TW201109682A - Method of measurement and print sheet resistance of articles and system of the same - Google Patents

Method of measurement and print sheet resistance of articles and system of the same Download PDF

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TW201109682A
TW201109682A TW98129970A TW98129970A TW201109682A TW 201109682 A TW201109682 A TW 201109682A TW 98129970 A TW98129970 A TW 98129970A TW 98129970 A TW98129970 A TW 98129970A TW 201109682 A TW201109682 A TW 201109682A
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Taiwan
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resistance value
measurement
measured
measuring
probes
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TW98129970A
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Chinese (zh)
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TWI338783B (en
Inventor
Chao-Hsi Cheng
Hsin-Ming Chang
Liang-Hung Lee
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Suntek Prec Corp
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Publication of TW201109682A publication Critical patent/TW201109682A/en

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Abstract

A system for measurement and print of sheet resistances of thin film formed on the articles and a method of the same is disclosed. The system comprises apparatus including a plurality of 4-probes for sheet resistance at a plurality of measuring points simultaneously, a control module for data process, and a printer. After the sheet resistances of the thin film are measured, the data are processed and print on the article.

Description

201109682 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種電阻值量測系統,特 量測電阻值之後可自動將量測數值直接襟麵 量測點之量測系統。 π条終火件食 【先前技術】 對於各種的待測工件而言,多個待挪 是非常重要的參考數據。例如:在塑膠件颭<蕙瞇 層上,藉由量測多點電阻值,即可得知金1金屬幾噼 否均勻’以及塑膠件中有無斷路。 趣取層^ 但目前在取得多點電阻值時,大都是 或數位式三用電表,並以人工方式一點一點匕式 測。這種的量測方式,除了量測時間冗長外笑慢%量 費昂貴的人力成本,導致使用者在實際^量測亦需耗 常只會挑選部分的待測點,而難以全面性量測^,通 阻值,因此容易產生偏差或遺漏而影響判斷。'夕點電 旦在申請案號為97131338之專利案中,已提供一種 里測多點電阻值之量測系統及其方法,藉由同步以量 測電路分時量測被傳送電流之二探針的跨壓,可在短 時間内大量量測多個待測點,此自動化量測電阻值的 方式可大幅降低人力成本。 然而,經過量測之後,每一工件金屬鍍膜之品質 如何只有供貨廠商清楚。對於客戶而言,在購入每一 201109682 批工件時’還需再自行進行檢測,但也僅能從一整批 工件中’抽樣進行檢測’而檢測結果也無法客觀的反 映每一工件的品質。因此,為了提高客戶的信任感, 供貨廠商有責任主動提供工件的檢測資料。 【發明内容】201109682 VI. Description of the Invention: [Technical Field] The present invention relates to a resistance value measuring system, which can automatically measure the measured value directly after measuring the measuring point. Π-end fire-fighting food [Prior Art] For various workpieces to be tested, multiple data to be moved are very important reference data. For example, on the plastic part 飐<蕙眯 layer, by measuring the multi-point resistance value, it can be known whether the metal 1 metal is uniform or not, and whether there is an open circuit in the plastic part. Interesting layer ^ However, when multi-point resistance values are obtained, most of them are digital or digital-type three-meter meters, and they are manually measured by a little bit. This kind of measurement method, in addition to the lengthy measurement time, is slower than the cost of manpower, which leads to the user's actual measurement. It is also necessary to select only some of the points to be tested, and it is difficult to measure comprehensively. ^, the resistance value, so it is easy to produce deviations or omissions and influence judgment. In the patent case of the application number 97131338, a measurement system and a method for measuring the multi-point resistance value have been provided, and the second measurement of the transmitted current by synchronizing the measurement circuit with time measurement is provided. The cross-pressure of the needle can measure a large number of points to be measured in a short time, and the method of automatically measuring the resistance value can greatly reduce the labor cost. However, after the measurement, the quality of each workpiece metal coating is only clear to the supplier. For the customer, when purchasing each 201109682 batch of workpieces, it is necessary to carry out the inspection itself, but it can only be sampled from a batch of workpieces and the inspection results can not objectively reflect the quality of each workpiece. Therefore, in order to improve the customer's trust, the supplier is responsible for providing the inspection data of the workpiece. [Summary of the Invention]

