TW201131019A - Graphene and hexagonal boron nitride planes and associated methods - Google Patents

Graphene and hexagonal boron nitride planes and associated methods Download PDF

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Publication number
TW201131019A
TW201131019A TW100106159A TW100106159A TW201131019A TW 201131019 A TW201131019 A TW 201131019A TW 100106159 A TW100106159 A TW 100106159A TW 100106159 A TW100106159 A TW 100106159A TW 201131019 A TW201131019 A TW 201131019A
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Taiwan
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graphite
solid metal
metal substrate
layer
graphite layer
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TW100106159A
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Chinese (zh)
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jian-min Song
Shao-Zhong Hu
Yi-Qiao Lin
Jian-Pei Yu
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jian-min Song
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Priority claimed from US12/713,004 external-priority patent/US20100218801A1/en
Application filed by jian-min Song filed Critical jian-min Song
Publication of TW201131019A publication Critical patent/TW201131019A/en

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Abstract

Graphene layers made of primarily sp2 bonded atoms and associated methods are disclosed. In one aspect, for example, a method of forming a graphite film can include heating a solid substrate under vacuum to a solubilizing temperature that is less than a melting point of the solid substrate, solubilizing carbon atoms from a graphite source into the heated solid substrate, and cooling the heated solid substrate at a rate sufficient to form a graphite film from the solubilized carbon atoms on at least one surface of the solid substrate. The graphite film is formed to be substantially free of lattice defects.

