201017722 九、發明說明 【發明所屬之技術領域】 本發明係關於一種可重複使用環保型之光阻劑桶子， 其可減少光阻劑殘留、具有良好氣密性、耐壓性及耐衝擊 ’且無金屬離子析出之問題，並具有重複使用特性及減少 包裝耗材，可減少對環境之衝擊。該光阻劑桶子亦可裝載 並運送其它液體如水、牛奶、溶劑...等等。 φ 【先前技術】 傳統光阻劑的包裝和運送是以加侖瓶或是有鐵氟龍內 襯的鐵桶進行，其優缺點如下： 優點：包裝方式便宜。 缺點：1 ·光阻劑使用率低。 2.易有微氣泡問題，進而影響良率。 φ 3.加侖瓶或鐵桶強度不夠，搬運時易因撞擊 ^ 而破損。 4. 加侖瓶或鐵桶氣密性不好，影響光阻劑保 存時效。 5. 包裝使用一次即報廢。 目前有另一種光阻劑的包裝和運送方式，此方式爲一 在不鏽鋼桶內部放置內袋及內管。使用時以高壓氣體擠壓 內袋將光阻劑由內管擠出，其優缺點如下： -4- 201017722 優點：（1)光阻劑使用率高。 (2)不易有微氣泡問題。 , (3)不鏽鋼桶強度及耐壓性大，不因碰撞或加 壓而破損。 (4)氣密性好，光阻劑保存時效長。 缺點：（1)除不鏽鋼桶外，內袋、內管、扣環...等皆 爲耗材，使用一次即報廢，造成環境衝擊 〇 ❹ (2)此一設計所有耗材都由 ATMI此家廠商 完全壟斷全球市場，而且價格昂貴。一組 • 20公斤包裝所需耗材價錢約 2,000元 ，每公斤包裝費約 100元。 因此，需要一種結合以上兩種包裝和運送方式之優點 ，並具可重複使用及減少包裝耗材和減少對環境之衝擊， φ 並可降低成本之光阻劑包裝運送桶。 【發明內容】 本發明之目的在於提供一種可重複使用環保型之光阻 劑桶子，其具有重複使用之特性，而可減少光阻劑包裝耗 材和對環境之衝擊，並減少光阻劑廠商及再生光阻劑廠商 對於光阻劑包裝運送之成本。 本發明之另一目的爲使用上述之光阻劑桶子裝載/運 送其它液體如水、牛奶、溶劑…等等。 -5- 201017722 本發明之可重複使用環保型之光阻劑桶子，係以鐵氟 龍或鈦塗覆不鏽鋼桶內壁，或是於不鏽鋼桶內放置一可抗 溶劑之內襯桶而成。不鏽鋼桶以夾套方式將上下桶身連結 固定，或是鎖螺絲方式將蓋板與桶身連結固定，可以上面 兩種中任一種方式放置或取出內襯桶。 本發明之光阻劑桶子具有下面有益效果： (1) 結合傳統光阻劑桶子之優點，並且改良傳統 光阻劑桶之缺點。可減少光阻劑殘留，有良 好氣密性、耐壓性、流通量及耐衝擊，且無 金屬離子析出之問題，並具有重複使用特性 及減少包裝耗材，可減少對環境之衝擊。 (2) 另光阻劑在取出和洗淨後，粒子含量符合光 電廠（彩色濾光片廠及面板廠）要求，而使 光電廠（彩色濾光片廠及面板廠）在使用取 自該光阻劑包裝運送桶內之光阻劑時，無須 更改現有設備，而減少繁瑣之操作且降低成 本。 【實施方式】 本發明之可重複使用環保型之光阻劑桶子分爲：1. 夾套式；2.鎖螺絲式兩種形式，其個別爲： ^夾套式 (1) 分爲上下桶身兩部分之外桶； (2) 內襯桶； 201017722 (3) 夾套； (4) 液體內管； (5) 惰性氣體內管； 2 .鎖螺絲式 (1) 頭部有螺絲孔之外桶； (2) 內襯桶；201017722 IX. INSTRUCTIONS OF THE INVENTION [Technical Field of the Invention] The present invention relates to a reusable environmentally-friendly photoresist barrel which can reduce photoresist residue, has good air tightness, pressure resistance and impact resistance. It has no problem of metal ion precipitation, and has reusable characteristics and reduced packaging consumables, which can reduce the impact on the environment. The photoresist barrel can also be loaded and transported with other liquids such as water, milk, solvents, and the like. φ [Prior Art] The packaging and transportation of traditional photoresists are carried out in gallons or iron drums lined with Teflon. The advantages and disadvantages are as follows: Advantages: The packaging method is cheap. Disadvantages: 1 · Low resistivity is used. 2. Easy to have microbubble problems, which in turn affects yield. Φ 3. The gallon bottle or the iron drum is not strong enough, and it is easily damaged by the impact ^ during handling. 4. The gallon bottle or iron drum is not tightly sealed, which affects the aging time of the photoresist. 5. Once the package is used, it will be scrapped. There is currently another way to package and transport the photoresist, which is to place the inner bag and the inner tube inside the stainless steel barrel. When used, the inner bag is extruded with high pressure gas to extrude the photoresist from the inner tube. The advantages and disadvantages are as follows: -4- 201017722 Advantages: (1) The use rate of the photoresist is high. (2) It is not easy to have microbubble problems. (3) Stainless steel barrels have high strength and pressure resistance and are not damaged by collision or pressure. (4) The airtightness is good, and the photoresist is stored for a long time. Disadvantages: (1) In addition to stainless steel barrels, inner bags, inner tubes, buckles, etc. are all consumables, which are scrapped once, causing environmental impact. (2) All supplies are designed by ATMI. It completely