plate of the Japanese knife 12 It is set to .5mm 'But it is not limited to this, for example, it can be arbitrarily changed according to the output obtained by grabbing 10 in 4⁄4. The conditions of p work, for example, applied to the electrode line electrode and metal plate sound i, small, Or as the processing feed of the moving speed of the metal plate P, the meaning of the field _ impurity or the line discharge plus 4 set. The performance of the ^ ^ ^ grab the filament] from the metal plate ρ cut out by the line The electric discharge machining is not limited to this. For example, a water jet (other method such as the reading (10) method) may be used, and the metal plate p or the like may be cut by using water passing through a hole of aimem to LGmm or water of GMPa. The method of breaking, for example, the money is slaved to 50 __. • In addition, it can also be used to mix the abrasive material in the added water flow, thereby processing the abrasive jet method. The shape of the metal plate P, in other words, the forming material of the filament 1 is set as the crane: the sub-area is not limited thereto, and the alloy containing tungsten may be used as the material for forming the filament. Or the other metal materials such as the use group are substituted for the town. Filament material. Because the work function knows less than the work function of tungsten (w), For example, as shown in (4), the temperature of the ',,, electrons' is about 2, and about tungsten is about %. Therefore, by replacing the tungsten with the threat, The temperature of the filament 1 is reduced by about numb. • The gold riding material used as the constituent material of the above-mentioned electronic rayon wire 1 is generally a knot 24 201137931 Change 廿, you, - using the early-plate material, but also silk. If the metal plate is simple (four) face 4 layer plate * forming the light right for this kind of structure, the following effects are obtained. That is, 1 = ι: gold is subject to 妳 (4) 调 ^ 视 大 = = = = = For example, the mechanical strength of the mechanical properties of the material direction of the gold (four) plate is as follows: = 3 large relief strength and tensile strength, etc., taken in the direction of the square π w parallel to the small 'other, rolling direction Small 'and form electricity in the metal: =:. 2. When the mechanical strength of the above-mentioned laminated plate is not maintained in the direction of the desired product, it is preferable that the rolling direction of the plate is the same as that of the plate (4). In addition to the above ((4), can also be obtained; ==, as) stack =:=] slab property can be complementary 'and can improve the structure of the electron robbing filament machine to cut out the wire from the board, etc. 2 (7) The effect is that when the metal plates adjacent to each other are laminated to each other in the manner of the direction of the recording, the same is true. - 25 201137931 The same plate; in the laminated plate, the adjacent metal plates are galvanized with each other. = In comparison with the same metal material = crystal grain, even if it can be limited to the laminated plate to which each crystal grain belongs, it can also suppress the thickness of the metal plate composed of - grain. The coarsening of the crystal grains in the thickness direction of the layer, the thickness of the metal plate. 1 === the metal plate to form the laminated plate, the electron grab filament function is more than the bean 1 The metal plate on the opposite side can also be made of the material of the whole disk. For example, it can also be used. (W), a metal laminated plate made of a metal of a button (Ta) to form a filament. The first drawing is a filament 41 of only _ 2 formed by laminating a metal plate 42 and a base metal plate. In the electronic splicing using the filament 41, ^42 is disposed opposite to the cathode electrode 2, and the tungsten metal plate 43 is placed on the opposite side of the cathode electrode 2. That is, the metal plate 42 is formed. A pair of cathodes is included, and the surface of the filament 4 is formed by cutting the wire from the w_Ta laminate after the metal plate 42 is bonded to the metal plate 43 to obtain the -Ta layer. In addition, instead of joining the metal plate 42 , 43, and by spraying the metal on the tungsten metal plate, or f by steaming the tungsten metal to the surface metal plate, the w_Ta laminated plate can also be formed. In other words, the tungsten metal plate 43 can also be cut out. A tungsten wire is formed, and a filament 4 is formed by melting a button metal in the wire, and the wire member is cut out from the metal plate 42 and the filament is formed by