201032910 六、發明說明： 【發明所屬之技術領域】 關於"一種用於無 本發明係有關於一種清潔器具，特別係 塵室中清潔液體污染物之器具。 【先前技術】 皆知無塵ΐ内的環境條件係受嚴格地控制，例如需精 準地控制濕度、溫度及懸浮微粒量，以防二：$ _ 潛在危紐好所污染。 ^無塵至已廣泛地敏感產品及成分之製造、組裝和包 2二例^ ’半導體製造薇’藥廠及類似工廢對保持無塵的要求 極而。因此’被個於無塵環境巾的物品必需小心設計與製 造’以免成為污染源並造成污染風險。 已知商業化使用的無塵擦拭布具有檫拭時不會造成物品 表面磨損，可吸水及吸油，且具有落塵量少、離子析出量少、 觸感柔細、不易產生微粒及起化學反應.·等等諸項使用優點。 一般來說，其主要係用以清理，例如位於該無塵室中之設備、 裝置、器具等物品的表面，及自外部帶入無塵室中的工具表面 上的細微粒子，藉以避免細微粒子於無塵室中造成污染。除此 之外’另一個在無塵室使用擦拭物的重點為清理製程中滿溢出 來液體及化學藥劑等溶液。習知用於無塵室中的擦拭物，一般 來說大多係使用針織聚酯擦拭物（亦可稱之為無塵布或無塵 紙）。 然，眾所皆知將聚酯或棉的纖維用在一般紙巾、抹布、擦 拭物及相似物件上，可獲致吸收液體效果不錯的清潔物品’但 此類產品並不適用於無塵室的環境中。因此類纖維所製的擦拭 物，其棉絮之數量較習知經處理之針織聚酯無塵布來得高很 多，故無法被使用於無塵室中。使用經處理後之針織聚酯無塵 201032910 布雖可減少棉絮數量，但卻會使其液體吸收量（亦即，所能承 载之液體最大的量）減少。致使當需要清除大量液體時，便需 要使用大量針織聚酯無塵布方能將擬清除的液體完全去除。另 外’此種針織聚酯無塵布縱使能將液體吸附清除，但如前所述 ，液體吸附效果有限，當吸附過多液體時，即有可能發生再滴 落的狀況。再者，當這些液體具有腐蝕性或毒性時，使用此種 針織聚鲦無塵布，清潔人員尚需另外戴上手套才能避免接觸到 該液體。 有鐘於前述習知針織聚酯無塵布用於清除液體時之效果201032910 VI. Description of the invention: [Technical field to which the invention pertains] A device for use in a cleaning apparatus, particularly a dust chamber, for cleaning liquid contaminants. [Prior Art] It is known that the environmental conditions in the dust-free raft are strictly controlled, for example, the humidity, the temperature, and the amount of suspended particulates need to be precisely controlled to prevent contamination of the second:$ _ potential danger. ^Dust-free to the manufacture, assembly and packaging of a wide range of sensitive products and ingredients 2 2 cases 'The semiconductor manufacturing company' and similar wastes are extremely dust-free. Therefore, items that are placed in a dust-free environmental towel must be carefully designed and manufactured to avoid becoming a source of pollution and posing a risk of contamination. It is known that the dust-free wiping cloth used commercially can not cause surface abrasion of the article when wiping, can absorb water and absorb oil, and has less dust falling, less ion precipitation, soft touch, less particle generation and chemical reaction. And so on the use of advantages. Generally, it is mainly used for cleaning, for example, the surface of articles, devices, appliances and the like located in the clean room, and the fine particles on the surface of the tool brought from the outside into the clean room to avoid fine particles. Causes pollution in the clean room. In addition to this, the other use of wipes in clean rooms is focused on cleaning solutions such as liquids and chemicals. Wipes used in clean rooms are generally used with knitted polyester wipes (also known as dust-free cloth or dust-free paper). However, it is well known that polyester or cotton fibers can be used on general paper towels, rags, wipes, and the like to obtain a cleaning article that absorbs liquids well. However, such products are not suitable for use in a clean room environment. in. Therefore, the amount of cotton wadding made of the fiber-like fabric is much higher than that of the conventional knitted polyester dust-free cloth, so it cannot be used in a clean room. The use of treated knitted polyester dust-free 201032910 fabric reduces the amount of cotton wool, but it reduces the amount of liquid absorbed (ie, the maximum amount of liquid that can be carried). As a result, when a large amount of liquid