TW201130117A - A method of fabricating an optical transformer - Google Patents

A method of fabricating an optical transformer

Info

Publication number
TW201130117A
TW201130117A TW99104973A TW99104973A TW201130117A TW 201130117 A TW201130117 A TW 201130117A TW 99104973 A TW99104973 A TW 99104973A TW 99104973 A TW99104973 A TW 99104973A TW 201130117 A TW201130117 A TW 201130117A
Authority
TW
Taiwan
Prior art keywords
region
fabricating
optical transformer
substrate
material layer
Prior art date
Application number
TW99104973A
Other languages
Chinese (zh)
Other versions
TWI497699B (en
Inventor
Yi-Ching Wu
Shuenn-Jeng Chen
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW099104973A priority Critical patent/TWI497699B/en
Publication of TW201130117A publication Critical patent/TW201130117A/en
Application granted granted Critical
Publication of TWI497699B publication Critical patent/TWI497699B/en

Links

Abstract

A method of fabricating an optical transformer is provided. A substrate is provided at first, wherein the substrate includes a first region and a second region. Then a first material layer is formed on the substrate, and the portion of the first material layer other than the first region is removed. Then a second material layer is formed on the substrate, and the portion of the second material in the first region and the second region is removed. Lastly, a first conductive layer is formed on the substrate and the portion of the first conductive layer other than the second region is removed. The first material layer becomes a part of the optical transformer.
TW099104973A 2010-02-22 2010-02-22 A method of fabricating an optical transformer TWI497699B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099104973A TWI497699B (en) 2010-02-22 2010-02-22 A method of fabricating an optical transformer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099104973A TWI497699B (en) 2010-02-22 2010-02-22 A method of fabricating an optical transformer

Publications (2)

Publication Number Publication Date
TW201130117A true TW201130117A (en) 2011-09-01
TWI497699B TWI497699B (en) 2015-08-21

Family

ID=50180103

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099104973A TWI497699B (en) 2010-02-22 2010-02-22 A method of fabricating an optical transformer

Country Status (1)

Country Link
TW (1) TWI497699B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI494627B (en) * 2013-04-23 2015-08-01 Hon Hai Prec Ind Co Ltd Optical signal gather member and optical module used thereof
US9383531B2 (en) 2013-04-23 2016-07-05 Hon Hai Precision Industry Co., Ltd. Light signal gathering device and optical module used thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050253268A1 (en) * 2004-04-22 2005-11-17 Shao-Ta Hsu Method and structure for improving adhesion between intermetal dielectric layer and cap layer
US7220677B2 (en) * 2005-04-13 2007-05-22 Taiwan Semiconductor Manufacturing Co., Ltd. WAT process to avoid wiring defects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI494627B (en) * 2013-04-23 2015-08-01 Hon Hai Prec Ind Co Ltd Optical signal gather member and optical module used thereof
US9383531B2 (en) 2013-04-23 2016-07-05 Hon Hai Precision Industry Co., Ltd. Light signal gathering device and optical module used thereof

Also Published As

Publication number Publication date
TWI497699B (en) 2015-08-21

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