201130604 六、發明說明： 【發明所屬之技術領域】 本發明是關於利用真空加熱乾燥從線鋸之廢粉漿以高 效率確實回收分散液，並且確保真空加熱乾燥作業停止時 之安全的線鋸之粉漿管理裝置。 【先前技術】 以往，例如在從陶瓷、1C晶片的基板、太陽電池的矽 、合成石英等的材料製作晶圓時，使用所謂線鋸的裝置。 該線鋸是在加工用輥間具備有平行張設成無端的複數鋼線 ，在該鋼線供應磨粒分散在分散液中形成的粉漿藉此進行 切削。分散液，一般是使用水系分散液或油系分散液。 在利用線鋸對上述陶瓷、1C晶片的基板等被切削體進 行切削時，對鋼線供應磨粒分散在分散液中形成的粉漿， 與此同時，驅動加工用輥使鋼線移動，於該狀態下使鋼線 和被切削體接近，讓被切削體通過鋼線藉此對被切削體進 行切削製作出多數的晶圓。 上述鋼線的切削能力是大幅依賴供應至鋼線之粉漿中 的磨粒和分散液的混合重量比，因此爲了有效率執行被切 削體的切削，需要將粉漿中的磨粒和分散液的混合重量比 維持成能夠使鋼線發揮最大的切削能力。 此外，供應至線鋸對被切削體進行切削後的粉漿，混 入有被切削體的切屑，所以切削後的廢粉漿中固體成份的 混入量會變多導致磨粒所占的比率相對變少，再加上，基 201130604 於磨粒在切削時會破碎以致切削時適當粒徑的磨粒量會減 少等理由，被切削體的切削效能會歷時性降低。 因此，以往是在切削處理指定次數結束的每次’進行 排出一定量的廢粉漿，供應與排出的廢粉漿同量的新粉漿 之粉漿再生處理。 但是，即使如上述定期更換廢粉漿的一部份，但粉漿 中的切屑或破碎磨粒的量仍會逐漸增加，所以粉漿中磨粒 和分散液的混合重量比就無法經常維持成最佳値，因此， 鋼線的切削能力會逐漸降低，導致無法維持均勻穩定的切 削效率。 再加上，先前的線鋸是對粉漿更換時取出的廢粉漿進 行廢棄處理，但其廢棄的廢粉漿中含有可使用的磨粒及分 散液，如此廢棄又加上供應新的磨粒及分散液是浪費資源 的消耗，因此會有增加切削處理所需的磨粒及分散液的消 耗量造成切削運轉成本增加的問題。此外，廢棄的廢粉漿 因是做爲產業廢棄物處理，所以又會有產業廢棄物處理負 荷增加的問題》 · 另外，爲了解決上述的問題，有將上述廢粉漿供應至 離心分離機分離去除粒徑比較大的固體成份，然後，再供 應至過濾機分離去除微細的固體成份藉此獲得比較乾淨的 分散液，將磨粒分散在該回收的分散液再度供應至線鋸的 •方式。 但是，如上述使用離心分離機和過濾機去除廢粉漿中 的固體成份回收分散液的方法，理論上是可行的方法，但 -6- 201130604 實際上固體成份的分離是有困難。 即，通常的分散液具有黏性，並且廢粉漿中高濃度混 有數微米程度的微細固體成份，因此分離非常困難。使用 離心分離機只能夠分離某種程度大粒徑的固體成份’因此 ，數微米程度的微細固體成份就需要使用過濾機分離，但 能夠從高濃度混有該微細粒子的分散液有效率分離微粒子 的過濾機並不存在。即，過濾機的過濾部會因爲高濃度的 微粒子而立即造成堵塞。因此，從上述廢粉漿連續並且高 效率分離固體成份和分散液是有技術性的困難。 爲了處理上述問題，有將來自於線鋸的廢粉漿供應至 可利用蒸汽套進行加熱並且利用內部所具備之攪拌裝置進 行攪拌的同時利用真空吸引裝置進行吸引的真空乾燥機， 藉此使廢粉漿分離成固體成份和水蒸氣，將分離後的水蒸 氣導入冷凝器進行液化藉此回收分散液之裝置（參照專利 文獻1 )。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開2004-082247號公報 【發明內容】 [發明欲解決之課題] 但是，專利文獻1所示的裝置，在真空加熱乾燥的運 轉停止時會有下述不利的問題。即，從對廢粉漿進行加熱 201130604 的同時進行真空吸引分離成固體成份和水蒸氣的狀態停止 真空加熱乾燥的同時，停止真空吸引將真空系路內開放於 大氣時，高溫的矽會因氧化發熱而更加增溫有可能導致有 機成份起火。 因此’停止時需要冷卻真空乾燥機，不過即使從外部 冷卻真空乾燥機但要立刻冷卻內部的廢粉漿實屬困難，殘 熱有可能造成起火。此外，實施冷卻時，具有某種程度能 夠抑制發熱的效果，但冷卻會造成設備收縮以致從洩漏部 吸入空氣，導致局部性昇溫，結果還是有可能發熱、起火 〇 另外，即使能夠避免如上述將真空系路內開放於大氣 時產生的起火問題，但在高溫下氧氣的存在還是會造成分 散液和固體物的矽材料氧化導致品質變差的問題。 本發明是有鑑於上述問題所硏創而成的發明，提供一 種利用真空加熱乾燥從線鋸之廢粉漿以高效率確實回收分 散液，並且確保真空加熱乾燥作業停止時之安全的線鋸之 粉漿裝置。 [用以解決課題之手段] 本發明相關的線鋸之粉漿管理裝置，具有線鋸和真空 乾燥機及冷凝器， 該線鋸，導入有磨粒已分散在分散液的粉漿藉此進行 切削； 該真空乾燥機，具有筒體和蒸汽套，該筒體可導入有 -8 - 201130604 該線鋸所產生的廢粉漿並且具有連通於真空吸引裝置的乾 燥室，該蒸汽套是可使加熱流體導入在該筒體的外部將筒 體內加熱成分散液的蒸發溫度以上； 該冷凝器，配置在上述真空乾燥機和真空吸引裝置連 通用的真空系路，可對來自於上述真空乾燥機的水蒸氣進 行冷卻液化， 該線鋸之粉漿管理裝置的特徵爲，具備有：可轉換成 上述加熱流體將冷卻水供應至上述蒸汽套藉此對真空乾燥 機進行冷卻的冷卻裝置；及可對上述真空系路供應惰性氣 體的惰性氣體供應裝置。 上述線鋸之粉漿管理裝置中，以在上述線鋸和真空乾 燥機之間，具有從廢粉漿去除粗粒固體成份用的離心分離 機爲佳。 此外，上述線鋸之粉漿管理裝置中，以具有可導入有 來自於廢粉漿經由離心分離機分離後的粗粒固體成份和經 由冷凝器冷凝後的分散液對上述線鋸供應粉漿的粉將調整 槽爲佳。 另外，上述線鋸之粉漿管理裝置中，以具備有從上述 真空乾燥機所分離的水蒸氣去除固體成份用的除霧器爲佳 0 此外，上述線鋸之粉漿管理裝置中，以具備有複數段 的上述冷凝器爲佳。 [發明效果] -9 - 201130604 根據本發明的線鋸之粉漿管理裝置時，因具備有：可 轉換成上述加熱流體將冷卻水供應至蒸汽套對真空乾燥機 進行冷卻的冷卻裝置；及可對真空系路供應惰性氣體進行 清潔的惰性氣體供應裝置，所以在真空加熱乾燥的運轉停 止時，對蒸汽套供應冷卻水進行冷卻的同時，對真空系路 供應惰性氣體進行清潔，藉此就能夠將廢粉漿保持在惰性 氣體環境的狀態下進行冷卻，因此可獲得下述優異的效果 :能夠防止高溫的矽因氧化發熱導致有機成份起火的問題 ，再加上，又能夠防止分散液及固體成份即矽材料因氧化 導致品質變差的問題。 【實施方式】 [發明之最佳實施形態] 以下，對本發明實施形態與圖示例同時進行說明。 第1圖是表示本發明實施例的線鋸之粉漿管理裝置一 例的方塊圖。如第1圖所示，線鋸1，由泵浦4供應有來自 於粉漿調整槽2的粉漿3藉此進行被切削體的切削。由線鋸 1切削被切削體之後的廢粉漿8 ’是導入在分散液回收裝置 1 2構成用的離心分離機6，藉此分離成粗粒固體的磨粒7和 含有微粒固體的廢粉漿8，回收後的磨粒7是供應上述粉漿 調整槽2。 經離心分離機6分離的廢粉漿8是導入儲存在廢粉漿槽 9，該廢粉漿槽9的廢粉漿8是由泵浦10取出通過配管11供 應至分散液回收裝置12構成用的真空乾燥機28，藉此分離 -10· 201130604 成矽等固體成份和水蒸氣5a。真空乾燥機28是在筒體29的 內部具備有利用旋轉馬達30旋轉的中心軸3 1，該中心軸3 1 具備有攪拌葉片32。接著，上述廢粉漿8是從廢粉漿供應 口 33供應至筒體29內部由攪拌葉片32進行攪拌。 上述筒體29的軸方向中間位置上部形成有可取出水蒸 氣5 a的吸引胴部34，吸引胴部34是連接於下述之利用真空 吸引裝置45吸引的真空系路13。40是可將真空乾燥機28內 所分離的矽等固體成份取出在外部的固體成份取出裝置。 再加上，上述筒體29的外圍設有蒸汽套35,該蒸汽套 3 5及上述中心軸31，由供給管3 8供應來自於加熱流體供應 裝置36的加熱蒸氣等的加熱流體37。39爲加熱流體37的回 送管。 上述真空乾燥機28的加熱，若上述粉漿3構成用的分 散液爲水系分散液時保持成大致1 00 °C的加熱溫度，此外 ，分散液爲油系分散液時保持成大致3 00 °C前後的加熱溫 度。因此，對於上述加熱流體供應裝置36的採用，只要能 夠保持上述加熱溫度，可使用既設的蒸氣鍋爐或其他各種 的加熱裝置、加熱媒體。 在上述真空乾燥機28的吸引胴部34所連接的真空系路 13途中，配備有從水蒸氣5 a去除固體成份用的除霧器41。 該除霧器41所分離的霧42是送回至上述真空乾燥機28。 