201124701 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種對焦裝置，尤其涉及一種影像測量儀的 對焦裝置。 [0002] 【先前技術】 影像量測是目前精密量測領域中最廣泛使用的量測方法 ，該方法不僅精度高，而且量測速度快。影像量測主要 用於零件或者部件的尺寸物差和形位誤差的測量，對保 證產品品質起著重要的作用。 〇 [0003] 一般而言，在測量待測工件的輪廓或表面前，通常需要 進行影像對焦，使得待測工件的表面到鏡頭的距離等於 焦距，能否準確的對焦，對保證測試的精度起著重要的 作用。影像自動對焦方法為：在一定範圍内移動電荷耦 合裝置（charge coupled device，CCD)的鏡頭，並 不斷獲取待測工件表面的影像，然後根據獲取的影像計 算出CCD鏡頭的焦點位置。然而，在對焦的過程中，通常 η 被測工件表面會出現受光不均勻現象，使對焦的準確性 降低，況且，當所述被測工件表面的光滑度非常高的時 候，比如光滑的玻璃片，由於光射到待測工件的光滑表 面反射回CCD時，所獲取的影像中的輪廓資訊非常少，在 計算影像的清晰度時準確度不高，從而也影響對焦的準 確性。 [0004] 【發明内容】 鑒於以上内容，有必要提供一種影像測量儀的對焦裝置 ，其可以對光滑的被測工件表面及粗糙的被測工件表面 099100534 表單編號A0101 第3頁/共18頁 0992001136-0 201124701 進行對焦，使被測工件表面受光均勻，提高了對焦的準 確性。 [0005] —種影像測量儀的對焦裝置，包括一光學裝置、一圖案 光裝置、一同轴光裝置、一分光鏡、一影像攫取裝置及 一光源，所述光源用於照射一待測工件，所述光學裝置 用於根據圖案光裝置或同軸光裝置所發出的光線對所述 待測工件進行光學成像，所述影像攫取裝置用於透過所 述光學裝置感應所述待測工件的圖像並將其轉換為電信 號以傳輸給一電腦系統進行對焦分析，所述圖案光裝置 透過所述分光鏡與上述光學裝置相連；所述同軸光裝置 透過所述分光鏡與上述光學裝置相連；所述圖案光裝置 與同軸光裝置以該分光鏡為垂點成90度夾角；所述分光 鏡用於將所述圖案光裝置或同軸光裝置發出的光線傳送 到所述光學裝置。 [0006] 上述影像測量儀的對焦裝置在待測工件表面的光滑度較 高時，可利用所述圖案光裝置將圖案片上的圖案投射到 所述待測工件的表面，以準確的對待測工件進行對焦。 如果所述待測工件表面的光滑度粗糙時，利用所述同軸 光裝置發出的光線投射到所述待測工件的表面，直接對 待測工件進行對焦。 【實施方式】 [0007] 下面結合附圖及較佳實施方式對本發明作進一步詳細描 述。 [0008] 參考圖1至圖6，本發明影像測量儀1的較佳實施方式包括 一與水平面平行的工作臺2、一跨設於該工作臺2的龍門 099100534 表單編號 A0101 第 4 頁/共 18 頁 0992001136-0 201124701 Ο [0009] Ο 架-固設於該龍門架3中部的頂軍*及 同軸光裝置7、~分朵q '、先裴置6、一 ，如一環形光源8。所^^、—影像攫取裝置1Q及一光源 所返環形光源8為LED (Li —g_e，發光二極體）光源 = 1還設有-X轴傳動系統 〜像測量儀 ^ ns, i - λ 軸傳動系統及~Ζ軸傳動系 =的機：述Χ轴傳動系統用以驅動所述頂罩4沿 ㈣χ㈣動，㈣％傳動系統用 動所违作里2沿所述機械坐標系的γ轴移動。所述χ =轴分Γ行於所述工作臺2。所述⑽傳動系統用以 °所述光干裝置5、圖案光裝置6、同軸光裝置7 '分光 鏡11〜像攫取裝置1Q沿所述機械座標的Ζ私移動，用以 使所述光予裝置5對-位於所述工作臺2上的待測 焦。 所述光學裝置5安裝於所述影像獲取裝置 10及環形光源8 的中間所述環形光源8用於照射所述待測 工件9，所述 光學裝置5用於對所述待測卫件9進行光學成像，所述影 像攫取裝置ίο用於透過第—透鏡51 (如圖3所示）感應由 所述光學裝置5所形成的待測工件9的圖像並將其轉換成 電仏號傳輸給-電腦系統（圖未示）進行對焦分析。該 電腦系統包括一顯示裝i，用以顯示所述影龍取裝置 10所攫取的圖像《所述影像攫取裝置1〇可以是一CCD (201124701 VI. Description of the Invention: [Technical Field] [0001] The present invention relates to a focusing device, and more particularly to a focusing device for an image measuring instrument. [0002] [Previous technique] Image measurement is currently the most widely used measurement method in the field of precision measurement, and the method has high precision and fast measurement speed. Image measurement is mainly used to measure the dimensional difference and shape error of parts or components, which plays an important role in ensuring product quality. 〇[0003] Generally speaking, before measuring the contour or surface of the workpiece to be tested, it is usually necessary to perform image focusing so that the distance from the surface of the workpiece to be measured to the lens is equal to the focal length, and whether the focus can be accurately performed, the accuracy of the test is guaranteed. An important role. The image autofocus method is: moving a lens of a charge coupled device (CCD) within a certain range, and continuously obtaining an image of the surface of the workpiece to be tested, and then calculating a focus position of the CCD lens based on the acquired image. However, in the process of focusing, η is uneven on the surface of the