TW201119075A - Apparatus for mechanically structuralizing thin-film solar cell module - Google Patents

Apparatus for mechanically structuralizing thin-film solar cell module Download PDF

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Publication number
TW201119075A
TW201119075A TW99134694A TW99134694A TW201119075A TW 201119075 A TW201119075 A TW 201119075A TW 99134694 A TW99134694 A TW 99134694A TW 99134694 A TW99134694 A TW 99134694A TW 201119075 A TW201119075 A TW 201119075A
Authority
TW
Taiwan
Prior art keywords
pressure
piston rod
tool
piston
thin
Prior art date
Application number
TW99134694A
Other languages
Chinese (zh)
Inventor
Roland Henning
Original Assignee
Jenoptik Automatisierungstech
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Publication date
Application filed by Jenoptik Automatisierungstech filed Critical Jenoptik Automatisierungstech
Publication of TW201119075A publication Critical patent/TW201119075A/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25HWORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H7/00Marking-out or setting-out work
    • B25H7/04Devices, e.g. scribers, for marking
    • B25H7/045Devices, e.g. scribers, for marking characterised by constructional details of the marking elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring

Abstract

Disclosed is an apparatus for mechanically structuralizing a thin-film solar cell module (2), wherein the thin-film solar cell module (2) consists of a substrate layer and a plurality of functional layers and the overlapped at the upper layer and the lower layer of the function layer, and the structuralization is to place a structural layout in at least one of the functional layers and completely cut it off without damaging the lower layer. The apparatus comprises a workpiece holder (1) to place a thin-film solar cell module (2) on a horizontal surface; a tool holder (3) having a scraper (4) with a peak held on a piston bolt (5) in a non-rotating way in the tool holder (3), wherein the piston bolt (5) can be introduced by vertically moving toward the thin film solar cell module (2) along its longitudinally direction; a pressure generation means for generating predetermined pressure force/each piston bolt (5), in which the pressure generation means connects to the end having no tool of the piston bolt (5) to bring pressure force upon the held scraper (4) along the longitudinal direction of the piston bolt (5); and a moving means to move the workpiece holder (1) along the direction of the disposed structural layout horizontally against the tool holder (3). The above-mentioned pressure generation means is a pressure cylinder (6) which can provide air pressure and has a pressure chamber (7) and a piston component (8) capable of moving inside the pressure chamber (7).

Description

201119075 六、發明說明: 【發明所屬之技術領域】 本發明關於一種薄磨纟陽電池模組作機械式構造化的 裝置’一如EP 1 041 648 B1所揭示的那一類裝置。 【先前技術】 薄層太陽電池模組係如下述方式製造:將數個(一般為 3個)功能層施到一基材(Substrat,英:⑶以的⑷上,該基 材具有一載體層的功能。各在施覆一功能層後再將其一部 分材料除去,此處係沿平行的路線(構造線)隔規則距離將材 料除去,這點稱「構造化」。 施覆及構造化的程序用於形成個別的太陽電池及其電 配線。 有習知之作構造化的方法與裝置,它們設有雷射光裝 置或機械工具。 要合理地製造模組,重要的一點為:在製造循環週期 中所作的數次的構造化程序須迅速而確實地進行。確實的 構造化程序」係指一個或數個層依標的完全切斷,其中 位於其下方的層(下層)不能受損壞。 在 US 4,502,225 提到一種刮刻裝置(Ritzv〇rrichtung, 英:scratching device),其中利用設有彈簧的槓桿設置將— 機械式刮刻工具用一受控制的壓迫力量沿一工作物(例如一 多層式太陽模組)作相對導進,以在個別的層中產生刮刻線。 US 4,5 02,225係根據一種先前技術,依此,要將薄層太 201119075 陽電池模組的個別的層作刮刻,係不使用機械工具而宜用 雷射;因為用機械工具彼難切割出準破的深度與寬度。 °玄刮刻裝置包含-載體板,它固定在-手控制或電腦 控制的xy扣上方的一殼體上,該巧枱帶著要刮刻的工作 物。載體板上固定著一轴承塊,二條槓桿上下支承在該轴 承塊中’其相反端各利用—微米螺絲保在在距載體板一段 可調1的距離處。藉著調整此距離將一拉伸彈 用該彈箸將二積桿互相連接。作用的彈菁力以一種增速比 (此〜速比由槓桿力臂長度決定)傳到到刻工具,而刮刻工具 壓、力量(此力量依工具的傾斜位置而定)壓到工作物 ^,US 4,502,225的裝置可用—股可很敏感地調整的壓 迫力夏作機械式刮刻。 要達成-種怪定的材料切除深度的前提為 工且 的Γ絕不能磨損,如此在尖端與工具之間有怪定的接觸 面積且有—怪定作用的壓迫力量的情形下, t厂堅力作㈣工作物上,此w彳壓力決定工且進= 作物中的深度以及刮刻深度。 、進入工 地:τ上’各種機械工具都會受磨損,如此不可避免 且的使工作物所用的虔力保持恆定,則隨著-用㈣越久’到刻深度越減少,因此,在US 4,502 225 的裝置,工具的使用壽命受到切 , (T〇leranz)F^.J 〇 *度的預4容許誤差 EP 1 041 648 B1提到一種裝置,它 的鐮形切割工具。