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201131019 - 六、發明說明: 【優先權資料】 本申請案是主張於2〇1()年2月25日提出中請的美國 第12/71 3,GG4號專利巾請案的優先權,該美國專利申請案 疋於2009年7月8日提出申請的美國第12/499,647號專 利申清案以及美國第61/〇79,〇64號專利申請案以及於 2009年1月19日提出申請的美國第61/145,707號臨時專 利申凊案的接續案,上述專利申請案整合於本文中以作為 w 參考。 【發明所屬之技術領域】 本發明通常係關於石墨烯與六方氮化硼薄片及其相關 方法。因此,本發明涉及化學以及材料科學領域。 【先前技術】 石墨烯通常被定義為單一原子厚度具有sp2鍵結之碳 原子的平板,該等碳原子是緊密堆疊成具有蜂巢結晶晶格 • 之苯環的結構。此二維材料在層狀結構的平面呈現高電子 穩定性以及優異的導熱性’於複數彼此相互平行堆疊之層 狀石墨烯係由石墨所組成。 石墨烯廣泛地使用於描述很多碳基材料(包括石墨、 大型富勒烯、奈米管等)的特性,例如,碳奈米管可為石 墨稀捲起形成奈米尺寸的圓柱體。再者,平面石墨烯本身 已經被推定為不存在於游離態(free state),且對於f曲結 構(例如炭灰(soot)、富勒烯、奈米管等)的形成是不穩定 的。 201131019 目别已有人企圖結合石墨烯於電子裝置(如電晶體) 中而ia樣的企圖通常因為與具有適合結合到這種裝置 _之適合尺寸的高品質石墨烯層的製造有關的問題而無法 成功。產生石墨烯層的一種技術涉及將石墨烯從高定向熱 解石墨撕下’使用這種方法,只會產生小月體,它們通常 太小以至於無法使用在電子應用中。 【發明内容】 因此,本發明提供石墨烯和六方氮化硼層及其相關方 法舉例而3,在一方面中係提供一種形成石墨層 film)的方法。此方法包含:纟真空狀態下加熱一固態基材 到達一溶解溫度(S0|ubi|izing temperature),該溶解溫度低 於該固態基材m將來自—石墨來源的碳原子溶解於 該被加熱的固態基材之中;以及以一充足的速率冷卻該被 加熱的固態基材以使得該溶解的碳原子形成一石墨層到該 固態基材的至少-表面纟。所形成的石墨層大致上不包含 有晶格缺陷。在一方面’該方法可近一步包含自該固態基 材上移除該石墨層。 可根據本發明各方面而考慮使用各種固態金屬基材來 製造石墨&。在-方面,固態金屬基材的例子包含而不受 限於鉻(Cr)、猛(Μη) ' 鐵(Fe)、链(Co)、鎳(Ni)、组(Ta)、 把(Pd)、姑(Pt)、鑭(La)、鈽(Ce)、銪(Eu)、銀(丨「)、釕(Ru)、 姥(Rh)、其合金以及其結合物。在一特定方面該固態金屬 基材可包含鎳。 此外,該固態基材可包含一大致上較少活性的材料以 調整碳原子在固態金屬基材之中的溶解度。可考慮各種大 201131019 致上較少活性的材料,且任何相容於固態金屬基材且能夠 調整碳溶解度的這類材料均被視為在本發明之範疇内。該 大致上較少活性材料的例子包含而不受限於金(Au)、銀 (Ag)、銅(cu)、鉛(Pb)、錫(Sn)'鋅(Zn)、其結合物以及其 合金。在一方面,該大致上較少活性的材料可包含銅。在 另一方面,該固態金屬基材包含一第一金屬層以及一第二 金屬層,其中該第一金屬層能夠用來溶解碳原子,且該第 二金屬層能夠用來調整碳原子溶解度。因此,在某些方面 之中,該第二金屬層相較第一金屬層而言,包含較大比例 的大致上較少活性的材料。 在製造石墨烯層(graphene layers)時可使用不同的溶 解溫度,且可根據所使用的固態金屬基材以及所要產出的 石墨稀層的特性來改變此溶解溫度。在一方面,該固態金 屬基材是鎳,且該溶解溫度是由大約5〇(rc到大約145〇。 C。在另一方面,該固態金屬基材是鎳,且該溶解溫度是由 大約500 C到大約1 〇〇〇 c。在又另一方面,該固態金屬基 材是鎳’且該溶解溫度是由大約700。C到大約8〇〇。◦。此 外了根據該固態金屬基材的材料以及所要產出的石墨稀 層的特性來改變固態金屬基材的冷卻速率。在一方面,該 冷卻速率是由大約1。C/每秒到20。C/每秒。 在本發明另一方面,一形成石墨層的方法可包含:將 一固態金屬基材設置在一支撐基材上且連接一石墨碳來源 到該固態金屬基材。該方法可進一步包含:在真空狀態下 加熱<·玄固態金屬基材到達一溶解溫度’該溶解溫度低於該 固態金屬基材的熔點;以及將石墨來源中的碳原子溶解到 201131019 該被加熱的固態金屬基材之中。接著可以一充足的速率來 冷卻該被加熱的固態金屬基材以由被溶解的碳原子形成一 石墨層在該固態金屬基材的至少一表面上,其中該石墨層 大致上不具有晶格缺陷。在一方面,連接該石墨碳來源到 該固態金屬基材的步驟包含將該石墨碳來源設置在該支撐 基材與該固態金屬基材之間。在另一方面,連接該石墨碳 來源到該固態金屬基材的步驟包含將該石墨碳來源到該固 態金屬基材的一表面上且相對該支撐基材。 本發明亦k供根據本發明方法所製造的石墨烯層。在 此例子中,石墨烯層可以預設的尺寸和形狀而製造。這些 石墨烯層可應用於各種裝置上。前述裝置可包含而不受限 於分子感測器、發光二極體、液晶顯示器、太陽能板、麼 力感測器、表面聲波據波器(SAWfi|te「)、共鳴器、電晶體、 電容器.;透明電極、紫外線雷射(uvias 現在僅概純錢廣地料出本„的各種^,4因 此在接下來的詳細說明中可#彳隹 了更進一步地理解,並且在本領 域^故的貢獻可能會有更佳的領會,而本發明的其他特徵 將會從所载的詳細說明及其附圖和申請專 為清晰’也可能在實行本發料得知。 更 【實施方式】 定義 以下是在本發明的說明及專利範 詞的定義。 出現之專有名 文中所使用的單數型態字眼如「一 = 在上下文中清楚明白的指示為單數^該」,除非 然乂些單數型態的 201131019 先行詞亦包括複數對象,因此例如「一顆粒」包括一個或 多個這樣的顆粒;「該材料」包括一個或多個這種材料。 在此所述的「石墨化程度(degree of graphjtizati〇n)」 係指石墨的比例,其具有理論上相隔3·354埃(抓9以「〇叫的 石墨平面(graphene plane),因此,石墨化的程度為]是指 100%的石墨具有底面的石墨平面間距⑼刚2))為3 354埃的 碳原子六角形網狀結構。較高的石墨化程度係指較小的石墨 • 平面間距。石墨化程度(G)能利用式1來計算。 G = (3.440 - d(〇〇〇2))/(3.440 - 3.354) ⑴ 相反地,d(〇0〇2)能根據G而使用式2計算而得。 d(0002) = 3.354 + 0.086(1-G) (2) 根據式1,3.440埃是非晶碳(Lc = 50Aw面的間隔’而 3.354埃是純石墨(lc = ι〇0〇Α)的間隔,純石墨是可藉由在 3000 以一延長的時間(如12小時)燒結可石墨化的碳。 較高程度的石墨化對應於較大的結晶尺寸,其係藉由底面 _ (La)的尺寸和堆疊層(Lc)的尺寸所表徵。需注意該尺寸參數 是反比於底面的間隔。一「高度石墨化」係依照所使用的材 料但通*係指石墨化的程度等於或大於約〇 8。在一些實 施例中,高程度的石墨化係指大於約〇_85的石墨化程度。 文中所使用的「石墨層(graphite film)」用詞是指複數 堆疊的石墨烯層(graphene layers) » 文中所使用的「大致上較小活性(substantia||y less-「eactive)」係指不會顯著地與石墨烯材料反應和化學鍵 、。的元素或元素之混合物。大致上較小活性的元素之範例可 包括但不限制在金(Au)、銀(Ag)、銅(Cu)、鉛(Pb)、錫(Sn)、 201131019 鋅(Zn)及其混合物。 文中所使用「大致上(substantially)」是指步驟、特性、 性質、狀態、結構、項目或結果的完全、接近完全的範圍或 程度。例如,一「大致上」被包覆的物體係指該物體完全被 包覆或幾乎完全被包覆。而離絕對完全確實可允許的偏差可 在不同情況下依照特定上下文來決定。然而,通常來說接近 全就如同獲付絕對或完整的完全具有相同的總體結果。所 用的「大致上地」在當使用於負面含意亦同等適用,以表示 完全或接近完全缺乏步驟、特性 '性質、狀態、結構、項目 或結果。舉例來說,一「大致上沒有(substantia丨丨yfree〇f)」 顆粒的組成可為完全缺乏顆粒,或者非常近乎完全缺乏顆 粒,而其影響會如同完全缺乏顆粒一樣。換句話說,一「大 致上沒有」一成分或元素的組成只要在所關注的特性上沒有 可測量到的影響,可實際上依然包含這樣的物質。 文中所使用的「大約(about)」是藉由提供可能比端點「高 一些(3丨川丨6 31)(^6)」或「低一些(3旧^1:)8丨〇叫」之數值而 提供數值範圍端點的彈性。 文中所使料複數個物品 '結構元件、組成元素和/或 材料,基於方便可出現在一般的常見列舉中,然而這些列舉 可解釋為列料的[構件單獨或個㈣被定義,因此,這 樣列舉巾的單—構件不能視為任何單獨基於在-般族群中 無相反表示之解釋的相同列舉中實際上相等的其他構件。 濃度、數量以及其他數值上的資料可是以範圍的形式來 加以呈現或表示’而需要瞭解的是這種範圍形式的使用僅基 於方便性以及簡潔,因此在解釋時,應具有相當的彈性 201131019 僅包括在範圍中明確顯示出來以作為限制之數值,同時亦可 包含所有個別的數值以及在數值範圍中的次範圍,如同每一 個數值以及次範圍被明確地引述出來一般。例如一個數值範 圍「約1微米到約5微米」應該解釋成不僅僅包括明確引述 出來的約1到約5’同時還包括在此指定範圍内的每一個數 值以及次範圍,因& ’包含在此一數值範圍中的每一個數 值,例如2、3及4,或例如ί _3、2-4以及3-5的次範圍等, 以及個別的1、2、3、4和5。此相同原則適用在僅有引述 一數值的範圍中,再者,這樣的說明應該能應用於無論是— 範圍的幅度或所述的特徵中。 發明 本發明係有關於新穎的石墨烯以及六方氮化硼層及其 相關方法;進一步而言,其係有關於製造包含主要以sp2鍵 結排列而成的原子之材料以及材料層的方法以及這種材 料。已經知道的是石墨烯層可被製成具有足夠用於很多電子 應用的尺寸,石墨烯層為具有sp2鍵結碳且具單一原子厚度 的平板,且如圖1所示,其係緊密堆疊成具有蜂巢結晶晶格 之苯環的結構。在石墨烯中的碳_碳鍵結長度大約為145埃 (A)比鑽石的長度1.54A短。石墨稀是其他石墨材料的基 本結構7L素,該石墨材料包括石墨、碳奈米管、富勒烯等。 :該注意的是在本發明之方面中「石墨烯」的用語包括有關 ^原子層的石墨烯以及複數層堆疊的石墨烯。應注意的是 石墨層」用詞可用於形容複數層堆疊的石墨烯。 ^極佳的石墨烯僅單單由六方晶體所組成,且任何在石墨 、x的角形或七角形晶體都會構成缺陷,這種缺陷改變該 201131019 石墨稀層平坦的性質。例如,單-五㈣晶體會使得平板彎 曲(赚P)成圓椎狀,當12個五角W適當的 產生平坦的富勒婦。同樣地’單-的七角形晶體會將平板f 曲成鞍狀(saddle_shape)e石墨料板㈣㈣向於降 子穩疋性以及熱導性,且pg μμ丈名,丨+人 且因此不利於使用在這些性質為重要 的應用上。 f 如上所述’已經證明能大到足以使用於很多電子或其他 應用的高品質石墨稀層(或石墨層)是很難獲得的。而使用 熔融溶劑或是一固態金屬基材料能夠產生此高品質的石墨 稀層》在溶融溶劑的例子卜該等材料形纽融溶劑而作為 觸媒以有助於複數石墨烯片體的燒結和/或形成。例如在一 方面中,本發明提供一種形成石墨稀層的方法,這種方法可 包括混合碳源與-水平定向的炼融溶劑;從該㈣溶劑中沉 澱碳源以形成遍及於該㈣溶劑的—石墨層;以及將該石墨 層分隔成複數石墨烯層。在—些方面中,碳源的加熱二及沉 殺係於真空狀態中完成以減少污染。 許多混合碳源和熔融溶劑的方法都能考慮。在一些情形 中,該碳源係與已經呈溶融狀態的溶融溶劑混合;在其他情 形中’該碳源係結合於之後才會呈現熔融狀態的溶劑材料。 例如在一方面中,混合碳源和該熔融溶劑包括提供該碳源至 -固化之溶劑層,並在真空環境下加熱該固化之溶劑層以熔 融該固化之溶劑層成為-溶融溶劑’而讓該熔融溶劑和碳源 之碳原子形成一共熔(eutectic)液體,將該熔融溶劑和碳源 接著會保持在共熔液體的狀態,而讓石墨層形成而大致上遍 及於整個熔融溶劑。在另一方面中,曱烷會被熱解(pyr〇丨yze) .201131019 而在濺鍍於氧化鋁基板上之鎳上形成石墨,之後加熱鎳以液 化’而石墨中的碳原子會重新排列而形成石墨烯。 在一方面中’石墨烯能藉由碳從在熔融溶劑之碳的過飽 和溶液中出溶(exsolution)所形成的,在這種情況下,該溶 劑液體具有過飽和的碳材料,冷卻該液體以使得碳開始出溶 成凝析石墨(kish graphite),該凝析石墨會浮在該熔融溶劑 之頂部表面,且會相互修補(mend)而形成高品質石墨烯,能 施加震動至該熔融溶劑以幫助石墨片的修補,這種製程能夠 ® 使碳原子在過飽和熔融溶劑中有效擴散,因此能輕易地沉澱 在石墨片體「島嶼(islands)」的邊緣。具有六方鍵結排列的 碳原子是非常穩定的,因此不會輕易溶解於該熔融溶劑中, 另一方面,這種結構的邊緣包括會與溶質原子(如鎳原子)反 應的晃動鍵(dangling bond) ’因此,在邊緣的溶解和沉澱反 應是可逆的,使得溶質原子藉由鍵結和溶解而重複循環,直 到與碳原子鍵結,而在該片體之邊緣周圍生長,若溫度能夠 φ 控制在接近平衡狀態或者若溫度能循環而移除利於六方鍵 結碳的不穩定碳原子以及溶質原子則能改善此程序。 在一些方面中,能夠使用蝕刻劑(etchant)來移除碳原 子,且在一些情形中係移除不符合石墨埽晶格之較大碳分 :,這種蝕刻劑包括但不限制在氫(H)、氧(〇)、氮(N)、氟(f)、 氣(Cl)以及其混合物。除此之外,能施加甲院而遍及於整個 表面作為補充碳源,並且有助於修補該等石墨稀片體而成為 至v大致上連續的層狀結構。在一方面中,蝕刻劑和曱烷 能夠隨時間而循環以修補該等石墨稀片體而成為一至少大 致上連續的層狀結構。再者,藉由修補時控制在表面之漂浮 11 201131019 石墨烯的數量能促進石墨烯層的品質,太多石墨烯會在所形 成之層狀結構中產生無法修補的間隙,而太少的石墨烯會顯 著地降低產率。 更特別的是如圖2所示,一高度石墨化之石墨12的薄 層能夠散佈(spread)遍及於位於模具16中固化之熔融溶劑 層14,該高度石墨化之石墨包括天然石墨。在很多情形中, 使用石墨材料作為模具是有益的,然而,其他材料也同樣可 以使用,且能為所屬技術領域中具有通常知識者所熟知。另 外,在-方面中,該高度石墨化之石墨的薄層可具有小於約 # 40 nm的厚度;在另-方面中,該薄層可具有小於約2〇⑽ 的厚度。同樣重要而值得注意的是當高度石墨化之石墨高度 純化時能夠得到較佳的結果,例如,各種石墨中的雜質 氧和氮)能夠利用如在高溫中進行加氣消毒處理 (chlorination treatment)而被移除。此外,非限制性之高度 石墨化之石墨的範例包括熱解石墨(pyr〇丨jtic graphite)、濺 鍍石墨(sputtered graphite)、天然石墨(natura 丨 graphUe) 等。在一方面中,該石墨的石墨化程度係約大於〇 8〇 ;在另 參 一方面中,該石墨的石墨化程度係約大於〇 9〇 ;在又一方面 令,該石墨的石墨化程度係約大於〇. 9 5。 在石墨散佈於該固化之溶劑層之後,該模具總成能在真 空爐中加熱而熔融溶劑材料而成一熔融溶劑,在熔融時,該 溶劑和該石墨形成共熔液體,例如,若該溶劑為鎳,鎳-碳 共熔液體會沿著該熔融溶劑表面和該高度石墨化之石墨間 的邊界而形成;接著,該熔融溶劑有助於將從高度石墨化之 石墨製成之石墨烯片體彼此修補在一起而成為連續性石墨201131019 - VI. Description of Invention: [Priority Information] This application is a priority for the US Patent Application No. 12/71 3, GG4, which was filed on February 25, 2002. U.S. Patent Application No. 12/499,647, filed on July 8, 2009, and US Patent Application No. 61/79, No. 64, and filed on January 19, 2009. For the continuation of the US Patent Application No. 61/145,707, the above patent application is incorporated herein by reference. TECHNICAL FIELD OF THE INVENTION The present invention relates generally to graphene and hexagonal boron nitride flakes and related methods. Accordingly, the present invention relates to the fields of chemistry and materials science. [Prior Art] Graphene is generally defined as a plate having a single atomic thickness of sp2 bonded carbon atoms, which are closely packed into a structure having a benzene ring of a honeycomb crystal lattice. This two-dimensional material exhibits high electron stability and excellent thermal conductivity in the plane of the layered structure. The layered graphene which is stacked in parallel with each other is composed of graphite. Graphene is widely used to describe the characteristics of many carbon-based materials (including graphite, large fullerenes, nanotubes, etc.), for example, carbon nanotubes can be rolled up to form a nanometer-sized cylinder. Furthermore, planar graphene itself has been presumed to be absent in the free state and is unstable for the formation of f-curved structures (e.g., soot, fullerenes, nanotubes, etc.). 201131019 The attempt to combine graphene in electronic devices (such as transistors) and ia-like attempts is often not possible due to problems associated with the manufacture of high quality graphene layers suitable for the size of such devices. success. One technique for producing graphene layers involves tearing graphene away from highly oriented pyrolytic graphite. Using this method, only small moon bodies are produced, which are often too small to be used in electronic applications. SUMMARY OF THE INVENTION Accordingly, the present invention provides graphene and hexagonal boron nitride layers and related methods thereof. 3 In one aspect, a method of forming a graphite layer film is provided. The method comprises: heating a solid substrate under vacuum to a dissolution temperature (S0|ubi|izing temperature), the dissolution temperature being lower than the solid substrate m, dissolving carbon atoms derived from the graphite source in the heated The solid substrate is cooled; and the heated solid substrate is cooled at a sufficient rate such that the dissolved carbon atoms form a graphite layer to at least a surface defect of the solid substrate. The graphite layer formed does not substantially contain lattice defects. In one aspect, the method can include further removing the graphite layer from the solid substrate. Various solid metal substrates can be considered for the fabrication of graphite & in accordance with various aspects of the present invention. In the aspect, examples of the solid metal substrate include, without limitation, chromium (Cr), sb (iron), iron (Fe), chain (Co), nickel (Ni), group (Ta), and (Pd) , Pt, La, Ce, Eu, silver, Ru, Rh, alloys, and combinations thereof. The metal substrate may comprise nickel. In addition, the solid substrate may comprise a substantially less active material to adjust the solubility of the carbon atoms in the solid metal substrate. Consider various large 201131019 materials that are less active, And any such material that is compatible with solid metal substrates and capable of adjusting carbon solubility is considered to be within the scope of the present invention. Examples of such substantially less active materials include, without limitation, gold (Au), silver. (Ag), copper (cu), lead (Pb), tin (Sn) 'zinc (Zn), combinations thereof, and alloys thereof. In one aspect, the substantially less active material may comprise copper. In one aspect, the solid metal substrate comprises a first metal layer and a second metal layer, wherein the first metal layer can be used to dissolve carbon atoms, And the second metal layer can be used to adjust the solubility of the carbon atoms. Thus, in some aspects, the second metal layer comprises a greater proportion of substantially less active material than the first metal layer. Different dissolution temperatures can be used in the manufacture of graphene layers, and this dissolution temperature can be varied depending on the solid metal substrate used and the characteristics of the thin layer of graphite to be produced. In one aspect, the solid metal The substrate is nickel and the dissolution temperature is from about 5 Torr to about 145 Å C. On the other hand, the solid metal substrate is nickel and the dissolution temperature is from about 500 C to about 1 Torr. 〇c. In yet another aspect, the solid metal substrate is nickel' and the dissolution temperature is from about 700 ° C to about 8 Torr. In addition, depending on the material of the solid metal substrate and the desired output The characteristics of the graphite thin layer are used to change the cooling rate of the solid metal substrate. In one aspect, the cooling rate is from about 1 C/sec to 20 C/sec. In another aspect of the invention, a graphite layer is formed. Method can include: The metal substrate is disposed on a supporting substrate and is connected to a graphite carbon source to the solid metal substrate. The method may further comprise: heating under vacuum; the solid metal substrate reaches a dissolution temperature 'the dissolution The temperature is lower than the melting point of the solid metal substrate; and the carbon atoms in the graphite source are dissolved into the heated solid metal substrate of 201131019. The heated solid metal substrate can then be cooled at a sufficient rate to Forming a graphite layer on at least one surface of the solid metal substrate from the dissolved carbon atoms, wherein the graphite layer has substantially no lattice defects. In one aspect, connecting the graphite carbon source to the solid metal substrate The step includes disposing the source of graphitic carbon between the support substrate and the solid metal substrate. In another aspect, the step of joining the graphite carbon source to the solid metal substrate comprises passing the graphite carbon to a surface of the solid metal substrate and opposite the support substrate. The invention also provides a graphene layer produced in accordance with the method of the invention. In this example, the graphene layer can be fabricated in a predetermined size and shape. These graphene layers can be applied to various devices. The foregoing device may include, without limitation, a molecular sensor, a light emitting diode, a liquid crystal display, a solar panel, a force sensor, a surface acoustic wave device (SAWfi|te "), a resonator, a transistor, a capacitor .; transparent electrodes, ultraviolet lasers (uvias are now only purely widely available, and therefore, in the following detailed description, can be further understood, and in the field The contribution of the present invention may be better understood, and other features of the present invention will be apparent from the detailed description and the accompanying drawings and applications. The following is a description of the invention and a definition of a patent suffix. The singular type of the word used in the singular name appears as "a = singular ^ in the context of the singular ^", unless otherwise singular The 20111019 antecedent also includes plural objects, such as "one particle" includes one or more of such particles; "the material" includes one or more of such materials. (degree of graphjtizati〇n)" refers to the proportion of graphite, which is theoretically separated by 3.354 angstroms (grabbing 9 with a "graphene plane", therefore, the degree of graphitization is 100%) The graphite has a graphite plane spacing of the bottom surface (9) just 2)) a hexagonal network of carbon atoms of 3 354 angstroms. A higher degree of graphitization means a smaller graphite • plane spacing. The degree of graphitization (G) can be utilized Calculated by Equation 1. G = (3.440 - d(〇〇〇2))/(3.440 - 3.354) (1) Conversely, d(〇0〇2) can be calculated from G using Equation 2. d(0002) = 3.354 + 0.086(1-G) (2) According to Equation 1, 3.440 angstroms is amorphous carbon (Lc = 50Aw surface spacing ' and 3.354 angstroms is pure graphite (lc = ι〇0〇Α) interval, pure graphite is The graphitizable carbon can be sintered at 3000 for an extended period of time (eg, 12 hours). Higher degrees of graphitization correspond to larger crystal sizes, which are by the size of the bottom surface _ (La) and the stacked layers. (Lc) is characterized by the size. It should be noted that the size parameter is inversely proportional to the spacing of the bottom surface. A "highly graphitized" is based on the material used but Refers to the degree of graphitization equal to or greater than about 〇 8. In some embodiments, a high degree of graphitization refers to a degree of graphitization greater than about 〇 _ 85. The term "graphite film" as used herein is Refers to a plurality of stacked graphene layers. As used herein, "substantia||y less-"eactive" means that it does not significantly react with the graphene material and chemical bonds. a mixture of elements or elements. Examples of substantially less active elements may include, but are not limited to, gold (Au), silver (Ag), copper (Cu), lead (Pb), tin (Sn), 201131019 zinc (Zn), and mixtures thereof. As used herein, "substantially" refers to the complete, near-complete extent or extent of a step, characteristic, property, state, structure, item, or result. For example, a "substantially" coated system means that the object is completely covered or nearly completely coated. Deviations from absolute full allowable deviations can be determined in different situations depending on the specific context. However, it is usually nearly as complete as the absolute or complete payment has the same overall result. The use of "substantially" as used in the negative sense is equally applicable to indicate complete or near complete lack of steps, characteristics, nature, state, structure, project or outcome. For example, a "substantia丨丨yfree〇f" particle composition can be completely devoid of particles, or very nearly completely devoid of particles, and its effect will be as completely lacking particles. In other words, a "substantially no" component or element composition actually contains such a substance as long as it has no measurable effect on the characteristics of interest. The "about" used in the text is provided by the "higher (3丨川丨6 31)(^6)" or "lower (3 old^1:) 8 yells" than the endpoint. The value provides the elasticity of the endpoint of the range of values. The plurality of articles 'structural elements, constituent elements and/or materials used in the text may appear in the general common list based on convenience, however these enumerations may be interpreted as [components alone or in (four) are defined, therefore, The single-members of the recited towel are not to be considered as any other component that is substantially equivalent based on the same enumeration in the ordinary enumeration without the opposite representation. Concentrations, quantities, and other numerical data may be presented or expressed in a range of '. It is important to understand that the use of this range of forms is based on convenience and simplicity, and therefore should be fairly flexible when interpreted. 201131019 Only Included in the range is explicitly shown as a limiting value, and also includes all individual values and sub-ranges in the range of values, as each value and sub-range are explicitly recited. For example, a range of values "about 1 micrometer to about 5 micrometers" should be interpreted to include not only about 1 to about 5' that are explicitly recited, but also every value and sub-range within the specified range, because & 'contains Each of the values in this range of values, such as 2, 3, and 4, or sub-ranges such as ί _3, 2-4, and 3-5, and the individual 1, 2, 3, 4, and 5. This same principle applies to the range in which only one value is recited. Again, such description should apply to either the range of the range or the features described. The present invention relates to novel graphene and hexagonal boron nitride layers and related methods; further, it relates to a method of fabricating a material comprising a substance mainly composed of sp2 bonds and a material layer, and Materials. It is known that the graphene layer can be made to have a size sufficient for many electronic applications, and the graphene layer is a flat plate having sp2 bonded carbon and having a single atom thickness, and as shown in Fig. 1, it is closely packed into The structure of a benzene ring having a honeycomb crystal lattice. The carbon-carbon bond length in graphene is about 145 angstroms (A) shorter than the length of the diamond of 1.54A. Graphite is a basic structure of other graphite materials, 7L, including graphite, carbon nanotubes, fullerenes and the like. It is noted that the term "graphene" in the aspect of the invention includes graphene relating to the atomic layer and graphene stacked in a plurality of layers. It should be noted that the term "graphite layer" can be used to describe a plurality of layers of graphene stacked. ^Excellent graphene is composed only of hexagonal crystals, and any graphite or x-angle or heptagonal crystals will form defects, which will change the flatness of the 201131019 graphite thin layer. For example, a single-five (four) crystal would cause the flat plate to bend (earn P) into a rounded vertebra, and when 12 pentagonal Ws would properly produce a flat fuller. Similarly, the 'single-seven-corner crystal will bend the flat plate f into a saddle-shaped (saddle_shape) e-graphite plate (4) (4) toward the drop stability and thermal conductivity, and pg μμ, 丨+人 and thus not conducive to Use in applications where these properties are important. f As described above, it has been difficult to obtain a high quality graphite thin layer (or graphite layer) that has been proven to be large enough for many electronic or other applications. The use of a molten solvent or a solid metal-based material can produce this high-quality graphite thin layer. In the case of a molten solvent, these materials form a solvent to act as a catalyst to facilitate sintering of the plurality of graphene sheets and / or formed. For example, in one aspect, the present invention provides a method of forming a thin layer of graphite, the method comprising: mixing a carbon source with a horizontally oriented smelting solvent; precipitating a carbon source from the (iv) solvent to form a solvent throughout the (iv) solvent a graphite layer; and dividing the graphite layer into a plurality of graphene layers. In some aspects, the heating and killing of the carbon source is accomplished in a vacuum to reduce contamination. Many methods of mixing carbon sources and melting solvents can be considered. In some cases, the carbon source is mixed with a molten solvent that has been in a molten state; in other cases, the carbon source is bonded to a solvent material that is then in a molten state. For example, in one aspect, the mixed carbon source and the molten solvent include a solvent layer that provides the carbon source to the curing, and the cured solvent layer is heated in a vacuum environment to melt the cured solvent layer into a -solvent solvent. The molten solvent and the carbon atoms of the carbon source form a eutectic liquid, which is then maintained in a state of the eutectic liquid, and the graphite layer is formed substantially throughout the molten solvent. On the other hand, decane is pyrolyzed. 201131019 and graphite is formed on the nickel sputtered on the alumina substrate, after which the nickel is heated to liquefy 'the carbon atoms in the graphite are rearranged. And graphene is formed. In one aspect, 'graphene can be formed by carbon being eluted from a supersaturated solution of carbon in a molten solvent, in which case the solvent liquid has a supersaturated carbon material, and the liquid is cooled to The carbon begins to dissolve into kish graphite, which will float on the top surface of the molten solvent and will mens each other to form high-quality graphene, which can apply vibration to the molten solvent to help Repair of graphite sheets, this process enables the carbon atoms to diffuse effectively in supersaturated molten solvents, so they can be easily deposited on the edge of the graphite sheet "islands". A carbon atom having a hexagonal bond arrangement is very stable and therefore does not readily dissolve in the molten solvent. On the other hand, the edge of the structure includes a dangling bond that reacts with a solute atom such as a nickel atom. ) 'Therefore, the dissolution and precipitation reactions at the edges are reversible, allowing the solute atoms to recirculate by bonding and dissolution until they are bonded to the carbon atoms and grow around the edges of the sheet if the temperature can be controlled by φ This procedure can be improved by approaching equilibrium or if the temperature can circulate to remove unstable carbon atoms and solute atoms that favor hexagonal bonding carbon. In some aspects, an etchant can be used to remove carbon atoms, and in some cases to remove larger carbons that do not conform to the graphite germanium lattice: such etchants include but are not limited to hydrogen ( H), oxygen (〇), nitrogen (N), fluorine (f), gas (Cl), and mixtures thereof. In addition to this, a courtyard can be applied throughout the entire surface as a supplemental carbon source, and it is helpful to repair the graphite thin sheets to form a substantially continuous layered structure to v. In one aspect, the etchant and decane can be cycled over time to repair the graphite flakes to form an at least substantially continuous layered structure. Furthermore, by controlling the floating on the surface during repair 11 201131019 The amount of graphene can promote the quality of the graphene layer, too much graphene will produce irreparable gaps in the formed layer structure, and too little graphite Alkene can significantly reduce the yield. More particularly, as shown in Figure 2, a thin layer of highly graphitized graphite 12 can be spread throughout the molten solvent layer 14 that is cured in the mold 16, which includes natural graphite. In many cases, it may be beneficial to use a graphite material as the mold, however, other materials may be used as well, and are well known to those of ordinary skill in the art. Additionally, in the aspect, the thin layer of highly graphitized graphite may have a thickness of less than about #40 nm; in another aspect, the thin layer may have a thickness of less than about 2 〇 (10). It is also important to note that better results can be obtained when highly graphitized graphite is highly purified, for example, impurities in various graphites, oxygen and nitrogen) can be utilized, for example, for chlorination treatment at elevated temperatures. Was removed. Further, examples of non-limiting highly graphitized graphite include pyr〇丨jtic graphite, sputtered graphite, natural graphite (natura 丨 graph Ue) and the like. In one aspect, the degree of graphitization of the graphite is greater than about 8 〇; in another aspect, the degree of graphitization of the graphite is greater than about 9 〇; in yet another aspect, the degree of graphitization of the graphite The system is greater than 〇. 9 5. After the graphite is dispersed in the solidified solvent layer, the mold assembly can be heated in a vacuum furnace to melt the solvent material to form a molten solvent. When melted, the solvent and the graphite form a eutectic liquid, for example, if the solvent is a nickel, nickel-carbon eutectic liquid is formed along the boundary between the surface of the molten solvent and the highly graphitized graphite; the molten solvent then assists the graphene sheet from the highly graphitized graphite Patched together to become continuous graphite

