TW201107047A - Dispensing method and device for dispensing - Google Patents

Dispensing method and device for dispensing Download PDF

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Publication number
TW201107047A
TW201107047A TW97113408A TW97113408A TW201107047A TW 201107047 A TW201107047 A TW 201107047A TW 97113408 A TW97113408 A TW 97113408A TW 97113408 A TW97113408 A TW 97113408A TW 201107047 A TW201107047 A TW 201107047A
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Taiwan
Prior art keywords
fluid
dispenser
opening
region
layer
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TW97113408A
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Chinese (zh)
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TWI519357B (en
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Charles Richard Manuel Schmidgall
De Weijer-Wagemans Melanie Maria Hubertina Van
Robert Hayes
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Liquavista Bv
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/0289Apparatus for withdrawing or distributing predetermined quantities of fluid
    • B01L3/0293Apparatus for withdrawing or distributing predetermined quantities of fluid for liquids

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

A method of providing a layer of a first fluid on an area (2) of a surface by means of a dispenser (3) having an opening (8). The method comprises the step of providing a layer of a second fluid (7) on the surface, the second fluid being immiscible with the first fluid. It also includes the step of arranging the opening of the dispenser in the second fluid above the area and the step of dispensing the first fluid (6) through the opening assisted by a third fluid (9) for settling on the first area, the third fluid being immiscible with the first fluid.

Description

201107047 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種藉由一施配器在一表面之一第一區域 上提供一第一流體之一層之方法。本發明還關於一種用於 實施該方法之設備。 【先前技術】 國際申請案WO 2005/098797揭示一種在一基板之一表面 上提供一油層之方法’其特別適用於製造電濕潤顯示器。 該表面最初係由一水層所覆蓋。一施配器在該水層内及在 该表面上方具有其開口。油係饋入於該施配器内,然後在 該開口與該表面之間形成一油滴。該表面包括由第二親水 性區域環繞的第一疏水性區域。當該施配器在該表面上移 動時,在該等第一及第二區域上拖動該油滴並由一油層來 取代在該等第一區域上的水並使水留在該等第二區域上。 此提供一油層之方法之一缺點係難以控制油層之厚度。 本發明之一目標係提供一種允許更容易控制油層厚度之 方法。 【發明内容】 該目標係藉由一種藉由具有一開口之一第—施配器在— 表面之一第一區域上提供一第一流體之一層之方法來加以 實現’該方法包含以下步驟: -在該表面上提供一第二流體之一層,該第二流體係與該 第一流體不相溶; -在該第一區域上方在該第二流體内配置該第一施配器之 130008.doc 201107047 開口;以及201107047 IX. Description of the Invention: [Technical Field] The present invention relates to a method of providing a layer of a first fluid on a first region of a surface by means of a dispenser. The invention also relates to an apparatus for carrying out the method. [Prior Art] The international application WO 2005/098797 discloses a method of providing an oil layer on one of the surfaces of a substrate, which is particularly suitable for the manufacture of electrowetting displays. The surface is initially covered by a layer of water. A dispenser has its opening in and over the aqueous layer. An oil system is fed into the dispenser and an oil droplet is formed between the opening and the surface. The surface includes a first hydrophobic region surrounded by a second hydrophilic region. As the dispenser moves over the surface, the oil droplets are dragged over the first and second regions and the water on the first regions is replaced by an oil layer and the water is retained in the second regions on. One of the disadvantages of this method of providing an oil layer is that it is difficult to control the thickness of the oil layer. One object of the present invention is to provide a method that allows for easier control of the thickness of the oil layer. SUMMARY OF THE INVENTION The object is achieved by a method of providing a layer of a first fluid on a first region of a surface by a first dispenser having an opening. The method comprises the following steps: Providing a layer of a second fluid on the surface, the second flow system being incompatible with the first fluid; - disposing the first dispenser in the second fluid over the first region 130008.doc 201107047 Opening;

-透過該辅助開口來施配該第一流體用於沈澱在該 域上; / (HE -藉由一第三流體來輔助該施配,該第三流體係與該第一 流體不相溶。 添加-第三流體提供一額外自由度以控制在該表面上沈 積該第-流體。特;^言之,該第三流體可用以移除在提供- dispensing the first fluid through the auxiliary opening for precipitation on the field; / (HE - assisting the dispensing by a third fluid, the third flow system being incompatible with the first fluid. - the third fluid provides an additional degree of freedom to control deposition of the first fluid on the surface. In other words, the third fluid can be used to remove

