TW201009307A - Optical characteristic measuring device and optical characteristic measuring method - Google Patents

Abstract

A spectrometer (1) comprises: a measuring part (10) used for measuring an optical characteristic of a measuring object (2) by using measuring light from the measuring object (2); an objective lens (20) disposed on an optical path between the measuring object (2) and the measuring part (10); and a light emitting diode (LED) (30) capable of emitting observation light including a wavelength which can be reflected by the measuring object (2) from the outside of the optical path onto a prescribed position on the optical path between the measuring part (10) and the objective lens (20). The spectrometer (1) has a first mode for emitting the observation light onto the optical path, and a second mode for performing measurement via the measuring part (10) without emitting the observation light onto the optical path.

Description

.201009307 » VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to an optical characteristic measuring device and an optical characteristic measuring method, particularly relating to measuring reflected light of an object to be measured after light irradiation, for determining a test to be measured The optical characteristics of the I optical characteristics were measured, and the optical characteristics of the device were measured. [Prior Art]

The optical characteristic measuring device s is configured to measure the reflected light of the object to be tested after being irradiated with light, and to measure the optical characteristics of the object to be tested. For example, the present invention is disclosed in Japanese Laid-Open Patent Publication No. Hei 11-316186 (Patent Document No. 11-230829 (Patent Document 2). The characteristic measuring device (spectrophotometer) includes an upper light shielding portion that can be used for switching control of a sample set surface on which the object to be tested is placed. In addition, the optical characteristic measuring device disclosed in Patent Document 2 The differential optical device includes an illumination optical system and an imaging optical system. The illumination optical system transmits the illumination light emitted from the light source through a half mirror to the sample to be measured placed on the table, and the imaging optics The system directs the reflected light of the sample to be measured to the optical system for diffracting the light and the monitor. Then, on the sample to be measured, the diffracted light is used to split the observation light from the measurement area. The spectroscopic spectrum is imaged on a line sensor (line sens〇r), and then used to calculate the optical characteristic according to the spectroscopic spectrum measured by the line sensor. Another 3 201009307 On the one hand, by using a relay lens, the monitoring optical system images an enlarged image of the sample to be measured on a two-dimensional charge-coupled-device (CCD) camera. According to the magnified image of the sample to be measured taken by the charge-coupled camera, the position is determined and the focus is roughly focused. In the general optical characteristic measuring device, the microscopic spectroscopic device disclosed in Patent Document 2 is a light source. The illumination light emitted is used for the measurement and focusing of the spectroscopic spectrum. In the optical characteristic measuring apparatus disclosed in Patent Documents 1 and 2, it is necessary to focus and measure the Qbjective lens of the object to be tested. In this case, in the optical special-purpose measuring device disclosed in Patent Document 2, the charge-coupled camera (丨6) is provided, and the characteristics of the measurement site can be focused and acquired. As described above, since the illumination light emitted from the source is simultaneously used to perform the spectroscopy and focusing of the spectroscopic spectrum, it is necessary to use a half mirror ((1), and the observation ❹ _ = spectrometry is required) . On the optical path of the U because of a problem of this, there will be a loss of light quantity measured SUMMARY OF THE INVENTION In view of this, the date of the present invention &,

