201109093 六、發明說明： 【發明所屬之技術領诚】 本發明係有關於-種液體材料之排出方法，裝置及程式， 該排出方法係使與具備有排h之噴嘴連通之計量部内滑 動之柱塞，移動所希望之量用來排出液體材料，經由控制上 述柱塞之動作，以不使液體材料之排出量不產生魏，且可 重複地排出定量之液體材料。 另外、，在本說明書中「飛揚」是指液體材料在接觸到塗佈 對象之前，從排出口離開。 【先前技術】 ^有被稱為柱塞泵（歧㈣泵)之排出裝置。此種排 ^大夕使用在液晶面板製造時之〇d驟等 出-定量之液體材料之情況。 &要正確排 二排出裝置，所具有之特微是使密接 排出液體材料，^塞進行進出移動，用來從排出口 排出，因此可以= 所排除之體積量可以從排出口 後急速停止確度Μ，在餘絲高迷進出移動 排出。 Μ從❹口切離液體材料_其飛揚地 之2絲巾⑽為柱塞在計量㈣密減雜，所以大夕 月疋在接觸部分設置密封部。因為該: 099121192 一會發生摩耗或變形，對會造成各== 201109093 a。例如’當有摩耗時會產·h科賴制，且必須 頻繁地更換。另-方面，t_時則不論是否停止枉塞之動 作’枉基亦會移動，而排出多餘之液體材料。 口此直至目别’提案有各種對密封部施加精良技術者。 例如，在專利文獻1所揭示之技術是-種塗佈裝置，具備有 塗佈液移送泵用來將塗佈液導㈣金屬蓋，塗佈液移送泵所 使用之密封構件係由可撓性材料形成之帽蓋狀體所構成，且 在將帽蓋狀體之開口端部固接於汽㈣周面上之狀態，利用 帽蓋狀體之細卩轉紐塞，叫錢缸和柱叙間隙折返 到下側卿叙1；字騎返部輯該間隙。 另外，在專利文獻2所揭示之技術是一種調配器，具備有 〇環設置在形成於柱塞前端部分之環狀溝部，可以沿著 器之内壁面滑動者’其特徵在於：環狀溝部係由在其奸區 域具有平坦底壁之區晝凹部所構成，以隔開間隔而 1 狀溝部之側壁’依照柱塞之壓人而與Q環之側部 二 性位移進而壓縮變形H面，設有複數凸部或溝早 柱塞之壓人解除負載使Q環復原，且餘塞錢入方精由 相反方向滑動，用來引導内容物之反吸。 ^ [先前技術文獻] [專利文獻] 專利文獻1 ··日本專利特開2〇06_281〇91號公報 專利文獻2 ··日本專利特開2〇〇8_1835ι號公報 099121192 4 201109093 【發明内容】 (發明所欲解決之問題） 如上述之方式，在先前技術中對柱塞施加各種之精良技 術’即使重複利用該技術’亦不能提高複數次排出時每次排 出量之精確度。亦即，當柱塞進行排出用之動作，其每次動 作之排出量會有不同，因而不能排出正確之量，使排出量產 生變動。 當排出量產生變動’則會在從喷嘴等排出口排出液體材料 時’成為產生分成複數飛散等液滴形狀不良，或不從喷嘴飛 揚等排出不良之原因。 因此’本發明之目的是提供一種可以達成使排出之液體材 料之液滴形狀、排出狀態穩定，以及排出精確度提高之液體 材料之排出方法，裝置及程式。 (解決問題之手段） 靜止摩擦， 矛柱塞之動作中所產生之動摩擦。在此處，推測201109093 VI. Description of the Invention: The present invention relates to a method, a device and a program for discharging a liquid material, which is a column that slides in a metering portion that is connected to a nozzle having a row of h. The plug is moved in a desired amount for discharging the liquid material, and the action of the plunger is controlled so as not to cause the discharge amount of the liquid material to be generated, and the quantitative liquid material can be repeatedly discharged. In addition, in the present specification, "flying" means that the liquid material is separated from the discharge port before coming into contact with the object to be coated. [Prior Art] There is a discharge device called a piston pump (dissimilar (four) pump). This type of arranging uses a liquid material which is equal to the amount of liquid material in the manufacture of the liquid crystal panel. & To correctly discharge the two discharge devices, the special feature is to make the liquid material close to the liquid, and the plug is moved in and out for discharge from the discharge port. Therefore, the volume of the excluded volume can be quickly stopped from the discharge port. Hey, in the aftermath of the lingering in and out of the movement. Μ 切 切 液体 液体 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切 切Because of this: 099121192 A loss or deformation will occur, which will result in each == 201109093 a. For example, 'when there is friction, it will be produced, and it must be replaced frequently. On the other hand, when t_ is used, the sputum base will move regardless of whether or not the choking action is stopped, and the excess liquid material is discharged. This is until the eyes of the project. There are various proposals for applying sophisticated techniques to the seals. For example, the technique disclosed in Patent Document 1 is a coating apparatus including a coating liquid transfer pump for guiding a coating liquid (4), and a sealing member used for a coating liquid transfer pump is made of a flexible material. The cap-shaped body formed of the material is formed, and in the state in which the open end of the cap-like body is fixed to the circumferential surface of the steam (four), the cap-shaped body is used to turn the button, and the cylinder and the column are called The gap is folded back to the lower side of the Qing 1; the word ride back to the gap. Further, the technique disclosed in Patent Document 2 is a dispenser having a ring-shaped ring provided in an annular groove portion formed at a tip end portion of the plunger and slidable along an inner wall surface of the device, which is characterized in that the annular groove portion is It is composed of a recessed portion having a flat bottom wall in the treacherous area, and the side wall of the first groove is spaced apart from the side of the Q ring in accordance with the pressing force of the plunger to compress and deform the H surface. The pressing of the plurality of convex portions or the grooved early plunger releases the load to restore the Q ring, and the residual money is slipped in the opposite direction to guide the back suction of the contents. [PRIOR ART DOCUMENT] [Patent Document] Patent Document 1 Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. 