201009225 六、發明說明： 【發明所屬之技術領域] 本發明於-種_供給閥及零件搬送 於-種適用在控制氣體之供給狀態以選擇性地二"係關 篩選搬送零件情況的氣體供給閥之構造。a ^體達 【先前技術】 Θ 般在零*件…料器等之零件搬送裝置（零件供應裝 中，要求以尚速且受控制姿勢搬送多數零件，但此 送裝置中，為了將構造上不良之零件或非為正規姿勢1 從零件搬送路徑上排除、或者為了將非為正規姿勢之零件轉 換為正規姿勢’㈣零件搬送路徑上之零件選擇性吹 艚。 ’、 在對如上述零件搬送裝置中之零件筛選部供應氣體之情 況時，為射氣體之供應及停止，而需要高速動作的氣體供 ❹ 給閥，故例如有提案構成為輯電致動n驅動隱之閱構造 (例如參照以下專利文獻υ。 [專利文獻1]日本專利特開2003-10790號公報 【發明内容】 (發明所欲解決之問題） 然而，在由前述壓電致動器驅動的氣體供給閥中，若欲在 零件搬送路徑上迅速地供應氣體，則必須從閥入口 9經由閥 體之開閉部分朝向閥出口 1〇流通高速氣流，因此必須加大 098119672 4 201009225 壓電致動器動作行程或_部空間’確保流通剖面積、或者 提高氣體供應侧壓力以使通過_部空間之氣流高速化。但 .是，當加大壓電致動器的動作行程、或_部空間的剖面 .積，則使閥構造本身大型化，又當增加供應侧壓力，則閥内 部空間（閥開放時之導入開口與導出開口間空間）會產生負 壓，導致壓電致動器之驅動負栽增加，因此總而言之均會導 致氣體供給閥大型化與消耗功率增加，同時因閥内部空間的 蠡殘壓而使零件搬送路徑上容易產生開始及停止吹附之延遲 的問題。 因此，本發明用於解決上述問題’其課題在於使氣體供給 閥小型化，同時降低開始吹附氣流之時序延遲。 (解決問題之手段） 有馨於上述情況，本發明之氣體供給閥具備有：氣體導入 路徑’用於導人氣體；閥汽缸，該氣體導人路徑之導入開口 籲面臨其内’閥體’具備有構成為可在該閥汽缸内部開閉上 述導入開υ的阻塞部；氣體導出路徑，具備有面臨上述閥汽 缸内部的導出開口；及壓電致動II，驅動上關體而進行上 述導入開口的開_作；特徵在於，在關放時，使上述導 -入開口與上述導出開π間之内部空間連通至外部的通氣路 ’位才皮β又置成與上述氣體導入路徑及上述氣體導出路徑分開。 根據本發明’在閥開放時，因為内部空間會經由通氣路徑 而與外目連通’因此即使壓電致動器之動作行程較小、或 098119672 5 201009225 通過内部空pa1的氣流速度較高，亦可抑制閥内部空間的負壓 發生’可減輕㈣致動器之轉負載，故可避免氣體供給闕 大型化與祕功率增加，_可減_部空間之通氣阻力， 因而可減輕_放時供應目標開始供應氣體之延遲。 此外， 當使用氣體⑽騎零件_裝置之零件㈣部供應氣流 之隋况時目閥的小型化而可配置於吹附氣流的零件筛選部 附近’因而可減輕開始及停止吹附氣流之延遲。 在本發月樣中’上述通氣路徑無_的開閉狀態，其 上述内部空間均連通於外部。依此，砂通氣路徑無關闕的 開閉狀態其内部空間均連通於外部，因而在閥_時内部 空間的殘壓會經由通氣路徑釋出至外部，因此可減輕供應目 標停止供應氣體之延遲。 在本發明另-態樣中，上述閥汽缸内，上述阻塞部在與上 述閥ru缸之周圍内面間具有間隔的態樣下朝上述導入開口 突出’上述通氣路徑開口於上述間隔内。依此，_的阻塞 部在與閥汽缸周_面之至少—部分間具有_而朝導入 開口犬出’上述通氣路徑開口於該間隔内，由此於閥開放時 上述間隔會連通於⑽空間，因此即使導人開口與阻塞部間 之隙間較小’内部空間之容積亦會實質擴大，同時因可經由 上述間隔從通氣路徑導人外氣，因此内部空間所產生之負磨 可受通氣路射效果性抑制。此外，由於職路徑開口於上 述間隔Θ彳從閉鎖部侧朝内部空間導人外氣，因此可提高 098119672 201009225 減輕因上述負歷而對pq 使壓電致動器之動作 施加之吸引力的敦果。因此，即 丁程較小，亦可®推 載，可輕易避免氣體供給闕大型化與消了減輕驅動負 此情況下，最好前端具備右μ、、 率増加。 與上述閥汽缸之周固内面的氣體導入部在 突出’同時上述氣體導入部之前=下朝上述閥體 shape)。依此，由於 、、’_ 細狀(tapering ❷積，因而可抑制内部*門:體導入部與P且塞部之對向面 動作行程較小，亦㈣產生’故即使壓電致動器的 步減輕驅動負截。, — = 二：^ ，位置，朝與:述二=:上述導入開口之 此，導出開口 向相正父之方向開口。依 &導出開口對於内部空間的開口位置，相 開Π位置被配置於與阻塞部移動方向相正交之方導二 •使當閥開放時閉鎖部相對 向’因此即 導入問山 的㈣行程較小，氣體從 ^開導出開口不被閉鎖部等遮住而可直接流通，因而 可減輕通氣阻力，可提高氣體供應速度。 在本發明不同態樣中，其更進一步具備有收容上述闕汽缸 =外殼，上述通氣路徑包含有：内側貫通孔，形成於上述闕 0>缸，使内外連通；中間凹溝，形成於上述閥汽缸外面或上 述外殼内面，連通於上述内側貫通孔；及外側貫通孔形成於 上述外殼，使内外連通同時連通於上述尹間凹溝。如此，由 〇98119672 7 201009225 於通氣路徑為包含有内侧貫通孔、中間凹溝及外侧貫通孔的 態樣，即使提高組裝容易性與構造自由度，亦可確實確保通 氣路徑。此外，由於變更内侧貫通孔與外侧貫通孔之位置關 係，可輕易地調整通氣路徑之通氣阻力❶在此情況下，如後 述實施態樣’閥汽缸外面與外殼内面均由圓筒面構成，並使 上述中間凹溝為繞軸線延長形狀的凹溝(例如環狀溝），而可 在外殼内以任意角度收容閥汽缸，故由於在具備有外侧貫通 孔的外殼内變更具備有内侧貫通孔的閥汽缸繞軸線之角度 姿勢，可更輕易地變更通氣路徑之長度而調整通氣阻力。 本發明中’亦可僅藉由壓電致動器之動作而進行阻塞部之 開閉，但例如有時可更進一步具備有朝阻塞部阻塞導入開口 的方向賦予閥體勢能的賦予勢能手段。此情況，因為至少有 一部分使用賦予勢能手段之賦予勢能作用而將閥閉鎖，因此 即使供應侧壓力較高，亦可減輕對壓電致動器造成的負載。 此外，亦有時可更進一步具備有朝阻塞部開放導入開口的方 向賦予閥體勢能的賦予勢能手段。此情況下，因為至少有一 部分使用賦予勢能手段之賦予勢能作用而將閥開放，因此可 將闊迅速地開放，可更進一步減輕對供應目標開始供應氣體 之延遲。 本發明中，最好其具有閥體限制手段，用以設定上述閥體 在上述阻塞部離開上述導人開σ之方向上的移動極限。藉由 該閥體限制手段的設置，因為設有_開放動作時之移動極 098119672 201009225 限，因此可防止因賦予勢能手段的賦予勢能作用或供應側壓 力等使閥體過度動作而造成壓電致動器破損的情況。 • 其次，本發明的零件搬送裝置特徵在於具備有上述任一項 記載之氣體供給閥、將經由該氣體供給閥供應的氣體選擇性 人附於零件而進行師選的零件篩選部、及通過該零件篩選部 的零件搬送路徑。依此，可避免氣體供給閥大型化與消耗功 率增加，同時可減輕内部空間的通氣阻力，因而可減輕零件 ❹篩選部開始供應氣體之延遲。尤其當通氣路徑無關閥的開閉 狀態其内部空間均連通於外部的情況下，在閥閉鎖時，内部 空間的殘壓會經由通氣路徑而釋出至外部，因而可減輕零件 -篩選部停止供應氣體之延遲。 【實施方式】 以下，合併圖式說明本發明實施形態。圖1為表示本發明 氣體供給閥第1實施形態之内部構造的概略縱剖圖，圖2 ® 為表示與第1實施形態之圖1相正交之剖面的概略縱剖圖 (圖1之II-II線剖面箭視圖），圖3係第1實施形態之概略橫 剖圖（圖1之ΙΙΙ-ΙΠ線剖面箭視圖）。201009225 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a gas supply in which a supply valve and a component are transported to a supply state of a controlled gas to selectively filter and transport a component. The construction of the valve. a ^ 达 达 [Previous technique] 零件 In the case of a parts transport device such as a zero-piece material feeder, it is required to transport most parts in a fast and controlled position, but in this device, in order to construct Defective parts or non-normal postures 1 are excluded from the part transport path, or in order to convert parts that are not in a normal posture into a normal posture' (4) Selective blowing of parts on the part transport path. ', Carrying the parts as described above When the component screening unit in the device supplies a gas, the gas is supplied and stopped, and the gas that needs to be operated at a high speed is supplied to the valve. Therefore, for example, it is proposed to configure the electric actuation n to drive the hidden reading structure (for example, [Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-10790 (Discussion of the Invention) However, in the gas supply valve driven by the piezoelectric actuator described above, In order to supply the gas rapidly on the part conveying path, it is necessary to circulate the high-speed airflow from the valve inlet 9 through the opening and closing portion of the valve body toward the valve outlet 1 , so it is necessary to increase the 09811967. 2 4 201009225 Piezoelectric actuator operation stroke or _ space> to ensure the flow cross-sectional area, or to increase the gas supply side pressure to speed up the airflow through the _ space. However, when the piezoelectric actuator is enlarged The stroke of the operation stroke or the _ section space increases the size of the valve structure itself, and when the supply side pressure is increased, the internal space of the valve (the space between the introduction opening and the outlet opening when the valve is opened) generates a negative pressure, resulting in a negative pressure. The driving force of the piezoelectric actuator is increased, so that the gas supply valve is increased in size and power consumption in the whole, and the delay in starting and stopping the blowing is easily caused in the component conveying path due to the residual pressure in the internal space of the valve. Therefore, the present invention has been made to solve the above problems. The object of the present invention is to reduce the size of the gas supply valve while reducing the timing delay of starting the blown air flow. (Means for Solving the Problem) The gas supply of the present invention is succinct in the above case. The valve is provided with: a gas introduction path 'for guiding a human gas; a valve cylinder, the introduction opening of the gas guiding path is facing the inner 'valve body' having The gas discharge path includes an outlet opening facing the inside of the valve cylinder, and a piezoelectric actuator II that