有寥於上述課題’本發明之目的係提供一種電阻 值莖,系統,用以對一已鍍金屬膜的塑料工件進行電 阻值量測,且在量測電阻值之後可將量測數值直接標 不於工件’量測系統包括:_控制裝置,用以進行數 據處理;-量測設備,電性連接控制裝 具有複數個探針,以形成多個電_量_> 控=『量測設備自動對工件上的多個待測點進 灯夏測後,再將制後之數據傳回控财置處理,以 得到這些_點之電阻值;以及—打印歡,電 接於控制裴置’打印模組具有—印字頭,控制 這些待測點之電喊傳送至_卩字頭,印字頭將待測 點的電阻值印刷於該工件上一預定位置。 同時,本發明相對於先前技術之功效·,除可 化量測電阻值外,亦可在極短的時間内,大量 多個待測點,並且,在量測電阻值之後立即將電阻值 標示於這些待測點。 【實施方式】 為使本發明之上述目的、特徵和優點 懂,下文依本發明電阻值量測系統,在量測電阻值^ 201109682 後可將量測數值直接標示於工件。特舉較佳實施例, 並配合所附相關圖式,作詳細說明如下,其中相同的 元件將以相同的元件符號加以說明。 請參閱圖1,係顯示本發明電阻值量測系統示意 圖,用以對一已鍍金屬膜的塑料工件10進行電阻值 量測。圖中,電阻值量測系統1包含一控制裝置11, 一量測設備12及一打印模組13。 所述的控制裝置11較佳為一電腦、一控制台或 • 一處理器,用以對所量測的數據進行處理。控制裝置 包括一顯示單元110、一儲存單元111、一處理單元 112及一驅動程式113。 所述的量測設備12電性連接該控制裝置11,具 有複數個探針120〜120e以形成多個電阻值量測點, 其中,控制裝置11控制量測設備12之探針120〜120e 自動對工件10上的多個待測點進行量測後,再將量 測後之數據傳回控制裝置11處理,以得到該些待測 φ 點之電阻值。 > 以本發明實施例而言,量測設備12包括一平台 121及一活動板122。在量測之前,先將一待測工件 10置於平台121上。此待測工件10較佳為一金屬鍍 膜之塑膠件或一金屬鍍膜之非導體元件。而所述的探 針120〜120e——設置於活動板122之一第一組預定 位置,以形成多個電阻值量測點,量測工件10上複 數個待測點的電阻值,本發明實施例中,待測點之位 置如第二圖所示,待測點標示為100〜102。活動板122 201109682 係根據社件之客製化需求而設立探針120〜120e之 Ϊ置=此些探針12 Q〜12 Q e之位置或更換相對 應之/動板122 ’藉此量測各式各樣的待測工件10。 "Μ卜,為了控制活動板122之升降,使設置於活 動板^ ί探針120〜12加可正好接觸於工件10之 表面^行1測。因此,在本發明實施例中,量測設備 更包升降裝置123。活動板122在升降過程中需 能穩定,而不抖動。 為了對提供電流給所述的探針進行量測,測量 設備12會具有一電源供應器124及一量測電路 125’由電源供應器124提供—電流I%(通常為定電 流),使電流126傳送至控制裝置11,控制電流之流 向,並在極*短的時間(如幾毫秒)内,讓電流透過控制 裝置11陸續傳送至預定之-組探針,例如:探針12〇 與!f 探針12〇b與12〇C或探針120d與12〇e… 等,請注意以上的每一組都是四點探針,請同時來考圖 1a,例如探針12〇包含兩支相鄰的探針,12如也是 兩支相鄰的探針’四點探針中内圈的兩支用以量跨壓 Vh-V^ h則是流經該兩支探針至電壓計(未圖示)的電 流。較外圈的兩支則是用以送電流丨到薄膜 相較於€机丨是很小的,因此,可以視流經薄承 流就相等於電流I,,電流丨就相當於所= 的電阻,一般稱為片電阻(以下的描述只以,,電阻值,,稱 且探針編號,以便於分別不同級探針所 和件之貝m。本發明實施财,參照第三圖 工件10上之待測點。將探針120與120a編為第L組 201109682 測量待測點100之電阻值,探斜9 ^值休针12〇b與120c編為第 二組測董相點ιοί之電阻值,探針i2〇d與i2〇e 編為第三組測量待測點1〇2之電阻值。 所述的打印模組13,打印模組13具有一印字頭 130,電性連接於控制裝置11。在前述三組探針量測 完工件之複數個待測點之後,控制裝置仂計算出每 個待測點的電阻值,並驅動所述的印字 3〇,以 電阻值印刷於工件上的—狀位置⑽。所述的預定 位置103可任忍選擇,或可在所述的待測點1⑻〜似 上,打印其電阻值,也可如本發明實施例,在工件1〇 的-角落將每-組探針所量測之電阻㈣條列方式標 不 本發明實施例中,為了驅動所述的印字頭1 3〇打 印於工件上的預定位置103,控制裝置彳1更包括一驅 動程式113。 本發明之另一實施例中,所述的打印模組13也可 具有一第二組個印字頭,設置於活動板122之一第二 =預定位置,以在每-組探針量測完财待測點的& 值,控制裝置11内的驅動程式113即驅動印字頭, 立即將所量測的電阻值打印於每個待測點i 〇〇〜彳〇2。 在量測時,分時傳送電流至每一組四點探針的外 =二探針’再以量測電路125量測每一組四點探針的 内圈二探針的電壓做為跨壓127。跨壓’27及電流126 $值被傳送至控制裝置U,來計算每崎針所量測 电阻值。 測到 隨後,利用處理單元112對此些待測點所量 201109682 的數值做處理,以及分析此些待測點之電阻值的分佈 圖,藉此了解待測工件1〇上金屬鍍祺層之均勻度及 有無斷路。處理單元112隨後控制印字頭彳3〇,=所 量測的多點電阻值,依編號列印於印設工件1〇之預 設位置。 本發明具有以下優點:In view of the above problems, the object of the present invention is to provide a resistance stem, a system for measuring a resistance value of a metal workpiece having a metallized film, and directly measuring the resistance value after measuring the resistance value. The measurement system does not include: _ control device for data processing; - measurement device, electrical connection control device with a plurality of probes to form a plurality of electricity _ > control = "measurement The device automatically enters the plurality of points to be tested on the workpiece for summer measurement, and then transfers the processed data back to the control and processing to obtain the resistance values of the _ points; and - printing, electrically connected to the control device The printing module has a printing head, and the electric shouts controlling the points to be measured are transmitted to the _卩 head, and the printing head prints the resistance value of the point to be measured on a predetermined position on the workpiece. At the same time, according to the effect of the prior art, in addition to the measurable resistance value, a large number of multiple points to be measured can be detected in a very short time, and the resistance value is marked immediately after measuring the resistance value. At these points to be tested. [Embodiment] In order to understand the above objects, features and advantages of the present invention, in the following, according to the resistance value measuring system of the present invention, the measured value can be directly indicated on the workpiece after measuring the resistance value ^201109682. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT(S) The detailed description of the preferred embodiments will be described with reference to the accompanying drawings. Referring to Fig. 1, there is shown a schematic diagram of a resistance value measuring system of the present invention for measuring a resistance value of a metallized plastic workpiece 10. In the figure, the resistance value measuring system 1 comprises a control device 11, a measuring device 12 and a printing module 13. The control device 11 is preferably a computer, a console or a processor for processing the measured data. The control device includes a display unit 110, a storage unit 111, a processing unit 112, and a driver 113. The measuring device 12 is electrically connected to the control device 11 and has a plurality of probes 120-120e to form a plurality of resistance value measuring points, wherein the control device 11 controls the probes 120 to 120e of the measuring device 12 to automatically After the plurality of points to be measured on the workpiece 10 are measured, the measured data is sent back to the control device 11 for processing to obtain the resistance values of the φ points to be measured. > In the embodiment of the present invention, the measuring device 12 includes a platform 121 and a movable panel 122. Prior to the measurement, a workpiece 10 to be tested is placed on the platform 121. The workpiece 10 to be tested is preferably a metal plated plastic part or a metal coated non-conductor element. The probes 120 to 120e are disposed at a first predetermined position of one of the movable plates 122 to form a plurality of resistance value measuring points, and measure the resistance values of the plurality of points to be measured on the workpiece 10, and the present invention In the embodiment, the position of the point to be measured is as shown in the second figure, and the points to be measured are indicated as 100 to 102. The movable plate 122 201109682 is set up according to the customization requirements of the social parts. The position of the probes 120 to 120e = the position of the probes 12 Q~12 Q e or the corresponding corresponding / movable plate 122 ' A wide variety of workpieces 10 to be tested. " In order to control the lifting and lowering of the movable plate 122, the probes 120 to 12 disposed on the movable plate can be just in contact with the surface of the workpiece 10. Therefore, in the embodiment of the present invention, the measuring device further includes the lifting device 123. The movable plate 122 needs to be stable during the lifting process without being shaken. In order to provide current to the probe for measurement, the measuring device 12 will have a power supply 124 and a measurement circuit 125' provided by the power supply 124 - current I% (usually constant current), the current 126 is transmitted to the control device 11 to control the flow of current, and in a very short time (such as a few milliseconds), the current is transmitted through the control device 11 to a predetermined group of probes, for example, the probe 12 〇 and ! f Probe 12〇b and 12〇C or probes 120d and 12〇e... etc. Please