CN101713463A - High-vacuum valve - Google Patents
High-vacuum valve Download PDFInfo
- Publication number
- CN101713463A CN101713463A CN200910174147A CN200910174147A CN101713463A CN 101713463 A CN101713463 A CN 101713463A CN 200910174147 A CN200910174147 A CN 200910174147A CN 200910174147 A CN200910174147 A CN 200910174147A CN 101713463 A CN101713463 A CN 101713463A
- Authority
- CN
- China
- Prior art keywords
- valve
- push rod
- hole
- stream
- mentioned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
Abstract
The present invention provides a high-vacuum valve which comprises the following components: a valve body which is provided with a valve seat on a flow path between a first valve opening and a second valve opening and is provided with an opening/closing member that can joint or separate relatively to the valve seat; and a valve driving part. A push rod driven by the pilot fluid penetrates through a flow path opposite with the valve seat and is inserted into the flow path. The valve driving part drives and is connected with the opening/closing member provided at the top end of the push rod, wherein a lubricating grease groove is provided in a through hole. One side of the flow path of the lubricating grease groove is provided with a sealing member used for preserving the lubricating grease, and the other side is provided with a sealing member used for vacuum sealing thereby forming a shaft sealing. The axial length of the lubricating grease groove is same with or larger than the maximum stroke of the opening/closing member.
Description
Technical field
The present invention relates to a kind of high vacuum valve, its envelope adopts the slipper seal structure of band grease trough.
Background technique
High vacuum valve for prior art: it is used for, and if the driven opening part makes the axle envelope at the push rod place that valve opens and closes when adopting the slipper seal structure of band grease trough; owing to sneak into solvent etc. sometimes in the gas that in stream, flows; if the solvent of sneaking into etc. enters axle envelope, be used for protecting vacuum seal with the lubricating grease of sealed member therefore generation dissolve separate out, problems such as loss or deterioration.Specifically, when above-mentioned solvent etc. entered the lip-deep trickle concavo-convex place of above-mentioned push rod, it might enter grease trough from inlet side, crossed grease trough and arrived vacuum seal sealed member place, made sealing parts deterioration.In addition, because the stream of high vacuum valve is in the vacuum environment, and above-mentioned lubricating grease might evaporate or be lost in the vacuum environment of stream, this can cause vacuum seal with packing ring owing to lacking lubricating grease and premature wear and leakage of oil problems such as (leak) takes place.
Summary of the invention
The object of the present invention is to provide a kind of high vacuum valve, wherein, the driven opening part makes the axle envelope employing at the push rod place of valve switching be with the slipper seal structure of grease trough, and this high vacuum valve can an envelope prevent that this seal life lacks the situation of lubricating grease, realizes the purpose in the life-span of this envelope of prolongation.
More particularly, the purpose of this invention is to provide a kind of high vacuum valve, take simple structure just can contain effectively that lubricating grease evaporates, dissolves and separate out or be lost in the stream that is in the vacuum environment from above-mentioned axle envelope.
To achieve these goals, the structure of high vacuum valve provided by the invention is that it comprises: valve body, in the stream that between first valve port and second valve port, forms valve seat is set, and also have the shutter member that opens and closes this stream by relative this valve seat joint or separation; The valve drive portion, to run through with sealing state with the right stream wall of the valve seat surface of above-mentioned valve body and be inserted in this stream by the push rod of drive mechanism, above-mentioned valve drive portion drives the above-mentioned shutter member that is attached at above-mentioned push rod top and opens and closes valve seat, wherein, in the through hole of the above-mentioned push rod of the stream wall that runs through above-mentioned valve body, be provided with grease trough, the above-mentioned stream one side setting of the grease trough in this through hole is used for keeping the sealed member of lubricating grease, and an opposite side setting of the grease trough in above-mentioned through hole is used for vacuum-packed sealed member, constitute the axle envelope of above-mentioned through hole thus, and the range of the axial length that makes above-mentioned grease trough and above-mentioned shutter member is identical or greater than this range.
Be preferably as follows structure in the mode of execution of high vacuum valve of the present invention: the stream side in above-mentioned through hole is provided with scraper plate.