S 12 201131019 烯層。該熔融溶劑係由任何能夠用於催化石墨烯之形成的材 料所組成;例如在一方面中,該熔融溶劑可包括鉻(c「)、錳 (Μη)、鐵(Fe)、始(Co)、鎳(Ni)、组(Ta)、把(pd)、始(pt)、 鑭(La)、鈽(Ce)、銪(Eu)及其相關合金和混合物。在一特定 方面中,該熔融溶劑可包括鎳。在另一特定方面中,該熔融 溶劑可大致上由鎳所組成。在又一特定方面中,該熔融溶劑 可由鎳或鎳合金所組成或大致上由鎳或鎳合金所組成。在一S 12 201131019 Olefin layer. The molten solvent is composed of any material capable of catalyzing the formation of graphene; for example, in one aspect, the molten solvent may include chromium (c"), manganese (Mn), iron (Fe), and (Co). , nickel (Ni), group (Ta), p (pd), ep (p), lanthanum (La), cerium (Ce), cerium (Eu) and related alloys and mixtures. In a particular aspect, the melting The solvent may comprise nickel. In another particular aspect, the molten solvent may consist essentially of nickel. In yet another particular aspect, the molten solvent may consist of or consist essentially of nickel or a nickel alloy. .In a

特定方面中,該熔融溶劑包括鐵、鎳和鈷。在一方面中,該 熔融溶劑剛開始係粉末狀材料而與石墨材料接觸;在另一方 面中,該固化之溶劑可為在石墨所要沉積之處上的一硬表 面’該石墨係以各種方法施加於這種表s,包括乾粉法㈣ powders)、泥漿法(S|ur「ies)、濺鐘等等。 在些情況下,所形成的石墨烯層會因為溶劑(如帶有 碳的錄)的活性而損傷,例如,碳化物鍵結會在該㈣溶劑 和石墨材料之間的卩面產生’此鍵結的強度會導致石墨烯在 從該溶融溶劑表面移除時f曲(buck|e々以撕裂(tear),因 此,在一些方面中,大致上較小活性的化合物或材料能包含 在該熔融溶劑,以減少具有石墨之熔融溶劑的活性,因此, 該熔融溶劑活性的減少能夠降低沿著界面形成之碳化物的 量,因而有助於重新獲得具有最小撕裂損害的石墨烯。 任何能夠降低該熔融溶劑之活性而讓石墨烯形成於該 熔融溶劑之上的材料係被視為本發明之範疇。在一方面中Y 該大致上較小活性之化合物可包括如金、銀、銅、錯、锡、 鋅之元素及其元素之組合或合金。在一特定方面中,該大致 上較小活性之化合物為銅。在又一特定實施例中,鎳-銅合 13 201131019 金可用於觸媒表面,對於這種合金而言,由於空的3d執道 的緣故所以炫融鎳能夠溶解石墨,而炫融銅因著其3d軌道 已經被占滿的所以無法溶解石墨,鎳銅是—種具有能在銅熔 點_。0至錄熔點1455»c間調整炫點的合金因此錦銅 口金此夠用於使在液態合金和石墨片之間之活性最佳化,此 活性不會強大到形成碳化物,但足以在石墨烯中移動碳原 子,以輕推(nudge)等碳原子至平衡位置,也就是能量最小 的位置。在另-方面中,能夠使用鋼合金,其係,因為銅 和錳能完全溶混(misc|b丨e),而使得熔點下降,其在錳含量 為 34·5 wt%時僅有 873°C。 因此石墨烯的製作係依照石墨烯和液態金屬之間獨特 的安排(unique mapping)而讓石墨烯平板生長,並減少因觸 媒反應而不穩定的缺陷位置。除此之外,重的炫融液體(密 度接近9 g/cc)能作為易碎之石墨烯(密度為以9/叫的鐵板 (iron plane),在此㈣中’流體靜力學的平衡能藉由漂浮而 保持石墨平板的大面積,為了幫助有缺陷的碳原子移動可 提供超音波震動以幫助燒結程序以及晶粒粗化生長;接著藉 由能讓顯著之晶粒不致形成或變形(buck|e)該已經形成之石 墨烯的方法冷卻該熔融液體,藉由保持溫度梯度能夠達成, 並避免對流以及非常慢的頂部冷卻。 並無意圖要結合任何特定的理論,但相信溶劑材料能催 化石墨烯層的形成,因為溶劑原子的尺寸比碳原子尺寸大得 多,該觸媒材料空的d軌道能夠「輕推(nudge)j或引導碳 原子幾乎進入碳的正確位置而形成石墨烯網狀結構,此交互 作用並不足夠強到形成碳化物,但是卻足夠強到使碳原子移 201131019 動,因此溶劑液體係作為定為碳原子的模板以形成六方石墨 烯網狀結構,當該等網狀結構形成,若有任何晶界則很多石 墨烯層堆疊而產生一些晶界,應該了解的是許多石墨烯堆疊 體,所產生的石墨烯層越遠離觸媒表面,則越容易開始產生 晶界。 例如液態鎳能夠在石墨烯形成時排列石墨烯層中任何 其他的原子,該液態模板的流動性質會環繞式&(a「〇und)輕 推石墨原子,以修補石墨片之間的界面,其他仍有很多關於 自動修補石墨修補片段(patch)的自組機制的細微細節,必須 在石墨烯上有兩個不同的碳原子區域,雖然獨立的石墨烯平 板採用六角形圖案,但複數石墨層會稍微彎曲(buck|ed)而具 有阿法(alpha)區和貝塔(beta)g。石墨烯平板只要有其他原 子(阿法區)對齊於整體平板後才會移動而對齊,其他大半部 分的原子則位於鄰近六角形的中央。由於阿法區是以凡得瓦 耳力所鍵結,所以晃動的電子太微弱而無法與鎳原子交互作 鲁用,只有貝塔區的碳原子能夠受到鎳的3d軌道之空位 (vacancies)所吸引,此意味著石墨婦修補片段必須朝向有關 的鎳原子,在本質上,其會輕推石墨片而遍及於鎳表面。 能藉由以上所述之熔融溶劑的催化效果而減少任何在 石墨烯層的晶界,因此形成較大區域、高品質的石墨烯層, 且右有任何晶界存在的話則具有極少的晶界。在一些方面 中,該石墨烯能大致上缺乏晶界或完全無晶界。所形成之石 墨烯層常常大致上與供其形成於其上的表面有相同的尺 寸該溶融觸媒表面準確的水平定向能因此有助於具有高平 坦度之石墨烯層的形成。值得注意的是,此程序能用以成形 15 201131019 單一原子厚度的石墨烯層,或者一具有複數個別之石墨烯層 平行堆疊之石墨烯層或平板。在後述的情形中,石墨烯層的 堆疊因著複數石墨烯層大致上不具有結構性的晶界而具有 冋電子移動性以及尚熱導性。在一些情形中係形成該石墨的 薄層,且能分隔成為複數石墨稀層。 模具總成的溫度所能被提高的程度依照溶劑的性質以 及石墨烯產物所欲達到之特性而決定。然而在一方面中,該 模具總成係被加熱至大於約1 〇〇〇。C ;在另一方面中,該模 具總成係被加熱至大於約130(TC ;在又一方面中,該模具 總成係被加熱至大於約150CTC。同樣地,石墨烯能在各種 壓力中被製造,例如在一方面中,真空爐中的壓力係小於約 5托耳(Τοιτ);在另-方面中’真线中的壓力係從約ι〇·3 至約1 (Γ6托耳。 在石墨婦層形成之後’冷卻該模具總成以有助於石墨稀 產物的移除。在一些方面中’均勻冷卻該表面以維持表面的 平坦度是有幫助的n面中,這種冷卻能夠藉由將孰從 溶劑表面之下傳導出來,並維持溶劑表面之上的熱在高溫中 而完成ϋ溶劑冷卻,石㈣層可從表面撕下,石墨稀能 夠以單層狀或多層狀從表面撕下,由於在層狀結構之間有 3_35埃(Α)的間隔,所以能夠產生這種撕下的動作。根據溶 Μ表面的尺寸’石墨烯層能夠持續地被撕下並能夠捲繞於一 捲軸狀裝置。 ' 圖3到圖6顯示已在此所述之石墨烯的顯微照片。圖3 顯不形成於其上具有詩紋路的石墨層,如所述的,石 層能夠從此石墨層分隔。如圖4所示,放大的敵 201131019 石墨層為連續的且無大致上破裂。圖5顯示石墨層的可撓 性’圖6顯示在露出之石墨稀層表面微生物⑽cr〇be)的密 度分布,在石墨烯層上的微生物能藉由加熱至約5〇。〇而被 移除。此為可逆反應,因此該等石墨稀層能作為微生物的感 應器。In a particular aspect, the molten solvent comprises iron, nickel, and cobalt. In one aspect, the molten solvent is initially in contact with the graphite material as a powdered material; in another aspect, the curing solvent can be a hard surface at the point where the graphite is to be deposited 'the graphite is in various ways Applied to such a table, including dry powder method (four) powders), mud method (S | ur "ies", splashing clock, etc. In some cases, the formed graphene layer will be due to solvent (such as with carbon recorded) The activity is impaired, for example, the carbide bond will produce a 'the strength of the bond between the (iv) solvent and the graphite material. The strength of this bond will cause the graphene to f-buck when removed from the surface of the molten solvent (buck| E々 is torn, and therefore, in some aspects, a substantially less active compound or material can be included in the molten solvent to reduce the activity of the molten solvent having graphite, and thus, the activity of the molten solvent is reduced. The amount of carbide formed along the interface can be reduced, thereby helping to regain the graphene with minimal tear damage. Any activity that reduces the activity of the molten solvent and allows graphene to form on the molten solvent Materials are considered to be within the scope of the invention. In one aspect, the substantially less active compound may comprise a combination or alloy of elements such as gold, silver, copper, aluminum, zinc, zinc, and combinations thereof. In one aspect, the substantially less active compound is copper. In yet another particular embodiment, nickel-copper 13 201131019 gold can be used for the catalyst surface, for which the empty 3d is obsessed Therefore, the smelting of nickel can dissolve graphite, and the smelting copper cannot be dissolved due to its 3d orbital. Nickel-copper is a kind of sleek point that can be adjusted between the melting point of copper _.0 and the melting point of 1455»c. The alloy is therefore sufficient to optimize the activity between the liquid alloy and the graphite flakes. This activity is not strong enough to form carbides, but is sufficient to move the carbon atoms in the graphene to nudge (nudge a carbon atom to an equilibrium position, that is, a position where energy is the smallest. In another aspect, a steel alloy can be used, which is because the copper and manganese are completely miscible (misc|b丨e), and the melting point is lowered. It is only when the manganese content is 34·5 wt% 873 ° C. Therefore, the production of graphene allows graphene plates to grow in accordance with the unique mapping between graphene and liquid metal, and reduces the position of defects that are unstable due to catalyst reaction. Heavy smelting liquid (density close to 9 g/cc) can be used as fragile graphene (density is 9/called iron plane), in which the hydrostatic balance can be floated by Maintaining a large area of the graphite plate, in order to help the movement of defective carbon atoms, can provide ultrasonic vibration to help the sintering process and grain coarsening growth; then by allowing significant grains to not form or deform (buck|e) The method of forming graphene cools the molten liquid, which can be achieved by maintaining a temperature gradient, and avoids convection and very slow top cooling. It is not intended to be combined with any particular theory, but it is believed that the solvent material can catalyze the formation of the graphene layer because the size of the solvent atoms is much larger than the carbon atom size, and the empty d orbital of the catalyst material can be nudged. j or direct the carbon atoms into the correct position of the carbon to form a graphene network, this interaction is not strong enough to form carbides, but strong enough to move the carbon atoms 201131019, so the solvent liquid system is defined as a template of carbon atoms to form a hexagonal graphene network structure. When these network structures are formed, if there are any grain boundaries, many graphene layers are stacked to form some grain boundaries. It should be understood that many graphene stacks are produced. The farther the graphene layer is from the catalyst surface, the easier it is to start to produce grain boundaries. For example, liquid nickel can arrange any other atoms in the graphene layer when graphene is formed, and the flow properties of the liquid template will wrap around & "〇 und" pushes the graphite atoms to repair the interface between the graphite sheets. There are still many self-organizing machines for automatically repairing the graphite patch patches. The fine details must have two different carbon atom regions on the graphene. Although the individual graphene plates have a hexagonal pattern, the multiple graphite layers will be slightly bent (buck|ed) and have an alpha region and Beta g. The graphene plate will move and align as long as other atoms (Alpha region) are aligned with the entire plate, and most of the other atoms are located in the center of the adjacent hexagon. The gas force is bonded, so the sloshing electrons are too weak to interact with the nickel atoms. Only the carbon atoms in the beta zone can be attracted by the 3d orbital vacancies of nickel, which means that the graphite patch must be repaired. Towards the relevant nickel atom, in essence, it will push the graphite sheet over the nickel surface. The grain boundary of the graphene layer can be reduced by the catalytic effect of the above-mentioned molten solvent, thus forming a large area. , a high-quality graphene layer, and any grain boundary on the right has very few grain boundaries. In some aspects, the graphene can be substantially lacking grain boundaries or completely The grain boundary formed. The graphene layer formed is often substantially the same size as the surface on which it is formed. The accurate horizontal orientation of the molten catalyst surface thus contributes to the formation of a graphene layer having a high degree of flatness. It is worth noting that this procedure can be used to shape a graphene layer of a single atomic thickness of 15 201131019, or a graphene layer or a flat plate with a plurality of individual graphene layers stacked in parallel. In the latter case, the stacking of graphene layers Due to the fact that the plurality of graphene layers have substantially no structural grain boundaries, they have erbium electron mobility and thermal conductivity. In some cases, a thin layer of the graphite is formed and can be separated into a plurality of graphite thin layers. The extent to which the temperature can be increased is determined by the nature of the solvent and the desired properties of the graphene product. However, in one aspect, the mold assembly is heated to greater than about 1 Torr. C; in another aspect, the mold assembly is heated to greater than about 130 (TC; in yet another aspect, the mold assembly is heated to greater than about 150 CTC. Similarly, graphene can be in various pressures It is manufactured, for example, in one aspect, the pressure in the vacuum furnace is less than about 5 Torr; in another aspect, the pressure in the 'true line is from about ι 〇 3 to about 1 (Γ 6 Torr). Cooling the mold assembly after the formation of the graphite layer to aid in the removal of the graphite thin product. In some aspects 'cooling the surface evenly to maintain the flatness of the surface is helpful n-face, this cooling can The stone (four) layer can be removed from the surface by conducting the ruthenium out of the surface of the solvent and maintaining the heat above the surface of the solvent at a high temperature, and the graphite can be removed in a single layer or a plurality of layers. The surface is torn off, and this tearing action can be produced due to the interval of 3_35 angstroms (层) between the layered structures. The graphene layer can be continuously torn and can be wound according to the size of the molten surface. In a reel-like device. 'Figures 3 to 6 show that it is here. A photomicrograph of graphene. Figure 3 is not formed on a graphite layer having a striated path thereon, as described, the stone layer can be separated from the graphite layer. As shown in Fig. 4, the enlarged enemy 201131019 graphite layer is continuous. Figure 5 shows the flexibility of the graphite layer. Figure 6 shows the density distribution of the microbes (10)cr〇be on the exposed graphite layer. The microorganisms on the graphene layer can be heated to about 5 It is removed. This is a reversible reaction, so these graphite thin layers can act as a sensor for microorganisms.

