201030332 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種三維X射線的取像機構及應用該取像 機構的檢測系統，其可應用在备種形式的自動光學檢測 (AOI)，例如印刷電路板(pCB)的盲孔檢測、積體化的冗封裝 檢測及光電元件封裝檢測等等。 【先前技術】 目前PCB的封裝檢測可利用x_ray影像技術，由2度空 間影像變成3度空間影像。且x_ray檢查機可解決並克服 BGA、CSP、Flip Chip等幾種新封裝型態品管的瓶頸，提升生 產良率。然而目前3D X-ray的檢測系統產品與技術多為國際 大廠所把持’其價格昂貴且功能無法彈性符合不同公司與不同 產業的需求。 ' 例如JP11-344453揭露一種非破壞性X射線斷層攝影法 (X-ray tomography)機構設計。其架構是將待測物固定於一可 360度旋轉的機構上’ x_ray與轉動轴中心及偵測裝置成一直 線，即可取得待測物之一連串斷層影像予以分析。由於待測物 需旋轉360度，導致待測物無法置放過於靠近x_my ,故取像 的放大倍率受限，而難以觀察到各個元件更精細的部分。 又US4,926,452揭露一種非破壞性的χ射線薄層描繪法 PC_ray laminography)機構設計。透過控制單元使在待測物上方 的X-ray與旋轉鏡機構同步轉動，使得偵測裝置取得具有輻射 ，的X光斷層影像。但當待測物越靠近χ_Γ^，則待測物將有 落在輻射範圍(irradiation range)外的狀況，因此取像的放大倍 ^被限制。此外該專利前案所揭露的整體機構過於複雜和^ 貝0 JP2002-189002揭露一種x_ray檢測機構可用於檢測已黏 201030332 合元件之被測電路板(待測量物）。其主要利用傾斜及旋轉的x 射線輕射裝置(X-ray irradiation device)以放射狀的方式取得排 除黏合元件之重疊位置的X光片(radiograph)。此機構設計雖 然可以檢測有黏合元件的電路板，但若是各元件間距變窄，將 會發生任何角度都無法將黏合元件排除的狀況換言之，待分 離之檢測位置的X光照像術的影像(radi〇graphic images)有可 能得到不精確的影像資訊。201030332 VI. Description of the Invention: [Technical Field] The present invention relates to a three-dimensional X-ray imaging mechanism and a detection system using the same, which can be applied to automatic optical detection (AOI) in a seed preparation form, For example, blind hole detection of printed circuit boards (pCB), redundant package inspection of integrated devices, and detection of optoelectronic component packages. [Prior Art] At present, PCB package inspection can be changed from 2 degree space image to 3 degree space image by using x_ray image technology. And x_ray inspection machine can solve and overcome the bottleneck of several new packaging type quality control such as BGA, CSP, Flip Chip, etc., and improve the production yield. However, the current 3D X-ray inspection system products and technologies are mostly controlled by international manufacturers. Their prices are expensive and their functions are not flexible enough to meet the needs of different companies and different industries. For example, JP 11-344453 discloses a non-destructive X-ray tomography mechanism design. The structure is to fix the object to be tested on a 360-degree rotating mechanism. x_ray is in line with the center of the rotating shaft and the detecting device, and a series of tomographic images of the object to be tested can be obtained for analysis. Since the object to be tested needs to be rotated 360 degrees, the object to be tested cannot be placed too close to x_my, so the magnification of the image is limited, and it is difficult to observe the finer parts of the respective components. No. 4,926,452 discloses a non-destructive X-ray thin film depiction of PC_ray laminography. The X-ray above the object to be tested is rotated synchronously with the rotating mirror mechanism through the control unit, so that the detecting device obtains the X-ray tomographic image with radiation. However, when the object to be tested is closer to χ_Γ^, the object to be tested will have a condition that falls outside the radiation range, and thus the magnification of the image is limited. In addition, the overall mechanism disclosed in the prior patent is too complicated and it is disclosed that an x_ray detecting mechanism can be used to detect a circuit board to be tested (object to be measured) which has been bonded to the components of 201030332. It mainly uses a tilting and rotating X-ray irradiation device to radially obtain a radiograph that removes overlapping positions of the bonding elements. Although the design of the mechanism can detect the circuit board with the adhesive component, if the spacing of the components is narrowed, the adhesive component can not be removed at any angle, in other words, the image of the X-ray image to be separated at the detection position (radi 〇graphic images) It is possible to get inaccurate image information.
