201103068 六、發明說明： 【發明所屬之技術領域】 本發明係關於放射出藉由使用含有選自氪氣、 一種以上的稀有氣體與碘氣的放電氣體而形成激鸯 所放射的紫外光的燈。 【先前技術】 在液晶顯示器之製造工程中，係已採用一種在 晶的像素時使單體混入液晶，在使液晶分子呈傾斜 下使單體聚合，藉此使液晶分子的傾斜方向固定的 PSA: Polymer Sustained Alignment )。藉由針對 揭示的專利文獻1，以用以使單體聚合的光源而言 到對液晶造成的損害較少、單體的感度、液晶用玻 過率等，以對單體照射例如波長300-380nm的紫外 (專利文獻1的段落0 2 3 7 )。 以放射用以使單體聚合所需之波長3 00-3 8 0nm 光的紫外線光源而言，已知有各式各樣，但目前乃 最適於PSA用途的光源反覆硏究的階段。例如，將 爲放電媒體而主要放射波長365nm之紫外光的水銀 金屬鹵化物作爲放電媒體的金屬鹵素燈等成爲PSA 光源的候補。但是，水銀燈在欲裝載複數水銀燈來 外線照射裝置時，會有紫外線照射裝置大型化的問 外’會有爲了將水銀作爲放電媒體而對環境所造成 較大的缺點。金屬鹵素燈係在與投入電力相比，所 氬氣之 碘分子 構成液 的狀態 技術（ PSA所 ，考慮 璃的透 光爲佳 的紫外 爲針對 水銀作 燈、將 用途之 構成紫 題，此 的負荷 放射的 -5- 201103068 紫外線的輸出較低的能量效率方面存有問題，此外無法忽 視爲了將鹵化金屬作爲放電媒體而對環境所造成的不良影 響。 另一方面，具備有由彼此相對向配置之由介電質材料 所構成的一對壁部、及與一對壁部的端部相連接的密封用 壁部所構成的放電容器，且在形成於放電容器內部的放電 空間內塡充稀有氣體、鹵素氣體、或該等之混合氣體，隔 著前述壁部施加交流電壓或脈衝電壓，藉此將紫外線放射 至放電容器外部的燈已爲人所知。該類燈在欲裝載複數準 分子燈來構成紫外線照射裝置時，可使紫外線照射裝置較 爲小型化，並且與投入電力相比，所放射的紫外線的輸出 較高’故能量效率較佳，而且由於使用氙氣、氪氣等稀有 氣體作爲放電媒體，因此對環境造成的負荷較小等在實用 性方面具有較大優點，因此有希望作爲PSA用光源加以使 用。 如上所示之燈自以往以來主要作爲藉由對液晶基板等 被處理物的表面照射真空紫外線以進行被處理物之表面改 質的光源而加以使用’但是在PS A用途中用以使單體聚合 所需的波長300-380nm的波長範圍的紫外光的輸出並不足 夠。 〔先前技術文獻〕 〔專利文獻〕 [專利文獻1]日本特開2003-1 49647號 201103068 【發明內容】 (發明所欲解決之課題） 基於以上，本發明之目的在提供—種燈’其效率佳地 放射用以使單體聚合所需之波長3 00-3 80nm之波長範圍的 紫外光，俾以提供最適於P S A用途的光源。 段 手 之 題 課 決 解 本發明係（i)—種燈，係具備有：被封入有含有選自氪 氣、氬氣之1種以上的稀有氣體與碘氣的放電氣體的放電 容器；及以夾持被形成在前述放電容器內部的放電空間而 相對向的方式作配置的一對電極，藉由形成激發碘分子而 將波長3 42nm的紫外光放射的燈，其特徵爲：在前述放電 空間混合發生：遍及前述放電空間的全體發生放電之狀態 的擴散放電、及具有與前述擴散放電相比在空間上呈收縮 的帶狀形狀的燈絲放電等雙方。 本發明係（2)—種燈，係具備有：被封入有含有氪氣與 碘氣的放電氣體的放電容器；及以夾持被形成在前述放電 容器內部的放電空間而相對向的方式作配置的一對電極， 藉由形成激發碘分子而將波長342nm的紫外光放射的燈， 其特徵爲：前述放電氣體所含碘氣的濃度爲0.04〜0.9%， 並且將被施加在前述放電空間的電場強度設爲E( kV/cm )、前述稀有氣體的分壓設爲pl(kPa)、前述碘氣的分 壓設爲p2 ( kPa)時，成立下式關係·· E/pl 2(6.6xp2 + 124)xexp(-〇.〇〇93xpl)。 201103068 本發明係（3)—種燈，係具備有：被封入有 碘氣的放電氣體的放電容器；及以夾持被形成 容器內部的放電空間而相對向的方式作配置的 藉由形成激發碘分子而將波長342nm的紫外光 其特徵爲：前述放電氣體所含碘氣的濃度爲0. 並且將被施加在前述放電空間的電場強度設爲 )、前述稀有氣體的分壓設爲pl(kPa)、前 壓設爲p2(kPa)時，成立下式關係： Ε/ρ12(236χρ2+1598)χρ1·0 83。 本發明係（4)一種燈，係具備有：被封入有 及氬氣加以混合的混合氣體、以及碘氣的放電 容器；及以夾持被形成在前述放電容器內部的 相對向的方式作配置的一對電極，藉由形成激 將波長3 42 nm的紫外光放射的燈，其特徵爲： 體所含碘氣的濃度爲0.04〜0.9%，並且將被施 電空間的電場強度設爲E ( kV/cm )、前述稀 壓設爲pl(kPa)、前述拂氣的分壓設爲p2 成立下式關係： Ε/ρ12(1 337χρ20 0177)χρ1_0 74。 本發明係在（1)-(4)中，前述放電氣體的全丨 以上。 本發明係在（1)-(4)中，供給至前述燈的亮 〜120kHz。 含有氬氣與 在前述放電 一對電極， 放射的燈， 0 4 〜0.9 %， ；E ( kV/cm 述碘氣的分 含有將氪氣 氣體的放電 放電空間而 發碘分子而 前述放電氣 加在前述放 有氣體的分 (kP a )時， g 爲 lOOkPa 燈頻率爲1 201103068 (發明之效果） 藉由請求項1之發明，在放電空間混合發 述放電空間的全體發生放電之狀態的擴散放電 前述擴散放電相比在空間上呈收縮的帶狀形狀 等雙方，因而效率佳地放出由激發碘分子1/ 長342nm的碘分子發光，因此可使在PSA用 單體聚合所需之波長範圍之紫外光的輸出提升 藉由請求項2至請求項4之發明，將被封 器內的放電氣體所含碘氣的濃度及被施加在放 場強度以成立預定關係的方式予以最適化，藉 在放電容器的內部空間形成將波長342nm的砩 以放射的激發碘分子I/，因此可使在PSA用 單體聚合所需之波長範圍之紫外光的輸出提升 藉由請求項5之發明，被封入在放電容器 體的全壓被設爲lOOkPa以上，藉此使激發碘j 形成在放電空間，因此效率佳地放射峰値波長 碘分子發光，可使在PSA用途中用以使單體聚 長範圍之紫外光的輸出爲更高。 藉由請求項6之發明，由於被供給至燈的 1〜120kHz，因此不會發生激發碘分子1/被分 此外，不會有平均單位時間的發光次數極端短 此效率佳地放射波長342nm的碘分子發光， 用途中用以使單體聚合所需之波長範圍之紫外 更高。 生：遍及前 、及具有與 的燈絲放電 所放射的波 途中用以使 〇 入在放電容 電空間的電 此效率佳地 分子發光予 途中用以使 〇 內的放電氣 子子1/易於 爲342nm的 合所需之波 亮燈頻率爲 解的情形， 的情形，因 可使在PSA 光的輸出爲 -9 - 201103068 【實施方式】 第1圖係顯示本發明之燈之槪略構成的斜視圖。第2 圖係第1圖所示之Α·A線剖面圖。燈1 0係具備有藉由例 如石英玻璃等介電質材料而如第2圖所示以剖面呈方形狀 的方式所構成的放電容器1。在放電容器1的內部係被封 入有主要含有氪、氬之任一種以上的稀有氣體與碘氣的放 電氣體。放電容器1係在放電容器之長邊方向之兩端附近 的內部配置密封構件2而將放電容器1與密封構件2熔接 ，藉此以放電氣體不會漏出至外部的方式予以氣密式密封 。此外，在放電容器1之上下壁面3、4之各自的外表面 ，以夾持形成在放電容器1內部的放電空間S及構成放電 容器1的介電質材料而相對向的方式設有網孔狀的一對電 極5、6。電極5、6係以形成有預定的網孔狀圖案的方式 藉由例如蒸鍍等所形成。此外，在放電容器1的內部，在 與光出射方向側之壁面3呈相反側的壁面4形成有例如含 有Si02作爲主成分的紫外線反射膜7，在放電空間S內所 發生的紫外線藉由紫外線反射膜7而朝光出射方向反射， 由位於光出射方向側的壁面3射出。 如上所示之構成的燈係在一對電極5、6間供給例如1 〜120kHz的交流電壓或脈衝電壓，藉此在面向放電空間S 的內壁面混在發生遍及放電空間全體而發生放電的狀態的 擴散放電、及具有與前述擴散放電相比在空間上較爲收縮 之帶狀形狀的燈絲放電等雙方。 -10- 201103068 藉由如上所示之放電，被封入在放電容器的碘I的正 離子1 +及陰離子Γ係與選自碘以外之氬、氪之中的1種以 上的原子或分子以下式起反應，藉此形成激發碘分子1/ 。以下化學式所示的Μ爲碘、氪及氬的原子或分子。 [化學式1] I+ + I + Μ —^ 12 + Μ 激發碘分子1/係藉由放電氣體所含之碘離子1 +及Γ 與放電氣體所含之碘、氪及氬的原子或分子反覆衝撞而形 成在放電空間，且放射峰値波長爲342nm的碘分子發光。 成爲形成激發碘分子之基礎的碘離子係因準安定激發 原子的能量而使碘被電離之被稱爲潘寧效應（Penning Effect )的反應成爲主要因素而生成。該潘寧效應係藉由 氪及氬之準安定激發原子的能量比碘原子的電離能量稍高 而發生。爲供參考，準安定激發原子的能量，氪爲10.5 eV 、氬爲11.5、ll_7eV，碘原子的電離能量爲10.4eV。因此 ，若將含有選自氪、氬之一種以上的稀有氣體與碘氣的放 電氣體封入放電容器，則在放電空間中會生成更多碘離子 ，而形成有多數激發碘分子，因此期待波長3 42 nm之碘分 子發光的輸出提升者。 放電氣體亦可含有氪、氬以外的其他稀有氣體，但是 與氪或氬等稀有氣體的分壓相比，除該等以外的稀有氣體 的分壓變高時，會減弱上述潘寧效應，因此必須注意其他 稀有氣體的分壓比例不會變得過高。例如，氪、氬以外的 其他稀有氣體的分壓係以設爲氪、氬的分壓的1 0%以下爲 -11 - 201103068 佳。 在此，由激發碘分子所放射之波長342nm之碘分子發 光的輸出，經本·發明人硏究結果，判定出在（1)放電氣體所 含碘氣的濃度、與（2)被施加至放電空間的電場強度特別具 有關係。（1)的碘的濃度係藉由將碘氣的分壓P2除以放電 氣體的全壓而計算出。放電氣體的全壓係近似於選自氪、 氬中之一種以上的稀有氣體的分壓pi。其中，（2)的電場 的強度係依存於：選自氪、氬之中之一種'以上的稀有氣體 的分壓pl、與碘I的分壓p2。以下針對爲了決定爲提高 波長342nm的激發碘分子1/的發光強度所需之放電氣體 所含碘氣的濃度及施加於放電空間之電場強度的條件所進 行的實驗加以說明。實驗中係使用以下實施例1〜3的燈 [實施例1] 實施例1的燈係藉由壁厚2mm的石英玻璃，構成爲 全長200mm、寬幅42mm、高度14mm、放電間隙l〇mm， 具備有藉由全長130mm、寬幅32mm的金所形成的電極。 在放電容器係封入含有氪氣及碘氣的放電氣體。 [實施例2] 實施例2的燈係藉由壁厚2mm的石英玻璃，構成爲 全長200mm、寬幅42mm、高度14mm、放電間隙i〇mm， 具備有藉由全長130mm、寬幅32mm的金所形成的電極。 -12- 201103068 在放電容器係封入含有氬氣及碘氣的放電氣體。 [實施例3 ] 爲 以 範 按 加 同 各 構 24 本 台 置 以 電 電 實施例3的燈係藉由壁厚2mm的石英玻璃，構成 全長200mm、寬幅42mm、高度14mm、放電間隙l〇mm 具備有藉由全長130mm、寬幅32mm的金所形成的電極 在放電容器係封入含有氣氣及氬氣以1: 1的混合比加 混合的稀有氣體的混合氣體以及碘氣的放電氣體。 (實驗1 ) 實驗1係爲了調査放電氣體所含碘氣的濃度的最適 圍而進行。實驗1係針對各實施例1〜3之燈的各個， 各實施例1〜3，個別準備將放電氣體的全壓以l20kPa 以統一，且在碘氣的濃度爲0.01〜2%的範圍內彼此不 的7種燈。亦即，實驗1係使用針對各實施例1〜3的 個分別各7種合計2 1種的燈。 第3圖係顯示爲了進行實驗1所使用的實驗裝置的 成槪略槪念圖。22爲鋁製燈罩、23爲陶瓷製支持台、 爲受光部。受光部24係藉由光纖而與未圖示的分光器 體相連接。將燈1固定在被配置在燈罩22內部的支持 23之上，並且將受光部24以在離燈1的表面5mm的位 與燈1相對向的方式作配置，將燈罩22的內部雰圍氣 氮氣置換。針對實施例1〜3的燈的各個，藉由對一對 極5、6施加交流電壓（矩形波）而使放電空間發生放 -13- 201103068 ，對由網孔狀電極5的間隙所放射的波長342nm的碗分子 發光的發光強度進行測定。 將實驗1的結果顯示於第4圖。第4圖中，縱軸表示 碘分子發光強度的規格資料，橫軸表示放電氣體所含之碘 氣的濃度（％)。如該圖所示，關於實施例1、2、3之任 一者均將碘濃度設爲0.04〜0.9%的範圍者，與碘濃度爲該 範圍以外者相比，激發碘分子1/的發光強度變得特別高 (實驗2 ) 實驗2係調查出在當將放電氣體的全壓及碘氣的分壓 分別設爲一定時，爲了提高峰値波長爲3 42nm之碘分子 1/的發光強度所需的換算電場強度的下限値（以下亦稱之 爲臨界換算電場強度）。所謂換算電場強度係將電場強度 E除以稀有氣體的分壓pi所得數値。 各實施例1〜3之燈係分別將放電氣體的全壓（稀有 氣體的分壓pi及碘氣的分壓p2的合計）設爲12〇kPa、蛾 氣的分壓p2設爲0.14kPa。 針對實施例1〜3之燈’以成爲分別不同的7種換算 電場強度的方式使其作亮燈驅動，與實驗1相同地測定出 波長342nm之碘分子發光的發光強度。亦即，在實驗2中 ’針對各實施例1〜3之燈’測定出各7種合計2丨種捵分 子發光強度的資料。 被施加至放電空間的電場強度E係如數式1〜3予以 -14- 201103068 計算。