CN101669060B - Dispensing method and device for dispensing - Google Patents
Dispensing method and device for dispensing Download PDFInfo
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- CN101669060B CN101669060B CN200880011932.9A CN200880011932A CN101669060B CN 101669060 B CN101669060 B CN 101669060B CN 200880011932 A CN200880011932 A CN 200880011932A CN 101669060 B CN101669060 B CN 101669060B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/0289—Apparatus for withdrawing or distributing predetermined quantities of fluid
- B01L3/0293—Apparatus for withdrawing or distributing predetermined quantities of fluid for liquids
Abstract
Dispensing method and device for dispensing A method of providing a laye r of a first fluid on an area (2) of a surface by means of a dispenser (3) having an opening (8). The method comprises the step of providing a layer of a second fluid (7) on the surface, the second fluid being immiscible with the first fluid. It also includes the step of arranging the opening of the dispenser in the second fluid above the area and the step of dispensing the first fluid (6) through the opening assisted by a third fluid (9 ) for settling on the first area, the third fluid being immiscible with the first fluid.
Description
Technical field
The present invention relates to a kind of method that is used on the first area on surface, providing the first fluid layer through divider (dispenser).The invention still further relates to a kind of equipment that is used to carry out this method.
Background technology
International Application No. WO 2005/098797 discloses a kind of method that is used on the surface of substrate (substrate), providing oil reservoir, is particularly suited for making electric moistening display.This surface is covered by water layer at the beginning.Divider has and is arranged in water layer and the opening on the surface.Oil flows in the divider and between opening and surface, forms oil droplet.The surface comprises first hydrophobic region that is centered on by second hydrophilic region.When divider moved from the teeth outwards, oil droplet slowly moved on first and second zones, and by the water on the oil reservoir replacement first area, and on second area, stay water.
This shortcoming of the method for oil reservoir that provides is to be difficult to control the thickness of oil reservoir.
Summary of the invention.
The objective of the invention is, provide permission to control the method for core intersection more simply.
First divider that has opening through utilization provides the method for first fluid layer to realize above-mentioned purpose on the first area on surface, and the method comprising the steps of:
-second fluid layer is provided from the teeth outwards, second fluid and first fluid are immiscible;
In-second fluid of aperture arrangement on the first area with first divider; And
-distribute first fluid through opening, precipitate (settle) on the first area to help first fluid;
-distributing through three-fluid is auxiliary, three-fluid and first fluid are immiscible.
The feasible degree of freedom that has increased the deposition of the first fluid on the control surface of the increase of three-fluid.Especially, three-fluid can be used to remove and in the process that second fluid layer is provided, sinks into lip-deep air pocket (pocket) (for example air pocket).The removal of air pocket has improved first fluid deposition from the teeth outwards.Immiscible property has guaranteed only to deposit first fluid, and does not comprise auxiliary three-fluid, and guarantees to mix with first fluid the effect that can not influence three-fluid.If second and three-fluid also immiscible, the stability of this method increases so.
In first embodiment of this method, apply three-fluid with second divider with the opening that is arranged in second fluid.Can be independent of the supply of first fluid layer and carry out the removal of sunken air pocket.For example, second divider is one or many ground scanning (scan) from the teeth outwards, is the one or many scanning of first divider afterwards.When second and three-fluid when immiscible, with avoiding second and the mixing of three-fluid.
Can apply three-fluid through the opening of second divider, between opening and surface, to form the spheroid (globule) of three-fluid.Spheroid is seemingly effective when lip-deep air pocket (for example air pocket) is sunk in removal.
Second divider with the opening that is arranged in second fluid can be independent of first divider and first fluid and apply, and can be used to remove from the surface air pocket (for example air pocket) that is fallen into.
Though second divider can be prior to first divider and scanning of a surface,, advantageously, first divider is prior to second divider and scanning of a surface.When first fluid be deposited upon the surface last time, do not compare when also depositing with first fluid, sunken air pocket more possibly removed by the spheroid of three-fluid.In addition, this makes that the thickness of sedimentary deposit of first fluid is more even.
In second embodiment of this method, the opening through first divider applies three-fluid.In this case, the amount and the position thereof of scalable three-fluid are with amount and the depositional mode that influences first fluid.Allow to improve control like this, especially to the control of thickness evenness to the thickness of the sedimentary deposit of first fluid.In the special shape of second embodiment, this method comprises step:
-distribute three-fluid through the opening of divider, between opening and surface, to form the spheroid of three-fluid; And
-distribute first fluid through opening, so that it is along the interface movement between second fluid and the three-fluid and be deposited on the first area.
