201000846 九、發明說明： 【發明所屬之技術領域】 本發明’係關於以雙光器接收由投光器照射的單色平 行光，檢測遮蔽該單色平行光的遮蔽物之邊緣位置的光學 式邊緣檢測裝置及該邊緣檢測裝置所使用的線感測器。 【先前技術】 圖9係表示揭示於專利文獻1的習知之邊緣檢測裝置 的構成圖。在圖9中，該邊緣檢測裝置，具備線感測器1 〇〇、 投光器101以及邊緣檢測部1 〇2。線感測器1 〇〇，係在一 定方向上以既定間距排列有複數個受光元件（像素），接 收由投光器1 〇 1照射的單色平行光。投光器1 〇丨，配置成 與線感測器1 〇〇的受光面相對向，具備由雷射二極體（LD ) 構成的光源l〇la、導引單色光（雷射光）的光纖l〇lb、投 光透鏡1 0 1 c以及控制LD的驅動IC 101 d。 【 在投光器101，由光源l〇la産生的單色光（雷射光）， 通過光纖101b而被導至投光透鏡101c，由投光透鏡101c 轉換成單色平行光之後，照射到線感測器100上。當遮蔽 物1 04通過在投光器101與線感測器1 00的受光面之間所 形成的測量空間103時，射向線感測器100的單色平行光 破遮蔽。邊緣檢測部102由微電腦構成，對線感測器100 的輪出進行解析，檢測在測量空間1〇3遮蔽單色平行光的 遮蔽物104在受光元件的排列方向上之邊緣位置。 由邊緣檢測部1 〇2所進行的遮蔽物1 〇4之邊緣位置的 5 201000846 檢測，係藉由對在測量空間1 03因遮蔽物1 04遮蔽單色平 行光的一部分而産生的線感測器的全部受光量的變 化、或起因於產生在遮蔽物104邊緣部分的菲涅耳（Fresnel) 繞射的受光圖案（受光量分布）進行解析而進行。如此， 習知之邊緣檢測裝置，根據線感測器1 〇〇的受光面上的光 強度分布來高精度地檢測遮蔽物1 04之邊緣位置。（例如， 參照專利文獻1 ) [專利文獻] 日本特開2004-177335號公報 【發明内容】 習知之邊緣檢測裝置’由於如上述般構成，因此可根 據線感測器1 00的受光元件上未被照射單色平行光的寬度 l〇3a來檢測遮蔽物104的位置。但是，當遮蔽物ι〇4爲如 玻璃或薄膠片般的透明體的情況下，由於單色光會透過遮 k物104，所以與遮蔽物1〇4爲不透明體的情況比較，邊 緣部分的檢測非常困難。特別是，根據透明體的遮蔽物 的插入狀況（插入位置），由於在遮蔽物1〇4之邊緣部分 産生的菲涅耳繞射所引起的受光量的衰減很小，有時難以 進行邊緣_。例士σ，如果將作爲遮蔽物104料明膠片 相對於早色光垂直插入，則受光量的衰減报大，可檢測出 邊緣部分’但是當以傾斜的狀態插人時，《光量的衰減較 ^ ’而有無法正確地檢測出邊緣部分之情形。作爲邊緣檢 1、置的用途，有於薄膠片捲繞時的蛇行檢測等，此時由 於膠片的插入方向尤^ 匀不一疋，所以受光量的衰減小，有難以 6 201000846 正確檢測邊緣部分之情形。 此外還有下述問題：由於光源1 〇 1 a會因周圍溫度而 使輸出的单色光的波長不同，所以照射的單色光的干涉圖 案會因溫度而變化，照射到線感測器1GG上的平行光的圖 案發生變化。特別《，對如透明體般存在受光量的衰減變 小的可能性之遮蔽物1〇4進行測量時，需要使線感測器 的訊號輸出穩定。但是，當單色光的干涉圖案因周圍溫度 而發生變化時，輸出訊號會産生變動，甚至於不存在遮蔽 物1 04的自由空間亦發生了受光量的衰減，因而會有將其 衰減部分誤檢測爲由邊緣部分的菲涅耳繞射所引起的受光 里的哀減之^檢測可能性。 另一方面’爲了保護受光元件免於機械損傷，一般線 感測器100採取與受光元件非接觸地配置透明的保護玻璃 的構造。本來爲了避免該保護玻璃對受光特性產生影響， 較佳係使用透明度非常高的玻璃，但是爲了降低線感測器 100的成本，有時採用透明度低的便宜玻璃。因此，會有 入射到保護玻璃上的雷射光發生漫反射或新的干涉，而使 各受光元件輸出的接收訊號變動的問題。 如此’習知之邊緣檢測裝置，會有單色光的波長或輸 出功率因周圍温度的變化’使各受光元件輸出的接收訊號 變動’對裝置性能產生不良影響，而難以進行正確之檢測 的問題。特别是，膠片等透明體由於邊緣部分的菲淫耳繞 射所引起的受光量的衰减小，所以在不穩定的受光量分布 中難以僅檢測邊緣部分。此外，由於入射在線感測器的保 7 201000846 護破填之單色光發生漫反射或新的干涉，使各受光元件輸 出的接收訊號變動的程度增大，因而爲了進行高精度之邊 緣部分的檢測，無法使用便宜的線感測器。 本發明，爲解決上述問題而成者，其目的在於提供一 種邊緣檢測裝置，即使是透明的遮蔽物亦能正確地檢測邊 緣部分，即使在測量空間内的周圍溫度變動的情況下，亦 能進行穩定之邊緣部分的檢測。 本發明之邊緣檢測裝置，具備：投光部，由產生單色 光的雷射光源、將來自該雷射光源的單色光轉換爲單色平 灯光的投光透鏡、以及放射該單色平行光的投光窗所構 成；受光部，由與該投光窗對向設置的受光窗、將從該受 光窗射入的該單色平行光變更到既定方向的複數條光路上 的光路麦更元件、以及線感測器所構成，該線感測器係在 長适方向上以既定間距將複數個用於接收從該光路變更元 件入射的單色光的受光元件排列而成；及檢測部，對該線 感測器的受光量分布進行解析，檢測存在於該單色平行光 的光路上之遮蔽物在該受光元件的排列方向上之邊緣位 置。 此外’本發明之邊緣檢測裝置的光路變更元件係三角 柱稜鏡，將該棱鏡的三個側面之一個面與該線感測器的受 光元件平行配置。 此外，本發明之邊緣檢測裝置的光路變更元件係任意 升> 狀的圓柱狀透鏡，將該透鏡的水平側面與該線感測器的 受光元件平行配置。 201000846 又，本發明之邊緣檢測裝置，在該線感測器的受光元 件上具備保護用玻璃’該光路變更元件固^在該保護用玻 璃上。 ，根據本發明，由於具備：投光部，由產生單色光的雷 射光源、將來自該雷射光源的單色光轉換為單色平行光的 投光透镜、以及放射該單色平行光的投光窗所構成；受光 部，由與該投光窗對向設置的受光f、將從該受光窗射入 的該單色平行光變更到既定方向的複數條光路上的光路變 更元件、卩及、線感測器所構成，該線感測器係在長邊方向 亡以既定間距將複數個用於接收從該光路變更元件入射的 早^光的党光兀件排列而成；檢測部，對該線感測器的受 光置分布進行解析，檢測存在於該單色平行光的光路上之 遮蔽物在該受光元件的排列方向上之邊緣位置，因此具有 下述效果：即使遮蔽物為透明體的情况下，由複數條光路 生成之邊緣部分的菲涅耳繞射所引起光强度分布的衰减增 大，亦能够正確地檢測邊緣位置。此外，即使在單色光的 波長因周圍溫度的變化而變化的情況下，來自受光元件的 輸出巩唬亦不會産生急劇的變化，可對邊緣檢測部供應穩 定的輸出訊號。 “ 又’根據本發明’具有以下效果：使用三角柱稜鏡作 爲光路變更以牛、將該稜鏡的三則則面之一個面與該線感 $器的受光元件平行配置，藉此，即使在平行單色光發生 〉更反射與新的干涉圖案’亦能確保對受光元件的穩定的入 射故可利用便宜的構成來使遮蔽物之邊緣部分發生大的 9 201000846 受光量衰減，並且來自夸&mm , 水目又光7G件的輸出訊號不會産生偏差 與急劇的變化，能夠對】蠢缝偽、Blf Λι? Μ 土 卞遭緣檢4部供應穩定的輸出訊號。 又’根據本發明，呈古·，+* L w 具有下述效果：使用任意形狀的圓 柱狀透鏡作爲光路變更元彳丰，陴 尺70件將該透鏡的水平側面與該線 感測器的受光元件平行配置，藉此，即使在平行單色光上 發生漫反射與新的干涉圖案’亦能確保對受光元件的稃定 入射’所以’㈣多數條光路來收集由邊緣部分引起的菲 埋耳繞射的結{，能夠發生更大的受光量的㈣m 透明度非常高的遮蔽物’亦能進行邊緣部分的正確檢測。 …另外，根據本發明，具有下述效果：在該線感測器的 '先兀件上具備保護用玻璃、該光路變更元件係固定在該 保屢用玻璃上’藉& ’能去除因保護用玻璃所引起的單色 光^曼反射與新的干涉圖案的影響，㈣使用便宜的線感 測器。 【實施方式】 圖1係表示本發明之實施形態之邊緣檢測裝置的構成 圖。該邊緣檢測裝置，具備投光冑i、受光部2、以及邊 緣檢測部3。投光部1，係與受光部2之受光窗23的受光 :對向配置’並具有由雷射二極體（LD)構成的光源⑺、 =制光源10的驅動IC11、投光透鏡12以及投光窗η。 ’ '兄12藉由才又光囪13朝向受光器2之線感測器21 :中央部玫射由光源' 1〇產生的單色光。又，在此所謂的 單色光係指使用工業方法生産的雷射二極體或光濾波器 201000846 所此獲彳于的程度之具有波長分布特性的光。又，投光窗i 3 係設置在不透明筐體丨的透明玻璃。 受光部2，具有受光窗23、光路變更元件22以及線感 及J Is 21 °線感測器2丨，具有在一定方向上以既定間距將 、复數個又光元件（像素）排列而成的受光面，接收由投光 β 1照射的單色平行光。在此，藉由使受光窗23具有與 斤使用的光源〗0之單色光的波長匹配的濾波器功能，而 能緩和雜散光對線感測器21的影響。 —邊、'彖榼測部3，具有a/d轉換部3丨、處理器3 2與顯 Ρ ^ 3 A/D轉換部3丨，將由受光部2的線感測器21輸 3之又光7L件的輸出訊號從類比值轉換爲數位值。處理器 >。對以A/D轉換部3丨數位轉換後的線感測器2丨的輸出 、儿進仃解析，檢測在測量空間4遮蔽單色平行光的一部 1 刀之遮蔽⑯5在受光元件的排列方向上之邊緣位置。顯示 二33係顯示處理器32的檢測結果。又，a/d轉換部Η及 ::二器32,亦可設置在受光部2内。在此情況下，由 性处辦Ρ 2與邊緣檢測盗3之間成爲數位通訊，故抗雜訊 邛3二：，可延長配線距離。此外，亦可將整個邊緣檢測 Q| 3 s又置在受光部2内。 係各圖1係表示線感測器21之各受光元件的受光量。橫軸 光『先广件的位置，縱軸係所接收的單色光 =:5量：間4係投光窗13與受光窗23之間的空間， 爲透明體的情況下遮蔽測量空間㈣，被遮蔽 。與沒有遮蔽物的自由空間相比，受光元件的受光 201000846 量略微衰減。另一方面，在遮蔽物之邊緣部分5b發生因 菲&耳繞射所引起的急劇的受光量衰減。在邊緣檢測部3， 檢測受光量衰減之邊緣部分5b，根據其與線感測器21上 的受光元件的排列長度21a之間的比例’來計算判斷遮蔽 物5之邊緣部分的位置。又，有關與完全沒插入遮蔽物5 的狀態相比受光量減少的比例，係取決於遮蔽物5的透明 度等。 圖3係在邊緣部分的檢測所使用的菲涅耳繞射之說明 圖。由菲涅耳繞射引起的光強度分布，如圖3所示在邊 緣位置附近急劇上升，隨著遠離邊緣位置而邊振蕩邊收 斂。又’在利用單色平行光之因菲料繞射引起的線感測 器2〗的受光面上的光強度分布，來檢測遮蔽物5之邊緣 部分的位置時，需要預先高精度地求得光強度分布的特 性，有關此特性的高精度之近似方法，已揭示於日本特開 2004-177335 號公報。 