TW201114590A - Silicone rubber sheet for thermocompression bonding - Google Patents

Silicone rubber sheet for thermocompression bonding Download PDF

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TW201114590A
TW201114590A TW099111618A TW99111618A TW201114590A TW 201114590 A TW201114590 A TW 201114590A TW 099111618 A TW099111618 A TW 099111618A TW 99111618 A TW99111618 A TW 99111618A TW 201114590 A TW201114590 A TW 201114590A
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Taiwan
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rubber sheet
group
protective layer
component
adhesive
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TW099111618A
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Chinese (zh)
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TWI488739B (en
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Masakatsu Hotta
Hisaharu Yamaguchi
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Shinetsu Chemical Co
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00Layered products comprising a layer of natural or synthetic rubber
    • B32B25/04Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B25/08Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00Layered products comprising a layer of natural or synthetic rubber
    • B32B25/20Layered products comprising a layer of natural or synthetic rubber comprising silicone rubber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00Use of ingredients characterised by shape
    • C08K7/16Solid spheres
    • C08K7/18Solid spheres inorganic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J183/00Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
    • C09J183/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22Plastics; Metallised plastics

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

A silicone rubber sheet for the thermo-compression is provided to secure the heterogeneity for an epoxy conductive adhesive and an acryl conductive adhesive, and to economically produce the silicone rubber sheet. A silicone rubber sheet for the thermo-compression comprises the following: a thermo-conductive silicone rubber sheet substrate layer; and a silicon protective layer formed on one surface of the substrate layer. The silicon protective layer is formed with a silicone addition cured material, and includes more than 2 mol of silethylene group.