In addition, the driving mechanism that is used for driving above-mentioned shutter member is following structure: linking on the top has above-mentioned shutter member and makes on the other end above-mentioned push rod outstanding from the cylinder body portion of above-mentioned stream wall in sleeve pipe, link to have and be accommodated in piston in the cylinder body portion, by coming the driven opening part by above-mentioned piston and push rod for the pressure that is discharged to the pilot fluid in this cylinder body portion in the mode that in this cylinder body portion, can slide.
When above-mentioned high vacuum valve adopts the structure of above-mentioned guiding driving, the pressure chamber for the pressure of row's pilot fluid is used as by the piston chamber that preferably push rod of the piston at least of above-mentioned cylinder body portion is linked side, this pressure chamber's side setting that runs through the through hole in it at above-mentioned push rod is used for sealing the packing ring of this pressure chamber, and make this be used for the packing ring of sealing load chamber and vacuum seal with the space between the sealed member by through hole towards outside opening, wherein, vacuum seal is positioned at above-mentioned pressure chamber one side of the grease trough of through hole with sealed member, above-mentioned through hole is used for making from above-mentioned pressure chamber through the above-mentioned packing ring that is used for the sealing load chamber and the air that spills overflows.
In having the high vacuum valve of the present invention of said structure, because in valve body, it is identical with the range of shutter member to be provided with axial length in the through hole that supplies push rod to run through, or greater than the grease trough of this range, so exist on the push rod surface with grease trough in lubricating grease remain the part that contacts, and, in any one stroke that opens and closes shutter member, the lip-deep part that contacts with grease trough all the time of push rod can contact with some sealed members at grease trough two ends, thereby can realize prolonging the purpose in the life-span of sealed member to the sealed member supplemental lubrication fat that is contacted.
When adopting the structure of the above high vacuum valve of the present invention that describes in detail, to make the axle envelope at the push rod place that valve opens and closes be to adopt band that the high vacuum valve of the slipper seal structure of grease trough is set for being used for the driven opening part, can prevent that a seal life lacks the situation of lubricating grease, can realize prolonging a purpose in the life-span of envelope, more particularly, the present invention takes simple structure just can contain effectively that lubricating grease evaporates, dissolves and separate out or be lost in the stream that is in the vacuum environment from above-mentioned axle envelope.
Description of drawings
Fig. 1 is the longitudinal sectional view in the mode of execution of high vacuum valve of the present invention, and left-half of its expression high vacuum valve is the state of valve closing, the state that right half part is valve open.
Fig. 2 represents the longitudinal sectional view of the major component in the above-mentioned mode of execution.
[symbol description]
1: valve body, 2: valve drive portion, 11: stream, 12: the first valve ports, 13: the second valve ports, 14: shutter member, 15: push rod, 16: valve seat, 18: through hole, 20: cylinder body portion, 21: sleeve pipe, 22: piston, 23,24: piston chamber, 30: axle envelope, 31: grease trough, 32,33: sealed member, 35: scraper plate, 36: sealing is used packing ring, 37: through hole
Embodiment
Below, describe embodiments of the present invention with reference to the accompanying drawings in detail.
Fig. 1 and Fig. 2 are examples of the mode of execution of expression high vacuum valve of the present invention.This high vacuum valve is alphabetical L shape, and wherein being used for driven opening part 14, to make the axle envelope 30 at push rod 15 places that valve opens and closes are slipper seal structures of band grease trough 31.The major component of this high vacuum valve can roughly be divided into valve body 1 and the valve drive portion 2 that is formed with stream 11 in inside, and wherein, valve drive portion 2 is used for driven opening part 14, with the valve seat on the open and close valve body 1 16.
In above-mentioned valve body 1, between second valve port 13 of the intersect vertical axis of first valve 12 and its axis and first valve port 12, form above-mentioned stream 11, the inboard near first valve port 12 at this stream 11 is provided with valve seat 16, and be provided with shutter member 14 with position that this valve seat 16 is faced, shutter member 14 is by with the joint of above-mentioned valve seat 16 or separate and open and close above-mentioned stream 11, be used for driving the push rod 15 of this shutter member 14 by 17 supportings of push rod support plate, push rod support plate 17 constitutes the stream wall, push rod 15 runs through this stream wall, outwards extend into the valve drive portion 2 that is attached on the valve body 1 from above-mentioned stream 11, wherein, the state that is keeping sealing between push rod 15 and the stream wall.