2, No. Hei. Problem to be Solved As described above, in the prior art, various sophisticated techniques are applied to the plunger 'even if the technique is repeated', the accuracy of each discharge amount at the time of multiple discharges cannot be improved. That is, when the plunger is ejected, the amount of discharge per movement will be different, so that the correct amount cannot be discharged, and the discharge amount is varied. When the discharge amount fluctuates, the liquid material is discharged from the discharge port such as the nozzle, and the liquid droplets are broken into a shape such as a plurality of droplets, or the discharge is not caused by nozzle flying or the like. Accordingly, it is an object of the present invention to provide a discharge method, apparatus and program for a liquid material which can achieve a droplet shape, a discharge state, and an improved discharge accuracy of a discharged liquid material. (Means for solving the problem) Static friction, the dynamic friction generated by the action of the spear plunger. Here, speculate
空氣汽缸驅動源之動作， 本發明人驗證排出量產生變動之原因是在柱塞之滑動部 分作用之摩擦阻抗，在絲之祕㈣時和動針不同所造 成，並驗誠織β成立。妹絲計量部Μ壁之雜 阻抗包含有：從柱塞之靜止狀態轉移為動作狀態時所產生之 在此處之驗證時發現，對於馬達或 柱塞之動作不能正確地追蹤，柱塞 099121192 201109093 之移動量紐度不能成為―定，餘之動作成衫穩定(參 照圖2)。另外’發現驅動源本身受到柱塞之摩擦阻抗變化 之影響，對於來自控㈣置之指令，會有動作不—定之課題。 在對柱塞之密封部施加精良技術之先前技術之手法中，不 能消除該等課題。 本發明人著重在柱塞之動作，特別是排出動作内之柱塞速 度隨時間H發現可經由提高柱塞動作開㈣柱塞動作 之穩定性，即可以解決課題，因而完成本發明。 第1發明是-種液體材料之排出方法，包含以下步驟：填 充步驟，係設有用來計量液體材料之計量部、連通到計量部 一端之排出口、及對計量部之内壁滑動地移動之柱塞，使柱 塞在排出口之相反方向移動，用來將液體材料填充到計量 部；和排出步驟，使柱塞朝向排出口之方向移動然後停止， 利用排出Π使液體材料飛揚排出；其特徵在於：設有不進行 液體材料之排出而使柱塞移動之預備動作之步驟，用來將排 出步驟之柱塞速度控制為一定。 第2發明之特徵是在第i發明中，使上述預備動作之構成 包含有：第一動作，使上述柱塞朝向排出口之相反方向僅移 動既定距離S;和第二動作，使上述柱塞朝向排出口之方向 僅移動與上述距離S相同或同等之距離。 第3發明之特徵是在第2發明中，將上述既定距離s設定 為使上述柱塞加速至一定速度之距離。 099121192 6 201109093 第4發明之特徵是在第2或3發明中，在上述填充步驟之 後直至開始上述排出步驟，重複進行上述第一動作和上述第 二動作。 第5發明之特徵是在第2至4之任一發明中，上述第—動 作係以從排出―口吸引之外來氣體而不產生氣泡之條件，使柱 塞移動。 第6發明之特徵是在第丨或2發明中，上述預備動作, 由使上述柱塞朝向排出口方向缓慢加速之動作所構成 係 第7發明之特徵是在第丨至6之任一發明中，連纥土 上述預備動作和上述排出步驟。 π地進行 第8發明是—種液體材料之排出裝置，其特徵在於 有用來計量液體材料之計量部、連通到計量部—^具備 口、對計量部之内壁滑動地移動之柱塞驅，之排出 動源、和控制裝置；控射置可以實施第動挺塞之驅 之排出方法。 主7之住〜發日月 第9發明是一種液體材料之 有：設置塗件對象物之裁物台；二:置，其待徵在於相 m置㈣物台鄉 二㈣之 第10發明是-種程式，社4m移動機構。The operation of the air cylinder driving source, the inventors of the present invention verified that the variation in the discharge amount is caused by the frictional resistance acting on the sliding portion of the plunger, which is caused by the difference between the moving needle and the moving needle, and the test is established. The miscellaneous impedance of the wall of the sister wire metering section includes: from the static state of the plunger to the action state, it is found here that the action of the motor or the plunger cannot be correctly tracked, the plunger 099121192 201109093 The movement amount can not be set to "fixed," and the rest of the action is stable (see Figure 2). In addition, it is found that the driving source itself is affected by the change of the frictional impedance of the plunger, and there is a problem that the operation is not fixed for the command from the control (four). In the prior art technique of applying a sophisticated technique to the seal portion of the plunger, such problems cannot be eliminated. The present inventors have focused on the action of the plunger, and in particular, the plunger speed in the discharge operation has been found to improve the stability of the plunger action by increasing the plunger action with time H, which is a problem that can be solved. A first invention is a method for discharging a liquid material, comprising the steps of: a filling step for measuring a liquid material, a discharge port connected to one end of the metering portion, and a column slidingly sliding the inner wall of the metering portion a plug that moves the plunger in the opposite direction of the discharge port for filling