Description

201114590 六、發明說明: 【發明所屬之技術領域】 本發明係有關一種在電氣·電子機器零件之配線連接 步驟,可與傳導熱同時地均一施加壓力之目的所使用之熱 壓黏用聚矽氧橡膠薄片。 【先前技術】 在液晶面板製造時係爲驅動液晶,使液晶面板之透明 導線電極與搭載驅動用LSI之可撓性電路基板(c〇F)之 導線電極,介入異方性導電接著劑(膏狀或膜狀)而進行 熱壓黏,以進行電性及機械性連接。此時,就與熱同時地 施加均一的壓力之目的’於加壓·加熱金屬工具與COF之 間挾住聚矽氧橡膠薄片爲一般。 又,單層之導熱性聚矽氧橡膠薄片中係因對於異方性 導電接著劑之離型性不充分,故已提出於導熱性橡膠薄片 之至少一者的表面層合聚矽氧保護層,改善對於異方性導 電接著劑之離型性,提昇作業性。 此時,在上述熱壓黏步驟中’反覆進行使用聚砂氧橡 膠薄片之相同處幾次壓黏後少許送入薄片。亦即,儘量多 些可使用聚矽氧橡膠薄片之相同處,與製造成本之優異性 有關。未以COF被覆而露出之異方性導電接著劑,或於壓 黏時反覆與從COF滲出之異方性導電接著劑的接觸,聚矽 氧橡膠薄片徐緩地劣化,故提高對於聚矽氧橡膠薄片之異 方性導電接著劑的離型性係非常重要。 -5- 201114590 但,至今有關設於電氣•電子機器零件之熱壓黏配線 連接步驟所使用之導熱性聚矽氧橡膠薄片表面的聚砂氧保 護層,甚至考慮成爲其對象之異方性導電接著劑的熱硬化 性樹脂之種類而進行開發或評估之事例尙無。 本發明人等係藉由至今之硏究,與導熱性聚矽氧橡膠 薄片基材層比較,僅減少聚矽氧保護層中之無機粉末(塡 充材),確認出可提高對於自以往廣泛普及之環氧樹脂內 分散導電粒子之異方性導電接著劑(以下,環氧導電接著 劑)的離型性(專利文獻1 :專利第3 902558號公報,專利 文獻2:特開2005-297234號公報)。 但,近年,於作爲低溫短時間壓黏用普及之丙稀酸樹 脂內使導電粒子分散之異方性導電接著劑(以下,H g _ 導電接著劑)係黏著力非常強,不論單層之導熱性聚砂氧 橡膠薄片、於此設有保護層之多層薄片,以很少之壓黏次 數產生薄片之貼黏或破裂。因此,與環氧導電接著劑比較 ,有薄片之使用量變多之缺點。 (先前技術文獻) (專利文獻) (專利文獻1 )專利第3 902 5 5 8號公報 (專利文獻2) 特開2〇〇5_297234號公報 【發明內容】 (發明之槪要) -6 - 201114590 (發明欲解決之課題) 本發明係有鑑於如此之事情者,目的在於提供一種不 僅環氧導電接著劑’即使對於丙烯酸導電接著劑亦具有優 異之離型性的熱壓黏用聚矽氧橡膠薄片。 [用以解決課題之手段] 本發明之上述目的係藉由聚矽氧橡膠薄片來達成,聚 矽氧橡膠薄片係於電氣•電子機器零件的熱壓黏配線連接 步驟所使用之聚矽氧橡膠薄片爲由導熱性聚矽氧橡膠薄片 基材層與設於其至少一者的表面之聚矽氧保護層所構成之 複層的聚矽氧橡膠薄片,其特徵在於:該聚矽氧保護層爲 聚矽氧加成硬化物作爲主成分,其組成相對於二甲基矽氧 烷單元((CH3)2Si01/2) 1〇〇莫耳,含有加成反應部之矽亞 乙基(Si-CH2-CH2-Si) 2莫耳以上。 亦即’本發明人等經各種硏究之結果,可知對於丙烯 酸導電接者劑之離型性係與保護層之主成分的聚砂氧成分 之交聯密度相關。 但,若提昇單層之導熱性聚矽氧橡膠薄片的交聯密度 ’有喪失柔軟性且於配線連接步驟產生壓黏不良之問題。 又,以往之保護層係使導熱性塡充劑之含量少之液狀 聚矽氧橡膠組成物進行溶劑稀釋而塗佈,並加熱硬化。但 ’即使單獨硬化,在可得到柔軟性或延伸之所謂聚砍氧橡 膨中交聯密度不充分。在如此之保護層中,對於環氧導電 接著劑的離型性係明顯提昇,但對於丙烯酸導電接著劑之 201114590 離型性與基材層比較係完全不提昇。 因此’更進一步硏究之結果,在本發明之保護層中係 單獨提高交聯密度至成爲薄膜狀,使其很薄地形成於導熱 性聚矽氧橡膠薄片基材層上,一部分浸染,發揮如表面改 質劑般作用者,藉此’確保薄片全體之柔軟性與導熱率, 同時並得到僅明顯地提高表面附近之交聯密度的薄片者。 其結果’使在至今之聚矽氧橡膠薄片中對於完全看不到差 之丙烯酸導電接著劑的離型性,成功地提昇至習知品的2 倍以上,終完成本發明。 因此’本發明係提供下述熱壓黏用聚矽氧橡膠薄片。 申請專利範圍第1項: 一種熱壓黏用聚矽氧橡膠薄片’係於電氣•電子機器 零件的熱壓黏配線連接步驟所使用之聚矽氧橡膠薄片爲由 導熱性聚砂氧橡膠薄片基材層與設於其至少一者的表面之 聚矽氧保護層所構成之複層的熱壓黏用聚砂氧橡膠薄片, 其特徵在於: 該聚矽氧保護層爲由加成聚矽氧之硬化物所構成,相 對於二甲基矽氧烷單元(1〇〇莫耳,含有加 成反應部之矽亞乙基(Si-CH2-CH2-Si) 2莫耳以上。 申請專利範圍第2項: 如申請專利範圍第1項之聚矽氧橡膠薄片,其中聚较 氧保護層爲含有:於側鏈具有乙烯基之二有機聚矽氧烷、 -8 - 201114590 於側鏈具有SiH基之有機氫聚矽氧烷、與鈿系觸媒之聚妙 氧組成物的硬化物。 申請專利範圍第3項: 如申請專利範圍第1或2項之聚矽氧橡膠薄片,其中上 述聚矽氧保護層爲厚0.1// m以上30# m以下。 申請專利範圍第4項: 如申請專利範圍第1 ~3項之聚矽氧橡膠薄片,其中上 述聚矽氧保護層爲含有選自金屬、金屬氧化物、金屬氮化 物、金屬碳化物之至少一種的無機粉末0.1質量%以上30質 量%以下。 申請專利範圍第5項: 如申請專利範圍第1〜4項之聚矽氧橡膠薄片,其中上 述無機粉末爲球狀微粉末氧化矽。 申請專利範圍第6項: 如申請專利範圍第1〜5項之聚矽氧橡膠薄片,其中上 述微粉末氧化矽爲平均粒徑1 μ m以上30 μ m以下之球狀粉 ,進一步篩除3 5 a m以上之粗粒。 申請專利範圍第7項: 如申請專利範圍第1 項之聚矽氧橡膠薄片,其中上 -9- 201114590 述導熱性聚矽氧橡膠薄片基材層滿足導熱率0.1 W/mK以上 5 W/mK以下且厚〇.〇5 mm以上1 mm以下。 [發明之效果] 本發明之熱壓黏用聚矽氧橡膠薄片係對於丙烯酸導電 接著劑具有優異之離型性。 又,本薄片係與具有以往保護層之多層聚矽氧橡膠薄 片同樣地,亦一倂擁有對於環氧導電接著劑之離型性、玻 璃或透明導線電極、對於COF之周邊構件的離型性。因而 ,可對液晶面板製造步驟之合理化或成本降低造成很大的 效果。 [用以實施發明之形態] 本發明之熱壓黏用聚矽氧橡膠薄片係具備導熱性聚矽 氧橡膠薄片基材層、與設於其至少一者的表面之聚矽氧保 護層。 此時,導熱性聚矽氧橡膠薄片基材層係可使用對於異 方性導電接著劑所使用之公知導熱性聚矽氧橡膠薄片,可 使用使含有導熱性塡充劑之公知的聚矽氧橡膠組成物進行 薄片成形且硬化所得到者。亦可使用市售品作爲如此之聚 矽氧橡膠組成物,可使用例如信越化學工業(股)製聚矽 氧橡膠薄片HC-25MS等。又,導熱性聚矽氧橡膠薄片基材 層宜導熱率爲0.1 W/mK以上5 W/mK以下,尤其宜爲〇·5〜5 W/mK者。若導熱率小於0.1 W/mK,必須提高熱壓黏溫度 201114590 ’或增長壓黏時間,在效率之方面,產生不利之情形。即 使超過5 W/mK,無法期待特別有利之效果。又,導熱性 聚矽氧橡膠薄片基材層之厚度宜爲0.05 mm以上1 mm以下 ’尤宜爲0.1〜0.8 mm ^若薄於0.05 mm,有時強度不足, 若超過1 mm,於導熱方面產生不利之情形。 本發明之聚矽氧保護層係宜爲由聚矽氧加成硬化物所 構成, (A) 具有烯基之有機聚矽氧烷、 (B) 具有直接結合於矽原子之氫原子的有機氫聚矽 氧垸、 (C) 鉑系觸媒:有效量、 (D )反應控制劑:有效量、 (E)宜爲以選自金屬、金屬氧化物、金屬氮化物、 金屬碳化物之至少一種作爲必須成分的聚矽氧組成物之硬 化物、 (A)成分係宜爲於1分子中至少具有2個烯基,尤宜 具有乙烯基之二有機聚矽氧烷,爲本發明之聚矽氧組成物 的主劑(基材聚合物)。 此含有烯基之有機聚矽氧烷係在室溫下(25 t)若爲 液狀,其分子構造係無限定,而可舉例如直鏈狀、分枝鏈 狀、具有一部分枝之直鏈狀,但尤宜爲直鏈狀。又,烯基 係可舉例如烯丙基、丙烯基、異丙烯基、丁烯基、己烯基 、環己烯基等之碳數2〜8左右的烯基,但從成本或取得的 容易性,宜使用乙烯基。 -11 - 201114590 結合於(A)成分中之烯基以外的矽原子之基,除甲 基以外’非取代或取代之一價烴基,係可舉例如乙基、丙 基、異丙基、丁基、異丁基、第三丁基、戊基、新戊基' 己基、庚基、辛基、壬基、癸基、十二碳基等之烷基、環 戊基、環己基、環庚基等之環烷基、苯基、甲苯基、二甲 苯基、萘基、聯苯基等之芳基、苯甲基、苯基乙基、苯基 丙基、甲基苯甲基等之芳烷基、以及結合於此等之基的碳 原子的氫原子之一部分或全部,被氟、氯、溴等之鹵原子 、氰基.等所取代之基,可舉例如氯甲基、2-溴乙基、3·氯 丙基、3,3,3 -三氟丙基、氯苯基、氟苯基 '氰乙基、 3,3,4,4,5,5,6,6,6-九氟己基等之碳原子爲1~10,尤宜爲碳 原子數爲1〜6者,但依成本或取得容易性、化學安定性、 環境負荷等之理由宜全部爲甲基。 (A)成分之有機聚矽氧烷係可1種單獨,組合黏度或 組成相異之2種以上亦可使用。此時,上述有機聚矽氧烷 之黏度以旋轉黏度計所得到的25 °C黏度爲10-10000 mPa· s’ 尤宜爲 50 〜5000 mPa. s’ 更宜爲 100〜lOOOmPa· s。 在本發明中,有機聚矽氧烷宜爲具有2個以上乙烯基 之二甲基聚矽氧烷,尤其可適宜使用以下述式(1)所示 者,尤其可於側鏈具有乙烯基者。 【化1】BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding polyoxygen used for the purpose of uniformly applying pressure simultaneously with conduction heat in a wiring connection step of an electric/electronic machine component. Rubber sheet. [Prior Art] When the liquid crystal panel is manufactured, the liquid crystal is driven, and the transparent lead electrode of the liquid crystal panel and the lead electrode of the flexible circuit board (c〇F) on which the LSI for driving is mounted are interposed with an anisotropic conductive adhesive (paste). Thermal compression bonding for electrical and mechanical bonding. At this time, it is common to apply a uniform pressure to the heat at the same time as to hold the polyoxyethylene rubber sheet between the pressurizing and heating metal tool and the COF. Further, in the single-layer thermally conductive polyoxyethylene rubber sheet, since the release property to the anisotropic conductive adhesive is insufficient, it has been proposed to laminate the polyoxyn protective layer on at least one of the thermally conductive rubber sheets. Improves the release property of the anisotropic conductive adhesive and improves workability. At this time, in the above-mentioned hot press-bonding step, the same place where the polyoxynose rubber sheet was used was repeatedly pressed and applied a few times, and then the sheet was slightly fed. That is, as much as possible of the same place where the silicone rubber sheet can be used is related to the superiority of the manufacturing cost. The anisotropic conductive adhesive that is not exposed by COF or the contact with the anisotropic conductive adhesive oozing out from the COF during pressure bonding, the polyoxyethylene rubber sheet is slowly deteriorated, so that the polyoxyxene rubber is improved. The release of the anisotropic conductive adhesive of the sheet is very important. -5- 201114590 However, the polysilicon protective layer on the surface of the thermally conductive polyoxyethylene rubber sheet used in the thermo-adhesive wiring connection step of electrical and electronic machine parts has been considered to be an anisotropic conductive object. There are no examples of development or evaluation of the types of thermosetting resins of the subsequent agents. The present inventors have confirmed that the inorganic powder (tantalum) in the polyfluorinated protective layer is reduced compared with the thermally conductive polyoxyethylene rubber sheet base material layer, and it has been confirmed that it can be improved from the past. The release property of the anisotropic conductive adhesive (hereinafter, an epoxy conductive adhesive) in which the conductive particles are dispersed in the epoxy resin (Patent Document 1: Patent No. 3 902558, Patent Document 2: JP-A-2005-297234) Bulletin). However, in recent years, the anisotropic conductive adhesive (hereinafter, H g _ conductive adhesive) which disperses the conductive particles in the acrylic resin which is popular for low-temperature short-time pressure bonding has a very strong adhesive force, regardless of the single layer. A thermally conductive polyaza rubber sheet, a multi-layer sheet provided with a protective layer thereon, which causes sticking or cracking of the sheet with a small number of press-fit times. Therefore, compared with the epoxy conductive adhesive, there is a disadvantage that the amount of use of the sheet is increased. (Prior Art Document) (Patent Document 1) Patent No. 3 902 5 5 8 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. (Problems to be Solved by the Invention) The present invention has been made in view of such circumstances, and an object thereof is to provide a thermocompression adhesive polyoxyxene rubber which not only has an epoxy conductive adhesive agent but has excellent release properties even for an acrylic conductive adhesive. Sheet. [Means for Solving the Problems] The above object of the present invention is achieved by a polyoxyxene rubber sheet which is a polyoxyethylene rubber used in a thermocompression bonding wiring connection step of an electric/electronic machine part. The sheet is a multi-layered polyoxyethylene rubber sheet composed of a thermally conductive polyoxyethylene rubber sheet base material layer and a polyoxygen protective layer provided on at least one of the surfaces thereof, characterized in that the polysilicon protective layer As a main component of the polyoxygen addition hardening compound, its composition is relative to the dimethyloxane unit ((CH3)2Si01/2) 1 〇〇 molar, and the ethylene group containing the addition reaction portion (Si- CH2-CH2-Si) 2 moles or more. In other words, the inventors of the present invention have found that the release property of the acrylic conductive receiver is related to the crosslinking density of the polyoxo component of the main component of the protective layer. However, if the cross-linking density of the thermally conductive polyoxyethylene rubber sheet of the single layer is increased, there is a problem that the flexibility is lost and the pressure-bonding failure occurs in the wiring connection