monopolizes the global market and is expensive. A set of supplies for a 20 kg package costs about 2,000 yuan, and the package cost per kilogram is about 100 yuan. Therefore, there is a need for a photoresist packaging drum that combines the advantages of both of the above packaging and shipping methods, and which can be reused and reduced in packaging consumables and reduces environmental impact, φ and can be reduced in cost. SUMMARY OF THE INVENTION It is an object of the present invention to provide a reusable environmentally-friendly photoresist barrel that has reusable characteristics, reduces photoresist packaging consumables and environmental impact, and reduces photoresist manufacturers. And the cost of regenerative photoresist manufacturers for the delivery of photoresist packages. Another object of the present invention is to load/deliver other liquids such as water, milk, solvent, etc., using the above-described photoresist barrel. -5- 201017722 The reusable environmentally-friendly photoresist barrel of the present invention is coated with a Teflon or titanium coated stainless steel inner wall or a solvent-resistant inner lining barrel in a stainless steel barrel. . The stainless steel barrel is fixed by the upper and lower barrels in a jacket manner, or the cover plate is fixed to the barrel body by a locking screw method, and the inner liner barrel can be placed or taken out in either of the above manners. The photoresist barrel of the present invention has the following beneficial effects: (1) Combining the advantages of the conventional photoresist barrel and improving the disadvantages of the conventional photoresist barrel. It can reduce the residue of photoresist, has good air tightness, pressure resistance, flux and impact resistance, and has no problem of metal ion precipitation. It has reusable characteristics and reduces packaging consumables, which can reduce the impact on the environment. (2) After the photoresist is removed and washed, the particle content meets the requirements of the photovoltaic power plant (color filter factory and panel factory), and the light power plant (color filter factory and panel factory) is used. When the photoresist is packaged to transport the photoresist in the barrel, it is not necessary to change the existing equipment, thereby reducing cumbersome operations and reducing costs. [Embodiment] The reusable environment-friendly photoresist barrel of the present invention is divided into: 1. jacket type; 2. lock screw type, each of which is: ^ jacket type (1) is divided into upper and lower (2) inner lining barrel; 201017722 (3) jacket; (4) liquid inner tube; (5) inert gas inner tube; 2. lock screw type (1) head with screw hole Outside the barrel; (2) lined barrels;
(3) 液體內管； (4) 惰性氣體內管； (5) 墊圈； (6) 蓋板； (7) 螺絲； (8) 桶蓋； 其中該內襯桶、液體內管和惰性氣體內管係以聚乙嫌 (例如，超高密度聚乙烯、高密度聚乙烯、低密度聚乙烯 等等）、聚丙烯、聚二氟乙烯、聚三氟乙烯或聚四氟乙烯 (鐵氟龍）···等製成；該內襯桶係用於裝載光阻劑或其它 液體如水、牛奶、溶劑…等等；該外桶、夾套、蓋板、桶 蓋、螺絲係爲不鏽鋼材料；該外桶內璧可視情況選擇性地 以鐵氟龍或鈦塗覆（coating)，塗覆後之外桶可選擇使用 內襯桶裝載光阻劑或其它液體如水、牛奶、溶劑...等等或 不使用內襯桶直接裝載光阻劑或其它液體如水、牛奶、溶 劑…等等；該惰性氣體可爲氮氣。 201017722 使用時利用高純氮氣經氮氣內管注入內襯中產生壓力 ，而將光阻劑由光阻劑內管推出。因氮氣之純度高，故無 污染之疑慮。由於光電廠（彩色濾光片廠及面板廠）3 代線以上廠之生產線在使用光阻劑前會先經過中間槽進行 除氣之操作，以避免微氣泡之產生。故在此無需擔心因氮 氣擠壓而產生氣泡的問題。 (一）、金屬離子析出測試： 實驗方法： (1) 取 500 ml血清瓶 3個。 (2) 於血清瓶分別放入： a. 光阻劑之主要溶劑一電子級 PGMEA 5 0 0 ml 〇 b. HDPE原粒 100 g，再加入電子級 PGMEA至血清瓶滿。 c. 