the liquid material to the metering portion; and a discharging step of moving the plunger toward the discharge port and then stopping, and discharging the liquid material by the discharge port; It is a step of providing a preparatory movement for moving the plunger without discharging the liquid material, and controlling the plunger speed of the discharge step to be constant. According to a second aspect of the invention, in the first aspect of the invention, the preliminary operation includes: a first operation of moving the plunger in a direction opposite to a discharge port by only a predetermined distance S; and a second operation of the plunger Only the distance equal to or equal to the above-described distance S is moved in the direction toward the discharge port. According to a third aspect of the invention, in the second aspect of the invention, the predetermined distance s is set to a distance at which the plunger is accelerated to a constant speed. According to a fourth aspect of the invention, in the second or third aspect of the invention, the first operation and the second operation are repeated after the filling step and until the discharging step is started. According to a fifth aspect of the invention, the first aspect of the invention, wherein the first action is to move the plunger by a condition that the gas is sucked from the discharge port without generating bubbles. According to a sixth aspect of the invention, in the second aspect of the invention, the preliminary operation is characterized in that the plunger is gradually accelerated toward the discharge port, and the seventh invention is characterized in any one of the inventions The above-mentioned preparatory action and the above-described discharge step. The ninth invention is a discharge device for a liquid material, characterized in that a metering portion for measuring a liquid material, a plunger drive connected to the metering portion, and a plunger drive for slidingly moving the inner wall of the metering portion are provided. Discharge the source, and the control device; the control device can implement the discharge method of the first mover plug. The ninth invention of the main 7 is a liquid material: a set of objects for setting the object to be coated; two: set, which is to be levied in phase m (four), the tenth invention of Wutai Township (four) is - Kind of program, community 4m mobile agency.
量部、連通到計量部一端之排^有用來計量液體 移動之板塞、用來驅動挺。、二計量部之内璧滑動而 之排出裝置中，在批 勒原和控制裝 r在控制裝置實施第1至衣置之夜體材料 099121192 7 7之任一發明之排出 201109093 方法。 另外，亦可以使上述預備動作之構成包含有：第 使上述柱塞朝向排出口之相 力作， 動作，使上述柱塞朝向排出口 罘― π ^ π ^ 11僅移動與上述距離s 相Η或冋寻之距離；第三動》 ύ 使上述柱塞朝向排出口 向僅移動與上述距離S相同或方 I* dΑ h 此雕，和第四動作，佶 上边柱基㈣排出口之相反方向僅移動與上述 吏 或同等之距離。 S相同 另外，亦可以在使填充在計量部 進行排出動作時，只在第—次排出業^ / :複數次地連續 材料前，進行上述預備動作。、、在^麗。卩之液體 (發明效果） 依照本發明時，可以將柱塞動作之移動旦式 定，並達成使排出之液體材料之液商扩里3逮度保持為一 而提高排出精確度。 狀排出狀態穩定， 【實施方式】 以下’以排出裝置為例，說明用以 型式具備有柱塞和噴嘴，且柱塞具^本發明之形態’其 内壁滑動之密封部。 ㈣3所示之計量部之 本發明之排出裝置之柱塞，在進^ 所示之圖形表示各個參數隨時間 冑作時’以圖1 排出裝置之柱塞，在進行排出動作^化。另外’先前技術之 099121192 、’以圖2所示之圖形表 8 201109093 迎夺間之貪化。另外，圖i和圖2 之縱軸之正方向# U為圖形 乃向表不排出口方向，負方向表示與 之方向。另外，彳、生 、那出口相反 (a)表*驅動源之動作錢，（b)表 移動距離之變化，⑻表示柱塞之速度隨時間之變化7之 表不在排出口之排出量變化。 。(d) 以下’將圖1和圖2之二個圖對比同時進行說明。 2提高排出精確度、使排"穩定，不需限難塞動作之 =時=必助__之動作㈣接近零。_是柱塞速 又近夺間之變化對液滴形狀或排出狀態具有报大之与塑 示之習知動作方法中，由⑻之柱塞速度隨日; 之化可以清楚明白’在從動作開始至達到最高速之期間 7〜A之間）’柱塞動作不穩定。亦即，在柱塞㈣部和計量 拍土面之間作用之摩擦阻抗，會受到從動作開始時靜 擦變化為動作進行時動摩擦之影響。所以不追隨該驅動源之 動作信_不穩定部分會存在於柱塞，所以排出量不穩定。 *因此’在本發日种，要除去從靜止摩擦變化騎摩擦之影 響時’如圖1解’成為在排出動作之前實麵備動作卜 在排出動作時只有動摩擦作用。 預備動作！由第一預備動作2和第二預備動作3構成。 第-預備動作2歧柱塞在排出口之相反方向僅移 動既疋_ S(0〜A)。這時，利用排出口將一些空氣吸 喷嘴内。這是為了不因預備動作^排出液體材料。為使检 099121192 201109093 碁:度女义’柱塞移動量(距離s)，須藉由預先、裳 必要距離並設定。 貝无《驗荨求出 料作讀轉祕件是最好在以至 ❸包之範圍。在此處，為不會產生氣用：而 作吸入到料心空氣卿奴”，經 ，動 部(外部氣體)維持連通此點非常重要。柱塞之=動=與外 ，件’係考慮喷嘴内之流路形狀==動 要素，利用預先之實驗等求得並加以設定。f生質等 其久’第—預備動作3是使柱塞朝向排出口之方 與上述設定之距離S相同或同等之距離(Α,。亦即， 動作吸入而存在之嘴嘴内空氣之空間，再 ： 料填滿。利用此種方式，可以進行正確量之排出。另夕;:材 以順利地繼續轉移到排出動作。 可 然後，即使第二預備動作3結束亦不使柱塞停 ^接轉移侧動帅〜〇。依照_方式，在㈣動 一預備動作1 ’因為在排出動作中摩擦阻抗不會從靜止摩 擦變化為動摩擦，所吨塞動作敎，可料行正確量之排 出。 以下，利用實施例說明本發明之詳細部分，但是本發明不 由任何實施例限定。 [實施例1] (排出裝置之構造） 099121192 201109093 本貫施例之排出褒置參照圖3進行以下之說明。另外，本 實施例所使用之液體材料為液晶(黏度=約2〇mPa . s)。 圖3所示之排出裝置4構成包含有：管狀計量管5;以密 封部9内接在計量管5之柱塞6;具備有排出口 7之噴嘴.8; 1來儲存液收材料之儲存容器1();用來切換計量管$和喷 觜的連L 4切換儲存容器1〇和計量管5的連通之變換 閥11 ;作為驅動源用來驅動螺旋軸12藉以驅動柱塞6之馬 達13 ;和用來控制變換閥11或馬達13等動作之控制裝置 14°另外’為顺利地進行液體材料之供給，儲存容器10係 經由控制裝置14與未圖示之_氣體源連接 體之供給。 