201042149 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種真空泵外殻，尤其是一種由鑄鐵 或球墨鑄鐵所製成之外殼。 【先前技術】 在一由一外殼所界定之吸入室中，真空泵包含複數個 泵元件。具體而言，真空泵係螺旋式泵、單段或多段魯氏 泵（Roots)、旋轉葉輪泵、或爪式泵。爲了產生真空’有必 〇 要在諸泵元件與吸入室之內壁間形成一盡可能小的間 隙。有關此一方面，真空泵有必要被操作於盡可能恆定之 操作溫度下，以便可避免由於外殼與諸栗元件之不同熱膨 脹而導致在該間隙方面的變化。 提供具有冷卻肋件之真空泵外殼並藉由一氣流來冷 卻此諸泵外殼之作法係屬習知的。然而，在這些背景技藝 中，外殼之均勻且經定向的冷卻可槪括地僅利用一些特殊 措施而達成，諸如利用一具有經定向之空氣導引的外箱及 Ο —外部鼓風機系統（由諸泵軸中之一者所驅動或具有一個 別之驅動裝置）。在此處，特定之冷卻性能（每單位面積之 熱流）係低的。除此之外，將熱消散至環境中通常係不樂 見的。尤其在無麈室環境中，氣流的發生必須盡可能地被 避免。此外，鼓風機係令人討厭的噪音來源。 空氣冷卻之諸額外缺點係產生自較低之冷卻強度以 及對許多外部影響或干擾（諸如局部拖曳或移除覆蓋）之 敏感度。 201042149 另外，用水或冷卻劑液體來冷卻真空泵外殻之作法係 習知的。實現水冷卻需要特殊之結構措施。在一方面，水 必須被盡可能接近地導引至諸待冷卻部分以便可獲得好 的冷卻效果。另一方面，由於其腐蝕性，水無法與大部分 無特殊保護措施之材料合用。爲了避免腐蝕，例如可用不 會腐蝕之材料，諸如不銹鋼或某些鋁合金。然而，此類材 料昂貴且不符合發生在真空泵中之其他要求，諸如抗高溫 性，尤其是大於2 5 0°C者。另外，亦可將與水相接觸的諸 〇 表面塗以塗料。然而，確實地將多個位於外殼內側處之相 對應通道塗以塗料係非常錯綜複雜的。此塗料必須藉由浸 沒或藉由轉動及翻攪動作來分佈液體塗料而被予完成。另 外，電鍍表面處理法（例如鍍鋅或鍍鎳）係習知用於鑄鋼及 鑄鐵，而硬質陽極處理係習知用於鋁。然而，這些亦爲非 常複雜之製程。此外。犧牲陽極之使用係習知的，其也爲 一複雜方法且無法可靠地避免腐蝕在諸內部冷卻通道中 發生。 ® 除了使用水作爲冷卻劑，亦可使用特殊之冷卻劑液 體。然而，此僅在封閉型之複雜冷卻迴路配合使用時才可 能。尤其，這有必要藉由必須額外設置之熱交換器才能冷 卻此冷卻劑。 在金屬鑄件之真空泵外殻中設置多個冷卻通道也可 藉由利用機械製造（尤其銑製及鑽製）以較後地形成此諸 通道而達成。這是極端複雜的，因爲此方式必須耗費時間 來進行額外之工作步驟。也可在鑄造過程中就已形成多個 201042149 冷卻通道。爲達此目的，砂心（sand core)將必須被設置。 再次地，這是一項耗費時間之方法，且更甚的是冷卻水可 能被殘留的砂污染一段長的時間。另外，設置鑄入式砂模 (sand-molded)製造通道可僅在設計、截面與路線上受到嚴 厲之限制下才進行，因爲此種成型係利用在鑄造過程中必 須具有對應穩定度之砂心予以達成。設置此類之通道因此 導致對於設計與操作條件（諸如強度、容許之操作溫度、 及介質相容性）產生強烈之限制。 〇 【發明内容】 本發明之一目的在於提供一種真空泵外殻，尤指一種 由鑄鐵或球墨鑄鐵所製成之真空泵外殼，其允許一冷卻液 體以一簡單之方式進行冷卻。 根據本發明，上述之目的係憑藉分別被界定於申請專 利範圍第1及1 7項中之諸特徵而達成。 尤其由鑄鐵或球墨鑄鐵（spheroidal cast)所製之真空 泵外殼具有一吸入室，其中配置有多個泵元件。此吸入室 ^ 係與一入口及一出口相連接，使得此泵元件之作動（特別 是轉動）可在泵入口處形成真空。在此操作中，本真空栗 外殻尤其經由被栗送之介質的壓縮而被加熱。爲利用一諸 如水之冷卻流體來冷卻如本發明所提供之真空泵外殻，此 真空泵外殼具有複數個被配置在此外殼之一外側上的腹 板。具體而言，此諸腹板被配置成使得兩個相鄰腹板可形 成一具有大致呈U形之截面的溝槽或通道。較佳地，此 諸腹板之截面係略呈圓錐狀，以利於其等從一澆注砂箱 201042149 (molding box)處脫模。砂心之使用僅在特殊情形時才需 要’例如具有非常狹窄腹板之情形下。較佳地，腹板通常 被成形爲不具有任何倒凹部（undercut)或類似者，如此便 有利於脫模。根據本發明，一蓋件係與此外殼相連接。如 本發明所設置的’此蓋間被形成可伸展遍及至少兩個腹 板，並因此封閉了由兩個相鄰腹板所構成之該U形通道。 因此’一冷卻通道藉由設置此蓋件而被形成。此冷卻通道 藉由諸相鄰腹板中之兩個相對立側壁及此蓋件之一內側 〇 所構成’其中此諸側壁及此蓋件之內側當然可被加以襯 裡。 本發明之此諸冷卻通道設計的一項特別優點在於：這 些冷卻通道亦可用鑄鐵或球墨鑄件予以實現。尤其，真空 泵外殼通常係由鑄鐵或球墨鑄件所製成，此乃因爲這些鑄 造方法提供絕佳之塑形可能性，且因而所製成之外殼將適 於承受尤其大於250OC之高操作溫度。 在本發明之一尤佳實施例中，界定冷卻通道之諸腹板 Ο 的側壁並未經處理。他們係未經處理的鑄件表面。此係有 利的，因爲諸未經處理之表面提供一足夠之腐蝕防護。鑄 鐵或球墨鑄件之未經處理的鑄件表面提供足夠之腐蝕防 護，甚至在當冷卻水被使用時。另外，鑄鐵或球墨鑄件具 有優異於不銹鋼鑄件之優點在於：不銹鋼鑄件在塑型上承 擔更多明顯之限制且更昂貴。 憑藉相當寬之冷卻通道，亦即一位於諸相鄰腹板間之 相當大距離，此冷卻通道藉由外殼之外側的一區段而被額 201042149 外地界定。此外殻之外側的區段係位於該兩相鄰腹板件之 間。在一較佳實施例中，冷卻通道邊界之此一部分亦並未 經處理。 在一較佳實施例中，因爲蓋件之內側係成平面狀’故 諸腹板頂部（亦即朝向此蓋件之諸腹板的頂側）成被處理 過是適當的。因此，將確保此蓋之內側可平面地緊靠於此 諸腹板頂部上。爲了密封諸相鄰之冷卻通道區段’ 一密封 件被設置在諸腹板頂部與蓋件的內側之間。然而’因爲諸 Ο 相鄰冷卻通道區段間之某種程度的洩漏並非一個大缺 點，故此密封件並不是極爲必要的。 同樣地，可使此蓋件具有一凸塊形狀，藉此使其具有 一凹陷之內側。此將可提供一弧形（尤爲凸出）之外殼部 分，其具有多個大致伸展於徑向方向上之向外定向腹板。 在此，此蓋件被體現爲一管件或係由經捲起之板片金屬所 製成。被設置在該外殼處之諸腹板可經由使用多個被對應 地形成之脫模體而被鑄成。具體而言，這些可爲經車製或 ® 經圓銑之腹板件。此設計尤其適合於具有一大致成圓柱形 截面或多個對應地成凸起之弧形部分的外殼。 本發明之一尤佳實施例中設有一較佳地伸展遍及蓋 件之整個內側的二維密封件。此具有之優點尤其在於：除 具有密封之功能外，此密封件另也可對蓋件之內側提供腐 蝕防護。此密封件可防止冷卻介質（尤其冷卻水）與蓋件之 內側相接觸，因而得以避免在此表面處發生腐蝕。 較佳地，諸腹板頂部亦未經處理並因此具有一凸出弧 201042149 形外表面。此係有利的，因爲沒有不樂見的腐蝕可發生在 此腹板頂部處。爲了仍可確保諸相鄰冷卻通道區段的密封 性，較佳地設置一相當厚之密封件。此密封件被腹板頂部 所變形或壓縮，以便可在凸起之腹板頂部與蓋件的平面狀 內側之間提供密封。同樣在此實施例中，較佳地設置一伸 展遍及蓋件之整個內側的二維密封件’而此密封件特定地 係一平坦的密封件。 同樣由於經處理之腹板頂部，所以有利地係至少在這 由諸腹板頂部所構成之區域中提供一相當厚之密封’而此 ^ 密封之寬度係大於此腹板頂部之經處理部分。此具有之優 點在於：在組裝期間，此密封在此腹板頂部區域中被擠壓 或壓縮，並因此側向伸出至此腹板頂部之諸側邊並達諸腹 板之側壁上。因此可確保的是，冷卻劑（尤其冷卻水）不會 與此腹板頂部之經處理表面相接觸，如此避免腐蝕發生。 同樣地，在此實施例中，一較佳伸展遍及蓋件整個內側之 二維密封件係再次爲較好的。 取決於鑄造方法之品質，許多大約1至2 mm之不平 Q 整將可能發生。因爲基於腐蝕防護之理由而不處理諸腹板 頂部是爲有利的，所以若此諸不平整存在，則較佳係提供 一平坦之密封件，而此密封具有3 mm或更大之厚度。提 供未經處理之腹板頂部另具有之優點在於可省略一工作 步驟。爲了將蓋件緊繫至外殼，較佳地設置有多個繫緊腹 板。爲此目的，諸腹板中之一部分被構形爲繫緊腹板，尤 其是相對於一蓋件被安置於諸橫向外側上之諸腹板。此諸 繫緊腹板被構形爲使其可被用以緊繫該蓋件。爲達此一目 的，此諸繫緊腹板將被設置，其特別地具有一足夠之寬 201042149 度，以便使此諸繫緊腹板可配備有孔以收納繫緊螺絲。較 佳地’此諸繫緊腹板之諸腹板頂部被處理，以便可形成一 平面狀表面。此具有之優點在於：尤其是藉由設置一平坦 之密封件，將可在蓋件與諸繫緊腹板之間有一良好的密 封。當然，此密封亦可使用〇形環、密封膏、或其他之密 封件而達成。本發明之一特別優點在於：諸蓋件係可移除 的。例如，當經由螺絲而將蓋件繫緊時，將可藉由鬆開螺 絲而移除蓋件。此係有利的，因爲諸冷卻通道例如爲了清 Ο 理之目的而可易於進入。同樣地，如果此諸冷卻通道例如 藉由塗料而被防護以免於腐蝕，則當諸蓋件被移出時，將 可輕易地修理或更新此塗料塗層。當諸冷卻通道之內側被 處理，且然後配備一抗腐蝕劑（例如塗料）時，則本發明在 外殼之外側上配備多個腹板之諸冷卻通道的設計則是有 利的，因爲其可例如藉由噴漆而簡單地在其上塗敷此抗腐 蝕劑。 尤佳地，蓋件被構形爲一個二維元件。被此蓋件所連 接之諸腹板因此被設計成使得諸腹板頂部較佳地被配置 〇 在一平面上。 在一尤佳之實施例中，複數個腹板被配置在外殼之外 側上，以便可形成一曲折狀之冷卻通道。 尤佳地，諸腹板被配置並構形爲使得一流動通道之截 面面積至少在外殼之側邊區域中沿著此流動通道之長度 成大致恆定。此具有之優點在於：流動速度至少在此流動 通道之一部分中係大致恆定的。因此，將可確保一均句之 散熱。所謂之漩渦水（eddywater)區域的發生亦可被避免。 201042149 爲可實現一盡可能均勻之截面，可將諸腹板配置成使 得其等之相互距離與其等之高度係始終相同的。然而，此 設計之通道並無法獲得良好之冷卻，因爲此諸冷卻通道必 須總是盡可能地接近熱發生之區域。因此，諸相鄰之腹板 具有不同之相互間距。因此，可藉由減小諸腹板間之距離 而形成一較深之流動通道，然而仍維持該截面之面積不變。 特別在當使用不良熱傳導材料（諸如鑄鐵）時，尤佳地 將一冷卻通道之複數個通道區段設計成使得通道底部始 〇 終具有與熱源或熱產生區域相距大致相同之距離。具體而 言，這是介於通道底部與吸入室之間的距離。例如在一螺 旋式泵中，此吸入室具有一弧形內側。簡言之，一螺旋式 泵之吸入室係由兩個相疊置在縱長方向上之圓形柱體所 構成。尤其在變換區域中，外殻之形狀具有一向內尖縮之 尖頂形截面形狀，其亦被稱作爲一間隙。爲了也可在此區 域中達到一良好之冷卻，此通道底部尤佳地具有與吸入室 之內側處相距大致相同之距離。爲了額外地形成具有恆定 截面面積之冷卻通道，諸相鄰腹板間之距離必須隨同此通 道之深度而改變。 爲進一步改良諸待冷卻之壁與冷卻液體之間的熱傳 遞，較佳地藉由相應高之流動速度來產生一紊流 (turbulent flow)。此係爲可能的，尤其藉由改變諸截面且 同時使諸截面之面積保持大致相等，及/或藉由相當高之 流動速度。在本文中，轉向應會被形成，如此將導致儘管 是相當高速，此流動仍可在不致於產生漩渦水區域之下被 -10- 201042149 轉向。 較佳地，多個冷卻通道被設置在真空泵外殼之多個外 殻側面上。這些較佳地藉多個分離且尤其是平面狀之平坦 蓋件而被封閉。此諸冷卻通道可經由亦可爲_件之諸連接 通道而被相互連通。這些亦可爲分離之冷卻通道’其個別 地與冷卻劑管相連接。此諸連接通道可被配置在外殼內 部。它們可爲在鑄造後被形成於外殻中之孔或類似者。然 而取決於運用之領域，可能有必要藉塗敷內表面來保護其 免於腐蝕。因此，諸個別冷卻通道較佳地係經由連接管線 或連接管而被相互連接。在本文中，可使用以一種防腐蝕 材料所製之連接管。 另外，可將蓋件至少部分地實施成一犧牲陽極 (sacrificial anode)，以便藉此達到腐蝕防護。爲達此目 的’此蓋件可至少部分地藉由一鍍鋅金屬板片而被形成， 或可包括一鍍鋅金屬板片。 另外，蓋件可具有額外之功能。例如，此蓋件可被形 成爲一凸緣。在此情形中，此蓋件可額外用以導引此泵介 質之流動及/或可用以繫緊真空泵。此外，此蓋件可被形 $爲一軸承凸緣，以使得此蓋件額外地用以收納軸承。具 體而言’這些係支撐諸泵元件用之軸承件。 如同在上述發明中，根據另一獨立發明所實施之真空 栗外殻包括一外殼外側，其上配置有多個腹板。此外，亦 設置一蓋件。然而，在此發明中，此蓋件包括位於內側上 之蓋腹板。這些蓋腹板面向該外殼之外側。與外殻之外側 201042149 相連接之諸腹板以及此諸蓋腹板被配置成使得諸外殼腹 板與諸蓋腹板形成一冷卻通道。在此，於一較佳實施例 中’此諸外殻腹板與此諸蓋腹板被交替地配置，以形成〜 曲折狀之冷卻通道，其中此曲折狀冷卻通道被配置成使得 冷卻液體交替地流動自此泵外殼以及流動至此泵外殼。 蓋件本身於其周圍部分處被封抵住外殼。此可藉由提 供一密封塊或藉由提供一 0形環或二維密封件而達成，如 同在第一個發明之內容中所說明者。 Ο 較佳地，兩個發明可被結合，其中尤其可經由使用二 維密封件而在蓋件與外殼之間的周圍部分處實現密封，而 此二維密封件則被部分地壓縮並因此伸展至諸橫側面 上。因此，冷卻介質與外殼（及/或蓋件）之可能已處理表面 間之接觸將在此密封區域中被避免。如同針對第一個發明 所述者，一樣地可將冷卻通道之一部分設計成使得諸外殻 腹板可密封地接觸蓋件，並使此腹板頂部經處理或未經處 理。較佳地，此蓋件係亦由鑄鐵或球墨鑄件所製成，且尤 0 其諸蓋腹板具有一個未經處理之表面，以便可省略一抗腐 蝕層（諸如防護塗料塗敷）。 【實施方式】 在第1圖之示意圖例中，外殻1 0之一部分係以截面 被顯示。在所示之實施例中，位於此外殼之外側上設置有 複數個腹板1 2以及兩個繫緊腹板1 4。外殻部分1 0係一 藉由鑄鐵鑄造製程或球狀石墨鑄鐵鑄造製程所製成之組 件。在諸相鄰腹板1 2之間以及在諸繫緊腹板1 4與諸相鄰 -12- 201042149 腹板1 2之間分別地形成多個冷卻通道1 6。此諸冷卻通道 1 6係藉由設置一蓋件1 8而被形成。此蓋件1 8係一平面 狀平坦元件，其藉由若干繫緊件（諸如螺絲，並以鏈點線 20表示）而被固定至諸繫緊腹板14。蓋件18之內側22上 設置一伸展遍及整個此內側之平面狀密封件24。 諸個別之冷卻通道1 6因此係由諸相鄰之腹板丨2、1 4 以及由蓋件18之內側22所界定’並具有一可被設置於其 間之二維密封件24。此外，特別是如果諸腹板1 2、1 4被 〇 分隔一較大距離，則此諸冷卻通道將由外殻1 0之外側的 一區段或一部分表面28所界定。 在第1圖所示之本發明實施例的示意圖式中，諸側壁 26以及諸區段28被體現爲未經處理之鑄件材料表面。因 此，並不需要提供具有抗腐蝕劑（諸如相當之塗料）之表 面，儘管這也可被額外地進行。 