The device sees 1 ^ 'in the provision of optical characteristics measurement U and optical characteristics measurement method, using armored electricity to control the reduction of the measured light amount, the focus adjustment of the objective lens and the measurement site H can be performed, and the optical characteristic measuring device of the present invention includes : the measurement portion is determined from the measurement light of the test object to be placed on the optical path between the object to be tested and the measurement portion of the mirror; and the light injection portion is 201009307, in the measurement portion and At a predetermined position of the optical path between the objective lenses, the observation light having the reflection wavelength of the object to be detected is injected from outside the optical path, and is characterized in that it has a first mode of injecting the light into the optical path, and the observation light is not injected. The second mode in which the optical path is measured by the measurement portion. According to the above structure, when the observation light having the reflection wavelength of the object to be tested is injected into the optical path between the object to be tested and the measurement portion, the focus adjustment of the objective lens and the measurement portion can be designated, in this case, In the state where the light is not observed, the measurement is performed by the measurement portion, and i can be turned on when the measurement is performed. Therefore, according to the optical characteristic measuring apparatus of the present invention, it is possible to control the reduction of the amount of illumination and to perform focus adjustment of the objective lens and designation of the measurement site. Pushing a feng 丄 疋 progress, because it can control the measurement first into the measuring optical system, and can control the generation of stray light in the measurement. More preferably, the optical characteristic measuring device further comprises a shutter, wherein the predetermined position of the learning path is 'where' when the optical path is closed, the first state of the Igman' and the observation light is directed toward the objective lens, and when the optical path is opened : The shutter is in the second state' and wherein the first mode is when the fast time Tianshan Gate becomes the first state, and the second mode is when the shutter becomes the first-strong & your horse state. As described above, by using the shutter provided, the optical path can be switched off/on, and the first mode and the second mode can be realized by a simple architecture. Preferably, the optical characteristic measuring device further comprises a reflection disposed between the objective lens and the shutter for s ^ ^ 反射 反射 反射 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : 测定As described, when the image of the image tr: is set, the image is taken. The reflected image obtained by the reflected light is used to capture the image from the mirror image, and can be specified according to the image k obtained in the image of 201009307. To adjust the focus of the objective lens and measure the optical characteristics of the measurement site, and measure the light to determine the optical characteristics (4) from the optical properties of the object to be tested. In one step, the method for measuring the optical path of the light is located on the opposite side of the object to be tested: the left-handed learning path with respect to the reflection wavelength of the object to be tested, and the measurement is performed by the measurement light. According to the above method, the light is injected into the object to be tested, and 'there will be a reflected wave of the object to be measured, when the optical path between the parts is used, for the light to be connected to the objective lens. , 'Point adjustment and designation of the measurement site. Further, in the first step, the measurement is performed on the right and the fixed portion, and the measurement can be performed in the state of "," and therefore, according to the present invention, the light according to the present invention: The optical path is turned on. I 2 4 The method of measuring the temple can control the measurement light to simultaneously adjust the focus of the objective lens and the finger of the measurement site. #The control light can be controlled to enter the measurement optical system. Controlling the generation of stray light. Preferably, the optical characteristic measuring method further comprises: reflecting the measuring light by a portion of the mirror disposed on the optical path, and reflecting the reflected light from the reflecting portion of the reflecting portion. As described above, when the reflected image obtained by the reflection of the mirror portion provided on the optical path is imaged, the focus of the objective lens can be performed based on the reflected image. Adjustment and measurement site designation. According to this month's 16th, it is sufficient to control the decrease of the measured light quantity 201009307 when measuring the optical characteristics. At the same time, the objective lens can be adjusted. The points of the adjustment, measurement and measurement are made to the present invention. The above-mentioned objects, advantages and advantages can be more clearly understood. The following is a detailed description of the preferred embodiments and the accompanying drawings, which are described below in detail. In the following, the same or similar elements are denoted by the same or similar symbols, and the repeated description is omitted. Further, in the embodiments described below, the number and quantity mentioned In addition, the number, the number, and the like are not intended to limit the scope of the present invention. In addition, in the following embodiments, except for the case where it is specifically described, The 7G piece is not essential to the present invention. In addition, in the following embodiments, except for the case where it is specifically described, it is The appropriate combination of the embodiments is arranged. - The optical characteristic measuring device i of the present embodiment is used for color unevenness measurement, brightness measurement, film thickness unevenness measurement, and multi-point spectroscopic measurement. However, it is also applicable to other uses. Fig. 1 is a schematic view showing the state of use of the optical characteristic measuring apparatus according to the embodiment of the present invention. Referring to Fig. J, in this embodiment, the optical splitter i as an optical characteristic measuring apparatus Is used to determine the optical characteristics of the sample 2A of the test object. As shown in Fig. i, the beam splitter i can perform a linear region. In other words, the beam splitter i expands the linear light onto the plane to 201009307:: In order to analyze the optical characteristics of the sample 2A, it is sufficient to measure the optical properties of the object to be tested in a short time. In the embodiment of Fig. 1, the square of the spleen DR2A is rectangular. The sample 2A is moved in the direction of the arrow h, and the optical properties of the sample core are arranged in the width direction of the beam splitter A along the plural (for example, three) of the sample. In order to measure the state of the spectroscope, it is also possible to use the modification of Fig. 2 in the example of Fig. 2 to rotate the circular sample 2b along the arrow (four) b. The spectrometer 1 performs measurement to determine the optical characteristics of the sample (9). "Architecture of Splitter 1" Next, use the third diagram to illustrate the splitter! The architecture. Referring to Fig. 3, the beam splitter 1 includes a measuring portion 10, a receiving member (four), a light emitting diode (led) 3, a slit mirror (slit mirr〇r) 4, a shutter (a repeating (8) 5 〇, a lens ( Triplet lens) 60 and 80, diffraction grating 70, mirror 90, and 1〇〇, lens 丨1〇, image capturing portion, and frame HQ. Measurement P damage 1 G includes light receiving portion ii. When measuring the optical characteristics of the test object 2, the light from the measurement light source (not shown) is irradiated onto the object to be tested 2, and the diffraction grating 70 is transmitted through the diffraction grating 70 to guide the reflected light of the object 2 to be measured. The light receiving portion 10 of the portion 10. The objective lens 20 is disposed opposite to the object to be tested 2. The light from the light source for measurement is not transmitted through the objective lens 2, and reaches the object to be tested 2, and the object to be tested 2 The reflected light (measured light) of the reflection passes through the objective lens 2 〇 and reaches the measurement part 1 〇〇.201009307 The light-emitting diode 30 is the light-emitting area of the emitted light (observation light), and the object 2 is turned on, Use ', ,, # to determine the position of the object to be measured 2. When the light is in the direction of the silver, the vine will be 1 〇 The observation light is emitted. The shutter 50 is closed, and the light of the t-pole body 30 is reflected toward the objective lens 20. Since the reflected light is imaged on the object to be tested 2 due to the surface of the crucible, the objective lens 20 is adjusted to The objective lens 20 can perform 隹", dot adjustment. In addition, the image is placed on the surface of the surface of the object to be tested 2, and can also be used to specify the measurement site. The slot mirror 40 is a (slit) reflection having an elongated opening portion. / & P1 50 in the open state 'through the slit mirror (10) straight