上述除霧器41的下游，配備有可導入來自除霧器41的 水蒸氣5a進行冷卻液化藉此取出分散液5的冷凝器。第1圖 是圖示著第1冷凝器43和第2冷凝器44成串聯配備的狀況， 201130604 第2冷凝器44連接有真空吸引裝置45。 真空吸引裝置45是利用噴射器用泵浦47將噴射器水槽 46的水供應至噴射器48透過排氣管49真空吸引上述第2冷 凝器44內的氣體。此外，真空吸引裝置也可使用真空泵浦 〇 上述第1冷凝器43和第2冷凝器44是配備在內部的冷卻 水管50供應冷卻水5 1進行冷卻，水蒸氣5a經冷卻後凝結成 液化的分散液5，是從下部抽出部52由分散液抽出泵浦53 抽出回收至上述粉漿調整槽2。粉漿調整槽2供應有補充用 的磨粒、分散液、其他的調整劑構成的成份調整劑54。 第1圖中，14爲冷卻水箱，該冷卻水箱14是經由泵浦 15及具備有冷卻用的熱交換器16之給水管17連接在上述加 熱流體37供應用的供給管38，構成爲利用轉換閥18、19的 操作，轉換成加熱流體37將冷卻水20供應至上述蒸汽套35 ，藉此可對真空乾燥機28進行冷卻的冷卻裝置21。22是利 用轉換閥23、24的操作使流動在上述回送管3 9之冷卻後的 冷卻水返回至冷卻水箱1 4的回收管。此外，第1圖中，從 上述泵浦15通過熱交換器16的冷卻水51是供應至第1冷凝 器43及第2冷凝器44進行冷卻、凝結。 上述真空系路I3，透過惰性氣體管26連接有惰性氣體 供應裝置25，構成爲利用配備在惰性氣體管26的轉換閥27 的操作使惰性氣體26a供應至真空系路1 3藉此就能夠清潔 真空系路1 3內。 以下，對上述形態例的作用進行說明。 -12- 201130604 第1圖之經粉漿調整槽2成份調整後的粉漿3是由泵浦4 供應線鋸1進行線鋸1之被切削體的切削。 線鋸1切削所產生的廢粉漿8 ’，是供應至離心分離機6 分離成磨粒7和含有微粒的廢粉漿8，磨粒7是導入至上述 粉漿調整槽2做爲再利用，廢粉漿8是儲存在廢粉漿槽9。 廢粉漿槽9的廢粉漿8，是由泵浦10供應至分散液回收 裝置12構成用之真空乾燥機28的筒體29內部。真空乾燥機 28的內部是由真空吸引裝置45保持成真空，再加上，蒸汽 套3 5及上述中心軸3 1供應且加熱有來自於加熱流體供應裝 置36的加熱蒸氣等加熱流體37，因此就能夠使供應至真空 乾燥機28由攪拌葉片3 2攪拌的廢粉漿的分散液，有效蒸發 成爲水蒸氣5 a導入至除霧器41。在筒體29內分散液蒸發後 殘留的矽等固體成份是從固體成份取出裝置40取出於外部 〇 上述真空乾燥機28的加熱溫度，當分散液5爲水系分 散液時以大致100 °C的溫度進行加熱，此外，當分散液5爲 油系分散液時以大致300 °C前後的溫度進行加熱。爲通常 的水系分散液時若要在常壓下形成蒸發是需要以大致180 °(：的溫度進行加熱，另外，分散液5爲油系分散液時若要 在常壓下形成蒸發是需要以大致5 00 °C的溫度進行加熱， 但如以上所述當在真空吸引的狀態下進行加熱時，以較低 的溫度就能夠使分散液蒸發有效率進行分離的同時，能夠 以較低的加熱溫度進行亦可防止分散液5變質。 從上述真空乾燥機28取出的水蒸氣5 a是由除霧器41分 -13- 201130604 離出霧42，此時霧42是含有固體成份，因此含有固體成份 的霧42是被送回至上述真空乾燥機28。 在上述除霧器41分離出霧42後的水蒸氣5a是由第1冷 凝器43進行冷卻形成爲液化。接著，利用第2冷凝器44進 行冷卻，使在第1冷凝器43未形成爲液化的水蒸氣5a液化 ，藉此使水蒸氣5a的幾乎全部都液化。 經上述第1冷凝器43及第2冷凝器44液化的分散液5是 利用分散液抽出泵浦53抽出回收至上述粉漿調整槽2。接 著，回收在粉漿調整槽2的分散液5及上述磨粒7是經由補 充成份檢查所得知之不足成份的成份調整劑54加以調整後 ，再度供應至線鋸1。 具備有上述的分散液回收裝置12，能確實回收廢粉漿 8中的分散液的幾乎全部做爲再利用，因此能夠極力減低 線鋸1的粉漿管理費用提高經濟性，再加上，廢棄物量的 減少，有利於環境保護的同時，還能夠降低廢棄處理費用 〇 另一方面，上述分散液回收裝置12中，若在利用真空 乾燥機28對廢粉漿.8進行加熱的同時進行真空吸引從分離 成固體成份和水蒸氣5a的狀態停止真空乾燥機28的運轉， 使真空吸引裝置45停止，讓大氣開放在真空系路13時，高 溫的矽會因氧化發熱而更加昇溫可能導致有機成份起火。 因此，本發明是在真空乾燥機28的真空加熱乾燥運轉 停止，真空吸引裝置45停止時，對轉換閥18、19、23、24 進行轉換，利用泵浦1 5取出冷卻水箱1 4的冷卻水利用熱交 -14- 201130604 換器1 6進行冷卻後’由給水管丨7供應至蒸汽套3 5從外部 真空乾燥機28進行冷卻。再加上，與此同時，對轉換閥 進行轉換’將惰性氣體供應裝置25的惰性氣體26a供應 真空系路13利用惰性氣體26a清潔真空系路13。 藉此’可將真空乾燥機28內的廢粉漿8保持在惰性 體周圍環境狀態下進行冷卻，因此，就能夠防止高溫的 氧化發熱導致有機成份起火的問題，再加上，還能夠防 分散液及固體成份即矽材料氧化造成的品質變差問題。 此外，對於真空乾燥機28冷卻用的冷卻水20，可沿 第1及第2冷凝器43、44的水蒸氣5a冷凝用所使用的冷卻 ，因此有不需要追加設備的優點。 另，本發明的線鋸之粉漿管理裝置，並不限於上述 實施例，雖然是以離心分離機6所分離的廢粉漿8供應至 空乾燥機28爲例，但也可將來自於線鋸1的廢粉漿8’直 供應至真空乾燥機28，其他，只要不脫離本發明主旨理 當然是可加以各種變更。 [產業上之可利用性] 本發明的線鋸之粉漿管理裝置，在真空乾燥機的真 加熱乾燥運轉停止時，能夠有效防止高溫的矽氧化發熱 致有機成份起火的問題，能夠有效防止分散液及固體成 即矽材料氧化造成的品質變差問題。 【圖式簡單說明】 對 27 至 氣 矽 止 用 水 的 真 接 所 空 導 份 -15- 201130604 第1圖爲表示本發明實施例的線鋸之粉漿管理裝置一 例的方塊圖。 【主要元件符號說明】 1 :線据 2 :粉漿調整槽 3 :粉漿 5 :分散液 5 a :水蒸氣 6 :離心分離機 7 :磨粒 8 :廢粉漿 8’ ：廢粉漿 13 :真空系路 1 4 :冷卻水箱 2 0 :冷卻水 2 1 :冷卻裝置 2 5 :惰性氣體供應裝置 26a :惰性氣體 2 8 :真空乾燥機 29 :筒體 35 :蒸汽套 36 :加熱流體供應裝置 3 7 :加熱流體 -16- 201130604 43 ： 44 ： 45 ： 第1冷凝器（冷凝器） 第2冷凝器（冷凝器） 真空吸引裝置 -17-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw which utilizes vacuum heating to dry waste slurry from a wire saw to efficiently recover a dispersion with high efficiency and to ensure safety when the vacuum heating drying operation is stopped. Slurry management device. [Prior Art] Conventionally, for example, when a wafer is produced from a material such as ceramic, a substrate of a 1C wafer, a crucible of a solar cell, or synthetic quartz, a device called a wire saw is used. This wire saw is provided with a plurality of steel wires which are alternately stretched in an endless manner between the processing rolls, and the steel wire is supplied with the slurry formed by dispersing the abrasive grains in the dispersion liquid to perform cutting. As the dispersion, an aqueous dispersion or an oil dispersion is generally used. When the