needs to be removed, it is necessary to use a large amount of knitted polyester dust-free cloth to completely remove the liquid to be removed. In addition, such a knitted polyester dust-free cloth can remove the liquid in a longitudinal direction, but as described above, the liquid adsorption effect is limited, and when excessive liquid is adsorbed, there is a possibility that dripping occurs. Furthermore, when these liquids are corrosive or toxic, the use of such knitted polythene-free cloth requires the wearer to wear additional gloves to avoid contact with the liquid. There is a clock in the above-mentioned conventional knitted polyester dust-free cloth for removing liquid
不，（尤其是處理大量液體時）’因此開發出一種可應用於無 塵室中清除大量液體，並清潔物體表面之清潔器具仍有其^ 要0 '、 【發明内容】 依據本發明之一目的，在於提供一種用於無塵室之清潔用 具’藉以克服前述習知技術中尚存之缺陷。 依據本發明之一實施態樣所揭示一種用於無塵室之清潔 用具，其包括：一清潔接觸層，其係為一液體通透膜；一液^ 吸收層，用以吸收該液體，及一液體隔離層，各層間係依序堆 疊呈一積層結構，且該積層結構周圍邊緣係緊密接合。其中， 該液體通透膜上設置有複數個將其貫穿之液體通透孔，且'該液 體通透孔位於清潔接觸層内侧的孔徑小於位於外側的孔徑，藉 此可防止液體再回渗至外部。 依據本發明之另一實施態樣所揭示者，係於前述實施態樣 之該清潔接觸層外及/或該液體隔離層外，再附加一層無塵 布層。 依據本發明之又一實施態樣所揭示者，係於前述實施態樣 中將該液體隔離層以另一清潔接觸層替代。此種結構亦可藉由 201032910 Ϊ成^膜直接將液體吸收層包覆 该=據ί ί指出之胁無塵室之清織具，當用於清潔 繁之岑㈣H潔接觸層（或無塵布層）侧接觸該液體，擬清 1清潔_層（或先經過無塵布層吸收，再 ίί::、屉？ϋ，接著為液體吸收層所吸收。由於’本發明 具有防止液體回流之設計，因此可有效防止已吸 最上層之液體隔離層（或清潔接觸層) 之該液體得以有效的被承載並包裹於 本發月清潔器具中，而無外漏之風險。 〜故驗無塵室之清潔11魏有效地清除大量的 3換克=知針峡s旨無塵布無法清除Α量賴的缺點，且 不用擔心被魏之賴畴，亦可使料人㈣ 觸到該液體。由此顯見，依據本發_指出之職無塵室3 潔器具’相較於習知針織聚g旨無塵布，具有顯著的增進效果。 【實施方式】No, (especially when dealing with a large amount of liquid) 'Therefore, a cleaning device that can be applied to clean a large amount of liquid in a clean room and clean the surface of the object is still found to be 0', [invention] According to one of the present invention It is an object of the present invention to provide a cleaning appliance for a clean room to overcome the deficiencies of the prior art. A cleaning appliance for a clean room according to an embodiment of the present invention includes: a cleaning contact layer which is a liquid permeable membrane; a liquid absorbing layer for absorbing the liquid, and A liquid isolating layer, the layers are sequentially stacked in a laminated structure, and the edges around the laminated structure are closely joined. Wherein, the liquid permeable membrane is provided with a plurality of liquid through holes penetrating therethrough, and 'the liquid permeable hole is located on the inner side of the clean contact layer with a smaller diameter than the outer diameter hole, thereby preventing the liquid from re-infiltrating to external. According to another embodiment of the present invention, a layer of a dust-free cloth layer is added to the outside of the cleaning contact layer and/or the liquid separation layer of the foregoing embodiment. According to yet another embodiment of the present invention, the liquid barrier layer is replaced with another clean contact layer in the foregoing embodiment. Such a structure can also directly cover the liquid absorbing layer by the 201032910 film, and the clear woven fabric of the dust-free chamber according to the ίίί, when used for cleaning the 岑 (4) H clean contact layer (or clean cloth) Layer) side contact with the liquid, clear 1 clean _ layer (or first absorbed through the dust-free cloth layer, then ίί::, ϋ ϋ, then absorbed