201137915 六、發#說明： 【發明所屬之技術領域】 本發明是有關於一種用於真空設備的部品，特別是指 一種真空電引入裝置》 【先前技術】 如圖1所示，現有一種利用一夾具102安裝在—真空 腔體1的一真空接頭1〇1上的真空電引入裝置，可提供一 大氣側I與一真空側Π之間訊號或電力傳輸，包含有一外 管件2、一焊固在該外管件2内部的安裝板3、多數燒結固 設在該安裝板3上的陶瓷管4、多數燒結固設在該等陶瓷管 4中的金屬傳輸桿5及一密封設置在該真空接頭1〇1與該外 管件2之間的密封單元6。該外管件2具有—與該真空接頭 101相對的凸緣端部2〇丨及一設置在該凸緣端部2〇丨中的間 隔板202。雖然這種真空電引入裝置可達到預期的電性引入 目的，但仍有以下缺失： 一、因該安裝板3與該等陶瓷管4、該等陶瓷管4與該 等金屬傳輸桿5組接時都必須利用燒結方式固定，且燒結 又南以致於有工序困難、製造組配麻煩且成本高之缺 失。 一、 該外官件2的長度長，導致該真空電引入裝置整 體長度也長，佔用安裝空間。 二、 該密封單元6由一 〇形環601及一定位件602構 成，成本較高。 再如圖2所示，現有另一種真空電引入裝置，也包含 201137915 有一外管件2，、-详固在該外管件2，内部的安裝板3，、多 數燒結固設在該安裝板3,上的4，、多數燒結固設在 該相莞管4,中的金屬傳輸桿5,及一密封設置在一真空接 頭10Γ與該外管件2，之間的密封單元6，。這種真*電引入 =:圖丨之真空電引入裝置結構大致相同，只：長度及 Z途與圖！略有差異，主要適宜用來作為熱電偶引入，且 其亦具有如圖1的缺失。 【發明内容】 本發明之目的，即在提供—種工序簡單、製造 配各易且可降低製造成本之真空電引入裝置。 於：，本發明真空電引入裝置’適宜安裝在一真空腔 真空接頭上，且提供一大氣側與一真空 Π::真空電引入裝置包含一定位座、-固設在該定 件:一安裝在該定位座與該承座之間的防漏 以可^㈣'地穿設在該定位座中的傳輸桿。該定位座 可耐純溫、耐高Μ、耐純之㈣ :於該真空側的内側面、一對應該内側面 槽有一 鄰於該大氣側的外側面、 哀才曰相 面及多數貫穿該内、外側面=内二卜：面之間的外周 ，且 时孔。該承座呈令空環圈狀 =外部’並具有―與該相面 環面。該防漏件位 内環柙中廿担 座與该承座之間，且安裝在該 座盘^广卷定位座與該真空接頭套接處及該定位 承座套接處保持氣密。該等傳輸桿分別呈氣密地穿 設在該定位座的穿孔中，並各具有一設置在該等=的穿 201137915 中段、一伸設至該真空側的内側段及一對應該大氣側的外 侧段。 本發明之功效：利用該承座可使該定位座穩固定位在 S亥真空接頭上’且使得該等傳輸桿氣密且穩定地穿設在該 真空側與該大氣側之間，不僅可達到電引入目的，且整體 結構簡單、製造組配容易、體積小，進而降低製造成本。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之二個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前’要注意的是，在以下的說 明内容中’類似的元件是以相同的編號來表示。 如圖3、圖4及圖5所示，本發明真空電引入裝置1〇〇 之第一較佳實施例’是利用一夾具3〇〇安裝在一真空腔體 200,的一真空接頭21〇上，且提供一大氣側j與一真空側jj 之間的電性引入，該真空接頭21〇具有一凸緣22〇、一設置 在該凸緣220的定位面230、一自該定位面230凹設的卡槽 240及一與該定位面230相反的第一斜面250，該夾具300 具有互相柩接的一第一、二夾板31〇、32〇及一可使該第一 一夾板310、320活動端靠合連結的鎖桿330，該第一、 二夾板310、320可共同界定出一供該凸緣22〇及真空電引 入裝置100嵌套的扣槽340。 該真空電引入裝置1〇〇包含一定位座1〇、一固設在該 疋位座10外部的承座20、一安裝在該定位座1〇與該承座 201137915 2 0之間的防漏彳生, 属件30及多數呈氣密地穿設在該定 的傳輸桿40。 M 1〇 Τ 一本實細例的^位座1G是以可财高低溫（-27G〜285°C )、 耐腐蝕之鐵氟龍（她η)材質製成圓形塊狀，並 的外相鄰於該真空側11的内側面U ' 一相鄰於該大氣側 I的外側面12、 入 一人▲―，丨於該内、外側面η、12之間的凸環部 八；丨於5亥凸環部13與該内側面11之間的内環槽14' "於該凸％部13與該外側面12之間的外環槽15、一介 :該内側面11與該内環槽14之間且抵靠在該定位面230的 面16、一自命# 目"亥鳊面ΐό凸設且嵌套在該卡槽24〇中的凸台 17及夕數貫穿該内、外側® 11、12的穿孔18。該凸環部 13具有一呈階級狀的外周® 19 ’該外周面19呈有一鄰近 槽 的小徑部19i、一鄰近該外環槽15的大徑部 2及：銜接在該小、大徑部191、192之間的環肩部193 4由—垂直銜接於該端面Ιό的内平直段141、 垂直銜接在該内平直段141的内側肩段142所界定而成 〇 /亥承座2G明性佳之金屬材質製成中空環圈狀，在本 實知例中採用*錄鋼，且迫固在該定位座10外部，並具有 套叹在該外環槽15中的底盤部21、—由該底盤部21周 緣/〇軸向延伸而成的環壁22及一設於該環壁22且與該外 周面19相對的内環面23。該底盤部21對應於該凸緣咖 ，並具有一與該第一斜面250相反的第二斜面211，該凸 220的第一极二， 深 ^斜面25〇與該承座2〇的第二斜面211抵靠在該 201137915 扣槽340的二相對槽壁面，該内環面23呈階級狀，並具有 一套合在該小徑部19ι的縮徑部231、一對應該大徑部192 的擴徑部232及一銜接在該縮徑部231與該擴徑部232之 間且抵止在該環肩部193的抵靠部233，該縮徑部23ι具有 一延伸至該内環槽14中段的末端緣234。且本實施例的大 徑部192是以迫套方式通過該縮徑部231 ’且利用該凸環部 13抵靠在該底盤部21、該抵靠部233嵌制在該環肩部^3 上’使得該承座20穩固結合在該定位座丨〇上。201137915 六发发# Description: [Technical field to which the invention pertains] The present invention relates to a component for a vacuum apparatus, and more particularly to a vacuum electric induction device. [Prior Art] As shown in Fig. 1, a conventional one utilizes The clamp 102 is mounted on a vacuum connector 1 of the vacuum chamber 1 to provide a signal or power transmission between the atmosphere side I and a vacuum side, including an outer tube 2 and a solder joint. a mounting plate 3 inside the outer tubular member 2, a plurality of ceramic tubes 4 