201103073 六、發明說明： 【發明所屬之技術領域】 本發明係關於在放電容器內面設有螢光體的螢光燈 及該螢光燈之製造方法。 【先前技術】 以螢光燈的構成而言，已知有專利文獻1所記載者 〇 第1 2圖（a )係專利文獻1中所記載之螢光燈9 1的 說明圖。 螢光燈91係藉由：雙層管構造的放電容器911、設 在放電容器911內面的螢光體913、及設在放電容器911 外面的一對電極912所構成。 放電容器911係藉由圓筒狀外管9112、及以與外管 9112同軸的方式配置在外管9112內部的內管9111而以 雙層管構造所構成，將該雙層管構造的兩端以圓環狀端 壁9 1 1 3予以密封。構成放電容器9 1 1的構件爲例如石英 玻璃。 在該放電容器9 1 1的內部係被封入有例如氙氣作爲 發光氣體。 該螢光燈91係在放電容器911的內管9111及外管 9112介在有一對電極912，亦介在有位於外管9112與內 管9 1 1 1之間的放電空間。 螢光燈91係藉由在一對電極912被輸入有高頻.高 -5- 201103073 電壓’而產生準分子放電，並由該準分子放電產生 2 OOnm以下的真空紫外線。螢光體9丨3係藉由照射 空紫外線而被激發，激發光透過且放射在放電容器 〇 以如上所示產生準分子放電的燈而言，已知一 分子燈。以準分子燈而言，係有專利文獻2及3。 第1 2圖（b )係專利文獻2所記載之準分子燈 說明圖。 第12圖（b)的準分子燈92係在：在放電容器 內面未設有螢光體、設在內管9211內面的電極922 狀、及在放電容器921的端壁9213設有流體流通管 留部924等方面，與第1 2圖（a )的螢光燈91相異 第1 2圖（b )的準分子燈92的說明而言，針對作爲 1 2圖（a )之螢光燈9 1的相異點的流體流通管的殘 924加以敘述》 在準分子燈92的製造工程中，爲了將放電容器 內面洗淨而進行：使用氟化銨水溶液等作爲洗淨液 液洗淨處理、及藉由洗淨用水所爲的洗濯處理。 在設於放電容器921兩端的端壁9213設有流體 管，由其中一方流體流通管流入洗淨液，放電容器 中的空氣係由另一方流體流通管排出。流入放電 92 1的洗淨液係由其中一方流體流通管被排出，由 方流體流通管流入空氣。在該藥液洗淨處理後，藉 淨用水進行洗濯處理》 例如 該真 9 11 種準 92的 lt 921 爲板 的殘 。以 與第 留部 f 921 的藥 流通 92 1 容器 另一 由洗 201103073 上述處理後’放電容器921係被施行乾燥處理，且 進行密封工程。在該密封工程中，在其中一方流體流通 管被例如燃燒器燒斷後，將放電容器921內部的空氣排 出，充塡有氙氣等發光氣體，最後使另一方流體流通管 被燒斷。該被燒斷的流體流通管即成爲流體流通管的殘 留部9 2 4。 若爲專利文獻2的情形，由於充塡氙氣作爲發光氣 體’因此在燈亮燈時所得的紫外線爲波長200nm以下的 真空紫外線。 第1 2圖（c )係專利文獻3所記載之準分子燈9 3的 說明圖。 第12圖（c)的準分子燈93係在放電容器921的形 狀爲單層管形狀而非雙層管構造方面、以及其管形狀爲 長方體方面，與第12圖（b)的準分子燈92相異。以第 12圖（c)的準分子燈93的說明而言，針對與第12圖 (b )的準分子燈9 2的相異之處加以敘述。 放電容器係如第1 2圖（c )或專利文獻3之第1圖 所示爲長方體狀’在其兩端設有端壁9213,在該端壁 9213設有尖管924。 該尖管924係進行放電容器921內部之空氣的排氣 、及對放電容器92 1內部塡充氙氣作爲發光氣體。 若爲專利文獻3的情形，由於塡充氙氣作爲發光氣 體’因此在燈亮燈時所得的紫外線爲波長2〇〇nm以下的 真空紫外線。 201103073 [先前技術文獻] [專利文獻] [專利文獻1]日本特開平06-215736號公報 [專利文獻2]日本特開2001-023578公報 [專利文獻3]日本特開2004-111326公報 【發明內容】 (發明所欲解決之課題） 例如在樹脂硬化、除菌、美容、醫療等用途中，已 採用所希望波長的光，如上述專利文獻2及3之準分子 燈92、93所示，藉由放電所得之波長爲固定，並不容易 取得所希望波長。因此，如專利文獻1所示，考慮在放 電容器的內面設置螢光體，以利用使螢光體激發而得的 波長。 專利文獻1所記載之螢光燈9 1係考慮在放電容器 911的內面設置螢光體913，因此由專利文獻2及3所示 之流體流通管或尖管使螢光體充塡在放電容器的內部。 但是，在如上所示之製造方法中，會產生設在放電容器 之端壁的螢光體剝落的問題。若螢光體剝落，該剝落的 螢光體在放電容器的內部係成爲不純物，導致妨礙放電 ，在該部分會引起光量降低。 關於該螢光體的剝落，經本發明人等精心硏究結果 ，可知係因螢光體的厚度與螢光體與放電容器的熱膨脹 係數差而起。關於該原因，敘述如下。 -8 - 201103073 螢光體的熱膨脹係數係比放電容器所構成的構件的 熱膨脹係數爲大。設在放電容器側壁的螢光體係形成爲 極薄，因此即使燈被亮燈而加熱’亦使設在側壁的螢光 體的膨脹量較小，而抑制由側壁剝落。但是’用以塗佈 螢光體的螢光體漿體的黏度大’當在放電容器的內面塗 佈螢光體漿體的工程中，螢光體漿體與在側壁流動的速 度相比，在端壁流動的速度較慢，因此設在放電容器之 端壁的螢光體的厚度與設在側壁的螢光體的厚度相比爲 被凝縮爲較厚。因此’當燈被亮燈而加熱時’凝縮在端 壁的螢光體的膨脹量與如設在側壁的螢光體般未凝縮爲 較薄的狀態相比爲較大’而且比端壁的膨脹量爲大。因 此，設在端壁的螢光體係被推測爲因與設在側壁的螢光 體之間的熱膨脹量差，而且因與端壁之間的熱膨脹量差 而發生剝落者。 亦考慮到預先剝落設在端壁的螢光體，以防止設在 端壁的螢光體發生剝落的情形，但是因放電所產生之例 如200nm以下的紫外線會變成直接照射在端壁，而在構 成端壁的玻璃發生變形以致發生破損。 此外，端壁爲例如石英玻璃般在透過波長200nm以 下之真空紫外線時，由端壁所透過的真空紫外線會被氧 吸收而形成臭氧。臭氧會將樹脂等加以分解，因此必須 訂定螢光燈周邊之裝置類的臭氧對策，裝置較爲複雜。 因此，本發明之目的在提供一種抑制設在端壁之螢 光體發生剝落的螢光燈。 -9 - 201103073 (解決課題之手段） 第1發明之螢光燈係由：在內面設有螢光體的放電 容器；及使放電容器介於其中而相對向的電極所構成的 螢光燈，其特徵爲：前述放電容器係在至少其中一方端 部設有塗佈劑用管殘留部，該端壁係朝向塗佈劑用排出 管殘留部呈大致漏斗狀.，而且在其內面亦設有螢光體。 第2發明之螢光燈係在第1發明中，前述放電容器 係隔著玻璃層設有前述螢光體爲其特徵。 第3發明之螢光燈係在第1或第2發明中，前述塗 佈劑用管殘留部設在兩方的端部爲其特徵。 第4發明之螢光燈之製造方法係由：在內面設有螢 光體的放電容器；及使放電容器介於其中而相對向的電 極所構成的螢光燈之製造方法，其特徵爲具有：放電容 器形成管之至少其中一方端部的端面形成爲相對於放電 容器形成管之長邊方向呈傾斜，其中一方端壁形成板沿 著該呈傾斜的端面而予以接合，其中一方塗佈劑用排出 管以其中一方端壁形成板朝向其中一方塗佈劑用排出管 而成爲漏斗狀的方式，而且以放電容器形成管的中空與 塗佈劑用排出管的中空相連通的方式予以接合’藉此形 成玻璃管的工程；及螢光體漿體被塡充在玻璃管的內部 ，且由玻璃管的其中一方塗佈劑用排出管予以排出的工 程。 -10- 201103073 (發明之效果） 第1發明之螢光燈係藉由上述特徵，可抑制設在其 中一方端部之端壁的螢光體的厚度比設在側壁的螢光體 的厚度極端地厚，因此可減小設在其中一方端部之端壁 的螢光體與設在側壁的螢光體的熱膨脹差，此外可減小 設在其中一方端壁的螢光體與構成端壁的構件的熱膨脹 量差，藉此可抑制設在其中一方端壁的螢光體剝落。此 外，藉由在端壁的內面設置螢光體，抑制將藉由準分子 放電所發生的紫外線直接照射在端壁，可延長放電容器 的壽命。 第2發明之螢光燈係藉由上述特徵，在放電容器與 螢光體之間形成玻璃層，構成該玻璃層的玻璃的軟化點 比構成放電容器的構件的軟化點爲低，因此在螢光體燒 成時，玻璃層被軟化，可藉由玻璃層而使放電容器與螢 光體的結合更爲強固，可抑制螢光體剝落。此外，由於 玻璃層的軟化點比構成放電容器的構件的軟化點爲低， 因此螢光體並未被加熱至1000 °C以上的溫度，因此不會 劣化即可進行燒成。 若爲長形的放電容器，當在放電容器的內面塗佈螢 光體漿體而進行排出時，僅以其中一方塗佈劑用排出管 並無法充分排出，因此亦使用另一方塗佈劑用排出管來 進行排出。因此，第3發明之螢光燈係藉由上述特徵， 另一方端壁的形狀形成爲漏斗狀，可抑制設在另一方端 壁的螢光體的厚度比設在側壁的螢光體的厚度極端地厚 -11 - 201103073 ，因此可減小設在另一方端壁的螢光體與設在側壁的螢 光體的熱膨脹量差，此外可減小設在另一方端壁的螢光 體與構成端壁的構件的熱膨脹量差，藉此可抑制設在另 一方端壁的螢光體剝落。此外，藉由在端壁的內面設置 螢光體，抑制將藉由準分子放電所發生的紫外線直接照 射在端壁，可延長放電容器的壽命。 第4發明之螢光燈之製造方法係藉由上述特徵，螢 光體漿體在漏斗狀的端壁的內面順利地流動，且由其中 一方塗佈劑用排出管順利地排出，因此可抑制設在漏斗 狀端壁的螢光體的厚度比設在側壁的螢光體的厚度極端 地厚而予以凝縮，因此可減小設在另一方端壁的螢光體 與設在端壁的螢光體的熱膨脹量差，此外可減小設在另 一方端壁的螢光體與構成端壁的構件的熱膨脹量差，藉 此可抑制設在另一方端壁的螢光體剝落。此外，藉由在 端壁的內面設置螢光體，抑制將藉由準分子放電所發生 的紫外線直接照射在端壁，可延長放電容器的壽命。 【實施方式】 第1圖及第2圖係本發明之第1實施例的說明圖。 第1圖係沿著第1實施例之螢光燈1之長邊方向的 剖面圖。 第2圖（a)係第1圖之螢光燈1之其中一方端部的 斜視圖，第2圖（b )係相對第2圖（a )之螢光燈之長 邊方向呈正交的剖面圖（第2圖（a )的A-A剖面圖） -12- 201103073 第1實施例之螢光燈1係藉由：長方體狀 器2、設在放電容器2內面的玻璃層4、設在玻 面的螢光體5、及在放電容器2的外面彼此隔 一對電極3 1、3 2所構成。 放電容器2係藉由：長方體狀的側壁23、 壁23之長邊方向中之兩端的漏斗狀端壁241 設在端壁241、242的塗佈劑用管殘留部251、 成。以構成該放電容器2的構件而言，列舉有 玻璃，採用後述之透過來自螢光體5的發光的| 如第2圖所示，側壁23係構成4面（在| )中爲紙面眼前側之面、該面之側面的2面、 面內側之未圖示之面）的長方體狀，其中紙面 面（設有其中一方電極31之面）與位於紙面內 示的面的端部，以其寬幅朝向塗佈劑用管殘留 25 2依序變窄的方式設有直線狀的傾斜。 端壁241、242係沿著該側壁23的傾斜， 向塗佈劑用管殘留部2 5 1、2 5 2逐漸縮徑的方式 斗狀。在第1圖所示剖面中，端壁241、242係 中央的塗佈劑用管殘留部251、2 5 2，構成爲由 逐漸縮徑的漏斗狀。該端壁241、242在第1圖 ，對相對放電容器2之長邊方向的垂直線，其 R以例如10°〜45°所構成。 在漏斗狀的端壁24丨、242的中央，以朝外 的放電容 璃層4內 離而設的 設在該側 、242 、及 2 5 2所構 例如石英 _件。 I 2 圖（a 及位於紙 眼前側之 側之未圖 部 2 5 1 ' 並且以朝 構成爲漏 朝向位於 紙面左右 的剖面中 傾斜角度 方突出的 -13- 201103073 方式設有塗佈劑用管殘留部25 1、252。在塗佈劑用管殘 留部251、252的內方有中空，在漏斗狀的端壁241、 242的中央設有該中空與側壁23內方的中空相連通的孔 部。 放電容器2的內部係形成有密閉的放電空間2 6，在 該放電空間26係被封入有例如氙氣作爲發光氣體。 在側壁2 3的外面，如第2圖所示，分別設有網狀電 極31、32。藉此，一對電極31、（另一方電極在第2圖 (a )中並未圖示，在第2圖（b )則予以圖示）係隔著 放電容器2與放電空間26而相對向配置。 在放電容器2的內面設有由例如硼矽酸玻璃（Si-B-〇系玻璃、軟化點：約80(TC )、鋁矽酸玻璃（Si-Al-0 系玻璃、軟化點：900°C )所構成的玻璃層4。該玻璃層 4係使用至少具有比構成放電容器2之構件的軟化點（ 石英玻璃的軟化點：1 600°C )爲低之軟化點者。 該玻璃層4係爲了使螢光體5與放電容器2的結合 較爲強固而設。因此，玻璃層係設在至少設有螢光體5 的範圍內。設有螢光體5的範圍係爲了效率佳地接收電 極3 1、3 2間來自準分子放電的紫外線而設在側壁2 3的 內面，此外爲了使來自準分子放電的紫外線不會照射在 端壁241、242而設在端壁241、242的內面。因此，玻 璃層4亦設在側壁23的內面與端壁241、242的內面。 螢光體5係隔著玻璃層4而設在放電容器2的內面 -14 - 201103073 以構成螢光體5的構件而言，例如銪賦活硼酸總（ Sr-B-O: Eu’中心波長368nm)螢光體5'鈽賦活鋁酸 錶鋼（La-P-O: Gd、Pr，中心波長311nm)營光體5等 。該等螢光體5係吸收均爲未達波長2 5 〇nm之區域的紫 外光，轉換成分別所具有的中心波長區域的光且進行放 射。 上述第1實施例之螢光燈1係將端壁241、242朝向 塗佈劑用管殘留部25 1、252而構成爲漏斗狀，藉此使得 設在端壁241、242的螢光體5的厚度、與設在側壁23 的厚度不會極端地不同。透過螢光燈I的製造方法來說 明設在端壁24 1、242的螢光體5的厚度不會比設在側壁 23的螢光體5的厚度極端地變厚的理由。 第3〜5圖係顯示第1圖及第2圖所示之第1實施例 之螢光燈1之製造工程的說明圖。 第3圖係顯示玻璃管6之形成工程的說明圖。 弟4圖（i)及（k)係在弟3圖中所得之玻璃管6 的內面形成玻璃層4的'工程的說明圖。第4圖（1 )、（ m)及第5圖（η)係在第4圖中所形成的玻璃層4的內 面形成螢光體5的工程的說明圖。 第5圖（〇)〜（q)係將第4圖中所得之放電容器 2進行密封的工程的說明圖。 首先，針對玻璃管的形成工程加以說明。 備妥由熔融石英玻璃所構成的長方體狀的放電容器 形成管61 (第3圖（a)係放電容器形成管61之端部的 -15- 201103073 局部斜視圖），以將其長邊方向中的端面朝向其端 方逐漸縮徑的方式切斷成傾斜狀（第3圖（b )係展 圖（a)的端部予以切斷的說明圖）。 將由熔融石英玻璃所構成的端壁形成板6 2，以 於放電容器形成管61之端面長度的長度進行切出而 (第3圖（c)係端壁形成板62的斜視圖），且抵 放電容器形成管61的端面（第3圖（d)係使放電 形成管61與端壁形成板62相抵接的側面圖）。該 係藉由使放電容器形成管61固定在玻璃旋盤之其中 卡盤（chuck ) 811，以被固定在玻璃旋盤之另一方 812的治具813將端壁形成板62朝向放電容器形成 的端面按壓來加以實現（第3圖（d))。 該玻璃旋盤中的其中一方卡盤811與另一方 812係具有可以同軸進行同旋轉的機構。 放電容器形成管6 1之傾斜狀的端部與端壁形 62係一面藉由玻璃旋盤反覆旋轉•停止，一面利用 器8 2將所抵接的部分加熱而藉此熔接（第3圖（< 第3圖（d)之抵接部分的局部放大圖。其中，第3 d)中所示治具8 1 3係予以省略）。 在抵接部分熔接後，端壁形成板62係藉由利用 器8 2予以加熱而軟化，沿著傾斜狀的端面彎曲而抵 傾斜狀的端面。該重新抵接的部分與端壁形成板62 面藉由玻璃旋盤反覆旋轉·停止，一面利用燃燒器 以加熱而藉此熔接（第3圖（f))。 面外 ί第3 相當 備妥 接於 容器 抵接 一方 卡盤 管61 卡盤 成板 燃燒 3)係 圖（ 燃燒 接於 係一 82予 -16- 201103073 在該熔接後，放電容器形成管61係一面被旋轉C， 一面利用燃燒器82將所熔接的端壁形成板62的中央部 分加熱（第3圖（g))。放電容器形成管61的內部係 藉由氮氣N而呈加壓狀態，端壁形成板62的中央部利 用燃燒器82而被加熱，藉此使該部分軟化而藉由氮氣N 的加壓而膨脹，最後被吹破而形成孔部621 (第3圖（h ))" 在該孔部621，備妥由熔融石英玻璃所構成之圓筒 狀的其中一方塗佈劑用排出管63 1，使其端部抵接孔部 62 1，以燃燒器82予以加熱而將端壁形成板62與其中一 方塗佈劑用排出管63 1相接合。 至此爲止係針對放電容器形成管61的其中一方端部 加以說明，惟另一方端部亦經由與上述相同的工程而接 合有其中一方塗佈劑用排出管63 2，因此省略其說明。 放電容器形成管61、設在其兩端的漏斗狀端壁形成 板62、及設在該端壁形成板的一對塗佈劑用排出管63 1 、63 2係如上所述呈一體接合。將該一體物稱爲「玻璃 管6」。 接著，針對在玻璃管6的內面形成玻璃層4的工程 、及形成螢光體5的工程加以說明。 1 .製作用以構成玻璃層4的玻璃粉末經分散的漿體 (步驟1 )。 將玻璃層4構成用的塊狀玻璃微細粉碎而施加於球 -17- 201103073 磨機。經粉碎後的玻璃粉末係藉由施加於篩網來將粒徑 作分類，製作平均粒徑爲0.5〜ΙΟμηι (最好爲1〜5μπι) 的玻璃粉末。 將該玻璃粉末與硝化纖維素（nitrocellulose)、乙 酸丁酯液以重量比1 : 4的比例加以混合。將混合液連同 氧化鋁球施加於球磨機充分硏磨而製作玻璃粉末經分散 的漿體（slurry )。以下將使該玻璃粉末分散的漿體稱爲 「玻璃漿體71」。 構成玻璃層4的玻璃係具有比作爲放電容器2之基 材的石英玻璃的軟化點（1 600°C )爲低的軟化點的玻璃 。較佳爲軟化點在螢光體5之燒成溫度（400〜900 °C ) 範圍內的玻璃，更佳爲耐熱衝撃性良好的硬質玻璃。 其中亦以硼矽酸玻璃（Si-Β-Ο系玻璃、軟化點：約 800°C )、鋁矽酸玻璃（Si-Al-Ο系玻璃、軟化點：約 9 0 0 °C )爲佳，如上所示之硬質玻璃可單獨使用，亦可以 適當比例加以混合使用。 2.接著，將玻璃漿體71塗佈在玻璃管6的內表面（ 步驟2 )。 在本實施例中，如第4圖（i )所示，玻璃管6係以 垂直保持其長邊方向，在以玻璃漿體71充滿的容器液面 置入其中一方塗佈劑用排出管631。玻璃管6係由另一 方塗佈劑用排出管6 3 2抽吸玻璃管6的內部空氣，藉此 由其中一方塗佈劑用排出管6 3 1上吸玻璃獎體7 1，在玻 -18 - 201103073 璃管6的內部塡充玻璃漿體71(第1 2圖（k))，之後 ，由其中一方塗佈劑用排出管631排出玻璃漿體71。此 時，由於玻璃漿體71具有黏度，在放電容器形成管61 的內面、另一方端壁形成板62(紙面上方側）的內面、 其中一方端壁形成板6 2 (紙面下方側）的內面、其中一 方塗佈劑用排出管632的內面及其中一方塗佈劑用排出 管63 1的內面係被塗佈有玻璃漿體7 1。在此，端壁形成 板62的形狀係形成爲朝向其中一方塗佈劑用排出管63 1 逐漸縮徑的漏斗狀，可將玻璃粉末朝向其中一方塗佈劑 用排出管63 1順利地流出玻璃漿體7 1，而可抑制發生玻 璃粉末的積存。此時，玻璃漿體71的厚度以形成爲在1 〜3 0 μ m的範圍內爲佳。該所塗佈的玻璃漿體7 1的厚度 係可藉由調整玻璃漿體71的黏度或塗佈次數來改變。 其中，在後工程中所形成的螢光體5，若其發光爲 紫外線時’若玻璃層4的厚度較厚，則會有無法取得透 過來自螢光體之紫外線之充分透過率的情形。因此，玻 璃層4的厚度最好在可保持在後工程所形成的螢光體5 的範圍內儘可能爲小。 -19- 1 .使玻璃漿體7 1乾燥（步驟3 )。 2 由玻璃管6的另一方塗佈劑用排出管632朝向其中 —方塗佈劑用排出管63 1流動乾燥氮氣，藉此使玻璃漿 體71所含有的乙酸丁酯蒸發。在此亦由於端壁形成板 62的形狀係形成爲朝向其中一方塗佈劑用排出管63 1逐 201103073 漸縮徑的漏斗狀，因此可將玻璃粉末朝向其中一方塗佈 劑用排出管6 3 1順利地流出，而可抑制玻璃粉末發生積 存。結果，在玻璃管6的內表面上形成有堆積厚度爲1 〜30 μπι之玻璃粉末的層。 4. 將玻璃管6加熱而將玻璃粉末的層進行燒成（步 驟4 )。 燒成條件爲在大氣中，約500〜1 000°C，以時間而 言，以最高溫度下的保持時間予以表示時，爲0.2〜1小 時。使用上述硼矽酸玻璃、鋁矽酸玻璃時，以在600〜 9 00°C下進行爲佳。藉由該燒成工程而使粒子彼此相結合 並且熔接在玻璃管6，玻璃層4會強力結著在基材。 其中，玻璃層4由於不會升溫至熔融溫度，因此通 常係維持粉末狀的形態，但是亦可形成爲更加提高溫度 而使其熔融的狀態。 5. 將玻璃管6冷卻至常溫（步驟5 )，藉由上吸法 ，將調製完畢的螢光體5的漿體塗佈在發光管內（步驟 6 ) ° 螢光體5的塗佈方法係與之前在2 .中所說明的順序 相同，垂直保持發光管構成用玻璃管，在已充滿螢光體 漿體72的容器液面置入其中一方塗佈劑用排出管63 玻璃管6係由另一方塗佈劑用排出管63 2將玻璃管6的 內部空氣作抽吸，藉此由其中一方塗佈劑用排出管6 3 1 -20- 201103073 上吸螢光體漿體72，在玻璃管6的內部塡充螢光體 72(第4圖（m))，之後，由其中一方塗佈劑用 管631排出螢光體漿體72。此時，由於螢光體漿f 具有黏度，因此在放電容器形成管61的內面、另一 壁形成板62 (紙面上方側）的內面、其中一方端壁 板62 (紙面下方側）的內面、其中一方塗佈劑用排 63 2的內面及其中一方塗佈劑用排出管631的內面 塗佈有螢光體漿體72。