TW201117909A - Glass welding method - Google Patents

Glass welding method Download PDF

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Publication number
TW201117909A
TW201117909A TW099131732A TW99131732A TW201117909A TW 201117909 A TW201117909 A TW 201117909A TW 099131732 A TW099131732 A TW 099131732A TW 99131732 A TW99131732 A TW 99131732A TW 201117909 A TW201117909 A TW 201117909A
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TW
Taiwan
Prior art keywords
glass
heat input
input amount
laser light
glass layer
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TW099131732A
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Chinese (zh)
Inventor
Satoshi Matsumoto
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Hamamatsu Photonics Kk
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Publication of TW201117909A publication Critical patent/TW201117909A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26Sealing together parts of vessels
    • H01J9/261Sealing together parts of vessels the vessel being for a flat panel display
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06Joining glass to glass by processes other than fusing

Abstract

In the glass welding method of this invention, a glass layer 3 is melted by applying laser light having a first heat input quantity along a region intended for welding R. Then the glass layer 3 is melted by switching the heat input quantity when the melting ratio of the glass layer 3 in the direction approximately perpendicular to the traveling direction of the laser light L1 approaches 100% and applying the laser light having a second heat input quantity smaller than the first heat input quantity along the region intended for welding R. Consequently, glass members are welded with the glass layer 3 interposed therebetween. When the glass layer 3 is melted, the laser light absorptivity of the glass layer 3 sharply rises when the melting ratio of the glass layer 3 approaches 100%, but by the abovementioned switching of the heat input quantity, the glass layer 3 can be inhibited from falling into an excessive heat input state, and thus the occurrence of cracking of the glass members 4, 5 can be prevented.

Description

201117909 六、發明說明: 【發明所屬之技術領域】 本發明係關於-種將玻璃構件彼此熔接而製造玻璃炫接 體之玻璃熔接方法。 【先前技術】 作為上述技術領域中之先前之玻璃熔接方法,已知有如 下方法:將包含雷射光吸收性顏料之玻璃層以沿著熔接預 定區域之方式燒接於-玻璃構件上之後,使另—玻_件 經由玻璃層而重合於該玻璃構件上,並沿著熔接預定區域 照射雷射光,藉此將一玻璃構件與另一玻璃構件熔接(例 如參照專利文獻1 )。 先行技術文獻 專利文獻 專利文獻1 .曰本專利特表2006-524419號公報 【發明内容】 發明所欲解決之問題 然而,若藉由雷射光之照射將玻璃構件彼此熔接,則有 時玻璃構件會產生裂痕。 因此,本發明係鑒於上述情況而完成者,其目的在於提 供一種可製造可靠性較高之玻璃熔接體之玻璃熔接方法。 解決問題之技術手段 本發明者為達成上述目的反覆進行努力研究,結果發 現,於利用雷射光之照射之玻璃構件彼此之熔接中玻璃構 件產生裂痕之原因在於,如圖U所示,於照射雷射光時若 150763.doc 201117909 玻璃層之溫度超過熔點Tm,則玻璃層之雷射光吸收率急 遽變高。即’配置於玻璃構件彼此之間的玻璃層中,由於 玻璃料之粒子性等而引起超出雷射光吸收性顏料之吸收特 性之光散射’成為雷射光吸收率較低之狀態(例如,於可 見光下看起來泛白)。因此,若如圖12所示,以玻璃層之 恤度成為而於熔點Tm且低於結晶化溫度Tc之溫度Tp之方 式以雷射功率Ρ照射雷射光,則由於玻璃料之熔融而使粒 子性受到破壞等’顯著表現出雷射光吸收性顏料之吸收特 性’玻璃層之雷射光吸收率急遽變高(例如,於可見光下 看起來泛黑或泛綠)。藉此,玻璃層中引起預想以上之雷 射光之吸收’而由於熱輸入過多所引起之熱衝擊而導致玻 璃構件產生裂痕。 本發明者基於該見解進反覆進行研究而完成本發明。 即’本發明之玻璃熔接方法之特徵在於:其係將第1玻璃 構件與第2玻璃構件熔接而製造玻璃熔接體者,其包括以 下步驟:將包含雷射光吸收材及玻璃粉之玻璃層以沿著熔 接預疋區域之方式配置於第1玻璃構件上;及於使第2玻璃 構件經由玻璃層而重合於第1玻璃構件上之狀態下,藉由 沿著熔接預定區域照射具有第丨熱輸入量之第丨雷射光使玻 璃層溶融,於與第1雷射光之行進方向交又之方向上之玻 璃層之熔融率超過特定值時,自第丨熱輸入量切換為少於 第1熱輸入量之第2熱輸入量,並藉由沿著熔接預定區域照 射具有第2熱輸入量之第丨雷射光使玻璃層熔融,而將第1 玻璃構件與第2玻璃構件熔接。 150763.doc 201117909 該玻璃熔接方法中,於沿著熔接預定區域照射第丄雷射 光而使玻璃層熔融時,藉由沿著熔接預定區域照射具有第 1熱輸入量之第1雷射光而使玻璃層熔融,於與第】雷射光 之行進方向交又之方向上之玻璃層的熔融率超過特定值 時,藉由切換熱輸入量,沿著熔接預定區域照射具有少於 第1熱輸入量之第2熱輸入量之第丨雷射光,而使玻璃層熔 融,將第1玻璃構件與第2玻璃構件熔接。於該破璃層之熔 融時,若玻璃層之炫融率超過特定纟,則玻璃層之雷射光 吸收率急遽變高’之後’照射具有少於第i熱輸人量之第2 熱輸入量之第i雷射光’因此可抑止玻璃層成為熱輸入過 多之狀態。藉由此種熱輸入量之切換,即便藉由第i雷射 光之照射將第i玻璃構件與第2玻璃構件炼接,亦可防止玻 璃構件產生裂痕等玻璃構件破損。因此,根據該玻璃炫接 方法,可防止於第i玻璃構件及第2玻璃構件上產生裂痕, :製造可靠性較高之玻㈣接體。再者,所謂「熱輸入 里」,係第!雷射光於其照射區域所具有之能量密度。又, 所謂「玻璃層之㈣率」,係於與第if射光之行進方向交 :之方向上’「玻璃層之炼融部分之寬度」占「玻璃層之 整個寬度」之比例。 昭:發明之玻㈣接方法中,較佳為藉由使第以射光之 产:率降低而自第i熱輸人量切換為第㉘輸人量。於此 藉由照射功率之下降而進行熱輸入量之切換,因 切貫地自第1熱輸入量切換為第2熱輸入量。 月之玻璃炫接方法中,較佳為藉由使第^雷射光相 150763.doc 201117909 對於玻璃層之行進速度上升而自第丨熱輸人量切換為第2轨 輸入量。於此情形時,#由第i雷射光之行進速度之上升 而進行熱輸入量之切換,因此可切實地自第1熱輸入量切 換為第2熱輸人量。並且’由於使行進速度上升而進行切 換,故而可使玻璃層之固著所需之時間縮短。再者,所謂 「第1雷射光相對於玻璃層之行進速度」,係指第i雷射光 之相對行進速度,#包含第丨雷射光固定而玻璃層移動之 情形、玻璃層固定而第丨雷射光移動之情形、第丨雷射光及 玻璃層均移動之情形。 本發明之玻璃熔接方法中,較佳為於自第丨雷射光之照 射開始經過特定時㈣,自第丨熱輸人量㈣為第2熱輸二 量。於此情㈣,可利用控制預先所求出之特定時間等簡 易方法自第1熱輸入量容易地切換為第2熱輸入量。並且, 於相同構成之玻璃層之情形時,#第1#射光之照射條件 相同’則可使特定時間大致相同,因此可容易地使複數層 相同構成之玻璃層連續或同時熔融,而可提高製造效率。 本發明之玻璃熔接方法中,較佳為於自玻璃層所放射之 熱輻射光之強度上升至特定值時,自第丨熱輸入量切換為 第2熱輸入量。於此情形時,藉由對具有隨著玻璃層之熔 融率上升而遞增等關聯性的熱輻射光之強度進行檢測,可 正確地進行熱輸入量之切換。 本發明之玻璃熔接方法中,較佳為於由玻璃層所反射之 第1雷射光之反射光之強度下降至特定值時,自第丨熱輸入 量切換為第2熱輸入量。於此情形時,藉由對具有隨著玻 150763.doc 201117909 的反射光之強度進行檢 璃層之熔融率上升而遞減等關聯性 測,可正確地進行熱輸入量之切換 發明之效果 根據本發明, 【實施方式】 可製造可靠性較高之玻璃熔接體。 以下,參照圖式對本發明之較佳實施形態加以詳細說 月再者,各圖中對於相同或相當部分標註相同的符號, 省略重複之說明。 圖1係藉由本發明之玻璃熔接方法之一實施形態而製造 之:璃熔接體的立體圖。如圖i所示,玻璃熔接體經由 沿者溶接預定區域R而形成之玻璃層3,Μ㈣構件⑷ 玻璃構件)4與玻璃構件(第2玻_件)艰接而成者。玻璃 構件4、5例如為包含無驗玻璃且厚度為〜7 _的矩形板狀 之構件,熔接預定區域R係沿著玻璃構件4、5之外緣而設 疋成矩形環狀。玻璃層3例如包含低熔點玻璃(釩磷酸系玻 璃、鉛硼酸玻璃等)’且沿著熔接預定區域R而形成為矩形 環狀。 