drives the upper body to open the introduction opening. </ RTI> </ RTI> </ RTI> characterized in that, during the closing, the air-venting path of the air-conducting path of the above-mentioned conduction-in opening and the inner space of the above-mentioned derivation is connected to the gas introduction path and the gas extraction path According to the present invention, when the valve is opened, since the internal space is communicated with the external body via the venting path, even if the action stroke of the piezoelectric actuator is small, or 098119672 5 201009225, the airflow speed through the internal air pa1 is high. It can also suppress the occurrence of negative pressure in the internal space of the valve, which can reduce the load of the actuator (4), so that the gas supply can be prevented from being enlarged and the power is increased, and the ventilation resistance of the space can be reduced, thereby reducing When the supply target starts to supply gas, the delay. In addition, when the gas (10) is used to ride the parts, the part (4) of the device is supplied with the airflow, and the mesh valve is miniaturized and can be disposed near the part screening portion of the blown airflow', thereby reducing the delay in starting and stopping the blown airflow. . In the present invention, the above-mentioned internal space is connected to the outside in the open/close state in which the ventilation path is absent. According to this, the sand venting path is independent of the opening and closing state, and the internal space thereof is connected to the outside, so that the residual pressure of the internal space is released to the outside through the venting path at the time of the valve _, thereby alleviating the delay in stopping the supply of the gas by the supply target. In another aspect of the invention, in the valve cylinder, the blocking portion protrudes toward the introduction opening in a manner spaced apart from an inner surface of the valve ru cylinder, and the ventilation passage is opened in the space. Accordingly, the blocking portion of the _ has a _ between at least a portion of the circumference of the valve cylinder, and the venting passage opens into the gap. Thus, the interval is communicated to the (10) space when the valve is opened. Therefore, even if the gap between the opening and the blocking portion is small, the volume of the internal space will be substantially enlarged, and at the same time, since the outside air can be guided from the ventilation path through the above interval, the negative grinding generated by the internal space can be affected by the air passage. Shooting effect suppression. In addition, since the service path opening is outside the above-mentioned space, the air is conducted from the side of the lock to the inner space, so that the 098119672 201009225 can be improved, and the attraction of the action of the piezoelectric actuator by pq due to the above negative history can be alleviated. fruit. Therefore, even if the D-pass is small, it can be pushed by the ®, and it is easy to avoid the gas supply, increase the size, and reduce the negative drive. In this case, it is preferable that the front end has the right μ and the rate is increased. The gas introduction portion on the inner surface of the cylinder of the valve cylinder is protruded 'before the gas introduction portion = downward toward the valve body shape). According to this, since the '_ is thin (tapering hoarding, it is possible to suppress the internal * door: the body introduction portion and the P and the opposing surface of the plug portion have a smaller stroke, and (4) is generated", even if the piezoelectric actuator The step of mitigating the drive negative cut., — = 2: ^, position, toward and: said two =: the above-mentioned introduction opening, the outlet opening is opened in the direction of the positive father. According to & the opening position of the opening for the internal space The phase opening position is arranged in a direction orthogonal to the moving direction of the blocking portion. 2. When the valve is opened, the locking portion is opposite to each other. Therefore, the (four) stroke of the introduction mountain is small, and the gas is not opened by the opening. The blocking portion or the like is shielded and can be directly circulated, so that the ventilation resistance can be reduced and the gas supply speed can be increased. In various aspects of the present invention, the present invention further includes a housing for housing the housing, the ventilation path including: the inner through a hole formed in the 阙0> cylinder to communicate inside and outside; an intermediate groove formed on the outer surface of the valve cylinder or the inner surface of the outer casing and communicating with the inner through hole; and an outer through hole formed in the outer casing The external communication is simultaneously connected to the above-mentioned inter-glot groove. Thus, since the air passage includes the inner through hole, the intermediate groove, and the outer through hole, the ease of assembly and the degree of freedom of construction are improved by 〇98119672 7 201009225. It is possible to surely ensure the ventilation path. Further, since the positional relationship between the inner through hole and the outer through hole is changed, the ventilation resistance of the air passage can be easily adjusted. In this case, the outer surface of the valve cylinder and the inner surface of the outer casing are The cylindrical surface is configured such that the intermediate groove is a groove (for example, an annular groove) that is elongated around the axis, and the valve cylinder can be accommodated at an arbitrary angle in the casing. Therefore, the casing is changed in a casing having an outer through hole. The angular position of the valve cylinder having the inner through hole around the axis makes it easier to change the length of the air passage to adjust the ventilation resistance. In the present invention, the opening and closing of the blocking portion can be performed only by the action of the piezoelectric actuator. However, for