在受光部2，藉由在受光窗23與線感測器2ι之間設 置光路變更元# 22,即使在平行單色光發生漫反射及新的 干涉圖案，亦能確保對受光元件的穩定入射，故能實現本 發明之透明體之邊緣檢測與線感測器21 @輸出訊號的穩 定化。圖4、5表示其構成與位置關係。圖*係使用截 面爲等腰直角三角形的三稜柱稜豸221作爲光路變更元件 22的一個例子。該稜鏡，—般稱爲直角稜鏡。如圖4⑴ 所示，直角，鏡⑵，將與9〇。的頂點相對向的侧面配置 爲與線感測益21的受光元件21丨排列的方向平行。此外， 12 201000846 如圖4- (2)所示，線感測器21在元件上面的數麵的位 置配置用於保護受光元件211免於灰塵等污染的保護用玻 璃212。在該保護用玻璃212上配置直角稜鏡221。又， 作爲光路變更手段，就獲得容易性與聚光性能之點而言， 較佳係使用直角稜鏡，但未限於此。亦可取代直角棱鏡， 而使用頂角爲銳角或純角的三稜鏡。 、，另了方面’圖5係使用半圓柱狀的圓柱狀透鏡222作 爲光路變更7G件22的例子。此圓柱狀透鏡222，係將圓柱 於軸方向分割爲兩個而成的形狀。如冑5⑴所示’圓 =狀透鏡222，係將其半圓柱的水平側面與線感測器η的 文先疋件2U的排列方向平行配置。圓柱狀透鏡222且有 :迷特性：由於在截面222a方向上具有曲率，所以光被彎 …而在截面222b方向上沒有曲率，所以如光通過平行 平面玻璃同樣地，R^ 八稍铽改變一下方向就直接通過。又， 如圖5_(2)所示’在線感測器的保護用玻璃212上配 置圓柱狀透鏡222 口此外，作爲 黏接透鏡等光㈣+乍爲固疋方法，考慮使用用於 統產生影響。此外，作2 著劑等，以避免對光學系 圓丨爲光路變更元件不限於半圓柱狀的 狀透鏡’亦可使用任意形狀的81柱狀透鏡。 布輸^差^表示因光路變更元件22所引起的受光量分 狀处 、圖6_ ( 0表示未設置光路變更元件22的 各受光元件的受光量分布，由於單色光的干涉圖 受光=元件未被均句地照射單色光，産生懿以上的 又无里偏差。转g，丨JL m 特別疋，因干涉而以數十個元件份量爲單位 13 201000846 在受光量分布上產夺、、^ ’上產生波動。在此，另一方面，圖 係α又置有光路變更元件22，凊況下的受光量分布，整體受 光量:加’去除了按每數十心件發生的受光量分布的波 動，並且連相鄰的每個元件夕為本旦八古 u凡件之文先量分布的偏差亦被抑 制’而能獲得穩定的受光量分布。此係由於藉由在光入射 到線感測n 21之前設置光路變更元件22，從相對於受光 兀件垂直的複數個方向㈣單色光，並朝向受光元件照射 單色光的緣故。又，從垂直方向上以既定寬度進行收集， 所以抑制了相鄰的受光元件彼此間的受光量的偏差，減小 干涉圖案的影響。Λ外，即使雷射波長因周圍溫度的變動 而變化，+涉圖案改變，單色光的變化被限制，僅限於微 量的受光量的變化，所以可構成不會受到周圍溫度影響之 邊緣檢測裝置。又，考慮受光量的增加量可減小來自投光 部1的單色光輸出，所以可實現低功率消耗化。又，在光 路麦更元件爲圓柱狀透鏡222的情況下，由於受光面爲圓 柱狀’所以能夠從更多的方向收集雷射。 圖7係表示因周圍溫度所引起的受光量的變動圖。當 β又以遮蔽物5未進入測量空間4時各元件的受光量爲基準 罝1·〇〇，試著多次改變周圍溫度。在圖9所示的習知之邊 緣檢測裝置，如圖7- ( 1 )所示，因單色光的波長變化所 引起的干涉圖案的變動，産生土 20%左右的受光量的變動。 另一方面’圖7- (2)係設置有光路變更元件22的情況， 即使改變周圍溫度，受光量幾乎沒有發生變動。此對於消 除因光源附近的驅動IC11散熱的影響上亦有效，具有能 14 201000846 將自電源投人到可進行測量爲止的穩定時_短的效果。 圖8係表示於測量空間4插入有薄膠片般的透明體之 遮蔽物5時受光量的變動值之比較圖。圖8_ ( ◦係圖9 所示的習知之邊緣檢測裝置，5a爲插入有膠片的部分，讣 爲沒有遮蔽物5的自由空Pa1。此種情況下，在膠片之邊緣 部分因菲涅耳繞射而發生如5c所示的受光量的衰減，可根 據該衰減來檢測邊緣的位置。但是，當遮蔽物5爲非常薄 的膠片時，受光量的衰減很難成為〇5以下，進而，考慮 因膠片在傾斜插人時的受光量的衰減降低，將被判斷爲邊 緣部分的受光量的變動閾值爲〇.75左右。即使是此閾值， 只要受光量穩定就沒有問題，但，如前所述，在周圍溫度 變動的條件下’單色光的波長變動所引起的干涉圖 化，從而産生±20%左右的受光量變動，因此，在未插入膠 片的自由空間5b發生受光量衰減至〇.75左右而誤判斷爲 邊緣部分的可能性很高。 因此，本發明人，確認出藉由配置光路變更元件22來 解決該問題的事實。M 8_ (2)係表示使用圓柱狀透鏡⑵ 作爲光路變更元件22,在插入有薄膠片時的受光量分布的 正規化的圖。由於圓柱狀透鏡222僅在一維方向上聚光， 所以當設置在線感測器21上並以既定寬度入射單色光時， 收集膠片邊緣部分的菲涅耳繞射’並且能夠使其現象朝更 加強的方向動作。藉此，就算係習知因菲涅耳繞射所引起 的又光量的衰減爲圖8-(1)的5c(l)，亦能如圖8_(2) ^ Q t ^ \ 、z )所示，明確地衰減到0.3左右。另外，由於習 15 201000846 知産生的因周圍溫度所弓I起的受光量的變動亦能抑制，故 可進行敎之邊緣檢測。又，爲了利用圓柱狀透鏡222來 獲得上述效果，如5所*，較佳係使該透鏡的水平側面 儘量與受光元件211平行的方式進行定位。 如上所述，藉由實施本發明，即使是習知困難的薄膠 片等透明Μ，亦不會受到插入狀態的影響而能進行穩定： 邊緣部分的檢測。X，即使在單色光的波長與輸出功率因 周圍温度的變化而變化的情况下，來自受光元件的輸出訊 號亦不會產生急劇的變化，能構築穩定的系統。此外，作 爲次要的效果，能去除因線感測器的保護用玻璃所引起的 雷射光之漫反射及新的干涉圖案的影響，能使用便宜的線 感測器的效果。 【圖式簡單說明】 圖1係表示本發明之實施形態丨之邊緣檢測裝置的構 成圖。201000846 IX. Description of the Invention: [Technical Field] The present invention relates to optical edge detection for detecting the edge position of a mask that shields the monochromatic parallel light by receiving a monochromatic parallel light irradiated by the light projector with a double light device. The device and the line sensor used by the edge detecting device. [Prior Art] Fig. 9 is a view showing the configuration of a conventional edge detecting device disclosed in Patent Document 1. In FIG. 9, the edge detecting device includes a line sensor 1 〇〇, a light projector 101, and an edge detecting unit 1 〇2. The line sensor 1 is a plurality of light receiving elements (pixels) arranged at a predetermined pitch in a certain direction to receive monochromatic parallel light irradiated by the light projector 1 〇 1. The light projector 1 is disposed so as to face the light-receiving surface of the line sensor 1 ,, and includes a light source l〇la composed of a laser diode (LD) and an optical fiber 1 for guiding monochromatic light (laser light). 〇 lb, the light projecting lens 1 0 1 c, and the drive IC 101 d that controls the LD. [In the light projector 101, monochromatic light (laser light) generated by the light source 101a is guided to the light projecting lens 101c through the optical fiber 101b, converted into monochromatic parallel light by the light projecting lens 101c, and then irradiated to the line sensing. On the device 100. When the shield 104 passes through the measurement space 103 formed between the light projector 101 and the light receiving surface of the line sensor 100, the monochromatic parallel light directed to the line sensor 100 is shattered. The edge detecting unit 102 is constituted by a microcomputer, and analyzes the rounding of the line sensor 100, and detects the edge position of the shielding 104 that shields the monochromatic parallel light in the measurement space 1〇3 in the arrangement