by the liquid absorbing layer. Because the invention has a design to prevent liquid reflux Therefore, the liquid of the liquid barrier layer (or the cleaning contact layer) which has sucked the uppermost layer can be effectively prevented from being carried and wrapped in the cleaning device of the present month without the risk of leakage. The cleaning 11 Wei effectively removes a large number of 3 grams = the needle can not remove the shortcomings of the amount of dust, and do not have to worry about being the domain of Wei, or the material (4) can touch the liquid. It is obvious that the clean room 3 cleaning device according to the present invention has a remarkable improvement effect as compared with the conventional knit cloth.
為使本發明所揭示之麟無塵室之清潔器具能更被清楚 的了解’在此配合圖式加以說明，惟此非用以限制本發明 圍，任何熟悉於此項技藝中具有通常知識之人士可輕 修飾及改變，均涵蓋於本發明之範圍内。 參閱第一圖’為本發明用於無塵室之清潔器具之一具體實 施態樣之剖〒示意圖。依據本發明所指出之用於^塵室2清潔 器具(1)，其係由至少一清潔接觸層(2)、一液體吸收層(4)及」 液體隔離層⑹所依序堆疊而成。其中，清潔接觸層(2)係為一 液體通透膜，其上δ又置有複數個將其貫穿之液體通透孔， 且液體通透孔(22)位於清潔接觸層(2)的内側開口 (24)孔徑小於 外侧開口(26)孔徑，藉以防止液體再回滲至外部。具體$言，' 201032910 液體通透孔(22)的勤是相等或近似於 大 為^明用於無塵室之清潔器具⑴於清除 通透孔(22) ’藉以達成清除液體之目 實ΐ樣為 ’另一具體實施態樣為 ϋ Π: 透孔(22)的外側開口(26)孔徑具體之實施態 樣為0.5〜2.5mm，另-具體實雜樣為〇 7〜2 3mm。另外，外In order to make the clean room of the clean room disclosed in the present invention more clearly understood, it is described herein in conjunction with the drawings, but is not intended to limit the scope of the present invention, and is familiar with the ordinary knowledge in the art. Those skilled in the art can devise modifications and variations that are within the scope of the invention. Referring to Fig. 1 is a schematic cross-sectional view showing one embodiment of a cleaning device for a clean room of the present invention. The cleaning device (1) for a dust chamber 2 according to the present invention is formed by sequentially stacking at least one cleaning contact layer (2), a liquid absorbing layer (4) and a liquid separation layer (6). Wherein, the cleaning contact layer (2) is a liquid permeable membrane, wherein the upper δ is further provided with a plurality of liquid through holes penetrating therethrough, and the liquid transparent hole (22) is located inside the cleaning contact layer (2) The opening (24) has a smaller aperture than the outer opening (26) to prevent the liquid from re-infiltrating to the outside. Specific $言, '201032910 The liquid through hole (22) is equal or similar to the cleaning device used in the clean room (1) in clearing the through hole (22) 'to achieve the purpose of clearing the liquid The other embodiment is ϋ Π: The outer opening (26) of the through hole (22) has a specific aperture of 0.5 to 2.5 mm, and the other specific sample is 〇7 to 2 3 mm. In addition, outside
=口 (26)孔徑與内側開口 (24)孔徑比值之具體實施樣態為 !： 另一具體實施態樣為u〜2.5。為使本發明用於無塵 至之清潔器具⑴於清除液體時有較佳之清除效率，液體通透 孔(22)之内侧開口 (24)的所有面積佔清潔接觸層(2)總面積的 ϋι,具體之實施態樣為ig〜4G%，另—具體實施態樣為 〜°。形成液體通透孔(22)的方法除了以加熱的鐵梢來穿 孔的方式外，亦可使用打孔之物理性穿孔方式，但並不僅限於 此0 可用於製備本發明清潔接觸層(2)之材料於本_^明中並沒 有特別的限制，只要是可以阻止液體非經由設置於其上之液體 ，透$(22)流通或滲透者，皆可被應用於本發明中。例如，高 刀子薄膜或不織布薄膜《更具體的例子，包含但不僅限於，聚 烯烴（例如，聚乙烯、聚丙烯）、聚酯等材料所製成之薄膜或 不織布。當為不織布材質時，其可由與聚酯或聚丙烯相同形態 之纖維所構成，或由具低熔點成份與高熔點成份之雙成份或複 合纖維所構成。纖維可選擇尼龍(Nylon)、聚酯、棉、壓克力 纖維(acrylic fiber)等’以及與這些組合物相同之各種天然及合 成材料。雙成份纖維則例如可由聚酯芯(polyesterC〇re)及聚乙 烯外稍(polyethylene sheath)構成，但不僅限於此。 