在第1圖中，諸腹板頂部（亦即被定向朝蓋件18之諸 腹板12、14的多個面）係經處理，以獲得多個平面狀表面 Ο 30、32。在諸繫緊元件20之區域中，一平面狀密封表面 3 2較佳地被設置成與蓋件1 8之平面狀內側2 2對立。藉 由處理此諸腹板頂部並因此形成多個亦被設置成與蓋件 1 8之內側2 2對立的平面狀密封表面3 0，將可在諸冷卻通 道1 6之相鄰區段間形成一良好之密封。 因爲當冷卻劑（尤其是冷卻水）接觸經處理之表面時 有腐蝕之風險，所以較佳地提供一伸展遍及蓋件18之整 個內側22上之二維密封件24。藉此而將可避免讓冷卻介 -13- 201042149 質與蓋件之經處理內側22相接觸。此外，較佳地藉由 供一厚的密封件來確保密封件30在諸腹板頂部之區域 被壓縮，以便使得密封件24至少稍稍地伸出至諸腹板 側壁2 6上。藉此而將可避免讓冷卻劑與諸經處理表面 相接觸。這同樣適用於諸繫緊腹板1 4之密封表面3 2。 在另一個實施例（第2圖）中，諸腹板12之腹板頂 34係未經處理。諸腹板頂部34因此具有一凸出弧形 面。爲了確保諸冷卻通道16之相鄰區段彼此封抵住， Ο 置一厚的且特別是二維之密封件24將是足夠的。藉由 置一相對應厚之密封件24，該腹板頂部將變爲可被壓 密封件24中，以便使密封件24可在腹板頂部34之區 中被壓縮。藉由提供一較佳爲二維且厚（尤指具有3 mm 更大之厚度）之密封件，將可補償位於諸腹板頂部區域 之鑄件材料表面上許多1至2 mm的不平整。 在另一個實施例（第3圖）中，蓋件18之內側22並 配備有二維之密封件。反而相對於蓋件1 8可見的，一 〇 繫緊腹板14配備有一呈〇形環形式或類似者之密封 3 6。一對應之密封件3 6亦被配置在蓋件1 8與相鄰之腹 1 2之間。因爲諸通道1 6之內側在本實施例中也較佳係 經處理的，所以基於防止腐蝕之目的而可將蓋件18完 或部分地實施成一犧牲陽極。當然，諸冷卻通道16之 表面也可配備有一防護塗料。由於此諸冷卻通道16朝 外側敞開之設計，使得這些通道可容易地例如藉由在其 噴漆而被予塗層。 提 中 之 30 部 表 設 設 入 域 或 內 未 外 件 板 未 全 內 向 上 -14- 201042149 在第3圖所示之實施例中顯示具有一內側4〇之吸入 室3 8的一部分，其至少在所示之部分中係成圓柱狀。爲 了確保吸入室或界定此吸入室之通道壁有之確實冷卻，有 利的是使諸冷卻通道1 6之諸個別通道底部2 8可與熱源分 隔開’亦即均與此吸入室之內側4 0相隔大致相同之距離。 因爲尤其較佳地係根據本發明而提供一平面狀蓋件 18’故諸個別通道區段16具有不同之深度，尤如第3圖 中明顯所示。根據本發明，因爲位於諸個別部分區段中之 Ο 冷卻通道的截面更佳地保持大致上恆定，所以諸冷卻通道 1 6之諸相應區段的寬度必須順應該深度。結果，諸通道 16之寬度被形成於如第4圖所示之諸個別區段中。 冷卻流體可例如像箭頭所示意顯示般地流動。冷卻劑 然後從第3及4圖中之右側通道區段1 6處沿箭頭42之方 向流入一連接管44內。冷卻劑可從外側經由此連接管44 而被供應。然而，連接管44較佳地將第3圖中所示冷卻 通道之諸區段16與位於本真空泵外殼之相對立外側上之 〇 w —對應冷卻通道相連接。 密封件3 6係位於一溝槽46中（第4圖）。 在第3及4圖所示之實施例中’諸冷卻通道之諸區段 16延伸於本真空泵之縱長方向上，亦即垂直於第3圖之 圖式平面。 在第5及6圖所示之實施例中，介於蓋件18與諸繫 緊腹板14間之密封藉由一被配置在溝槽4 6中之呈0形環 形式的密封件36而被再度地造成。就此而言’蓋件18可 -15- 201042149 再度地被體現爲一犧牲陽極。亦可在蓋件18之內側22上 設置一抗腐蝕塗料。 第5及6圖所示之實施例係一螺旋式真空栗之外殼， 其中吸入室38係由兩個延伸而垂直於第5圖之圖式平面 之相交圓柱所構成。爲了在吸入室38與冷卻通道16之區 段間盡可能達到一均勻之溫度轉變，外殼壁48之厚度至 少在其大部分中係恆定的。 在第5圖所示之流動通道1 6的部分中，冷卻流體流 〇 動於箭頭60之方向上。因此，冷卻流體相對於吸入室之 縱長方向成橫向地流動。 如第5圖中可見的，由於一平面狀蓋件18，流動通 道16之高度在流動方向50上係不同的。根據本發明，因 爲此流動通道之截面面積較佳地在流動方向上係大致恆 定的，故如果此流動通道之深度增加，則此流動通道之寬 度必須減小。因此，俯視圖（第6圖）所示之流動通道的路 線以及諸腹板1 2之寬度上的不規則形狀將可獲得。流體 ^ 如箭頭5 0所示地流動於諸流動通道中，以致可形成一曲 折狀流動通道。若干螺紋孔52可被設於諸腹板1 2、1 4之 凹部中，以便可供繫緊螺絲使用。藉由這些，蓋件1 8可 被繫緊。在一邊緣部分中或者在此冷卻通道16之起始處 設有一開口 54，而在本實施例中一呈管狀之連接通道44 被設置於此開口 54中。在本實施例中，此管狀之連接通 道44藉由一定位環56而被固定。另外，若干Ο形環被設 置在多個溝槽5 8中以利密封。 -16- 201042149 爲了冷卻一螺旋式真空栗之整個外殼（第7圖），複數 個腹板12、14可被配置在吸入室周圍。一共同冷卻通道 1 6之複數個通道區段藉此被形成。較佳地以一曲折狀方 式所延伸之諸冷卻通道的諸個別區段係經由若干被設置 在外殼中且較佳係藉鑄造所製成之連接通道60而被相互 連通。由諸腹板12、14所形成之諸通道再度被平面狀蓋 件18所封閉。在本實施例中，這些包括多個被配置在諸 溝槽46中以達密封目的之密封件3 6。當然，在以上諸實 〇 施例中亦可設置一個二維密封件24，如同在第1及2圖 所示之實施例中者。 諸個別蓋件1 8並非必須如第7圖所示般地彼此以直 角配置。具體而言，將可在一邊緣部分（例如在第7圖中 之頂部右側處）中配置另一個例如角度小於45°之蓋件， 以便使諸通道在此區域中之深度可被減小。如果根據本發 明而較佳地維持此流動截面不變，此將必須在此區域中拓 寬諸通道。此外，可經由多個弧形外罩覆蓋兩個最外側之 Ο 外殼表面，而此亦適用於單軸式機器，諸如渦輪分子泵、 鼓風機、或渦輪壓縮機（第10圖）。 另外，另一通道62可被設置在外殼中，其可不必由 一蓋件所封閉。此通道可爲一排放（blow-off)通道，其亦 可藉一相對應之蓋件而被封閉。此外，可額外地設置具有 多個孔之外殼，以利於供應沖洗氣體或氣鎭裝置（gas ballast)，如由習知技藝可知者。 爲了冷卻之均勻化，諸通道更佳地被設計成使得待被 -17- 201042149 冷卻之諸側（例如頂部及底部）可被經常地變換。 當然，諸冷卻通道之配置可被設計成不只冷卻真空栗 之吸入室，且還冷卻例如諸旁通管線。 取決於使用一特別與多個另外之真空栗相結合的真 空泵，該冷卻可對應地被設計。例如’強力地冷卻一栗之 壓力側是適當的，以便可避免一緊接著的泵發生熱過載。 由於此冷卻’使得一較高之氣體密度可被獲得’且因此可 輸送一較大質量流，而體積流則維持不變。爲達此目的’ Ο 提供更強力冷卻至一泵或一泵配置（高壓縮將發生於其中） 之個別部分是有用的。 在另一實施例（第8圖）中’蓋件1 8用以封閉兩個相 互對立之通道16(分別地設置在一外殼1〇中）。另一方面’ 蓋件18可配備有一用於連接此兩個通道16之連接孔6 4。 蓋件18可被形成爲兩個外殼部分1〇之凸緣連接。此外’ 蓋件1 8可被形成爲使得多個用於支撐諸泵元件之軸承件 可被設置於其中。 Ο 諸如繫緊螺絲之繫緊件通常亦可穿過通道1 6。在此 情形下，此螺絲軸較佳地被一密封套筒所封圍。 爲了防止來自諸冷卻通道之冷卻流體進入吸入室，例 如可有利地提供除了諸如〇形環之密封件（第9圖）以外之 一防護氣體密封件。同樣地，亦可設置一控制通道5 7以 檢查此密封件之可靠性。例如，此一控制通道可被配置在 兩個彼此同心之〇形環密封件3 6。一穩態之壓力可在例 如控制通道5 7處被量測，以便使得在洩漏至吸入室或至 -18- 201042149 冷卻液體之情形發生之際，此可立即因在壓力上之變動而 被偵測到。 在另一較佳實施例（第1 0圖）中，外殻1 〇係成一大致 圓柱形狀或具有一大致呈圓柱之截面。外殻1 0之外側配 備多個大致成徑向延伸之腹板1 2。根據上述諸實施例， 諸腹板1 2之頂部係被一密封件24所覆蓋，以形成複數個 單獨之腹板1 6。密封件24被一蓋件1 8所包圍，而此蓋 件1 8在第1 0圖所示之實施例中係呈管狀。在本實施例 Ο 中，諸沿著一象限之個別腹板1 2各由一砂心所形成，而 此砂心因此可在徑向上脫模。另一個砂心被配置在一略微 較大之通道17中。 下文中，第二個獨立發明將配合參照第11至13圖而 被說明；然而，此發明亦可與第一個發明（第1至1 〇圖） 之諸元件相倂用。類似及相同之組件被標示以相同之元件 符號。 如前所述的，例如參照第1及2圖，外殼1 〇具有多 Ο 個腹板12，其諸腹板頂部34均被設計成凸出之未經處理 表面，如第2圖中所示。此外殼之一外側2 8被分別設置 在諸腹板1 2之間’而此外側較佳亦爲未經處理的。 外殻蓋件66不同於外殼蓋件18之處在於：蓋件腹板 68被設置在外殼蓋件66之內側上’其面向泵外殼10。較 佳地，諸蓋件腹板68亦具有一未經處理表面。在第9圖 所示之實施例中’諸外殼腹板12與諸蓋腹板68被交替地 配置成使得可形成一曲折狀冷卻通道1 6。冷卻劑例如像 -19- 201042149 箭頭7 0所示般地流經此冷卻通道1 6，其中此冷卻劑交替 地流自外殻1 〇及流向外殻1 0。 在第12及13圖所示之實施例中，以上配合參照第9 圖所述之總體槪念被實現於諸如傳動裝置蓋件之外殼部 件72上。此外殼部件72具有一周圍外側74，其與一連 接凸緣7 6相對立地延伸。在頂部表面上，外殼部件7 2被 一外壁78所封閉。在此外殼部件72內，例如可被配置一 傳動裝置。 〇 —蓋件66(第13圖）被從上方處設定於第10圖所示之 外殼部件上，以便可形成多個冷卻通道。在已組裝之狀態 下，外殻蓋件66之一密封表面80因此停置於外殻部件 72之一密封表面82上。一密封件被設置在此區域中。此 外，另一密封件被設置在蓋件66之一前面84處。具體而 言，此係一座落在連接凸緣76之一表面86上之0形環密 封件。 在外殻部件72之整個圓周外圍，外側74上配備有多 ® 個外殼腹板12。蓋件66具有多個蓋腹板68於此蓋件之 內側86上。在已組裝之狀態下，這些被配置在諸外殼腹 板1 2之間，以便可形成一曲折狀冷卻通道1 6。 在第1 2及1 3圖所示之實施例中，尤其有利的是藉由 鋁模製鑄件來製造諸組件。在此，諸〇形環溝槽密封表面 及諸通孔係經完全地鑄造並可在無需後續之最後修整便 能被使用。如有需要，此諸表面可被硬鍍塗層 (h a r d - a η 〇 d i z e d)處理。銘模製鑄件之特別有利處在於·商 -20- 201042149 精確水平可被達成，使得後續之最後修整通常係不需要 的。 雖然本發明已參照其多個特定實施例而被說明與圖 示’但此並非意欲將本發明限定於這些經圖式說明之實施 例。熟習本藝之人士將承認許多變化與修改可在不脫離被 界定於後附申請專利範圍中之本發明的真實範圍下被達 成。因此，本發明將涵蓋所有這些落在所附申請專利範圍 及其均等物之範圍內的變化與修改。 Ο 【圖式簡單說明】 本發明之包括其最佳模式及使熟習本藝之人士可據 以實施之完整且可行的揭示內容已配合參照附圖而被詳 細地提出於上文中，在此諸附圖中： 第1圖係一根據本發明所實施之真空泵外殻之一部 分的示意剖面圖， 第2圖係一具有一未經處理腹板頂部之腹板的放大 示意圖， 〇 第3圖係一根據另一較佳實施例所實施之真空泵外 殼之一部分的示意剖面圖’ 第4圖係一沿第3圖中之IV-IV線所取之示意俯視平 面圖， 第5圖係一根據再一較佳實施例所實施之真空泵外 殼之一部分的示意剖面圖’ 第6圖係一沿第5圖中之VI - VI線所取之示意俯視平 面圖， -21 - .201042149 第7圖係一螺旋式真空泵之真空泵外殼之另一較佳 實施例的示意剖面圖， 第8圖係一額外地作爲一軸承凸緣之蓋件的示意部 分剖面圖， 第9圖係一被設置在一軸承凸緣中之控制通道的示 意部分剖面圖， 第10圖係此真空泵外殻之另一較佳實施例的示意剖 面圖， 〇 第11圖係一可體現一獨立發明之實施例的示意剖面 圖， 第1 2圖係一諸如傳動裝置蓋件之外殼部件之立體 圖，其中第9圖所說明之本發明的實施例被實現’及 第13圖係一蓋件之立體圖，而此蓋件適於被安置在 第10圖中所示之外殻上，藉此而形成多個冷卻通道。 【主要元件符號說明】 10 外殼 12 腹板 14 繫緊腹板 16 冷卻通道 18 蓋件 20 繫緊件 22 內側 24 密封件 26 側壁 -22- 201042149201042149 VI. Description of the Invention: TECHNICAL FIELD The present invention relates to a vacuum pump casing, and more particularly to a casing made of cast iron or ductile iron. [Prior Art] In a suction chamber defined by an outer casing, the vacuum pump includes a plurality of pump elements. Specifically, the vacuum pump is a spiral pump, a single or multi-stage Rouls pump, a rotary impeller pump, or a claw pump. In order to create a vacuum, it is necessary to form a gap as small as possible between the pump elements and the inner wall of the suction chamber. In this regard, it is necessary for the vacuum pump to be operated at an operating temperature that is as constant as possible so as to avoid variations in the gap due to differential thermal expansion of the outer casing and the various components. It is known to provide a vacuum pump housing having cooling ribs and to cool the pump housings by a flow of air. However, in these background art, uniform and directional cooling of the outer casing can be achieved by only a few special measures, such as the use of an outer casing with directional air guidance and a 鼓-external blower system (from One of the pump shafts is driven or has a separate drive). Here, the specific cooling performance (heat flow per unit area) is low. In addition, it is often unpleasant to dissipate heat into the environment. Especially in a chamberless environment, the occurrence of airflow must be avoided as much as possible. In addition, blowers are an annoying source of noise. Additional disadvantages of air cooling arise from the lower cooling intensity and sensitivity to many external influences or disturbances such as local drag or removal coverage. 