TW201029848A - Substrate with hydrophobic surface and manufacturing method thereof - Google Patents

Abstract

A substrate with hydrophobic surface and a manufacturing method thereof are provided. The substrate includes a base and a hydrophobic group. The surface of the base has many oxygen groups. The hydrophobic group formed by an organo silicone compound reacted with oxygen groups and a hydrophobic compound is combined with the oxygen groups.

Description

201029848 6. Technical Field of the Invention The present invention relates to a substrate having a hydrophobic surface and a method of manufacturing the same, and more particularly to a substrate having an organic ruthenium group attached to its hydrophobic surface and Production method. [Prior Art] In order to avoid the phenomenon of the microstructure on the surface of the substrate of the microelectromechanical device, the surface of the substrate is often subjected to hydrophobic treatment. In the general hydrophobic treatment, the substrate is first oxidized with hydrogen peroxide (H2〇2) to form a hydroxyl group on the surface of the substrate. Then, a hydrophobic molecule such as 1H, 1H, 2H, 2H~perfiuorodecyl1:rich〇i〇rsiiane (FDTS), which has a chemical formula of (CF3(CF2MCH2)2SiCl3) and a hydroxyl group, is subjected to dehydration condensation reaction to make FDTS A self-assembled layer film is formed on the substrate. However, by-products such as hydrochloric acid (HC1) are usually derived during the above treatment. Since the FDTS is a chlorine-containing organic ruthenium compound, the chloroquinone ion of the FDTS is removed and the hydrogen ion of the hydroxyl group is also removed, and the removed gas ion combines with the removed hydrogen ion to form hydrogen chloride, i.e., hydrochloric acid. Such by-products can etch the substrate and the metal on the substrate, such as pads on the substrate. In addition, foam is generated during the oxidation of the substrate with hydrogen peroxide, which also damages the substrate. Further, the solvent associated with a conventional hydrophobic molecule such as FDTS is isoindole (is〇_〇ctane). Isoxin is a flammable substance that is easily ignited by heat, sparks and flames. Also, isooctane is toxic. If inhaled or absorbed through the skin, it may cause poisoning to the human body. If it is handled improperly, it will inevitably harm the environment. The present invention relates to a substrate having a hydrophobic surface and a method for producing the same, which is through an organic group containing carbon and hydrogen leaving groups such as ethoxy (-OCHWH3) The compound is combined with the hydroxyl group of the substrate, and its by-product is an alcohol such as ethyl lactate (C2H5〇H). Such by-products have very little damage to the substrate, the environment or the human body. Then, a hydrophobic compound is reacted with an organic compound bonded to the substrate to form a hydrophobic group. According to a first aspect of the invention, a substrate having a hydrophobic surface is proposed. The substrate includes a substrate and a hydrophobic group. The surface of the substrate of the substrate has a plurality of oxy groups. The oxy group is bonded to a hydrophobic group, and the hydrophobic group is formed by reacting an organic hydrazine compound with a hydrophobic compound. According to a second aspect of the invention, a substrate having a hydrophobic surface is provided. The substrate includes a substrate and a hydrophobic group. The surface of the substrate of the substrate has a plurality of oxy groups. The oxy group is bonded to a hydrophobic group, and the hydrophobic group is formed by reacting an organic hydrazine compound with a hydrophobic compound. Among them, the 'organic compound is 3-(aminopropyl triethoxysilane) (APTES), and its chemical formula is as follows:

Ch3

4 2 201029848 X VT l^VX ΓΛ. , and the hydrophobic compound is Monoglycidyl ether-terminated PDMS ( MGE-PDMS ), the chemical formula is as follows ·

H3C

Ch3

n CH3

And the chemical formula of the hydrophobic group is as follows:

According to a third aspect of the invention, a substrate having a hydrophobic surface is provided. The substrate includes a substrate and a hydrophobic group. The substrate surface 10 of the substrate has a plurality of oxy groups. The oxy group is bonded to a hydrophobic group and the hydrophobic group is formed by reacting an organic hydrazine compound with a hydrophobic compound. Among them, the organic ruthenium compound is r -Methacryloxypropyltrimethoxysilane (MPTMS), and its chemical formula is as follows: 5 201029848 1 w j mum CH,

The body is ch2 ch3, and the hydrophobic compound is lH, lH, 2H-hep1: adecafluor〇-l-decene (HDFD), and its chemical formula is as follows: ^^CH2 (CF2)7CF3, and the chemical formula of the hydrophobic group is as follows: _α o ( cf2)7cf3 / ch3

