201013175 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種基材表面疏水性處理之偵測方 法，且特別是有關於一種具有顯色之基材表面疏水性處理 之偵測方法。 【先前技術】 為了避免微機電裝置之基材表面上之微結構發生附 著現象，基材表面常會進行疏水性處理。 ❹ 一般來說，檢測疏水性處理的方法有以下三種。第一 種是利用接觸角量測儀（contact angle analyzer)，偵測 ,水滴接觸角變化以判斷疏水性自我組裝單分子是否有確 實與基材表面結合及多點分析以得知其均勻性。第二種是 應用化學分析電子術（Electron Spectroscopy for Chemical Analysis，ESCA) ’偵測基材表面元素組成以判 斷疏水性自我組裝單分子是否有確實與基材表面結合及 多點分析以得知其均勻性。第三種是應用原子顯微鏡來量 測基材表面的粗糙度，進行多點分析以得知其均勻性。 然而，不管是第一種、第二種或第三種方法，量測方 式不屬於分子級或使用的設備係相當昂貴。 【發明内容】 有鑑於此’本發明就是在提供一種基材表面疏水性處 理之偵測方法。藉由一具有顯色作用之化合物與一基材表 面之自我組裝單分子結合，以檢測基材表面之自我組裝單 分子結合之分佈狀況。 5 201013175 根據本發明之一方面，提出一種基材表面疏水性處理 之偵測方法。偵測方法用以偵測一基材之表面，基材表面 吸附數個自我組裝單分子，每一自我組裴單分子具有一官 能基及一疏水端，官能基係結合至基材表面上。偵測方法 包括以下步驟。配製一偵測溶液，偵測溶液之組成物至少 包括數個偵測化合物，每一偵測化合物之組成物係為一顯 色化合物及一具有疏水端之疏水性化合物。顯色化合物用 以顯示一顏色。將基材浸入偵測溶液，以使每一自我組裝 ®單分子之疏水端與偵測化合物之疏水端結合。 根據本發明之另一方面，提出一種基材表面疏水性處 .理之偵測方法，用以偵測一基材之表面。基材表面吸附數 個自我組裝單分子，每一自我組裝單分子具有一官能基及 一氟碳鏈，官能基係結合至基材表面上。偵測方法包括以 下步驟。配製一偵測溶液，偵測溶液之組成物包括數個偵 測化合物，每一 <貞測化合物之組成物係為一奈米粒子及一 1-硫醇-111，111，211，211-全氟辛烷（？01')，奈米粒子係具有 @ 一顏色，F0T係具有一硫醇基及一氟碳鏈，奈米粒子係結 合至硫醇基。將基材浸入偵測溶液，以使自我組裝單分子 之氟碳鏈與偵測化合物之氟碳鍵結合。 根據本發明之再一方面，提出一種基材表面疏水性處 理之偵測方法，用以偵測一基材之一基材表面。基材表面 吸附數個自我組裝單分子，每一自我組裝單分子具有一官 能基及一氟碳鏈，官能基係結合至基材表面上。偵測方法 包括以下步驟。配製一偵測溶液，偵測溶液之組成物包括 6 201013175 數個偵測化合物，每一偵測化合物之組成物係為一螢光染 料分子及一 F0T，F0T係具有一氟碳鏈及一硫醇基，硫醇 基係結合至螢光染料分子。將基材浸入偵測溶液，以使自 我組裝單分子之氟碳鏈與偵測化合物之氟碳鏈結合。於將 基材浸入偵測溶液之步驟後，發射一激發光線至偵測溶 液，以激發螢光染料分子發射出一放射光線。 為讓本發明之上述内容能更明顯易懂，下文特舉較佳 實施例，並配合所附圖式，作詳細說明如下： ❹【實施方式】 第一實施例 請參照第1圖，其繪示依照本發明第一實施例之基材 表面疏水性處理之偵測方法之流程圖。偵測方法係包括以 下步驟。首先，於步驟S102中，將一具有疏水端之疏水 性化合物，例如是F0T，混合至一丙_溶液中，以配製成_ 濃度約為1E_6莫耳/公升（M)之一 F0T溶液，F0T溶液之體 積約10ml。F0T係具有一硫醇基及一氟碳鏈。 ® 接著，於步驟S104中，將一顯色化合物，例如是約 10毫升（ml)之奈米粒子混合至F0T溶液中，以配製成一偵 測溶液。在偵測溶液中，奈米粒子係結合至FOT之硫醇基。 奈米粒子係為一金奈米粒子或一銀奈米粒子。金奈米粒子 係顯示紅色，而銀奈米粒子係顯示黃褐色。在本實施例 中，所使用之奈米粒子係以金奈米粒子為例作說明。 再來，於步驟S106中，將基材浸入偵測溶液。由於 基材係已完成疏水性處理，所以基材表面已吸附數個自我 7 201013175 組裝單分子。基材之尺寸係以一平方公分（cm2)為例作說 明。基材表面上之每一自我組裝單分子具有一官能基及一 疏水端’疏水端例如是一氟碳鏈，而官能基係已結合至基 材表面上。在基材浸入偵測溶液後，基材表面上之自我組 裝單分子之氟碳鏈與偵測化合物之氟碳鏈係結合。較佳 地，偵測化合物之數量係多於自我組裝單分子之數量，以 使每一自我組裝單分子都能與偵測化合物結合。 再來，於步驟S108中，去除多餘之偵測化合物。由 於偵測化合物之數量多於自我組裝單分子之數量，所以去 除多餘之偵測化合物，只留下結合至自我組裝單分子之偵 測化合物。如此，只要依據基材表面所顯示之顏色分佈， 就能以肉眼清楚地觀察基材表面之疏水狀況。進一步地 說，若全部之基材表面都顯示紅色，那表示基材表面之疏 水性處理是優良的。 第二實施例 請參照第2圖，其繪示依照本發明第二實施例之基材 表面疏水性處理之偵測方法之流程圖。偵測方法係包括以 T步驟。首先，於步驟S202中，將螢光染料分子，例如 ，5~iAF ( 5-Iodoacetamid〇 flu〇rescein)混合至一碳酸 士氨溶液（#仏//093)中’以配製成一濃度〇 1M之螢光染料 溶液。此外，雖然本實施例之螢光染料分子係以5_IAF為 例作說明，然而再其它實施例中，只要螢光染料分子之反 μ吕施基係為氣元素、〉臭元素或砍元素者，都可作為本實 施例之榮光染料分子，例如是一6_〖AF ( 6_〖〇d〇acetamid〇 8 201013175 fluorescein)° 接著’於步驟S204中，將FOT混合至碳酸氫氨溶液 中’以配製成一濃度〇· 1M之f〇t溶液。 再來，於步驟S206中，混合等體積之螢光染料溶液 與F0T溶液，以配製成偵測溶液，較佳地係以〆溶液，例 如是碳酸氫氨溶液加以稀釋偵測溶液。在偵測溶液中’ F〇T 與螢光染料分子產生一親核取代反應（SN type reaction) ’使得F0T係以硫醇基取代至5-IAF之反應官 ®能基，例如是峨元素。 再來，於步驟S208中，將基材浸入偵測溶液’以使 自我組裝單分子之氟碳鏈與偵測化合物之氟碳键結合。 然後，於步驟S210中，發射一激發光線’例如是波 長490奈米（nm)〜495nm之光線至彳貞測溶液，以激發螢 光染料分子之發光官能基發射出一放射光線，放射光線例 如是波長515nm〜520nm之光線。 然後，在於步驟S210之後，使用一裝設有濾光片之 參顯微鏡，來觀測放射光線之亮度。進一步地說，只要依據 基材表面所顯示之光色分佈，就能以觀察基材表面之疏水 狀況。若全部之基材表面都顯示放射光線之光色，那表示 基材表面之疏水性處理是優良的。 雖然上述實施例之丙酮溶液、奈米粒子、F0T、碳酸 氫氨溶液及螢光染料分子係列出劑量或濃度。然而，此些 劑量或濃度係與基材表面之自我組裝單分子之數量有 關。也就是說，只要讓基材表面之自我組裝單分子都能與 9 201013175 偵測化合物結合即可，丙酮溶液、奈米粒子、FOT、碳酸 氫氨溶液及螢光染料分子之劑量及濃度並不受上述本實 例所限制。 本發明上述實施例所揭露之基材表面疏水性處理之 偵測方法。藉由一具有顯色作用之化合物，例如是奈米粒 子或螢光染料分子，與一基材表面之自我組裝單分子結 合，就能輕易地檢測出基材表面上之自我組裝單分子之分 佈狀況。由於上述實施例之偵測方法係以分子為對象進行 ❿操作，故屬於分子級的偵測方法。也就是說，本實施例之 方法係為低成本且是屬於分子級量測之方法。因此，在不 .需要昂貴的設備之情況下，使用上述實施例之分子級之偵 測方法能輕易地檢測基材表面之疏水狀況。 綜上所述，雖然本發明已以較佳實施例揭露如上，然 其並非用以限定本發明。本發明所屬技術領域中具有通常 知識者，在不脫離本發明之精神和範圍内，當可作各種之 更動與潤飾。因此，本發明之保護範圍當視後附之申請專 ®利範圍所界定者為準。 【圖式簡單說明】 第1圖繪示依照本發明第一實施例之基材表面疏水 性處理之偵測方法之流程圖。 第2圖繪示依照本發明第二實施例之基材表面疏水 性處理之偵測方法之流程圖。 