201132978 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於偵測一真空環境中之分子污染之 氣體分析系統’該糸統包括一泉送糸統，其係用於將氣^^ 從真空環境令輸送出去；一預濃縮裝置，其包括具有用於 接收一氣體樣本之一氣體入口及用於耦合至一栗送系統之 一氣體出口之一中空元件，該中空元件包括一吸收劑材 料0 本發明進一步係關於一種分析氣體以偵測一真空環境中 之分子污染之方法且係關於一種用於製造一預濃縮裝置之 方法。 【先前技術】 在先進的半導體製程中控制分子污染對於成功的製造^ 分關鍵。極短的波長（極紫外線，Euv; 13 5⑽）的使用坤 加光,學分解及隨後沈積在光學零件上的污染物。結果^ 產率損失、王具使用壽命_及長期裝置可靠性下降。因 此’、，對半導體製造設備中所使㈣子總成及零件的有機 物脫氣規格十分嚴格。 在真空或低壓環境中，报難果送足夠量的氣體穿過-偵 在此情況中’已知使用-預濃縮農置。在-預澳 細裝置中，在相對較長的 的夺間乾圍内收集分子污染。隨 後，在短時間間隔内釋放 分析中可決定分子污^收# “子1所釋放分子之 已头預/辰縮裝置之—實例係纷示於圖2卜該預濃縮 149194.doc 201132978 裝置為填滿吸收劑材料之— 中二官。可將填料床中的顆粒 之間的互聯開放空間視為鱼其 ，、具寺所填充入的裝置相比具有 小得多的有效直徑之大量的苯 . 里的毛細官。有效直徑的縮短導致 氣流的減少。在正常情沉φ，，山丁 —丄 中丨月况宁，故不存在問題。然而，當在 分子流或過渡流範圍（直空式★ 二次極低壓）中作業時，一降低的 有效直徑可能導致較大的門日自 ...v 的問4。由於分子流及過渡流範圍201132978 VI. Description of the Invention: [Technical Field] The present invention relates to a gas analysis system for detecting molecular pollution in a vacuum environment, which includes a spring system for gas ^^ is sent out from a vacuum environment; a preconcentration device comprising a hollow element having a gas inlet for receiving a gas sample and a gas outlet for coupling to a pump delivery system, the hollow element comprising a Absorbent Material 0 The present invention is further directed to a method of analyzing a gas to detect molecular contamination in a vacuum environment and to a method for making a preconcentration device. [Prior Art] Controlling molecular contamination in advanced semiconductor processes is critical to successful manufacturing. The extremely short wavelength (extreme UV, Euv; 13 5(10)) is used to add light, to learn to decompose and subsequently deposit contaminants on optical parts. Results ^ Loss of yield, service life of the king's _ and long-term reliability of the device. Therefore, the organic degassing specifications of the (4) sub-assemblies and parts in the semiconductor manufacturing equipment are very strict. In a vacuum or low-pressure environment, it is reported that a sufficient amount of gas is passed through - in this case 'known use-pre-concentrated farm. In the pre-Australian device, molecular contamination is collected in a relatively long intercropping. Subsequently, in the short-term interval release analysis, the molecular pre-existing device can be determined. The example of the pre-concentration device is shown in Figure 2. The pre-concentration 149194.doc 201132978 device is Filling up the absorbent material - the second official. The interconnected open space between the particles in the packed bed can be regarded as the fish, and the large amount of benzene with a much smaller effective diameter compared to the device filled with the temple The captain in the cap. The shortening of the effective diameter leads to the reduction of the airflow. In the normal situation, the mountain is in the middle of the mountain, and there is no problem. However, when in the molecular flow or transitional flow range (straight space In the case of the type ★ quadratic extreme low pressure), a reduced effective diameter may result in a larger gate day from ...v. 4. Due to molecular flow and transition flow range