The interface that forms with the three-fluid spheroid between the opening of divider and surface provides first fluid to move to the path on surface from the opening of divider.Can control the amount that is deposited on the first fluid on the first area by the size of spheroid.Bigger spheroid provides thicker first fluid layer on the first area.Can accurately control, thereby for many application, it no longer is necessary with (for example) scraper the ground floor that deposits being carried out follow-up filling leveling filling process.
When the first area relative first fluid of relative second fluid ratio has lower wettable, improved the deposition of first fluid.Wettable difference is convenient to replace second fluid with first fluid from the teeth outwards.
First, second can be a liquid with three-fluid.In the particular embodiment of this method, first fluid is first liquid, and second fluid is second liquid, and three-fluid is a gas.Interface between the gas and second liquid forms first liquid moves to the surface from divider high-quality path.
When second fluid be polarity or conduction the time, the surface that is provided with first and second fluids and forms a substrate part is particularly suited in changeable (switchable) optical element, using, for example, electric moistening display.
Gas can be air, and air just in time forms good spheroid.When second fluid layer is applied to the surface, perhaps through distributing second fluid from the teeth outwards, perhaps immerse in second fluid through the article that will have the surface, air pocket all possibly sink on the first area owing to the low moisture adsorbability of second fluid.In the assigning process of first fluid, the air spheroid between divider and the surface will merge with the sunken air pocket of institute, discharge air pocket thus from the first area and make first fluid can get into whole zone.When divider moves from the teeth outwards, spheroid as the clearer of sunken air pocket.
This method can be advantageously used in and apply first fluid from the teeth outwards, and the first area has adjacent second area on this surface, and the relative first fluid of relative second fluid ratio of second area has higher wettable.Because wettable difference, first fluid will preferably adhere to the first area, and not adhere to second area.Similarly, second fluid adheres to second area with maintenance and leaves from the first area.As a result, the first area will be covered by the first fluid layer, except other factor, its thickness depends on the size of spheroid, and second area will keep being covered by second fluid.
When the size of first area hour, the first fluid of deposition can adopt near hemispheric shape.The deposition of this bending also can be contained by term " first fluid layer ".
When the full-size of the opening of first and/or second divider during less than the minimum dimension of first area, can accurately fill each zone, to obtain the expectation thickness of ground floor, thickness possibly be different for different first areas.
When the full-size of the opening of first and/or second divider during greater than the minimum dimension of first area, can fill several adjacent first areas simultaneously, this allows to improve sedimentation velocity.
Opening with elongated shape allows filling first area in once the scanning of first divider, or removes air through once scanning of second divider.Can be through on the zone of grid pattern, progressively or continuously moving divider and fill area or regional pattern.Through from the teeth outwards with elongate dispenser scan fill need be still less motion, and can quicken deposition process.The border of spheroid, the normal (normal) between promptly lip-deep first and second fluids on the interface is not parallel to the spheroid part of the position of direction of motion, possibly cause thickness local inhomogeneous of sedimentary deposit.Elongate dispenser allows the border to remain on the outside of first area, and wherein first fluid is deposited on the first area, thereby avoids sedimentary deposit in uneven thickness on the first area.
When relative to each other preferably moved on the direction perpendicular to the longitudinal axis of elongated shape on the opening of first divider and surface, the single sweep of divider covered a maximum region.
This method is particularly suited for depositing ground floor comprising on the surface of a plurality of first areas, and a plurality of first areas by second area separately and form pattern.When depositing first fluid, realized the uniform thickness of ground floor by divider with elongated open.Preferably, the longitudinal axis of the elongated shape of opening has the measure-alike length that is parallel to longitudinal axis with pattern at least.If first fluid twice or repeatedly scan in be deposited on the pattern, and the part spheroid on the first area through twice, be deposited on so the layer on the first area thickness will with spheroid only on the first area thickness during through one time different.Therefore, when pattern was filled in once the scanning of elongate dispenser, thickness was filled smaller divider more even in several times scan.
