200944449 六、發明說明： 【發明所屬之技術領域] 本發明係關於一種將收容諸如半導體晶圓等薄型基板而 進行搬送的搬送谷器裝設於潔淨室中，在保持相互潔淨度裝 '卸其蓋的搬送容器之蓋裝卸襞置、搬送容器及搬送容器之蓋 裝卸系統。 【先前技術】 ❹ 習知使搬送半導體晶圓之通稱F0UP(FR0NT OPENING UNIFIEDPOD ’前開式晶圓盒）等的搬送容器之蓋體可裝卸地 保持於門構件’更具有在水平方向及垂直方向之2方向上移 動的裝載口（例如專利文獻丨）。 裝載口係經由在移動平台上載置搬送容器並將搬送容器 的蓋體壓抵於門構件而密接的步驟，而使搬送容器的蓋體保 持於門構件上。該移動平台與搬送容器係透過在移動平台上 ©所設置的銷、與在搬送容器底面所設置的v字溝而決定其錄 直方向與水平方向上之位置。 .但是4搬送容ϋ收容直徑超過3()_程度的大口經晶圓 時’裝載口便必須以較大的力將搬送容器的蓋體壓抵於巧構 件。此情況’搬送容器底_ V字溝會跨上移動平台的鎖， 而有導致搬送容器浮起的可能性。 (專利文獻1)日本專利特開平u_288991號公報 【發明内容】 098104801 3 200944449 (發明所欲解決之問題） 本毛月課題在於提供—種即使將搬送容器蓋體以較大的 力壓抵於蓋裝卸裝置的門構件亦可防止發生搬送容器之浮 起的搬送容器之蓋裝卸裝置、搬送容器及搬送容器之蓋裝卸 系統。 (解決問題之手段） 本發明係利用如下的解決手段而解決問題。另外，為求易 於理解，賦予與本發明之實施形㈣應的元件符號來進行說 明，惟並不受限於此。但，賦予元件符號進行說明的構成可 適當改良，亦可將至少其中一部分替代為其他的構成物。 第1發明的搬送容器之蓋裝卸裝置，其使内部保持高潔淨 度的搬送谷器（200)之開口部之蓋構件（2〇3)，卡合於保持高 潔淨度的潔淨室之開口部之門構件，在使上述二開口部之周 邊部密接而保持高潔淨度狀態下裝卸上述蓋構件；其特徵在 於’其具備有：平台（15) ’載置上述搬送容器，可朝既定移 動方向（M)移動；及連結銷（15a〜15c)，卡合於與上述既定移 動方向（M)略成直角地設置在上述搬送容器下面之剖面v字 溝（205a〜205c)的固定面（205a-1〜205c-l) ’與上述既定移動 方向略成直角地被設置在上述平台。 第2發明係就申請專利範圍第1項所記載的搬送容器之蓋 裝卸裝置，其中，上述平台（15)之上述既定移動方向（1^為 水平方向，上述連結銷（15a〜15c)之軸方向為鉛直方向，上 098104801 4 200944449 述f定面⑽a-Mn)為將上述剖面v字溝（2〇5a〜2〇5c) 内設為凹陷而成的凹部（2〇5a_2〜2〇5c_2)鉛直方向之内壁。 第3發明係就第1發明的搬送容器之蓋裝卸裝置，其中， ' 上述連結銷（15a〜15c)具有設置在前端部之平面部 ‘ （15a~7)，藉由使上述平面部與設置在上述搬送容器（2〇〇) 之上述凹部（205a-2〜205c-2)底部的平面（2〇5a—7)面接觸’ 而決定上述搬送容器之鉛直方向位置。 ❹ 帛4發明係就巾請專利範圍第3項所記載的搬送容器之蓋 裝卸裝置’其中’其具備有檢測出上述連結銷⑽5a)之上 述平面部（1015a-7)與上述搬送容器（2〇〇)底部之上述平面 (205a-7)已形成面接觸的檢測部dou—丨、。 第5發明係就第明的搬送容器之蓋裝卸裝置，其中， 其具備有藉由抵接於上述剖面v字溝（2〇5a、2〇5a)之斜面 (205a-6、205a-6)而決定上述搬送容器（2〇〇)之錯直方向位 ©置之V字斜面抵接部（811—1、915a_8)。 第6發明係就第1發明的搬送容器之蓋裝卸裝置，其中， 上述平台（15)之上述既定移動方向（M)為水平方向剖面形 狀為推拔狀的導引部（15a_6)被設置在上述連結銷（i5a〜i5c) 之前端緣部，上述導引部（15a—6)將上述固定面 (205a-l〜205C-1)導引至上述連結銷。 第7發明係就第1發明的搬送容器之蓋裝卸裝置，其中， 上述平台（915)之上述既定移動方向（M)為水平方向，剖面形 098104801 200944449 導引至上述連結銷。 狀為圓弧狀的導引部（915a-6)被設置於上述連結鎖（9ι5 > 之前端緣部’上述導引部（915a-6)將上述固定面（2〇^ ^ 第8發明係就第1發明的搬送容器之蓋裝卸裝 I 丹中， 其具備有：經由接觸到上述剖面V字溝（2〇5a) 」之斜面 (205a-6)，而將上述固定面（205a-l)導引至上述連妹， (815a)的基部導引部（811-1);可在上述連結銷之轴方向移 動地保持上述連結銷的基部（811);及對上述連結銷於轴方 向朝從上述基部突出側施力的施力構件（816);而上述連 銷在經由上述基部導引部導引上述固定面之途中，藉由按才 於上述剖面V字溝之斜面（2〇5a-6)而壓入於上述武部 部，且在經上述基部導引部導引上述固定面之狀態下，受到 上述施力構件之施力而從上述基部突出。 第9發明係就第8發明之搬送容器之蓋裝卸裝置，其中， 其具備有檢測出上述連結銷（815a)已從上述基部（8ΐι)突出 的狀態之檢測部（818、818-1、818-2)。 第發明係就第8發明的搬送容器之蓋裝卸裝置，其中， 上述基部導引部（811-丨）為v字斜面抵接部（81M)，其在將 上述固定面（2〇5a-l)導引至上述連結銷（8l5a)之狀態下，藉 由抵接於上述剖面v字溝（2〇5a)之斜面（2〇5a_6)而決定上 述搬送容器（2〇〇)之鉛直方向位置。 第Η發明的搬送容器（200)，其使内部保持高潔淨度的搬 098104801 6 200944449 送容器之開口部之蓋構件（203)，卡合於保持高潔淨度的潔 淨室之開口部之門構件，在使上述二開口部之周邊部密接而 保持高潔淨度狀態下，使用蓋裝卸裝置而裝卸上述蓋構件； ' 其特徵在於’其具備有卡合於連結銷（15a〜15c)而與既定移 ^ 動方向（M)略成直角地設置在該搬送容器下面之剖面v字溝 (205a〜205c)的固定面（205a-l〜205c-l)，而該連結銷與上述 既定移動方向（M)略成直角地被設置在載置該搬送容器且可 〇 朝上述既定移動方向（M)移動的上述蓋裝卸裝置之平台（15)。 第12發明係就第11發明的搬送容器，其中，上述平台（15) 之上述既定移動方向（M)為水平方向，上述固定面 (205a-l〜205C-1)為將上述剖面V字溝（2〇5a〜205c)内設為 凹陷而成的凹部（205a-2〜205c-2)錯直方向之内壁，上述連 結銷（15a~ 15c)之軸方向為斜直方向。 第13發明係就第11發明的搬送容器，其中，於上述凹部 ❹（2〇5a-2〜205C-2)之底部具有平面（2〇5a-7)，藉由使上述底 部之平面與設在上述連結銷（15a〜15c)前端的平面部（15a_?) 進行面接觸，而決定該搬送容器之鉛直方向位置。 ‘帛14發明的搬送容器之蓋裝㈣統，具備有：搬送容器 -(200) ’内部保持高潔淨度；及蓋裝卸褒置，使上述搬送容 器之開π部之蓋構件⑽3)，卡合於保持高潔淨度的潔淨室 之開口部之門構件，在使上述二開口部之周邊部密接而保持 高潔淨度的狀態下裝_上述蓋構件；其特徵在於，上述蓋裝 098104801 7 200944449 卸裝置具有連結銷（15a〜15c)’該連結銷與既定移動方向（M) 略成直角地被設置在載置上述搬送容器且可朝上述既定移 動方向（M)移動的平台（15)，上述搬送容器具有固定面 (205a-l〜205c-l)，該固疋面卡合於上述連結銷，同時與上 述既定移動方向略成直角地設置在上述搬送容器了面之剔 面V字溝（205a〜205c)。 (發明效果） 根據本發明可達到以下的效果： (1) 本發明中即使對門構件以較大的力進行壓抵而對平台 之移動方向施加較大的力，因為設於搬送容器的固定面與設 於平台的連結銷相卡合，因此可防止搬送容器浮起的情況。 (2) 本發明中平台之移動方向為水平方向，連結銷為錯直 方向之銷’對搬送容器船直方向之内壁固定面形成卡合因 此可決定搬送容器水平方向之位置。 (3) 本發明中藉由使連結銷之平面部與搬送容器凹部之平 面面接觸，而決定搬送容器鉛直方向之位置。即，因為搬送 容器鉛直方向之定位為面接觸，因此當連結銷與搬送容器的 底面相抵接時，不會使搬送容器之底面凹陷情形，可提高搬 送容器的耐久性。 (4) 本發明具備有檢測出連結銷之平面部與搬送容器底部 之平面已形成面接觸的檢測部，因此僅在搬送容器被正確配 置之情況下驅動移動平台，可防止對蓋裝卸裝置及搬送容器 098104801 200944449 施加過剩負載’俾可防止 ⑸本發财連結銷 當利用在習知搬送容器之情^可朝財向進行移動，因此 部’亦可因應習知之搬送容^了，連、字溝壓入於基 【實施方式】 本發明之目的在於提供— 、種即使將搬送容器的蓋體以較 大的力壓抵蓋裝卸裝置的p丨 〇 ⑩ 的門構件亦可防止搬送容器發生浮 起情況的搬送容器之蓋步細駐m 展卸裝置、搬送容器及搬送容器之蓋 裝卸糸統’藉由在搬送裳II夕装抽 之盎裴卸裝置設置平台與連結銷 而實現，該平台係載置搬送容器且可移動，而該連結銷係卡 合於設置於搬送容㈣面V字溝中且與平台移動方向呈略 直角的固定面’並與上述移動方向呈略直角地設置於平台 上。 (第1實施形態） 以下，參照圖式等針對本發明第i實施形態進行說明。 圖1所示係本發明搬送容器之蓋裝卸裝置的第i實施形態 圖。 搬送容ϋ之蓋裝卸裝置⑽（裝载口）係具備有：隔間板 1〇卜開口部102、門103、閂鎖機構1〇4、及平台15等， 該隔間板1G1區隔出高潔淨度” Α與低潔淨度^ Β，該 開口部102减於隔間板101 +，使高潔淨度空間八與低潔 淨度空間Β相連通’該門103使隔間板1〇1的開口部1〇2 098104801 9 200944449 開閉，該閂鎖機構104具備有在門103中所設置的2根定位 銷104a、104b與2支T字鎖104c、104d，將搬送容器200 的蓋203閂鎖，該平台15設置於低潔淨度之空間B側，載 置有搬送容器200，具有3根定位銷15a、15b、15c與1支 鎖定鎖105d。 搬送容器200為内部空間C保持高潔淨度並收容著複數片 半導體晶圓（例如25片程度）的容器。 該搬送容器200係具備有：容器本體201、開口部202、 蓋203、及底面205，該開口部202係設置於容器本體201 之一面上’該蓋203使開口部202開閉，並具有定位銷 104a、104b 所嵌合的銷孔 204a、204b、與 T 字鎖 104c、104d 所卡合的鎖孔204c、204d，該底面205具有平台15的定位 銷15a、15b、15c所嵌合的剖面V字溝205a、205b、205c、 與鎖定鎖105d所卡合的鎖孔205d。 若將搬送容器200載置於平台15上，則3根定位銷I5a、 15b、15c嵌合於剖面V字溝205a〜205c。此處，若解除未圖 示之鎖定按鈕，鎖定鎖105d便上升且傾斜，而卡合於鎖孔 205d中’同時平台15整體會朝隔間板ι〇1側移動既定距離 (約30mm程度），搬送容器200便密接於隔間板101。在隔 間板101的開口部1〇2與搬送容器200的開口部202外圍， 設有未圖示之〇形環等密封材，經由密接可保持潔淨度。 搬送容器200中，藉由平台15的移動，使蓋203密接於 098104801 10 200944449 門103,定位銷l〇4a、104b嵌合於蓋203之銷孔204a、204b， T字鎖104c、l〇4d將插入鎖孔204c、204d。然後，利用未 圖示的旋轉致動器等，使T字鎖104c、104d旋轉90度，藉 ' 此爪2〇4e~204h被拉入，而解除容器本體201與蓋203之鎖 - 定。 接著，門103利用未圖示之驅動機構被拉入於空間A内側 (箭頭D1)並下降（箭頭D2)’使搬送容器200的内部空間C與 0 隔間板的内部空間A在保持高潔淨度之狀態下相連通。 以下，針對第1實施形態之搬送容器2〇〇與平台15進行 更詳細的說明。 圖2所示係第1實施形態的搬送容器2〇〇及蓋裝却裝置之 平台15的圖，圖2(a)所示係圖2(b)中A1-A1線切剖剖視 圖，圖2(b)所示係仰視圖。 圖3所示係第1實施形態的剖面v字溝2〇5a與定位銷15a ❿相卡合狀態的剖視圖，圖3(a)所示係圖2(b)中A2-A2線切 剖剖視圖’圖3(b)所示係剖面V字溝2〇5a從長度方向所觀 看到的侧面剖視圖（圖2(b)中B-B線切剖剖視圖）。 •如圖2(b)所示，搬送容器200係具備有3條剔面V字溝 205a、205b、205c。 剖面V字溝205a、205b被配置成朝平台15之移動方向（箭 頭M)隨靠近蓋203側而相互離開。另一方面，剔面v字溝 205c被配置成長度方向平行於移動方向。 098104801 11 200944449 以下，雖主要針對剖面V字溝205a進行說明，但剖面v 字溝205b、205c與剖面V字溝205a形狀相同’因此省略說 明。 如圖3所示，刻面V字溝205a由長孔205a~2(凹部）與斜 面205a-6所形成。 長孔205a-2係使剖面V字溝205a朝鉛直方向（即與移動 方向（水平方向）成直角的方向）凹陷而設置。如圖2(b)戶斤 示，長孔205a-2當觀看搬送容器200之底面時為細長形狀， 二端部205a-3、205a-4為半圓狀。 如圖3所示，長孔205a-2内壁為錯直方向之固定面 205a-l ’如後述’該固定面205a-l卡合於定位銷i5a。 斜面205a-6設在長孔205a-2之整個周圍與搬送容器2〇〇 之底面205a-5之間成推拔狀，傾斜角度保持一定。 如圖2所示，平台15為載置搬送容器2〇〇並進行移動的 構件。平台15的移動方向為水平方向。平台B具備有3 根定位銷15a、15b、15c(連結銷）。 定位銷15a、15b、15c被配置於與經載置的搬送容器2〇〇 之剖面V字溝205a、2G5b、2G5c相對應的位置處。定位銷 15a、15b、15c被設置成軸方向為鉛直方向，從平台15突 出。另外’以下雖主要針對定位銷15a進行說明，但因為定 位銷15b、15c之形狀與定位銷i5a相同，因此省略說明。 如圖3所*，定位銷15a為圓柱狀構件。定位銷—的直 098104801 12 200944449 徑與長孔205a的寬度大致相同，定位銷15a卡合於長孔 205a。如圖2(b)所示，定位銷i5a的直徑、與長孔二 端部205a-3、205a-4的半圓直徑大致相同。理由在於當將 搬送容器200載置於平台15的情況時，若定位銷丨％與二 . 端部205a_3、20%~4相接觸時，經由使該等面接觸可防止 該等遭受破損。 如圖3所示，在定位銷i5a之前端緣部沿整個周圍設置有 ❹導引部15a-6。導引部i5a-6的剖面形狀為推拔狀。導引部 15a-6的傾斜角度係與剖面v字溝2〇5a的斜面2〇5a-6之傾 斜角度大致相同。藉此，當將搬送容器2〇〇載置於裝卸裝置 10之平台15時，剖面v字溝2〇5a的斜面205a-6會在導引 部15a-6上進行滑動，而固定面朝定位銷15&導引， 可順暢地配置搬送容器200。 接著，針對搬送容器200及平台15的動作進行說明。 Φ 如圖2所示，當將搬送容器200載置於平台15時，操作 員只要在定位銷15a、15b、15c之導引部（參照圖3所示之 導引部15a-6)與剖面V字溝2〇5a、2〇5b、2〇5c之斜面（參 照圖3所示之斜面2〇5a-6)相接觸的範圍内配置搬送容器 • 200即可。隨此，長孔驗_2、__2、2〇5b_2朝定位二 15a、15b、15c 導引，使固定面 20534、、2〇5c i 與固定面15a-卜15b-l、15c-l相卡合。 藉由使疋位銷15a之固定面I5a-1與剖面v字溝2〇5a之 098104801 13 200944449 固定面205a-l相卡合（參照圖2(a))，又使定位銷15b之固 定面15b-l與剖面V字溝205b之固定面205b-l相卡合，而 在移動方向之前後方向定位搬送容器2〇〇。 更進一步，藉由使定位銷15c之固定面15c-l、與剖面V 字溝205c之固定面205c-l相卡合，而鎖住水平方向之旋轉 (參照箭頭Θ )’於水平方向定位搬送容器200。 