轧 (排出裝置之動作） 開始時對計量管5進行填充液體材料。首先 行滑動之柱塞6,進出至最接近變換閥uj =然〜將變換閥η切換到使儲存容器i。和計量管5 連通之位置，使挺塞6移動後退m 内之液體材料緩由變換閥u流入 5 —到計量管5最上料，則結束填充。α塞6後退 其次，所填充之液體材料之排出，係 換到使計量管5和噴嘴8連 I換閥11切 量使柱塞6進行二動置’並依照所希望之排出 099121192 柱塞6之排出動作，係在使馬達13動作並急逮加速後’ 201109093 使馬達13急速停止，用來使柱塞6急速停止。湘此種方 式，計量管5内之液體材料，由於柱塞6之急速移動和急速 停止所造成之慣性力，從喷嘴8前端飛揚排出。重複進行該 排出動作，使計量管5内之液體材料複數次地排出。在此處 柱塞6之排出動作與±述圖丨之預備動作丨合併，連續地進 打。該預備動作1和排出動作之進行，是以使柱塞在排出口 之相反方向僅移動預先算定之既定距離s，作為第一預備動 作2 ’且以使柱塞在排出口之方向僅移動上述距離$，作為 第一預備動作3 ’並與第二預備動作3連續，僅前進與排出 量對應之距離。 之位置時，會將變換閥11 連通之位置，使柱塞6移 將液體材料填充到計量管 柱塞6在到達最接近變換閥u 切換到使儲存容器1〇和計量管5 動後退’再度填充液體材料。 利用此種方式，從儲存容器1〇 進行預備動作並重複進行使計量管5内之液體材料從 喷嘴8排出之—連貫動作，以實施排出作業。 本實施狀計量管5因為可錢較填充郝中具有每 人句可里連、’排出之量填充液體材料之容量，所以亦可 以在計量管5内之液體材料用完為止，複數次地排出。另-方面，亦可以在每—次之排㈣作時進行填充。 另卜亦可纟排出動作之最後當使柱塞停止時，控制進 出移動之柱餘__起轉枝移動速度， 用來控制分 099121192 201109093 斷從喷嘴排出之液體材料之力（參照專利第4i83577號) (塗佈裝置之構造） 上述之排出裝置4可單獨使用，但是亦可以例如， 收晶面 板製造步驟中所使用之玻璃基板，成用以安裝電子機器 刷基板等作為塗佈對象，即搭載在邛相對於成為塗佈對象之 基板移動之驅動機構並進行作業。圖4表示搭载有排出誓 4之塗佈裝置之實例。 圖4所示之塗佈裝置15具備有··上述之排出裝置4 •，載 物台Π’用來载置成為塗佈對象之基板16;χγζ驅動機構 18 ’配置有排出裝置4，用來使排出裝置4在載物台17之 上方朝ΧΥΖ方向相對移動；和控制裝置，用來控制該等之 動作。在塗佈作業時’是利用驅動機構18使排出裝置4移 動到基板16上所希望之位置，並進行排出。 另外’在圖4令是搭載複數個排出裝置4，這是為了 數個排出裝置4同時動作，用來縮短對大型基板Μ之 時間°搭载排出裝置4之數目不只限於圖4所示之3個，亦 可以為2㈣下’或4細上。亦即，成為依照基板16大 ，或可花#之作業相的限辦，適當決定之事項。 (貫施例之效果）The measuring unit and the row connected to one end of the measuring unit have a plug for measuring the movement of the liquid, and are used for driving the plug. In the discharge device in which the inner measuring portion of the two measuring units is slid, the invention is carried out in the first and second nights of the body material 099121192 7 7 in the control device. Further, the preparatory operation may include: causing the plunger to move toward the discharge port, and moving the plunger toward the discharge port 罘 π ^ π ^ 11 to move only by the distance s or冋 之 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; Move the same distance as above or the same distance. S is the same. Alternatively, when the filling operation is performed in the metering unit, the preparatory movement may be performed only before the first-time discharge of the material is repeated several times. ,, in ^ Li. Liquid of the crucible (Effect of the invention) According to the present invention, the movement of the plunger can be determined, and the liquidity of the discharged liquid material can be maintained at one level to improve the discharge accuracy. The discharge state is stable. [Embodiment] Hereinafter, a discharge device will be described as an example in which a plunger and a nozzle are provided in a form, and the plunger has a seal portion in which the inner wall slides. (4) In the measuring unit shown in Fig. 3, the plunger of the discharge device of the present invention, when the pattern shown in Fig. 1 indicates that each parameter is time-lapsed, the plunger of the discharge device of Fig. 1 is discharged, and the discharge operation is performed. In addition, the prior art 099121192, the graphical table 8 201109093 shown in Figure 2, greets the corruption. In addition, the positive direction # U of the vertical axis of Figures i and 2 is the direction in which the pattern is not discharged, and the negative direction indicates the direction. In addition, the output of the 彳, raw, and the opposite is opposite (a) the action money of the table * drive source, (b) the change of the movement distance of the table, and (8) the change of the speed of the plunger with time 7 which is not the discharge amount of the discharge port. . (d) The following is a description of the two figures of Fig. 1 and Fig. 2 at the same time. 2 Improve the discharge accuracy, make the row " stable, do not need to limit the difficulty of the action = time = must help __ action (four) close to zero. _ is the change in the speed of the plunger and the change in the shape of the droplet. In the conventional method of the movement of the droplet shape or the discharge state, the plunger speed of (8) is changed with the day; The period from the start to the highest speed period between 7 and A) 'The plunger action is unstable. That is, the frictional resistance acting between the plunger (four) portion