依該案;““乍用 J衮置,该切割工具有一由BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for mechanically constructing a thin-ground solar cell module as disclosed in EP 1 041 648 B1. [Prior Art] A thin-film solar cell module is manufactured by applying a plurality of (generally three) functional layers to a substrate (Substrat, English: (3), which has a carrier layer The function is to remove a part of the material after applying a functional layer, where the material is removed along a parallel path (construction line) by a regular distance. This is called "structurization". The program is used to form individual solar cells and their electrical wiring. There are conventional methods and devices for constructing laser light devices or mechanical tools. To make a module reasonably, the important point is: in the manufacturing cycle The number of constructive procedures made in the process must be carried out quickly and surely. The exact constructive procedure means that one or several layers are completely cut according to the target, and the layer below it (the lower layer) cannot be damaged. 4,502,225 mentions a rating device (Ritzv〇rrichtung, scratching device) in which a mechanically squeezing tool is used with a controlled compression force using a lever provided with a spring. A work object (such as a multi-layer solar module) is used for relative advancement to create a scratch line in individual layers. US 4,5 02,225 is based on a prior art, whereby a thin layer is too 201119075 The individual layers of the battery module are scratched, and the laser is preferably used without using a mechanical tool; because it is difficult to cut the depth and width of the breakage with a mechanical tool. The stenciling device comprises a carrier plate, which is fixed at a hand-controlled or computer-controlled xy buckle on a housing with the workpiece to be scraped. A bearing block is fixed on the carrier plate, and two levers are supported up and down in the bearing block. Each of the utilization-micron screws is maintained at a distance of one distance from the carrier plate. By adjusting the distance, a tensile projectile is used to connect the two integrated rods with each other. The acting elastic force is increased by a speed ratio. (This ~ speed ratio is determined by the length of the lever arm) is transmitted to the engraving tool, and the tooling pressure and force (this force depends on the tilt position of the tool) are pressed to the work object. The device of US 4,502,225 is available. Very sensitively adjusted compression force for summer machinery Scratch. To achieve a certain kind of material, the premise of the depth of material removal is that the workmanship must not wear, so in the case of a strange contact area between the tip and the tool, and there is a strange action of the oppressive force, The factory is working hard (4) on the work, this pressure determines the depth of the crop and the depth of the scraping. Entering the site: τ, 'all kinds of mechanical tools will be subject to wear, so inevitable and used by the work The force of the force is kept constant, and the longer the depth is reduced with the use of (four), the lower the service life of the device is cut by the device of US 4,502 225, (T〇leranz) F^.J 〇* degree pre- 4 Tolerance EP 1 041 648 B1 refers to a device whose jaw-shaped cutting tool. According to the case; ""With the J device, the cutting tool has a