step. Further, in the conventional protective layer, the liquid polyoxyethylene rubber composition having a small content of the thermal conductive agent is applied by solvent dilution, and is heat-cured. However, even if it is hardened alone, the crosslink density is insufficient in so-called polyoxyethylene swell which is soft or stretchable. In such a protective layer, the release property of the epoxy conductive adhesive is remarkably improved, but the 201114590 release property of the acrylic conductive adhesive is not improved at all compared with the substrate layer. Therefore, as a result of further investigation, in the protective layer of the present invention, the crosslinking density is separately increased to a film shape, and it is formed thinly on the thermally conductive polyoxyethylene rubber sheet base material layer, and a part of the dip dye is used. The surface modifier acts like this, thereby ensuring the softness and thermal conductivity of the entire sheet, and at the same time obtaining a sheet which only significantly increases the crosslink density near the surface. As a result, the release property of the acrylic conductive adhesive having no difference at all in the polyoxyethylene rubber sheet to date has been successfully increased to twice or more of that of the conventional product, and the present invention has been completed. Therefore, the present invention provides the following thermocompression adhesive polyoxyethylene rubber sheet. Patent Application No. 1: A hot-press adhesive poly-xylene rubber sheet is used for the thermo-adhesive wiring connection step of electrical and electronic machine parts. a thermosetting adhesive polyaza rubber sheet composed of a layer and a polysilicon protective layer provided on at least one of the surfaces thereof, characterized in that: the polyfluorene protective layer is an addition polyoxygen It is composed of a cured product, and is equivalent to dimethylene (Si-CH2-CH2-Si) 2 molar containing an addition reaction unit with respect to a dimethyloxane unit (1 Torr). Item 2: The polyoxyethylene rubber sheet according to claim 1 of the patent scope, wherein the polyoxygen protective layer contains: a diorganopolyoxyalkylene having a vinyl group in a side chain, -8 - 201114590 having a SiH group in a side chain A cured product of an organohydrogen polyoxyalkylene and a polyoxo-oxygen composition of a ruthenium-based catalyst. Patent Application No. 3: A poly-xylene rubber sheet according to claim 1 or 2, wherein the above-mentioned polyfluorene The oxygen protective layer has a thickness of 0.1//m or more and 30# m or less. Item 4: The polyoxyxene rubber sheet according to any one of claims 1 to 3, wherein the polyfluorene protective layer is an inorganic powder containing at least one selected from the group consisting of a metal, a metal oxide, a metal nitride, and a metal carbide. 5% by mass or more of 30% by mass or less. Patent Application No. 5: The polyoxyxene rubber sheet of the first to fourth aspects of the patent application, wherein the inorganic powder is a spherical fine powder of cerium oxide. The polyoxyxene rubber sheet according to any one of claims 1 to 5, wherein the fine powder cerium oxide is a spherical powder having an average particle diameter of 1 μm or more and 30 μm or less, and further sieving coarse particles of 3 5 am or more. Patent Application No. 7: Polyurethane rubber sheet according to item 1 of the patent application scope, wherein the thermal conductive polyoxyethylene rubber sheet substrate layer of the above-mentioned -9-201114590 satisfies the thermal conductivity of 0.1 W/mK or more and 5 W/mK. The thickness is not more than 5 mm and not more than 1 mm. [Effects of the Invention] The thermosetting adhesive polyoxyethylene rubber sheet of the present invention has excellent release property against an acrylic conductive adhesive. Past protective layer The multilayer polyoxyethylene rubber sheet similarly has a release property for an epoxy conductive adhesive, a glass or transparent wire electrode, and a release property to a peripheral member of the COF. Therefore, the liquid crystal panel manufacturing step can be performed. The rationalization or the cost reduction has a great effect. [The embodiment for carrying out the invention] The thermocompression adhesive polyoxyethylene rubber sheet of the present invention comprises a thermally conductive polyoxyethylene rubber sheet base material layer and at least one of them The surface of the thermally conductive polyoxyethylene rubber sheet base layer may be a known heat conductive polyoxyethylene rubber sheet used for the anisotropic conductive adhesive, and may be used to have thermal conductivity. A well-known polyoxyxene rubber composition of a chelating agent is obtained by sheet forming and hardening. A commercially available product can also be used as such a polyoxyethylene rubber composition, and for example, a polyoxyethylene rubber sheet HC-25MS manufactured by Shin-Etsu Chemical Co., Ltd. can be used. Further, the thermal conductive polyoxyethylene rubber sheet base material layer preferably has a thermal conductivity of 0.1 W/mK or more and 5 W/mK or less, and particularly preferably 〇·5 to 5 W/mK. If the thermal conductivity is less than 0.1 W/mK, it is necessary to increase the hot-pressing temperature of 201114590 ’ or increase the viscosity-bonding time, which is disadvantageous in terms of efficiency. Even if it exceeds 5 W/mK, a particularly advantageous effect cannot be expected. Further, the thickness of the thermally conductive polyoxyethylene rubber sheet base material layer is preferably 0.05 mm or more and 1 mm or less, particularly preferably 0.1 to 0.8 mm. If it is thinner than 0.05 mm, sometimes the strength is insufficient, and if it exceeds 1 mm, in terms of heat conduction. An unfavorable situation arises. The polyfluorene protective layer of the present invention is preferably composed of a polyfluorene addition hardening compound, (A) an organic polyoxyalkylene having an alkenyl group, and (B) an organic hydrogen having a hydrogen atom directly bonded to a halogen atom. Polyoxonium oxide, (C) platinum-based catalyst: effective amount, (D) reaction control agent: effective amount, (E) is preferably selected from at least one selected from the group consisting of metals, metal oxides, metal nitrides, and metal carbides The cured product of the polyfluorene oxide composition as an essential component, and the component (A) is preferably a diorganopolyoxyalkylene having at least two alkenyl groups in one molecule, particularly preferably a vinyl group, which is a polyfluorene of the present invention. The main component of the oxygen composition (substrate polymer). The alkenyl group-containing organopolyoxyalkylene has a molecular structure in the form of a liquid at room temperature (25 t), and may be, for example, a linear chain, a branched chain, or a linear chain having a part of branches. Shape, but especially linear. Further, the alkenyl group may, for example, be an alkenyl group having a carbon number of from 2 to 8 such as an allyl group, a propenyl group, an isopropenyl group, a butenyl group, a hexenyl group or a cyclohexenyl group, but it is easy to obtain from the cost. Sex, vinyl should be used. -11 - 201114590 A group of a non-substituted or substituted one-valent hydrocarbon group other than a methyl group, in addition to a methyl group, in addition to a methyl group, for example, an ethyl group, a propyl group, an isopropyl group, and a butyl group. Base, isobutyl, tert-butyl, pentyl, neopentyl 'hexyl, heptyl, octyl, decyl, decyl, dodecyl, etc. alkyl, cyclopentyl, cyclohexyl, cycloheptane An aryl group such as a cycloalkyl group, a phenyl group, a tolyl group, a xylyl group, a naphthyl group or a biphenyl group, a benzyl group, a phenylethyl group, a phenylpropyl group or a methylbenzyl group. A part or all of a hydrogen atom of an alkyl group and a carbon atom to which the group is bonded, and a group substituted with a halogen atom such as fluorine, chlorine or bromine, a cyano group or the like may, for example, be a chloromethyl group or a 2- Bromoethyl, 3·chloropropyl, 3,3,3-trifluoropropyl, chlorophenyl, fluorophenyl 'cyanoethyl, 3,3,4,4,5,5,6,6,6 The carbon atom such as nonafluorohexyl group is 1 to 10, and particularly preferably has 1 to 6 carbon atoms. However, it is preferably a methyl group for reasons such as cost, availability, chemical stability, environmental load, and the like. The organopolysiloxane of the component (A) may be used alone or in combination of two or more kinds having different combinations of viscosity or composition. In this case, the viscosity of the above organopolyoxane is from 10 to 10000 mPa·s', preferably from 50 to 5,000 mPa·s', more preferably from 100 to 100 mPa·s, at a viscosity of 25 ° C obtained by a rotational viscometer. In the present invention, the organopolyoxyalkylene is preferably a dimethylpolysiloxane having two or more vinyl groups, and particularly preferably those represented by the following formula (1), especially those having a vinyl group in a side chain. . 【化1】