workpiece to be measured, which reduces the accuracy of focusing. Moreover, when the surface of the workpiece to be tested has a very high smoothness, such as a smooth glass piece. When the light is incident on the smooth surface of the workpiece to be tested and reflected back to the CCD, the contour information in the acquired image is very small, and the accuracy in calculating the sharpness of the image is not high, thereby affecting the accuracy of the focus. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide a focusing device for an image measuring instrument which can face a smooth surface of a workpiece to be tested and a rough surface of a workpiece to be tested. 099100534 Form No. A0101 Page 3 / 18 pages 0992001136 -0 201124701 Focusing makes the surface of the workpiece to be evenly illuminated, improving the accuracy of focusing. [0005] A focusing device for an image measuring instrument, comprising: an optical device, a patterned optical device, a coaxial optical device, a beam splitter, an image capturing device and a light source, wherein the light source is used to illuminate a workpiece to be tested The optical device is configured to optically image the workpiece to be tested according to the light emitted by the pattern light device or the coaxial light device, and the image capturing device is configured to sense an image of the workpiece to be tested through the optical device Converting it into an electrical signal for transmission to a computer system for focusing analysis, the patterned optical device being coupled to the optical device through the beam splitter; the coaxial optical device being coupled to the optical device through the beam splitter; The pattern light device and the coaxial light device are at an angle of 90 degrees from the beam splitter; the beam splitter is configured to transmit light emitted by the pattern light device or the coaxial light device to the optical device. [0006] When the smoothness of the surface of the workpiece to be tested is high, the focusing device of the image measuring instrument can use the pattern light device to project a pattern on the pattern sheet onto the surface of the workpiece to be tested, so as to accurately measure the workpiece. Focus. If the smoothness of the surface of the workpiece to be tested is rough, the light emitted by the coaxial optical device is projected onto the surface of the workpiece to be tested, and the workpiece to be tested is directly focused. [Embodiment] The present invention will be further described in detail below with reference to the accompanying drawings and preferred embodiments. 1 to 6, a preferred embodiment of the image measuring apparatus 1 of the present invention includes a table 2 parallel to a horizontal plane, a gantry 099100534 spanning the table 2, and a form number A0101. 