如上所述,在一些情形中,石墨烯層能夠從形成於溶劑 表面之厚的石墨層所分隔出來。各種分隔該等石墨烯層的方 法都有可能,其皆包含於本發明之範疇中。在一方面中,該 石墨層能在硫酸中加熱’硫原子的插入能夠將該石墨烯層分 隔成複數石墨烯層’之後各石墨婦層能夠被純化(例如在高 溫下的氫氣或齒素環境中)而移除雜質和/或缺陷。 在本發明另-方面t,能夠使用氣化程序而消除缺陷, 因為在石墨稀中的缺陷和晶界是不敎的,位於末端位子的 碳原子係、傾向於被溶解,而在石墨稀網狀結構中的碳原子則 相對穩定。引人加熱後的氧氣或蒸氣遍及於石墨烯層的表面 .能夠引起欲晶界有關之不穩定的碳原子氣化成—氧化碳(c〇) 或二氧化碳(co2),藉由控制c〇/c〇2比例(分壓),碳原 子能夠從缺陷位置被移除m各種方式生長至石墨婦片 體中°除了氧之外’齒素氣體(例如氟和氣)也能使用。 石墨烯層能夠另外以含碳氣體(例如甲烧、乙院、丙烧、 丁炫等)之熱分解的方式生長,這種方式能夠使用於生長高 質石墨#因為石厌的溶解度受到控制而避免碳的過飽和以 及快速且不又控制的生長。因此,能夠添加含碳氣體(例如 C0/C02)的⑨合物’ J_—氧化碳和:氧化碳之分屋能夠不 同,以控制碳在熔融溶射碳的濃度,藉此使所產生之石墨 17 201131019 烯層中的缺陷最小化。 - 亦可使用固態金屬基材來製造石墨烯層。在—方面,兴 例而s,一形成石墨層(或石墨稀層)的方法包含.在真 空狀態下加熱一固態基材到達一溶解溫度(solub丨丨丨zing temperature),該溶解溫度低於該固態金屬基材的熔點;以 及將來自一石墨來源的碳原子溶解於該被加熱的固態金屬 基材之中。藉由加熱該固態金屬基材可增加該石墨來源令的 碳原子在該固態金屬基材中的溶解度,藉此能使碳原子移動 到該金屬之中。該方法可進一步包含以一充分的速率來冷卻 # 該被加熱的固態金屬基材達以使得該溶解的碳原子形成一 石墨層到該固態金屬基材的任何表面上。前述表面可包含鄰 接石墨來源的表面以及/或是與石墨來源相對的表面。在形 成石墨層後,可由該固態金屬基材移除該石墨層。在某些方 面,可在加熱以及/或是冷卻該固態金屬基材時採用真空條 件以避免在形成石墨烯時氧化。 可考慮各種固態金屬基材,且任何這類能夠溶解碳原子 的固態金屬基材均視為在本發明之範疇之t。在一方面,舉 修 例而言,該固態金屬基材包含了 一成分,該成分是選自於鉻 (Cr)、猛(Μη)、鐵(Fe)、鈷(Co)、鎳(Ni)、纽(Ta)、把(Pd)、 始(Pt)、鑭(La)、鈽(Ce)、銪(Eu)、鈒(丨「)、釕(Ru)、铑(Rh)、 其相關合金以及其結合物的其中一種。在一特定方面,該固 態金屬基材包含鎳。 在某些方面,可使用一大致上較少活性的材料來調整碳 原子在固態金屬基材之中的溶解度。該大致上較少活性材料 的例子包含而不受限於金(Au)、銀(Ag)、銅((:…鉛(pb)、 18 201131019 錫(Sn)、鋅(Zn)、其結合以及其合金,如文中先前述。大致 上較少活性的材料可以各種不同方式結合到該固態金屬基 材上以調整碳原子的溶解度。在一方面,舉例而言該大致 上較少活性的材料可混合於固態金屬基材内。前述舉例而言 可包括混合物以及合金等等。在另—方面,該固態金屬基材 可形成為一多層(multilayer)固態金屬基材。舉例而言,在一 方面,該固態金屬基材包含一第一金屬層以及—第二金屬 層,其中該第一金屬層是一用來溶解碳原子的固態金屬基材 材料,且該第二金屬層是用來調整碳原子溶解度的大致上較 少活性的材料。在一特定定的例子中,可結合一鎳層到一銅 層上。當該加熱該複合材料,可將一相鄰的石墨來源中的碳 原子溶解到該鎳層之中。由於碳原子在銅層的溶解度大致上 較低,因此碳原子將會主要集中於該鎳層之中。 相較於熔融溶劑,使用固態金屬基材的其中一項益處是 該固態金屬基材的結樣穩定度較熔融液體來的優異。在熔融 φ 溶劑的例子之中,一金屬材料進行熔融石墨烯形成於該液態 金屬的表面。當該金屬材料經加熱並冷卻而固化,由於至少 一部分表面張力改變而使金屬材料表面形狀改變。此表面形 狀改變可導致在金屬材料表面上所形成的石墨烯層在某些 狀況下產生缺陷。透過將碳原子溶解在一加熱達一溫度的固 態金屬基材之中且該溫度低於該基材熔點,其生長表面的外 形與表面配置大致上不會改變,且於某些例子中,可使得石 墨稀層有較少的缺陷。 因此,該碳原子所溶解時的溫度(溶解溫度)可根據用 於該固態金屬基材的材料的不同而改變。任何維持該固態金 19 201131019 屬基材表面形狀而可溶解碳原子的溫度均應考慮包含在本 發明之範疇内。在一特定方面,該固態金屬基材是鎳,且該 溶解溫度是由大約500。C到大約1450。C。在另一方面,該 固態金屬基材是鎳,且該溶解溫度是由大約5〇〇ec到大約 1000 C。在又另一方面,該固態金屬基材是鎳且該溶解 溫度是由大約700 ° C到大約800。C β 亦可根據固態金屬基材以及所形成的石墨稀的性質來 改變該固態金屬基材的冷卻速率,應注意該被加熱的固態金 屬基材可進行主動式或被動式冷卻以達到特定的冷卻速 率。快速的冷卻速率相較慢的冷卻速率會將碳原子更快地拉 出金屬基材,此可能導致石墨烯材料有不同的特性或不同的 晶格品質。 在某些方面,在形成該石墨烯層時,該固態金屬基材可 被放置在一支撐基材上。該固態金屬基材可結合到該支撐基 材上或者其僅僅是設置在該支撐基材上。除了提供支撐性, 該支撐基材亦可辅助調節熱度,特別是冷卻的速率。所增加 的支樓基材質量,可能配合使用熱力調節材料,可使該固態 金屬基材能夠在空間以及時間方面更均勻地冷卻。 該石墨碳來源可結合在該固態金屬基材的各個位置 處。在一方面,舉例而言,該石墨碳來源可設置在支撐基材 以及固態金屬基材之間。在此例子之中,石墨烯可形成在該 固態金屬表面且介於石墨碳來源以及固態金屬表面之間;其 可透過移動穿過固態金屬基材的方式而形成在固態金屬基 材上且相對石墨碳來源;或是其可同時形成在這些不同表面 上。在另一方面’該石墨碳來源可設置在該固態金屬基材的 201131019 表面上且相對該支撐基材。在此例子中,石墨烯可形成在該 該固態金屬基材上且介於石墨碳來源以及固態金屬基材之 間;其可透過移動穿過固態金屬基材的方式形成在於該固態 金屬基材料上且相對石墨碳來源,且固態金屬基材不結合到 該支撲基材上’或者其可同時形成在這些不同表面上。 除了石墨以及高度石墨化的石墨,亦可使用鑽石材料來 作為碳來源以形成石墨烯層以應用於熔融溶劑以及固態金 屬基材的情況之中,且該鑽石可在一低於固態金屬基材的熔 鲁點的溫度下溶解。所使用的鑽石材料可包含天然鑽石、人造 鑽石、單晶鑽石、多晶鑽石、類鑽碳(diam〇nd丨ike carbon, DLC)、無晶鑽石(amorph〇us djam〇nd)以及其他類似物。使 用此鑽石材料的其中一項益處是能產生菱形六面體 (「hombohedral)序列(ABCABC…)的石墨烯層而非產生傳 統ABABAB....的序列。因此,在一方面一形成菱形六面體 石墨層的方法可包含:混合一鑽石來源以及一水平定向的熔 • 融’合劑,且沉澱在該熔融溶劑中的鑽石來源以形成一遍佈於 溶融溶劑中的菱形六面體石墨層。 在本發明之一些方面中,石墨烯層能夠摻雜各種摻雜 物,摻雜物能用以改變石墨烯層的物理性質,和/或其能用 以改變在石墨烯層堆疊體之石墨烯層之中的物理交互作 知·種摻雜能在該石墨層形成時藉由將摻雜物添加至熔融 ^ 生’或者能在石墨層形成之後藉由在層狀結構中 積杉雜物而產生。例如藉由摻雜硼能夠形成P型半導體。As described above, in some cases, the graphene layer can be separated from the thick graphite layer formed on the surface of the solvent. Various methods of separating the graphene layers are possible, and are included in the scope of the present invention. In one aspect, the graphite layer can be heated in sulfuric acid. 'The insertion of sulfur atoms can separate the graphene layer into a plurality of graphene layers'. After each graphite layer can be purified (for example, hydrogen or dentate environment at high temperature) Medium) and remove impurities and/or defects. In another aspect of the invention, it is possible to use a gasification process to eliminate defects, since the defects and grain boundaries in the graphite thinning are not flawed, the carbon atom system located at the terminal position tends to be dissolved, and in the graphite thin mesh The carbon atoms in the structure are relatively stable. The heated oxygen or vapor spreads over the surface of the graphene layer. It can cause the unstable carbon atoms related to the grain boundary to be vaporized into carbon monoxide (c〇) or carbon dioxide (co2) by controlling c〇/c. 〇 2 ratio (partial pressure), carbon atoms can be removed from the defect position m is grown in various ways to the graphite wafer body. In addition to oxygen, 'dental gases (such as fluorine and gas) can also be used. The graphene layer can be additionally grown by thermal decomposition of a carbon-containing gas (for example, smoldering, yoke, propylene, ding, etc.), which can be used for growing high-quality graphite # because the solubility of stone anaesthesia is controlled Avoid supersaturation of carbon and fast and uncontrolled growth. Therefore, it is possible to add a carbonaceous gas (for example, C0/C02) of the 9 compound 'J_-oxygen carbon and: the carbon oxide partition can be different to control the concentration of carbon in the molten molten carbon, thereby causing the produced graphite 17 201131019 Defects in the olefin layer are minimized. - A solid metal substrate can also be used to make the graphene layer. In the aspect of the invention, a method of forming a graphite layer (or a thin layer of graphite) comprises: heating a solid substrate under vacuum to a solubilization temperature, the dissolution temperature being lower than a melting point of the solid metal substrate; and dissolving carbon atoms from a graphite source in the heated solid metal substrate. By heating the solid metal substrate, the solubility of the carbon source of the graphite source in the solid metal substrate can be increased, whereby carbon atoms can be moved into the metal. The method can further comprise cooling the heated solid metal substrate at a sufficient rate such that the dissolved carbon atoms form a graphite layer onto any surface of the solid metal substrate. The foregoing surface may comprise a surface adjacent to the graphite source and/or a surface opposite the graphite source. After forming the graphite layer, the graphite layer can be removed from the solid metal substrate. In some aspects, vacuum conditions can be employed to heat and/or cool the solid metal substrate to avoid oxidation upon formation of graphene. Various solid metal substrates can be considered, and any such solid metal substrate capable of dissolving carbon atoms is considered to be within the scope of the present invention. In one aspect, the solid metal substrate comprises a component selected from the group consisting of chromium (Cr), strontium (Mn), iron (Fe), cobalt (Co), and nickel (Ni). , New (Ta), Put (Pd), Start (Pt), 镧 (La), 钸 (Ce), 铕 (Eu), 鈒 (丨 "), 钌 (Ru), 铑 (Rh), related alloys And one of its combinations. In a particular aspect, the solid metal substrate comprises nickel. In some aspects, a substantially less active material can be used to adjust the solubility of carbon atoms in the solid metal substrate. Examples of such substantially less active materials include, without limitation, gold (Au), silver (Ag), copper ((:...lead (pb), 18 201131019 tin (Sn), zinc (Zn), combinations thereof, and Alloys thereof, as previously described herein. Substantially less active materials can be bonded to the solid metal substrate in a variety of different ways to adjust the solubility of the carbon atoms. In one aspect, for example, the substantially less active material can be Mixed in a solid metal substrate. The foregoing examples may include mixtures and alloys, etc. In another aspect, the The metal substrate can be formed as a multilayer solid metal substrate. For example, in one aspect, the solid metal substrate comprises a first metal layer and a second metal layer, wherein the first metal layer Is a solid metal substrate material for dissolving carbon atoms, and the second metal layer is a substantially less active material for adjusting the solubility of carbon atoms. In a specific example, a nickel layer may be bonded to On a copper layer, when the composite is heated, carbon atoms in an adjacent graphite source can be dissolved into the nickel layer. Since the solubility of carbon atoms in the copper layer is substantially lower, the carbon atoms will Mainly concentrated in the nickel layer. One of the benefits of using a solid metal substrate compared to a molten solvent is that the stability of the solid metal substrate is superior to that of a molten liquid. In the example of melting a φ solvent A molten metal is formed on the surface of the liquid metal by a metal material. When the metal material is heated and cooled to solidify, the surface shape of the metal material is changed due to at least a part of the surface tension change. The surface shape change may cause the graphene layer formed on the surface of the metal material to be defective under certain conditions by dissolving the carbon atoms in a solid metal substrate heated to a temperature and the temperature is lower than The melting point of the substrate, the shape and surface configuration of the growth surface are not substantially changed, and in some cases, the graphite thin layer may have fewer defects. Therefore, the temperature at which the carbon atom is dissolved (dissolution temperature) It may vary depending on the material used for the solid metal substrate. Any temperature that maintains the surface shape of the solid gold 19 201131019 to dissolve the carbon atoms should be considered to be included in the scope of the present invention. In aspect, the solid metal substrate is nickel and the dissolution temperature is from about 500 ° C to about 1450. C. In another aspect, the solid metal substrate is nickel and the dissolution temperature is from about 5 〇〇 ec to about 1000 C. In yet another aspect, the solid metal substrate is nickel and the dissolution temperature is from about 700 ° C to about 800. C β can also change the cooling rate of the solid metal substrate according to the solid metal substrate and the thinness of the formed graphite. It should be noted that the heated solid metal substrate can be actively or passively cooled to achieve specific cooling. rate. A fast cooling rate with a slower cooling rate will pull carbon atoms out of the metal substrate faster, which may result in graphene materials with different properties or different lattice qualities. In some aspects, the solid metal substrate can be placed on a support substrate when the graphene layer is formed. The solid metal substrate can be bonded to the support substrate or it can only be disposed on the support substrate. In addition to providing support, the support substrate can also assist in regulating the heat, particularly the rate of cooling. The increased quality of the support substrate, possibly in conjunction with the use of thermal conditioning materials, allows the solid metal substrate to be more uniformly cooled in space and time. The graphite carbon source can be incorporated at various locations on the solid metal substrate. In one aspect, for example, the graphite carbon source can be disposed between the support substrate and the solid metal substrate. In this example, graphene may be formed on the solid metal surface and between the graphite carbon source and the solid metal surface; it may be formed on the solid metal substrate by moving through the solid metal substrate and relatively Graphite carbon source; or it can be formed on these different surfaces simultaneously. In another aspect, the graphite carbon source can be disposed on the surface of the 201131019 of the solid metal substrate and opposite the support substrate. In this example, graphene may be formed on the solid metal substrate and between the graphite carbon source and the solid metal substrate; it may be formed by moving through the solid metal substrate in the solid metal-based material. Upper and opposite graphite carbon sources, and the solid metal substrate is not bonded to the baffle substrate' or it can be formed on these different surfaces simultaneously. In addition to graphite and highly graphitized graphite, diamond materials can also be used as a carbon source to form a graphene layer for use in molten solvents and solid metal substrates, and the diamond can be used in a lower than solid metal substrate. The melting point of the melting point is dissolved. The diamond materials used may include natural diamonds, synthetic diamonds, single crystal diamonds, polycrystalline diamonds, diam〇nd丨ike carbon (DLC), amorph〇us djam〇nd and others. . One of the benefits of using this diamond material is the ability to produce a graphene layer of the rhombohedral sequence (ABCABC...) rather than a sequence of traditional ABABAB.... Thus, on one hand, a diamond 6 is formed. The method of planar graphite layer can comprise: mixing a source of diamond and a horizontally oriented melt-blending mixture and depositing a source of diamond in the molten solvent to form a rhombohedral graphite layer throughout the molten solvent. In some aspects of the invention, the graphene layer can be doped with various dopants, the dopant can be used to alter the physical properties of the graphene layer, and/or it can be used to alter the graphene in the graphene layer stack The physical interaction between the layers allows for the doping of the graphite layer to be formed by adding dopants to the molten layer or by forming debris in the layered structure after formation of the graphite layer. A P-type semiconductor can be formed, for example, by doping boron.