example, there may be further provided a potential energy supply means for imparting potential energy to the valve body in a direction in which the blocking portion blocks the introduction opening. In other words, since at least a part of the valve is locked by the potential energy imparting means by the potential energy means, even if the supply side pressure is high, the load on the piezoelectric actuator can be reduced. The potential energy supply means for imparting the potential energy to the valve body in the direction in which the blocking portion opens the introduction opening. In this case, since at least a part of the valve is opened by the action of the potential energy imparting the potential energy means, the valve can be opened quickly and can be further reduced. In the present invention, it is preferable to have a valve body restricting means for setting a movement limit of the valve body in a direction in which the blocking portion is apart from the guide opening σ. Since the setting of the restriction means is limited to the movement pole 098119672 201009225 when the opening operation is performed, it is possible to prevent the piezoelectric actuator from being broken due to the excessive action of the valve body due to the potential energy application or the supply side pressure imparted to the potential energy means. . The component conveying device according to the present invention is characterized in that the gas supply valve according to any one of the above-described items is provided, and a component screening unit that selectively selects a gas supplied through the gas supply valve and is attached to the component is provided, and The part transfer path of the part screening unit. According to this, it is possible to avoid an increase in the size and power consumption of the gas supply valve, and at the same time, it is possible to reduce the ventilation resistance in the internal space, thereby reducing the delay in starting the supply of gas by the parts and the screening unit. In particular, when the internal space of the vent path-independent valve is open and closed and the internal space is connected to the outside, when the valve is closed, the residual pressure of the internal space is released to the outside through the venting path, thereby reducing the supply of gas to the part-screening portion. Delay. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a schematic longitudinal cross-sectional view showing an internal structure of a gas supply valve according to a first embodiment of the present invention, and Fig. 2 is a schematic longitudinal cross-sectional view showing a cross section orthogonal to Fig. 1 of the first embodiment (II of Fig. 1) Fig. 3 is a schematic cross-sectional view of the first embodiment (the arrow diagram of the ΙΙΙ-ΙΠ line section of Fig. 1).
氣體供給閥10具有由金屬、合成樹脂等構成的外殼11， 該外殼11中設有主構造部11A與延長部11B，而該主構造 部ΠΑ内部具備有圓柱狀凹孔lla，該延長部11β係從該主 構造部11A朝侧方直線狀延伸之樑狀構成，前端部具備有 用於固定後述壓電致動器的固定部位lib。在主構造部11A 098119672 9 201009225 之底部形成有連通於上述凹孔lla之氣體導人路徑llc。該 氣體導入路徑lie通過從凹孔lla之底面朝圖示上方突出的 氣體導入部lid内部’並具有在氣體導入部Ud之前端(圖 不上端）呈開口的導入開口 lle。氣體導入部lld之前端形成 漸細狀(推拔狀)。氣體導人部lld在圖示例中為圓柱狀(前端 _ 係圓錐或圓錐梯狀），但不受特別限定，可為例如角柱狀等 之任意形狀。 凹孔11a内收容具有朝圖示垂直方向貫通之軸孔12a的圓 ❿ 筒狀閥汽缸12 ’該閥汽缸12藉由其上部環狀溝所收容的〇 形環等密封材13而與主構造部ι1Α間構成氣密。另外，閥 >飞缸12外面設置有凹部（或凹溝）ub，並藉由螺入至主構造 部11A之侧部所貫通形成的側螺絲孔Ilf之固定螺絲14， 而對主構造部11A保持固定。閥汽缸12之軸孔12a下端係 具裕隙地承接上述氣體導入部lld，藉此在氣體導入部lid 與軸孔12a之周圍内面間沿全周設置間隔。 ❿ 再者，閥汽缸12設置有連通於轴孔12a，並貫通於内外 的橫孔12c’該橫孔i2c與主構造部ha中所設置的氣體導 出孔llg相連通，由該等而構成氣體導出路徑。該氣體導出 路徑之導出開口 12d由閥汽缸12之上述橫孔12c内部開口 所構成。 該導出開口 12d對導入開口 lie之開口位置而言，朝與阻 塞部15a之移動方向（閥汽缸12之轴線方向）相正交方向開 098119672 10 201009225 口。在圖㈣的情況’導人開口 Ue中沿上述移動方向所看 到之開口位置、與導出開口⑶中沿上述移動方向所看到的 .外緣位置呈現致(參照圖1的虛線’ 亦同），但只要产 上述移動方向所看到導人開口…之位置，在沿同移動、方向口 所看到導出開π i2dm圍内即可。依此，因為導出開 :相對於内部空間的開σ位置，對於導人開口之開口位置而 5被配置於與阻塞部移動方向相正交方向因此即使當間開 ❿放時閉鎖部對導入開口的移動行程較小，從導入開口至導出 開口亦不會受閉鎖部等遮住，可使氣體直接流通，因此可減 輕通氣阻力，可提早開始供應氣體之時序。 • 姊孔12a内插入閥體15，該閥體15在軸孔i2a内與閥 汽缸12财絲紐的狀时被配置為可滑動自如。就闕 體I5之内端部，圖示例中，在閥體ls之本體固定有由軟質 樹脂材料等構成㈣材…。該内端部構成透過抵接於上述 ❹導人開π lle而使閥成為閉鎖狀態的阻塞部…。闕體 與閥汽缸12之軸孔12a相密接，在確保氣密性的狀態下被 配置為可滑動，其内端之阻塞部15a構成為直徑收縮 ，且在 與軸孔12a間具有間隔之態樣下朝導入開口 lle突出。在圖 .示例的情況下，阻塞部15a沿全周在與閥汽缸12之軸孔12a _ 周圍内面間具有間隔。 在上述閥構造中，形成在導入開口 lle與導出開口 12d間 的内部空間’由氣體導入部lid與閥汽缸12之軸孔12a周 098119672 11 201009225 圍内面之間隔、及閥體15之阻塞部15a與閥汽缸12之軸孔 12a周圍内面間之間隔相互連通而構成。該内部空間之容積 依閥之開閉而增減’但該空間本身無關之開閉均經常存 在0 在閥汽缸12形成有使軸孔12a連通於外侧的内侧貫通孔 12e’並在其外周形成有内側貫通孔Ue呈開口的中間凹溝 12f。該中間凹溝i2f在圖示例中，為依軸線圍繞外周面一 周的環狀凹溝。又，在主構造部11A形成使凹孔lu内外 相連通的外侧貫通孔Uj(參照圖2)，而該外側貫通孔叫連 通於上述中間凹溝12f。藉此，上述内部空間經過由上述内 侧貫通孔12e、中間凹溝12f及外側貫通孔⑴構成的通氣 路徑而連通於外部4外，當構成該通氣路徑時，亦可取代 形成在閥汽紅12#中間凹溝12f，改為在凹孔…之内面上 形成連通於_貫通孔12e的其他中間凹溝。 此處 ㈣貝通孔U朝設置在上述阻塞部…與閥汽叙 12周圍内面間的間隔内呈開口。因此，上述内部空間經由 朝該間隔呈開口的上述通氣路徑而與外部相麵。 處汽缸12内朝圖示上方延伸，並在其一 處汉置有朝外側伸出的保持部16。該保持部 f种n峨㈣等梅件㈣成心2 之上部設置從側方朝凹孔】】&内伸出的袖* Μ圓示例〜之伸出構件)，並在上述保持部16與;The gas supply valve 10 has a casing 11 made of metal, synthetic resin or the like. The casing 11 is provided with a main structure portion 11A and an extension portion 11B, and the main structure portion ΠΑ is provided with a cylindrical recessed hole 11a, and the extension portion 11β is provided. The main structure portion 11A is formed in a beam shape extending linearly in the lateral direction, and the distal end portion is provided with a fixing portion lib for fixing a piezoelectric actuator to be described later. A gas guiding path llc that communicates with the above-described recessed hole 11a is formed at the bottom of the main structural portion 11A 098119672 9 201009225. The gas introduction path lie passes through the inside of the gas introduction portion lid which protrudes upward from the bottom surface of the recessed hole 11a toward the upper side of the drawing, and has an introduction opening lle which is open at the front end (the upper end of the drawing) of the gas introduction portion Ud. The front end of the gas introduction portion 11d is tapered (push-up shape). The gas guiding portion 11d is cylindrical (front end _ cone or conical ladder) in the illustrated example, but is not particularly limited, and may be any shape such as a prismatic shape. In the recessed hole 11a, a cylindrical cylindrical valve cylinder 12 having a shaft hole 12a penetrating in the vertical direction is shown. The valve