201113496 ·' 六、發明說明： 【發明所屬之技術領域】 本發明係提供一種模組化冷卻板及其製造方法，尤指其 技術上提供一種冷卻板模組單元，可依照需求拼接成不同 尺寸之冷卻板’或可替換冷卻板之部分損毁區塊者。 【先前技術】 Ο 〇 一般PVD製程所使用之靶材常需要適時的進行散熱降 溫以確保靶材正常反應，一般常見之靶材冷卻方式為利用 冷卻板挖設流道’令冷卻水流入並帶走部分熱量達到降严 之效果 '然而，若需要製作大面積冷卻板，必須要準； 作大面積冷卻板所需要的大面積之板材，台灣並無製作 大面積板材的機器，經常需要仰賴進口而耗費極大、 購買製作大面積冷卻板所需要之大面積板材再行加工=本 成大面積冷卻板，再者，冷卻板若有其中 — 、 —冷卻流道指 毁，而導致需要汰換整個冷卻板，不但浪 * * 不環保，又 要ib錢購買新的冷卻板。 是以，針對上述習知結構所存在之問題點，“ -種更具理想實用性之創新結構，實消費者所殷切：開發 亦係相關業者須努力研發突破之目標及方向。又刀企盼， 之製造開發 估後， 有鑑於此，發明人本於多年從事相關產品 與設計經驗，針對上述之目#，詳加設計與審慎: 終得一確具實甩性之本發明。 3 201113496 【發明内容】 欲解決之技術問題點：為因應大面積冷卻板的需求， 必須要準備製作大面積冷卻板所需要的大面積之板材，但 台灣並無製作大面積板材的機器’必須先仰賴進口購買製 作冷卻板所需要之大面積板材來加工製作成大面積冷卻板 ’以符合市場需求’再者’若因冷卻板其中一部份流道損 毁就必須要更換掉整個冷卻板，不但需要花費成本來更換 /新的冷卻板而且葙使環境造成污染。 解決問題之技術特點：為改善上述問題，本發明提供 一種模組化冷卻板及其製造方法，其步驟包括：s丨、製作 複數個冷卻板模組單元，每一個冷卻板模組單元均包括一 冷卻板與至少一頂蓋，該冷卻板上挖設至少一溝槽，該溝 槽上周緣處凹設有一嵌槽使得該頂蓋可嵌入該嵌槽；S2、 透過烊接手段將該頂蓋與該冷卻板結合以形成該冷卻板 模組單元之冷卻水道；S3、以具―攪拌頭之—摩擦棒在兩 個以上該冷卻板模組單元之接縫處間加壓並高速旋轉產生 熱把其中，该攪拌頭與該摩擦棒為不同軸心之設置以達 到偏心旋轉之效果，待材質軟化後，緩慢移動並持續使該 授拌頭高速旋轉攪拌 板模組單元間之結合 S4、最後取出該攪拌頭完成該冷卻 形成大面積之冷卻板。藉此，透過 本發明之冷卻板模組單^依照需求拼接出不同大小之冷 部板’並且透過偏心攪拌頭之摩擦攪拌銲手段可使冷卻板 201113496 &組單兀間之接合更平整’達到與大面積冷卻板相同之功 效，不需要仰賴進口購買製作大面積冷卻板所需之大面積 板材，就可以拼接製作出大面積之冷卻板，更不需要購買 製作不同冷卻板規格之機器以花費大量成本，再者，若冷 郃μ道或冷部板部分損毁，可將壞掉的那塊冷卻板模組單 兀切割下來而不破壞冷卻板模組單元本身之結構，替換新 冷卻板模組單元避免浪費且可增進冷卻板之壽命。 〇 冑照先别技術之功效：本發明之功效係透過冷卻板模 組單元拼接出不同大小之冷卻板以因應市場需求，且改善 以在因需要大面積冷卻板而耗費成本仰賴進口購買材料之 問題’且I組化冷卻才反單元間透過偏心攪拌頭之摩擦授摔 鲜手段可使接合更平整’拼接成大面積冷卻板並達到與大 片冷卻板相同之功效，使廠商不需要花費成本購買生產不 同規格冷卻板之機器，且可將壞掉那塊冷卻板模組單元切 〇割下來更替新的模組化冷卻板以增進冷卻板壽命，且不污 染環境，？文善習用因冷卻板小部份壞掉而導致需要更換整 片冷卻板而導致浪費之問題。 有關本發明所採用之技術、手段及其功效，兹舉一較 佳實施例並配合圖式詳細說明於后，相信本發明上述之目 的、構造及特徵，當可由之得一深入而具體的瞭解。 【實施方式】 201113496 本發明係提供一種模組化冷卻板及其製造方法，請先 參閱第一至四圖所不’本發明之模組化冷卻板係包含兩個 以上之冷卻板模組單元（1)所構成，該冷卻板模組單元 (1)包括一冷卻板（10)與至少一頂篕（20)，該冷 卻板（1 0 )上挖設至少-溝槽（1 1 )，該溝槽（！ i ) 上周緣處凹設有-嵌槽（"），使該頂蓋（2 0 )係容設 於°亥冷卻*反（1 〇 )之該嵌槽（1 3 )中以形成冷卻水道 ’並透過料㈣_、使用偏Μ拌頭之摩擦騎銲（a) 、電子束焊接或真空硬焊之手段結合該冷卻板（^ )與 名頂蓋（2 0 )’形成本發明之冷卻板模組單元（丄），最 後透過使用偏i拌頭之摩㈣拌銲手段（a)將該冷卻板 模組單元（1 )相互接合成所需大小之模組化冷卻板，以 因應市場需求’其該冷卻板模組單元（i )可為銅及 其合金、紹及其銘合金、鈦及其合金或其他輕金屬等所製 成0 參閱第-圖所示，本發明模組化冷卻板之製作方法其 步驟包括： S卜製作複數個冷卻板模組單元（1 )，每—個冷卻板 模組單元（1 )均包括一冷卻板（i 〇 )與至少一頂蓋（ 2 0 )，該冷卻板（i 〇 )上挖設至少一溝槽（丄1 )，該 溝槽（1 1 ) _L周緣處凹設有一嵌槽（丄3 )使得該頂蓋 (20)可嵌入該嵌槽（13); 201113496 頂蓋（2〇)與該冷卻 組單元（1)之冷卻水 S2、透過一焊接手段（b)將該 板（1 0 )結合以形成該冷卻板模 道； 1 )之一摩擦棒（3 )在兩個 )之接縫處間加壓並高速旋轉 (3 1 )與該摩擦棒（3 )為 旋轉之效果，待材質軟化後， (31)高速旋轉擾拌； (3 1 )元成該冷卻板模組單201113496 ·' VI. Description of the invention: [Technical field of the invention] The present invention provides a modular cooling plate and a manufacturing method thereof, and more particularly to a technically provided cooling plate module unit which can be spliced into different sizes according to requirements. The cooling plate 'or a part of the replacement block that can replace the cooling plate. [Prior Art] 靶 靶 The target used in the general PVD process often needs to be cooled and cooled in time to ensure the target's normal reaction. The common target cooling method is to use the cooling plate to dig the flow channel to make the cooling water flow in and out. Take some of the heat to achieve the effect of reducing the severity. However, if it is necessary to make a large-area cooling plate, it must be accurate; for large-area plates required for large-area cooling plates, Taiwan does not have a machine for making large-area plates, and often needs to