and the metering surface is affected by the dynamic friction from the start of the movement to the movement of the movement. Therefore, the unstable signal that does not follow the drive source is present in the plunger, so the discharge amount is unstable. * Therefore, in the case of the present day, when the effect of riding friction from the static friction change is removed, the solution is as shown in Fig. 1. The solid surface is prepared before the discharge operation. Prepare for action! It consists of the first preparatory movement 2 and the second preparatory movement 3. The first preparatory action 2 dissimilar plunger moves only the 疋_S (0 to A) in the opposite direction of the discharge port. At this time, some air is sucked into the nozzle by the discharge port. This is to prevent the liquid material from being discharged due to the preparatory action. In order to check the 099121192 201109093 碁: degree female plucking amount (distance s), it must be set by the necessary distance in advance. Bei does not have the "test" to find the material to read the secret is the best in the scope of the bag. Here, in order not to generate gas: but to inhale into the center of the air, it is very important to maintain the connection between the moving parts (external gas). Plunger = movement = and outside, the piece 'considered The shape of the flow path in the nozzle == the moving element is determined and set by a prior experiment or the like. The first "preparatory action 3" is such that the plunger faces the discharge port and is the same as the set distance S. Or the same distance (Α, that is, the space in the mouth of the mouth that exists when the action is inhaled, and then: fill the material. In this way, the correct amount can be discharged. On the eve;: the material continues smoothly Then, it is transferred to the discharge operation. Then, even if the second preliminary operation 3 is finished, the plunger is not stopped and transferred to the transfer side. In accordance with the _ mode, the (4) movement is a preparatory action 1 ' because the frictional impedance is not in the discharge operation. It will change from static friction to dynamic friction, and the amount of discharge can be expected to be discharged in the correct amount. Hereinafter, the detailed description of the present invention will be described by way of examples, but the invention is not limited by any embodiment. [Example 1] Construction of the device) 099121 192 201109093 The discharge device of the present embodiment is described below with reference to Fig. 3. In addition, the liquid material used in the present embodiment is liquid crystal (viscosity = about 2 〇 mPa·s). The utility model comprises: a tubular measuring tube 5; a plunger 6 which is connected to the measuring tube 5 by a sealing portion 9; a nozzle 8 which has a discharge port 7; 1) a storage container 1 for storing a liquid collecting material; The pipe $ and the squirting L 4 switch the switching valve 11 of the connection between the storage container 1 and the measuring tube 5; the motor 13 for driving the screw shaft 12 to drive the plunger 6; and the control valve 11 for controlling the switching valve 11 The control device 14 such as the motor 13 or the like is configured to smoothly supply the liquid material, and the storage container 10 is supplied via the control device 14 and the gas source connector (not shown). Rolling (action of the discharge device) When the measuring tube 5 is filled with the liquid material, the plunger 6 is first slid, and the inlet and outlet are moved to the closest switching valve uj = otherwise - the switching valve η is switched to the position where the storage container i is connected with the measuring tube 5, so that the plug 6 moving the liquid material in the back m is slowly flowing into the 5 by the change valve u — When the metering tube 5 is most loaded, the filling is finished. The α plug 6 is retracted, and the filling of the filled liquid material is changed so that the measuring tube 5 and the nozzle 8 are connected to the valve 11 to cut the plunger 6 into two. In accordance with the desired discharge operation of the 099121192 plunger 