cylinder 12 is connected to the main structure by a sealing material 13 such as a 〇-shaped ring housed in the upper annular groove. Part ι1 构成 constitutes airtight. Further, the valve > the outer periphery of the flying cylinder 12 is provided with a recessed portion (or a groove) ub, and is fixed to the main structural portion by a fixing screw 14 which is screwed into the side screw hole Ilf formed at the side portion of the main structural portion 11A. 11A remains fixed. The lower end of the shaft hole 12a of the valve cylinder 12 receives the gas introduction portion 11d with a gap therebetween, thereby providing a space along the entire circumference between the gas introduction portion lid and the inner surface of the shaft hole 12a. Further, the valve cylinder 12 is provided with a horizontal hole 12c' that communicates with the shaft hole 12a and penetrates the inside and the outside, and the horizontal hole i2c communicates with the gas outlet hole 11g provided in the main structure portion ha, and the gas is constituted by the same. Export the path. The outlet opening 12d of the gas discharge path is constituted by an opening inside the horizontal hole 12c of the valve cylinder 12. The lead-out opening 12d opens the opening position of the opening lie 098119672 10 201009225 in the direction orthogonal to the moving direction of the blocking portion 15a (the axial direction of the valve cylinder 12). In the case of the figure (4), the position of the opening seen in the moving direction of the guiding opening Ue and the position of the outer edge of the leading opening (3) as seen along the moving direction are presented (see also the broken line of Fig. 1). However, as long as the position of the guide opening... as seen in the above-mentioned moving direction is produced, it can be obtained by π i2dm in the same direction of movement and direction. According to this, since the opening σ position relative to the internal space is 5, the opening position of the guide opening is arranged in a direction orthogonal to the moving direction of the blocking portion, so that the locking portion is introduced into the opening even when the opening is opened. Since the movement stroke is small, the introduction opening to the outlet opening is not blocked by the closing portion or the like, and the gas can be directly circulated, so that the ventilation resistance can be reduced, and the timing of supplying the gas can be started earlier. • The valve body 15 is inserted into the bore 12a, and the valve body 15 is slidably disposed in the shaft hole i2a and the valve cylinder 12 in the form of a wire. In the inner end portion of the body I5, in the example of the figure, a body made of a soft resin material or the like is fixed to the body of the valve body ls. The inner end portion constitutes an obstruction portion that is in a closed state by abutting against the above-described guide opening π lle. The body is in close contact with the shaft hole 12a of the valve cylinder 12, and is configured to be slidable in a state of ensuring airtightness, and the blocking portion 15a at the inner end is configured to have a diameter contraction and a space between the shaft hole 12a and the shaft hole 12a. The sample protrudes toward the introduction opening lle. In the case of the example, the blocking portion 15a is spaced apart from the inner surface around the shaft hole 12a_ of the valve cylinder 12 along the entire circumference. In the valve structure described above, the internal space formed between the introduction opening lle and the outlet opening 12d is separated from the inner surface of the shaft hole 12a of the valve cylinder 12 by the circumference 098119672 11 201009225, and the blocking portion 15a of the valve body 15 is formed. It is configured to communicate with the space between the inner faces of the shaft holes 12a of the valve cylinder 12. The volume of the internal space is increased or decreased depending on the opening and closing of the valve. However, the opening and closing of the space itself is often zero. The valve cylinder 12 has an inner through hole 12e' in which the shaft hole 12a communicates with the outside, and an inner side is formed on the outer circumference. The through hole Ue is an intermediate groove 12f that is open. In the illustrated example, the intermediate groove i2f is an annular groove that is circumferentially surrounded by the outer peripheral surface by an axis. Further, the main structure portion 11A is formed with an outer through hole Uj (see Fig. 2) that communicates the inside and outside of the recess hole lu, and the outer through hole is connected to the intermediate groove 12f. Thereby, the internal space communicates with the outside 4 through a ventilation path formed by the inner through hole 12e, the intermediate groove 12f, and the outer through hole (1), and when the air passage is formed, it may be replaced by a valve steam red 12 #中凹沟12f, instead, another intermediate groove that communicates with the through hole 12e is formed on the inner surface of the recessed hole. Here, (4) the beacon hole U is opened in the space between the above-mentioned blocking portion and the inner surface around the valve cylinder 12. Therefore, the internal space faces the outside via the ventilation path that opens toward the space. The inside of the cylinder 12 extends upwardly from the figure, and a holding portion 16 projecting outward is provided at one of the places. The holding portion f is a kind of n (four) and the like, and the upper part of the center 2 is provided with a sleeve extending from the side toward the recessed hole, and the sleeve is extended in the above-mentioned holding portion 16;