在此，端壁形成板62的形 形成爲朝向其中一方塗佈劑用排出管63 1逐漸縮徑 斗狀，可將螢光體粉末朝向其中一方塗佈劑用排 63 1順利地流出，可抑制螢光體粉末發生積存（凝 〇 可適用於本發明之螢光燈1的螢光體係例如銪 硼酸緦（Sr-B-0 : Eu (以下稱爲 SBE )，中心 3 68nm )螢光體、铈賦活鋁酸鎂鑭（La-Mg-Al-Ο : 以下稱之爲LAM)，中心波長338nm (但爲broa( 螢光體、IL、鐯賦活磷酸鑭（La-P-0 : Gd，Pr (以 爲LAP:Pr，Gd’中心波長311 nm)螢光體等。該 光體係吸收均爲未達波長250nm之領域的紫外光， 換成分別所具有的中心波長區域的紫外線而予以放| 6.由玻璃管6的另一方塗佈劑用排出管632, 其中一方塗佈劑用排出管6 3 1流通乾燥氮氣，藉此 光體漿體72所含有的乙酸丁酯蒸發。在此亦使端壁 漿體 排出 I 72 方端 形成 出管 係被 狀係 的漏 出管 縮） 賦活 波長 Ce ( )) 下稱 等螢 且轉 朝向 使螢 -21 - 241 201103073 、242部形成板的形狀形成爲朝向其中一方塗佈劑用排 出管63 1逐漸縮徑的漏斗狀，因此可將螢光體粉末朝向 其中一方塗佈劑用排出管63 1順利地流出（第5圖（η ) )，可抑制螢光體粉末發生積存（凝縮）。 7 ·將螢光體進行燒成（步驟8 )。 將玻璃管6放入爐內進行燒成。燒成條件係在大氣 環境中約爲500〜800°C，以最高溫度下的保持時間而言 ，加熱0.2〜1小時。在該燒成工程中，在螢光體5層與 玻璃層4的交界面發生玻璃軟化而使螢光體5結著在玻 璃層4，結果獲得強固的結合狀態。 結果，獲得在由石英玻璃所構成的玻璃管6的內表 面上，依序層積有由低軟化點玻璃粉末所構成的玻璃層 4、螢光體5層的狀態。 其中，若爲在大氣中的劣化激烈的螢光體5的情形 ，係在升溫至硝化纖維素（nitrocellulose)在大氣中燃 燒的溫度之後，藉由形成爲非氧化氛圍氣或還原氛圍氣 ，而可進行至約800度程度的加熱。 最後針對玻璃管6的密封工程加以說明。 8.將玻璃管6冷卻至常溫（步驟9)，在該玻璃管6 的內部封入稀有氣體而以氣密式密封（步驟10)。 更具體而言，在將附著在一對塗佈劑用排出管63 1 、632內面的螢光體5層及玻璃層4去除之後，以燃燒 -22- 201103073 器82將其中一方塗佈劑用排出管631加熱（第5圖（ο ))，藉由予以密封而形成其中一方塗佈劑用管殘留部 2 5 1 (第5圖（ρ ))。之後，其中一方塗佈劑用排出管 632係以氣密式連接於排氣裝置83，藉由該排氣裝置83 而使玻璃管6內部的氣體被排氣後，以發光氣體而言， 可將例如氙（Xe)、氪（Kr)、氬（Ar)、氖（Ne)單 獨封入，亦可以適當組合加以混合而封入。其中，藉由 該等稀有氣體的放電所得的波長係氙160-19 Onm、氪 124，1 4 0 - 1 6 0 nm ' 氬 1 0 7 - 1 6 5 n m ' 氣 80-90nm° 在封入發光氣體之後，利用燃燒器82將其中一方塗 佈劑用排出管6 3 2加熱密封（t i ρ - 〇 f f )，藉此完成在內 部設有螢光體5及玻璃層4的放電容器2。 之後，在該放電容器2的外面設有一對電極31、32 ，藉此獲得第1及2圖所示之螢光燈1。 如以上述製造方法所述，設在放電容器2之其中一 方端部的其中一方端壁241朝向其中一方塗佈劑用管殘 留部251構成爲漏斗狀，藉此在螢光體5漿體排出時或 乾燥時’可抑制在其中一方端壁2 4 1的內面發生螢光體 粉末的積存（凝縮），因此可抑制設在端壁24 1、242的 螢光體5層的厚度與設在側壁23的厚度極端不同。藉此 ’設在端壁241、242的螢光體5係與設在側壁23的螢 光體5的厚度不會極端不同，因此其熱膨脹量差亦小， 而且設在端壁241、242的螢光體5係與設在側壁23的 螢光體5同樣爲極薄，因此與端壁241、242所構成的構 -23- 201103073 件的熱膨脹量差亦變小，藉此可抑制由端壁24 1、 落。 在燈亮燈時，由封入在放電容器2內部的發 ，發生200nm以下的真空紫外線，藉由該真空紫 激發螢光體5。該激發光爲例如250nm〜3 80nm 線時，若構成放電容器2的構件爲石英玻璃，則 該紫外線而適當地照射至外部。此時，在放電容I 端壁24 1、242設有螢光體5，因此可抑制將在放 2內部所產生的真空紫外線直接照射在端壁24 1 且可抑制放電容器2破損，因此可延長放電容器 命。 此外，若爲200nm以下的真空紫外線，在流 電容器2的外部時，會被外部的氧所吸收而生成 而會產生將裝置所包含的樹脂加以分解的不良情 是第1贾施例之螢光燈1由於在端壁241、242的 有螢光體5，因此可抑制真空紫外線由端壁241、 出。此外，伴隨此，裝置係未訂定臭氧對策亦可 不會招致裝置複雜化。 在第1實施例中，構成放電容器2的構件爲 璃，由於該石英玻璃的軟化點爲160CTC附近，因 欲在放電容器2的內面直接設置螢光體5，亦在 體5加熱至1 600°C附近之高溫領域爲止時使螢光 化，而無法獲得預定的光。另一方面，即使避免 5劣化，而以未達1600t的溫度將螢光體5加熱 242剝 光氣體 外線來 的紫外 可透過 § 2的 電容器 、242 > 2的壽 出至放 臭氧， 形，但 內面設 24 2流 ，因此 石英玻 此即使 將螢光 體5劣 螢光體 ，亦會 -24- 201103073 產生放電容器2的軟化不充分，與螢光體5的結合亦不 充分而在最後使螢光體5剝落的不良情形。因此’在第 1實施例中，螢光體5隔著軟化點低於石英玻璃的玻璃 層4而設在放電容器2的內面，藉此可抑制螢光體5剝 落或劣化。 若將放電容器2形成爲硬質玻璃時，由於其軟化點 低於石英玻璃的軟化點，因此可在放電容器2直接設置 螢光體5。顯示第2實施例作爲未設置玻璃層4而在放 電容器2直接設置螢光體5之例。 第6圖係本發明之第2實施例的說明圖。 第6圖係沿著第2實施例之螢光燈1之長邊方向的 剖面圖。 其中，第6圖係針對與第1圖所示者爲相同者標註 相同的元件符號。 第6圖之第2實施例係在構成放電容器2的構件不 同、與未設置玻璃層4等方面，與第1圖之第1實施例 相異。 以第6圖之第2實施例的說明而言，與第1圖共通 的部分係予以省略’就相異部分加以敘述。 構成放電容器2的構件爲硬質玻璃，其軟化點爲 7 8 0 C。該溫度係與第1實施例中所示玻璃層4的軟化點 相同，因此當在放電容器2內面塗佈螢光體漿體72而進 行燒成時，會在螢光體5層與放電容器2的交界面發生 玻璃軟化’而使螢光體5結著在放電容器2，在放電容 -25- 201103073 器2與螢光體5之間獲得強力結合狀態。 如上所示’若構成放電容器2的構件爲硬質玻璃， 可在放電容器2內面直接設置螢光體5。即使構成爲如 上所示’第2實施例之螢光燈1由於放電容器2的形狀 與第1實施例相同，故可獲得與第1實施例相同的效果 〇 顯示第3實施例作爲第1及第2實施例所示漏斗狀 端壁241、242之形狀以外之例。 第7圖係本發明之第3實施例的說明圖。 第7圖（a )係沿著第3實施例之螢光燈1之長邊方 向的剖面圖。第7圖（b)係第7圖（a)之螢光燈1之 其中一方端部的斜視圖。 其中，在第7圖中係針對與第1圖及第2圖所示者 爲相同者標註相同的元件符號。 第7圖之第3實施例係在端壁24 1、20的漏斗狀形 狀爲圓弧狀方面，與第1及2圖的第1實施例相異。 以第7圖之第3實施例的說明而言，與第1及2圖 共通的部分係予以省略，就相異部分加以敘述。 如第7圖（b)所示，端壁241、242係使紙面眼前 側之面（設有其中一方電極3 1之面）與位於紙面內側之 未圖示的面的端部，以其寬幅朝向塗佈劑用管殘留部 251、252逐漸變窄的方式，設置傾斜成對數函數的圓弧 狀。 端壁241、242係沿著該側壁23的傾斜，並且以朝 -26- 201103073 向塗佈劑用管殘留部251、2 52逐漸縮徑的方式構成爲漏 斗狀。在第7圖（a )所示剖面中，端壁241、2 4 2係朝 向位於中央的塗佈劑用管殘留部2 5 1、2 5 2，以由紙面左 右形成對數函數之圓弧的方式構成爲漏斗狀。 端壁24 1、2U的形狀即使爲第7圖所示之圓弧漏斗 狀，亦在螢光體塗佈工程中，可順利地進行塡充在玻璃 管6內部之螢光體粉末的排出，可抑制在端壁241、242 發生螢光體粉末的積存（凝縮）。 因此，第3實施例之螢光燈1係獲得與第1實施例 之螢光燈1相同的效果。 在第1〜第3實施例中，係將設置塗佈劑用管殘留 部251、252的位置形成在端壁241、242的中央，將除 此之外之例顯示爲第4實施例。 第8圖係本發明之第4實施例的說明圖。 第8圖（a )係沿著第4實施例之螢光燈1之長邊方 向的剖面圖。第8圖（b )係第8圖（a )之螢光燈1的 其中一方端部的斜視圖。 其中，在第8圖中係針對與第1圖及第2圖所示者 爲相同者標註相同的元件符號。 第8圖之第4實施例係在將塗佈劑用管殘留部25 1 、2 52設在端壁241、242之側緣位置方面，與第1及2 圖的第1實施例相異。 以第8圖之第4實施例的說明而言，與第1及2圖 共通的部分係予以省略，就相異部分加以敘述。 -27- 201103073 如第8圖（b)所示，塗佈劑用管殘留部251、252 係設在端壁241、242中之側緣的位置。 如第8圖（b )所示，側壁23係使紙面眼前側之面 (設有一方電極31、32的面）與位於紙面內側之未圖示 的面的端部，以其寬幅朝向塗佈劑用管殘留部251、252 逐漸變窄的方式設有直線狀的傾斜。 端壁24 1、242係沿著該側壁23的傾斜，並且構成 爲朝向塗佈劑用管殘留部251、252呈傾斜的漏斗狀。在 第8圖（a )所示剖面中，端壁241、242係朝向位於紙 面右方的塗佈劑用管殘留部2 5 1、2 5 2，構成爲朝紙面左 方傾斜的漏斗狀。 即使端壁241、242的形狀爲第8圖所示之漏斗狀， 亦在螢光體塗佈工程中可順利地進行塡充在玻璃管6內 部的螢光體粉末的排出，可抑制在端壁241、242發生螢 光體粉末的積存（凝縮）。 因此’第4實施例之螢光燈1係獲得與第1實施例 之螢光燈1相同的效果》 在第1〜第4實施例中，係將設有端壁241、242的 位置設在端壁2 3之端部的端面，將除此之外之例顯示爲 第5實施例。 第9圖係本發明之第5實施例的說明圖。 第9圖係沿著第5實施例之螢光燈】之長邊方向的 剖面圖。 其中’在第9圖中係針對與第1圖所示者爲相同者 -28- 201103073 標註相同的元件符號。 第9圖之第5實施例係在使設置端壁241、242的位 置設在由側壁23端面進入至內側的領域、與具有由端壁 24 1、242的外周緣朝向外方突出的放電容器形成管殘留 部23 1等方面，與第1實施例相異。 以第9圖之第5實施例的說明而言，與第1圖共通 的部分係予以省略，就相異部分加以敘述。 端壁24 1、242係在放電容器2的端部，設在由側壁 23的端面爲內側的位置。藉此，設置由端壁241、242 的外周緣朝向放電容器2之長邊方向突出的放電容器形 成管殘留部231。 如第9圖所示，即使設置端壁241、242的位置爲由 端壁24 1、242的端面在內側的位置，若端壁241、242 的形狀爲朝向塗佈劑用管殘留部251、252而呈漏斗狀， 則在螢光體塗佈工程中可順利地進行塡充在玻璃管6內 部的螢光體粉末的排出，可抑制在端壁241、242發生螢 光體粉末的積存（凝縮）。 因此，第5實施例之螢光燈1係獲得與第1實施例 之螢光燈1相同的效果。 在第1〜5實施例中，係以長方體形狀的單層管來構 成放電容器2的形狀，將除此之外之例顯示爲第6實施 例。 第1 0圖係本發明之第6實施例的說明圖。 第1 〇圖係沿著第6實施例之螢光燈1之長邊方向的 -29- 201103073 剖面圖。 其中’在第10圖中係針對與第8圖所示者爲相同者 標註相同的元件符號。 第10圖之第6實施例係在以圓筒狀的雙層管構成放 電容器2、與將另一方電極32設在放電容器2之內管22 之內面等方面，與第4實施例相異。 以第10圖之第6實施例的說明而言，與第8圖共通 的部分係予以省略，就相異部分加以敘述。 第6贲施例之螢光燈1係藉由：圓筒雙層管的放電 容器2、設在放電容器2內面的玻璃層4、設在玻璃層4 內面的螢光體5、及在放電容器2的外面彼此隔離而設 的一對電極31、32所構成。 放電容器2係藉由：圓筒狀的外管21、與外管21 同軸配置在外管21的內部的內管22、雙層管構造的側 壁23、設在該側壁23之長邊方向中之兩端的漏斗狀端 壁24 1、242、及設在端壁241、242的塗佈劑用管殘留 部25 1、25 2所構成。以構成該放電容器2的構件而言， 列舉有例如石英玻璃，採用透過來自螢光體5之激發光 的構件。 如第1 0圖所示，側壁2 3的端面爲傾斜狀。 端壁24 1、242係沿著該側壁23的傾斜，並且構成 爲朝向塗佈劑用管殘留部25 1、25 2呈傾斜的漏斗狀。在 第1〇圖所示剖面中，端壁241、20係朝向位於紙面右 方的塗佈劑用管殘留部，構成爲由紙面左方呈傾斜的漏 -30- 201103073 斗狀。 在雙層管構造的側壁23係在外管2 1側的外周面設 有網狀的其中〜方電極31，且設有內管22之外周面之 圓筒板狀的另一方電極32。 藉此’一對電極31、32係介在於放電容器2的內管 22及外管21 ’亦介在於位於外管21與內管22之間的放 電空間2 6。 即使放電容器2的形狀爲第10圖所示之雙層管構造 ’若端壁24 1、242的形狀爲朝向塗佈劑用管殘留部2 5 1 、252呈漏斗狀，則在螢光體塗佈工程中可順利地進行 塡充在玻璃管6內部之螢光體粉末的排出，而可抑制在 端壁24 1 ' 242發生螢光體粉末的積存（凝縮）。 因此，第6實施例之螢光燈1係獲得與第4實施例 之螢光燈1相同的效果。 在第1〜6實施例中，係將塗佈劑用管殘留部2 5 i、 2 5 2設在端壁241、242，將除此.之外之例顯示爲第7實 施例。 第11圖係本發明之第7實施例的說明圖。 第1 1圖（a )係顯示第7實施例之螢光燈1之其中 一方端部的斜視圖。第1 1圖（b )係顯示第1 1圖（a ) 之螢光燈1之其中一方端部的剖面圖。 其中，在第11圖中係針對與第8圖所示者爲相同者 標註相同的元件符號。 第1 1圖之第7實施例係在將塗佈劑用管殘留部2 5 ! -31 - 201103073 、2 52設在側壁23方面，與第8圖之第4實施例相異。 以第11圖之第7實施例的說明而言，與第8圖共通 的部分係予以省略，就相異部分加以敘述。 其中一方塗佈劑用管殘留部25 1係被設在側壁23的 端面附近。其中一方塗佈劑用管殘留部25 1係以其形狀 由側壁23從放電容器2之長邊方向以垂直方向延伸，接 著朝向放電容器2的長柄方向彎曲的方式構成爲L字狀 〇 其中一方塗佈劑用管殘留部251係其內面接連於呈 傾斜的端壁24 1的內面，藉此，在螢光體塗佈工程中， 在將塡充在玻璃管6內部的螢光體粉末排出時，可將在 呈傾斜的端壁24 1流動的螢光體粉末順利地流動且排出 至接連於呈傾斜之端壁24 1的內面的塗佈劑用排出管的 內面，可抑制在端壁24 1發生螢光體粉末的積存（凝縮 )° 因此，第6實施例之螢光燈1係獲得與第4實施例 之螢光燈1相同的效果。 其中，將其中一方塗佈劑用管殘留部25 1設在側壁 23的端面附近，即使爲第10圖所示之雙層管構造亦可 適用。 在上述第1〜7實施例中’一對端壁241、242之中 ，至少其中—方端部的端壁24 I朝向塗佈劑用管殘留部 25 1呈漏斗狀，藉此在螢光體塗佈工程中，可順利地排 出塡充在玻璃管6內部的螢光體粉末。 -32- 201103073 但是’當被照射來自本發明之螢光燈1之光 射物爲大型時，會有螢光燈1亦製造例如2m以 的長形者的情形。此時，由於螢光體漿體72具有 因此在排出蛋光體粉末時 '若僅由其中一方塗佈 出管63 1排出，會有無法進行充分排出的情形。 若螢光燈1爲長形時，如第1圖所示，另一方端 亦朝向另一方塗佈劑排出管構成爲漏斗狀，藉此 在另一方端壁242發生螢光體粉末的積存（凝縮 抑制設在另一方端壁242之螢光體5剝落.。 【圖式簡單說明】 第1圖係第1實施例之螢光燈的說明圖。 第2圖係第1實施例之螢光燈的說明圖。 第3圖係第1實施例之螢光燈之製造方法的 〇 第4圖係第1實施例之螢光燈之製造方法的 〇 第5圖係第1實施例之螢光燈之製造方法的 〇 第6圖係第2實施例之螢光燈的說明圖。 第7圖係第3實施-例之螢光燈的說明圖。 第8圖係第4實施例之螢光燈的說明圖。 第9圖係第5實施例之螢光燈的說明圖。 第1 〇圖係第6實施例之螢光燈的說明圖。 的被照 上之類 黏度， 劑用排 因此， 壁 242 可抑制 )，可 說明圖 說明圖 說明圖 -33- 201103073 第1 1圖係第7實施例之螢光燈的說明圖。 第1 2圖係習知技術的說明圖。（a )習知之螢光燈 的說明圖。（b )習知之準分子燈的說明圖。（c )習知 之準分子燈的說明圖。 【主要元件符號說明】 1 :螢光燈 2 :放電容器 2 1 :外管 22 :內管 2 3 :側壁 2 3 1 :放電容器形成管殘留部 2 4 1 :其中一方端壁 2 4 2 :另一方端壁 25 1 :其中一方塗佈劑用管殘留部 2 5 2 :另一方塗佈劑用管殘留部 2 6 :放電空間 3 1 :其中一方電極 32 :另一方電極 4 :玻璃層 5 :螢光體 6 :玻璃管 6 1 :放電容器形成管 62 :端壁形成板 -34- 201103073 6 2 1 :孔部 6 3 1 :其中一方塗佈劑用排出管 63 2 :另一方塗佈劑用排出管 71 :玻璃漿體 72 ·‘螢光體漿體 8 :雙層管構造 81 1 :其中一方卡盤 812 :另一方卡盤 8 1 3 .治具 8 2 :燃燒器 8 3 :排氣裝置 91 :螢光燈 9 2 :準分子燈 93 :準分子燈 9 1 1 :放電容器 9111:內管 9112：外管 9 1 1 3 :圓環狀端壁 9 1 2 :電極 913 :螢光體 9 2 1 :放電容器 9211：內管 9 2 1 3 :端壁 922 :電極 -35- 201103073 924 :殘留部 924 :尖管 C :旋轉 N :氮氣 R :傾斜角度BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent lamp in which a phosphor is provided on the inner surface of a discharge vessel, and a method of manufacturing the same. [Prior Art] In the configuration of the fluorescent lamp, the description of the fluorescent lamp 9 1 described in Patent Document 1 is known. The fluorescent lamp 91 is composed of a discharge vessel 911 having a double tube structure, a phosphor 913 provided on the inner surface of the discharge vessel 911, and a pair of electrodes 912 provided on the outer surface of the discharge vessel 911. The discharge vessel 911 is configured by a double-tube structure by a cylindrical outer tube 9112 and an inner tube 9111 disposed inside the outer tube 9112 so as to be coaxial with the outer tube 9112, and both ends of the double-tube structure are The annular end wall 9 1 1 3 is sealed. The member constituting the discharge vessel 9 1 1 is, for example, quartz glass. Inside the discharge vessel 911, for example, helium gas is sealed as a luminescent gas. The fluorescent lamp 91 has a pair of electrodes 912 interposed between the inner tube 9111 and the outer tube 9112 of the discharge vessel 911, and also has a discharge space between the outer tube 9112 and the inner tube 9 1 1 1 . The fluorescent lamp 91 generates an excimer discharge by inputting a high frequency. -5 - 201103073 voltage ' to the pair of electrodes 912, and generates vacuum ultraviolet rays of 200 nm or less from the excimer discharge. The phosphor 9 丨 3 is excited by irradiating an empty ultraviolet ray, and the excitation light is