V爲施加電壓、Cgap爲平均單位長度的放電空間的 靜電電容、Cglass爲平均單位長度的介電質的靜電電容、 dgap爲放電間隙' dglass爲介電質的厚度、sgap爲放電空間 的介電係數、eg,ass爲介電質的介電係數、W爲電極寬幅 。其中，ε83ρ%ε〇，Sgiass与3·7χε0。ε〇係真空介電係數： 8.8 5 X 1 (Γ 1 2 (F / m)。 [數式Π E = V/dgapX l/Cgap/(2/Cg,ass+l/Cgap) [數式2]201103068 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a lamp which emits ultraviolet light emitted by excitation by using a discharge gas containing helium gas, one or more rare gases and iodine gas. . [Prior Art] In the manufacturing process of a liquid crystal display, a PSA in which a monomer is mixed into a liquid crystal at a crystal pixel, and a monomer is polymerized under tilting of the liquid crystal molecules, thereby fixing the tilt direction of the liquid crystal molecules is employed. : Polymer Sustained Alignment ). According to the disclosed Patent Document 1, the light source for polymerizing the monomer is less damaged to the liquid crystal, the sensitivity of the monomer, the glass transition rate of the liquid crystal, or the like, to irradiate the monomer, for example, at a wavelength of 300- UV at 380 nm (paragraph 0 2 3 7 of Patent Document 1). An ultraviolet light source that radiates light having a wavelength of 300 to 80 nm required for polymerizing a monomer is known in various forms, but it is currently the most suitable stage for the light source of PSA use. For example, a metal halide lamp in which a mercury metal halide which mainly emits ultraviolet light having a wavelength of 365 nm, which is a discharge medium, is used as a discharge medium, is a candidate for a PSA light source. However, when a mercury lamp is to be loaded with a plurality of mercury lamps and an external beam irradiation device, there is a disadvantage that the ultraviolet irradiation device is large in size, and there is a large disadvantage to the environment in order to use mercury as a discharge medium. The metal halide lamp is a state technology of the argon-containing iodine molecule constituting liquid compared with the input electric power (PSA, considering that the light transmittance of the glass is good, the mercury is used as a lamp for mercury, and the purpose of the use is purple. Load-emitting radiation -5-201103068 There is a problem with the lower energy efficiency of the output of ultraviolet light, and the adverse effects on the environment in order to use the halogenated metal as a discharge medium cannot be ignored. a discharge vessel comprising a pair of wall portions made of a dielectric material and a sealing wall portion connected to an end portion of the pair of wall portions, and is suffocating in a discharge space formed inside the discharge vessel It is known that a gas, a halogen gas, or a mixed gas thereof is applied with an alternating voltage or a pulse voltage across the wall portion, thereby emitting ultraviolet rays to the outside of the discharge vessel. The lamp is intended to be loaded with a plurality of excimers. When the lamp constitutes an ultraviolet irradiation device, the ultraviolet irradiation device can be made smaller, and the output of the emitted ultraviolet light can be compared with the input of the electric power. Higher energy efficiency is better, and since a rare gas such as helium or neon is used as a discharge medium, the load on the environment is small, and the utility is advantageous in terms of practicality, so it is promising to be used as a light source for PSA. The lamp as described above is mainly used as a light source for irradiating a surface of a workpiece such as a liquid crystal substrate with vacuum ultraviolet rays to reform the surface of the object to be processed, but it is used for PS A use. The output of ultraviolet light in the wavelength range of 300-380 nm required for the bulk polymerization is not sufficient. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-1 49647 No. 201103068 [Invention] SUMMARY OF THE INVENTION In view of the above, it is an object of the present invention to provide a lamp which efficiently emits ultraviolet light in a wavelength range of from 300 to 80 nm for polymerization of a monomer to provide optimum light. The light source for PSA use. The invention is based on (i) a kind of lamp, which is provided with one type selected from the group consisting of helium and argon. a discharge vessel of a discharge gas of a rare gas and an iodine gas; and a pair of electrodes arranged to face each other so as to sandwich a discharge space formed inside the discharge vessel, to form a wavelength of 3 42 nm by forming an excited iodine molecule The ultraviolet light emitting lamp is characterized in that the discharge space is mixed: a diffusion discharge in a state in which the entire discharge space is discharged, and a strip shape having a spatial contraction compared with the diffusion discharge. In the present invention, the lamp (2) includes a discharge vessel in which a discharge gas containing helium gas and iodine gas is sealed, and a discharge space formed inside the discharge vessel by clamping. a pair of electrodes arranged in a relative manner, a lamp that emits ultraviolet light having a wavelength of 342 nm by forming an excited iodine molecule, wherein the discharge gas contains a concentration of iodine gas of 0.04 to 0.9%, and is to be When the electric field intensity applied to the discharge space is E (kV/cm), the partial pressure of the rare gas is pl (kPa), and the partial pressure of the iodine gas is p2 (kPa), Set a relation formula ·· E / pl 2 (6.6xp2 + 124) xexp (-〇.〇〇93xpl). 