種杉雜物都能用以摻雜於石墨烯層中,特定非限制性的範 例包括蝴、碰、U φ 氣以及其組合。摻雜也能用於改變石墨層特 21 201131019 定$域的電子移動性,以在層狀結構中形成電路,這種區域 特疋的摻雜能夠在一石墨烯層中分布電路圖形。再者,告石 墨烯層具有高度電子移動性時,於堆疊體中的石墨烯層之間 的導電性則會被限制。藉由摻雜金屬原子或其他導電性材 在隹曼之層狀結構中的電子移動性能夠增加。 本發明又提供依據在此所述之步驟而製造的石墨稀 層,思種層狀結構可包括單一石墨烯層或複數石墨烯層的堆 疊體;再者,如上所述,本發明方面中的石墨烯層具有高品 質的材料,若有任何晶界存在的話則具有極少的晶界,^此 之外石墨烯層能夠根據在此所述之各方面所製成,由於石 土烯材料的合成係遍及全部的溶劑或觸媒表面,所以其具有 比先刖可能的方面更大的尺寸,但應了解依據本發明所製造 具有任何尺寸之石墨層皆視為在本發明之範疇中,本發明之 方法特別符合大面積的石墨烯層,這種層狀結構的尺寸需要 依照觸媒表面的尺寸而各有不同,然而在一特定方面中,石 墨層的尺寸能大於約1.0 mm2 ;在另一方面中,石墨層的尺 寸係從約1.0 mm2至約1〇 mm2;在又一方面中,石墨層的 尺寸係從約10 mm2至約1〇〇 mm2 ;尚於一方面中,該石墨 層的尺寸係大於約1〇〇 mm2;另於一方面中,石墨層的尺寸 係大於約1 〇 cm2 ;更於一方面中,石墨層的尺寸係大於約 100 cm2 ;又於一方面中,石墨層的尺寸係大於約j m2。 石墨稀層的物理特性使其成為一有利於結合至各種裝 置的材料。能夠考慮很多裝置和用途,以下的範例不應被視 為有任何限制。例如,在一方面中,石墨烯的高電子移動性 使其能作為積體電路的元件;在另一方面令,石墨烯能夠作 .201131019 為偵測單一或複數分子(包括氣體)的感測器,石墨層的2 維(2D)結構能有效將石墨烯之材料的整體暴露於周遭環境 中’因此使其成為偵測分子的有效材料,這種分子偵測能夠 間接量測’當氣體分子吸收於石墨烯之表面,吸收的位置會 在電阻方面呈現局部轉變。石墨稀是一種對於這種彳貞測的有 利材料,因其高導電性以極低雜訊,而導致電阻的改變能被 偵測。在另一方面中,石墨層可用於作為表面聲波濾波器 (SAW filter),在此情形中,由於石墨烯材料的共振,所以 忐夠傳遞電壓訊號。在又一方面中,能使用石墨烯作為壓力 感測器。另於一方面中,石墨烯層可用於作為發光二極體 (LED)、液晶顯示器(LCD)以及太陽能電池板之應用的透明電 極。除此之外,石墨烯能夠與絕緣材料(例如My丨ar@)膜 共同捲繞以製造電容器。再者,石墨烯能夠與絕緣的六方氮 化硼共同捲繞以製造絕佳的電容器材料。而且石墨烯鋪設於 半導體材料(例如矽)上,且經蝕刻而產生電子裝置的電子 連接線路(electricalinterconnect)。 本發明又提供六方氮化硼層以及相關方法。例如在一方 面中係提供一種形成六方氮化硼層的方法,這種方法可包括 混合氮化硼源和水平定向之熔融溶劑,並且從該熔融溶劑中 况焱該氮化硼源以形成遍及於該熔融溶劑的六方氮化硼 層在一方面中,混合氮化蝴源和熔融溶劑包括提供該氮化 硼源至一固化之溶劑層’並在氮氣環境下加熱該固化之溶劑 層以溶融該固化之溶劑層&為…溶融溶冑,而讓該炫融溶劑 以及從氮化硼源而來的硼與氮原子形成一共熔(eutectjc)液 體。在另一方面中,從該熔融溶劑中沉澱該氮化硼源包括保 23 201131019 持該熔融溶劑和氮化硼源在共熔液體的狀態,而讓六方氮化 棚層形成而大致上遍及於整個熔融溶劑。 更特定的是顯示於圖7,一氮化硼源薄層(例如薄片32 ) 能夠分散於在模具36中固化之熔融溶劑層34上。在很多情 形中’使用氮化财料作為模具是有利的,但是其他材料也 一樣有用,且於所屬技術領域中具有通常知識者所能知悉 的。除此之外,在一方面中,氮化硼源薄層可具有小於約 40nm的厚度;在另一方面中,氮化硼源薄層可具有小於約 20nm的厚度。 在將氮化硼分散於該固化之熔融溶劑層之後,模具總成 會在具有氮氣環境之鍋爐中被加熱以熔化該溶劑層。該氮氣 環境用於阻止從氮化硼形成的氮蒸氣,再者,在熔融金屬中 氮的溶解度係遠低於硼,氮的溶解度能夠藉由添加氮吸收劑 (例如鎳、鈷、鐵、鎢、錳、鉬、鉻及其組合物)而增加, 藉由增加氮的溶解度,能夠增加層狀結構的生長率,並減少 缺陷的密度。 因此該觸媒表面有助於將六方氮化硼薄片從氮化硼源 修補為連續性六方氮化硼。該熔融觸媒係由任何能催化連續 之六方氮化硼層形成之材料。例如在一方面中,該熔融觸媒 包括經(Li)、鈉(Na)、鉀(K)、錄i(Rb)、鈹(Be)、鎂(Mg)、鈣 (Ca)、锶(Sr)、鋇(Ba)、氫化鋰(LiH)、氮化鋰<ϋ3Ν)、氮化 鈉(NhN)、氮化鎂(Mg"2)、氮化鈣(Canj及其合金和組合 物;在一特定方面中,該觸媒表面包含氮化鋰;在另一特定 方面中,該觸媒表面大致上由氮化鋰所組成。在又一特定方 面中’氫化鋰能使用作為熔融溶劑。 201131019 任何在六方氮化硼層中的晶界能藉由熔融溶劑的催化 效果而減少,因此形成大面積、高品質的六方氮化硼層,若 有任何晶界存在的話則具有極少的晶界。所形成之六方氮化 蝴層與供其生成於其上之觸媒溶劑大致上有相同的尺寸。熔 融溶劑平坦的水平定向有助於高度平面化之六方氮化硼層 的形成。值得注意的是此程序能用以形成單一原子厚度的六 方氮化硼層,或者一六方氮化硼層,或者具有複數個別之六 籲方氮化硼層平行堆疊之平板。在之後的情形中,六方氮化硼 層的堆疊體具有高電子移動性以及高導熱性,其係因為複數 六方氮化硼層具有大致上非結構性的晶界。 模具總成能被加熱之溫度能夠依照熔融溶劑的性質以 及六方氮化硼產物所要的特性而有所不同。然而在一方面 中’該模具總成能被加熱至大於約1 〇00。c;再另一方面中, 該模具總成能被加熱至大於約】3〇〇。c ;在又一方面中,該 模具總成能被加熱至大於約15〇(rc。同樣地,六方氮化硼 鲁月匕在各種壓力中產生’例如在一方面中,在銷爐中的氣氣環 境係小於約1 atm。 在該六方氮化硼層形成後,該模具總成能冷卻而有助於 六方氮化蝴產物的移除。在—些方面中’均句冷卻表面以維 持該溶劑表面的平坦度是有利的。在一方面中,這種冷卻能 藉由,溶融溶劑之下傳導熱量並維持在溶融溶劑之上的熱 ;車乂间的皿度而凡成…旦溶劑冷卻,六方氮化則可從表 面撕下’六方氮化蝴撕下而成為單—層狀結構或複數層狀結 構。依據觸媒表面的尺寸’六方氮化蝴能夠持續地被撕下並 能夠捲繞於一捲軸狀裝置。 25 201131019 在本發明之一些方面中,六方氮化硼層能夠摻雜各種摻 雜物,掺雜物能用以改變六方氮化硼層的物理性質,和/或 其能用以改變在六方氮化硼層堆疊體之六方氮化硼層中的 物理交互作用。這種摻雜能在該六方氮化硼層形成時藉由將 摻雜物添加至模具總成中而產生,或者能在六方氮化硼層形 成之後藉由在層狀結構中沉積摻雜物而產生。各種摻雜物都 能用以摻雜於六方氮化硼層中,特定非限制性的範例包括 矽、鎂及其組合物。將矽摻雜於六方氮化硼而形成N型半導 體材料。 ^ 本發明還提供依照在此所述之步驟所製成的六方氮化 硼,這種層狀結構包括單一六方氮化硼層或複數六方氮化硼 層的堆疊體。再者,如上所述,根據本發明方面的該等六方 氮化硼層為高品質材料,若有任何晶界存在的話則具有極少 的晶界。除此之外,六方氮化硼層能夠根據在此所述之各方 面所製成,由於六方氮化硼材料的合成係遍及全部的觸媒表 面所以其具有比先前可能的方面更大的尺寸,但應了解依 據本發明所製造具有任何尺寸之六方氮化硼層皆視為在本 籲 發明之範4中,本發明之方法特別符合大面積&六方氮化硼 層,這種層狀結構的尺寸需要依照觸媒表面的尺寸而各有不 同,然而在一方面中,六方氮化硼層的尺寸能大於約10 2 · mm ;在另一方面中,六方氮化硼層的尺寸係從約1〇阳巾2 至約10 mm2;在又一方面中,六方氮化硼層的尺寸係從約 10 mm至約1〇〇 mm2 ;尚於一方面中,六方氮化硼層的尺 寸係大於約100 mm2;另於一方面中,六方氮化硼層的尺寸 係大於約10 cm2;更於一方面中,六方氮化硼層的尺寸係 £ 26 .201131019 大於約100 cm2 ;又於一方面中,六方氮化硼層的尺寸係大 於約1 m2。 六方氮化硼層的物理特性使其成為一有利於結合至各 種裝置的材料。能夠考慮很多裝置和用途,以下的範例不應 被視為有任何限制。例如,在一方面中,六方氮化硼具有一 尚月b隙(5.97 eV)並且能發出遠紫外線(deep uv,約波長215 nm)。因此,六方氮化硼能用於作為一 LED或太陽能電池。 鲁 例如,該等材料具固體最短的鍵結長度(1 ·42 A),所以比兩 維的鑽石還硬,故其具有非常大的能隙,能夠發射遠紫外 線,此對於奈米微影技術以及UV激發螢光非常有用以形成 白光LED。能形成P-N介面以製造電晶體,其係能原位 (in-situ)形成石墨烯互連接電路。再另一實施例中石墨烯 或單一氮化硼也具有高音速以及導熱性,因此,其能用於超 向頻率的表面聲波濾波器、超音速產生器以及散熱器。因著 六角對稱性’該等材料也有壓電性質(piez〇e丨ectrjc)。在另 _ 一貫施例中,石墨烯或氮化硼層能用於作為化學吸附氣體的 感應器、用於藉由在水溶液中電解以分析離子(如鉛)之 ρΡβ程度的精密電極(delicate electrode)、具有氫氣終結之 透明電極等。 應該注意的,該六方氮化硼能藉由熔融鎳而有相似的排 列。如前所述,液態鎳能夠在石墨烯形成時排列石墨層中任 何其他的原子,該液態模板的流動性質會環繞式地輕推石墨 原子,以修補石墨片之間的界面,其他仍有很多關於自動修 補石墨修補片段(patch)的自組機制的細微細節,必須在石墨 烯上有兩個不同的碳原子區域,雖然獨立的石墨烯平板採用 27 201131019 六角形圖案,但複數石墨層會稍微彎曲而具有阿法(a|pha) 區和貝塔(beta)區。石墨烯平板只要有其他原子(阿法區) 對準於整體平板後才會移動而對齊,其他大半部分的原子則 位於鄰近六角形的中央。由於阿法區是以凡得瓦耳力所鍵 結,所以晃動的電子太微弱而無法與鎳原子交互作用,只有 貝塔區的碳原子能夠受到鎳的3d軌道之空位(vacancies)所 吸引,此意味著石墨烯修補片段必須朝向有關的鎳原子,在 本質上,其會輕推石墨片而遍及於鎳表面。在六方氮化硼的 情況中,此方向性排列更為明白,其係因為氮化硼由電子互 補性之硼原子和氮原子所匹配。在使用鎳來催化自組機制的 情形中,因為空的3d軌域的性質,使得鎳原子以及額外的 電子能被推往硼原子。 六方氮化硼具有非常寬廣的直接能隙,藉由提供電場即 能釋放遠紫外線。六方氮化硼為固有的1^型半導體,其能藉 由鈹(Be)或鎂(Mg)的摻雜而強化,此陰極能夠自激(se|f 「esonate),且因此能用作雷射電極,並與系統組件(buj丨〇 用於散熱器中。 各種裝置皆能考慮結合六方氮化硼和石墨烯層。例如, 六方氮化硼層具有高能隙’且因此為良好的絕緣體。藉由改 變石墨烯以及六方氮化硼層,能夠產生有效電容量的 (effective capacitative)材料,此複合材料係以堆疊形式、 平面排列或層狀被捲曲形成複合圓柱型態而產生,其他有潛 力的用途包括藉由石墨烯相互連接的三維氮化硼電晶體之 積體電路、汽車電池、太陽能電池、筆記型電腦之電池以及 手機之電池。因為此複合材料具有薄的截面而能產生平行式The species can be used to dope into the graphene layer, and specific non-limiting examples include butterflies, bumps, U φ gas, and combinations thereof. Doping can also be used to alter the electron mobility of the graphite layer to form a circuit in a layered structure that is capable of distributing circuit patterns in a graphene layer. Further, when the graphene layer has a high electron mobility, the conductivity between the graphene layers in the stack is limited. The electron mobility in the layered structure of the Temman can be increased by doping metal atoms or other conductive materials. The invention further provides a thin layer of graphite produced in accordance with the steps described herein, the layered structure may comprise a single graphene layer or a stack of complex graphene layers; further, as described above, in aspects of the invention The graphene layer has a high quality material, and if there are any grain boundaries, there are few grain boundaries, and the graphene layer can be made according to various aspects described herein due to the synthesis of the stone earth material. The entire solvent or catalyst surface is present, so it has a larger size than the possible aspects of the prior art, but it should be understood that the graphite layer of any size produced in accordance with the present invention is considered to be within the scope of the present invention, the present invention The method is particularly compatible with a large area of graphene layer, the size of which needs to vary according to the size of the catalyst surface, however in a particular aspect, the size of the graphite layer can be greater than about 1.0 mm2; In one aspect, the graphite layer has a size of from about 1.0 mm 2 to about 1 mm 2 ; in yet another aspect, the graphite layer has a size of from about 10 mm 2 to about 1 mm 2 ; in one aspect, the graphite layer Size system More than about 1 〇〇 mm 2 ; in another aspect, the size of the graphite layer is greater than about 1 〇 cm 2 ; more in one aspect, the size of the graphite layer is greater than about 100 cm 2 ; and in one aspect, the size of the graphite layer The system is greater than about j m2. The physical properties of the graphite layer make it a material that facilitates bonding to a variety of devices. Many devices and uses can be considered, and the following examples should not be considered as limiting. For example, in one aspect, the high electron mobility of graphene makes it an element of an integrated circuit; on the other hand, graphene can be used as a 201131019 to detect single or complex molecules (including gases). The two-dimensional (2D) structure of the graphite layer effectively exposes the entire graphene material to the surrounding environment', thus making it an effective material for detecting molecules. This molecular detection can indirectly measure 'when gas molecules Absorbed on the surface of graphene, the position of absorption will show a local transformation in electrical resistance. Graphite thinning is an advantageous material for this speculation, because its high conductivity is extremely low noise, and the change in resistance can be detected. In another aspect, the graphite layer can be used as a surface acoustic wave filter (SAW filter), in which case the voltage signal is transmitted due to the resonance of the graphene material. In yet another aspect, graphene can be used as a pressure sensor. In another aspect, the graphene layer can be used as a transparent electrode for applications in light emitting diodes (LEDs), liquid crystal displays (LCDs), and solar panels. In addition to this, graphene can be wound together with an insulating material (for example, My丨ar@) film to manufacture a capacitor. Furthermore, graphene can be co-wound with insulated hexagonal boron nitride to produce an excellent capacitor material. Moreover, graphene is deposited on a semiconductor material (e.g., germanium) and etched to produce an electrical interconnect of the electronic device. The invention further provides a hexagonal boron nitride layer and related methods. For example, in one aspect, a method of forming a hexagonal boron nitride layer is provided, the method comprising the steps of mixing a boron nitride source and a horizontally oriented molten solvent, and wherein the boron nitride source is formed from the molten solvent to form a In the aspect of the hexagonal boron nitride layer of the molten solvent, mixing the nitriding source and the molten solvent includes providing the boron nitride source to a solidified solvent layer 'and heating the solidified solvent layer under a nitrogen atmosphere to melt The cured solvent layer & is melted and dissolved, and the molten solvent and boron from the boron nitride source form a eutectic liquid with the nitrogen atom. In another aspect, precipitating the boron nitride source from the molten solvent comprises maintaining a state in which the molten solvent and the boron nitride source are in a eutectic liquid, and forming a hexagonal nitride shed layer substantially throughout The entire molten solvent. More specifically, as shown in FIG. 7, a thin layer of boron nitride source (e.g., sheet 32) can be dispersed on the molten solvent layer 34 solidified in the mold 36. In many cases, it is advantageous to use a nitriding material as a mold, but other materials are equally useful and well known to those of ordinary skill in the art. Additionally, in one aspect, the boron nitride source layer can have a thickness of less than about 40 nm; in another aspect, the boron nitride source layer can have a thickness of less than about 20 nm. After dispersing boron nitride in the solidified molten solvent layer, the mold assembly is heated in a boiler having a nitrogen atmosphere to melt the solvent layer. The nitrogen atmosphere is used to prevent nitrogen vapor formed from boron nitride. Further, the solubility of nitrogen in the molten metal is much lower than that of boron, and the solubility of nitrogen can be increased by adding a nitrogen absorbent (for example, nickel, cobalt, iron, tungsten). By increasing the solubility of nitrogen, the growth rate of the layered structure can be increased and the density of defects can be reduced by increasing the solubility of nitrogen. The catalyst surface thus helps to repair the hexagonal boron nitride flakes from the boron nitride source to continuous hexagonal boron nitride. The molten catalyst is made of any material capable of catalyzing the formation of a continuous hexagonal boron nitride layer. For example, in one aspect, the molten catalyst comprises (Li), sodium (Na), potassium (K), i (Rb), bismuth (Be), magnesium (Mg), calcium (Ca), strontium (Sr) ), barium (Ba), lithium hydride (LiH), lithium nitride (ϋ3Ν), sodium nitride (NhN), magnesium nitride (Mg"2), calcium nitride (Canj and its alloys and compositions; In a particular aspect, the catalyst surface comprises lithium nitride; in another particular aspect, the catalyst surface consists essentially of lithium nitride. In yet another particular aspect, 'hydrogenated lithium can be used as a molten solvent. 201131019 Any grain boundary in the hexagonal boron nitride layer can be reduced by the catalytic effect of the molten solvent, so that a large-area, high-quality hexagonal boron nitride layer is formed, and if any grain boundary exists, there is little grain boundary. The hexagonal nitride layer formed is substantially the same size as the catalyst solvent it is formed thereon. The flat horizontal orientation of the molten solvent contributes to the formation of a highly planarized hexagonal boron nitride layer. This procedure can be used to form a hexagonal boron nitride layer of a single atomic thickness, or a hexagonal boron nitride layer. Or a flat plate in which a plurality of individual hexagonal boron nitride layers are stacked in parallel. In the latter case, the stack of hexagonal boron nitride layers has high electron mobility and high thermal conductivity due to a plurality of hexagonal boron nitride layers. Having a substantially unstructured grain boundary. The temperature at which the mold assembly can be heated can vary depending on the nature of the molten solvent and the desired properties of the hexagonal boron nitride product. However, in one aspect, the mold assembly can be Heating to greater than about 1 〇 00. c; in another aspect, the mold assembly can be heated to greater than about 3 〇〇 c. In yet another aspect, the mold assembly can be heated to greater than about 15 〇 (rc. Similarly, hexagonal boron nitride is produced in various pressures'. For example, in one aspect, the gas atmosphere in the pin furnace is less than about 1 atm. After the hexagonal boron nitride layer is formed, The mold assembly can be cooled to facilitate removal of the hexagonal nitriding butterfly product. In some aspects it is advantageous to cool the surface to maintain the flatness of the solvent surface. In one aspect, the cooling energy By melting solvent The heat is controlled and maintained above the solvent of the molten solvent; the degree of the rut between the ruts and the slabs is... When the solvent is cooled, the hexagonal nitriding can be torn off from the surface, and the hexagonal nitriding butterfly is peeled off to become a single-layer structure or A plurality of layered structures. The hexagonal nitride butterfly can be continuously torn off and can be wound around a reel-like device depending on the size of the catalyst surface. 25 201131019 In some aspects of the invention, the hexagonal boron nitride layer can be doped Various dopants, dopants can be used to alter the physical properties of the hexagonal boron nitride layer, and/or it can be used to alter the physical interaction in the hexagonal boron nitride layer of the hexagonal boron nitride layer stack. The doping can be generated by adding a dopant to the mold assembly when the hexagonal boron nitride layer is formed, or by depositing a dopant in the layered structure after the hexagonal boron nitride layer is formed. produce. Various dopants can be used to dope in the hexagonal boron nitride layer, and specific non-limiting examples include bismuth, magnesium, and combinations thereof. The cerium is doped with hexagonal boron nitride to form an N-type semiconductor material. The present invention also provides hexagonal boron nitride produced in accordance with the steps described herein, the layered structure comprising a single hexagonal boron nitride layer or a stack of complex hexagonal boron nitride layers. Further, as described above, the hexagonal boron nitride layers according to aspects of the present invention are high quality materials having few grain boundaries if any grain boundaries are present. In addition, the hexagonal boron nitride layer can be made in accordance with various aspects described herein, and since the synthesis of the hexagonal boron nitride material extends over the entire catalyst surface, it has a larger size than previously possible. However, it should be understood that the hexagonal boron nitride layer of any size produced in accordance with the present invention is considered to be in the scope of the present invention, and the method of the present invention is particularly compatible with a large area & hexagonal boron nitride layer, such a layer The size of the structure needs to be different depending on the size of the catalyst surface, however, in one aspect, the size of the hexagonal boron nitride layer can be greater than about 10 2 · mm; in another aspect, the size of the hexagonal boron nitride layer is From about 1 〇 〇 2 to about 10 mm 2; in yet another aspect, the hexagonal boron nitride layer has a size of from about 10 mm to about 1 〇〇 mm 2 ; in one aspect, the size of the hexagonal boron nitride layer The system is greater than about 100 mm2; in another aspect, the size of the hexagonal boron nitride layer is greater than about 10 cm2; and in one aspect, the size of the hexagonal boron nitride layer is £26.201131019 is greater than about 100 cm2; In one aspect, the hexagonal boron nitride layer has a size greater than about 1 m2. The physical properties of the hexagonal boron nitride layer make it a material that facilitates bonding to various devices. Many devices and uses can be considered, and the following examples should not be considered as limiting. For example, in one aspect, hexagonal boron nitride has a monthly b-span (5.97 eV) and is capable of emitting a deep ultraviolet (about 215 nm). Therefore, hexagonal boron nitride can be used as an LED or a solar cell. For example, these materials have the shortest bond length (1 · 42 A), so they are harder than two-dimensional diamonds, so they have a very large energy gap and can emit far ultraviolet rays. This is for nano lithography. And UV excitation fluorescence is very useful to form white LEDs. A P-N interface can be formed to fabricate a transistor that can form a graphene interconnect circuit in-situ. In still another embodiment, graphene or single boron nitride also has high sound velocity and thermal conductivity, and therefore, it can be used for supersonic frequency surface acoustic wave filters, supersonic generators, and heat sinks. Due to the hexagonal symmetry, these materials also have piezoelectric properties (piez〇e丨ectrjc). In another embodiment, a graphene or boron nitride layer can be used as an inductor for chemisorbed gas, a precision electrode for analyzing the degree of ρβ of ions (such as lead) by electrolysis in an aqueous solution. ), a transparent electrode with hydrogen termination, and the like. It should be noted that the hexagonal boron nitride can be similarly arranged by melting nickel. As mentioned above, liquid nickel can align any other atoms in the graphite layer when graphene is formed. The flow properties of the liquid template will push the graphite atoms around the surface to repair the interface between the graphite sheets. The subtle details of the self-organizing mechanism for automatic repair of graphite patch patches must have two different carbon atom regions on the graphene. Although the individual graphene plates use the 27 201131019 hexagonal pattern, the multiple graphite layers will be slightly Curved to have an alpha (a|pha) zone and a beta zone. The graphene plate will move and align as long as other atoms (Afar region) are aligned with the entire plate, and most of the other atoms are located in the center of the adjacent hexagon. Since the Alpha area is bonded by Van der Waals force, the sloshing electrons are too weak to interact with the nickel atoms, and only the carbon atoms in the beta zone can be attracted by the 3d orbital vacancies of nickel, which means The graphene repair fragments must face the relevant nickel atoms, which essentially pushes the graphite sheets over the nickel surface. In the case of hexagonal boron nitride, this directional alignment is more apparent because boron nitride is matched by an electron-complementary boron atom and a nitrogen atom. In the case where nickel is used to catalyze the self-organizing mechanism, nickel atoms and additional electrons can be pushed to the boron atoms because of the nature of the empty 3d orbital domain. Hexagonal boron nitride has a very broad direct energy gap and can emit far ultraviolet rays by providing an electric field. Hexagonal boron nitride is an intrinsic 1^ type semiconductor which can be strengthened by doping of beryllium (Be) or magnesium (Mg), which is self-excited (se|f "esonate", and thus can be used as a thunder The emitter and the system components (buj丨〇 are used in the heat sink. Various devices can be considered to combine hexagonal boron nitride and graphene layers. For example, the hexagonal boron nitride layer has a high energy gap' and is therefore a good insulator. By changing the graphene and the hexagonal boron nitride layer, it is possible to produce an effective capacitative material which is produced by stacking, planar or layered to form a composite cylindrical shape, and other potentials. Applications include integrated circuits of three-dimensional boron nitride transistors interconnected by graphene, batteries for automobiles, solar cells, batteries for notebook computers, and batteries for mobile phones. This composite material has a thin cross section and can produce parallel patterns.