另一方面，就鉛直方向而言，如圖3所示，搬送容器200 中定位銷15a前端部之平面部i5a-7與搬送容器200之長孔 205a底部的平面205a-7相抵接。關於定位銷i5b與長孔 205b-2、以及定位銷15c與長孔205c-2亦同。藉此，決定 搬送容器200對於平台15之鉛直方向上位置。另外’該等 平面部利用面接觸而承受搬送容器2〇〇之負載，因此不會使 搬送容器200之底面205a-5凹陷，可提高搬送容器200之 耐久性。 當裝卸蓋203時，關於可防止搬送容器2〇〇發生上推（浮 起）情況之理由，已如上所述。 圖4所示係第1實施形態之搬送容器2〇〇(圖4(a))、與習 知搬送容器300(圖4(b)〜圖4(d))之比較說明圖。另外，圖 4(a)所示係與上述圖3(a)相同之剖視圖，表示作為參考用。 習知搬送容器300中，若平台15朝箭頭Μ之方向前進， 因為剖面V字溝305c與移動方向相平行，因此不會特別發 生多餘的力，但剖面V字溝305a、305b中卻會發生將搬送 098104801 14 200944449 谷器300朝箭頭n(N1)方向上推的力。 結果如圖4(d)所示’搬送容器300會發生以定位銷15c 為中心朝箭頭P(P1)方向的旋轉力。因此，搬送容器3〇〇的 前端上半部會被拉離隔間板11，而有引發密封不良等情況 - 的可能性。 相對於此’如圖4(a)所示，在第1實施形態的搬送容器 200中’藉由在下面所形成的剖面v字溝2〇5a(205b、205c) ❹ °又置垂直的固疋面205a-l(205b-l、205c~*l)，可與定位銷 15a(15b、15c)之垂直固定面 i5a-l(15b-l、15c-l)相接觸 (結合姿勢矯正手段），因此即使以水平方向的力推壓，亦不 會發生將搬送容器200上推的力。 但是，一般若晶圓直徑變大，便必須將搬送容器與蓋設為 較大型，當裝卸蓋時，對搬送容器便需要施加更大的力。因 此，晶圓直徑越大，越容易發生搬送容器浮起情況。 ❹ 相對於此’在本實施形態的搬送容器200中係使與對搬送 容器200施力方向成直角方向的鉛直方向定位銷i5a、15b、 15c、與固疋面205a-l、205b-l、205c-l相卡合，可有效地 •防止浮起情況。 * (第2實施形態） 圖5所示係第2實施形態蓋裝卸裝置的定位銷815a與搬 送容器200的剖面V字溝205a相卡合狀態之剖視圖（相當於 圖3(a)的圖）。 098104801 15 200944449 變更第1實施形態的定位銷 第2實施形態的蓋裝卸裝置為 15a〜15c而成者。 本實施形態蓋裝卸褒置之平台815係配置有3個定㈣ 810。圖5所示係其中一個。 定位部810係具備有：基部811、定位銷8心、施力構件 816、底蓋817、及光感測器Mg。 基部811為圓筒狀構件，將定位銷81如保持成可朝定位 銷815a之軸方向（即錯直方向）移動。基部811係具有將固 定面205a-l朝定位銷8i5a導引的基部導引部811_1(v字斜 面抵接部）。基部導引部8叫形狀為圓弧狀，藉由使 該圓弧接觸到剖面v字溝205a之斜面2〇5a_6，而導弓丨固定 面 205a-l 。 基部導引部811-1在將固定面導引至定位銷㈣ 的狀態下抵接於剖面V字溝205a之斜面205a-6，藉此在平 台815之鉛直方向（與移動方向成直角之方向）上決定搬送 容器900之位置。 基部811外圍設有螺紋部811—2,藉由該螺紋部811_2與 螺帽812而安裝於平台815上。 定位銷815a被配置在平台815上與第丨實施形態之定位 銷15a、15b、15c相同的位置處。定位銷815a可在鉛直方 向移動地保持於基部811上。定位銷815a為頂面球狀的構 件’且下面設有遮光部815a-7。 098104801 16 200944449 在定位銷815a從基部811朝上側突出的狀態下，遮光杳 815a-7被設成其下端位在與底蓋817之下面相同的位4 處。因此，在定位銷815a壓入於基部811内部之狀熊下置 遮光部815a-7如圖中二點鏈線所示從底蓋817中突出了 • 施力構件816為收容於基部811之内部中的壓縮線圈彈菁 (coil spring)。施力構件816之錯直方向下側端部經底蓋 817而定位，鉛直方向侧之端部抵接於定位銷μ%之下面 Φ 藉此，施力構件816將定位銷815a朝鉛直方向上側上推， 而朝從基部811之頂面突出側施力。 底蓋817螺合於基部811，為將基部811之下侧上蓋的構 件。底蓋817中設有可讓定位銷8i5a之遮光部815a_7插通 的貫通孔。 光感測器818為發光元件818-1及受光元件818-2經相對 向配置而成的檢測部。光感測器818被配置於底蓋817之下 ❹面。當定位銷815a的遮光部815a_7未從底蓋817的下面突 出時，受光元件818-2便可接受發光元件818-1所發出的光 L°另一方面’當遮光部815a_7較底蓋817下面更突出的情 • 況，因為發光元件818-1的光L會被遮光部815a-7遮蔽， • 因而受光元件818-2便無法接受光L。如此一來，光感測器 818便可檢測遮光部815a_7是否突出於底蓋817的下面。 光感測器818係連接於未圖示之控制器，光感測器818 的檢測信號輸出至控制器。 098104801 17 200944449 其次’針對搬送容器200及平台815的動作進行說明β 當將搬送容器200載置於平台815時，操作員只要在使基 部導引部811 -1與剖面V字溝205a之斜面2〇5a-6相接觸的 範圍内配置搬送容器200即可。隨此，長孔2〇5a_2導引至 定位銷815a，使固定面205a-l與定位銷8i5a之固定面 815a_l互相卡合。 此情況下，在藉由基部導引部811-1將固定面2〇5a-l導 引至疋位銷815a的狀態下，定位銷8i5a經由按押於剖面v ◎ 字溝205a之斜面205a-6而朝基部811内部壓入。 隨此，定位銷815a的遮光部815a-7較底蓋817下面突 出。控制器配合光感測器818的輸出，當判斷搬送容器2〇〇 並未確實載置於平台815上，則不驅動移動馬達（未圖示） 來使移動平台815，而維持著平台815停止狀態。 然後’在藉由基部導引部811-1導引固定面2〇5a-l的狀 態下’定位鎖815a受施力構件816施力而從基部811突出 〇 (圖5的狀態）。透過定位銷815a決定搬送容器2〇〇對於平 台815之水平方向位置。 另一方面’在鉛直方向上，藉由使基部導引部8!^抵接 於剖面V字溝205a之斜面2〇5a-6，而決定搬送容器200之 . 位置。 在此狀態下，定位銷815a的遮光部815a_7下端位在與底 蓋817下面相同之位置處。控制器配合光感測器818的輸 098104801 18 200944449 出’當判斷搬送容器200已確實載置於平台815上’便驅動 移動馬達使平台815前進。 另外，搬送容器2〇〇是否確實已載置於平台815上的判 斷’亦可使用以下方法實施。 * 第1方法係在平台815設置光感測器，測定平台815表面 與搬送容器200底面間之距離，判斷有無容器200的方法。 但是，此方法必須將感測器的檢測誤差設置為收斂於例如 ❺ 2mm程度以内，就設置精度與維修等觀點而言較不佳。 第2方法係在銷815a〜815c等中設有檢測容器200之負載 的壓力感測器等，判定有無容器200的方法。但是，一般因 為壓力感測器的檢測誤差較大，因而會成為平台815錯誤動 作的肇因。此外，因為容器200因收容物的種類等而會有不 同的重量’因而容器200的負載會有變動。所以，此方法亦 較不佳。 〇 相對於該等方法，本實施形態中，只要進行定位銷815a 是否有從底蓋817下面突出的判定便可，幾乎不會有檢測錯 誤的情況發生。且，定位銷815a的移動行程可確保長孔 ‘ 205a-l的深度程度。因而，可將該移動行程（即定位銷 突出量）設為例如5mm程度的充分長度，不必要求較高設置 精度，且維修亦容易。 ° 圖6所示係第2實施形態蓋襄卸裝置的定位鎖咖與習 知搬送容器綱的剖面V字溝305a相卡合狀態下的剖視圖 098104801 19 200944449 (相當於圖3(a)的圖）。 目前已❹的搬送容器未具有如搬送容謂G的長孔 205a-2、205b-2、205c-2(參照圖2)。此情況下，定位銷_ 亦被按押於剖面V字溝3G5a之斜面3Q5a_6，致使朝基部81 i 内部壓入。而且’基部導弓丨部81卜1(v字斜聽接部）抵接 於剖面V字溝3〇5a之斜面3()5a—6,藉此可決定搬送容器3〇〇 在水平方向之位置及在鉛直方向之位置。 另外此情況下’控㈣無關有無域卿818的檢測信 號’只要使平台815移動即可。 由此’本實施形態的蓋裝卸裝置亦可因應習知搬送容器 300。 如以上說明，第2實施形態的蓋裝知裝置係判斷搬送容器 200是否已確實地載置於平台815 i，在經確實載置時便可 使平台815前進。 再者，第2實施形態的蓋震卸裝置對於設有長孔觀_2、 205b 2、2G5c-2的搬送容器2GG與未設有該等的習知搬送 容器300任一者均可因應。 (第3實施形態） 圖7所示係第3實施形態蓋裝卸装置之定位銷9恤與搬 送容器200之剖面v字溝啊相卡合狀態的剖視圖（相當於 圖3(a)的圖）。 在本實施形態蓋裝卸裝置之平台915中，於與第（實施形 098104801 20 200944449 I、定位銷15a 15b、15c相同之位置處配置有3根定位鎖 915a。 疋位銷915a形成為由上段915a_7與下段915&_8所構成 的2段狀’在上段915a-7之前端緣部設有導引部915&_6。 ❹ 導引部U剖面形狀為圓弧狀’抵接於剖面V字溝205a 之斜面2〇5a-6 ’而將剖面v字溝2()5a之岐面驗^導 引至定^肖^之較^❿+又’定位銷仙下段 915a_8(V字斜面抵接部）之㈣為圓弧狀。 在定位銷915a之固定面915a-1與剖面v字溝驗之固 定面20W相卡合的狀態下，以與第2實施形態相同的形 態決定搬送容器200對於平台915之位置。 —P在Jc平方向上’搬送谷器2〇〇經由定位銷9他之固 定面915a-l與長孔205a_2之固定面咖㈠而定位。另一 方面’在鉛直方向上，搬送容器2〇〇經由定位銷—的下 €>段他-8抵接於剖面V字溝2G5a的斜面咖^而於船直 方向被定位。 如以上說明，本實施形態的蓋裝卸裝置中，即使定位銷 915a頂面不是平面^是圓弧狀，亦可定位搬送容器測。 (第4實施形態） 圖8所示係第4實施形態蓋裳卸裝置之定位銷順a、與 搬送容器200之剖面v字溝啊相卡合狀態的剖視圖（相當 於圖3(a)的圖）。 098104801 21 200944449 在本實施形態的定位銷l〇15a中設有可朝鉛直方向移動 的檢測銷1015a-8。此外，定位銷1015a係具備有與第2實 施形態之施力構件816與光感測器818相同的施力構件 1016與光感測器1〇18。 定位銷1015a受施力構件1〇16朝鉛直方向上側施力。當 搬送容器200之V未載置於平台1〇15時，定位銷i〇15a如 圖中二點鏈線所示，從平面部1015a-7突出，又遮光部 1015a-9被設定為位在與底蓋1〇17下面相同之位置處。 另一方面’搬送容器2〇〇載置於平台1〇15,固定面2〇5a-l 由導引部1015a-6進行導引而正常載置時，定位銷1〇15a 之平面部1015a-7與搬送容器2〇〇底部之平面205a-7形成 面接觸。此情況，檢測銷1015a_8由平面2〇5a_7被朝鉛直 方向下側按押。藉此，如圖8所示，檢測銷1〇15a_8被朝定 位銷1015a内部壓入。又，因為遮光部1〇15a_9從底蓋1〇17 犬出，因而受光元件1〇18_2無法接收發光元件1〇18_丨之光 L ° 如此一來，本實施形態的蓋裝卸裝置可檢測出搬送容器 200已載置於平台1〇15。 如上說明，本實施形態的蓋裝卸裝置根據由發光元件 1018 1與受光元件1Q18-2所構成的檢測部之輸出，可檢測 出定位銷1015a之平面部i〇i5a_7與搬送容器2〇〇底部之平 面205a-7已形成面接觸。藉此，本實施形態的蓋裝卸裝置 098104801 22 200944449 可檢測出搬送谷器200疋否已正常地載置於平台i〇i5上。 另外，本實施形態的蓋裝卸裝置亦可取S發光元件 與受光元件篇-2,改為在定位銷1〇以的平面部 l〇15a-7具備有壓力感測器。此情況下，蓋裝卸裝置為了進 •行是否已載置搬送容H 的判定，只要確認伴隨定位銷 1015a之平面部1015a-7與搬送容器2〇〇底部之平面2〇5&_7 面接觸所產生的壓力變化便可。藉此，蓋裝卸裝置可更確實 ❿地檢測出搬送容器200是否已正常地載置於平台1〇15上。 以上，針對本發明實施形態進行說明，惟本發明並不受限 於上述實施形態，可有各種之變形與變更，該等均在本發明 技術範疇内。此外，實施形態所記載的效果僅不過是列舉出 本發明所產生的最佳效果而已’本發明所產生的效果並不受 限於實施形態所記載。 【圖式簡單說明】 ❹ 圖1為表示本發明搬送容器之蓋裝卸裝置第}實施形態概 略的立體圖。 圖2(a)及（b)表示第1實施形態搬送容器之蓋裝卸裝置之 平台定位構件圖。 •圖3(a)及（b)為第1實施形態搬送容器之剖面v字溝與蓋 裝卸裝置之定位銷相卡合狀態下的剖視圖。 圖4(a)至（d)為第1實施形態之搬送容器與習知搬送容器 之比較說明圖。 098104801 23 200944449 圖5為第2實施形態搬送容 器之剖面V字溝與蓋裝卸裝置 之定位銷相卡合狀態下的剖視圖。 圖6為第2實施形態蓋裝卸裝w + ^ , 置之定位銷與習知搬送容器 之剖面V字溝相卡合狀態下的剖視圖。 圖7為第3實施形態蓋裝却楚置之定位銷與搬送容器之剖 面V字溝相卡合狀態下的剖视圖。 圖8為第4實施形態蓋料震置之定位銷與搬送容器之剖 面V字溝相卡合狀態下的剖視圖。 【主要元件符號說明】 11 ' 101 隔間板 15、815、915、1015 平台 15a、15b、15c、104a、 104b、815a、9i5a、i〇i5a 15a-l、15b-l、15c-l、 205a-l、2051η、205c-l、915a-l 15a-6 ' 915a-6 導引部 15a-7、1015a-7 平面部 100 蓋裝卸裝置 102 、 202 開口部 103 門 104 問鎖機構 104c、104d τ字鎖 105d 鎖定鎖 200 、 300 搬送容器 定位銷 固定面 098104801 24 200944449 201 203 204a、204b 204c、204d、205d 204e〜204h 205 、 205a-5 205a、205b、205c、305a 魯 205a_2 、 205b_2 、 205c_2 205a-3 、 205a-4 205a-6 205a-7 810 811 811-1 φ 811-2 815a-7 、 1015a-9 816 、 1016 817、 1017 818、 1018 818-1 、 1018-1 818-2 、 1018-2 915a-7 098104801 容器本體 蓋 銷孔 鎖孔 爪 底面 305b > 305c 剖面V字溝 長孔 二端部 斜面 平面 定位部 基部 基部導引部 螺紋部 遮光部 施力構件 底蓋 光感測器 發光元件 受光元件 上段 25 200944449 915a-8 下段 1015a-8 檢測銷 A 高潔淨度空間 B 低潔淨度空間 C 内部空間 L 光 098104801 26[Technical Field] The present invention relates to a transfer tray that transports a thin substrate such as a semiconductor wafer and transports it in a clean room, and dismounts it while maintaining mutual cleanliness. A lid loading and unloading device for the lid of the transport container, a transport container, and a lid loading and unloading system for the transport