201042149 In addition, the use of water or coolant liquids to cool the vacuum pump casing is conventional. Special structural measures are required to achieve water cooling. In one aspect, the water must be directed as close as possible to the portion to be cooled so that a good cooling effect can be obtained. On the other hand, due to its corrosive nature, water cannot be combined with most materials without special protection measures. To avoid corrosion, for example, materials that do not corrode, such as stainless steel or certain aluminum alloys, may be used. However, such materials are expensive and do not meet other requirements that occur in vacuum pumps, such as high temperature resistance, especially those greater than 250 °C. Alternatively, the surfaces of the crucibles in contact with the water may be coated with a coating. However, it is very intricate to apply a plurality of corresponding channels at the inner side of the outer casing to the coating system. This coating must be completed by immersion or by dispensing the liquid coating by turning and tumbling. In addition, electroplating surface treatments (e.g., galvanizing or nickel plating) are conventionally used for cast steel and cast iron, while hard anodizing is conventionally used for aluminum. However, these are also very complex processes. Also. The use of sacrificial anodes is also known, which is also a complex method and does not reliably prevent corrosion from occurring in the internal cooling channels. ® In addition to the use of water as a coolant, special coolant liquids can also be used. However, this is only possible when the closed complex cooling circuit is used together. In particular, it is necessary to cool the coolant by means of a heat exchanger which must be additionally provided. The provision of a plurality of cooling passages in the vacuum pump casing of the metal casting can also be achieved by mechanically manufacturing (especially milling and drilling) to form the passages later. This is extremely complicated because it takes time to perform additional work steps. Multiple 201042149 cooling channels can also be formed during the casting process. To achieve this, the sand core will have to be set. Again, this is a time consuming method and, even more so, the cooling water may be contaminated by residual sand for a long period of time. In addition, the installation of a sand-molded manufacturing channel can be carried out only under severe constraints on the design, section and route, since such a molding system utilizes a sand core that must have a corresponding stability during the casting process. To be reached. The provision of such channels thus creates a strong limitation on design and operating conditions such as strength, allowable operating temperatures, and media compatibility. SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum pump casing, and more particularly to a vacuum pump casing made of cast iron or ductile iron which allows a cooling liquid to be cooled in a simple manner. In accordance with the present invention, the above objects are achieved by virtue of the features defined in items 1 and 17 of the patent application, respectively. The vacuum pump housing, in particular made of cast iron or spheroidal cast, has a suction chamber in which a plurality of pump elements are arranged. The suction chamber is connected to an inlet and an outlet such that actuation (especially rotation) of the pump element creates a vacuum at the pump inlet. In this operation, the vacuum pump housing is heated, in particular, by compression of the medium being pumped. To utilize a cooling fluid such as water to cool a vacuum pump housing as provided by the present invention, the vacuum pump housing has a plurality of webs disposed on one of the outer sides of the housing. In particular, the webs are configured such that two adjacent webs can form a channel or channel having a generally U-shaped cross section. Preferably, the webs are slightly conical in cross-section to facilitate demolding from a casting box 201042149 (molding box). The use of the core is only required in special cases, such as in the case of very narrow webs. Preferably, the web is generally shaped to have no undercut or the like, which facilitates demolding. According to the invention, a cover member is attached to the outer casing. The cover is formed to extend over at least two webs as in the present invention and thereby enclose the U-shaped channel formed by two adjacent webs. Therefore, a cooling passage is formed by providing the cover member. The cooling passage is formed by two opposite side walls of the adjacent webs and an inner side of the cover member, wherein the side walls and the inner side of the cover member can of course be lined. A particular advantage of the cooling passage design of the present invention is that these cooling passages can also be realized with cast iron or ductile castings. In particular, vacuum pump housings are typically made of cast iron or ductile castings because these casting methods provide excellent shaping possibilities and the resulting housing will be suitable for withstanding operating temperatures of, in particular, greater than 250 OC. In a particularly preferred embodiment of the invention, the side walls of the webs of the cooling channels are defined and untreated. They are untreated casting surfaces. This is advantageous because the untreated surfaces provide a sufficient degree of corrosion protection. The untreated casting surface of cast iron or spheroidal castings provides adequate corrosion