其次,對用於製造上述玻璃熔接體丨之玻璃熔接方法加 以說明。 首先’如圖2所示,藉由利用分注器或網版印刷等塗佈 玻料漿料,而沿著溶接預定區域R於玻璃構件4之表面4a形 成毀料層6。玻料漿料例如係將包含低熔點玻璃(釩磷酸系 玻璃、鉛硼酸玻璃等)之粉末狀之玻璃料(玻璃粉μ、氧化 鐵等無機顏料即雷射光吸收性顏料(雷射光吸收材)、乙酸 150763.doc 201117909 戍酯等有機溶劑、及於玻璃之軟化點溫度以下熱分解之樹 月曰成分(丙歸酸專)即黏合劑混練而成者。玻料漿料亦可為 將使預先添加有雷射光吸收性顏料(雷射光吸收材)之低溶 點玻璃成為粉末狀之玻璃料(玻璃粉)、有機溶劑、及黏合 劑混練而成者。即,漿料層6包含玻璃料2、雷射光吸收性 顏料、有機溶劑及黏合劑。 繼而,使漿料層6乾燥而除去有機溶劑,進 層6進行加熱而除去黏合劑,藉此沿著熔接預定區域r,使 玻璃層3固著於玻璃構件4之表面乜。再者,固著於玻璃構 件4之表面4a之玻璃層3係由於玻璃料2之粒子性等而引 起超出雷射光吸收性顏料之吸收特性之光散射,成為雷射 光吸收率較低之狀態(例如,於可見光下看起來泛白)。 繼而,如圖3所示,玻璃構件5經由玻璃層3而重合於固 著有玻璃層3之玻璃構件4。繼而,如圖4〜圖6所示,使聚 光點對準玻璃層3之溶接預定區域尺中之照射起始位置a, 開始照射雷射光(第1雲 雷射先)u,使照射沿著熔接預定區 或R向圖示箭頭之行進方向前進。 另外,如圖7所示,雷鉍也τ , & f ^L1具有寬度方向(與雷射光Ll 丁山向大致正交之方向)之中央部之溫度較高、且溫 度向兩端部變低的、、田疮 爲,_ 皿度分佈。因此’如圖6所示,自破璁 上,玻璃層丄 之行進方向大致正交之方向 例)大2 炫融部分之寬度占玻璃層3之整個寬度之比 =近零之照射起始位置A,至_緩緩上升而成為 率接近_之穩定區域之穩定區域起始位置 \50763.doc 201117909BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass fusing method for producing a glass splicing body by fusing glass members to each other. [Prior Art] As a prior art glass fusing method in the above technical field, there is known a method in which a glass layer containing a laser light absorbing pigment is fired on a -glass member along a predetermined region of fusion, so that Further, the glass member is superposed on the glass member via a glass layer, and irradiates the laser light along the predetermined region to be welded, thereby welding one glass member to the other glass member (for example, refer to Patent Document 1). PRIOR ART DOCUMENT PATENT DOCUMENT Patent Document 1 Patent Publication No. 2006-524419 SUMMARY OF THE INVENTION Problems to be Solved by the Invention However, if glass members are welded to each other by irradiation of laser light, sometimes glass members may be Cracks occur. Accordingly, the present invention has been made in view of the above circumstances, and an object thereof is to provide a glass fusing method capable of producing a highly reliable glass fusing body. MEANS FOR SOLVING THE PROBLEMS The present inventors have made intensive studies to achieve the above object, and as a result, have found that the glass member is cracked in the fusion of the glass members irradiated with the laser light, as shown in FIG. If the temperature of the glass layer exceeds the melting point Tm when the light is emitted, the laser light absorption rate of the glass layer is rapidly increased. In other words, in the glass layer disposed between the glass members, the light scattering that exceeds the absorption characteristics of the laser light absorbing pigment due to the particle property of the glass frit becomes a state in which the laser light absorption rate is low (for example, in visible light). It looks like white.) Therefore, as shown in FIG. 12, when the laser light is irradiated with laser power so that the glass layer has a melting point Tm and a temperature Tp lower than the crystallization temperature Tc, the particles are melted by the glass frit. The property is damaged, etc. 'significantly exhibits the absorption characteristics of the laser light absorbing pigment'. The laser light absorption rate of the glass layer is rapidly increased (for example, it appears black or green under visible light). Thereby, the absorption of the above-mentioned laser light is caused in the glass layer, and the glass member is cracked due to the thermal shock caused by the excessive heat input. The inventors of the present invention have completed the present invention based on this finding. That is, the glass welding method of the present invention is characterized in that the first glass member and the second glass member are welded to each other to produce a glass frit, and the method includes the steps of: forming a glass layer containing the laser light absorbing material and the glass frit. Disposed on the first glass member along the pre-twisting region; and in a state in which the second glass member is superposed on the first glass member via the glass layer, the third heat is irradiated along the predetermined region of the fusion The input amount of the third laser light melts the glass layer, and when the melting rate of the glass layer in the direction perpendicular to the traveling direction of the first laser light exceeds a certain value, the heat input amount is switched from the first heat input to less than the first heat. The second heat input amount of the input amount is obtained, and the first glass member and the second glass member are welded by irradiating the third layer of the laser light with the second heat input amount along the predetermined region to be welded. 