Ο 該第二流體層期間在該表面上所截獲之(例如)空氣之空 穴°移除該以穴改良該第—流體在該表面上的沈積。: 相溶性確保僅沈積該第一流體而不包括該輔助第三流體且 該第三流體之效果不受混合該第一流體影響。在該第二流 體與該第I流體也係不相溶的情況了,增&該方法之穩定 性。 " 在該方法之一第一具體實施例中,使用一第二施配器來 把加該第二流體,該第二施配器有一開口配置於該第二流 體内。移除該等截獲空穴可獨立於提供該第一流體層來加 以實施。例如,可在該表面上一或多次掃描該第二施配 器’隨後進行該第一施配器之一或多個掃描。當該第二及 第二流體係不相溶時,將會避免混合該第二及第三流體。 該第三流體可透過該第二施配器之開口來加以施加以在 該開口與該表面之間形成該第三流體之一小滴。該小滴表 現為有效地移除在該表面上所截獲之(例如)空氣之空穴。 具有一開口配置於該第二流體内的該第二施配器還可獨 立於該第一施配器來加以施加並第一流體可用以從該表面 130008.doc 201107047 移除(例如)空氣之截獲空穴。 儘官該第二施配器可先於該第一施配器掃描該表面,但 較有利的係該第一施配器先於該第二施配器掃描該表面。 當該第一流體層已沈積在該表面上時,比還未曾沈積該第 . 一流體時,更可能藉由該第三流體之小滴來移除該等截獲 空穴。而且,其使該第一流體之沈積層之厚度更均勻。 在°亥方法之一第二具體實施例中,該第三流體係透過該 Q 帛⑯配器之開口來加以施加。在該情況下,可調節該第 三流體之量及其位置以影響該第一流體之沈積量及方式。 其允許所沈積第-流體層之厚度之一改良控制,特別係厚 度之均勻性。在該第二具體實施例之一特殊形式下,該方 法包含以下步驟: -透過該施配器之開π來施配該第三流體以在該開口與該 表面之間形成該第三流體之一小滴;以及 γ透過該開π來施配該第—流體,用於沿在該第二流體與 〇 ㉟第三流體之間的—介面移動並沈澱在該第-區域上。 、在於細配态之開口與表面間之該第三流體小滴與該第二 机體之間的介面提供一路徑用於該第一流體從該施配器開 - σ移動至該表面。在該等第-區域上所沈積之第—流體量 ^ 彳由:小滴之大小來加以控制。-更大小滴在該等第一區 域上提供-更厚第一流體層。可精確地控制填充,使得對 於許多應用,不再需要藉由(例如)一刮板在填充後夷平所 沈積的第一層。 田該第-區域對於該第二流體比對於該S _流體具有一 130008.doc 201107047 更低潤濕性時’會改良該第一流體之沈積。潤濕性差異促 進在該表面上由該第一流體替換該第二流體。 該第-、第二及第三流體可能係液體。在該方法之一特 殊具體實施例中,該第-流體係H體,該第二流體 係-第二液體而該第三流體係—氣體。在該氣體與該第二 液體之間的介面形成一較佳品質路徑用於該第一液體從該 施配器移動至該表面。 Ο ❹ 當該第二流體係極性或導電性時,具有該第一及第二流 體並形成-基板之部分的表面特別適合用於—可切換光學 元件,例如一電濕潤顯示器。 該氣體可能m氣,其恰好形成較佳小滴。當藉由在該 表面上施配該第二流體或囍击A — & L魈及猎由在該第二流體内浸沒具有該 表面之物件來施加該第二流體層至該表面時,线空穴可 能因為用於該第二流體之較低潤濕性而被截獲在該第一區 域上在鈿配該第一流體期間,在該施配器與該表面之間 的空氣小滴將會與所截獲空穴合併,藉此從該第一區域釋 放空氣空穴並使整個區域可用於該第一流體。當該施配器 在該表面上移動時’該小滴作為料所㈣空氣空穴之一 清除器而操作。 該方法可較有利地用於施加—第—流體於—表面上,在 該表面上該第-區域具有—相鄰第二區域,該第二區域對 於該第二流體比對於該第一流體具有一更高潤濕性。由於 i /門展14差異’該第—流體將會偏向性地黏附至該等第一 區域而不黏附至該等第二區域。類似地,該第二流體將會 130008.doc 201107047 保持黏附至該等第二區域並驅使離開該等第一區域。由 此,該等第一區域將會由該第一流體之一層所覆蓋,厚度 另外取決於該小滴之大小,而該等第二區域將仍由該第: 流體所覆蓋。 當該第-區域之大小係較小時’所沈積第—流體可能採 取接近一半球形之一靴。此類彎曲沈積係也由術語「該 第一流體之一層」所涵蓋。 ΟThe voids of, for example, air trapped on the surface during the second fluid layer are removed to improve the deposition of the first fluid on the surface. The compatibility ensures that only the first fluid is deposited without including the auxiliary third fluid and the effect of the third fluid is not affected by mixing the first fluid. In the case where the second fluid is also incompatible with the first fluid, the stability of the method is increased. " In a first embodiment of the method, a second dispenser is used to apply the second fluid, and the second dispenser has an opening disposed in the second fluid. Removal of the trapped holes can be performed independently of providing the first fluid layer. For example, the second dispenser can be scanned one or more times on the surface and then one or more scans of the first dispenser are performed. When the second and second flow systems are incompatible, mixing of the second and third fluids will be avoided. The third fluid is permeable to the opening of the second dispenser to form a droplet of the third fluid between the opening and the surface. The droplets are shown to effectively remove holes such as air trapped on the surface. The second dispenser having an opening disposed within the second fluid can also be applied independently of the first dispenser and the first fluid can be used to remove (eg,) air from the surface 130008.doc 201107047 hole. The second applicator can scan the surface prior to the first applicator, but advantageously the first applicator scans the surface prior to the second applicator. When the first fluid layer has been deposited on the surface, the trapped holes are more likely to be removed by the droplets of the third fluid than when the first fluid has not been deposited. Moreover, it makes the thickness of the deposited layer of the first fluid more uniform. In a second embodiment of the °H method, the third flow system is applied through the opening of the Q 帛16 adapter. In this case, the amount of the third fluid and its position can be adjusted to affect the amount and manner of deposition of the first fluid. It allows for improved control of one of the thicknesses of the deposited first fluid layer, particularly the uniformity of thickness. In a particular form of the second embodiment, the method comprises the steps of: - dispensing the third fluid through the opening π of the dispenser to form a small one of the third fluid between the opening and the surface And gamma is applied to the first fluid through the opening π for moving along the interface between the second fluid and the third fluid of the crucible 35 and depositing on the first region. The interface between the third fluid droplet between the opening and the surface of the finely-matched surface and the second body provides a path for the first fluid to move from the dispenser - σ to the surface. The amount of first fluid deposited on the first-regions is controlled by the size of the droplets. - The larger size drops provide a thicker first fluid layer on the first zones. The filling can be precisely controlled so that for many applications it is no longer necessary to level the deposited first layer by filling, for example, a squeegee. The first region of the field will improve the deposition of the first fluid for the second fluid having a lower wettability for the S_fluid of 130008.doc 201107047. The difference in wettability promotes replacement of the second fluid by the first fluid on the surface. The first, second and third fluids may be liquid. In a particular embodiment of the method, the first flow system H body, the second fluid system - the second liquid and the third flow system - gas. An interface between the gas and the second liquid forms a preferred quality path for the first liquid to move from the dispenser to the surface. Ο ❹ When the second flow system is polar or electrically conductive, the surface having the first and second fluids and forming part of the substrate is particularly suitable for use in a switchable optical component, such as an electrowetting display. The gas may be m gas, which just forms a preferred droplet. When the second fluid layer is applied to the surface by displacing the second fluid or slamming A- & L 魈 and hunting in the second fluid by immersing the object having the surface in the second fluid The void may be trapped on the first region due to the lower wettability of the second fluid during the first fluid, and the air droplet between the dispenser and the surface will Hole cavitation is intercepted whereby air voids are released from the first region and the entire region is available for the first fluid. When the dispenser moves over the surface, the droplet operates as a one of the air pockets of the material (4). The method may be advantageously used to apply a first-fluid-on-surface on which the first-region has an adjacent second region, the second region having a second fluid ratio for the first fluid A higher wettability. Since the i/door spread 14 difference, the first fluid will be biased to adhere to the first regions without adhering to the second regions. Similarly, the second fluid will remain adhered to the second regions 1308000.doc 201107047 and drive away from the first regions. Thus, the first regions will be covered by a layer of the first fluid, the thickness being additionally dependent on the size of the droplets, and the second regions will still be covered by the first fluid. When the size of the first region is small, the deposited first fluid may take nearly one half of the spherical boot. Such curved deposition systems are also covered by the term "one layer of the first fluid". Ο

當該第-及/或第二施配器之開口之一最大尺寸係小於 該第-區域之-最小尺寸時,便可精確填充各區域以獲得 該第-層之所需厚纟’該厚度可能對於不同第—區域而不 同。 當該第-及/或第二施配器之開口之一最大尺寸係大於 該第-區域之-最小尺寸時,可同時填充數個相鄰第一區 域,從而允許增加沈積速度。 一具有一伸長形狀之開口允許在該第—施配器之一掃掠 中填充第一區域岑藉cb姑. ❹該弟二施配II之-掃掠來移除空 氣。-區域或-區域圖案可藉由在一栅格狀圖案内在該區 域上逐步或連續地移動該施配器來加以填充。藉由在該表 :上,過—伸長施配器進行填充需要更少移動並可加速沈When the maximum dimension of one of the openings of the first and/or second dispenser is less than the minimum dimension of the first region, the regions can be accurately filled to obtain the desired thickness of the first layer. It is different for different first-areas. When the maximum dimension of one of the openings of the first and/or second dispenser is greater than the minimum dimension of the first region, a plurality of adjacent first regions may be simultaneously filled, thereby allowing for an increase in deposition speed. An opening having an elongated shape allows the first region to be filled in the sweep of one of the first dispensers, and the second is to sweep the air to remove the air. The area or area pattern can be filled by gradually or continuously moving the dispenser over the area within a grid pattern. By using the over-extension dispenser on the table, the filling requires less movement and can accelerate the sinking.