workpiece to be cut such as the ceramic or the 1 C wafer substrate is cut by a wire saw, the steel wire is supplied with the slurry formed by dispersing the abrasive grains in the dispersion liquid, and at the same time, the processing roller is driven to move the steel wire. In this state, the steel wire and the workpiece are brought close to each other, and the workpiece is cut by the steel wire to cut the workpiece to produce a large number of wafers. The cutting ability of the above steel wire is largely dependent on the mixing weight ratio of the abrasive grains and the dispersion liquid supplied to the slurry of the steel wire, and therefore, in order to efficiently perform the cutting of the workpiece, it is necessary to apply the abrasive grains and the dispersion in the slurry. The mixing weight ratio is maintained to maximize the cutting capacity of the steel wire. In addition, since the slurry supplied to the wire saw by the wire saw is mixed with the chips of the object to be cut, the amount of solid content in the waste slurry after cutting becomes large, and the ratio of the abrasive grains is relatively changed. Less, in addition, base 201130604 will reduce the cutting performance of the workpiece during the cutting, so that the amount of abrasive grains with the appropriate particle size will be reduced during cutting. For this reason, in the past, a certain amount of waste slurry was discharged every time the designated number of cutting processes was completed, and the same amount of fresh slurry was discharged as the discharged slurry. However, even if a part of the waste slurry is periodically replaced as described above, the amount of chips or broken abrasive grains in the slurry is gradually increased, so that the mixing weight ratio of the abrasive grains and the dispersion in the slurry cannot be maintained frequently. The best flaw, therefore, the cutting ability of the steel wire will gradually decrease, resulting in the inability to maintain uniform and stable cutting efficiency. In addition, the previous wire saw was used to dispose of the waste slurry taken out during the replacement of the slurry, but the waste waste slurry contained in the waste slurry contained usable abrasive particles and dispersion, so that it was discarded and a new mill was supplied. Since the granules and the dispersion are wasteful of resources, there is a problem that the amount of abrasive grains and dispersion required for the cutting process increases, and the cutting operation cost increases. In addition, since the waste waste slurry is treated as industrial waste, there is a problem that the industrial waste treatment load increases. · In addition, in order to solve the above problems, the waste slurry is supplied to the centrifugal separator for separation. The solid component having a relatively large particle size is removed, and then supplied to a filter to separate and remove the fine solid component, thereby obtaining a relatively clean dispersion, and dispersing the abrasive particles in the manner in which the recovered dispersion is re-supplied to the wire saw. However, the above method of removing the solid component recovery dispersion in the waste slurry by using a centrifugal separator and a filter is theoretically a feasible method, but -6-201130604 actually has difficulty in separating solid components. That is, the usual dispersion is viscous, and a high concentration of the waste slurry is mixed with a fine solid component of a few micrometers, so separation is very difficult. It is only possible to separate solid components of a certain