201134545 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種還原反應器，詳細而言，是有關 於一種縱型還原反應器。 【先前技術】 作為先前成為太陽電池用矽的原料的多晶矽的代表 性的製造法’可列舉西門子法（Sieinens method )。利用西 門子法所製造的多晶矽的純度極高。然而另一方面，西門 子法的反應速度慢，且製造設備的運轉為分批式，因此產 品價格高’作為期望廉價的販賣價格的太陽電池用多晶矽 的製造法不適合。 近年來’作為可比西門子法更廉價地進行製造的多晶 石夕製造法’提出了利用金屬鋅還原四氣化矽而製造高純度 多晶矽的鋅還原法。 例如’專利文獻1 (曰本專利第42〇〇7〇3號）中，揭 不了如下方法：使高純度四氣化矽及高純度鋅分別氣化， 在900°C〜U〇〇°C的氣體環境下進行反應時，在反應器内 部設置可通電的矽芯或鈕芯，促進矽析出在芯上，反應結 束後將反應器開放，並取出所生成的針狀及薄片狀矽。 另外，專利文獻2 (曰本專利特開2〇〇7_223822)中， 揭示了如下多㈣製造裝置：使用具有設置在上部的氣化 矽氣體供給喷嘴、還原劑氣體供給喷嘴、及排氣氣體抽出 管的縱型反應器，向上述反應器内供給氣化矽氣體與還原 劑氣體，藉由氣化矽氣體與還原劑氣體的反應，而在氣化 4 201134545 矽氣體供給喷嘴的前端部生成多晶矽’進一步在上述狀態 下向下方成長。 為了使包括上述内容的先前公開的用以利用鋅還原 法製造矽的反應器耐受800eC〜1200°C的高溫，且防止所 生成的多晶矽的污染，在大部分的反應器中採用了石英構 件。 另外，考慮到製作的容易度、反應器内部的反應氣體 的均勻流動性、反應器内部的溫度分佈均勻牲等，反應器 通常使用圓筒形狀的石英管。 另外，目前所製造的石英管的直徑由於製造上的限制 而最大為1000 mm。 因此’在上述利用鋅還原法的多晶矽的製造中，製造 裝置的大小即生產能力受到石英管的直徑的限制，因此為 了增大多晶矽製造工廠的生產能力，只有藉由增加目前被 s忍為是最大的直徑約1〇〇〇 mm的石英管反應器的數量的 方法。 此處，在認為太陽電池用多晶矽的需求今後越來越大 的狀況下，期待可廉價地進行製造的多晶矽的大型製造裝 置的實現。 先前技術文獻 專利文獻 專利文獻1 :曰本專利第4200703號 專利文獻2 :日本專利特開2007_223822號公 【發明内容】 201134545 ，本發明的目的在於提供一種在利用鋅還原的多晶矽 的製造裝置中，不增加石英管反應器的數量便可大幅提高 製造能力的還原反應器。 用以實現上述目的之本發明的還原反應器是在反應 器本體内的反應部中利用金屬鋅還原四氯化矽而製造多晶 梦5其特徵在於： 準備多個將石英管沿軸方向分割而成的縱剖式分割 體，並且將上述多個縱剖式分割體對接，藉此構成剖面為 大致花瓣狀的反應部。 根據上述構成’可構成比所使用的石英管的直徑更大 型的還原反應器。 此處，本發明中較佳為，構成一個反應部的上述縱剖 式分割體可為3個〜8個。 另外，本發明中較佳為，構成一個反應部的上述縱剖 式分割體為4個。 ° 根據上述構成的還原反應器，可製成形狀平衡良好且 使用方便性良好的還原反應器。 而且，本發明中較佳為，由上述多個縱剖式分割體所 構成的剖面為大致化瓣狀的反應部在上下方向上堆積配置 2段〜5段。 根據上述構成，可製成所需容量的縱型還原反應器。 另外’本發明中較佳為，上述多個縱剖式分割體分別 藉由黏接劑而與其圓周方向及/或其上下方向上鄰接的縱 剖式分割體相接合。此時，較佳為調整縱剖式分割體的對 6 201134545 接面的角度’以便可將圓周方向上鄰接的縱剖式分割體彼 此對接。 而且’本發明巾較佳為’上述黏接劑是將二氧化 氧化鋁作為主成分。 / +另外本案發明中較佳為，在上述反應部的外周部介 隔著加強用的按壓構件。 如上所述，藉由將按壓構件介隔在外周部，可防止自 接合部的洩漏及破損。 [發明之效果] 根據本發明的還原反應器，與先前由石英管所構成的 圓筒形狀的反應器相比，可更大地設定反應部的容積，因 此可製成可大幅提高製造能力的大型還原反應器。 為讓本發明之上述特徵和優點能更明顯易懂，下文特 舉實施例，並配合所附圖式作詳細說明如下。 【實施方式】 以下，一邊參照圖式，一邊說明本發明。 圖1是表示本發明一實例的大型還原反應器2的製作 過程中的概略模型的立體圖。另外，圖2是表示本發明的 還原反應器2的整體構成的構成圖。 上述還原反應器2中，在反應器本體2a的内部兩個 反應部10、20上下連通。另外，在反應器本體2a的腳部 設置著圓盤狀且由耐火物所構成的承載構件4,在反應器 本體2a的上部設置著石英制的頂板8。 頂板8及承載構件4是暫時用於還原反應器2的製作 201134545 過程中，冑了使還原反應ϋ 2製成為SΜ製造用的還原 反應器2 ’如圖2所示，在反應器本體2a的上部設置四氯 化石夕氣體供給管14與鋅氣體供給管12，並在反應器本體 2a的下部設置排氣出口部16與多晶矽回收部18。 如下所示’上述反應器本體2a的反應部10、20是由 將石英管分割為多個而成的縱剖式分⑽所構成。 如圖3 (A)、（B)所示’構成各反應部1〇、20的縱 剖式分割體是II由將圓筒狀的^英管沿轴方向（縱方向） 對半分割而成的半割體6a，例如在圓周方向上組合4個而 構成。另外，上述分割體無須完全為一半的半割體。例如， 也可為藉由T述方式獲得的分龍：關於圓筒沿轴方向分 割的切割線’以通過圓筒中心的與直徑平行的兩條直線來 代替通過_中心的直線（圖3 (Β)的型態）進行切斷。 如上所述，以兩條直線進行切斷而獲得的分割體成為比圖 3 (Β)所不的分割體稍小的剖面為大致圓弧狀（劣弧狀） 的兩個分割體。 另外，分割體也可由三分之一的分割體（剖面為劣弧 狀）等而非二分之一的分割體所形成。因此，本發明中的 分割體包括將圓筒以軸方向的直線一分為二的半割體、或 者比其稍小的大致圓弧狀的半割體、以及三分割體、四分 割體等。然而，實際上使用半割體或大致圓弧狀的半割體。 總之，只要藉由以構成大致花瓣狀的反應部的方式組 合上述多個分割體，而設定為比切斷之前的圓筒的剖面積 更大即可。 8 201134545 另外’關於石英管的直徑及長度，例如使用直徑為800 mm〜1050 mm(較佳為 850 mm〜950 mm)、長度為 800 mm 〜2000 mm的石英管，但本發明並不限定於此。另外，石 英管的壁厚為1〇 mm〜35 mm (較佳為20 mm〜30 mm)， 但本發明並不限定於此。 μ本實例中，如圖3 (A)、（B)所示，預先準備兩組將 圓筒狀例如直徑約900 mm、長度1000 mm的石英管6沿 軸方向分割為兩個而成的縱剖式分割體6a、6a。接著，將 上述4個縱剖式分割體6a如圖4所示般彼此在圓周方向上 對接，藉此分別形成花瓣狀的反應部10或反應部20。另 =卜’構成反應部1〇或反應部2〇的縱剖式分割體如的連接 部較佳為藉由碎轉接劑進行接合。此時，較佳為調整 縱剖#分割體的對接面的角度’以便可將圓周方向上鄰接 的縱剖式分割體6a、6a彼此對接。 作為;5英_接劑，較佳為選擇具有雜性，在反應 ^又下相對於石英玻璃不會成為失透原因，且具有與石^ ^目Ϊ程度的熱膨脹係數的二氧化石夕或氧化链作為主成分 =接劑°而且，也可藉由添加石英棉（silieawool)或石 央璃珠作為添力口劑而提高黏接劑的強度。 一 構件3上:Γ所示的承載構件4作為基台，在該承載 的上°卩將經一體化的上述兩個反應部10、20沿上 為藉另外’反應部1〇、2〇彼此的接合部也較佳 2^- ^隋况相同的黏接劑而彼此接合。而且，如圖 不’在反絲本體2a的最上部設置四氣切氣體供給 201134545 管I4及鋅氣體供給管12,在反應器本體 氣出口部16及多晶石夕回收部 乂二置: 狀的還原反應器2。 魏面大致化瓣 藉此’上述實例中所得的還原反應器2的反應器本體 2^僅使用圓筒，石英f的情況相比，可更大地設定剖 面積即反應部的容積。 ，此，本發明中，可構成比目前認為是最大級的直經 為1000mm的石英反應器更大型的石英反應 以上，對本發明·《實例的還原反應^進行了說明， 但本發明的還原反應器並不受上述實例任何限定。 例如，上述實例中’在構成一個反應部1〇或反應部 2〇時，分別使用4個縱剖式分割體6a而構成一個反應部 10或20’且將上述多個縱剖式分割體6a重合為上下兩段， 但本發明並不限定於此％縱剖式分割體6a的圓周方向的組 合個數或反應部的上下方向的重疊段數可考慮確保耐受 800C〜1200°C的高溫的強度而進行適當選擇。