direction of the light receiving elements. The detection of 5 201000846 of the edge position of the shield 1 〇 4 by the edge detecting unit 1 〇 2 is performed by shielding the line sensing in the measurement space 103 by masking a part of the monochromatic parallel light. The change in the total amount of received light or the light-receiving pattern (light-receiving amount distribution) generated by the Fresnel diffraction at the edge portion of the shield 104 is performed. Thus, the conventional edge detecting device detects the edge position of the shield 104 with high precision based on the light intensity distribution on the light receiving surface of the line sensor 1 。. (Patent Document 1) Japanese Laid-Open Patent Publication No. 2004-177335. SUMMARY OF THE INVENTION The conventional edge detecting device is configured as described above, and therefore can be based on the light receiving element of the line sensor 100. The position of the mask 104 is detected by the width l〇3a of the monochromatic parallel light being irradiated. However, when the shield ι 4 is a transparent body such as glass or a thin film, since the monochromatic light passes through the occlusion 104, the edge portion is compared with the case where the shield 1 〇 4 is an opaque body. Detection is very difficult. In particular, depending on the insertion condition (insertion position) of the shield of the transparent body, the attenuation of the amount of received light due to the Fresnel diffraction generated at the edge portion of the shield 1〇4 is small, and it is sometimes difficult to perform the edge _ . The sigma σ, if the film 104 is inserted vertically as the mask 104 with respect to the early color light, the attenuation of the received light amount is large, and the edge portion can be detected'. However, when the person is inserted in an inclined state, the attenuation of the light amount is higher. 'There is a situation where the edge portion cannot be detected correctly. As the use of the edge inspection and the placement, there is a snake detection when the thin film is wound. At this time, since the insertion direction of the film is not uniform, the attenuation of the received light amount is small, and it is difficult to accurately detect the edge portion. situation. In addition, there is a problem in that since the light source 1 〇 1 a causes the wavelength of the output monochromatic light to be different due to the ambient temperature, the interference pattern of the irradiated monochromatic light changes due to the temperature, and is irradiated to the line sensor 1GG. The pattern of parallel light on the surface changes. In particular, when measuring a shield 1〇4 that is less likely to be attenuated by the amount of light, such as a transparent body, it is necessary to stabilize the signal output of the line sensor. However, when the interference pattern of the monochromatic light changes due to the ambient temperature, the output signal changes, and even if there is no free space of the shield 104, the amount of received light is attenuated, so that the attenuation is partially delayed. It is detected as the detection possibility of the sorrow in the light received by the Fresnel diffraction of the edge portion. On the other hand, in order to protect the light-receiving element from mechanical damage, the general line sensor 100 has a structure in which a transparent cover glass is disposed in contact with the light-receiving element. Originally, in order to prevent the protective glass from affecting the light receiving characteristics, it is preferable to use a glass having a very high transparency, but in order to reduce the cost of the line sensor 100, an inexpensive glass having a low transparency is sometimes used. Therefore, there is a problem in that the laser light incident on the cover glass is diffusely reflected or newly interfered, and the received signals output from the respective light receiving elements are changed. As described above, the conventional edge detecting device has a problem that the wavelength of the monochromatic light or the output power is changed by the change in the ambient temperature to cause the reception signal to be outputted by the respective light receiving elements to adversely affect the performance of the device, and it is difficult to perform accurate detection. In particular, in a transparent body such as a film, since the attenuation of the amount of received light due to the