In the particular embodiment of this method, the local direction of boundary line between first area and the second area and the front interface between second fluid that passes through on the boundary line and first fluid forms and is not equal to zero angle.When the boundary line between the front interface between first and/or second distributor orifices and the surface and first and second zones formed line and contacts, fluid interface trended towards fixing (pin) on the boundary line, caused sedimentary deposit in uneven thickness of first fluid.When boundary line and interface form non-zero angle, no longer wired contact and only be a contact, this shows any fixedly phenomenon hardly.As a result, the thickness of the sedimentary deposit of first fluid is more even.5 ° or bigger angle cause inhomogeneity remarkable improvement.Can obtain extraordinary homogeneity for 20 ° or bigger angle.
When the opening of divider was rectangle, the local direction of front interface was parallel to the longitudinal axis of opening.Therefore, the rectangle pattern of first area should be arranged as its boundary line with longitudinal axis and become non-zero angle.
Above-mentioned dip sweeping not only helps the three-fluid deposition process, and can improve the homogeneity of deposit thickness in the two fluid deposition methods, in two liquid deposition methods, in second fluid, distributes first fluid, and does not apply three-fluid.This advantage also can be applicable to deposit first fluid and the divider that do not deposit second fluid, or only in second fluid, applies the divider of three-fluid.In the later case, relevant with the direction of the front interface between second fluid and the three-fluid, but not the direction of the front interface between second fluid and the first fluid.
First divider is run-down from the teeth outwards, with deposition first fluid layer.When first divider with twice of surface scan or repeatedly the time, realize the better homogeneity of bed thickness.In first time scanning process, first fluid deposits from the teeth outwards; In ensuing one or many scanning process, replenish first fluid and through removing first fluid and distribute first fluid again from the teeth outwards in the too much place of deposition through the very few place of deposition in scanning for the first time.If use first and second dividers, so, the homogeneity of one or many scanning also the improved thickness of second divider after first divider.
When the surface is the part of first substrate and when second substrate is provided (this second substrate limits the space that comprises the first fluid and second fluid between first substrate and second substrate), the surface that is provided with first and second fluid layers can change into closed system.
Second aspect of the present invention relates to a kind of equipment, and this equipment comprises having opening in order to through first divider of first fluid layer is provided according to the method for the invention on the first area on surface.
In first embodiment of this equipment, provide second divider so that apply three-fluid with opening.
In second embodiment of this equipment; First divider is provided with first inlet that is used for first fluid and second inlet that is used for three-fluid; The size of the amount of permission control first fluid and the spheroid of three-fluid, thus control is deposited on the amount of lip-deep first fluid.
In the particular embodiment of this equipment, the opening of first and/or second divider is elongated.This equipment advantageously comprises and is used to make divider and the surperficial motion stand (movement stage) that relative to each other moves.
When device comprises when being used to control the controller of first fluid and three-fluid, the thickness of the sedimentary deposit of may command first fluid is to increase the accuracy of deposit thickness.The amount of controller may command first fluid and/or three-fluid.The input that is used for controller can be by the measurement mechanism of confirming deposit thickness or by the shape of the spheroid of confirming three-fluid and/or the value that measurement mechanism provided of size.Controller also can use the manual input from device operator.
From the description to the preferred embodiment for the present invention that only provides with example forms with reference to the accompanying drawings, it is obvious that other features and advantages of the present invention will become.
Description of drawings
Fig. 1 shows the equipment that utilizes the air spheroid to distribute oil from the teeth outwards according to of the present invention;
Fig. 2 and Fig. 3 show the divider that is used for having distribution oil on the surface of pattern;
Fig. 4 shows the equipment with elongate dispenser;
Fig. 5 (a), Fig. 5 (b) and Fig. 5 (c) show first, second and the 3rd orientation that the surface is scanned;
Fig. 6 shows the xsect of Electrowetting element;
Fig. 7 shows the controller of equipment; And
Fig. 8 shows the divider and another divider that is used to apply air that is used to distribute oil.
Embodiment
Fig. 1 shows the xsect according to first embodiment of the equipment that is used for distributing from the teeth outwards first fluid of the present invention.Plate 1 has surface 2, will on this surface, deposit the first fluid layer.Divider with syringe needle (syringe needle) 3 forms of central passage 4 moves along direction 5 from the teeth outwards.Through passage 4 supply first fluids 6.Surface 2 is covered by the layer of second fluid 7.Syringe needle has circular open 8, and it is positioned at second fluid and is positioned on the surface 2 when operation.Three-fluid 9 parts are positioned at passage 4, and part is between opening 4 and surface 2.Three-fluid forms spheroid 10 between opening 4 and surface 2.Spheroid 10 can be partly and surperficial 2 adjacency.