(CF2) 7CF3 According to a fourth aspect of the present invention, a method of manufacturing a substrate having a hydrophobic surface is proposed. The manufacturing method includes the following steps. Providing a substrate; oxidizing one surface of the substrate to form a plurality of argon oxygen 201029848 X VT *τν»χ 基. base; preparing a first organic solution, the solute of which is a plurality of organic bismuth compounds; Forming a second organic solution having a solute of a plurality of hydrophobic compounds; after the oxidizing step, immersing the substrate in the first organic solution, and performing a Silanization reaction on the substrate and the organic ruthenium compound; After the thiolation reaction, the substrate is immersed in the second organic solution, and the hydrophobic compound is chemically reacted with the organic hydrazine compound after the hydrazine alkylation reaction to bind the hydrophobic compound to the hydrazine alkylation reaction. The organic compound is broken to form a hydrophobic group. According to the fifth aspect of the invention, a hydrophobic surface is proposed

A method of manufacturing a substrate. The manufacturing method includes the following steps. Providing a substrate; oxidizing one of the substrate surfaces to form a plurality of hydroxyl groups on the surface of the substrate; preparing a first organic solution having a solute of several APTES; preparing a second organic solution having a plurality of solute MGE-PDMS; after the oxidation step, the substrate is immersed in the first organic solution, the hydroxyl group is subjected to a dream alkylation reaction with the APTES; and after the calcination reaction, the substrate is immersed in the second organic solution, MGE-PDMS is subjected to an Epoxy-amine reaction with APTES(R) after completion of the oximation reaction, and MGE-PDMS is bonded to ApTES after completion of the oximation reaction to form a hydrophobicity. Group. According to a sixth aspect of the invention, a method of manufacturing a substrate having a hydrophobic surface is provided. The manufacturing method includes the following steps. Providing a substrate; oxidizing one surface of the substrate to form a plurality of hydroxyl groups on the surface of the substrate; preparing a first organic solution having a solute of several MpTMS; preparing a second organic solution having a plurality of solute HDFD; after the oxidation step, 7 201029848 AV ¥ 1TV1 1-%. The substrate is immersed in the first organic solution, and the hydroxyl group is subjected to a dream alkylation reaction with MPTMS; after the calcination reaction, the substrate is immersed in the first step. In a second organic solution; providing a photoinitiator to the second organic solution; and using an ultraviolet light