spectacles of the edge portion is small, it is difficult to detect only the edge portion in the unstable light-receiving amount distribution. In addition, due to the diffuse reflection or new interference of the monochromatic light that is incident on the in-line sensor, the degree of variation of the received signal output by each light-receiving element is increased, so that the edge portion of the high-precision edge is increased. Detection, unable to use cheap line sensors. The present invention has been made to solve the above problems, and an object thereof is to provide an edge detecting device capable of accurately detecting an edge portion even in a transparent shield, even in the case where the ambient temperature in the measurement space fluctuates. Detection of stable edge portions. An edge detecting device according to the present invention includes: a light projecting portion, a laser light source that generates monochromatic light, a light projecting lens that converts monochromatic light from the laser light source into a monochromatic flat light, and emits the monochrome parallel The light-receiving window is configured by the light-receiving portion, and the light-receiving window provided opposite to the light-emitting window, and the optical path of the plurality of optical paths that are changed from the light-receiving window to the predetermined direction And a line sensor configured by arranging a plurality of light-receiving elements for receiving monochromatic light incident from the optical path changing element at a predetermined interval in a long-term direction; and a detecting unit The light-receiving amount distribution of the line sensor is analyzed to detect the edge position of the shielding object existing on the optical path of the monochromatic parallel light in the direction in which the light-receiving elements are arranged. Further, the optical path changing element of the edge detecting device of the present invention is a triangular column, and one surface of the three side faces of the prism is arranged in parallel with the light receiving element of the line sensor. Further, the optical path changing element of the edge detecting device of the present invention is a cylindrical lens of an arbitrary shape, and the horizontal side surface of the lens is arranged in parallel with the light receiving element of the line sensor. Further, in the edge detecting device of the present invention, the light-receiving element of the line sensor is provided with a protective glass. The optical path changing element is fixed to the protective glass. According to the present invention, a light projecting unit includes a laser light source that generates monochromatic light, a light projecting lens that converts monochromatic light from the laser light source into monochromatic parallel light, and emits the monochromatic parallel light. a light-receiving window; the light-receiving portion, the light-receiving element provided on the plurality of optical paths in the predetermined direction by the light-receiving f provided in the light-receiving window, and the monochromatic parallel light incident from the light-receiving window; The line sensor is formed by arranging a plurality of party light elements for receiving the early light incident from the light path changing element at a predetermined interval in the longitudinal direction; And analyzing the light-receiving distribution of the line sensor to detect the edge position of the shield existing on the optical path of the monochromatic parallel light in the direction in which the light-receiving elements are arranged, thereby having the following effect: even if the shielding In the case of a transparent body, the attenuation of the light intensity distribution caused by the Fresnel diffraction of the edge portion generated by the plurality of optical paths is increased, and the edge position can be accurately detected. Further, even in the case where the wavelength of the monochromatic light changes due to the change in the ambient temperature, the output beam from the light receiving element does not change abruptly, and the edge detecting portion can supply a stable output signal. Further, according to the present invention, the effect of using the triangular prism 稜鏡 as the optical path is changed, and one of the three faces of the cymbal is arranged in parallel with the light receiving element of the line sensor, thereby even Parallel monochromatic