On the other hand, the above-mentioned valve drive portion 2 that is used for driving above-mentioned shutter member 14 comprises the driving mechanism that is used for driving push rod 15, and this push rod 15 is connected on its top and above-mentioned shutter member 14.As this driving mechanism, has following structure in the illustrated embodiment: the other end that links the push rod 15 that above-mentioned shutter member 14 is arranged on the top, cylinder body portion 20 in the sleeve pipe 21 in stream wall (the push rod support plate 17) outside stretches out from above-mentioned stream wall (push rod support plate 17), the end and the piston 22 that are positioned at the above-mentioned push rod 15 of this cylinder body portion 20 link, piston 22 is accommodated in the above-mentioned cylinder body portion 20 in the mode that can be free to slide, respectively there is a piston chamber 23 both sides that are positioned at the piston 22 of above-mentioned cylinder body portion 20,24, it can be respectively by pilot port 23a as the pressure chamber, 24a is to its pressure for row's pilot fluid, rely on pressure, above-mentioned piston 22 and push rod 15 driven opening parts 14 for the pilot fluid that is discharged to the pressure chamber.
In addition, one of them of described piston chamber 23,24 can be used as pressure chamber yet, be resetted and use Returnning spring to make because of the driven piston 22 of the pressure of pilot fluid for row's pilot fluid.In this structure, normally Returnning spring is installed between shutter member 14 and the push rod support plate 17, but do not get rid of Returnning spring is accommodated in one of them of piston chamber 23,24 yet.
In addition, the side of the close stream 11 in above-mentioned through hole 18 is provided with scraper plate 35.This scraper plate 35 has following function: because expose in stream 11 on the surface of push rod 15, can be attached with solvent etc. on this surface, scraper plate 35 can contain attached to this lip-deep solvent etc. and follow the slip of push rod 15 and enter the inside of axle envelope 30 that scraper plate 35 can contain that also lubricating grease flows to the outside from the inside of axle envelope simultaneously.
And, be arranged on above-mentioned sealed member 32 near stream 11 1 sides of above-mentioned grease trough 31, not only lubricating grease is played the maintenance effect and make it can not flow to stream 11 1 sides that are vacuum state, also played vacuum-packed effect.On the other hand, the sealed member 33 in that grease trough 31 1 sides away from stream 11 are provided with also not only plays vacuum-packed effect, also plays and contains that grease flow arrives the effect in the cylinder body portion 20.
And, the surface portion that contacts with sealed member 32 slide relative on the preferred above-mentioned push rod 15 can not expose in stream 11, thereby, even on the surfaces attached to push rod 15 such as solvent in the stream 11, and enter in 18 envelopes of through hole along with moving back and forth of shutter member 14, but can not arrive sealed member 32 places yet, thereby can prevent reliably that the situation of damaging sealed member 32 because of solvent from taking place.
In mode of execution as shown in the figure, when the piston chamber 24 that links side as the push rod with the piston 22 of above-mentioned cylinder body portion 20 is used as for the pressure chamber of the pressure of row's pilot fluid, sealing packing ring 36 and through hole 37 preferably are set, promptly, make the sealing of the close above-mentioned piston chamber 24 distolateral settings of the through hole 18 that above-mentioned push rod 15 runs through to pass through through hole 37 and external communications, make from above-mentioned pressure chamber and can overflow from this through hole 37 through the air that above-mentioned sealing spills with packing ring 36 with the space between the vacuum seal usefulness sealed member 33 in packing ring 36 and the through hole 18.When above-mentioned piston chamber 24 is used as the space of taking in Returnning spring and makes it towards the atmosphere opening, then need not to be provided with above-mentioned sealing packing ring 36 or through hole 37.In addition, between the sealed member 32 of above-mentioned axle envelope 30 and scraper plate 35, be provided with bearing 38.
In having the high vacuum valve of said structure, because it is identical or greater than the grease trough 31 of this range to be provided with the range of axial length and shutter member 14 in the through hole 18 that runs through for push rod 15 in valve body 1, so on the surface of push rod 15, there is all the time the part that contacts with lubricating grease in the grease trough 31, like this, in any one stroke that opens and closes shutter member 14, that part of meeting that push rod 15 surfaces contact with grease trough 31 all the time remains with the sealed member 32 or 33 at grease trough 31 two ends and contacts, so there is lubricating grease can replenish all the time to these sealed members 32,33, thus can realize prolonging sealed member 32, the purpose in 33 life-span.Therefore, can prevent that axle envelope 30 from the situation that lubricating grease lacks taking place, and then can realize prolonging the purpose in the life-span of this envelope 30, more particularly, can just can contain effectively that lubricating grease evaporates, dissolves and separate out or be lost in the stream 11 that is in vacuum environment from above-mentioned axle envelope 30 by taking simple structure.