5 S 201119075 前變扁平的尖端’纟中由於變扁平都造成一平面,當作切 割工具的潸動面。此切割工具受導引的方式,纟它以此滑 動面在一施覆的基材的層上滑動(此層位在所要的構造化線 以下’以下稱為「下層」)’其中該滑動面整面地倚在此和 它平行的下層上。在此,切割工具的縱軸垂直於下層。藉 著維持這些條件,將下層受損之虞減到最小。如Ep' 〇二 648 B1所述,施到切割工具上的壓迫力量的調整並不重 要’它並不須將切割工具的切入深度作繁複的調節與調 整。相反地,我們可毫無危險地將力量調得很高使要切 斷的層可確實切斷,該切割工具宜用其滑動面以彈性方式 頂向基材頂壓。 依一實施例,該裝置包含一工具保持器,其中有數個 工具利用導引面以不能轉動的方式保持在各活塞桿銷 (Pinole)中,其中該活塞桿銷可各沿縱方向受彈力頂向工作 物移動而導進》 為了要能不受到不可避免的摩損影響〔亦即工作物的 爲平度(Abplattung)益增且因此工具與工作物間的接觸面加 大〕而能使工具的使用壽命加長,故此案主張將壓迫壓力 隨著面積增加(它和磨損有關)而提高’俾經常都能產生相同 的到刻壓力《為此,利用彈簧所施加的壓迫力量須重 整。 、-用 依EP 1 041 648 B1的裝置(其中該工具作用到工作物上 的壓迫力量利用彈簣力量產生)有各種不同的缺點,對構造 化線的品質有負面影響。這些缺點中,特別是由於彈黃材 6 201119075 料疲乏現象以及細敏感度差的結果使得在調整壓迫力量 時,壓迫力量會改變,因為對於彈簧強韌度和對於小小的 力量變化的敏感性的要求是互相抵觸的。 【發明内容】 本發明的目的在提供—種用於將薄層太陽電池模組作 構仏化的裝置,利用它可將一到刻工具以長期恆定的壓迫 力量作用到工作物上,該壓迫力量可作細微調整。 此目的係利用具有中請專利範圍帛i項的特點的一種 裝置達成。 有利的進一步特點見於申請專利範圍附屬項。 如上述-種用於將薄層太陽電池模組作機械式構造化 的裝置,其中該薄層太陽雷 a太軔電池杈組由一基材層和數個功能 層構成,該功能層係上下重羼 里且# 且β亥構造化係將構造化 線做到至J 一功能層中將企—八+TI此 a甲將匕疋全切斷,而不損害位在i 方的層,該裝置具有: 崎/w八丨苟黾池模組水平放罝 一一工具:持器’有-個具有-尖端的到刻工具在該工 具保持益t以不能轉動的方式保持在—活 且該活塞桿銷可沿其縱向垂直 玆叙产„ 寸禮双味電池模組 移動在该工具保持器中導進; --厂堅力產生手a,用於產生一預設壓追力量 杯鈉,該壓力產生手段與該 。 叫的無工具的那一 "連接’以將該保持住的到刻工具沿活塞桿銷的二 201119075 @施以一壓迫力量;以及 移:手段,以將工作物保持器相對於工具保持器沿 -斤6又之構造化線的方向作水平相對移 m , J T * 6¾ 以生一預設壓迫力量的壓力產生手段係一種可施 二體壓力的氣壓缸,它具有一壓力室及-個可在 〇 Μ力室中移動的活塞元件。 體J好該氣體壓力可控制’且有一控制褒置以控制該氣 裝置=有一與該壓力室配合的壓力測量裝置,與該控制 如不採用壓力測量裝置(或除了屬力測量裝置外同時另 )可有一力量測量器,設在該產生-壓迫力量的產生手 段與該活塞桿銷之間的力量流中,且與該控制裝置連接, =依該作用到活塞桿銷上的壓迫力量而定而調節該氣體 山士果有,則置裝置以檢出構造化線的寬度,俾依該尖 端的扁平度的大小而定而調節氣體壓 決定構造化的寬度),則更有利。.U扁千度的大小 :於隨著尖端的扁平度增加,壓力的損失也可能增加 。,種知失直接用一壓力測量儀器檢出,或間接用力量測量 故藉著將構造線的寬度以及福乎度的值檢出,可將 厫重的為差來源間接檢出’且針對它們對構造線的品 貝的影響作補償。 球或 該活塞元件可為一缸形活塞或為一球片段 8 201119075 膜片。 在:塞几件設計成球的情形’則該球 的無工具的那—端牢接或只與該端接觸。 接,銷可有利地利用拉伸彈普與工作物保持器連 ;償拉伸”將活塞桿銷的重力以及該與它牢接的構件作 有-的方式,也可在4保持器上每個活塞桿鎖 置。 糸統藉之測量各刮刻工具沿垂直方向的位 兹在以下利用圖式為例詳細說明此裝置。 【實施方式】 圖1中顯示具有本發明 的裝置㈣理。此裝 組⑺水平地倚在㈣層太陽電池模 工旦久、 —工具保持器(3)〔在其中有刮刻 (Τ.、1 Μ以不能轉動的方式保持在各一活塞桿銷(5) 且各活塞桿銷(5)有一氣壓缸⑹,氣 可在壓力室内移動的活塞元件⑻,該: 广與活塞桿銷(5)的無工具的那一端連接。且有移 段,以將工作物保持器⑴相對於 造化線的方向作相對水平移^ 、保持训沿所設之構 使到刻工具⑷可受到一股利用—氣壓虹( 反k力I向一位在工具保持器(3)中 、 頂场電㈣組⑺ 其縱方向在工具保持器(3)令向 9 g 201119075 薄層太陽電池模組移動導進。 订家很清楚,如果沒有作任何措施造成反對力量,如 第五實施例所述者,則壓迫力量不只是由氣壓缸(6)的作用 依所調整的氣體壓力而定作決定,而係也由該活塞桿銷(5) 及到刻工具(4)以及該活塞元件(8)〔該活塞元件與活塞桿銷 (5)連接〕的自身重量造成的重力決定。 此外,該裝置包含一壓縮機(9),它與氣壓缸(6)及一控 制單7〇(10)連接。將此裝置作校準(KaHbrierung)得到一力量 -壓力特性線,且儲存在一個與控制單元(1〇)連接的儲存及 。十算單兀(Π)。如此,當得知一為所設之刮刻深度所需的壓 迫力量時,就在壓力虹(7)中建構相關的氣體壓力。 對於各壓力室(7)宜設一壓力測量儀器(12),俾在壓力室 ⑺中有壓力損失時’將氣體壓力作後調整,如此可保持壓 迫力量恆定》 如果不用壓力測量儀器(12)〔或除了壓力測量儀器⑽ 外同時另夕卜〕也可將-力f測量器〇3)用至氣壓缸⑹盘活夷 桿銷(5)之間的力量流之中。舉例而言,它可為—壓電元件土, j壓電元件對應施壓迫力量產生_電壓,&電壓可當作調 節值用,以在壓力室(7)中產生壓力。 」而/、有田到刻工具(4)尖端設有磨損(這點在實際上 不易做到)則㈣的壓迫力量才能保證恒定的構造線深L 刮刻工具(4)各有_尖端,它宜由前方略變扁平。此 平程度〔爲平的面平平地倚在尖端的末端及在薄層太 池模組⑺上〕隨刮刻工具(4)的使用期間而加大。如此—方 10 201119075 面,到刻線的甯;§: 4 延伸過所另方面,「到刻深度不再能完全 I伸過所要切斷的層」之虞也加大。 有利的做法係設一測量裝置以檢出構 =端的扁平度(此扁平度決定構造化線的寬度)而寬“ 5周卽氣體壓力。 氣:缸⑹内的氣體壓力提高,使所造成之提高的 ^ h對於尖端之加Α的磨平度作用)造成怪定的刮 堅^ ’也稱平面㈣作用,如此可確保Μ的到刻深度。 k種乳體!力的調節作用對於要續保刮刻工具⑷的長 使用壽命而言並非絕對必需者,但卻是有利的。如果沒有 上述的調節的可能方式,依本發明的裝置仍同樣有功能, 只要把從刮刻麗力偏離的程度保持在一預設之容許誤差内 即可。為此,相關的使用壽命也可利用試驗得知。 依圖1中所示之第一實施例,氣壓缸⑹的活塞元件⑻ 為一缸形活塞(8·ΐρ由於對於此缸形活塞(8丨)的尺寸維持 的要求得高,因此其製造繁複且昂貴。因為對於一種裝置, 在作調節時,係在工具保持器(3)中設有數個保在在活^塞桿 銷(5)中的刮刻工具(4),例如22個,各有—氣壓缸(6)與各 工具配合,因此上述那點特別有利。由於活塞壁與室壁間 有不可避免的摩擦且造成粘滑效應(Stick_SHp-Effekt),^會 造成滯留(HySterese)的情事。換言之,一氣壓缸(6)的壓力_ 力量特性線會有不同走勢,各依活塞是否移入壓力室(乃或 從壓力室移出以改變壓迫力量而定。 因此,將活塞元件(8)設計成缸形活塞(81):固然是一 201119075 種可能方式,但絕非最有利者。 一第二實施例與第一實施例的不同係將活塞元件(8)气 計成球片段(8.2)。如圖2所示,該球片段位在該活塞桿銷 中的工作物的對立端即在無工具的那一端上或與此端 連接。 其優點係為圓片段壁與室壁之間的接觸部位減少到一 圓線’如此摩擦彷彿變零,i不產生滞留情事 '然而相較 於將活塞元件(8)設計成缸形活塞(81)的實施例,壓力室⑺ 中壓力損失之虞提高。 圖3中所示之第三實施例和前述實施例不同處在將活 塞元件(8)設計成球(8.3)形式。球只倚在活塞桿銷(5)的無工 具那-端上。因此可在空氣流〔它係在壓力室⑺中建構氣 體壓力時產生者〕中自動對準中心。 特別是一球(8_3)可以用很小的容許誤差大量生產〔但 -球片段(8.2)也可以〕,且因此可使裝置很廉價地製造。 圖4中所示的實施例與上述實施例不同處,係將活塞 元件(8)做成膜片(8.4)。 在依上述三個實施例的活塞元件(8)的設計,在活塞元 件(8)與壓力室間往往產生多少有點寬的環形縫隙,因此一 直都會有一股漏溢流在流出,這點使氣體要一直作補充供 用0 使用-膜片(8.4)(它與壓力室的室壁連接)當作活塞元 件(8) ’可使壓力室(7)絕對密封,因此沒有漏溢流會流出。 圖5中顯示一第五實施例的細節。它與前述實施例不 12 201119075 同處為·’該活塞桿銷(5)利用拉伸彈簧(14)與工具保持器⑺ 連接。拉伸彈簧(14)用於在氣體墨力減少時(由於系統故障 或在構造化程序終了時造成者)將刮刻工具(4)拉回。 此外它可使刮刻工具受控制而移出以及放在薄層太陽 電池模組(2)上。如果沒有拉伸彈簧⑽,則在放上去時刮刻 〃(4)的重星馬上起影響〔它各和一活塞桿銷(5)及—活夷 元件(8)連接〕。由於使用拉伸彈簧(14)〔它被繃緊使其彈力 將此重力抵消〕故壓迫壓量可調整成比重力小。 有利的做法,係在工具保持器(3)上每個活塞桿銷(5)各 設一路徑測量系統(15);利用它可將刮刻工具(4)在其垂直的 移動路徑的各位置檢出。檢出的移動路徑可當作調節值, 以將氣體壓力作後調節,或者只通知:是否刮刻工具(4)位 在其特定的位置,因此也可檢知刮刻工具(4)損壞。 對所有實施例,刮刻工具放到工作物上的動作宜利 用馬達驅動而達成。 【圖式簡單說明】 圖1係一裝置的一第一實施例的原理略圖; 圖2係一氣壓缸,具有一裝置的一第二實施例的原理 略圖; 圖3係一氣壓缸,具有一裝置的一第三實施例的原理 略圖; 圖4係一氣壓缸,具有一裝置的一第四實施例的原理 略圖; 13 g 201119075 圖5係一裝置的第五實施例的詳細圖。 