The first organic solution was injected to cause the HDFD to undergo a photopolymerization reaction with each other to bind the JJDFD to the MPTMS after the completion of the oximation reaction to form a hydrophobic group. According to a seventh aspect of the present invention, a method of manufacturing a substrate having a hydrophobic surface is proposed. The manufacturing method comprises the steps of: providing a substrate; oxidizing one surface of the substrate to form a plurality of hydroxyl groups on the surface of the substrate, preparing a first organic solution, the solute is a plurality of MpTMS; preparing a second organic a solution whose solute is several HDFDs; after the oxidation step, the substrate is immersed in the first organic solution, the hydroxyl group is subjected to a rock alkylation reaction with MPTMS; a hot initiator is supplied to the second organic solution; The second organic solution is subjected to a thermal polymerization reaction of the hydrophobic compounds to each other to bind the hydrophobic steeping α to the organolithium compound after the completion of the fragmentation reaction to form a hydrophobic group. According to an eighth aspect of the invention, a method of manufacturing a substrate having a hydrophobic surface is provided. The manufacturing method includes the following steps. Providing a substrate; oxidizing one surface of the substrate to a surface of the substrate to form a plurality of hydroxyl groups; and after the oxidizing step, immersing the substrate in a third organic solution, the solute is Hydrophobic compounds react a hydrophobic compound with a hydroxyl group to form a hydrophobic group. In order to make the above description of the present invention more comprehensible, the following detailed description of the preferred embodiment of the present invention will be described in detail as follows: 201029848 [Embodiment] The substrate having a hydrophobic surface of the present invention and In the manufacturing method, 'the permeation-containing leaving group of carbon and hydrogen, for example, an organic hydrazine compound of an ethoxy group is bonded to a hydroxyl group of a substrate, and the by-product produced is an alcohol, such as ethanol. The product is very low in damage to the substrate, the environment or the human body. The following is an example of four application examples. However, the embodiments are merely illustrative of several embodiments of the invention, and the description and illustration are not intended to limit the scope of the invention. First Embodiment Referring to Figure 1, there is shown a schematic view of a substrate having a hydrophobic surface in accordance with a first embodiment of the present invention. The substrate 100 includes a substrate 1〇2 and a hydrophobic group 104, wherein the substrate 1〇2 is, for example, a micro-matrix system (MEMS) microstructure substrate. The substrate surface 1〇6 of the substrate 102 has a plurality of oxy groups 1〇8, wherein the substrate surface 106 can be a flat surface. The hydrophobic group 1〇4 is bonded to the oxy group 1-8, and the hydrophobic group 104 is an organic hydrazine compound such as 3-(aminopropyl triethoxysilane) (APTES) and a hydrophobic compound such as Monoglycidyl. Ether-terminated PMS (MGE-PDMS) Reaction Formation The following describes a method of manufacturing the substrate 100 of the present embodiment. Referring to Figure 2, there is shown a flow chart of a method of fabricating a substrate having a hydrophobic surface in accordance with a first embodiment of the present invention. Please also refer to Fig. 3A, which shows a schematic view of the substrate of the first embodiment. In step S202, a substrate 1〇2 is provided. 9 201029848 λ w χ-τνι η. Next, please refer to Fig. 3B, which shows a schematic diagram of the formation of a plurality of hydroxyl groups on the substrate of Fig. 3A. The substrate surface 106' of the substrate 102 is oxidized in step S204 such that the substrate surface 106 is formed with a plurality of hydroxyl groups U0. Where the 'oxidation step can be accomplished by a plasma oxidation technique during the plasma oxidation process' does not result in a bubble that would damage the substrate as is conventional. In addition, the technology of plasma treatment is simple, the cost is low, and the treatment process does not require a large amount of/grain to cause pollution to the environment, and is fast and efficient. Although only three hydroxyl groups are shown in FIG. 3B, it should be understood by those skilled in the art that the base material of the 3A drawing may have three or more hydroxyl groups, and in order not to make the illustration too turbulent, the third The figure only shows three hydroxyl groups 11 〇. Then, in step S206, a first organic solution (not shown) is prepared, wherein the solvent is isopropanol (2-pr〇pan〇i) or ethanol, and the solute thereof is a plurality of 3-(aminopropyl triethoxysilane) ( APTES). Then, in step S208, a second organic solution (not shown) is prepared, the solvent of which is preferably a high boiling organic solvent, and the solute thereof is a plurality of Monoglycidyl ether-terminated PDMS (MGE-PDMS). Then, please refer to FIG. 3C, which shows a schematic diagram of the APTES of the first embodiment bonded to the substrate of FIG. 3B. In step S210, the substrate 102 is immersed in the first organic solution, and the hydroxyl group 11〇 is subjected to a monoalkylation reaction with aptes. In this step, the APTES is de- ethoxylated, and the hydroxyl no of the substrate 102 is dehydrogenated, and the two are combined, as shown in Figure 3C. The hydroxyl group 110 becomes an oxy group 108 after dehydrogenation. Further, the by-product produced in this step is an alcohol such as ethanol. Such by-products have very little damage to the substrate, the environment or the human body. Then, in step S212, after the oximation reaction, the substrate 102 is immersed in the second organic solution and the second organic solution is heated with the substrate 1〇2. At this time, 'MGE-PDMS is subjected to an epoxy amination reaction with APTES after the completion of the oximation reaction, so that MGE-PDMS is bonded to the APTES after the completion of the calcination reaction, thus forming the first The hydrophobic group 104 is shown. In this step, the epoxy group of MGE-PDMS is bonded to the amine group (-NH2) of Figure 3C after ring opening. Thus, the substrate 100 as shown in Fig. 1 is completed. Further, the portion protruding from the substrate 1〇2 in Fig. 1 is a 10-carbon hydrogen bond. Since the hydrocarbon chain is hydrophobic, the substrate 100 of the present embodiment is a substrate having hydrophobic properties. The hydrophobic group of this embodiment is a two-layer structure formed by two kinds of compounds, APTES and MGE-PDMS. Further, in this embodiment, a harmful environment such as hydrochloric acid, a by-product of the human body and the substrate is not produced. Therefore, the manufacturing method of the substrate 100 of the present embodiment is a manufacturing method which can easily meet environmental protection and safety requirements. ❿Second Embodiment The structure of the hydrophobic group of the present invention may also be other different structures, and is not limited to the structure of the hydrophobic group 104 of the first embodiment. Referring to Figure 4, there is shown a schematic view of a substrate having a hydrophobic surface in accordance with a second embodiment of the present invention. The second embodiment differs from the first embodiment in that the structure of the hydrophobic group 204 is composed of another organic hydrazine compound, such as r-Methacryloxypropyl trimethoxysi lane (MPTMS) and another hydrophobic compound, for example, 11 201029848