protection even when cooling water is used. In addition, cast iron or ductile castings have the advantage over stainless steel castings in that stainless steel castings are more constrained and more expensive to mold. With a relatively wide cooling passage, i.e., a considerable distance between adjacent webs, the cooling passage is defined by the outer portion of the outer casing by a section on the outer side of the outer casing. The section on the outer side of the casing is located between the two adjacent web members. In a preferred embodiment, this portion of the boundary of the cooling channel is also not processed. In a preferred embodiment, the tops of the webs (i.e., the top side of the webs facing the cover members) are treated as planar because the inside of the cover member is planar. Therefore, it will be ensured that the inside of the cover is planarly abutted against the top of the webs. In order to seal adjacent cooling passage sections', a seal is placed between the tops of the webs and the inside of the cover. However, because a certain degree of leakage between adjacent cooling channel sections is not a major disadvantage, the seal is not extremely necessary. Similarly, the cover member can have a convex shape so that it has a concave inner side. This will provide an arcuate (especially convex) outer casing portion having a plurality of outwardly oriented webs extending generally in a radial direction. Here, the cover member is embodied as a tubular member or from a rolled sheet metal. The webs disposed at the outer casing can be cast by using a plurality of correspondingly formed release bodies. In particular, these can be made of car or ® milled webs. This design is particularly suitable for housings having a generally cylindrical cross section or a plurality of correspondingly convex curved portions. In a preferred embodiment of the invention, a two-dimensional seal is preferably provided which extends over the entire inner side of the cover member. This has the advantage, inter alia, that in addition to the function of sealing, the seal can also provide corrosion protection to the inside of the cover. This seal prevents the cooling medium (especially the cooling water) from coming into contact with the inside of the cover member, thereby avoiding corrosion at the surface. Preferably, the tops of the webs are also untreated and thus have a convex arc 201042149 shaped outer surface. This is advantageous because no unpleasant corrosion can occur at the top of the web. In order to still ensure the tightness of adjacent cooling channel sections, a relatively thick seal is preferably provided. The seal is deformed or compressed by the top of the web to provide a seal between the top of the raised web and the planar inner side of the cover. Also in this embodiment, a two-dimensional seal 'extending over the entire inner side of the cover member is preferably provided, and the seal member is specifically a flat seal member. Also due to the treated web top, it is advantageous to provide a relatively thick seal at least in the region formed by the tops of the webs. The width of the seal is greater than the treated portion of the top of the web. This has the advantage that during assembly, the seal is squeezed or compressed in the top region of the web and thus laterally projects to the sides of the top of the web and onto the side walls of the web. It is therefore ensured that the coolant (especially the cooling water) does not come into contact with the treated surface of the top of the web, thus avoiding corrosion. Similarly, in this embodiment, a two-dimensional seal that preferably extends over the entire inner side of the cover member is again preferred. Depending on the quality of the casting process, many irregularities of about 1 to 2 mm will likely occur. Since it is advantageous to treat the tops of the webs for corrosion protection reasons, if such unevenness is present, it is preferred to provide a flat seal having a thickness of 3 mm or more. Providing an untreated web top has the additional advantage that a work step can be omitted. In order to fasten the cover to the outer casing, a plurality of tie webs are preferably provided. For this purpose, one of the webs is configured to fasten the web, particularly the webs that are placed on the laterally outer sides relative to a cover. The fastening webs are configured such that they can be used to fasten the cover. To achieve this, the tie webs will be provided, which in particular have a width of 201042149, so that the tie webs can be provided with holes to receive the captive screws. Preferably, the tops of the webs of the fastening webs are treated so that a planar surface can be formed. This has the advantage that, in particular, by providing a flat seal, there is a good seal between the cover member and the tie webs. Of course, this seal can also be achieved using a 〇-ring, sealant, or other seal. One particular advantage of the present invention is that the cover members are removable. For example, when the cover is fastened via a screw, the cover can be removed by loosening the screw. This is advantageous because the cooling channels are easily accessible, for example for cleaning purposes. Similarly, if the cooling passages are protected from corrosion by, for example, paint, the coating of the coating can be easily repaired or renewed when the cover members are removed. When the inside of the cooling channels are treated and then equipped with an anti-corrosion agent (e.g., paint), then the design of the cooling channels of the present invention with a plurality of webs on the outer side of the outer casing is advantageous because it can be borrowed, for example. This anti-corrosion agent is simply applied thereon by painting. More preferably, the cover member is configured as a two-dimensional element. The webs joined by the cover are thus designed such that the tops of the webs are preferably configured to be placed on a flat surface. In a preferred embodiment, a plurality of webs are disposed on the outer side of the outer casing so as to form a meandering cooling passage. More preferably, the webs are configured and configured such that the cross-sectional area of a flow passage is substantially constant along the length of the flow passage at least in the side regions of the outer casing. This has the advantage that the flow velocity is at least substantially constant in a portion of the flow channel. Therefore, it will ensure the heat dissipation of a uniform sentence. The occurrence of the so-called eddy water area can also be avoided. 