【主要元件符號說明】 ⑴ 工作物保持器 (2) 薄層太陽電池模 (3) 工具保持器 (4) 刮刻工具 (5) 活塞桿銷 (6) 氣壓缸 (7) 壓力室 (8) 活塞元件 (8.1) 缸形活塞 (8-2) 球片段 (8.3) 球 (8.4) 膜片 (9) 壓縮機 (10) 控制單元 (11) 儲存及計算單元 (12) 壓力測量儀器 (14) 拉伸彈簧 (15) 路徑測量系統 145 S 201119075 The flattened tip of the front has a flat surface due to flattening, acting as a swaying surface for the cutting tool. The cutting tool is guided in such a manner that it slides on the layer of the applied substrate with the sliding surface (this layer is below the desired structural line 'hereinafter referred to as the "lower layer"), wherein the sliding surface I lean on this and the lower layer parallel to it. Here, the longitudinal axis of the cutting tool is perpendicular to the lower layer. By maintaining these conditions, the damage to the lower layers is minimized. As described in Ep' 〇 2 648 B1, the adjustment of the pressing force applied to the cutting tool is not critical. It does not require complicated adjustment and adjustment of the cutting depth of the cutting tool. Conversely, we can adjust the force to a high degree without risk, so that the cutting layer can be cut off. The cutting tool should be elastically pressed against the substrate with its sliding surface. According to one embodiment, the apparatus includes a tool holder in which a plurality of tools are held in each of the piston rod pins in a non-rotatable manner by a guide surface, wherein the piston rod pins are each elastically received in the longitudinal direction. Moving to the work object to guide the tool in order to be able to be affected by the inevitable wear and tear (that is, the work is flat (Abplattung) and thus the contact surface between the tool and the work object is increased] The service life is lengthened, so the case advocates that the compression pressure increases as the area increases (it is related to wear). '俾 often produces the same momentary pressure. To this end, the compression force exerted by the spring must be reformed. - The use of the device according to EP 1 041 648 B1, in which the force exerted by the tool on the work object is generated by the force of the magazine, has various disadvantages which have a negative effect on the quality of the construction line. Among these shortcomings, especially due to the fatigue of the yellow material 6 201119075 and the poor sensitivity, the compression force will change when adjusting the pressing force, because of the strength of the spring and the sensitivity to small changes in force. The requirements are contradictory. SUMMARY OF THE INVENTION The object of the present invention is to provide a device for constructing a thin-film solar cell module, which can be used to apply a long-term constant compressive force to a workpiece, which is pressed. Strength can be fine-tuned. This object is achieved by a device having the features of the scope of the patent application 帛i. Further advantageous features are found in the scope of the patent application. As described above, the apparatus for mechanically constructing a thin-film solar cell module, wherein the thin-layer solar ray a solar cell stack is composed of a substrate layer and a plurality of functional layers, the functional layer is up and down羼 羼 且 and # β 构造 构造 构造 β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β β The device has: Saki / w gossip pool module horizontal release one by one tool: the holder 'has a - tip-to-engraving tool in the tool to maintain the benefit of t can not be rotated in the way - live and the piston rod The pin can be vertically produced along its longitudinal direction. „Industrial double-battery battery module moves in the tool holder; --The factory firmly produces hand a for generating a preset pressure chasing force cup sodium, the pressure Produce means with that. Call the toolless one that connects to hold the engraved tool along the piston rod pin of the two 201119075 @ to apply a pressure of force; and move: means to place the work object holder Horizontal