前述液體吸收層(4)係由一吸液體所構成，其可用以迅速 6 201032910 Α ^體具有吸液及保留液體等功能。於本發明中任何習 卜魏之料紐料，柯被翻於 夕愈；u枝藝者藉由本發明之說明即可輕易的視需求選用適當 ΐΐίΐ可獲得之材料’於本發明中並沒有特別的限制。具體 夕、、s人撕例f，包含但不僅限於，聚合物吸收體、纖維或兩者 、二魏聚合物吸㈣包含天然聚合物與合成聚合物。 ^纖維包含紙漿纖維。當液體為聚合物吸收體所吸收後，聚 j吸收體即會膨脹形成膠體，將該液體包覆於其中，而無須 擔憂該液體再次回滲至清潔接觸層(2)。 、、、 • 前述f體隔離層(6)，只要是可有效地用以隔離液體之任 何習知的薄膜皆可被應用於本發明中。具體可舉出的例子，包 含但不僅限於，聚乙烯細，或與具紐不透過性之聚乙稀膜 相同之熱可塑性(thermoplasticity)薄膜所形成。 、依據本發明所指出之用於無塵室之清潔器具(1)，可藉由 以熱或超音波結合、接著劑，諸如高溫熔解膠黏劑等，利用上 述組合或其他適當之附著手段，使前述清潔接觸層(2)、液體 ，收層(4)及液體隔離層(6)堆疊而得之積層體的周圍接合附 著。藉此，即可形成由清潔接觸層(2)與液體隔離層(8)所構成 • 之接近谘閉狀態的空間（唯一的開口為設置於清潔接觸層 上之複數個液體通透孔(22))。. ' 藉此，當使用本發明用於無塵室之清潔器具(1)清潔液體 時’使清潔器具(1)之清潔接觸層(2)側接觸該液體。液體將通 過設置於清潔接觸層(2)上之液體通透孔(22)，而為液體吸收層 (4)所吸收。最後’藉由液體吸收層(4)之吸附及清潔接觸層(2) 與液體隔離層(6)之包覆’即可使液體被包覆於清潔器具(1)中 而不致流出。本發明清潔器具(1)於清潔液體時不但可有效的 清除大量的液體，且清潔人員在整個清潔的過程中亦不會接觸 到該液體。 9 201032910 參閱第二圖，為本發明用於無塵室之清潔器具(1)之另一 具體實施態樣之剖面示意圖。依據本發明所指出之用於盔塵室 之清潔器具(1)’其係由至少一無塵布層(8)、一清潔接觸^(2)、 一液體吸收層(4)及一液體隔離層(6)所依序堆疊而成。 可用於本發明中無塵布層(1〇)之織物包含針織，編織及非 紡織物，只要是任何習知可應用於無塵室中進行清潔者，皆可 被應用於本發财，並無贿_的_。在此可舉出的例 但^限於’ 1〇〇%聚醋或尼龍。較佳由連續長纖 ^ ^ ^AlphaWipe- ： «AlphaSorb^ • 〇乂f Μί_·，，* Tex咖公司(紐澤西州上鞍 黏聚㈣（此等織物纖維航排列且藉 加,、、、或化學作用黏合。使用此種構造之典 f ° }' 55〇/^«^ f 〇〇/。紅彻水糾結水針紡織物料（ :製二其::贅，述:== 具⑴清潔之清潔器 ::步藉仙無塵布層==::卜子 體實施也樣，為不同處係在於 圖所不之具 層⑹上。藉此即可賦予本發㈣於置於液體隔離 具有乾澄兩用之特徵。另外，狃^二至之4潔器具(1)同時 技藝者藉由第二圖與第三圖之&示=明書之描述，熟習 一圖所示之域實鋪财 8 201032910 隔離層(6)上均設置一無塵布層。 具體實施紐1 ® ίm 樣’為不同處係在於液軸層(二 —本::=:二室機：= i ====，當擬清除之=== 體反;清 ί2 清除之液_雜㈣時，酿録使水性 ^ 2之，染物)，亦可同時將親水性與疏水性的聚 與疏水性纖維同時混織成不織布所製備層= 卩•張薄膜上 虽擬h潔液體係為驗性物質時’本發明無塵室清潔器 中，可於液體吸收層(4)内進-步包含一種有機酸。無塵室環 境中並不會經常暴露於如同在礦物酸中發現的高濃度離子，故 較佳的是該酸在27C下，具有解離常數(pKa)大於12，蒸汽壓 y於7仟帕。較佳的疋該酸在室溫下是液體。做為本發明中有 機酸的例子，包含但並不僅限於，曱酸、乙酸、丙酸、正丁酸、 異丁酸和丁酸。雙基酸的例子包括有抗壞血酸、葡糖酸、蘋果 酸、丙二酸、草酸、琥珀酸和酒石酸。三基酸的例子包括有檸 檬酸和掊酸。較佳的酸具有1至7個碳原子，並且每分子中超 過一個叛基。 9 201032910 液體吸收層(4)内可進一步再包含一結晶抑制劑，用以防 止酸結晶的生成，該酸結晶可能是灰塵的來源。結晶抑制劑包 括有溶劑，並且可能包括有共溶劑，譬如說是界面活性劑、醇 =、乙二醇或者是相關的混合物。較佳的共溶劑具有3至6個 碳原子，更佳的是具有3至4個碳原子。 相反的’當擬清潔液體係為酸性物質時，本發明無塵室清 潔器具(1)中，則可於液體吸收層(4)内進一步包含一種有機驗。 <本發明無塵室清潔器具(1)中藉由有機酸（或有機鹼）之 設置，可輕易的中和液體污染物之鹼性（或酸性）。藉此，縱 使本發明無塵室清潔器具(1)於操作時不慎破裂，也不致傷及 清潔操作人員。 此外，為使液體可於通過清潔接觸層(2)後，順暢地流至 液體吸收層(4)，可於清雜觸層(2)上（亦即料接觸層與液 體吸收層間）再進-步設置一液體引流層，係肖以將通過該清 潔接觸層(2)之液體引流離開清潔接觸層(2)，以使擬清除之液 體得以持續經由液體通透孔(22 )通過清潔接觸層(2)。故任何習 知可用於引導液體流動之設計與材料皆可被應用於本發明 中，在此並沒有特別的限制。做為本發明液體引流層(4)之具 體實施態樣’例如使用具有方向性之纖維不織布，藉此可利用 虹吸作用將通過清潔接觸層(2)之液體均勻的引導至液體吸收 層⑷。 為避免本發明無塵室清潔器具⑴於使用前受到微塵粒子 之污染’其最雜存在-錢乎完全緊密孩空氣的袋子裡， 以使得在處理或齡過程巾’不會魏灰塵。該包裝或袋子可 以是係自聚乙烯、聚丙烯、聚丁稀、聚(4_f基賴、丙稀 和乙稀的共聚物、乙烯和乙烯基醋酸_共聚物、乙稀和丙 酸乙醋的共聚物和乙烯和㈣酸d基丙烯軸 群中選出的，該包裝的厚度從0 5至1〇密爾。 201032910 【圖式簡單說明】 第一圖為本發明用於無塵室之清潔器具之一具體實施態樣之 剖面示意圖。 第二圖為本發明用於無塵室之清潔器具之另一具體實施態樣 之剖面示意圖。 第三圖為本發明用於無塵室之清潔器具之又一具體實施態樣 之剖面示意圖。 第四圖為本發明用於無塵室之清潔器具之再一具體實施態樣 之剖面示意圖。 【主要元件符號說明】 1清潔器具 2清潔接觸層 4液體吸收層 6液體隔離層 8無塵布層 22液體通透孔 24内侧開口 26外侧開口 11= Port (26) Aperture and Inner Opening (24) The specific implementation of the aperture ratio is !: Another specific embodiment is u~2.5. In order to make the cleaning device (1) of the present invention have better cleaning efficiency when removing liquid, all areas of the inner opening (24) of the liquid through hole (22) occupy ϋι of the total area of the cleaning contact layer (2). The specific implementation is ig~4G%, and the specific implementation is ~°. The method for forming the liquid through hole (22) may be a physical perforation method of punching, except for the manner of perforating with a heated iron tip, but it is not limited thereto. 