201103068 The present invention is directed to (3) a lamp comprising: a discharge vessel in which a discharge gas of iodine gas is sealed; and an arrangement in which a discharge space formed inside the container is opposed to each other to form an excitation The iodine molecule is characterized in that the ultraviolet light having a wavelength of 342 nm is characterized in that the concentration of the iodine gas contained in the discharge gas is 0. The electric field intensity to be applied to the discharge space is set to be, and the partial pressure of the rare gas is set to pl ( When kPa) and the front pressure are set to p2 (kPa), the following relationship is established: Ε/ρ12(236χρ2+1598)χρ1·0 83. According to a fourth aspect of the invention, there is provided a lamp comprising: a discharge gas sealed with a mixed gas of argon gas; and a discharge vessel of iodine gas; and configured to sandwich an opposing direction formed inside the discharge vessel A pair of electrodes, by forming a lamp that emits ultraviolet light having a wavelength of 3 42 nm, characterized in that: the concentration of the iodine gas contained in the body is 0.04 to 0.9%, and the electric field intensity of the space to be applied is set to E. (kV/cm), the lean pressure is pl (kPa), and the partial pressure of the helium is p2. The following equation is established: Ε/ρ12(1 337χρ20 0177)χρ1_0 74. In the present invention, in the above (1) to (4), the discharge gas is more than 丨. The present invention is supplied to the lamps ～120 kHz in (1) to (4). a lamp containing argon gas and a pair of electrodes discharged in the foregoing, emitting light, 0 4 to 0.9%, E (kV/cm, the fraction of iodine gas containing iodine molecules in the discharge discharge space of helium gas and the aforementioned discharge gas In the case where the gas fraction (kP a ) is placed, g is 100 kPa, and the lamp frequency is 1 201103068 (Effect of the invention) According to the invention of claim 1, the diffusion in the state in which the entire discharge space is discharged in the discharge space is mixed. The discharge diffusion discharge is more efficient than the spatially contracted strip shape, and thus the iodine molecule emitted by the excited iodine molecule 1/length 342 nm is efficiently emitted, so that the wavelength range required for polymerization of the monomer for PSA can be obtained. The output of the ultraviolet light is optimized by the inventions of claim 2 to claim 4, and the concentration of the iodine gas contained in the discharge gas in the sealer and the applied intensity in the discharge are optimized to establish a predetermined relationship. Forming an excited iodine molecule I/ at a wavelength of 342 nm to emit light in the inner space of the discharge vessel, thereby increasing the output of ultraviolet light in a wavelength range required for polymerization of the monomer for PSA by claim 5 According to the invention, the total pressure of the discharge vessel body is set to 100 kPa or more, whereby the excited iodine j is formed in the discharge space. Therefore, the peak 値 wavelength iodine molecules are efficiently emitted, and the iodine molecule can be used for PSA use. The output of the long-range ultraviolet light is higher. With the invention of claim 6, since the iodine molecule 1 is not supplied to the lamp, it does not have an average unit time. The number of times of illuminating is extremely short. This illuminates illuminate at a wavelength of 342 nm, and the ultraviolet ray in the wavelength range required for polymerization of the monomer is higher. The radiant wave is emitted before and during the filament discharge. In the middle of the way, it is used to make the electric energy that is in the discharge capacitor electric space, and the molecular light is illuminating, so that the discharge gas frequency required for the discharge gas carrier 1 in the crucible is 342 nm is solved. In the case where the output of the PSA light is -9 - 201103068 [Embodiment] Fig. 1 is a perspective view showing a schematic configuration of the lamp of the present invention. Fig. 2 is a diagram showing the Α·A shown in Fig. 1. Line profile view. Light 1 0 The discharge vessel 1 is formed by a dielectric material such as quartz glass and has a square cross section as shown in Fig. 2. The inside of the discharge vessel 1 is sealed with bismuth and argon. One or more discharge gases of a rare gas and an iodine gas. The discharge vessel 1 is provided with a sealing member 2 disposed in the vicinity of both ends in the longitudinal direction of the discharge vessel, and the discharge vessel 1 is welded to the sealing member 2, whereby the discharge gas is not The outer surface of the lower wall surfaces 3, 4 on the discharge vessel 1 is sandwiched between the discharge space S formed inside the discharge vessel 1 and the discharge capacitor 1 is formed. A pair of electrodes 5 and 6 having a mesh shape are provided in an opposing manner to the electric material. The electrodes 5 and 6 are formed by, for example, vapor deposition so as to form a predetermined mesh pattern. Further, inside the discharge vessel 1, an ultraviolet ray reflection film 7 containing SiO 2 as a main component is formed on the wall surface 4 opposite to the wall surface 3 on the light emission direction side, and ultraviolet rays generated in the discharge space S are ultraviolet rays. The reflection film 7 is reflected in the light emission direction, and is emitted from the wall surface 3 located on the light emission direction side. In the lamp having the above-described configuration, an AC voltage or a pulse voltage of, for example, 1 to 120 kHz is supplied between the pair of electrodes 5 and 6, and the inner wall surface facing the discharge space S is mixed in a state in which discharge occurs over the entire discharge space. The diffusion discharge and the filament discharge having a strip shape which is spatially contracted compared with the diffusion discharge