S 28 .201131019 太陽能電池。額外的使用包括氣體和微生物感剛器⑽ sensor),以及DNA和蛋白質晶片。 本發明也提供石墨烯/六方氮化硼複合材料。例如在一 方面中,電子前驅物材料具有一複合材料,包括一石墨層以 及設置於該石墨層上的六方氮化磡層。在一特定方面中,該 複合材料包括複數間隔設置的石墨烯層以及六方氮化硼 層。這些層狀結構能夠用於各種電子元件中,其係能夠被所 屬技術領域中具有通常知識者所了解。例如,藉由捲繞複數 間隔設置的層狀結構成為圓柱形,能夠形成有用的圓柱形電 容器。 這些複合材料能夠使用在此所述的炫融溶劑方法所製 造,或是藉由其他能夠形成這種層狀結構的方法。例如在一 方面中,製造石墨烯/六方氮化硼複合材料的方法包括提供 一具有石墨層設置於一基材上的模板;以及沉積一氮化硼源 材料於該石墨層上以於其上形成一六方氮化硼層,因此在沉 鲁 積時使用石墨層作為六方氮化侧層的模板,該六方氮化棚層 係藉由任何已知的方法所沉積的,包括化學氣相沉積法 (CVD)和物理氣相沉積法(pvd)。 在此揭示的方法之一優點在於能夠製造具有預先決定 之尺寸以及形狀的石墨烯以及六方氮化硼,因為材料層能形 成在遍及於溶融溶劑的表面,所以所產生的石墨婦以及六方 氮化硼層的尺寸和形狀能夠藉由水平定向之熔融溶劑的尺 寸和形狀所決定。因此,藉由預先選擇模具,以產生具有特 疋尺寸和形狀的溶融溶劑表面,則該石墨稀以及六方氛化蝴 層的形狀和尺寸也能被預先決定。因此這種預先決定的尺寸 29 201131019 ^㈣僅是將-材料層切割至特定形狀的結果,而是形成 -特疋且預先選擇或預先決定之尺寸和形狀的材料層。 在本發明另一方面中係提供形成碳化矽層的方法,這種 方法包括混合碳切源和水平定向之溶融溶劑,並且從該溶 融溶劑巾沉澱該碳切源相成遍及㈣㈣㈣的碳化 矽層》 範例 範例1 一石墨塊被機械加工而形成具有約3mm高度的圓盤狀 # 凹陷部’放置-具有、約彳_之厚度的純錦板於該凹陷部 中,超高純度的石墨則散佈於鎳板上,而此總成係放置於一 官狀鍋爐中,該鍋爐中係提供約1 0_5托耳的真空環境·,接著 鎳會在1500 c中完全熔融,且維持於熔融狀態3〇至6〇分 鐘,控制溫度以使得石墨邊緣約比該熔融鎳漿液(bath)高出 5〇 C ’這樣的溫度差異能夠減少液體的對流,而可能妨礙形 成之石墨烯晶格的形成;該鍋爐之後會慢慢冷卻且將所產生 之石墨烯層從該冷卻之鎳板上撕下。 _ 範例2 一石墨烯層係依據範例1所形成,不同之處在於該錄板 係以無電解電鍍有一鎳-磷(Nj-p)層,而鎳_磷化鎳(Nj_Ni3p) 層的共溶點為B7CTC,因此能夠讓石墨烯平板在1〇〇〇。◦中 形成。 範例3 一石墨烯層係依據範例1所形成,不同之處在於該超純 石墨係以超純石墨片以及70 wt%之羰基的鎳化合物的混合 30 201131019 物所取代。 範例4S 28 .201131019 Solar cells. Additional uses include gas and microbial sensors (10) sensors, as well as DNA and protein wafers. The present invention also provides a graphene/hexagonal boron nitride composite. For example, in one aspect, the electron precursor material has a composite material comprising a graphite layer and a hexagonal tantalum nitride layer disposed on the graphite layer. In a particular aspect, the composite material comprises a plurality of spaced apart graphene layers and a hexagonal boron nitride layer. These layered structures can be used in a variety of electronic components, which can be understood by those of ordinary skill in the art. For example, a useful cylindrical capacitor can be formed by winding a plurality of layered structures in a plurality of intervals to form a cylindrical shape. These composite materials can be made using the smelting solvent process described herein, or by other methods capable of forming such a layered structure. For example, in one aspect, a method of fabricating a graphene/hexagonal boron nitride composite includes providing a template having a graphite layer disposed on a substrate; and depositing a boron nitride source material on the graphite layer thereon A hexagonal boron nitride layer is formed, so that a graphite layer is used as a template for the hexagonal nitride side layer deposited by any known method, including chemical vapor deposition, in the deposition process. Method (CVD) and physical vapor deposition (pvd). One of the advantages of the method disclosed herein is that it is possible to produce graphene and hexagonal boron nitride having a predetermined size and shape, since the material layer can be formed on the surface of the molten solvent, so that the graphite and hexagonal nitride are produced. The size and shape of the boron layer can be determined by the size and shape of the horizontally oriented molten solvent. Therefore, by selecting the mold in advance to produce a surface of the molten solvent having a characteristic size and shape, the shape and size of the graphite thin and hexagonalized butterfly layer can also be determined in advance. Therefore, this predetermined size 29 201131019 ^(d) is merely the result of cutting the material layer to a specific shape, but forming a layer of material that is characteristic and pre-selected or predetermined in size and shape. In another aspect of the invention, there is provided a method of forming a tantalum carbide layer, the method comprising mixing a carbon cut source and a horizontally oriented molten solvent, and depositing the carbon cut source phase from the molten solvent bath into a tantalum carbide layer throughout (4) (4) (d) Example 1 A graphite block is machined to form a disc-like shape with a height of about 3 mm. The depression is placed in a hollow with a thickness of about 彳, and the ultra-high purity graphite is dispersed. On the nickel plate, the assembly is placed in an official boiler, which provides a vacuum environment of about 10_5 Torr, then nickel is completely melted in 1500 c and maintained in a molten state. By 6 minutes, the temperature is controlled such that the edge of the graphite is about 5 〇 C ' higher than the molten nickel slurry, which can reduce the convection of the liquid and may hinder the formation of the graphene lattice formed; the boiler It is then slowly cooled and the resulting graphene layer is removed from the cooled nickel plate. _ Example 2 A graphene layer was formed according to Example 1, except that the recording plate was electrolessly plated with a nickel-phosphorus (Nj-p) layer and the nickel-phosphorus (Nj_Ni3p) layer was co-dissolved. The point is B7CTC, so the graphene plate can be placed at 1 〇〇〇. Formed in the middle. Example 3 A graphene layer was formed according to Example 1, except that the ultrapure graphite was replaced by a mixture of ultrapure graphite flakes and a 70 wt% carbonyl nickel compound 30 201131019. Example 4