1 VY 1TWX I~V lH, lH, 2H-heptadecafluoro-l-decene (HDFD). In this second embodiment, the same elements as those of the first embodiment are all given the same reference numerals. The substrate 200 includes a substrate 102 and a hydrophobic group 204. The hydrophobic group 204 is an organic hydrazine compound, for example, MPTMS is formed by reacting with a hydrophobic compound such as HDFD. A method of manufacturing the substrate 200 of the present embodiment will be described below. Referring to Figure 5, there is shown a flow chart of a method of fabricating a substrate having a hydrophobic surface in accordance with a second embodiment of the present invention. Steps S2〇2 to S204 have been described in the first embodiment, and will not be described again. The following is explained from step S502. ® In step S502, a first organic solution (not shown) is prepared, the solute of which is a plurality of organic hydrazine compounds, such as MPTMS. Then, in step S504, a second organic solution (not shown) may be prepared, the solvent of which may be ethanol or water, and the solute thereof is a plurality of hydrophobic compounds such as HDFD. The second organic solution of this embodiment uses a solution which is less harmful to the environment and human body, i.e., ethanol or an aqueous solution. Therefore, the method of manufacturing the substrate ❹ 200 of the present embodiment is a process method that can easily meet environmental protection and safety requirements. Then, Qi refers to FIG. 6 at the same time, which shows a schematic diagram of the MPTMS of the second embodiment bonded to the substrate of FIG. 3A. In step S5〇6, the substrate 102 is sub-into the first organic solution, and the hydroxyl group 110 is subjected to a monoalkylation reaction with MPTMS. In this step, the MPTMS is removed from the ethoxy group, and the hydroxyl group 110 of the US material 102 (the hydroxyl group 110 is shown in the first figure) after deamination of argon 12 201029848 λ. fj i^vrx rk, two Combine together as shown in Figure 6. The by-product produced in this step is an alcohol such as ethanol. Such by-products have very little damage to the substrate, the environment or the human body. Then, in step S508, after the alkylation reaction, the substrate 102 is immersed in the second organic solution. Then, in step S510, a photoinitiator such as α,α-Dimethoxy-α-phenylacetophenone is supplied to the second organic solution. φ Then 'in the step S512, 'irradiating the second organic solution with an ultraviolet light', the HDFD is photopolymerized with each other to bind the HDFD to the MPTMS after the completion of the calcination reaction to form a hydrophobic group. Mission 2〇4. So far, as shown in Fig. 4, the substrate 200 of this embodiment is completed. The portion of the substrate 102 that protrudes from the substrate 102 is a hydrocarbon chain. Since the carbon-hydrogen bond is hydrophobic, the substrate 200 of the present embodiment is a substrate having hydrophobic properties. Further, the hydrophobic group of the present embodiment has a two-layer structure, that is, a combination of MPTMS and HDFD. Moreover, the present embodiment does not produce a harmful environment such as guanidine hydrochloride, a by-product of a human body or a substrate, so the method for manufacturing the substrate 200 of the present embodiment is a process method that can easily meet environmental protection and safety requirements. The third embodiment is different from the second embodiment in that the third embodiment can complete the substrate 200 of FIG. 4 by thermal polymerization. The procedure for fabricating the substrate 2 by thermal polymerization will be described below. 13 201029848 χτν* rx Referring to Fig. 7, there is shown a flow chart of a method of manufacturing a substrate having a hydrophobic surface in accordance with a third embodiment of the present invention. Since steps S202 to S204 and steps S502 to S508 have been explained in the second embodiment, they will not be described again. The description will be started from step S702 below. In step S702, a thermal initiator such as Lauroyl peroxide is supplied to the second organic solution. Then, in step S704, the second organic solution is heated to cause the HDFDs to undergo a thermal polymerization reaction with each other to bind the HDFD to the MPTMS after the completion of the oximation reaction to form the hydrophobic group 204. So far as shown in Fig. 4, the substrate 2 of Fig. 4 is completed. Fourth Embodiment Further, the hydrophobic group of the above first to third embodiments is a two-layer structure, i.e., the hydrophobic group is a combination of two substances, which is not intended to