本發明中， 在分割體6a為半割體的情況下，組合3個〜8個上述縱剖 式分割體6a而形成一個反應部，且重合2段〜5段上述反 應部，藉此可形成一個連通的反應管。若在上述範圍内， 則可在800°C〜120〇t的高溫下充分保持氣密性及強度。 作為一例，使用4個將直徑為900 mm、長度為1000 mm的石英管沿縱方向切斷而成的縱剖式分割體如，製作 2個利用黏接劑將上述縱剖式分割體6a接合而成的剖面為 花瓣型的反應部後，將上述反應部重合為兩段並進行接 201134545 中的最大 合’而製成反應器本體2a。上述反應器本體2& 部分的直徑為約1650 mm = 時的ΐ二:二I個與"1 述情況相同的縱剖式分割體6a 時的直位為約126〇mm，其剖面積為上述石 的約。另外，使用8個縱剖式分割體6 約邏麵，其剖面積為上述石英管的剖面積的約1〇 4ζ為 在上述反應器本體2a的上部安裝還原用的 ° 給管12與原料的讀化錢體供給冑14，且在反二= 體2a的下部安裝作為反應排氣的氣化鋅氣 ^ 部16,而完成還原反應器2。 F礼出口 广使用上述還原反應器2’自反應器本體2a的上部供給 鋅氣體及四氣化魏體，並在1G()(rc下反應6小時而製造 多晶矽。還原反應器2在反應中無氣體洩漏，且氣密性良 好，耐壓、耐熱強度也充分。 ^ 另外為了維持反應器本體2a的強度，也可利用由 多個陶瓷（ceramics)或石英等所構成的按壓構件等，對 反應器本體2a的外側周圍（4處相當於花瓣型的瓣尖部的 部分）自外侧進行按壓，而加強反應器本體2a。 若將上述按壓構件設置成圍繞反應部1〇的周圍，則 也可用作將反應部1〇重合為多段時的支架，藉此可容易地 進行重合作業。 雖然本發明已以實施例揭露如上’然其並非用以限定 本發明，任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍内，當可作些許之更動與潤飾，故本 11 201134545 發明之保護範菌當視後附之申請專利範®所界定者為準。 【圖式簡單說明】 圖1是表示本發明一實例的還原反應器的製作過程的 概略立體圖。 圖2是表示本發明的選原反應器的整體構成的構成 圖。 凡 叫^疋取小固上的還原反應器中 管的分割前的狀態的立體圖，圖3⑻是將圖,用的石 應器中所採用的石英管沿軸古 圖1的還原, 的立體圖》 肖分割而成的縱剖式分如 圖4是表示圖3 (B) 態的立體圖。 所示的縱剖式分割體的組裝狀 【主要元件符號說明】 2 :還原反應器 2a :反應器本體 4:承載構件 6 :石英管 6a :分割體 8 =頂板 W、20 :反應部 12 :鋅氣體供給管 14 :四氣化矽氣體供給管 16 :排氣出口部 18 :多晶矽回收部 12201134545 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a reduction reactor, and more particularly to a vertical reduction reactor. [Prior Art] As a representative manufacturing method of polycrystalline germanium which has been a raw material for tantalum for solar cells, the Siemens method (Sieinens method) is exemplified. The purity of polycrystalline germanium produced by the Siemens method is extremely high. On the other hand, however, the reaction rate of the Siemens method is slow, and the operation of the manufacturing equipment is batch-type, so that the product price is high, and the manufacturing method of the polycrystalline silicon for solar cells, which is expected to be inexpensive, is not suitable. In recent years, 'the method of producing polycrystalline silicon which is cheaper to manufacture than the Siemens method' has proposed a zinc reduction method for producing high-purity polycrystalline germanium by reducing zinc hydride by metal zinc. For example, in Patent Document 1 (Japanese Patent No. 42〇〇7〇3), the following method is not disclosed: high-purity four-gas bismuth and high-purity zinc are separately vaporized at 900 ° C to U 〇〇 ° C When the reaction is carried out in a gas atmosphere, a core or a button core which can be energized is provided inside the reactor to promote the precipitation of the ruthenium on the core. After the reaction is completed, the reactor is opened, and the resulting needle-like and flaky ruthenium is taken out. Further, in the patent document 2 (Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The vertical reactor of the tube supplies the vaporized helium gas and the reducing agent gas into the reactor, and generates polycrystalline silicon at the front end portion of the gasification nozzle of the gasification 4 201134545 by the reaction of the vaporized helium gas and the reducing agent gas. ' Further grows below in the above state. In order to withstand the high temperature of 800 eC to 1200 ° C of the previously disclosed reactor for producing ruthenium by the zinc reduction method including the above, and to prevent contamination of the generated polycrystalline ruthenium, a quartz member is employed in most of the reactors. . Further, in consideration of easiness of production, uniform fluidity of the reaction gas inside the reactor, uniform temperature distribution inside the reactor, etc., the reactor usually uses a cylindrical quartz tube. In