relative movement m, JT relative to the direction of the tool holder along the line of the line * 63⁄4 The pressure generating means for generating a predetermined pressing force is a pneumatic cylinder capable of applying a two-body pressure, which has a pressure chamber and a piston member movable in the force chamber. Controllable and having a control device for controlling the gas device = having a pressure measuring device cooperating with the pressure chamber, and having a force measuring device if the pressure measuring device is not used (or in addition to the force measuring device) Provided in the force flow between the generating-compressing force generating means and the piston rod pin, and connected to the control device, adjusting the gas mountain according to the pressing force acting on the piston rod pin If it is, it is more advantageous to set the device to detect the width of the structuring line and adjust the gas pressure according to the flatness of the tip to determine the width of the structure.) The size of the U flat thousand degrees: As the flatness of the tip increases, the loss of pressure may also increase. The loss is detected directly by a pressure measuring instrument, or indirectly by force measurement, by detecting the width of the construction line and the value of the blessing. can The heavier indirect detection of the difference source is made and compensates for their influence on the construction line. The ball or the piston element can be a cylinder piston or a ball segment 8 201119075 diaphragm. The case where the piece is designed as a ball 'the tool-free end of the ball is firmly or only in contact with the end. The pin can advantageously be connected with the workpiece holder by using the tensioning spring; The weight of the rod pin and the means in which it is attached to it can also be locked on each of the 4 retainers. The measurement of each of the squeegee tools in the vertical direction is described in detail below using the drawings as an example. [Embodiment] The device (four) having the present invention is shown in Fig. 1. The assembly (7) is horizontally placed on the (four) layer of the solar cell mold for a long time, the tool holder (3) [there is a scratch in it (Τ., 1 Μ can not be rotated to maintain a piston rod pin (5) And each piston rod pin (5) has a pneumatic cylinder (6), a piston element (8) whose gas can move in the pressure chamber, which is widely connected with the toolless end of the piston rod pin (5) and has a moving section to The work object holder (1) is relatively horizontally moved relative to the direction of the line of manufacture, and the structure of the training line is maintained so that the tool (4) can be utilized one-at-one (the anti-k force I to one position in the tool holder ( 3) The middle and top field electric (4) group (7) The longitudinal direction of the tool holder (3) causes the 9 g 201119075 thin-layer solar cell module to move in. The home is very clear, if no measures are taken to cause opposition forces, such as In the fifth embodiment, the pressing force is determined not only by the action of the pneumatic cylinder (6) but also by the adjusted gas pressure, but also by the piston rod pin (5) and the engraving tool (4). And the weight of the piston element (8) [the piston element is connected to the piston rod pin (5)] In addition, the device comprises a compressor (9) which is connected to the pneumatic cylinder (6) and a control unit 7〇(10). The device is calibrated to obtain a force-pressure characteristic line. And stored in a storage and connection with the control unit (1〇). Ten counts Π (Π). Thus, when you know the pressure required for the set depth of the scraping, it is in the pressure rainbow (7 The relevant gas pressure is constructed in the middle. For each pressure chamber (7), a pressure measuring instrument (12) should be provided. When there