201042149 In order to achieve a cross section that is as uniform as possible, the webs can be arranged such that their mutual distance is always the same as their height. However, the passage of this design does not provide good cooling because the cooling passages must always be as close as possible to the area where heat is generated. Therefore, adjacent webs have different mutual spacings. Therefore, a deeper flow passage can be formed by reducing the distance between the webs while still maintaining the area of the cross section. Particularly when using a poor heat conducting material such as cast iron, it is preferred to design a plurality of channel sections of a cooling passage such that the bottom of the channel ends at substantially the same distance from the heat or heat generating zone. Specifically, this is the distance between the bottom of the channel and the suction chamber. For example, in a spiral pump, the suction chamber has an arcuate inner side. In short, the suction chamber of a screw pump is composed of two circular cylinders stacked in the longitudinal direction. Particularly in the transition region, the shape of the outer casing has an inwardly tapered pointed shape, which is also referred to as a gap. In order to achieve a good cooling in this region as well, the bottom of the channel preferably has substantially the same distance from the inside of the suction chamber. In order to additionally form a cooling passage having a constant cross-sectional area, the distance between adjacent webs must vary with the depth of the passage. To further improve the heat transfer between the walls to be cooled and the cooling liquid, a turbulent flow is preferably produced by a correspondingly high flow velocity. This is possible, in particular by varying the cross sections and at the same time keeping the areas of the sections substantially equal and/or by a relatively high flow rate. In this paper, the steering should be formed, which will result in a flow that can be diverted by -10- 201042149, even though it is relatively high speed. Preferably, a plurality of cooling passages are provided on a plurality of outer casing sides of the vacuum pump casing. These are preferably closed by a plurality of separate and especially planar flat covers. The cooling passages may be connected to each other via a connecting passage which may also be a member. These may also be separate cooling channels' which are individually connected to the coolant tubes. These connecting passages can be disposed inside the casing. They may be holes or the like formed in the outer casing after casting. Depending on the field of application, it may be necessary to protect the surface from corrosion by applying an internal surface. Therefore, the individual cooling passages are preferably connected to each other via a connecting line or a connecting pipe. Herein, a connecting pipe made of an anticorrosive material can be used. Alternatively, the cover member can be at least partially implemented as a sacrificial anode to thereby achieve corrosion protection. To achieve this, the cover may be formed at least in part by a galvanized sheet metal or may comprise a galvanized sheet metal. In addition, the cover can have additional functionality. For example, the cover member can be formed as a flange. In this case, the cover member may additionally serve to direct the flow of the pump medium and/or may be used to tie the vacuum pump. Additionally, the cover member can be shaped as a bearing flange such that the cover member is additionally used to receive the bearing. Specifically, these are bearing members for supporting pump elements. As in the above invention, the vacuum pump housing according to another independent invention includes an outer side of the outer casing on which a plurality of webs are disposed. In addition, a cover is also provided. However, in this invention, the cover member includes a cover web on the inner side. These cover webs face the outside of the outer casing. The webs joined to the outer side of the outer casing 201042149 and the webs are configured such that the outer casing webs form a cooling passage with the cover webs. Here, in a preferred embodiment, the outer casing webs and the cover webs are alternately arranged to form a tortuous cooling passage, wherein the meandering cooling passages are configured such that the cooling liquid alternates The ground flows from the pump casing and flows to the pump casing. The cover itself is sealed against the outer casing at its surrounding portion. This can be achieved by providing a sealing block or by providing an O-ring or a two-dimensional seal, as explained in the context of the first invention. Preferably, two inventions can be combined, wherein in particular the sealing can be achieved at the peripheral portion between the cover and the outer casing via the use of a two-dimensional seal, which is partially compressed and thus stretched To the lateral sides. Thus, contact between the cooling medium and the possibly treated surface of the outer casing (and/or cover) will be avoided in this sealed area. As with the first invention, one portion of the cooling passage can be designed such that the outer casing webs sealingly contact the cover member and the top of the web is treated or untreated. Preferably, the cover member is also made of cast iron or ductile casting, and particularly wherein the cover webs have an untreated surface so that a corrosion resistant layer (such as a protective coating) can be omitted. [Embodiment] In the schematic example of Fig. 1, one portion of the casing 10 is shown in cross section. In the illustrated embodiment, a plurality of webs 1 2 and two tie webs 14 are disposed on the outer side of the outer casing. The outer casing portion 10 is a component made by a cast iron casting process or a spheroidal graphite cast iron casting process. A plurality of cooling passages 16 are formed between adjacent webs 1 2 and between the webs 14 and the adjacent -12-201042149 webs 1 