18 pages 0992001136-0 201124701 Ο [0009] Ο frame - the top army* and the coaxial optical device 7 fixed in the middle of the gantry 3, the sub-station q', the first device 6, a first, such as a ring light source 8. The image capturing device 1Q and the ring light source 8 of a light source are LED (Li — g — e, light emitting diode) light source = 1 is also provided with an -X axis transmission system ~ image measuring device ^ ns, i - λ The shaft transmission system and the machine of the Ζ shaft transmission system: the Χ shaft transmission system is used to drive the top cover 4 along (4) χ (4), (4)% of the transmission system is used to violate the γ axis of the machine coordinate system mobile. The χ = axis branches to the workbench 2. The (10) transmission system is configured to move the light-drying device 5, the pattern light device 6, and the coaxial light device 7's beam splitter 11 to image capturing device 1Q along the mechanical coordinate to enable the light to be The pair of devices 5 - the focus to be measured on the table 2 . The optical device 5 is mounted in the middle of the image capturing device 10 and the annular light source 8 for illuminating the workpiece 9 to be tested, and the optical device 5 is used to perform the workpiece 9 to be tested. Optical imaging, the image capturing device is configured to sense an image of the workpiece 9 to be tested formed by the optical device 5 through the first lens 51 (shown in FIG. 3) and convert it into an electric signal transmission to - The computer system (not shown) performs focus analysis. The computer system includes a display device i for displaying an image captured by the shadow capturing device 10. The image capturing device 1 can be a CCD (
Charge Coupled Device，電荷耦合器件）攝像頭，也 可以是CMOS (Complementary Metal Oxide Semiconductor ， 互補金屬氧化物半導體） 攝像頭。 099100534 表單編號A0101 第5頁/共18頁 0992001136-0 201124701 [0010] 所述光學裝置5包括一殼體50、第一透鏡51、第二透鏡52 及與該第二透鏡52不平行的半透半反射鏡53，所述第一 透鏡51和第二透鏡52分別安裝於所述殼體50的兩端，以 對所述待測工件9進行光學成像，所述半透半反射鏡53位 於該兩透鏡51及52之間，且與所述殼體50的軸成45度爽 角。 [0011] 所述圖案光裝置6包括一殼體60、一裝設於殼體60前端的 圖案光源61、一倍率放大器62、一圖案片63,所述圖案 光源61、倍率放大器62和圖案片63依次安裝於所述殼體 60内部，如圖3所示〇所述圖案光琢61為LED (Light Emitting Diode，發光二極體）光源。所述圖案片62 為一玻璃片，其上具有如圖4所示的多個透明與不透明的 方形，且所述多個透明與不透明的方形交替排布。所述 倍率放大器62為一透鏡，透過調整透鏡a距離，可以改 變投射到所述待測工件9的表面上的特徵亂案的大小。在 其他實把方式中，所迷圖案月63上的圖案也可以為其他 圖案，如輪廓清晰的動物像、人物像或者風景均可。 [0012] 所述同轴光裝置7包括一殼體7〇、一裝設於殼體70前端的 同轴光源71及兩個倍率放大器72、73，所述同軸光源71 、倍率放大1§72、73依次安裝於所述殼體7〇内部，如圖3 所示。所述圖案光源7ι為[ED (Light Emitting Di-ode，發光二極體）光源。所述倍率放大器72、73為兩透 鏡（如第三透鏡、第四透鏡），透過倍率放大器72、73 的距離，可以改變投射到所述待測工件9的表面上光的亮 度。 °"100534 表單編號删 1 第 6 ^ 18 胃 〇992〇〇1136-° 201124701 [0013] 所述分光鏡11包括一殼體110、一裝設於殼體110的菱鏡 ’如圖3所示。所述圖案光裝置6透過分光鏡11與光學 襄置5相連，同轴光裝置7也透過分光鏡11與光學裝置5相 連。該分光鏡11用於分別將圖案光裝置6發出的光線及同 輪光裝置7發出的光線投射到光學裝置5中。其中，圖案 光裝置6與同軸光裝置7以分光鏡11為垂點成90度夾角。 具體而言’光線的傳播路徑如圖3所示，當圖案光裝置6 發出水平的光線投射到分光鏡11的菱鏡111上時’光線穿 Ο [0014] 過菱鏡111 ;當同軸光裝置7發出垂直的光線投射到分光 . "： .. ...... 鏡11的菱鏡111上時，光線發生9 0度的折射。所述菱鏡 與所述殼體110的軸成45度夾角。 Ο [0015] 上述影像測量儀1包括所述圖案光裝置6及同軸光裝置7， 如果所述待測工件9表面的光滑度較高，則利用所述圖案 光裝置6將圖案片63的圖形投射到所达待測工件9的表面 ，以方便對焦；如果所述待測工件9表面的光滑度較低， 則利用所述同軸光裝置7照亮所述待測工件9即可。具體 内容描述如下： 當所述待測工件9表面的光滑度較高時，開啟所述圖案光 源61及環形光源8，所述圖案光源61所發出的光線依次透 過所述倍率放大器62、圖案片63、菱鏡II1、半透半反射 鏡53以及透鏡52將所述圖案片63的圖形投射在所述待測 工件9的表面，同時透過控制所述環形光源8的照明區域 照亮所述待測工件9的指定區域。此時，所述光學裝置5 將對所述待測工件9的表面進行成像。