201114590 在上述式(1 )中,R爲CH3或CH = CH2。此時,在形成 聚矽氧保護層之聚矽氧加成硬化物中,爲使二甲基矽氧烷 單元[(CH3)2SiO1/2]100 莫耳之矽亞乙基(Si-CH2-CH2-Si) 的比率(交聯點)爲2莫耳以上,故R爲CH = CH2時,χ = 10〜1000 、 y=0〜100 、 y/x=0〜0.1 ,尤其 x=50〜300 、 y=l〜30 、y/x = 0.02〜0· 0 5。又,R 爲 CH3 時 ’ x=l〇 〜1〇〇〇、y = 2~100 、y/x = 0.02 〜0.1,尤宜爲 x = 30〜300、y = 3 〜30、y/x = 0.02 〜0.05,但R爲CH2 = CH或CH3之任一者時,宜爲於側鏈具有 乙烯基(亦即y#〇) ,R爲ch2 = ch時,ygi,r爲ch3時 ,宜爲y 2 2。 又,爲提昇本發明之保護層的機械強度,除了(A) 成分之有機聚矽氧烷成分,亦可併用聚矽氧樹脂。聚砂氧 樹脂係由R^SiOo」單元(M單元)與Si〇2單元(Q單元) 、或、該Μ單元與Q單元及RJSiOu單元(T單元)及/或 R^SiO單元(D單元)所構成之MQ樹脂、MTQ樹脂、MDQ 樹脂或MDTQ樹脂,但使用於本用途之聚矽氧樹脂,進一 步宜爲含有(CH2 = CH)(CH3)2SiO〇.5 單元或(CH2 = CH)(CH3)SiO 單 元之含有乙稀基的聚砂氧樹脂。又,R1可舉例如碳數1〜8 的1價烴基(烷基、烯基、芳基等),尤宜爲甲基。 加入於此(A)成分之聚砂氧樹脂的含量,相對於( A)成分宜爲30質量%以下。聚砂氧樹脂—般含有砂醇( Si OH)基’具有與異方導電性接著劑中之樹脂成分反應的 性質。聚矽氧樹脂之添加量宜爲很少,但若特別地超過3 〇 質量%,與矽醇基之反應的影響變大,有時離型性降低。 -13- 201114590 (B)成分係於1分子中之分子鏈側鏈至少具有2個以 上結合於矽原子的氫原子(亦即SiH基)之有機氫聚矽氧 烷,且爲作爲(A )成分之交聯劑作用的成分。亦即,結 合於(B)成分中之砂原子的氫原子藉由後述之(C)成分 的鈷系觸媒作用,藉由(A)成分中之乙烯基等的烯基與 氫甲矽烷基化反應進行加成,得到具有含交聯鍵之3次元 網狀構造的交聯硬化物。 就結合於(B)成分中之矽原子的有機基而言,可使 用烯基以外之非取代或取代的一價烴基等,但與(A)成 分同樣地,從合成面及經濟性而言,宜爲甲基。 (B)成分之構造無特別限定,亦可爲直鏈狀、分枝 狀及環狀之任一者,但宜爲直鏈狀。 (B)成分係例如以下述通式(2 ): 【化2】201114590 In the above formula (1), R is CH3 or CH=CH2. At this time, in the polyfluorene addition addition hardening which forms the protective layer of polyfluorene oxide, in order to make the dimethyloxane unit [(CH3)2SiO1/2] 100 莫 矽 矽 ethylene (Si-CH2- The ratio of CH2-Si) (crosslinking point) is 2 m or more, so when R is CH = CH2, χ = 10~1000, y=0~100, y/x=0~0.1, especially x=50~ 300, y=l~30, y/x = 0.02~0· 0 5. Further, when R is CH3, 'x=l〇~1〇〇〇, y=2~100, y/x=0.02~0.1, especially x=30~300, y=3~30, y/x= 0.02 to 0.05, but when R is CH2 = CH or CH3, it is preferred to have a vinyl group in the side chain (ie, y#〇), and when R is ch2 = ch, ygi, r is ch3, preferably y 2 2. Further, in order to enhance the mechanical strength of the protective layer of the present invention, in addition to the organopolyoxane component of the component (A), a polyoxyxylene resin may be used in combination. The polysiloxane resin is composed of R^SiOo unit (M unit) and Si〇2 unit (Q unit), or the unit and Q unit and RJSiOu unit (T unit) and/or R^SiO unit (D unit) ) MQ resin, MTQ resin, MDQ resin or MDTQ resin, but the polyoxynoxy resin used for this purpose is further preferably containing (CH2 = CH)(CH3)2SiO〇.5 unit or (CH2 = CH) (CH3) a silica-containing polysandoxy resin of the SiO unit. Further, R1 may, for example, be a monovalent hydrocarbon group (alkyl group, alkenyl group, aryl group or the like) having 1 to 8 carbon atoms, and is particularly preferably a methyl group. The content of the polysiloxane resin to be added to the component (A) is preferably 30% by mass or less based on the component (A). The polyoxyn resin generally contains a mordant (Si OH) group which has a property of reacting with a resin component in an anisotropic conductive adhesive. The amount of the polyoxymethylene resin to be added is preferably small, but if it is particularly more than 3% by mass, the influence of the reaction with the decyl group becomes large, and the release property may be lowered. -13- 201114590 (B) is an organic hydrogen polyoxyalkylene having at least two or more hydrogen atoms (ie, SiH groups) bonded to a ruthenium atom in a molecular chain side chain in one molecule, and is (A) A component that acts as a cross-linking agent. That is, the hydrogen atom of the sand atom bonded to the component (B) acts by the cobalt-based catalyst of the component (C) described later, and the alkenyl group such as a vinyl group in the component (A) and the hydroformyl group The addition reaction is carried out to obtain a crosslinked cured product having a 3-dimensional network structure containing a crosslink. As the organic group of the ruthenium atom to be bonded to the component (B), an unsubstituted or substituted monovalent hydrocarbon group other than the alkenyl group may be used, but in the same manner as the component (A), from the viewpoint of synthesis and economy It should be methyl. The structure of the component (B) is not particularly limited, and may be any of a linear chain, a branched chain, and a ring shape, but is preferably a linear chain. The component (B) is, for example, the following formula (2):