6, after the motor 13 is actuated and the acceleration is accelerated, the 201113093 causes the motor 13 to be rapidly stopped to quickly stop the plunger 6. In this manner, the measuring tube 5 The liquid material inside is flying from the front end of the nozzle 8 due to the inertial force caused by the rapid movement and rapid stop of the plunger 6. This discharge operation is repeated to discharge the liquid material in the measuring tube 5 several times. The discharge operation of the plunger 6 is combined with the preparatory action of the description of the figure 6, and the stroke is continuously performed. The preliminary operation 1 and the discharge operation are performed such that the plunger moves only a predetermined distance s calculated in the opposite direction of the discharge port as the first preliminary operation 2' and moves the plunger only in the direction of the discharge port. The distance $ is the first preparatory movement 3' and is continuous with the second preparatory movement 3, and only advances the distance corresponding to the discharge amount. In the position, the position of the changeover valve 11 will be communicated, so that the plunger 6 is moved to fill the liquid material to the metering tube. The plunger 6 is switched to the closest switching valve u, and the storage container 1 and the measuring tube 5 are moved back. Fill the liquid material. In this manner, the preparatory operation is performed from the storage container 1 and the liquid material in the measuring tube 5 is repeatedly discharged from the nozzle 8 to perform the discharging operation. In the embodiment, the measuring tube 5 can be filled with a plurality of times when the liquid material in the measuring tube 5 is used up because the amount of the liquid material filled in the amount of the liquid material can be filled and filled. . On the other hand, it can also be filled in every row (four). In addition, when the plunger is stopped at the end of the discharge operation, the movement of the column is controlled to move in and out, and is used to control the force of the liquid material discharged from the nozzle by the 099121192 201109093 (refer to Patent No. 4i83577). No.) (Structure of Coating Device) The above-described discharge device 4 may be used alone, but for example, the glass substrate used in the crystal forming panel manufacturing step may be used as a coating object for mounting an electronic device brush substrate or the like, that is, It is mounted on a drive mechanism that moves on the substrate to be coated, and performs work. Fig. 4 shows an example of a coating device equipped with a discharge smear 4. The coating device 15 shown in Fig. 4 is provided with the above-described discharge device 4, the stage Π' for placing the substrate 16 to be coated, and the χγζ drive mechanism 18' for arranging the discharge device 4 for The discharge device 4 is relatively moved in the ΧΥΖ direction above the stage 17; and a control device for controlling the actions. At the time of the coating operation, the discharge mechanism 4 is moved to a desired position on the substrate 16 by the drive mechanism 18, and discharged. In addition, in FIG. 4, a plurality of discharge devices 4 are mounted, in order to simultaneously operate a plurality of discharge devices 4, and to shorten the time required for the large substrates. The number of the discharge devices 4 is not limited to the three shown in FIG. It can also be 2 (four) under 'or 4'. In other words, it is an item that is appropriately determined in accordance with the limitation of the operation of the substrate 16 or the flower. (the effect of the example)