The light 'transmits through the triplet 60, the diffraction grating 7〇 and the triplet 8〇, is guided to the light receiving part of the measuring part 1G (4), and the light reflected by the slit mirror is transmitted through the mirror 9Q, _ And the lens (1) is guided by the image portion fm such that the image of the portion of the portion to be tested reflected by the reflection portion of the slit mirror 4 is obtained from the image capturing portion. In the image 4 damage 12G, only the slit portion of the slit mirror 4Q is obtained by displaying the image in black. Therefore, the portion of the gap formed by the black portion of the image obtained by the image portion m is the measurement portion. In other words, it is possible to select the image obtained by the image damage of 12 G to specify the measurement site. In addition to this, the objective lens 20 is adjusted to focus on the image reflected by the slit mirror 4, so that the objective lens 20 can be adjusted in focus. Further, the light-emitting diode 30, the slit mirror 4A, the shutter 5〇, and the triplet lens 6. And 80, the diffraction grating 7. The mirrors 9〇 and 1〇〇, and the lens 110' are all placed inside the single frame i3〇. Will measure part]. The objective lens 20 and the image capturing portion 120 are disposed in the frame 13A to form a 9201009307 optical splitter 1. The control device 3 is connected to the measuring portion ι of the beam splitter. The control device 3 is used to calculate the optical characteristics of the object to be tested 2 based on the detection result of the beam splitter i. The calculation method of this optical characteristic will be described below by way of an embodiment. <<Optical characteristic measurement process of the spectroscope 1>> Next, the optical characteristic measurement process of the spectroscope 丨 will be described with reference to Fig. 4, referring to the optical characteristic measurement method of the fourth optical beam i, including: injection from the light-emitting diode 30 The step of observing light (si〇 in Fig. 4) and not from the light emitting diode 3. The observation light is injected, and the measurement is performed by the measurement light of the measurement light source (not shown) (s2〇 of Fig. 4). In the training towel, the shutter 50 is "closed state". In this state, the light of the light-emitting diode 30 is directed toward the object 2 to be reflected. In this way, adjusting the objective lens 20 to focus on the object to be tested 2