Be compared to the higher wettable of second fluid if the surface has for first fluid, will be convenient to deposit from the teeth outwards first fluid so.In illustrated embodiment, plate 1 can be covered by hydrophobic layer, and for example, amorphous fluoropolymer (for example, AF1600).Hydrophobic layer has increased oil and has adhered to the surface trend of boiling water side by side.
Can realize applying of three-fluid as shown in Figure 1 through following subsequent step: use the first fluid filled syringe, air in certain amount is drawn in syringe, syringe is inserted in the layer of second fluid 7, and fluid is released from syringe.The size of spheroid is by the amount of the air in the syringe and the character decision of first and second fluid.Syringe can be by substituting with the liquid reservoir of first liquid filling pump machanism with first liquid that is used to distribute desired amount.
Fig. 2 shows the vertical view that is used for having the divider of distribution first fluid on the surface of pattern.Pattern 20 comprises first area 21, is square in this embodiment, and the wettable that its wettable to first fluid 6 is compared second fluid 7 is big.Can process these squares by the layer of AF1600.The wettable of the wettable comparison first fluid of adjacent 22 pairs second fluids of second area is big.Can process zone 22 by the layer of various materials (comprising photoresist, for example SU8).In the drawings, the full-size of the opening 8 of syringe needle is less than foursquare minimum dimension.The size of syringe needle allows the only selected first area of Filling pattern.When deposition first fluid on the first area, the scope of first fluid layer is by the second area restriction of pushing first fluid open.Can form second area through on the successive layers that forms the first area, arranging separate layer (separate layer) with second area form.When first area when being hydrophobic, separate layer should be hydrophilic.Can form separate layer through (for example) printing process or evaporation.Also can form second area by the wall with certain altitude, these walls mechanically are limited to the first area with first fluid.
Fig. 3 also shows the vertical view that is used for having the divider of distribution first fluid on the surface of pattern.Pattern 30 comprises first area 31 and second area 32.Syringe needle 33 has opening 34, and this opening has the full-size (that is diameter) of the minimum dimension (that is the length on one side of first area) greater than the first area.When moving opening on the pattern from the teeth outwards, a plurality of first areas are covered by first fluid simultaneously, thereby have improved the sedimentation velocity of equipment.Since the different wettables in first and second zones, first fluid preferably with the first area adjacency, and pushed open by second area.
First fluid has some advantages through the deposition of second fluid layer.It has reduced overflowing of first fluid.It has reduced the pollution of environment to the surface; Pollutant trends towards can not getting into second fluid through barrier of environment.The existence of second fluid makes and is easier to the location deposition.Second fluid makes first fluid less be exposed to airborne oxygen, and this has reduced the oxidation of first fluid.Do not deposit first fluid if there is not second fluid layer, first fluid will be fixed on impurity on the second area so.Before the first fluid deposition, when second fluid contacted with second area, first fluid unlikely was fixed on the impurity, because it must push second fluid open from impurity zonule on every side.
Second fluid layer is being applied in the lip-deep process, and air possibly be absorbed on the surface, especially is trapped on the first area at boundary vicinity place of first area and second area.When divider when inswept and spheroid is by fills with air on the first area, the air that is absorbed in will merge with spheroid, and its position on the first area will be occupied by first fluid.Spheroid is as the air cleaner on surface.
After first fluid deposits from the teeth outwards, can for example Electrowetting device (as, display device, optical element, adjustable diaphragm or adjustable lens) in use the plate have first and second fluids.After the first fluid deposition, also can remove second fluid, and in application, use the plate that only has first fluid.
Fig. 4 shows the equipment with elongate dispenser, and it is used for depositing the first fluid oil reservoir through being arranged on the lip-deep second fluid water layer and being assisted by the three-fluid air.Accompanying drawing shows a section that passes divider and plate.Can seal divider at the minor face place by two vertical walls.Divider 40 has the U-shaped shape, and its opening 41 is towards the surface 42 of plate 43.Opening is positioned under the surface of second fluid.Interface between second fluid and the environment does not illustrate in the drawings.Divider have be used for oil inject divider pipe 44 forms first the inlet and be used for control air pipe 45 forms second the inlet.Long divider can have two or more first inlets and/or second inlet, and they are regularly spaced along the length of divider, to improve the control of convection cell.Air forms layer elongated spheroid 46 that centers on by oil 47.The width of opening 41 is preferably less than 10mm, for example 2mm.When opening was wider than 10mm, oil trended towards leaving opening and in water, rises.Opening preferably less than 2mm, is 0.1mm apart from lip-deep distance in particular embodiment.Little opening is convenient to fill divider through capillary force with first fluid.