098119672 T 18 201009225 P間配置線圈彈簧等之彈性構件18。該彈性構件 為朝閥閉鎖_ 万向（圖不下方，即上述閉鎖部15a閉鎖導入 . 之方向）賦予閥體15勢能的賦予勢能手段。閥體15 • 2外端°M5b通過設置在伸出部17之開口部17a而朝上方 大出於外端部15b卡合有從侧方延伸出的壓電致動器19 之驅動部19a。 e 壓電致動器19包含有由金屬等構成的彈性板19A、及接 口於該彈性板19A表背面的壓電體層19B、19C，藉由對未 圖示之表背面電極施加電壓，壓電體⑽、况構成為與彈 性板19A -起朝圖示上下方向產生撓曲。在圖示例中，髮 電致動器19具有雙壓電晶片型之板狀構造，但可為僅具有 壓電體層19B或19C任—者的單廢電晶片型板狀構造，更 =一步亦可具有將壓電體層與電極層交錯積層的積層型構 ❿ Μ電致動㈣19之基端部m固定於安裝在延長部】1 固定部位m的固定構件21上。在圖示例中，固 藉由雜2WWb。岐财^從相對固 定部位仙之安裝部分伸出於形成在固定部位m表面之= 部⑽上的態樣下進行固定，在伸出於該凹溝m上的部Γ f在與安裝構件23間祕上述基端部〗外。固定構件 安裝構件23藉由螺栓24央祕端部19b而加以固定。固1、 部位；Hb具有連通於上述凹溝nh的貫通螺絲孔⑴，在ς 098119672 13 201009225 貫通螺絲孔lii中螺入固定螺絲25，固定螺絲 下方(朝凹部lib内突出）抵接支撐上述固定構件25之前端從 藉由調整Μ螺絲25之位置，可在上述二溝^ 21。而且， 構件之上下值置，因此，構成為可調整壓電致調整固定 上下方向之安裝位置(正確而言為上 動器19 裝角度)。 白之讀位置及安 壓電致動器19在基端部19b固定於固定部位叫 下，其前端之驅動部19a連接於閥體15，藉由 的狀態 與基端部19 b間之撓曲變形，構成為可朝轴線方^ 在如上所構成的本實施形態中，於壓電致動器19未 動作的狀態（未通電狀態)下，_ 15㈣性構件18 力朝下方移動，阻塞部15a閉鎖導入開口 lle，因此間成閉 鎖狀態。另-方面，壓電致動器19產生動作(通電）而朝上 方撓曲，藉此閥體15反抗彈性構件18之彈性力而朝上方移 動，閥成為開放狀態。因此，藉由對上述氣體導入路徑Uc 供應壓縮空氣等之經加壓鐘，當閥朗放狀態，則可從氣 體導出孔llg(即氣體導出路徑)釋放出加壓氣體。 在閥體15朝上方移動而閥成開放狀態的情況下，從導入 開口 lie流入的氣體會通過内部空間而從導出開口 12(1出 去，但當内部空間的氣流速度提高則會發生負壓，因此閥體 15被吸弓丨至下方，有對壓電致動器19施加負載的可能性。 098119672 14 201009225 然而，在本實施形態中，閥成開放狀態下，内部空間經由上 述通氣路徑而與外部相連通，因此内部空間中所產生的負壓 透過經由通氣路徑流入的外氣而緩和，可減輕對壓電致動器 19施加的負載。因此，即使在提高供應侧壓力以增加自閥 所釋放的氣體量的情況下，亦可防止因上述負壓所造成的供 應不良、或壓電致動器19之破損等。 又，藉由緩和上述負壓而可減輕壓電致動器的負載，因此 〇 可避免壓電致動器之大型化，又亦可避免因加大内部空間之 氣體流通剖面以增加釋放自閥之氣體量所導致閥構造之大 型化，因此可使氣體供給閥小型化，結果，可將閥配置於更 靠近氣體供應目標的位置處，因而可減輕開始及停止供應氣 體的時序延遲。 本實施形態中，尤其透過彈性構件18之彈性力使閥體15 之阻塞部15a抵接於導入開口 lie，而使閥成為閉鎖狀態， # 因此即使提高供應侧壓力亦不會對壓電致動器19施加負 載，可防止壓電致動器19遭受損傷，亦可避免壓電致動器 19之大型化。 再者，本實施形態中，上述通氣路徑無關閥之開閉狀態均 ，構成為經常使其内部空間與外部相連通。由此，如上述，當 _ 閥處在開放狀態時，不僅可緩和内部空間之負壓且可迅速開 始供給氣體，在閥閉鎖時亦可將内部空間及導出開口 12d 側之壓力經由通氣路徑釋出至外部，因而亦可更迅速地停止 098119672 15 201009225 供應氣體。 更進步，本實施形態中，由於通氣路徑開口於閥體15 之阻塞。卩15a朗汽缸12之周圍㈣間關隔無關間之 開閉狀態’閥内部經常經由通氣路徑而與外部相連。此外， =開放時，於形成在導人開口 He與導出開π 12d間之内 «Ρ二間有發生負壓之情況時，該内部空間受供應來自阻塞部 15a側(周1|)之外氣’因此具有可有效減輕閥體Μ起因該 壓所產生之吸弓丨力的優點。 另外:本實施形態中，由於彈性構件18朝閥成閉鎖狀態 的方向賦予閥體15勢能’#壓電致動器19未產生動作時則 構成閉鎖狀態、即構成常__態。此職在於，在通常 使用態樣下初期狀態最好為閉鎖狀態，同時如上述，藉2 =件18之彈性力按愿供應侧壓力而亦可減輕施:至壓 電致動器19的負裁。X . ^ ^ 貝戰 由於為常閉型，當閥成閉銷妝能 時可以彈性構件18之彈性力使閥體迅速產生動Γ: 具有可大幅提高停止供應氣趙之響應性的優點二= 接受各種不利點，將壓電致 ，，、右了 位置）設^㈣㈣料 :;;r㈣構成為 另外’本實施形態午維無特別意圖， 造部11A與閥汽缸12繞舳 7褥成為使主構 嗓轴線之角度變化。此情況下，由於 098119672 % 16 201009225 沿内侧貫通孔12e之外側開口、與外侧貫通孔Uj之内侧開 口間凹溝12f的距離產生變化，而使通氣路徑之路徑長產生 變化，因此可輕易地調整通氣阻力。此處，藉由將凹部l2b 設為凹溝狀等，而可以固定螺絲14在任意角度位置處固定 閥汽缸12。 其次，參照圖4及圖5,說明本發明第2實施形態之氣體 供給閥10’。圖4係表示第2實施形態内部構造之概略縱剖 鲁圖，圖5係表示與第2實施形態圖4相正交剖面之概略縱剖 圖（圖4之V-V線剖面箭視圖）。另外，第2實施形態之概略 橫剖圖與圖3大致共通。又，第2實施形態中，就與第工 實施形態共通的部分賦予相同元件符號，而省略該等的說 明。 該第2實施形態之氣體供給閥1〇，中，取代第丨實施形態 之彈性構件18，改為設置朝閥成開放狀態之方向賦予閥體 蠹I5’勢能而作為賦予勢能手段的彈性構件18,。該彈性構件 18’被配置於主構造部11A之凹孔Ua底部與閥體15，之閉鎖 部15a'間，並產生將閥體15，朝圖示上方上推的作用。因此， 該第2實施形態中，當壓電致動器19未產生動作的情況下， • 由於以彈性構件18,之彈性力將閥體15，上推而使閥成開放 狀態，因而成為常開型閥。在本實施形態中，雖藉由壓電致 動器19之動作使閥抵抗彈性構件18，之彈性力’而成閉鎖狀 態，但在閥成開放狀態時可藉由彈性構件18，之彈性力更迅 098119672 17 201009225 速地開始供應氣體，因此具有大幅提高開始供應氣體時之響 應速度的優點。 再者，該第2實施形態中，使壓電致動器19之驅動部19a 抵接於閥體15,之外端部15b'端面（圖示上面）。原因在於， 本實施形態中，由於如上述藉由彈性構件18,朝閥成開放狀 態方向賦予閥體15，勢能，因此壓電致動器19之驅動部19a 成為承受自閥體15,經常朝圖示上方之應力的狀態，因而不 必將驅動部19a固定於闕體15’。然而，亦可將驅動部 黏著固定於閥體15，。如此藉由僅使驅動部19a相對閥體15, 抵接’可防止壓電致動器19承受自閥體15除軸線方向外之 其他方向應力。 另外，本實施形態中，作為閥體限制手段的限制部（圖示 例中為限制構件㈣朝閥體15，之外周伸出。該限_ 16，透 過使闕體㈣，上方突出必要以上而防止電 19造成損傷。 €腳° 上述各實施形態中，設置有朝移動方 予閥體15勢能的雜構件(彈簧），但亦開閉方向)賦 彈性構件。例如亦可在實施形態中，省=成為不設置該 取而代之構成為在閥閉鎖時由壓電致動3| 19 構件18， 朝下方按壓難。此情況下，例如可在壓 作部l9a 驅動狀態時，構成為動作部19a朝下方按壓間動器b為# 閉鎖’又’亦可構成為對壓電致動器19通電發15而牌問 098119672 ’ ’鵰動力 201009225 使動作部19a按壓閥體15的狀態。不管何種情況，藉由解 除對上述閥體15之按壓狀態，閥體15由氣體之供應壓進行 移動’閥成為開放狀態。此時，以壓電致動器19之驅動力’ 使動作部19a朝開閥方向變形而將閥開放，藉此可更高速供 應氣體’可提早開始供應氣體之時序。 其次’說明將上述各實施形態使用於零件搬送裝置之零件 峰選部例。圖6為包含上述各實施形態之氣體供給閥1〇、 ❹098119672 T 18 201009225 An elastic member 18 such as a coil spring is disposed between P. The elastic member is a potential energy imparting means for imparting potential energy to the valve body 15 toward the valve lock _ universal direction (the direction in which the lock portion 15a is closed and introduced). The valve body 15 • 2 outer end ° M5b is provided upward in the opening portion 17a of the extension portion 17 and the drive portion 19a of the piezoelectric actuator 19 extending from the side is engaged with the outer end portion 15b. e Piezoelectric actuator 19 includes an elastic plate 19A made of metal or the like, and piezoelectric layers 19B and 19C which are connected to the front and back surfaces of the elastic plate 19A, and voltage is applied to the front and back electrodes (not shown). The body (10) is configured to be deflected in the vertical direction of the drawing from the elastic plate 19A. In the illustrated example, the power generating actuator 19 has a bimorph type plate-like configuration, but may be a single waste electric wafer type plate-like structure having only the piezoelectric body layer 19B or 19C, and more The base end portion m of the laminated structure in which the piezoelectric layer and the electrode layer are alternately laminated may be fixed to the fixing member 21 attached to the fixing portion m of the extension portion 1 . In the example of the figure, the 2WWb is used. The ^ ^ ^ is fixed from the mounting portion of the fixed portion to the portion (10) formed on the surface of the fixed portion m, and the portion 伸出 f projecting from the groove m is in the mounting member 23 The secret is above the base end. Fixing member The mounting member 23 is fixed by the end portion 19b of the bolt 24. The solid part 1 has a through screw hole (1) that communicates with the groove nh, and the fixing screw 25 is screwed into the screw hole lii in the ς 119119672 13 201009225, and the fixing screw (projecting toward the concave portion lib) abuts and supports the above fixing. The front end of the member 25 can be in the above-mentioned two grooves 21 by adjusting the position of the boring screw 25. Further, since the member is placed above the lower value, it is configured to adjust the mounting position in which the piezoelectric adjustment is fixed in the up and down direction (correctly, the angle of the upper actuator 19 is mounted). The white reading position and the piezoelectric actuator 19 are fixed to the fixed portion at the proximal end portion 19b, and the driving portion 19a at the distal end thereof is connected to the valve body 15 by the deflection between the state and the proximal end portion 19b. In the present embodiment, which is configured as described above, in the state in which the piezoelectric actuator 19 is not operated (non-energized state), the _ 15 (four) member 18 is moved downward, and the blocking portion is configured. The 15a locks the introduction opening lle, so that the lock is in a locked state. On the other hand, the piezoelectric actuator 19 is operated (energized) and deflected upward, whereby the valve body 15 moves upward against the elastic force of the elastic member 18, and the valve is opened. Therefore, by supplying the pressurized gas such as compressed air to the gas introduction path Uc, when the valve is in the horizontal state, the pressurized gas can be released from the gas discharge hole 11g (i.e., the gas discharge path). When the valve body 15 is moved upward and the valve is opened, the gas flowing in from the introduction opening lie passes through the internal space and exits from the outlet opening 12 (1), but when the airflow speed in the internal space is increased, a negative pressure occurs. Therefore, the valve body 15 is sucked down to the lower side, and there is a possibility that a load is applied to the piezoelectric actuator 19. 