150763.doc 201117909 In the glass fusing method, when the third layer of the first laser beam having the first heat input amount is irradiated along the predetermined region of the fusion when the third layer of the laser beam is irradiated by irradiating the thunder laser light along the predetermined region of the fusion bonding, the glass is irradiated. The layer is melted, and when the melting rate of the glass layer in the direction intersecting with the traveling direction of the laser light exceeds a specific value, by switching the heat input amount, the irradiation along the predetermined region of the fusion has less than the first heat input amount. The second heat input amount of the first laser light is melted, and the glass layer is melted to weld the first glass member and the second glass member. When the glass layer is melted, if the brightness of the glass layer exceeds a certain enthalpy, the laser light absorption rate of the glass layer is rapidly increased, and then the second heat input having less than the i-th heat input amount is irradiated. The i-th laser light can therefore suppress the glass layer from becoming too hot. By switching the heat input amount, even if the i-th glass member and the second glass member are welded by the irradiation of the i-th laser light, it is possible to prevent breakage of the glass member such as cracks in the glass member. Therefore, according to the glass splicing method, it is possible to prevent cracks from occurring in the i-th glass member and the second glass member, and to manufacture a highly reliable glass (four) joint. Furthermore, the term "in the heat input" is the energy density of the first laser light in the irradiation area. Further, the "fourth rate of the glass layer" is the ratio of the "width of the fused portion of the glass layer" to the "wide width of the glass layer" in the direction in which the direction of the i-thin light travels. In the glass (four) connection method of the invention, it is preferable to switch from the ith heat input amount to the 28th input amount by lowering the first light emission rate. Here, the switching of the heat input amount is performed by the decrease in the irradiation power, and the first heat input amount is switched to the second heat input amount. In the moon glass splicing method, it is preferable to switch from the second heat input amount to the second track input amount by increasing the traveling speed of the glass layer by the first laser light phase 150763.doc 201117909. In this case, # is switched by the increase in the traveling speed of the i-th laser light, so that the first heat input amount can be reliably switched from the first heat input amount to the second heat input amount. Further, since the switching is performed by increasing the traveling speed, the time required for fixing the glass layer can be shortened. In addition, the "speed of travel of the first laser light with respect to the glass layer" means the relative traveling speed of the i-th laser light, #includes the case where the third laser light is fixed and the glass layer moves, and the glass layer is fixed and the thunder is fixed. The case where the light is moved, the third laser light, and the glass layer are moved. In the glass fusing method of the present invention, it is preferable that the amount of heat input from the second enthalpy (four) is the second heat transfer amount after the irradiation of the laser light from the second ray is passed. In the case of (4), it is possible to easily switch from the first heat input amount to the second heat input amount by a simple method such as controlling the specific time obtained in advance. Further, in the case of the glass layer of the same configuration, the irradiation conditions of the #1#-lighting light are the same, the specific time can be made substantially the same, so that the glass layer of the same layer can be easily melted continuously or simultaneously, and can be improved. Manufacturing efficiency. In the glass fusing method of the present invention, it is preferable that the heat input amount from the glass layer is switched to the second heat input amount when the intensity of the heat radiation emitted from the glass layer rises to a specific value. In this case, by detecting the intensity of the heat radiation having an increase in the correlation with the increase in the melting rate of the glass layer, the heat input amount can be accurately switched. In the glass fusing method of the present invention, it is preferable that the intensity of the reflected light of the first laser light reflected by the glass layer is changed to a specific value, and the amount of heat input from the second heat is switched to the second heat input amount. In this case, by measuring the correlation between the decrease in the melting rate of the glass layer with the intensity of the reflected light of the glass 150763.doc 201117909, it is possible to accurately switch the heat input amount. Invention, Embodiments A glass frit having high reliability can be manufactured. In the