Divider has hydrophobic surface on the inwall 48 and in the wall portion 49 near opening 41.Hydrophobic property is fixed to divider with oil.At least the part is hydrophilic with the outer wall 50 of the divider of water adjacency, to avoid the pollution of oil.Divider can be processed by hydrophobic a little PMMA.This material has the advantage of high contact angle hysteresis, and this has improved oily inplace stability.In the accompanying drawings, though first fluid is fixed on two outward flanges of wall portion, it also can be fixed on two inward flanges of wall portion.Hysteresis refers to the difference of the motion contact angle afterwards that moves forward and backward of fluid boundary.
In deposition process, divider moves along the direction 51 that is basically perpendicular to the longitudinal axis of opening 41, thereby between water on the surface 42 and oil, moves a front interface 52.The surface comprises the pattern in zone 53, and each zone can be the sub-pattern of first area or first area and second area.For example, each sub-pattern can be a display device, and two or more display device is arranged from the teeth outwards along the direction of the longitudinal axis that is parallel to divider.In addition, pattern or sub-pattern can have shape from the meaning to the observer that pass on, for example, and sign.This sub-pattern can make up to be used for Presentation Function with another sub-pattern, and semiotic function is provided jointly.In display device, pattern or sub-pattern can be used as common display element and are changeable, or nonvolatil, promptly not changeable.In another embodiment, this pattern or sub-pattern provide decorative effect, for example are used to strengthen observer's impression.
The length of opening is substantially equal to or greater than the size that is parallel to the opening longitudinal axis of pattern.This length should be big at least like this: promptly, make any erratic deposition that produces at the boundary of spheroid 46 all appear at the pattern outside.The length of opening can be substantially equal to the surface perpendicular to the size on the direction of direction of scanning.Zone between the zone 53 is preferably hydrophilic, is for example covered by SU8, deposits in this zone on surface to avoid oil.
In the embodiment of equipment shown in Figure 4, move the boundary line 54 that the front interface 52 of oil is parallel between first area and the second area.Owing to do not hope oil 47 and second area adjacency, the shape of the oil of divider below is upset along osculatory from hydrophobic region to hydrophilic region.In the process that divider moves from the teeth outwards, oil fixedly causes stick-slip on the boundary line, and this possibly cause streaky deposition oil reservoir.
Fig. 5 (a) shows first orientation of divider 60 with respect to the surface, and this surface has the pattern 61 that is arranged in the zone of first and second on the plate 62.By arrow 63 beacon scanning directions.First orientation is same with oriented phase shown in Figure 4.Fig. 5 (b) shows second orientation, wherein, plate 62 with pattern 61 with rotate with respect to the orientation of Fig. 5 (a) about 8 the degree angle.Now, 54 one-tenth 8 equal angular of spending of the front interface 52 of divider and boundary line.Because interface and boundary line no longer line contacts but put and contact, so fixed effect (pinningeffect) acutely reduces, the thickness of sedimentary deposit is more even than the thickness in the situation of Fig. 5 (a).Angle for greater than 5 degree can be observed inhomogeneity improvement, and for the angle greater than 22.5 degree, can further not improve homogeneity significantly.Fig. 5 (c) shows alternate configuration, and wherein, an edge of plate 63 is parallel to divider 60, and pattern 64 has the boundary line that is not equal to zero degree with the angle of the front interface of divider.
The front interface of straight elongated divider is straight, and has the identical direction of direction with the longitudinal axis of distributor orifices.When the opening of divider is being parallel in the plane on surface when crooked, front interface is also with bending.For fear of above-mentioned stick-slip, the local direction of front interface should form non-zero angle with the direction of boundary line.
Though the fill process that is described to use three kinds of fluids is filled in the inclination shown in Fig. 5 (b) and Fig. 5 (c); But for the fill method that distributes first fluid on the surface in second fluid; It also is favourable tilting to fill, because similar stick-slip can occur in this case.Tilting to be filled in is favourable equally in the single fluid fill method, in the single fluid fill method, and a kind of fluid of deposition on the surface in air or vacuum.