0 It can be used for preparing the clean contact layer of the present invention (2) The material is not particularly limited as long as it can prevent liquid from passing through the liquid disposed thereon, and can be used in the present invention. For example, a high knife film or a nonwoven film "more specific examples include, but are not limited to, films or nonwovens made of materials such as polyolefins (e.g., polyethylene, polypropylene), polyester, and the like. When it is a non-woven material, it may be composed of fibers of the same form as polyester or polypropylene, or a bicomponent or composite fiber having a low melting point component and a high melting point component. The fibers may be selected from nylon (Nylon), polyester, cotton, acrylic fibers, and the like, as well as various natural and synthetic materials similar to these compositions. The bicomponent fiber may be composed of, for example, a polyester core and a polyethylene sheath, but is not limited thereto. The liquid absorbing layer (4) is composed of a liquid absorbing liquid, and it can be used to quickly absorb liquid and retain liquid. In the present invention, any of the materials of the Wei Wei, Ke is turned over; the art of the present invention can be easily selected according to the description of the present invention. limits. Specifically, the s human tearing example f includes, but is not limited to, a polymer absorber, a fiber or both, and a diver polymer (4) comprising a natural polymer and a synthetic polymer. ^ Fiber contains pulp fibers. When the liquid is absorbed by the polymer absorber, the poly-j absorber expands to form a colloid, and the liquid is coated therein without fear of re-infiltration of the liquid to the clean contact layer (2). The above-mentioned f-body isolating layer (6) can be used in the present invention as long as it is any conventional film which can be effectively used for isolating a liquid. Specific examples include, but not limited to, polyethylene which is fine or has the same thermoplasticity film as the opaque polyethylene film. The cleaning device (1) for a clean room according to the present invention may be utilized by heat or ultrasonic bonding, an adhesive such as a high temperature melting adhesive, etc., using the above combination or other suitable attachment means, The periphery of the laminate obtained by stacking the cleaning contact layer (2), the liquid, the layer (4) and the liquid barrier layer (6) is bonded. Thereby, a space close to the closed state formed by the cleaning contact layer (2) and the liquid separation layer (8) can be formed (the only opening is a plurality of liquid through holes provided on the cleaning contact layer (22 )). Thus, when the cleaning device (1) for cleaning a clean room of the present invention is used, the side of the cleaning contact layer (2) of the cleaning device (1) is brought into contact with the liquid. The liquid will be absorbed by the liquid absorbing layer (4) through the liquid permeable aperture (22) provided in the cleaning contact layer (2). Finally, the liquid is coated in the cleaning device (1) without being discharged by the adsorption of the liquid absorbing layer (4) and the cleaning of the contact layer (2) with the liquid barrier layer (6). The cleaning device (1) of the present invention not only effectively removes a large amount of liquid when cleaning the liquid, but also the cleaning personnel does not come into contact with the liquid throughout the cleaning process. 