200950179 九、發明說明： 【發明所屬之技術領域】 本發明有關於一種溶液製程技術，‘且特別是有關於一 種用於溶液製作多層膜的溶液製膜方法及其相關設備。 【先前技術】 有機光電元件依照製造原料分子大小可區分為可溶液 製程之有機分子有機光電元件及利用蒸鍍製程之有機分子 有機光電元件兩種。 雖然，已知利用蒸鍍製程可容易製造出具有多層結構 的有機光電元件，但此種製程不適合用來製造大面積的有 機光電元件。 相對地，由於利用溶液製程之有機光電元件在製程上 較利用蒸鍍製程之有機光電元件更為簡單且便宜，所以適 合使用於製造大面積光電元件及裝置，但也因為其為溶液 製程，所以利用溶液製程之有機光電元件在製作多層膜元 件時會有嚴重的層與層間互溶問題。例如第二層的溶劑溶 掉並破壞第一層膜，進而產生互溶問題。 故爲因應有機光電元件製程技術之需求，尚需發展相 關技術，且可藉以節省人力與時間等成本。 【發明内容】 本發明之一目的，在於提供一種利用溶液製程製作多 層膜的方法及其溶液製膜設備，以能用來製作多層有機分 200950179 子光電元件。 本發明之一目的，在於提供一種利用溶液製程製作多 層膜的方法及其溶液製膜設備，以能有效解決製作多層有 機分子光電元件時層與層互溶的問題。 依據本發明之一特色，提供一種利用溶液製程製作多 層膜的方法。實施時可配合一具有一狹縫之有機分子容器。 上述有機分子容器可容置有機分子溶液。上述方法包 括：提供一基板；於基板上製作一有機分子薄膜層；以及 利用有機分子容器之狹縫控制有機分子溶液掉落在有機分 子薄膜層的量，以形成一有機分子渔膜層。本方法並且可 利用一刮刀裝置（例如：利用刮刀塗膜設備）決定有機分 子溼膜層之厚度。 此外，本方法利用一加速手段來加速有機分子澄膜層 中的溶劑揮發速度，以防止向下破壞原先的有機分子薄膜 層，其中這個加速手段例如為：加熱方式。 依據本發明之一特色，提供一種溶液製膜設備。上述 溶液製膜設備是用來對一有機電子元件的基板形成至少一 薄膜，其中有機電子元件可為有機分子發光元件、有機分 子電晶體、有機太陽電池、或有機光偵測器。上述溶液製 膜設備包括有機分子容器、進氣閥、及加熱器。上述有機 分子容器用以容置有機分子溶液，且有機分子容器具有一 用以面對基板的狹缝，容器的高度由機具本身控制，容器 與機板的間距可決定濕膜的厚度，進而決定乾膜形成後的 厚度。上述進氣閥設置於有機分子容器之上，以用來控制 200950179 有機分子溶液通過狹縫的流出量。 在本發明之一實施例中，有機分子容器更包括上蓋， 且其具有通氣孔，而上述進氣閥設置於上蓋之通氣孔處。 在本發明之一實施例中，上述溶液製膜設備更包含馬 達，以控制有機分子容器的移動。 在本發明之一實施例中，上述溶液製膜設備更包含加 熱器，以加速濕膜中溶劑揮發及薄膜形成的速度。 在本發明之一實施例中，有機分子容器的狹縫與基板 之間的距離是可調整的，且這個距離決定基板之薄膜的厚 度。 關於本發明之優點與精神可以藉由以下的發明詳述及 所附圖式得到進一步的瞭解。 【實施方式】 本發明為一種利用溶液製程製作多層膜的方法及其溶 液製膜設備，有關本發明較佳實施例的說明，敬請一併參 照第1圖、第2圖、及第3圖的說明。 第1圖顯示本發明較佳實施所提供之溶液製膜設備的 側視圖。在本實施例中，溶液製膜設備1包括有機分子容 器10、進氣閥31、及加熱器51。有機分子容器10包括殼 體11與上蓋12,殼體11具有一容置空間110與狹縫111， 上蓋12具有通氣孔121。 請參照第2圖，其顯示本發明較佳實施例所提供之有 機分子容器的示意圖。進氣閥31設置於有機分子容器10 200950179 之上蓋12的通氣孔121 (如第1圖所示）處，以使得進氣 閥31所提供之氣流能通過通氣孔121而進入殼體11的容 置空間110，藉以用來控制有機分子溶液80通過狹缝111 的流出量。 本發明之溶液製膜設備用以形成至少一薄膜於有機電 子元件的基板6上，其中有機電子元件可為有機分子發光 元件、有機分子電晶體、有機太陽電池、或有機光偵測器。 而在本實施例中，有機分子容器10的狹縫111與基板 6之間的一距離是可調整的，而此距離可決定基板6上所 形成的薄膜的厚度。 在本實施例中，有機分子容器10是設置在一調整設備 (圖未示）上，調整設備可用來控制有機分子容器10與基 板6之間的距離。此外，調整設備可與至少一馬達（圖未 示）耦接，藉此，可透過馬達來控制調整設備的操作，進 而控制有機分子容器10與基板6之間的距離。在本實施例 中，調整設備為一機具、滑執或機械方法如機械手臂。 在本實施例中，加熱器51是緊鄰設置在有機分子容器 10的一侧，以加速基板6上薄膜的形成速度。在其他實施 例中，加熱器51亦可設置在基座，例如：基板6下方，以 加速該薄膜形成的速度。 第3圖顯示本發明之一實施例利用溶液製程製作多層 膜的方法的流程圖。 第4圖顯示製作多層膜的示意圖。有關上述製作多層 膜的說明，敬請一併參照第1圖至第4圖。 200950179 在步驟S305中，提供一基板6，以在這個基板6上形 成多層膜。在本實施例中，基板6是放置在傳送帶7上， 其中傳送帶7的傳送方向是由右向左。在其他實施例中， 亦可將基板6放置在固定位置，而有機分子容器10是放置 在傳送帶7或滑執上。在本實施例中，基板6例如為氧化 銦錫透明導電鍍膜（ITO)基板。 在步驟S310中，控制有機分子溶液80通過狹縫111 的流出，以在基板6上形成一第一有機分子薄膜層41，並 且利用加熱器51來烘乾，以加速第一有機分子薄膜層41 的形成，並使其成為乾膜。 在步驟S315中，繼續利用有機分子容器10之狹縫111 來控制有機分子溶液80掉落在第一有機分子薄膜層41(乾 膜）的量（亦即厚度），以形成第二有機分子溼膜層42。 在步驟S320中，利用一刮刀裝置43來決定第二有機 分子溼薄膜層42的厚度，其中刮刀裝置例如使用刮刀塗布 機來實施。 在步驟S325中，再利用加熱器51來對第二有機分子 溼薄膜層42進行加熱，以加速第二有機分子溼薄膜層42 中的溶劑揮發速度，進而使得第二有機分子溼薄膜層42成 為乾薄膜層。 藉此，上述第二有機分子溼薄膜層42的厚度可由刮刀 與基板間所造成的間距所控制。此外，本發明實施例利用 加熱方式使得第二有機分子溼薄膜層42中溶劑快速揮 發，以防止其侵蝕原先已形成之有機分子薄膜（第一有機 200950179 分子薄膜層41)。 此外，本實施例所提供的溶液製膜設備1可透過進氣 闕31來調整後續溶液落下成濕臈的速度，故可有效的製作 多層膜光電兀件。另外，此裝置若調整狹縫長度亦可有效 製作大面積，不像傳統的旋轉塗布法，此法對材料的利用 率可高達90%以上。 值得注意的是’’在本實施例中僅顯示利用一個有機分 子谷器來進行溶液製膜，在其他實施例中，亦可使用多個 有機分子容器來進行溶液製膜。❹卜，在本實施例中有 機分子容器具有—個狹縫，在其他實施例中，每一個有機 分子容器亦可具有多個狹縫。 第5圖顯示利用本發明較佳實施例實際製作多層膜的 剖面圖，其可直接驗證此方法（製衫輕）的可行性。 接著，歸利2400電流電壓 例所提供的溶液製膜職製作的光 ^彻本實施 壓電流特性，利用PR650量測上迷所得潛薄膜的， 度、發光效益、CIE座標等之光學牲4 、光譜、發光党 式結合飢制期電流電；1料對同時湘電腦程 單層膜進行整體電性、光性量測。而㈣的光電70件的 與第6b圖所示之試驗結果，即發光拼各玄項光電性能如第如 電麗特性圖示可知本實施例所製作二電壓、發光強度_ 溶液製程所製做的賴。 、早日結構近似於-般 另外，利用飢撒利2400電流電壤源計 例所提供的溶液製膜設備製作 、丨利用本實 尤電轉之雙層薄膜的 200950179 壓電流特性，利用PR650量測上述所得到 度、發光效益、CIE座標等之光學特性，、π、發光亮 式結合凱㈣2棚電流電壓料對m用電腦程 單層膜進行整體電性、光性量測。各項光電性〜如電70件的 與第7b圖所示。由第7a與第7b圖所示之試:^圖 =例所製作的雙層結構優於1溶液 由以上之說明可知’本發明較佳實 製膜設備·狹縫，以阻擋後來的大】後供之洛液 的有機分子薄膜上，並_㈣刀技術=接落在原先 隨之以加熱裝置將濕膜烤乾而成乾膜。藉膜厚度，並 製作多層有機分子光電元件時層與層 可有效解決 藉由以上較佳具體實施例之詳述，；：問題； 描述本發明之特徵與精神，而並非以上述戶望=更加清楚 體實施例來對本發明之範疇加以限制。相揭露的較佳具 希望能涵蓋各種改變及具相等性的安排於地，其目的是 之專利範圍的範疇内。因此，本發明所申二發明所欲申請 範疇應該根據上述的說明作最寬廣的解釋y之專利範圍的 所有可能的改變以及具相等性的安排。 以致使其涵蓋 200950179 【圖式簡單說明】 示意^圖^本發明較佳實施所提供之有機分子容器的 設在發㈣佳實顧提供之有齡子容器級 膜的佳實施例利聽液製程製作多層 =1示本發明較佳實施製作多層膜的示意圖。 剖面圖。