Fig. 6 shows a series of xsects of using the Electrowetting element of making according to deposition process of the present invention.First substrate 70 is provided with electrode 71, and it is deposited on the substrate as thin film conductor.Each electrode is connected to a signal wire 72 so that voltage to be provided.Electrode is covered by the thin hydrophobic layer 73 of amorphous fluoropolymer AF1600.The pattern of the thin hydrophilic layer 74 of SU8 is separated the substrate surface in the hydrophobic first area 75 between the hydrophilic second area 74.The size of first area is 160 square microns, and second area has 10 microns width and 3 to 6 microns height.Use deposition process according to the present invention to handle to be provided with first substrate 70 of layer 71,73 and 74, as first fluid, water is as second fluid with oil, and air is as three-fluid or utilize another combination of fluid.After this method of execution, first area 75 is evenly covered by oil reservoir 76, and the thickness of oil reservoir is between 3 to 6 microns, for example 5 microns.Second area 74 covers by water 77 with oil reservoir.Can comprise salt in the water, to increase its electric conductivity and to amplify the temperature window of this method.Second fluid that in this procedure, uses (being water in this example) preferably with the product that comprises substrate in the fluid that uses identical, this has been avoided after carrying out this method with one other fluid, changing second fluid.Second substrate 78 forms enclosure space between first and second substrates.Protect this space protected from environmental influences through the seal that is attached to two substrates, seal is not shown in the drawings.
The pattern of layer 74 defines the element on the substrate, and oil reservoir 76 is limited on it.Each element all has electrode 71.Another electrode 79 that is connected to signal wire 80 contacts with water 77, is formed for the public electrode of a plurality of elements.When applying voltage between the electrode 71 at public electrode 79 and element, the oil reservoir 76 in this element moves to the sidepiece of element or breaks, and first surface will be covered by water 77 at least partly.This so-called electrowetting effect has more fully been described in International Patent Application WO 03/071346.When oil and/or glassware for drinking water had the special optical characteristic of absorption, reflection and/or transmitted light, this element can be used as light valve in (for example) display.
Electrowetting element can use in display device, and wherein, a plurality of Electrowetting elements form a display device.Display driving system in this equipment provides voltage, so that these elements are arranged in the state of expectation.
Fig. 7 shows according to the equipment of sedimentary deposit from the teeth outwards that is used for of the present invention.Pallet 82 can be by second fluid filled.Pallet comprises stand 84, and substrate arranged is on this stand.The divider 85 that has opening 86 at downside is installed on the translation stage (translation stage) (not illustrating in the drawings), and translation stage makes divider on stand 84, to scan.Alternately, divider is fixed, and will be surface mounted on the translation stage.In operation, distributor orifices is lower than the surface level of second fluid.First container 87 that is used for first fluid is connected to first control module 88, for example valve or pump, and this first control module control is sent to the amount of the first fluid of divider 85 via web member 89.Second container 90 that is used for three-fluid is connected to second control module 91 similarly, so that via web member 92 three-fluid is sent to divider.When three-fluid is air, can omit second container, and control module 91 can be preferably via filtrator from the surrounding environment extracting air, or discharge any unnecessary air.When the size of spheroid must reduce or when the air from air pocket removal became too much, web member 92 also can be used to from divider, discharge air.
Fig. 8 shows alternative embodiments according to the method for the invention.Divider 100 is filled first fluid 6 through pipe 101 and is had the opening of the layer that is arranged in second fluid 7,42 upper edge directions, 102 scannings of this divider on the surface of plate 43, with first fluid layer 103 deposition from the teeth outwards.Divider 105 fill three-fluid 9 through pipe 106 and have be arranged in second fluid 7 the layer opening, this divider after divider 100 along direction 107 scanning of a surfaces 42.Three-fluid forms spheroid between the opening and surperficial 42 of divider 105.Provide from the teeth outwards after second fluid layer, spheroid will sink into lip-deep air pocket and remove.
Above-mentioned embodiment is interpreted as illustrative example of the present invention.Can imagine other embodiments of the present invention.Be understood that; The described characteristic relevant with any one embodiment can be used separately; Or be used in combination with other described characteristics, also can be used in combination, or be used in combination with any other embodiment with one or more characteristics of any other embodiment.In addition, under the prerequisite that does not deviate from the scope of the present invention that is defined by the following claims, equivalent or the modification do not described above also can adopting.
Claims (34)
1. one kind provides the method for first fluid layer through first divider with opening on the first area on surface, comprises step:
-second fluid layer is provided on said surface, said second fluid and said first fluid are immiscible;
In-said second fluid of aperture arrangement on said first area with said first divider; And
-distribute said first fluid through said opening, so that it is deposited on the said first area;
-three-fluid is passed through above said assigning process, being arranged on the first fluid on the said first area, said three-fluid and said first fluid and said second fluid are immiscible.