積程序。該小滴之邊I 瓊界(即在該表面上的該第一及第二流 :之間介面線上的法線不平行於移動方向時該小滴之部 ^ 可能會引起沈積層厚度之局部不均勻性。該伸長施配 ^ 料邊界於上面欲沈積㈣的該等第一 外’藉此避免在該等第—區域上的沈積層厚度不均 130008.doc -10· 201107047 勻性。 當該第-施配器之開口與該表面在一方向(較佳的 質上垂直於該伸長形狀之—長轴)上相對於彼此移動時, 一最大區域係由該施配器之一單一掃掠所覆蓋。 A該:法特別適合於在-表面上沈積-第-層,該表面包 含由第二區域所分離並形成一圖案的複數個第_區域。^ 自具有-伸長開口之施配器來沈積該第—流體時,獲得二 〇 帛—層之—均勻厚度。較佳的係,該開口之伸長形狀之長 轴八有至>、與平行於§亥長轴之圖案之一尺寸相同的長度。 若該第一流體係在二或更多掃掠中沈積在一圖案上且該小 滴之部分越過一第一區域兩次,則沈積在該第—區域上的 層厚度將會不同於該小滴僅越過一次之第一區域。因此, 該厚度在該圖案係在一伸長施配器之一掃掠中填充比在— 更小施配器之數個掃掠中填充時將會更加均勻。 在該方法之一特殊具體實施例中,在一第一區域與一第 Ο 二區域之間的一界線與在越過該界線的該第二流體與第_ 地體之間的一前導介面(leading interfaee)之一局部方向形 成不同於零之角度。當在該第一及/或第二施配器開口 - 與6亥介面之間的前導介面與在第一及第二區域之間的一界 • 線形成一線接觸時,流體介面傾向於固定於該界線上,引 起所沈積第一流體層之厚度不均勻。當該界線與該介面形 成一非零角度時,不再存在任何線接觸,而僅存在一點接 觸,從而幾乎不顯示任何固定。由此,所沈積第一流體層 厚度更加均勻。一 5。或更多角度引起一明顯的均勻性改 130008.doc -11 - 201107047 良ρ對於20。及以上的一角度,獲得極佳的均勻性。 當該施配器之開口為矩形時,該前導介面之局部方向平 行於該開口之長軸。因此應配置第一區域之一矩形圖案, 其界線與該長軸成一非零角度。 ΟProduct program. The edge of the droplet, the I-join boundary (ie, the first and second flows on the surface: the normal of the droplet on the interface line is not parallel to the direction of movement) may cause a local thickness of the deposited layer Inhomogeneity. The elongation application boundary is on the first outer portion of the above (4) to be deposited to thereby avoid uneven thickness of the deposited layer on the first-regions 130008.doc -10·201107047. When the opening of the first dispenser is moved relative to each other in a direction (preferably qualitatively perpendicular to the elongated axis of the elongated shape), a maximum area is covered by a single sweep of the dispenser A: The method is particularly suitable for depositing a - layer on a surface comprising a plurality of _ regions separated by a second region and forming a pattern. ^ is dispensed from a dispenser having an elongated opening In the case of the first fluid, a uniform thickness of the bismuth layer is obtained. Preferably, the long axis of the elongated shape of the opening has a length equal to the size of one of the patterns parallel to the long axis of the § If the first-flow system is deposited in two or more sweeps On the pattern and the portion of the droplet passes over a first region twice, the thickness of the layer deposited on the first region will be different from the first region in which the droplet only passes once. Therefore, the thickness is in the pattern system. The filling in one sweep of an elongate dispenser will be more uniform than in a few sweeps of a smaller dispenser. In a particular embodiment of the method, in a first region and a third A boundary line between the two regions forms a different angle from zero with respect to a local direction of a leading interfaee between the second fluid and the third ground region crossing the boundary line. When at the first and/or Or when the first interface between the second dispenser opening and the 6-layer interface forms a line contact with a boundary line between the first and second regions, the fluid interface tends to be fixed to the boundary line, causing deposition The thickness of a fluid layer is not uniform. When the boundary forms a non-zero angle with the interface, there is no longer any line contact, but only a little contact, so that almost no fixation is shown. Thus, the first fluid layer is deposited. thickness More uniform. One or more angles cause a significant uniformity change 130008.doc -11 - 201107047 Good ρ for an angle of 20 and above, excellent uniformity is obtained. When the dispenser opening is rectangular The local direction of the leading interface is parallel to the long axis of the opening. Therefore, a rectangular pattern of one of the first regions should be arranged, the boundary of which is at a non-zero angle to the long axis.