vapor-depositing tungsten metal into the button wire. As described above, the button system can release a temperature lower than that of tungsten, releasing the same amount of hot electrons (refer to Fig. 1). In the embodiment, the filament enthalpy of Example 2 can suppress the temperature rise of the filament 41 and the average coffee time (average life). The figure u shows the filament life of the embodiment 1 and the filament life of the embodiment 2. As shown in Fig. 12, the average life of the filament i of the first embodiment is 7 hrs, whereas the average life of the filament 41 of the second embodiment is 838 hours. Thus, the embodiment 1 is also The average life expectancy can be extended by about 12 times. Here, the contact system can be effective at a lower temperature, releasing *hot electrons, and on the other hand, it is worse than the tungsten in tensile strength at high temperatures. Therefore, the w_Ta4 layer is formed. When the plate is used, the sufficient strength of the 41 can be suppressed, and the temperature of the filament 41 can be suppressed. To:: The filament 4 of Embodiment 2 has the following advantages. (9) The filament 4i is formed by laminating the metal plate a and the w_Ta of the town metal plate a. When the filament 41 is placed on the electron gun 1G, the age plate 42 is placed on the cathode electrode 2. Division, to _ also _ warm squama electronic. Or a conventional filament (10) formed by the wire of the material, or a metal plate (ie, the metal of the group metal itself) formed by the wire electrode formed by cutting out the wire from the early-metal plate. :=The temperature rise of the second is 'and can suppress the filament electrode 2_彡 of the filament 41.' Compared with the cross-connection 1, it can also suppress the three or more metals (or metal plates) whose filaments are facing the female shape. ;: The money to lie (four) um to the configuration of the electric 3 embodiment of the details of the system is expected to more clearly describe the various modifications of the cover. Conversely, the purpose is to hope that the occlusion of the eight-phase four cranes in the present invention Please refer to the scope of the patent scope 27 201137931. [Simple description of the diagram] Figure 1 (a) shows the use of the known electronic stereogram. The invention of the specimen - the actual _ _ _ _ _ _ _ _ 3 (8) to (4) schematically show the first schematic diagram. The manufacturing step of the electronic grab filament is shown in Fig. 4 as a schematic diagram of the electrons available in Fig. 2. The image of the electronic grab of the #_丝_ is shown in the figure 5 For the electronic grabbing wire + recognition output of Fig. 2, __, _. The human power and electron beam curve of the filament wheel. Fig. 6 Fig. 7 showing the relationship between the input power of the cathode electrode and the output of the electron beam shows a graph showing the relationship between the rate at which the cathode electrode is changed and the output of the electron beam, and the input power diagram of the electron-collecting filament. (b) is a curve showing the results of the evaluation of the stability of the electron beam = the graph shows the graph of the resistance between the electron-collecting filaments in Fig. 2. (4) The electrons in Fig. 2 _ _ A graph of the comparison of the radiance density of the enthalpy of the material, 、, , - - The metal diagram shows the embodiment 2 of the Ta S layer using the age plate and the group in the electron robbed filament of Fig. 2 Fig. 12 is a graph showing the life of the filament of the embodiment using only the tungsten metal plate and the life of the filament of the second embodiment using the W-Ta laminate. 201137931 [Description of main component symbols] 1 : Filament lb for electron gun: Foot Is: Cathode opposite plane P1 : Wire Pi : Imaginary plane WE1 : Tool line electrode WE3 : NC device 100 : Filament 100b : Foot 2 : Cathode electrode 4 : Anode electrode 6 : Focus coil 8 : Ion Device 9a: flange EB: electron beam 30: vapor deposition chamber 21: Filament power supply 23: acceleration power source 42: tantalum plate 1 a: the bent portion 1 c: curvature help P: a metal plate (sheet)
Ps :加工面 WE :線放電加工裝置 WE2 .加工電源 W :金屬線 100a :彎曲部 D:照射方向 3:韋乃耳特電極 5:流量調節器 7:擺動線圈 9 :框體 10 :電子槍 A :光軸 31 :蒸鍍材料 22 :陰極電源 41 :燈絲 43 :鎢金屬板 29Ps: processing surface WE: wire electric discharge machining device WE2. machining power supply W: metal wire 100a: bending portion D: irradiation direction 3: Vernet electrode 5: flow rate adjuster 7: swinging coil 9: frame 10: electron gun A : Optical axis 31 : evaporation material 22 : cathode power supply 41 : filament 43 : tungsten metal plate 29