2. method according to claim 1, use has second divider that is arranged in the opening in said second fluid and applies said three-fluid.
3. method according to claim 2 comprises step: the opening through said second divider applies said three-fluid, between opening and said surface, to form the spheroid of said three-fluid.
4. according to claim 2 or 3 described methods, wherein, said first divider scans said surface prior to said second divider.
5. method according to claim 1, wherein, the opening through said first divider applies said three-fluid.
6. method according to claim 5 comprises step:
-distribute said three-fluid through said opening, between said opening and said surface, to form the spheroid of said three-fluid; And
-distribute said first fluid through said opening, so that it is along the interface movement between said second fluid and the said three-fluid and be deposited on the said first area.
7. method according to claim 1, wherein, the said first area said relatively first fluid of said relatively second fluid ratio has lower wettable.
8. method according to claim 1, wherein, said first fluid and said second fluid are liquid, and said three-fluid is a gas.
9. method according to claim 8, wherein, said second fluid be polarity or the conduction.
10. method according to claim 8, wherein, said gas is air.
11. method according to claim 1, wherein, said first area has adjacent second area, and the said relatively first fluid of said relatively second fluid ratio of said second area has higher wettable.
12. method according to claim 11, wherein, said surface comprises a plurality of first areas that separated and formed pattern by said second area.
13. method according to claim 12, wherein, the sub-pattern of said pattern or said pattern has decoration functions or with making a check mark.
14. according to claim 1,2 or 5 described methods, wherein, the full-size of the opening of said divider is less than the minimum dimension of said first area.
15. according to claim 1,2 or 5 described methods, wherein, the full-size of the opening of said divider is greater than the minimum dimension of said first area.
16. according to claim 1,2 or 5 described methods, wherein, the opening of said divider has elongated shape.
17. method according to claim 16, wherein, relative to each other move along the direction of the longitudinal axis that is basically perpendicular to elongated shape on said opening and said surface.
18. method according to claim 17, wherein, said surface comprises a plurality of first areas that separated and formed pattern by second area, and the longitudinal axis of elongated shape has the measure-alike length that is parallel to longitudinal axis with said pattern at least.
19. method according to claim 16; Wherein, Said surface comprises the second area adjacent with said first area, the boundary line between said first area and the said second area and form at the local direction of said second fluid of process on the said boundary line and the front interface between the first fluid and to be not equal to zero angle.
20. method according to claim 15, wherein, said first and/or the opening of second divider have elongated shape.
21. method according to claim 20, wherein, relative to each other move along the direction of the longitudinal axis that is basically perpendicular to elongated shape on said opening and said surface.
22. method according to claim 21, wherein, said surface comprises a plurality of first areas that separated and formed pattern by second area, and the longitudinal axis of elongated shape has the measure-alike length that is parallel to longitudinal axis with said pattern at least.
23. method according to claim 20; Wherein, Said surface comprises the second area adjacent with said first area, the boundary line between said first area and the said second area and form at the local direction of said second fluid of process on the said boundary line and the front interface between the first fluid and to be not equal to zero angle.
24. method according to claim 1 comprises said first divider run-down or step repeatedly on said surface.
25. method according to claim 1; Wherein, Said surface is the part of first substrate, and said method comprises the step that second substrate is provided, and said second substrate limits a space that comprises said first fluid and said second fluid between first substrate and second substrate.
26. method according to claim 25, wherein, said first substrate and said second substrate form Electrowetting element.
27. an equipment, said equipment comprise that first divider with opening provides the first fluid layer so that utilize according to each described method in claim 1 to 4 and 7 to 26 on the first area on surface.
28. an equipment, said equipment comprise that first divider with opening provides the first fluid layer so that utilize according to claim 5 or 6 described methods on the first area on surface.
29. equipment according to claim 27 comprises that second divider with opening is so that apply said three-fluid.
30. equipment according to claim 28, said first divider are provided with first inlet that is used for said first fluid and second inlet that is used for said three-fluid.
31. according to claim 27,28,29 or 30 described equipment, wherein, the opening of said divider is elongated.
32., comprise the motion stand that is used to make said divider and said surface relative to each other to move according to claim 27,28,29 or 30 described equipment.