ίΟ\ (式中,R2爲甲基或氫原子,於分子鏈側鏈至少結合2個 氫原子。亦可於分子鏈末端結合氫原子。Ζ爲2以上之整數 ° ) 所示。此時,SiH基係存在於側鏈者,亦可只於側鏈具有 SiH基者,但除了側鏈,亦可於分子鏈末端存在SiH基》 又,ζ宜爲2~200,更宜爲20~200之整數。若ζ太小, 塗佈後至硬化,揮發或滲透至基材之導熱性橡膠薄片之二 甲基聚砂氧院量會變多,無法得到安定之加成反應。 -14- 201114590 又’ (B)成分係可1種單獨亦可組合2種以上而使用 〇 (B) 成分之添加量係(b)成分之SiH基相對於(A )成分中之乙烯基1莫耳爲0.5〜5.0莫耳的量,宜爲0.8〜3.0 莫耳的量。(B)成分之Si-H基的量相對於(A )成分中之 乙烯基1莫耳未達0.5莫耳時無法充分得到硬化物之硬度。 又’超過5.0莫耳的量時,殘存許多SiH基,故對於異方導 電性接著劑之離型性降低。 在本發明中,特徵在於:(A)成分與(B)成分硬化 後’相對於其硬化物中之二甲基矽氧烷單元1〇〇莫耳,含 有加成反應部之矽亞乙基2莫耳以上。更佳係2〜10莫耳, 更宜爲3〜5莫耳。加成反應部係可藉(a)成分中之乙烯基 與結合於(B)成分中之矽原子的氫原子之氫甲矽烷基化 反應所得到’但,其形態可舉例如末端-末端結合、末端_ 側鏈結合、側鏈-側鏈結合。於交聯密度提昇之貢獻度係 側鏈-側鏈結合 >末端-側鏈結合 >末端-末端結合,但一般反 應速度係成爲其逆向之末端-末端結合 >末端-側鏈結合 >側 鏈-側鏈結合。爲提高交聯密度,亦即對於丙烯酸導電性 接著劑之離型性,增加側鏈-側鏈結合乃很有效,但爲使 硬化性安定,宜使末端-側鏈結合共存。又,若太提昇交 聯密度’保護層之硬度會變高,妨礙均一之壓力傳達,或 壓黏時薄片易破裂,故必須注意。 (C) 成分之鉑系觸媒係促進(a)成分中之乙烯基與 結合於(B)成分中之矽原子的氫原子之加成反應,爲從 -15- 201114590 本發明之組成物得到三次元網狀構造的交聯硬化物所調配 之成分。 (C)成分係可使用於一般氫甲矽烷基化反應所使用 之公知的觸媒全部。其具體例可舉例如鉑(含有鈾黑)、 铑、鈀等之鈾族金屬單體、H2PtCl4 · nH20 ' H2PtCl6 · nH20 ' NaHPtCle * nH20 ' KHPtCl6 * nH2〇 ' Na2PtCl6 * nH20 、 K2PtCl4 · nH20 、 PtCl4 . nH20 、 PtCl2 、 Na2HPtCl4· nH20(但,式中,n爲0~6之整數,宜爲0或6 )等之氯化鉑、氯化鉑酸及氯化鉑酸鹽、醇改性氯化鉑酸 、氯化鉑酸與烯烴之複合物、使鉑黑、鈀等之鉑族金屬擔 持於氧化鋁、氧化矽、碳等之擔體者、鍺-烯烴複合物、 氯三(三苯基磷)铑(Wilkin son觸媒)、氯化鉑、氯化鉑 酸、或氯化鉑酸鹽與含有乙烯基之矽氧烷的複合物等。又 ,(C )成分之鈾系觸媒係可一種單獨或組合2種以上而使 用。 (C) 成分之調配量係只要爲用以使本發明之組成物 硬化所需要的有效量即可,並無特別限制,但一般對於( A)成分之鉑族金屬元素的質量換算,爲0.1~1000 PPm, 宜爲 0·5~500 ppm。 (D) 成分之反應控制劑係用以整調在(C )成分之存 在下進行的(A)成分與(B)成分之反應速度者。 (D)成分係可使用於一般加成反應硬化型聚矽氧組 成物所使用之公知的加成反應抑制劑全部。其具體例可舉 例如1-乙炔基-1-環己醇、3-丁炔-1-醇等之乙炔化合物、 -16- 201114590 氮化合物、有機磷化合物、硫化合物、括化合物、有機氯 化合物等。又,(D )成分之加成反應抑制劑係可一種單 獨或組合2種以上而使用。 (D) 成分之調配量係亦依(C)成分之使用量而異, 故無法一次定義之,但只要爲可調整氫甲矽烷基化反應之 進行至所希望的反應速度之有效量即可,一般,對於(A )成分之質量,可爲10-50000 ppm左右。(D)成分之調 配量太少時,有時無法確保充分的可使用時間,太多時, 有時組成物之硬化性會降低。 (E) 成分係從金屬、金屬氧化物、金屬氮化物、金 屬碳化物選出之至少一種,對本發明之離型層賦予導熱性 或表面滑性、塗佈時之膜厚安定性者。此等之具體例係就 金屬而言可例示銀粉、銅粉、鐵粉、鎳粉、鋁粉等,就金 屬氧化物而言,可例示鋅、鎂、鋁、矽、鐵等之氧化物、 就金屬氮化物而言可例示硼、鋁、矽等之氮化物,就金屬 碳化物而言可例示矽、硼等之碳化物等。 其中,(Ε)成分適宜爲氧化矽粉末,尤宜爲球狀者 。使用此粉末,可得到特別優異之表面滑性與膜厚安定性 。又,因爲低比重,隨時間之沉澱亦少,可安定塗佈。 (Ε )成分之平均粒徑宜爲1 m以上30 y m以下,尤 宜爲5 ~ 2 0 /z m。平均粒徑不足1 v m時,很難得到表面平滑 性。又,若超過30 // m,爲防止塡充劑之脫落,必須增厚 塗佈膜,在薄片全體之導熱性會降低,故必須提高加壓· [S 1 加熱金屬工具之設定溫度。又,平均粒徑係可依以雷射光 -17- 201114590 繞射法所求得之粒度分布測定裝置來求出,可作爲重量平 均値而得到》 (E)成分之調配量係聚矽氧保護層中,爲0.1質量% 以上30質量%以下的量。尤宜在5〜30質量%之範圍使用。 若少於〇. 1質量%,很難得到表面滑性與膜厚安定性的效果 ,從此點可推薦爲5質量%以上。又,若超過30質量%,對 於異方導電性接著劑之離型性會降低。 但,即使(E )成分之調配量少於〇. 1質量%時,於基 材之導熱性橡膠薄片表面設有凹凸形狀,可藉粗面化進行 安定之塗佈。 於橡膠薄片表面賦予凹凸之方法,係有:輾壓成型時 ,於具有凹凸形狀表面之塑膠膜上分出硬化前的聚矽氧橡 膠組成物,而轉印凹凸形狀之方法。又,有於硬化前之薄 片表面押住附有凹凸之輥,並轉印凹凸之方法,但不限定 於此等。 本發明之保護層的塗佈方法係於導熱性聚矽氧橡膠薄 片基材上溶解於甲苯等之溶劑而液狀化的聚矽氧保護層形 成用材料(上述聚矽氧組成物)以刮刀塗佈、繞線棒塗佈 、棒塗佈、浸漬塗佈、噴塗等之方法進行塗佈成型,直接 在大氣中除去溶劑、加熱硬化之方法,但不限定於此。又 ,加熱硬化宜爲120〜180°C、3~10分鐘之條件,但不限定 於此》 以往之保護層係以液狀聚矽氧橡膠作爲主成分,必須 爲溶劑稀釋,但,在本發明中,藉由降低(A )及(B )成 -18- 201114590 分之黏度’亦可無溶劑塗佈。與溶劑稀釋塗佈比較而可提 昇塗佈生產線之速度,可明顯提昇生產性。 本發明之保護層的厚度宜爲Ο.ίμηι以上30ym以下。 因係高交聯組成物,即使爲薄的膜厚,表面被改質,可得 到高的離型性。但,若超過30/zm,在薄片全體之導熱性 會降低,故必須提高加壓·加熱金屬工具之設定溫度。 【實施方式】 [實施例] 以下,表示實施例及比較例,具體地說明本發明,但 ,本發明係不限定於下述之實施例。 (導熱性聚矽氧橡膠薄片基材層) 塗佈聚矽氧保護層之基材係使用信越化學工業公司製 聚矽氧橡膠薄片HC-25MS (厚度0.25 mm、導熱率〇_85 W/mK )。 (塗佈液之調製) E S1 於具有乙烯基之二甲基聚矽氧烷100質量份((A )成 分)中,加入1-乙炔基-1-環己醇0.2質量份((C)成分) '氯化鉑酸之乙烯基矽氧烷錯合物(鉑含量0 · 5質量% ) 0.2質量份((D )成分)而混練後,添加具有直接結合於 矽原子之氫原子的二甲基聚矽氧烷((B)成分)及篩除 平均粒徑1 5 # m且3 5 // m以上之粗粒的高純度真球狀氧化 -19- 201114590 矽塡充劑15質量份((E )成分)。 在實施例中係改變各種(A )成分之組成而進行評估 。(B )成分係使用平均構造以下述式(3 )所示者。添加 量係調整成(A)成分中之乙烯基與結合於(B)成分中之 矽原子的氫原子成爲等莫耳。 【化3】Ο Ο (wherein R 2 is a methyl group or a hydrogen atom, and at least two hydrogen atoms are bonded to the side chain of the molecular chain. Hydrogen atoms may be bonded to the end of the molecular chain. Ζ is an integer of 2 or more ° ). In this case, the SiH group is present in the side chain, and the SiH group may be present only in the side chain, but in addition to the side chain, the SiH group may be present at the end of the molecular chain, and it is preferably 2 to 200, more preferably An integer from 20 to 200. If the crucible is too small, the amount of dimethyl polysulfide in the thermally conductive rubber sheet which is hardened, volatilized or infiltrated into the substrate after application will increase, and a stable addition reaction cannot be obtained. -14- 201114590 In addition, the component (B) can be used alone or in combination of two or more. The amount of the component (B) is added. The SiH group of the component (b) is compared with the vinyl group of the component (A). The molar amount is 0.5 to 5.0 moles, preferably 0.8 to 3.0 moles. When the amount of the Si-H group of the component (B) is less than 0.5 mol with respect to the vinyl group 1 in the component (A), the hardness of the cured product cannot be sufficiently obtained. Further, when the amount exceeds 5.0 moles, many SiH groups remain, so that the release property to the heteroconductive conductive adhesive is lowered. In the present invention, the (A) component and the (B) component are hardened, and the dimethylene group containing the addition reaction portion is 1 Torr with respect to the dimethyloxane unit in the hardened material. 2 moles above. More preferably 2 to 10 moles, more preferably 3 to 5 moles. The addition reaction moiety can be obtained by alkylation of a vinyl group in the component (a) with a hydrogenation of a hydrogen atom bonded to a halogen atom in the component (B). However, the form may be, for example, terminal-end bonding. , terminal _ side chain binding, side chain-side chain binding. The contribution to the increase in crosslink density is side chain-side chain binding>end-side chain binding> end-end binding, but the general reaction rate is its reverse end-end binding>end-side chain binding>; side chain - side chain bonding. In order to increase the crosslinking density, that is, the release property of the acrylic conductive adhesive, it is effective to increase the side chain-side chain bonding, but in order to stabilize the hardenability, it is preferred to allow the terminal-side chain bonding to coexist. Further, if the crosslinking density is too high, the hardness of the protective layer becomes high, which hinders the uniform pressure transmission, or the sheet is easily broken when pressed, so care must be taken. The platinum-based catalyst of the component (C) promotes an addition reaction of a vinyl group in the component (a) with a hydrogen atom bonded to a halogen atom in the component (B), and is obtained from the composition of the present invention from -15 to 201114590. The component of the cross-linking hardened material of the three-dimensional network structure. The component (C) can be used for all of the known catalysts used in the general hydroformylation reaction. Specific examples thereof include a uranium metal monomer such as platinum (containing uranium black), ruthenium, palladium, etc., H2PtCl4 · nH20 'H2PtCl6 · nH20 'NaHPtCle * nH20 ' KHPtCl6 * nH2〇' Na2PtCl6 * nH20 , K2PtCl4 · nH20 , PtCl4 . nH20 , PtCl2 , Na2HPtCl4 · nH20 (however, n is an integer of 0-6, preferably 0 or 6), etc. Platinum chloride, chloroplatinic acid and chloroplatinate, alcohol modified chlorination a combination of platinum acid, chloroplatinic acid and olefin, platinum group metal such as platinum black or palladium, supported on alumina, ruthenium oxide, carbon, etc., ruthenium-olefin complex, chlorotri(triphenylbenzene) Phosphoric acid (Wilkinson catalyst), platinum chloride, chloroplatinic acid, or a complex of a chlorinated platinum salt and a vinyl-containing decane. Further, the uranium-based catalyst system of the component (C) may be used singly or in combination of two or more. The amount of the component (C) is not particularly limited as long as it is an effective amount required for curing the composition of the present invention, but is generally 0.1 in terms of mass of the platinum group metal element of the component (A). ~1000 PPm, preferably 0. 5~500 ppm. The reaction control agent for the component (D) is used to adjust the reaction rate of the component (A) and the component (B) which are carried out in the presence of the component (C). The component (D) can be used for all of the known addition reaction inhibitors used in the general addition reaction hardening type polyoxo composition. Specific examples thereof include an acetylene compound such as 1-ethynyl-1-cyclohexanol or 3-butyn-1-ol, -16-201114590 nitrogen compound, an organic phosphorus compound, a sulfur compound, a compound, and an organic chlorine compound. Wait. Further, the addition reaction inhibitor of the component (D) may be used singly or in combination of two or more. The amount of the component (D) varies depending on the amount of the component (C). Therefore, it cannot be defined once, but it is only necessary to adjust the effective amount of the hydroformylation reaction to the desired reaction rate. In general, the mass of the component (A) may be about 10 to 50,000 ppm. When the amount of the component (D) is too small, sufficient usable time may not be secured. When the amount is too large, the hardenability of the composition may be lowered. (E) The component is at least one selected from the group consisting of a metal, a metal oxide, a metal nitride, and a metal carbide, and imparts heat conductivity, surface slipperiness, and film thickness stability at the time of coating to the release layer of the present invention. Specific examples of the metal include silver powder, copper powder, iron powder, nickel powder, and aluminum powder. Examples of the metal oxide include oxides of zinc, magnesium, aluminum, barium, and iron. The metal nitride may be exemplified by a nitride such as boron, aluminum or tantalum, and the metal carbide may be a carbide such as ruthenium or boron. Among them, the (Ε) component is preferably a cerium oxide powder, and particularly preferably a spherical one. Using this powder, particularly excellent surface slip and film thickness stability can be obtained. Moreover, because of the low specific gravity, there is little precipitation with time, and the coating can be stabilized. The average particle diameter of the (Ε) component is preferably 1 m or more and 30 μm or less, and particularly preferably 5 to 2 0 /z m. When the average particle diameter is less than 1 v m, it is difficult to obtain surface smoothness. Further, if it exceeds 30 // m, in order to prevent the detachment of the squeegee, it is necessary to increase the thickness of the coating film, and the thermal conductivity of the entire sheet is lowered. Therefore, it is necessary to increase the pressure and the temperature of the S1 heating metal tool. Further, the average particle diameter can be obtained by the particle size distribution measuring device obtained by the laser light -17-201114590 diffraction method, and can be obtained as a weight average 》 (E) component is a polyoxygen protection. The amount in the layer is 0.1% by mass or more and 30% by mass or less. It is particularly suitable to use in the range of 5 to 30% by mass. If it is less than 0.1% by mass, it is difficult to obtain the effect of surface slip and film thickness stability, and from this point, it is recommended to be 5% by mass or more. Moreover, when it exceeds 30 mass%, the release property with respect to the anisotropic conductive adhesive will fall. However, even if the amount of the component (E) is less than 0.1% by mass, the surface of the thermally conductive rubber sheet of the substrate is provided with a concavo-convex shape, and the coating can be carried out by roughening. The method of imparting irregularities to the surface of the rubber sheet is a method of transferring the uneven polystyrene rubber composition onto the plastic film having the surface of the uneven shape during the press forming, and transferring the uneven shape. Further, there is a method in which a roller having irregularities is applied to the surface of the sheet before curing, and the unevenness is transferred, but it is not limited thereto. The coating method of the protective layer of the present invention is a material for forming a polyfluorinated protective layer (the above-mentioned polyfluorene composition) which is dissolved in a solvent such as toluene on a thermally conductive polyoxyxene rubber sheet substrate to form a doctor blade. Coating, wire bar coating, bar coating, dip coating, spray coating, etc., a method of coating and forming, and a method of removing a solvent and heat-hardening directly in the atmosphere, but it is not limited to this. Further, the heat curing is preferably 120 to 180 ° C for 3 to 10 minutes, but is not limited thereto. The conventional protective layer is mainly composed of liquid polyoxyethylene rubber, and must be diluted with a solvent. In the invention, it is also possible to apply solvent-free coating by lowering the viscosity of (A) and (B) to -18-201114590. Compared with solvent dilution coating, the speed of the coating line can be increased, which can significantly improve productivity. The thickness of the protective layer of the present invention is preferably Ο.ίμηι or more and 30 μm or less. Due to the high cross-linking composition, even if it is a thin film thickness, the surface is modified to obtain high release property. However, if it exceeds 30/zm, the thermal conductivity of the entire sheet is lowered, so it is necessary to increase the set temperature of the pressurization and heating metal tool. [Embodiment] [Examples] Hereinafter, the present invention will be specifically described by way of examples and comparative examples, but the present invention is not limited to the examples described below. (Thermal conductive polyoxyethylene rubber sheet base material layer) The substrate coated with the polyoxygen oxide protective layer was a polymerized hydrogen oxide rubber sheet HC-25MS manufactured by Shin-Etsu Chemical Co., Ltd. (thickness 0.25 mm, thermal conductivity 〇_85 W/mK) ). (Preparation of coating liquid) E S1 To 100 parts by mass of the dimethylpolysiloxane having a vinyl group (component (A)), 0.2 parts by mass of 1-ethynyl-1-cyclohexanol is added ((C) Component) 'Vinyl oxoxane complex of chloroplatinic acid (platinum content: 0.5% by mass) 0.2 parts by mass (component (D)), after kneading, adding a hydrogen atom having a direct bond to a ruthenium atom Methyl polyoxyalkylene (component (B)) and high-purity true spherical oxidation of coarse particles having an average particle diameter of 1 5 # m and 3 5 // m or more -19- 201114590 矽塡 15 15 parts by mass ((E) component). In the examples, the composition of each of the components (A) was changed and evaluated. The component (B) is an average structure which is represented by the following formula (3). The amount of addition is adjusted such that the vinyl group in the component (A) and the hydrogen atom bonded to the ruthenium atom in the component (B) become equimolar. [化3]