size and large particle size by using a centrifugal separator. Therefore, a fine solid component of several micrometers needs to be separated by a filter, but it is possible to efficiently separate fine particles from a dispersion in which the fine particles are mixed at a high concentration. The filter does not exist. That is, the filter portion of the filter immediately causes clogging due to the high concentration of the fine particles. Therefore, it is technically difficult to continuously and efficiently separate solid components and dispersions from the above-mentioned waste toner. In order to deal with the above problem, the waste slurry from the wire saw is supplied to a vacuum dryer which can be heated by a steam jacket and agitated by a stirring device provided inside, and suctioned by a vacuum suction device, thereby making it waste. The slurry is separated into a solid component and water vapor, and the separated water vapor is introduced into a condenser to be liquefied to thereby recover the dispersion (see Patent Document 1). [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004-082247 [Draft of the Invention] [Problems to be Solved by the Invention] However, the apparatus disclosed in Patent Document 1 is stopped in the operation of vacuum heating and drying. There are the following unfavorable problems. In other words, when the waste slurry is heated to 201130604 while vacuum suction is separated into a solid component and water vapor, the vacuum heating and drying are stopped, and the vacuum suction is stopped. When the vacuum system is opened to the atmosphere, the high temperature enthalpy is oxidized. Heating and increasing temperature may cause organic ingredients to catch fire. Therefore, it is necessary to cool the vacuum dryer at the time of stopping, but it is difficult to immediately cool the internal waste toner even if the vacuum dryer is cooled from the outside, and residual heat may cause a fire. Further, when cooling is performed, there is an effect that heat generation can be suppressed to some extent, but cooling causes the device to shrink so that air is sucked from the leak portion, causing localized temperature rise, and as a result, heat generation and fire may occur, and even if it is possible to avoid The problem of fire generated when the vacuum system is open to the atmosphere, but the presence of oxygen at high temperatures still causes the deterioration of the quality of the dispersion of the dispersion and the solid material. The present invention has been made in view of the above problems, and provides a wire saw which is capable of reliably recovering a dispersion liquid from a wire saw by high-efficiency by vacuum heating, and ensuring safety when the vacuum heating drying operation is stopped. Slurry device. [Means for Solving the Problem] The slurry management device for a wire saw according to the present invention has a wire saw, a vacuum dryer, and a condenser, and the wire saw is introduced with the slurry in which the abrasive grains have been dispersed in the dispersion liquid. The vacuum dryer has a cylinder and a steam jacket, and the cylinder can be introduced with a waste slurry produced by the wire saw of -8 - 201130604 and has a drying chamber connected to the vacuum suction device, which can make The heating fluid is introduced into the outside of the cylinder to heat the cylinder to a temperature above the evaporation temperature of the dispersion; the condenser is disposed in a vacuum system for communicating between the vacuum dryer and the vacuum suction device, and is applicable to the vacuum