所述影像攫取裝置 10感應所述待測工件9的表面的圖像並將其轉換為電信號 099100534 表單編號A0101 第7頁/共18頁 0992001136-0 201124701 以傳輸給所述電腦系統，從而運算得到所述待測工件9的 表面的圖像的清晰度及對比度。所述電腦系統根據其清 晰度及對比度即可判斷得到所述待測工件9的焦點位置。 [0016] 當所述待測工件9表面的光滑度較低時，即所述待測工件 9表面粗糙時，開啟所述同軸光源71及環形光源8，所述 同軸光源71所發出的光線依次透過所述倍率放大器72、 73、菱鏡111、半透半反射鏡53以及透鏡52投射在所述 待測工件9的表面，同時透過控制所述環形光源8的照明 區域照亮所述待測工件9的指定區域。此時，所述光學裝 置5將對所述待測工件9的表面進行成像。所述影像攫取 裝置10感應所述待測工件9的表面的圖像並將其轉換為電 信號以傳輸給所述電腦系統，從而運算得到所述待測工 件9的表面的圖像的清晰度及對比度。所述電腦系統根據 其清晰度及對比度即可判斷得到所述待測工件9的焦點位 置。 [0017] 最後所應說明的是，以上實施例僅用以說明本發明的技 術方案而非限制，儘管參照以上較佳實施例對本發明進 行了詳細說明，本領域的普通技術人員應當理解，可以 對本發明的技術方案進行修改或等同替換，而不脫離本 發明技術方案的精神和範圍。 【圖式簡單說明】 [0018] 圖1係本發明影像測量儀的較佳實施方式的立體圖。 [0019] 圖2係圖1中對焦裝置的較佳實施方式的立體圖。 [0020] 圖3係圖1中對焦裝置的剖面圖。 099100534 表單編號A0101 第8頁/共18頁 0992001136-0 201124701 [0021] 圖4係圖1中圖案片的示意圖。 [0022] 圖5係圖1中所述圖案光裝置與光學裝置、影像攫取裝置 之間的連接關係示意圖。 [0023] 圖6係圖1中所述同轴光裝置與光學裝置、影像攫取裝置 之間的連接關係示意圖。 【主要元件符號說明】 [0024] 影像測量儀1 [0025] 工作臺2 〇 [0026] 龍門架3 [0027] 頂罩 4 [0028] 對焦裝置100 [0029] 光學裝置5 [0030] 殼體 50、60、70、110 [0031] 第一透鏡51 ❹ [0032] 第二透鏡52 [0033] 半透半反射鏡53 [0034] 圖案光裝置6 [0035] 圖案光源61 [0036] 倍率放大器62、72、73 [0037] 圖案片6 3 099100534 表單編號A0101 第9頁/共18頁 0992001136-0 201124701 [0038] 同軸光裝置7 [0039] 同軸光源71 [0040] 環形光源8 [0041] 待測工件9 [0042] 影像攫取裝置10 [0043] 分光鏡11 [0044] 菱鏡 111 099100534 表單編號A0101 第10頁/共18頁 0992001136-0Charge Coupled Device, a CMOS (Complementary Metal Oxide Semiconductor) camera. 099100534 Form No. A0101 Page 5 / 18 pages 0992001136-0 201124701 [0010] The optical device 5 includes a housing 50, a first lens 51, a second lens 52, and a semi-transparent non-parallel to the second lens 52. a half mirror 53, the first lens 51 and the second lens 52 are respectively mounted at two ends of the housing 50 to optically image the workpiece 9 to be tested, and the half mirror 53 is located at the same Between the two lenses 51 and 52, and at a 45 degree angle to the axis of the housing 50. [0011] The pattern light device 6 includes a casing 60, a pattern light source 61 mounted on the front end of the casing 60, a magnification amplifier 62, a pattern sheet 63, the pattern light source 61, the magnification amplifier 62 and the pattern sheet. 63 is sequentially mounted inside the casing 60. As shown in FIG. 3, the pattern aperture 61 is an LED (Light Emitting Diode) light source. The pattern sheet 62 is a glass sheet having a plurality of transparent and opaque squares as shown in Fig. 4, and the plurality of transparent and opaque squares are alternately arranged. The magnification amplifier 62 is a lens, and by adjusting the distance of the lens a, the size of the feature file projected onto the surface of the workpiece 9 to be tested can be changed. In other implementations, the pattern on the pattern month 63 may also be other patterns, such as a well-defined animal image, a portrait or a landscape. [0012] The coaxial optical device 7 includes a casing 7〇, a coaxial light source 71 installed at the front end of the casing 70, and two multiplying amplifiers 72 and 73. The coaxial light source 71 and the magnification are 1§72. And 73 are sequentially installed inside the casing 7〇, as shown in