第1A圖為US7,099,432的圖式，其揭露一種非破壞性的 X射線斷層攝影法(X_ray tomography)機構，專利案能用以檢 ，已黏合元件之被測電路板。更進一步而言，其具有一可固定 待，電路板10的平台12 ’二驅動器14和15分別驅動平台12 沿著一個不同方向的轉轴擺動(swinging)，且一 X光裝置π 偵測裝置18能於平台12不同擺幅下取得待測電路板12 各角度^斷層影像。第1B圖同為US7,〇99,432的圖式，其利 用一個二軸向(χ-γ_ζ)的傳動裝置19來驅動平台位移且 藉由控制各軸向的位移量，可使得平台12產 該，要非常精確的驅動機構與 算法才月b仔到正確角度之影像。 【發明内容】 -，係提供—麟運動及—轉運動來縣-待檢洋Figure 1A is a diagram of US 7,099,432, which discloses a non-destructive X-ray tomography mechanism that can be used to inspect the board under test for bonded components. Further, it has a fixed standby, the platform 12' of the circuit board 10', the two drivers 14 and 15 respectively drive the platform 12 to swing along a different direction of the axis, and an X-ray device π detecting device 18 can obtain the image of each angle of the circuit board 12 to be tested under different swings of the platform 12. Figure 1B is also a pattern of US 7, 〇 99, 432, which utilizes a two-axis (χ-γ_ζ) transmission 19 to drive the displacement of the platform and by controlling the amount of displacement in each axial direction, the platform 12 can be produced, It is very accurate to drive the mechanism and algorithm to get the image of the correct angle. [Summary of the Invention] -, providing - Lin sports and - moving to the county - to be tested
Si測待檢測物每—層面結構的目的。且本發四面) 像技術，可改咖_ x_Ray _晴4^= 本發明的主要目的係在提供一種3Dx射 ^有能夠達取像無失真、提高影像相對對比、縮減機體積細 其 使操作與控制更加簡便， 201030332 以及有助於輕易取得待檢測物的各方向投影影像。 根據上述的目的與功效，本發明揭露一種3DX射線檢測 系統’係用以承載一待檢測物及擷取該待檢測物的光學影像， 其包含一 X光輻射裝置與一影像接收裝置，一載板可活動地 位在該X光輻射裝置與該影像接收裝置之間且承載及帶動該 待檢測物；其中該載板的運動模式包含繞著一第一轉轴進行擺 動及繞著一第二轉轴進行旋轉。是以待檢測物每轉動一個角 度’ X光輻射裝置的X光照射於待檢測物可產生一個投影影 像’而複數個不同角度或不同位置的投影影像由影像接收裝置 接收，然後經一影像處理軟體進一步地重建，即得到待檢測物 β 的結構影像。 以下即依本發明的目的、功效及結構組態，舉出較佳實施 例，並配合圖式詳細說明。 【實施方式】 第2圖揭露本發明的技術概念，其包含一 X光輻射裝置 21，一影像接收裝置22相對X光輻射裝置21。又一載板23 可活動地位在X光輻射裝置21與影像接收裝置22之間。 前述的X光輻射裝置21用以產生X光及照射位在載板 ❿ 23上的待檢測物24 ;影像接收裝置22用以接收來自該X光 輻射裝置21且照射過待檢測物24的X光。 值得注意的是，載板23可以繞著一第一轉轴25進行ω 角度的擺動，且載板23還可以繞著一第二轉轴26進行Θ角度 • 的旋轉。上述的第一轉轴25與第二轉轴26為非平行。 再者，載板23的擺動角度小於180度，也就是說ω角度 可以介於負90度與正90度之間；載板23的旋轉角度可依設 定每單位角度做旋轉，實際使用狀態可使待檢測物24作360 度旋轉；是以位在載板23上的待檢測物24隨著載板23擺動 及旋轉。 201030332 請參閱第2圖’在載板23與待檢測物24擺動及轉動的運 動模式下’ X光輻射裝置21所產生的X光照射在待檢測物24 上，可以就待檢測物24的不同位置，例如圖中的24a〜24d分 . 別形成影像且由影像接收裝置22接收。 請參閱第3圖，一般而言，待檢測物24的3D重建需的 四面投影影像(shadow image) 24a，〜24d，，可以在待檢測物24 擺動及轉動的運動模式下順利地產生。 再參閱第2圖’影像接收裝置22為電荷耦合裝置(charge Couple Device，CCD)且電性耦接一影像處理裝置27。其中影像 ❿ 處理處理裝置27為一電腦，且内建一影像處理軟體(未顯示）。 影像接收裝置22接收的待檢測物24影像傳送給影像處理裝置 27 ’並由影像處理軟體進行重建及顯示。 另外，一第一傳動裝置28係結合影像接收裝置22，且第 一傳動裝置28用以驅動影像接收裝置22作線性位移。藉此可 以調整影像接收裝置22相對待檢測物24的距離，使得待檢測 物24的影像呈現更局的相位對比(phase contrast)結果。 請參閱第4圖’本實施例與第2圖所顯示之實施例的不同 處在於載板23結合一第二傳動裝置29 »第二傳動裝置29可 Ο 以提供X軸方向、γ轴方向、z軸方向’或其組合的驅動作用。 在本實例中’載板23與待檢測物24除了擺動與旋轉外，更可 以朝受第一傳動裝置29驅動的方向位移。例如載板23朝Z 軸方向位移可以達到調整影像效大倍率的效果。 第5圖揭露一個本發明的可行實施例，其包含一 X光輻 ' 射裝置21用以產生X光及照射待檢測物24; —影像接收裝置 22係位在X光輻射裝置21的相對面用以接收通過待檢測物 24的X光。一載板23位在X光輻射裝置21與影像接收裝置 22之間用以承載及帶動待檢測物24。 一第一載座31對應載板23 ;更具體而言，載板23係位 201030332 在第一載座31上。一第二載座32位在第一載座31 一侧；一 第三載座33對應第二載座32。 一旋轉機構41配置在第一載座31與載板23間，其提供 旋轉作用力以帶動載板23及待檢測物24作旋轉運動。 擺動機構42配置在第二載座32與第一載座31間，且 帶動第一載座31作擺動運動。而位在第一載座31上的載板 23及待檢測物24隨第一載座31的擺動而擺動。