、1彻本發明較佳實施例實際製作多層膜的 電流發明料實㈣㈣作料層元件的 發光㈣錄料綱心叫層元件的 發難佳Μ賴心_層元件的 發光赌料綱心-廣元件的 【主要元件符號說明】 I :溶液製膜設備 10:有機分子容器 II :殼體 110 :容置空間 200950179 111 :狹缝 12 :上蓋 121 :通孔 31 :進氣閥 41 :第一有機分子薄膜層 42 :第二有機分子溼薄膜層 43 :刮刀裝置 50 :加熱板 51 :加熱器 6 :基板 7 :傳送帶 80 :有機分子溶液 步驟：S305〜S325200950179 IX. Description of the Invention: [Technical Field] The present invention relates to a solution process technology, and in particular to a solution film forming method for a multilayer film for solution and related equipment. [Prior Art] The organic photoelectric element can be classified into an organic molecular organic photoelectric element capable of being a solution process and an organic molecular organic photoelectric element using an evaporation process according to the molecular size of the raw material. Although it is known that an organic photovoltaic element having a multilayer structure can be easily fabricated by an evaporation process, such a process is not suitable for manufacturing a large-area organic photoelectric element. In contrast, since the organic photoelectric element using the solution process is simpler and cheaper in the process than the organic photoelectric element using the evaporation process, it is suitable for manufacturing a large-area photovoltaic element and device, but also because it is a solution process, Organic photo-electric elements using solution processes have serious layer-to-layer miscibility problems when fabricating multilayer film elements. For example, the solvent of the second layer dissolves and destroys the first layer of the film, thereby causing a problem of mutual dissolution. Therefore, in order to meet the needs of the process technology of organic optoelectronic components, it is necessary to develop relevant technologies, and can save labor and time and other costs. SUMMARY OF THE INVENTION One object of the present invention is to provide a method for producing a multi-layer film by a solution process and a solution film-forming apparatus thereof, which can be used to fabricate a multilayer organic component 200950179 sub-photovoltaic device. SUMMARY OF THE INVENTION One object of the present invention is to provide a method for producing a multi-layer film by a solution process and a solution film-forming apparatus thereof, which can effectively solve the problem that layers and layers are mutually soluble when a multi-layer organic molecular photoelectric element is produced. According to a feature of the present invention, a method of making a multi-layer film using a solution process is provided. It can be implemented with an organic molecular container having a slit. The above organic molecular container can accommodate an organic molecular solution. The above method comprises: providing a substrate; forming an organic molecular film layer on the substrate; and controlling the amount of the organic molecular solution falling on the organic molecular film layer by using the slit of the organic molecular container to form an organic molecular fishing film layer. The method also determines the thickness of the organic molecular wet film layer using a doctor blade device (e.g., using a doctor blade coating device). In addition, the method utilizes an acceleration means to accelerate the rate of solvent evaporation in the organic molecular film layer to prevent the original organic molecular film layer from being destroyed downward, wherein the acceleration means is, for example, a heating mode. According to a feature of the present invention, a solution film forming apparatus is provided. The above solution film forming apparatus is for forming at least one film on a substrate of an organic electronic component, wherein the organic electronic component may be an organic molecular light-emitting element, an organic molecular transistor, an organic