【主要元件符號說明】 無201013175 IX. Description of the Invention: [Technical Field] The present invention relates to a method for detecting hydrophobicity of a substrate surface, and more particularly to a method for detecting surface hydrophobicity of a substrate having coloration . [Prior Art] In order to avoid adhesion of microstructures on the surface of a substrate of a microelectromechanical device, the surface of the substrate is often subjected to hydrophobic treatment. ❹ In general, there are three methods for detecting hydrophobic treatment. The first is to use a contact angle analyzer to detect changes in the contact angle of the water droplets to determine whether the hydrophobic self-assembled single molecules are indeed bound to the substrate surface and multi-point analysis to determine their uniformity. The second is to apply Electrochemical Spectroscopy for Chemical Analysis (ESCA) to detect the surface element composition of the substrate to determine whether the hydrophobic self-assembled single molecule actually binds to the substrate surface and multi-point analysis to know its Uniformity. The third is to use an atomic microscope to measure the roughness of the surface of the substrate and perform multi-point analysis to know its uniformity. However, whether it is the first, second or third method, the measurement method is not molecular level or the equipment used is quite expensive. SUMMARY OF THE INVENTION In view of the above, the present invention provides a method for detecting hydrophobicity of a substrate surface. The distribution of self-assembled single molecule binding on the surface of the substrate is detected by binding a compound having a color developing effect to a self-assembled single molecule on the surface of a substrate. 5 201013175 According to one aspect of the invention, a method of detecting hydrophobic treatment of a substrate surface is presented. The detection method is for detecting the surface of a substrate, and the surface of the substrate adsorbs a plurality of self-assembled single molecules, each of which has a functional group and a hydrophobic end, and the functional group is bonded to the surface of the substrate. The detection method includes the following steps. A detection solution is prepared. The composition of the detection solution comprises at least a plurality of detection compounds, and the composition of each detection compound is a color development compound and a hydrophobic compound having a hydrophobic end. The chromogenic compound is used to display a color. The substrate is immersed in the detection solution such that the hydrophobic end of each self-assembling single molecule binds to the hydrophobic end of the detection compound. According to another aspect of the present invention, a method for detecting the hydrophobicity of a substrate surface is provided for detecting the surface of a substrate. The surface of the substrate adsorbs several self-assembled single molecules, each of which has a monofunctional group and a fluorocarbon chain, and the functional groups are bonded to the surface of the substrate. The detection method includes the following steps. A detection solution is prepared, and the composition of the detection solution comprises a plurality of detection compounds, and each of the components of the test compound is a nanoparticle and a 1-thiol-111, 111, 211, 211- Perfluorooctane (?01'), the nanoparticle has @一色, the F0T has a thiol group and a fluorocarbon chain, and the nanoparticle is bonded to a thiol group. The substrate is immersed in a detection solution to bond the self-assembled monomolecular fluorocarbon chain to the fluorocarbon bond of the detection compound. According to still another aspect of the present invention, a method for detecting hydrophobicity of a substrate surface is provided for detecting a surface of a substrate of a substrate. The surface of the substrate adsorbs several self-assembled single molecules, each of which has a functional group and a fluorocarbon chain, and the functional groups are bonded to the surface of the substrate. The detection method includes the following steps. A detection solution is prepared, and the composition of the detection solution comprises 6 201013175 