上文傾斜掃描不僅有利於一三流體沈積方法,而且還為 一雙流體沈積方法改良沈積層厚度均勻性,其中係在該第 二流體中施配該第一流體而不施加該第三流冑。該優點還 適用於不使用該第二流體來沈積該第—流體或僅在該第二 流體内施加該第三流體的施配器。在後者情況下,在該第 二流體與肖第三流體之間的前導介面方向係相關而非在該 第二流體與該第一流體之間的前導介面方向。 該第一施配器可在該表面上一次掃描以沈積第一流體 層。當該第一施配器在該表面二或更多次掃描時,獲得一 更大層厚度均句性。在第—掃描期間,該第—流體係沈積 在該表面上;在隨後掃描或多個掃描期間,該第一流體係 藉由在第一掃描中沈積過少情況下補充第一流體並藉由在 /尤積過多時移除第一流體來重新分配於該表面上。若使用 一第一及第二施配器’則在該第一施配器之後該第二施配 器之一或多個掃描也會增加厚度均勻性。 當該表面係—第一基板之部分且提供一第二基板,其定 義在該第一基板與該第二基板之間包含該第一流體與該第 二流體之一空間時,具有該第一及第二流體層之該表面可 轉換成一閉合系統。 本發月之第一態樣係關於一種設備,其包括一第一施 130008.doc -12- 201107047 配器,其具有一開口用於使用依據本發明之方法來在—表 面之一第一區域上提供一第一流體之一層。 在該設備之一第一具體實施例中,提供具有一開口的一 第二施配器用於施加該第三流體。 在該設備之一第二具體實施例中’該第一施配器有用於 該第一流體的一第一輸入與用於該第三流體的一第二輸 入,從而允許控制第一流體之量與第三流體小滴之大小, 藉此控制沈積於該表面上的第一流體量。 在該設備之一特殊具體實施例中,該第一及/或第二施 配器之開口係伸長的。該設備較有利的係包括一移動平 台,用於相對於彼此來移動該施配器與該表面。 當該裝置包含用於控制該第一流體與該第三流體之一控 制器時,可控制所沈積第一流體層厚度以增加該沈積層之 厚度精度。該控制器可控制該第一流體及/或該第三流體 之量。用於該控制器之輸入可能係由一決定該沈積層厚度 之測量裝置或由一決定該第三流體小滴之形狀及/或大小 之測量裝置所提供的值。該控制器還可使用來自該設備之 一操作者之手動輪入。 >考附圖進行本發明之較佳具體實施例之下列說明,其 系僅藉由範例方式提供,從中將會明白本發明之進—步特 徵及優點。 【實施方式】 圖1以斷面顯示依據本發明之一種用於在一表面上施配 第一流體之設備之一第一具體實施例。一板丨具有一表 130008.doc -13- 201107047 面2,在其上將會沈積一第一流體之一層。採取—注 =3形式之-施配器在—方向5上在該表面上移動,該注射 盜針具有巾心通道4。第一流體6係透過通道4來加以供 應。表面2係由一第-、、ώ胁。 、 由第—流體7之-層所覆蓋。該針具有一圓 形開口8,其在操作中位於該第二流體内並位於表面2上 方。一第三流體9係部分位於通道4内並部分位於開口 4與 Ο ❹ 表面2之間。該第三流體在開口 4與表面以間形成一小滴 10。小滴10可局部鄰接表面2。 第一流體6作為一相對較薄層沿第二流體7與第三流體9 =的介面⑽注射器3移動至表面2,在該表面處其⑽ 成為-層12。在第二流體7與第一流體6之間的一前導介面 :„3推開該第二流體並用該第-流體取代其。在通過該施配 盗之後仍留在該表面之—區域上的該層之厚度另外取決於 開口 8之寬度、其形狀、該施配器之移動速度、在開口 8盥 表面2之間的距離、該等流體之黏度及小滴之大小、第二 及第三流體之量、各種介面之介面張力及化學差異,即在 流體及該表面及該施配器之各種組合之間的疏水性差異。 第一流體6可能係一燒烴(例如十六貌)或一油⑼如一炉 油)。圖!之具體實施例使用_料。第二流體何能係與 該第-流體不相溶的任一流體。該第二流體可能係極性或 導電性的,此在由該第一及第二流體所覆蓋之板之一些應 用中較有用。所示具體實施例使用水作為第二流體。第三 流體續有利的係同時與該第—流體與該第二流體不相溶 以穩定該小滴。該第三流體可能係一氣體,例如空氣、氮 130008.doc -14- 201107047 氣或氬氣。該具體實施例使用空氣作為第三流體。可使用 的其他不相溶流體係氟碳化合物與液體金屬(例如水銀)。 在該表面對於該第一流體比對於該第二流體具有一更高 潤濕性時,冑會促進在該表面上沈積該第一流冑。在所示 I體實施例中,板!可由—疏水層所覆蓋,例如—非晶含 氣聚合物,諸如AF 1600。言亥疏水層増加該油黏附至該表 面並排斥該水之傾向。 Ο 如圖1所示施加該第三流體可藉由遵循後續步驟來實 現.使用該第-流體來填充該注射器;引入一定量的空氣 至該主射器内,將該注射器插入第二流體7之層内;及將 流體從該注射器中推出。該小滴之大小係由在該注射器内 的空氣量與該等第-及第二流體之屬性來決定的。該注射 器可m第一液體之貯存器與—用㈣配所需第一流 體量之幫浦機構來取代。 圖2顯不一用於在一具有圖案之表面上施配該第一流體 Ο 之施配器之俯視圖° «案20包含第—區域21,在此具體實 施例中係方格,其對於第一流體6比對於第二流體7具有一 更大润濕性。該等方格可由一 AF 16〇〇層製成。一相鄰第 • 〕區域22對於該第二流體比對於該第-流體具有一更大潤 - 隸。區域22可由各種材料之-層所製A,包括-光阻 (例如則)。在圖中該針之開σ8之最大尺寸係小於該方格 之最小尺寸。該針之大小允許僅填充該圖案之選定第一 區域。當在該第—區域上沈積該第一流體時,該第-流體 層之展度係受該第二區域限制,該第二區域排斥該第一流 130008.doc •15- 201107047 體。該第二區诚** * 藉由配置一分離層來加以形成,該分離 層在形,該等第_區域之—不中斷層上具有該第二區域之 形式。當该第—區域係疏水性時,該分離層應該係親水性 的。亥刀離層可藉由(例如)一印刷方法或蒸鍍來加以形 成。該第—區域還可由具有一高度之壁所形成,該高度機 械約束該第-流體至該第—區域。 圖3顯不一用於在一具有—圖案之表面上施配該第一流 ΟThe above oblique scanning not only facilitates a three-fluid deposition method, but also improves the thickness uniformity of the deposited layer for a two-fluid deposition method in which the first fluid is dispensed in the second fluid without applying the third flow. . This advantage is also applicable to dispensers that do not use the second fluid to deposit the first fluid or only apply the third fluid within the second fluid. In the latter case, the direction of the leading interface between the second fluid and the third fluid is related rather than the direction of the leading interface between the second fluid and the first fluid. The first dispenser can scan once on the surface to deposit a first fluid layer. When the first dispenser is scanned two or more times on the surface, a greater layer thickness uniformity is obtained. During the first scan, the first flow system is deposited on the surface; during a subsequent scan or a plurality of scans, the first flow system replenishes the first fluid by depositing too little in the first scan and by The first fluid is removed to be redistributed on the surface when it is excessive. If a first and second dispenser is used, then one or more scans of the second dispenser after the first dispenser also increase thickness uniformity. When the surface is a portion of the first substrate and provides a second substrate, the first substrate and the second substrate are defined to have a space between the first fluid and the second fluid. The surface of the second fluid layer can be converted into a closed system. The first aspect of the present month relates to an apparatus comprising a first application 130008.doc -12- 201107047 orchester having an opening for use on a first region of a surface using the method according to the invention A layer of a first fluid is provided. In a first embodiment of the apparatus, a second dispenser having an opening for applying the third fluid is provided. In a second embodiment of the apparatus, the first dispenser has a first input for the first fluid and a second input for the third fluid to allow control of the amount of the first fluid The size of the third fluid droplet, thereby controlling the amount of first fluid deposited on the surface. In a particular embodiment of the apparatus, the opening of the first and / or second dispenser is elongated. Advantageously, the apparatus includes a moving platform for moving the dispenser and the surface relative to each other. When the apparatus includes a controller for controlling the first fluid and the third fluid, the thickness of the deposited first fluid layer can be controlled to increase the thickness accuracy of the deposited layer. The controller can control the amount of the first fluid and/or the third fluid. The input for the controller may be provided by a measuring device that determines the thickness of the deposited layer or by a measuring device that determines the shape and/or size of the third fluid droplet. The controller can also use manual wheeling from an operator of the device. BRIEF DESCRIPTION OF THE DRAWINGS The following description of the preferred embodiments of the present invention is intended to [Embodiment] Figure 1 is a cross-sectional view showing a first embodiment of an apparatus for dispensing a first fluid on a surface in accordance with the present invention. A plate has a surface 130008.doc -13 - 201107047 face 2 on which a layer of a first fluid will be deposited. The dispenser is moved in the direction 5 on the surface, and the injection thief has a center channel 4. The first fluid 6 is supplied through the passage 4. Surface 2 consists of a -, and a threat. Covered by the layer of the first fluid-7. The needle has a circular opening 8 that is operatively located within the second fluid and above the surface 2. A third fluid 9 is partially located within the passage 4 and partially between the opening 4 and the crucible surface 2. The third fluid forms a droplet 10 between the opening 4 and the surface. The droplet 10 can partially abut the surface 2. The first fluid 6 moves as a relatively thin layer along the interface (10) of the second fluid 7 and the third fluid 9 = the injector 3 to the surface 2 where it (10) becomes the layer 12. a leading interface between the second fluid 7 and the first fluid 6: „3 pushes the second fluid and replaces it with the first fluid. This remains on the surface of the surface after passing the dispensing The thickness of the layer is additionally dependent on the width of the opening 8, its shape, the speed of movement of the dispenser, the distance between the surfaces of the openings 8 and the surface, the viscosity of the fluids and the size of the droplets, and the amount of the second and third fluids. Interfacial tension and chemical difference of various interfaces, that is, the difference in hydrophobicity between the fluid and the various combinations of the surface and the dispenser. The first fluid 6 may be a hydrocarbon (for example, a sixteen appearance) or an oil (9) such as a furnace. The specific embodiment uses a material. The second fluid can be any fluid that is incompatible with the first fluid. The second fluid may be polar or electrically conductive. And some applications of the plate covered by the second fluid are more useful. The particular embodiment shown uses water as the second fluid. The third fluid continues to be advantageous while simultaneously being incompatible with the first fluid and the second fluid to stabilize The droplet. The third fluid may A gas, such as air, nitrogen 130008.doc -14-201107047 gas or argon. This embodiment uses air as the third fluid. Other immiscible flow systems may be used, fluorocarbons and liquid metals (e.g., mercury). When the surface has a higher wettability for the first fluid than for the second fluid, helium promotes deposition of the first flow on the surface. In the illustrated embodiment, the plate can be hydrophobic The layer is covered, for example, an amorphous gas-containing polymer, such as AF 1600. The hydrophobic layer adds the tendency of the oil to adhere to the surface and repel the water. 施加 Applying the third fluid as shown in Figure 1 can be followed by Subsequent steps are implemented. The first fluid is used to fill the syringe; a quantity of air is introduced into the main emitter, the syringe is inserted into the layer of the second fluid 7, and the fluid is pushed out of the syringe. The size of the drop is determined by the amount of air in the syringe and the properties of the first and second fluids. The syringe can be used as a reservoir for the first liquid and (four) with the first amount of fluid required. Pu institutions to replace Figure 2 shows a top view of a dispenser for dispensing the first fluid raft on a patterned surface. The case 20 contains a first region 21, which in this particular embodiment is a square, A fluid 6 has a greater wettability than the second fluid 7. The squares can be made of an AF 16 layer. An adjacent region 22 is for the second fluid ratio for the first fluid The region 22 can be made of a layer of various materials, including - photoresist (for example). In the figure, the maximum size of the opening σ8 of the needle is less than the minimum size of the square. The size of the needle allows filling only the selected first region of the pattern. When the first fluid is deposited on the first region, the spread of the first fluid layer is limited by the second region, the second region repels the The first stream 130008.doc •15- 201107047 body. The second zone is formed by arranging a separate layer in the form of a shape of the second region on the uninterrupted layer of the first region. When the first region is hydrophobic, the separation layer should be hydrophilic. The cleavage layer can be formed by, for example, a printing method or evaporation. The first region may also be formed by a wall having a height that mechanically constrains the first fluid to the first region. Figure 3 is apparently used to dispense the first flow on a surface having a pattern