丨_「(_>粉末分散在石墨模具的底部,高度石墨化 程度的石墨(如天然石墨)粉末係沿著該…他粉末頂部分 散’該模具總成在真空(例如1〇、「「)中被加熱以溶融該 合金(如1300Χ ’對於金屬·碳之共溶組成物而言)。因為石 墨的密度(2.25)是遠低於合金的密度(89),所以石墨片會浮 在溶融合金的頂部。再者’因為石墨的小片形狀,石墨稀平 板會與溶融合金表面平行。在此情況下,石墨稀片段會被催 化而藉由鐵合金修補在—起,此步驟為自組機制以及自我修 補機制,因此能形成公尺級尺寸的石墨烯平板。 " 在石墨稀平板生長之後’該炫融椠液會在其表面保持平 坦的狀態下被降溫,其可藉由熱從下方向上傳冑,並且保持 頂層於-較高的溫度而完成’一旦該總成冷卻,則將可能還 黏在合金上的石墨烯平板從底層撕下,由於在石墨烯平板之 間的較大間隔(3.35A),所以撕下的動作能夠以連續性步驟 而完成。 範例5 純天然石墨粉末與其10倍重量的鎳和銅(具有相同比 例)相互混合,將此混合物放置於一石墨模具中,並且在真 空狀態下加熱至13G(TC六個小時。石墨溶解並且在邊緣沉 澱’其具有豐富的晃動電子,所形成的片體浮纽融液體 上八個小時後,溫度降低在液相線和固相線之間,使得液 態和固態達到平衡狀態,在此階段巾,不穩定的碳原子會溶 解,而更穩定的原子會沉澱,而贿融物會慢慢地固化。利 31 201131019 用氫通入真空中以進一步藉由氣化的碳原子來移除石墨缺 陷。大型的石墨烯浸潤於熱的硫酸中以分隔成石墨烯層,取 得該等石墨烯層且藉由在真空中8〇(rc下的晶圓接合 (waferbonding)而設置在已拋光的矽晶圓上,此表面進一步 通入敗以藉由形成CF4氣體而移除任何缺陷。 範例6 純天然六方氮化硼(hBN)粉末與其氫化鋰在氮氣氣氛中 相互混合’並加熱至13〇〇。〇以上而形成hBN溶液,該熔融 誤持溫在1 300。C六個小時,之後冷卻至液相線和固相線之 間的溫度,接著此共熔熔融物緩慢降溫,並將氫氣引入以移 除不穩定的硼和氮原子,因而所形成之hBN薄膜在硫酸中 沸騰而分隔出層狀結構。所取得的hBN層設置在例5中塗 佈於矽晶圓的石墨層上,將一鈦薄膜藉由濺鍍而沉積於hBN 層上’钮刻該欽薄膜以形成内數位電晶體變換器 (transducer) ’其係能夠將電磁訊號轉換成表面聲波,反之 亦然。 範例7 六方氮化硼(hBN)薄膜摻雜有鈹以使其成為p型材料; 氮化銘(AIN)係以分子束磊晶技術(MBE )而沉積於hBN薄 膜上’且摻雜有碳原子以形成N型材料。所形成的p_n接面 能夠在接受直流電後立即放出紫外線(UV) » 當然,需要瞭解的是以上所述之排列皆僅是在描述本發 明原則的應用,許多改變及不同的排列亦可以在不脫離本發 明之精神和範圍的情況下被於本領域具通常知識者所設想 出來’而申請範圍也涵蓋上述的改變和排列。因此,儘管本 £ 32 201131019 發明被特定及詳述地描述呈上述最實用和最佳實施例,於本 領域具通常知識者可在不偏離本發明的原則和觀點的情況 下做許多如尺寸、材料、形狀、樣式、功能、操作方法、組 震和使用等變動。 【圖式簡單說明】 圖1係本發明一實施例之石墨烯晶格的示意圖。 圖2係本發明另一實施例之模具總成的剖面圖。 圖3係本發明又一實施例之石墨烯層的顯微照片。 圖4係本發明再一實施例之石墨烯層的顯微照片。 圖5係本發明又另一實施例之石墨烯層的顯微照片。 圖6係本發明另一實施例之石墨烯層的顯微照片。丨_"(_> powder is dispersed at the bottom of the graphite mold, and a highly graphitized graphite (such as natural graphite) powder is dispersed along the...the top of the powder is dispersed." The mold assembly is under vacuum (for example, 1", "") The medium is heated to melt the alloy (eg, 1300 Χ 'for the co-solvent composition of metal · carbon). Because the density of graphite (2.25) is much lower than the density of the alloy (89), the graphite sheet will float on the fusion gold The top. In addition, because of the small piece shape of graphite, the graphite thin plate will be parallel to the surface of the dissolved gold. In this case, the graphite thin particles will be catalyzed and repaired by the iron alloy. This step is self-organizing mechanism and self. The repair mechanism can form a metric-sized graphene plate. " After the growth of the graphite thin plate, the sputum sputum will be cooled while its surface remains flat, which can be uploaded from the bottom by heat.胄, and keep the top layer at a higher temperature - once the assembly is cooled, the graphene plate, which may still stick to the alloy, is torn from the bottom layer due to the between the graphene plates The larger interval (3.35A), so the tearing action can be completed in a continuous step. Example 5 Pure natural graphite powder is mixed with 10 times by weight of nickel and copper (with the same ratio), and the mixture is placed in a graphite. In the mold, and heated to 13G under vacuum (TC for six hours. Graphite dissolves and precipitates at the edge 'It has abundant sloshing electrons, and the formed sheet floats on the liquid for eight hours, the temperature is lowered in the liquid Between the phase line and the solidus line, the liquid and solid phases are brought to equilibrium. At this stage, the unstable carbon atoms will dissolve, and the more stable atoms will precipitate, and the bribe will slowly solidify. 201131019 Hydrogen is introduced into a vacuum to further remove graphite defects by vaporized carbon atoms. Large graphene is infiltrated in hot sulfuric acid to separate into graphene layers, which are obtained by vacuum Medium 8〇 (wafer bonding on rc) is placed on the polished germanium wafer, which is further exposed to remove any defects by forming CF4 gas. Example 6 Natural The hexagonal boron nitride (hBN) powder and its lithium hydride are mixed with each other in a nitrogen atmosphere and heated to 13 Torr to form a hBN solution which is held at a temperature of 1 300 ° C for six hours, after which it is cooled to liquid. The temperature between the phase line and the solidus line, followed by the slow cooling of the eutectic melt, and the introduction of hydrogen to remove the unstable boron and nitrogen atoms, so that the formed hBN film boils in the sulfuric acid to separate the layer The obtained hBN layer is disposed on the graphite layer coated on the tantalum wafer in Example 5, and a titanium thin film is deposited on the hBN layer by sputtering. The button is engraved to form an internal digital transistor transformation. Transducer 'It is capable of converting electromagnetic signals into surface acoustic waves, and vice versa. Example 7 Hexagonal boron nitride (hBN) film is doped with antimony to make it a p-type material; Nitride Ming (AIN) is Molecular beam epitaxy (MBE) is deposited on the hBN film and is doped with carbon atoms to form an N-type material. The formed p_n junction can emit ultraviolet light (UV) immediately after receiving direct current. Of course, it should be understood that the above arrangement is only for describing the application of the principles of the present invention, and many variations and different arrangements may also be It will be apparent to those skilled in the art from the spirit and scope of the invention, and the scope of the application also encompasses the above-described changes and arrangements. Accordingly, the present invention is to be construed as being limited to the details of the embodiments of the invention, Changes in materials, shapes, styles, functions, methods of operation, vibrations, and use. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a graphene crystal lattice according to an embodiment of the present invention. Figure 2 is a cross-sectional view of a mold assembly in accordance with another embodiment of the present invention. Figure 3 is a photomicrograph of a graphene layer in accordance with still another embodiment of the present invention. Figure 4 is a photomicrograph of a graphene layer in accordance with still another embodiment of the present invention. Figure 5 is a photomicrograph of a graphene layer in still another embodiment of the present invention. Figure 6 is a photomicrograph of a graphene layer in accordance with another embodiment of the present invention.

