201003034 九、發明說明： 【發明所屬之技術領域】 發鴨關於—種厚度m紐方法，_是，-種且 有雙每射非接觸式之厚度測量系統及方法。該厚 2 一對雷射測量器用以測量-待測量物的厚度，且二I# 行度校正治具以分別產生—雷射訊號漂移ϋ 提ϊ測量補償值，並且加入制量物的厚度計算中以 【先前技術】 二般產業界可以_游標尺或職測微器來量測 ，這類工具需要直接地接觸待測量物，所以不適用於 表面為軟性材質或是移動中的待測量。 、 非，，，厚度*測純可以絲測量軸的制量物的 it,生材質的待測量物的厚度。在非接觸式厚 雷射㈣流1容鄉翻裝置或是渦電流 一雷射先感測裝置來作為測量感測器。前者的設備f 南’不符合成本效益；後者則是使用過程中合吝 田 移而導朗量絲不準 財會產生雷射訊號漂 純ί論使用那一種測量設備皆需要一個與待測量物平行的 然而無論是製造技術或組裝技術皆無法完全地使測量 ^備”待測量物完全平行’所⑽量所制的 ^;在環境溫度產生變化的情钉，機械峡架構會有相， =形，因此訊號會產生漂移誤差進而使厚度的測量結果不 先前技術所揭露之厚度測量設備存在 T U吏用渦電流電容感測裝置需高的設備成本 === b雷射感測II ’除了成本高之外更需進—步解決雷射訊號漂 201003034 ㈣_式_測系統 差，因《魏決各的成的熱變形誤 【發明内容】 、、則系ϋ 3主目的係在提供—種雙雷射非接觸式厚度量 物的=得二對，器掃描-移動中的待測量 度。 置訊號經叶鼻後可以獲知該待測量物的厚 =測量或機械組織 統俜本與功效，該雙雷射非接觸式厚度量測系 對可移動的雷射測量器；—厚度校正治具，其具有 理ί置，在，對雷射量測器的運動路徑中;一訊號處 ^声;目連接該對雷射測量器；如此該對雷射測量器對 訊號計算出一基準值對應該基準厚置度= 3測”對-待測量物的相對二表面進行掃描，其所= 2訊號絲準厚度_量峨比對，可以計算出該待測物的 且舌=用I段時間之後，該對雷射校測量器可以對厚度校正治 “，峨，該訊賴先前基準厚度的測量訊號 入、、a丨曰i可以獲知雷射訊號漂移的情形，並將漂移的修正量加 ’、’篁、、^果則可用以補償該待測量物的厚度測量值。 供平該對雷侧量^上配置—平行度校正治具，並提 十仃度誤差補償值，藉此解決構件安裝或環境溫度變化所造 6 201003034 成之機構架構不平行的問題’以提高測量的準確性。 平出較佳實施例 以下即依本發明的目的、功效及結構組態 並配合圖式詳細說明。 ~ 【實施方式】 關於本發明的測量原理，請參閱第i圖，當一雷射測量器 A對-，測量物B發出-測量光'私，且測量級經藉由 該待測量物B表面形成一反射光線L回到雷射測量器A，此 時反射光線L2的光強度可以轉換成一第一訊號值；當待量物b 與=電射測量A之間的距離改變，則測量光線Li經藉由該待 測量物B表面形成另一反射光線^回到雷射測量器A，此時 反射光線L3的光強度可以轉換成一第二訊號值；該第一訊號 值與該第二訊號值的訊號關係可以被換算成距離(厚度）。 根據前述原理，請參閱第2圖’本發明揭露一厚度測量系 統，係一機座10開設一貫穿構造的通道12用以供一待測量物 200(例如薄膜或板材)通過。 二線執13和14平行地配設在該通道12二侧。一驅動機 構15包含一馬達152驅動一傳動軸154，以及該傳動軸154 帶動二條時規皮帶156和158轉動。該驅動機構15配設在該 機座10上，其中該時規皮帶156和158分別平行該二線轨13 和14。 請參閱第2圖，一對雷射測量器20係包含一第一雷射測 量器21及一第二雷射測量器22。每一雷射測量器21或22皆 配置在一滑塊23和24上，該滑塊23和24分別結合該時規皮 帶156或158上及線執13和14 ;此外二雷射測量器21和22 彼此相對且對準於同一鉛直線。 一厚度校正治具30，係配置在該機座10上且位在該對雷 射測量器20的位移路徑中。該厚度校正治具30具有一第一測 7 201003034 量表面 31 . , . 量表面32之pg#一測1表面32。第一測量表面31與第二測 表面31盘笛曰的距離(厚度)能夠保持固定值。因此第一測量 |面Μ與弟二測量表面％之間的厚度可以絲為一基準厚 的片^ 斬I圖一平行度校正治具40係一具有反射能力 測量器2〗ί /測1器所構成；該片體42係固設於第一雷射 射測i器22 該測量器為第二雷射測量器22。該第二雷 回，二雷^趙42，且先線能夠反射 第二ili i【λ器上:側’而渦電流感測治具54 、J里器22且相對該渦電流感測器52。 治且mi’田由上可f該對雷射測量112〇與該厚度校正 正或5〇運作可以產生一平行度補償訊號’， ，電壓？。該厚度測量訊號被傳送到—訊號處理裝置 ϊίϊΐτ出—厚度值；該平行度補償訊號被傳送到 ^虎處裝經分析計算可以對應 請參閱第6圖，關於基準厚度的量測係藉一基 步驟7〇完成。該轉係第-雷侧量ϋ21料二雷射ς ’j 22移動且對準該厚度校正治具3Q的第—啦表面3ι 測量表面32。第一雷射測量器21可對第一測量表面y、二 一測量訊號(a〇);第二雷射測量器22可對第二測量表面 = 的一測量訊號(bG);將測量訊號(a〇, bG)傳送到訊號處理 ， 顯示），並經過分析及計算可以獲得該訊號值與厚 係，此時的厚度為基準厚度D〇。 ^崎應關 8 201003034 請參閱第7圖’關於制量物的厚度的量測係藉—待測量 物厚度掃描步驟80完成。該步驟係第一雷射測晋笛一 方向(即厚度方向_對二絲），並產生複數個測量 =(a bn) ’其中n>0。厚度測量訊號(an，bn)與基準厚度Do的 ^^^咖對’祕過適料鱗可崎到麟測量物 200的多處厚度測量值Dn。可以理解的是，可以進_步利用各 處厚度值計算出待測量物的平均厚度Dav。 8 ® ’ _雷射峨_境溫親化喊生訊號 j問f藉-雷射漂移校正步驟9〇來完成。該步驟係第一 測里益21與第二雷射測量器22經過一段使用時間後，再 度，治具3㈣所在處，並以第—雷射測量器 雷射測量器22對第一測量表面31及第二測量表面 =重新取得-厚度測量訊號(a，G，b，G)，此時的基準厚度不變。 tit訊號u處理裝置(未顯示)計算及比對先前的基準厚度的 =，bi) ’能夠制—訊號漂移補償值AS;重新啟動 旦Ιΐΐΐ度掃描步驟時’該訊號漂移補償值AS加入該待測 訊，bn)中’藉此於厚度計算步驟中修正該 量訊號及厚度。上述的雷射漂移校正步驟90係 了乂在測置過程中，依一定的周期自動執行。 9 ®，關於機械架構因組裝技術或環境溫度變化 驟ιοί誤差的補償問題，可以藉由一平行度誤差補償步 -雷射測1 IfΪΪ係執行待測量物厚度掃描之前，驅動第 程ί ^ 與第22砂娜。在位移過 的片測ί器22可以對配置在第—雷射測量器21 一側 換成一平度=號’並將每—減的峨值對應轉 資ϊ。ϋ差補償值叫，其中n>G，並形成一資料庫 厚声可^測量轉鱗糾’制量物的每—位置的測 X L虽地加入該平行度誤差補償值ΔΗη使測量厚度更 9 201003034 精準。 上述的平行度誤差補償步驟刚是以 補償值ΔΗη來加入測量厚度中，彳日=的千仃度誤差 不固定的，因此可以採用化有些時候是 請參閱第10圖，關於另一平行度誤罢 在執行待測量物，厚度测量的，係 器2i -側的渦電流感測器52可以對配置$第:雷射測量 -位置的峨職概成—卩時地將每 適當地加人厚度㈣值巾可將紙 一種本發明包含 系統計算出一基準厚度D〇;汛旒(a〇, b〇)，且經一訊號處理 掃描：T對雷射測量器移動且 訊號(an，bn)，其中n>〇 ; 士一表面，並產生複數個測量 量器^處理裝置接收該對雷射測 該基準厚度DG，經由計算且比對 位移以%，係該對雷射測量器 b，0)，經該訊號處理裝ϋ =取得一厚度測量訊號(a，0, 號(a〇, b〇)，得到對先前的基準厚度的測量訊 值AS加入該待測量二^^值处，並將該訊號漂移補償 測量物的測量訊號及厚产。又/ I矾號(an，bn)中，以修正該待 201003034 以及一平行度誤差補償步驟1〇〇或11()，其利用一平行度 ，正治具測量二個雷射測量器之間的平行度訊號，並經由該訊 號處^裝置計算以產生一平行度誤差補償值，該平行度誤 差補4員值用以加入該厚度計算步驟中修正該待測量物的測量 厚度。 、，上乃本發明之較佳實施例以及設計圖式，惟較佳實施例 ，及設計®式僅是糊說明，並_於關本發明技藝之權利 3、圍二凡以均等之技藝手段、*為下述「巾請專職圍」内容 斤涵盖之f利範圍而實施者’均不脫離本發明之範嘴而為申請 人之權利範圍。 【圖式簡單說明】 第1圖係本發明厚度測量之原理示意圖。 