container. [Prior Art] 盖 The cover of a transfer container such as a F0UP (FR0NT OPENING UNIFIED POD) that transports a semiconductor wafer is detachably held in the horizontal direction and the vertical direction. A load port that moves in two directions (for example, Patent Document). The loading port holds the conveying container on the moving platform and presses the lid of the conveying container against the door member to adhere thereto, so that the lid of the conveying container is held by the door member. The moving platform and the transport container determine the position in the recording direction and the horizontal direction by the pin provided on the moving platform and the v-groove provided on the bottom surface of the transport container. . However, when the transfer container accommodates a large-mouth wafer having a diameter of more than 3 () _, the load port must press the cover of the transfer container with a large force against the component. In this case, the bottom of the container _ V-groove will straddle the lock of the moving platform, and there is a possibility that the transport container will float. (Patent Document 1) Japanese Patent Laid-Open Publication No. H-288991 (Summary of the Invention) 098104801 3 200944449 (Problems to be Solved by the Invention) The problem of the present month is to provide a cover that can be pressed against the cover with a large force. The door member of the loading and unloading device can also prevent the lid loading and unloading device, the transport container, and the lid loading and unloading system of the transport container from being transported by the transport container. (Means for Solving the Problem) The present invention solves the problem by the following means of solving. Further, in order to facilitate understanding, the component symbols to which the embodiment (4) of the present invention is applied are described, but are not limited thereto. However, the configuration for explaining the component symbols can be appropriately modified, and at least some of them can be replaced with other components. In the lid attachment/detachment device of the transfer container according to the first aspect of the invention, the lid member (2〇3) of the opening portion of the transfer tray (200) having a high cleanliness inside is engaged with the opening of the clean room in which the high cleanliness is maintained. The door member attaches and detaches the cover member while keeping the peripheral portions of the two openings in close contact with each other, and is characterized in that it is provided with a platform (15) (M) moving; and the connecting pins (15a to 15c) are engaged with the fixing faces (205a) of the cross-sectional v-grooves (205a to 205c) provided at a right angle to the predetermined moving direction (M) on the lower surface of the transfer container -1 to 205c-1) 'The above-mentioned stage is set at a right angle to the above-described predetermined moving direction. According to a second aspect of the invention, in the lid loading and unloading device of the transport container according to the first aspect of the invention, the predetermined moving direction of the platform (15) is a horizontal direction, and the axis of the connecting pin (15a to 15c) The direction is the vertical direction, and the upper surface (10) a-Mn) is a concave portion (2〇5a_2 to 2〇5c_2) in which the inside of the v-groove (2〇5a to 2〇5c) is recessed. The inner wall in the vertical direction. According to a third aspect of the invention, in the cover loading and unloading device of the transport container according to the first aspect of the invention, the connecting pin (15a to 15c) has a flat portion ' (15a to 7) provided at a distal end portion, and the flat portion and the flat portion are provided The plane (2〇5a-7) at the bottom of the concave portions (205a-2 to 205c-2) of the transfer container (2) is in surface contact with ', and the vertical position of the transfer container is determined. In the invention, the lid loading and unloading device of the transport container according to the third aspect of the invention is provided with the flat portion (1015a-7) for detecting the connecting pin (10) 5a) and the transport container (2).上述) The above-mentioned plane (205a-7) at the bottom has formed a surface contact detecting portion dou-丨. According to a fifth aspect of the invention, there is provided a lid loading and unloading device for a transport container, comprising: a slope (205a-6, 205a-6) that abuts against the cross-sectional v-groove (2〇5a, 2〇5a); On the other hand, it is determined that the V-shaped bevel contact portion (811-1, 915a_8) of the transfer container (2〇〇) is placed in the wrong direction. According to a sixth aspect of the invention, in the lid loading and unloading device of the transport container according to the first aspect of the invention, the guide portion (15a_6) in which the predetermined moving direction (M) of the stage (15) is a horizontal cross-sectional shape is provided in a push-out manner. The front end portion of the connecting pin (i5a to i5c), the guiding portion (15a-6) guides the fixing surface (205a-1 to 205C-1) to the connecting pin. According to a seventh aspect of the invention, in the lid loading and unloading device of the transport container according to the first aspect of the invention, the predetermined moving direction (M) of the platform (915) is a horizontal direction, and the cross-sectional shape 098104801 200944449 is guided to the connecting pin. The guide portion (915a-6) having an arc shape is provided in the connection lock (9ι5 > the front edge portion of the guide portion (915a-6) to fix the fixed surface (2〇^^8 invention) In the cover loading and unloading device I of the transfer container according to the first aspect of the invention, the fixed surface (205a-) is provided via a slope (205a-6) that contacts the V-shaped groove (2〇5a) of the cross section. l) guiding the base guide portion (811-1) of the connected girl (815a); holding the base portion (811) of the connecting pin in the axial direction of the connecting pin; and the coupling pin on the shaft a direction pushing member (816) that urges from the protruding portion of the base portion; and the connecting pin is guided by the base guiding portion to guide the fixing surface, by pressing the inclined surface of the V-shaped groove (2) The 〇5a-6) is press-fitted into the martial part, and is guided from the base by the urging force of the urging member in a state where the fixing surface is guided by the base guiding portion. The lid loading and unloading device of the transport container according to the invention, comprising: detecting that the connecting pin (815a) has passed from the base portion (8ΐι) The