sintered and fixed on the mounting plate 3, a plurality of metal transfer rods 5 sintered and fixed in the ceramic tubes 4, and a seal disposed on the vacuum joint A sealing unit 6 between the outer tube 2 and the outer tube 2. The outer tubular member 2 has a flange end portion 2 opposite to the vacuum joint 101 and a partition 202 disposed in the flange end portion 2''. Although the vacuum electric induction device can achieve the intended electrical introduction purpose, the following defects are still missing: 1. The mounting plate 3 and the ceramic tubes 4, the ceramic tubes 4 are connected to the metal transfer rods 5 At the same time, it must be fixed by sintering, and the sintering is so south that there is a process difficulty, a troublesome manufacturing assembly, and a high cost. 1. The length of the outer member 2 is long, so that the vacuum electric introduction device has a long overall length and occupies an installation space. 2. The sealing unit 6 is composed of a ring-shaped ring 601 and a positioning member 602, and has a high cost. As shown in FIG. 2, another vacuum electric power introducing device, which also includes 201137915, has an outer tubular member 2, and is integrally fixed to the outer tubular member 2, the inner mounting plate 3, and most of the sintering is fixed on the mounting plate 3. 4, a plurality of metal transfer rods 5 fixed in the phase tube 4, and a sealing unit 6 sealed between a vacuum joint 10 and the outer tube 2. This kind of true* electric introduction =: The vacuum electric induction device of the figure is basically the same, only: length and Z way and figure! Slightly different, it is mainly suitable for introduction as a thermocouple, and it also has a deletion as shown in Fig. 1. SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum electric power introducing device which is simple in process, easy to manufacture, and which can reduce manufacturing cost. The vacuum electric induction device of the present invention is suitably mounted on a vacuum chamber vacuum joint and provides an atmospheric side and a vacuum chamber: the vacuum electric induction device includes a positioning seat, and is fixed on the fixing member: an installation A leakage preventing rod between the positioning seat and the socket is disposed through the transmission rod in the positioning seat. The positioning seat can withstand pure temperature, high sorghum resistance, and pure resistance (4): on the inner side of the vacuum side, a pair of inner side grooves should have an outer side adjacent to the atmosphere side, the sorrow face and the majority penetrate Inner and outer sides = inner two: the outer circumference between the faces, and the time holes. The socket is in the form of an empty ring = outer ' and has a torus with the face. The leakage preventing member is located between the inner ring and the bearing seat, and is installed at the seat plate, the wide-rolling positioning seat and the vacuum joint socket and the positioning socket socket are kept airtight. The transmission rods are respectively airtightly disposed in the