(3) (塗佈方法) 於附PET之基材上以繞線棒塗佈器塗佈塗佈液,在160 °C之加熱爐中硬化5分鐘。又,於PET薄膜剝離後進一步以 200°C加熱處理4小時而得到評估用試樣。膜厚調整成約1 〇 (1 m。 (對於異方性導電接著劑之壓黏試驗評估) 在加熱至300 °C之加壓•加熱金屬工具加壓下固定薄 片(使聚矽氧保護層朝下,壓黏時以外係張貼薄片俾遠離 工具與玻璃)’進一步,於其下插入轉印有丙烯酸系異方 性導電接著薄膜之玻璃基板,在5MP a下壓黏10秒。薄片係 直接插入轉印有其後新的異方性導電接著薄膜的玻璃基板 ,進丫了壓黏。反覆此,同時並確認薄片與丙稀酸系異方性 導電接著薄膜之張貼情形的變化。 將評估結果表示於表1中。(3) (Coating method) The coating liquid was applied onto a substrate attached with PET by a wire bar coater, and hardened in a heating furnace at 160 ° C for 5 minutes. Further, after the PET film was peeled off, it was further heat-treated at 200 ° C for 4 hours to obtain a sample for evaluation. The film thickness is adjusted to about 1 〇 (1 m. (Assessed for the pressure-adhesion test of an anisotropic conductive adhesive). Pressurize under a pressurization of a heated metal tool heated to 300 °C (the polysilicon protective layer is facing) Next, when the pressure is applied, the sheet is attached to the outside of the tool and the glass is further removed. Further, a glass substrate to which an acrylic anisotropic conductive film is transferred is inserted, and the film is pressed at 5 MP a for 10 seconds. The glass substrate to which the new anisotropic conductive film was transferred was transferred, and the pressure was adhered. This was repeated, and the change of the sheet and the acrylic acid anisotropic conductive film was confirmed. Shown in Table 1.