中裝置及氣流的傳導性报大茲疮μ % + M U 寸守丨王偎大％度上取決於其必須流動穿過 的裝置的橫截面積，因此齑士 +、士 | U此^ /瓜大大減少。插圖繪示吸收劑 的顆粒及可將填料床φ ^ g斗 丹Tt木甲的顆拉之間的互聯開放空間視為與 其等所填充入的裝置相比具有小得多的有效直徑之大量毛 細管的路徑。因此在分子流或過渡流範圍中作業時，上述 預漠縮裝置在氣流方面存在嚴重問題。 【發明内容】 本發明之一目標係提供一種根據開篇段落之1體分析系 統，該系統能夠有效決定一真空或低壓環境中之分子污 染。 根據本發明之一第一態樣，此目標係藉由提供一種用於 偵測一真空環境中之分子污染之氣體分析系統而達成該 系統包括一泵送系統、一預濃縮裝置及—冷卻構件。該泵 送系統係提供以用於將氣體從真空環境中輸送出去。該預 濃縮裝置包括具有用於接收來自真空環境之一氣體樣本之 一氣體入口及用於耦合至該泵送系統之一氣體出口之一中 空元件’該中空元件之一内壁包括吸收劑顆粒之_塗層。 該冷卻構件係提供以用於冷卻該預濃縮裝置。 J49194.doc 201132978 根據本發明之氣體分析系統之有效性來自兩個重要的新 特徵之-組合。為了使該系統的傳導性最大化且為了維持 足夠氣流從精簡的壓力/真空系統穿過該預濃縮裝置，藉 由僅將此材料之顆粒附著至該裝置之該内壁而克服因吸： 有機化合物的吸收劑顆粒而形成的大阻礙。裝置傳導性的 提高使得足夠的氣體分子從精簡的壓力/真空環境輸送穿 過該預濃縮裝置。然而’單單僅藉由向該預漢縮裝置之兮 内壁施加吸收劑顆㈣增加該中空元件的有效直徑無法得 到所要的氣體分析系統改良。應藉由該濃縮裝置收集的許 夕刀子-穿過。亥中空元件而不被吸收至吸收劑顆粒上。因 此、’根據本發明之氣體分析系統進-步包括冷卻構件。該 冷:構件導致分子與該中空元件的壁上的吸收劑顆粒碰撞 二知耗吸附熱且藉此增加被内壁上的塗層截留吸收的機 率因此，本發明之目標係因該中空元件與吸收劑塗層及 該冷卻構件之組合而達成。 '較佳地，該預濃縮裝置包括1合至該冷卻構件之一冷 u入口及其中該冷卻構件係、經配置以提供—冷卻劑至 該預濃縮裝置。舉例而[可透過該中空元件中的冷卻槽 傳送液悲氮以從内邦 一冷部5亥預浪縮裝置。或者，可從該中 空管之外部冷卻該預濃縮裝置。 吕玄預濃縮裝置可；隹 jk ^ t 置了進一步包括用於實現該預濃縮裝置之清 、, L入口。用較佳的純氣體清洗對於在解吸附之 Ή斤有收集的污染物輸送至分析系統及/或在將其重新 用於進一步量測前清潔該預濃縮裝置十分重要。 149194.doc 201132978 較佳地，該氣體分析系統進—步包㈣於將—數量之已 知氣體引入至真空環J备& 1 = ' 兄中乂稭由泵送系統促進輸送氣體分 子之氣體^構件。在送线㈣少量污 染分子穿過該中空元件可能十分困難。若在系送之前或聚 送期間’將少量已知氣體引至真空環境，則可改良果送且 所有污染分子被收集的機率增大。「已知氣體」較佳為— 超純氣體，但可為具有_預定組成之—氣體混合物。 根據本發明之-另-隸，提供_種方法以使用根據本 發明之系統分析氣體債測一真空環境中I分子污染。 根據本發明之-另-祕，提供_種方法以製造一預濃 给目裝置以用於根據太蘇明夕 ^ mk ^ 很龈不明之一軋體分析系統。該方法包括 下列步驟：⑴提供—中空元件；⑴）冷卻該中空元件之至 少-部分；（iii)在該中空元件之被冷卻部分之—内壁上冷 凝-溶劑並使該溶劑固化；及㈣施加吸收劑顆粒至該中 空元件之被冷卻部分之該内壁。 較佳地’此方法進-步包括停止冷卻及蒸發多餘溶劑之 一步驟，且視需要亦包括移除未附著至該内壁之吸收劑顆 粒之一步驟。 可從下文所述之實施例瞭解並可參考下文所述之實施例 解釋本發明之此等及其他態樣。 【實施方式】 圖1示意地繪示根據本發明之一氣體分析系統1〇。該系 統10係用於偵測藉由已放置在—真空環境丨丨内之一測試物 件18而脫氣之分子。在所有描述中，詞真空係用於（近）真 149194.doc 201132978 空環境以及用於（極）低壓環境。一預濃縮裝置13係耦合至 該真空環境11。該預濃縮裝置13包括由可承受低溫以及高 /皿之材料製成之-中空管14。該中空管14之一開口端係耦 合至該真空環境11以接收待分析之氣體。例如，該中空管 14可由玻璃製成。該中空管14之内壁至少部分由一吸收劑 顆粒塗層15覆蓋。下文參考圖3及圖4更詳細地描述該塗層 15。-泵12係耦合至該中空管14之另一開口端以輸送待分 析的氣體穿過該中空管14。從一真空或極低壓環境u系送 分子極困難。可藉由提供一受控洩漏17至該真空環境丨^而 更使得輸送變得更簡單。當經由該受控茂漏添加—量的已 知氣體至該真空環境丨丨時，促進輸送氣體物種穿過該裝 置。當汽入氣體之數量及/或類型已知時，可針對此氣體 對量測結果之影響校正量測結果。 此外，該系統11包括用於冷卻該預濃縮裝置13或至少該 中空管14之被塗佈部分15之一冷卻構件16。可使用例如I 冷卻液體或一冷的氣體完成冷卻。舉例而言，可使用液態 氮。可從該中空管U之外部及/或從内部進行冷卻。塗= 15的冷卻大大提高塗層15的吸收性質及該預濃縮裝置n 時儲存待分析分子的能力。 在收集該預濃縮裝置丨3中的分子污染達一段時間後，分 析具有被吸收分子的塗層。料到最佳效能，該預濃縮裝 置13應使用較長的取樣時間。為達此目的，較佳藉由將一 已知氣體通入該中空管14而使該預濃縮裝置13恢復至環境 壓力。停止冷卻並使該預濃縮裝置13恢復至環境溫度。隨 I49I94.doc 201132978 後可線上分析該預濃縮裝置13或將該預濃縮襄置η從該直 空環境η移除並轉移至例如配備一合適偵測器(舉例而言 FID(火焰離子化㈣器）/AED(原子發射们則器外⑽（傅 立葉變換紅外線彳貞測器）/ M s D (質譜債測器）或谓測器之一 組合）之一熱脫附氣相層析系統（TD_GC)以在（次）級上對 有機污染進行量化及質化。對於線上分析，可提供一分析 單元19以收集及偵測當塗層15被加熱至高於一特定溫度時 從吸收劑解吸附之分子。 圖2繪示先前技術中所使用之一預濃縮裝置23之一載 面。該預濃縮裝置23包括充滿一多孔吸收劑25之一中空管 24。使用此先前技術預濃縮裝置23之主要問題在於緊密填 充的吸收劑顆粒25導致分子相及過渡相（真空或（極）低壓） 中氣流的大大減少。 圖3綠不用於根據本發明之系統丨〇之一預濃縮裝置丨3之 截面在此’吸收劑顆粒1 5係僅施加至該中空管1 4之内 壁。藉此大大改良透過該管丨4之氣體分子輸送。較佳，該 内壁之被塗佈區段15係長至足夠防止分子被吸收穿越該管 1 4而不擊中該壁之被塗佈部分1 5(例如’藉由依循路徑 33)。塗層15的吸收功能係藉由冷卻該塗層15而大大提 雨。 圖4繪示圖3之該預濃縮裝置13之另一戴面。其亦繪示該 中空管14及該吸收塗層15。 圖5繪示根據本發明分析氣體之一方法之一流程圖。該 方法包括冷卻5 1該預濃縮裝置13以提高該塗層1 5之吸收特 149194.doc 201132978 性之一步驟。