limit the present invention. Hereinafter, the hydrophobic group of the fourth embodiment will be described as a single hydrophobic compound, and the by-product produced during the process of bonding the single hydrophobic compound to the substrate is also caused to the substrate, the environment or the human body. A substance that has very low damage. Referring to Figure 8, there is shown a flow chart of a method of fabricating a substrate having a hydrophobic surface in accordance with a fourth embodiment of the present invention. First, please refer to Fig. 9A at the same time, which shows a schematic view of the substrate of the fourth embodiment. In step S802, a substrate 402 is provided. Next, in step S804, the substrate 402 is immersed in an isopropanol solution for about 5 seconds to remove impurities on the substrate 402. Further, in step S806, the substrate 402 is blown dry with an air. 201029848 Then, please refer to Figure 9B, which shows a schematic diagram of the formation of a number of hydroxyl groups on the substrate of Figure 9A. In step S8〇8, one of the substrate surfaces 406 of the substrate 402 is oxidized by a plasma such that the substrate surface 406 is formed with a plurality of hydroxyl groups 410. Then, in step S810, the substrate 402 is immersed in an isopropanol solution. Then, in step S812, the substrate 402 is immersed in an iso-octane solution. • Then, please refer to Figure 9C, which shows a schematic diagram of the substrate formed in Figure 9B with hydrophobic molecules. In step S814, the substrate 402 is immersed in a third organic solution having a concentration of 5 mM (mole concentration), and the operating environment has a temperature of about 70. (: or room temperature. Among them, the solvent of the third organic solution is Yixinyuan' and its solute is several hydrophobic compounds, such as FDTES. The chemical formula of 'FDTES is CF3(CF2)7(CH2)2Si(0CH2CH3) 3. In this step, 'FDTES is removed from the ethoxy group, and after the hydroxyl group 410 is dehydrogenated, the two react to form a hydrophobic group 404 and are formed on the substrate surface 10406. Thus, the present embodiment is completed. The substrate 400 of the example. During the production process, the by-product produced is an alcohol, such as ethanol. Such by-products have little damage to the substrate, the environment or the human body. After the hydrogen group is removed, it becomes oxy 408. Then, in step S816, the substrate 402 is immersed in an isooctane solution to clean the unreacted FDTES. Then, in step S818, the substrate 402 is immersed in a different state. After the step S818, the substrate 400 can be subjected to a drying operation. 15 201029848 1 w The substrate having a hydrophobic surface disclosed in the above embodiments of the present invention and a method for manufacturing the same are provided by a method comprising carbon and hydrogen. Deion group, for example, ethoxylate The organic hydrazine compound is combined with the hydroxyl group reaction of the substrate, and the by-product produced is an alcohol such as ethanol. Such by-products have little damage to the substrate, the environment or the human body. Moreover, the present invention No corrosive substances are produced during the manufacturing process, such as hydrochloric acid, which does not cause corrosion of the metal pads for substrates with metal pads. In addition, the oxidation step is completed by a plasma oxidation technique. In the plasma oxidation process, there is no foam which will damage the substrate as in the prior art. In addition, the plasma treatment technology is simple, the cost is low, the treatment process does not require a large amount of solvent, and the environment is not polluted. And the present invention has been described above by way of a preferred embodiment, and is not intended to limit the invention. Those skilled in the art to which the invention pertains, without departing from the invention. Within the spirit and scope, various changes and refinements can be made. Therefore, the scope of protection of the present invention is subject to the definition of the patent application scope attached to the following. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of a substrate having a hydrophobic surface according to a first embodiment of the present invention. FIG. 2 is a flow chart showing a method of manufacturing a substrate having a hydrophobic surface according to a first embodiment of the present invention. Fig. 3A is a schematic view showing the substrate of the first embodiment of the first embodiment. Fig. 3B is a schematic view showing the formation of a plurality of hydroxyl groups on the substrate of Fig. 3A.