transmitted through the discharge vessel 〇. A lamp for generating an excimer discharge as described above is known. In the case of an excimer lamp, there are Patent Documents 2 and 3. Fig. 1(2) is an explanatory view of the excimer lamp described in Patent Document 2. The excimer lamp 92 of Fig. 12(b) is characterized in that a phosphor is not provided on the inner surface of the discharge vessel, an electrode 922 is provided on the inner surface of the inner tube 9211, and a fluid is provided on the end wall 9213 of the discharge vessel 921. The flow tube 924 and the like are different from the fluorescent lamp 91 of Fig. 2(a). The description of the excimer lamp 92 of Fig. 2(b) is for the case of Fig. 2 (a) In the manufacturing process of the excimer lamp 92, in order to wash the inner surface of the discharge vessel, an ammonium fluoride aqueous solution or the like is used as the cleaning liquid liquid. Washing treatment and washing treatment by washing water. A fluid tube is provided at the end wall 9213 provided at both ends of the discharge vessel 921, and one of the fluid flow tubes flows into the cleaning liquid, and the air in the discharge tube is discharged from the other fluid flow tube. The cleaning liquid that has flowed into the discharge 92 1 is discharged by one of the fluid flow tubes, and the air flows into the square fluid flow tube. After the liquid is washed, the washing is performed by using the water. For example, the lt 921 of the true 9 11 kinds of 92 is the residue of the plate. The medicine is circulated with the medicine of the stagnation portion f 921. 92 1 The container is further washed 201103073 After the above treatment, the discharge vessel 921 is subjected to a drying process, and a sealing process is performed. In the sealing process, after one of the fluid flow tubes is blown by, for example, a burner, the air inside the discharge vessel 921 is discharged, and a luminescent gas such as helium gas is charged, and finally the other fluid flow tube is blown. The blown fluid flow tube serves as a residual portion 9 24 of the fluid flow tube. In the case of Patent Document 2, since the xenon gas is used as the luminescent gas, the ultraviolet ray obtained when the lamp is turned on is a vacuum ultraviolet ray having a wavelength of 200 nm or less. Fig. 1 (2) is an explanatory view of the excimer lamp 9 3 described in Patent Document 3. The excimer lamp 93 of Fig. 12(c) is an excimer lamp of the Fig. 12(b) in that the shape of the discharge vessel 921 is a single-layer tube shape rather than a double-tube structure, and the tube shape is a rectangular parallelepiped. 92 is different. The description of the excimer lamp 93 of Fig. 12(c) will be described with respect to the excimer lamp 92 of Fig. 12(b). The discharge vessel has a rectangular parallelepiped shape as shown in Fig. 22 (c) or Fig. 1 of the patent document 3, and an end wall 9213 is provided at both ends thereof, and a tip pipe 924 is provided at the end wall 9213. The tip tube 924 is configured to exhaust the air inside the discharge vessel 921 and to charge the inside of the discharge capacitor 92 1 as a luminescent gas. In the case of Patent Document 3, since the xenon gas is used as the luminescent gas, the ultraviolet ray obtained when the lamp is turned on is a vacuum ultraviolet ray having a wavelength of 2 〇〇 nm or less. [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A No. Hei. No. Hei. (Problems to be Solved by the Invention) For example, in applications such as resin curing, sterilization, beauty, medical treatment, etc., light of a desired wavelength has been used, as shown by the excimer lamps 92 and 93 of Patent Documents 2 and 3, The wavelength obtained by the discharge is fixed, and the desired wavelength is not easily obtained. Therefore, as shown in Patent Document 1, it is conceivable to provide a phosphor on the inner surface of the discharge vessel to utilize a wavelength obtained by exciting the phosphor. In the fluorescent lamp 9 1 described in Patent Document 1, since the phosphor 913 is provided on the inner surface of the discharge vessel 911, the phosphor is filled in the discharge by the fluid flow tube or the tip tube shown in Patent Documents 2 and 3. The inside of the container. However, in the manufacturing method as described above, there is a problem that the phosphor provided on the end wall of the discharge vessel is peeled off. When the phosphor is peeled off, the exfoliated phosphor is impure in the inside of the discharge vessel, causing the discharge to be hindered, and the amount of light is lowered in this portion. As a result of careful study by the inventors of the present invention, it has been found that the thickness of the phosphor is different from the difference in thermal expansion coefficient between the phosphor and the discharge vessel. The reason for this is described below. -8 - 201103073 The thermal expansion coefficient of the phosphor is larger than the thermal expansion coefficient of the member made of the discharge vessel. The fluorescent system provided on the side wall of the discharge vessel is formed to be extremely thin, so that even if the lamp is lit and heated, the amount of expansion of the phosphor provided on the side wall is small, and the peeling of the side wall is suppressed. However, 'the viscosity of the phosphor paste used to coat the phosphor is large'. When the phosphor paste is coated on the inner surface of the discharge vessel, the phosphor paste is compared with the velocity at the side wall. The velocity of the flow at the end wall is slow, so that the thickness of the phosphor provided on the end wall of the discharge vessel is condensed to be thicker than the thickness of the phosphor provided on the side wall. Therefore, 'when the lamp is heated to be lit, the amount of expansion of the phosphor condensed on the end wall is larger than that in the state where the phosphor provided on the side wall is not condensed to be thinner than the end wall. The amount of expansion is large. Therefore, the phosphor system provided on the end wall is presumed to be a peeling due to the difference in the amount of thermal expansion between the phosphors provided on the side walls and the difference in the amount of thermal expansion between the end walls. It is also considered that the phosphor provided on the end wall is peeled off in advance to prevent the phosphor provided on the end wall from peeling off, but ultraviolet rays of, for example, 200 nm or less generated by the discharge may become directly irradiated on the end wall, and The glass constituting the end wall is deformed so that breakage occurs. Further, when the end wall is a vacuum ultraviolet ray having a wavelength of 200 nm or less, such as quartz glass, the vacuum ultraviolet ray transmitted through the end wall is absorbed by oxygen to form ozone. Since ozone decomposes the resin and the like, it is necessary to set a countermeasure against ozone in the device around the fluorescent lamp, and the device is complicated. Accordingly, it is an object of the present invention to provide a fluorescent lamp which suppresses peeling of a phosphor provided on an end wall. -9 - 201103073 (Means for Solving the Problem) The fluorescent lamp according to the first aspect of the invention is a fluorescent lamp in which a phosphor is placed on the inner surface and a fluorescent lamp in which the discharge vessel is interposed therebetween In the discharge vessel, at least one of the end portions is provided with a residual portion for the coating agent tube, and the end wall is substantially funnel-shaped toward the residual portion of the discharge tube for the coating agent, and is also substantially inside the funnel. It has a fluorescent body. According to a first aspect of the invention, in the fluorescent lamp of the first aspect of the invention, the discharge device is characterized in that the phosphor is provided with a glass layer. In the first or second aspect of the invention, the fluorescent material lamp according to the first aspect of the invention is characterized in that the tube residual portion for the coating agent is provided at both end portions. A method of manufacturing a fluorescent lamp according to a fourth aspect of the invention is a method of manufacturing a fluorescent lamp comprising: a discharge vessel having a phosphor on an inner surface; and an electrode having a discharge vessel interposed therebetween; wherein The end surface of at least one of the end portions of the discharge vessel forming tube is formed to be inclined with respect to the longitudinal direction of the discharge vessel forming tube, and one of the end wall forming plates is joined along the inclined end surface, one of which is coated In the discharge pipe, the one end wall forming plate is formed in a funnel shape toward one of the coating agent discharge pipes, and the hollow portion of the discharge vessel forming pipe is joined to the hollow portion of the coating agent discharge pipe. 