is pressure loss in the pressure chamber (7), the gas pressure is adjusted later, so that the pressing force can be kept constant. If the pressure measuring instrument (12) is not used (or in addition to the pressure measuring instrument (10), the force force measuring device 〇3) can be used to force the flow between the pneumatic cylinder (6) and the movable pin (5). For example, it can be - piezoelectric element soil, j piezoelectric element corresponding to the applied pressure to generate _ voltage, & voltage can be used as an adjustment value to generate pressure in the pressure chamber (7). /, there is wear and tear on the tip of the tool (4) (this is not easy to do in practice) The pressure force of (4) can ensure a constant construction line depth L. The scraping tool (4) has a _ tip, which should be slightly flattened from the front. This level is flat (the flat surface is flat on the tip end and On the thin-layer Taichi module (7), it increases with the use of the scraping tool (4). So - square 10 201119075 surface, to the lining of the line; §: 4 extends over the other side, "to the depth of engraving It is no longer possible to completely extend the layer to be cut. The advantage is also to set up a measuring device to detect the flatness of the structure = the flatness determines the width of the structured line and is wide 5 Perimeter gas pressure. Gas: The pressure of the gas in the cylinder (6) is increased, so that the resulting increase in the degree of smoothing of the tip is caused by the stranger's scratching force, which is also called the plane (four) effect. Make sure the depth of the squat is deep. k kinds of milk! The adjustment of the force is not absolutely necessary for renewing the long service life of the scraping tool (4), but it is advantageous. In the absence of the above-described possible means of adjustment, the device according to the invention is still functional, as long as the degree of deviation from the squeezing force is kept within a predetermined tolerance. For this purpose, the relevant service life can also be known using tests. According to the first embodiment shown in Fig. 1, the piston member (8) of the pneumatic cylinder (6) is a cylinder-shaped piston (8·ΐρ is highly demanded for the maintenance of the size of the cylinder-shaped piston (8丨), so that the manufacturing thereof is complicated. And expensive, because for a device, in the tool holder (3), there are several scraping tools (4), for example 22, each in the live plug pin (5). The above-mentioned point is particularly advantageous because the pneumatic cylinder (6) is fitted with the respective tools. Due to the inevitable friction between the piston wall and the chamber wall and the stick-slip effect (Stick_SHp-Effekt), the hysteresis (HySterese) In other words, the pressure _ power characteristic line of a pneumatic cylinder (6) will have different trends depending on whether the piston moves into the pressure chamber (either or removed from the pressure chamber to change the pressing force. Therefore, the piston element (8) Designed as a cylinder piston (81): although it is a 201119075 possible way, but by no means the most advantageous. A second embodiment differs from the first embodiment in that the piston element (8) is counted as a ball segment (8.2 ), as shown in Figure 2, the ball segment is in the live The opposite end of the workpiece in the rod pin is connected to or connected to the end without the tool. The advantage is that the contact between the wall of the circular segment and the wall of the chamber is reduced to a round line so that the friction seems to be zero, i No remnant situation arises. However, the pressure loss in the pressure chamber (7) is increased compared to the embodiment in which the piston element (8) is designed as a cylinder piston (81). The third embodiment shown in Fig. 3 and the foregoing implementation The