present invention relates to a cover loading and unloading device for a transport container according to the eighth aspect of the present invention, wherein the base guide portion (811-丨) is a v-shaped inclined surface. a joint portion (81M) that abuts against a slope of the cross-section v-groove (2〇5a) in a state in which the fixing surface (2〇5a-1) is guided to the coupling pin (8l5a) 2〇5a_6), the vertical position of the transport container (2〇〇) is determined. The transport container (200) of the second invention maintains a high cleanliness inside the container 098104801 6 200944449 The cover member of the opening of the container ( 203) a door member that is engaged with an opening portion of a clean room that maintains high cleanliness, and that is attached to and detached from the peripheral portion of the two openings to maintain a high cleanliness state, and is attached and detached using a lid attaching and detaching device; It is characterized in that it has a fixing surface which is provided on the cross-section v-grooves (205a to 205c) which are disposed at a right angle to the transfer direction in the predetermined transfer direction (M). 205a-l~205c-1), and the connecting pin is at a right angle to the predetermined moving direction (M) In the above-described platform (15), the above-described platform (15) is the transport container according to the eleventh aspect of the present invention, wherein the transport container is placed in the transport container (15). The predetermined moving direction (M) is a horizontal direction, and the fixed surfaces (205a-1 to 205C-1) are recesses (205a-) in which the inside of the cross-section V-grooves (2〇5a to 205c) are recessed. 2 to 205c-2) The inner wall in the wrong direction, the axial direction of the connecting pins (15a to 15c) is oblique. According to a thirteenth aspect of the invention, in the transfer container of the eleventh aspect, the bottom portion (2〇5a-2 to 205C-2) has a flat surface (2〇5a-7), and the bottom surface is provided The flat portion (15a_?) at the front end of the connecting pins (15a to 15c) is in surface contact, and the vertical position of the transport container is determined. The cover (4) of the transport container of the invention of the present invention includes: a transport container - (200) 'the interior maintains a high degree of cleanliness; and a cover member (10) 3 for attaching and detaching the transfer container to the π portion, the card The door member of the opening portion of the clean room that maintains the high cleanliness is attached to the peripheral portion of the two openings to maintain a high degree of cleanliness. The cover member is characterized in that the cover is 098104801 7 200944449 The unloading device has a connecting pin (15a to 15c). The connecting pin is disposed at a right angle to the predetermined moving direction (M), and is disposed on a platform (15) on which the transport container is placed and movable in the predetermined moving direction (M). The transfer container has a fixing surface (205a-1 to 205c-1), and the fixing surface is engaged with the connecting pin, and is disposed at a right angle to the predetermined moving direction on the surface of the conveying container. (205a~205c). (Effect of the Invention) According to the present invention, the following effects can be obtained: (1) In the present invention, even if the door member is pressed with a large force, a large force is applied to the moving direction of the platform because the fixing surface provided on the conveying container It is engaged with the connecting pin provided on the platform, so that the transport container can be prevented from floating. (2) In the present invention, the direction in which the platform is moved in the horizontal direction, and the pin in which the connecting pin is in the wrong direction is engaged with the fixing surface of the inner wall in the straight direction of the conveying container, so that the position in the horizontal direction of the conveying container can be determined. (3) In the present invention, the position of the transport container in the vertical direction is determined by bringing the flat portion of the joint pin into contact with the flat surface of the transfer container recess. In other words, since the positioning of the transfer container in the vertical direction is in surface contact, when the connecting pin abuts against the bottom surface of the transfer container, the bottom surface of the transfer container is not recessed, and the durability of the transfer container can be improved. (4) The present invention is provided with a detecting portion that detects that the flat portion of the connecting pin and the flat surface of the transfer container are in surface contact with each other. Therefore, the moving platform is driven only when the transport container is correctly disposed, and the cover attaching and detaching device can be prevented. Transfer container 098104801 200944449 Applying excess load '俾 can prevent (5) The money-selling pin can be moved in the direction of wealth in the case of the conventional transfer container, so the department can also transfer the contents according to the conventional knowledge. [Embodiment] It is an object of the present invention to provide a door member of a p丨〇10 that can be pressed against a lid of a loading and unloading device with a large force to prevent the conveying container from floating. The cover of the transfer container is the same as that of the transfer device, the transfer container, and the cover of the transfer container, which is realized by the platform and the connecting pin in the transfer device. The transport container is mounted and movable, and the connecting pin is engaged with a fixed surface 'disposed in the V-shaped groove of the transporting surface (four) and at a right angle to the moving direction of the platform It has an approximately right angle to the direction provided on the internet. (First embodiment) Hereinafter, an i-th embodiment of the present invention will be described with reference to the drawings and the like. Fig. 1 is a view showing an i-th embodiment of a lid attaching and detaching device for a transfer container of the present invention. The cover loading and unloading device (10) (loading port) for transporting the accommodating device includes a partition plate 1 , an opening portion 102 , a door 103 , a latch mechanism 1 〇 4 , a platform 15 , and the like, and the partition plate 1G1 is partitioned. High cleanliness" 低 and low cleanliness ^ Β, the opening portion 102 is reduced to the compartment plate 101 +, so that the high cleanliness space eight is connected to the low cleanliness space ' 'the door 103 makes the partition plate 1 〇 1 The