note that each of the above groups is a four-point probe. Please refer to Figure 1a at the same time. For example, probe 12〇 contains two Adjacent probes, 12 are also two adjacent probes. Two of the inner rings of the four-point probe are used to measure the cross-pressure Vh-V^h and flow through the two probes to the voltmeter ( Current not shown). Compared with the outer casing, the two coils are used to send current to the membrane. Compared with the casing, it is very small. Therefore, it can be regarded as equal to the current I by flowing through the thin tube, and the current 丨 is equivalent to the resistance of =. Generally referred to as the sheet resistance (the following description only, the resistance value, the scale and the probe number, in order to facilitate the different stages of the probe and the shell of the member. The invention is implemented, refer to the third figure on the workpiece 10 Point to be tested. The probes 120 and 120a are grouped into the Lth group 201109682. The resistance value of the point to be tested 100 is measured, and the 9^ value of the needle 12〇b and 120c is recorded as the resistance value of the second group of the measured phase points ιοί. The probes i2〇d and i2〇e are programmed into a third group of resistance values of the measurement point 1〇2. The print module 13 has a print head 13 electrically connected to the control device. 11. After the foregoing three sets of probes measure the plurality of points to be measured of the workpiece, the control device calculates the resistance value of each point to be measured, and drives the printing 3〇 to print the resistance value on the workpiece. - position (10). The predetermined position 103 can be tolerated, or can be at the point 1 (8) to be measured. Printing the resistance value, as in the embodiment of the present invention, the resistance (four) strips measured by each set of probes in the corner of the workpiece 1 is not marked in the embodiment of the present invention, in order to drive the print head The control unit 更1 further includes a driver 113. In another embodiment of the invention, the print module 13 can also have a second set of print heads. The second=predetermined position is set in one of the movable plates 122 to measure the & value of the financial point to be measured in each set of probes, and the driver 113 in the control device 11 drives the printing head, and the measured value is immediately measured. The resistance value is printed at each of the points to be measured i 〇〇 彳〇 。 2. During the measurement, the current is distributed to the external = two probes of each set of four-point probes, and then measured by the measuring circuit 125 The voltage of the inner probe and the two probes of each set of four-point probes is used as the cross-pressure 127. The value of the cross-voltage '27 and the current 126 $ is transmitted to the control device U to calculate the measured resistance value of each squirrel needle. Then, the processing unit 112 processes the values of the 201109682 of the points to be measured, and analyzes the points to be measured. The distribution map of the resistance value, thereby understanding the uniformity of the metal plating layer on the workpiece 1 to be tested and whether there is an open circuit. The processing unit 112 then controls the printing head 彳3〇, = the measured multi-point resistance value, according to the number The printing is performed at a preset position of the printed workpiece 1 。. The present invention has the following advantages:

彳薄膜電阻多點近乎同步量測(因分時緣故),打 印模組將量測後的電阻值即時記錄於工件上,相較於 過去的抽驗方式,本發明顯然更具公信力。 、 2本發㈣、統所㈣在薄_化電阻值也可以 立即回饋至濺鍍系統做為濺鍍系統參數調整的依據。 本發明雖以較佳實例闡明如上,然其並相以限 定本發明精神與發明實體僅止於上述實 此項技術者,當可輕易了解並利用其它轉或方^ J生相同的功效。是以’在不脫離本發明之精神i範 鳴内所作之修改,均應包含在下述之巾請專利範圍内& 【圖式簡單說明】 圖 係顯示本發明電阻值量測系統之示意圖。 圖13係顯示本發明四點探針電阻值量測示意圖。 圖2 =二電阻值量測系統將量測後之電阻 值打印於工件之示意圖。 201109682 【主要元件符號說明】 1 :電阻值量測系統 10 :工件 10a:薄膜 100〜102 :待測點 103 :預定位置 11 :控制裝置 110 :顯示單元 111 :儲存單元 112 :處理單元 113 :驅動程式 12 :量測設備 120〜120e :探針 121 :平台 122 :活動板 123 :升降裝置 124:電源供應器 125 :量測電路 126 :電流 127 :跨壓 130 :印字頭 13 :打印模組彳The film resistance is nearly synchronously measured (due to time sharing), and the printing module records the measured resistance value on the workpiece immediately. Compared with the past sampling method, the invention is obviously more credible. 2, the hair (4), the system (4) in the thin _ resistance value can also be immediately fed back to the sputtering system as the basis for the adjustment of the sputtering system parameters. The present invention has been described above by way of a preferred example, and it is intended to limit the spirit of the invention and the inventive entity only to those skilled in the art, and the same effects can be readily understood and utilized. The modifications made in the present invention without departing from the spirit of the present invention are included in the scope of the following claims. & BRIEF DESCRIPTION OF THE DRAWINGS The figure shows a schematic diagram of the resistance value measuring system of the present invention. Fig. 13 is a view showing the measurement of the resistance value of the four-point probe of the present invention. Figure 2 = Schematic diagram of the two-resistance measurement system to print the measured resistance value on the workpiece. 201109682 [Description of main component symbols] 1 : Resistance value measuring system 10 : Workpiece 10a : Film 100 to 102 : Point to be tested 103 : Predetermined position 11 : Control device 110 : Display unit 111 : Storage unit 112 : Processing unit 113 : Drive Program 12: Measuring device 120~120e: Probe 121: Platform 122: movable plate 123: lifting device 124: power supply 125: measuring circuit 126: current 127: voltage across 130: printing head 13: printing module