are both. -10-201103068 By the discharge as described above, the positive ion 1 + and the anion oxime enclosed in the iodine I of the discharge vessel and one or more atoms or molecules selected from argon and argon other than iodine are as follows: The reaction is initiated thereby forming an excited iodine molecule 1/. The oximes shown by the following chemical formula are atoms or molecules of iodine, ruthenium and argon. [Chemical Formula 1] I+ + I + Μ —^ 12 + Μ The iodine molecule 1 is excited by the iodide ion 1 + and Γ contained in the discharge gas and the atom or molecule of iodine, helium and argon contained in the discharge gas. On the other hand, an iodine molecule having a radiation peak wavelength of 342 nm is formed in the discharge space. The iodide ion which forms the basis for the formation of the excited iodine molecule is formed by the reaction called the Penning Effect, which causes the iodine to be ionized by quasi-stable excitation of the atomic energy. The Penning effect occurs by quasi-stable quenching of argon and argon, and the energy of the excited atom is slightly higher than the ionization energy of the iodine atom. For reference, the energy of the quasi-stable excitation atom is 10.5 eV, argon is 11.5, ll_7eV, and the ionization energy of the iodine atom is 10.4 eV. Therefore, when a discharge gas containing a rare gas of one or more selected from the group consisting of helium and argon and iodine gas is sealed in the discharge vessel, more iodide ions are generated in the discharge space, and a large number of excited iodine molecules are formed, so that wavelength 3 is expected. The output of the 42 nm iodine molecule emits light. The discharge gas may contain a rare gas other than helium or argon. However, when the partial pressure of the rare gas other than the rare gas is higher than the partial pressure of the rare gas such as helium or argon, the Penning effect is weakened. It must be noted that the partial pressure ratio of other rare gases does not become too high. For example, the partial pressure of a rare gas other than helium or argon is preferably 1-10 - 201103068, which is set to be 10% or less of the partial pressure of helium or argon. Here, the output of the iodine molecule having a wavelength of 342 nm emitted by the excited iodine molecule is determined by the inventors' findings, and (1) the concentration of the iodine gas contained in the discharge gas and (2) are applied to the discharge. The electric field strength of space is particularly relevant. The concentration of iodine in (1) is calculated by dividing the partial pressure P2 of iodine gas by the total pressure of the discharge gas. The total pressure of the discharge gas is approximately equal to the partial pressure pi of a rare gas selected from one or more of helium and argon. Here, the intensity of the electric field of (2) depends on a partial pressure pl of a rare gas selected from one of 氪 and argon, and a partial pressure p2 of iodine I. In the following, an experiment will be described in order to determine the concentration of the iodine gas required for the discharge gas required to increase the luminescence intensity of the excited iodine molecule at a wavelength of 342 nm and the electric field strength applied to the discharge space. In the experiment, the lamps of the following Examples 1 to 3 were used. [Example 1] The lamp of Example 1 was formed into a total length of 200 mm, a width of 42 mm, a height of 14 mm, and a discharge gap of 10 mm by a quartz glass having a wall thickness of 2 mm. It is provided with an electrode formed of gold having a total length of 130 mm and a width of 32 mm. A discharge gas containing helium gas and iodine gas is sealed in the discharge vessel. [Embodiment 2] The lamp of Example 2 is composed of quartz glass having a wall thickness of 2 mm, and has a total length of 200 mm, a width of 42 mm, a height of 14 mm, and a discharge gap of i 〇 mm, and is provided with gold having a total length of 130 mm and a width of 32 mm. The electrode formed. -12- 201103068 A discharge gas containing argon gas and iodine gas is sealed in the discharge vessel. [Embodiment 3] The lamp system of the third embodiment is electrically connected to each other. The lamp system of the third embodiment is composed of quartz glass having a wall thickness of 2 mm, and has a total length of 200 mm, a width of 42 mm, a height of 14 mm, and a discharge gap of 10 mm. The electrode formed of gold having a total length of 130 mm and a width of 32 mm is provided with a mixed gas of a rare gas containing a gas and an argon gas mixed at a mixing ratio of 1:1 and a discharge gas of iodine gas. (Experiment 1) Experiment 1 was carried out in order to investigate the optimum concentration of the concentration of iodine gas contained in the discharge gas. Experiment 1 is directed to each of the lamps of Examples 1 to 3, and in each of Examples 1 to 3, the total pressure of the discharge gas was individually set at 1200 kPa, and the concentration of iodine gas was 0.01 to 2%. No 7 lights. That is, in Experiment 1, a total of 21 lamps of 7 types for each of Examples 1 to 3 were used. Fig. 3 is a view showing the development of the experimental apparatus used for the experiment 1. 