opening portion 1〇2 098104801 9 200944449 is opened and closed, and the latch mechanism 104 is provided with two positioning pins 104a and 104b and two T-shaped locks 104c and 104d provided in the door 103, and the cover 203 of the conveying container 200 is latched. The platform 15 is disposed on the space B side of low cleanliness, and has a transfer container 200 mounted thereon, and has three positioning pins 15a, 15b, and 15c and one lock lock 105d. The transfer container 200 maintains high cleanliness for the internal space C. A container that accommodates a plurality of semiconductor wafers (for example, about 25 pieces). The transfer container 200 includes a container body 201, an opening 202, a lid 203, and a bottom surface 205. The opening 202 is provided in the container body 201. On one side, the cover 203 opens and closes the opening 202 and has the positioning pins 104a and 104b fitted thereto. Pin holes 204a, 204b, lock holes 204c, 204d engaged with the T-locks 104c, 104d, the bottom surface 205 having the cross-sectional V-shaped grooves 205a, 205b, 205c to which the positioning pins 15a, 15b, 15c of the platform 15 are fitted The lock hole 205d that is engaged with the lock lock 105d. When the transport container 200 is placed on the platform 15, the three positioning pins I5a, 15b, and 15c are fitted to the cross-sectional V-shaped grooves 205a to 205c. When the lock button (not shown) is released, the lock lock 105d is raised and tilted, and is engaged with the lock hole 205d. At the same time, the entire platform 15 is moved toward the side of the partition plate ι1 by a predetermined distance (about 30 mm), and the container 200 is transported. In the opening portion 1〇2 of the partition plate 101 and the periphery of the opening 202 of the transport container 200, a sealing material such as a 〇-shaped ring (not shown) is provided, and the cleanliness can be maintained by the close contact. In the container 200, by the movement of the platform 15, the cover 203 is in close contact with the 098104801 10 200944449 door 103, and the positioning pins 10a, 104b are fitted into the pin holes 204a, 204b of the cover 203, and the T-locks 104c, 104b will be The lock holes 204c and 204d are inserted. Then, the T-locks 104c and 104d are rotated by a rotary actuator or the like (not shown). When the rotation is 90 degrees, the claws 2〇4e to 204h are pulled in, and the lock of the container body 201 and the lid 203 is released. Then, the door 103 is pulled into the space A by the drive mechanism (not shown) (arrow D1) and descending (arrow D2)' allows the internal space C of the transport container 200 to communicate with the internal space A of the 0 partition plate while maintaining high cleanliness. Hereinafter, the transfer container 2A and the stage 15 of the first embodiment will be described in more detail. Fig. 2 is a view showing the transfer container 2A of the first embodiment and the platform 15 of the capping device, and Fig. 2(a) is a cross-sectional view taken along line A1-A1 of Fig. 2(b), Fig. 2 (b) shows a bottom view. Fig. 3 is a cross-sectional view showing a state in which the cross-sectional V-groove 2〇5a of the first embodiment is engaged with the positioning pin 15a, and Fig. 3(a) is a cross-sectional view taken along line A2-A2 of Fig. 2(b). Fig. 3(b) is a side cross-sectional view of the V-shaped groove 2〇5a in the cross section viewed from the longitudinal direction (a cross-sectional view taken along line BB in Fig. 2(b)). As shown in Fig. 2(b), the transport container 200 is provided with three reticle V-grooves 205a, 205b, and 205c. The cross-section V-shaped grooves 205a, 205b are arranged to move away from each other toward the side of the cover 203 toward the moving direction of the stage 15 (arrow M). On the other hand, the face v groove 205c is arranged such that the length direction is parallel to the moving direction. 098104801 11 200944449 Hereinafter, the cross-section V-shaped groove 205a will be mainly described, but the cross-sectional V-shaped grooves 205b and 205c have the same shape as the cross-sectional V-shaped groove 205a. As shown in Fig. 3, the faceted V-shaped groove 205a is formed by long holes 205a to 2 (recessed portions) and inclined faces 205a-6. The long hole 205a-2 is provided such that the cross-section V-shaped groove 205a is recessed in the vertical direction (that is, a direction perpendicular to the moving direction (horizontal direction)). As shown in Fig. 2(b), the long hole 205a-2 has an elongated shape when the bottom surface of the transfer container 200 is viewed, and the two end portions 205a-3 and 205a-4 are semicircular. As shown in Fig. 3, the fixing surface 205a-1' of the inner wall of the long hole 205a-2 in the wrong direction is engaged with the positioning pin i5a as will be described later. The inclined surface 205a-6 is provided between the entire circumference of the long hole 205a-2 and the bottom surface 205a-5 of the transfer container 2A so as to be pushed and pulled, and the inclination angle is kept constant. As shown in Fig. 2, the stage 15 is a member on which the transfer container 2 is placed and moved. The moving direction of the platform 15 is horizontal. The platform B is provided with three positioning pins 15a, 15b, and 15c (coupling pins). The positioning pins 15a, 15b, and 15c are disposed at positions corresponding to the cross-sectional V-shaped grooves 205a, 2G5b, and 2G5c of the transport container 2A placed thereon. The positioning pins 15a, 15b, 15c are disposed such that the axial direction is a vertical direction and protrudes from the platform 15. Further, although the positioning pin 15a is mainly described below, the shape of the positioning pins 15b and 15c is the same as that of the positioning pin i5a, and thus the description thereof is omitted. As shown in Fig. 3, the positioning pin 15a is a cylindrical member. The locating pin is straight 098104801 12 200944449 The diameter is substantially the same as the width of the long hole 205a, and the positioning pin 15a is engaged with the long hole 205a. As shown in Fig. 2(b), the diameter of the positioning pin i5a is substantially the same as the diameter of the semicircle of the long hole end portions 205a-3 and 205a-4. The reason is that when the transport container 200 is placed on the platform 15, if the positioning pin 丨% and two. When the end portions 205a_3 and 20% to 4 are in contact with each other, the contact is prevented from being damaged by contacting the surfaces. As shown in Fig. 3, a leading portion 15a-6 is provided along the entire circumference of the edge portion before the positioning pin i5a. The cross-sectional shape of the guiding portion i5a-6 is a push-up shape. The inclination angle of the guide portion 15a-6 is substantially the