201028577 六、發明說明： 【發明所屬之技術領域】 本發明是關於軸密封部由設有潤滑油槽的滑動密封件 所構成的高真空閥。 【先前技術】 先前所知的高真空閥，其閥構件開閉驅動用之桿的軸 Φ 密封部，若是由設有潤滑油溝槽的滑動密封件構成時，流 動在流路內的氣體中有時也會混入有溶劑等，當該溶劑等 進入軸密封部時，就有可能會產生保護著真空密封用密封 構件的潤滑油洗脫、流出、變差。具體而言，當上述溶劑 等進入上述桿表面細微凹凸時，該溶劑等會從真空側進入 潤滑油溝槽，又越過潤滑油溝槽到達真空用密封構件，使 真空用密封構件變差。此外，高真空閥中，由於流路置於 真空周圍環境，以致上述潤滑油有時會在流路的真空周圍 • 環境內蒸發或流出，導致有時也會有真空密封用密封墊缺 乏潤滑油而造成早期磨損，產生漏損的問題。 【發明內容】 本發明的技術性課題是針對閥構件開閉驅動用之桿的 軸密封部由設有潤滑油溝槽的滑動密封件構成的上述高真 空閥，防止上述軸密封部缺乏潤滑油，實現該軸密封部的 長壽命化。 本發明更具體的技術性課題是針對上述高真空閥，利 -5- 201028577 用簡易手段有效抑制潤滑油從上述軸密封部往位於真空周 圍環境的流路蒸發、洗脫、流出。 爲了解決上述課題，根據本發明時，提供一種高真空 閥，其具備：在第1埠和第2埠之間形成的流路設置閥座 ，具備有以接離該閥座來開閉該流路之閥構件的閥體部； 由驅動手段驅動的桿以密封狀態貫通上述閥體部閥座相向 的流路壁插入在該流路內，可對連結在該桿前端的上述閥 構件進行驅動使閥座開關的閥驅動機構部，其特徵爲，在 貫通上述閥體部流路壁之上述桿的貫通孔內設置潤滑油溝 槽，在該貫通孔內潤滑油溝槽的上述流路側設置潤滑油保 持用的密封構件的同時，在上述貫通孔內之潤滑油溝槽的 相反側設置真空密封用密封構件，藉此構成上述貫通孔的 軸密封部，上述潤滑油溝槽的軸方長度是形成和上述閥構 件的最大衝程相同或爲該最大衝程以上。 本發明相關的高真空閥其較佳的實施形態是在上述貫 通孔內的流路側端設有刮板。 此外，上述閥構件驅動用的驅動手段，形成於前端連 結有上述閥構件使另一端從上述流路壁突出在殼內缸筒部 的上述桿，連結著滑動自如收容在該缸筒部內的活塞，利 用給排在該缸筒部內的導向流體壓透過上述活塞及桿就可 驅動閥構件。 當上述高真空閥爲上述導向式驅動的高真空閥時，以 將上述缸筒部之至少活塞的桿連結側的活塞室爲可給排導 向流體壓的壓力室，在上述桿貫通之貫通孔的該壓力室側 -6- 201028577 端設置該壓力室的密封用密封墊的同時，將該密封用密封 墊和位於貫通孔內潤滑油溝槽的該壓力室側的真空密封用 密封構件之間的空間，利用可讓從上述壓力室通過上述密 封用密封墊漏出的空氣脫逃的通孔開放於外部爲佳。 . 具有上述構成的高真空閥，因是在閥體部之桿的貫通 孔設有和閥構件的最大衝程相同或爲該最大衝程以上之軸 方向長度的潤滑油溝槽，所以桿表面經常存在有接觸著潤 Φ 滑油溝槽潤滑油的部份，再加上，於閥構件的開閉任一衝 程中，桿表面之接觸在潤滑油溝槽的部份是會經常接觸著 潤滑油溝槽兩端的密封構件其中之一，使該等密封構件可 補給潤滑油，因此能夠實現密封構件的長壽命化。 根據以上詳述的本發明高真空閥時，針對閥構件開閉 驅動用之桿的軸密封部由設有潤滑油溝槽的滑動密封件構 成的上述高真空閥，可防止軸密封部缺乏潤滑油，能夠實 現該軸密封部的長壽命化，更具體而言，利用簡易手段就 φ 能夠有效抑制潤滑油從上述軸密封部往位於真空周圍環境 的流路蒸發、洗脫、流出。 【實施方式】 〔發明之最佳實施形態〕 以下，根據圖面對本發明的實施例進行詳細說明。 第1圖及第2圖是表示本發明相關高真空閥的實施一 例。該高真空閥是閥構件14開閉驅動用之桿15的軸密封 部3 0由設有潤滑油溝槽3 1的滑動密封件構成的L型閥， 201028577 其主要部份’大致區分爲由：內部形成有流路11的閥體 部1 ;及爲了閥體部1的閥座16開閉可執行閥構件14開 閉驅動的閥驅動機構部2所構成。 上述閥體部1是在第1埠12和軸線與此正交的第2 埠13之間形成有上述流路1 1，在該流路1 1的第1埠12 內側設有閥座16，接著，在該閥座16相向的位置，配設 有以接離該閥座16來開閉上述流路11的閥構件14，該閥 構件14驅動用的桿15是以密封狀態貫通該桿15支撐用 的桿支撐板14所構成的流路壁，從上述流路11內導出附 設在閥體部1的閥驅動機構部2。 另一方面，上述閥構件14驅動用的上述閥驅動機構 部2，具備可對前端連結有上述閥構件14的桿15進行驅 動的驅動手段。該驅動手段，於圖示的實施例中，形成可 使前端連結有上述閥構件14的桿15的另一端從上述流路 壁（桿支撐板17)突出在其外側的殻21內的缸筒部20, 於該缸筒部20內，在上述桿15的端部，連結著滑動自如 收容在該缸筒部20內的活塞22，位於該缸筒部20內的活 塞22兩側的各活塞室23、24是成爲可從各別的導向埠 23a、24a給排有導向流體壓的壓力室，利用給排至該等壓 力室的導向流體壓透過上述活塞22及桿15就可驅動閥構 件14。 另，可構成爲上述活塞室23、24的一方並非給排有 導向流體壓的壓力室，可利用復位用的彈簧使導向流體壓 所驅動的活塞22復位。於該狀況時，通常是在閥構件14 -8- 201028577 和桿支撐板17之間安裝復位用的彈簧，但也可在活塞室 23、24的一方收容有復位用的彈簧。 上述高真空閥的貫通閥體部1的流路壁貫通孔18的 桿15的軸密封部30是經由在該貫通孔18內設置淺溝狀 - 的潤滑油溝槽3 1，在該貫通孔1 8內的潤滑油溝槽3 1的流 路11側，設置由0環等形成的潤滑油保持用的密封構件 32的同時’在上述貫通孔18內的潤滑油溝槽31的流路 Φ 11相反側，設置由〇環等形成的真空密封用密封構件33 所構成。接著，上述潤滑油溝槽31的軸方向長度是形成 和上述閥構件14的最大衝程相同或爲該最大衝程以上。 此外’在上述貫通孔18內的流路11側端設置刮板35 。該刮板35可抑制因桿15表面露出在流路11內所造成 附著在該表面的溶劑等隨著桿的滑動進入軸密封部30，但 其還具備有可抑制潤滑油從軸密封部30流出的功能。 再加上，設置在上述潤滑油溝槽3 1之流路1 1側的上 • 述密封構件32是可保持著潤滑油不會流出至成爲真空的 流路11側，但理所當然其還兼具真空密封功能。另一方 面，設置在上述潤滑油溝槽31相反側的密封構件3 3是以 真空密封爲其功能，但理所當然還兼具可使潤滑油不流出 至缸筒部20內的功能。 另，上述桿15，其表面和密封構件32滑接的部份是 以形成不露出在流路1 1爲佳，如此一來，即使流路1 1中 的溶劑等附著在桿表面，隨著閥構件1 4的衝程造成溶劑 等進入軸密封部30時，也不會到達密封構件32，能夠更 -9 - 201028577 加確實防止溶劑造成密封構件32的損傷。 上述缸筒部20的活塞22的桿連結側的活塞室24爲 給排有導向流體壓的壓力室之圖示實施例時，以在上述桿 15貫通的貫通孔18的該活塞室24側端設置密封用密封墊 36的同時’將該密封用密封墊36和貫通孔18內的真空密 封用密封構件3 3之間的空間，利用可使從上述壓力室通 過上述密封用密封墊36漏出的空氣脫逃的通孔37開放於 外部爲佳。當上述活塞室24做爲收容有復位用彈簧而開 放於大氣時，不需要設置上述密封墊36或通孔37。此外 ，於上述軸密封部3 0 ’在密封構件3 2和刮板3 5之間設置 軸承3 8。 具有上述構成的高真空閥，因是在閥體部1之桿15 的貫通孔18設有和閥構件14的最大衝程相同或爲該最大 衝程以上之軸方向長度的潤滑油溝槽31，所以桿15的表 面經常有接觸著潤滑油溝槽31潤滑油的部份，再加上， 於閥構件14的開閉任一衝程中，桿表面之接觸在潤滑油 溝槽31的部份會經常接觸著潤滑油溝槽31兩端的密封構 件32、33其中之一’使該等密封構件32、33經常補給有 潤滑油，能夠實現密封構件3 2、3 3的長壽命化。因此， 可防止軸密封部30缺乏潤滑油，能夠實現該軸密封部30 的長壽命化，更具體而言，利用簡易手段就能夠有效抑制 潤滑油從上述軸密封部30往位於真空周圍環境的流路n 的蒸發、洗脫、流出。 -10- 201028577 【圖式簡單說明】 胃1圖爲表示本發明相關的高真空閥的實施例左半爲 閉閥狀態’右半爲開閥狀態時的縱剖面圖。 . 第2圖爲上述實施例的要部縱剖面圖。 【主要元件符號說明】 I :閥體部 0 2:閥驅動機構部 II :流路 . 12 :第1埠 13 :第2埠 1 4 :閥構件 15 :桿 1 6 :閥座 1 8 :貫通孔 _ 2〇 :缸筒部 21 :殼 22 :活塞 23、24 :活塞室 3 〇 :軸密封部 3 1 :潤滑油溝槽 32 ' 33 :密封構件 3 5 :刮板 3 6 :密封用密封墊 -11 - 201028577 3 7 :通孔201028577 VI. Description of the Invention: [Technical Field] The present invention relates to a high vacuum valve in which a shaft seal portion is constituted by a sliding seal provided with a lubricating oil groove. [Prior Art] In the high vacuum valve known in the prior art, the shaft Φ sealing portion of the valve member for opening and closing the valve member is formed by a sliding seal member provided with a lubricating oil groove, and flows in the gas flowing in the flow path. When a solvent or the like enters the shaft sealing portion, the lubricating oil that protects the sealing member for vacuum sealing may elute, flow out, or deteriorate. Specifically, when the solvent or the like enters the fine unevenness on the surface of the rod, the solvent or the like enters the lubricating oil groove from the vacuum side, and passes over the lubricating oil groove to reach the vacuum sealing member, thereby deteriorating the vacuum sealing member. In addition, in the high vacuum valve, since the flow path is placed in the vacuum surrounding environment, the lubricating oil sometimes evaporates or flows out around the vacuum of the flow path, and sometimes the vacuum sealing gasket lacks lubricating oil. It causes early wear and tear and causes leakage. SUMMARY OF THE INVENTION A technical problem of the present invention is to prevent the shaft seal portion from being deficient in lubricating oil by a high-pressure valve including a sliding seal provided with a lubricating oil groove in a shaft seal portion of a valve member for opening and closing a valve member. The life of the shaft seal portion is extended. A more specific technical problem of the present invention is to effectively suppress the evaporation, elution, and outflow of the lubricating oil from the shaft seal portion to the flow path in the vacuum surrounding environment by the simple means for the above-mentioned high vacuum valve, benefiting from -5 to 201028577. In order to solve the above problems, according to the present invention, there is provided a high vacuum valve including a valve passage provided between a first turn and a second turn, and a valve seat provided to open and close the flow path by being separated from the valve seat a valve body portion of the valve member; a rod driven by the driving means is inserted into the flow path wall of the valve body portion facing the valve body in a sealed state, and the valve member connected to the tip end of the rod is driven to A valve drive mechanism portion of the valve seat switch is characterized in that a lubricating oil groove is provided in a through hole penetrating the rod of the valve body passage passage wall, and lubrication is provided on the flow passage side of the lubricating oil groove in the through hole In the oil retaining sealing member, a vacuum sealing sealing member is provided on the opposite side of the lubricating oil groove in the through hole, thereby forming a shaft sealing portion of the through hole, and the axial length of the lubricating oil groove is The formation is the same as or above the maximum stroke of the valve member described above. In