following, the preferred embodiments of the present invention will be described in detail with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a glass fusing body manufactured by an embodiment of the glass fusing method of the present invention. As shown in Fig. i, the glass frit is rigidly joined to the glass member 3, the crucible member (4) glass member 4, and the glass member (the second glass member) formed by the predetermined region R. The glass members 4, 5 are, for example, members having a rectangular plate shape having a thickness of not more than -7 Å, and the welding predetermined region R is formed in a rectangular ring shape along the outer edges of the glass members 4, 5. The glass layer 3 contains, for example, a low-melting glass (vanadium phosphate glass, lead borate glass, etc.) and is formed in a rectangular ring shape along the welding predetermined region R. Next, the glass fusing method for manufacturing the above-mentioned glass fusing body will be described. First, as shown in Fig. 2, the smeared layer 6 is formed on the surface 4a of the glass member 4 along the predetermined region R where the coating is applied by means of a dispenser or screen printing. The glass frit is, for example, a powdery glass frit containing a low-melting glass (vanadium phosphate glass, lead boric acid glass, etc.) (a laser light μ, an inorganic pigment such as iron oxide, that is, a laser light absorbing material (laser light absorbing material)) , acetic acid 150763.doc 201117909 organic solvent such as decyl ester, and the thermal decomposition of the glass below the softening point of the temperature of the tree glutinous rice ingredients (acrylic acid), that is, the binder is mixed. The glass paste can also be A low-melting point glass to which a laser light absorbing pigment (laser light absorbing material) is added in advance is a powdery glass frit (glass powder), an organic solvent, and a binder. That is, the slurry layer 6 contains a glass frit. 2. A laser light absorbing pigment, an organic solvent and a binder. Then, the slurry layer 6 is dried to remove the organic solvent, and the layer 6 is heated to remove the binder, whereby the glass layer 3 is formed along the predetermined region r of the fusion. The surface layer of the glass member 4 is fixed to the surface of the glass member 4. Further, the glass layer 3 fixed to the surface 4a of the glass member 4 is diffused beyond the absorption characteristics of the laser light absorbing pigment due to the particle property of the glass frit 2 or the like. a state in which the laser light absorption rate is low (for example, it appears white under visible light). Then, as shown in FIG. 3, the glass member 5 is superposed on the glass member 4 to which the glass layer 3 is fixed via the glass layer 3. Then, as shown in FIG. 4 to FIG. 6, the light-converging point is aligned with the irradiation start position a in the predetermined area of the glass layer 3, and the laser beam (first cloud-ray first) u is started to be irradiated. Advancing along the welding predetermined area or R in the direction of travel of the illustrated arrow. Further, as shown in Fig. 7, the Thunder also has a width direction (a direction substantially orthogonal to the direction of the laser light L1 Dingshan) The temperature in the central part is high, and the temperature is lower at both ends, and the field sore is _ the degree of distribution. Therefore, as shown in Fig. 6, the direction of travel of the glass layer is substantially positive. Example of the direction of intersection) The ratio of the width of the large portion of the fused portion to the entire width of the glass layer 3 = the starting position A of the near-zero illumination, and the steadily rising to the stable region starting position of the stable region with a rate close to _ \50763.doc 201117909

存在特疋距離,自照射起始位置A至穩定區域起始位置B :成為破璃層3於寬度方向之一部分進行炼融的不穩定 區域。 忒不穩定區域中,玻璃層3之熔融未遍及整個寬度方向 而進仃’因此雷射光吸收率未完全變高。目此’如圖8所 不,雷射光L1係以於對穩定區域之玻璃層3進行照射時結 晶化的較強之照射條件例如雷射光L1之照射功率為i〇w^ 第1熱輸入量而開始照射。再者,所謂熱輸入量,可以下 述數式⑴所表示,本實施形態中,行進速度或光點直徑為 固疋’因此熱輸入量根據照射功率而發生變化。 熱輸入量(J/mm2)=功率密度(J.S/mm2卜行進速度(s)·., (i) 其後,若至穩定區域起始位置B,玻璃層3成為遍及整個 寬度方向而熔融之穩定區域,則玻璃層3之溫度遍及寬度 方向而成為熔點Tm以上,由於玻璃料2之熔融而使粒子性 文到破壞等,顯著表現出雷射光吸收性顏料之吸收特性, 玻璃層3之雷射光吸收率遍及整個寬度方向而急遽變高, 熔融率變得接近100%(例如,於可見光下看起來泛累戈泛 綠)。藉此,玻璃層3中引起預想以上之雷射光“之吸收, 而對玻璃層3之熱輸入變得過多。 因此,如圖8所示,於經過玻璃層3之熔融率變得接近 unm之特定時間X之後(或其之前),即,玻璃層3剛於整個 寬度方向超過熔點Tm而雷射光吸收率急遽變高之後,便 進行使雷射光L1之照射功率自照射功率1〇w下降至照射功 率8 W之切換,將熱輸入量自照射功率為1〇 w之第丨熱輸 150763.doc 201117909 入夏切換為照射功率為8 w之第2熱輸入量。本實施形態 中預先針對各玻璃層3之構成求出特定時間χ,以控制預 先所求出之特定時間χ等簡易方法自第1熱輸人量切換為第 2熱輸入量。χ,於相同構成之玻璃層之情形時,相對於 相同熱輸入量成為大致相同之熔融程度,因此若雷射光^ 之照射條件相同,則可使特定時間X大致相同。 其後,以作為第2熱輸入量之照射功率8 w進行雷射照 射’直至沿著炼接預定區域尺返回至照射起始位置入為 止,繼續利用雷射光L1之對玻璃層3之照射後,結束玻璃 構件4與玻璃構件5之熔接。藉此,玻璃層3及其周邊部分 (玻璃構件4、5之表面4a、5a部分)炼融再固化,玻璃構件 與玻璃構件5熔接(溶接中,亦有時玻璃層3炼融,而玻璃 構件4、5未熔融),從而製造玻璃熔接體丨。