201041803 六、發明說明： 【發明所屬之技術領域】 固 [0001] 本發明# —種位於沉積多晶石々> c； + , 日夕之反應爐内的矽晶棒緊 圓錐。 【先前技術】 [0002] 099107995 多晶石夕在各種不同的應用領域被大量使用，例如用於製 造太陽能電池。由於存在於自然界中的多晶料純度及 數量均不足，因此必如適當的方法製造多晶石夕。 例如一種料y夕的方法是所•西Π子法，這種方 法是將許多石夕晶棒（也稱為石夕細長棒）放到反應爐中，並 利用蒸發法讓石夕沉積在石夕晶棒上。這種方法的-個前提 是石夕晶棒的溫度必須夠高，也就是必須高___ 化溫度。為了達到這個要求，西n子法是以電阻加熱的 方式將矽晶棒加熱到所需的溫度。 將固定在適當的固餐裂置上的相鄰的成對石夕晶棒g立在 反應爐内’其中各石夕晶棒的頂端彼此導電連接。通常是 以石墨製的緊關錐作為〜日棒_定裝置，緊固圓2 可以是單件式的，也可以是多件式的。緊固圓錐的作用 疋形成導電接觸及將石夕晶棒確實固定杜 ^ t 1在矽沉積過程 中，石夕晶棒的重量會因為石夕層的沉積而大幅增加。此外 ，製成的矽晶棒應盡可能易於從緊固圓錐被取出。 在110 0 C的溫度下利用化學氣相沉積法（CM)將丄产 的三氣矽烷（SiHCl3)歧化，使矽沉積在 ： 又 種歧化作用的方程式如下： Ββ 棒'11 ’此 4CiHCi3 --> Si + 3SiC14 + 2H2 被釋放出來的矽會沉積在石晶棒上。 表單編號A0101 第4頁/共21頁 201041803 反應爐通常是由帶有保護用之金屬外罩的石英容器構成 ，此金屬罩、底板及必要的進線套管都是水冷式的。 最簡單的緊固圓錐構造方式，也就是單件式的緊固圓錐 ，矽晶棒是從緊固圓錐上的一個開口被插到反應爐内。 在這種情況下，緊固圓錐上的開口輪廓必須盡可能與要 插入之矽晶棒的輪廓相同，才能確保可以產生足夠良好 的電接觸。 多件式緊固圓錐是由一個本體及可放入本體中的夾爪所 構成，其中將插入反應爐的矽晶棒夾住的夾爪被一鎖緊 螺母張緊。 緊固圓錐的一個重要任務是確保經過爐壁到緊固圓錐的 進線套管、緊固圓錐及矽晶棒之間能夠形成良好的導電 接觸。另外一個任務是，對進線套管、緊固圓錐及矽晶 棒之間的界面的熱能逸出要盡可能的小。以下列出的專 利案均未能滿足這兩個要求。 DE 600 32 81 3 T2,利用CVD法及CVD設備將矽沉積在 矽晶管上，這種方法是屬於前面提及的西門子法，其中 矽晶管是被石墨製的固定裝置固定在反應爐中。 US 3 200 009 A揭示一種類似的石墨製固定裝置。 DE 1 205 950 B揭示一種位於將氣相半導體材料沉積到 由具有相同晶格結構之半導體材料製的棒狀載體上的設 備内的固定裝置，以及製造這種固定裝置的方法。這個 專利也是使用端面為錐形或圓錐形的石墨製固定裝置將 矽晶棒固定住。也可將固定裝置製作成夾具，這個夾具 在鏜孔端被部分分成兩半，因而使其中一半被垂直於棒 轴的切口分開。這兩半被一個石墨環連結在一起。 099107995 表單編號A0101 第5頁/共21頁 0993170295-0 201041803 【發明内容】 [0003] 本發明的目的是提出一種矽晶棒緊固圓錐，這種緊固圓 錐可以確保矽晶棒具有良好的導電接觸，並使熱能逸出 明顯下降。 為達到上述目的，本發明提出之在反應爐内讓多晶矽沉 積於其上的矽晶棒的緊固圓錐是由一個旋轉對稱的本體 構成，其中該本體具有一緊固矽晶棒用的單件式夾緊元 件，而且該夾緊元件可以在本體之中心軸的最高位置被 放入本體。像罐蓋一樣的本體有留出容納連接螺栓用的 缺口，同時本體的邊緣可以插入反應爐底部的進線套管 ，其中矽晶棒、夾緊元件、本體、進線套管的支架、以 及連接螺栓都可以用形狀配合及力配合的方式彼此插入 〇 由於緊固圓錐的特別節省材料的構造方式將厚降至最低* ，以及經由夾鉗進行的中央輸熱方式，使得因電流通過 造成的熱能逸出得以大幅降低，因此能夠減少將反應器 加熱的熱能需求。 此外，可以放入緊固圓錐之特殊構造的夾鉗可以使插人 的矽晶棒以簡單的方式確實被夾緊，同時在沉積之後推^ 容易就可以將帶有沉積之矽晶棒去除。只要改變夾鉗的 内輪廓即可使夾鉗幾乎能夠與所有尺寸的矽晶棒適配， 而無需改變本體的結構。 本發明的另外一個優點是緊固圓錐的結構非常細長，而 且易於實現。 為了容納夾緊元件，本體具有一位於中心的盲孔。 根據本發明的一種改良方式，單件式夾緊元件類似於一 099107995 表單編號A0101 第6頁/共21頁 09931 了 201041803 旋轉對稱的卡盤爪，並具有_縱向貫穿㈣晶棒容納孔 0 為了易於達到夾緊的目的’夾緊元件的兩個端面均帶有 從端面出發並沿著端面前進的未貫穿細長開口，該等細 長開口係交替從一個端面或另一個端面出發。 夾緊70件帶有兩組各3個彼此各夾12〇度的細長開口，其 中一個端面上的細長開口相對於另外一個端面上的細長 開口彼此各夾60度。 根據本發明的另外一種實施方式，夾緊元件的一端具有 一凸緣，其中從夾緊元件之端面朝凸緣面伸展的細長開 口延伸通過凸緣。夾緊元件與凸緣鄰接逸部分的長度最 多等於盲孔的深度。 為了使插入之矽晶棒及夾緊元件之間以及夾緊元件及本 體之間均能夠達到足夠的動力嚙合，盲孔是像圓錐形一 樣愈往深處愈縮小。 盲孔之圓錐角應在0.5度至3|度之間，以便一方面能夠達 到足夠的夾緊作用，另一方面又能夠確保夾緊元件能夠 從本體中脫出。 此外’夾緊元件從凸緣到對面之端面的外表面是以和盲 孔一樣的圓錐角逐漸縮小。 根據本發明的另外一種有利的實施方式，罐蓋形本體的 邊緣是以和進線套管内之相應的對應件相同的圓錐角逐 漸縮小。 邊緣及進線套管内之對應件的圓錐角應在4度至5度之間 〇 根據本發明的一種特別的改良方式’至少在進線套管之 099107995 表單編號A0101 第7頁/共21頁 0993170295-0 201041803 套管及本m有設置—具有導電性的隔離元件，該隔 離兀件係以銀製成’且同時具有防止擴散之作用。 盡可能完整且大面積的隔離，隔離元件之形狀 相當於本體之内輪廓的陰模形狀，同時隔離元件之底面 形狀相當於進線套管之連接螺栓的陰模形狀。 為了易於將長成㈣晶棒取出，—财獅方式是至 夕在本體及長成的⑪晶棒之間設置—隔離物。 隔離物可以是一種導電薄膜、CFC(碳纖維強化碳)薄片 或另外-種石墨薄膜，且其範圍可以延伸到盲孔的底部 【實施方式】 [0004] 099107995 本發明之碎B曰棒緊固圓錐是由一個旋轉對稱的本體⑵構 成，該本體（2)具有一緊固矽晶棒π)(第丨、2、5_7圖） 用的單件式夾緊元件（3)，該夾緊元件（3)可以在本體 (2)之中心軸的最高位置被放入本體（2)。像罐蓋一樣的 本體（2)有留出容納進線套管之連接螺栓（4)用的缺口（第 6圖）。