perforations of the positioning seat, and each has a middle portion of the length of 201137915, an inner side extending to the vacuum side, and a pair of outer sides to the atmospheric side. segment. The effect of the invention is that the positioning seat can be stably fixed on the S-vacuum joint by using the socket, and the transmission rods are tightly and stably penetrated between the vacuum side and the atmospheric side, which can not only be achieved The purpose of electric introduction is simple, the overall structure is simple, the manufacturing assembly is easy, the volume is small, and the manufacturing cost is further reduced. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the invention. Before the present invention is described in detail, it is to be noted that in the following description, similar elements are denoted by the same reference numerals. As shown in FIG. 3, FIG. 4 and FIG. 5, the first preferred embodiment of the vacuum electric power introducing device 1 of the present invention is a vacuum joint 21 which is mounted on a vacuum chamber 200 by means of a jig 3〇〇. And providing an electrical introduction between the atmosphere side j and a vacuum side jj, the vacuum joint 21 has a flange 22, a positioning surface 230 disposed on the flange 220, and a positioning surface 230 a recessed card slot 240 and a first inclined surface 250 opposite to the positioning surface 230. The clamp 300 has a first and second clamping plates 31〇, 32〇 and a first clamping plate 310, The movable end is coupled to the interlocking locking bar 330. The first and second clamping plates 310, 320 can collectively define a buckle groove 340 for the flange 22 and the vacuum electric lead-in device 100 to be nested. The vacuum electric lead-in device 1A includes a positioning seat 1 , a socket 20 fixed to the outside of the clamping seat 10 , and a leakage preventing device installed between the positioning seat 1〇 and the bearing 201137915 2 0 . The abutment, the member 30 and the majority are airtightly disposed on the fixed transfer rod 40. M 1〇Τ A practical example of the seat 1G is made of a high-low temperature (-27G~285°C), corrosion-resistant Teflon (her η) material, and is made of a circular block. An inner side surface U' adjacent to the vacuum side 11 is adjacent to the outer side surface 12 of the atmospheric side I, and a person ▲-, a convex portion 8 between the inner and outer side surfaces η, 12; An inner ring groove 14' between the convex ring portion 13 and the inner side surface 11 and an outer ring groove 15 between the convex portion 13 and the outer side surface 12, the inner side surface 11 and the inner ring The bosses 17 between the slots 14 and abutting against the face 16 of the positioning surface 230, and a boss 17 and a number of eves nested in the card slot 24 are penetrated through the inner and outer sides. Perforation 18 of ® 11, 12. The convex ring portion 13 has a stepped outer periphery® 19'. The outer peripheral surface 19 has a small diameter portion 19i adjacent to the groove, a large diameter portion 2 adjacent to the outer ring groove 