FIG. The pattern light source 7ι is an [ED (Light Emitting Diode) light source. The magnification amplifiers 72, 73 are two lenses (e.g., a third lens, a fourth lens), and the distances transmitted through the magnification amplifiers 72, 73 can change the brightness of light projected onto the surface of the workpiece 9 to be tested. °"100534 Form No. 1 6 ^ 18 Stomach 〇 〇〇 136 136 136 1136-° 201124701 [0013] The beam splitter 11 includes a housing 110 and a prism mounted on the housing 110 as shown in FIG. Show. The pattern light device 6 is connected to the optical device 5 through the beam splitter 11, and the coaxial light device 7 is also connected to the optical device 5 through the beam splitter 11. The beam splitter 11 is for projecting the light emitted from the pattern light device 6 and the light emitted from the same light device 7 into the optical device 5, respectively. The pattern light device 6 and the coaxial light device 7 are at an angle of 90 degrees with the beam splitter 11 as a vertical point. Specifically, the propagation path of the light is as shown in FIG. 3. When the pattern light device 6 emits horizontal light onto the prism 111 of the beam splitter 11, the light passes through [0014] the mirror 111; when the coaxial light device 7 emits a vertical ray of light to the splitting. ": .. ...... When the mirror 11 is on the mirror 111, the light is refracted by 90 degrees. The prism is at an angle of 45 degrees to the axis of the housing 110. [0015] The image measuring apparatus 1 includes the pattern light device 6 and the coaxial light device 7. If the smoothness of the surface of the workpiece 9 to be tested is high, the pattern of the pattern sheet 63 is formed by the pattern light device 6. Projected to the surface of the workpiece 9 to be tested to facilitate focusing; if the smoothness of the surface of the workpiece 9 to be tested is low, the workpiece 9 to be tested is illuminated by the coaxial optical device 7. The specific content is described as follows: when the smoothness of the surface of the workpiece 9 to be tested is high, the pattern light source 61 and the ring light source 8 are turned on, and the light emitted by the pattern light source 61 sequentially passes through the magnification amplifier 62 and the pattern sheet. 63, a prism II1, a half mirror 53 and a lens 52 project a pattern of the pattern sheet 63 on the surface of the workpiece 9 to be tested while illuminating the illumination area by controlling an illumination area of the ring light source 8. The designated area of the workpiece 9 is measured. At this time, the optical device 5 will image the surface of the workpiece 9 to be tested. The image capturing device 10 senses an image of the surface of the workpiece 9 to be tested and converts it into an electrical signal 099100534 Form No. A0101 Page 7 / 18 pages 0992001136-0 201124701 for transmission to the computer system, thereby computing The sharpness and contrast of the image of the surface of the workpiece 9 to be tested are obtained. The computer