再者,亦可視 需要而以對不穩定區域再照射雷射光£1而成為穩定區域之 方式使雷射照射重疊。 藉由進行此種切換熱輸入量之控制來進行玻璃構件4與 玻璃構件5之炼接,可抑制玻璃層3之過度加熱,防止玻璃 構件4、5發生熱&。再者,溶接後之玻璃層3係由於玻璃 料2之熔融而使粒子性受到破壞等,顯著表現出雷射光吸 性顏料之吸收特性,成為雷射光吸收率較高之狀態(例 如,於可見光下看起來渗黑或泛綠)。 所述在用於製造玻璃溶接體1之玻璃溶接方法 中於/σ著炫接預定區域R照射雷射光L1而使玻璃層3熔融 時’错由沿著溶接預定區域R照射具有第1熱輸入量之雷射 150763.doc 201117909 光L1而使玻璃層3熔融,於與雷射光li之行進方向大致正 交之方向上之玻璃層3之熔融率接近1〇〇%時切換熱輸入 1,並藉由沿著熔接預定區域尺照射具有少於第丨熱輸入量 之第2熱輸入量之雷射光L1而使玻璃層3熔融,從而將玻璃 構件4與玻璃構件5熔接。於該玻璃層3之熔融時,若玻璃 層3之熔融率接近1〇〇%,則玻璃層3之雷射光吸收率將急 遽變尚,但之後由於改為照射具有少於第1熱輸入量之第2 熱輸入里之雷射光L1 ’因此可抑止玻璃層3成為熱輸入過 多之狀態。藉由此種熱輸入量之切換,即便藉由雷射光L1 之照射將玻璃構件4與玻璃構件5熔接,亦可防止於玻璃構 件4、5上產生裂痕等玻璃構件4、5破損之情形。因此,根 據=玻璃熔接方法,可防止玻璃構件4、5之破損,可製造 可罪性較高之玻璃溶接體1。 又’上述玻璃炫接方法中,#由使雷射光u之照射功率 降低,而自第^熱輸人量切換為第2熱輸人量。由於藉由此 種照射功率之下降而進行熱輸入量之切換,故而可切實地 自第1熱輸入量切換為第2熱輸入量。 述玻璃溶接方法中,於自雷射光U之照射開始經 過特定時間x時炼融率接近1嶋,而自W熱輸入量切換 為第2熱輸入量。因此,能夠以控制預先所求出之熔融率 接近⑽%之特定時間U W ^ 门之間易方法,而自第1熱輸入量容 ^地切換為第2熱輸入量。並且,於相同構成之玻璃層之 ,月形時’ 射扣之照射條件相同,射將料時⑽ 设為大致㈣,因此可容易地使複數層相同構成之玻璃層 150763.doc 201117909 3連續或同時熔融,可大幅提高製造複數個玻璃熔接體i時 之製造效率。 然而’在有機EL(electroluminescence,電致發光)封裝 體等中,由於容器本身為小型,故而使用更薄型化之玻璃 構件4、5,因此作為玻璃構件4、5之材料,為使裂紋難以 產生而多選擇低膨脹玻璃。此時,為使玻璃層3之線膨脹 係數配合玻璃構件4、5之線膨脹係數(即,為降低玻璃層3 之線膨脹係數)’使玻璃層3中含有大量之包含陶究等之填 料。若使玻璃層3中含有大量之填料’則於雷射光L1之照 射之前後玻璃層3之雷射光吸收率將進一步大幅變化。因 此’上述玻璃炼接方法於選擇低膨脹玻璃作為玻璃構件 4、5之材料之情形時尤其有效。 本發明並不限定於上述實施形態。 例如’上述實施形態中’係於自雷射光L丨之照射起始位 置A經過特定時間X時熔融率接近ι〇〇%,而自第1熱輸入量 切換為第2熱輸入量’但亦可如圖9所示,於自玻璃層3所 放射之熱輻射光之強度上升至特定值q時,自第1熱輸入量 切換為第2熱輸入量。於此情形時,可藉由對具有隨著玻 璃層3之溶融率上升而遞增之關聯性的熱輻射光之強度進 行檢測’而正確地進行熱輸入量之切換。又,亦可如圖1〇 所示,於以玻璃層3所反射之雷射光L1之反射光之強度下 降至特定值P時’自第1熱輸入量切換為第2熱輸入量。於 此情形時,可藉由對具有隨著玻璃層3之熔融率上升而遞 減之關聯性的反射光之強度進行檢測,而正確地進行熱輸 150763.doc •12· 201117909 入量之切換。 又,上述實施形態中,係藉由變更雷射光L〖之照射功率 而控制對玻璃層3之熱輸入量,但亦可如上述數式(丨)所 示,藉由使雷射光L1之照射功率固定,使雷射光L1之相對 照射速度(即,雷射光L1相對於玻璃層3之行進速度)上升 而進行對玻璃層3之熱輸入量之切換。於此情形時,由於 藉由雷射光L1之行進速度之上升而進行熱輸入量之切換, 故而可切實地自第1熱輸入量切換為第2熱輸入量。並且, 由於使行進速度上升而進行切換,故而可使玻璃構件4與 玻璃構件5之熔接所需之時間縮短。再者,於藉由使行進 速度上升而進行熱輸入量之切換之情形,多半包含速度之 加速過程之情形,因此就抑止玻璃層3之結晶化之觀點而 言,較佳為於成為應進行切換之時序(經過特定時間X時, 或熱輻射光或反射光之強度成為特定值)之前開始行進速 度之切換控制,於實際上應進行切換之時序時完成切換。 又,上述實施形態中,使雷射光u相對於固定之玻璃構 件4、5行進’但只要雷射光£1相對於各玻璃構件*、5相對 行進即可,亦可固定雷射扣而使玻璃構件4、5㈣或 亦可使玻璃構件4、5與雷射光L1均移動。 3 又,上述實施形態中,係於熔融率成為1〇〇%等特定值 時進行熱輸入量之切換,但只要玻璃層3適當地溶融 例如亦可於熔融率成為9〇%等特定值時進行熱輸入量之切 換’而切實地抑止玻璃層3之結晶化。再者,若於溶融率 軚低時切換熱輸入量’則切換後之雷射光之吸收率不充 150763.doc 13 201117909 分,有無法維持破璃層之熔融處理之虞,因此用於進行熱 輸入量之切換之熔融率之特定值較佳為8 0 %。 雷射光L1之照射亦可自玻璃構件4側進行,或亦可 自玻璃構件4之相反側進行。 產業上之可利用性 根據本發明,可製造可靠性較高之玻璃炫接體。 【圖式簡單說明】 係藉由本發明之玻璃熔接方法之一實施形態而製造 之玻璃熔接體之立體圖。 圖2係用以對用於製造圖1之玻璃熔接體之玻璃熔接方法 進行說明之立體圖。 圖3係用以對用於製造圖以玻璃溶接體之玻璃溶接方法 進行說明之立體圖。 圖4係用以對用於製造圖1之玻璃炫接體之玻璃溶接方法 進行說明之剖面圖。 圖係用以對用於製造圖i之玻璃溶接體之玻璃溶接方法 進行說明之剖面圖。 圖6係用以對用於製造圖以玻璃料體之玻璃熔接方法 進行說明之平面圖。 圖7係表示雷射照射之溫度分佈之圖。 圖8係表示雷射光之照射條件之切換時序之圖。 圖9係表示雷射光之照射條件之其他切換時序之圖。 圖W係表示雷射光之照射條件之其他切換時序之圖。 圖11係表示玻璃層之溫度與雷射光吸收率之關係之圖 150763.doc • 14· 201117909 表。 圖12係表示雷射功率與玻璃層之溫度之關係之圖表。 【主要元件符號說明】 1 玻璃熔接體 2 玻璃料(玻璃粉) 3 玻璃層 4 玻璃構件(第1玻璃構件) 4a 表面 5 玻璃構件(第2玻璃構件) 5 a 表面 6 漿料層 A 照射起始位置 B 穩定區域起始位置 L1 雷射光(第1雷射光) R 熔接預定區域 150763.doc -15 -There is a characteristic distance from the irradiation start position A to the stable region start position B: an unstable region in which the glass layer 3 is fused in one of the width directions. In the unstable region of the crucible, the melting of the glass layer 3 does not propagate throughout the entire width direction, so the laser light absorption rate is not completely high. As shown in Fig. 8, the laser light L1 is a strong irradiation condition for crystallizing the glass layer 3 in the stable region, for example, the irradiation power of the laser light L1 is i〇w^ the first heat input amount. And start to shine. In addition, the heat input amount can be expressed by the following formula (1). In the present embodiment, the traveling speed or the spot diameter is solid 疋, so the heat input amount changes depending on the irradiation power. Heat input amount (J/mm2) = power density (JS/mm2 Bu travel speed (s)·., (i) Thereafter, if it reaches the stable region start position B, the glass layer 3 is melted throughout the entire width direction. In the stable region, the temperature of the glass layer 3 is equal to or greater than the melting point Tm, and the particle material is destroyed by the melting of the glass frit 2, and the absorption characteristics of the laser light absorbing pigment are remarkably exhibited. The light absorption rate increases sharply throughout the entire width direction, and the melting rate becomes close to 100% (for example, it appears to be broadly green under visible light). Thereby, the glass layer 3 causes the absorption of the above-mentioned laser light. And the heat input to the glass layer 3 becomes excessive. Therefore, as shown in Fig. 8, after the specific time X after the melting rate of the glass layer 3 becomes close to unm (or before), that is, the glass layer 3 After the entire width direction exceeds the melting point Tm and the laser light absorption rate is rapidly increased, the irradiation power of the laser light L1 is switched from the irradiation power 1 〇 w to the irradiation power 8 W, and the heat input amount is 1 from the irradiation power. 