light generation > more reflection and new interference pattern 'can also ensure a stable incidence of the light-receiving element, so that an inexpensive configuration can be used to cause the edge portion of the shield to be large 9 201000846 Attenuation of the amount of light, and from the boast &;mm, the output signal of the 7G piece of water and light will not produce deviation and sharp change, and can supply a stable output signal to the 4th part of the sneak peek, Blf Λι? , 呈古·, +* L w has the following effect: using a cylindrical lens of any shape as the optical path change element, 70 pieces of the horizontal side of the lens and the light-receiving element of the line sensor are arranged in parallel, Thereby, even if diffuse reflection and a new interference pattern are generated on the parallel monochromatic light, the determined incidence of the light-receiving element can be ensured, so that (4) a plurality of optical paths are collected to collect the phenanthrene caused by the edge portion. The diffractive junction {, capable of generating a larger amount of light (4) m, a very high transparency mask can also perform correct detection of the edge portion. Further, according to the present invention, there is the following effect: in the line sensor 'The first member has a protective glass, and the optical path changing element is fixed to the glass for maintenance. 'Borry&' can remove the influence of the monochromatic light and the new interference pattern caused by the protective glass. (4) A configuration of an edge detecting device according to an embodiment of the present invention is shown in Fig. 1. The edge detecting device includes a light projecting unit i, a light receiving unit 2, and an edge detecting unit. 3. The light projecting unit 1 receives light from the light receiving window 23 of the light receiving unit 2: a light source (7) having a laser diode (LD) disposed opposite to the light source (LD), a driving IC 11 of the light source 10, and a light projecting lens 12 and the light projection window η. ' 'Brother 12 is the light sensor 13 that is directed toward the light receiver 2 by the line 21: the central portion of the monochromatic light generated by the light source '1 。. Again, so-called Monochromatic light refers to a laser diode produced using an industrial method or The light having the wavelength distribution characteristic is obtained by the filter 201000846. The light projecting window i 3 is provided in the transparent glass of the opaque casing 。. The light receiving unit 2 has the light receiving window 23, the optical path changing element 22, and The line sense and the J Is 21 ° line sensor 2 丨 have a light receiving surface in which a plurality of optical elements (pixels) are arranged at a predetermined pitch in a certain direction, and receive a monochrome parallel illuminated by the light projecting β 1 Here, by making the light receiving window 23 have a filter function that matches the wavelength of the monochromatic light of the light source "0" used by the jin, the influence of the stray light on the line sensor 21 can be alleviated. The detecting unit 3 includes an a/d converting unit 3, a processor 3 2 and a display unit 3 A/D converting unit 3, and outputs the output of the light 7L of the line sensor 21 of the light receiving unit 2 The signal is converted from an analog value to a digital value. Processor >. The output of the line sensor 2A that has been digitally converted by the A/D conversion unit 3丨 is analyzed, and the arrangement of the mask 165 of one of the 1 blades that shields the monochromatic parallel light in the measurement space 4 is detected in the arrangement of the light receiving elements. The edge position in the direction. The display results of the two 33 series display processor 32 are displayed. Further, the a/d conversion unit Η and the :: two unit 32 may be provided in the light receiving unit 2. In this case, the digital communication between the sex office 2 and the edge detection piracy 3 becomes anti-noise 邛 3 2: The wiring distance can be extended. Further, the entire edge detection Q| 3 s may be placed in the light receiving portion 2 again. Each of FIG. 1 shows the amount of light received by each of the light receiving elements of the line sensor 21. Horizontal axis light "first position of the wide part, vertical light received by the vertical axis =: 5 amount: space between the 4 series projection window 13 and the light