TW201121696A - Ultra-precision piezoelectric positioning platform - Google Patents
Ultra-precision piezoelectric positioning platform Download PDFInfo
- Publication number
- TW201121696A TW201121696A TW098145187A TW98145187A TW201121696A TW 201121696 A TW201121696 A TW 201121696A TW 098145187 A TW098145187 A TW 098145187A TW 98145187 A TW98145187 A TW 98145187A TW 201121696 A TW201121696 A TW 201121696A
- Authority
- TW
- Taiwan
- Prior art keywords
- movable portion
- micro
- positioning platform
- fixing
- movable
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 230000000694 effects Effects 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 238000003475 lamination Methods 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 241000238631 Hexapoda Species 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW098145187A TW201121696A (en) | 2009-12-25 | 2009-12-25 | Ultra-precision piezoelectric positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW098145187A TW201121696A (en) | 2009-12-25 | 2009-12-25 | Ultra-precision piezoelectric positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201121696A true TW201121696A (en) | 2011-07-01 |
| TWI373390B TWI373390B (https=) | 2012-10-01 |
Family
ID=45045736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098145187A TW201121696A (en) | 2009-12-25 | 2009-12-25 | Ultra-precision piezoelectric positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201121696A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI463784B (zh) * | 2012-11-21 | 2014-12-01 | Univ Nat Yunlin Sci & Tech | Quick positioning device with piezoelectric element |
| TW201508294A (zh) * | 2013-08-26 | 2015-03-01 | Chiuan Yan Technology Co Ltd | 床台式光學元件對位與導電性之檢測機構 |
-
2009
- 2009-12-25 TW TW098145187A patent/TW201121696A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI373390B (https=) | 2012-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103021472B (zh) | 平面并联式三自由度精密定位工作台 | |
| WO2019052044A1 (zh) | 一种用于高精度定位和测量的二维三自由度微动平台结构 | |
| CN103240755A (zh) | 调节机构 | |
| CN110289785B (zh) | 一种断电保持三自由度压电指向调整装置及平台控制方法 | |
| JP2013501249A (ja) | 光学要素のための保持装置 | |
| US7451596B2 (en) | Multiple degree of freedom micro electro-mechanical system positioner and actuator | |
| TWI481966B (zh) | 具有最小化寄生負載之光學元件模組 | |
| TWI495076B (zh) | 用於微機電系統電接觸點之機械隔離 | |
| CN102498559B (zh) | 基板保持架系统、基板接合装置以及器件的制造方法 | |
| CN110730918A (zh) | 调节装置 | |
| TW201121696A (en) | Ultra-precision piezoelectric positioning platform | |
| CN102114600B (zh) | 超精密压电定位平台 | |
| CN104896268A (zh) | 一种三自由度大行程柔性纳米定位平台 | |
| CN111785318B (zh) | 基于2t3r型柔性运动副的微定位平台 | |
| CN109872767B (zh) | 多源驱动的柔顺并联微操作器 | |
| WO2023022180A1 (ja) | 静電吸着デバイス及び静電吸着方法 | |
| WO2005102909A1 (ja) | アクチュエータ | |
| CN114865946B (zh) | 一种微动平台 | |
| JP5955964B2 (ja) | ターゲット処理ツールのためのガイダンス | |
| WO2011059369A1 (en) | Provision of a normal force to electromechanical motor | |
| US11579403B2 (en) | 2D bi-pod flexure design, mount technique and process for implementation | |
| JP2002184339A (ja) | 制動機構および電子顕微鏡用試料ステージ | |
| WO2006018888A1 (ja) | 反射鏡支持機構 | |
| CN119224967B (zh) | 反射镜调节装置及运动台定位装置 | |
| KR102778682B1 (ko) | 광학 스캐닝 장치 |