22 is an aluminum lampshade, 23 is a ceramic support stand, and is a light receiving section. The light receiving unit 24 is connected to a spectroscope body (not shown) by an optical fiber. The lamp 1 is fixed on the support 23 disposed inside the globe 22, and the light receiving portion 24 is disposed in such a manner as to face the lamp 1 at a position 5 mm from the surface of the lamp 1, and the inside atmosphere of the globe 22 is nitrogen gas. Replacement. With respect to each of the lamps of the first to third embodiments, an alternating current voltage (rectangular wave) is applied to the pair of poles 5 and 6, and the discharge space is discharged to -13,030,068, which is radiated by the gap of the mesh-like electrode 5. The luminescence intensity of the luminescence of the bowl molecule having a wavelength of 342 nm was measured. The results of Experiment 1 are shown in Figure 4. In Fig. 4, the vertical axis indicates the specification data of the iodine molecular luminescence intensity, and the horizontal axis indicates the concentration (%) of the iodine gas contained in the discharge gas. As shown in the figure, in any of the first, second, and third embodiments, the iodine concentration is set to be in the range of 0.04 to 0.9%, and the iodine molecule is excited to emit light of 1/1 as compared with the range in which the iodine concentration is outside the range. The strength was extremely high (Experiment 2). In Experiment 2, when the total pressure of the discharge gas and the partial pressure of iodine gas were respectively set to be constant, in order to increase the luminescence intensity of the iodine molecule 1 of the peak wavelength of 3 42 nm. The lower limit of the required converted electric field strength (hereinafter also referred to as the critical converted electric field strength). The converted electric field strength is obtained by dividing the electric field intensity E by the partial pressure pi of the rare gas. In the lamp systems of the first to third embodiments, the total pressure of the discharge gas (the total of the partial pressure pi of the rare gas and the partial pressure p2 of the iodine gas) was 12 kPa, and the partial pressure p2 of the moth was set to 0.14 kPa. The lamps of Examples 1 to 3 were driven to be light-driven in such a manner that they were different in seven kinds of converted electric field strengths, and the luminescence intensity of iodine molecules having a wavelength of 342 nm was measured in the same manner as in Experiment 1. Namely, in the experiment 2, the data of the total luminous intensity of each of the two kinds of quinones was measured for each of the lamps of the first to third embodiments. The electric field intensity E applied to the discharge space is calculated as Equations 1 to 3 and -14-201103068. V is the electrostatic capacitance of the discharge space where Cgap is the average unit length, Cglass is the dielectric capacitance of the average unit length, dgap is the discharge gap 'dglass is the thickness of the dielectric, and sgap is the dielectric of the discharge space. The coefficient, eg, ass is the dielectric constant of the dielectric, and W is the width of the electrode. Among them, ε83ρ%ε〇, Sgiass and 3·7χε0. Ε〇 system vacuum dielectric coefficient: 8.8 5 X 1 (Γ 1 2 (F / m). [Expression Π E = V/dgapX l/Cgap/(2/Cg, ass+l/Cgap) [Expression 2 ]
Cgap-Sgapx 'W / d g a p [數式3]Cgap-Sgapx 'W / d g a p [Expression 3]
Cgiass = Sgiass x W / dgiass 將實驗2的結果顯示於第5圖。第5圖中，縱軸爲碘 分子發光強度的規格資料、橫軸爲換算電場強度。換算電 場強度基本上顯示爲將電場強度E除以放電氣體的壓力（ 稀有氣體的分壓pl及碘氣的分壓P2的合計）所得的E/( pi+p2 )，但是碘氣的分壓p2遠小於稀有氣體的分壓pi ，因此與將電場強度E除以稀有氣體的分壓pl所得的 E/p 1近似。 由第5圖所示之實驗結果可知以下內容。實施例1的 燈係確認出：藉由將亮燈驅動時的換算電場強度E/p 1設 爲40.8以上，與將換算電場強度E/pl設爲未達40.8時相 比，碘分子發光強度會變得特別高。實施例2的燈係確認 -15- 201103068 出：藉由將亮燈驅動時的換算電場強度E/pl設f 上，與將換算電場強度E/pl設爲未達30.7時相 子發光強度會變得特別高。實施例3的燈係確認 將亮燈驅動時的換算電場強度E/pl設爲37.5以 換算電場強度E/pl設爲未達37.5時相比，碘分 度會變得特別高。 藉由實驗2確認出：臨界換算電場強度係當 的分壓pi爲120kPa、碘氣的分壓爲0.14kPa時 施例1的燈爲40.8、實施例2的燈爲30.7、實施 爲 37.5。 (實驗3 ) 實驗3係分別改變放電氣體所含稀有氣體的 氣的分壓，如實驗2般調查出爲了提高峰値波長 之激發碘分子12#的發光強度所需的換算電場強J 下限値（亦即臨界換算電場強度）。 在實驗3中，在各實施例1〜3中使用稀有 壓P 1及碘氣的分壓p2爲彼此不同的燈各20種f 。稀有氣體的分壓pi係設爲40〜133 kP a的範圍 分壓P2係設爲0.05〜1.09kPa的範圍。 實驗3係針對各實施例1〜3之合計60種的 ’如實驗2般將換算電場強度E/pl的値作各種 其亮燈驅動，與實驗1相同地測定波長3 42nm的 光的強度，藉此調查出臨界換算電場強度E/pl。 各3 0.7以 比，碘分 出：藉由 上，與將 子發光強 稀有氣體 ，分別實 例3的燈 全壓及碘 爲 3 42 nm :E/pl 的 氣體的分 ί計60種 、碘氣的 燈的各個 改變而使 碘:分子發 實驗3的 -16- 201103068 結果顯示於表1。 [表1] 稀有氣體分壓pi (kPa) E/pl (V/kPa/cm) 挑分壓 p2 (kPa) 0.05 0.14 0.57 1.09 實施例1 40 88.2 88.4 90.3 92.7 67 65.1 67.1 67.3 69.0 93 50.3 51.0 51.7 52.8 120 40.2 40.8 41.3 42.3 133 37.3 37.6 37.9 38.6 實施例2 40 75.1 78.3 81.5 86.0 67 48.9 48.9 53.6 56.9 93 36.3 38.5 40.3 42.3 120 29.7 30.7 32.0 33.5 133 28.1 28.8 30.6 32.5 實施例3 40 85.1 85.5 87.3 88.4 67 54.8 56.2 57.7 58.3 93 42.6 43.8 45.7 45.1 120 36.9 37.5 38.2 38.7 133 35.1 34.9 35.7 36.3 表1係將針對各實施例1〜3之合計60種的燈的各個 所測定出的臨界換算電場強度E/p 1的數値加以彙整者。 表2係將表1所示之各實施例1〜3之燈的臨界換算電場 強度E/pl按每個碘氣的分壓p2而作爲稀有氣體的分壓pi 的函數予以近似的近似式加以彙整者。 -17- 201103068 [表2] 碗分壓p2 (kPa) 近似式E/pl 係數 0.05 124 X exp(-0.0093xpl) 124 實施例1 0.14 125 xexp(-0.0093xpl) 125 0.57 128 xexp(-0.0093xpl) 128 1.09 131 x exp(-0.0093xpl) 131 0.05 1595 χρΓ0 83 1595 實施例2 0.14 1640 χ ρΓ0·83 1640 0.57 1744 χρΓ0·83 1744 1.09 1849 χ ρΓ083 1849 0.05 1264 χ ρΓ0 74 1264 眘施仿|| 1 0.14 1298 χ ρΓ0 74 1298 員卿J 0.57 1326 χ ρ1_0 74 1326 1.09 1335 χ ρΐ*074 1335 爲供參考’關於表2所示之各近似式的求法，補充說 明。第6圖係說明用以將表1所示之臨界換算電場強度 E/pl的數値作爲稀有氣體的分壓pi的函數予以近似的近 似方法的圖。在該圖中，縱軸爲臨界換算電場強度E/pl、 橫軸爲稀有氣體的分壓pl。在該圖中，爲方便起見，表1 所示臨界換算電場強度之中，僅針對碘的分壓p2爲 0· 1 4kPa的縱列’按各實施例1〜3之各燈個別作描點。 第6圖所示之5個菱形描點係表示表1之實施例1的 欄位中’碘的分壓p2爲0.1 4kP a且稀有氣體的分壓pl分 別爲 40kPa、67kPa、93kPa、120kPa、133kPa 的 5 個臨界 換算電場強度的數値資料。將第6圖所示之菱形的各插點 連結後的曲線係如表2之實施例1的欄位由上數來第2行 所示作爲稀有氣體的分壓pl的函數予以近似。 -18 - 201103068 第6圖所示之5個正方形描點係表示表1之實施例2 的欄位中，蛛的分壓p2爲O.HkPa且稀有氣體的分壓pi 分別爲 40kPa、67kPa、93kPa、120kPa、133kPa 的 5 個臨 界換算電場強度的數値資料。將第6圖所示之正方形的各 描點連結後的曲線係如表2之實施例2的欄位由上數來第 2行所示作爲稀有氣體的分壓pi的函數予以近似。 第6圖所示之5個三角形描點係表示表丨之實施例3 的欄位中’碘的分壓p2爲0.14kPa且稀有氣體的分壓pi 分別爲 40kPa、67kPa、93kPa、120kPa、133kPa 的 5 個臨 界換算電場強度的數値資料。將第6圖所示之三角形的各 描點連結後的曲線係如表2之實施例3的欄位由上數來第 2行所示作爲稀有氣體的分壓p1的函數予以近似。 如第.6圖所示，表示各實施例1〜3之燈的臨界換算 電場強度E/pl與稀有氣體分壓pi的關係的曲線圖，在該 圖的紙面中，由下方側依照實施例2、實施例3、實施例1 的順序並列配置。實施例3的曲線圖係位於實施例1的曲 線圖與實施例2的曲線圖的大槪中間位置。 