dryer from the vacuum dryer. The water vapor is cooled and liquefied, and the wire saw slurry management device is characterized in that: a cooling device that can be converted into the heating fluid to supply cooling water to the steam jacket to cool the vacuum dryer; An inert gas supply device that supplies an inert gas to the above vacuum system. In the above-described slurry management apparatus for a wire saw, it is preferred to have a centrifugal separator for removing coarse solid components from the waste slurry between the wire saw and the vacuum dryer. Further, in the slurry management device for a wire saw, the slurry is supplied with the slurry which has a coarse solid component which can be introduced from the waste slurry and is separated by a centrifugal separator and which is condensed via a condenser. The powder will adjust the groove as well. Further, in the slurry management device for a wire saw, it is preferable that a mist eliminator for removing solid components from water vapor separated from the vacuum dryer is provided. Further, the wire saw slurry management device includes The above condenser having a plurality of stages is preferred. [Effect of the Invention] -9 - 201130604 According to the present invention, the slurry management device for a wire saw includes: a cooling device that converts the heating fluid to supply the cooling water to the steam jacket to cool the vacuum dryer; An inert gas supply device for supplying an inert gas to a vacuum system, so that when the vacuum heating and drying operation is stopped, the steam jacket is supplied with cooling water for cooling, and the vacuum system is supplied with an inert gas for cleaning. The waste slurry is cooled while being kept in an inert gas atmosphere, so that the following excellent effects can be obtained: the problem that the high temperature is caused by the oxidative heat generation and the organic component is ignited, and the dispersion and the solid can be prevented. The component is a problem in which the bismuth material deteriorates due to oxidation. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described together with examples of drawings. Fig. 1 is a block diagram showing an example of a slurry management apparatus for a wire saw according to an embodiment of the present invention. As shown in Fig. 1, the wire saw 1 is supplied with the slurry 3 from the slurry conditioning tank 2 by the pump 4, thereby cutting the workpiece. The waste slurry 8' after the workpiece is cut by the wire saw 1 is a centrifugal separator 6 introduced into the dispersion recovery device 12, whereby the abrasive grains 7 separated into coarse solids and the waste powder containing the particulate solids are separated. The slurry 8 and the recovered abrasive grains 7 are supplied with the above-described slurry conditioning tank 2. The waste slurry 8 separated by the centrifugal separator 6 is introduced and stored in the waste slurry tank 9, and the waste slurry 8 of the waste slurry tank 9 is taken out by the pump 10 and supplied to the dispersion recovery device 12 through the pipe 11. The vacuum dryer 28 is thereby separated into a solid component such as helium and a water vapor 5a. The vacuum dryer 28 is provided with a center shaft 3 1 that is rotated by a rotary motor 30 inside the cylinder 29, and the center shaft 31 is provided with a stirring blade 32. Next, the waste toner slurry 8 is supplied from the waste slurry supply port 33 to the inside of the cylindrical body 29 and stirred by the stirring blade 32. The upper portion of the cylindrical body 29 in the axial