solar cell, or an organic photodetector. The above solution film forming apparatus includes an organic molecular container, an intake valve, and a heater. The organic molecular container is used for accommodating the organic molecular solution, and the organic molecular container has a slit for facing the substrate. The height of the container is controlled by the implement itself, and the distance between the container and the plate determines the thickness of the wet film, and then determines The thickness after dry film formation. The above-mentioned intake valve is disposed on the organic molecular container to control the outflow of the organic solvent solution through the slit of 200950179. In an embodiment of the invention, the organic molecular container further includes an upper cover and has a vent hole, and the intake valve is disposed at the vent hole of the upper cover. In an embodiment of the invention, the solution film forming apparatus further comprises a motor to control the movement of the organic molecular container. In one embodiment of the invention, the solution film forming apparatus further includes a heater to accelerate the rate of solvent evaporation and film formation in the wet film. In one embodiment of the invention, the distance between the slit of the organic molecular container and the substrate is adjustable, and this distance determines the thickness of the film of the substrate. The advantages and spirit of the present invention will be further understood from the following detailed description of the invention. [Embodiment] The present invention is a method for producing a multilayer film by a solution process and a solution film forming apparatus thereof. Referring to the description of the preferred embodiment of the present invention, please refer to FIG. 1, FIG. 2, and FIG. instruction of. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a side elevational view of a solution film forming apparatus provided by a preferred embodiment of the present invention. In the present embodiment, the solution film forming apparatus 1 includes an organic molecular container 10, an intake valve 31, and a heater 51. The organic molecular container 10 includes a housing 11 and an upper cover 12. The housing 11 has an accommodation space 110 and a slit 111. The upper cover 12 has a vent hole 121. Referring to Figure 2, there is shown a schematic view of an organic molecular container provided in accordance with a preferred embodiment of the present invention. The intake valve 31 is disposed at the vent hole 121 (shown in FIG. 1) of the cover 12 above the organic molecular container 10 200950179, so that the airflow provided by the intake valve 31 can enter the capacity of the housing 11 through the vent hole 121. Space 110 is provided for controlling the outflow of organic molecular solution 80 through slit 111. The solution film forming apparatus of the present invention is for forming at least one film on the substrate 6 of the organic electronic component, wherein the organic electronic component may be an organic molecular light emitting device, an organic molecular transistor, an organic solar cell, or an organic photodetector. In the present embodiment, a distance between the slit 111 of the organic molecular container 10 and the substrate 6 is adjustable, and this distance determines the thickness of the film formed on the substrate 6. In the present embodiment, the organic molecular container 10 is disposed on an adjustment device (not shown) which can be used to control the distance between the organic molecular container 10 and the substrate 6. Further, the adjustment device can be coupled to at least one motor (not shown) whereby the operation of the adjustment device can be controlled by the