例如，可使用流動穿過或沿著該預濃縮裝置 1 3之壁流動之一氣態或液態冷卻劑而完成冷卻5 1。 當該吸收塗層15被充分冷卻時，下一步驟係將氣體從真 空環境11泵送穿過該預濃縮裝置13之該中空管14。可藉由 提供用於使額外氣體進入該真空或低壓環境丨i之一受控茂 漏而加強泵送5 2。 隨後’收集53吸收劑顆粒上的分子污染之步驟開始。當 氣體被泵送穿過該管14時，分子被該被冷卻管丨4之該内壁 上之顆粒15吸收。 當總體取樣時間結束時，緊接著為使用已知氣體使該預 濃縮裝置13恢復54至環境壓力之一步驟。現在可以停止冷 卻，因為，又有分子需要吸收。由於吸收劑顆粒的特性較 早吸收的分子仍保持被吸收。隨後可將該預濃縮裝置13從 系統中取出以藉由另一系統進行進一步分析。或者，藉由 泫系統ίο本身所包含之—分析單元19而執行分析。 在Ik後的加熱步驟55中，加熱該預濃縮裝置13以將分子 污染從吸收劑顆粒中釋放。隨後，在分析步驟56中，可使 用氣相層析法分離及偵測所釋放的分子污染。 圖6繪不製造如圖3及圖4所示之一預濃縮裝置之一方法 之一流程圖。豸方法以提供61一巾空元件14之一步驟開 始Ή空7L件係由可承受極低及極高溫度的材料製成。 舉例而言，玻璃係可承受收集分子所需的低溫及將該等分 子從吸收劑中釋放所需的高溫之一適當材料。 提i、61 a玄中空疋件14之步驟之後為冷卻該中空元件14 149I94.doc 201132978 之至少—部分之一步驟。該步驟62之後為在該中空元件14 之被冷卻部分之一内壁上冷凝63 —合適溶劑之一步驟。該 溶劑隨後將固化。 在塗佈步驟64中’將吸收劑顆粒施加至該中空元件14之 被冷卻部分之該内壁上。許多類型之吸收劑顆粒適於製造 根據本發明之一預濃縮裝置13。所使用之吸收劑顆粒之類 型取決於待藉由該預濃縮裝置13收集之分子之類型。適當 顆粒之一些實例為： _聚合物材料（固態），例如Tenax(次聯苯氧化物之聚合 物）， -聚合物材料（液態），例如聚矽氧聚合物 '二乙烯基笨-笨 乙稀共聚物， -固體材料，例如，（碳）、氧化鋁（A1203)， - 分子篩， 塗佈在基板顆粒上的離子液體，例如1，9_二（3_乙烯基-咪 。坐鏽）壬燒雙（三氟曱基）錡醯亞胺酸鹽 〃、他材料，包含活性煤炭、多孔官能基化溶膠-凝膠材 料。 從上述列表看，尤其是丁⑶以似乎是一種極適當的材 料。在冷卻並使用一適當溶劑溶解Tenax時，可達成聚人 物與玻璃之黏附。為了使用Tenax製備裝置，必須用—大 致非互連Tenax珠構成之一薄層覆蓋一合適取樣裝置之内 壁之一部分。Tenax層必須以在使用熱脫附脫附時，該層 可承受大的溫差（例如，50〖至6〇〇 κ)同時維持—低背旦值 M9194.doc 11 201132978 之一方式施加。為達此目的，冷卻必須放置Tenax珠之該 裝置之部分，且在被冷卻區域上冷凝一合適溶劑。在溶劑 固化後，將Tenax珠施加至該裝置並停止冷卻（步驟65)。在 使該裝置恢復至環境溫度後，使用一氣流（例如，氮）將多 餘的溶劑蒸發。當溶劑完全蒸發時，將未附著至該裝置之 壁之Tenax移除（步驟66p在適當調節後，裝置待用。 應注意，上述實施例闡釋而非限制本發明，且熟習此項 技術者能夠在不脫離隨时請專利範圍的範圍的情況下設 計許多替代實施例。在巾請專利範圍t，放置在括弧間的 元件符號不應解釋為限制申請專利範圍。動詞「包括」及 其變化形式的使用㈣除除中請專利範圍中所述之元件或 步驟之外之元件或步驟之存在。1件之前之冠詞「―」 不排除複數個此等元件之存在。本發明可藉由包括數個不 同元件之硬體及藉由經適當程式化之電腦實施。在例舉數 種方式之裝置請求項中，此等方式之數者可藉由一相同的 硬體項目具體實施。特定方法係敍述於互不相同的附屬請 求項中的純粹事實並不表示不可有利地使用此等方法之一 組合。 【圖式簡單說明】 圖1示意地繪示根據本發明之—氣體分析系統； 圖2繪示先前技術中所使用之—預濃縮裝置之一截面； 圖3繪示用於根據本發明之系統之—預濃縮裝置之一截 面； 圖4繪示圖3之預濃縮裝置之另—截面. 149194.doc -12· 201132978 圖5繪示根據本發明分析氣體之一方法之一流程圖；及 圖6繪示製造如圖3及圖4所示之一預濃縮裝置之一方法 之一流程圖。 【主要元件符號說明】 10 氣體分析糸統 11 真空環境 12 泵送系統 13 預濃縮裝置 14 中空管 15 塗層/吸收劑顆粒/被塗佈區段/被塗佈部分 16 冷卻構件 17 受控洩漏 18 測試物件 19 分析單元 23 預濃縮裝置 24 中空管 25 吸收劑顆粒 33 路徑 149194.doc -13-The conductivity of the device and the airflow is reported to be large. The MU MU 丨 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于 取决于decrease very much. The illustration shows the particles of the absorbent and the interconnected open space between the pulls of the packed bed φ ^ g 斗丹Tt 甲甲甲 as a large number of capillaries having a much smaller effective diameter than the device filled therein. path of. Therefore, the above pre-diverging device has serious problems in terms of gas flow when operating in the molecular flow or transition flow range. SUMMARY OF THE INVENTION One object of the present invention is to provide a bulk analysis system according to the opening paragraph which is capable of effectively determining molecular contamination in a vacuum or low pressure environment. According to a first aspect of the present invention, the object is achieved by providing a gas analysis system for detecting molecular contamination in a vacuum environment, the system comprising a pumping system, a preconcentration device and a cooling member . The pumping system is provided for transporting