'The process of forming a glass tube; and the process in which the phosphor paste is filled inside the glass tube, and one of the glass tubes is discharged by the discharge tube. -10-201103073 (Effect of the Invention) According to the above feature, the fluorescent lamp of the first aspect of the invention can suppress the thickness of the phosphor provided on the end wall of one of the end portions from being extremely larger than the thickness of the phosphor provided on the side wall. Since the ground thickness is small, the difference in thermal expansion between the phosphor disposed on the end wall of one of the end portions and the phosphor disposed on the side wall can be reduced, and the phosphor disposed on one of the end walls can be reduced and the end wall can be formed. The amount of thermal expansion of the member is poor, whereby the phosphor provided on one of the end walls can be prevented from peeling off. Further, by providing a phosphor on the inner surface of the end wall, it is possible to suppress the direct irradiation of the ultraviolet rays generated by the excimer discharge to the end wall, thereby prolonging the life of the discharge vessel. According to the fluorescent lamp of the second aspect of the invention, the glass layer is formed between the discharge vessel and the phosphor, and the softening point of the glass constituting the glass layer is lower than the softening point of the member constituting the discharge vessel. When the light body is fired, the glass layer is softened, and the combination of the discharge vessel and the phosphor can be made stronger by the glass layer, and the phosphor peeling can be suppressed. Further, since the softening point of the glass layer is lower than the softening point of the member constituting the discharge vessel, the phosphor is not heated to a temperature of 1000 ° C or higher, so that firing can be performed without deterioration. In the case of an elongated discharge vessel, when the phosphor paste is applied to the inner surface of the discharge vessel and discharged, only one of the coating agent discharge pipes cannot be sufficiently discharged. Therefore, the other coating agent is also used. Use a discharge pipe to discharge. Therefore, in the fluorescent lamp according to the third aspect of the invention, the shape of the other end wall is formed in a funnel shape, and the thickness of the phosphor provided on the other end wall can be suppressed from the thickness of the phosphor provided on the side wall. Extremely thicker -11 - 201103073 , so that the difference in thermal expansion between the phosphor disposed on the other end wall and the phosphor disposed on the side wall can be reduced, and the phosphor disposed on the other end wall can be reduced The amount of thermal expansion of the member constituting the end wall is small, whereby the phosphor provided on the other end wall can be prevented from peeling off. Further, by providing a phosphor on the inner surface of the end wall, it is possible to suppress the ultraviolet rays generated by the excimer discharge from directly irradiating the end walls, thereby prolonging the life of the discharge vessel. According to the fourth aspect of the invention, in the method of manufacturing a fluorescent lamp, the phosphor slurry smoothly flows on the inner surface of the funnel-shaped end wall, and one of the coating agent discharge tubes is smoothly discharged. The thickness of the phosphor provided on the funnel-shaped end wall is suppressed to be extremely thicker than the thickness of the phosphor provided on the side wall, so that the phosphor provided on the other end wall and the end wall can be reduced. The amount of thermal expansion of the phosphor is inferior, and the difference in thermal expansion between the phosphor provided on the other end wall and the member constituting the end wall can be reduced, whereby the phosphor provided on the other end wall can be prevented from peeling off. Further, by providing a phosphor on the inner surface of the end wall, it is possible to suppress the direct irradiation of the ultraviolet rays generated by the excimer discharge to the end walls, thereby prolonging the life of the discharge vessel. [Embodiment] Figs. 1 and 2 are explanatory views of a first embodiment of the present invention. Fig. 1 is a cross-sectional view taken along the longitudinal direction of the fluorescent lamp 1 of the first embodiment. Fig. 2(a) is a perspective view showing one end portion of the fluorescent lamp 1 of Fig. 1, and Fig. 2(b) is orthogonal to the longitudinal direction of the fluorescent lamp of Fig. 2(a). Cross-sectional view (AA cross-sectional view of Fig. 2(a)) -12-201103073 The fluorescent lamp 1 of the first embodiment is composed of a rectangular parallelepiped 2, a glass layer 4 provided on the inner surface of the discharge vessel 2, and The phosphor 5 on the glass surface and the outer surface of the discharge vessel 2 are separated by a pair of electrodes 3 1 and 3 2 . The discharge vessel 2 is formed by a rectangular wall-shaped side wall 23 and a funnel-shaped end wall 241 at both ends in the longitudinal direction of the wall 23, which are provided in the coating agent tube remaining portion 251 of the end walls 241 and 242. The member constituting the discharge vessel 2 is exemplified by glass, and the light emitted from the phosphor 5 is transmitted as will be described later. As shown in Fig. 2, the side wall 23 constitutes the front side of the paper in four faces (in |). a rectangular parallelepiped shape of the surface of the surface of the surface, the surface of the surface of the surface (not shown), wherein the paper surface (the surface on which one of the electrodes 31 is provided) and the end surface of the surface shown in the paper surface are The wide width is applied to the coating agent tube residue 25 2 so as to be narrowed in a straight line. The end walls 241 and 242 are bucket-shaped so as to gradually decrease in diameter toward the coating agent tube remaining portions 2 5 1 and 2 5 2 along the inclination of the side wall 23. In the cross section shown in Fig. 1, the end portions 241 and 242 are formed in a funnel shape in which the coating agent remaining portions 251 and 252 are formed in a tapered shape. In the first drawing, the end walls 241 and 242 are perpendicular to the longitudinal direction of the discharge vessel 2, and R is formed, for example, at 10 to 45 degrees. In the center of the funnel-shaped end walls 24, 242, the outer side of the discharge glass layer 4 is provided on the side, 242, and 252, for example, quartz. I 2 (a) and a non-figure portion 2 5 1 ' on the side of the front side of the paper eye, and a coating agent tube is provided in a manner of -13-201103073 which is formed so as to be inclined toward the left and right sides of the paper surface. The remaining portions 25 1 and 252 are hollow inside the coating agent tube remaining portions 251 and 252, and the holes communicating with the hollow inner side of the side wall 23 are provided in the center of the funnel-shaped end walls 241 and 242. The inside of the discharge capacitor 2 is formed with a sealed discharge space 26, in which, for example, helium gas is sealed as a luminescent gas. On the outside of the side wall 23, as shown in Fig. 2, a net is provided. The electrodes 31 and 32. The pair of electrodes 31 and (the other electrode is not shown in Fig. 2(a), and is shown in Fig. 2(b)) is separated from the discharge vessel 2 The discharge space 26 is disposed opposite to each other. On the inner surface of the discharge vessel 2, for example, borosilicate glass (Si-B-lanthanum glass, softening point: about 80 (TC), aluminosilicate glass (Si-Al-) is provided. 0 is glass, softening point: 900 ° C) The glass layer 4 is formed. The glass layer 4 is used to have at least a specific discharge. The softening point of the member of the device 2 (softening point of quartz glass: 1 600 ° C) is a low softening point. The glass layer 4 is provided to strengthen the bonding between the phosphor 5 and the discharge vessel 2. The glass layer is provided in a range in which at least the phosphor 5 is provided. The range of the phosphor 5 is provided in order to efficiently receive the ultraviolet rays from the excimer discharge between the electrodes 3 1 and 3 2 and is provided on the side wall 2 3 In addition, in order to prevent ultraviolet rays from excimer discharge from being irradiated to the inner surfaces of the end walls 241 and 242 without being irradiated to the end walls 241 and 242, the glass layer 4 is also provided on the inner and end walls of the side wall 23. The inner surface of 241, 242. The phosphor 5 is provided on the inner surface of the discharge vessel 2 via the glass layer 4 - 201103073 to constitute the member of the phosphor 5, for example, the endowed boric acid total (Sr-BO : Eu' center wavelength 368nm) phosphor 5' endows live aluminate steel (La-PO: Gd, Pr, center wavelength 311nm) camping body 5, etc. These phosphors 5 are absorbed at less than the wavelength The ultraviolet light in the region of 2 5 nm is converted into light in the central wavelength region which is contained, and is radiated. In