addition, the diameter of the quartz tube currently manufactured is up to 1000 mm due to manufacturing limitations. Therefore, in the production of the polycrystalline silicon using the zinc reduction method described above, the size of the manufacturing apparatus, that is, the production capacity, is limited by the diameter of the quartz tube. Therefore, in order to increase the production capacity of the polycrystalline silicon manufacturing plant, only by increasing the current The method of the maximum number of quartz tube reactors with a diameter of about 1 〇〇〇 mm. Here, in the case where the demand for polycrystalline silicon for solar cells is expected to increase in the future, a large-scale manufacturing apparatus for polycrystalline silicon which can be manufactured at low cost is expected. PRIOR ART DOCUMENT Patent Document Patent Document 1: Japanese Patent Publication No. 4200703 Patent Document 2: Japanese Patent Laid-Open No. Hei. No. 2007-223822. A reduction reactor which can greatly increase the manufacturing capacity without increasing the number of quartz tube reactors. The reduction reactor of the present invention for achieving the above object is a method for producing polycrystalline dreams by reducing zinc tetrachloride by using metal zinc in a reaction portion in a reactor body, characterized in that: preparing a plurality of quartz tubes in the axial direction The longitudinal section-shaped divided body is formed by abutting the plurality of longitudinal sectional divided bodies to form a reaction portion having a substantially petal shape in cross section. According to the above configuration, a reduction reactor having a larger diameter than that of the quartz tube to be used can be constructed. Here, in the present invention, it is preferable that the longitudinal sectional divided bodies constituting one reaction portion are three to eight. Further, in the present invention, it is preferable that the number of the longitudinal sectional divided bodies constituting one reaction portion is four. ° According to the reduction reactor having the above configuration, a reduction reactor having a good shape balance and good usability can be obtained. Further, in the present invention, it is preferable that the reaction portions having the substantially lobed cross section formed by the plurality of longitudinal sectional divided bodies are stacked in the vertical direction in two to five stages. According to the above configuration, a vertical reduction reactor having a desired capacity can be obtained. Further, in the present invention, it is preferable that the plurality of longitudinal sectional divided bodies are joined to each other in the circumferential direction and/or in the vertical direction thereof by an adhesive. At this time, it is preferable to adjust the angle ' of the joint of the 6 201134545 of the longitudinal sectional type divided body so that the longitudinally-divided divided bodies adjacent in the circumferential direction can be butted against each other. Further, the present invention preferably has the above-mentioned binder as the main component of alumina. Further, in the invention of the present invention, it is preferable that a pressing member for reinforcement is interposed in the outer peripheral portion of the reaction portion. As described above, by separating the pressing member from the outer peripheral portion, leakage and breakage of the self-joining portion can be prevented. [Effects of the Invention] According to the reduction reactor of the present invention, the volume of the reaction portion can