The imaging of the Jz face makes it possible to adjust the focus of the objective lens 2〇. In addition to this, the position of the light line imaged on the surface of the object to be tested 2 can be used to specify the measurement site. On the other hand, the reflected light image of the object 2 is obtained by the image capturing portion 120. You can refer to the image taken in the image capture section 12 to specify the measurement site. In addition to this, the image reflected by the objective lens 2 is adjusted to focus the focus mirror 40 so that the objective lens 20 can be adjusted in focus. After S1 0, the s 2 0 system uses the light source (light source for measurement) different from the light-emitting diode 30 to measure the optical characteristics of the sample to be tested. The light-emitting diode 30 is turned off. ^20

Qn In this way, it is possible to control the light of the light-emitting diode 30 to enter the measuring optical system, and to control the generation of stray light during the measurement. ^ .201009307 "Method for calculating optical characteristics based on the detection result of the spectroscope 1" Next, a method of calculating the optical characteristics based on the detection result of the spectroscope 1 will be described. As shown in Fig. 3, the control unit 3 is connected to the measuring portion 10 of the spectroscope. Based on the measured value of the splitter ,, the control device 3 calculates optical characteristics such as brightness and chromaticity of the test to be measured = 2. For example, the optical characteristics calculated by the control device 3 include a tristimulus value, a chromaticity coordinate, a dominant wavelength, a stimulus purity (pUrj β ), a correlated color temperature and a deviation value (duv), a color rendering evaluation value, and the like. . These measurement items are mainly specified in accordance with the XYZ color system. The tristimulus values (X, γ, z) used in the XYZ color system are generated according to the following formula: 780 X = k H汾(4) elements (again 380, 780 Y = kYjSt(X)y(zy^ ? • 380 780 Z = k^St(X)z(Ayjl 5 380 where, for (4): the spectral distribution value of the illuminant in the interval of A, no (again), 7 (^0, ^ again): xyz color system Equivalent color number; ΔΑ : used to calculate the wavelength interval of the tristimulus value; allow: constant. In the above formula, calculate the tristimulus value (X, Y, Z) to be measured (split 11 201009307 knife cloth value), and The control device 3 multiplies the equal-color off values corresponding to the intensities of the respective wavelength components in the visible field (38 〇 nanometer to 78 〇 nanometer), and then accumulates the second stimulus values (X, γ, z). The method is the method for measuring the F color specified by JIS z 8724 - the color of the light source. Figure 5 shows the number of equal color levels specified by the International Commission on Illumination (CIE). Referring to Figure 5, the number of equal colors corresponds to the person. The spectral sensitivity of the eye.

In the second stimulus value (X' Y, Z ), the value of the stimulus value γ corresponds to the brightness of the object 2 to be tested. Further, in the above formula, the value of the constant moxibustion refers to the detection gain ratio (gain) of the light receiving portion 330 and the like, and the value is set in advance so that the value of "Y" corresponds to the absolute value of the actual measured brightness. . Further, in the tristimulus value (X, γ, z), the chromaticity coordinates are calculated using the values of the stimulus value χ and the stimulus value Υ. The chromaticity coordinates (χ, y) are generated according to the following formula:

X χ =—-- X-hY+Z 1

Y y =---

χ+γ+ζ 0 The chromaticity coordinate C X,y) ' is used to indicate the value of the horizontal axis direction and the vertical axis direction in the χΥΖ χΥΖ color system. The calculation method of the chromaticity coordinate (χ, y) is the "color measurement method _ light source color" prescribed by J IS Z 8724. Other calculation methods can be specified according to CIE 1960 UCS and CIE 1 976 UCS as calculation methods for chromaticity coordinates (X, y), or these calculation methods can also be used. In this way, the control device 3 calculates the tristimulus value (X, γ, z) based on the measured value 12 201009307 of the spectroscope 300, and calculates the brightness of the object to be tested, that is, the brightness of the object 2 ( kY) and at least one of the chromaticity coordinates (x, y). Furthermore, the control device 3 prestores the above-described chromaticity number and constant k 〇 in the chromaticity diagram defined by the xyz color system, and the wavelengths corresponding to the y coordinate values of the main wavelength and the chromaticity coordinate (X y ) are the same. To indicate the color difference of the object 2 to be tested. The stimulus purity ' corresponds to the origin coordinate and the distance between the chromaticity coordinates (X, y)' to indicate the saturation of the object 2 to be tested. The calculation method of the dominant wavelength and the stimulation purity is the "color representation" of the XYZ color system and the χιογιοζίο color system as defined by JIS Z8701. The correlated color temperature and the deviation value (duv) respectively indicate the black body temperature closest to the color of the object to be tested 2 and the deviation value from the black body temperature, and are specified in JIS Z 8725 "Light source distribution temperature and color temperature, correlated color temperature" In the measurement method. The evaluation value of the colorimetric property of the object to be measured 2 is used to evaluate the color rendering property of the object to be tested 2, which is defined in JIS Z 8726, "Method for evaluating the color rendering property of a light source". <<Modification of the above structure>> For example, a modification of the above configuration can be made as follows. In other words, in this modification, the lens 11'' and the image taking portion 120 of Fig. 3 are removed, the centers of the optical axes are aligned, and other light-emitting diodes are provided. In this case, light (observation light) from the other light-emitting diodes is reflected by the slit mirror 40 to reach the surface of the object 2 to be tested. In this regard, in order to focus on the object to be tested 2, the objective lens 20 is adjusted, so that it is possible to perform the confrontation of the object 2 of 201009307. w , ' * In addition, the position corresponding to the gap portion of the image formed on the surface of the object 2 to be tested is the measurement position. In the case of “Summary”, the above related content is summarized as T. In other words, the spectroscope 1 of the present embodiment of the present invention includes: measuring the measurement light from the object 2 to measure the pre-test characteristics of the object to be tested 2, and the objective lens 20 is set to be The optical path between the measuring object 2 and the measuring portion is lighter. *5; Α, as the light-emitting diode of the "light-injecting portion"

The positioning of the optical path of the measuring portion 10 &lt;&gt;&amp;dU&lt;d&gt;&gt; and the objective lens 20 Fb1 is positioned from the optical path to the observation light having the reflected wavelength of the object to be tested 2. = has a first mode (fourth) that will observe the optical path of the newman, and a second mode that does not measure the optical path q of the observed light from the measurement line (Fig. 4 (10)). Specifically, the split 1 first includes a shutter 50 which is disposed at a predetermined position of the optical path. When the optical path is closed, the shutter 5 is the first shape and the observation light is directed toward the objective lens 2G, and when the optical path is opened, the shutter %: the :: state, wherein when the shutter 50 becomes the first state (closed) The state is the first mode r, 弋S1 〇), and when the shutter 50 is in the second state (on state), it is in the second mode (S20). In addition, the 'beam splitter 1' further includes a mirror mirror 40 as a "mirror portion", which is disposed between the objective lens 2 brother 20 and the shutter 50 for reflection measurement and image pickup Qp injury 120 'pair from the gap Mirror 4. The reflected image obtained by the reflected light is imaged. According to the spectroscope 贝 of the embodiment of the present invention, when the observation light having the reflection wavelength 14 201009307 / of the object to be tested 2 is injected into the optical path between the object to be tested 2 and the measurement portion 10, it can be used. On the armor of the objective lens, the adjustment of the point, the point and the location of the measurement. In this regard, in the case where the observation light is not injected, the &amp;&gt; is measured by the measurement portion 丨0, and the A, the double and the ninth path can be measured. Therefore, according to the spectroscope 1, it is possible to control the decrease of the measurement, and at the same time, the focus adjustment of the mirror 20 and the designation of the measurement site. #订接接 Further, in the beam splitter 1, the shutter 50 can be used to switch the optical path to be turned off/on, and the first mode (S10) and the earlier architecture of the TM ^ U are implemented. The second mode (S20). Progressing in the knife light 1, when the image capturing portion 120 is provided for the reflection image of the reflection (4) of the light, the image taken by the image capturing portion 120 can be used to push &amp; The image is adjusted to the focus adjustment of the objective lens 20 and the designation of the measurement site.