第2圖係本發明的結構組態示意圖。 第3圖係本發明之—平行度校正治具之轉及功示意圖。 第4圖係本發似—平行度校正治具之結構及工作示意圖。 ί作5用"4本=；騎轉各治狀齡與財計算之相 第6圖係本㈣之基準厚度難倾示意圖。 第7圖係本發明之铜量物厚度掃齡驟示意圖。 第8圖係本發明之雷射漂移校正示意圖。 第9圖係本㈣之—平行度縣娜倾示韻。 第1〇圖係本發明另一平行度誤差補償步驟示意圖。 第η圖係本發日職行非接觸式厚度制絲之方塊圖。 【主要7L件符號說明】 11201003034 IX. Description of the invention: [Technical field to which the invention pertains] The method for measuring the thickness of the duck is about the thickness of the m-new method, _ is, and there is a double-shot non-contact thickness measurement system and method. The thick 2 pair of laser measuring instruments are used to measure the thickness of the object to be measured, and the two I# row degree correcting jigs respectively generate a laser signal drift ϋ ϊ ϊ measurement compensation value, and the thickness of the added material is calculated. In the prior art, the two industries can measure with a vernier scale or a micrometer. These tools need to directly touch the object to be measured, so it is not suitable for the surface to be soft material or to be measured while moving. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, In the non-contact thick laser (four) flow 1 Rongxiang turn device or eddy current a laser first sensing device as a measurement sensor. The former equipment f South 'is not cost-effective; the latter is the use of the process of the combined field shift and the guide is not allowed to produce the laser signal. The use of that kind of measuring equipment requires a parallel with the object to be measured However, neither the manufacturing technology nor the assembly technology can completely make the measurement "the object to be measured completely parallel" (10); when the ambient temperature changes, the mechanical gorge will have a phase, = shape Therefore, the signal will produce drift error and thus the thickness measurement result is not disclosed by the prior art. The thickness measurement device has TU. The eddy current capacitance sensing device requires high equipment cost === b laser sensing II 'In addition to high cost In addition, it is necessary to further solve the problem of laser signal drifting 201003034 (4) _ type _ measuring system is poor, because "the heat deformation of the Wei dynasty" [invention content], then the system ϋ 3 main purpose is to provide - double The laser non-contact thickness gauge has two pairs, the device scans - the degree of measurement in the movement. After the leaf is passed through the leaf nose, the thickness of the object to be measured can be known as the measurement or mechanical organization and the effect. Double laser The non-contact thickness measuring system is for the movable laser measuring device; the thickness correction jig has a rational setting, and is in the moving path of the laser measuring device; For the laser measuring device; thus the pair of laser measuring devices calculate a reference value corresponding to the reference thickness = 3 measured" to - the opposite surface of the object to be measured is scanned, the = 2 signal wire thickness _ 峨 峨 , , , , 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌 舌, a丨曰i can know the situation of the laser signal drift, and add the correction amount of the drift to ', '篁, ^, fruit can be used to compensate the thickness measurement value of the object to be measured. The upper-parallel-correcting fixture and the ten-degree error compensation value are used to solve the problem that the component structure is not parallel due to the component installation or the ambient temperature change, so as to improve the accuracy of the measurement. The