表2所示之其他近似式係如上所述針對碘的分壓 0.05kPa ' 0.14kPa、0.57kPa、1.09kPa 的各個，藉由按每 個各實施例1〜3的燈進行近似所得的稀有氣體的分壓P 1 的函數。 此外，表2所示之各實施例1〜3之燈之臨界換算電 場強度E/pl的近似式係可形成爲稀有氣體的分壓pi及碘 氣的分壓P 2的函數而如以下所示作近似。 -19- 201103068 <實施例1 > [數式4] E/pl=(6.6xp2+124)xexp(-0.0093xpl) <實施例2 > [數式5] Ε/ρ1=(236χρ2+1 598)χρ1'083 <實施例3 > [數式6] Ε/ρ 1 =( 1 3 3 7 χρ 2 0 017 7 )χρΓ0·74 如前所述係 限値。因此 方式，分別 含稀有氣體 由激發碘分 數式4〜6所示之臨界換算電場強度E/pl 爲了提高激發碘分子的發光強度所需的下 ，各實施例1〜3之燈係以成立以下關係式的 適當設定臨界換算電場強度E/p 1、放電氣體所 的分壓pl及碘氣的分壓p2，藉此可特別提高 子1/所放射之波長3 42ηπι的發光強度。 <實施例1 > [數式7] E/pl^(6.6xp2+124)xexp(-0.0093xpl) -20- 201103068 <實施例2 > [數式8] E/pl^(236xp2+1598)xpr0·83 <實施例3 > [數式9] E/pl ^ ( 1 3 3 7 xp 2 0 017 7 )xpr0·74 如上所示，本發明之各實施例1〜3之燈由於以（1)放 電氣體所含碘氣的濃度被設爲最適範圍，並且（2)換算電場 強度E/p 1成爲臨界換算電場強度以上的條件作亮燈驅動 ，因此可使由碘發光分子1/所放射之峰値波長爲342nm 的紫外光的放射強度比習知的燈爲特別高。該理由雖不明 確，但考慮如以下所示。 在碘氣的濃度在0.04〜0.9%的範圍內並且換算電場強 度E/p 1滿足數式7〜9之關係的各實施例1〜3之燈中， 藉由實驗3確認出遍及放電空間全體而發生放電的狀態下 的擴散放電、及具有與擴散放電相比在空間上呈收縮的帶 狀形狀的燈絲放電等雙方在放電空間混合發生。第7圖係 以模式顯示混合發生擴散放電與燈絲放電等雙方的放電空 間的態樣。該圖的K爲擴散放電' F爲燈絲放電。若發生 燈絲放電時，由於爲空間上呈收縮的形狀，1因此與擴散放 電相比，電流密度較高，因此多數碘離子1+、Γ會存在於 放電空間。因此，由於在放電空間中變得容易形成激發碘 -21 - 201103068 分子I2*，因此由激發碘分子12*所放射之峰値波長爲 3 4 2nm的碘分子發光的放射強度會變高。 相對於此，在碘氣的濃度在〇.〇4〜0.9%的範圍外並且 換算電場強度E/pl不滿足數式7〜9之關係的各實施例1 〜3之燈中，藉由實驗3確認出在放電空間僅發生燈絲放 電。第8圖係以模式顯示燈絲放電單獨發生的放電空間的 態樣。該圖的F爲燈絲放電。在如上所示之燈中’由於在 放電空間中僅局部形成放電，因此由激發碘分子1/所放 射之峰値波長爲342 nm的碘分子發光的放射強度會降低。 峰値波長爲342ητη的碘分子發光，如前所述，係由藉 由使碘離子1 +及Γ衝撞氪、氬等稀有氣體所形成的激發碘 分子1/所放射。亦即，激發碘分子係藉由增多放電氣 體所含稀有氣體的原子或分子而變得容易形成。因此，藉 由提高放電氣體的全壓（稀有氣體的分壓pl+碘氣的分壓 ρ2的合計），衝撞碘離子1 +及Γ的稀有氣體的原子或分子 會增加而使激發碘分子1/變得容易形成，因此可提高峰 値波長爲342nm之碘分子發光的強度。本發明之各實施例 1〜3之燈係以將放電氣體的全壓（pl+p2)設爲lOOkPa 以上爲佳。 其中，本發明之各實施例1〜3之燈由於具有若放電 氣體的溫度過高時，放射峰値波長3 42 nm之碘分子發光的 激發碘分子〗2_會分解而恢復成原本的碘離子1 +或Γ的特 性，因此以將放電氣體的溫度維持爲最適爲佳。各實施例 1〜3之燈爲了將放電氣體的溫度維持爲最適，以藉由供給 -22- 201103068 1〜120kHz的交流電壓或脈衝電壓來作亮燈驅動爲佳。巷 供給至燈的交流電壓或脈衝電壓的頻率超過120kHz時， 放電氣體的溫度會變得過高而使激發碘分子1，容易分解 ，因此會有峰値波長342nm之碘分子發光的強度降低的舞 病。此外，若交流電壓或脈衝電壓的頻率低於1kHz時， 平均單位時間的發光次數會變少，因此會有峰値波長 3 42nm之碘分子發光的強度降低的弊病。 【圖式簡單說明】 第1圖係顯示本發明之燈之槪略構成的斜視圖。 第2圖係第1圖所示之A-A線剖面圖。 第3圖係顯示用以進行實驗1所使用的實驗裝置的槪 略構成的槪念圖。 第4圖係顯示碘氣的濃度與碘分子發光強度的關係圖 〇 第5圖係顯示換算電場E/pl與碘分子發光強度的關 係圖。 第6圖係說明用以將表1所示之臨界換算電場強度 E/pl的數値作爲稀有氣體的分壓pi的函數予以近似的近 似方法的圖。 第7圖係以模式顯示擴散放電與燈絲放電的雙方混在 發生的放電空間的態樣。 第8圖係以模式顯示燈絲放電單獨發生的放電空間的 態樣。 -23- 201103068 【主要元件符號說明】 1 :放電容器 2 :密封構件 3、4 :壁面 5、6 :電極 7 :紫外線反射膜 10 :燈 2 2 :燈罩 23 :支持台 24 :受光部 -24-Cgiass = Sgiass x W / dgiass The results of Experiment 2 are shown in Figure 5. In Fig. 5, the vertical axis represents the specification data of the luminescence intensity of iodine molecules, and the horizontal axis represents the converted electric field intensity. The converted electric field intensity is basically shown as E/( pi+p2 ) obtained by dividing the electric field intensity E by the pressure of the discharge gas (the total pressure pl of the rare gas and the partial pressure P2 of the iodine gas), but the partial pressure of the iodine gas P2 is much smaller than the partial pressure pi of the rare gas, and thus is similar to E/p 1 obtained by dividing the electric field intensity E by the partial pressure pl of the rare gas. The following results are known from the experimental results shown in Fig. 5. In the lamp system of the first embodiment, it was confirmed that the converted electric field intensity E/p 1 when the lighting was driven was 40.8 or more, and the iodine molecular luminous intensity was compared with when the converted electric field intensity E/pl was less than 40.8. Will become very high. The lamp system of the second embodiment is confirmed -15-201103068. The phase electric light intensity is set by setting the converted electric field intensity E/pl when the lighting is driven, and setting the converted electric field intensity E/pl to less than 30.7. It became very high. In the lamp system of the third embodiment, the converted electric field intensity E/pl was 37.5, and the converted electric field intensity E/pl was set to be less than 37.5, and the iodine index was extremely high. It was confirmed by Experiment 2 that the critical converted electric field strength was when the partial pressure pi was 120 kPa, the partial pressure of iodine gas was 0.14 kPa, the lamp of Example 1 was 40.8, the lamp of Example 2 was 30.7, and the pressure was 37.5. (Experiment 3) Experiment 3 is a method of changing the partial pressure of the gas of the rare gas contained in the discharge gas, and the lower limit of the converted electric field strength J required to increase the luminescence intensity of the excited iodine molecule 12# in order to increase the peak enthalpy wavelength. (ie critically converted electric field strength). In Experiment 3, in each of Examples 1 to 3, the rare pressure P 1 and the partial pressure p2 of the iodine gas were used as 20 kinds of lamps each having different lamps. The partial pressure pi of the rare gas is set to be in the range of 40 to 133 kPa, and the partial pressure P2 is set to be in the range of 0.05 to 1.09 kPa. In the experiment 3, 60 kinds of the total of the converted electric field strengths E/pl were driven as shown in Experiment 2, and the intensity of light having a wavelength of 3 42 nm was measured in the same manner as in Experiment 1. From this, the critical converted electric field strength E/pl was investigated. Each of the three 0.7 ratios, iodine separation: by the upper, and the sub-luminous strong gas, respectively, the lamp full temperature of Example 3 and iodine is 3 42 nm: E / pl of gas, 60 kinds of iodine gas The various changes in the lamp made iodine: Molecular Experiment 3 -16-201103068 The results are shown in Table 1. [Table 1] Rare gas partial pressure pi (kPa) E/pl (V/kPa/cm) Picking pressure p2 (kPa) 0.05 0.14 0.57 1.09 Example 1 40 88.2 88.4 90.3 92.7 67 65.1 67.1 67.3 69.0 93 50.3 51.0 51.7 52.8 120 40.2 40.8 41.3 42.3 133 37.3 37.6 37.9 38.6 Example 2 40 75.1 78.3 