several detection compounds, the composition of each detection compound is a fluorescent dye molecule and a F0T, and the F0T system has a fluorocarbon chain and a sulfur The alcohol group, the thiol group is bonded to the fluorescent dye molecule. The substrate is immersed in the detection solution to bind the fluorocarbon chain of the self-assembled single molecule to the fluorocarbon chain of the detection compound. After the substrate is immersed in the detection solution, an excitation light is emitted to the detection solution to excite the fluorescent dye molecules to emit a radiation. In order to make the above-mentioned contents of the present invention more comprehensible, the following description of the preferred embodiments and the accompanying drawings will be described in detail as follows: 实施 [Embodiment] For the first embodiment, please refer to FIG. A flow chart showing a method for detecting hydrophobicity of a substrate surface according to a first embodiment of the present invention. The detection method includes the following steps. First, in step S102, a hydrophobic compound having a hydrophobic end, such as FOT, is mixed into a solution of propylene to prepare a F0T solution having a concentration of about 1E_6 mol/liter (M). The volume of the F0T solution is about 10 ml. The F0T system has a thiol group and a fluorocarbon chain. ® Next, in step S104, a chromogenic compound, for example, about 10 ml (ml) of nanoparticles is mixed into the FT solution to prepare a detection solution. In the detection solution, the nanoparticles bind to the thiol group of the FOT. The nanoparticle is a gold nanoparticle or a silver nanoparticle. The gold nanoparticles show a red color, while the silver nanoparticles show a yellowish brown color. In the present embodiment, the nanoparticles used are described by taking gold nanoparticles as an example. Further, in step S106, the substrate is immersed in the detection solution. Since the substrate has been hydrophobically treated, several surfaces have been adsorbed on the surface of the substrate. The dimensions of the substrate are exemplified by one square centimeter (cm2). Each self-assembled monomolecular on the surface of the substrate has a functional group and a hydrophobic end. The hydrophobic end is, for example, a fluorocarbon chain, and the functional group has been bonded to the surface of the substrate. After the substrate is immersed in the detection solution, the self-assembled single molecule fluorocarbon chain on the surface of the substrate is combined with the fluorocarbon chain of the detection compound. Preferably, the amount of detection compound is greater than the number of self-assembled single molecules such that each self-assembled single molecule can bind to the detection compound. Further, in step S108, the excess detection compound is removed. Since the number of detected compounds is greater than the number of self-assembled single molecules, the excess detection compound is removed, leaving only the detection compound bound to the self-assembled single molecule. Thus, the hydrophobic state of the surface of the substrate can be clearly observed with the naked eye as long as the color distribution is displayed on the surface of the substrate. Further, if all the surfaces of the substrate are red, it means that the hydrophobic treatment of the surface of the substrate is excellent. Second Embodiment Referring to Figure 2, there is shown a flow chart of a method for detecting hydrophobicity of a substrate surface in accordance with a second embodiment of the present invention. The detection method includes the T step. First, in step S202, a fluorescent dye molecule, for example, 5~iAF (5-Iodoacetamid〇flu〇rescein), is mixed into a carbonate solution (#仏//093) to prepare a concentration. 