the light lamp 1, the end walls 241 and 242 are formed in a funnel shape toward the coating agent tube remaining portions 25 1 and 252, whereby the thickness of the phosphor 5 provided on the end walls 241 and 242 and the side wall are provided on the side wall. The thickness of 23 is not extremely different. The method of manufacturing the fluorescent lamp I will explain that the thickness of the phosphor 5 provided on the end walls 24 1 and 242 is not extremely higher than the thickness of the phosphor 5 provided on the side wall 23 . Reasons for thickening. Fig. 3 to Fig. 5 are explanatory views showing the manufacturing process of the fluorescent lamp 1 of the first embodiment shown in Figs. 1 and 2 . Fig. 3 is an explanatory view showing the formation process of the glass tube 6. Fig. 4 (i) and (k) are explanatory views of the construction of the glass layer 4 on the inner surface of the glass tube 6 obtained in the drawing of Fig. 3. Fig. 4 (1), (m) and Fig. 5 (n) are explanatory views of the process of forming the phosphor 5 on the inner surface of the glass layer 4 formed in Fig. 4. Fig. 5 (〇) to (q) are explanatory views of a process for sealing the discharge vessel 2 obtained in Fig. 4. First, the formation process of the glass tube will be described. A rectangular parallelepiped discharge vessel forming tube 61 made of fused silica glass is prepared (Fig. 3(a) is a partial oblique view of the end portion of the discharge vessel forming tube 61 -15-201103073) to be in the longitudinal direction thereof. The end surface is cut into an inclined shape so as to gradually decrease in diameter toward the end (Fig. 3(b) is an explanatory view showing the end portion of the drawing (a) cut off). The end wall formed of fused silica glass is formed into a plate 6 2 so as to be cut out at the length of the end surface length of the discharge vessel forming tube 61 (Fig. 3 (c) is an oblique view of the end wall forming plate 62), and is abutted The end face of the discharge vessel forming tube 61 (Fig. 3(d) is a side view in which the discharge forming tube 61 abuts against the end wall forming plate 62). This is achieved by fixing the discharge vessel forming tube 61 to the chuck 811 of the glass rotary disc, and pressing the end wall forming plate 62 toward the end surface formed by the discharge vessel by the jig 813 fixed to the other side 812 of the glass rotary disk. To achieve it (Fig. 3(d)). One of the chucks 811 and the other 812 of the glass disk have a mechanism that can rotate coaxially. The inclined end portion of the discharge vessel forming tube 6 1 and the end wall shape 62 are repeatedly rotated and stopped by the glass rotary disk, and the abutted portion is heated by the user 8 2 to be welded (Fig. 3 (Fig. 3 ( < A partially enlarged view of the abutting portion of Fig. 3(d). Among them, the jig 8 1 3 shown in the third d) is omitted. After the abutting portion is welded, the end wall forming plate 62 is softened by heating by the sensor 82, and is bent along the inclined end surface to abut against the inclined end surface. The re-contacted portion and the end wall forming plate 62 are repeatedly rotated and stopped by a glass rotary disk, and are welded by heating by a burner (Fig. 3(f)). Outer surface ί 3rd is quite ready to be connected to the container to abut the chuck tube 61 chuck into a plate burning 3) Diagram (burning is connected to a system 82--16-201103073 After the welding, the discharge vessel is formed into a tube 61 While being rotated C, the central portion of the welded end wall forming plate 62 is heated by the burner 82 (Fig. 3(g)). The inside of the discharge vessel forming tube 61 is pressurized by nitrogen gas N. The central portion of the end wall forming plate 62 is heated by the burner 82, whereby the portion is softened and expanded by the pressurization of the nitrogen gas N, and finally blown to form the hole portion 621 (Fig. 3 (h)) " In the hole portion 621, one of the cylindrical coating agent discharge pipes 631 made of fused silica glass is prepared, and the end portion abuts against the hole portion 62 1, and is heated by the burner 82. The end wall forming plate 62 is joined to one of the coating agent discharge pipes 63 1 . Up to now, one end portion of the discharge vessel forming pipe 61 has been described, but the other end portion is also subjected to the same work as described above. Since one of the coating agent discharge pipes 63 2 is joined, the description thereof is omitted. The discharge vessel forming pipe 61, the funnel-shaped end wall forming plate 62 provided at both ends thereof, and the pair of coating agent discharge pipes 63 1 and 63 2 provided on the end wall forming plate are integrally joined as described above. This integrated product is referred to as "glass tube 6". Next, the process of forming the glass layer 4 on the inner surface of the glass tube 6 and the process of forming the phosphor 5 will be described. The glass powder is dispersed in a slurry (step 1). The bulk glass for constituting the glass layer 4 is finely pulverized and applied to a ball -17-201103073 mill. The pulverized glass powder is applied to the screen. The particle size is classified to prepare a glass powder having an average particle diameter of 0.5 to ΙΟμηι (preferably 1 to 5 μm). The ratio of the glass powder to nitrocellulose and butyl acetate is 1:4 by weight. The mixture is mixed with an alumina ball and applied to a ball mill to sufficiently honed to prepare a slurry in which the glass powder is dispersed. Hereinafter, the slurry in which the glass powder is dispersed is referred to as "glass slurry 71". Layer 4 of the glass system has The softening point (1 600 ° C) of the quartz glass as the base material of the discharge vessel 2 is a glass having a low softening point. Preferably, the softening point is in the range of firing temperature (400 to 900 ° C) of the phosphor 5 . The glass is more preferably a hard glass with good heat resistance. Among them, borosilicate glass (Si-Β-lanthanum glass, softening point: about 800 ° C), aluminosilicate glass (Si-Al-lanthanum) Glass, softening point: about 900 ° C) is preferable, and the hard glass shown above can be used alone or in a suitable ratio. 2. Next, the glass paste 71 is applied to the inner surface of the glass tube 6 (step 2). In the present embodiment, as shown in Fig. 4(i), the glass tube 6 is vertically held in the longitudinal direction thereof, and one of the coating agent discharge pipes 631 is placed on the liquid level of the container filled with the glass paste 71. . The glass tube 6 is sucked by the other coating agent with the discharge tube 6 3 2 to suck the inside air of the glass tube 6, whereby the coating body ejector 7 1 is sucked by one of the coating agent discharge tubes 6 1 1 in the glass- 18 - 201103073 The inside of the glass tube 6 is filled with the glass slurry 71 (Fig. 22 (k)), and thereafter, the glass paste 71 is discharged from one of the coating agent discharge pipes 631. At this time, the glass paste 71 has a viscosity, and the inner surface of the discharge vessel forming pipe 61 and the other end wall forming plate 62 (the upper side of the paper surface side), and one of the end wall forming plates 6 2 (the lower side of the paper surface) The inner surface, the inner surface of one of the coating agent discharge pipes 632, and the inner surface of one of the coating agent discharge pipes 63 1 are coated with a glass paste 7 1 . Here, the shape of the end wall forming plate 62 is formed in a funnel shape in which the coating agent discharge pipe 63 1 is gradually reduced in diameter, and the glass powder can smoothly flow out of the glass toward the one of the coating agent discharge pipes 63 1 . The slurry 71 can suppress the accumulation of glass powder. At this time, the thickness of the glass paste 71 is preferably in the range of 1 to 30 μm. The thickness of the applied glass paste 71 can be changed by adjusting the viscosity or the number of coatings of the glass paste 71. In the case where the phosphor 5 formed in the post-engineering process emits ultraviolet light, if the thickness of the glass layer 4 is thick, sufficient transmittance of ultraviolet rays from the phosphor may not be obtained. Therefore, the thickness of the glass layer 4 is preferably as small as possible within the range of the phosphor 5 which can be formed by post-engineering. -19- 1. Dry the glass paste 71 (step 3). 2 The other coating agent discharge tube 632 of the glass tube 6 is made to flow dry nitrogen gas toward the side coating agent discharge pipe 63 1 to evaporate butyl acetate contained in the glass paste 71. Here, since the shape of the end wall forming plate 62 is formed in a funnel shape which is tapered toward the one of the coating agent discharge pipes 63 1 by 201103073, the glass powder can be directed toward one of the coating agent discharge pipes 6 3 . 1 smoothly flows out, and the accumulation of glass powder can be suppressed. As a result, a layer in which glass powder having a thickness of 1 to 30 μm is deposited is formed on the inner surface of the glass tube 6. 