098119672 14 201009225 However, in the present embodiment, in the open state of the valve, the internal space is passed through the ventilation path. Since the external phase is connected, the negative pressure generated in the internal space is alleviated by the external air flowing in through the ventilation path, and the load applied to the piezoelectric actuator 19 can be alleviated. Therefore, even if the supply side pressure is increased to increase the self-valve In the case of the amount of gas released, it is possible to prevent supply failure due to the negative pressure or damage of the piezoelectric actuator 19. The load of the piezoelectric actuator can be reduced by mitigating the negative pressure. Therefore, the size of the piezoelectric actuator can be prevented from being increased, and the valve structure can be prevented from being increased by increasing the gas flow profile of the internal space to increase the amount of gas released from the valve. Therefore, the gas supply valve can be miniaturized, and as a result, the valve can be disposed at a position closer to the gas supply target, thereby reducing the timing delay of starting and stopping the supply of the gas. In the present embodiment, particularly, the elastic member 18 is The elastic force causes the blocking portion 15a of the valve body 15 to abut against the introduction opening lie, and the valve is in a locked state, so that even if the supply side pressure is increased, no load is applied to the piezoelectric actuator 19, and piezoelectric actuation can be prevented. Further, in the present embodiment, the opening and closing state of the vent path-independent valve is configured to constantly connect the internal space to the outside. As described above, when the valve is in the open state, not only the negative pressure of the internal space can be alleviated, but also the supply of gas can be started quickly, and when the valve is locked, the pressure of the internal space and the outlet opening 12d side can be released to the ventilation path. Externally, it is also possible to stop 098119672 15 201009225 more quickly. Supplying more gas, in this embodiment, the ventilation path is blocked by the valve body 15卩15a The circumference of the cylinder 12 (4) is independent of the opening and closing state. The inside of the valve is often connected to the outside via the ventilation path. In addition, when it is open, it is formed between the guide opening He and the outlet opening π 12d « When there is a negative pressure in the second chamber, the internal space is supplied with air from the side of the blocking portion 15a (week 1|). Therefore, it has the advantage of effectively reducing the suction force generated by the valve body due to the pressure. Further, in the present embodiment, the elastic member 18 is provided with the potential energy of the valve body 15 in the direction in which the valve is locked. When the piezoelectric actuator 19 does not operate, the locked state is formed, that is, the normal state is formed. It is preferable that the initial state is a locked state in the normal use state, and as described above, the biasing force is applied to the piezoelectric actuator 19 by the elastic force of the member member 2 to the supply side pressure. X . ^ ^ Because of the normally closed type, when the valve is closed, the elastic force of the elastic member 18 can make the valve body quickly move: It has the advantage of greatly improving the responsiveness of stopping the supply of gas. Accepting various disadvantages, the piezoelectric (,), right position is set to ^ (4) (four) material:;; r (four) is configured as another 'this embodiment of the afternoon dimension has no special intention, the manufacturing part 11A and the valve cylinder 12 around 7舳The angle of the main 嗓 axis changes. In this case, since 098119672% 16 201009225 changes the distance between the outer side opening of the inner through hole 12e and the inner opening gap 12f of the outer through hole Uj, the path length of the air passage is changed, so that it can be easily adjusted. Ventilation resistance. Here, by fixing the recessed portion l2b to a groove shape or the like, the fixing screw 12 can fix the valve cylinder 12 at an arbitrary angular position. Next, a gas supply valve 10' according to a second embodiment of the present invention will be described with reference to Figs. 4 and 5 . Fig. 4 is a schematic longitudinal cross-sectional view showing the internal structure of the second embodiment, and Fig. 5 is a schematic longitudinal cross-sectional view showing a cross section orthogonal to Fig. 4 of the second embodiment (a cross-sectional view taken along the line V-V in Fig. 4). Further, the schematic cross-sectional view of the second embodiment is substantially the same as that of Fig. 3. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. In the gas supply valve 1A of the second embodiment, instead of the elastic member 18 of the second embodiment, the elastic member 18 is provided as a means for imparting a potential energy to the valve body 蠹I5' in a direction in which the valve is opened. ,. The elastic member 18' is disposed between the bottom of the recess Ua of the main structural portion 11A and the lock portion 15a' of the valve body 15, and acts to push the valve body 15 upward. Therefore, in the second embodiment, when the piezoelectric actuator 19 does not operate, the valve body 15 is pushed up by the elastic force of the elastic member 18, and the valve is opened. Open type valve. In the present embodiment, the elastic force of the valve against the elastic member 18 is locked by the action of the piezoelectric actuator 19, but the elastic force can be exerted by the elastic member 18 when the valve is in the open state. More quickly 098119672 17 201009225 The gas supply starts quickly, so it has the advantage of greatly increasing the response speed when starting the supply of gas. In the second embodiment, the driving portion 19a of the piezoelectric actuator 19 is brought into contact with the valve body 15 and the end surface (the upper surface of the outer end portion 15b'). The reason is that, in the present embodiment, since the valve body 15 is provided in the open state of the valve by the elastic member 18 as described above, the driving force 19a of the piezoelectric actuator 19 is received from the valve body 15, often toward The state of the stress above is illustrated, so that it is not necessary to fix the driving portion 19a to the body 15'. However, the driving portion may be adhered and fixed to the valve body 15. Thus, by merely bringing the driving portion 19a into contact with the valve body 15, the piezoelectric actuator 19 can be prevented from being subjected to stress in the direction other than the axial direction of the valve body 15. Further, in the present embodiment, the restricting portion (four) of the valve body restricting means protrudes toward the outer periphery of the valve body 15 in the illustrated example. The limit _16 is transmitted through the upper body (four). The electric 19 is prevented from being damaged. In the above embodiments, the miscellaneous members (springs) that move toward the valve body 15 are provided, but the elastic members are also provided in the opening and closing directions. For example, in the embodiment, it is also possible to eliminate the need to provide this. Instead, the piezoelectric actuator 3|19 member 18 is pressed when the valve is closed, and it is difficult to press it downward. In this case, for example, when the pressing portion 19a is in the driving state, the operating portion 19a is pressed downward to press the intermediate member b to be #locked and "configured" to energize the piezoelectric actuator 19 by 15 098119672 ' 'Carving power 201009225 The state in which the operating portion 19a is pressed against the valve body 15. In either case, by releasing the pressing state of the valve body 15, the valve body 15 is moved by the supply pressure of the gas, and the valve is opened. At this time, the operating portion 19a is deformed in the valve opening direction by the driving force of the piezoelectric actuator 19 to open the valve, whereby the gas can be supplied at a higher speed, and the timing of supplying the gas can be started earlier. Next, a description will be given of an example of a component peak selection unit used in the component conveying device in each of the above embodiments. Fig. 6 is a view showing a gas supply valve 1〇, ❹ including the above embodiments.
10的零件搬送裝置1概略部分說明圖。該零件搬送裝置1 中，在加振機構2上所固定的振動體3，固定具有零件搬送 路徑4a的搬送體4。作為加振機構2有使用電磁螺管的電 磁振動機、或使用壓電致動器的壓電振動機等，只要在搬送 方向（與圖6紙面正交之方向）產生既定頻率（在搬送電子零 件等較小搬送物時，通常為50〜300Hz程度）的往復振動，則 其不受特別限定。 在零件4選部4X設置有感測器（光檢測器等)4c，用以判 斷零件搬送路徑4a上的零件p有無H姿勢等，並設 置有根據該感測器4e之檢測信號而執行判斷㈣斷部4d。 判斷部如在零件篩選部4X卜判別氣流是否有吹附於零 件搬送路徑4a上之零件p、切時序之正確料，而對上 述氣體供給閥1G、1G，進行控制。具體而言，作為該控制内 谷，可有是否對上述壓電致動器19傳送驅動信號、或決定 傳送部種_信號。職流之切基於將零件p從零件搬送 098119672 201009225 路徑如上騎、使零件搬送路㈣上之零件而改變 ，勢:或使零件搬送路彳f4a上之零件卩㈣至其他搬送路 徑上等目的而進行。 對零件搬送裝置卜㈣縮機5等經由供氣管6 縮空氣’此經由流量娜器7而供應至上錢體供給閥1〇、 10’之氣體導人部。而且，氣體供给閥1G、1G•之氣體導出部 經由供氣管8連接於設在上述搬送體4的供氣路徑牝。供 氣路彳b在上述零件搬送路控如所通過的零件篩選部 中朝零件搬送路# 4a之搬送面—部分開口。而且，藉由使 氣體供給閥1G、1G，成為狀態，可對在零件搬送路徑如 上搬送而來的零件p吹附氣流。 在零件搬送路徑如上，當高速地進行零件搬送時，因為 多數零件P相連進行搬送，因此必須在零件筛選部4X中以 高速且高響應速度進行上述氣流吹附之開始及停止。例如， 當氣流吹附的開始較延遲，則無法對特定零件p吹附氣流， 當氣流吹附的停止較延遲’則會連特定零件P以外的其他零 件P亦併被吹附氣流，導致零件篩選精度惡化，除對零件 供應造成致命性阻礙之外，亦會使搬送效率降低。 上述各實施形態的氣體供給閥10、10,中，關於氣體供給 閥10、10’本身構造，藉由在閥開放狀態下使内部空間經由 通氣路徑而與外部相連通，可缓和内部空間的負壓產生，可 使氣體供應效率化，使閥構造小型化，同時可迅速地開始氣 098119672 20 201009225 流吹附。因此，由於閥構造的小型化，而可設置於靠近零件 篩選部4X的地方，同時可使閥功能提升，藉此在零件搬送 路徑4a上可降低開始及停止吹附氣流之延遲，可確保對零 件P篩選的高響應性。 本發明中，由於使用壓電致動器，可達習知電磁閥等的十 分之一以下（數msec、或以下）之高速響應，同時根據具有通 氣路徑的閥構造，可減輕氣體開始供應及停止供應的延遲， ❹因而在氣體供應切換時可實現明顯較高的實質響應性，極適 用為對零件搬送裝置的零件筛選部供應氣體的氣體供給闕。 再者’本發明的氣體供給閥與零件搬送裝置不只受限於上 述圖示例’舉凡在不脫離本發明主旨的範圍内當然均可進行 各種變更。例如，上述壓電致動器19構成為具有板狀構造， 朝其延伸方向撓曲變形’利用前端之驅動部19a朝軸線方向 驅動閥體15，但作為壓電致動器，不受限於上述構造邡 參可採用如使塊狀壓電體於厚度方向變形而朝軸線方向挨麈 閥體15之構造等之各種構造。 【圖式簡單說明】 圖1為氣體供給閥第1實施形態之概略縱剖圖。 圖2為沿第1實施形態圖1之11_„線之概略剖面箭視圖。 圖3為沿第1實施形態圖！之m_m線之概略剖面箭視圖。 圖4為氣體供給閥第2實施形態之概略縱剖圖。 圖5為沿第2實施形態圖4之V-V線之概略剖面箭視蘭。 098119672 21 201009225 圖6為模式性表示零件搬送裝置構成之概略構成說明圖。 【主要元件符號說明】 1 零件搬送裝置 2 加振機構 3 振動體 4 搬送體 4a 零件搬送路徑 4b 供氣路徑 4c 感測器 4d 判斷部 4X 零件篩選部 5 壓縮機 6、8 供氣管 7 流量調整器 10、10， 氣體供給閥 11 外殼 11A 主構造部 11a 凹孔 lib 固定部位 11B 延長部 11c 氣體導入路徑 lid 氣體導入部 098119672 22 201009225A schematic diagram of a part of the component transporting device 1 of FIG. In the component transporting apparatus 1, the vibrating body 3 fixed to the vibrating mechanism 2 is fixed to the transporting body 4 having the component transporting path 4a. The vibration oscillating mechanism 2 includes an electromagnetic vibrator using an electromagnetic solenoid or a piezoelectric vibrator using a piezoelectric actuator, and the like, and a predetermined frequency is generated in the transport direction (a direction orthogonal to the plane of the drawing of FIG. 6). In the case of a small conveyance such as a component, the reciprocating vibration is usually 50 to 300 Hz, and is not particularly limited. A sensor (photodetector or the like) 4c is provided in the component 4 selection portion 4X for determining whether or not the component p on the component transport path 4a has an H posture or the like, and is provided with determination based on the detection signal of the sensor 4e. (4) Broken part 4d. The determination unit controls the gas supply valves 1G and 1G in the component screening unit 4X to determine whether or not the airflow has the