本體（2)的邊緣（5)可以插入未在圖式中繪出之反 應爐之底部的進線套管，其中矽晶棒（^、夾緊元件（3) 、本體（2)、進線套管的支架、以及連接螺栓（4)都可以 用形狀配合及力配合的方式彼此插入。 第3、4及8-10圖顯示緊固圓錐的另外一種實施方式其 中本體（2)的上部並非圓錐狀，而是平的。 為了容納夾緊元件（3)，本體（2)具有一位於中心的盲孔 (6)。盲孔（6)之圓錐角應在〇，5度至30度之間，以便— 方面能夠達到足夠的夾緊作用，另一方面又能夠確保夾 緊元件（3)能夠從本體（2)中脫出，這可以從以下的說明 表單編號Α0101 第8頁/共21頁 0993170295-0 201041803 中看出（第2、4圖）。 夾緊元件（3)類似於一旋轉對稱的卡盤爪，並具有一縱向 貫穿的矽晶棒（1)容納孔（7)(第14a-d圖）。 為了易於達到夾緊的目的，夾緊元件（3)的兩個端面（8， 9)均帶有從端面出發並沿著端面前進的未貫穿細長開口 (10)，該等細長開口（1〇)係交替從一個端面（8)或另一 個端面（9)出發。 夾緊元件（3)帶有兩組各3個彼此各夾12〇度的細長開口 (10)，其中一個端面（8)上的細長開口（ 1 〇)相對於另外 一個端面（9)上的細長開口（1〇)彼此各夾度（第6a_c圖 )。 夾緊元件（3)的一端具有一凸緣（11)，·其中從夾緊元件 (3)之端面（8)朝凸緣面伸展的細長開口（1〇)延伸通過凸 緣（U)。夾緊元件（3)與凸緣鄰接之部分的長度最多等於 盲孔（6)的深度。 為了使插入之矽晶棒（1)及夾緊元件（3)之間以及夾緊元 件（3)及本體（2)之間均能夠達到足夠的動力嚙合，夾緊 元件（3)在凸緣（11)之後的外表面是以和盲⑽）一樣的 圓錐角逐漸縮小’因而形成一摩擦副。 由於本體（2)-方面必須被穩固的固定在進線套管之相應 的對應件中，但另-方面又必須賴很料被抽出，因 此罐蓋形本體⑺的邊緣⑸是以和進線套管内之相應的 對應件相_圓錐角逐漸縮小，因而形成另外—個摩擦 副（第2、4、6、9圖）。 邊緣（5)及進線套"之對應件的圓錐角應在4度至5度之 間。 099107995 表單編號A0101 第9頁/共21頁 0993170295-0 201041803 邊緣（5)也可以毫無困難的與其他的安裝條件配合。例如 其内面可以帶有螺紋，或是可以用於㈣讀或類似的 構件。 為了避免在沉積過程中發生可能導致長成之石夕晶棒品質 明顯變差的擴散現象，在進線套管之套管及本體⑺之間 有設置一具有導電性的隔離元件（12)。例如—種適當的 隔離元件（12)是以銀製成（第1-4圖）。 為了達到盡可能完整且大面積的隔離，隔離元件。2)之 形狀相當於本體之内輪廓的陰模形狀，同時隔離元件之 底面形狀相當於進線套管之連接螺栓（4)的陰模形狀， 為了易於將長成的石夕晶棒取出，一種有利的方式是至 少在本體（2)及長成的石夕晶棒之間設置一隔離物（13)(第 11 -13 圖）。 隔離物（13)可以是-種導電薄膜、GF(：(碳纖維強化碳） 薄片、或另外—種石墨薄膜，且其範圍可以延伸到盲孔 (6)的底部。 由於本發明之緊關錐的特別節㈣料的構造方式將厚 降至最低’以及經由夾钳（3)進行的中央輸熱方式，使得 因電流通過造成的熱能逸出得以大幅降低，因此能夠減 少將反應器加熱的熱能需求。 此外，可以放入緊固圓錐之特殊構造的夾钳（3)可以使插 入的石夕晶棒（1)以簡單的方式峰實被央緊，同時在沉積之 後很容易就可以將帶有沉積之硬晶棒去除。只要改變爽 甜（3)的内㈣即可使夾钳（3)幾乎能夠與所有尺寸的石夕 晶棒（1)適配，而無需改變本體（2)的結構，因此可以大 幅降低成本。 099107995 表單編號A0101 第1〇頁/共21頁 0993170295-0 201041803 【圖式簡單說明】 [圖以下配合圖式及-個實施例對本發明做進_步的說明。 其中： 緊70件及矽晶棒之緊固圓錐的側 第1圖：本發明之裝有夾 視圖； 第2圖：如第1圖之緊固圓錐的一個斷面圖； 第3圖：本發明之裝有夹緊元件及石夕晶棒之緊固圓錐的另 外一種實施方式； 第4圖：如第3圖之緊固圓錐的-個斷面圖； 第5圖：如第1圖之緊固圓錐的一個侧面圖， 第6圖：如第5圖之緊固圓錐的-個侧面圖; 第7圖：如第5圖之緊固圓錐的-個立體透視圖； 第8圖：如第3圖之緊固圓錐的-個側面圖； 第9圖：如第8圖之緊固圓錐的-個斷面圖； 第_ :如第8圖之緊固圓錐的—個立體透視圖； 第U圖：一置於如第3圖及_之緊_錐上^ 件； 第12圖：如第㈣之隔離元件的—個側面圖； 第13圖：如第11圖之隔離元件的-個立體透視圖；及 第14 a - d圖：夾緊元件的細部圖。 【主要元件符號說明】 [0006] 1 矽晶棒 2 本體 3 爽緊元件/失錯 4 連接螺栓 5 邊緣 099107995 表單編號A0101 第11頁/共耵頁 0993170295-0 201041803 6 盲孔 7 容納孔 8 端面 9 端面 10 細長開口 11 凸緣 12 隔離元件 13 隔離物 099107995 表單編號A0101 第12頁/共21頁 0993170295-0201041803 VI. Description of the invention: [Technical field to which the invention pertains] Solid [0001] The present invention is a crucible rod compact cone located in a reactor for depositing polycrystalline stone 々>c; [Prior Art] [0002] 099107995 Polycrystalline stone is widely used in various application fields, for example, in the manufacture of solar cells. Since the purity and quantity of the polycrystalline material present in nature are insufficient, it is necessary to produce polycrystalline as a proper method. For example, a method of yue is the Xixizi method, which puts many Shi Xijing rods (also known as Shi Xi slender rods) into the reaction furnace, and uses the evaporation method to deposit Shi Xi in the stone. On the eve of the crystal. The premise of this method