receiving window 23, shielding the measurement space in the case of a transparent body (4) , was obscured. The amount of light received by the light-receiving element 201000846 is slightly attenuated compared to the free space without the shield. On the other hand, a sharp attenuation of the amount of received light due to the phenanthrene & ear diffraction occurs in the edge portion 5b of the shield. In the edge detecting portion 3, the edge portion 5b for attenuating the received light amount is detected, and the position of the edge portion of the shield 5 is calculated based on the ratio ' between the arrangement length 21a of the light receiving elements on the line sensor 21. Further, the ratio of the amount of received light compared to the state in which the shield 5 is not inserted at all depends on the transparency of the shield 5 and the like. Fig. 3 is an explanatory view of Fresnel diffraction used for detecting the edge portion. The light intensity distribution caused by Fresnel diffraction rises sharply near the edge position as shown in Fig. 3, and oscillates while being away from the edge position. Further, when detecting the position of the edge portion of the shield 5 by the light intensity distribution on the light receiving surface of the line sensor 2 caused by the diffraction of the monochromatic parallel light, it is necessary to accurately obtain the position of the edge portion of the shield 5 in advance. The characteristics of the light intensity distribution and the approximation method of the high precision of this characteristic are disclosed in Japanese Laid-Open Patent Publication No. 2004-177335. In the light receiving unit 2, by providing the optical path changing element #22 between the light receiving window 23 and the line sensor 2i, stable reflection of the light receiving element can be ensured even if diffused reflection of the parallel monochromatic light and a new interference pattern occur. Therefore, the edge detection of the transparent body of the present invention and the stabilization of the line sensor 21 @output signal can be realized. Figures 4 and 5 show the configuration and positional relationship. Fig. * shows an example of the optical path changing element 22 using a triangular prism 221 having an isosceles right triangle. The cockroach, commonly known as the right angle 稜鏡. As shown in Figure 4(1), the right angle, mirror (2), will be 9〇. The opposite side faces of the apex are arranged in parallel with the direction in which the light receiving elements 21 of the line sensing profit 21 are arranged. Further, as shown in Fig. 4-(2), the line sensor 21 is provided with a protective glass 212 for protecting the light-receiving element 211 from dust or the like at a position on the surface of the element. A rectangular angle 221 is disposed on the protective glass 212. Further, as the optical path changing means, it is preferable to use a right angle 点 in terms of easiness and condensing performance, but it is not limited thereto. It is also possible to replace the right-angle prism and use three turns with an acute angle or a pure angle. Further, Fig. 5 shows an example in which the semi-cylindrical cylindrical lens 222 is used as the optical path changing 7G member 22. This cylindrical lens 222 has a shape in which a cylinder is divided into two in the axial direction. As shown in Fig. 5(1), the 'circular shape lens 222 is arranged such that the horizontal side faces of the semi-cylindrical elements are arranged in parallel with the arrangement direction of the stencils 2U of the line sensor η. The cylindrical lens 222 has a characteristic: since there is a curvature in the direction of the section 222a, the light is bent... and there is no curvature in the direction of the section 222b, so that the light passes through the parallel plane glass, and the R^8 is slightly changed. The direction is passed directly. Further, as shown in Fig. 5 (2), the cylindrical lens 222 is placed on the protective glass 212 of the in-line sensor. In addition, as a method of fixing the light (4) + 乍 as a bonding lens, it is considered to have an influence on the system. . Further, it is also possible to use a lenticular lens of any shape in order to prevent the optical path changing element from being an optical path changing element, not limited to a semi-cylindrical lens. The distribution of the light receiving amount is indicated by the optical path changing element 22, and FIG. 6_ (0 indicates