Si measures the purpose of each layer structure of the object to be detected. And the hair of the four sides) like technology, can change the coffee _ x_Ray _ clear 4 ^ = The main purpose of the present invention is to provide a 3Dx shot ^ can achieve image without distortion, improve the relative contrast of the image, reduce the size of the machine to make it operate It is easier to control, 201030332 and projection images in all directions that help to easily obtain the object to be detected. According to the above object and effect, the present invention discloses a 3DX ray detection system for carrying an object to be detected and an optical image for capturing the object to be detected, which comprises an X-ray radiation device and an image receiving device. The board is movable between the X-ray radiation device and the image receiving device and carries and drives the object to be detected; wherein the motion mode of the carrier comprises swinging around a first axis of rotation and rotating around a second axis The axis rotates. The projection image of the plurality of different angles or different positions is received by the image receiving device by the X-ray of the X-ray radiation device, and the X-ray radiation device is irradiated with the X-ray of the X-ray radiation device to generate a projection image, and then processed by the image receiving device. The soft body is further reconstructed, that is, a structural image of the object to be detected β is obtained. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. [Embodiment] Fig. 2 discloses the technical concept of the present invention, which comprises an X-ray radiation device 21, and an image receiving device 22 opposed to the X-ray radiation device 21. Another carrier 23 is movable between the X-ray radiation device 21 and the image receiving device 22. The X-ray radiation device 21 is configured to generate X-rays and the object 24 to be detected on the carrier ❿ 23; the image receiving device 22 is configured to receive the X from the X-ray radiation device 21 and illuminating the object to be detected 24 Light. It should be noted that the carrier 23 can be oscillated at an angle of ω around a first rotating shaft 25, and the carrier 23 can also be rotated about a second rotating shaft 26. The first rotating shaft 25 and the second rotating shaft 26 described above are non-parallel. Furthermore, the swing angle of the carrier 23 is less than 180 degrees, that is, the ω angle can be between minus 90 degrees and plus 90 degrees; the rotation angle of the carrier 23 can be rotated according to the set angle, and the actual use state can be The object to be detected 24 is rotated 360 degrees; the object to be detected 24 positioned on the carrier 23 is swung and rotated with the carrier 23. 201030332 Please refer to FIG. 2 'X-rays generated by the X-ray radiation device 21 on the object to be detected 24 in the motion mode in which the carrier 23 and the object to be detected 24 are swung and rotated, which may be different for the object to be detected 24 The position, for example, 24a to 24d in the figure, is not formed and received by the image receiving device 22. Referring to Fig. 3, in general, the four-sided reconstruction of the object 24 to be detected 24a, 24a, 24d, can be smoothly generated in the motion mode in which the object 24 is swung and rotated. Referring to FIG. 2, the image receiving device 22 is a charge couple device (CCD) and is electrically coupled to an image processing device 27. The image processing device 27 is a computer and has an image processing software (not shown) built in. The image of the object to be detected 24 received by the image receiving device 22 is transmitted to the image processing device 27' and reconstructed and displayed