gas out of a vacuum environment. The preconcentration device includes a hollow element having a gas inlet for receiving a gas sample from a vacuum environment and a gas outlet for coupling to one of the pumping systems. The inner wall of one of the hollow elements includes absorbent particles. coating. The cooling member is provided for cooling the preconcentration device. J49194.doc 201132978 The effectiveness of a gas analysis system according to the invention comes from a combination of two important new features. In order to maximize the conductivity of the system and to maintain sufficient airflow from the streamlined pressure/vacuum system through the preconcentration device, the absorption of organic compounds is overcome by attaching only particles of this material to the inner wall of the device. A large barrier to the formation of absorbent particles. The increased conductivity of the device allows sufficient gas molecules to be transported through the preconcentration device from a streamlined pressure/vacuum environment. However, merely increasing the effective diameter of the hollow member by applying the absorbent particles (4) to the inner wall of the pre-compression device does not result in the desired improvement of the gas analysis system. The knives that should be collected by the concentrating device - pass through. The hollow element is not absorbed onto the absorbent particles. Therefore, the gas analysis system according to the present invention further includes a cooling member. The cold: member causes the molecules to collide with the absorbent particles on the wall of the hollow member to absorb heat and thereby increase the probability of absorption by the coating on the inner wall. Therefore, the object of the present invention is due to the hollow member and absorption. A combination of a coating of the agent and the cooling member is achieved. Preferably, the preconcentration device comprises a cold u inlet to the cooling member and the cooling member therein, configured to provide a coolant to the preconcentration device. For example, [the liquid can be transported through the cooling tank in the hollow element to remove the device from the inner region. Alternatively, the preconcentration device can be cooled from outside the hollow tube. The LV Xuan preconcentration device can be configured to further include a clearing, L inlet for implementing the preconcentrating device. Cleaning with a preferred pure gas is important for transporting the collected contaminants from the desorbed crucible to the analytical system and/or cleaning the preconcentration prior to reusing it for further measurements. 