〇w's third heat loss 15 0763.doc 201117909 The summer is switched to the second heat input amount of the irradiation power of 8 w. In the present embodiment, the specific time χ is obtained for each glass layer 3 in advance, so as to control the specific time 预先 obtained in advance. The method is switched from the first heat input amount to the second heat input amount. When the glass layer of the same composition is used, the melting degree is substantially the same with respect to the same heat input amount, so if the irradiation conditions of the laser light are the same Then, the specific time X can be made substantially the same. Thereafter, the laser irradiation is performed at the irradiation power of 8 w as the second heat input amount until the return to the irradiation start position along the predetermined area of the refining, and the use of the thunder is continued. After the irradiation of the glass layer 3 by the light beam L1, the glass member 4 and the glass member 5 are welded together, whereby the glass layer 3 and its peripheral portions (the portions 4a and 5a of the glass members 4 and 5) are fused and resolidified. The glass member is welded to the glass member 5 (in the case of fusion, the glass layer 3 may be fused, and the glass members 4 and 5 may not be melted), thereby producing a glass fusion body 丨. Further, it may be necessary to treat the unstable region. Photo The laser light is superimposed by the laser light to become a stable region. By performing the control of the switching heat input amount, the glass member 4 and the glass member 5 are welded together, thereby suppressing excessive heating of the glass layer 3 and preventing it. The glass members 4 and 5 generate heat and light. Further, the glass layer 3 after the fusion is caused by the melting of the glass frit 2 to deteriorate the particle properties, and the absorption characteristics of the laser light-absorbing pigment are remarkably exhibited, and the laser light absorption is obtained. a state in which the rate is high (for example, blackening or greening under visible light). In the glass-melting method for producing the glass-melted body 1, the laser beam L1 is irradiated with a predetermined region R in the stimuli. When the glass layer 3 is melted, the glass layer 3 is melted in a direction substantially perpendicular to the traveling direction of the laser light li by irradiating the laser 150763.doc 201117909 light L1 having the first heat input amount along the predetermined region R to be melted. The heat input 1 is switched when the melting rate of the upper glass layer 3 is close to 1%, and the glass is irradiated by irradiating the laser light L1 having a second heat input amount smaller than the second heat input amount along the predetermined area of the fusion bonding. Layer 3 melts, thereby Glass member 4 and the glass member 5 welded. When the glass layer 3 is melted, if the melting rate of the glass layer 3 is close to 1%, the laser light absorption rate of the glass layer 3 will be rapidly changed, but thereafter, the irradiation has less than the first heat input amount. The laser light L1' in the second heat input can therefore suppress the glass layer 3 from being in a state of excessive heat input. By switching the heat input amount, even if the glass member 4 and the glass member 5 are welded by the irradiation of the laser light L1, the glass members 4 and 5 such as cracks in the glass members 4 and 5 can be prevented from being damaged. Therefore, according to the glass welding method, the glass members 4 and 5 can be prevented from being damaged, and the glass fused body 1 having a high degree of sin can be produced. Further, in the above-described glass splicing method, # is reduced by the irradiation power of the laser light u, and is switched from the second heat input amount to the second heat input amount. Since the amount of heat input is switched by the decrease in the irradiation power, it is possible to reliably switch from the first heat input amount to the second heat input amount. In the glass melting method, the smelting rate is close to 1 经 at a specific time x from the irradiation of the laser light U, and is switched from the W heat input amount to the second heat input amount. Therefore, it is possible to switch from the first heat input amount to the second heat input amount by controlling the method in which the previously obtained melting rate approaches (10)% of the specific time U W ^ gate. Further, in the glass layer of the same configuration, the irradiation conditions of the shots are the same in the shape of the moon, and the (10) when the shots are shot is set to be substantially (four), so that the glass layers 150763.doc 201117909 