by the image processing software. In addition, a first transmission 28 is coupled to the image receiving device 22, and the first transmission 28 is used to drive the image receiving device 22 for linear displacement. Thereby, the distance of the image receiving device 22 relative to the object to be detected 24 can be adjusted, so that the image of the object to be detected 24 exhibits a more phase contrast result. Referring to Fig. 4, the difference between the embodiment shown in Fig. 2 and the embodiment shown in Fig. 2 is that the carrier 23 is combined with a second transmission 29. The second transmission 29 can provide the X-axis direction, the γ-axis direction, The driving action of the z-axis direction 'or a combination thereof. In the present example, the carrier 23 and the object to be detected 24 are displaced in the direction of being driven by the first actuator 29 in addition to the swinging and rotating. For example, the displacement of the carrier plate 23 in the Z-axis direction can achieve the effect of adjusting the image magnification. Figure 5 illustrates a possible embodiment of the present invention comprising an X-ray radiation device 21 for generating X-rays and illuminating the object to be detected 24; - Image receiving device 22 being tethered to the opposite side of the X-ray device 21 It is used to receive X-rays passing through the object to be detected 24. A carrier 23 is disposed between the X-ray radiation device 21 and the image receiving device 22 for carrying and driving the object to be detected 24. A first carrier 31 corresponds to the carrier 23; more specifically, the carrier 23 is tied to the first carrier 31 at 201030332. A second carrier 32 is located on the side of the first carrier 31; a third carrier 33 corresponds to the second carrier 32. A rotating mechanism 41 is disposed between the first carrier 31 and the carrier 23, and provides a rotational force to drive the carrier 23 and the object 24 to be rotated. The swinging mechanism 42 is disposed between the second carrier 32 and the first carrier 31, and drives the first carrier 31 to perform a swinging motion. The carrier 23 and the object to be detected 24 positioned on the first carrier 31 are swung with the swing of the first carrier 31.
❹ 是以本實施例明白地揭露載板23與待檢測物24能夠確實 地作擺動及旋轉運動。依待檢測物24的擺動與旋轉，χ光輻 射裝置21照射待檢測物24所產生的多個影像被影像接收裝置 22接收，且由影像處理設備27進行影像處理。 又一第一滑動機構51係結合該載板23且位在第一載座 31上。當第一滑動機構51作動可帶動載板23作Υ軸方向的 位移。此外，第一滑動機構51與旋轉機構41可互相結合， 整合成同一裝置/機構。 一第二滑動機構52位在第二載座32與該第三載座33 間’且第二滑動機構52用以帶動第二載座32作χ軸方向位 滑動機構53結合第三載座33，且第三滑動機構53 帶動第二載座33作Z軸方向位移。 ^由各滑動機構調整載板23與待檢測物24的位置以及 第-傳動裝置28調整影像接收裝置22的位置 此外關於做23的擺動角 根據本發明所揭露的内容，其具有以下優點： 4==:¾像技術，改良晰像須藉由 2·在有限空酸資源τ，㈣定^^赫像接收裝置的 201030332 方式達到取像無失真與縮減機構體積目標。 3·獨立式ϋ動機構各轴運動，可輕易取得欲檢測物各種方 向、角度之投影影像。 4. 此機構之X光三維檢測與顯示技術可減少3D成像所需 之旋轉角度’達到減少循環時間(CycleTime)的效果。 5. 影像接收裝置可位移，其有助於提高X光影像的相位對 比、影像處理的可靠度與影像的解析度。 以上乃本發明之較佳實施例以及設計圖式，惟較佳實施例 ^及設計圖式僅是舉例說明，並非用於限制本發明技藝之權利 範圍’凡以均等之技藝手段、或為下述「申請專利範圍 所涵蓋之糊範圍而實施者’均稀離本發明之範_而為申請 【圖式簡單說明】 第la圖為習知X-Ray檢測機構的結構示意圖； 第lb圖為習知X-Ray檢測機構的另一示意圖； 第2圖為本發明的結構示意圖； ❹ 第3 意圖In the present embodiment, it is apparent that the carrier 23 and the object to be detected 24 can be surely oscillated and rotated. Depending on the swing and rotation of the object to be detected 24, a plurality of images generated by the calendering device 21 illuminating the object 24 to be detected are received by the image receiving device 22, and image processing is