201118480 六、發明說明： 【發明所屬之技術領域】 相關申請的交又引用 本美國非臨時專利申請根據35 U.S.C. § 119要求2009 年11月27號提交的韓國專利申請1〇_2〇〇9_〇115756的優先 權，其全部内容藉由引用合併於此。 這裡公開的發明關於一種排放處理液的裝置和方法， 並且更特別地關於-觀過喷墨排放法（inkjet diseharging method )將處理液排放到基板的裝置和使用該裝置排放處 理液的方法。 【先前技術】 近年來 狀日日.，、、員不器被廣泛地用作比如行動電話和可 檇式電腦等電子裝置_示器。麵晶顯示財，盆上形 成有黑矩陣、彩膜㈣Qrfllm)、共用電極和配向膜的彩膜基 ，與陣縣板關以在彩職板和_基板之間填充液 日日’其中在陣形基板上形成有薄膜電晶體（TFTs) 膜。透過取決於液晶的各向異性而被不同地 折射的光，圖像被顯示在液晶顯示器上。 布裝置被用於將配向液或者液晶塗布到彩膜 土板或者陣列基板上。但是，這樣的噴累 、 嘴間距不能根據基板的單元間距㈤1二）進= 此塗布到基板的配向賴或麵晶膜的性低 【發明内容】 1低。 本發明提供了-種均一地將處理液（比如配 晶）排放到基板的裝置和方法。 -11液或者液 本發明的目標並不局限於前述内容，而是根據下面的 4/38 201118480 〇兒月本領域的技術人員將清楚地理解這裡沒有説明的其他 目標0 本發明的具體實施例提供了一種透過喷墨排放法排放 處理液的裝置，該裝置包括：基板支撐單元，構造成在其上 放，基板並且能夠沿第一方向移動；門架，配置於該基板支 ^早疋的移動通道上方’並且多個噴頭（head)連接到該門 采以將處理㈣制基板；和旋轉單元，構造减轉該門架。 在㉟具體貫施例中，該嘴頭可被設置於該門架的長 度方向。 該門架的一端玎成為旋轉中 轉單元的作用下繞該旋轉中 在其他的具體實施例中， '、並且§玄門架的另一端在述旋 〇旋轉。 在又-個具體實施例中，轉單元可包括 ===::置於該門_另-端 支撑該門㈣該-端。.轉找構件’構錢可旋轉地 又—個具體實施例中，㈣單元還可包括n ㈣動構件，該第二線性驅動構件被構儿 第一泉 性地移動該第二旋轉支撐構件。 〜方向線 在又-個具體實施例中，第一線性驅 線性驅動構件可被設置於崎料基板切單。该第二 在又-個具體實施例中，該噴頭可 、基部。 方向線性地移動。 /σ a門架的長度 在又-個具體實施例中，該喷頭可沿該門架的長度方 201118480 向線性地並且分別單獨（individually) 地移動。 在又一個具體實施例中，該基板支撐單元可包括：支 撐板’構造成支撐基板；線性驅動構件，構造成沿該第一 方向線性地移動該支撐板；和旋轉驅動構件，構造成在垂 直於該支撐板的轉軸上旋轉該支撐板。 在本發明的其他具體實施例中，提供了一種排放處理 液的方法，該方法包括：沿第一方向線性地移動基板；旋 轉門架，以使與該門架連接的多個喷頭的喷嘴被配置於相 對於έ亥第一方向傾斜的方向上；和，透過該喷頭的喷嘴將 處理液排放到該基板。 在其他具體實施例中，在該基板在垂直於該基板的轉 軸上被旋轉90。的狀態下，該基板可沿該第一方向線性地移 動。 在另外的具體實施例中，該喷頭可沿該門架的長度方 向移動。 在另外的具體實施例中，該噴頭可在該門架的長度方 向上被線性地和分別單獨地移動以調節該噴頭之間的足巨 離0 在另外的具體實施例中，該基板可以是液晶顯示器面 板的彩膜（CF)基板或薄膜電晶體（TFT)基板。 在另外的具體實施例中’該處理液可以是液晶或者配 向液。 【實施方式】 下文中，將參考圖式說明根據本發明的示例性具體實 施例的排放處理液的裝置和方法。儘管元件顯示在不同的 圖式中，但相同的元件符號為相同的圖式標記。在下面的 6/38 201118480 :明！’不再詳細說明熟知的功能和構造，因為這樣會使 不必耑的細節模糊本發明。 將描述透過液轉放噴墨法將處理液塗布到目標 虹、、置’及使m置將該處理液塗布到目標物體的 ，如’目標物體可以是液晶㈣器面板的彩膜（CF) 幻 =薄膜電晶體（TFT)基板，處理液可以是液晶、配向 =透過將色素顆粒分散在溶液中製備的紅⑻墨、綠 土、或藍（B),墨。可用聚酿亞月安（p咖遍e)作為配 、配向液可財布到CF基板或者TFT基板，並且液晶 布到CF基板或者TFT基板。墨可以塗布到以樹格 圖案的形式配置於CF基板上的黑轉的内部區域。 在本具體實施例中，該裝置用液晶作為處理液。但是， 本發明並不局限於此。 、圖1為顯示噴墨型液晶塗布裝置1的圖。圖1的液晶 塗布震置藤透過㈣繼噴墨法將液晶塗布到基板。 違基板可以是液晶顯示||面板的CF基板或者tft基 板’液晶可以塗布到CF基板或者TFT基板。 參考1Π ’液晶塗布裝置i包括液晶排放裝置1〇、基 板承載部20、載入部30、卸載部4〇、液晶供給部％、和 主控部90。液晶排放裝置1〇和基板承載部可以在第〆 方向（I)上於彼此接近的位置處沿直線配置。液晶供給部 50和主控部90配置於液晶排放裝置1〇的與基板承載部2〇 相對的一側。液晶供給部50和主控部9〇可在第二方向（ιΙ) 上沿直線配置。載入部30和卸載部4〇配置於基板承載部 7/38 201118480 20的與液晶排放裝置1〇相對的一側。載入部3〇和卸載部 40可以在第二方向（Π)上沿直線配置。 這裡，第一方向（I)是配置液晶排放裝置10和基板承 載部20的方向。在水平面上，第二方向（II)垂直於第一 方向（I)。第三方向（111)垂直於第一方向（1)和第二 向（II)。 一 待塗布液晶的基板被載人到載人部3Q巾。基板承載部 20將基板從載入部30載運到液晶排放裝置1〇。液晶排放 裝置ίο接收來自液晶供給部5Q的液晶並且透過液滴排放 =墨法將該液晶排朗基板。之後，基板錢部2q將基板 :夜晶排放裝置K)載運到卸載部♦已經塗布液晶的基板 從卸載部40被卸載。主控部9〇控制液晶排放農置、某 部20、載人部3G、卸載部4Q和液晶供給部％的^ 鹿一圖2為顯示圖1中液晶排放裝置10的立體圖，圖3為 =圖1中液晶排放裝置1()的平面圖。參考圖2和圖3， ，曰曰排放裝置U)包括基部⑻、基板支 H獅料元谓，棚,移鱗元、液 m70 _、喷頭控制單元700、液晶排量測量單元 、噴嘴檢測單元900 '和喷頭清潔單元1〇〇〇。 現在將更為詳細地說明液晶排放裝置的結構。 (基板支撐單元） （B)可以成型為具有預定厚度的平行六面體形 =板支撐單元議被配置於基部⑻的頂側。基板 尋早元100包括支樓板110，基板（s)能夠被置於支撐 8/38 201118480 板110上。支撐板11〇可以具有矩 ^到切板11G的底側。旋轉‘動構件⑽ 1。旋轉驅動構件120使支樓板11〇^件120可以是旋轉 的轉軸上旋轉。 川在垂直於支撐板110 田支撐板110由旋轉驅動構件12 可以與切板no-起旋轉。如果基= 轉時，基板⑴ 的長邊側與第二方向⑻平行，則=(S)的單元㈤Ο 向⑴平^使基板⑻的單^的長邊側能夠與第-方 13。=。=?件120可以由線性驅動構件 包括滑二(Γ地移一^ 〇引V構件134。旋轉驅動構件U0 ® 於滑動件m _側。引導構件134被==被配1 頂側的中心部並且 —置方；基邛（B)的 示)可以配詈延伸。線性馬達(未顯 J M配置在滑動件132 + ’並且滑動件 導構件134上由該驗馬達線性地移動。 在引 (門架） ^架200配置於支撐板丨心之移動的通道的上方。 木〇以其長度方向與第二方向⑻平 =200。喷頭400可透過喷頭移動單元妾 長度方向線性地移動，即，沿第二方向的 喷頊 _ 5()() / 料， 線性地移動。 ^弟二方向（ΠΟ (門架移動單元） 門架移動單元300可以沿第一方向⑴線性地移動門 9/38 201118480 i二=了使得門架的長度方向能夠相 Hi ⑴傾斜。由於門架·的旋轉，噴頭_ =嘴(未顯示)被配置於相對於第一方向⑴= 1 動單元_可以如下方式旋轉門架 .使門架200的一個端部成為門架2〇〇的旋轉中心，而 木。ί〇0的另一個端部繞該旋轉中心旋轉。可選地，門架 ^動單το 3GGJT以構造成使得門架2⑽能夠繞其中心旋 門，移動早το 3〇。在隨附的申請專财還可以稱 為方疋轉單元。 …門架移動單元300包括第-驅動單元310和第二驅動 单元320。第一驅動單元32Q被配置於門架成為門架 200的㈣中^的端部，而第—軸單元·被配置於門架 200的另一個端部。 ’、 圖4為顯示圖3中所示的第一驅動單元31〇的圖。參 考圖4，第-驅動單元31〇包括滑動件312'第一旋轉支撐 構件314、和第-線性驅動構件318。導軌21〇沿門架· 的長度方向被設置於門架·的該另—端部的下部，滑動 件312在導執210上被線性地移動。第一旋轉支撐構件314 被連接到滑動件312的底侧。第-旋轉支撐構件314可以 是軸承，該軸承的上部和下部能夠相對地旋轉。第一線性 驅動構件318被連接到第一旋轉支撐構件314的底侧。第 -線性驅動構件318沿第—方向⑴線性地移動第一旋轉 支撐構件M4。 第一線性驅動構件318包括導執315和滑動件317 ^ 導執315的長度方向平行於第一方向，並且導軌315 10/38 201118480 被配置於基部⑻__邊緣部且與基板切單元· 3引導構件134隔開。滑動件3Π以可移動的方式連接到 執315。第一旋轉支撐構件314被連接到滑動件317的 頂側。線性馬達（未顯示）可以配置在滑動件中。滑 ，件317可以由線性馬達（未顯示）驅動沿著導執阳在 第一方向（I)上移動。 圖\為顯示圖3中所示的第二驅動單元32〇的圖。參 ^圖5 ’第二驅動單元32〇可以沿第—方向⑴線性地移 動門架200的該一個端部，以線性地移動門帛2〇〇，並且第 二驅動單元320。可以用作為門架2〇〇旋轉時的旋轉中心。 第一驅動單A 320包括第二旋轉支撐構件324和第二 線性驅動構件328。連接構件322被連接朝架的該一 個端部的下側，並且第二旋轉支撐構件324被連接到連接 構件322的底側。第二旋轉支禮構件似可以是輛承，該 軸承的上部和下部能夠相對旋轉。第二線性驅動構件似 被連接到第二旋轉支樓構件324的底側。第二線性驅動構 件328沿第-方向⑴線性地移動第二旋轉支揮構件似。 當第二旋轉支樓構件324被線性地移動時，順序地連接到 第二旋轉支撐構件324的頂側的連接構件322和門架2〇〇 的該一個端部也被線性地移動。 第二線性驅動構件328包括導執325和滑動件327。遙 執奶的長度方向與第-方向⑴平行，並且 =轨3== 配置於基部⑻的頂側的邊緣處且與基板支樓單元ι〇〇的 引導構件134隔開。滑動件327以可移動的方式連接到導 軌325。第二旋轉支撐構件324被連接到滑動件327的頂 側。線性馬達（未顯示）可以配置在滑動件切巾。滑動 11/38 201118480 件327可以由線性馬達（未顯示）驅動沿著導轨奶 一方向（I)上線性地移動。 牡弟 圖6為顯示門架2〇〇的線性移動和旋轉的圖。參考 4、圖5和圖6’門架可以透過第一驅動單元灿和 被旋轉_對於第—方向⑴傾斜的位置和被以平行於 一方向（I)的方式線性地移動。 ' 如果第-驅動單元310的第一線性驅動構件318在第 二驅動單元320的第二線性驅動構件328被固定的狀態下 沿第一方向（I)線性地移動，則門架被: 對此進行詳細賴。 w兄在將 .首先，第一線性驅動構件318的滑動件317由線性馬 達（未顯示）驅動沿著導執315在第一方向（1)上移動: 此時，由於未驅動第二線性驅動構件328，則門架2⑻的嗲 -個端部並不沿第—方向⑴移動而是由第二旋轉^ 件324旋轉。 牙構 h者苐一線性驅動構件318的滑動件317在第—方白 (I)上移動，配置在滑動件317上的第一旋轉支撐構件 沿著315線性地移動。此時，在由於第一旋轉支撐構件 的上部和下部的相對旋轉而被旋轉的同時，連接到第一旋 轉支撐構件314的頂側的滑動件312被沿著設置在門架2= 中的導軌210移動到門架200的該另一端部的頂部。=果， Η架200在第二驅動單元320的支撐位置上被旋轉，並且 第-驅動單元31〇支樓門架2〇〇的支撐位置被向外移動到 門架200的另一端部的頭部。由此，門架2〇〇可以被旋 到相對於第一方向（I)傾斜的位置，並且喷頭4〇〇可以被 配置於相對於第一方向（I)傾斜的方向。 耳 12/38 201118480 以此’如果噴頭400能夠被配置於相對於第一方向（工） 傾斜的方向’則能夠根據待塗布液晶的基板（S )的圖元間 距調整液晶排放位置之間的間距，由此能夠改進塗布到基 板（S )的液晶膜的均勻性。 門架200能夠如該地旋轉。另外，在旋轉狀態，門架 200能夠在第一線性驅動構件318的滑動件317和第二線性 驅動構件328的滑動件327上沿第一方向（丨）線性地移動。 門架200的該一個端部可以透過第二線性驅動構件328的 滑動件327的移動而在第一方向（τ)上線性地移動，而門 架200的該另一端部可以透過第一線性驅動構件318的滑 動件317的移動而在第一方向d)上線性地移動。 如果門架200被固定並且基板在第一方向（1)上移動’ 則有必要將基板從門架200的一側移動到門架2〇〇的另一 侧，由此能夠增加該裝置的覆蓋區（f〇〇tprim)。但是，根 據本發明，在基板處於停止或者線性移動的狀態中，門架 200能夠在第-方向⑴上移動，由此會減小該裝置的覆 盖區。 (喷頭） 噴頭_將液晶的液滴排玫到基板。在本呈體實施例 中’使用了三個喷頭、420和43〇。但是，本發明並不 局限於此。嘴頭400可以沿第二方肖⑻成直線配置且可 以連接到門架200 ° 多個噴嘴（未顯示）被設置於噴頭4〇〇的底側以排放 液晶的液滴。例如，每個噴頭400可以包括128個或者乃6 個喷嘴（未顯示）。該料嘴可^_的咖成直線配 置。液晶的液滴可以透過噴嘴以微克（吨）的單位排放。 13/38 201118480 在使用注入器（syringe )的點繪法（p〇int触㈣ m=〇d)的情況中，液晶的液滴以相對大的間距以毫克（mg) 的單位排放。由此’液晶由於液晶本身_性（流動阻力） 而不能均-地在基板上擴展。但是，根據本發明，由於液 晶的液滴透過多個以小的間距配置的噴嘴（未顯示）以微 克（pg)的單位排放，則儘管液晶具有黏性，也能夠更為 均一地將液晶塗布到基板。 每個喷頭400可以包括與喷嘴（未顯示）的數目一樣 多的壓電器件，並且喷嘴的液滴排量可以透過調節施加到 壓電器件的電壓而分別單獨地控制。 (噴頭移動單元） 可以分別為各個喷頭400設置噴頭移動單元500。在本 具體實施例中’設置了與三個喷頭410'420和430對應的 三個喷頭移動單元500。可選地，可以僅設置一個喷頭移動 單元500,並且假若這樣，喷頭4〇〇可以一起移動，而不是 分別單獨地移動。 圖7為顯示圖2和圖3中所示的喷頭移動單元5〇〇的 侧視圖，圖8為顯示圖7中所示的第一可移動單元52〇的 正視圖。參考圖7和圖8,喷頭移動單元5〇〇包括第一可移 動單元520和第二可移動單元540。第一可移動單元52〇沿 門架200的長度方向，即沿該第二方向（Π)線性地移動噴 頭410。第二可移動單元540沿該第三方向（III)線性地 動噴頭410。 夕 ^ 』秒助早兀52ϋ包栝等軌以a和522b、滑動件 524a和524b、和可移.動板52。導轨522a和522b可以在 第二方向（II)上較長。導執522a和522b可以採用在第 14/38 201118480 二方向（III)上彼此隔開的方式被配置於門架2〇〇的前側。 滑動件524a和524b以可移動的方式連接到導執522a和 522b，並且線性驅動單元比如線性馬達（未顯示）可以配 置在滑動件524a和524b中。可移動板526被連接到滑動 件524a和524b。可移純526白勺上部被連接到上部滑動 件524a’可移動板526的下部被連接到下部滑動件兄仆。 如圖8所不，可移動板526可以由線性馬達（未顯示）驅 動而在第二方向（11)上沿著導軌522a和522b被線性地 移動。以此’能夠透過在第二方向（11)上分別單獨地移 動噴頭410、420和430而調節噴頭410、420和430之間201118480 VI. Description of the invention: [Technical field to which the invention pertains] The filing of the related application also refers to the Korean non-provisional patent application filed in accordance with 35 USC § 119, filed on November 27, 2009, Korean Patent Application 1〇_2〇〇9_ The priority of 〇115756, the entire contents of which is incorporated herein by reference. The invention disclosed herein relates to an apparatus and method for discharging a treatment liquid, and more particularly to a device for discharging a treatment liquid to a substrate with respect to an inkjet diseharging method and a method of discharging the treatment liquid using the same. [Prior Art] In recent years, the device has been widely used as an electronic device such as a mobile phone and a portable computer. The surface crystal shows the wealth, the black matrix, the color film (4) Qrfllm), the color film base of the common electrode and the alignment film are formed on the basin, and the film is filled with the film board to fill the liquid between the color plate and the _ substrate. Thin film transistors (TFTs) are formed on the substrate. The image is displayed on the liquid crystal display through light that is differently refracted depending on the anisotropy of the liquid crystal. The cloth device is used to apply an alignment liquid or liquid crystal onto a color film or an array substrate. However, such a spray and a nozzle pitch cannot be made according to the cell pitch (5) of the substrate. The adhesion to the substrate or the surface film is low. The present invention provides an apparatus and method for uniformly discharging a treatment liquid such as a crystal to a substrate. -11 Liquid or Liquid The object of the present invention is not limited to the foregoing, but is based on the following 4/38 201118480. A person skilled in the art will clearly understand other objects not described herein. Provided is an apparatus for discharging a treatment liquid by an inkjet discharge method, the apparatus comprising: a substrate supporting unit configured to be placed thereon, the substrate being movable in a first direction; and a gantry disposed on the substrate Above the moving channel' and a plurality of heads are connected to the door to process the (four) substrate; and the rotating unit is configured to reduce the gantry. In a specific embodiment of the 35, the mouth can be disposed in the length direction of the gantry. One end of the gantry is rotated about the rotation by the rotation of the relay unit. In other embodiments, the other end of the sill gantry is rotated. In yet another embodiment, the swivel unit can include ===:: placed at the door _ other end supporting the door (four) the end. The steerable member is rotatably and, in a specific embodiment, the (four) unit may further include an n (four) moving member that is configured to first move the second rotating support member in a first spring. ~ Directional Line In yet another embodiment, the first linear drive linear drive