體之&配器之俯視圖。圖案3〇包括第一區域31與第二區域 32。針33具有—開口 34 ’其具有大於該第一區域之一最小 尺寸(即該第一區域之一側之長度)的一最大尺寸(即一直 桎)。當肖開口在該表面上的該圖案上移動時,複數個第 -區域係同時由該第一流體所覆蓋,藉此增加該設備之沈 積速度。該第-流體偏向於鄰接第__區域並因為其不同潤 濕性而受該第二區域排斥。 、、透過該第二流體層來沈積該第一流體具有數個優點。其 減少第-流體之溢濺。其減少由於環境所導致之表面污 染^亏染物不會傾向於穿過環境之阻擋至第二流體。存在 該第二流體使得更易於局部化該沈積。該第二流體引起該 卜流體更少曝露於空氣中的氧氣,從而減少該第一流體 乳化。若+存在該第二流體層❿沈積該第一流冑,該第一 流體將會固定於該第二區域上的雜質。當該第二流體X在沈 積该第-流體之前接觸該第二區域時,該第一流體會更少 可能固定於該等雜質丨’因為必需從雜質周圍的一較小區 域排斥該第二流體。 I30008.doc -16- 201107047 在施加該第二流體層於該表面上時,空氣可能會截獲於 該表面上,特別係在與一第二區域之邊界附近的第一區域 上。當該施配器掃過該第一區域且該小滴係充滿空氣時, 所截獲空氣將會與該小滴合併並且其在該第一區域上的位 置將會由該第一流體所佔據。該小滴作為該表面之一空氣 清除器而操作。 . 在該表面上沈積該第一流體之後,具有第一及第二流體 〇 之板可用以(例如)一電濕潤裝置,例如一顯示裝置、一光 學元件及一可調整虹膜或一可調整透鏡。該第二流體還可 在该第一流體沈積之後移除並在一應用中使用僅具有該第 一流體之板。 圖4顯不一設備,其具有一種用於透過提供於該表面上 之一第二流體水之一層並在一第三流體空氣輔助下沈積一 第一流體油之一層之伸長施配器。該圖顯示該施配器與該 板之一切透。該施配器可能藉由兩個垂直壁而在較短側閉 ❹ 合。施配器40具有一 U形狀,其開口41面向一板43之表面 42。δ亥開口係在该第二流體表面下面。圖中未顯示在該第 二流體與環境之間的介面。該施配器有採取一管44之形式 . 的一第一輸入,其係用以饋送該油至該施配器内;及採取 一管45之形式的一第二輸入,其係用以控制空氣。一較長 施配器可能具有二或更多第一輸入及/或第二輸入,其係 以該施配器之長度規則間隔以改良該等流體之控制。空氣 形成由一油層47所環繞之一伸長小滴46。開口 〇之寬度較 佳的係小於10 mm,例如2 mm。當該開口寬於1〇 mm時, 130008.doc •17- 201107047 油傾向於從該開口逃逸並在水中向上移動。在該表面上方 的該開口距離較佳的係小於2 mm,且在一特殊具體實施 例中係0.1 mm。一較小開口透過毛細管力藉由該第一流體 來促進該施配器之填充。 該施配器在内壁48上及相鄰開口 41之壁部分49上具有一 疏水性表面。該疏水特性將該油固定至該施配器。至少部 分為水所鄰接的該施配器之外壁5〇係親水性的以避免油污 〇 染。該施配器可由略微疏水的PMMA製成。此材料具有一 高接觸角度滯後的優點,從而改良該油之潛在穩定性。儘 管在圖巾該第一流體固定在該壁部分之兩個外邊緣上,但 其還可固定於該壁部分之兩個内邊緣上。滞後係指在流體 邊界之前進及退後運動之後的接觸角差異。 在沈積程序期間,該施配器在—方向51上移動,該方向 實質上垂直於開口 41之長轴,藉此在表面42上移動在該水 與該油之間的一前導介面52。該表面包含一區域圖案53, 〇 各區域可能係-第-區域或-第-區域及第二區域子圖 案例如,各子圖案可能係一顯示裝置,且二或更多顯示 裝置係在一平行於該施配器之長軸之方向上而配置於該表 面上。此外’一圖案或子圖案可能具有一形狀,其向一觀 ㈣傳達-含意,例如-徽標。此-子圖案可能組合另一 子圖案用以一顯示功能,同時還提供票牌功㉟。在一顯 示裝置中,該圖案或子圖案可作為一共同顯示元件切換或 係水久性的,即不可切換。在另一具體實施例中,此一圖 案或子圖案提供—裝饰效果,例如用以增強觀察者體驗。 130008.doc -18- 201107047 該開口之長度係實質上與平行於該開口長軸之圖案之尺 寸相同或大於其。該長度應至少大得足以在小滴46之邊界 處所引起之任一沈積不規則會發生於該圖案之外。該開口 之長度可能在垂直於掃描方向之方向上實質上等於該表面 之大小。在區域53之間的區域較佳的係親水性的,例如由 SU8覆蓋以避免在該表面之此區域内沈積油。 在圖4所不設備之具體實施例中,該油之前導介面μ平 ❹ 行於在第一區域與第二區域之間的界線54而行進。由於油 47不欲鄰接第二區域,故在該施配器下面的油形狀沿從疏 水性區域至親水性區域之接觸線而受到擾亂。在該等界線 上固定該油會在該施配器在該表面上移動期間引起一遲滯 (stick-slip)運動,從而可能會導致一條狀沈積油層。 圖5(a)顯示施配器6〇相對於具有第一及第二區域之—圖 案61配置於-板62上之一表面之一第一方位。掃描方向係 由箭頭63來指示。第一方位係與圖4所示之方位相同。圖 〇 5(b)顯不一第二方位,其中比較圖5(a)中方位,板62在大 約8度的角度上隨同圖案61 —起旋轉。該施配器之前導 介面52現在處於與界線54相同的8度角度下。由於該介面 . 與該界線不再具有一線接觸而僅一點接觸,故會強烈降低 固定效應且該沈積層之厚度比圖5(a)之情況更加均勻。對 於大於5度之角度觀察到一均勻性改良且對於大於22·5度 之角度,均勻性不會進一步顯著改良。圖5(c)顯示一替代 I1 生組i、其中板63具有其邊緣之一平行於施配器6〇而圖案 64具有界線與該施配器之前導介面成一不等於零之角度。 130008.doc -19- 201107047 用於-筆直、伸長施配器之前導介面係筆直 該施配器開口之長軸之方.的 士人 ^ 釉之方向的一方向。當該施配器之開口 在一平行於該表面之平面内變曲時,該前導介面也將會f 曲。為了避免上述遲滯運動,該前導介面之局部方向應與 該等界線之方向形成一非零角度。 • _㈣使用三個流體針對—填充程序來說明圖5(b)及⑷所 不之傾斜填充,但還可能較有利地用於其令該第一流體係 〇 歧於一第二流體内表面上的填充方法,由於在此情況下 發生類似遲滞運動。在一單流體填充方法t,該傾斜填充 類似地較有利,其中一流體係在空氣或真空令沈積於該表 面上。 圖6顯示使用依據本發明之沈積方法所製造之一系列電 濕潤元件之一斷面。一第一基板7〇具有電極71,其係在該 基板上沈積作為一薄膜導體。各電極係連接至用於提供一 電壓之一彳s號線72。該等電極係由非晶含氟聚合物AF ❹ 1600之一細薄疏水層73所覆蓋。一細薄SU8親水層74之一 圖案在該等第二親水區域74之間的第一疏水區域75内劃分 該基板表面。第一區域之大小係! 6〇平方微米,該等第二 • 區域具有一 10微米寬度與一 3至6微米高度。具有該等層 - 71、73及74之第一基板70使用油作為第一流體、水作為第 一流體及空氣作為第三流體或另一流體組合而經歷依據本 發明之沈積方法。在實施該方法之後,該等第一區域75均 勻地由一油層76覆蓋’該油層具有在3與6微米之間的一厚 度’例如5微米。該等第二區域74與該油層係由水77所覆 130008.doc • 20· 201107047 蓋。該水可能包含睫以极Λ甘@ 以增加其導電性並增大用於該方法之 溫度窗口。在該方法如門& /± 忐期間所使用的該第二流體(在此範例 中為水)較佳的係在包括該基板之產品中所使用的相同流 體從而避免在藉由另—流體執行該方法之後改變該第二 流體。-第二基板78形成在該第一及第二基板之間的一閉 σ工間豸工間係藉由附著至二基板之密封齊“圖中未顯 ' 示)保護以免受環境影響。 ◎ 層74之圖案在該基板上定義限定油層76的元件。各元件 具有-電極71。連接至一信號線8〇的另一電極79係接觸水 77’從而形成用於複數個元件的一共同電極。當在共同電 極79與一几件之電極71之間施加一電壓時,在該元件内的 油層76移動至—元件側或打碎,然後該第一表面將會至少 β刀地由水77所覆蓋。在國際專利申請案w〇〇3/〇7i346中 更全面地說明此所謂電濕润效應。當該油及/或該水具有 用於光吸收、反射及/或透射的特定光學屬性時,該元件 〇 可作為在(例如)一顯示器中的一光閥操作。 該等電濕潤元件可用於—顯示設備,其中複數個電濕潤 元件I成顯示裝f;。在該設備内的一顯示驅動系統提供 • 用於设定該等元件於所需狀態下的電壓。 • 圖7顯示依據本發明一種用於在一表面上沈積一層之設 備。一托盤82可由該第二流體填充。該托盤包含一平台 84,其上可配置一基板。在下側具有一開口 %之一施配器 85係安裝於一平移平台(圖中未顯示)上,該平移平台致能 该施配器掃過平台84。或者,該施配器係固定不動的而該 130008.doc -21- 201107047 表面係女裝於-平移平台上。在操作中,該施配器開口低 於該第二流體之位準。用於該第—流體之一第一容器87係 連接至-第一控制單元88(例如—間或一幫浦),其控制欲 經由一連接89遞送至施配器85之第一流體量。用於該第三 流體之-第二容器9〇係類似地連接至一第二控制單元Μ, 其係用於經由一連接92遞送該第三流體至該施配器。當該 第-流體係空氣時’可施配該第二容器且控制單元Μ可較 Ο Ο 佳的係經由一過滤器從周圍環境提取空氣,或排出任何多 餘空氣。連接92還可用以在必須減少小滴之大小時或在從 =等工八所移除之空氣變得相當多時從該施配器中排出空 氣。 二 一控制器93提供用於設定該第—及第二控制器至所需讯 信號。該設備可包括用於決定該沈積層之厚度之一: =、置。厚度值可料用於設^該等控制單元之輸入。該 2還可能包括用於(例如)使用一在該施配器長轴方向^ 察该施配器之相機來測量第三流體小滴之形狀及/或大 小或在該施配器與該表面之間第一流體容積的—裝置,並 ^用此輸入來設定該等控制單元。在該表面上方㈣施配 =南度可能(例如)藉由在該伸長施配器之二遠端處測量 兩度並維持該些高度在相等值下來保持在一所需值下。該 可使用來自該設備之一操作者之手動輸入而非測 重值。 圖8顯示依據本發明之方法之—替代性具體實施例。透 過-管⑻填充有[流體6並在—第二流射層内具有一 130008.doc •22· 201107047 開口之一施配器100在板43之表面42上在一方向1〇2上掃 描,從而在該表面上沈積該第一流體之一層1〇3。透過一 管106填充有第三流體9並在第二流體7層内具有一開口之 一施配器105跟隨施配器1〇〇之後在一方向ι〇7上掃描表面 42。該第三流體在施配器! 〇5之開口與表面42之間形成一 小滴。該小滴移除在該表面上提供該第二流體層之後在該 表面上所截獲之空氣空穴。 ◎ 上述具體實施例應理解為本發明之說明性範例》預期本 發明之另外具體實施例。應明白,所述關於任一具體實施 例所述之任一特徵可單獨或組合所述其他特徵來使用,並 還可組合該等具體實施例之任一其他具體實施例之一或多 個特徵或該等具體實施例之任一其他者之任一組合來使 用此文,還可運用上面未說明之等效内容及修改而不脫 離在隨附申請專利範圍内所定義的本發明之範疇。 【圖式簡單說明】 〇 圖1顯不依據本發明用於使用一空氣小滴在一表面上施 配油之一設備; 圖2及3顯示用於在具有一圖案之一表面上施配油之一施 配器; 圖4顯示具有一伸長施配器之一設備; 圖5(a)、(b)及(c)顯示用於掃描該表面之一第一、第二及 第三方位。 圖6顯示一電濕潤元件之一斷面; 圖7顯示用於該設備之一控制器;以及 130008.doc -23- 201107047 圖8顯示用於施配油之一施配器與用於施加空氣之一分 離施配器。 【主要元件符號說明】 1 板 2 區域/表面 3 施配器/注射器針 4 中心通道/開口 6 第一流體Top view of the body & The pattern 3A includes a first area 31 and a second area 32. The needle 33 has an opening 34' which has a maximum dimension (i.e., a constant length) that is larger than the smallest dimension of one of the first regions (i.e., the length of one side of the first region). As the shaw opening moves over the pattern on the surface, a plurality of first-regions are simultaneously covered by the first fluid, thereby increasing the deposition speed of the device. The first fluid is biased adjacent to the first _-region and is repelled by the second region because of its different wettability. Depositing the first fluid through the second fluid layer has several advantages. It reduces the splash of the first fluid. It reduces surface contamination due to the environment. The depleted material does not tend to block through the environment to the second fluid. The presence of the second fluid makes it easier to localize the deposit. The second fluid causes the fluid to be less exposed to oxygen in the air, thereby reducing the first fluid emulsification. If + the second fluid layer is present and the first flow is deposited, the first fluid will be fixed to the impurities on the second region. When the second fluid X contacts the second region prior to depositing the first fluid, the first fluid is less likely to be immobilized to the impurities 因为 because the second fluid must be repelled from a smaller region around the impurities. I30008.doc -16- 201107047 When the second fluid layer is applied to the surface, air may be trapped on the surface, particularly on the first region adjacent the boundary of a second region. When the dispenser sweeps across the first region and the droplet is filled with air, the trapped air will merge with the droplet and its position on the first region will be occupied by the first fluid. The droplet operates as an air cleaner for the surface. After depositing the first fluid on the surface, the plate having the first and second fluid ports can be used, for example, an electrowetting device, such as a display device, an optical component, and an adjustable iris or an adjustable lens. . The second fluid can also be removed after the first fluid deposition and a plate having only the first fluid is used in an application. Figure 4 shows a device having an elongate dispenser for depositing a layer of a first fluid fluid through a layer of a second fluid water provided on the surface and assisted by a third fluid air. The figure shows everything through the dispenser and the plate. The dispenser may be closed on the shorter side by two vertical walls. The dispenser 40 has a U shape with its opening 41 facing the surface 42 of a plate 43. The δH opening is below the surface of the second fluid. The interface between the second fluid and the environment is not shown. The dispenser has a first input in the form of a tube 44 for feeding the oil into the dispenser; and a second input in the form of a tube 45 for controlling the air. A longer dispenser may have two or more first inputs and/or second inputs that are regularly spaced apart by the length of the dispenser to improve control of the fluids. The air forms an elongated droplet 46 surrounded by an oil layer 47. The width of the opening 〇 is less than 10 mm, for example 2 mm. When the opening is wider than 1 mm, 130008.doc • 17-201107047 oil tends to escape from the opening and move upwards in the water. The opening distance above the surface is preferably less than 2 mm, and in a particular embodiment is 0.1 mm. A smaller opening facilitates filling of the dispenser by capillary force through the first fluid. The dispenser has a hydrophobic surface on the inner wall 48 and on the wall portion 49 of the adjacent opening 41. This hydrophobic property fixes the oil to the dispenser. At least a portion of the outer wall 5 of the dispenser adjacent to the water is hydrophilic to avoid oil staining. The dispenser can be made of slightly hydrophobic PMMA. This material has the advantage of a high contact angle hysteresis to improve the potential stability of the oil. Although the first fluid is attached to the two outer edges of the wall portion in the towel, it may also be attached to the two inner edges of the wall portion. Hysteresis refers to the difference in contact angle after the movement of the fluid before and after the boundary. During the deposition procedure, the dispenser moves in a direction 51 that is substantially perpendicular to the long axis of the opening 41, thereby moving a leading interface 52 between the water and the oil on the surface 42. The surface includes a region pattern 53, and each region may be a - region or a - region and a second region sub-pattern. For example, each sub-pattern may be a display device, and two or more display devices are in a parallel The surface is disposed on the surface in the direction of the long axis of the dispenser. Further, a pattern or sub-pattern may have a shape that conveys a meaning to a view (4), such as a logo. This sub-pattern may combine another sub-pattern for a display function while also providing ticket work 35. In a display device, the pattern or sub-pattern can be switched or water-repellent as a common display element, i.e., non-switchable. In another embodiment, the pattern or sub-pattern provides a decorative effect, for example to enhance the viewer experience. 