14炫融溶劑層 34熔融溶劑層 圖7係本發明又另一 【主要元件符號說明】 12石墨 16模具 32薄片 36模具 3314 dazzling solvent layer 34 molten solvent layer Fig. 7 is another embodiment of the present invention [Major component symbol description] 12 graphite 16 mold 32 sheet 36 mold 33

Claims (1)

201131019 七、申請專利範圍: 1·一種形成石墨層的方法,其包含有: 在真空狀態下加熱一固態金屬基材料達一溶解溫度, 其中該溶解溫度低於該固態金屬基材的熔點; 將一石墨來源的碳原子溶解到該被加熱的固態金屬基 材之中;以及 以一充足的速率冷卻該被加熱的固態金屬基材以使得 該溶解的碳原子形成一石墨層到該固態金屬基材的至少一 表面上,其中所形成的石墨層大致上不具有晶格缺陷。 2. 如申請專利範圍第彳項所述形成石墨層的方法,其進 一步包含自該固態金屬基材上移除石墨層。 3. 如申請專利範圍第彳項所述形成石墨層的方法,其中 該石墨層是高度石墨化。 4. 如申請專利範圍第1項所述形成石墨層的方法,其中 S亥固態金屬基材包含一成分,該成分羌選自於鉻、錳、鐵、 鈷、鎳、钽、鈀、鉑、鑭、鈽、銪、銥、釕、铑、其合金 以及其結合物的其中一種。 5. 如申請專利範圍第1項所述形成石墨層的方法,其中 該固態金屬基材包含鎳。 6. 如申請專利範圍第1項所述形成石墨層的方法,其令 該固態金屬基材包含一大致上較少活性的材料來調整碳溶 解度。 / 7·如申請專利範圍第6項所述形成石墨層的方法,其中 該大致上較少活性的材料是選自金、銀、銅、鉛、錫、鋅、 其結合物以及其合金的其中一種。 S 34 201131019 8_如申請專利範圍第6項所述形成石墨層的方法,其中 該大致上較少活性的材料是銅。 9.如申請專利範圍第6項所述形成石墨層的方法,其中 該固態金屬基材包含該固態金屬基材包含一第一金屬層以 及一第二金屬層,其中該第一金屬層能夠用來溶解碳原 子’且該第二金屬層能夠用來調整碳原子溶解度。 1 0.如申請專利範圍第彳項所述形成石墨層的方法其 中該固態金屬基材是鎳,且該溶解溫度是由大約5〇〇。c到 大約 1450°C。 11_如申請專利範圍第彳項所述形成石墨層的方法其 中該固態金屬基材是鎳,且該溶解溫度是由大約5〇(r c到 大約 1000°C。 12_如申請專利範圍第彳項所述形成石墨層的方法,其 中該固態金屬基材是鎳,且該溶解溫度是由大約7〇〇。c到 大約800°C。 13. —種形成石墨層的方法,其包含有: 將一固態金屬基材設置在一支撐基材上; 連接一石墨碳來源到該固態金屬基材; 在真空狀態下加熱該固態金屬基材到達一溶解溫度, β亥 >谷解度低於該固態金屬基材的溶點; 將石墨碳來源中的碳原子溶解到該被加熱的固態金屬 基材之中;以及 以一充足的速率來冷卻該被加熱的固態金屬基材以由 被溶解的碳原子形成一石墨層在該固態金屬基材的至少一 表面上’其中該石墨層大致上不具有晶格缺陷。 35 201131019 14_如申請專利範圍第13項所述形成石墨層的方法, 八中該連接該石墨碳來源結合到該固態金屬基材的步驟包 含將該石墨碳來源設置在該支撐基材與該固態金屬基材之 間。 15.如申請專利範圍第13項所述形成石墨層的方法, 其中該連接該石墨碳來源到該固態金屬基材的步驟包含將 該石墨碳來源到該固態金屬基材的一表面上且相對該支樓 基材。 1 6·如申請專利範圍第1 3項所述形成石墨層的方法, 其進一步包含預選該固態金屬基材的尺寸與形狀以產生具 有預設尺寸與形狀的石墨層。 17. —種由申請專利範圍第16項所述方法製造的石墨 層’其中該石墨層包含一預設的尺寸與形狀。 18. 如申請專利範圍第17項所述的石墨層,其整合於 裝置中’該裝置是選自分子感測器、發光二極體、液晶 顯不器、太陽能板、壓力感測器、表面聲波濾波器(SAW filter)、共鳴器、電晶體、電容器;透明電極、紫外線雷射 (UV laser)、DNA晶片以及其結合。 1 9.如申請專利範圍第1 7項所述的石墨層,其中該石 墨層耦合到一矽晶圓上。 20如申請專利範圍第1 9項所述的石墨層,該石墨層 受蝕刻而形成電子連接線路。 八、圖式:(如次頁)201131019 VII. Patent application scope: 1. A method for forming a graphite layer, comprising: heating a solid metal-based material under vacuum to a dissolution temperature, wherein the dissolution temperature is lower than a melting point of the solid metal substrate; Dissolving a graphite-derived carbon atom into the heated solid metal substrate; and cooling the heated solid metal substrate at a sufficient rate such that the dissolved carbon atoms form a graphite layer to the solid metal substrate On at least one surface of the material, the graphite layer formed therein has substantially no lattice defects. 2. A method of forming a graphite layer as described in the scope of claim 2, further comprising removing the graphite layer from the solid metal substrate. 3. A method of forming a graphite layer as described in the scope of the patent application, wherein the graphite layer is highly graphitized. 4. The method for forming a graphite layer according to claim 1, wherein the solid metal substrate comprises a component selected from the group consisting of chromium, manganese, iron, cobalt, nickel, ruthenium, palladium, platinum, One of 镧, 钸, 铕, 铱, 钌, 铑, its alloys, and combinations thereof. 5. The method of forming a graphite layer according to claim 1, wherein the solid metal substrate comprises nickel. 6. The method of forming a graphite layer according to claim 1, wherein the solid metal substrate comprises a substantially less active material to adjust the carbon solubility. The method of forming a graphite layer according to claim 6, wherein the substantially less active material is selected from the group consisting of gold, silver, copper, lead, tin, zinc, combinations thereof, and alloys thereof. One. The method of forming a graphite layer as described in claim 6, wherein the substantially less active material is copper. 9. The method of forming a graphite layer according to claim 6, wherein the solid metal substrate comprises the solid metal substrate comprising a first metal layer and a second metal layer, wherein the first metal layer can be used To dissolve the carbon atoms' and the second metal layer can be used to adjust the solubility of the carbon atoms. A method of forming a graphite layer as described in the scope of claim 2, wherein the solid metal substrate is nickel, and the dissolution temperature is about 5 Å. c to approximately 1450 ° C. 11_ The method for forming a graphite layer according to the above-mentioned claim, wherein the solid metal substrate is nickel, and the dissolution temperature is from about 5 〇 to about 1000 ° C. 12_ as claimed in the specification The method of forming a graphite layer, wherein the solid metal substrate is nickel, and the dissolution temperature is from about 7 〇〇 c to about 800 ° C. 13. A method of forming a graphite layer, comprising: a solid metal substrate is disposed on a supporting substrate; a graphite carbon source is connected to the solid metal substrate; and the solid metal substrate is heated under vacuum to reach a dissolution temperature, and the β-cold solution is lower than the solution a melting point of the solid metal substrate; dissolving carbon atoms in the graphite carbon source into the heated solid metal substrate; and cooling the heated solid metal substrate at a sufficient rate to be dissolved The carbon atoms form a graphite layer on at least one surface of the solid metal substrate 'where the graphite layer has substantially no lattice defects. 35 201131019 14_ The method of forming a graphite layer as described in claim 13 The step of joining the graphite carbon source to the solid metal substrate comprises positioning the graphite carbon source between the support substrate and the solid metal substrate. 15. As described in claim 13 A method of forming a graphite layer, wherein the step of connecting the graphite carbon source to the solid metal substrate comprises using the graphite carbon source on a surface of the solid metal substrate and opposite to the support substrate. The method of forming a graphite layer according to Item 13 of the patent, further comprising preselecting the size and shape of the solid metal substrate to produce a graphite layer having a predetermined size and shape. The graphite layer produced by the method wherein the graphite layer comprises a predetermined size and shape. 18. The graphite layer according to claim 17, which is integrated in the device. The device is selected from the group consisting of molecular sensing. , light-emitting diode, liquid crystal display, solar panel, pressure sensor, surface acoustic wave filter (SAW filter), resonator, transistor, capacitor; transparent electrode, ultraviolet A UV laser, a DNA wafer, and a combination thereof. 1 9. The graphite layer of claim 17, wherein the graphite layer is coupled to a germanium wafer. 20, as claimed in claim 19 In the graphite layer, the graphite layer is etched to form an electrical connection line. 8. Pattern: (eg, next page)
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Cited By (1)

* Cited by examiner, † Cited by third party
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US9944530B2 (en) 2012-10-16 2018-04-17 Ritedia Corporation Graphene platelet fabrication method and graphene platelet fabricated thereby

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102627275B (en) * 2012-04-28 2015-05-20 郑州大学 Method for preparing graphene by melting carbon-containing alloy to separate out carbon in solidification process
TW201410603A (en) * 2012-09-12 2014-03-16 Ritedia Corp Method of mass production of graphene
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TWI473164B (en) * 2013-02-22 2015-02-11 Ritedia Corp Dielectric material and transistor using the same
CN103950925B (en) * 2014-05-13 2016-05-11 青岛科技大学 A kind of preparation method of nanoscale graphite flake
CN105016329A (en) * 2015-07-06 2015-11-04 兰州大学 Preparation method for graphene
US20180308696A1 (en) * 2017-04-25 2018-10-25 Texas Instruments Incorporated Low contact resistance graphene device integration
CN107748025B (en) * 2017-09-30 2019-10-29 中国人民解放军国防科技大学 Graphene/hexagonal boron nitride heterostructure pressure sensor and preparation method thereof
CN113390959B (en) * 2021-04-30 2022-10-25 西安交通大学 Composite sensitive film and preparation method thereof, gas sensor and preparation method thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358046A (en) * 1977-03-17 1982-11-09 Union Carbide Corporation Oriented graphite layer and formation
GB0106358D0 (en) * 2001-03-13 2001-05-02 Printable Field Emitters Ltd Field emission materials and devices
US20040206008A1 (en) * 2001-07-16 2004-10-21 Chien-Min Sung SiCN compositions and methods
JP4483152B2 (en) * 2001-11-27 2010-06-16 富士ゼロックス株式会社 Hollow graphene sheet structure, electrode structure, manufacturing method thereof, and device
US7172745B1 (en) * 2003-07-25 2007-02-06 Chien-Min Sung Synthesis of diamond particles in a metal matrix
WO2005019104A2 (en) * 2003-08-18 2005-03-03 President And Fellows Of Harvard College Controlled nanotube fabrication and uses
WO2010006080A2 (en) * 2008-07-08 2010-01-14 Chien-Min Sung Graphene and hexagonal boron nitride planes and associated methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9944530B2 (en) 2012-10-16 2018-04-17 Ritedia Corporation Graphene platelet fabrication method and graphene platelet fabricated thereby

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