member can be placed on the battered substrate singulation. The second, in yet another embodiment, the showerhead can be a base. The direction moves linearly. / σ a gantry length In yet another embodiment, the showerhead can be linearly and individually moved along the length of the gantry 201118480. In still another specific embodiment, the substrate supporting unit may include: a support plate configured to support the substrate; a linear driving member configured to linearly move the support plate in the first direction; and a rotation driving member configured to be vertical Rotating the support plate on the rotating shaft of the support plate. In other specific embodiments of the present invention, a method of discharging a treatment liquid is provided, the method comprising: linearly moving a substrate in a first direction; rotating the gantry to cause nozzles of the plurality of nozzles connected to the gantry It is disposed in a direction inclined with respect to the first direction of the έ; and the discharge liquid is discharged to the substrate through the nozzle of the head. In other embodiments, the substrate is rotated 90 on a rotating axis that is perpendicular to the substrate. The substrate is linearly movable in the first direction. In other embodiments, the spray head is movable along the length of the gantry. In other embodiments, the showerhead can be linearly and separately moved in the length direction of the gantry to adjust the foot-to-foot gap between the showerheads. In another embodiment, the substrate can be A color film (CF) substrate or a thin film transistor (TFT) substrate of a liquid crystal display panel. In another embodiment, the treatment liquid may be a liquid crystal or an alignment liquid. [Embodiment] Hereinafter, an apparatus and method for discharging a treatment liquid according to an exemplary embodiment of the present invention will be described with reference to the drawings. Although the components are shown in different figures, the same component symbols are the same drawing. In the following 6/38 201118480: Ming! The well-known functions and constructions are not described in detail, as this will obscure the invention in detail. The liquid-transfer inkjet method will be described to apply the treatment liquid to the target rainbow, and set and apply the treatment liquid to the target object, for example, the target object may be a color film (CF) of the liquid crystal panel. Fantasy = thin film transistor (TFT) substrate, the treatment liquid may be liquid crystal, alignment = red (8) ink, smectite, or blue (B) ink prepared by dispersing pigment particles in a solution. It is possible to use a polystyrene as a matching or alignment liquid to deposit a CF substrate or a TFT substrate, and to supply a liquid crystal to a CF substrate or a TFT substrate. The ink can be applied to a black-turned inner region which is disposed on the CF substrate in the form of a tree pattern. In this embodiment, the device uses liquid crystal as the treatment liquid. However, the present invention is not limited to this. FIG. 1 is a view showing an inkjet type liquid crystal coating apparatus 1. The liquid crystal coating of Fig. 1 is applied to the substrate by the ink jet method. The substrate may be a CF substrate of a liquid crystal display panel or a tft substrate. The liquid crystal may be applied to a CF substrate or a TFT substrate. The liquid crystal discharge device i includes a liquid crystal discharge device 1A, a substrate carrying portion 20, a loading portion 30, an unloading portion 4A, a liquid crystal supply portion %, and a main control portion 90. The liquid crystal discharge device 1 and the substrate carrying portion may be arranged in a straight line at positions close to each other in the second direction (I). The liquid crystal supply unit 50 and the main control unit 90 are disposed on the side of the liquid crystal discharge device 1 that faces the substrate carrying portion 2A. The liquid crystal supply portion 50 and the main control portion 9A can be arranged in a straight line in the second direction (ι). The loading unit 30 and the unloading unit 4 are disposed on the side of the substrate carrying portion 7/38 201118480 20 opposite to the liquid crystal discharge device 1A. The loading portion 3〇 and the unloading portion 40 may be arranged in a straight line in the second direction (Π). Here, the first direction (I) is a direction in which the liquid crystal discharge device 10 and the substrate carrying portion 20 are disposed. In the horizontal plane, the second direction (II) is perpendicular to the first direction (I). The third direction (111) is perpendicular to the first direction (1) and the second direction (II). A substrate on which a liquid crystal is to be applied is carried to a person carrying a 3Q towel. The substrate carrying portion 20 carries the substrate from the loading portion 30 to the liquid crystal discharge device 1A. The liquid crystal discharge device ίο receives the liquid crystal from the liquid crystal supply portion 5Q and discharges the liquid crystal to the substrate by the liquid droplet discharge = ink method. Thereafter, the substrate money portion 2q carries the substrate: the night crystal discharge device K) to the unloading portion ♦ the substrate on which the liquid crystal has been applied is unloaded from the unloading portion 40. The main control unit 9 controls the liquid crystal discharge, the part 20, the passenger part 3G, the unloading part 4Q, and the liquid crystal supply part %. FIG. 2 is a perspective view showing the liquid crystal discharge device 10 of FIG. 1, FIG. 3 is= Figure 1 is a plan view of the liquid crystal discharge device 1 (). Referring to FIG. 2 and FIG. 3, the 曰曰 discharge device U) includes a base portion (8), a substrate support H lion element, a shed, a scale element, a liquid m70 _, a nozzle control unit 700, a liquid crystal displacement measuring unit, and a nozzle detection. Unit 900' and nozzle cleaning unit 1〇〇〇. The structure of the liquid crystal discharge device will now be described in more detail. (Substrate Support Unit) (B) It is possible to form a parallelepiped shape having a predetermined thickness = the board support unit is disposed on the top side of the base (8). The substrate finder element 100 includes a slab 110 and the substrate (s) can be placed on a support 8/38 201118480 board 110. The support plate 11A may have a moment ^ to the bottom side of the cutting plate 11G. Rotate the 'moving member (10) 1. The rotary drive member 120 causes the branch floor panel member 120 to be rotated on a rotating shaft. The support plate 110 is perpendicular to the support plate 110. The rotary drive member 12 can be rotated with the cutting plate no. If the base side (1) has a long side that is parallel to the second direction (8), the unit (5) of the =(S) direction (1) is flat so that the long side of the substrate (8) can be aligned with the first side. =. The member 120 may be comprised of a linear drive member including a slide member (the V member 134 is rotated). The rotary drive member U0 ® is on the slider m _ side. The guide member 134 is == is assigned to the center portion of the top side And - the square; the base (B) shows) can be extended with extensions. A linear motor (not shown in JM is disposed on the slider 132 + ' and the slider guide member 134 is linearly moved by the inspection motor. The guide frame 200 is disposed above the passage of the movement of the support plate. The raft is flat with its second direction (8) = 200. The spray head 400 can move linearly through the length direction of the head moving unit, that is, the sneeze _ 5()() in the second direction, linear Ground movement. ^Different direction (ΠΟ (gantry moving unit) The gantry moving unit 300 can linearly move the door 9/38 in the first direction (1) 201118480 i 2 = so that the length direction of the gantry can be tilted by Hi (1). Due to the rotation of the gantry, the nozzle _ = mouth (not shown) is disposed relative to the first direction (1) = 1 moving unit _ the gantry can be rotated in such a manner that one end of the gantry 200 becomes the gantry 2 〇〇 The center of rotation, while the other end of the wood. 〇 0 rotates around the center of rotation. Optionally, the gantry moves a single το 3GGJT to be configured such that the gantry 2 (10) can rotate around its center, moving early το 3 〇. In the attached application for special wealth can also be called Fang 疋 单元 unit. ... The gantry moving unit 300 includes a first driving unit 310 and a second driving unit 320. The first driving unit 32Q is disposed at the end of the gantry as the (four) middle of the gantry 200, and the first-axis unit is disposed at the door The other end of the frame 200. ', Fig. 4 is a view showing the first driving unit 31A shown in Fig. 3. Referring to Fig. 4, the first driving unit 31A includes a slider 312' first rotating support member 314. And the first linear drive member 318. The guide rail 21 is disposed at a lower portion of the other end portion of the gantry in the longitudinal direction of the gantry, and the slider 312 is linearly moved on the guide 210. The support member 314 is coupled to the underside of the slider 312. The first-rotational support member 314 can be a bearing, the upper and lower portions of which can be relatively rotated. The first linear drive member 318 is coupled to the first rotary support member 314. The bottom side of the first linear drive member 318 linearly moves the first rotary support member M4 along the first direction (1). The first linear drive member 318 includes the guide 315 and the slider 317. The length direction of the guide 315 is parallel to the One direction, and the guide rail 