direction intermediate portion is formed with a suction dam portion 34 from which the water vapor 5a can be taken out, and the suction dam portion 34 is connected to the vacuum system 13 sucked by the vacuum suction device 45. The solid component such as hydrazine separated in the dryer 28 is taken out to the external solid component take-out device. Further, a steam jacket 35 is provided on the outer periphery of the cylinder 29, and the steam jacket 35 and the center shaft 31 are supplied with heating fluid 37 from the heating fluid supply device 36 by the supply pipe 38. 39 It is a return pipe for heating the fluid 37. The heating of the vacuum dryer 28 is maintained at a heating temperature of approximately 100 ° C when the dispersion for the composition of the slurry 3 is an aqueous dispersion, and is maintained at approximately 300 ° C when the dispersion is an oil dispersion. Heating temperature before and after C. Therefore, as long as the heating fluid supply device 36 can be used, the steam boiler or other various heating devices and heating medium can be used as long as the above heating temperature can be maintained. In the middle of the vacuum system 13 to which the suction dam portion 34 of the vacuum dryer 28 is connected, a defogger 41 for removing solid components from the water vapor 5a is provided. The mist 42 separated by the demister 41 is sent back to the vacuum dryer 28. Downstream of the mist eliminator 41, a condenser that can introduce water vapor 5a from the demister 41 and perform cooling liquefaction to take out the dispersion liquid 5 is provided. Fig. 1 shows a state in which the first condenser 43 and the second condenser 44 are arranged in series. In 201130604, the second condenser 44 is connected to the vacuum suction device 45. The vacuum suction device 45 supplies the water in the ejector water tank 46 to the ejector 48 by the ejector pump 47 to vacuum-attract the gas in the second condenser 44 through the exhaust pipe 49. Further, the vacuum suction device may be vacuum pumped. The first condenser 43 and the second condenser 44 are cooled by the cooling water pipe 50 provided inside, and the water vapor 5a is cooled and condensed into a liquefied dispersion. The liquid 5 is extracted from the lower extraction portion 52 by the dispersion pump 53 and recovered and collected in the slurry adjustment tank 2. The slurry conditioning tank 2 is supplied with a component adjusting agent 54 composed of abrasive grains, a dispersion liquid, and other adjusting agents. In the first drawing, reference numeral 14 denotes a cooling water tank 14 which is connected to a supply pipe 38 for supplying the heating fluid 37 via a pump 15 and a water supply pipe 17 including a heat exchanger 16 for cooling, and is configured to be converted. The operation of the valves 18, 19 is converted into a heating fluid 37 to supply the cooling water 20 to the steam jacket 35, whereby the cooling device 21 that can cool the vacuum dryer 28 is operated by the operation of the switching valves 23, 24. The cooling water cooled by the above-mentioned return pipe 39 is returned to the recovery pipe of the cooling water tank 14. Further, in Fig. 1, the cooling water 51 that has passed through the heat exchanger 16 from the pump 15 is supplied to the first condenser 43 and the second condenser 44 to be cooled and condensed. The vacuum system I3 is connected to the inert gas supply unit 25 through the inert gas pipe 26, and is configured to supply the inert gas 26a to the vacuum system 13 by the operation of the switching valve 27 provided in the inert gas pipe 26. The