-20- 201114590 [實施例1〜3、比較例1〜4 ] 就(A)成分,準備7種類以下述式(4)所示之構造 者。又,式中之X、y係表示於表1之値。 【化4】 ch3 CH2=CH-Si—〇 CH,-20-201114590 [Examples 1 to 3, Comparative Examples 1 to 4] For the component (A), seven types of structures represented by the following formula (4) were prepared. Further, X and y in the formula are shown in Table 1. [Chemical 4] ch3 CH2=CH-Si—〇 CH,

(4) [比較例5、6 ] 比較例1係使用來作爲基材之H C - 2 5 M S的評估結果。 又,比較例2係於其設有厚〇.〇2 mm保護層之信越化學工業 公司製聚砍氧橡膠薄片HC-25MR3。 [交聯點] 以矽亞乙基對二甲基矽氧烷構造100莫耳之莫耳數定 義。 使聚矽氧保護層藉四乙氧基矽烷及氫氧化鉀進行水解 ’以氣體色層分析-FID檢測器分析時所檢出之下述式(5 )〜(8)所示的乙氧基矽烷之譜峯面積進行算出。式(5 )爲源自於二甲基矽氧烷單元之成分、式(6)〜(8)爲 源自於矽亞乙基交聯點之成分。檢測出感度分別相異,但 從組成已知物質之測定結果進行修正,換算成莫耳比。 -21 - (5)201114590 【化5】 CH3 CH3CH2〇-Si-〇CH2CH3 CH3 CH, CH, CH3CH2〇-Si-CH2CH2-Si-〇CH2CH3 CH, CH, (6)(4) [Comparative Examples 5 and 6] Comparative Example 1 is an evaluation result of H C - 2 5 M S used as a substrate. Further, Comparative Example 2 was a polyacetal rubber sheet HC-25MR3 manufactured by Shin-Etsu Chemical Co., Ltd. which was provided with a thick 〇.〇2 mm protective layer. [Crosslinking point] The molar number of 100 moles of oxime ethylene to dimethyl oxirane was defined. The polyoxyxyl protective layer was hydrolyzed by tetraethoxy decane and potassium hydroxide. The ethoxy group represented by the following formula (5) to (8) detected by gas chromatography analysis-FID detector analysis. The peak area of decane was calculated. The formula (5) is a component derived from a dimethyloxane unit, and the formulae (6) to (8) are components derived from a cross-linking point of iridium ethylene. The detected sensitivities are different, but are corrected from the measurement results of the known substances and converted into molar ratios. -21 - (5)201114590 [Chemical 5] CH3 CH3CH2〇-Si-〇CH2CH3 CH3 CH, CH, CH3CH2〇-Si-CH2CH2-Si-〇CH2CH3 CH, CH, (6)

CH, I OCH^CH, CH3CH2〇-‘〒-CH2CH2-Si-〇CH2CH3 CH3 CH, (7) OCH2CH3 OCH0CH3 CH3CH2〇-Si-CH2CH2-Si-〇CH2CH3 CH3 CH, 以下,更詳細記載試驗條件之評估。 (聚矽氧保護層之處理方法) 將聚矽氧保護層0 · 1 g削去至小玻璃瓶Λ Υ,再添加四乙 氧基矽烷3g、氫氧化鉀O.Olg’進行密封。再以加熱 1小時後,於室溫以二氧化碳進行中和,以離心分離( 1 0000 rpm/10分)所得到之上清液藉Agilent公司製氣體色 層分析HP-6890 ( FID檢測器)解析。 (氣體色層分析測定條件) 機種:HP-6890 ( FID檢測器) 管柱:J&W DB-5MS (膜厚 l//m) 0.25 mm I.D.x30m 管柱溫度:50°C - ( l〇t /分鐘)—30(TC ( 10分鐘) -22- 201114590 注入口溫度:2 5 0 °C 檢測器溫度:3 Ο 0 °C 載體氣體:He ( 5mL/分鐘)CH, I OCH^CH, CH3CH2〇-'〒-CH2CH2-Si-〇CH2CH3 CH3 CH, (7) OCH2CH3 OCH0CH3 CH3CH2〇-Si-CH2CH2-Si-〇CH2CH3 CH3 CH, the following is a more detailed description of the test conditions . (Processing method of polyoxygen protective layer) The polyxyl oxide protective layer 0·1 g was cut into a small glass bottle Λ, and then added with 4 g of tetraethoxy decane and potassium hydroxide O.Olg'. After heating for 1 hour, the mixture was neutralized with carbon dioxide at room temperature, and the supernatant obtained by centrifugation (1 0000 rpm/10 min) was analyzed by gas chromatography analysis of HP-6890 (FID detector) by Agilent. . (Gas chromatography analysis conditions) Model: HP-6890 (FID detector) Column: J&W DB-5MS (film thickness l//m) 0.25 mm IDx30m Column temperature: 50 °C - (l〇 t / min) - 30 (TC (10 minutes) -22- 201114590 Note inlet temperature: 2 5 0 °C Detector temperature: 3 Ο 0 °C Carrier gas: He (5mL / min)