motor to thereby control the distance between the organic molecular container 10 and the substrate 6. In this embodiment, the adjustment device is a implement, a slippery or a mechanical method such as a robotic arm. In the present embodiment, the heater 51 is disposed immediately adjacent to the side of the organic molecular container 10 to accelerate the formation speed of the film on the substrate 6. In other embodiments, heater 51 may also be disposed on the pedestal, such as under substrate 6, to accelerate the rate at which the film is formed. Fig. 3 is a flow chart showing a method of producing a multilayer film by a solution process in an embodiment of the present invention. Figure 4 shows a schematic of the fabrication of a multilayer film. For the description of the above-mentioned multilayer film, please refer to Fig. 1 to Fig. 4 together. 200950179 In step S305, a substrate 6 is provided to form a multilayer film on this substrate 6. In the present embodiment, the substrate 6 is placed on the conveyor belt 7, wherein the conveying direction of the conveyor belt 7 is from right to left. In other embodiments, the substrate 6 can also be placed in a fixed position while the organic molecular container 10 is placed on the conveyor belt 7 or slippery. In the present embodiment, the substrate 6 is, for example, an indium tin oxide transparent conductive plating (ITO) substrate. In step S310, the organic molecule solution 80 is controlled to flow out through the slit 111 to form a first organic molecular film layer 41 on the substrate 6, and is dried by the heater 51 to accelerate the first organic molecular film layer 41. Form and make it a dry film. In step S315, the slit 111 of the organic molecular container 10 is continuously used to control the amount (ie, thickness) of the organic molecular solution 80 dropped on the first organic molecular film layer 41 (dry film) to form a second organic molecule wet. Film layer 42. In step S320, the thickness of the second organic molecular wet film layer 42 is determined by a doctor blade device 43, wherein the doctor blade device is implemented, for example, using a knife coater. In step S325, the second organic molecular wet film layer 42 is further heated by the heater 51 to accelerate the solvent evaporation rate in the second organic molecular wet film layer 42, thereby making the second organic molecular wet film layer 42 Dry film layer. Thereby, the thickness of the second organic molecular wet film layer 42 can be controlled by the spacing between the doctor blade and the substrate. In addition, the embodiment of the present invention utilizes a heating method to rapidly evaporate the solvent in the second organic molecular wet film layer 42 to prevent it from eroding the originally formed organic molecular film (the first organic 200950179 molecular film layer 41). In addition, the solution film forming apparatus 1 provided in the embodiment can adjust the speed at which the subsequent solution falls into a wet enthalpy through the intake port 31, so that the multilayer film photoelectric element can be efficiently fabricated. In addition, the device can effectively make a large area by adjusting the length of the slit. Unlike the conventional spin coating method, the utilization rate of the material can be as high as 90% or more. It is to be noted that in the present embodiment, only one organic molecular granulator is used for film formation, and in other embodiments, a plurality of organic molecular containers may be used for solution film formation. Further, in the present embodiment, the organic molecular container has a slit, and in other embodiments, each of the organic molecular containers may have a plurality of slits. Figure 5 is a cross-sectional view showing the