a preferred embodiment of the high vacuum valve according to the present invention, a squeegee is provided at a flow path side end in the through hole. Further, the driving means for driving the valve member is formed by a rod that is connected to the valve member at the distal end and that has the other end protruding from the flow path wall in the inner cylindrical portion of the casing, and is connected to a piston slidably accommodated in the cylindrical portion. The valve member can be driven by the pressure of the pilot fluid discharged into the cylinder portion through the piston and the rod. When the high vacuum valve is the above-described guide type driven high vacuum valve, the piston chamber on the rod connecting side of at least the piston of the cylinder portion is a pressure chamber for guiding the fluid pressure to the discharge row, and the through hole penetrating the rod The pressure chamber side -6-201028577 is provided with a sealing gasket of the pressure chamber, and the sealing gasket is disposed between the sealing member and the vacuum sealing member on the pressure chamber side of the lubricating oil groove in the through hole. The space is opened to the outside by means of a through hole through which the air leaking from the pressure chamber through the sealing gasket is released. The high vacuum valve having the above configuration is characterized in that the through hole of the rod of the valve body portion is provided with a lubricating oil groove having the same stroke as the maximum stroke of the valve member or the axial length of the maximum stroke or more, so the rod surface often exists. There is a part that contacts the lubrication oil of the Φ oil groove, and in any stroke of the opening and closing of the valve member, the contact of the surface of the rod in the groove of the lubricating oil often contacts the lubricating oil groove. One of the sealing members at both ends allows the sealing members to replenish the lubricating oil, so that the life of the sealing member can be extended. According to the high vacuum valve of the present invention as described above, the above-mentioned high vacuum valve including the sliding seal provided with the lubricating oil groove for the shaft seal portion of the valve member for opening and closing the valve member can prevent the shaft seal portion from lacking the lubricating oil. In addition, it is possible to achieve a long life of the shaft seal portion, and more specifically, it is possible to effectively suppress evaporation, elution, and outflow of the lubricating oil from the shaft seal portion to the flow path around the vacuum by a simple means. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 and Fig. 2 are diagrams showing an example of the implementation of the high vacuum valve according to the present invention. The high vacuum valve is an L-shaped valve in which the shaft seal portion 30 of the valve member 14 for opening and closing the drive member 15 is constituted by a sliding seal member provided with the lubricating oil groove 31, and the main portion of 201028577 is roughly divided into: The valve body portion 1 in which the flow path 11 is formed is formed therein, and the valve drive mechanism portion 2 that can open and close the valve member 16 of the valve body portion 1 to open and close the valve member 14 can be opened and closed. In the valve body portion 1, the flow