15, and a small and large diameter The annular shoulder portion 193 4 between the portions 191, 192 is defined by an inner straight section 141 that is vertically connected to the end face, and an inner shoulder section 142 that is vertically connected to the inner straight section 141. The metal material of 2G is made of a hollow ring shape, and in the present embodiment, the steel is recorded and forced to be external to the positioning seat 10, and has a chassis portion 21 which is slid in the outer ring groove 15, a ring wall 22 extending from the circumference/〇 axial direction of the chassis portion 21 and an inner ring surface 23 provided on the ring wall 22 and opposed to the outer peripheral surface 19. The chassis portion 21 corresponds to the flange portion and has a second inclined surface 211 opposite to the first inclined surface 250. The first pole 2 of the protrusion 220, the deep slope 25 〇 and the second portion of the socket 2 The inclined surface 211 abuts against the two opposite groove wall surfaces of the 201137915 buckle groove 340. The inner ring surface 23 has a step shape and has a set of reduced diameter portions 231 and a pair of large diameter portions 192 which are combined with the small diameter portion 19i. The enlarged diameter portion 232 and an abutting portion 233 that is coupled between the reduced diameter portion 231 and the enlarged diameter portion 232 and abuts against the annular shoulder portion 193, the reduced diameter portion 23i has an extension to the inner ring groove 14 The end edge 234 of the middle section. The large diameter portion 192 of the present embodiment passes through the reduced diameter portion 231 ' in a sleeve manner, and the convex portion 13 abuts against the chassis portion 21 , and the abutting portion 233 is embedded in the ring shoulder portion 3 The upper part enables the seat 20 to be firmly coupled to the positioning seat.
該防漏件30是以橡膠材質製成環圈狀，且安裝在該内 環槽14中且位在該定位座1〇與該承座2〇之間並氣密地 抵靠在該真空接頭21()的定位面23〇、内側肩段M2、内平 直段141與該末端緣234之間，且提供該定位座與該真 空接頭21G套接處及較位座1〇與該承座20套接處保持 氣密。 該等傳輸桿40分別呈氣密地穿設在該定位座ι〇的穿 孔18中’並各具有一設置在該等穿孔18中的中段*卜一 伸設至該真空❹的内側段42、—對應該大氣側ι的外側 段43 —設置在該中段41與該内側段42銜接處且抵止在 該内側面卩的第—限位件44、—設置在該中段Μ與該外 侧段43銜接處的職部45及—㈣在該螺紋部μ且抵止 ^該外側® 12的第二限位件46。本實施例的傳輪桿扣的 第-限位件44呈凸緣狀，且與請41、内側段42 一體 成型，该第二限位件46為螺帽。 再如圖4及圖5所示，組配時，先將該承座2q迫固在 201137915 :亥疋位座1G外部，當該大徑部192以迫套方式通過該縮徑 ^彳％用該凸環冑13抵靠在該底盤部21、該抵靠部 =3甘入制在該&肩部193 i，可使該承座μ穩固結合在該 疋位座1〇上，接著，再將該防漏件30套設在該内環槽14 中，且將該等傳輸桿40安裝在該定位座10的穿孔18中， 並利用該等第—限位件44抵止在該内側面11、該等第二限 位件46«並抵止在料側面12，即可完成真 100整體的組裝。 再將組裝完成的真空電引裝置100利用該夾且300安 裝在該真空接頭21G的凸緣22G上，且利用該凸台17套設 在該卡槽24G巾，可使該真空電引裝置〖⑽相對於該真空 接頭㈣的徑向產生準確對位，再利用該防漏件30迫緊地 設置在該凸緣220㈣位面23()、内側肩段142、内平奸 ⑷與該末端緣234之間，可提供該定位座iq與該真空二 頭210套接處及妓位座1()與該承座2()套接處保持氣密 ，且利用該等傳輸桿4〇即可達到大氣们與真空側Π的真 空電性引入目的。 且相較於圖i及圖2之現有真空電引裝置 有下列優點： 〃 ^ 一、利用該定位座1G'該承座20、該防漏件3〇及該 等傳輸桿40所組成的整體結構簡單，各元件可以採用一= 車床進行加工’ 7L件之間完全不需要利用燒結固定以 工序簡單、製造組配容易，整體體積也 造成本。 積也】進而可降低製 201137915 一、該定位座10取代了圖1及圖2的外管件2、2， ^板3、3’及陶究管4、4，，不僅能提供該等傳輸桿4〇氣 被且穩固^位，且該定位座1Q長度小，料位座1〇_ 承座20組配後的總長度不大於該扣具細的厚度1 電引裝置整體長度亦小，不佔用安裝空間。 ^二 >三、利用該定位座10所設的内環槽14供該防漏件％ 套設定位，以及湘該凸台17嵌套在該卡槽_中，則可The leakage preventing member 30 is formed in a loop shape of a rubber material, and is installed in the inner ring groove 14 and located between the positioning seat 1 〇 and the socket 2 并 and airtightly abuts the vacuum joint. a positioning surface 23〇 of the 21(), an inner shoulder section M2, an inner straight section 141 and the end edge 234, and providing the positioning seat and the vacuum joint 21G socket and the positioning seat 1〇 and the socket The 20 sets of joints remain airtight. The transmission rods 40 are respectively airtightly disposed in the through holes 18 of the positioning seat ι' and each have a middle portion disposed in the through holes 18 and extended to the inner side portion 42 of the vacuum raft. The outer section 43 corresponding to the atmospheric side ι is disposed at the junction of the middle section 41 and the inner section 42 and abuts against the inner side 卩, and is disposed at the middle section 衔 and the outer section 43 The job portion 45 and (4) at the thread portion μ and the second limit member 46 of the outer side 12 are abutted. The first limiting member 44 of the transmission lever of the embodiment has a flange shape and is integrally formed with the inner portion 42 and the inner portion 42. The second limiting member 46 is a nut. As shown in FIG. 4 and FIG. 5, when the assembly is performed, the socket 2q is first fixed to the outside of the 201137915: the seat 1G, and the large diameter portion 192 is passed through the reduced diameter by the sleeve. The convex ring 13 abuts against the chassis portion 21, and the abutting portion=3 is inserted into the & shoulder portion 193i, so that the socket μ can be firmly coupled to the clamping seat 1〇, and then, The leakage preventing member 30 is sleeved in the inner ring groove 14 , and the transmission rods 40 are mounted in the through holes 18 of the positioning seat 10 , and the first and second limiting members 44 are used to resist the inside. The side surface 11, the second limiting member 46« and the material side surface 12 are arranged to complete the assembly of the true 100. The assembled vacuum electric drawing device 100 is mounted on the flange 22G of the vacuum joint 21G by using the clamp 300, and the vacuum guiding device can be arranged by the bracket 17 in the card slot 24G. (10) accurately aligning with respect to the radial direction of the vacuum joint (4), and then using the leakage preventing member 30 to be tightly disposed on the flange 220 (four) plane 23 (), the inner shoulder section 142, the inner flat (4) and the end edge Between 234, the positioning seat iq and the vacuum two-end 210 socket and the socket 1 () and the socket 2 () socket can be kept airtight, and the transmission rod 4 can be used. The purpose of introducing vacuum electricity into the atmosphere and the vacuum side is achieved. Moreover, compared with the prior art vacuum electric lead device of FIG. 1 and FIG. 2, the following advantages are obtained: 〃 ^1. Using the positioning seat 1G', the socket 20, the leakage preventing member 3〇 and the whole of the transmission rod 40 are integrated. The structure is simple, and each component can be processed by a lathe. 