preferred embodiment is as follows according to the purpose and efficacy of the present invention. Structure configuration and detailed description with the drawings. ~ [Embodiment] Regarding the measurement principle of the present invention, please refer to the i-th diagram, when a laser measuring device A is -, the measuring object B emits - measuring light 'private, and measuring The stage passes through the surface of the object to be measured B to form a reflected light L back to the laser measuring device A. At this time, the light intensity of the reflected light L2 can be converted into a first signal value; when the object to be measured b and = the electric measurement A When the distance between the two changes, the measured light ray is formed by the surface of the object to be measured B to form another reflected light, and the light intensity of the reflected light L3 can be converted into a second signal value; The signal relationship between the first signal value and the second signal value can be converted into a distance (thickness). According to the foregoing principle, referring to FIG. 2, the present invention discloses a thickness measuring system, which is a structure in which a base 10 is opened. The passage 12 is for passage of a to-be-measured object 200 such as a film or a sheet. The two-wire holders 13 and 14 are disposed in parallel on the two sides of the channel 12. A drive mechanism 15 includes a motor 152 for driving a drive shaft 154, and the drive shaft 154 causes the two timing belts 156 and 158 to rotate. The drive mechanism 15 is disposed on the base 10, wherein the timing belts 156 and 158 are parallel to the two-track rails 13 and 14, respectively. Referring to Fig. 2, a pair of laser measuring devices 20 includes a first laser measuring device 21 and a second laser measuring device 22. Each of the laser measuring devices 21 or 22 is disposed on a slider 23 and 24 which respectively engages the timing belt 156 or 158 and the wires 13 and 14; in addition, the two laser measuring devices 21 And 22 are opposite each other and aligned to the same lead line. A thickness correcting jig 30 is disposed on the base 10 and in the displacement path of the pair of laser measuring devices 20. The thickness correcting jig 30 has a first measuring surface of the surface of the measuring surface 30. The distance (thickness) of the first measuring surface 31 from the second measuring surface 31 flute can be maintained at a fixed value. Therefore, the thickness between the first measurement | face and the second measurement surface % can be a reference thickness of the film ^ 斩 I Figure 1 parallelity correction fixture 40 is a reflection ability measuring device 2 〗 〖 The sheet body 42 is fixed to the first laser beam measuring device 22, and the measuring device is the second laser measuring device 22. The second thunder, the second thunder ^ Zhao 42, and the first line can reflect the second ili i [lambda on: side] and the eddy current sensing fixture 54 , the J inner 22 and relative to the eddy current sensor 52 . And the mi' field can be measured by the pair of lasers 112 〇 with the thickness correction positive or 5 〇 operation can produce a parallelism compensation signal ',, voltage? . The thickness measurement signal is transmitted to the signal processing device ϊίϊΐτout-thickness value; the parallelism compensation signal is transmitted to the ^hu where the analysis and calculation can be performed. Please refer to Fig. 6, and the measurement of the reference thickness is based on a basis. Step 7 