130008.doc -18- 201107047 The length of the opening is substantially the same as or greater than the size of the pattern parallel to the long axis of the opening. The length should be at least large enough that any deposition irregularities caused at the boundaries of the droplets 46 will occur outside of the pattern. The length of the opening may be substantially equal to the size of the surface in a direction perpendicular to the scanning direction. The area between regions 53 is preferably hydrophilic, such as covered by SU8 to avoid depositing oil in this region of the surface. In a particular embodiment of the apparatus of Figure 4, the oil front interface μ is traveling parallel to the boundary 54 between the first region and the second region. Since the oil 47 does not wish to abut the second region, the shape of the oil under the dispenser is disturbed along the line of contact from the hydrophobic region to the hydrophilic region. Fixing the oil on the boundaries causes a stick-slip movement during movement of the dispenser over the surface, which may result in a strip of oil deposit. Figure 5 (a) shows a first orientation of the dispenser 6 〇 relative to one of the surfaces of the pattern 61 having the first and second regions disposed on the -plate 62. The scanning direction is indicated by arrow 63. The first orientation is the same as the orientation shown in FIG. Figure 5(b) shows a second orientation in which the orientation of the panel 62 is rotated with the pattern 61 at an angle of about 8 degrees as compared to the orientation in Figure 5(a). The adapter front interface 52 is now at the same 8 degree angle as the boundary 54. Since the interface no longer has a line contact with the boundary and only has a single contact, the fixing effect is strongly reduced and the thickness of the deposited layer is more uniform than in the case of Fig. 5(a). Uniformity improvement was observed for angles greater than 5 degrees and uniformity was not significantly improved for angles greater than 22.5 degrees. Fig. 5(c) shows an alternative I1 group i in which the plate 63 has one of its edges parallel to the applicator 6〇 and the pattern 64 has a boundary which is at an angle unequal to zero with the front interface of the dispenser. 130008.doc -19- 201107047 Used for - Straight, Elongate Dispenser Before the interface is straight The side of the long axis of the applicator opening. The person in the direction of the glaze. When the opening of the dispenser is deflected in a plane parallel to the surface, the leading interface will also be curved. In order to avoid the above-mentioned hysteresis motion, the local direction of the leading interface should form a non-zero angle with the direction of the boundary lines. • _ (d) use three fluids for the filling procedure to illustrate the oblique filling of Figures 5(b) and (4), but it may also be advantageous to use it to distinguish the first flow system from the inner surface of a second fluid. The filling method occurs because of a similar hysteresis motion in this case. In a single fluid filling method t, the oblique filling is similarly advantageous, wherein a first-class system is deposited on the surface by air or vacuum. Figure 6 shows a section of a series of electrowetting elements produced using the deposition method in accordance with the present invention. A first substrate 7A has an electrode 71 deposited as a thin film conductor on the substrate. Each electrode is connected to a line 72 for providing a voltage 彳s. The electrodes are covered by a thin hydrophobic layer 73 of amorphous fluoropolymer AF 1600 1600. A pattern of a thin SU8 hydrophilic layer 74 defines the surface of the substrate within the first hydrophobic region 75 between the second hydrophilic regions 74. The size of the first area is! 6 〇 square microns, the second • regions have a 10 micron width and a 3 to 6 micron height. The first substrate 70 having the layers - 71, 73 and 74 undergoes a deposition method in accordance with the present invention using oil as the first fluid, water as the first fluid, and air as the third fluid or another fluid combination. After the method is implemented, the first regions 75 are uniformly covered by an oil layer 76. The oil layer has a thickness of between 3 and 6 microns, e.g., 5 microns. The second regions 74 and the oil layer are covered by water 77 130008.doc • 20· 201107047. The water may contain an eyelash to increase its conductivity and increase the temperature window used for the method. The second fluid (water in this example) used during the method, such as the gate & /±, is preferably the same fluid used in the product comprising the substrate to avoid being protected by another fluid The second fluid is changed after the method is performed. - The second substrate 78 is formed between the first and second substrates by a closed 工 inter-working chamber which is protected from the environment by a seal (not shown) attached to the two substrates. The pattern of layer 74 defines an element defining an oil layer 76 on the substrate. Each element has an -electrode 71. The other electrode 79 connected to a signal line 8 turns into contact with water 77' to form a common electrode for a plurality of elements. When a voltage is applied between the common electrode 79 and the electrode 71 of the plurality of pieces, the oil layer 76 in the element moves to the side of the element or is broken, and then the first surface will be at least β-shaped by the water 77. Covered. This so-called electrowetting effect is more fully described in International Patent Application No. 3/7i346. When the oil and/or the water has specific optical properties for light absorption, reflection and/or transmission. The component 〇 can be operated as a light valve in, for example, a display. The electrowetting elements can be used in a display device in which a plurality of electrowetting elements I are mounted as display devices; Display drive system provides • for setting these The voltage in the desired state. Figure 7 shows an apparatus for depositing a layer on a surface in accordance with the present invention. A tray 82 can be filled with the second fluid. The tray includes a platform 84 on which a The substrate has one opening % on the lower side. The dispenser 85 is mounted on a translation platform (not shown) that enables the dispenser to sweep across the platform 84. Alternatively, the dispenser is stationary and the dispenser is stationary. 130008.doc -21- 201107047 The surface is worn on a translational platform. In operation, the dispenser opening is below the level of the second fluid. One of the first fluids 87 for the first fluid is connected to - A first control unit 88 (e.g., a pump or a pump) that controls the amount of first fluid to be delivered to the dispenser 85 via a connection 89. The second container 9 for the third fluid is similarly connected And a second control unit Μ for delivering the third fluid to the dispenser via a connection 92. When the first flow system is air, the second container can be dispensed and the control unit can be better The system is surrounded by a filter from the surroundings The air is extracted or any excess air is expelled. The connection 92 can also be used to vent air from the dispenser when it has to reduce the size of the droplets or when the air removed from the workmanship becomes quite large. The device 93 is configured to set the first and second controllers to the desired signal. The device may include one of determining thicknesses of the deposited layer: =, and the thickness value may be used to set the control Input to the unit. The 2 may also include, for example, measuring the shape and/or size of the third fluid droplet or using the camera in the long axis direction of the dispenser to view the dispenser and the surface a device for the first fluid volume, and using the input to set the control units. Above the surface (4) dispensing = south degrees may be measured, for example, by measuring two degrees at the distal end of the elongate dispenser And maintaining the heights at an equal value to maintain a desired value. This can be done using manual input from one of the devices rather than the weight value. Figure 8 shows an alternative embodiment of the method according to the invention. The permeate tube (8) is filled with [fluid 6 and in the second ejecting layer having a 130008.doc • 22· 201107047 opening one of the dispensers 100 is scanned on the surface 42 of the plate 43 in a direction 1〇2, thereby A layer 1 〇 3 of the first fluid is deposited on the surface. A dispenser 105, which is filled with a third fluid 9 through a tube 106 and has an opening in the second fluid layer 7, follows the dispenser 1 and scans the surface 42 in a direction ι7. The third fluid is in the dispenser! A droplet is formed between the opening of the crucible 5 and the surface 42. The droplet removes air voids trapped on the surface after the second fluid layer is provided on the surface. The above specific embodiments are to be understood as illustrative examples of the invention. It is to be understood that any of the features described with respect to any particular embodiment may be used alone or in combination with one or more of the other specific embodiments. The use of this document, or any combination of any of the specific embodiments, may also be used in the context of the invention as defined by the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 shows a device for dispensing oil on a surface using an air droplet according to the present invention; Figures 2 and 3 show the application of oil on a surface having a pattern One of the dispensers; Figure 4 shows one of the devices having an elongated dispenser; Figures 5(a), (b) and (c) show the first, second and third positions for scanning one of the surfaces. Figure 6 shows a section of an electrowetting element; Figure 7 shows a controller for the device; and 130008.doc -23- 201107047 Figure 8 shows one dispenser for dispensing oil and for applying air A separate dispenser. [Main component symbol description] 1 plate 2 area/surface 3 dispenser/injector needle 4 center channel/opening 6 first fluid