4. The glass tube 6 is heated to heat the layer of the glass powder (step 4). The firing condition is about 500 to 1 000 ° C in the atmosphere, and is 0.2 to 1 hour in terms of time and retention time at the highest temperature. When the above borosilicate glass or aluminosilicate glass is used, it is preferably carried out at 600 to 900 °C. By the firing process, the particles are bonded to each other and welded to the glass tube 6, and the glass layer 4 is strongly adhered to the substrate. However, since the glass layer 4 does not heat up to the melting temperature, it is usually maintained in a powder form, but may be formed in a state in which the temperature is further increased and melted. 5. The glass tube 6 is cooled to a normal temperature (step 5), and the slurry of the prepared phosphor 5 is applied to the arc tube by a suction method (step 6). The coating method of the phosphor 5 In the same manner as described in the previous section, the glass tube for illuminating the arc tube is vertically held, and one of the coating liquid discharge tubes 63 is placed in the liquid level of the container filled with the phosphor slurry 72. The inside air of the glass tube 6 is sucked by the other coating agent discharge pipe 63 2, whereby the phosphor slurry 72 is sucked up by one of the coating agent discharge pipes 6 3 1 -20- 201103073, The inside of the glass tube 6 is filled with the phosphor 72 (Fig. 4(m)), and then the phosphor slurry 72 is discharged from one of the coating agent tubes 631. At this time, since the phosphor paste f has viscosity, the inner surface of the discharge vessel forming tube 61 and the inner surface of the other wall forming plate 62 (upper side of the paper surface) and one of the end wall plates 62 (the lower side of the paper surface) The inner surface, one of the inner surfaces of the coating agent row 63 2 and the inner surface of one of the coating agent discharge pipes 631 are coated with the phosphor slurry 72. Here, the shape of the end wall forming plate 62 is formed such that the one of the coating agent discharge pipes 63 1 is gradually reduced in the shape of a bucket, and the phosphor powder can be smoothly discharged toward the one of the coating agent rows 63 1 . Inhibition of accumulation of phosphor powder (coagulation can be applied to the fluorescent system of the fluorescent lamp 1 of the present invention, for example, strontium barium borate (Sr-B-0: Eu (hereinafter referred to as SBE), center 3 68 nm) phosphor , endows live magnesium aluminate strontium (La-Mg-Al-Ο: hereinafter referred to as LAM), the center wavelength of 338nm (but broa (fluorescent, IL, 鐯 活 镧 镧 (La-P-0: Gd, Pr (LLP: Pr, Gd' center wavelength 311 nm), phosphor, etc. The light system absorbs ultraviolet light in the field of less than 250 nm, and replaces it with ultraviolet light in the central wavelength region. 6. The other coating agent discharge pipe 632 of the glass tube 6, wherein one of the coating agent flows through the discharge pipe 633 to dry nitrogen gas, whereby the butyl acetate contained in the photo body slurry 72 is evaporated. The end wall slurry is discharged from the I 72 square end to form a leaky tube of the tube system. The activation wavelength Ce ( )) is called The shape of the plate forming plate of the fluorescene-21-241 201103073 and the 242 part is formed into a funnel shape which is gradually reduced in diameter toward the one of the coating agent discharge pipes 63 1 , so that the phosphor powder can be discharged toward one of the coating agents. The tube 63 1 smoothly flows out (Fig. 5 (η)), and the accumulation of the phosphor powder (condensation) can be suppressed. 7 - The phosphor is fired (step 8). The glass tube 6 is placed in a furnace. The firing conditions are about 500 to 800 ° C in an atmospheric environment, and are heated for 0.2 to 1 hour at the maximum temperature retention time. In the firing process, the phosphor 5 layer and the glass are used. At the interface of the layer 4, the glass softens to cause the phosphor 5 to adhere to the glass layer 4, and as a result, a strong bonding state is obtained. As a result, on the inner surface of the glass tube 6 composed of quartz glass, sequential lamination is obtained. In the case of the phosphor layer 5 which is composed of the low-softening point glass powder, the phosphor layer 5 is heated to nitrocellulose. After the temperature of combustion in the atmosphere, by shape For non-oxidizing atmosphere or reducing atmosphere, it can be heated to about 800 degrees. Finally, the sealing process of the glass tube 6 will be described. 8. Cool the glass tube 6 to normal temperature (step 9), in the glass tube The inside of 6 is sealed with a rare gas and hermetically sealed (step 10). More specifically, the phosphor 5 layer and the glass layer 4 which are adhered to the inner surfaces of the pair of coating agent discharge pipes 63 1 and 632 After the removal, one of the coating agents is heated by the discharge pipe 631 by the burner -22-201103073 82 (Fig. 5 (o)), and one of the coating agent tube remaining portions 2 5 1 is formed by sealing ( Figure 5 (ρ)). Thereafter, one of the coating agent discharge pipes 632 is hermetically connected to the exhaust device 83, and the gas inside the glass tube 6 is exhausted by the exhaust device 83, and the luminescent gas is used. For example, xenon (Xe), krypton (Kr), argon (Ar), and neon (Ne) may be separately enclosed, or may be appropriately combined and mixed to be enclosed. Wherein, the wavelength system obtained by the discharge of the rare gases is 氙160-19 Onm, 氪124,1 4 0 - 1 6 0 nm 'argon 1 0 7 - 1 6 5 nm 'gas 80-90 nm° in the enclosed light After the gas, one of the coating agents is heat-sealed (ti ρ - 〇ff) by the discharge pipe 633 by the burner 82, whereby the discharge vessel 2 in which the phosphor 5 and the glass layer 4 are provided is completed. Thereafter, a pair of electrodes 31 and 32 are provided on the outer surface of the discharge vessel 2, whereby the fluorescent lamp 1 shown in Figs. 1 and 2 is obtained. In the above-described manufacturing method, one of the end walls 241 of one of the discharge vessels 2 is formed in a funnel shape toward the one of the coating agent tube remaining portions 251, whereby the phosphor 5 is discharged from the slurry. At the time of drying or drying, it is possible to suppress the accumulation (condensation) of the phosphor powder on the inner surface of one of the end walls 241, so that the thickness and the thickness of the phosphor 5 layer provided on the end walls 24 1 and 242 can be suppressed. The thickness of the side wall 23 is extremely different. Therefore, the thickness of the phosphor 5 provided on the end walls 241 and 242 and the phosphor 5 provided on the side wall 23 are not extremely different, so that the difference in thermal expansion amount is small, and is provided on the end walls 241 and 242. Since the phosphor 5 is extremely thin as in the case of the phosphor 5 provided on the side wall 23, the difference in the amount of thermal expansion of the structure -23-201103073 formed by the end walls 241 and 242 is also small, whereby the end can be suppressed. Wall 24 1 falls. When the lamp is turned on, the ultraviolet light of 200 nm or less is generated by the hair enclosed in the inside of the discharge vessel 2, and the phosphor 5 is excited by the vacuum violet. When the excitation light is, for example, a line of 250 nm to 380 nm, if the member constituting the discharge vessel 2 is quartz glass, the ultraviolet ray is appropriately irradiated to the outside. At this time, since the phosphor 5 is provided on the discharge capacitor I end walls 24 1 and 242, it is possible to suppress the vacuum ultraviolet rays generated inside the discharge 2 from directly irradiating the end wall 24 1 and suppress the breakage of the discharge vessel 2, thereby Extend the life of the discharge capacitor. In addition, when the vacuum ultraviolet ray of 200 nm or less is generated outside the current capacitor 2, it is absorbed by external oxygen, and the resin contained in the apparatus is decomposed. Since the lamp 1 has the phosphor 5 on the end walls 241 and 242, it is possible to suppress the vacuum ultraviolet rays from being emitted from the end wall 241. Further, along with this, the device does not determine the ozone countermeasure, and the device may not be complicated. In the first embodiment, the member constituting the discharge vessel 2 is a glass. Since the softening point of the quartz glass is around 160 CTC, the phosphor 5 is directly placed on the inner surface of the discharge vessel 2, and the body 5 is heated to 1 in the body 5. When the high temperature region near 600 ° C is used, it is fluoresced, and predetermined light cannot be obtained. On the other hand, even if 5 degradation is avoided, the ultraviolet light which is heated by the ultraviolet light 242 at a temperature of less than 1600t can be transmitted through the § 2 capacitor, 242 > 2 to ozone, shape, However, there are 24 streams on the inner surface. Therefore, even if the quartz glass is inferior to the phosphor, the