system can determine the focus position of the workpiece 9 to be tested according to its clarity and contrast. [0016] When the smoothness of the surface of the workpiece 9 to be tested is low, that is, when the surface of the workpiece 9 to be tested is rough, the coaxial light source 71 and the annular light source 8 are turned on, and the light emitted by the coaxial light source 71 is sequentially Projecting on the surface of the workpiece 9 to be tested through the magnification amplifiers 72, 73, the mirror 111, the half mirror 53, and the lens 52, while illuminating the object to be tested by controlling the illumination area of the ring light source 8. The designated area of the workpiece 9. At this time, the optical device 5 will image the surface of the workpiece 9 to be tested. The image capturing device 10 senses an image of the surface of the workpiece 9 to be tested and converts it into an electrical signal for transmission to the computer system, thereby calculating the sharpness of the image of the surface of the workpiece 9 to be tested. And contrast. The computer system can determine the focus position of the workpiece 9 to be tested according to its definition and contrast. [0017] It should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention and are not intended to be limiting, although the present invention will be described in detail with reference to the preferred embodiments thereof, Modifications or equivalents of the technical solutions of the present invention are made without departing from the spirit and scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS [0018] FIG. 1 is a perspective view of a preferred embodiment of an image measuring instrument of the present invention. 2 is a perspective view of a preferred embodiment of the focusing device of FIG. 1. 3 is a cross-sectional view of the focusing device of FIG. 1. 099100534 Form No. A0101 Page 8 of 18 0992001136-0 201124701 [0021] FIG. 4 is a schematic diagram of a pattern sheet in FIG. 5 is a schematic diagram showing a connection relationship between the pattern light device, the optical device, and the image capturing device of FIG. 1. 6 is a schematic diagram showing the connection relationship between the coaxial optical device, the optical device, and the image capturing device of FIG. 1. [Main Component Symbol Description] [0024] Image Measuring Instrument 1 [0025] Workbench 2 〇 [0026] Gantry 3 [0027] Top Cover 4 [0028] Focusing Device 100 [0029] Optical Device 5 [0030] Housing 50 60, 70, 110 [0031] First lens 51 第二 [0032] Second lens 52 [0033] Half-mirror 53 [0034] Pattern light device 6 [0035] Pattern light source 61 [0036] Magnification amplifier 62, 72, 73 [0037] Pattern sheet 6 3 099100534 Form number A0101 Page 9 / Total 18 page 0992001136-0 201124701 [0038] Coaxial light device 7 [0039] Coaxial light source 71 [0040] Ring light source 8 [0041] Workpiece to be tested 9 [0042] Image capturing device 10 [0043] Beam splitter 11 [0044] Mirror 111 099100534 Form number A0101 Page 10 / Total 18 pages 0992001136-0