7 第二流體 8 開口 9 第三流體 10 小滴 11 介面 12 層 13 前導介面 20 圖案 21 第一區域 22 第二區域 30 圖案 31 第一區域 32 第二區域 33 針 34 開口 40 施配器 130008.doc -24- 2011070477 second fluid 8 opening 9 third fluid 10 droplet 11 interface 12 layer 13 leading interface 20 pattern 21 first region 22 second region 30 pattern 31 first region 32 second region 33 pin 34 opening 40 dispenser 130008.doc -24- 201107047

41 開口 42 表面 43 板 44 管 45 管 46 小滴 47 油層 48 内壁 49 壁部分 50 外壁 52 前導介面 53 區域圖案 54 界線 60 施配器 61 圖案 62, 63 板 64 圖案 70 第一基板 71 電極/層 72 信號線 73 細薄疏水層 74 親水層/第二親水區域 75 第一疏水區域 76 油層 130008.doc -25- 20110704741 opening 42 surface 43 plate 44 tube 45 tube 46 droplet 47 oil layer 48 inner wall 49 wall portion 50 outer wall 52 leading interface 53 area pattern 54 boundary line 60 dispenser 61 pattern 62, 63 plate 64 pattern 70 first substrate 71 electrode / layer 72 Signal line 73 thin hydrophobic layer 74 hydrophilic layer / second hydrophilic region 75 first hydrophobic region 76 oil layer 130008.doc -25- 201107047