performed by the image processing device 27. A further first sliding mechanism 51 is coupled to the carrier 23 and is positioned on the first carrier 31. When the first sliding mechanism 51 is actuated, the carrier 23 can be displaced in the axial direction. Further, the first sliding mechanism 51 and the rotating mechanism 41 can be combined with each other to synthesize the same device/mechanism. A second sliding mechanism 52 is located between the second carrier 32 and the third carrier 33 and the second sliding mechanism 52 is used to drive the second carrier 32 as the axial direction sliding mechanism 53 in combination with the third carrier 33. And the third sliding mechanism 53 drives the second carrier 33 to be displaced in the Z-axis direction. The position of the carrier 23 and the object to be detected 24 is adjusted by the respective sliding mechanisms and the position of the image receiving device 22 is adjusted by the first transmission device. Further, with respect to the swing angle of 23, according to the disclosure of the present invention, it has the following advantages: ==:3⁄4 like technology, the improved image must be achieved by the method of 2········································· 3. The movement of each axis of the independent swaying mechanism can easily obtain the projection images of various directions and angles of the object to be detected. 4. This mechanism's X-ray 3D inspection and display technology reduces the rotation angle required for 3D imaging' to achieve a reduced cycle time (CycleTime). 5. The image receiving device can be displaced, which helps to improve the phase contrast of the X-ray image, the reliability of image processing and the resolution of the image. The above is a preferred embodiment and a design of the present invention, and the preferred embodiment and the drawings are merely illustrative and not intended to limit the scope of the invention. The description of the scope of the invention covered by the scope of the patent application is omitted from the scope of the present invention. The application is a schematic diagram of a conventional X-Ray detection mechanism. The lb diagram is a schematic diagram of a conventional X-Ray detection mechanism. Another schematic diagram of a conventional X-Ray detecting mechanism; Fig. 2 is a schematic structural view of the present invention; ❹ 3rd intention
圖為本發明的待檢測物經X 第4圖為本發明的另一結構示意圖。 第5圖為本發明的實施例結構示意圖。 【主要元件符號説明】 10待測電路板 12平台 14驅動器 15驅動器 16 X光裝置 18偵測裝置器 201030332 19傳動裝置 21 X光輻射裝置 22影像接收裝置 23載板 24待檢測物 25第一轉軸 26第二轉轴 27影像處理裝置 28第一傳動裝置 29第二傳動裝置 31第一載座 32第二載座 33第三載座 41旋轉機構 42擺動機構 51第一滑動機構 52第二滑動機構 53第三滑動機構The figure is a schematic view of another structure of the present invention, which is the object to be detected of the present invention. Figure 5 is a schematic view showing the structure of an embodiment of the present invention. [Main component symbol description] 10 circuit board to be tested 12 platform 14 driver 15 driver 16 X-ray device 18 detecting device 201030332 19 transmission device 21 X-ray radiation device 22 image receiving device 23 carrier plate 24 to be detected object 25 first axis 26 second rotating shaft 27 image processing device 28 first transmission device 29 second transmission device 31 first carrier 32 second carrier 33 third carrier 41 rotating mechanism 42 swinging mechanism 51 first sliding mechanism 52 second sliding mechanism 53 third sliding mechanism