be set larger than that of the cylindrical reactor previously composed of a quartz tube, so that a large-scale manufacturing capacity can be greatly improved. The reactor was reduced. The above described features and advantages of the present invention will become more apparent from the description of the appended claims. [Embodiment] Hereinafter, the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a schematic model of a large-scale reduction reactor 2 according to an example of the present invention. In addition, Fig. 2 is a configuration diagram showing the overall configuration of the reduction reactor 2 of the present invention. In the reduction reactor 2, the two reaction portions 10, 20 in the reactor main body 2a communicate vertically. Further, a load member 4 having a disk shape and composed of a refractory is provided on the leg portion of the reactor body 2a, and a top plate 8 made of quartz is provided on the upper portion of the reactor body 2a. The top plate 8 and the load-bearing member 4 are temporarily used in the production of the reduction reactor 2 in the process of 201134545, and the reduction reactor 2 is made into a reduction reactor 2' for the production of S?, as shown in Fig. 2, in the reactor body 2a. The silicon tetrachloride gas supply pipe 14 and the zinc gas supply pipe 12 are disposed in the upper portion, and the exhaust gas outlet portion 16 and the polysilicon recovery portion 18 are provided in the lower portion of the reactor main body 2a. The reaction portions 10 and 20 of the reactor main body 2a described above are constituted by a longitudinal section (10) in which a plurality of quartz tubes are divided into a plurality of sections. As shown in Fig. 3 (A) and (B), the vertical sectional type divided body constituting each of the reaction portions 1 and 20 is divided into half by dividing the cylindrical tube in the axial direction (longitudinal direction). The half-cut body 6a is configured by, for example, combining four in the circumferential direction. In addition, the above-mentioned divided body does not need to be completely half of the half-cut body. For example, it is also possible to obtain a split dragon obtained by the method of T: a cutting line divided in the axial direction of the cylinder to replace the straight line passing through the center with two straight lines parallel to the diameter of the center of the cylinder (Fig. 3 (Fig. 3 The type of Β) is cut off. As described above, the divided body obtained by cutting in two straight lines is a two-folded body having a slightly smaller cross-section (inferior arc shape) than the divided body which is not shown in Fig. 3 (Β). Further, the divided body may be formed of one-third of the divided body (the cross section is inferior arc shape) or the like instead of one-half of the divided body. Therefore, the divided body according to the present invention includes a half-cut body in which a straight line of the cylinder is divided into two in the axial direction, or a substantially circular-shaped half-cut body slightly smaller than the straight line, and a three-part body, a four-part body, and the like. . However, a half-cut or a substantially circular-shaped half-cut is actually used. In short, the plurality of divided bodies are combined in such a manner as to form a substantially petal-shaped reaction portion, and the cross-sectional area of the cylinder before cutting is set to be larger. 