試樣注入量:2 a LSample injection amount: 2 a L

[壓黏次數(1 ) 、( 2 )] 所§胃壓黏次數(1)係壓黏後不接觸薄片,或只輕觸 ,薄片與丙烯酸系異方性導電薄膜分離,亦即,維持非常 輕之離型性之次數。又,壓黏次數(2 )係離型性降低, 丙烯酸.系異方性導電薄膜之成分至明確地朝薄片移動之次 數。 [結果] 在此次之壓黏試驗的條件中係在壓黏次數(1 )之項 目中實施例1〜3維持高達1 0次以上的離型性。其中,顯示 具有側鏈-側鏈交聯之實施例2發揮特優之離型性。 若交聯點未達2個,壓黏次數(1 )會特別降低,即使 很少的壓黏次數’亦可看到薄片與異方性導電薄膜之貼黏 〇 就比較例而言,雖載置信越化學工業(股)製單層薄 片及複層薄片’但不論單層、複層,而即使同樣地評估各 公司各種之薄片’對於丙烯酸系導電性接著劑之壓黏試驗 結果係並列,本發明係對於電氣•電子機器零件之熱壓黏 配線連接步驟的效率化很大貢獻者。 -23- 201114590 [表i] 實施例 1 實施例 2 實施例 3 比較例 1 比較例 2 比較例 3 比較例 4 比較例 5 比較例 6 X値 40 100 120 140 210 510 170 一 — y値 0 3 18 0 0 0 1 一 — 交聯點 3.8 3.7 8.2 1.2 0.8 0.4 1.5 — 0.5 塗佈液 無溶劑 無溶劑 無溶劑 無溶劑 稀釋 稀釋 無溶劑 一 稀釋 壓黏次數 Ο) 11 18 10 3 1 0 5 0 0 壓黏次數 (2) 36 48 33 31 29 22 30 23 22 -24-[Pressing times (1), (2)] § The number of times of gastric pressure sticking (1) is not contact with the sheet after pressure bonding, or is only lightly touched, and the sheet is separated from the acrylic anisotropic conductive film, that is, it is maintained very much. The number of times of light release. Further, the number of press-fits (2) is reduced in the release property, and the number of components of the acrylic anisotropic conductive film is clearly moved toward the sheet. [Results] In the conditions of this pressure-bonding test, the release properties of Examples 1 to 3 were maintained at up to 10 times in the number of press-fit times (1). Among them, Example 2 showing side chain-side chain crosslinking exhibited excellent release properties. If the number of cross-linking points is less than 2, the number of times of press-bonding (1) will be particularly lowered. Even if the number of times of pressing is small, the sticking of the sheet and the anisotropic conductive film can be seen. Confidence in the chemical industry (stock) single-layer sheet and multi-layer sheet 'but regardless of the single layer, the multi-layer, and even the same evaluation of each company's various sheets' pressure-resistance test results for acrylic conductive adhesives are juxtaposed, The present invention is a great contributor to the efficiency of the thermo-adhesive wiring connection step of electrical and electronic machine parts. -23- 201114590 [Table i] Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 X値40 100 120 140 210 510 170 One - y値0 3 18 0 0 0 1 — Crosslinking point 3.8 3.7 8.2 1.2 0.8 0.4 1.5 — 0.5 Coating liquid solvent free solvent free solvent free solvent dilution dilution solvent free dilution adhesive number Ο 11 18 10 3 1 0 5 0 0 Number of presses (2) 36 48 33 31 29 22 30 23 22 -24-

Claims (1)

201114590 七、申請專利範圍: 1. 一種熱壓黏用聚矽氧橡膠薄片,係於電氣電子機器 零件的熱壓黏配線連接步驟所使用之聚矽氧橡膠薄片爲由 導熱性聚矽氧橡膠薄片基材層與設於其至少一者的表面之 聚矽氧保護層所構成之複層的熱壓黏用聚矽氧橡膠薄片, 其特徵在於:該聚矽氧保護層爲由加成聚矽氧之硬化物所 構成,相對於二甲基矽氧烷單元((CH3)2Si01/2) 100莫耳 ,含有加成反應部之矽亞乙基(Si-CH2-CH2-Si) 2莫耳以 上。 2. 如申請專利範圍第1項之熱壓黏用聚矽氧橡膠薄片 ’其中聚矽氧保護層爲含有:於側鏈具有乙烯基之二有機 聚矽氧烷、於側鏈具有SiH基之有機氫聚矽氧烷、與鈾系 觸媒之聚矽氧組成物的硬化物。 3 ·如申請專利範圍第1或2項之熱壓黏用聚矽氧橡膠薄 片,其中上述聚矽氧保護層爲厚0.1 A m以上30 m以下。 4. 如申請專利範圍第1或2項之熱壓黏用聚矽氧橡膠薄 片,其中上述聚矽氧保護層爲含有選自金屬、金屬氧化物 、金屬氮化物、金屬碳化物之至少一種的無機粉末0.1質 量%以上3 0質量%以下。 5. 如申請專利範圍第1或2項之熱壓黏用聚矽氧橡膠薄 片,其中上述無機粉末爲球狀微粉末氧化矽。 6. 如申請專利範圍第1或2項之熱壓黏用聚矽氧橡膠薄 片,其中上述微粉末氧化矽爲平均粒徑1/zm以上30/zm以 下之球狀粉,進一步篩除3 5 # m以上之粗粒。 -25- 201114590 7.如申請專利範圍第1或2項之熱壓黏用 片,其中上述導熱性聚矽氧橡膠薄片基材 0.1 W/mK以上5 W/mK以下且厚0.05 mm以上 聚矽氧橡膠薄 層滿足導熱率 1 mm以下。 -26- 201114590 四 指定代表圖: (一) 本案指定代表圖為:無 (二) 本代表圖之元件符號簡單說明:無 201114590 五 本案若有化學式時,請揭示最能顯示發明特徵的化學 式:無201114590 VII. Patent application scope: 1. A thermocompression adhesive polysilicon rubber sheet, which is used for the thermocompression bonding line connection step of electrical and electronic machine parts. The polysilicon rubber sheet is made of thermal conductive polyoxyethylene rubber sheet. a thermosetting adhesive polyoxyethylene rubber sheet composed of a substrate layer and a polysilicon protective layer provided on at least one of the surfaces thereof, characterized in that the polyfluorene protective layer is an addition polycondensation Oxygenated by oxygen, containing 100% of dimethyloxane unit ((CH3)2Si01/2), an ethylene (Si-CH2-CH2-Si) 2 molar containing an addition reaction moiety the above. 2. The hot-pressed polyoxyxene rubber sheet of claim 1 wherein the polyoxygen protective layer comprises: a diorganopolyoxyalkylene having a vinyl group in a side chain and a SiH group in a side chain. A hardened substance of an organic hydrogen polyoxane and a polyoxonium composition of a uranium-based catalyst. 3. The hot-pressed polyoxyethylene rubber sheet according to claim 1 or 2, wherein the polyfluorene protective layer has a thickness of 0.1 Å or more and 30 m or less. 4. The thermocompression adhesive polyoxyethylene rubber sheet according to claim 1 or 2, wherein the polyfluorene protective layer contains at least one selected from the group consisting of a metal, a metal oxide, a metal nitride, and a metal carbide. The inorganic powder is 0.1% by mass or more and 30% by mass or less. 5. The hot press adhesive polyoxyethylene rubber sheet according to claim 1 or 2, wherein the inorganic powder is spherical fine powder cerium oxide. 6. The hot-pressed polyoxyethylene rubber sheet according to claim 1 or 2, wherein the fine powder cerium oxide is a spherical powder having an average particle diameter of 1/zm or more and 30/zm or less, and further sieving 3 5 # m above the coarse particles. -25- 201114590 7. The hot-pressed adhesive sheet according to claim 1 or 2, wherein the thermally conductive polyoxyethylene rubber sheet substrate has a thickness of 0.1 W/mK or more and 5 W/mK or less and a thickness of 0.05 mm or more. The thin layer of oxygen rubber satisfies the thermal conductivity of 1 mm or less. -26- 201114590 Four designated representative maps: (1) The designated representative figure of this case is: None (2) The symbol of the symbol of this representative figure is simple: No 201114590 If there is a chemical formula in the five cases, please disclose the chemical formula that best shows the characteristics of the invention: no
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