difference is in the design of the piston element (8) in the form of a ball (8.3). The ball rests only on the toolless end of the piston rod pin (5). Therefore, it can be constructed in the air flow (it is constructed in the pressure chamber (7)). In the gas pressure generator, the center is automatically aligned. In particular, a ball (8_3) can be mass-produced with a small tolerance (but the ball segment (8.2) can also be used), and thus the device can be manufactured inexpensively. The embodiment shown in Fig. 4 differs from the above embodiment in that the piston element (8) is formed into a diaphragm (8.4). In the design of the piston element (8) according to the above three embodiments, in the piston element ( 8) How many somewhat wide annular gaps are created between the pressure chamber and the pressure chamber. This will always have a leak overflow in the outflow, which makes the gas always be used for supplemental use. 0 Use - diaphragm (8.4) (which is connected to the chamber wall of the pressure chamber) as the piston element (8) 'can make the pressure chamber (7) Absolutely sealed, so that no leakage overflow will flow out. The details of a fifth embodiment are shown in Fig. 5. It is the same as the previous embodiment No. 12 201119075. The piston rod pin (5) utilizes a tension spring. (14) Connected to the tool holder (7). The tension spring (14) is used to pull the scraping tool (4) back when the gas ink force is reduced (due to system failure or at the end of the structuring procedure). The scribing tool can be controlled to be removed and placed on the thin-film solar cell module (2). If there is no tension spring (10), the heavy star that scratches the 〃(4) when it is placed up immediately affects it (it is connected to a piston rod pin (5) and a living element (8)). Since the tension spring (14) is used (it is tensioned so that its elasticity counteracts this gravity), the compression pressure can be adjusted to be smaller than the gravity. Advantageously, a path measuring system (15) is provided for each piston rod pin (5) on the tool holder (3); with which the scraping tool (4) can be placed at various positions of its vertical path of movement Check out. The detected movement path can be used as an adjustment value to adjust the gas pressure later, or only to inform: whether the squeegee tool (4) is in its specific position, so that the squeegee tool (4) can also be detected to be damaged. For all embodiments, the action of the squeegee tool placed on the workpiece is preferably achieved by motor drive. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic diagram of a first embodiment of a device; Figure 2 is a schematic diagram of a pneumatic cylinder having a second embodiment of a device; Figure 3 is a pneumatic cylinder having a BRIEF DESCRIPTION OF THE DRAWINGS FIG. 4 is a schematic diagram of a fourth embodiment of a pneumatic cylinder having a device; 13 g 201119075 FIG. 5 is a detailed view of a fifth embodiment of a device. [Main component symbol description] (1) Work object holder (2) Thin layer solar cell mold (3) Tool holder (4) Scratch tool (5) Piston rod pin (6) Pneumatic cylinder (7) Pressure chamber (8) Piston element (8.1) Cylinder piston (8-2) Ball segment (8.3) Ball (8.4) Diaphragm (9) Compressor (10) Control unit (11) Storage and calculation unit (12) Pressure measuring instrument (14) Tension Spring (15) Path Measurement System 14

Claims (1)