77 水 78 第二基板 79 電極 80 信號線 82 托盤 84 平台 85 施配器 86 開口 87 第一容器 88 第一控制單元 89 連接 90 第二容器 91 第二控制單元 92 連接 93 控制器 100 施配器 101 管 103 層 105 施配器 106 管 130008.doc -26-77 Water 78 Second substrate 79 Electrode 80 Signal line 82 Pallet 84 Platform 85 Dispenser 86 Opening 87 First container 88 First control unit 89 Connection 90 Second container 91 Second control unit 92 Connection 93 Controller 100 Dispenser 101 Tube 103 layer 105 dispenser 106 tube 130008.doc -26-

Claims (1)

201107047 十、申請專利範圍: 1. 一種藉由具有一開口之一第一施配器在一表面之一第一 區域上提供一第一流體之一層之方法,該方法包含以下 步驟 在該表面上提供一第二流體之一層’該第二流體係與 該第一流體不相溶; 在該第一區域上方在該第二流體内配置該第一施配器 之開口;以及 透過該開口來施配該第一流體用於沈殺在該第一區域 上; 藉由一第三流體來輔助該施配,該第三流體係與該第 一流體不相溶。 2 ·如请求項1之方法,其使用一第二施配器,其具有一開 口配置於該第二流體内用於施加該第三流體。 3 ·如請求項2之方法’其包含步驟:透過該第二施配器之 該開口來施加該第三流體以在該開口與該表面之間形成 該第二流體之一小滴。 4. 如請求項2或3之方法,其中該第一施配器先於該第二施 配器知描該表面。 5. 如請求項1之方法,其中該第三流體係透過該第一施配 器之該開口來施加。 6. 如請求項5之方法,其包含以下步驟 透過該開口來施配該第三流體以在該開口與該表面之 間形成該第三流體之一小滴;以及 130008.doc 201107047 透過該開口來施配該第一流體,用於沿在該第二流體 與該第三流體之間的一介面移動並沈澱在該第一區域 上0 7. 如凊求項1之方法,其中該第一區域對於該第二流體比 對於該第一流體具有一更低潤濕性。 8. 如請求項丨之方法,其中該第一流體與該第二流體係液 體而該第三流體係一氣體。 Ο201107047 X. Patent Application Range: 1. A method for providing a layer of a first fluid on a first region of a surface by a first dispenser having an opening, the method comprising the steps of providing on the surface a layer of a second fluid that is incompatible with the first fluid; disposing an opening of the first dispenser in the second fluid over the first region; and dispensing the opening through the opening A first fluid is used to kill on the first region; the dispensing is assisted by a third fluid that is incompatible with the first fluid. 2. The method of claim 1, wherein a second dispenser is provided having an opening configured in the second fluid for applying the third fluid. 3. The method of claim 2, comprising the step of applying the third fluid through the opening of the second dispenser to form a droplet of the second fluid between the opening and the surface. 4. The method of claim 2 or 3, wherein the first dispenser knows the surface prior to the second dispenser. 5. The method of claim 1, wherein the third flow system is applied through the opening of the first dispenser. 6. The method of claim 5, comprising the step of: dispensing the third fluid through the opening to form a droplet of the third fluid between the opening and the surface; and 130008.doc 201107047 through the opening Dispensing the first fluid for movement along an interface between the second fluid and the third fluid and depositing on the first region. 7. 7. The method of claim 1, wherein the first The zone has a lower wettability for the second fluid than for the first fluid. 8. The method of claim 1, wherein the first fluid and the second fluid system are in a liquid and the third stream is a gas. Ο 9. 如喷求項8之方法,其中該第二流體係極性或導電性 的。 10.如請求項8之方法,其中該氣體係空氣。 11·如响求項丨之方法,其中該第一區域具有一相鄰第二區 域,邊第二區域對於該第二流體比對於該第一流體具有 一更高潤濕性。 士叫求項11之方法,其中該表面包含由第二區域分離並 形成—圖案的複數個第一區域。 月求項12之方法,其中該圖案或該圖案之一子圖案具 有一裝飾功能或用作一標牌。 14.如咕求項丨、2或5之方法,其中該施配器之該開 最大尺寸係小於該第一區域之一最小尺寸。 15_如明求項丨、2或5之方法,其中該施配器之該開 最大尺寸係大於該第一區域之一最小尺寸。 16.如明求項丨、2或5之方法,其中該施配器之該開 一伸長形狀。 口之一 口之一 口具有 17·如請求項16之方法 其中該開口與該表面在一實質上垂 130008.doc 201107047 直於4伸長形狀之—長轴之方向上相對於彼此移動。 18.如請求項17之方法,其中該表面包含由第二區域分離並 形成—圖案的複數個第-區域,且該伸長形狀之長軸具 有至少與平行於該長轴之圖案之—尺寸相同的長度。 19·如請求項16之方法,其中在一第一區域與一第二區域之 間的#線與在越過該界線的該第二流體與第—流體之 間的—前導介面之-局部方向形成-不同於零之角度。 ❹9. The method of claim 8, wherein the second flow system is polar or electrically conductive. 10. The method of claim 8, wherein the gas system is air. 11. The method of claim </ RTI> wherein the first region has an adjacent second region and the second region has a higher wettability for the second fluid than for the first fluid. The method of claim 11, wherein the surface comprises a plurality of first regions separated by a second region and formed into a pattern. The method of claim 12, wherein the pattern or a sub-pattern of the pattern has a decorative function or is used as a sign. 14. The method of claim 2, wherein the maximum size of the dispenser is less than a minimum dimension of one of the first regions. 15) The method of claim 2, wherein the maximum size of the dispenser is greater than a minimum dimension of one of the first regions. 16. The method of claim 2, wherein the applicator has an elongated shape. One of the ports has a port as claimed in claim 16 wherein the opening and the surface are moved relative to each other in a direction substantially perpendicular to the long axis of the elongated shape 130008.doc 201107047. 18. The method of claim 17, wherein the surface comprises a plurality of first regions separated by a second region and formed into a pattern, and the major axis of the elongated shape has a size that is at least the same as a pattern parallel to the major axis length. The method of claim 16, wherein the # line between a first region and a second region forms a local direction with a leading interface between the second fluid and the first fluid that crosses the boundary - Different from the angle of zero. ❹ 20.如印求項!之方法,其包括步驟:在該表面上一或多次 掃描該第一施配器。 21. 如請求項丨之方法,其中該表面係一第一基板之部分且 該方法包括步驟:提供一第二基板,其在該第一基板與 該第二基板之間定義包含該第一流體與該第二流體的一 空間。 22.如請求項21之方法,其中該第—基板與該第二基板形成 一電濕潤元件。 23· —種設備’其包括—第一施配器,該第一施配器有一開 口用於使用如請求項1、2、3、5至1;3或17至22中任一項 之方法在一表面之一第一區域上提供一第一流體之一 層。 24. 如請求項23之設備,其包括一第二施配器,其具有一開 口用於施加第三流體。 25. 如清求項23之β史備,該第一施配器設備有用於該第一流 體的一第一輸入與用於該第三流體的—第二輸入。 26. 如請求項23之設備,其中該施配器之該開口係伸長的。 130008.doc 201107047 27. 如請求項23之設備,其包括一移動平台 器與該表面相對於彼此而移動。 28. 如請求項23之設備,其包括一控制器, 流體與該第三流體。 29. 如請求項23之設備,其包括一控制器, 器在該表面上方的一高度。 ,用於使該施配 用於控制該第一 用於控制該施配20. If printed! The method includes the step of scanning the first dispenser one or more times on the surface. 21. The method of claim 1, wherein the surface is part of a first substrate and the method comprises the steps of: providing a second substrate defining the first fluid between the first substrate and the second substrate a space with the second fluid. 22. The method of claim 21, wherein the first substrate and the second substrate form an electrowetting element. A device comprising: a first dispenser having an opening for using a method as claimed in any one of claims 1, 2, 3, 5 to 1, 3 or 17 to 22 A layer of a first fluid is provided on a first region of the surface. 24. The device of claim 23, comprising a second dispenser having an opening for applying a third fluid. 25. The first dispenser device has a first input for the first fluid and a second input for the third fluid, as disclosed in claim 23. 26. The device of claim 23, wherein the opening of the dispenser is elongated. 130008.doc 201107047 27. The device of claim 23, comprising a mobile platform and the surface moving relative to each other. 28. The device of claim 23, comprising a controller, a fluid and the third fluid. 29. The device of claim 23, comprising a controller at a height above the surface. For making the application for controlling the first for controlling the dispensing 130008.doc130008.doc
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