Claims (4)
1. high vacuum valve, comprise: valve body and valve drive portion, in described valve body, be provided with valve seat, this valve seat is in the stream that is formed between first valve port and second valve port, also be provided with shutter member in the described valve body, joint by described shutter member and described valve seat or separate opens and closes described stream with this; Described valve drive portion is used to drive the shutter member that is attached at described push rod top and opens and closes valve seat, run through in the described valve body stream wall by the push rod of drive mechanism towards valve seat, insert in the described stream, keep sealing state between described push rod and the described stream wall, it is characterized in that:
Be provided with grease trough in the through hole that on the stream wall of described valve body, connects for described push rod, described stream one side near grease trough in described through hole is provided with the sealed member that is used for keeping lubricating grease, be used for vacuum-packed sealed member and in described through hole, be provided with near the opposite side of grease trough, form the axle envelope thus in described through hole, the axial length of described grease trough is identical with the range of described shutter member or greater than this range.
2. high vacuum valve according to claim 1 is characterized in that:
Stream one side in described through hole is provided with scraper plate.
3. high vacuum valve according to claim 1 and 2 is characterized in that:
The driving mechanism that is used for driving described shutter member is following structure: the top of described push rod and described shutter member link, in the other end of described push rod extend into cylinder body portion in the sleeve pipe from described stream wall, with be accommodated in described cylinder body portion in can slide piston be connected, by driving described shutter member by described piston and push rod again for the pressure that is discharged to the pilot fluid in the described cylinder body portion.
4. high vacuum valve according to claim 3 is characterized in that:
The piston chamber that the push rod of the piston at least of described cylinder body portion is linked side serves as the pressure chamber for the pressure of row's pilot fluid, be used for sealing the packing ring of this pressure chamber in the described pressure chamber side setting of the through hole that runs through for described push rod, and make this be used for the packing ring of sealing load chamber and vacuum seal with the space between the sealed member by through hole towards outside opening, wherein, vacuum seal is positioned at described through hole near described pressure chamber one side of grease trough with sealed member, and described through hole is used for making from above-mentioned pressure chamber the air that spills through the described packing ring that is used for the sealing load chamber to overflow.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008258838A JP4783916B2 (en) | 2008-10-03 | 2008-10-03 | High vacuum valve |
| JP2008-258838 | 2008-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101713463A true CN101713463A (en) | 2010-05-26 |
| CN101713463B CN101713463B (en) | 2012-05-30 |
Family
ID=42215087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101741471A Expired - Fee Related CN101713463B (en) | 2008-10-03 | 2009-09-30 | High-vacuum valve |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4783916B2 (en) |
| KR (1) | KR101107098B1 (en) |
| CN (1) | CN101713463B (en) |
| TW (1) | TWI394909B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102933885A (en) * | 2010-06-15 | 2013-02-13 | 阿尔法拉瓦尔股份有限公司 | Valve with a valve bonnet |
| CN103644363A (en) * | 2013-11-25 | 2014-03-19 | 大连元利流体技术有限公司 | Novel high-pressure coaxial valve |