81.5 86.0 67 48.9 48.9 53.6 56.9 93 36.3 38.5 40.3 42.3 120 29.7 30.7 32.0 33.5 133 28.1 28.8 30.6 32.5 Example 3 40 85.1 85.5 87.3 88.4 67 54.8 56.2 57.7 58.3 93 42.6 43.8 45.7 45.1 120 36.9 37.5 38.2 38.7 133 35.1 34.9 35.7 36.3 Table 1 is the number of critical converted electric field strengths E/p 1 measured for each of the total of 60 lamps of each of Examples 1 to 3値 to the remittance. Table 2 is an approximate approximation of the critically-converted electric field strength E/pl of each of the lamps of Examples 1 to 3 shown in Table 1 as a function of the partial pressure pi of the iodine gas as a function of the partial pressure pi of the rare gas. Consolidator. -17- 201103068 [Table 2] Bowl partial pressure p2 (kPa) Approximate E/pl coefficient 0.05 124 X exp(-0.0093xpl) 124 Example 1 0.14 125 xexp(-0.0093xpl) 125 0.57 128 xexp(-0.0093xpl ) 128 1.09 131 x exp(-0.0093xpl) 131 0.05 1595 χρΓ0 83 1595 Example 2 0.14 1640 χ ρΓ0·83 1640 0.57 1744 χρΓ0·83 1744 1.09 1849 χ ρΓ083 1849 0.05 1264 χ ρΓ0 74 1264 Shen Shi Imitation|| 1 0.14 1298 χ ρΓ0 74 1298 Member J 0.57 1326 χ ρ1_0 74 1326 1.09 1335 χ ρΐ*074 1335 For reference, please refer to the method of finding the approximations shown in Table 2. Fig. 6 is a view for explaining a similar method for approximating the number 値 of the critical converted electric field intensity E/pl shown in Table 1 as a function of the partial pressure pi of the rare gas. In the figure, the vertical axis represents the critical converted electric field intensity E/pl, and the horizontal axis represents the partial pressure pl of the rare gas. In the figure, for the sake of convenience, among the critically-converted electric field strengths shown in Table 1, only the column of the partial pressure p2 of iodine is 0·1 4 kPa, and the lamps of the respective embodiments 1 to 3 are individually described. point. The five rhombic traces shown in Fig. 6 indicate that the partial pressure p2 of iodine in the column of the first embodiment of Table 1 is 0.1 4 kP a and the partial pressures pl of the rare gases are 40 kPa, 67 kPa, 93 kPa, and 120 kPa, respectively. Data of five critically converted electric field strengths at 133 kPa. The curve obtained by connecting the respective interpolated points of the rhombus shown in Fig. 6 is approximated by the function of the partial pressure pl of the rare gas as shown in the second row from the top in the second embodiment. -18 - 201103068 The five squares shown in Fig. 6 indicate that in the column of the second embodiment of Table 1, the partial pressure p2 of the spider is O.HkPa and the partial pressures pi of the rare gases are 40 kPa and 67 kPa, respectively. Data of five critically converted electric field strengths of 93 kPa, 120 kPa, and 133 kPa. The curve obtained by connecting the respective squares shown in Fig. 6 is approximated by the function of the partial pressure pi of the rare gas as shown in the second row of the second embodiment. The five triangular points shown in Fig. 6 indicate that the partial pressure p2 of iodine in the column of Example 3 is 0.14 kPa and the partial pressures pi of the rare gases are 40 kPa, 67 kPa, 93 kPa, 120 kPa, and 133 kPa, respectively. The data of the five critically converted electric field strengths. The curve obtained by connecting the respective points of the triangle shown in Fig. 6 is approximated by the function of the partial pressure p1 of the rare gas shown in the second row from the top in the second embodiment. As shown in Fig. 6, a graph showing the relationship between the critical converted electric field intensity E/pl and the rare gas partial pressure pi of the lamps of Examples 1 to 3 is shown in the lower side of the paper surface according to the embodiment. 2. The order of Embodiment 3 and Embodiment 1 is arranged in parallel. The graph of the third embodiment is located at the middle of the large curve of the graph of the first embodiment and the graph of the second embodiment. The other approximate expressions shown in Table 2 are as follows for the partial pressure of iodine of 0.05 kPa '0.14 kPa, 0.57 kPa, and 1.09 kPa, and the approximate rare gas is obtained by the lamps of each of Examples 1 to 3. The function of the partial pressure P 1 . Further, the approximate expression of the critical converted electric field intensity E/pl of the lamps of each of Examples 1 to 3 shown in Table 2 can be formed as a function of the partial pressure pi of the rare gas and the partial pressure P 2 of the iodine gas as follows. Approximate. -19-201103068 <Example 1 > [Expression 4] E/pl=(6.6xp2+124)xexp(-0.0093xpl) <Example 2 > [Formula 5] Ε/ρ1=(236χρ2 +1 598) χ ρ1 '083 <Example 3 > [Expression 6] Ε / ρ 1 = ( 1 3 3 7 χ ρ 2 0 017 7 ) χ ρ Γ 0 · 74 The 如前所述 is limited as described above. Therefore, in each mode, the critically-converted electric field intensity E/pl represented by the excited iodine fractions 4 to 6 is contained in order to increase the luminescence intensity of the excited iodine molecules, and the lamp systems of the respective embodiments 1 to 3 are established as follows. The relationship between the critically-converted electric field intensity E/p1, the partial pressure pl of the discharge gas, and the partial pressure p2 of the iodine gas can be appropriately set, whereby the luminous intensity of the wavelength of 3/4 ηπ emitted by the sub-1/1 can be particularly improved. <Example 1 > [Expression 7] E/pl^(6.6xp2+124)xexp(-0.0093xpl) -20- 201103068 <Example 2 > [Expression 8] E/pl^(236xp2 +1598)xpr0·83 <Example 3 > [Equation 9] E/pl ^ (1 3 3 7 xp 2 0 017 7 )xpr0·74 As shown above, each of Examples 1 to 3 of the present invention The lamp is driven by iodine because the concentration of the iodine