rely on imports. It is extremely expensive, and the large-area plate required for the production of a large-area cooling plate is reprocessed = the large-area cooling plate is formed. In addition, if the cooling plate has its own -, the cooling flow path is destroyed, and the whole process needs to be replaced. Cooling plate, not only * * Not environmentally friendly, but also ib money to buy a new cooling plate. Therefore, in view of the problems in the above-mentioned conventional structure, "the innovative structure with more ideal and practicality is really eager for consumers: development is also the goal and direction of the relevant industry players to work hard to develop breakthroughs. After the manufacturing development and evaluation, in view of this, the inventor has been engaged in related products and design experience for many years, and for the above-mentioned purpose #, detailed design and prudence: the invention has finally become practical. 3 201113496 [Invention Contents] Technical problems to be solved: In order to meet the demand for large-area cooling plates, it is necessary to prepare large-area plates for large-area cooling plates. However, Taiwan does not have machines for making large-area plates. The large-area plate required for the production of the cooling plate is processed into a large-area cooling plate to meet the market demand. Furthermore, if a part of the flow path of the cooling plate is damaged, the entire cooling plate must be replaced, which not only costs Cost to replace/new cooling plate and cause environmental pollution. Problematic technical features: In order to improve the above problems, the present invention provides a The modular cooling plate and the manufacturing method thereof comprise the steps of: manufacturing a plurality of cooling plate module units, each cooling plate module unit comprising a cooling plate and at least one top cover, wherein the cooling plate is dug At least one groove, a groove is recessed in the upper periphery of the groove so that the top cover can be embedded in the groove; S2, the top cover is combined with the cooling plate through a splicing means to form the cooling plate module unit a cooling water channel; S3, pressing a friction bar with a stirring head between two or more joints of the cooling plate module unit and rotating at a high speed to generate a heat, wherein the stirring head and the friction bar are different axes The setting of the heart is to achieve the effect of eccentric rotation. After the material is softened, slowly move and continue to rotate the mixing head at a high speed to rotate the mixing plate module unit S4, and finally take out the stirring head to complete the cooling to form a large area cooling plate. In this way, through the cooling plate module of the present invention, the cold plate of different sizes can be spliced according to requirements, and the friction stir welding method of the eccentric stirring head can be used to connect the cooling plate 201113496 & The combination of the same effect as the large-area cooling plate does not require the large-area plate required for the large-area cooling plate to be purchased. It can be spliced to produce a large-area cooling plate, and it