1M fluorescent dye solution. In addition, although the fluorescent dye molecule of the present embodiment is exemplified by 5_IAF, in other embodiments, as long as the anti-μlu Shiji of the fluorescent dye molecule is a gas element, a odor element or a chopping element, As the glare dye molecule of the present embodiment, for example, a 6_[AF (6_[〇d〇acetamid〇8 201013175 fluorescein)°] followed by 'in step S204, the FOT is mixed into the ammonia hydrogen carbonate solution' to prepare a Concentration 〇·1M f〇t solution. Further, in step S206, an equal volume of the fluorescent dye solution and the FOT solution are mixed to prepare a detection solution, preferably a solution of hydrazine, for example, a solution of ammonium hydrogencarbonate, to dilute the detection solution. In the detection solution, 'F〇T and the fluorescent dye molecule produce a SN type reaction' such that the F0T is substituted with a thiol group to the reaction charge of the 5-IAF, such as a ruthenium element. Further, in step S208, the substrate is immersed in the detection solution ' to bind the fluorocarbon chain of the self-assembled single molecule to the fluorocarbon bond of the detection compound. Then, in step S210, an excitation light 'for example, a light having a wavelength of 490 nm (nm) to 495 nm is emitted to the detection solution to excite the luminescent functional group of the fluorescent dye molecule to emit a radiation, for example, the radiation. It is a light having a wavelength of 515 nm to 520 nm. Then, after step S210, the brightness of the radiation is observed using a microscope equipped with a filter. Further, the hydrophobic state of the surface of the substrate can be observed by the light color distribution displayed on the surface of the substrate. If the surface of all the substrates shows the color of the light, it means that the hydrophobic treatment of the surface of the substrate is excellent. Although the acetone solution, the nanoparticles, the FOT, the ammonia hydrogen carbonate solution, and the fluorescent dye molecules of the above examples are in a series of doses or concentrations. However, such doses or concentrations are related to the number of self-assembled single molecules on the surface of the substrate. That is to say, as long as the self-assembled single molecule on the surface of the substrate can be combined with the detection compound of 9 201013175, the dose and concentration of the acetone solution, the nanoparticle, the FOT, the ammonia hydrogen carbonate solution and the fluorescent dye molecule are not This is limited by the above examples. The method for detecting hydrophobicity of a substrate surface disclosed in the above embodiments of the present invention. The distribution of self-assembled single molecules on the surface of the substrate can be easily detected by combining a color-developing compound, such as a nanoparticle or a fluorescent dye molecule, with a self-assembled single molecule on the surface of a substrate. situation. Since the detection method of the above embodiment performs the ❿ operation on the molecule, it is a molecular level detection method. That is to say, the method of the present embodiment is low cost and is a method of molecular level measurement. Therefore, the hydrophobic state of the substrate surface can be easily detected using the molecular level detection method of the above embodiment without expensive equipment. In the above, the present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention is subject to the definition of the scope of the application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method for detecting hydrophobicity of a substrate surface according to a first embodiment of the present invention. Fig. 2 is a flow chart showing a method for detecting hydrophobicity of a substrate surface according to a second embodiment of the present invention. [Main component symbol description] None