9 201032910 Referring to the second figure, a cross-sectional view showing another embodiment of the cleaning device (1) for a clean room of the present invention. A cleaning device (1) for a helmet dust chamber according to the present invention is provided by at least one clean cloth layer (8), a cleaning contact (2), a liquid absorbing layer (4) and a liquid isolation The layers (6) are stacked in sequence. The fabric which can be used in the dust-free cloth layer (1〇) of the present invention comprises knitted, woven and non-woven fabrics, and can be applied to the present invention as long as it can be applied to any clean room for cleaning. No bribe _. The examples exemplified herein are limited to '1% by weight of polyester or nylon. Preferably, the continuous filaments ^ ^ ^AlphaWipe- : «AlphaSorb^ • 〇乂f Μί_·,,* Tex Coffee Company (New Jersey Upper Saddle Adhesive (4) (These fabric fibers are arranged and borrowed, ,, Or chemically bonded. Use this structure of the formula f ° } ' 55〇 / ^ « ^ f 〇〇 /. Red water tangled water needle textile material (: two:: 赘, description: == 具(1) Cleaning the cleaner:: Step by the dust-free cloth layer ==:: The body of the cloth is also implemented, and the difference is in the layer (6) which is not in the figure. This can be used to give the hair (4) to the liquid. Isolation has the characteristics of dry and clean. In addition, 狃^2 to 4 cleaning appliances (1) at the same time, the skilled person is familiar with the description of the second figure and the third figure &地实实财8 201032910 The isolation layer (6) is provided with a dust-free cloth layer. The specific implementation of the New 1 ® ίm-like 'is different in the liquid axis layer (two - this:: =: two room machine: = i ====, when it is to be cleared === body inverse; clear ί2 clear liquid _ miscellaneous (four), brewing to make water ^ 2, dye), can also be hydrophilic and hydrophobic poly and hydrophobic Fiber is mixed and woven into a non-woven fabric In the clean room system, the liquid cleansing layer of the present invention can include an organic acid in the liquid absorbing layer (4). The clean room environment It is not often exposed to high concentrations of ions as found in mineral acids, so it is preferred that the acid has a dissociation constant (pKa) greater than 12 and a vapor pressure y of 7 kPa at 27 C. The acid is a liquid at room temperature. Examples of the organic acid in the present invention include, but are not limited to, citric acid, acetic acid, propionic acid, n-butyric acid, isobutyric acid, and butyric acid. Examples of the bis-acid include There are ascorbic acid, gluconic acid, malic acid, malonic acid, oxalic acid, succinic acid and tartaric acid. Examples of the tribasic acid include citric acid and citric acid. Preferred acids have 1 to 7 carbon atoms and are in each molecule. More than one rebel. 