315 10/38 201118 480 is disposed at the base (8)__ edge portion and spaced apart from the substrate cutting unit 3 guiding member 134. The slider 3 is movably coupled to the holder 315. The first rotating support member 314 is coupled to the top side of the slider 317 A linear motor (not shown) may be disposed in the slider. The slider 317 may be driven by a linear motor (not shown) to move along the guide yang in the first direction (I). Figure \ is shown in Figure 3. The second driving unit 32A is shown in Fig. 5. The second driving unit 32 can linearly move the one end of the gantry 200 in the first direction (1) to linearly move the threshold 2〇〇. And a second driving unit 320. It can be used as the center of rotation when the gantry 2 is rotated. The first drive unit A 320 includes a second rotary support member 324 and a second linear drive member 328. The connecting member 322 is coupled to the lower side of the one end of the frame, and the second rotating support member 324 is coupled to the bottom side of the connecting member 322. The second rotating support member may be a bearing, and the upper and lower portions of the bearing are relatively rotatable. The second linear drive member is similarly coupled to the underside of the second rotary strut member 324. The second linear drive member 328 linearly moves the second rotary support member in the first direction (1). When the second rotating branch member 324 is linearly moved, the connecting member 322 sequentially connected to the top side of the second rotating support member 324 and the one end portion of the gantry 2A are also linearly moved. The second linear drive member 328 includes a guide 325 and a slider 327. The longitudinal direction of the remote milk is parallel to the first direction (1), and the = rail 3 == is disposed at the edge of the top side of the base (8) and spaced apart from the guiding member 134 of the substrate branch unit. The slider 327 is movably coupled to the guide rail 325. The second rotary support member 324 is coupled to the top side of the slider 327. A linear motor (not shown) can be placed on the slider cut. Sliding 11/38 201118480 piece 327 can be linearly moved along the rail milk direction (I) by a linear motor (not shown). The younger brother Figure 6 is a diagram showing the linear movement and rotation of the gantry 2〇〇. Reference 4, Fig. 5 and Fig. 6' of the gantry can be linearly moved through the first drive unit and the rotated _ position for the first direction (1) and linearly parallel to the direction (I). If the first linear drive member 318 of the first drive unit 310 linearly moves in the first direction (I) in a state where the second linear drive member 328 of the second drive unit 320 is fixed, the gantry is: This is done in detail. w brother. First, the slider 317 of the first linear drive member 318 is driven by a linear motor (not shown) to move in the first direction (1) along the guide 315: at this time, since the second linearity is not driven With the driving member 328, the end portions of the gantry 2 (8) are not moved in the first direction (1) but are rotated by the second rotating member 324. The slider 317 of the linear drive member 318 moves on the first white (I), and the first rotary support member disposed on the slider 317 linearly moves along 315. At this time, while being rotated due to the relative rotation of the upper and lower portions of the first rotary support member, the slider 312 connected to the top side of the first rotary support member 314 is along the guide rail provided in the gantry 2= 210 moves to the top of the other end of the gantry 200. If the truss 200 is rotated at the support position of the second drive unit 320, and the support position of the first drive unit 31 〇 gantry 2 被 is moved outward to the head of the other end of the gantry 200 unit. Thereby, the gantry 2 can be rotated to a position inclined with respect to the first direction (I), and the head 4 can be disposed in a direction inclined with respect to the first direction (I). Ear 12/38 201118480 Thus, if the head 400 can be disposed in a direction inclined with respect to the first direction, the spacing between the liquid crystal discharge positions can be adjusted according to the pixel pitch of the substrate (S) to be coated with the liquid crystal Thereby, the uniformity of the liquid crystal film applied to the substrate (S) can be improved. The gantry 200 can be rotated as it is. Further, in the rotated state, the gantry 200 can linearly move in the first direction (丨) on the slider 317 of the first linear drive member 318 and the slider 327 of the second linear drive member 328. The one end of the gantry 200 is linearly movable in a first direction (τ) by movement of the slider 327 of the second linear drive member 328, and the other end of the gantry 200 is permeable to the first linear The movement of the slider 317 of the drive member 318 linearly moves in the first direction d). If the gantry 200 is fixed and the substrate moves in the first direction (1), it is necessary to move the substrate from one side of the gantry 200 to the other side of the gantry 2, thereby being able to increase the coverage of the device. District (f〇〇tprim). However, according to the present invention, in a state where the substrate is stopped or linearly moved, the gantry 200 can be moved in the first direction (1), whereby the covering area of the apparatus can be reduced. (sprinkler) Nozzle _ Discharge the droplets of liquid crystal to the substrate. In the present embodiment, three nozzles, 420 and 43 使用 were used. However, the present invention is not limited to this. The nozzle 400 may be arranged in a line along the second square (8) and may be connected to the gantry 200. A plurality of nozzles (not shown) are disposed on the bottom side of the head 4 to discharge liquid droplets of the liquid crystal. For example, each of the showerheads 400 can include 128 or 6 nozzles (not shown). The nozzle can be configured in a straight line. Liquid crystal droplets can be discharged through the nozzle in micrograms (tons). 13/38 201118480 In the case of the dot plotting method using the injector (p〇int touch (4) m=〇d), liquid crystal droplets are discharged in units of milligrams (mg) at relatively large intervals. Thus, the liquid crystal cannot spread uniformly on the substrate due to the liquid crystal itself (flow resistance). However, according to the present invention, since the droplets of the liquid crystal are discharged through a plurality of nozzles (not shown) arranged at a small pitch in units of micrograms (pg), the liquid crystal can be more uniformly coated despite the viscosity of the liquid crystal. To the substrate. Each of the heads 400 may include as many piezoelectric devices as the number of nozzles (not shown), and the droplet discharge amount of the nozzles can be individually controlled by adjusting the voltage applied to the piezoelectric devices, respectively. (Nozzle Moving Unit) The head moving unit 500 may be provided for each of the heads 400, respectively. In the present embodiment, three head moving units 500 corresponding to the three heads 410' 420 and 430 are disposed. Alternatively, only one head moving unit 500 may be provided, and if so, the heads 4〇〇 may move together instead of separately moving separately. Fig. 7 is a side view showing the head moving unit 5A shown in Figs. 2 and 3, and Fig. 8 is a front view showing the first movable unit 52A shown in Fig. 7. Referring to Figures 7 and 8, the head moving unit 5A includes a first movable unit 520 and a second movable unit 540. The first movable unit 52 is linearly moved in the longitudinal direction of the gantry 200, i.e., in the second direction (Π). The second movable unit 540 linearly moves the head 410 in the third direction (III). </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> The guide rails 522a and 522b may be longer in the second direction (II). The guides 522a and 522b may be disposed on the front side of the gantry 2〇〇 in a manner spaced apart from each other in the 14th/38th 201118480 direction (III). Sliders 524a and 524b are movably coupled to guides 522a and 522b, and linear drive units such as linear motors (not shown) may be disposed in sliders 524a and 524b. The movable plate 526 is coupled to the sliders 524a and 524b. The upper portion of the movable 526 is connected to the upper slider 524a'. The lower portion of the movable plate 526 is connected to the lower slider brother. As shown in Fig. 8, the movable plate 526 can be driven by a linear motor (not shown) to be linearly moved along the guide rails 522a and 522b in the second direction (11). Thus, it is possible to adjust between the heads 410, 420 and 430 by separately moving the heads 410, 420 and 430 in the second direction (11)