same as the inclination angle of the slope 2〇5a-6 of the section v groove 2〇5a. Thereby, when the transport container 2 is placed on the platform 15 of the loading and unloading device 10, the inclined surface 205a-6 of the cross-section V-shaped groove 2〇5a slides on the guiding portion 15a-6, and the fixed surface faces the positioning. The pin 15 & guide allows the transport container 200 to be smoothly disposed. Next, the operation of the transport container 200 and the stage 15 will be described. Φ As shown in Fig. 2, when the transport container 200 is placed on the stage 15, the operator only needs to guide the guide pins 15a, 15b, 15c (refer to the guide portion 15a-6 shown in Fig. 3) and the cross section. The transport container 200 may be disposed in a range in which the inclined surfaces of the V-shaped grooves 2〇5a, 2〇5b, and 2〇5c (see the inclined surface 2〇5a-6 shown in FIG. 3) are in contact with each other. With this, the long hole test _2, __2, 2 〇 5b_2 is guided toward the positioning two 15a, 15b, 15c, so that the fixing faces 20534, 2〇5c i and the fixing faces 15a-b 15b-l, 15c-l are stuck Hehe. By fixing the fixed surface I5a-1 of the clamp pin 15a to the 098104801 13 200944449 fixed surface 205a-1 of the cross-section v-groove 2〇5a (refer to FIG. 2(a)), the fixing surface of the positioning pin 15b is again made. 15b-1 is engaged with the fixed surface 205b-1 of the V-groove 205b of the cross section, and the transport container 2 is positioned in the rear direction before the moving direction. Further, by engaging the fixing surface 15c-1 of the positioning pin 15c with the fixing surface 205c-1 of the cross-section V-shaped groove 205c, the rotation in the horizontal direction (refer to the arrow Θ) is locked in the horizontal direction. Container 200. On the other hand, in the vertical direction, as shown in Fig. 3, the flat portion i5a-7 of the front end portion of the positioning pin 15a in the transfer container 200 abuts against the flat surface 205a-7 at the bottom of the long hole 205a of the transfer container 200. The positioning pin i5b and the long hole 205b-2, and the positioning pin 15c and the long hole 205c-2 are also the same. Thereby, the position of the transport container 200 in the vertical direction of the stage 15 is determined. Further, since the flat portions are subjected to the load of the transfer container 2 by the surface contact, the bottom surface 205a-5 of the transfer container 200 is not recessed, and the durability of the transfer container 200 can be improved. When the cover 203 is attached or detached, the reason why the transfer container 2 is prevented from being pushed up (floating) is as described above. Fig. 4 is a cross-sectional explanatory view showing a transfer container 2A (Fig. 4(a)) and a conventional transfer container 300 (Fig. 4(b) to Fig. 4(d)) according to the first embodiment. Further, Fig. 4(a) is a cross-sectional view similar to Fig. 3(a) above and is shown for reference. In the conventional transfer container 300, if the stage 15 advances in the direction of the arrow ,, since the cross-section V-shaped groove 305c is parallel to the moving direction, no extra force is particularly generated, but the cross-section V-shaped grooves 305a and 305b may occur. The force that pushes the 098104801 14 200944449 barn 300 in the direction of the arrow n (N1) will be carried. As a result, as shown in Fig. 4 (d), the conveyance container 300 generates a rotational force in the direction of the arrow P (P1) around the positioning pin 15c. Therefore, the upper end portion of the front end of the transfer container 3 is pulled away from the partition plate 11, and there is a possibility that a seal failure or the like is caused. As shown in Fig. 4(a), in the transfer container 200 of the first embodiment, the cross-section v-grooves 2〇5a (205b, 205c) formed on the lower side are vertically fixed. The facets 205a-1 (205b-1, 205c~*l) are in contact with the vertical fixing faces i5a-1 (15b-1, 15c-1) of the positioning pins 15a (15b, 15c) (combined posture correcting means) Therefore, even if the force is pushed in the horizontal direction, the force pushing the transfer container 200 does not occur. However, generally, if the wafer diameter is increased, the transfer container and the lid must be made larger, and when the lid is attached or detached, a larger force is required for the transfer container. Therefore, the larger the wafer diameter, the more likely the transfer container floats. In the transfer container 200 of the present embodiment, the vertical positioning pins i5a, 15b, and 15c and the fixed surfaces 205a-1 and 205b-1 are arranged in a direction perpendicular to the direction in which the transfer container 200 is biased. The 205c-l is snapped to effectively prevent floating. (Second Embodiment) Fig. 5 is a cross-sectional view showing a state in which the positioning pin 815a of the lid attaching and detaching device of the second embodiment is engaged with the cross-section V-shaped groove 205a of the transport container 200 (corresponding to Fig. 3(a)). . 098104801 15 200944449 Changing the positioning pin of the first embodiment The cover attaching and detaching device of the second embodiment is a 15a to 15c. In the platform 815 of the present embodiment, the cover 815 is provided with three fixed (four) 810. Figure 5 shows one of them. The positioning portion 810 is provided with a base portion 811, a positioning pin 8 core, a biasing member 816, a bottom cover 817, and a photo sensor Mg. The base portion 811 is a cylindrical member, and the positioning pin 81 is held to be movable in the axial direction of the positioning pin 815a (i.e., in the direction of the straight line). The base portion 811 has a base guiding portion 811_1 (a v-shaped bevel abutting portion) that guides the fixing surface 205a-1 toward the positioning pin 8i5a. The base guiding portion 8 is formed in an arc shape, and the arcuate fixed surface 205a-1 is guided by bringing the circular arc into contact with the inclined surface 2〇5a_6 of the cross-section V-shaped groove 205a. The base guiding portion 811-1 abuts against the inclined surface 205a-6 of the cross-section V-shaped groove 205a in a state where the fixing surface is guided to the positioning pin (4), whereby the vertical direction of the platform 815 (the direction perpendicular to the moving direction) The location of the transport container 900 is determined. A threaded portion 811-2 is provided on the periphery of the base portion 811, and is attached to the platform 815 by the threaded portion 811_2 and the nut 812. The positioning pin 815a is disposed on the platform 815 at the same position as the positioning pins 15a, 15b, 15c of the second embodiment. The positioning pin 815a is movably held on the base 811 in the vertical direction. The positioning pin 815a is a top spherical member 'and a light blocking portion 815a-7 is provided below. 