is that the temperature of the Shixi crystal rod must be high enough, that is, it must be high ___. In order to meet this requirement, the West N sub-method heats the crystal rod to the desired temperature by means of resistance heating. Adjacent pairs of stone ingots fixed on a suitable solid meal are placed in the reactor. The top ends of the respective ingots are electrically connected to each other. Usually, a tight cone made of graphite is used as a rod-shaped device, and the fastening circle 2 may be a single piece or a multi-piece type. The role of the fastening cone 疋 forms a conductive contact and secures the stellite rod. During the bismuth deposition process, the weight of the slab is greatly increased by the deposition of the sap. In addition, the resulting twin rods should be removed from the fastening cone as easily as possible. The disproportionation of tritethane (SiHCl3) produced by hydrazine at a temperature of 110 ° C was carried out by chemical vapor deposition (CM) to deposit ruthenium: The equation for disproportionation is as follows: Ββ rod '11 'This 4CiHCi3 -- > Si + 3SiC14 + 2H2 released ruthenium will deposit on the stone rod. Form No. A0101 Page 4 of 21 201041803 The reactor is usually constructed of a quartz container with a protective metal cover. The metal cover, base plate and necessary inlet bushings are all water-cooled. The simplest way to tighten the cone is to use a one-piece fastening cone. The twine is inserted into the reactor from an opening in the fastening cone. In this case, the contour of the opening on the fastening cone must be as similar as possible to the contour of the twine to be inserted in order to ensure a sufficiently good electrical contact. The multi-piece fastening cone is composed of a body and a jaw that can be placed in the body, wherein the jaws clamped by the twin rods inserted into the reaction furnace are tensioned by a lock nut. An important task of tightening the cone is to ensure a good electrical contact between the inlet sleeve, the fastening cone and the twine through the wall to the fastening cone. Another task is to minimize the escape of thermal energy from the interface between the incoming casing, the fastening cone and the twine. None of the patents listed below meet these two requirements. DE 600 32 81 3 T2, using CVD and CVD equipment to deposit ruthenium on a ruthenium tube. This method belongs to the aforementioned Siemens method, in which the ruthenium tube is fixed in a reaction furnace by a graphite fixing device. . A similar graphite fixture is disclosed in US 3 200 009 A. DE 1 205 950 B discloses a fixing device in a device for depositing a vapor-phase semiconductor material onto a rod-shaped carrier made of a semiconductor material having the same lattice structure, and a method of manufacturing such a fixing device. This patent also uses a graphite fixture with a