33., comprise the controller that is used to control said first fluid and said three-fluid according to claim 27,28,29 or 30 described equipment.
34., comprise being used to control the controller of said divider at the height of said surface according to claim 27,28,29 or 30 described equipment.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0707201A GB0707201D0 (en) | 2007-04-13 | 2007-04-13 | Dispensing method and device for dispensing |
| GB0707201.0 | 2007-04-13 | ||
| PCT/EP2008/054457 WO2008125644A1 (en) | 2007-04-13 | 2008-04-11 | Dispensing method and device for dispensing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101669060A CN101669060A (en) | 2010-03-10 |
| CN101669060B true CN101669060B (en) | 2012-10-10 |
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| CN200880011932.9A Active CN101669060B (en) | 2007-04-13 | 2008-04-11 | Dispensing method and device for dispensing |
Country Status (5)
| Country | Link |
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| JP (1) | JP2010524039A (en) |
| CN (1) | CN101669060B (en) |
| GB (1) | GB0707201D0 (en) |
| TW (1) | TWI519357B (en) |
| WO (1) | WO2008125644A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0803585D0 (en) * | 2008-02-27 | 2008-04-02 | Liquavista Bv | Fluid dispensing method |
| GB201004244D0 (en) * | 2010-03-15 | 2010-04-28 | Liquavista Bv | Electrowetting display device |
| WO2011135044A1 (en) | 2010-04-29 | 2011-11-03 | Samsung Lcd Netherlands R & D Center B.V. | Improvements in relation to a manufacturing method for an electrowetting device |
| GB201010296D0 (en) | 2010-06-18 | 2010-08-04 | Liquavista Bv | An electrowetting element and fluid |
| GB201104713D0 (en) * | 2011-03-21 | 2011-05-04 | Liquavista Bv | Dispensing method and device for dispensing |
| GB201220155D0 (en) * | 2012-11-08 | 2012-12-26 | Samsung Lcd Nl R & D Ct Bv | Method of manufacture |
| US9625705B2 (en) * | 2014-04-14 | 2017-04-18 | University Of Cincinnati | Dosing and sealing of fluid-based elctro-optical devices and displays |
| US10201832B2 (en) * | 2014-05-30 | 2019-02-12 | The Boeing Company | Methods for dispensing a substance on a surface |
| US9645385B2 (en) * | 2014-06-26 | 2017-05-09 | Amazon Technologies, Inc. | Methods and apparatuses for fabricating electrowetting displays |
| CN106773017B (en) * | 2017-01-22 | 2023-03-24 | 华南师范大学 | Filling method and filling equipment for electrowetting display device with dry-wet separation |
| CN109248722A (en) * | 2018-11-20 | 2019-01-22 | 京东方科技集团股份有限公司 | A kind of preparation method of covering plate structure, micro fluidic device and covering plate structure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4984475A (en) * | 1989-07-24 | 1991-01-15 | Tritech Partners | Ultra low carryover sample liquid analysis apparatus and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2843048B1 (en) * | 2002-08-01 | 2004-09-24 | Commissariat Energie Atomique | DEVICE FOR INJECTING AND MIXING LIQUID MICRO-DROPS. |
| FR2861609B1 (en) * | 2003-10-31 | 2006-02-03 | Commissariat Energie Atomique | METHOD FOR DISTRIBUTING DROPS OF A LIQUID OF INTEREST ON A SURFACE |
| ES2393193T3 (en) * | 2004-04-08 | 2012-12-19 | Samsung Lcd Netherlands R&D Center B.V. | Display device |
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- 2007-04-13 GB GB0707201A patent/GB0707201D0/en not_active Ceased
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2008
- 2008-04-11 WO PCT/EP2008/054457 patent/WO2008125644A1/en active Application Filing
- 2008-04-11 JP JP2010502530A patent/JP2010524039A/en active Pending
- 2008-04-11 CN CN200880011932.9A patent/CN101669060B/en active Active
- 2008-04-11 TW TW097113408A patent/TWI519357B/en active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4984475A (en) * | 1989-07-24 | 1991-01-15 | Tritech Partners | Ultra low carryover sample liquid analysis apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010524039A (en) | 2010-07-15 |
| CN101669060A (en) | 2010-03-10 |
| TW201107047A (en) | 2011-03-01 |
| WO2008125644A1 (en) | 2008-10-23 |
| GB0707201D0 (en) | 2007-05-23 |
| TWI519357B (en) | 2016-02-01 |
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