components p and the cutting timing which are blown on the component transport path 4a. Specifically, as the control valley, whether or not the drive signal is transmitted to the piezoelectric actuator 19 or the transmission unit type signal is determined. The job flow is based on the transfer of the part p from the part 098119672 201009225. The path is as follows, and the parts on the part transport path (4) are changed. The potential is: or the part is transported to the part 四 (4) on the path f4a to other transport paths. get on. The component conveying device (4) the retracting machine 5 or the like is condensed by the air supply pipe 6 and is supplied to the gas guiding portion of the upper body supply valve 1 〇, 10' via the flow damper 7. Further, the gas discharge portions of the gas supply valves 1G and 1G are connected to the supply path 牝 provided in the transfer body 4 via the air supply pipe 8. The air supply path 彳b is partially opened to the transport surface of the component transport path #4a in the component screening unit through which the above-described component transport path is passed. In addition, the gas supply valves 1G and 1G are brought into a state, and the airflow can be blown to the component p conveyed on the component transport path. In the component transport path, as described above, when the parts are transported at a high speed, since the plurality of parts P are connected and transported, it is necessary to start and stop the air flow blowing at the high speed and high response speed in the part screening unit 4X. For example, when the start of the airflow is delayed, the airflow cannot be blown to the specific part p, and when the stop of the airflow is delayed, the other parts P other than the specific part P are also blown with the airflow, resulting in parts. The deterioration of the screening accuracy, in addition to the fatal hindrance to the supply of parts, will also reduce the efficiency of the transfer. In the gas supply valves 10 and 10 of the above-described embodiments, the gas supply valves 10 and 10' have their own structure, and the internal space is communicated with the outside through the air passage in the valve open state, thereby alleviating the negative of the internal space. The pressure generation can make the gas supply efficient, and the valve structure can be miniaturized, and at the same time, the gas 098119672 20 201009225 can be quickly started. Therefore, since the valve structure can be miniaturized, it can be disposed close to the part screening portion 4X, and at the same time, the valve function can be improved, whereby the delay in starting and stopping the blowing air flow can be reduced on the component conveying path 4a, and the pair can be ensured. High responsiveness of part P screening. In the present invention, since a piezoelectric actuator is used, a high-speed response of less than one tenth (several msec or less) of a conventional solenoid valve or the like can be achieved, and at the same time, according to a valve structure having a ventilation path, gas supply can be reduced. And the delay in stopping the supply, so that a substantially higher substantial responsiveness can be achieved when the gas supply is switched, and it is extremely suitable as a gas supply port for supplying gas to the parts screening portion of the parts conveying device. Further, the gas supply valve and the component conveying device of the present invention are not limited to the above-described examples, and various modifications can be made without departing from the scope of the invention. For example, the piezoelectric actuator 19 is configured to have a plate-like structure and is flexibly deformed in the extending direction. The valve body 15 is driven in the axial direction by the driving portion 19a at the distal end. However, the piezoelectric actuator is not limited to the piezoelectric actuator. The structure of the above-described structure can adopt various structures such as a structure in which the bulk piezoelectric body is deformed in the thickness direction and the valve body 15 is bent in the axial direction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic longitudinal cross-sectional view showing a gas supply valve according to a first embodiment. Fig. 2 is a schematic cross-sectional view taken along line 11 of Fig. 1 of the first embodiment. Fig. 3 is a schematic cross-sectional view taken along line m_m of Fig. 1; Fig. 4 is a second embodiment of the gas supply valve. Fig. 5 is a schematic cross-sectional view of the VV line of Fig. 4 in the second embodiment. 098119672 21 201009225 Fig. 6 is a schematic view showing a schematic configuration of a component transport device. [Description of main component symbols] 1 Parts conveying device 2 Vibration absorbing mechanism 3 Vibrating body 4 Transporting body 4a Part transporting path 4b Air supply path 4c Sensor 4d Judging part 4X Part screening part 5 Compressor 6, 8 Air supply pipe 7 Flow regulator 10, 10, Gas Supply valve 11 housing 11A main structure portion 11a recess lib fixing portion 11B extension portion 11c gas introduction path lid gas introduction portion 098119672 22 201009225
lie 導入開口 Hg 氣體導出孔 llh、12b 凹部 lli 貫通螺絲孔 Hj 外側貫通孔 12 閥汽缸 12a 軸孔 12c 橫孔 12d 導出開口 12e 内側貫通孔 12f 中間凹溝 13 密封材 14、25 固定螺絲 15、15， 閥體 15a 阻塞部 15a' 閉鎖部 15b ' 15b' 外端部 15x 片材 16 保持部 16' 限制部 17 伸出部 17a 開口部 098119672 201009225 18、18， 彈性構件 19 壓電致動器 19A 彈性板 19a 驅動部 19b 基端部 19B、19C 壓電體層 21 固定構件 22、24 螺栓 23 安裝構件 P 零件 098119672Lie introduction opening Hg gas outlet hole llh, 12b concave portion lli through screw hole Hj outer through hole 12 valve cylinder 12a shaft hole 12c transverse hole 12d outlet opening 12e inner through hole 12f intermediate groove 13 sealing material 14, 25 fixing screw 15, 15 , valve body 15a blocking portion 15a' latching portion 15b' 15b' outer end portion 15x sheet 16 holding portion 16' restricting portion 17 projecting portion 17a opening portion 098119672 201009225 18, 18, elastic member 19 piezoelectric actuator 19A elastic Plate 19a Drive portion 19b Base end portion 19B, 19C Piezoelectric layer 21 Fixing member 22, 24 Bolt 23 Mounting member P Part 098119672