actual fabrication of a multilayer film using the preferred embodiment of the present invention, which directly verifies the feasibility of this method (lightweight). Next, the light current characteristics of the liquid film produced by the solution of the 2400 current and voltage are provided, and the optical properties of the obtained latent film, the degree of luminescence, the CIE coordinates, etc. Spectral, luminous party style combined with hunger current current; 1 material on the simultaneous Xiang computer computer single layer film for overall electrical and optical measurement. And (4) the photoelectricity of 70 pieces and the test results shown in Fig. 6b, that is, the photoelectric properties of the luminescent materials, such as the electro-characteristic characteristics, can be seen that the two voltages produced by the present embodiment, the luminous intensity _ solution process is made Lai. The early structure is similar to that of the other, using the solution film-making equipment provided by the hunger-salary 2400 galvanic source method, and using the 200950179 current-current characteristic of the two-layer film of the present electric-electrical conversion, using the PR650 to measure the above. The optical characteristics of the obtained degree, luminous efficiency, CIE coordinates, etc., π, illuminating bright combination Kai (four) 2 shed current and voltage materials for m using the computer program single layer film for overall electrical and optical measurement. The photoelectricity is as shown in Figure 7b. Tests shown in Figures 7a and 7b: The two-layer structure produced by the example of Fig. = is better than the one solution. From the above description, the preferred film forming apparatus and slit of the present invention are used to block the subsequent large size. After the film is applied to the organic molecular film of the Lok, and _ (four) knife technology = the original wet film is then dried by a heating device to form a dry film. The layers and layers can be effectively solved by the thickness of the film and the multi-layer organic molecular photovoltaic elements are produced by the above detailed description of the preferred embodiments; the problem; the characteristics and spirit of the present invention are described, and not the above-mentioned households = more The embodiments are to be construed as limiting the scope of the invention. The preferred embodiment of the disclosure is intended to cover various changes and equivalence arrangements, and is intended to be within the scope of the patent. Therefore, the scope of the invention as claimed in the present invention should be construed in accordance with the description of the invention. So that it covers 200950179 [Simplified description of the drawings] The schematic diagram of the organic molecular container provided by the preferred embodiment of the present invention is provided in the fourth embodiment of the invention. Making a multilayer = 1 shows a schematic representation of a preferred embodiment of the invention for making a multilayer film. Sectional view. 1 The current embodiment of the present invention is actually made of a multilayer film. (4) (4) Light-emitting of the material layer component (4) Recording material is called the layer element, and the light-emitting gambling material-wide component [Main component symbol description] I : Solution film forming apparatus 10: Organic molecular container II: Housing 110: accommodating space 200950179 111: slit 12: upper cover 121: through hole 31: intake valve 41: first organic molecule Film layer 42: second organic molecular wet film layer 43: doctor blade device 50: heating plate 51: heater 6: substrate 7: conveyor belt 80: organic molecular solution step: S305~S325