vacuum system is within 1 3 . Hereinafter, the action of the above-described embodiment will be described. -12- 201130604 The slurry 3 after the composition adjustment of the slurry adjustment tank 2 of Fig. 1 is the cutting of the workpiece of the wire saw 1 by the pump 4 supply wire saw 1. The waste slurry 8' produced by the wire saw 1 is supplied to the centrifugal separator 6 and separated into abrasive grains 7 and waste slurry 8 containing fine particles, and the abrasive grains 7 are introduced into the above-mentioned slurry adjustment tank 2 for reuse. The waste slurry 8 is stored in the waste slurry tank 9. The waste slurry 8 of the waste slurry tank 9 is supplied from the pump 10 to the inside of the cylinder 29 of the vacuum dryer 28 which is constituted by the dispersion recovery device 12. The inside of the vacuum dryer 28 is kept in a vacuum by the vacuum suction device 45. Further, the steam jacket 35 and the center shaft 31 are supplied and heated with a heating fluid 37 such as heated steam from the heating fluid supply device 36. The dispersion of the waste slurry supplied to the vacuum dryer 28 by the stirring blade 32 can be efficiently evaporated into water vapor 5 a and introduced into the mist eliminator 41. The solid component such as ruthenium remaining after evaporation of the dispersion in the cylinder 29 is taken out from the solid component take-out device 40 and heated outside the vacuum dryer 28, and when the dispersion 5 is an aqueous dispersion, it is approximately 100 °C. The temperature is heated, and when the dispersion liquid 5 is an oil-based dispersion liquid, it is heated at a temperature of approximately 300 ° C or so. In the case of a normal aqueous dispersion, it is necessary to heat at a temperature of approximately 180 ° (at a temperature of at least 180 °), and if the dispersion 5 is an oil-based dispersion, it is necessary to form an evaporation at a normal pressure. Heating is carried out at a temperature of approximately 50,000 ° C. However, when heating is carried out under vacuum suction as described above, the dispersion can be efficiently evaporated at a lower temperature, and heating can be performed at a lower temperature. The temperature can also prevent the dispersion 5 from deteriorating. The water vapor 5 a taken out from the vacuum dryer 28 is separated from the mist 42 by the mist eliminator 41 -13 - 201130604, and the mist 42 contains a solid component and thus contains solids. The mist 42 of the component is sent back to the vacuum dryer 28. The water vapor 5a after the mist 42 is separated by the mist eliminator 41 is liquefied by cooling by the first condenser 43. Next, the second condenser is used. 44 is cooled, and the water vapor 5a which is not liquefied in the first condenser 43 is liquefied, whereby almost all of the water vapor 5a is liquefied. The dispersion liquid liquefied by the first condenser 43 and the second condenser 44 5 is to use the dispersion to pump The pump 53 is extracted and recovered to the slurry conditioning tank 2. Then, the dispersion liquid 5 recovered in the slurry conditioning tank 2 and the abrasive particles 7 are adjusted by the component adjusting agent 54 of the insufficient component obtained by the supplementary component inspection, and then re-introduced. The wire saw 1 is provided. The dispersion liquid recovery device 12 described above is provided, and almost all of the dispersion liquid in the waste toner slurry 8 can be recovered for reuse. Therefore, the slurry management cost of the wire saw 1 can be reduced as much as possible, and the economy can