的距離。 S 第二可移動單元540包括引導構件542、滑動件544、 檢測器546和控制器548。引導構件542被連接到第一可移 動單元520的可移動板526，以在第三方向（ΙΠ)上引導^ 動件544的運動。滑動件544以可線性移動的狀態被連^ 到引導構件542,並且線性驅動單元比如線性馬達（未顯示） 可以配置在滑動件544中。喷頭41G被連接到滑動件544， 從而噴頭410能夠透過滑動件544在第三方向（ιιι)上的 線性運動而在第三方向（in)上移動。 檢測器546可以配置到門架200 ’用以檢測噴頭41〇與 基板（S)之間的距離。檢測器％可以是雷射感測界。控 制器548產生與檢測$ 546的檢測信號對應的控制^虎^ 並且將該控制信號傳送到配置在滑動件544中的線性鬲達 以控制線性馬達的操作。如果根據檢測器撕的檢測結果 確定噴頭410和基板（s)之間的距離超出了預定的基 圍，則控制器548控制線性馬達（未顯示）的操作二調: 15/38 201118480 喷頭410和基板（s)之間的距離。 (液晶供給單元） 液晶供給單元6〇〇包括液晶供給模組620和壓力調節 模組640。液晶供給模組62〇和壓力調節模組64〇可以連接 到門架200。液晶供給模組62〇接收來自液晶供給部％(參 考圖1)的液晶並且將該液晶供給到喷頭410、42〇和。 壓力調節模組640將液晶供給模組62〇保持於正壓或負 壓’並調節液晶供給模組620的壓力。 圖9為顯示圖2和圖3中所示的液晶供給單元6〇〇的 圖，圖10為顯示圖9中所示的第一氣泡過濾構件63()的局 部放大圖。 蒼考圖2、圖9和圖1〇，液晶供給模組62〇配置於門 架200。例如，液晶供給模組62〇可以配置於門架2〇〇的頂 側的中心。卩。喷頭41〇、420和430可以透過允許液體連通 的集中連接法（centralized connection method )連接到液晶 供給模組620。即，噴頭410、420和430可以從單個的液 晶供給模組620接收液晶，並且喷頭41〇、42〇和43〇的内 壓可以由單個的液晶供給模組620控制。 液晶供給模組620包括液晶箱622和第一氣泡過濾構 件630。液晶箱622儲存接收自液晶供給部5〇的液晶並且 將該液晶供給到喷頭410、420和430。液晶箱622可以為 圓柱开>。液晶箱622可以包括在垂直方向上彼此面對的頂 壁622a和底壁622b、和連接頂壁622a和底壁622b的邊緣 的側壁622c。 入口部623、收集口部624、壓力調節口部625和液面 感應口部626被設置於液晶箱622的頂壁622a上。液晶供 16/38 201118480 給部50的液晶供給構件7〇被連接到入口部623,使得液晶 供給構件70可以經由入口部623供給液晶。液晶供給部50 的氣泡收集構件80被連接到收集口部624，使得氣泡能夠 透過收集口部624從液晶箱622排出。壓力調節模組640 連接到壓力調節口部625，從而氣體可以透過壓力調節口部 625被供給到壓力調節模組640或者透過壓力調節口 625從 壓力調節模組640排出。液面感測器（未顯示）被配置於 液面感應口部626以檢測液晶箱622中的液晶的液面。 苐一至第二液晶供給口部627a、627b和627c被設置 於液晶箱622的底壁622b。第一至第三液晶供給口部 627a、627b和627c的數目可以對應於噴頭410、420和430 的數目。液晶透過第一至第三液晶供給口部627a、627b和 627c被供給到噴頭410、420和430。第一液晶配給線621a 的一端連接到第一液晶供給口部627a，第一液晶配給線 621a的另一端連接到噴頭41〇。第二液晶配給線621b的一 端連接到第二液晶供給口部627b，第二液晶配給線621b的 另一端連接到噴頭420。第三液晶配給線621c的一端連接 到第三液晶供給口部027c，第三液晶配給線621&的另一端 連接到喷頭430。 液晶箱622可以可拆卸地方式安裝到門架2⑻。例如， 托架628可以連接到液晶箱622的側壁622c的外表面，並 且牦架628可以用螺釘連接到門架2〇〇。 第一氣泡過濾構件630可以配置在液晶箱622中。第 一氣泡過濾構件630從自液晶供給部5〇的液晶供給 供給到液晶箱622中的液晶中移除氣泡。第一氣泡過濾 構件630具有板的形狀並且被水準地配置於液晶箱奶^ 17/38 201118480 的、將液，|备622白勺内部分為上部區域和下部區域的位置 處第iw包過濾構件630 #邊緣的侧面與液晶箱622的 侧壁622c的内面接觸。多個濾孔纽形成在第一氣泡過遽 構件630中。遽孔632可有毛細管的形狀，其尺寸沿向下 方向增大以防止氣泡穿過濾孔632。液晶的流體和晶體成 分可以通過纽632，但氣泡不會通過濾'孔63>液晶的流 體和晶體成分沿從濾、孔632的頂端632a到底端咖的方 向通過濾孔632。另外’液晶的流體和晶體成分還可以沿 從航63^的底端632b到頂端仙的方向通過濾、孔紐。 壓力調節模、组_可以連接到門架綱。壓力調節模組 _可以將液晶箱622保持在正壓或者負壓。例如，可以透 過供應氣體形成絲，可以透過真㈣力形成貞壓。杏喷 頭清潔單元1_清洗喷嘴時，動·模組_可以:液 晶供給模組620施加正壓，而#未進行液晶概處理時， 壓力調節模組640可以向液晶供給模組㈣施加負壓以防 止液晶從麵的喷嘴落下。充氣線642可以連^到液 晶箱622的壓力調節口部625,壓力調節單元644可垃 到充氣線642。 # 如圖1所示，液晶供給部5〇可以設置為與液晶排放華 置10分離的部分。液晶供給部5〇包括液晶供給源52、办 壓構件60、液晶供給構件70和氣泡收集構件8〇〇例如， 液晶供給源52可以為圓柱形，液晶可以填充在液晶供 52中。加壓構件6〇對液晶供給源52施加氣壓。然後塌 充在液晶供給源52中的液晶由於加壓構件⑼所施加的義 壓而透過液晶供給構件70被供給到液晶箱622。 ” 液晶供給構件70包括液晶供給線72、顆粒過據構科 18/38 201118480 74、和第二氣泡過濾構件76。液晶供給線72的一端連接到 液晶供給源52 ’而液晶供給線72㈣—端連接到液晶箱 622的入口部623。顆粒過濾構件74和第_氣# 76沿著液晶供給線72配置。顆崎構 供給線72流到液晶箱622的液晶中移除顆粒。第二氣泡過 濾構件76從透過液晶供給線72流到液晶箱622的液晶中 移除氣泡。 由於氣泡收集構件80，由配置在液晶箱622中的第一 氣泡過滤構件630所阻擔的氣泡能夠被從液晶箱622的上 部區域收集到液晶供給源52。氣泡收集構件8〇包括氣泡收 集線82和排氣構件84。氣泡收集線82的一端連接到液晶 供給源52 ’而氣泡收集線82的另一端連接到設置在液晶箱 622的頂壁622a中的收集口部624。排氣構件84被配置於 氣泡收集線82上。排氣構件84對液晶箱622的上部區域 方也加負堡’以從液晶箱622收集氣泡。 下文中，將§兒明液晶如何從液晶供給部5 〇被供給到喷 頭 410、420 和 430。 加壓構件60對液晶供給源52施加氣壓。然後，填充 在液晶供給源52中的液晶由於加壓構件60所施加的氣壓 而透過液晶供給構件70被供給到液晶箱622。此時，顆粒 過濾構件74從液晶中移除顆粒，第二氣泡過濾構件76從 液晶中移除氣泡。 供給到液晶箱622中的液晶的流體和晶體成分可以透 過第一氣泡過濾構件630並且填充液晶箱622的下部區 域。即，第一氣泡過濾構件630從液晶中移除氣泡。 以此，液晶被連續地供給到液晶箱622，由此液晶在液 19/38 201118480 晶箱622中的液面升高。隨著液晶的液面的升高，由第一 氣泡過渡構件㈣_的氣泡向上移_液晶表面。如果 液晶的液面達到預定的值，則氣泡收集構件80的排氣構件 84對液晶箱622施加負壓，從而能夠從液晶箱似收集氣 泡。氣泡收集構件8G所㈣的氣泡被返_液晶供給源52。 液晶箱622的下部區域被填充有液晶，該液晶被過滤 以移除H被過_液晶透過第―至第三液日日日供給口部 627a、627b和627c和第一至第三液晶配給線咖、㈣ 和621c被供給到喷頭41〇、42〇和43〇。 -透過上述的步驟，已經移除了氣泡的液晶被供給到喷 頭410 420和430 ’由此能夠防止喷頭41〇、42〇和柳的 喷嘴被氣泡堵塞。 (喷頭控制單元） 喷頭控制單元控制噴頭410、420和43〇的液晶排 放動作。噴頭控制單元可以配置在液晶排放裝置ι〇的 接近於噴頭410、420和430的位置處。例如，噴頭控制單 元-700可以配置在門架2⑻的端部。在本具體實施例中， 喷頭控制單元7GG被配置於門架·的端部。但是 控制單元700的位置並不局限於此。 雖然未顯示，但喷頭控制單元700被電氣連接到喷頭 4—10、420和430以對喷頭41〇、和43〇施加控制信號。 =個嘴頭41G、420和430可以包括與其喷嘴（未顯示）的 。目樣夕的壓電器件（未顯示），並且喷頭控制單元7〇〇 可以控制施加到壓f ϋ件的f壓以_喷嘴的液滴排量。 ，通*的液晶塗布裝置中，喷頭由喷頭控制單元控 制，忒噴頭控制單元與該噴頭分離地設置於該裝置的外側 20/38 201118480 或者設置於該裝置的内側但離開噴頭。由此’當控制信號 從噴頭控制單元傳輸到喷頭時，控制信號易於受到雜訊的* 干擾。 、但是，在本發明的具體實施例中，喷頭控制單元7〇〇 被配置於連接有喷頭410、420和430的門架200上。因此， 能夠使用較短的線纜將噴頭控制單元7〇〇連接到噴頭41〇、 420和430。這降低了當信號從噴頭控制單元7〇()傳輸到噴 頭410、420和430時產生的雜訊所引起的信號失真。 圖11為顯示圖2和圖3中所示的喷頭控制單元7〇〇的 圖。圖12為顯示圖π中所示的控制模組的立體圖，圖u 為顯示圖12 +所示的控制模組的戴面圖。參相n至圖 13，噴頭控制單元700包括殼體72〇和多個（第—至第三） 控制模組740a、740b和740c。殼體720可以配置於門架 2〇〇的端部的頂側上（參考圖控制模組74〇&、74〇b和 740c配置在殼體72〇中。控制模組74〇a、74〇b和“ο。分 別控制喷頭410、420和430 (參考圖2)。例如，第一控制 模組740a控制第一噴頭4〗〇 ’第二控制模组74%控制$二 噴碩42〇 ’和第三控制模組7撕控制第三嘴頭伽。 第一至第三控制模組740a、74%和74〇c具有相同的 結構，由此現以第一控制模組74〇a作為例示進行說明。第 了，制模組74Ga包括控制板742和盒744。控制板742可 以是構造成控制第-噴頭41Q的喷嘴（未顯示）的液晶排 放動作的電路板。控制板742可以透過調節施加到第 頭410的壓電器件（未顯示）的電壓來控制第—噴頭梢 的噴嘴（未顯示）的液滴排量。 、、 第一噴頭410的噴嘴可以劃分為組並且基於組進行控 21/38 201118480 制。控制板742的數目可以對應於組的數目。例如，如果 第一喷頭410包括256個噴嘴（256個噴嘴），全部256個 噴嘴可以作為一組由單個控制板742控制；或者以128個 噴嘴為一組並且使用兩個控制板742 ;或者64個喷嘴為一 組並且可以使用四個控制板742。可選地，全部256個喷嘴 可以由256個控制板742分別地控制。 盒744收納控制板742。盒744透過滑動進出框架722 而被裝配到框架722或從框架722拆卸。現在將說明盒744 的一個示例性結構。盒744具有平坦的門745。手柄745-1 被設置於門745的一側，即被設置於該平坦的門745的外 側。控制板收納部747被設置於門745的内側。控制板收 納部747包括側壁747a和.747b'以及底壁747c。側壁747a 和747b被配置於門745的内側的左側和右側並且垂直於門 745的内側。底壁747c連接側壁74%和74几的底側。多 個槽749沿著側壁鳩和747b的内面垂直地配置，用於 接收控制板742。 用以控制第一噴頭410的控制板742被收納在盒744 中，以形成第一控制模組740a，並且第一控制模組74如被 收納在配置於門架2〇〇上的殼體72〇中。第二控制模組鳩 和第二控制模組740c也被收納在殼體720中。 乂以此’用以控制喷頭410、420和430的控制板742被 分組為控制模組74〇a、74〇b和74〇c。由此，噴頭41〇、42〇 和430和喷頭控制單元7〇〇能夠易於維修和保持。 (液晶排量測量單元） 曰液晶排量測量單元800測量喷頭410、420和430的液 晶排量。詳細地說，對於各個喷頭410、420和430，液晶 22/38 201118480 排量測量單元800測量全部噴嘴的液晶排量。以此，每個 喷頭410、420和430的噴嘴（未顯示）能夠被目視檢測。 即，如果喷頭410、420和430中的任一個的液晶排量大於 參考值，則認為喷頭的至少一個喷嘴異常。 液晶排量測量單元800可以配置於基部（B)的基板支 撲單元100這一側。液晶排量測量單元800可以包括第一 至第三液晶排量測量單元800a、800b和800c。第一液晶排 量測量單元800a測量噴頭410的液晶排量，第二液晶排量 測量單元800b測量噴頭420的液晶排量，和第三液晶排量 測量單元800c測量喷頭430的液晶排量。 喷頭410、420和430可以由門架移動單元3〇〇和噴頭 移動單元500在第一方向（I)和第二方向（11：)上被移動 到液晶排量測量單元800上方的位置。噴頭移動單元5〇〇 可以沿第三方向（III)移動噴頭410、420和430以調節喷 頭410、420和430和液晶排量測量單元8〇〇之間的垂直距 離。 在第一至第三液晶排量測量單元8〇〇a、8〇〇b和8〇此 中，將以第一液晶排量測量單元800a作為例示進行說明。 圖14為顯示圖2和圖3中所示第一液晶排量測量單元8〇加 的截面圖。圖為顯示圖14中所示的液晶接收單元^ 的平面圖’和圖16是沿圖15的線A_A，戴取的戴面圖。 參考圖14至圖16,第-液晶排量測量單元8〇〇 重量測量單元820、液晶接收單元84〇、和傳送單元 重量測量單it 820測量液晶接收單元8則重量和^ 晶接收單A 840白勺液晶的重量。重量測量單元82〇可以為 能夠測量微克（kg)重量的電子天平。 ”'、 23/38 201118480 收從ΐ:=Γ4Μ皮置於重量測量單元820上並且接 :導:議。容請可以為頂侧具有開口二::: 合β 842包括底壁842a和從底壁_的邊 伸的側壁_。止動件842c被設置於_的外表面^ ，晶接收單元840插入傳送板（下面說明）的孔中（下: 並且上下移動時，液晶接收單元84G相對於傳送板 的垂直位置由於止動件842e而能夠被固定。止動件略 =絲1傾斜，使得其能夠與傳送板的孔的内面（斜面）接 合。容器842可以由防靜電絕緣材料比如陶曼材料形成。 由石夕形成的接觸部843被配置於容器842的側壁_ 側。當容器842向上移動以接收從喷頭41〇 #放的液 接觸部843與喷頭410的喷嘴面接觸。 導流器m從容器842的錢842a向容器842的開口 的頂，向上突起則丨導從喷頭排放的液晶流。導流器 844 Is近其向上伸展可以逐漸變細並且沿著喷頭仙的嘴嘴面 的長度f向延伸。例如，導流器844具有三角形截面，並 且導流器844的頂端可以光滑地彎曲。 、如圖I6所示，從41〇排放的液晶落到導流器844的頂 端並且沿著導流H 844的斜面向下流動。總體上，液晶以 Μ克（pg)為單位排放，由此液晶易於浮在空氣中。但是， 如果液晶沿著導流器844流動，則能夠阻止液晶的浮動。 傳运單元860包括傳送板862和驅動單元864。在液 晶透過喷頭410排放時為阻擋噴頭41〇和液晶接收單元 840之間的氣流，傳送板862提升液晶接收單元84〇以使 接觸部843與噴頭41㈣喷嘴面接觸。另外，當測量液晶 24/38 201118480 排量時，傳送單元860降低其中 、 =’使_收單元_能夠被置於=== =送板862被水平地配置於重量測量單以 =穿過傳送板船形成孔861以接收液晶接收單元⑽ =谷U42。孔861的中心與重量測量單元82〇的中心對 木二，以-種方式傾斜，使得隨其向下的伸展而變窄。 畜傳达板862上下移動時，孔⑹的斜的内面盘容哭842 件似的傾斜底面接合。由於止動件略的傾斜 底面與孔的斜的内面接合，容器％ 量單元820的中心對準。 “直里剃 驅動單元864升降傳送板862。驅動單元_可以包括 驅，構件比如氣缸。在本例示中，氣㈣傳送軸可以連接 到傳送板862。 圖17為顯示液晶排量測量單元8〇〇的操作的圖。參 考圖14至圖17 ’液晶接收單元84〇被置於重量測量單元 820上，其中液晶接收單元84〇被插入傳送板的孔弘】 中。在本狀態中，如果驅動單元864提升傳送板862，則 傳送板862的孔861的斜面與容器842的止動件842c的 傾斜底面接合，並且容器842的中心與重量測量單元82〇 的中心對準。然後，驅動單元864進一步提升傳送板8幻， 使得容器842的接觸部843能夠與喷頭41〇的喷嘴面接 觸。如果容器842的接觸部843與噴頭41〇的噴嘴面接觸， 則從噴頭410排放的液晶會落到容器842上而不會受周圍 氣流的干擾。落在容器842上的液晶沿著導流器844的斜 25/38 201118480 面向下流動。 在液晶完全從噴頭410排放後，驅動單元864降低傳 送板862以將容器842置於重量測量單元820上。在容器 842被置於重量測量單元82〇上後，傳送板862被進一步降 低。然後’重量測量單元820測量液晶接收單元840和液 晶接收單元840中所接收的液晶的總重。透過從該測量的 總重減去液晶接收單元840的重量能夠計算出所排放的液 晶的量。並且由此，可以肉眼確定喷頭410的喷嘴（未顯 示）的狀態。 (喷嘴檢測單元） 噴嘴檢測單元900透過光學檢測法可以分別單獨地檢 測喷頭410、420和430的噴嘴。透過液晶排量測量單元8〇〇 的目視檢測，如果確定喷頭410、420和430的喷嘴異常， 則使用喷嘴檢測單元900可以分別單獨地檢測全部噴嘴。 喷嘴檢測單元900可以配置於基部（B)的基板支撐單 元100側。喷頭410、420和430可以透過門架移動單元3〇〇 和噴頭移動單元500在第一方向（I)和第二方向（II)上 移動。喷頭移動單元500可以在第三方向（III)上移動噴 頭410、420和430以調節喷頭410、420和430與嘴嘴檢 測單元900之間的垂直距離。 圖18為顯示圖2和圖3中的噴嘴檢測單元900和喷頭 清潔單元1000的圖。參考圖18，喷嘴檢測單元900包括 第一噴嘴檢測構件920、第一驅動構件940、第二喷嘴檢測 構件960和第二驅動構件980。第一喷嘴檢測構件920檢 測液晶是否從喷頭410、420和430的喷嘴排放。即，第一 噴嘴檢測構件920檢測喷頭410、420和430的喷嘴是否堵 26/38 201118480 塞。第-驅動構# 940 a喷嘴的排列方向移 測構件920。第二喷嘴檢測構件_檢測喷嘴的狀/ 著噴:的排列方向移動第二喷嘴二 構件960。在圖18中’噴嘴被配置於第二方 第-噴嘴檢測構件920包括池部922 : 接收部似。池部922可以為在頂側具和: 部922接收透過噴頭410、42〇和_㈣ =f = =液晶。發光部924被配置於池部922的頂彻㈤:個側 邊處，先接收部926被配置於池部922的頂側的另一侧邊 處以朝向發光部924。發光部924輸出光信號，光接" 926接收來自發光部924的光信號。透過噴頭41〇、似和 430的喷嘴排放的液晶透過發光部924和光接收部gw之間 的區域，從而能夠基於光接收部926所接收到的光量確^ 液晶是否落下。如果確錢晶正常落下，贱夠^喷^ 410、420和430的喷嘴（未顯示）未被堵塞。 第一驅動構件940包括引導構件942、滑動件944、和 驅動單元946。引導構件942在基部（B)上沿第二方向（11) 延伸。驅動單元946比如線性馬達可以配置在滑動件944 中。滑動件944由驅動單元946驅動。滑動件944可以沿 著引導構件942在第二方向（n)上線性地移動。池部922 被配置於滑動件944中。由此，池部922能夠透過滑動件 944在第二方向（Π)上的線性移動而在第二方向上 被線性地移動。 第二噴嘴檢測構件％0包括框架962、照明器％4和 照相機966。框架962可以沿第二方向（〗〗）配置在接近於 第一喷嘴檢測構件920的池部922的位置。照明器964和 27/38 201118480 …、相機966被配置於框架962。照明器細照日 噴頭41〇、42〇和43〇的噴嘴面，並且照相機％6對由= 器964所照明的噴頭410、420和43〇的喷嘴面成像，= 取喷頭4U)、420和430的喷嘴的圖像。基於喷嘴的ς 定喷嘴是否被適當地排列。 崎the distance. S The second movable unit 540 includes a guiding member 542, a slider 544, a detector 546, and a controller 548. The guiding member 542 is coupled to the movable plate 526 of the first movable unit 520 to guide the movement of the movable member 544 in the third direction (ΙΠ). The slider 544 is coupled to the guiding member 542 in a linearly movable state, and a linear driving unit such as a linear motor (not shown) may be disposed in the slider 544. The head 41G is coupled to the slider 544 so that the head 410 can move in the third direction (in) by linear movement of the slider 544 in the third direction (ιι). The detector 546 can be configured to the gantry 200' for detecting the distance between the head 41 〇 and the substrate (S). The detector % can be the laser sensing boundary. The controller 548 generates a control corresponding to the detection of the detection signal of $546 and transmits the control signal to the linear timing disposed in the slider 544 to control the operation of the linear motor. If it is determined that the distance between the head 410 and the substrate (s) exceeds a predetermined base based on the detection result of the detector tear, the controller 548 controls the operation of the linear motor (not shown): 15/38 201118480 The distance from the substrate (s). (Liquid Crystal Supply Unit) The liquid crystal supply unit 6A includes a liquid crystal supply module 620 and a pressure adjustment module 640. The liquid crystal supply module 62A and the pressure regulating module 64A can be coupled to the gantry 200. The liquid crystal supply module 62 receives the liquid crystal from the liquid crystal supply portion % (refer to Fig. 1) and supplies the liquid crystal to the heads 410, 42. The pressure adjustment module 640 maintains the liquid crystal supply module 62A at a positive or negative pressure and adjusts the pressure of the liquid crystal supply module 620. Fig. 9 is a view showing the liquid crystal supply unit 6A shown in Figs. 2 and 