Claims (1)

201109682 七、申請專利範圍: 1、 -種電阻值量測系統,用以對—已鑛金屬膜的塑料工 件進仃電阻值量測,該量測系統包括: 一控制裝置,用以進行數據處理; 里測叹備,電性連接該控制裝置,具有複數個 該控制裝置控制該.量 量測後之數據傳曰該控制;置二點==再將 之電阻值;以及 以侍到該些待測點 一打印模組,電性連接於= 有-印字頭’該控制I置裝置’該打印模組具 該印字頭,該印字頭將該些=些待測點之電阻值傳送至 件的一預定位置。 一个剩點的電阻值印刷於該工 2、 如申請專利範圍帛1項戶斤、+、 制裝置係為一電腦、一控制二迷之量測系統,其中該控 3、 如申請專利範圍第广| 〇或一處理器。 定位置可選擇在該些待 ^述之篁測系統,其中該預 4、 如申請專利範圍第]'項或該工件的角落。 測設備包括一平台,用以放^述之量測系統,其中該量 以將該些探針一一設置於訪、、該塑料工件,一活動板, 置,以量測該塑科工件上診U舌動板的一第一組預定位 5、 如申請專利範固第4 μ二待夠點的電阻值。 動板係根據該塑料工件之斤述之量測系統’其中該活 位置。 W化而求而設立該些探針之 6、 如申請專利範固第4 印模組更包括一第二組印字_迷之量測系統,其中該打 於該活動板之一第二組預=碩,該第二組印字頭係設置 疋位置,以在該些探針量測完 201109682 ==測點的電阻值之後,直接將所量測 於該待測點。 J 1 申二專,…所述之量测系統,其中該量 降’使該活動板上之該錄針正好接觸該板升 行電阻值量測。 m件表面以進 8、如申請專利範圍第彳項所述之 制裝置更包括一驄叙拉4 ^ ^ 予統其中該控 所處理的該二式接收該控制裝置 疋位置打印該些待測點之電阻值。 碩於該預 9二申:青專利範㈣1項所述之量測系統,1中,曰 2統更包括電流-電源供應器及一量測電路::, 二探針的一跨該量測電路測得該預定 電g。 由該跨壓及該電料算該待測點之 1 曰請專利_第1項所述之量m 整的依據。 口饋至麟系、统以作為濺錄調 11201109682 VII. Patent application scope: 1. A resistance value measurement system for measuring the resistance value of a plastic workpiece with a metal film. The measurement system includes: a control device for data processing Measure the sigh, electrically connect the control device, and have a plurality of the control devices to control the data after the measurement; pass the control; set the two points == and then the resistance value; The printing module to be tested is electrically connected to the =-printing head. The control module has the printing head, and the printing head transmits the resistance values of the points to be measured to the piece. a predetermined location. A residual resistance value is printed in the work 2, such as the scope of patent application, 1 household, +, system is a computer, a control system for controlling two fans, wherein the control 3, such as the scope of patent application Wide | 〇 or a processor. The position may be selected in the above-described test system to be described, wherein the pre-four, such as the scope of the patent application, or the corner of the workpiece. The measuring device comprises a platform for placing the measuring system, wherein the measuring device sets the probes one by one, the plastic workpiece, and a movable plate to measure the plastic workpiece. A first set of pre-positions 5 of the U-moving plate of the upper diagnosis, such as the resistance value of the patented fourth solid. The moving plate measures the system 'where the living position is based on the measurement of the plastic workpiece. The invention also establishes the probes 6, such as the patent application, the fourth printing module further includes a second group of printing_the measurement system, wherein the second group of the activity board is = Master, the second set of print heads is set to the position, so that after the probes measure the resistance value of the test point of 201109682 ==, the measured point is directly measured. J 1 申二专, ...the measuring system, wherein the amount of drop is such that the stylus on the movable plate is just in contact with the plate rising resistance value measurement. The surface of the m-piece is advanced, and the device as described in the scope of the patent application includes a 4 拉 4 4 ^ ^ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The resistance value of the point. Mastering the pre-9:2 application: The measurement system described in the 1st paragraph of the Green Patent (4), 1 , the 曰 2 system further includes a current-power supply and a measuring circuit::, a cross-measure of the two probes The circuit measures the predetermined power g. From the cross-pressure and the electric material, the basis of the amount to be measured is calculated according to the quantity of m described in the patent_1. The word is fed to the lining, and the system is used as a splash. 11
TW98129970A 2009-09-04 2009-09-04 Method of measurement and print sheet resistance of articles and system of the same TWI338783B (en)

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