gas contained in the discharge gas is set to an optimum range, and (2) the converted electric field intensity E/p 1 is equal to or higher than the critical conversion electric field strength. The radiance of the ultraviolet light having a peak wavelength of 342 nm emitted by the molecule 1 is particularly high than that of the conventional lamp. Although this reason is not clear, consider the following. In the lamps of the respective embodiments 1 to 3 in which the concentration of the iodine gas was in the range of 0.04 to 0.9% and the converted electric field intensity E/p 1 satisfies the relationship of the formulas 7 to 9, the entire discharge space was confirmed by the experiment 3. The diffusion discharge in the state in which the discharge occurs and the filament discharge having a strip shape which is spatially contracted compared with the diffusion discharge are mixed in the discharge space. Fig. 7 is a view showing a state in which a discharge space such as a diffusion discharge and a filament discharge is mixed in a mode. In the figure, K is a diffusion discharge 'F is a filament discharge. In the case of filament discharge, since it has a spatially contracted shape, 1 therefore, the current density is higher than that of diffusion discharge, so that most of the iodide ions 1+ and Γ are present in the discharge space. Therefore, since the excited iodine -21 - 201103068 molecule I2* is easily formed in the discharge space, the radiant intensity of the iodine molecule emitted by the excited iodine molecule 12* having a peak wavelength of 342 nm becomes high. On the other hand, in the lamps of each of Examples 1 to 3 in which the concentration of iodine gas was outside the range of 〜.〇4 to 0.9% and the converted electric field intensity E/pl did not satisfy the formulas 7 to 9, 3 Confirm that only filament discharge occurs in the discharge space. Fig. 8 is a view showing the state of the discharge space in which the filament discharge occurs alone in a mode. F of the figure is a filament discharge. In the lamp as shown above, since only a discharge is locally formed in the discharge space, the radiant intensity of luminescence of the iodine molecule having a peak wavelength of 342 nm emitted by the excited iodine molecule 1 is lowered. The iodine molecule having a peak wavelength of 342 ητη emits light, and as described above, it is emitted by the excited iodine molecule 1 formed by causing iodide ion 1 + and helium to collide with a rare gas such as argon. That is, the excited iodine molecule is easily formed by increasing atoms or molecules of a rare gas contained in the discharge gas. Therefore, by increasing the total pressure of the discharge gas (the partial pressure of the rare gas pl + the total partial pressure ρ2 of the iodine gas), the atoms or molecules of the rare gas that collide with the iodide ion 1 + and helium increase, and the excited iodine molecule 1/ Since it is easy to form, the intensity of luminescence of iodine molecules having a peak wavelength of 342 nm can be improved. The lamp of each of the first to third embodiments of the present invention preferably has a total pressure (pl + p2) of the discharge gas of 100 kPa or more. In the lamp of each of the first to third embodiments of the present invention, when the temperature of the discharge gas is too high, the excited iodine molecule luminescence of the iodine molecule having a radiation peak wavelength of 3 42 nm is decomposed and restored to the original iodine. The characteristics of the ions 1 + or ytterbium are therefore preferable in order to maintain the temperature of the discharge gas as optimum. In order to maintain the optimum temperature of the discharge gas, the lamps of the first to third embodiments are preferably driven by an alternating voltage or a pulse voltage of -22 to 201103068 1 to 120 kHz. When the frequency of the alternating voltage or the pulse voltage supplied to the lamp exceeds 120 kHz, the temperature of the discharge gas becomes too high, and the iodine molecule 1 is excited to be easily decomposed, so that the intensity of iodine molecules having a peak wavelength of 342 nm is lowered. The dance is ill. Further, when the frequency of the alternating voltage or the pulse voltage is less than 1 kHz, the number of times of light emission per unit time is small, and thus the intensity of luminescence of iodine molecules having a peak wavelength of 3 42 nm is lowered. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a schematic configuration of a lamp of the present invention. Fig. 2 is a cross-sectional view taken along line A-A shown in Fig. 1. Fig. 3 is a view showing a schematic diagram of a schematic configuration of the experimental apparatus used in Experiment 1. Fig. 4 is a graph showing the relationship between the concentration of iodine gas and the luminescence intensity of iodine molecules. Fig. 5 is a graph showing the relationship between the converted electric field E/pl and the luminescence intensity of iodine molecules. Fig. 6 is a view for explaining a similar method for approximating the number 値 of the critical converted electric field intensity E/pl shown in Table 1 as a function of the partial pressure pi of the rare gas. Fig. 7 is a view showing a mode in which both the diffusion discharge and the filament discharge are mixed in the generated discharge space. Fig. 8 is a view showing the state of the discharge space in which the filament discharge occurs alone in a mode. -23- 201103068 [Explanation of main component symbols] 1 : Discharge capacitor 2 : Sealing members 3 , 4 : Wall surface 5 , 6 : Electrode 7 : Ultraviolet reflecting film 10 : Lamp 2 2 : Lamp cover 23 : Support table 24 : Light receiving unit - 24 -