3, and Fig. 10 is a partially enlarged view showing the first bubble filtering member 63 () shown in Fig. 9. In Fig. 2, Fig. 9, and Fig. 1, the liquid crystal supply module 62 is disposed on the gantry 200. For example, the liquid crystal supply module 62A may be disposed at the center of the top side of the gantry 2''. Hey. The shower heads 41, 420, and 430 can be connected to the liquid crystal supply module 620 through a centralized connection method that allows liquid communication. That is, the heads 410, 420, and 430 can receive liquid crystals from a single liquid crystal supply module 620, and the internal pressures of the heads 41, 42A, and 43 can be controlled by a single liquid crystal supply module 620. The liquid crystal supply module 620 includes a liquid crystal cell 622 and a first bubble filtering member 630. The liquid crystal cell 622 stores the liquid crystal received from the liquid crystal supply portion 5 and supplies the liquid crystal to the heads 410, 420, and 430. The liquid crystal cell 622 can be cylindrically opened >. The liquid crystal cell 622 may include a top wall 622a and a bottom wall 622b that face each other in the vertical direction, and a side wall 622c that connects the edges of the top wall 622a and the bottom wall 622b. The inlet portion 623, the collecting port portion 624, the pressure regulating port portion 625, and the liquid level sensing port portion 626 are provided on the top wall 622a of the liquid crystal cell 622. The liquid crystal supply member 7A of the liquid supply unit 16/38 201118480 is connected to the inlet portion 623 so that the liquid crystal supply member 70 can supply the liquid crystal via the inlet portion 623. The bubble collecting member 80 of the liquid crystal supply portion 50 is connected to the collecting port portion 624 so that the bubble can be discharged from the liquid crystal cell 622 through the collecting port portion 624. The pressure regulating module 640 is coupled to the pressure regulating port 625 such that gas can be supplied to the pressure regulating module 640 through the pressure regulating port 625 or discharged from the pressure regulating module 640 through the pressure regulating port 625. A level sensor (not shown) is disposed at the level sensing port 626 to detect the level of the liquid crystal in the liquid crystal cell 622. The first to second liquid crystal supply port portions 627a, 627b, and 627c are provided to the bottom wall 622b of the liquid crystal cell 622. The number of the first to third liquid crystal supply port portions 627a, 627b, and 627c may correspond to the number of the heads 410, 420, and 430. The liquid crystal is supplied to the heads 410, 420, and 430 through the first to third liquid crystal supply port portions 627a, 627b, and 627c. One end of the first liquid crystal supply line 621a is connected to the first liquid crystal supply port portion 627a, and the other end of the first liquid crystal supply line 621a is connected to the head 41〇. One end of the second liquid crystal supply line 621b is connected to the second liquid crystal supply port portion 627b, and the other end of the second liquid crystal supply line 621b is connected to the head 420. One end of the third liquid crystal supply line 621c is connected to the third liquid crystal supply port portion 027c, and the other end of the third liquid crystal supply line 621& is connected to the head 430. The liquid crystal cell 622 can be detachably mounted to the gantry 2 (8). For example, the bracket 628 can be coupled to the outer surface of the side wall 622c of the liquid crystal cell 622, and the truss 628 can be screwed to the gantry 2 〇〇. The first bubble filtering member 630 may be disposed in the liquid crystal cell 622. The first bubble filtering member 630 removes air bubbles from the liquid crystal supplied from the liquid crystal supply portion 5 to the liquid crystal in the liquid crystal cell 622. The first bubble filtering member 630 has a shape of a plate and is horizontally disposed in the liquid crystal box milk 17/38 201118480, and the inside of the liquid, the 622 is divided into an upper region and a lower region at the position of the iw-pack filter member The side of the 630 #edge is in contact with the inner surface of the side wall 622c of the liquid crystal cell 622. A plurality of filter holes are formed in the first bubble passing member 630. The bore 632 may have the shape of a capillary whose size increases in the downward direction to prevent air bubbles from passing through the filter hole 632. The fluid and crystal components of the liquid crystal can pass through the button 632, but the bubbles do not pass through the filter 'hole 63>; the liquid crystal and crystal components of the liquid crystal pass through the filter holes 632 in the direction from the top end 632a of the filter, the hole 632. In addition, the liquid crystal and crystal components of the liquid crystal can also pass through the filter and the hole in the direction from the bottom end 632b of the air 63^ to the top end. The pressure regulating die, group _ can be connected to the door frame. The pressure regulating module _ can maintain the liquid crystal cell 622 at a positive or negative pressure. For example, it is possible to form a wire through a supply gas, and it is possible to form a rolling force by a true (four) force. When the apricot nozzle cleaning unit 1_cleans the nozzle, the movable module _ can be: the liquid crystal supply module 620 applies a positive pressure, and # does not perform the liquid crystal general processing, the pressure adjustment module 640 can apply a negative to the liquid crystal supply module (four) Press to prevent the liquid crystal from falling from the nozzle of the surface. The inflation line 642 can be coupled to the pressure adjustment port 625 of the liquid crystal chamber 622, and the pressure adjustment unit 644 can be applied to the inflation line 642. # As shown in Fig. 1, the liquid crystal supply portion 5'' can be disposed as a portion separated from the liquid crystal discharge unit 10. The liquid crystal supply portion 5 includes a liquid crystal supply source 52, a pressing member 60, a liquid crystal supply member 70, and a bubble collecting member 8. For example, the liquid crystal supply source 52 may be cylindrical, and the liquid crystal may be filled in the liquid crystal supply 52. The pressing member 6A applies air pressure to the liquid crystal supply source 52. Then, the liquid crystal collapsed in the liquid crystal supply source 52 is supplied to the liquid crystal cell 622 through the liquid crystal supply member 70 by the pressure applied by the pressing member (9). The liquid crystal supply member 70 includes a liquid crystal supply line 72, a particle passing structure 18/38 201118480 74, and a second bubble filtering member 76. One end of the liquid crystal supply line 72 is connected to the liquid crystal supply source 52' and the liquid crystal supply line 72 (four) is terminated. It is connected to the inlet portion 623 of the liquid crystal cell 622. The particulate filter member 74 and the _ gas #76 are disposed along the liquid crystal supply line 72. The sag supply line 72 flows to the liquid crystal of the liquid crystal cell 622 to remove particles. The member 76 removes air bubbles from the liquid crystal flowing through the liquid crystal supply line 72 to the liquid crystal cell 622. Due to the bubble collecting member 80, the air bubbles blocked by the first bubble filtering member 630 disposed in the liquid crystal cell 622 can be removed from the liquid crystal cell. The upper region of 622 is collected to the liquid crystal supply source 52. The bubble collecting member 8 includes a bubble collecting line 82 and an exhaust member 84. One end of the bubble collecting line 82 is connected to the liquid crystal supply source 52' and the other end of the bubble collecting line 82 is connected to A collecting port portion 624 is disposed in the top wall 622a of the liquid crystal cell 622. The exhaust member 84 is disposed on the bubble collecting line 82. The exhaust member 84 also adds a negative to the upper portion of the liquid crystal cell 622 to receive the liquid. The bubble is collected in the case 622. Hereinafter, how the liquid crystal is supplied from the liquid crystal supply portion 5 to the shower heads 410, 420, and 430. The pressing member 60 applies air pressure to the liquid crystal supply source 52. Then, the liquid crystal supply source is filled. The liquid crystal in 52 is supplied to the liquid crystal cell 622 through the liquid crystal supply member 70 due to the air pressure applied by the pressing member 60. At this time, the particulate filter member 74 removes particles from the liquid crystal, and the second bubble filtering member 76 moves from the liquid crystal. The fluid and crystal components of the liquid crystal supplied into the liquid crystal cell 622 can pass through the first bubble filtering member 630 and fill the lower region of the liquid crystal cell 622. That is, the first bubble filtering member 630 removes bubbles from the liquid crystal. The liquid crystal is continuously supplied to the liquid crystal cell 622, whereby the liquid level of the liquid crystal in the liquid 19/38 201118480 crystal case 622 rises. As the liquid level of the liquid crystal rises, the bubble of the first bubble transition member (4)_ The liquid crystal surface is moved upward. If the liquid level of the liquid crystal reaches a predetermined value, the exhaust member 84 of the bubble collecting member 80 applies a negative pressure to the liquid crystal cell 622, so that bubbles can be collected from the liquid crystal cell. The bubble of (4) of the