is completed. The transfer system first-ray side ϋ21 material two laser ς ‘j 22 moves and is aligned with the first surface of the thickness correction jig 3Q to measure the surface 32. The first laser measuring device 21 can measure the signal y, the second measuring signal (a 〇); the second laser measuring device 22 can measure the second measuring surface = (bG); the measuring signal ( A〇, bG) is transmitted to the signal processing, display), and the signal value and thickness are obtained through analysis and calculation, and the thickness at this time is the reference thickness D〇. ^崎应关 8 201003034 Please refer to Fig. 7 for the measurement of the thickness of the measured material by the measurement of the thickness of the object to be measured. This step is the first laser to measure the direction of the whistle (i.e., the thickness direction _ pair of two filaments) and produces a plurality of measurements = (a bn) 'where n > 0. The thickness measurement signal (an, bn) and the reference thickness Do ^ ^ ^ 咖 versus _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ It can be understood that the average thickness Dav of the object to be measured can be calculated by using the thickness values at various points. 8 ® ’ _ 雷 峨 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ This step is performed after the first measuring profit 21 and the second laser measuring device 22 have passed a period of use, and then the fixture 3 (4) is located, and the first measuring surface 31 is taken by the first laser measuring device laser measuring device 22. And the second measurement surface = re-acquisition - thickness measurement signal (a, G, b, G), the reference thickness at this time is unchanged. The tit signal u processing device (not shown) calculates and compares the previous reference thickness =, bi) 'can be made - the signal drift compensation value AS; when the restart temperature scanning step is restarted, the signal drift compensation value AS is added to the waiting In the test, bn), the amount of signal and thickness are corrected in the thickness calculation step. The above-described laser drift correction step 90 is performed automatically in accordance with a certain period during the measurement process. 9 ®, regarding the mechanical structure due to assembly technology or environmental temperature changes, the compensation problem can be compensated by a parallel error compensation step - laser test 1 If the system is to perform the measurement of the thickness of the object to be scanned, drive the first step ί ^ with 22nd Shana. The displaced slice detector 22 can be replaced with a flatness = number ' on the side of the first-throat measuring device 21 and the corresponding value of the minus-valued 转 value. The coma compensation value is called, where n>G, and a database is formed to be thicker. Measure the scale of the scalar correction. The measurement of each position of the XL is added to the parallelism error compensation value ΔΗη to make the measured thickness more 9 201003034 Precision. The above-mentioned parallelism error compensation step is just added to the measured thickness by the compensation value ΔΗη, and the millisecond error of the next day is not fixed, so it can be used sometimes. Please refer to FIG. 10 for another parallel error. In the execution of the object to be measured, the thickness measurement, the eddy current sensor 52 of the side 2i-side can be used to configure the thickness of the $:laser measurement-position. (4) The value towel can calculate a reference thickness