'There is no need to use sintering to fix the 7L parts. The process is simple, the manufacturing is easy to assemble, and the overall volume is also caused. The product can also be lowered to 201137915. 1. The positioning seat 10 replaces the outer tube parts 2, 2, ^3, 3' and the ceramic tube 4, 4 of Fig. 1 and Fig. 2, and can provide not only the transmission rods 4 Xenon is stabilized and the position of the positioning seat 1Q is small, the total length of the material seat 1〇_ bearing 20 is not more than the thickness of the buckle 1 The overall length of the electric lead device is also small, not Take up the installation space. ^2> Third, the inner ring groove 14 provided by the positioning seat 10 is used for setting the leakage preventing member, and the boss 17 is nested in the card slot _
省略圖^及圖2之密封單元6、6，較位件術，可降低製 造成本。 再如圖6所示，本發明第二實施例與第一實施例大致 相同’差異處在於：該等傳輸桿4G，的該中段41，與該内側 段42,銜接處具有一第一螺紋部451，、該中段41，與該外側 段43’銜接處具有一第二螺紋部4兄，，該第一、二限位件 44’、46’均為螺帽，分別螺設在該第一、二螺紋部45丨，、 452’上，且該定位座10,對應該等穿孔18，處，更具有多數 由該内側面11，凹設的凹槽m，，且該等凹槽m，中各安裝 -供該等第-限位件44,氣密抵制的〇形環112，，利用該第 一、二限位件44,、46,分別螺設在該第一、二螺紋部451， 、452上，並分別抵止在該定位座i 〇，的内、外側面i 1，、 12’，以及該等〇形環112,的設置，亦可達到與第一實施例 相同的目的及功效。 值得一提的是’本發明上述實施例中的定位座與該 承座20的固定方式是採用階級卡制，但也可利用緊配合方 式取代。另外，當該等傳輸桿4〇、4〇,以緊配合方式穿過該 201137915 等穿孔is、18，時，則該等第一限位件44、44，、第二限位 件46、46,也可省略。 准以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是現有-種真空電引入裝置的組合剖面圖； 圖2是現有另一種真空電引入裝置的組合剖面圖； 圖3是一立體分解圖，說明本發明真空電引入裝置的 —第一較佳實施例； 圖4是本發明上述較佳實施例之一組合剖面圖，說明 真空電引人裝置氣密地設置在—大氣側與—真空側之間； 圖5是圖4的局部放大示意圖；及 圖6疋本發明真空電引入裝置的—第二較佳實施例的 組合剖面圖*The sealing units 6 and 6 of Fig. 2 and Fig. 2 are omitted, and the positional parts can be reduced to reduce the manufacturing cost. As shown in FIG. 6, the second embodiment of the present invention is substantially the same as the first embodiment. The difference is that the middle portion 41 of the transmission rod 4G and the inner portion 42 have a first thread portion at the joint. 451, the middle section 41, and the outer section 43' at the junction has a second threaded portion 4 brother, the first and second limiting members 44', 46' are nuts, respectively screwed in the first The two threaded portions 45A, 452', and the positioning seat 10, corresponding to the perforations 18, have a plurality of recesses m, which are recessed by the inner side surface 11, and the grooves m, Each of the first and second threaded portions 451 is respectively screwed to the first and second threaded portions 451 by the first and second limiting members 44, 46, respectively. , 452, and respectively, the inner and outer sides i 1, 12' of the positioning seat i 〇, and the arrangement of the 〇 ring 112, can also achieve the same purpose as the first embodiment And efficacy. It is worth mentioning that the fixing manner of the positioning seat and the socket 20 in the above embodiment of the present invention is a class card, but it can also be replaced by a tight fitting method. In addition, when the transmission rods 4〇, 4〇 pass through the perforations is, 18, such as 201137915, the first limiting members 44, 44, and the second limiting members 46, 46 Can also be omitted. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a combined sectional view of a conventional vacuum electric induction device; FIG. 2 is a combined sectional view of another conventional vacuum electric induction device; FIG. 3 is an exploded perspective view showing the vacuum electric induction of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 4 is a cross-sectional view showing a combination of the above preferred embodiment of the present invention, illustrating that the vacuum electric drawing device is hermetically disposed between the atmosphere side and the vacuum side; 4 is a partially enlarged schematic view of the second preferred embodiment of the vacuum electric induction device of the present invention;
10 20113791510 201137915
【主要元件符號說明】 100 .··· …真空電引入裝置 233 ···· 抵罪。P 10…… …定位座 234 ··.· …末端緣 11…… …内側面 30…… …防漏件 12…… _…外側面 40…… …傳輸桿 13…… …凸環部 41…… …中段 14…… …内環槽 42…… …内側段 141 ···. …内平直段 43…… …外側段 142 ··.· …内側肩段 44…… …第一限位件 15…… …外環槽 45…… •…螺紋部 16…… …端面 46…… …第二限位件 17…… …凸台 300… …夾具 18…… …穿孔 200… •…真空腔體 19…… …·外周面 210… •…真空接頭 191… •…小徑部 220… …·凸緣 192… …·大徑部 230… •…定位面 193… •…環肩部 240… -----^槽 20…… •…承座 250… •…弟 斜面 21…… •…底盤部 I ·... •…大氣側 211… •…第二斜面 Π ··.·· …·真空側 22····. …·環壁 310… —第 爽板 23••… •…内環面 320… •…第二夾板 231… •…縮徑部 330… …·鎖桿 232… •…擴徑部 340… …·扣槽 11 201137915 10, ···. …定位座 41，·.··· …中段 11,..... …内側面 42,··.·· …内側段 111，… …凹槽 43, …外側段 112,… …0形環 44,···.· …第一限位件 12, ···. …外側面 451，… …第一螺紋部 18, ···· …穿孔 452，. …第二螺紋部 4〇,…· …傳輸桿 46,..... …第二限位件[Explanation of main component symbols] 100 ........ Vacuum electric induction device 233 ···· Convicted. P 10...... ... positioning seat 234 ···· ...end edge 11 ... ... inner side surface 30 ... ... leakage preventing member 12 ... _ ... outer side surface 40 ... ... transmission rod 13 ... ... convex ring portion 41 ... ... middle section 14 ... ... inner ring groove 42 ... inner side section 141 · · · · ... inner straight section 43 ... ... outer section 142 · · · · ... inside shoulder section 44 ... ... first limiter 15... ...outer ring groove 45... •...thread portion 16...end face 46...the second limit member 17...the boss 300...the clamp 18...the perforation 200...the vacuum chamber 19... ... outer peripheral surface 210... • vacuum joint 191... • small diameter portion 220... flange 192... large diameter portion 230... • positioning surface 193... • ring shoulder 240... ---^槽20...... •...seat 250... •...Young bevel 21... •...Chassis part I ·... •...Atmospheric side 211... •...Second slope Π ·······vacuum Side 22····. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . •...Enlarged diameter part 340...··Retaining groove 11 201137915 10, ···. ... positioning seat 41, ·····... middle section 11, ........ inner side surface 42, ..... Segment 111, ... groove 43, ... outer segment 112, ... 0 ring 44, ..... ... first limiting member 12, ........ outer side surface 451, ... first thread portion 18 , ···· ...perforation 452,....the second threaded portion 4〇,...·transfer rod 46,.....the second limit member
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