〇 16 201029848 i TT J · Π · Fig. 3C is a schematic view showing the bonding of the APTES of the first embodiment to the substrate of the third drawing. Fig. 4 is a schematic view showing a substrate having a hydrophobic surface according to a second embodiment of the present invention. Fig. 5 is a flow chart showing a method of manufacturing a substrate having a hydrophobic surface according to a second embodiment of the present invention. Fig. 6 is a schematic view showing the bonding of the MPTMS of the second embodiment to the substrate of Fig. 3A. Fig. 7 is a flow chart showing a method of manufacturing a substrate having a hydrophobic surface according to a third embodiment of the present invention. Figure 8 is a flow chart showing a method of manufacturing a substrate having a hydrophobic surface in accordance with a fourth embodiment of the present invention. FIG. 9A is a schematic view showing the substrate of the fourth embodiment. Fig. 9B is a schematic view showing the formation of a plurality of hydroxyl groups on the substrate of Fig. 9A. Fig. 9C is a schematic view showing the formation of a hydrophobic molecule on the substrate of Fig. 9B. [Description of main component symbols] 100, 200, 400: substrate 102, 402: substrate 104, 204, 404: hydrophobic group 106, 406: substrate surface 108, 408: oxy group 110, 410: hydroxyl group 17

Claims (1)