path 1 is formed between the first 埠12 and the second 埠13 orthogonal to the axis, and the valve seat 16 is provided inside the first 埠12 of the flow path 1 1 . Next, at a position facing the valve seat 16, a valve member 14 that opens and closes the flow path 11 is provided to be separated from the valve seat 16, and the rod 15 for driving the valve member 14 is supported by the rod 15 in a sealed state. The flow path wall formed by the rod support plate 14 is led out from the flow path 11 to the valve drive mechanism portion 2 attached to the valve body portion 1. On the other hand, the valve drive mechanism portion 2 for driving the valve member 14 is provided with a drive means for driving the lever 15 to which the valve member 14 is connected to the front end. In the illustrated embodiment, the driving means is formed in a cylinder in which the other end of the rod 15 to which the valve member 14 is connected to the front end is protruded from the flow path wall (the rod supporting plate 17) in the outer casing 21 In the cylinder portion 20, a piston 22 slidably accommodated in the cylinder portion 20 is coupled to an end portion of the rod 15 in the cylinder portion 20, and pistons on both sides of the piston 22 in the cylinder portion 20 are provided. The chambers 23 and 24 are pressure chambers that can receive the pilot fluid pressure from the respective guide rollers 23a and 24a, and the valve member can be driven through the piston 22 and the rod 15 by the pilot fluid discharged to the pressure chambers. 14. Further, one of the piston chambers 23, 24 may be configured not to provide a pressure chamber in which the pilot fluid pressure is discharged, and the piston 22 for the pilot fluid pressure can be reset by the spring for resetting. In this case, a spring for resetting is usually installed between the valve member 14 -8 - 201028577 and the lever support plate 17, but a spring for resetting may be accommodated in one of the piston chambers 23, 24. The shaft seal portion 30 of the rod 15 of the flow path wall through hole 18 of the through valve body portion 1 of the high vacuum valve is provided with a shallow groove-shaped lubricating oil groove 3 1 in the through hole 18 In the flow path 11 side of the lubricating oil groove 3 1 in the first embodiment, the sealing member 32 for holding the lubricating oil formed by the zero ring or the like and the flow path Φ of the lubricating oil groove 31 in the through hole 18 are provided. On the opposite side of the eleventh side, a vacuum sealing seal member 33 formed of a ring or the like is provided. Next, the axial length of the lubricating oil groove 31 is formed to be equal to or greater than the maximum stroke of the valve member 14. Further, a squeegee 35 is provided at the side end of the flow path 11 in the through hole 18. The squeegee 35 can suppress the solvent or the like adhering to the surface due to the surface of the rod 15 from being exposed in the flow path 11 from entering the shaft seal portion 30 as the rod slides, but it is also provided to suppress the lubricating oil from the shaft seal portion 30. Outflow function. Further, the sealing member 32 provided on the side of the flow path 1 1 of the lubricating oil groove 3 1 can keep the lubricating oil from flowing out to the side of the flow path 11 which becomes a vacuum, but it is of course Vacuum sealing function. On the other hand, the sealing member 33 