鐵氟龍原粒100 g，再加入電子級 PGMEA至血清瓶滿。 (3 )置於 5 0 °C 水浴中 4 8小時後’檢測 金屬離子濃度。 201017722(3) liquid inner tube; (4) inert gas inner tube; (5) washer; (6) cover plate; (7) screw; (8) barrel cover; wherein the inner liner barrel, liquid inner tube and inert gas The pipe system is suspected of poly (for example, ultra high density polyethylene, high density polyethylene, low density polyethylene, etc.), polypropylene, polyvinylidene fluoride, polytrifluoroethylene or polytetrafluoroethylene (Teflon). ··· etc.; the lining barrel is used for loading photoresist or other liquid such as water, milk, solvent, etc.; the outer tub, the jacket, the cover, the lid, and the screw are made of stainless steel; The outer barrel can be selectively coated with Teflon or titanium depending on the case. After coating, the barrel can be optionally filled with a lining barrel to load a photoresist or other liquid such as water, milk, solvent, etc. The photoresist or other liquid such as water, milk, solvent, etc. may be directly loaded without using a liner tank; the inert gas may be nitrogen. 201017722 In use, high-purity nitrogen is injected into the inner liner through a nitrogen inner tube to generate pressure, and the photoresist is pushed out from the inner tube of the photoresist. Because of the high purity of nitrogen, there is no doubt about pollution. Since the production line of the 3rd generation line of the photovoltaic power plant (color filter factory and panel factory) will use the intermediate tank to degas the operation before using the photoresist to avoid the generation of microbubbles. Therefore, there is no need to worry about the generation of bubbles due to nitrogen gas extrusion. (1) Metal ion precipitation test: Experimental method: (1) Take 500 ml serum bottles. (2) Place in the serum bottle: a. The main solvent of the photoresist is an electronic grade PGMEA 5 0 0 ml 〇 b. HDPE original 100 g, then add electronic grade PGMEA to the serum bottle. c. Teflon original 100 g, then add electronic grade PGMEA to the serum bottle. (3) After 4 8 hours in a water bath at 50 °C, the metal ion concentration was measured. 201017722
- § <LOD <LOD CLOD bfi X <LOD <LOD <LOD £ <LOD <LOD <LOD Τ3 ίζ <LOD <LOD <LOD C 1 I <LOD 1 1 <LOD <LOD Ο S <LOD <LOD <LOD Ν 4.201 6.434 6.311 Q <LOD <LOD <LOD 9.885 17*997 12.708 £ <LOD 3.815 1.766 1 <LOD <LOD <LOD <LOD <LOD <LOD Ο <LOD 7.839 2.152 < 4.099 4.699 4.176 <LOD <LOD <LOD cd 40.382 63.599 56.583 1.866 2.208 1.885 3 <LOD <LOD <LOD •二 <LOD <LOD <LOD im m 電子級PGMEA HDPE原粒 鐵氟龍原粒 201017722 實驗結果顯示無論是 HDPE原粒或是鐵氟龍原粒金 屬離子析出都在 ppb水準，皆符合光電廠（彩色濾光片 廠及面板廠）之要求。 (二）、氣密性及耐壓實驗 實驗方法： (1) 將光阻劑運送桶各組件依下表組裝好。 (2) 塡充高壓空氣至 1.0kg/cm2及 2.0kg/cm2。 (3) 並於光阻劑運送統所有接縫處塗上肥皂水，觀 察是否有漏氣。 (3)於 48小時後，檢查壓力計讀値。 項目 塡充高壓空氣l.Okg/cm2^ 塡充高壓空氣2.0 kg/cm2 起始壓力 (kg/cm2) 48小時後壓力 (kg/cm2) 起始壓力 (kg/cm2) 48小時後壓力 (kg/cm2) 夾套式 (有放置內襯桶） 1.0 1.0 2.2 2.2 夾套式 (沒有放置內襯桶） 1.1 1.1 2.1 2.1 鎖螺絲式 (有放置內襯桶） 1.1 1.1 2.0 2.0 鎖螺絲式 (沒有放置內襯桶） 1.1 1.1 2.2 2.2 實驗結果顯示，光阻劑運送桶以高壓空氣塡充至內壓 達 1 ·0 kg/cm2 ( 14.7 psi )及 2 ·0 kg/cm2 ( 22.1 psi )，經 48小時測試後其內壓並未下降及外型並未有變形之現象 ，且以肥皂水檢測，並無漏氣之現象。此表示光阻劑運送 -10- 201017722 桶及其內管具有高度之氣密性與耐壓性。 (三）、殘留量測試 實驗方法： (1) 將光阻劑運送桶各組件依下表組裝好。 (2) 使用氣動式栗在壓力 0.5kg/cm2，將純水填充 20 L至光阻劑運送桶。 (3) 經惰性氣體內管注入 0.5 kg/cm2高純度氮氣 ，將純水由光阻劑內管推出。直至無法推出爲 止0 測試次數 純水塡充量 (kg) 桶內純水殘餘量 (kg) 殘餘量比率 (%) 夾套式 (有放置內襯桶） 19.9 0.30 1.5 夾套式 (沒有放置內襯桶） 19.9 0.35 1.8 鎖螺絲式 (有放置內襯桶） 20.1 0.33 1.6 鎖螺絲式 (沒有放置內襯桶） 19.8 0.33 1.7 實驗結果顯示，光阻劑運送桶之殘餘量皆小於 2%。 