201036772 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種在設置有產業用機器人之工廠内使用 之安全護罩。 【先前技術】 先前，在設置有產業用機器人之工廠中，為確保作業者 之安全而在產業用機器人之周圍設置安全護罩（例如，參 ❹ 照專利文獻1及2)。另外，先前，作為產業用機器人，已 知一種包括搭載有搬送對象物之機械手、及保持機械手之 機械臂的搬送用機器人（例如，參照專利文獻3)，於該搬送 用機器人之周圍亦設置有安全護罩。 [專利文獻1]日本專利特開2007-223002號公報 [專利文獻2]曰本專利特開2004-3 53 8的號公報 [專利文獻3]曰本專利特開20064 〇2886號公報 【發明内容】 ◎ [發明所欲解決之問題] 在如液晶㈣器用玻璃基板等之由搬送用機器人所搬送 之搬送對象物中，有逐年大型化者。另一方面，為提高生 ' 產性，要求搬送用機器人對搬送對象物之搬送速度實現高 .$化’搬送用機器人之機械手等在移動時之動能有逐漸變 大之傾向。其結果產生以下狀況：在搬送用機器人發生誤 動作時，難以確保作業者之安全。 此處’若將由鋼板等強度高的材料所形成之牢固的安全 濩罩設置於搬送用機器人之周圍，則即便搬送用機器人發 144732.doc 201036772 生誤動作，亦能利用牢固的安全護罩使機械手等停止，因 而可確保作業者之安全。然而，在將牢固的安全護罩設置 於搬送用機器人之周圍時， 于右機械手荨與女全護罩發生碰 里’ j有機械手等因該碰撞時之衝擊而損傷之虞。 發明之課題在於提供_種產㈣機器人之安全 浐亦.广保作業者之安全’且即便產業用機器人發生碰 才里亦旎防止其損傷。 [解決問題之技術機械手段] =決上述_ ’本發明之安全護罩之特 形成產業用機器人之作業區域之至少一部分者，且μ係 樹脂製且板狀的罩構件，其會與自作業區域露出之產%用 機械手或機械臂發生碰撞;框構件，其上形成有 '冓件之外周侧卡合之卡合機構，並保持罩構件，·以及 防脫機構，其係在罩構件之至少一… 用以防止罩構件從框構件上脫落。°錢δ機構脫開時 本發明之安全護罩中，與自作業區域露出之產举 人之機械手或機械臂發生碰撞之樹脂製的罩構件传被伴； 於形成有與罩構件之外周側卡合之卡合機構之框構=持 :外，本發明之安全護罩包括防脫機構，其係在罩構件從 卡合機構脱開時用以防止翠構件從框構件上脫落= 即便機械手或機械臂碰撞到罩構件 .Α 1( 〃月匕自无籍由卡合於 卡&機構之罩構件來吸收機械手或機械臂所具有之動处，、 直至罩構件從卡合機構脫開為 ^ 收先前未吸收完的動能。因此，本由防脫機構來吸 本&明中，能利用安全護 144732.doc 201036772 罩ί吸收機械手或機械臂所具有之全部動能，且能利用安 二構機構…件及 能，因此，能降低罩構件:二=機械所具有之動 稱件朝框構件之固定強度。又，本發 Ο ❹ 月之罩構件係由樹脂所形成。因此’於本發明中，能緩和 機械手或機械臂與罩構件發生碰撞時之衝擊，其結果為， 即便機械手或機械臂碰撞到草構件，亦能防止其損傷。 本：明中，較好的是防脫機構係以沿著罩構件外 嫌处& 此構成後，在機械手或機械臂盘罩 籌牛發生碰撞時，能防止罩構件以防脫機構為中心進行旋 動。因此，能利用防脫機構確實吸收動能。 本發明中’防脫機構例如包括連接罩構件與框構件之 材狀構件或鏈狀構件。於# _ " ^ 、以清形時，可利用線材狀構件或 鍵狀構件之變形（彈，性變形及 機械臂所具有之動能。 “)末吸收機械手或 於本發明中’較好的是防脫機構包括：固定於罩構件上之 螺检、及固定於框構件上之第二螺栓，且線材狀構件 :鏈狀構件係架設在第一螺栓與第二螺栓之間。如此構成 後m較簡單之構造而連接罩構件與框構件。 本發明中’較好的是防脫機構包括金屬線作為線 ’且在第一螺检之頭部，形成有供金屬線插通之插通 。如此構成後，即便有某些外力作用於金屬線，亦能防 144732.doc 201036772 止金屬線從第-螺检與第二螺检之間掉落。 本發明中’防脫機構亦可包括板狀構件，其係 機構脫開時之罩構件所接觸之位置處固定於框構件上; 該情形時，能利用板狀構件之變形來吸收機 臂 所具有之動能。 n身 另卜為解决上述課題，本發明之安全護罩之特微 於：其係形成產業用機器人之作業區域之至少一部分： 2=::製且板狀的罩構件，其會與自作業區域露出 '、機益人之機械手或機械臂發生碰撞；框構件，兑 上形成有與罩構件外周側卡合之卡合機構，並保持罩構 件；以及限制機構，其係在罩構件之至少—部分從卡合機 構脫開時用以限制罩構件朝向作業區域外側之移動。 本發明之安全護罩中，與自作業區域露出之產業用機器 人之機械手或機械臂發生碰撞之罩構件係被保持於形成有 與罩構件之外周侧卡合之卡合機構之框構件上。另外，本 發明之安全護罩包括限制機構，其係在罩構件從卡合 脫開時用以限制罩構件朝向作業區域外側之移動。因此， 即便機械手或機械臂碰撞到罩構件，亦能首先藉由卡合於 卡合機構之罩構件來吸收機械手與機械臂所具有之動能， 直至罩構件從卡合機構脫開為止，之後藉由限制機構來吸 收先則未吸收完的動能。因此，本發明中，能利用安全護 罩來吸收機械手與機械臂所具有之全部動能，且能利用安 全遵罩使機械手與機械臂停止。其結果為，本發明能確保 作業者之安全。 144732.doc 201036772 制=本發明中，能利用卡合於卡合機構之罩構件及限 =構^兩階段地吸收機械手或機械臂所具有之動能， :，施降低罩構件朝框構件之固定強度。又，本發明之 =件係由樹脂所形成。因&，於本發明中，能緩 ^機械臂與罩構件發生碰撞時之衝擊，其結果為，即便 機械手或機械臂碰撞到罩構件，亦能防止其損傷。 本發明中，較好的是罩構件為半透明或透明 後，作業者能從安全護罩之外側確認產業用 態。 ’、201036772 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a safety shield used in a factory provided with an industrial robot. [Prior Art] In a factory equipped with an industrial robot, a safety shield is provided around the industrial robot to secure the operator (see, for example, Patent Documents 1 and 2). In addition, a robot for mounting an object to be transported and a robot for holding a robot arm (for example, see Patent Document 3) are known as an industrial robot, and the robot is also surrounded by the robot. A safety shield is provided. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2007-223002 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-353 No. ◎ [Problems to be Solved by the Invention] The object to be transported by a transport robot such as a glass substrate for a liquid crystal device has been enlarged year by year. On the other hand, in order to improve the productivity, the transfer robot is required to have a high transfer speed of the transfer target. The kinetic energy of the robot for moving the robot is gradually increased. As a result, it is difficult to ensure the safety of the operator when the transfer robot malfunctions. Here, if a strong safety cover formed of a material having a high strength such as a steel plate is placed around the transfer robot, even if the transfer robot sends a 144732.doc 201036772 malfunction, the machine can be secured by a strong safety shield. The hand is stopped, thus ensuring the safety of the operator. However, when a strong safety shield is placed around the transfer robot, the right hand grip and the female full cover are in contact with each other, and the robot is damaged by the impact of the collision. The object of the invention is to provide the safety of the robot (the fourth), the safety of the operator, and the protection of the industrial robot. [Technical Means for Solving the Problem] = The above-mentioned safety guard of the present invention forms at least a part of the working area of the industrial robot, and the μ-type resin-made and plate-shaped cover member is self-worked. The % of the exposed area is collided by a robot or a robot arm; the frame member is formed with a snap mechanism that engages the outer side of the jaw, and holds the cover member, and the retaining mechanism, which is attached to the cover member At least one of... is for preventing the cover member from coming off the frame member. When the money δ mechanism is disengaged, the safety cover of the present invention is coupled with a resin cover member that collides with the robot or the robot arm exposed from the work area; the outer side of the cover member is formed The frame of the engaging mechanism of the engaging body: the safety guard of the present invention includes a retaining mechanism for preventing the green member from falling off the frame member when the cover member is disengaged from the engaging mechanism = even if the machine The hand or the mechanical arm collides with the cover member. Α 1 (〃月匕 卡 卡 无 无 卡 卡 卡 卡 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构Disengaged to receive the kinetic energy that has not been absorbed before. Therefore, the detachment mechanism can absorb the kinetic energy of the robot or the robot arm by using the safety protection 144732.doc 201036772 cover ί, and It is possible to use the two components and the energy, and therefore, it is possible to reduce the cover member: two = the fixed strength of the mechanical member having the mechanical component to the frame member. Further, the cover member of the present invention is formed of a resin. Therefore, in the present invention, the machine can be alleviated Or the impact of the collision between the mechanical arm and the cover member, as a result, even if the robot or the mechanical arm collides with the grass member, the damage can be prevented. Ben: In the middle, it is better that the anti-off mechanism is along the cover. In this case, when the robot or the robot arm cover collides, it is possible to prevent the cover member from rotating around the anti-off mechanism. Therefore, the kinetic energy can be absorbed by the anti-off mechanism. In the invention, the anti-off mechanism includes, for example, a material member or a chain member that connects the cover member and the frame member. In the case of clearing, the deformation of the wire-like member or the key member can be utilized (bomb, sex). The deformation and the kinetic energy of the robot arm. ") The end absorbing robot or in the present invention, preferably the detachment prevention mechanism comprises: a screw inspection fixed to the cover member, and a second bolt fixed to the frame member, And the wire-like member: the chain-shaped member is erected between the first bolt and the second bolt. Thus, the cover member and the frame member are connected in a relatively simple configuration. In the present invention, it is preferable that the retaining mechanism includes metal. Line as a line 'And in the head of the first screw inspection, there is a plug-in for inserting the metal wire. After this configuration, even if some external force acts on the metal wire, it can prevent 144732.doc 201036772 metal wire from the first screw The falling prevention mechanism may also include a plate-like member which is fixed to the frame member at a position where the cover member is in contact with the mechanism when the mechanism is disengaged; The kinetic energy of the arm is absorbed by the deformation of the plate member. In order to solve the above problems, the safety shield of the present invention is characterized in that it forms at least a part of the working area of the industrial robot: 2= :: a plate-shaped cover member that collides with a robot or a robot arm that is exposed from the work area, and the frame member is formed with an engagement mechanism that engages with the outer peripheral side of the cover member. And retaining the cover member; and restricting mechanism for restricting movement of the cover member toward the outside of the work area when at least a portion of the cover member is disengaged from the engagement mechanism. In the safety shield of the present invention, the cover member that collides with the robot or the robot arm of the industrial robot exposed from the work area is held by the frame member formed with the engagement mechanism that engages with the outer peripheral side of the cover member. . Additionally, the safety shield of the present invention includes a restraining mechanism for restricting movement of the cover member toward the outside of the work area when the cover member is disengaged from engagement. Therefore, even if the robot or the mechanical arm collides with the cover member, the kinetic energy of the robot and the robot arm can be absorbed by the cover member that is engaged with the engagement mechanism until the cover member is disengaged from the engagement mechanism. The kinetic energy that was not absorbed first is then absorbed by the restriction mechanism. Therefore, in the present invention, the safety guard can be used to absorb all the kinetic energy of the robot and the robot arm, and the robot and the robot arm can be stopped by the safety guard. As a result, the present invention can ensure the safety of the operator. 144732.doc 201036772 system=In the present invention, the kinetic energy of the robot or the robot arm can be absorbed by the cover member engaged with the engaging mechanism and the limit=configuration two steps: Fixed strength. Further, the member of the present invention is formed of a resin. In the present invention, it is possible to reduce the impact when the mechanical arm collides with the cover member, and as a result, even if the robot or the mechanical arm collides with the cover member, it can be prevented from being damaged. In the present invention, it is preferred that the cover member is translucent or transparent, and the operator can confirm the industrial state from the outside of the safety shield. ’,
。如此構成 機器人之狀 [發明之效果] 如上所述’本發明之安全護罩能確保作業者之安全，且 即便產業用機器人發生碰撞亦能防止其損傷。 【實施方式】 以下，根據圖式來說明本發明之實施形態。 (設置有安全護罩之工廠之佈置與產業用機器人之概略 構成） 圖1係表不設置有本發明之實施形態之安全護罩丨的工廠 之佈置之一例之俯視圖。圖2係圖丨所示之產業用機器人3 之俯視圖。圖3係從圖2之E_E方向表示產業用機器人3之示 圖。 本實施形態之安全護罩丨例如係在設置有用於搬送液晶 顯示器用玻璃基板2(以下，稱為「基板2」）之產業用機器 人3(以下，稱為「機器人3」）之工廠中用以確保作業者之 安全者。如圖1所示，在工廠内該安全護罩丨例如係設置成 144732.doc 201036772 包圍已被二個液晶顯示器製造裝置4包圍了三方之機器人3 之剩餘#。本實施形態中，藉由三個製造裝置4與安全 護罩1而形成機器人3之作業區域R。 王 如上所述，機器人3係用於搬送基板2之搬送用機器人。 本貝施形〜、之機器人3係特別適合搬送大型基板2之大型機 器=，例如搬送邊長約3 m之大致正方形之基板2。再者， 機器人3亦可為搬送半導體晶圓等之機器人。 α 匕括·搭載基板2之呵卿機械 手6、前端側與兩個機械手6各自連結之兩條機械臂7、支 持兩條機械臂7之本體邱8Β μ k τ 尽體邛8及於水平方向可移動地支持本 體部8之底座構件9。本體 不肢邛8包括.支持兩條機械臂7之基 端側並能上下運動之支持構件1〇、用以於上下方向可移動 地支持著支持構件1G之柱狀構件u、#成本體部8之下端 部分並且相對於底座構件9而能水平移動之基台12、固定 柱狀構件11之下端並且相對於 、土 σ 1 2而月I回旋之回旋構件 13 〇 機械手6包括用於搭載基板2之複數個爪部（抓爪）14。機 械手6之基端可旋動地連結於機械臂7之前端 構成為具有兩個關節部15並相對於本體部⑼ 另 外，機械臂7之基端固定於支持構㈣上 ; 中，兩個機械手6與兩條機械f 〜 式而配置。即，本實施形態之機=:方向重疊之方 器人3為雙臂型機考人。 再者’機器人3亦可為包括一個機 ： 單臂型機器人。 餘機械臂7之 144732.doc 201036772 對該機器人3而言，使支持構件10與機械手6及機械臂7 一起相對於柱狀構件U進行上下運動，並且使機械臂7相 對於本體部8進行伸縮，藉此將基板2向製造袭置4中搬入 或者將基板2從製造裝置种搬出。另外，使基㈢相對於 底座構件9進行水平移動，並且使回旋構件13相對於基台 12進行回旋，藉此，機械手6會在三個製造裝置4之二 動。. The configuration of the robot is as follows. [Effects of the Invention] As described above, the safety shield of the present invention can ensure the safety of the operator and can prevent damage even if the industrial robot collides. [Embodiment] Hereinafter, embodiments of the present invention will be described based on the drawings. (Arrangement of Factory Arrangement with Safety Shield and Industrial Robot) Fig. 1 is a plan view showing an example of a factory arrangement in which a safety shield 实施 according to an embodiment of the present invention is not provided. FIG. 2 is a plan view of the industrial robot 3 shown in FIG. Fig. 3 is a view showing the industrial robot 3 from the E_E direction of Fig. 2 . The safety shield of the present embodiment is used in a factory equipped with an industrial robot 3 (hereinafter referred to as "robot 3") for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as "substrate 2"). To ensure the safety of the operator. As shown in Fig. 1, in the factory, the safety shield 设置 is, for example, set to 144732.doc 201036772 to surround the remaining # of the robot 3 that has been surrounded by the three liquid crystal display manufacturing devices 4. In the present embodiment, the work area R of the robot 3 is formed by the three manufacturing apparatuses 4 and the safety shield 1. As described above, the robot 3 is a transfer robot for transporting the substrate 2. The robot 3 of the present invention is particularly suitable for a large-sized machine that transports the large substrate 2, for example, a substantially square substrate 2 having a side length of about 3 m. Furthermore, the robot 3 may be a robot that transports a semiconductor wafer or the like. α · · 呵 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载 搭载The base member 9 of the body portion 8 is movably supported in the horizontal direction. The body non-limbs 8 includes a support member 1 that supports the base end sides of the two robot arms 7 and can move up and down, and a columnar member u, #cost body portion for movably supporting the support member 1G in the up and down direction a lower end portion 8 and a base 12 that is horizontally movable with respect to the base member 9, a lower end of the fixed columnar member 11, and a revolving member 13 with respect to the soil σ 1 2 A plurality of claws (gripper) 14 of the substrate 2. The base end of the robot 6 is rotatably coupled to the front end of the robot arm 7 and has two joint portions 15 and is opposite to the body portion (9). Further, the base end of the robot arm 7 is fixed on the support structure (4); The robot 6 is configured with two mechanical f 〜. That is, the machine 3 of the present embodiment =: the direction in which the person 3 is a dual-arm type tester. Furthermore, the robot 3 can also include a single machine: a single arm type robot. 144732.doc 201036772 of the remaining robot arm 7 for the robot 3, the support member 10 is moved up and down with respect to the columnar member U together with the robot 6 and the robot arm 7, and the robot arm 7 is moved relative to the body portion 8. By stretching and contracting, the substrate 2 is carried into the manufacturing process 4 or the substrate 2 is carried out from the manufacturing apparatus. Further, the base (3) is horizontally moved with respect to the base member 9, and the swing member 13 is rotated with respect to the base 12, whereby the robot 6 is moved by the three manufacturing devices 4.
(安全護罩之構成） 圖4係圖1所示之安全護罩丨之前視圖。圖5係從圖*之 方向表示安全護罩1之俯視圖。圖6係圖4之〇部之放大圖。 圖7係圖6之H-H剖面之剖面圖。 本實施形態t，將安全護罩丨設置成使圖4中安全護罩】 之紙面近前側之面與機器人3對向。因此，於以下說明 中，將圖4之紙面近前側（圖5之上側）作為「對向」側，將 圖4之紙面深側（圖5之下側）作為「反對向」側。此外，亦 可將安全護罩1設置成使圖4中安全護罩丨之紙面深側之面 與機器人3對向。 如圖4、圖5所示，安全護罩1包括：薄的平板狀的罩構 件2 1、保持罩構件21之框構件22、及從下側支撐·框構件22 之兩個架台23。而且，如圖6、圖7所示，安全護罩1包 括：固定於罩構件21上之複數個第一之螺栓24(以下，稱 為「第一螺栓24」）、固定於框構件22上之複數個第二之 螺栓25(以下’稱為「第二螺栓25」）、及架設在第一螺栓 24與第二螺栓25之間以便連接罩構件21與框構件22之金屬 144732.doc 201036772 線26。 罩構件2 1係由半透明或透明之樹脂所形成。具體而言， 本實施形態之罩構件2 1係由透明的聚氯乙烯（pVC，p〇ly vinyl chloride)所形成。又，罩構件21形成為長方形狀，以 其長度方向作為上下方向而保持於框構件22上。再者，罩 · 構件21之厚度例如為5 mm。另外，罩構件2丨亦可由聚碳酸 酯等形成。 框構件22係由包含金屬製或樹脂製之角材且平行的兩條 長邊部22a、及包含金屬製或樹脂製之角材且比長邊部22a 0 短的平行的兩條短邊部22b所構成。具體而言，兩條長邊 部22a與兩條短邊部22b組合成長方形之框狀而形成框構件 22，框構件22以長邊部22a之長度方向作為上下方向而設 置。另外，配置於下側之短邊部22b被架台23所支持。 如圖7所示，在框構件22之内周面上，以凹陷的方式形 成有與罩構件21之外周側卡合之作為卡合機構的卡合槽 22c。即，在長邊部223與短邊部22b之内側面之整個區域 上形成有卡合槽22c。該卡合槽22(:形成為其剖面形狀成長 〇 方形之角槽狀。 架台23例如係調節墊或[字形板等，其係由金屬或樹脂 形成。兩個架台23係以在圖4之左右方向上隔開特定間隔 之狀態安裝於框構件22之下端並载置於地板等上。該架台 - 23起到防止安全護罩1傾倒之功能。 第一螺栓24係在插通於沿圖4之紙面垂直方向貫穿罩構 件21之貫穿孔21a之狀態下與螺母（具體而言，τ溝螺母π? 144732.doc •10- 201036772 螺合’藉此固定於罩構件21上（參照圖7)。本實施形態中， 以使第一螺栓24之頭部2牝配置於罩構件21之對向側，且 使螺母27配置於罩構件21之反對向側之方式，將第一螺栓 . 24固定於罩構件21上。另外，在頭部24a與罩構件21之間 . 及螺母27與罩構件21之間，配置有墊圈28。於頭部24a 上，以貫穿於徑方向之方式形成有供金屬線26插通之插通 孑匕24b ° Q 複數個第一螺栓24係以沿罩構件21外周之方式而配置。 本實施形態中，在圖4之罩構件21之左右兩端側形成有複 數個貫穿孔2ia，沿著與長邊部22a卡合之罩構件2丨之左右 兩而配置有複數個弟一螺检2 4。例如，分別沿著圖4之 罩構件21之左右兩端，將5個第一螺栓24等間隔地配置。 第二螺栓25係在插通於沿圖4之紙面垂直方向貫穿框構 件22之貫穿孔22(1之狀態下與螺母（具體而言，T溝螺母）29 螺合，藉此固定於框構件22上（參照圖7)。本實施形態中， 〇 以使第二螺栓25之頭部25a配置於框構件22之對向側，且 使螺母29配置於框構件22之反對向側之方式，將第二螺栓 25固定於框構件22上。另外，在頭部25a與框構件22之 . 間，配置有墊圈3 0。 -複數個第二螺栓25係以對應於第一螺栓24之方式沿著罩 構件21之外周而配置。本實施形態中，在長邊部之貫 穿孔21a之附近形成有貫穿孔22d，沿著圖4之罩構件21之 左右兩端配置有複數個第二螺栓25。例如’分別沿著圖4 之罩構件21之左右兩端，將5個第：螺栓25以與玲第一螺 U4732.doc -11 - 201036772 栓24大致相同間隔地配置。 金屬線26係以通過第二螺拾25之螺紋部之外周虚第 栓24之插通孔⑽之方式，在第-螺栓24與第二螺栓25之 間捲繞】周’且其兩端部被撼合在—起。本實施形能中， 金屬線26較松地捲繞在第—螺㈣與第二螺栓25之間。另 外’金屬線26插通於第—螺㈣之插通孔⑽中，且在被 長邊部22a與墊圈30夾持之狀態下架設在第一螺栓μ與第 二螺栓25之間。即’金屬線％配置於罩構件。與框構件Μ(Composition of safety shield) Fig. 4 is a front view of the safety shield 所示 shown in Fig. 1. Fig. 5 is a plan view showing the safety shield 1 from the direction of Fig. *. Figure 6 is an enlarged view of the crotch portion of Figure 4. Figure 7 is a cross-sectional view taken along the line H-H of Figure 6. In the t-th embodiment, the safety shield 丨 is placed such that the surface of the safety shield of the safety shield of Fig. 4 faces the robot 3 toward the front side. Therefore, in the following description, the front side of the paper surface of Fig. 4 (the upper side in Fig. 5) is referred to as the "opposite side", and the deep side of the paper surface (the lower side of Fig. 5) of Fig. 4 is referred to as the "opposing direction" side. Further, the safety shield 1 may be disposed such that the surface on the deep side of the paper surface of the safety shield 图 in Fig. 4 faces the robot 3. As shown in Figs. 4 and 5, the safety shield 1 includes a thin flat cover member 21, a frame member 22 for holding the cover member 21, and two stands 23 for supporting the frame member 22 from the lower side. Further, as shown in FIGS. 6 and 7, the safety shield 1 includes a plurality of first bolts 24 (hereinafter referred to as "first bolts 24") fixed to the cover member 21, and is fixed to the frame member 22. a plurality of second bolts 25 (hereinafter referred to as "second bolts 25"), and metal erected between the first bolts 24 and the second bolts 25 to connect the cover member 21 and the frame member 22 144732.doc 201036772 Line 26. The cover member 21 is formed of a translucent or transparent resin. Specifically, the cover member 21 of the present embodiment is formed of transparent polyvinyl chloride (pVC). Further, the cover member 21 is formed in a rectangular shape, and is held by the frame member 22 with its longitudinal direction as the vertical direction. Further, the thickness of the cover member 21 is, for example, 5 mm. Further, the cover member 2A may be formed of polycarbonate or the like. The frame member 22 is composed of two long side portions 22a including a metal or resin angle member and parallel, and two parallel short side portions 22b including a metal or resin angle material and shorter than the long side portion 22a 0 . Composition. Specifically, the two long side portions 22a and the two short side portions 22b are combined into a rectangular frame shape to form the frame member 22, and the frame member 22 is provided with the longitudinal direction of the long side portion 22a as the vertical direction. Further, the short side portion 22b disposed on the lower side is supported by the gantry 23. As shown in Fig. 7, on the inner circumferential surface of the frame member 22, an engagement groove 22c as an engagement mechanism that engages with the outer peripheral side of the cover member 21 is formed in a recessed manner. That is, the engagement groove 22c is formed over the entire inner side surface of the long side portion 223 and the short side portion 22b. The engagement groove 22 is formed in an angular groove shape in which the cross-sectional shape is increased in a square shape. The gantry 23 is, for example, an adjustment pad or a [shaped plate or the like, which is formed of metal or resin. The two gantry 23 are attached to FIG. The state in which the left and right directions are spaced apart by a certain interval is attached to the lower end of the frame member 22 and placed on the floor or the like. The gantry 23 functions to prevent the safety shield 1 from falling over. The first bolt 24 is inserted in the figure. 4 is perpendicular to the through hole 21a of the cover member 21 and is screwed to the nut (specifically, the tiling nut π? 144732.doc • 10 - 201036772 is screwed) to be fixed to the cover member 21 (refer to FIG. 7). In the present embodiment, the first bolt 24 is disposed such that the head portion 2 of the first bolt 24 is disposed on the opposite side of the cover member 21, and the nut 27 is disposed on the opposite side of the cover member 21. The cover member 21 is fixed to the cover member 21. Further, a washer 28 is disposed between the head portion 24a and the cover member 21, and between the nut 27 and the cover member 21. The head portion 24a is formed to penetrate the radial direction. The insertion wire 供 24b ° Q for the metal wire 26 is inserted into the plurality of first bolts 24 In the present embodiment, a plurality of through holes 2ia are formed on the left and right end sides of the cover member 21 of Fig. 4, and the left and right sides of the cover member 2 are engaged with the long side portion 22a. The plurality of first bolts 24 are disposed at equal intervals along the left and right ends of the cover member 21 of Fig. 4. For example, the second bolts 25 are inserted at the edges. The paper surface of FIG. 4 penetrates the through hole 22 of the frame member 22 in the vertical direction (in the state of 1 and is screwed to the nut (specifically, the T-groove nut) 29, thereby being fixed to the frame member 22 (see FIG. 7). In the embodiment, the second bolt 25 is fixed to the frame member 22 such that the head portion 25a of the second bolt 25 is disposed on the opposite side of the frame member 22, and the nut 29 is disposed on the opposite side of the frame member 22. Further, a washer 30 is disposed between the head portion 25a and the frame member 22. - The plurality of second bolts 25 are disposed along the outer circumference of the cover member 21 so as to correspond to the first bolts 24. In the embodiment, a through hole 22d is formed in the vicinity of the through hole 21a of the long side portion, and the cover member along the FIG. A plurality of second bolts 25 are disposed at the two ends of the left and right sides of the 21st. For example, 'the left and right ends of the cover member 21 respectively along the FIG. 4, the five first: the bolts 25 and the first snail U4732.doc -11 - 201036772 The bolts 24 are disposed at substantially the same interval. The metal wire 26 is wound between the first bolt 24 and the second bolt 25 in such a manner that the insertion hole (10) of the second plug 24 is passed through the threaded portion of the second screw 25 The circumference 'and its both ends are twisted together. In the present embodiment, the wire 26 is loosely wound between the first screw (four) and the second bolt 25. Further, the metal wire 26 is inserted into the insertion hole (10) of the first screw (4), and is interposed between the first bolt μ and the second bolt 25 while being sandwiched by the long side portion 22a and the washer 30. That is, the metal wire % is disposed in the cover member. With frame componentsΜ
之對向側。本實施形態之金屬線26係連接罩構件21與框構 件22之線材狀構件。再者，於圖6、圖7等中，省略將金屬 線26之兩端部彼此撚合而成之撚合部分之圖示。另外，本 實施形態之金屬線26係經淬火處理後之較硬的金屬線。 本實軛形悲之安全濩罩1係以其對向側朝向作業區域r内 侧之狀態而設置。因此，當機器人3發生某些故障而使機 械手6(具體而言，爪部14)自作業區域R朝安全護罩丨露出 時，爪部14之前端會從圖5所示之箭頭方向碰撞到安全護On the opposite side. The wire 26 of the present embodiment is a wire-like member that connects the cover member 21 and the frame member 22. Further, in Fig. 6, Fig. 7, and the like, the illustration of the merging portion in which the both end portions of the metal wire 26 are twisted together is omitted. Further, the metal wire 26 of the present embodiment is a hard metal wire which has been subjected to quenching treatment. The solid sash safety cover 1 is provided with its opposite side facing the inner side of the work area r. Therefore, when the robot 3 has some trouble and the robot 6 (specifically, the claw portion 14) is exposed from the work area R toward the safety shield, the front end of the claw portion 14 collides with the arrow shown in FIG. To safety
罩1之對向側。具體而言，爪部丨4之前端碰撞到罩構件2】 之對向側之面。 當爪部14之前端碰撞到罩構件21之對向側之面時，因機 械手6之移動速度而導致罩構件21之外周側之一部分從框 構件22之卡合槽22c脫開。本實施形態中，因為在固定於 罩構件21上之第一螺栓24與固定於框構件22上之第二螺栓 25之間架設有金屬線26 ’所以即便罩構件2丨之外周側之一 分從卡合槽22c脫開，罩構件21亦能經由金屬線26而保 144732.d〇c -12- 201036772 持於框構件22上。因此，罩構件21不會從框構件22上脫 落。另外，藉由金屬線26而限制罩構件21朝向作業區域R 外側之移動。 本只施开九邊中’藉由第一螺栓24、第二螺栓25及金屬線 . 26等而構成防脫機構35，其係在罩構件21從卡合槽22c脫 開時用以防止罩構件21從框構件22上脫落。又，本實施形 態之防脫機構35成為限制機構，其係在罩構件21從卡合槽 0 22c脫開時限制罩構件21朝向作業區域R外側之移動。 另外，當爪部14之前端碰撞到罩構件21之對向側之面 時，作為機械臂7伸縮動作之驅動源之馬達的轉矩會驟然 變動。本實施形態中，在檢測到該轉矩之驟然變動時，該 馬達停止。 (本實施形態之主要效果） 如上所述，本實施形態中，罩構件2丨之外周側卡合於框 構件22之卡合槽22c，罩構件21被保持於框構件22上。而 〇 且，本實施形態中，在固定於罩構件21上之第一螺拴24與 固定於框構件22上之第二螺拴25之間架設有金屬線26。因 此，在爪部14之前端與罩構件21發生碰撞時，首先藉由卡 • 合於卡合槽22c之罩構件21來吸收機械手6等所具有之動 - 能，直至罩構件21之一部分從卡合槽22c脫開為止，機械 手6減速。又，之後，藉由金屬線％來吸收先前未吸收完 的動能，機械手6停止。即，本實施形態中，能利用罩構 件21與金屬線26兩者來吸收機械手6等所具有之動能，從 而能利用安全護罩1來吸收機械手6等所具有之全部動能。 144732.doc 13 201036772 其結果為，纟實施形態能利用安全護罩】使機械手6停止， 從而能確保作業者之安全。 另外，本實施形態中，即便罩構件21之外周難卡合槽 2城開，但由於罩構件21經由金屬線以而保持於框構件 22上’故而亦並無罩構件21朝作業區域尺外側飛出之情 況。因此，該點亦能確保作業者之安全。 本實她形態中，藉由卡合於卡合槽22c之罩構件2丨與金 屬線26而分兩階段地吸收機械手6等所具有之動能，因此 可減小罩構件朝框構件22之固定強度。另外，罩構扣 係由樹脂所形成。因此，本實施形態中，能緩和爪部㈣ 罩構件發生碰撞時之衝擊，其結果為，即便爪部14碰撞 到罩構件21，亦能防止爪部14等損傷。 本實施形態中，例如’將1〇個第—螺栓24及第二螺栓25 沿著罩構件21之外周以特定之間隔而配置。即，例如將⑺ 個防脫機構35沿著罩構件21之外周以規定之間隔而配置。 因此，在爪部丨4碰撞到罩構件21時，能防止罩構件以以圖 4之左右方向作為轴方向進行旋動。因&，本實施形態 中，能利用金屬線26之變形來確實吸收機械手6等所具有 之動能。另外，能防止罩構件21以圖4之左右方向作=軸 方向進行旋動，因此，能防止罩構件2丨接觸到作業者。 本實施形態中，藉由架設在固定於罩構件21上之第一螺 栓24與固定在框構件22上之第二螺栓25之間的金屬線％'，' 來連接罩構件21與框構件22。因此，能以比較簡單之構成 而連接罩構件21與框構件22。即，能以比較簡單之構成來 144732.doc -14- 201036772 防止罩構件21之外周側從卡合槽22c脫開時罩構件21從框 構件22上脫落，並能限制罩構件21朝向作業區域R外側之 移動。 本實施形態中，在第—螺栓24之頭部24a，形成有供金 . 屬線26插通之插通孔24b。因此，金屬線26難以從第一螺 栓24與第二螺栓25之間掉落。 本實施形態中，罩構件21為半透明或透明。因此，作業 0 者能從安全護罩1之外側確認機器人3之狀態。另外，本實 施形態中，罩構件21係由氯乙稀等樹脂所形成，故而能降 低安全護罩1之成本。 (其他實施形態） 上述實施形態為本發明之較佳形態之一例，但並不侷限 於此S不I更本發明之要指之範圍内能進行各種變形實 施。 於上述實鉍形態中’藉由第一螺栓24、第二螺栓Μ及金 〇 屬線26等而構成防脫機構（限制機構）35。除此之外，如圖8 斤示例如亦可利用在罩構件21從卡合槽22c脫開時與罩 構件21接觸之位置處固定於框構件22上之板狀構件扣等而 • 構成防脫機構(限制機構)45。具體而言，可利用以特定之 間固疋於框構件22之長邊部22a之背面、及至少配置於 下側之紐邊部22b之背面上的板狀構件4〇等而構成防脫機 構（限制機構）45。 ;°玄潰$時’例如’為了使與爪部1 4碰撞時產生撓曲之 罩構件21不會朝板狀構件4〇之反對向侧脫落，在使板狀構 144732.doc 201036772 件40突出於框構件22内周側之狀態下，將板狀構件4〇固定 於長邊部22a等之背面。又，於該情形時，板狀構件仆係 由螺栓41而固定於長邊部2以等之背面。而且，於該情形 時，利用板狀構件40之變形能夠吸收機械手6等所具有之 動能。另夕卜，亦可藉由第一螺栓24、第二螺栓25及金屬線 %、以及板狀構件40兩者來構成防脫機構及限制機構。 上述實施形態中，金屬線26係以通過第二螺栓25之螺紋 部之外周與插通孔24b之方式，在第_螺栓Μ與第二螺检 25之間捲繞旧。除此之外，例如金屬線％亦可以通過第 二螺栓25之螺紋部之外周與插通孔糾之方式，在第—螺 栓24與第二螺栓25之間捲繞2周以上。 ” 上述實施形態中 臀％24與第二螺拴25之間架設 有金屬線26 ’利用金屬線26來連接罩構件以與框構件& 除此之外，例如亦可在第-螺栓24與第二螺检^之間架設 鋼琴弦，利用該鋼琴弦來連接罩構件21與框構❹。另 1 卜灵亦可在第—螺栓24與第二螺㈣之間架設金屬線26與 =琴弦以外之線材狀構件，利㈣線材狀構件來連接罩構 之門1Γ框構件22。進而，還可在第—螺㈣與第二螺栓25 ^㈣條㈣㈣件’利㈣鏈狀構件來連接罩構件 構件2:。即’可將伸縮性優異、且能經受Μ 衝擊之構件架設在第—螺㈣與第二螺检 間，並利用該構件來連接罩構件21與框構件U。 ^述實施形態中’金屬線26係經淬火處理後之較硬的全 但金屬線26亦可為易彎曲之生金屬線。另外，上述 144732.doc 201036772 實施形態中，金屬線26插通於第一螺栓24之插通孔之朴 中，但金屬線26亦可通過第一螺栓24之外周且炎持於罩構 件21之對向側與墊圈28之間。 上述實施形態中，在固定於罩構件21上之第一螺栓24與 固定於框構件22上之第二螺栓25之間架設有金屬線26，但 亦可在罩構件21及框構件22上形成金屬線26之捲繞部，並 在δ亥捲繞部之間捲繞金屬線26。另外，於上述實施形，離、 ❹ 中，沿著罩構件21之外周配置有例如1〇個防脫機構35，但 沿著罩構件21之外周所配置之防脫機構35只要為三個以上 即习' 〇 上述實施形態中，安全護罩丨係設置成包圍已被三個製 造裝置4包圍了三方之機器人3之剩餘一方。除此之外，例 如亦可利用兩個製造裝置4與兩個安全護罩丨來包圍機器人 3之四方。於該情形時，藉由兩個製造裝置4與兩個安全護 罩1而形成機器人3之作業區域r。另外，亦可利用一個製 Ο 造裝置4與三個安全護罩1來包圍機器人3之四方。於該情 形時，藉由一個製造裝置4與三個安全護罩丨而形成機器人 3之作業區域R。進而，還可利用四個安全護罩丨來包圍機 . 器人3之四方。於該情形時，藉由四個安全護罩丨而形成機 • 器人3之作業區域R。 上述實施形態中，罩構件21為半透明或透明，但罩構件 21亦可不為半透明或透明。另外，於上述實施形態中，在 設置有搬送基板2等之搬送用機器人3之工廠中使用安全護 罩1，但亦可在設置有搬送用以外之用途之機器人之工廠 144732.doc •17- 201036772 中使用安全護罩1。 再者，上述實施形態中’安全護罩1之高度例如與機器 人3之咼度大致相同。但是，例如在無塵室内設置安全護 罩1的情況下，亦可將安全護罩丨設置於從操作者之腰附近 直到機器人3之上端為止的部位，並在安全護罩丨之下側設 置網狀之護欄，不隔斷機器人3周圍之空氣流動。 【圖式簡單說明】 圖1係表示設置有本發明之實施形態之安全護罩的工廠 之布置之一例的俯視圖。 圖2係圖1所示之產業用機器人之俯視圖。 圖3係從圖2之E-E方向表示產業用機器人之示圖。 圖4係圖1所示之安全護罩之前視圊。 圖5係從圖4之F-F方向表示安全護罩之俯視圖。 圖ό係圖4之G部之放大圖。 圖7係圖6之Η-Η剖面之剖面圖。 圖8係用於說明本發明之其他實施形態之防脫機構及限 制機構之剖面圖。 【主要元件符號說明】 1 安全護罩 3 機器人（產業用機器人） 6 機械手 7 機械臂 21 罩構件 22 框構件 144732.doc 201036772 22c 卡合槽（卡合機構） 24 第一螺栓（第一之螺栓） 24a 頭部 24b 插通孔 25 第二螺栓（第二之螺栓） 26 金屬線（線材狀構件） 35 > 45 防脫機構、限制機構 Ο 40 板狀構件 R 作業區域 ❹ 144732.doc •19-The opposite side of the cover 1. Specifically, the front end of the claw portion 4 collides with the opposite side of the cover member 2]. When the front end of the claw portion 14 hits the opposite side of the cover member 21, a part of the outer peripheral side of the cover member 21 is disengaged from the engagement groove 22c of the frame member 22 due to the moving speed of the robot hand 6. In the present embodiment, since the metal wire 26' is placed between the first bolt 24 fixed to the cover member 21 and the second bolt 25 fixed to the frame member 22, even if the cover member 2 is outside the circumference side The cover member 21 can also be detached from the engagement groove 22c, and the cover member 21 can also be held by the frame member 22 via the wire 26 144732.d〇c -12- 201036772. Therefore, the cover member 21 does not fall off from the frame member 22. Further, the movement of the cover member 21 toward the outside of the work area R is restricted by the metal wire 26. In the present invention, only the first bolt 24, the second bolt 25, the metal wire 26, and the like are formed to constitute the retaining mechanism 35, which is used to prevent the cover when the cover member 21 is disengaged from the engaging groove 22c. The member 21 is detached from the frame member 22. Further, the retaining mechanism 35 of the present embodiment serves as a restricting mechanism for restricting the movement of the cover member 21 toward the outside of the work area R when the cover member 21 is disengaged from the engagement groove 0 22c. Further, when the front end of the claw portion 14 collides with the opposite side of the cover member 21, the torque of the motor which is the drive source of the telescopic operation of the robot arm 7 suddenly changes. In the present embodiment, when a sudden change in the torque is detected, the motor is stopped. (Main effect of the present embodiment) As described above, in the present embodiment, the outer peripheral side of the cover member 2 is engaged with the engagement groove 22c of the frame member 22, and the cover member 21 is held by the frame member 22. Further, in the present embodiment, the metal wire 26 is placed between the first screw 24 fixed to the cover member 21 and the second screw 25 fixed to the frame member 22. Therefore, when the front end of the claw portion 14 collides with the cover member 21, the movement of the robot 6 or the like is first absorbed by the cover member 21 that is engaged with the engagement groove 22c until one portion of the cover member 21 The robot 6 is decelerated until it is disengaged from the engagement groove 22c. Further, after that, the kinetic energy that has not been absorbed before is absorbed by the metal wire %, and the robot 6 is stopped. In other words, in the present embodiment, the kinetic energy of the robot 6 or the like can be absorbed by both the cover member 21 and the wire 26, and the kinetic energy of the robot 6 or the like can be absorbed by the safety shield 1. 144732.doc 13 201036772 As a result, in the embodiment, the safety guard can be used to stop the robot 6 and the safety of the operator can be ensured. Further, in the present embodiment, even if the cover member 21 is hard to be engaged with the groove 2, the cover member 21 is held by the frame member 22 via the wire. Therefore, the cover member 21 does not face the outside of the work area. Flying out of the situation. Therefore, this point also ensures the safety of the operator. In the present embodiment, the kinetic energy of the robot 6 or the like is absorbed in two stages by the cover member 2丨 and the wire 26 that are engaged with the engaging groove 22c, so that the cover member can be reduced toward the frame member 22. Fixed strength. Further, the cover fastener is formed of a resin. Therefore, in the present embodiment, the impact of the collision of the claw portion (four) cover member can be alleviated, and as a result, even if the claw portion 14 collides with the cover member 21, the claw portion 14 or the like can be prevented from being damaged. In the present embodiment, for example, one of the first bolts 24 and the second bolts 25 are disposed at a predetermined interval along the outer circumference of the cover member 21. That is, for example, the (7) retaining mechanisms 35 are disposed at predetermined intervals along the outer circumference of the cover member 21. Therefore, when the claw portion 4 collides with the cover member 21, it is possible to prevent the cover member from being rotated in the axial direction in the direction of the left and right in Fig. 4 . In the present embodiment, the kinetic energy of the robot 6 or the like can be surely absorbed by the deformation of the wire 26 in the present embodiment. Further, since the cover member 21 can be prevented from being rotated in the direction of the ? in the right and left direction of Fig. 4, it is possible to prevent the cover member 2 from coming into contact with the operator. In the present embodiment, the cover member 21 and the frame member 22 are connected by a metal wire %', which is bridged between the first bolt 24 fixed to the cover member 21 and the second bolt 25 fixed to the frame member 22. . Therefore, the cover member 21 and the frame member 22 can be connected with a relatively simple configuration. In other words, the cover member 21 can be detached from the frame member 22 when the outer peripheral side of the cover member 21 is prevented from being released from the engagement groove 22c by a relatively simple configuration, and the cover member 21 can be restricted toward the work area. The movement of the outside of R. In the present embodiment, the insertion hole 24b through which the gold wire 26 is inserted is formed in the head portion 24a of the first bolt 24. Therefore, the metal wire 26 is difficult to fall from between the first bolt 24 and the second bolt 25. In the present embodiment, the cover member 21 is translucent or transparent. Therefore, the worker 0 can confirm the state of the robot 3 from the outside of the safety shield 1. Further, in the present embodiment, the cover member 21 is formed of a resin such as vinyl chloride, so that the cost of the safety shield 1 can be reduced. (Other Embodiments) The above-described embodiments are an example of a preferred embodiment of the present invention, and are not limited thereto, and various modifications can be made without departing from the scope of the present invention. In the above-described embodiment, the retaining mechanism (restricting mechanism) 35 is constituted by the first bolt 24, the second bolt Μ and the metal wire 26, and the like. In addition, as an example, as shown in FIG. 8 , a plate-like member buckle that is fixed to the frame member 22 at a position where the cover member 21 comes into contact with the cover member 21 when the cover member 21 is disengaged from the engagement groove 22c can be used. Disengagement mechanism (restriction mechanism) 45. Specifically, the retaining mechanism can be configured by a plate member 4 that is fixed to the back surface of the long side portion 22a of the frame member 22 and at least on the back surface of the lower side edge portion 22b. (Restriction Agency) 45. When the 玄 $ $ 时 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The plate-like member 4 is fixed to the back surface of the long side portion 22a or the like in a state of being protruded from the inner peripheral side of the frame member 22. Further, in this case, the plate-like member is fixed to the long side portion 2 by the bolt 41 so as to be the back surface. Further, in this case, the kinetic energy of the robot 6 or the like can be absorbed by the deformation of the plate member 40. Further, the retaining mechanism and the restricting mechanism may be configured by the first bolt 24, the second bolt 25, the wire 100, and the plate member 40. In the above embodiment, the wire 26 is wound between the first bobbin and the second screw 25 so as to pass through the outer circumference of the screw portion of the second bolt 25 and the insertion hole 24b. In addition, for example, the metal wire % may be wound between the first bolt 24 and the second bolt 25 for two or more times by the outer circumference of the screw portion of the second bolt 25 and the insertion hole. In the above embodiment, the metal wire 26' is placed between the buttocks%24 and the second screw 25. The metal wire 26 is used to connect the cover member to the frame member and, in addition, for example, the first bolt 24 may be used. A piano string is erected between the second screw inspections, and the piano string is used to connect the cover member 21 and the frame structure. The other one can also erect the metal wire 26 and the piano between the first bolt 24 and the second screw (four). a wire-like member other than the string, the wire member is connected to the door member 1 of the cover member. Further, the wire member can be connected to the second screw (4) and the second bolt 25 ^ (four) (four) (four) The cover member member 2: that is, a member which is excellent in stretchability and capable of withstanding a shock can be placed between the first screw and the second screw, and the member is used to connect the cover member 21 and the frame member U. In the embodiment, the hard metal wire 26 after the quenching treatment may be a flexible metal wire. In addition, in the above embodiment, the wire 26 is inserted into the first wire. The bolt 24 is inserted into the through hole, but the metal wire 26 can also pass through the first bolt 24 Further, it is held between the opposite side of the cover member 21 and the washer 28. In the above embodiment, the first bolt 24 fixed to the cover member 21 and the second bolt 25 fixed to the frame member 22 are placed between the brackets. Although the metal wire 26 is formed, the winding portion of the metal wire 26 may be formed on the cover member 21 and the frame member 22, and the metal wire 26 may be wound between the δH winding portions. Further, in the above-described embodiment, the 离, ❹ In the above-described embodiment, the detachment prevention mechanism 35 is disposed along the outer circumference of the cover member 21, but the detachment prevention mechanism 35 disposed along the outer circumference of the cover member 21 is preferably three or more. The shroud is arranged to surround the remaining one of the robots 3 that have been surrounded by the three manufacturing devices 4. In addition, for example, the two manufacturing devices 4 and the two safety shields can be used to surround the robot 3 In this case, the work area r of the robot 3 is formed by the two manufacturing devices 4 and the two safety shields 1. Alternatively, it can be surrounded by a manufacturing device 4 and three safety shields 1. The square of the robot 3. In this case, with a manufacturing 4 and three safety shields form the working area R of the robot 3. Further, four safety shields can be used to surround the machine. The four sides of the machine. In this case, by four safety shields In the above embodiment, the cover member 21 is semitransparent or transparent, but the cover member 21 may not be translucent or transparent. Further, in the above embodiment, the cover member 21 is provided with The safety shield 1 is used in a factory for transporting the robot 3 such as the substrate 2, but the safety shield 1 may be used in a factory 144732.doc • 17-201036772 of a robot provided for use other than the transport. In the above embodiment, the height of the safety shield 1 is substantially the same as the height of the robot 3, for example. However, for example, in the case where the safety shield 1 is provided in the clean room, the safety shield 亦可 can also be placed at a position from the vicinity of the operator's waist to the upper end of the robot 3, and is disposed under the safety guard 丨A mesh fence that does not block the flow of air around the robot 3. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing an example of a factory arrangement in which a safety shield according to an embodiment of the present invention is installed. 2 is a plan view of the industrial robot shown in FIG. 1. Fig. 3 is a view showing the industrial robot from the E-E direction of Fig. 2; Figure 4 is a front view of the safety shield shown in Figure 1. Fig. 5 is a plan view showing the safety shield from the F-F direction of Fig. 4. Figure ό is an enlarged view of the G portion of Figure 4. Figure 7 is a cross-sectional view of the Η-Η section of Figure 6. Fig. 8 is a cross-sectional view for explaining a detachment prevention mechanism and a restriction mechanism according to another embodiment of the present invention. [Description of main component symbols] 1 Safety shield 3 Robot (industrial robot) 6 Robot 7 Robot arm 21 Cover member 22 Frame member 144732.doc 201036772 22c Engagement groove (engagement mechanism) 24 First bolt (first Bolt) 24a Head 24b Inserting hole 25 Second bolt (second bolt) 26 Metal wire (wire-like member) 35 > 45 Anti-off mechanism, restriction mechanism Ο 40 Plate member R Work area 144 144732.doc • 19-