conical or conical end face to hold the twin rod. It is also possible to make the fixture a jig which is partially divided into two halves at the pupil end so that half of it is separated by a slit perpendicular to the rod axis. The two halves are joined together by a graphite ring. 099107995 Form No. A0101 Page 5 / Total 21 Page 0993170295-0 201041803 SUMMARY OF THE INVENTION [0003] The object of the present invention is to provide a twine rod fastening cone which ensures good conductivity of the twine rod Contact and cause a significant drop in thermal energy. In order to achieve the above object, the fastening cone of the twin rod in which the polycrystalline crucible is deposited in the reactor is composed of a rotationally symmetrical body, wherein the body has a single piece for fastening the twin rod. The clamping element can be placed in the body at the highest position of the central axis of the body. The body like the can lid has a notch for receiving the connecting bolt, and the edge of the body can be inserted into the inlet sleeve at the bottom of the reaction furnace, wherein the twine rod, the clamping element, the body, the bracket of the inlet sleeve, and The connecting bolts can be inserted into each other in a form-fitting and force-fitting manner. The thickness is minimized due to the particularly material-saving construction of the fastening cones*, and the central heat transfer via the clamps causes the passage of current. Thermal energy escape is greatly reduced, thus reducing the thermal energy requirements for heating the reactor. In addition, a specially constructed clamp that can be placed in a fastening cone allows the inserted twine to be clamped in a simple manner, while the deposition of the crystallized rod can be easily removed after deposition. Simply changing the inner contour of the clamp allows the clamp to fit almost any size of the crystallized rod without changing the structure of the body. Another advantage of the present invention is that the structure of the fastening cone is very slender and easy to implement. In order to accommodate the clamping element, the body has a blind hole in the center. According to an improvement of the invention, the one-piece clamping element is similar to a 099107995 form number A0101 page 6 / 21 pages 09931. The 201041803 rotationally symmetrical chuck jaws have a longitudinal through (four) ingot receiving hole 0. Easy to achieve the purpose of clamping 'The two end faces of the clamping element each have a non-penetrating elongated opening from the end face and advancing along the end face, the elongate openings alternately starting from one end face or the other end face. The clamping 70 is provided with two sets of three elongated openings each of which is 12 degrees apart, and the elongated opening on one of the end faces is 60 degrees from each other with respect to the