【圖式簡單說明】 圖1顯示夾套式光阻劑桶子和其各組件。 圖2顯示鎖螺絲式光阻劑桶子和其各組件。 -11 - 201017722 【主要元件符號說明 1 =組裝後桶子 2 :外桶 3 :內襯 4 :夾套 5 :液體內管 6 :惰性氣體內管 7 :墊圈 ❿ 8 :蓋板 9 :內角螺絲 ' 1 〇 :桶蓋- § <LOD <LOD CLOD bfi X <LOD <LOD <LOD £ <LOD <LOD <LOD <LOD <LOD <LOD <LOD C 1 I <LOD 1 1 < ;LOD <LOD Ο S <LOD <LOD <LOD Ν 4.201 6.434 6.311 Q <LOD <LOD <LOD 9.885 17*997 12.708 £ <LOD 3.815 1.766 1 <LOD <LOD < LOD <LOD <LOD <LOD Ο <LOD 7.839 2.152 < 4.099 4.699 4.176 <LOD <LOD <LOD cd 40.382 63.599 56.583 1.866 2.208 1.885 3 <LOD <LOD <LOD • II < ;LOD <LOD <LOD im m electronic grade PGMEA HDPE original Teflon original particles 201017722 The experimental results show that both HDPE raw particles or Teflon raw metal ions are precipitated at ppb level, all in line with the photovoltaic power plant ( Requirements for color filter plants and panel plants). (2) Air tightness and pressure test Experiment method: (1) Assemble the components of the photoresist transport barrel according to the following table. (2) Fill high pressure air to 1.0kg/cm2 and 2.0kg/cm2. (3) Apply soapy water to all joints of the photoresist conveyor to check for air leaks. (3) After 48 hours, check the pressure gauge reading. The project is filled with high-pressure air l.Okg/cm2^ 高压charged high-pressure air 2.0 kg/cm2 initial pressure (kg/cm2) pressure after 48 hours (kg/cm2) initial pressure (kg/cm2) pressure after 48 hours (kg /cm2) Jacket type (with lining barrel) 1.0 1.0 2.2 2.2 Jacket type (without lining barrel) 1.1 1.1 2.1 2.1 Lock screw type (with lining barrel) 1.1 1.1 2.0 2.0 Lock screw type (No Place the lining barrel) 1.1 1.1 2.2 2.2 The experimental results show that the photoresist carrier is filled with high pressure air to an internal pressure of 1 · 0 kg / cm 2 ( 14.7 psi ) and 2 · 0 kg / cm 2 ( 22.1 psi ) After the 48-hour test, the internal pressure did not decrease and the appearance did not deform, and it was detected by soapy water, and there was no gas leakage. This means that the photoresist is transported. -10- 201017722 The barrel and its inner tube have a high degree of air tightness and pressure resistance. (III) Residue test Method: (1) Assemble the components of the photoresist carrier barrel according to the following table. (2) Fill the resin tank with 20 L of pure water at a pressure of 0.5 kg/cm2 using a pneumatic pump. (3) 0.5 kg/cm2 of high-purity nitrogen gas is injected through an inert gas inner tube, and pure water is pushed out from the inner tube of the photoresist. Until it can not be launched 0 Test times Pure water charge (kg) Pure water residue in barrel (kg) Residual ratio (%) Jacket type (with lining barrel) 19.9 0.30 1.5 Jacket type (not placed inside) Liner) 19.9 0.35 1.8 Lock screw type (with lining barrel) 20.1 0.33 1.6 Lock screw type (without lining barrel) 19.8 0.33 1.7 The experimental results show that the residual amount of the photoresist carrier is less than 2%. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 shows a jacketed photoresist barrel and its components. Figure 2 shows the lock screw type photoresist barrel and its components. -11 - 201017722 [Main component symbol description 1 = assembled barrel 2 : outer tub 3 : lining 4 : jacket 5 : liquid inner tube 6 : inert gas inner tube 7 : washer ❿ 8 : cover 9 : inner corner Screw ' 1 〇: lid