is not necessary to purchase different cooling plates. The size of the machine is costly. In addition, if the cold or the cold plate is partially damaged, the broken cooling plate module can be cut without breaking the structure of the cooling plate module unit itself. Replacing the new cooling plate module unit to avoid waste and improve the life of the cooling plate. Depending on the effect of the prior art: the effect of the present invention is to splicing different sizes of cooling plates through the cooling plate module unit to meet market demand, and Improvements in the cost of relying on imported materials for large-area cooling plates, and the cooling of the I-group cooling unit through the eccentric stirring head can make the joints smoother and spliced into large-area cooling plates. And achieve the same effect as the large cooling plate, so that manufacturers do not need to cost to buy machines that produce different specifications of cooling plates, and can be bad Piece cooling plate module replacement unit cut square cut off the new modular cooling plate cooling plates to enhance life, not pollution environment? Wenshan has a problem caused by the need to replace the entire cooling plate due to a small part of the cooling plate being broken. The above-mentioned objects, structures and features of the present invention will be described in detail with reference to the preferred embodiments of the present invention. . [Embodiment] 201113496 The present invention provides a modular cooling plate and a manufacturing method thereof. Please refer to the first to fourth figures. The modular cooling plate of the present invention includes more than two cooling plate module units. (1) The cooling plate module unit (1) includes a cooling plate (10) and at least one top cymbal (20), and the cooling plate (10) is provided with at least a groove (1 1 ). A groove (") is recessed in the upper periphery of the groove (! i), so that the top cover (20) is accommodated in the recessed cooling tank (1 〇) (1 3 In order to form a cooling water channel 'and through the material (4) _, using a yaw mixing head friction welding (a), electron beam welding or vacuum brazing combined with the cooling plate (^) and the name top cover (20) Forming the cooling plate module unit (丄) of the present invention, and finally joining the cooling plate module units (1) to a desired size by means of a friction welding method (a) using a partial mixing head (a) Board, in response to market demand, 'the cooling plate module unit (i) can be copper and its alloys, and its alloy, titanium and its alloys or other light metals The method for manufacturing the modular cooling plate of the present invention comprises the following steps: S-making a plurality of cooling plate module units (1), each cooling plate module unit (1) Each includes a cooling plate (i 〇) and at least one top cover (20), and at least one groove (丄1) is dug on the cooling plate (i 〇), and the groove (1 1 ) _L is recessed at the periphery a recessed groove (丄3) allows the top cover (20) to be embedded in the recessed groove (13); 201113496 top cover (2〇) and the cooling group unit (1) cooling water S2, through a welding means (b) Combining the plate (10) to form the cooling plate die; 1) one of the friction bars (3) is pressurized between the joints of the two) and rotates at a high speed (3 1 ) with the friction bar (3) For the effect of rotation, after the material is softened, (31) high-speed rotation is disturbed; (3 1) Yuan into the cooling plate module