2, respectively. The cooling passages 16 are formed by providing a cover member 18. The cover member 18 is a planar flat member that is secured to the tie webs 14 by a plurality of tie members, such as screws, and indicated by chain points 20. The inner side 22 of the cover member 18 is provided with a planar seal member 24 extending over the entire inner side. The individual cooling passages 16 are thus defined by adjacent webs 2, 14 and by the inner side 22 of the cover member 18 and have a two-dimensional seal 24 that can be disposed therebetween. Moreover, particularly if the webs 1, 2, 14 are separated by a greater distance from the crucible, the cooling passages will be defined by a section or portion of the surface 28 on the outside of the outer casing 10. In the schematic of the embodiment of the invention illustrated in Figure 1, the side walls 26 and the sections 28 are embodied as untreated casting material surfaces. Therefore, it is not necessary to provide a surface having an anticorrosive agent such as a comparable coating, although this can be additionally performed. In Fig. 1, the tops of the webs (i.e., the faces of the webs 12, 14 that are oriented toward the cover member 18) are treated to obtain a plurality of planar surfaces 30, 32. In the region of the tie-down elements 20, a planar sealing surface 32 is preferably disposed opposite the planar inner side 22 of the cover member 18. By processing the tops of the webs and thus forming a plurality of planar sealing surfaces 30 that are also disposed opposite the inner sides 2 of the cover members 18, they can be formed between adjacent sections of the cooling channels 16 A good seal. Because of the risk of corrosion when the coolant (especially cooling water) contacts the treated surface, it is preferred to provide a two-dimensional seal 24 that extends over the entire inner side 22 of the cover member 18. This will prevent the cooling medium from contacting the treated inner side 22 of the cover. Moreover, it is preferred to ensure that the seal member 30 is compressed at the top of the webs by a thick seal to allow the seal member 24 to extend at least slightly over the web side walls 26. Thereby, it is avoided that the coolant is brought into contact with the treated surfaces. The same applies to the sealing surfaces 32 of the fastening webs 14. In another embodiment (Fig. 2), the web tops 34 of the webs 12 are untreated. The web tops 34 thus have a convex curved surface. In order to ensure that adjacent sections of the cooling channels 16 are sealed against each other, it will be sufficient to provide a thick and in particular two-dimensional seal 24. By placing a relatively thick seal 24, the top of the web will become squeezable in the seal 24 so that the seal 24 can be compressed in the region of the web top 34. By providing a seal which is preferably two dimensional and thick (especially having a thickness of more than 3 mm), many 1 to 2 mm irregularities on the surface of the casting material at the top region of the webs can be compensated for. In another embodiment (Fig. 3), the inner side 22 of the cover member 18 is provided with a two-dimensional seal. Instead of being visible relative to the cover member 18, the 〇 fastening web 14 is provided with a seal 36 or the like. A corresponding seal 36 is also disposed between the cover member 18 and the adjacent abdomen 12. Since the inner side of the passages 16 is also preferably treated in this embodiment, the cover member 18 can be implemented in part or in part as a sacrificial anode for the purpose of preventing corrosion. Of course, the surfaces of the cooling passages 16 can also be provided with a protective coating. Due to the fact that the cooling passages 16 are open toward the outside, these passages can be easily pre-coated, for example, by painting them. The top 30 of the drawing is set in the field or the inner part is not fully in the upper direction. 14- 201042149 In the embodiment shown in Fig. 3, a part of the suction chamber 38 having an inner side is shown, at least It is cylindrical in the part shown. In order to ensure that the suction chamber or the passage wall defining the suction chamber is cooled, it is advantageous to separate the individual passage bottoms 28 of the cooling passages 16 from the heat source, i.e., both inside the suction chamber. 0 is approximately the same distance apart. Since it is particularly preferred to provide a planar cover member 18' in accordance with the present invention, the individual channel sections 16 have different depths, as best seen in Figure 3. According to the invention, the width of the respective sections of the cooling passages 16 must conform to the depth since the sections of the cooling passages located in the individual partial sections are more preferably kept substantially constant. As a result, the widths of the channels 16 are formed in individual segments as shown in Fig. 4. The cooling fluid can flow, for example, as indicated by the arrows. The coolant then flows into a connecting tube 44 from the right channel section 16 of Figs. 3 and 4 in the direction of arrow 42. The coolant can be supplied from the outside via this connecting pipe 44. However, the connecting tube 44 preferably connects the sections 16 of the cooling passages shown in Fig. 3 to the corresponding cooling passages on the opposite outer sides of the vacuum pump casing. The seal 36 is located in a groove 46 (Fig. 4). In the embodiment shown in Figures 3 and 4, the sections 16 of the cooling passages extend in the longitudinal direction of the vacuum pump, i.e., perpendicular to the plane of the drawing of Fig. 3. In the embodiment shown in Figures 5 and 6, the seal between the cover member 18 and the tie webs 14 is sealed by a seal 36 in the form of an O-ring disposed in the groove 46. Was caused again. In this regard, the cover member 18 can be -15-201042149 again embodied as a sacrificial anode. An anti-corrosion coating can also be placed on the inner side 22 of the cover member 18. The embodiment shown in Figures 5 and 6 is a spiral vacuum pump housing in which the suction chamber 38 is formed by two intersecting cylinders extending perpendicular to the plane of the drawing of Figure 5. In order to achieve as uniform a temperature transition as possible between the suction