| CN104048078A (en) * | 2014-06-30 | 2014-09-17 | 无锡市威海达机械制造有限公司 | Air-operated ultrahigh-pressure one-way valve |
| CN106572629A (en) * | 2015-10-08 | 2017-04-19 | 松下知识产权经营株式会社 | Component mounter |
| CN109723892A (en) * | 2018-06-12 | 2019-05-07 | 珠海市思卡净化技术有限公司 | A kind of novel intaking & discharging combined valve for air |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5489119B2 (en) * | 2010-08-17 | 2014-05-14 | リンナイ株式会社 | Flow control valve |
| WO2012105109A1 (en) * | 2011-02-02 | 2012-08-09 | シーケーディ株式会社 | Vacuum control valve, vacuum control apparatus, and computer program |
| JP5874274B2 (en) * | 2011-09-28 | 2016-03-02 | 日本電気株式会社 | Seal structure |
| JP5767124B2 (en) * | 2012-01-17 | 2015-08-19 | 日立オートモティブシステムズメジャメント株式会社 | Control valve |
| CN103615544A (en) * | 2013-11-11 | 2014-03-05 | 锦州高中压阀门制造有限公司 | Direct-opening multi-seal angle stop valve |
| KR101505952B1 (en) * | 2014-09-04 | 2015-03-26 | 윤어용 | Vacuum valve for semiconductor manufacturing equipment |
| CN212203141U (en) * | 2019-12-31 | 2020-12-22 | 浙江盾安禾田金属有限公司 | Electronic expansion valve and air conditioning system using same |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121508A (en) * | 1983-12-05 | 1985-06-29 | Yokogawa Hokushin Electric Corp | Magnetic head device and its production |
| JPS60121508U (en) * | 1984-01-23 | 1985-08-16 | シーケーデイ株式会社 | pneumatic cylinder |
| JPH0635737U (en) * | 1992-10-12 | 1994-05-13 | 日新電機株式会社 | Vacuum seal structure of shaft |
| KR960023972A (en) * | 1994-12-09 | 1996-07-20 | 지종기 | Safety vacuum valve using metal corrugated pipe |
| KR20000028106A (en) * | 1998-10-30 | 2000-05-25 | 윤종용 | High vacuum valve |
| JP4205295B2 (en) * | 2000-08-24 | 2009-01-07 | シーケーディ株式会社 | Cylinder with vacuum seal mechanism |
| JP3769495B2 (en) * | 2001-11-26 | 2006-04-26 | Ｓｍｃ株式会社 | Poppet valve with heater |
| KR20030060511A (en) * | 2002-01-09 | 2003-07-16 | 삼성전자주식회사 | High vacuum valve having two bellows and two sealing parts |
| JP2006312981A (en) * | 2005-05-09 | 2006-11-16 | Smc Corp | Structure for protecting rod sealing portion of two-port valve |
| JP4790374B2 (en) * | 2005-10-25 | 2011-10-12 | シーケーディ株式会社 | Vacuum valve |
| JP4633827B2 (en) * | 2008-06-26 | 2011-02-16 | シーケーディ株式会社 | Vacuum valve |
-
2008
- 2008-10-03 JP JP2008258838A patent/JP4783916B2/en active Active
-
2009
- 2009-09-24 KR KR1020090090521A patent/KR101107098B1/en active IP Right Grant
- 2009-09-29 TW TW098132953A patent/TWI394909B/en active
- 2009-09-30 CN CN2009101741471A patent/CN101713463B/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102933885A (en) * | 2010-06-15 | 2013-02-13 | 阿尔法拉瓦尔股份有限公司 | Valve with a valve bonnet |
| CN102933885B (en) * | 2010-06-15 | 2014-10-15 | 阿尔法拉瓦尔股份有限公司 | Valve with a valve bonnet |
| US8915483B2 (en) | 2010-06-15 | 2014-12-23 | Alfa Laval Corporate Ab | Valve with a valve bonnet |
| CN103644363A (en) * | 2013-11-25 | 2014-03-19 | 大连元利流体技术有限公司 | Novel high-pressure coaxial valve |
| CN104048078A (en) * | 2014-06-30 | 2014-09-17 | 无锡市威海达机械制造有限公司 | Air-operated ultrahigh-pressure one-way valve |
| CN106572629A (en) * | 2015-10-08 | 2017-04-19 | 松下知识产权经营株式会社 | Component mounter |
| CN106572629B (en) * | 2015-10-08 | 2020-07-31 | 松下知识产权经营株式会社 | Component mounting device |
| CN109723892A (en) * | 2018-06-12 | 2019-05-07 | 珠海市思卡净化技术有限公司 | A kind of novel intaking & discharging combined valve for air |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010090921A (en) | 2010-04-22 |
| TW201028577A (en) | 2010-08-01 |
| JP4783916B2 (en) | 2011-09-28 |
| KR101107098B1 (en) | 2012-01-30 |
| CN101713463B (en) | 2012-05-30 |
| TWI394909B (en) | 2013-05-01 |
| KR20100038143A (en) | 2010-04-13 |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20200930 |
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| CF01 | Termination of patent right due to non-payment of annual fee |