3 of the same layer can be easily formed continuously or Simultaneous melting can greatly increase the manufacturing efficiency when manufacturing a plurality of glass frits i. However, in an organic EL (electroluminescence) package or the like, since the container itself is small, the glass members 4 and 5 having a thinner thickness are used. Therefore, as the material of the glass members 4 and 5, cracks are hard to occur. And choose low-expansion glass. At this time, in order to match the linear expansion coefficient of the glass layer 3 with the linear expansion coefficient of the glass members 4 and 5 (that is, to lower the linear expansion coefficient of the glass layer 3), the glass layer 3 contains a large amount of filler containing ceramics and the like. . If the glass layer 3 contains a large amount of filler, the laser light absorption rate of the glass layer 3 will be further greatly changed before the irradiation of the laser light L1. Therefore, the above glass refining method is particularly effective in the case where low expansion glass is selected as the material of the glass members 4, 5. The present invention is not limited to the above embodiment. For example, in the above-described embodiment, the melting rate is close to ι〇〇% when the irradiation start position A of the laser light L 经过 passes the specific time X, and the first heat input amount is switched to the second heat input amount. As shown in FIG. 9, when the intensity of the heat radiation light radiated from the glass layer 3 rises to a specific value q, the first heat input amount is switched to the second heat input amount. In this case, the heat input amount can be accurately switched by detecting the intensity of the heat radiation light having an increasing correlation with the increase in the melting rate of the glass layer 3. Further, as shown in Fig. 1A, when the intensity of the reflected light of the laser light L1 reflected by the glass layer 3 is lowered to the specific value P, the first heat input amount is switched to the second heat input amount. In this case, the intensity of the reflected light having a correlation which decreases as the melting rate of the glass layer 3 is increased can be detected, and the heat transfer can be correctly performed. Further, in the above embodiment, the amount of heat input to the glass layer 3 is controlled by changing the irradiation power of the laser light L. However, the laser light L1 may be irradiated as shown in the above formula (丨). The power is fixed, and the relative irradiation speed of the laser light L1 (that is, the traveling speed of the laser light L1 with respect to the glass layer 3) is increased to switch the heat input amount to the glass layer 3. In this case, since the amount of heat input is switched by the increase in the traveling speed of the laser light L1, it is possible to reliably switch from the first heat input amount to the second heat input amount. Further, since the traveling speed is increased and the switching is performed, the time required for welding the glass member 4 and the glass member 5 can be shortened. Further, in the case where the heat input amount is switched by increasing the traveling speed, most of the acceleration process is included. Therefore, from the viewpoint of suppressing the crystallization of the glass layer 3, it is preferable to perform the process. The switching timing (when the specific time X is elapsed, or the intensity of the heat radiation or the reflected light becomes a specific value) starts the switching control of the traveling speed, and the switching is completed when the timing of the switching is actually performed. Further, in the above embodiment, the laser beam u is caused to travel with respect to the fixed glass members 4 and 5, but the laser beam may be relatively moved with respect to the glass members* and 5, and the laser beam may be fixed to the glass. The members 4, 5 (four) or the glass members 4, 5 and the laser light L1 can also be moved. In the above-described embodiment, the heat input amount is switched when the melting rate is a specific value such as 1% by weight. However, if the glass layer 3 is appropriately melted, for example, when the melting rate is a specific value such as 9〇%, The switching of the heat input amount is performed to reliably suppress the crystallization of the glass layer 3. Furthermore, if the heat input amount is switched when the melting rate is low, the absorption rate of the laser light after switching is not charged, and there is a possibility that the melting treatment of the glass layer cannot be maintained, so that it is used for heat generation. The specific value of the melting rate of the switching of the input amount is preferably 80%. The irradiation of the laser light L1 may be performed from the side of the glass