098104801 16 200944449 In a state where the positioning pin 815a protrudes from the base portion 811 toward the upper side, the light-shielding 815 815a-7 is disposed such that its lower end is located at the same position 4 below the bottom cover 817. Therefore, the lower bear shading portion 815a-7 which is pressed into the inside of the base portion 811 by the positioning pin 815a protrudes from the bottom cover 817 as shown by the two-dot chain line. • The biasing member 816 is housed inside the base portion 811. The compression coil is a coil spring. The lower end portion of the biasing member 816 in the wrong direction is positioned via the bottom cover 817, and the end portion on the vertical side abuts against the lower surface of the positioning pin μ%. Thereby, the biasing member 816 pushes the positioning pin 815a upward in the vertical direction. Push up, and apply force toward the protruding side from the top surface of the base 811. The bottom cover 817 is screwed to the base portion 811 as a member for covering the lower side of the base portion 811. The bottom cover 817 is provided with a through hole through which the light shielding portion 815a_7 of the positioning pin 8i5a is inserted. The photo sensor 818 is a detecting portion in which the light-emitting element 818-1 and the light-receiving element 818-2 are opposed to each other. The photo sensor 818 is disposed under the bottom cover 817. When the light blocking portion 815a_7 of the positioning pin 815a does not protrude from the lower surface of the bottom cover 817, the light receiving element 818-2 can receive the light L emitted by the light emitting element 812-1. On the other hand, when the light blocking portion 815a_7 is lower than the bottom cover 817 More prominently, since the light L of the light-emitting element 818-1 is blocked by the light-shielding portion 815a-7, the light-receiving element 818-2 cannot receive the light L. In this way, the photo sensor 818 can detect whether the light shielding portion 815a_7 protrudes below the bottom cover 817. The photo sensor 818 is connected to a controller (not shown), and the detection signal of the photo sensor 818 is output to the controller. 098104801 17 200944449 Next, the operation of the transport container 200 and the platform 815 will be described. When the transport container 200 is placed on the platform 815, the operator only needs to incline the base guide portion 811-1 and the cross-section V-shaped groove 205a. The transfer container 200 may be disposed in a range in which the crucible 5a-6 is in contact with each other. Accordingly, the long hole 2〇5a_2 is guided to the positioning pin 815a, so that the fixing surface 205a-1 and the fixing surface 815a_1 of the positioning pin 8i5a are engaged with each other. In this case, in a state where the fixing surface 2〇5a-1 is guided to the clamp pin 815a by the base guiding portion 811-1, the positioning pin 8i5a is pressed by the inclined surface 205a of the section v ◎ word groove 205a- 6 is pressed into the interior of the base 811. Accordingly, the light shielding portion 815a-7 of the positioning pin 815a protrudes below the bottom cover 817. The controller cooperates with the output of the light sensor 818. When it is determined that the transport container 2 is not actually placed on the platform 815, the moving motor (not shown) is not driven to move the platform 815 while maintaining the platform 815. status. Then, the positioning lock 815a is biased by the biasing member 816 to be protruded from the base portion 811 (the state of Fig. 5) in a state where the fixed surface 2〇5a-1 is guided by the base guiding portion 811-1. The position of the transport container 2 to the horizontal direction of the platform 815 is determined by the positioning pin 815a. On the other hand, in the vertical direction, the transport container 200 is determined by abutting the base guiding portion 8!^ against the inclined surface 2〇5a-6 of the cross-section V-shaped groove 205a. position. In this state, the lower end of the light shielding portion 815a_7 of the positioning pin 815a is located at the same position as the lower surface of the bottom cover 817. The controller cooperates with the light sensor 818 to transmit 098104801 18 200944449 'When it is judged that the transport container 200 has been indeed placed on the platform 815', the mobile motor is driven to advance the platform 815. Further, the determination "whether or not the transfer container 2 is actually placed on the platform 815" can also be carried out by the following method. * The first method is a method in which a light sensor is provided on the stage 815, and the distance between the surface of the platform 815 and the bottom surface of the transport container 200 is measured to determine the presence or absence of the container 200. However, this method must set the detection error of the sensor to converge to, for example, ❺ 2 mm, which is not preferable in terms of setting accuracy and maintenance. The second method is a method in which a pressure sensor or the like for detecting the load of the container 200 is provided in the pins 815a to 815c and the like, and the presence or absence of the container 200 is determined. However, generally because of the large detection error of the pressure sensor, it will become the cause of the erroneous operation of the platform 815. Further, since the container 200 has a different weight depending on the type of the article or the like, the load of the container 200 may vary. Therefore, this method is also less good. With respect to these methods, in the present embodiment, it is only necessary to determine whether or not the positioning pin 815a protrudes from the lower surface of the bottom cover 817, and there is almost no detection error. Moreover, the movement stroke of the positioning pin 815a ensures the depth of the long hole '205a-1. Therefore, the moving stroke (i.e., the amount of protruding of the positioning pin) can be set to a sufficient length of, for example, about 5 mm, and it is not necessary to require a high setting precision, and maintenance is easy. Fig. 6 is a cross-sectional view showing a state in which the positioning lock of the lid detaching device of the second embodiment is engaged with the cross-section V-groove 305a of the conventional transfer container, 098104801 19 200944449 (corresponding to the diagram of Fig. 3(a) ). At present, the transport container that has been transported does not have the long holes 205a-2, 205b-2, and 205c-2 (see Fig. 2) for transporting the capacity G. In this case, the positioning pin_ is also pressed against the