149194.doc 201132978 Preferably, the gas analysis system further comprises (4) introducing a quantity of known gas into the vacuum ring J. & 1 = 'The stalk is promoted by the pumping system to promote gas transporting gas molecules ^Components. It may be very difficult to pass a small amount of contaminating molecules through the hollow element in the feed line (4). If a small amount of known gas is introduced into the vacuum environment before or during the delivery, the rate of fruit delivery and the collection of all contaminating molecules can be increased. The "known gas" is preferably an ultrapure gas, but may be a gas mixture having a predetermined composition. In accordance with the present invention, a method is provided for analyzing a gas in a vacuum environment using a system for analyzing a gas in accordance with the present invention. According to the invention, a method is provided for producing a preconcentration device for use in a rolling body analysis system according to Taisu Mingxi ^mk^. The method comprises the steps of: (1) providing - a hollow element; (1) cooling at least a portion of the hollow element; (iii) condensing - a solvent on the inner wall of the cooled portion of the hollow element and curing the solvent; and (d) applying The absorbent particles are to the inner wall of the cooled portion of the hollow member. Preferably, the method further comprises the steps of stopping the cooling and evaporating the excess solvent, and optionally also removing one of the absorbent particles not attached to the inner wall. These and other aspects of the invention will be apparent from and elucidated with reference to the embodiments described herein. [Embodiment] FIG. 1 schematically shows a gas analysis system 1 according to the present invention. The system 10 is used to detect molecules that are degassed by a test object 18 that has been placed in a vacuum environment. In all descriptions, the word vacuum is used for (near) true 149194.doc 201132978 empty environment and for (polar) low voltage environments. A preconcentration device 13 is coupled to the vacuum environment 11. The preconcentration device 13 comprises a hollow tube 14 made of a material that can withstand low temperatures as well as high vessels. One of the open ends of the hollow tube 14 is coupled to the vacuum environment 11 to receive the gas to be analyzed. For example, the hollow tube 14 can be made of glass. The inner wall of the hollow tube 14 is at least partially covered by an absorbent particle coating 15. This coating 15 is described in more detail below with reference to Figures 3 and 4. A pump 12 is coupled to the other open end of the hollow tube 14 to deliver gas to be analyzed through the hollow tube 14. It is extremely difficult to send molecules from a vacuum or extremely low pressure environment. Delivery can be made simpler by providing a controlled leak 17 to the vacuum environment. When a known amount of gas is added to the vacuum environment via the controlled leak, the transport gas species is promoted through the device. When the amount and/or type of vaporized gas is known, the measurement results can be corrected for the effect of the gas on the measurement results. Furthermore, the system 11 comprises a cooling member 16 for cooling the preconcentration device 13 or at least one of the coated portions 15 of the hollow tube 14. Cooling can be accomplished