預列進行預備動作之姆置中，相較於進行習知 預備動作之排U 啊之精邮（變動減:;)械構造㈣），確認可以提高大約 099121192 13 201109093 [實施例2] 在實施例2 +，說明在與實施例1相同之排出裝置中，組 合不同恶樣之預備動作進行排出之方法。圖5至9表示柱塞 速度隨時間之變化。 (1)連續排it! t每:欠進行預備動作之方法[圖5] 在對計量部填充—次之後，使計量部内之液體材料連續， 進行複數次排出之情況時，在重視排出間隔變長或排出精確 虞之情況’如圖5所*，在每次排出動作開始時進行預備動 作1。利用此種方式，可以提高各次之排出精碟度 ，而且可 以減小各個排出之間的變動。 (2)將U小往復動作設^為預備動作之方法旧6] 柱塞6通系在不進行排出動作時停止。因此，如圖6所示， 在與停t時間相當之部分重複進行微小往復動作23,而成 爲失去靜止之狀態。亦即，經常為動狀態，所以摩擦阻 變化之部分變少’可以進行穩定精確度良好之排出^ 耕出-人數變少之情況’或排出間隔變長之情況。 5 、 a气芍頂備動作之方法[圖7] .錢灯使柱塞6在排出口 7相反方向移動之動作 成义排出口 7吸入一些空氣。在下一個動 、 口 7之方向移動相η 隹然朝向 _目Η㈣’但亦考制會發生影 成此’如圖7所示，不使柱塞朝向排出口 7之相反；_=情 '是在開始辨出動作之部分，缓慢地朝c 〇99121192 万 ^ 201109093 速(符號24) ’使摩擦阻抗有變化之部分對排出之影響變小。 利用此種方式，不會從排出口 7吸入空氣，且可以獲得減小 摩擦阻抗改變之影響的效果。 (4) 在連續排出中僅進行初次預備動作之方法[圖8] 本發明之預備動作1，如實施形態所示，基本上每次進行 一個排出動作。但是，經由實驗發現在連續進行複數次排出 之情況下，當排出間隔變短時，在從一次之排出動作停止起 至下一個排出動作之期間，從靜止摩擦改變為動摩擦之部分 變小’或實質上消失。在此，如圖8所示，可以在一連貫複 數次排出中僅於第-次排出19開始時進行預備動作丄，在 第二次排出20以後不進行預備動作1。利用此種方式，可 以縮短第二次排出2G以後之預備動作i所需之時間，可以 更有效地進行《。麵㈣度之情科為有奴方法。另 卜疋否進#本Λ施例之動作必須依照計量管5内面或密封 Ρ 9表面之H密封4 9按壓計量管5内面之力量等進行 判晰。因此’可以進行預先之實驗等，求得排出間隔之目標 來進行判斷。 (5) 進行大預備動作之方法[圖9] =有依照枉塞6之密封部9或計量管5之狀態，必須擴大 預備動作1之If ;兄。在該種情況下，要考慮對後來之排 :動作之影響。因此’如圖9所示，在大預備動作21之後， 反方向進行相同大小之動作，可以用來減小對其後 099121192 201109093 之排出動作之影響。彻此種方式，可以進行大小不受限制 之預備動作。另外，此種方式在進行上述⑴或⑷之小預備 動作時亦為有效。另外，假如排出間隔變短時，如上述(4) 之方式’亦可以只進行初次之預備動作。 (產業上之可利用性） 本《月適用在使柱基密接計量部内地滑動同時進行移 動、將液虹材料飛滴排出之裝置。對以柱塞而可飛揚排出 之所有液體材料是有效的，從水、乙料低肺物質至接著 J液aa材料糊狀或乳酪狀之工業用材料（焊劑、潤滑油 等）之咼黏稠流體之排出均可適用。 【圖式簡單說明】 圖1之圖形表示本發明之排出裝置之柱塞進行排出動作 時各個參數隨時間之變化。 圖2之圖形表不先前技術之排出裝置之柱塞進行排出動 作時各個參數隨時間之變化。 圖3是實施例丨之柱塞型排出裝置之概略圖。 圖4疋概略立體圖，用來表示搭載有實施例1排出裝置之 塗佈裝置之實例。 圖5是說明圖’用來說明實施例2之(1)連續排出每次進 行預備動作之方法。 圖6是說明圖’用來說明將實施例2之微小往復動作 設定為預備動作之方法。 099121192 201109093 圖7是說明圖，用來說明將實施例2之(3)緩慢力 4 π M 連設定 為預備動作之方法。 圖8是說明圖，用來說明實施例2之(4)在連續排出只進 行第一次預備動作之方法。 圖9是說明圖，用來說明實施例2之(5)進行大預備動作 之方法。 【主要元件符號說明】 1 預備動作 2 第一預備動作 3 第二預備動作 4 排出裝置 5 計量管(計量部) 6 柱塞 7 排出D 8 噴嘴 9 密封部 10 儲存容器 11 變換閥 12 螺旋轴 13 驅動源（馬達） 14 控制裝置 15 塗佈裝置 099121192 201109093 16 基板 17 載物台 18 XYZ驅動機構 19 第一次排出 20 第二次排出 09912Π92The pre-arranged pre-action is set in the middle, compared to the fine-grained (reduced minus:;) mechanical structure (4) of the conventional preparatory movement, the confirmation can be improved by approximately 099121192 13 201109093 [Example 2] In the example of the second embodiment, a method of combining the preliminary operations of different types of evil samples and discharging them in the discharge apparatus similar to that of the first embodiment will be described. Figures 5 through 9 show the change in plunger speed over time. (1) Continuously arranging it! t: The method of performing the preparatory movement [Fig. 5] When the liquid material in the measuring unit is continuously filled after the filling of the measuring unit, and the discharge is performed plural times, the discharge interval is emphasized. The case where the length is long or the discharge is accurate is as shown in Fig. 5, and the preliminary action 1 is performed at the start of each discharge operation. In this way, it is possible to increase the degree of discharge of each of the times, and it is possible to reduce the variation between the respective discharges. (2) The method of setting the U small reciprocating motion to the preparatory motion. The old 6] The plunger 6 is stopped when the discharge operation is not performed. Therefore, as shown in Fig. 6, the minute reciprocating motion 23 is repeated in a portion corresponding to the stop time t, and the state of losing the stationary state is obtained. In other words, it is often in a moving state, so that the portion where the frictional resistance changes is small, and it is possible to carry out the discharge with a good stability and accuracy, the case where the number of people is reduced, and the case where the number of people is small, or the discharge interval becomes long. 5, a method of gas topping action [Fig. 7]. The lamp makes the plunger 6 move in the opposite direction of the discharge port 7. The outlet is 7 and some air is sucked in. Moving the phase η in the direction of the next motion and port 7 隹 朝向 _ Η 四 四 四 四 四 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' At the beginning of the identification of the action, slowly toward c 〇 99121192 million ^ 201109093 speed (symbol 24) 'The effect of the part of the frictional impedance change on the discharge becomes smaller. In this way, air is not taken in from the discharge port 7, and the effect of reducing the influence of the change in the frictional resistance can be obtained. (4) A method of performing only the preliminary preparatory movement in the continuous discharge [Fig. 8] The preliminary operation 1 of the present invention basically performs one discharge operation each time as shown in the embodiment. However, it has been found