bubble collecting member 8G is returned to the liquid crystal supply source 52. The lower region of the liquid crystal cell 622 is filled with liquid crystal, which is filtered to remove H by the liquid crystal through the first to third liquid daily supply The mouth portions 627a, 627b, and 627c and the first to third liquid crystal distribution lines, (4) and 621c are supplied to the heads 41, 42, and 43. - Through the above steps, the liquid crystal from which the bubbles have been removed is supplied The nozzles 410 420 and 430' can thereby prevent the nozzles of the heads 41, 42 and Liu from being blocked by air bubbles. (Nozzle Control Unit) The head control unit controls the liquid crystal discharge operation of the heads 410, 420, and 43A. The head control unit may be disposed at a position of the liquid crystal discharge unit ι close to the heads 410, 420, and 430. For example, the nozzle control unit -700 can be disposed at the end of the gantry 2 (8). In the present embodiment, the head control unit 7GG is disposed at the end of the gantry. However, the position of the control unit 700 is not limited to this. Although not shown, the printhead control unit 700 is electrically coupled to the showerheads 4-10, 420, and 430 to apply control signals to the showerheads 41A, and 43A. = a nozzle 41G, 420 and 430 may comprise a nozzle (not shown) thereof. A piezoelectric device (not shown), and the head control unit 7〇〇 can control the amount of droplets applied to the pressure f 以 nozzle. In the liquid crystal coating device of the device, the nozzle is controlled by the nozzle control unit, and the nozzle control unit is disposed separately from the nozzle on the outside of the device 20/38 201118480 or disposed on the inside of the device but away from the nozzle. Thus, when the control signal is transmitted from the head control unit to the head, the control signal is susceptible to noise* interference. However, in a specific embodiment of the present invention, the head control unit 7 is disposed on the gantry 200 to which the heads 410, 420, and 430 are attached. Therefore, the head control unit 7 can be connected to the heads 41, 420, and 430 using a shorter cable. This reduces signal distortion caused by noise generated when signals are transmitted from the head control unit 7 () to the nozzles 410, 420, and 430. Figure 11 is a view showing the head control unit 7A shown in Figures 2 and 3. Figure 12 is a perspective view showing the control module shown in Figure π, and Figure u is a perspective view showing the control module shown in Figure 12+. Phase n to Figure 13, the nozzle control unit 700 includes a housing 72A and a plurality of (first to third) control modules 740a, 740b, and 740c. The housing 720 may be disposed on the top side of the end of the gantry 2 (refer to the control modules 74 〇 & 74 〇 b and 740 c in the housing 72 。. The control modules 74 〇 a, 74 〇b and “ο. control the nozzles 410, 420, and 430, respectively (refer to FIG. 2). For example, the first control module 740a controls the first nozzle 4 〇 'the second control module 74% control $ two spray master 42 The first control module 740a, 74% and 74〇c have the same structure, and the first control module 74〇a First, the module 74Ga includes a control board 742 and a case 744. The control board 742 may be a circuit board configured to control the liquid crystal discharge action of the nozzle (not shown) of the first head 41Q. The control board 742 may The droplet discharge amount of the nozzle (not shown) of the first nozzle tip is controlled by adjusting the voltage applied to the piezoelectric device (not shown) of the first head 410. The nozzles of the first head 410 can be divided into groups and based on the group. Control 21/38 201118480. The number of control boards 742 can correspond to the number of groups. For example, if A showerhead 410 includes 256 nozzles (256 nozzles), all 256 nozzles can be controlled as a group by a single control panel 742; or in groups of 128 nozzles and using two control panels 742; or 64 nozzles One set and four control boards 742 can be used. Alternatively, all 256 nozzles can be individually controlled by 256 control boards 742. The cassette 744 houses the control board 742. The cassette 744 is assembled to the frame 722 by sliding in and out of the frame 722. Or detached from the frame 722. An exemplary structure of the cartridge 744 will now be described. The cartridge 744 has a flat door 745. The handle 745-1 is disposed on one side of the door 745, that is, on the outside of the flat door 745. The control panel housing portion 747 is disposed inside the door 745. The control panel housing portion 747 includes side walls 747a and .747b' and a bottom wall 747c. The side walls 747a and 747b are disposed on the left and right sides of the inner side of the door 745 and perpendicular to the door 745 The bottom wall 747c connects the bottom sides of the side walls 74% and 74. A plurality of slots 749 are vertically disposed along the inner faces of the side walls 747 and 747b for receiving the control board 742. The control board for controlling the first head 410 742 received The first control module 740a is formed in the box 744, and the first control module 74 is received in the housing 72〇 disposed on the gantry 2〇〇. The second control module 鸠 and the second The control module 740c is also housed in the housing 720. The control panel 742 used to control the showerheads 410, 420, and 430 is grouped into control modules 74A, 74B, and 74A. Thus, the spray heads 41A, 42A and 430 and the spray head control unit 7 can be easily repaired and maintained. (Liquid Discharge Measuring Unit) The liquid crystal displacement measuring unit 800 measures the liquid crystal displacement of the heads 410, 420, and 430. In detail, for each of the heads 410, 420, and 430, the liquid crystal 22/38 201118480 displacement measuring unit 800 measures the liquid crystal displacement of all the nozzles. Thereby, the nozzles (not shown) of each of the heads 410, 420 and 430 can be visually detected. That is, if the liquid crystal displacement of any of the heads 410, 420, and 430 is larger than the reference value, it is considered that at least one nozzle of the head is abnormal. The liquid crystal displacement measuring unit 800 may be disposed on the side of the substrate supporting unit 100 of the base (B). The liquid crystal displacement measuring unit 800 may include first to third liquid crystal displacement measuring units 800a, 800b, and 800c. The first liquid crystal displacement measuring unit 800a measures the liquid crystal displacement of the head 410, the second liquid crystal displacement measuring unit 800b measures the liquid crystal displacement of the head 420, and the third liquid crystal displacement measuring unit 800c measures the liquid crystal displacement of the head 430. The heads 410, 420, and 430 can be moved to a position above the liquid crystal displacement measuring unit 800 by the gantry moving unit 3 and the head moving unit 500 in the first direction (I) and the second direction (11:). The head moving unit 5 移动 can move the heads 410, 420 and 430 in the third direction (III) to adjust the vertical distance between the heads 410, 420 and 430 and the liquid crystal displacement measuring unit 8A. In the first to third liquid crystal discharge measuring units 8a, 8B, and 8B, the first liquid crystal displacement measuring unit 800a will be described as an example. Figure 14 is a cross-sectional view showing the first liquid crystal displacement measuring unit 8 shown in Figures 2 and 3. The figure shows a plan view ' of the liquid crystal receiving unit ^ shown in Fig. 14 and Fig. 16 is a worn side view taken along line A_A of Fig. 15. Referring to FIGS. 14 to 16, the first liquid crystal discharge measuring unit 8 〇〇 weight measuring unit 820, the liquid crystal receiving unit 84 〇, and the transfer unit weight measuring unit 820 measure the liquid crystal receiving unit 8 and the weight receiving sheet A 840 The weight of the liquid crystal. The weight measuring unit 82A may be an electronic balance capable of measuring a microgram (kg) weight. "', 23/38 201118480 ΐ ΐ: = Γ 4 Μ 置于 置于 重量 重量 重量 重量 重量 重量 重量 重量 重量 重量 重量 置于 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The side wall of the wall _. The stopper 842c is disposed on the outer surface of the _, and the crystal receiving unit 840 is inserted into the hole of the conveying plate (described below) (bottom: and moving up and down, the liquid crystal receiving unit 84G is opposed to The vertical position of the transfer plate can be fixed by the stopper 842e. The stopper is slightly = the wire 1 is inclined so that it can be engaged with the inner face (bevel) of the hole of the transfer plate. The container 842 can be made of an antistatic insulating material such as Tauman. The material is formed. The contact portion 843 formed by the stone eve is disposed on the side wall_side of the container 842. When the container 842 is moved upward to receive the liquid contact portion 843 discharged from the head 41, the nozzle surface of the head 410 is in contact with the nozzle. The flower m protrudes upward from the money 842a of the container 842 toward the top of the opening of the container 842, and then directs the liquid crystal flow discharged from the shower head. The deflector 844 Is extending near its upward direction can be tapered and along the nozzle The length f of the mouth surface extends. For example, the deflector 844 There is a triangular cross section, and the tip end of the deflector 844 can be smoothly curved. As shown in Fig. I6, the liquid crystal discharged from 41 落 falls to the tip end of the deflector 844 and flows downward along the inclined