using, for example, an I cooling liquid or a cold gas. For example, liquid nitrogen can be used. Cooling can be carried out from the outside of the hollow tube U and/or from the inside. Cooling with coating = 15 greatly enhances the absorption properties of coating 15 and the ability to store the molecules to be analyzed when the preconcentration device n is used. After collecting the molecular contamination in the preconcentration unit 达3 for a period of time, the coating having the absorbed molecules is analyzed. For optimum performance, the preconcentration unit 13 should use a longer sampling time. To this end, the preconcentration device 13 is preferably returned to ambient pressure by passing a known gas into the hollow tube 14. The cooling is stopped and the preconcentration unit 13 is returned to ambient temperature. The preconcentration device 13 can be analyzed online after I49I94.doc 201132978 or the preconcentration device η is removed from the direct space environment η and transferred to, for example, a suitable detector (for example FID (flame ionization (4)) /AED (Atomic Emissions (10) (Fourier Transform Infrared Detector) / M s D (mass spectrometry) or one of the predators) thermal desorption gas chromatography system ( TD_GC) quantifies and quantifies organic contamination at the (secondary) level. For on-line analysis, an analysis unit 19 can be provided to collect and detect desorption from the absorbent when the coating 15 is heated above a certain temperature. Figure 2 illustrates one of the preconcentration devices 23 used in the prior art. The preconcentration device 23 includes a hollow tube 24 filled with a porous absorbent 25. Using this prior art preconcentration device The main problem with 23 is that the closely packed absorbent particles 25 result in a significant reduction in gas flow in the molecular phase and in the transition phase (vacuum or (polar) low pressure.) Figure 3 Green is not used in a preconcentration device in accordance with the system of the present invention. The section of 3 is here The agent particles 15 are applied only to the inner wall of the hollow tube 14. Thereby, the gas molecule transport through the tube 4 is greatly improved. Preferably, the coated portion 15 of the inner wall is long enough to prevent the molecules from being absorbed. The tube 14 is traversed without hitting the coated portion 15 of the wall (e.g., by following the path 33). The absorption function of the coating 15 is greatly enhanced by cooling the coating 15. Figure 4 Another wearing surface of the preconcentrating device 13 of Fig. 3. The hollow tube 14 and the absorbing coating 15 are also shown. Fig. 5 is a flow chart showing one of the methods for analyzing a gas according to the present invention. This includes the step of cooling the preconcentration device 13 to increase the absorption of the coating 15 149194.doc 201132978. For example, a gaseous state flowing through or along the wall of the preconcentration device 13 can be used. Cooling is completed by