9 201032910 The liquid absorbing layer (4) may further comprise a crystallization inhibitor to prevent the formation of acid crystals, which may be a source of dust. The crystallization inhibitor includes a solvent and may include Have a co-solvent, such as a surfactant, =, ethylene glycol or a related mixture. Preferred cosolvents have from 3 to 6 carbon atoms, more preferably from 3 to 4 carbon atoms. Conversely, when the intended cleaning liquid system is an acidic substance, In the invention, the clean room cleaning device (1) may further comprise an organic test in the liquid absorbing layer (4). <In the clean room cleaning device (1) of the present invention, the organic acid (or organic alkali) is used. It can easily neutralize the alkalinity (or acidity) of liquid contaminants. Therefore, even if the clean room cleaning device (1) of the present invention is accidentally broken during operation, it does not hurt the cleaning operator. The liquid can be smoothly flowed to the liquid absorbing layer (4) after passing through the cleaning contact layer (2), and can be further set on the clean contact layer (2) (that is, between the material contact layer and the liquid absorbing layer). a liquid drainage layer for draining the liquid passing through the cleaning contact layer (2) away from the cleaning contact layer (2) so that the liquid to be purged continues to pass through the liquid contact hole (22) through the cleaning contact layer (2) ). Therefore, any design and materials that can be used to guide the flow of liquid can be applied to the present invention, and there is no particular limitation thereto. As a specific embodiment of the liquid drainage layer (4) of the present invention, for example, a directional fiber nonwoven fabric is used, whereby the liquid passing through the cleaning contact layer (2) can be uniformly guided to the liquid absorbing layer (4) by siphoning. In order to avoid the clean room cleaning device (1) of the present invention, it is contaminated by fine dust particles before use. The most miscellaneous it exists in the bag which is completely close to the air, so that the process or the age of the process towel does not cause dust. The package or bag may be a copolymer of polyethylene, polypropylene, polybutylene, poly(4_f-based, propylene and ethylene, ethylene and vinyl acetate copolymer, ethylene and propionate) The copolymer and the ethylene and (iv) acid d-based propylene shaft group are selected, the thickness of the package is from 0 5 to 1 mil. 201032910 [Simplified description of the drawings] The first figure is the cleaning device for the clean room of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS The second drawing is a schematic cross-sectional view of another embodiment of the cleaning device for a clean room of the present invention. The third figure is a cleaning device for a clean room of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 4 is a schematic cross-sectional view showing still another embodiment of the cleaning device for a clean room of the present invention. [Description of main components] 1 cleaning device 2 cleaning contact layer 4 liquid Absorbing layer 6 liquid separating layer 8 clean cloth layer 22 liquid through hole 24 inner opening 26 outer opening 11