surface of the flow guiding H 844. In general, the liquid crystal is discharged in units of grams (pg), whereby the liquid crystal is liable to float in the air. However, if the liquid crystal flows along the deflector 844, the floating of the liquid crystal can be prevented. The transport unit 860 includes the transfer plate 862. And a driving unit 864. When the liquid crystal transmitting head 410 discharges, the airflow between the nozzle 112〇 and the liquid crystal receiving unit 840 is blocked, and the conveying plate 862 raises the liquid crystal receiving unit 84〇 so that the contact portion 843 is in contact with the nozzle 41(4) nozzle surface. When measuring the liquid crystal 24/38 201118480 displacement, the transfer unit 860 lowers, = ' enables the unit_ can be placed === = the send plate 862 is horizontally arranged on the weight measurement sheet to = pass the transfer plate The boat forms a hole 861 to receive the liquid crystal receiving unit (10) = valley U42. The center of the hole 861 and the center of the weight measuring unit 82 are tilted in such a manner as to be narrowed as it extends downward. Board 862 moves up and down At the same time, the slanted inner face of the hole (6) engages with a sloping bottom surface engagement. Since the slightly inclined bottom surface of the stop engages the oblique inner face of the hole, the center of the container % unit 820 is aligned. The unit 864 lifts the transfer plate 862. The drive unit_ may include a drive member such as a cylinder. In this illustration, the gas (four) transfer shaft may be coupled to the transfer plate 862. Fig. 17 is a view showing the operation of the liquid crystal discharge measuring unit 8A. Referring to Figs. 14 to 17 'the liquid crystal receiving unit 84' is placed on the weight measuring unit 820, wherein the liquid crystal receiving unit 84 is inserted into the hole of the conveying plate. In the present state, if the driving unit 864 lifts the conveying plate 862, the slope of the hole 861 of the conveying plate 862 is engaged with the inclined bottom surface of the stopper 842c of the container 842, and the center of the container 842 and the center of the weight measuring unit 82〇 quasi. Then, the driving unit 864 further lifts the conveying plate 8 so that the contact portion 843 of the container 842 can come into contact with the nozzle face of the head 41〇. If the contact portion 843 of the container 842 is in contact with the nozzle face of the head 41, the liquid crystal discharged from the head 410 falls onto the container 842 without being disturbed by the surrounding air current. The liquid crystal falling on the container 842 flows downward along the slope 25/38 201118480 of the deflector 844. After the liquid crystal is completely discharged from the head 410, the drive unit 864 lowers the transfer plate 862 to place the container 842 on the weight measuring unit 820. After the container 842 is placed on the weight measuring unit 82, the transfer plate 862 is further lowered. Then, the weight measuring unit 820 measures the total weight of the liquid crystal received in the liquid crystal receiving unit 840 and the liquid crystal receiving unit 840. The amount of the discharged liquid crystal can be calculated by subtracting the weight of the liquid crystal receiving unit 840 from the total weight of the measurement. And thereby, the state of the nozzle (not shown) of the head 410 can be visually determined. (Nozzle Detection Unit) The nozzle detection unit 900 can individually detect the nozzles of the heads 410, 420, and 430 by optical detection. Through the visual inspection of the liquid crystal displacement measuring unit 8A, if it is determined that the nozzles of the heads 410, 420, and 430 are abnormal, the nozzle detecting unit 900 can individually detect all the nozzles individually. The nozzle detecting unit 900 may be disposed on the substrate supporting unit 100 side of the base (B). The heads 410, 420, and 430 are movable in the first direction (I) and the second direction (II) through the gantry moving unit 3 〇〇 and the head moving unit 500. The head moving unit 500 can move the heads 410, 420, and 430 in the third direction (III) to adjust the vertical distance between the heads 410, 420, and 430 and the mouth detecting unit 900. Figure 18 is a view showing the nozzle detecting unit 900 and the head cleaning unit 1000 of Figures 2 and 3. Referring to Fig. 18, the nozzle detecting unit 900 includes a first nozzle detecting member 920, a first driving member 940, a second nozzle detecting member 960, and a second driving member 980. The first nozzle detecting member 920 detects whether or not the liquid crystal is discharged from the nozzles of the heads 410, 420, and 430. That is, the first nozzle detecting member 920 detects whether the nozzles of the heads 410, 420, and 430 are blocked by the 26/38 201118480 plug. The first drive structure 940 a is arranged in the direction of the nozzle to move the member 920. The arrangement direction of the second nozzle detecting member_detecting nozzle/spraying: moves the second nozzle two member 960. In Fig. 18, the nozzle is disposed on the second side. The nozzle detecting member 920 includes a pool portion 922: a receiving portion. The pool portion 922 can be on the top side and: the portion 922 receives the through nozzles 410, 42A and _(four) = f = = liquid crystal. The light-emitting portion 924 is disposed at the top (five) side of the pool portion 922, and the first receiving portion 926 is disposed at the other side of the top side of the pool portion 922 so as to face the light-emitting portion 924. The light emitting unit 924 outputs an optical signal, and the optical connection 926 receives the optical signal from the light emitting unit 924. The liquid crystal discharged through the nozzles 41 and 315 nozzles passes through the region between the light-emitting portion 924 and the light-receiving portion gw, so that the liquid crystal can be dropped based on the amount of light received by the light-receiving portion 926. If it is true that the crystals fall normally, the nozzles (not shown) that are sufficient to spray ^ 410, 420, and 430 are not blocked. The first driving member 940 includes a guiding member 942, a slider 944, and a driving unit 946. The guiding member 942 extends in the second direction (11) on the base (B). A drive unit 946 such as a linear motor may be disposed in the slider 944. The slider 944 is driven by the drive unit 946. The slider 944 can linearly move in the second direction (n) along the guiding member 942. The pool portion 922 is disposed in the slider 944. Thereby, the pool portion 922 can be linearly moved in the second direction by the linear movement of the slider 944 in the second direction (Π). The second nozzle detecting member %0 includes a frame 962, a illuminator %4, and a camera 966. The frame 962 may be disposed in a position close to the pool portion 922 of the first nozzle detecting member 920 in the second direction. Illuminators 964 and 27/38 201118480 ..., camera 966 are disposed in frame 962. The illuminator closely follows the nozzle faces of the day nozzles 41, 42 and 43 and the camera %6 images the nozzle faces of the heads 410, 420 and 43 that are illuminated by the = 964, = nozzles 4U), 420 And an image of the 430 nozzle. Whether the nozzle-based nozzles are properly aligned. Saki
第二驅動構件98〇包括滑動件984和驅動單元986。。 動單元986比如線性馬達可以配置在滑動件卯4中。.1區 滑動件984由驅動單元986驅動。滑動件984可 著引導構件942在第二方向（11)上被線性地移動。第二= 嘴檢測構件960的框架962被配置在滑動件984上。由此貝 框架962、照明态964和照相機966可以透過在第二方向（J 上線性地移動滑動件984而被在第二方向（π)上線性地移) 動。 在通常的檢測方法中，噴嘴檢測單元是固定的，並 在喷_铋測單元上方沿第二方向（H )分別地移動喷頭的同 時，檢測喷頭的喷嘴的排列狀態和堵塞。但是，由於嘴頭 的各自的移動是受限的，因此不能適當地進行噴頭的噴嘴 檢測。但是，根據本發明，由於喷嘴檢測單元9〇〇在第二 方向（II)上被線性地移動，因此能夠適當地進行喷嘴檢測。 在上述的示例中，第—噴嘴檢測構件920和第二噴嘴 檢測構件960被分別地驅動。但是，如圖19中所示，可以 使用共用的驅動構件990沿第二方向（11)線性地移動地驅 動第一喷嘴檢測構件920和第二喷嘴檢測構件960。 (噴頭清潔單元） 喷頭清潔單元1〇〇〇進行请潔處理和抽吸處理。在清潔 處理中，噴頭410、420和430中接收的一些液晶在高壓下 28/38 201118480 被喷射。在清潔處理後進行抽吸處理以透過抽吸移除喷頭 410、420和430的噴嘴面上殘留的液晶。 喷頭清潔單元1〇〇〇包括池部922、液晶抽吸構件1020 和收集構件1〇4〇。池部922可以由喷頭清潔單元1〇〇〇和噴 嘴檢測單元900的第一喷嘴檢測構件92〇共用。在本示例 中’池部922可以接收在清潔處理期間透過喷頭410、420 和430排放的液晶。另外，在噴頭41〇 ' 42〇和430的噴嘴 的液晶排放動作被檢測時、即當檢測噴頭41〇、420和43〇 的堵塞時，池部922可以接收透過喷頭41〇、420和430排 放的液晶。 液晶抽吸構件1020可以連接到池部922的外壁以抽吸 殘留在喷頭410、420和430的喷嘴面上的液晶並且將該抽 吸的液晶接收在池部922中。 收集構件1040收集從池部922排放的液晶。收集構件 1040包括殼體1042和收集容器1044。殼體1〇42被配置在 池。P 922下方以收納收集容器1〇44。收集容器1〇44可以透 過滑動進出殼體1042而安裝到殼體丨〇42或從殼體1〇42拆 卸。從池部922排放的液晶被收集在收集容器1〇44中。所 收集的液晶被再利用。 以此，在喷頭清潔處理（清潔處理和抽吸處理）期間 和噴嘴檢測處理（嘴嘴堵塞檢測處理）期間，從喷頭41〇、 42〇和43〇排放和移除的液晶被儲存在單個的池部似中， 並且被收集在單個的收集容器1G44中。因此，該裝置能夠 被有效地使用。 根據本發明，噴嘴的處理液排放間距能夠根據基 圖元間距適當地調節。 29/38 201118480 勻地S到：本發明，配向液膜或者液晶膜能夠更為均 另外，根據本發明，能夠減小裝置的覆蓋區。 杜專^!^題被認為是詞㈣，而不是限定性的，申 涵蓋在本發_相和範_的全部修 改改進和其他具體實施例。由此，在 =來i’㈣r㈣對於申請專利範圍的最寬的可允ϊ ，釋來確疋，而不局限於或受限於先前的詳細說明。 【圖式簡單說明】 相應的圖式係用以進-步理解本發明，且圖式被併入 =明書中並構成本說明書的-部分。圖式顯示出了 =例示健體實關，並且與說日轉—起心 明的原理。在圖式中： 不知 圖1為#員示喷墨型液晶塗布裝置的圖. 圖2為顯示圖i中示出的液晶排玫裝置的立體圖. 圖3為顯示圖i中示出的液晶排放|置的平: 圖4為顯示圖3中示出的第一驅動單元的圖.’ 圖5為顯示圖3中示出的第二驅動單元的圖| 圖6為顯示門架的線性移動和旋轉的圖. 