be improved. In addition, the reduction in the amount of waste is advantageous for environmental protection, and the disposal cost can be reduced. On the other hand, in the above-described dispersion recovery device 12, if the waste slurry 8 is used by the vacuum dryer 28 When the vacuum suction is performed, the operation of the vacuum dryer 28 is stopped in a state where the solid component and the water vapor 5a are separated, and the vacuum suction device 45 is stopped. When the atmosphere is opened to the vacuum system 13, the high temperature enthalpy is oxidized and heated. Further heating may cause the organic component to ignite. Therefore, the present invention stops the vacuum heating and drying operation of the vacuum dryer 28, and the vacuum suction device 45 stops. The switching valves 18, 19, 23, 24 are switched, and the cooling water of the cooling water tank 14 is taken out by the pump 15. The cooling water is cooled by the heat exchange-14-201130604, and the water is supplied to the steam by the water supply pipe 7 The sleeve 35 is cooled from the external vacuum dryer 28. In addition, at the same time, the switching valve is switched. 'The inert gas 26a of the inert gas supply device 25 is supplied to the vacuum system 13 to clean the vacuum system 13 with the inert gas 26a. By this, the waste slurry 8 in the vacuum dryer 28 can be cooled while being kept in an environment surrounding the inert body, so that it is possible to prevent the problem of ignition of the organic component caused by high temperature oxidation and heat generation, and also prevent The dispersion and the solid component, that is, the quality deterioration caused by the oxidation of the ruthenium material. Further, the cooling water 20 for cooling the vacuum dryer 28 can be cooled by the use of the water vapor 5a of the first and second condensers 43 and 44. Therefore, there is an advantage that no additional equipment is required. Further, the slurry management device for a wire saw of the present invention is not limited to the above embodiment, and although the waste slurry 8 separated by the centrifugal separator 6 is supplied to the air dryer 28 as an example, it may be from the line. The waste slurry 8' of the saw 1 is supplied directly to the vacuum dryer 28, and other various modifications can be made without departing from the spirit of the invention. [Industrial Applicability] The slurry management device for a wire saw according to the present invention can effectively prevent the problem of high-temperature enthalpy oxidation and organic component ignition when the vacuum drying operation of the vacuum dryer is stopped, thereby effectively preventing dispersion. The liquid and the solid become the problem of deterioration in quality caused by oxidation of the ruthenium material. [Brief Description of the Drawings] A true connection of the 27 to the gas stop water -15 - 201130604 Fig. 1 is a block diagram showing an example of the slurry management device for the wire saw according to the embodiment of the present invention. [Description of main component symbols] 1 : Line data 2: Slurry adjustment tank 3: Slurry 5: Dispersion liquid 5 a : Water vapor 6 : Centrifugal separator 7 : Abrasive grain 8 : Waste slurry 8': Waste slurry 13 : Vacuum system 1 4 : Cooling water tank 2 0 : Cooling water 2 1 : Cooling device 2 5 : Inert gas supply device 26a : Inert gas 2 8 : Vacuum dryer 29 : Cylinder 35 : Steam jacket 36 : Heating fluid supply device 3 7 : Heating fluid-16- 201130604 43 : 44 : 45 : 1st condenser (condenser) 2nd condenser (condenser) Vacuum suction device-17-