elongated opening on the other end face. According to a further embodiment of the invention, the clamping element has a flange at one end, wherein an elongated opening extending from the end face of the clamping element towards the flange face extends through the flange. The length of the clamping member adjacent the flange portion is at most equal to the depth of the blind hole. In order to achieve sufficient power engagement between the inserted twin rod and the clamping element and between the clamping element and the body, the blind hole is as narrow as the conical shape. The taper angle of the blind hole should be between 0.5 and 3 degrees, in order to be able to achieve sufficient clamping on the one hand and to ensure that the clamping element can be released from the body on the other hand. Furthermore, the outer surface of the 'clamping element from the flange to the opposite end face is tapered at the same taper angle as the blind hole. According to a further advantageous embodiment of the invention, the edges of the can lid-shaped body are gradually tapered with the same conical angle as the corresponding counterpart in the inlet sleeve. The angle between the edge and the corresponding piece in the inlet sleeve should be between 4 and 5 degrees. According to a particular modification of the invention 'at least in the inlet sleeve 099107995 Form No. A0101 Page 7 of 21 0993170295-0 201041803 The bushing and the m are provided with an electrically conductive spacer element which is made of silver and at the same time has a function of preventing diffusion. As much as possible and large-area isolation, the shape of the spacer element corresponds to the shape of the female mold of the inner contour of the body, and the shape of the bottom surface of the spacer element corresponds to the shape of the female mold of the connecting bolt of the inlet sleeve. In order to easily take out the long (four) crystal rods, the lion-style method is to arrange a separator between the body and the grown 11-crystal rod. The separator may be a conductive film, a CFC (carbon fiber reinforced carbon) sheet or another graphite film, and the range may extend to the bottom of the blind hole. [0004] 099107995 The broken B 曰 rod fastening cone of the present invention It is constituted by a rotationally symmetrical body (2) having a one-piece clamping element (3) for fastening a twine π) (Fig. 2, 5-7), the clamping element ( 3) It can be placed in the body (2) at the highest position of the central axis of the body (2). The body (2) like the can lid has a notch for the connection bolt (4) that accommodates the inlet sleeve (Fig. 6). The edge (5) of the body (2) can be inserted into the inlet sleeve of the bottom of the reactor not shown in the drawing, wherein the twin rod (^, clamping element (3), body (2), incoming line The bracket of the sleeve and the connecting bolt (4) can be inserted into each other in a form fit and force fit. Figures 3, 4 and 8-10 show another embodiment of the fastening cone wherein the upper part of the body (2) is not Conical, but flat. To accommodate the clamping element (3), the body (2) has a blind hole (6) at the center. The taper angle of the blind hole (6) should be between 5 and 30 degrees. In order to achieve sufficient clamping, on the other hand, it is ensured that the clamping element (3) can be released from the body (2), which can be numbered from the following description form Α0101 Page 8 of 21 See page 0993170295-0 201041803 (Figs. 2 and 4). The clamping element (3) is similar to a rotationally symmetrical chuck jaw and has a longitudinally penetrating twine (1) receiving hole (7) ( Fig. 14a-d). For easy clamping purposes, both end faces (8, 9) of the clamping element (3) are provided with end faces The elongate openings (10) are alternately extending from one end face (8) or the other end face (9). The clamping element (3) has two sets. Each of the three elongated openings (10) each sandwiching 12 degrees, wherein the elongated openings (1 〇) on one end face (8) are each other with respect to the elongated opening (1 〇) on the other end face (9) (Fig. 6a-c). One end of the clamping element (3) has a flange (11), wherein an elongated opening (1〇) extending from the end face (8) of the clamping element (3) toward the flange face extends Flange (U). The length of the portion of the clamping element (3) adjoining the flange is at most equal to the depth of the blind hole (6). For the insertion of the twin rod (1) and the clamping element (3) and Sufficient power engagement can be achieved between the clamping element (3) and the body (2), and the outer surface of the clamping element (3) after the flange (11) is tapered at the same angle as the blind (10)) Thus a friction pair is formed. Since the body (2)-face must be firmly fixed in the corresponding counterpart of the inlet bushing, the other side must be drawn out, so the edge (5) of the can lid-shaped body (7) is the incoming line. The corresponding counterpart phase _ cone angle in the sleeve is gradually reduced, thus forming another friction pair (Figs. 2, 4, 6, and 9). The taper angle of the edge of the edge (5) and the inlet sleeve should be between 4 and 5 degrees. 099107995 Form No. A0101 Page 9 of 21 0993170295-0 201041803 The edge (5) can also be used without any difficulty with other installation conditions. For example, the inner face can be threaded or can be used for (iv) reading or similar components. In order to avoid the diffusion phenomenon which may cause the deterioration of the quality of the grown stone in the deposition process, a conductive spacer element (12) is disposed between the sleeve of the inlet sleeve and the body (7). For example, a suitable spacer element (12) is made of silver (Figs. 1-4). In order to achieve as complete and large-area isolation as possible, the components are isolated. 2) The shape is equivalent to the shape of the female mold of the inner contour of the body, and the shape of the bottom surface of the spacer element corresponds to the shape of the female mold of the connecting bolt (4) of the inlet sleeve, in order to easily take out the grown stone core rod, An advantageous way is to provide at least a spacer (13) between the body (2) and the elongated stone rod (Fig. 11-13). The spacer (13) may be a conductive film, a GF (: (carbon fiber reinforced carbon) sheet, or another graphite film, and the range may extend to the bottom of the blind hole (6). Due to the tight cone of the present invention The special section (4) is constructed in such a way that the thickness is reduced to a minimum 'and the central heat transfer mode via the clamp (3), so that the heat energy escape due to the passage of current is greatly reduced, thereby reducing the heat energy for heating the reactor In addition, the specially constructed clamp (3), which can be placed in a fastening cone, allows the inserted stone core rod (1) to be compacted in a simple manner, and it is easy to carry the belt after deposition. The hard crystal rod with deposition is removed. Just change the inner (4) of the sweet (3) to make the clamp (3) adapt to almost all sizes of the stone rod (1) without changing the body (2). Structure, so the cost can be greatly reduced. 099107995 Form No. A0101 Page 1 / 21 pages 0993170295-0 201041803 [Simple description of the drawing] [The following is a description of the present invention in conjunction with the drawings and an embodiment. Of which: 70 tight and Side of the fastening cone of the ingot 1 : a clamped view of the invention; 2: a sectional view of the fastening cone as in Fig. 1; Fig. 3: the clamping element of the invention And another embodiment of the fastening cone of the stone illuminating rod; Fig. 4: a sectional view of the fastening cone as shown in Fig. 3; Fig. 5: a side view of the fastening cone as shown in Fig. 1. Figure 6: a side view of the fastening cone as in Figure 5; Figure 7: a perspective view of the fastening cone as in Figure 5; Figure 8: fastening cone as in Figure 3 - a side view; Figure 9: a sectional view of the fastening cone as shown in Fig. 8; _: a perspective view of the fastening cone as shown in Fig. 8; Fig. U: one placed Figure 3: _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 14 a - d diagram: detail of the clamping element. [Main component symbol description] [0006] 1 矽 bar 2 body 3 chilling element / error 4 connection bolt 5 edge 099107995 form number A0101 page 11 / total page 0993170295-0 201041803 6 blind hole 7 receiving hole 8 end face 9 end face 10 elongated opening 11 flange 12 spacer element 13 spacer 099107995 form number A0101 page 12 of 21 0993170295-0