The method for measuring the optical characteristics of the present embodiment is to determine the optical characteristics of the optical properties of the test object 2 by using the measurement light from the test object 2, and the method includes: Step (S1〇), in the optical path of the measuring light, in the opposite direction of the objective lens 20 and at a predetermined position opposite to the object to be tested 2, the observation light having the reflection wavelength of the object to be tested 2 is injected from the outside of the optical path; In the second step (S20), the observation light is not injected into the optical path, and the measurement is performed using the measurement light. Further, the measurement light is reflected by the slit mirror 4 of the X on the optical path, and the reflected image obtained by the reflected light from the slit mirror 40 is imaged. The present invention has been described in detail above, but the above description is only an example, and the present invention is not limited thereto, and the scope of the present invention is defined by the scope of the appended claims 15 201009307. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a state of use of an optical characteristic measuring apparatus according to an embodiment of the present invention. Fig. 2 is a view showing another state of use of the optical characteristic measuring apparatus according to the embodiment of the present invention. Fig. 3 is a schematic view showing the structure of an optical characteristic measuring apparatus according to an embodiment of the present invention. Fig. 4 is a flow chart showing a method of measuring optical characteristics according to an embodiment of the present invention. Figure 5 shows the isochromatic levels specified by the International Commission on Illumination (CIE). [Main component symbol description] 1~ splitter; 2A, 2B~ sample; 11~ light receiving part; 30~ light emitting diode 50~shutter; 7 〇~ diffraction grating; 110~ lens; 130~ frame; ~ Test object; 1 〇 ~ measurement part; 2 〇 ~ connected objective lens; slit mirror; 60, 80 ~ triplet lens; 90, 100 ~ mirror; 120 ~ image capture part; 3 ~ control device.

Claims (1)

201009307 VII. Patent application scope: 1. An optical characteristic measuring device, comprising: a measuring part 'determining the optical characteristic of the object to be tested by using the measuring light from the object to be tested; the objective lens' is disposed on the object to be tested And an optical path between the measuring portion; and a light injecting portion 'injecting the optical path between the measuring portion and the objective lens, and injecting the object to be tested from outside the optical path The observation light of the reflection wavelength is characterized in that it has a first mode in which the observation light is injected into the optical path, and a second mode in which the observation light is injected into the optical path and measured by the measurement portion. The optical characteristic measuring device as described in claim 1 further includes: a gate is placed at the predetermined position of the optical path, wherein the shutter is the first __ skin when the optical path is closed杂# The observation light is directed toward the object 匕', and the door is in the second state. When the first road meal is opened, the fast and wherein, when the shutter becomes the first state, when the shutter becomes $ _ # ', for the first mode, or the first state, is the second mode 3.&quot; Please patent scope 帛 2 items, two sets, including: first feature measurement mirror part, set The measuring lens emits the measuring light; and the AND gate is used to reverse the image of the image taken from the reflected portion of the mirror portion. 4. A method for determining an optical characteristic, which uses the measurement light from the object to be measured to determine an optical characteristic of the object to be tested, comprising: a first step 'on the optical path of the measurement light, located opposite to the objective lens The object to be tested is injecting observation light having a wavelength of reflection of the object to be tested from outside the optical path at a predetermined position; and in the second step, the observation light is not injected into the optical path, and the measurement is performed by using the measurement light. Method 5. The scope of the patent application further includes: the optical characteristic measurement described in item 4 is performed by the portion of the mirror disposed on the optical path, and the light obtained from the portion of the mirror is taken. image. Reflecting the reflected image of the assay 18