圖；圖7為顯示圖2和圖3中示出的噴頭移動單元的側視 ==圖7中Γ的第一可移動單元的正視圖； 圖9為圖2和圖3中所示的液晶供 兄圆 圖10為顯示圖9中所示的第一氣、由、兀、圖， 大視圖； &麵_件的局部放 圖11為圖2和圖3示出的嘴頭控制單元的圖； 30/38 201118480 圖12為顯示圖π +的控制模組的立體圖； 圖13為顯出目12的控制模组的截面圖； 截面^ ; 4為圖2和圖3中所示的液晶排量測量單元的 二】5:顯示圖14中的液晶收納單元的平面圖； ^ |:、/〇圖15的線Α·Α，截取的截面圖； 二17為顯示液晶排量測量單元的操作的圖； 清潔單和圖3中所示的喷嘴檢測單元和喷頭 示的為顯村嘴檢測單元和噴頭清潔單摘另-個例 【主要元件符號說明】 1塗布裝置 1 〇液晶排放裝置 20基板承載部 载入部 40卸载部 5〇液晶供給部 52供給源 60加壓構件 7〇液晶供給構件 72供給線 74顆粒過濾構件 76第二氣泡過濾構件 8〇氣泡收集構件 82氣泡收集線 31/38 201118480 84排氣構件 90主控部 100支撐單元 110支撐板 120旋轉驅動構件 130線性驅動構件 132滑動件 134引導構件 200門架 210導執 300門架移動單元 310第一驅動單元 312滑動件 314第一旋轉支撐構件 315導軌 317滑動件 318第一線性驅動構件 320第二驅動單元 322連接構件 324第二旋轉支撐構件 325導軌 327滑動件 328第二線性驅動構件 400喷頭 410、420、430 喷頭 500喷頭移動單元 32/38 201118480 520第一可移動單元 522a、522b 導軌 524a、524b滑動件 526可移動板 540第二可移動單元 542引導構件 544滑動件 546檢測器 548控制器 600液晶供給單元 620液晶供給模組 621a第一液晶配給線 621b第二液晶配給線 622液晶箱 622a頂壁 622b底壁 623入口部 624收集口部 625壓力調節口部 626液面感應口部 627a第一液晶供給口部 627b第二液晶供給口部 627c第三液晶供給口部 628托架 630第一氣泡過濾構件 33/38 201118480 632濾孔 632a頂端 632b底端 640壓力調節模組 642充氣線 644壓力調節單元 700喷頭控制單元 720殼體 740a、740b、740c 控制模組 742控制板 744盒 745門 745-1 柄 747控制板收納部 747a、747b 側壁 747c底壁 749槽 800液晶排量測量單元 800a第一液晶排量測量單元 800b第二液晶排量測量單元 800c第三液晶排量測量單元 820重量測量單元 840液晶接收單元 842容器 842a底壁 842b側壁 34/38 201118480 842c止動件 843接觸部 844導流器 860傳送單元 861孔 862傳送板 864驅動單元 900喷嘴檢測單元 920第一喷嘴檢測構件 922池部 924發光部 926光接收部 940第一驅動構件 942引導構件 944滑動件 946驅動單元 960第二噴嘴檢測構件 962框架 964照明器 966照相機 980第二驅動構件 984滑動件 986驅動單元 1000喷頭清潔單元 1020液晶抽吸構件 1040收集構件 35/38 201118480 1042殼體 1044收集容器 B基部 S基板 (I) (II) (III)方向The second drive member 98A includes a slider 984 and a drive unit 986. . A moving unit 986 such as a linear motor may be disposed in the slider 卯4. The .1 zone slider 984 is driven by a drive unit 986. The slider 984 can be linearly moved in the second direction (11) by the guiding member 942. Second = the frame 962 of the mouth detecting member 960 is disposed on the slider 984. Thus, the bay frame 962, the illumination state 964, and the camera 966 can be moved linearly in the second direction (π) by moving the slider 984 linearly in the second direction (J). In the usual detecting method, the nozzle detecting unit is fixed, and the nozzles are arranged in the second direction (H), respectively, while moving the heads in the second direction (H), and the arrangement state and clogging of the nozzles of the heads are detected. However, since the respective movements of the mouth are limited, the nozzle detection of the head cannot be properly performed. However, according to the present invention, since the nozzle detecting unit 9 is linearly moved in the second direction (II), nozzle detection can be appropriately performed. In the above example, the first nozzle detecting member 920 and the second nozzle detecting member 960 are separately driven. However, as shown in Fig. 19, the first nozzle detecting member 920 and the second nozzle detecting member 960 can be driven to move linearly in the second direction (11) using the common driving member 990. (head cleaning unit) The nozzle cleaning unit 1 performs cleaning and suction processing. In the cleaning process, some of the liquid crystals received in the heads 410, 420, and 430 are ejected under high pressure 28/38 201118480. A suction process is performed after the cleaning process to remove the liquid crystal remaining on the nozzle faces of the heads 410, 420, and 430 by suction. The head cleaning unit 1 includes a pool portion 922, a liquid crystal suction member 1020, and a collecting member 1A. The pool portion 922 can be shared by the head cleaning unit 1A and the first nozzle detecting member 92 of the nozzle detecting unit 900. In this example, the 'pool portion 922' can receive liquid crystal that is discharged through the showerheads 410, 420, and 430 during the cleaning process. Further, when the liquid crystal discharge operation of the nozzles of the heads 41'' 42 and 430 is detected, that is, when the heads 222, 420, and 43 are blocked, the pool portion 922 can receive the discharge through the nozzles 41, 420, and 430. LCD. The liquid crystal suction member 1020 may be connected to the outer wall of the pool portion 922 to suction the liquid crystal remaining on the nozzle faces of the shower heads 410, 420, and 430 and receive the sucked liquid crystal in the pool portion 922. The collecting member 1040 collects the liquid crystal discharged from the pool portion 922. Collection member 1040 includes a housing 1042 and a collection container 1044. The housing 1〇42 is disposed in the pool. Below the P 922, a collection container 1〇44 is housed. The collection container 1 〇 44 can be attached to or detached from the housing 丨〇 42 by sliding in and out of the housing 1042. The liquid crystal discharged from the pool portion 922 is collected in the collection container 1 to 44. The collected liquid crystals are reused. Thereby, liquid crystals discharged and removed from the heads 41, 42, and 43 are stored during the head cleaning process (cleaning process and suction process) and the nozzle detecting process (mouth plugging process). The individual pools are in the middle and are collected in a single collection container 1G44. Therefore, the device can be used effectively. According to the present invention, the treatment liquid discharge pitch of the nozzle can be appropriately adjusted in accordance with the pitch of the base element. 29/38 201118480 Leveling S to: In the present invention, the alignment liquid film or the liquid crystal film can be more uniform, and according to the present invention, the coverage area of the device can be reduced. Dugong^!^ is considered to be the word (four), and not limiting, and covers all modifications and other specific embodiments of the present invention. Thus, the broadest permissibility of the scope of the patent application at = i' (iv) r (d) is expressly stated and is not limited or limited to the foregoing detailed description. BRIEF DESCRIPTION OF THE DRAWINGS The corresponding drawings are used to further understand the present invention, and the drawings are incorporated in the specification and constitute a part of the specification. The schema shows that = the example of a healthy body, and the principle of saying that the day is turning. In the drawings: I do not know Figure 1 is a diagram showing the ink-jet type liquid crystal coating device. Figure 2 is a perspective view showing the liquid crystal discharge device shown in Figure i. Figure 3 is a view showing the liquid crystal discharge shown in Figure i Figure 4 is a view showing the first drive unit shown in Figure 3. Figure 5 is a view showing the second drive unit shown in Figure 3 | Figure 6 is a diagram showing the linear movement of the gantry and Figure 7 is a front elevational view showing the head moving unit shown in Figures 2 and 3 == the first movable unit of Figure 7 in Figure 7; Figure 9 is in Figure 2 and Figure 3. The liquid crystal for the brother figure 10 is shown in FIG. 9 showing the first gas, the 兀, the 图, the figure, the large view; the partial surface of the face plate 11 is the mouth shown in FIG. 2 and FIG. Figure of the head control unit; 30/38 201118480 Figure 12 is a perspective view showing the control module of Figure π +; Figure 13 is a cross-sectional view of the control module showing the object 12; Section ^; 4 is Figure 2 and Figure 3 The liquid crystal displacement measuring unit shown in the second section 5: shows the plan view of the liquid crystal storage unit in Fig. 14; ^ |:, / 〇 Figure 15 line Α · Α, cut-away sectional view; two 17 is to display the liquid crystal displacement measuring A diagram of the operation of the unit; the cleaning unit and the nozzle detecting unit and the head shown in FIG. 3 are shown as a display of the nozzle and the cleaning of the nozzle; and the example of the main component is described. 1 Coating device 1 〇 Liquid crystal Discharge device 20 substrate carrying portion loading portion 40 unloading portion 5 〇 liquid crystal supply portion 52 supply source 60 pressing member 7 〇 liquid crystal supply member 72 supply line 74 particle filter member 76 second bubble filter member 8 〇 bubble collecting member 82 bubble collection Line 31/38 201118480 84 Exhaust member 90 Main control unit 100 Support unit 110 Support plate 120 Rotational drive member 130 Linear drive member 132 Slide 134 Guide member 200 Gantry 210 Guide 300 Gantry moving unit 310 First drive unit 312 Slider 314 first rotation support member 315 rail 317 slider 318 first linear drive member 320 second drive unit 322 connection member 324 second rotation support member 325 rail 327 slider 328 second linear drive member 400 nozzle 410, 420, 430 nozzle 500 nozzle moving unit 32/38 201118480 520 first movable unit 522a, 522b rail 524a, 524b slider 526 movable board 540 Movable unit 542 guiding member 544 slider 546 detector 548 controller 600 liquid crystal supply unit 620 liquid crystal supply module 621a first liquid crystal supply line 621b second liquid crystal supply line 622 liquid crystal box 622a top wall 622b bottom wall 623 entrance portion 624 collection Mouth portion 625 pressure regulating port portion 626 liquid level sensing port portion 627a first liquid crystal supply port portion 627b second liquid crystal supply port portion 627c third liquid crystal supply port portion 628 bracket 630 first bubble filtering member 33/38 201118480 632 filter hole 632a top end 632b bottom end 640 pressure regulating module 642 inflating line 644 pressure adjusting unit 700 head control unit 720 housing 740a, 740b, 740c control module 742 control board 744 box 745 door 745-1 handle 747 control board housing portion 747a 747b side wall 747c bottom wall 749 slot 800 liquid crystal displacement measuring unit 800a first liquid crystal displacement measuring unit 800b second liquid crystal displacement measuring unit 800c third liquid crystal displacement measuring unit 820 weight measuring unit 840 liquid crystal receiving unit 842 container 842a bottom Wall 842b side wall 34/38 201118480 842c stop 843 contact 844 deflector 860 transfer unit 861 hole 862 transfer plate 864 drive unit 900 nozzle detection Element 920 first nozzle detecting member 922 pool portion 924 light emitting portion 926 light receiving portion 940 first driving member 942 guiding member 944 slider 946 driving unit 960 second nozzle detecting member 962 frame 964 illuminator 966 camera 980 second driving member 984 sliding Piece 986 drive unit 1000 head cleaning unit 1020 liquid crystal suction member 1040 collection member 35/38 201118480 1042 housing 1044 collection container B base S substrate (I) (II) (III) direction