softening of the discharge vessel 2 will be insufficient, and the combination with the phosphor 5 is insufficient. The bad condition that the phosphor 5 is finally peeled off. Therefore, in the first embodiment, the phosphor 5 is provided on the inner surface of the discharge vessel 2 with the softening point lower than that of the glass layer 4 of the quartz glass, whereby the phosphor 5 can be prevented from being peeled off or deteriorated. When the discharge vessel 2 is formed of hard glass, since the softening point is lower than the softening point of the quartz glass, the phosphor 5 can be directly disposed in the discharge vessel 2. The second embodiment is shown as an example in which the phosphor 5 is directly disposed in the discharge vessel 2 without providing the glass layer 4. Fig. 6 is an explanatory view showing a second embodiment of the present invention. Fig. 6 is a cross-sectional view taken along the longitudinal direction of the fluorescent lamp 1 of the second embodiment. Here, the sixth drawing is denoted by the same component symbol as the one shown in Fig. 1. The second embodiment of Fig. 6 differs from the first embodiment of Fig. 1 in that the components constituting the discharge vessel 2 are different from each other, and the glass layer 4 is not provided. In the description of the second embodiment of Fig. 6, the parts common to Fig. 1 are omitted, and the differences will be described. The member constituting the discharge vessel 2 is a hard glass having a softening point of 780 C. Since this temperature is the same as the softening point of the glass layer 4 shown in the first embodiment, when the phosphor paste 72 is applied to the inner surface of the discharge vessel 2 and fired, the layer 5 and the discharge of the phosphor 5 are discharged. At the interface of the container 2, glass softening is caused, and the phosphor 5 is attached to the discharge vessel 2, and a strong bonding state is obtained between the discharge vessel -25-201103073 and the phosphor 5. As described above, if the member constituting the discharge vessel 2 is hard glass, the phosphor 5 can be directly disposed on the inner surface of the discharge vessel 2. Even if the fluorescent lamp 1 of the second embodiment is configured as described above, since the shape of the discharge vessel 2 is the same as that of the first embodiment, the same effects as those of the first embodiment can be obtained, and the third embodiment is shown as the first and The shape of the funnel-shaped end walls 241, 242 shown in the second embodiment is other than the shape. Fig. 7 is an explanatory view showing a third embodiment of the present invention. Fig. 7(a) is a cross-sectional view along the longitudinal direction of the fluorescent lamp 1 of the third embodiment. Fig. 7(b) is a perspective view showing one end portion of the fluorescent lamp 1 of Fig. 7(a). In the seventh embodiment, the same component symbols are denoted by the same reference numerals as those in the first and second figures. The third embodiment of Fig. 7 differs from the first embodiment of Figs. 1 and 2 in that the funnel shape of the end walls 24 1 and 20 is an arc shape. In the description of the third embodiment of Fig. 7, the parts common to the first and second figures are omitted, and the different parts will be described. As shown in Fig. 7(b), the end walls 241 and 242 are such that the surface on the front side of the paper surface (the surface on which one of the electrodes 31 is provided) and the end on the inside of the paper surface (not shown) are wide. The width of the coating agent tube remaining portions 251 and 252 is gradually narrowed so as to be inclined in a logarithmic function. The end walls 241 and 242 are inclined along the side wall 23, and are configured to have a funnel shape such that they are gradually reduced in diameter toward the coating agent tube remaining portions 251 and 252 toward -26 to 201103073. In the cross section shown in Fig. 7(a), the end walls 241 and 242 are oriented toward the center of the coating agent tube portion 2 5 1 and 2 5 2 so as to form a logarithmic function arc from the left and right sides of the paper. The method is configured as a funnel. Even if the shape of the end walls 24 1 and 2U is a circular funnel shape as shown in Fig. 7, the phosphor powder can be smoothly discharged into the glass tube 6 in the phosphor coating process. The accumulation (condensation) of the phosphor powder on the end walls 241, 242 can be suppressed. Therefore, the fluorescent lamp 1 of the third embodiment obtains the same effects as those of the fluorescent lamp 1 of the first embodiment. In the first to third embodiments, the positions of the coating agent tube remaining portions 251 and 252 are formed at the centers of the end walls 241 and 242, and the other examples are shown as the fourth embodiment. Fig. 8 is an explanatory view showing a fourth embodiment of the present invention. Fig. 8(a) is a cross-sectional view along the longitudinal direction of the fluorescent lamp 1 of the fourth embodiment. Fig. 8(b) is a perspective view showing one end portion of the fluorescent lamp 1 of Fig. 8(a). In the eighth embodiment, the same component symbols are denoted by the same reference numerals as those in the first and second figures. The fourth embodiment of Fig. 8 differs from the first embodiment of Figs. 1 and 2 in that the coating agent tube remaining portions 25 1 and 2 52 are provided at the side edges of the end walls 241 and 242. In the description of the fourth embodiment of Fig. 8, the parts common to the first and second figures are omitted, and the different parts will be described. -27-201103073 As shown in Fig. 8(b), the coating agent tube residual portions 251 and 252 are disposed at the side edges of the end walls 241 and 242. As shown in Fig. 8(b), the side wall 23 is formed such that the surface on the front side of the paper surface (the surface on which the one electrodes 31 and 32 are provided) and the end portion on the inner side of the paper surface (not shown) are coated in a wide orientation. The cloth remaining portions 251 and 252 of the cloth are gradually narrowed so as to be linearly inclined. The end walls 24 1 and 242 are inclined along the side wall 23 and are formed in a funnel shape inclined toward the coating agent tube remaining portions 251 and 252. In the cross section shown in Fig. 8(a), the end walls 241 and 242 are formed in a funnel shape inclined toward the left side of the paper surface toward the coating agent tube remaining portions 2 5 1 and 2 5 2 located on the right side of the paper surface. Even if the shape of the end walls 241 and 242 is a funnel shape as shown in Fig. 8, the discharge of the phosphor powder which is filled in the inside of the glass tube 6 can be smoothly performed in the phosphor coating process, and the end can be suppressed. The walls 241, 242 are accumulated (condensed) of the phosphor powder. Therefore, the fluorescent lamp 1 of the fourth embodiment obtains the same effect as the fluorescent lamp 1 of the first embodiment. In the first to fourth embodiments, the positions where the end walls 241 and 242 are provided are set. The other example of the end face of the end wall 23 is shown as the fifth embodiment. Fig. 9 is an explanatory view showing a fifth embodiment of the present invention. Fig. 9 is a cross-sectional view taken along the longitudinal direction of the fluorescent lamp of the fifth embodiment. In the ninth figure, the same component symbol is attached to the same as the one shown in Fig. 1 -28-201103073. The fifth embodiment of Fig. 9 is such that the position where the end walls 241, 242 are provided is provided in the field of entering the inner side from the end surface of the side wall 23, and the discharge vessel having the outer peripheral edge of the end walls 24 1 and 242 protruding outward. The tube residual portion 23 1 and the like are different from the first embodiment. In the description of the fifth embodiment of Fig. 9, the parts common to Fig. 1 are omitted, and the different parts will be described. The end walls 24 1 and 242 are attached to the end of the discharge vessel 2 at a position inside the end surface of the side wall 23. Thereby, the discharge vessel forming tube remaining portion 231 which protrudes toward the longitudinal direction of the discharge vessel 2 by the outer peripheral edges of the end walls 241, 242 is provided. As shown in Fig. 9, even if the positions of the end walls 241 and 242 are located inside the end faces of the end walls 24 1 and 242, the shape of the end walls 241 and 242 is toward the coating agent tube remaining portion 251, 252 is a funnel shape, and the discharge of the phosphor powder which is filled in the inside of the glass tube 6 can be smoothly performed in the phosphor coating process, and the accumulation of the phosphor powder on the end walls 241 and 242 can be suppressed ( Condensation). Therefore, the fluorescent lamp 1 of the fifth embodiment obtains the same effects as those of the fluorescent lamp 1 of the first embodiment. In the first to fifth