provided on the opposite side of the lubricating oil groove 31 functions as a vacuum seal, but it is of course also possible to prevent the lubricating oil from flowing out into the cylinder portion 20. Further, it is preferable that the surface of the rod 15 whose surface is in contact with the sealing member 32 is formed not to be exposed in the flow path 11, so that even if a solvent or the like in the flow path 11 adheres to the surface of the rod, When the stroke of the valve member 14 causes the solvent or the like to enter the shaft seal portion 30, it does not reach the seal member 32, and it is possible to prevent the damage of the seal member 32 by the solvent. When the piston chamber 24 on the rod connection side of the piston 22 of the cylinder tube portion 20 is an illustrated embodiment in which a pressure chamber for guiding the fluid pressure is given, the piston chamber 24 side end of the through hole 18 penetrating the rod 15 is provided. When the sealing gasket 36 is provided, the space between the sealing gasket 36 and the vacuum sealing sealing member 33 in the through hole 18 can be leaked from the pressure chamber through the sealing gasket 36. The through hole 37 through which the air escapes is preferably opened to the outside. When the piston chamber 24 is housed in the reset spring and is opened to the atmosphere, it is not necessary to provide the gasket 36 or the through hole 37. Further, a bearing 38 is provided between the sealing member 3 2 and the squeegee 35 in the shaft seal portion 30'. The high vacuum valve having the above-described configuration is such that the through hole 18 of the rod 15 of the valve body portion 1 is provided with the lubricating oil groove 31 which is the same as the maximum stroke of the valve member 14 or the axial length of the maximum stroke or more. The surface of the rod 15 often has a portion that contacts the lubricating oil groove 31, and in addition, during any of the opening and closing of the valve member 14, the contact of the rod surface is often contacted in the portion of the lubricating oil groove 31. One of the sealing members 32, 33 at both ends of the lubricating oil groove 31 is such that the sealing members 32, 33 are often supplied with lubricating oil, and the life of the sealing members 3, 3, 3 can be extended. Therefore, it is possible to prevent the shaft seal portion 30 from being deficient in lubricating oil, and it is possible to achieve a long life of the shaft seal portion 30. More specifically, it is possible to effectively suppress the lubricating oil from the shaft seal portion 30 to the vacuum surrounding environment by a simple means. Evaporation, elution, and outflow of the flow path n. -10-201028577 [Simplified description of the drawings] The stomach 1 is a longitudinal cross-sectional view showing the left half of the embodiment of the high vacuum valve according to the present invention in the closed state. Fig. 2 is a longitudinal sectional view of an essential part of the above embodiment. [Description of main component symbols] I: Valve body part 0 2: Valve drive mechanism part II: Flow path. 12: 1st : 13: 2nd 埠 1 4: Valve member 15: Rod 1 6 : Seat 1 8 : Through Hole _ 2 〇: cylinder portion 21: case 22: piston 23, 24: piston chamber 3 〇: shaft seal portion 3 1 : lubricating oil groove 32 ' 33 : sealing member 3 5 : squeegee 3 6 : sealing seal Pad-11 - 201028577 3 7 : Through Hole
-12--12-