8 201134545 In addition, regarding the diameter and length of the quartz tube, for example, a quartz tube having a diameter of 800 mm to 1050 mm (preferably 850 mm to 950 mm) and a length of 800 mm to 2000 mm is used, but the present invention is not limited thereto. this. Further, the wall thickness of the quartz tube is from 1 mm to 35 mm (preferably from 20 mm to 30 mm), but the present invention is not limited thereto. In the present example, as shown in FIGS. 3(A) and (B), two sets of cylindrical tubes, for example, a quartz tube 6 having a diameter of about 900 mm and a length of 1000 mm, which are divided into two in the axial direction, are prepared in advance. The split body 6a, 6a is divided. Then, the four longitudinal sectional divided bodies 6a are butted in the circumferential direction as shown in Fig. 4, whereby the petal-like reaction portion 10 or the reaction portion 20 is formed. Further, the connecting portion such as the longitudinal cross-section of the reaction portion 1 or the reaction portion 2 is preferably joined by a crushing agent. At this time, it is preferable to adjust the angle ' of the abutting faces of the longitudinal section #-divided body so that the longitudinally-divided divided bodies 6a, 6a adjacent in the circumferential direction can be butted against each other. 5 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The oxidized chain is used as the main component = the bonding agent. Moreover, the strength of the bonding agent can also be improved by adding quartz wool (silieawool) or stone central glass beads as a reinforcing agent. On a member 3, the load-bearing member 4 shown by Γ is used as a base, and the above-mentioned two reaction portions 10, 20 are integrated on the upper side of the load to borrow another 'reaction portion 1 〇, 2 〇 each other. The joints are also preferably joined to each other by the same adhesive. Further, as shown in the figure, the four gas cut gas supply 201134545 pipe I4 and the zinc gas supply pipe 12 are provided at the uppermost portion of the reverse wire main body 2a, and are disposed in the reactor main gas outlet portion 16 and the polycrystalline stone recovery portion: Reduction reactor 2. The surface of the reactor is substantially the same as that of the reactor body 2 of the reduction reactor 2 obtained in the above-mentioned example, and the volume of the reaction portion, that is, the volume of the reaction portion, can be set larger than in the case of the quartz f. Therefore, in the present invention, it is possible to constitute a larger quartz reaction than the quartz reactor having a maximum diameter of 1000 mm which is currently considered to be the largest, and the reduction reaction of the present invention is described, but the reduction reaction of the present invention is described. The device is not limited by the above examples. For example, in the above-described example, when one reaction unit 1〇 or the reaction unit 2〇 is configured, four longitudinal section split bodies 6a are used to form one reaction unit 10 or 20', and the plurality of longitudinal section split bodies 6a are formed. The superposition is the upper and lower two stages, but the present invention is not limited to the number of combinations of the longitudinal section split body 6a in the circumferential direction or the number of overlapping sections of the reaction unit in the up and down direction, and it is considered to ensure the high temperature of withstanding 800C to 1200 °C. The strength is chosen appropriately. In the present invention, when the divided body 6a is a half-cut body, three to eight longitudinal split-type divided bodies 6a are combined to form one reaction portion, and the reaction portions of two to five stages