the light-receiving amount distribution of each light-receiving element in which the optical path changing element 22 is not provided, and the interference image of the monochromatic light is received by the light element. Monochromatic light is not uniformly irradiated, and there is no deviation in the above-mentioned enthalpy. Turning g, 丨JL m is particularly ambiguous, and is divided into dozens of component parts by interference 13 201000846 Produced in the light distribution, ^ 'There is fluctuation in the upper part. Here, on the other hand, the image system α is further provided with the optical path changing element 22, the light-receiving amount distribution under the circumstance, and the overall received light amount: plus 'removed the amount of light received per tens of centroids The fluctuation of the distribution, and even the deviation of the first-order distribution of each element of the neighboring occupant is suppressed, and a stable light-receiving amount distribution can be obtained. This is due to the incidence of light by Before the line sensing n 21, the optical path changing element 22 is provided, and the monochromatic light is irradiated from the plurality of directions (four) perpendicular to the light receiving element, and the monochromatic light is irradiated toward the light receiving element. Further, the light is collected from the vertical direction at a predetermined width. , so the phase is suppressed The variation in the amount of received light between the adjacent light-receiving elements reduces the influence of the interference pattern. Even if the laser wavelength changes due to fluctuations in the ambient temperature, the change in the monochromatic light is limited to a small amount. Since the amount of received light changes, it is possible to configure an edge detecting device that is not affected by the ambient temperature. Further, in consideration of the amount of increase in the amount of received light, the monochromatic light output from the light projecting unit 1 can be reduced, so that low power consumption can be achieved. Further, when the optical path merging element is the cylindrical lens 222, since the light receiving surface has a columnar shape, the laser beam can be collected from more directions. Fig. 7 is a view showing a variation of the amount of received light due to the ambient temperature. When β is again based on the amount of light received by each component when the shield 5 does not enter the measurement space 4, try to change the ambient temperature a plurality of times. The conventional edge detecting device shown in Fig. 9 is as shown in Fig. 7- (1), the fluctuation of the interference pattern due to the change in the wavelength of the monochromatic light causes a variation in the amount of received light of about 20% of the soil. On the other hand, Fig. 7-(2) is provided with the optical path changing element 22. Happening, When the ambient temperature is changed, the amount of received light hardly changes. This is also effective in eliminating the influence of heat dissipation by the drive IC 11 in the vicinity of the light source, and has the effect of being able to 14 from the power supply to the time when the measurement can be performed. Fig. 8 is a view showing a comparison of the variation values of the received light amount when the mask 5 of the thin film-like transparent body is inserted into the measurement space 4. Fig. 8_ (The conventional edge detecting device shown in Fig. 9 is inserted with 5a The portion of the film, 讣 is the free space Pa1 without the mask 5. In this case, the attenuation of the received light amount as shown by 5c occurs due to Fresnel diffraction at the edge portion of the film, and the edge can be detected based on the attenuation. However, when the mask 5 is a very thin film, the attenuation of the amount of received light is hard to be 〇5 or less. Further, considering that the attenuation of the amount of received light when the film is inserted obliquely is lowered, it is judged as the edge portion. The variation threshold of the amount of received light is about 7575. Even if the threshold value is used, there is no problem as long as the amount of received light is stabilized. However, as described above, the interference pattern caused by the fluctuation of the wavelength of the monochromatic light under the condition of the fluctuation of the ambient temperature produces a light receiving amount of about ±20%. Since there is a change, there is a high possibility that the amount of received light is attenuated to about 7575 in the free space 5b where the film is not inserted, and the edge portion is erroneously determined. Therefore, the inventors have confirmed the fact that the problem is solved by arranging the optical path changing element 22. M 8_ (2) shows a normalized pattern of the light-receiving amount distribution when the cylindrical lens (2) is used as the optical path changing element 22 and the thin film is inserted. Since the cylindrical lens 222 condenses only in the one-dimensional direction, when the in-line sensor 21 is disposed and the monochromatic light is incident at a predetermined width, the Fresnel diffraction of the edge portion of the film is collected and the phenomenon can be made More enhanced direction action. Therefore, even if it is known that the attenuation of the amount of light caused by Fresnel diffraction is 5c(l) of Fig. 8-(1), it can also be as shown in Fig. 8(2) ^ Q t ^ \ , z ) It is shown that it is definitely attenuated to about 0.3. In addition, since the variation of the amount of received light due to the ambient temperature caused by the knowledge of the temperature can be suppressed, it is possible to detect the edge of the crucible. Further, in order to obtain the above effects by the cylindrical lens 222, as shown in Fig. 5, it is preferable to position the horizontal side surface of the lens as parallel as possible to the light receiving element 211. As described above, by implementing the present invention, even a transparent crucible such as a conventionally thin film can be stabilized without being affected by the insertion state: detection of the edge portion. X, even when the wavelength of the monochromatic light and the output power change due to changes in the ambient temperature, the output signal from the light-receiving element does not change abruptly, and a stable system can be constructed. Further, as a secondary effect, it is possible to remove the influence of the diffuse reflection of the laser light and the new interference pattern caused by the protective glass of the line sensor, and the effect of the inexpensive line sensor can be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the construction of an edge detecting device according to an embodiment of the present invention.
圖2係表示實施形態1之線感測器之各受光元 A θ 凡的3C 光I。 圖3係在邊緣部分的檢測所使用的菲 π /呈斗現射之說明 圖。 圖4_(1)、（2)係表示線感測器與光路變更元件的位置 關係之實施例。 圖5-(1)、（2)係表示線感測器與光路變更元件的位 關係的另一實施例。 16 201000846 圖6-(1)、（2)係表示配置有光路變更元件時的受光量 之變動圖。 圖7-(1)、（2)係說明周圍溫度所引起的受光量之變動 圖。 圖8-(1)、（2)係表示對插入有薄膠片時的受光量之變 動圖。 圖9係表示習知之邊緣檢測裝置的構成圖。 【主要元件符號說明】 1 投光部 2 受光部 3 邊緣檢測部 4 測量空間 5 遮蔽物 10 光源 11 驅動1C 12 投光透鏡 13 投光窗 21 線感測器 211 受光元件 212 保護用玻璃 22 光路變更元件 22 1 直角稜鏡 222 圓柱狀透鏡 17 201000846 23 受光窗 3 1 A/D轉換部 32 處理器 33 顯示部 100 線感測器 102 投光器 101a 光源 101b 光纖 101c 投光透鏡 lOld 驅動1C 102 邊緣檢測部 103 測量空間 104、 104a、104b遮蔽物 105 受光元件 18Fig. 2 is a view showing a 3C light I of each of the light receiving elements A θ of the line sensor of the first embodiment. Fig. 3 is an explanatory view of the phenanthrene/pilotting shot used for the detection of the edge portion. Fig. 4 (1) and (2) show an example of the positional relationship between the line sensor and the optical path changing element. Fig. 5-(1) and (2) show another embodiment of the positional relationship between the line sensor and the optical path changing element. 16 201000846 Fig. 6-(1) and (2) show the variation of the amount of received light when the optical path changing element is placed. Fig. 7-(1) and (2) are diagrams showing changes in the amount of received light caused by the ambient temperature. Fig. 8-(1) and (2) are diagrams showing changes in the amount of received light when a thin film is inserted. Fig. 9 is a view showing the configuration of a conventional edge detecting device. [Description of main component symbols] 1 Projection unit 2 Light-receiving unit 3 Edge detection unit 4 Measurement space 5 Mask 10 Light source 11 Driving 1C 12 Projection lens 13 Projection window 21 Line sensor 211 Light-receiving element 212 Protective glass 22 Optical path Changing element 22 1 Right angle 稜鏡 222 cylindrical lens 17 201000846 23 Light receiving window 3 1 A/D converting unit 32 Processor 33 Display unit 100 Line sensor 102 Light projector 101a Light source 101b Optical fiber 101c Projection lens lOld Driving 1C 102 Edge detection Portion 103 measuring space 104, 104a, 104b shield 105 light receiving element 18