liquid coolant or liquid. When the absorbing coating 15 is sufficiently cooled, the next step is to pump gas from the vacuum environment 11 through the hollow tube 14 of the preconcentrating unit 13. Provided to provide additional gas into the vacuum or low pressure environment 丨i one of the controlled leaks to strengthen Send 5 2. The step of 'collecting 53 molecular contamination on the absorbent particles begins. When the gas is pumped through the tube 14, the molecules are absorbed by the particles 15 on the inner wall of the cooled tube 4. At the end of the sampling time, the step of recovering the preconcentration unit 13 to ambient pressure using a known gas is followed by a step. The cooling can now be stopped because another molecule needs to be absorbed. The absorption of the particles of the absorbent is earlier absorbed. The molecule remains absorbed. The preconcentration device 13 can then be removed from the system for further analysis by another system. Alternatively, the analysis can be performed by the analysis unit 19 included in the system ίο itself. In a heating step 55 after Ik, the preconcentration unit 13 is heated to release molecular contamination from the absorbent particles. Subsequently, in analysis step 56, gas chromatography can be used to separate and detect the released molecular contamination. Figure 6 depicts a flow chart of one of the methods of fabricating one of the preconcentration devices of Figures 3 and 4. The crucible method begins with the step of providing a hollow element 14 to hollow out. The 7L piece is made of a material that can withstand extremely low and extremely high temperatures. For example, the glass system can withstand the low temperatures required to collect the molecules and one of the appropriate materials for the high temperatures required to release the molecules from the absorbent. The step of extracting the i, 61 a hollow hollow member 14 is followed by at least one of the steps of cooling the hollow element 14 149I94.doc 201132978. This step 62 is followed by a step of condensing 63 - a suitable solvent on the inner wall of one of the cooled portions of the hollow member 14. The solvent will then solidify. In the coating step 64, absorbent particles are applied to the inner wall of the cooled portion of the hollow member 14. Many types of absorbent particles are suitable for making a preconcentration device 13 according to the present invention. The type of absorbent particles used depends on the type of molecule to be collected by the preconcentration unit 13. Some examples of suitable particles are: _ polymer material (solid state), such as Tenax (polymer of biphenyl oxide), - polymer material (liquid), such as polyoxyl polymer 'divinyl stupid - stupid B Dilute copolymer, - solid material, for example, (carbon), alumina (A1203), - molecular sieve, ionic liquid coated on the substrate particles, such as 1,9_2 (3_vinyl-methane. Anthraquinone bis(trifluoromethyl) rutheimide bismuth, other materials, including active coal, porous functionalized