201119075 七、申請專利範圍: 1.—種用於將薄層太陽電池模組(2)作機械式構造化的 裝置,其中該薄層太陽電池模組(2)由一基材層和數個功能 層構成,該功能層係上下重疊者,且該構造化係將構造化 線做到至少一功能層中將它完全切斷,而不損害位在其下 方的層’該裝置具有: 工作物保持器(1)’以將一薄層太陽電池模組(2)水平 放置; 工具保持器(3),有一個具有一尖端的刮刻工具(4)在 該工具保持器中以不能轉動的方式保持在一活塞桿銷 (5)上’且该活塞桿銷(5)可沿其縱向垂直向該薄層太陽 電池模組(2)移動在該工具保持器(3)中導進; 壓力產生手段,用於產生一預設壓迫力量/各活塞 桿銷(5) ’該壓力產生手段與該活塞桿銷(5)的無工具的 那一端連接,以將該保持住的刮刻工具(4)沿活塞桿銷 (5)的縱方向施以一壓迫力量; 及一移動手#又,以將工作物保持器(1)相對於工具保持 器(3)沿δ玄所设之構造化線的方向作水平相對移動,特 徵在: 該用於產生一預設壓迫力量的產生手段係一種可施以 一氣體壓力的氣壓缸(6),它具有一壓力室(7)及一個可在該 壓力室中移動的活塞元件(8)。 2.如申請專利範圍第1項之裝置,其中: 該氣體壓力可控制,且有一控制裝置(1〇)以控制該氣體 15 S 201119075 壓力。 3.如申請專利範圍第2項之裝置,其中: 有一與該壓力室(7)配合的壓力測量裝置(12),與該控制 裝置(1〇)連接。 ^ μ工 4.如申請專利範圍第2項之裝置,其中: 有—力量測量器(丨3),設在該產生一壓迫力量的產生手 段與該活塞桿銷(5)之間的力量流之中,且與該控制裝置⑽ 妾、依作用到活塞桿銷(5)上的廢迫力量而定調節該氣 .°甲請專利範圍第2項之裝置,其中: 活夷置以檢出構造化線的寬度,俾依該尖端 寶广的大小而定調節氣體壓力,該大小決定構造化 I度。 6·如申請專利範圍第1項之裝置,其中: 該活塞元件 1 )為一缸形活塞(8.1)。 7·如申請專利範圍第1項之裝置,其中: 該活塞元件(8)為— 工具的那-端連接。R(8.2),與該活塞桿銷⑺之 8.如申請專利範圍第i項之裝置, 該活塞元件為— /、 一端接觸。 ’’與該活塞桿銷(5)之無工具的 9·如申請專利範圍第i項之裝置, 該活塞兀件(8)為—膜。 ’、 10.如申請專利範 軏圍第1項之裝置,其中: 16 201119075 ' 該活塞桿銷(5)利用拉伸彈簧(14)與工具保持器(3)連 . 接。 11.如申請專利範圍第10項之裝置,其中: 在工具保持器(3)上每個活塞桿銷(5)有一路徑測量系 統,藉之測量各刮刻工具(4)沿垂直方向的位置。 八、圖式: (如次頁) 17201119075 VII. Patent application scope: 1. A device for mechanically constructing a thin-film solar cell module (2), wherein the thin-layer solar cell module (2) consists of a substrate layer and several a functional layer consisting of a functional layer that overlaps the top and bottom, and the structuring system completes the structural line in at least one functional layer without damaging the layer below it. The device has: a work object a holder (1)' for placing a thin layer of solar cell module (2) horizontally; a tool holder (3) having a sharpening tool (4) having a tip that is not rotatable in the tool holder Keeping on a piston rod pin (5) and the piston rod pin (5) can be guided vertically in the longitudinal direction of the thin solar battery module (2) in the tool holder (3); Generating means for generating a predetermined pressing force / each piston rod pin (5) 'the pressure generating means is connected to the toolless end of the piston rod pin (5) to hold the scraping tool ( 4) applying a pressing force along the longitudinal direction of the piston rod pin (5); and moving the hand #又了, the relative movement of the workpiece holder (1) relative to the tool holder (3) along the direction of the structuring line set by δ 玄, characterized in that: the generation of a predetermined pressing force is generated. The means is a pneumatic cylinder (6) which is capable of applying a gas pressure and has a pressure chamber (7) and a piston member (8) movable in the pressure chamber. 2. The apparatus of claim 1, wherein: the gas pressure is controllable and a control device (1〇) is provided to control the pressure of the gas 15 S 201119075. 3. The device of claim 2, wherein: a pressure measuring device (12) cooperating with the pressure chamber (7) is coupled to the control device (1). ^ μ工4. The device of claim 2, wherein: a force measuring device (丨3) is provided between the generating means for generating a compressive force and the force flow between the piston rod pin (5) And the control device (10) 妾, according to the force of the force acting on the piston rod pin (5) to adjust the gas. ° A patent range of the second device, wherein: live to detect The width of the structuring line is adjusted according to the size of the tip, which determines the degree of structuring. 6. The device of claim 1, wherein: the piston member 1) is a cylinder piston (8.1). 7. The device of claim 1, wherein: the piston element (8) is - the end of the tool. R (8.2), with the piston rod pin (7) 8. As in the device of claim i, the piston element is - /, one end is in contact. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> 10. For example, the device of claim 1 of the patent application, wherein: 16 201119075 'The piston rod pin (5) is connected to the tool holder (3) by means of a tension spring (14). 11. The device of claim 10, wherein: each of the piston rod pins (5) has a path measuring system on the tool holder (3) for measuring the position of each of the scraping tools (4) in the vertical direction . Eight, the pattern: (such as the next page) 17
TW99134694A 2009-11-17 2010-10-12 Apparatus for mechanically structuralizing thin-film solar cell module TW201119075A (en)

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