member 4 or may be performed from the opposite side of the glass member 4. Industrial Applicability According to the present invention, a highly reliable glass splicing body can be manufactured. BRIEF DESCRIPTION OF THE DRAWINGS A perspective view of a glass fusing body produced by one embodiment of the glass fusing method of the present invention. Fig. 2 is a perspective view for explaining a glass fusing method for manufacturing the glass fusing body of Fig. 1. Fig. 3 is a perspective view for explaining a glass-melting method for producing a glass-fused body. Fig. 4 is a cross-sectional view for explaining a glass melting method for manufacturing the glass splicing body of Fig. 1. The drawing is a cross-sectional view for explaining a glass melting method for producing the glass-fused body of Fig. i. Fig. 6 is a plan view for explaining a glass fusing method for manufacturing a glass frit. Fig. 7 is a view showing the temperature distribution of laser irradiation. Fig. 8 is a view showing a switching timing of irradiation conditions of laser light. Fig. 9 is a view showing another switching timing of the irradiation conditions of the laser light. Figure W is a diagram showing other switching timings of the irradiation conditions of the laser light. Figure 11 is a graph showing the relationship between the temperature of the glass layer and the laser light absorption rate. 150763.doc • 14·201117909 Table. Figure 12 is a graph showing the relationship between the laser power and the temperature of the glass layer. [Description of main component symbols] 1 Glass fusing body 2 Glass frit (glass frit) 3 Glass layer 4 Glass member (first glass member) 4a Surface 5 Glass member (second glass member) 5 a Surface 6 Slurry layer A Irradiation Starting position B Stabilizing area starting position L1 Laser light (1st laser light) R Welding scheduled area 150763.doc -15 -

Claims (1)

201117909 七、申請專利範圍: 1. 一種玻璃熔接方法,其特徵在於··其係將第丨玻璃構件 與第2玻璃構件熔接而製造玻璃熔接體者,其包括以下 步驟: 將包含雷射光吸收材及玻璃粉之玻璃層以沿著熔接預 定區域之方式配置於上述第1玻璃構件上;及 於使上述第2玻璃構件經由上述玻璃層而重合於上述 第1玻璃構件上之狀態τ,藉由沿著上㈣接預定區域 照射具有第1熱輸入量之第i雷射光使上述玻璃層炫融, 於與上述苐1雷射光之行進方向交叉之方向上的上述玻 璃層之炫料超過特定值時,自上述第ι熱輸人量切換 為少於上述第1熱輸入量之第2熱輸入量,並藉由沿著上 述溶接預定區域照射具有上述第2熱輸入量之上述第p 射光使上述玻璃層炫融,而將上述第!玻璃構件與上述 第2玻璃構件熔接。 2_如請求項1之玻螭熔接方法,其中 猎由:上述第1雷射光之照射功率降低而自上述第1 熱輸入量切換為上述第2熱輸入量。 3.如請求項1之玻璃熔接方法,其中 藉由使上述第1雷射光相對於上述玻璃層之行進速度 上升’而自上述第)熱輸入量切換為上述第2熱輸人量。 4·如請求項1之玻璃熔接方法,其中 於自上述第1雷射光之照射開始經過特定時間時,自 上述第1熱輸入量切換為上述第2熱輸入量。 150763.doc 201117909 5 _如請求項1之玻璃溶接方法,其中 於自上述玻璃層所放射之熱輻射光之強度上升至特定 值時,自上述第1熱輸入量切換為上述第2熱輸入量。 6.如請求項1之玻璃熔接方法,其中 於由上述玻璃層所反射之上述第丨雷射光之反射光之 強度下降至特定值時,自上述第!熱輸入量切換為上述 第2熱輸入量。 150763.doc201117909 VII. Patent Application Range: 1. A glass fusion method, characterized in that it is a method of welding a third glass member and a second glass member to produce a glass fusion body, comprising the following steps: comprising a laser light absorbing material And the glass layer of the glass frit is disposed on the first glass member along the predetermined region of the fusion; and the state τ in which the second glass member is superposed on the first glass member via the glass layer Irradiating the ith laser light having the first heat input amount along the upper (four) predetermined region to smear the glass layer, and the glazing of the glass layer in a direction crossing the traveling direction of the 苐1 laser light exceeds a specific value And switching from the first heat input amount to the second heat input amount smaller than the first heat input amount, and irradiating the p-th light having the second heat input amount along the predetermined welding area The glass layer is fused, and the second glass member is welded to the second glass member. The method of claim 2, wherein the hunting is performed by switching the first heat input amount to the second heat input amount. 3. The glass fusing method according to claim 1, wherein the first heat input amount is switched from the first heat input amount to the second heat input amount by increasing a traveling speed of the first laser light with respect to the glass layer. 4. The glass fusing method according to claim 1, wherein the first heat input amount is switched to the second heat input amount when a predetermined time elapses from the irradiation of the first laser light. The glass melting method of claim 1, wherein the first heat input amount is switched from the first heat input amount to the second heat input amount when the intensity of the heat radiation light emitted from the glass layer rises to a specific value . 6. The glass fusing method according to claim 1, wherein the intensity of the reflected light of said first-order laser light reflected by said glass layer is decreased to a specific value, from said above! The heat input amount is switched to the above second heat input amount. 150763.doc
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