embodiments, the shape of the discharge vessel 2 is formed by a single-layered tube having a rectangular parallelepiped shape, and the other examples are shown as the sixth embodiment. Fig. 10 is an explanatory view showing a sixth embodiment of the present invention. Fig. 1 is a cross-sectional view taken along line -29-201103073 of the long side of the fluorescent lamp 1 of the sixth embodiment. In the drawings, the same reference numerals are used for the same as those shown in Fig. 8. In the sixth embodiment of Fig. 10, the discharge vessel 2 is formed of a cylindrical double tube, and the other electrode 32 is provided on the inner surface of the inner tube 22 of the discharge vessel 2, and the like. different. In the description of the sixth embodiment of Fig. 10, the portions common to Fig. 8 are omitted, and the different portions will be described. The fluorescent lamp 1 of the sixth embodiment is a discharge vessel 2 of a double cylinder tube, a glass layer 4 provided on the inner surface of the discharge vessel 2, a phosphor 5 provided on the inner surface of the glass layer 4, and A pair of electrodes 31 and 32 which are provided apart from each other outside the discharge vessel 2 are formed. The discharge vessel 2 is composed of a cylindrical outer tube 21, an inner tube 22 disposed inside the outer tube 21 coaxially with the outer tube 21, and a side wall 23 of the double tube structure, which is disposed in the longitudinal direction of the side wall 23. The funnel-shaped end walls 24 1 and 242 at both ends and the coating agent residual portions 25 1 and 25 2 provided in the end walls 241 and 242 are formed. For the member constituting the discharge vessel 2, for example, quartz glass is used, and a member that transmits excitation light from the phosphor 5 is used. As shown in Fig. 10, the end faces of the side walls 23 are inclined. The end walls 24 1 and 242 are inclined along the side wall 23, and are formed in a funnel shape inclined toward the coating agent tube remaining portions 25 1 and 25 2 . In the cross section shown in Fig. 1, the end walls 241 and 20 are directed toward the remaining portion of the coating agent tube located on the right side of the paper surface, and are formed in a bucket shape inclined by the left side of the paper surface -30-201103073. The side wall 23 of the double pipe structure is provided with a mesh-shaped inner side electrode 31 on the outer peripheral surface of the outer pipe 2 1 side, and a cylindrical plate-shaped other electrode 32 having the outer peripheral surface of the inner pipe 22 is provided. Thus, the pair of electrodes 31, 32 are interposed between the inner tube 22 and the outer tube 21' of the discharge vessel 2 and also in the discharge space 26 between the outer tube 21 and the inner tube 22. Even if the shape of the discharge vessel 2 is the double pipe structure shown in Fig. 10, if the shape of the end walls 24 1 and 242 is funnel-shaped toward the coating agent tube residual portions 2 5 1 and 252, the phosphor is in the form of a phosphor. In the coating process, the discharge of the phosphor powder which is filled in the inside of the glass tube 6 can be smoothly performed, and the accumulation (condensation) of the phosphor powder at the end wall 24 1 ' 242 can be suppressed. Therefore, the fluorescent lamp 1 of the sixth embodiment obtains the same effects as those of the fluorescent lamp 1 of the fourth embodiment. In the first to sixth embodiments, the coating agent tube remaining portions 2 5 i and 2 5 2 are provided on the end walls 241 and 242, and the other examples are shown as the seventh embodiment. Figure 11 is an explanatory view showing a seventh embodiment of the present invention. Fig. 1(a) is a perspective view showing one end portion of the fluorescent lamp 1 of the seventh embodiment. Fig. 1(1) is a cross-sectional view showing one end portion of the fluorescent lamp 1 of Fig. 1(a). In the drawings, the same reference numerals are given to the same components as those shown in Fig. 8. The seventh embodiment of the first embodiment is different from the fourth embodiment of the eighth embodiment in that the coating agent tube remaining portions 2 5 ! -31 - 201103073 and 2 52 are provided on the side wall 23. In the description of the seventh embodiment of Fig. 11, the parts common to Fig. 8 are omitted, and the different parts will be described. One of the coating agent tube remaining portions 25 1 is provided near the end surface of the side wall 23. One of the coating agent tube remaining portions 25 1 is formed in a shape such that the side wall 23 extends in the vertical direction from the longitudinal direction of the discharge vessel 2 and is bent in the direction of the long handle of the discharge vessel 2, and is formed in an L shape. The coating agent tube residual portion 251 has its inner surface connected to the inner surface of the inclined end wall 24 1 , whereby the phosphor in the inside of the glass tube 6 is filled in the phosphor coating process. When the powder is discharged, the phosphor powder flowing on the inclined end wall 24 1 can be smoothly flowed and discharged to the inner surface of the discharge pipe for the coating agent which is connected to the inner surface of the inclined end wall 24 1 . It is suppressed that the phosphor powder is accumulated (condensed) in the end wall 24 1 . Therefore, the fluorescent lamp 1 of the sixth embodiment obtains the same effects as those of the fluorescent lamp 1 of the fourth embodiment. In addition, one of the coating agent tube remaining portions 25 1 is provided in the vicinity of the end surface of the side wall 23, and the double tube structure shown in Fig. 10 can be applied. In the first to seventh embodiments, at least one of the pair of end walls 241 and 242 has a funnel shape in which the end wall 24 I of the end portion is formed in a funnel shape toward the coating agent tube remaining portion 25 1 . In the bulk coating process, the phosphor powder that is filled inside the glass tube 6 can be smoothly discharged. -32-201103073 However, when the illuminating material from the fluorescent lamp 1 of the present invention is large, the fluorescent lamp 1 can also be manufactured, for example, in an elongated shape of 2 m. At this time, since the phosphor slurry 72 has such a tendency that when only the one of the coating tubes 63 1 is discharged when the egg-shaped powder is discharged, sufficient discharge cannot be performed. When the fluorescent lamp 1 is elongated, as shown in Fig. 1, the other end is also formed in a funnel shape toward the other coating agent discharge pipe, whereby the accumulation of the phosphor powder occurs on the other end wall 242 ( The condensing suppresses the removal of the phosphor 5 provided on the other end wall 242. [Brief Description of the Drawings] Fig. 1 is an explanatory view of the fluorescent lamp of the first embodiment. Fig. 2 is a fluorescent diagram of the first embodiment. Fig. 3 is a view showing a method of manufacturing a fluorescent lamp according to a first embodiment, Fig. 4 is a view showing a method of manufacturing a fluorescent lamp according to a first embodiment, and Fig. 5 is a fluorescent example of the first embodiment. Fig. 6 is an explanatory view of a fluorescent lamp of a second embodiment. Fig. 7 is an explanatory view of a fluorescent lamp of a third embodiment-example. Fig. 8 is a fluorescent diagram of the fourth embodiment. Fig. 9 is an explanatory view of a fluorescent lamp of a fifth embodiment. Fig. 1 is an explanatory view of a fluorescent lamp of a sixth embodiment. Fig. 33-201103073 Fig. 1 1 is an explanatory view of the fluorescent lamp of the seventh embodiment. Fig. 12 is an explanatory view of a conventional technique. (a) An explanatory diagram of a conventional fluorescent lamp. (b) An explanatory diagram of a conventional excimer lamp. (c) An explanatory diagram of a conventional excimer lamp. [Description of main component symbols] 1 : Fluorescent lamp 2 : discharge vessel 2 1 : outer tube 22 : inner tube 2 3 : side wall 2 3 1 : discharge vessel forming tube residual portion 2 4 1 : one of the end walls 2 4 2 : The other end wall 25 1 : one of the coating agent tube remaining portions 2 5 2 : the other coating agent tube remaining portion 2 6 : the discharge space 3 1 : one of the electrodes 32 : the other electrode 4 : the glass layer 5 : phosphor 6 : glass tube 6 1 : discharge vessel forming tube 62 : end wall forming plate - 34 - 201103073 6 2 1 : hole portion 6 3 1 : one of the coating agent discharge tubes 63 2 : the other coating Discharge pipe 71 for the agent: glass paste 72 · 'phosphor slurry 8 : double pipe structure 81 1 : one of the chucks 812 : the other chuck 8 1 3 . jig 8 2 : burner 8 3 : Exhaust device 91: Fluorescent lamp 9 2 : Excimer lamp 93 : Excimer lamp 9 1 1 : Discharge capacitor 9111: Inner tube 9112: Outer tube 9 1 1 3 : Annular end wall 9 1 2 : Electrode 913: Phosphor 9 2 1 : Discharge capacitor 9211 : Inner tube 9 2 1 3 : End wall 922 : Electrode - 35 - 201103073 924 : Residual portion 924 : Tip tube C : Rotation N : Nitrogen R : Tilt angle