201029848 1 wji*turr\ VII. Patent application scope: 1. A substrate having a hydrophobic surface includes: a substrate having a plurality of oxy groups on a surface thereof; and a hydrophobic group, and the oxygen The group is bonded, and the hydrophobic group is formed by reacting an organic compound with a hydrophobic compound. 2. The substrate of claim 1, wherein the substrate surface is a flat surface. 3. The substrate of claim 1, wherein the substrate is a microstructured substrate of a microelectromechanical system (MEMS). 4. A substrate having a hydrophobic surface, comprising: a substrate having a plurality of oxy groups on a surface thereof; and a hydrophobic group bound to the oxy groups, wherein the hydrophobic group is an organic The compound is formed by reacting with a hydrophobic compound; wherein the compound is 3-(aminopropyl triethoxysilane) (APTES), and its chemical formula is as follows: 18 201029848 Λ ψψ 1~Γ\/Χ Λ~». The hydrophobic compound is Monoglycidyl ether-tenninated PDMS (MGE-PDMS) with the following chemical formula: And the chemical formula of the hydrophobic group is as follows: 19 201029848 1 W J ΙΗΙλΓΛ ΑΗ3 C \/0丨 Ch2 ch3 ο , and the hydrophobic compound is lH, lH, 2H-heptadecafluor〇-l-decene (HDFD), the chemical formula of which is as follows · · 'CH2 (CF2)7CF3 and the chemical formula of the hydrophobic group is as follows: a ο \ /Si c (CF2)7CF3 ch3 o Sr Q /-C ~~ C-( CF2)7CF3 ch3 I c V_) 8. The substrate according to claim 7, wherein the substrate 20 201029848 χ ντ i-rva. ί ». flat. 9. The substrate of claim 7, wherein the substrate is a microstructured substrate of a microelectromechanical system. A method for producing a substrate having a hydrophobic surface comprises: providing a substrate; oxidizing a surface of the substrate to form a plurality of hydroxyl groups on the surface of the substrate; preparing a first organic solution, The solute is a plurality of organic bismuth compound Φ; a second organic solution is prepared, the solute is a plurality of hydrophobic compounds; after the oxidizing step, the substrate is immersed in the first organic solution 'the substrate and the The organic ash compound is subjected to a Si lanization reaction; and after the oximation reaction, the substrate is immersed in the second organic solution, and the hydrophobic compound is subjected to the oximation of the ruthenium After the reaction, the organic compound is subjected to a chemical reaction to cause the hydrophobic compounds to be bonded to the organic compound after the completion of the reaction to form a hydrophobic group. 11. The method of manufacture of claim 2, wherein the read gasification step is performed in a plasma. The manufacturing method according to the invention of claim 2, wherein the solvent for reading the first organic solution is isopropanol (2_pr〇pan〇1), ethanol or 21 201029848 1 yv^mwrrv 13. A method for manufacturing a substrate having a hydrophobic surface, comprising: providing a substrate; oxidizing a surface of the substrate of the substrate such that a plurality of hydroxyl groups are formed on the surface of the substrate; and preparing a first organic solution having a solute of a plurality of APTES; preparing a second organic solution having a solute of a plurality of MGE-PDMS; after the oxidizing step, immersing the substrate in the first organic solution, the hydroxyl groups and the APTES are subjected to a decane a silanization reaction; and after immersing the substrate in the second organic solution, the MGE-PDMS is subjected to a ring of the APTES after the alkylation reaction The Ep〇Xy-amine reaction binds the MGE-PDMS to the APTES after the oximation reaction to form a hydrophobic group. 14. The method of manufacture of claim 13, wherein the oxidizing step is performed in a plasma. The manufacturing method according to claim 13, wherein the solvent of the first organic solution is isopropanol or ethanol. 16. The method of manufacture of claim 13, wherein the substrate surface is a flat surface. The manufacturing method of claim 13, wherein the substrate is a microstructured substrate of a microelectromechanical system. 18. A method of fabricating a substrate having a hydrophobic surface, comprising: providing a substrate; 22 201029848 & *τ x~rvx t. x oxidizing a substrate surface of the substrate to form a surface of the substrate a plurality of hydroxyl groups; a first organic solution having a solute of plural MPTMS; a second organic solution having a solute of plural Hdfd; The oxime in the solution is subjected to a monoalkylation reaction with the MPTMS; after the oximation reaction, the substrate is immersed in the second organic solution; • a photoinitiator is provided to the second An organic solution; and ultraviolet light illuminating the second organic solution to cause the HDFDs to undergo a photopolymerization reaction with each other to bind the ribs to the stalks after the oximation reaction to form a Hydrophobic group. 19. The method of claim 18, wherein the photoinitiator is aya ~ Dlmethoxy-a - phenylacetophenone 〇 20. The method of claim 18, wherein the oxidizing step It is completed with a plasma. 21. The manufacturing method according to claim 18, wherein the solvent of the first organic solution is ethanol or water. 22. The method of manufacture of claim 18, wherein the substrate surface is a flat surface. The manufacturing method of claim 18, wherein the substrate is a microstructured substrate of a microelectromechanical system. 24. A method of manufacturing a substrate having a hydrophobic surface, comprising: 23 201029848 1 wj providing a substrate; oxidizing a substrate surface of the substrate such that a plurality of hydroxyl groups are formed on the surface of the substrate; a first organic solution having a solute of a plurality of MpTMS; a second organic solution having a solute of a plurality of HDFDs; after the oxidizing step, immersing the substrate in the first organic solution, the hydroxyl groups Performing a monoalkylation reaction with the MPTMS; providing a hot initiator to the second organic solution; and heating the second organic solution to cause the HDFDs to undergo a thermopolymerization reaction with each other to combine the HDFDs The MPTMS after the oximation reaction is completed to form a hydrophobic group. The manufacturing method according to claim 24, wherein the thermal initiator is Laur〇yl per〇xide. A method of manufacturing according to claim 24, wherein the oxidizing step is performed in a plasma. 27. The manufacturing method according to claim 24, wherein the solvent of the first organic solution is ethanol or water. The manufacturing method according to claim 24, wherein the surface of the substrate is a flat surface. 29. The method of manufacture of claim 24, wherein the substrate is a microstructured substrate of a microelectromechanical system. 30. A method of fabricating a substrate having a hydrophobic surface, comprising: providing a substrate; oxidizing a substrate surface of the substrate with a plasma such that a plurality of hydrogens are formed on the surface of the substrate 24 201029848 An oxy group; and after the oxidizing step, immersing the substrate in a third organic solution; the gluten is a plurality of hydrophobic compounds, and reacting the hydrophobic compound with the oxynitrides to form a hydrophobic group . The manufacturing method according to claim 30, wherein the hydrophobic compound is 1 Η, 1 Η, 2 Η, 2H-perfluorodecyl triethoxysilane (CF3(CF2)7(CH2)2Si(OCH2CH3)3) (FDTES) ). The manufacturing method of claim 30, wherein between the step of providing the substrate and the oxidizing step, the manufacturing method further comprises: immersing the substrate in an isopropanol solution; The substrate is blown dry with an air. 33. The method of claim 30, wherein the oxidizing step and the step of immersing the substrate in the third organic solution further comprises: immersing the substrate in a An isopropanol solution; and immersing the substrate in an Iso-octane solution. 34. The manufacturing method of claim 30, wherein after the step of immersing the substrate in the third organic solution, the manufacturing method further comprises: immersing the substrate in an isooctane solution; The substrate was immersed in a solution of isopropanol. 35. The manufacturing method according to claim 30, wherein 25 201029848 1 vy ^ i*tur r\ the surface of the substrate is a plane. 36. The method of manufacture of claim 30, wherein the substrate is a microstructured substrate of a microelectromechanical system. 26