inclined surface 3Q5a_6 of the V-groove 3G5a of the section, so that the inside of the base 81i is pressed in. Further, the 'base guide bow portion 81b1 (v-shaped oblique listener portion) abuts on the inclined surface 3() 5a-6 of the cross-section V-shaped groove 3〇5a, thereby determining that the transport container 3 is horizontally Position and position in the vertical direction. In addition, in this case, the control signal of the domain 818 is irrelevant, and the platform 815 can be moved. Thus, the lid attaching and detaching device of the present embodiment can also transfer the container 300 in accordance with the conventional method. As described above, the capping device of the second embodiment determines whether or not the transport container 200 has been reliably placed on the stage 815i, and can advance the stage 815 when it is actually placed. Further, the cover shocking and detaching device according to the second embodiment can be applied to any of the transfer container 2GG provided with the long hole views _2, 205b 2, 2G5c-2 and the conventional transfer container 300 in which these are not provided. (Third Embodiment) Fig. 7 is a cross-sectional view showing a state in which the positioning pin 9 of the cap attachment/detachment device of the third embodiment is engaged with the cross-shaped groove of the transport container 200 (corresponding to the figure of Fig. 3(a)). . In the platform 915 of the cover attaching and detaching device of the present embodiment, three positioning locks 915a are disposed at the same position as the first embodiment (098104801 20 200944449 I, the positioning pins 15a 15b and 15c. The clamp pin 915a is formed by the upper stage 915a_7 The two-stage shape constituting the lower stage 915 & _8 is provided with a guide portion 915 & _6 at the end edge portion of the upper stage 915a-7. ❹ The guide portion U has a circular arc shape and abuts against the cross-section V-shaped groove 205a. The slope of the slope 2〇5a-6' and the cross-section of the v-groove 2 () 5a to the surface inspection ^ to ^ ^ ^ ^ ^ ^ + 'positioning pin lower section 915a_8 (V-shaped bevel abutment) In the state in which the fixing surface 915a-1 of the positioning pin 915a is engaged with the fixing surface 20W of the cross-section V-shaped groove, the transport container 200 is determined for the platform 915 in the same manner as in the second embodiment. The position of -P in the Jc square direction 'transporting the grain 2 is positioned by the fixing surface 915a-1 of the positioning pin 9 and the fixed surface of the long hole 205a_2. On the other hand, 'the container is conveyed in the vertical direction. 2〇〇 via the positioning pin—the lower section of the section _8 is connected to the slope of the section V-groove 2G5a As described above, in the cap attaching and detaching device of the present embodiment, even if the top surface of the positioning pin 915a is not a flat surface or an arc shape, the transfer container can be positioned. (Fourth embodiment) Fig. 8 is the fourth. A cross-sectional view of the positioning pin of the embodiment of the embodiment of the present invention, which is in a state of being engaged with the cross-section of the transport container 200 (corresponding to the diagram of Fig. 3(a)). 098104801 21 200944449 The positioning pin of this embodiment The detection pin 1015a is movable in the vertical direction, and the positioning pin 1015a is provided with the same urging member 1016 and light as the urging member 816 and the photo sensor 818 of the second embodiment. The sensor 1〇18. The positioning pin 1015a is biased toward the upper side by the biasing member 1〇16. When the V of the transport container 200 is not placed on the platform 1〇15, the positioning pin i〇15a is as shown in the figure. As shown by the chain line, the flat portion 1015a-7 protrudes, and the light shielding portion 1015a-9 is set to be located at the same position as the bottom cover 1〇17. On the other hand, the transport container 2 is placed on the platform 1 〇15, when the fixed surface 2〇5a-1 is guided by the guiding portion 1015a-6 and is normally placed, The flat portion 1015a-7 of the pin 1〇15a is in surface contact with the flat surface 205a-7 of the bottom of the transfer container 2。. In this case, the detecting pin 1015a_8 is pressed by the plane 2〇5a_7 to the lower side in the vertical direction. As shown in Fig. 8, the detecting pin 1〇15a_8 is pushed in toward the inside of the positioning pin 1015a. Further, since the light blocking portion 1〇15a_9 is pulled out from the bottom cover 1〇17, the light receiving element 1〇18_2 cannot receive the light emitting element 1〇18_ In this way, the lid attaching and detaching device of the present embodiment can detect that the transport container 200 is placed on the platform 1〇15. As described above, according to the output of the detecting unit including the light-emitting element 1018 1 and the light-receiving element 1Q18-2, the cover attaching and detaching device of the present embodiment can detect the flat portion i〇i5a_7 of the positioning pin 1015a and the bottom of the transport container 2 The plane 205a-7 has formed a surface contact. Thereby, the lid attaching and detaching device 098104801 22 200944449 of the present embodiment can detect whether or not the transporting tray 200 has been normally placed on the platform i〇i5. Further, the cover attaching and detaching device of the present embodiment may take the S light-emitting element and the light-receiving element--2, and the flat portion l〇15a-7 of the positioning pin 1 may be provided with a pressure sensor. In this case, in order to determine whether or not the conveyance capacity H has been placed, it is confirmed that the flat portion 1015a-7 of the positioning pin 1015a is in contact with the plane 2〇5&_7 of the bottom of the transfer container 2〇〇. The resulting pressure changes. Thereby, the lid attaching and detaching device can more reliably detect whether or not the transport container 200 has been normally placed on the platform 1〇15. The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications and changes can be made therein, and these are all within the technical scope of the present invention. Further, the effects described in the embodiments are merely illustrative of the best effects produced by the present invention, and the effects produced by the present invention are not limited to the embodiments. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an outline of a first embodiment of a lid loading and unloading device for a transfer container according to the present invention. Fig. 2 (a) and (b) are views showing a platform positioning member of a lid attaching and detaching device for a transfer container according to the first embodiment. