201034981 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種陣列玻璃透鏡與其成型方法及成型設備，特別是 有關於利用高溫輔助氣壓成型之設備所製成之陣列玻璃透鏡。 【先前技術】 隨著各種光學透鏡的技術不斷進步，製程已朝向高精密化、高密度化 以及微小化等方面發展。在光學透鏡的應用上，不僅要小型化，對於解析 Ο201034981 VI. Description of the Invention: [Technical Field] The present invention relates to an array glass lens and a molding method therefor and a molding apparatus, and more particularly to an array glass lens manufactured by using a high temperature auxiliary air pressure molding apparatus. [Prior Art] With the advancement of various optical lens technologies, the process has progressed toward high precision, high density, and miniaturization. In the application of optical lenses, not only miniaturization, but also for analysis
度及穩定度要求也越來越高《尤其微陣列透鏡(Micr0 Lens Array)應用在 COXOiafge Coupled Device)感光元件上，因為能提供良好的光學成像品 質’因此逐漸受到重視。微陣列透鏡也可應用在諸如顯示器的背光板及投 影機的均光架構、光通訊的耦合器以及雷射頭的環紋透鏡等。 目前製造陣列透鏡的方法有傳統超精密加工(ultra_Precisi〇n)、模造技術 (Molding Process) ^ Embossing) ^ ^(Sol-Gel) 製程(Lithographic)等。#中模造技術雖然可以大量生產高精密的微光學鏡 片’但是想要在自由曲面之玻璃上製造出含有陣列結構的組成以利聚焦光 原更句勻散佈，其所使用的模具就必須使用超精密加卫才能使模具表面具 有微、’、α構以現今技術要製作丨具有複雜表面或微結構的模具需要非常高 的製作成本，且模造製糊時需要上下模具，在加熱施壓綱基材時，上 面的密合度容易被破壞而產生_，還有其他諸如沾黏或氣泡 殘留等問喊，都大大的影響陣列透鏡的品質。 相較於模造製程’微影製程雖然能製作出品質較佳轉列透鏡，但立 製k程序複雜且縣過於昂貴，鮮適合量產。 ’ 知技術之製作缺點的方法，以提 因此，業界亟待一種能夠解決上述習 円陣列透鏡的品質’並大幅降低生產成本 201034981 【發明内容】 為了解決上述先前技術不盡理想之處，本發明提供一種陣列玻璃透鏡 的成型方法，此陣列玻璃透鏡的成型方法主要包括： 提供一承載台；提供一成型模具，定位於承載台，成型模具包含有第 一表面、第二表面以及複數個以陣列狀排列、且貫穿第一表面與第二表面 的穿透孔； 提供一玻璃基材，玻璃基材具有一光學面覆蓋於成型模具之第一表 ΟThe degree of stability and stability requirements are also increasing. In particular, the use of Micr0 Lens Array on COXOiafge Coupled Device is a good choice for optical imaging quality. The microarray lens can also be applied to a light-emitting architecture such as a backlight of a display and a projector, a coupler for optical communication, and a ring lens of a laser head. At present, methods for fabricating array lenses include conventional ultra-precision processing (ultra_Precisi〇n), molding technology (Molding Process) ^ Embossing) ^ (Sol-Gel) process (Lithographic), and the like. #中模造技术, although it can mass produce high-precision micro-optical lenses', but wants to make a composition with an array structure on the glass of free-form surface to focus on the light source to spread evenly, the mold used must use super Precisely reinforced can make the surface of the mold have micro, ', α structure. Nowadays, it is necessary to make a mold with complex surface or microstructure, which requires a very high production cost, and the upper and lower molds are needed for the mold to make the paste. When the material is used, the above degree of adhesion is easily destroyed and _, and other screams such as stickiness or bubble residue greatly affect the quality of the array lens. Compared with the molding process, the lithography process can produce a better quality reticle lens, but the k program is complicated and the county is too expensive, which is suitable for mass production. 'The method of knowing the manufacturing defects of the technology, so that the industry needs to be able to solve the quality of the above-mentioned conventional array lens' and greatly reduce the production cost 201034981. SUMMARY OF THE INVENTION In order to solve the above-mentioned prior art, the present invention provides A method for forming an array glass lens, the method for forming the array glass lens mainly comprises: providing a loading platform; providing a molding die and positioning on the loading platform, the molding die comprising a first surface, a second surface and a plurality of arrays a through hole penetrating through the first surface and the second surface; providing a glass substrate having an optical surface covering the first surface of the molding die
Q 面；提供一具有内部容置空間之腔室，使成型模具與玻璃基材置於腔室之 容置空間； 提供第一壓力於腔室之容置空間内； &供第二壓力於成型模具之第二表面，且第二壓力小於第一壓力； 提供一預設溫度予腔室；以及 使第一壓力、第二壓力與預設溫度維持一預設時間；藉此，玻璃基材 的光學面對應於成型模具的穿透孔之位置形成陣列狀排列之陣列玻璃透 鏡。 因此，本發明之主要目的在於提供一種陣列玻璃透鏡之成型方法，藉 由控制壓力差、溫度以及時間，可針對不同材質的玻璃基材與厚度，在玻 璃基材表面上製作出具有高精密度的陣列玻璃透鏡。 本發明之次要目的在於提供一種陣列玻璃透鏡之成型方法，藉由高溫 輔助氣壓財式，壓差法使軟化之麵往成麵具的穿透孔流動，並 且使的每一個穿透孔模洞都具有相同的壓力而形成陣列凸透鏡狀。 、本發明再提供-種陣列玻璃透鏡，其特徵在於_玻璃透鏡係將一具 有光學面的玻璃基材經由以下之成型方法所製作，包括： 提供一承载台； 提供-成型模具，定位於承載台，成型模具包含有第—表面、第二表 面與有複數個鱗列狀制、且貫穿第—表面與第二表面的穿透孔，將玻 璃基材的光學面覆蓋於成型模具之第一表面； 4 201034981 ; 提供一具有内部容置空間之腔室，使成型模具與玻璃基材置於腔室之 容置空間； ‘ 提供第一壓力於腔室之容置空間内； 提供第二壓力於成型模具之第二表面，且第二壓力小於第一壓力； 提供一預設溫度予腔室；以及 • 使第一壓力、第二壓力與預設溫度維持一預設時間； 藉此，玻璃基材的光學面對應於成型模具的等穿透孔之位置形成有陣 列狀排列之陣列透鏡。 Q 因此，本發明之再一目的在於提供一種陣列玻璃透鏡，藉由高溫輔助 氣壓方式所製作而成，形成具有高精密度的凸透鏡狀之微陣列玻璃透鏡， 提供更良好的光學成像品質。 本發明之又一目的在於提供一種陣列玻璃透鏡，藉由高溫辅助氣壓方 式所製作而成，形成具有自由曲面的凸透鏡狀之微陣列玻璃透鏡，提供更 佳的光源散佈性。 本發明再提供一種陣列玻璃透鏡之成型設備，用以將一玻璃基材的光 學面形成陣列透鏡，主要包括：一承載台；—成型模具，可定位於承載台， 成型权具包含有第-表面、第二表面以及複數個以陣列狀排列、且貫穿第 表面與第二表_穿透孔’成雜具之第—表聽供玻璃基材的光學面 覆蓋；一具有内部容置空間之腔室，使成型模具置於腔室之容置空間；一 氣體加壓裝置，提供第一壓力於腔室之容置空間 二壓力於成型模具之第二表面，且第二壓力小於第—壓力；以及一力 == 置’提供-預設溫度予腔室；—控織置，使第—壓力、第二壓力與預設 溫度維持一預設時間。 、° 因此’本發明之另一目的在於提供一種陣列玻璃透鏡之成型設備，藉 域型減的穿透孔貫穿第—表面與第二表面，使賴基材在高溫輔助氣 壓過程中，與模具之間不會產生沾黏與氣泡的問題。 5 201034981 • 本發明之再一目的在於提供一種陣列玻璃透鏡之成型設備，其成型模 具製作容易，有別於傳統的模造技術，不需同時製作具複雜表面的上下模 ' 具，降低生產製作成本。 本發明之又一目的在於提供一種陣列玻璃透鏡之成型設備，藉由高溫 辅助氣壓方式，針對各種不同材質、結構形態或外廓曲線的玻璃基材皆可 製作出陣列狀之透鏡玻璃。 本發明之再一目的在於提供一種陣列玻璃透鏡之成型設備，藉由高溫 辅助氣壓方式以及細模具，可在自由曲面的玻璃基材上製作出構形不拘 Ο 的非軸對稱之陣列玻璃透鏡。 【實施方式】 由於本發明係揭露一種陣列玻璃透鏡與其成型方法及成型設備，其中 所使用之模具製作以及高溫輔助氣壓之原理，已為相關技術領域具有通常 知識者所能明瞭，故以下文中之說明，不再作完整描述。同時，以下文中 所對照之圖式，絲達與本發明特徵有關之結構示意，並未亦不需要依據 實際尺寸完整繪製，盍先敘明。 請參考第1圖，係根據本發明提出之第一較佳實施例，為本發明所提 〇 出之一種陣列玻璃透鏡之成型方法，步驟如下： 步驟101 :提供一承載台。 步驟1〇2:提供-成麵具，定位於承載台之上。此成型模具包含有第 表面與第一表面，以及複數個以陣列狀排列且貫穿第一表 面與第二表面的穿透孔。而此穿透孔形狀並不受限，可以依 照陣列透鏡的形狀需麵設，例如方形、_或是其他非袖 對稱等任何形狀皆可’其中以具有圓形的投影為較佳。此 外’成型模具的材質亦不受限’可以是不鏽鋼、超合金、石 英與陶莞等材質。且成型模具的外廓曲線並不受限，可視玻 璃基材的外廓曲線而設，此外，為製作出表面品質更高的陣 201034981 列玻璃透鏡’此成型模具的表面進一步亦可披覆鉑銥合金或 者是類鑽膜(DLC: Diamond Like Carbon)等高硬度、表面平 滑、抗腐蝕以及摩擦係數較低之材質。 步驟103 :提供一玻璃基材，此玻璃基材具有至少一個光學面，並使此 光學面覆蓋於成型模具的第一表面。其中，玻璃基材可為無 機玻璃材料’例如氧化物系列玻璃、磷酸鹽系玻璃、硼酸酸 鹽系玻璃、齒素系玻璃或者是紅外線玻璃等任何一種材質均 可，且其結構形狀不拘，可以是扁平板材、弧狀板材、或是 不規則的立體形狀。 步驟104 ··提供-具抽部容置空間之腔室，用以使成雜具與玻璃基 材容置在内。 步驟105:提供第-勤於腔室之容置空間内，而此腔室内的第一壓力 係藉由提供一特定氣體所形成，其中此特定氣體係指氮氣、 氬氣或者是其他惰性氣體等，據此使腔室内的第一壓力大於 一大氣壓。 步驟106 :提供第二壓力於成型模具之第二表面，且第二壓力小於第一 壓力，且此第二壓力以趨近於真空為較佳。 步驟1〇7 .提供一預設溫度予腔室，此預設溫度係由一加熱裝置所提 供。此加熱裝置的位置可以在腔室的内部或者是腔室的外部 均可’且可以制傳統的電阻加熱方式，或是加熱效率較高 的紅外線加熱裝置。 步驟108 ··使第—壓力、第二壓力與預設溫度轉―預設時間。 步驟1〇9 :據此使玻璃基材的光學面對應於成麵具的穿透孔之位置， 凸出而形成有陣列狀排列之陣列透鏡。 在此要特別桶的是，相較於以往的模造製程需要製作對應的上模1 ,、下模具，且若要製健_精密的微陣舰鏡，其上下模具所需的製ς 7 201034981 - 成本更是昂貴，且不易維護，而且仍無法有效解決沾粘及氣泡的問題。根 據本發明所提出之陣列玻璃透鏡之成型方法，其成型模具僅需單一個，因 此無上下模具岔合度的問題，有效降低製作成本。且由於此成型模具之穿 透孔係貫穿第一表面與第二表面，係利用高溫輔助加壓製程，使玻璃基材 的對應於穿透孔之位置凸出而形成陣列透鏡，非模具與玻璃接觸成型製 程，因此亦解決了先前技術的玻璃與模具沾黏以及氣泡殘留等之問題。此 外，在高溫持溫一段時間，當玻璃基材軟化後，藉由壓差法，使得成型模 具的所有穿透孔具有相同之壓力差，進而使軟化的玻璃基材之光學面均勻 0 的向成型模具的穿透孔流動，據此形成具有凸透鏡狀的陣列玻璃透鏡。 本發明進一步提出第二較佳實施例，為一種陣列玻璃透鏡，其特徵為 此陣列玻璃透鏡係將一具有光學面的玻璃基材經由以下之成型方法所製作 者，請參考第2圖’其中玻璃基材的材質與結構型態皆如同第一實施例所 述，成型方法的步驟如下： 步驟201 ·提供一承載台。 步驟202 :提供-成麵具’粒於承載台之上。此成型模具包含有第 一表面與第二表面，以及複數個以陣列狀排列且貫穿第一表 面與第二表面的穿透孔。而此穿透孔形狀並不受限，可以依 © 照陣列透鏡的形狀需求而設，例如方形、圓形或是其他非軸 對稱等任何形狀皆可，其中以具有圓形的投影為較佳。此 外，成型模具的材質亦不受限，可以是不鏽鋼、超合金、石 英與陶瓷等材質。且成型模具的外廓曲線並不受限，可視玻 璃基材的外廓曲線而設，此外，為製作出表面品質更高的陣 列玻璃透鏡，此成型模具的表面進一步亦可披覆鉑銀合金或 者是類鑽膜(DLC: Diamond Like Carbon)等高硬度、表面平 滑、抗腐蝕以及摩擦係數較低之材質。 步驟203··提供-具有内部容置空間之腔室，用以使成型模具與玻璃基 201034981 材容置於内。 步驟204:提供第—壓力於腔室之容置空_，此腔室内的第—壓力係 藉由提供-特定氣體所職，其中此特定氣體係指氮氣、氯 氣或者是其他惰性氣體等，據此使腔室内的第一壓力大於一 大氣壓。 、 步驟205 :提供第二壓 壓力’且此第二壓力以趨近於真空為較佳。 步驟2%:提供—預設溫度予腔室，此預設溫度係由-加熱裝置所提 £1 供。此加熱裝置的位置可以在腔室的内部或者是腔室的外部 均可，且可轉⑽統的電阻加熱方式，或是加熱效率較高 的紅外線加熱裝置。 步驟2〇7 :使第-壓力、第二壓力與預設溫度維持一預設時間。 步驟208 :據此使玻璃基材的光學面對應於成型模具的穿透孔之位置， 凸出而形成有陣列狀排列之陣列透鏡，其中，各透鏡的投影 形狀不拘，可以是方形、圓形或者是非軸對稱等任何形狀， 此外，各個透鏡為凸透鏡，且凸透鏡鄰近中央部位為圓弧狀。 接著請參考第Μ圖，為本發明所提出之第三較佳實施例，為一種陣列 © 玻璃透鏡之成型設備，用以將一玻璃基材的光學面形成陣列透鏡，主要包 括一承載台11、一成型模具12、一具有内部容置空間之腔室14、一氣體加 壓裝置15、一減塵裝置μ、一加熱裝置17、以及一控制裝置。 成型模具12係定位於承載台11之上。請參考第3B圖，成型模具12 包含有第一表面12卜第二表面122以及複數個以陣列狀排列、且貫穿第一 表面121與第二表面丨22的穿透孔123。而此穿透孔123形狀並不受限，可 以依照陣列透鏡的形狀需求而設，例如方形、圓形或是其他非軸對稱等任 何形狀。此外，成型模具12的材質並不受限，可以是不鏽鋼、超合金、石 英與陶瓷等材質。且成型模具12的外廓曲線亦不受限，可視玻璃基材13 9 201034981 的外廓鱗喊。此外n步地，可在此成麵具12絲面披覆雖 合金或者是類鑽膜等高硬度、表面平滑、抗腐蝕以及摩擦係數較低之材質， 以製作出表面品質需求更高的陣列玻璃透鏡。 此外，成型模具12之第一表面121係提供一玻璃基材13的光學面(未 圖不)覆蓋，其中，值得注意的是，本發明所提出之陣列玻璃透鏡之成型設 備，可適用於任何結構形狀的玻璃，例如方形、圓形、平板狀或是其他非 軸對稱等任何形狀皆可製作。*玻璃基材13的㈣亦不受限，例如氧化物a surface having a cavity for locating the molding die and the glass substrate in the chamber; providing a first pressure in the accommodating space of the chamber; & Forming a second surface of the mold, and the second pressure is less than the first pressure; providing a predetermined temperature to the chamber; and maintaining the first pressure, the second pressure, and the preset temperature for a predetermined time; thereby, the glass substrate The optical surface forms an array of arrayed glass lenses corresponding to the positions of the through holes of the molding die. Therefore, the main object of the present invention is to provide a method for forming an array glass lens. By controlling the pressure difference, temperature and time, high precision can be produced on the surface of the glass substrate for different glass substrates and thicknesses. Array of glass lenses. A secondary object of the present invention is to provide a method for forming an array glass lens, wherein the softened surface flows toward the through hole of the mask by a high temperature auxiliary pressure and a differential pressure method, and each of the penetration holes is made. The holes all have the same pressure to form an array of convex lenticular shapes. The invention further provides an array glass lens, characterized in that the glass lens system comprises a glass substrate having an optical surface formed by the following molding method, comprising: providing a loading platform; providing a molding die, positioning on the bearing The molding die includes a first surface, a second surface, and a plurality of penetrating holes penetrating through the first surface and the second surface, and covering the optical surface of the glass substrate with the first surface of the molding die Surface; 4 201034981 ; Providing a chamber having an internal accommodating space for placing the molding die and the glass substrate in the accommodating space of the chamber; 'providing a first pressure in the accommodating space of the chamber; providing a second pressure Forming a second surface of the mold, and the second pressure is less than the first pressure; providing a predetermined temperature to the chamber; and: maintaining the first pressure, the second pressure, and the preset temperature for a predetermined time; thereby, the glass The optical surface of the substrate is formed with array lenses arranged in an array corresponding to the positions of the through holes of the molding die. Q. Accordingly, it is still another object of the present invention to provide an array glass lens which is formed by a high temperature assisted gas pressure method to form a highly lenticular lens-shaped microarray glass lens to provide better optical imaging quality. Still another object of the present invention is to provide an array glass lens which is formed by a high temperature assisted gas pressure method to form a convex lens-like microarray glass lens having a free curved surface, thereby providing better light source diffusibility. The invention further provides an apparatus for forming an array glass lens, which is used for forming an optical lens of a glass substrate to form an array lens, which mainly comprises: a carrying platform; a molding die, which can be positioned on the carrying platform, and the molding tool includes the first- The surface, the second surface, and a plurality of first surface-arranged and through-the-surface and second surface-through-holes are provided with an optical surface covering the glass substrate; and an internal receiving space a chamber, the molding die is placed in the accommodating space of the chamber; a gas pressing device provides a first pressure in the accommodating space of the chamber and a pressure on the second surface of the molding die, and the second pressure is less than the first pressure And a force == set 'provide - preset temperature to the chamber; - control the weaving, so that the first pressure, the second pressure and the preset temperature are maintained for a preset time. Therefore, another object of the present invention is to provide an apparatus for forming an array glass lens, wherein the through-holes of the domain-type reduction penetrate the first surface and the second surface, so that the substrate is in a high-temperature auxiliary pressure process, and between the molds There are no problems with stickiness and air bubbles. 5 201034981 • A further object of the present invention is to provide a molding apparatus for an array glass lens, which is easy to manufacture and different from the conventional molding technology, and does not need to simultaneously manufacture upper and lower molds with complicated surfaces, thereby reducing the production cost. . Still another object of the present invention is to provide an array glass lens molding apparatus which can produce array-shaped lens glass for a glass substrate of various materials, structures, or profiles by a high temperature assisted gas pressure method. Still another object of the present invention is to provide an apparatus for forming an array glass lens which can form an unconformed non-axisymmetric array glass lens on a free-form curved glass substrate by a high temperature auxiliary gas pressure method and a fine mold. [Embodiment] The present invention discloses an array glass lens, a molding method thereof, and a molding apparatus. The principle of mold fabrication and high-temperature auxiliary gas pressure used in the present invention has been known to those skilled in the relevant art, and therefore, Description, no longer a complete description. At the same time, the drawings relating to the features of the present invention, as shown in the following drawings, are not necessarily required to be completely drawn according to actual dimensions, and are described first. Referring to Fig. 1, a first preferred embodiment of the present invention is a method for forming an array glass lens according to the present invention. The steps are as follows: Step 101: Provide a carrier. Step 1〇2: Provide a mask and position it on the carrier. The molding die includes a first surface and a first surface, and a plurality of penetration holes arranged in an array and extending through the first surface and the second surface. The shape of the through hole is not limited, and may be arranged according to the shape of the array lens. For example, any shape such as square, _ or other non-sleeve symmetry may be preferred. In addition, the material of the molding die is not limited, and may be stainless steel, superalloy, stone, or ceramic. Moreover, the profile of the molding die is not limited, and it is set according to the outer curve of the glass substrate. In addition, in order to produce a 201034981 column glass lens with a higher surface quality, the surface of the molding die may further be coated with platinum. Niobium alloy or DLC (Diamond Like Carbon) is a material with high hardness, smooth surface, corrosion resistance and low friction coefficient. Step 103: providing a glass substrate having at least one optical surface and covering the optical surface to the first surface of the molding die. The glass substrate may be an inorganic glass material such as an oxide series glass, a phosphate glass, a borate glass, a dentate glass, or an infrared glass, and the structure and shape thereof are not limited. It is a flat sheet, an arc sheet, or an irregular three-dimensional shape. Step 104 · Providing a chamber having a pumping space for housing the glass and the glass substrate. Step 105: providing a first chamber in the accommodating space of the chamber, wherein the first pressure in the chamber is formed by providing a specific gas system, wherein the specific gas system is nitrogen, argon or other inert gas. According to this, the first pressure in the chamber is greater than one atmosphere. Step 106: providing a second pressure on the second surface of the molding die, and the second pressure is less than the first pressure, and the second pressure is preferably near vacuum. Step 1〇7. Provide a preset temperature to the chamber, the preset temperature being provided by a heating device. The heating device can be located either inside the chamber or outside the chamber and can be made by conventional resistance heating or by an infrared heating device with high heating efficiency. Step 108 · Turn the first pressure, the second pressure, and the preset temperature to a preset time. Step 1〇9: Accordingly, the optical surface of the glass substrate is aligned with the position of the through hole of the mask, and an array lens arrayed in an array is formed. In this case, the special barrel is required to produce the corresponding upper mold 1 and the lower mold compared with the previous molding process, and if the micro-mirror mirror is to be made, the mold required for the upper and lower molds is 7 201034981 - The cost is more expensive and less maintainable, and the problem of stickiness and air bubbles is still not effectively solved. According to the method for forming an array glass lens according to the present invention, the molding die only needs to be single, so that there is no problem of the degree of the upper and lower molds, and the manufacturing cost is effectively reduced. And because the through hole of the molding die penetrates through the first surface and the second surface, the high-temperature auxiliary pressing process is used to protrude the position of the glass substrate corresponding to the penetration hole to form an array lens, the non-mold and the glass. The contact molding process also solves the problems of prior art glass and mold sticking and bubble residue. In addition, when the temperature is maintained at a high temperature for a period of time, when the glass substrate is softened, all the penetration holes of the molding die have the same pressure difference by the differential pressure method, thereby making the optical surface of the softened glass substrate uniform. The penetration holes of the molding die flow, thereby forming an array glass lens having a convex lens shape. The present invention further provides a second preferred embodiment, which is an array glass lens, which is characterized in that the array glass lens is produced by a glass substrate having an optical surface by the following molding method, please refer to FIG. 2 The material and structure of the glass substrate are as described in the first embodiment, and the steps of the molding method are as follows: Step 201: A carrier is provided. Step 202: Providing a mask into the mask. The forming mold includes a first surface and a second surface, and a plurality of through holes arranged in an array and extending through the first surface and the second surface. The shape of the through hole is not limited, and may be set according to the shape requirement of the array lens, such as a square, a circle or other non-axisymmetric shapes, wherein a projection having a circular shape is preferable. . In addition, the material of the molding die is not limited, and it can be made of stainless steel, superalloy, quartz or ceramic. Moreover, the profile of the molding die is not limited, and is designed according to the outer curve of the glass substrate. In addition, in order to produce an array glass lens with higher surface quality, the surface of the molding die may further be coated with platinum-silver alloy. Or it is a material with high hardness, smooth surface, corrosion resistance and low friction coefficient such as DLC (Diamond Like Carbon). Step 203·· Providing a chamber having an internal accommodating space for placing the molding die and the glass substrate 201034981. Step 204: providing a first pressure in the chamber, the first pressure in the chamber is provided by providing a specific gas system, wherein the specific gas system is nitrogen, chlorine or other inert gas, etc. This causes the first pressure in the chamber to be greater than one atmosphere. Step 205: providing a second pressure pressure ' and the second pressure is preferably close to vacuum. Step 2%: Provide - preset temperature to the chamber, this preset temperature is provided by the heating device. The heating device can be located inside the chamber or outside the chamber, and can be electrically heated by a resistor or a more efficient infrared heating device. Step 2:7: The first pressure, the second pressure and the preset temperature are maintained for a preset time. Step 208: Depending on the position of the through hole of the molding die corresponding to the position of the through hole of the molding die, the array lens is arranged to be arranged in an array, wherein the projection shape of each lens is not limited, and may be square or circular. Or any shape such as non-axisymmetric, and each lens is a convex lens, and the convex lens has an arc shape adjacent to the central portion. Referring to the drawings, a third preferred embodiment of the present invention is an array © glass lens forming apparatus for forming an optical surface of a glass substrate into an array lens, which mainly includes a carrier 11 A molding die 12, a chamber 14 having an internal accommodating space, a gas pressurizing device 15, a dust removing device μ, a heating device 17, and a control device. The forming die 12 is positioned above the carrier 11. Referring to FIG. 3B, the molding die 12 includes a first surface 12, a second surface 122, and a plurality of penetration holes 123 arranged in an array and extending through the first surface 121 and the second surface 22. The shape of the through hole 123 is not limited and may be set according to the shape requirements of the array lens, such as a square, a circle or any other shape other than axisymmetric. Further, the material of the molding die 12 is not limited, and may be stainless steel, superalloy, quartz or ceramic. Moreover, the profile of the molding die 12 is not limited, and the outer surface of the glass substrate 13 9 201034981 is shouted. In addition, in n steps, it can be used as a mask with a high surface hardness, smooth surface, corrosion resistance and low friction coefficient, such as alloy or diamond-like film, to produce an array with higher surface quality requirements. Glass lens. In addition, the first surface 121 of the molding die 12 is provided with an optical surface (not shown) of a glass substrate 13, wherein it is noted that the molding device for the array glass lens of the present invention can be applied to any Structured glass, such as square, round, flat or other non-axisymmetric shapes, can be made. * (4) of the glass substrate 13 is also not limited, such as an oxide
系列玻璃、填酸齡玻璃、刪_齡玻璃、_素系玻璃或者是紅外線玻 璃均可以製作。 腔室14係供成型模具12與玻璃基材13置於腔室14之容置空間内， 更進-步地，此腔室Μ的外罩141材質可以使用石英等耐高溫高壓之材質。 氣體加壓裝置15係提供第一壓力於腔室μ之容置空間内。 減壓裝置16係提供第二壓力於成型模具12之第二表面122，且第二壓 力小於第一壓力，用以使玻璃基材13貼服在成型模具12的第一表面ΐ2ΐ 之上。 加熱裝置17肋触-觀溫度14，其巾加紐置17可依加 熱設計的不同而設置於腔室14的内部或者是腔室14的外部。加熱裝置17 可以採用傳統的電阻加熱方式，或是加熱效率高的紅外線加熱裝置。 控制裝置18用以精確控制氣體加壓裝置15、減壓裝置16與加熱裝置 Π，並使第一壓力、第二壓力與預設溫度維持一預設時間。此時，玻璃基 材13在經過高溫軟化後，藉由壓差法，意即第一壓力大於第二壓力，據此 使每個穿透孔123都具有相同的壓力，使得玻璃基材13對應於穿透孔123 的位置從成型模具12的第-表面121往第二表面122均勻的流動，據此形 成陣列玻璃透鏡。在此要特別說明的是，由於穿透孔123貫穿第一表面i2i 與第二表面122，係屬於非模接觸_，因此，能夠完全解決絲技術之玻 璃與模具的沾黏與氣泡殘留的問題。 201034981 本發明所提ίϋ之陣顺_叙賴，可視财雜類、玻璃基 材材質與其軟化點以及透鏡的厚度等等變數，設定特定的參數，藉由控制 裝置18，控制施壓的時間、第一壓力與第二壓力之勤差、溫度以及持溫 時間等，據此製作出高精密度之陣列玻璃透鏡。 以上所述僅林發明之餘實關，並翻錄定本發狀中請專利 權利；同時以上_述，對於熟知本技術領域之專門人士應可日膽及實施， 因此其他未麟本發騎揭示讀神下職成轉效改魏修飾，均應包 含在申請專利範圍中。 ΟSeries glass, acid-aged glass, _ age-old glass, _ plain glass or infrared glass can be produced. The chamber 14 is configured such that the molding die 12 and the glass substrate 13 are placed in the accommodating space of the chamber 14. Further, the material of the outer cover 141 of the chamber 可以 can be made of a material resistant to high temperature and high pressure such as quartz. The gas pressurizing device 15 provides a first pressure in the accommodation space of the chamber μ. The pressure reducing device 16 provides a second pressure to the second surface 122 of the forming mold 12, and the second pressure is less than the first pressure for adhering the glass substrate 13 to the first surface ΐ2ΐ of the forming mold 12. The heating device 17 is ribbed to the temperature 14, and the towel plus button 17 can be placed inside the chamber 14 or outside the chamber 14 depending on the heating design. The heating device 17 can be a conventional electric resistance heating method or an infrared heating device with high heating efficiency. The control device 18 is used to precisely control the gas pressurizing device 15, the decompressing device 16 and the heating device Π, and maintain the first pressure, the second pressure and the preset temperature for a predetermined time. At this time, after the glass substrate 13 is softened by high temperature, the differential pressure method means that the first pressure is greater than the second pressure, so that each of the penetration holes 123 has the same pressure, so that the glass substrate 13 corresponds to The position of the penetration hole 123 is uniformly flowed from the first surface 121 to the second surface 122 of the molding die 12, thereby forming an array glass lens. It should be particularly noted that since the penetration hole 123 penetrates the first surface i2i and the second surface 122, it belongs to the non-mold contact_, so that the problem of sticking and residual bubbles of the glass and the mold of the silk technology can be completely solved. . 201034981 The invention provides a 阵 叙 叙 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The precision of the first pressure and the second pressure, the temperature, and the temperature holding time, etc., thereby producing a high-precision array glass lens. The above mentioned only the invention of the invention, and transcribed the patent right in the hairline; at the same time, the above-mentioned experts should be able to implement the rigor and implementation of the experts who are familiar with the technical field. God's next post-transfer change and Wei-modification should be included in the scope of patent application. Ο
【圖式簡單說明】 第1圖為-流程圖，係根據本發明提出之第—較佳實施例，為一種陣 列玻璃透鏡之成型方法。 第2圖為-流程圖’係根據本發明提出之第二較佳實施例，為一種陣 列玻璃透鏡所使用的成型方法。 第3Α圖為-示意圖，係根據本發明所提出之第三較佳實施例，為一種 陣列玻璃透鏡之成型設備。 第犯圖為-剖面圖，係根據本發明所提出之第三較佳實施例，為一種 陣列玻璃透鏡之成型設備所使用的成型模具。 【主要元件符號說明】 步驟 101、102、103、104、1〇5、1〇6、107、 承載台 108、109、2〇1、202、203、204、205、 206、207'208 11 成型模具 12 第一表面 121 第二表面 122 11 201034981 穿透孔 123 玻璃基材 13 腔室 14 外罩 141 氣體加壓裝置 15 減壓裝置 16 加熱裝置 17 控制裝置 18 Ο 12BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method of forming an array of glass lenses in accordance with a first preferred embodiment of the present invention. Fig. 2 is a flow chart showing a molding method used for an array of glass lenses according to a second preferred embodiment of the present invention. Fig. 3 is a schematic view showing a molding apparatus for an array glass lens according to a third preferred embodiment of the present invention. The first diagram is a cross-sectional view showing a molding die used in a molding apparatus for an array glass lens according to a third preferred embodiment of the present invention. [Description of main component symbols] Steps 101, 102, 103, 104, 1〇5, 1〇6, 107, carrying stations 108, 109, 2〇1, 202, 203, 204, 205, 206, 207'208 11 Forming Mold 12 First surface 121 Second surface 122 11 201034981 Through hole 123 Glass substrate 13 Chamber 14 Cover 141 Gas pressurizing device 15 Pressure reducing device 16 Heating device 17 Control device 18 Ο 12