chamber 38 and the cooling passage 16, the thickness of the outer casing wall 48 is at least constant throughout most of it. In the portion of the flow passage 16 shown in Fig. 5, the flow of the cooling fluid is in the direction of the arrow 60. Therefore, the cooling fluid flows laterally with respect to the longitudinal direction of the suction chamber. As can be seen in Figure 5, the height of the flow passages 16 is different in the flow direction 50 due to a planar cover member 18. According to the present invention, since the cross-sectional area of the flow passage is preferably substantially constant in the flow direction, if the depth of the flow passage is increased, the width of the flow passage must be reduced. Therefore, the path of the flow passage shown in the plan view (Fig. 6) and the irregular shape on the width of the webs 1 2 will be obtained. The fluid ^ flows into the flow passages as indicated by the arrow 50 so that a meandering flow passage can be formed. A plurality of threaded holes 52 can be provided in the recesses of the webs 1, 2, 14 for use with the captive screws. With these, the cover member 18 can be fastened. An opening 54 is provided in an edge portion or at the beginning of the cooling passage 16, and in the present embodiment a tubular connecting passage 44 is provided in the opening 54. In the present embodiment, the tubular connecting passage 44 is fixed by a positioning ring 56. In addition, a plurality of ring-shaped rings are provided in the plurality of grooves 58 for sealing. -16- 201042149 In order to cool the entire outer casing of a spiral vacuum pump (Fig. 7), a plurality of webs 12, 14 may be disposed around the suction chamber. A plurality of channel sections of a common cooling channel 16 are thereby formed. The individual sections of the cooling passages preferably extending in a meandering manner are interconnected via a plurality of connecting passages 60 which are disposed in the outer casing and are preferably formed by casting. The passages formed by the webs 12, 14 are again closed by the planar cover 18. In the present embodiment, these include a plurality of seals 36 that are disposed in the grooves 46 for sealing purposes. Of course, a two-dimensional seal 24 can also be provided in the above embodiments, as in the embodiments shown in Figures 1 and 2. The individual cover members 18 do not have to be disposed at right angles to each other as shown in Fig. 7. Specifically, another cover member such as an angle less than 45° may be disposed in an edge portion (e.g., at the top right side in Fig. 7) so that the depth of the channels in this region can be reduced. If this flow cross section is preferably maintained in accordance with the present invention, it will be necessary to widen the channels in this area. In addition, the two outermost outer casing surfaces may be covered by a plurality of curved outer casings, and this is also applicable to single-axis machines such as turbomolecular pumps, blowers, or turbo compressors (Fig. 10). Additionally, another passage 62 can be provided in the outer casing that does not have to be enclosed by a cover member. This channel can be a blow-off channel, which can also be closed by a corresponding cover. In addition, an outer casing having a plurality of holes may be additionally provided to facilitate the supply of flushing gas or gas ballast, as is known in the art. For uniformization of cooling, the channels are preferably designed such that the sides (e.g., top and bottom) to be cooled by -17-201042149 can be frequently changed. Of course, the arrangement of the cooling passages can be designed to not only cool the suction chamber of the vacuum pump, but also to cool, for example, the bypass lines. Depending on the use of a vacuum pump, in particular combined with a plurality of additional vacuum pumps, this cooling can be correspondingly designed. For example, it is appropriate to strongly cool the pressure side of a pump so that a thermal overload of the next pump can be avoided. Since this cooling 'allows a higher gas density to be obtained' and thus a larger mass flow can be delivered, the volume flow remains unchanged. It is useful to provide a more powerful cooling to a pump or a pump configuration (where high compression will occur) for this purpose. In another embodiment (Fig. 8), the cover member 18 is for closing two mutually opposing passages 16 (respectively disposed in a casing 1). On the other hand, the cover member 18 can be provided with a connecting hole 64 for connecting the two passages 16. The cover member 18 can be formed as a flange connection of the two outer casing portions 1〇. Further, the cover member 18 can be formed such that a plurality of bearing members for supporting the pump members can be disposed therein.扣 Fasteners such as tie-down screws can also generally pass through the passage 16. In this case, the screw shaft is preferably enclosed by a sealing sleeve. In order to prevent the cooling fluid from the cooling passages from entering the suction chamber, it is advantageous to provide, for example, a shielding gas seal other than a seal such as a 〇 ring (Fig. 9). Similarly, a control channel 57 can be provided to check the reliability of the seal. For example, such a control passage can be disposed in two concentric ring seals 36 that are concentric with one another. A steady state pressure can be measured, for example, at the control passage 57 so that it can be immediately detected due to changes in pressure at the time of leakage into the suction chamber or to the -18-201042149 cooling liquid. Measured. In another preferred embodiment (Fig. 10), the outer casing 1 is tucked into a substantially cylindrical shape or has a substantially cylindrical cross section. The outer side of the outer casing 10 is provided with a plurality of substantially radially extending webs 1 2 . According to the above embodiments, the tops of the webs 12 are covered by a seal 24 to form a plurality of individual webs 16. The seal 24 is surrounded by a cover member 18 which is tubular in the embodiment shown in Fig. 10. In the present embodiment, the individual webs 1 2 along a quadrant are each formed by a core, and the core can thus be demolded in the radial direction. The other core is placed in a slightly larger