sol-gel material. From the above list, especially Ding (3) seems to be a very suitable material. When the Tanax is cooled and dissolved in a suitable solvent, the adhesion of the polysilicon to the glass can be achieved. In order to use the Tenax preparation device, a thin layer of substantially non-interconnected Tenax beads must be used to cover a portion of the inner wall of a suitable sampling device. The Tenax layer must be applied in such a way that the layer can withstand large temperature differences (e.g., 50 〖 to 6 〇〇 κ) while maintaining the low back denier value M9194.doc 11 201132978 when using thermal desorption detachment. To this end, a portion of the device in which Tenax beads must be placed is cooled and a suitable solvent is condensed on the cooled area. After the solvent has solidified, Tenax beads are applied to the device and cooling is stopped (step 65). After the device is returned to ambient temperature, excess gas is vaporized using a stream of gas (e.g., nitrogen). When the solvent is completely evaporated, the Tenax that is not attached to the wall of the device is removed (step 66p, after appropriate adjustment, the device is ready for use. It should be noted that the above examples illustrate and do not limit the invention, and those skilled in the art can Many alternative embodiments are designed without departing from the scope of the patent pending. In the scope of the patent, the symbol of the component placed between the brackets should not be construed as limiting the scope of the patent application. The verb "includes" and its variations Use of (4) Except for the existence of elements or steps other than those described in the scope of the patent. The previous article "-" does not exclude the existence of a plurality of such elements. The invention may include The hardware of the different components is implemented by a suitably programmed computer. In the device requests exemplified in several ways, the number of these methods can be implemented by a similar hardware project. The mere fact of being recited in mutually different sub-claims does not mean that one of these methods cannot be advantageously used in combination. [Simplified Schematic] Figure 1 schematically shows the root Figure 2 illustrates a cross section of a preconcentration device used in the prior art; Figure 3 illustrates a cross section of a preconcentration device for use in a system according to the present invention; Figure 3 is a flow chart of one of the methods for analyzing gas according to the present invention; and Figure 6 shows the manufacture of Figures 3 and 4; Flow chart of one of the methods of a preconcentration device. [Description of main components] 10 Gas analysis system 11 Vacuum environment 12 Pumping system 13 Preconcentration device 14 Hollow tube 15 Coating / absorbent particles / coated area Segment/coated portion 16 Cooling member 17 Controlled leak 18 Test article 19 Analysis unit 23 Preconcentration device 24 Hollow tube 25 Absorbent particles 33 Path 149194.doc -13-