D〇; 汛旒(a〇, b〇), and scan by a signal processing: T moves to the laser measuring device and the signal (an, bn) , wherein n> a surface, and generating a plurality of measuring gauges ^ processing means receiving the pair of lasers to measure the reference thickness DG, by calculating and comparing the displacements by %, the pair of laser measuring devices b, 0 Processing the device via the signal = obtaining a thickness measurement signal (a, 0, (a〇, b〇), obtaining a measurement signal value AS for the previous reference thickness, adding the value to be measured, and This signal drift compensates for the measurement signal and the yield of the measured object. Also / I 矾 (an, bn), Correcting the 201003034 and a parallelism error compensation step 1〇〇 or 11(), which uses a parallelism to measure the parallelism signal between the two laser measuring instruments, and calculates the signal through the signal device Generating a parallelity error compensation value for adding the measured thickness of the object to be measured in the thickness calculation step. The above is a preferred embodiment and a design pattern of the present invention. The preferred embodiment, and the design® are merely illustrative, and the right to the art of the present invention is 3, and the second is the same as the technical means of equalization, and * is the following "clothing, full-time" content. The scope of the present invention is the scope of the applicant's rights without departing from the scope of the invention. [FIG. 1] FIG. 1 is a schematic diagram showing the principle of thickness measurement of the present invention. FIG. 2 is a schematic diagram of the structure configuration of the present invention. Fig. 3 is a schematic diagram of the rotation and function of the parallelism correction jig of the present invention. Fig. 4 is a schematic diagram of the structure and operation of the present-like parallelism correction jig. ί作5用"4本=; riding Transfer to each age and financial calculation Figure 6 is a schematic diagram of the reference thickness of the base (4). Figure 7 is a schematic diagram of the thickness of the copper gauge of the present invention. Figure 8 is a schematic diagram of the laser drift correction of the present invention. Figure 9 is a diagram of the (4) Parallel degree county Na rhyme rhyme. The first graph is a schematic diagram of another parallelism error compensation step of the present invention. The nth graph is a block diagram of the non-contact thickness silking of the present day. [Main 7L symbol description 】 11
I 201003034 A雷射測量器 B待測量物 L!測量光線 L2、L3反射光線 10機座 12通道 13線軌 14線執 15驅動機構 152馬達 154傳動軸 156、158時規皮帶 20雷射測量器 21第一雷射測量器 22第二雷射感測裝置 23、24滑塊 30厚度校正治具 31第一測量表面 32第二測量表面 40平行度校正治具 42片體 52满電流感測益 54滿電流感測治具 60訊號處理裝置 70基準厚度測量步驟 80待測量物厚度掃描步驟 90雷射漂移校正步驟 100、110平行度誤差補償步驟 120厚度計算步驟 200待測量物 12I 201003034 A laser measuring device B to be measured L! measuring light L2, L3 reflecting light 10 base 12 channel 13 line rail 14 line 15 drive mechanism 152 motor 154 drive shaft 156, 158 timing belt 20 laser measuring device 21 first laser measuring device 22 second laser sensing device 23, 24 slider 30 thickness correction jig 31 first measuring surface 32 second measuring surface 40 parallelism correction jig 42 piece body 52 full current sense benefit 54 full current sensing fixture 60 signal processing device 70 reference thickness measurement step 80 object to be measured thickness scanning step 90 laser drift correction step 100, 110 parallelism error compensation step 120 thickness calculation step 200 to be measured 12