through experiments that when the discharge interval is continuously performed, when the discharge interval is shortened, the portion from the static friction to the dynamic friction becomes smaller during the period from the stop of the discharge operation to the next discharge operation. Substantially disappeared. Here, as shown in Fig. 8, the preliminary operation 丄 can be performed only at the start of the first discharge 19 in one continuous discharge, and the preliminary operation 1 is not performed after the second discharge 20. In this way, the time required for the preparatory action i after the second discharge of 2G can be shortened, and the "more effective" can be performed. The face (four) degree of love is a slave. In addition, the operation of the present embodiment must be determined according to the force of the inner surface of the measuring tube 5 or the H seal of the surface of the sealing tube 9 to press the inner surface of the measuring tube 5. Therefore, it is possible to perform a preliminary experiment or the like to determine the target of the discharge interval. (5) Method of performing a large preparatory movement [Fig. 9] = There is a state in which the sealing portion 9 or the measuring tube 5 according to the dam 6 is required, and the If of the preparatory movement 1 must be enlarged; In this case, consider the impact of the subsequent row: action. Therefore, as shown in Fig. 9, after the large preparatory action 21, the same size action is performed in the reverse direction, which can be used to reduce the influence of the subsequent 099121192 201109093 discharge operation. In this way, preparatory actions of unlimited size can be performed. Further, this mode is also effective when performing the small preparatory operation of the above (1) or (4). Further, if the discharge interval is shortened, only the first preliminary operation may be performed as in the above-described method (4). (Industrial Applicability) This month applies to a device that moves the column base in close contact with the metering unit while moving, and discharges the liquid rainbow material. It is effective for all liquid materials that can be blasted and discharged by a plunger, from water and bi-materials of low-level materials to viscous fluids of industrial materials (flux, lubricating oil, etc.) of paste or cheese in the form of liquid J aa material. The discharge can be applied. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a graph showing changes in various parameters with time when a plunger of the discharge device of the present invention performs a discharge operation. The graph of Fig. 2 shows the variation of various parameters over time when the plunger of the prior art discharge device is discharged. Fig. 3 is a schematic view showing a plunger type discharge device of the embodiment. Fig. 4 is a schematic perspective view showing an example of a coating apparatus equipped with the discharge device of the first embodiment. Fig. 5 is a view for explaining the method of explaining the (1) continuous discharge of each of the preliminary operations of the second embodiment. Fig. 6 is a view for explaining the method of setting the minute reciprocating motion of the second embodiment to the preparatory motion. 099121192 201109093 Fig. 7 is an explanatory diagram for explaining a method of setting the (3) slow force 4 π M connection of the second embodiment to a preliminary operation. Fig. 8 is an explanatory view for explaining the method of (4) of the second embodiment in which only the first preparatory movement is performed in the continuous discharge. Fig. 9 is an explanatory view for explaining a method of performing a large preparatory operation in (5) of the second embodiment. [Description of main component symbols] 1 preparatory operation 2 first preliminary operation 3 second preliminary operation 4 discharge device 5 measuring tube (metering unit) 6 plunger 7 discharge D 8 nozzle 9 sealing portion 10 storage container 11 change valve 12 screw shaft 13 Drive source (motor) 14 Control device 15 Coating device 099121192 201109093 16 Substrate 17 Stage 18 XYZ drive mechanism 19 First discharge 20 Second discharge 09912Π92