passage 17. Hereinafter, the second independent invention will be described with reference to Figs. 11 to 13; however, the invention can also be applied to the elements of the first invention (Figs. 1 to 1). Similar and identical components are labeled with the same component symbols. As previously mentioned, for example, with reference to Figures 1 and 2, the outer casing 1 has a plurality of webs 12, the web tops 34 of which are designed to protrude from the untreated surface, as shown in Figure 2 . One of the outer sides 28 of the outer casing is disposed between the webs 1 2 and the outer side is preferably also untreated. The housing cover member 66 differs from the housing cover member 18 in that the cover member web 68 is disposed on the inside of the housing cover member 66, which faces the pump housing 10. Preferably, the cover webs 68 also have an untreated surface. In the embodiment shown in Fig. 9, the outer casing webs 12 and the cover webs 68 are alternately arranged such that a meandering cooling passage 16 can be formed. The coolant flows through the cooling passages 16 as shown, for example, in -19-201042149, arrow 70, wherein the coolant alternately flows from the outer casing 1 and to the outer casing 10. In the embodiment shown in Figures 12 and 13, the overall concept described above with reference to Figure 9 is implemented on a housing member 72 such as a transmission cover member. The outer casing member 72 has a peripheral outer side 74 that extends opposite a connecting flange 76. On the top surface, the outer casing member 72 is enclosed by an outer wall 78. Within the housing member 72, for example, a transmission can be provided. The cover member 66 (Fig. 13) is set from the upper portion to the outer casing member shown in Fig. 10 so that a plurality of cooling passages can be formed. In the assembled state, one of the sealing surfaces 80 of the outer casing cover 66 is thus parked on one of the sealing surfaces 82 of the outer casing member 72. A seal is placed in this area. In addition, another seal is disposed at a front face 84 of one of the cover members 66. Specifically, this is an O-ring seal that rests on a surface 86 of one of the attachment flanges 76. On the outer circumference of the outer circumference of the outer casing member 72, the outer side 74 is provided with a plurality of outer casing webs 12. The cover member 66 has a plurality of cover webs 68 on the inner side 86 of the cover member. In the assembled state, these are disposed between the outer casing webs 1 2 so that a meandering cooling passage 16 can be formed. In the embodiment shown in Figures 12 and 13, it is especially advantageous to manufacture the components by aluminum casting. Here, the ring-shaped groove sealing surfaces and the through holes are completely cast and can be used without subsequent final trimming. If desired, the surfaces can be treated with a hard coating (h a r d - a η 〇 d i z e d). The particular advantage of in-mold castings lies in the fact that the exact level can be achieved so that subsequent final dressing is usually not required. The present invention has been described and illustrated with reference to the particular embodiments thereof, but the invention is not intended to limit the invention to the illustrated embodiments. Those skilled in the art will recognize that many variations and modifications can be made without departing from the true scope of the invention as defined by the appended claims. Therefore, the present invention is intended to cover all such modifications and alternatives BRIEF DESCRIPTION OF THE DRAWINGS [0007] The complete and feasible disclosure of the present invention, including its best mode, and which can be implemented by those skilled in the art, has been presented in detail above with reference to the accompanying drawings. In the drawings: Figure 1 is a schematic cross-sectional view of a portion of a vacuum pump housing implemented in accordance with the present invention, and Figure 2 is an enlarged schematic view of a web having an untreated web top, 〇 Figure 3 A schematic cross-sectional view of a portion of a vacuum pump casing implemented in accordance with another preferred embodiment. FIG. 4 is a schematic top plan view taken along line IV-IV of FIG. 3, and FIG. 5 is based on one more A schematic cross-sectional view of a portion of a vacuum pump housing implemented in the preferred embodiment is a schematic top plan view taken along line VI-VI of Figure 5, -21 - . 201042149 Figure 7 is a schematic cross-sectional view of another preferred embodiment of a vacuum pump housing of a spiral vacuum pump, and Figure 8 is a schematic partial cross-sectional view of a cover member additionally used as a bearing flange, Figure 9 is a A schematic partial cross-sectional view of a control passage disposed in a bearing flange, Fig. 10 is a schematic cross-sectional view of another preferred embodiment of the vacuum pump housing, and Fig. 11 is a diagram showing an implementation of an independent invention BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a perspective view of a housing member such as a transmission cover member, wherein the embodiment of the present invention illustrated in FIG. 9 is implemented as a perspective view of a cover member and FIG. This cover member is adapted to be placed on the outer casing shown in Fig. 10, thereby forming a plurality of cooling passages. [Main component symbol description] 10 Housing 12 Web 14 Tight web 16 Cooling passage 18 Cover 20 Fastening 22 Inner 24 Seal 26 Side wall -22- 201042149
28 區段 30 表面 3 2 表面 34 腹板頂部 3 6 密封件 3 8 吸入室 40 內側 42 箭頭 44 連接管 46 溝槽 48 外殼壁 5 0 箭頭 52 螺紋孔 54 開口 5 6 <—t-» / r. -rtm 疋位環 57 控制通道 5 8 溝槽 60 箭頭 62 通道 64 連接孔 66 外殻蓋件 68 蓋件腹板 70 箭頭 72 外殼部件 -23- 201042149 74 周 圍 外 側 76 連 接 凸 緣 78 外 壁 80 密 封 表 面 82 密 封 表 面 84 刖 面 8 6 表 面28 Section 30 Surface 3 2 Surface 34 Web top 3 6 Seal 3 8 Suction chamber 40 Inside 42 Arrow 44 Connection tube 46 Groove 48 Housing wall 5 0 Arrow 52 Threaded hole 54 Opening 5 6 <-t-» / r. -rtm clamp ring 57 control channel 5 8 groove 60 arrow 62 channel 64 connection hole 66 housing cover 68 cover web 70 arrow 72 housing part -23- 201042149 74 surrounding outer side 76 connecting flange 78 outer wall 80 Sealing surface 82 sealing surface 84 8 surface 8 6 surface
-24--twenty four-