53、 以具一擾拌頭（3 以上該冷卻板模組單元（丄 產生熱能，其中，該挽拌頭 不同軸心之設置以達到偏心 緩慢移動並持續使該攪拌頭 54、 最後取出該攪拌頭 元（1 )間之結合’形成大面積之冷卻板。 藉此，透過本發明之冷卻板模組單元可依照需求拼接 出不同大小之冷卻板，並且透過偏心麟頭之摩擦授掉鲜 手段可使冷卻板模組單元間之接合更平整，達到與大面積 冷卻板相同之功效，不需要仰賴進口購買材料就可以直接 以拼接方式製作大面積冷卻板，再者，若冷卻流道或冷卻 板部分損毀，可將壞掉那塊冷卻板模組單元切割下來，同 時也不破壞冷卻板模組單元之結構，替換新冷卻板模組單 元避免浪費且可增進冷卻板之壽命，解決習用冷卻板因小 部分壞掉而導致需要更換整月冷卻板而造成浪費且花費成 本之問題。 前文係針對本發明之較佳實施例為本發明之技術特徵 進行具體之說明；惟，熟悉此項技術之人士當可在不脫離 201113496 本發明之精神與原則 鐵φ 本發明進行變更與修 變更與修改，皆 中〇 改 應涵蓋於‘ 、下申鲕專利範圍所界定 而該等 之範疇 【圖式簡單說明】 第-圖係本發明之製作方法流程圖。 圖 第二圖係本發明之冷卻板模組單元耕接示意圖 第二圖係本發明之冷㈣道剖面示意 第四圖係本發明之—實施例示意圖： 【主要元件符號說明】 (1 )冷卻板模組單元 (3 )摩擦棒 (3 1 )攪拌頭 (1 0 )冷卻板 (1 1 )溝槽 (13)嵌槽 (2 0 )頂蓋 (a)使用偏心攪拌頭之摩擦攪拌銲手段 (b )焊接手段53. With a stirrer head (more than 3 cooling plate module units (the heat is generated, wherein the different axes of the mixing head are arranged to achieve eccentric slow movement and continue to make the stirring head 54, finally take the stirring The combination of the head elements (1) forms a large-area cooling plate. Thereby, the cooling plate module unit of the present invention can be used to splicing different sizes of cooling plates according to requirements, and the means for imparting friction through the biasing of the eccentric lining head The joint between the cooling plate module units can be made flater, and the same effect as the large-area cooling plate can be achieved, and the large-area cooling plate can be directly formed by splicing without relying on the imported materials, and if the cooling channel or cooling is performed Part of the board is damaged, the broken cooling plate module unit can be cut off, and the structure of the cooling plate module unit is not damaged. The replacement of the new cooling plate module unit avoids waste and can improve the life of the cooling plate, and solve the conventional cooling. The problem that the board needs to be replaced by the replacement of the cooling plate for a whole month due to a small portion is broken is costly and costly. The foregoing is directed to a preferred embodiment of the present invention. The technical features of the present invention are specifically described; however, those skilled in the art can make modifications and alterations and modifications of the present invention without departing from the spirit and principles of the present invention. The scope of the patent application is defined by the scope of the patent application. [FIG. 1] is a flow chart of the manufacturing method of the present invention. The second drawing is the second diagram of the slab connection diagram of the cooling plate module unit of the present invention. The fourth section of the cold (four) track of the present invention is a schematic view of the present invention - [the main component symbol description] (1) the cooling plate module unit (3) the friction bar (3 1 ) stirring head (10) cooling Plate (1 1 ) groove (13) groove (20) top cover (a) friction stir welding method using eccentric stirring head (b) welding means