are superposed, thereby forming A connected reaction tube. When it is in the above range, the airtightness and strength can be sufficiently maintained at a high temperature of 800 ° C to 120 ° t. As an example, four longitudinally-divided divided bodies in which a quartz tube having a diameter of 900 mm and a length of 1000 mm is cut in the longitudinal direction are used, and two longitudinally-divided divided bodies 6a are joined by an adhesive. After the formed cross section is a petal-shaped reaction portion, the reaction portion is superposed into two stages and subjected to the maximum combination in 201134545 to form the reactor main body 2a. The reactor body 2& portion has a diameter of about 1650 mm = ΐ two: two I have the same vertical cross-section body 6a as in the case of "1, and the straight position is about 126 mm, and the sectional area thereof is The above stone is about. In addition, eight longitudinal section type split bodies 6 are used, and the cross-sectional area is about 1〇4ζ of the cross-sectional area of the quartz tube, and the lower portion of the reactor main body 2a is attached to the lower portion of the reactor tube 12 and the raw material. The money supply tank 14 is read, and the vaporized zinc gas portion 16 as the reaction exhaust gas is installed in the lower portion of the reverse second body 2a, and the reduction reactor 2 is completed. The F-export outlet widely uses the above-mentioned reduction reactor 2' to supply zinc gas and tetra-vaporized Wei body from the upper portion of the reactor body 2a, and reacts at 1 G () for 6 hours to produce polycrystalline germanium. The reduction reactor 2 is in the reaction. There is no gas leakage, and the airtightness is good, and the pressure resistance and the heat resistance are also sufficient. ^ In order to maintain the strength of the reactor main body 2a, a pressing member made of a plurality of ceramics or quartz may be used. The outer side of the reactor main body 2a (four portions corresponding to the petal-shaped apex portion) is pressed from the outside to reinforce the reactor main body 2a. If the pressing member is disposed to surround the reaction portion 1〇, It can be used as a scaffold when the reaction portion 1〇 is superposed into a plurality of stages, whereby the re-cooperation can be easily performed. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and it is common in any technical field. Those skilled in the art can make some changes and refinements without departing from the spirit and scope of the present invention. Therefore, the protection patents disclosed in this 2011 20114545 are defined by the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic perspective view showing a process of producing a reduction reactor according to an example of the present invention. Fig. 2 is a view showing a configuration of an overall configuration of a selective reactor of the present invention. A three-dimensional view of the state before the division of the tube in the reduction reactor on the small solid is taken, and Fig. 3 (8) is a perspective view of the quartz tube used in the stone reactor used in the reduction of the axis of Fig. 1 Fig. 4 is a perspective view showing the state of Fig. 3 (B). The assembled form of the longitudinal sectional divided body shown [Main element symbol description] 2: Reduction reactor 2a: Reactor body 4: Bearing member 6 : Quartz tube 6a : Split body 8 = Top plate W, 20 : Reaction portion 12 : Zinc gas supply pipe 14 : Four gasified helium gas supply pipe 16 : Exhaust gas outlet portion 18 : Polysilicon recovery portion 12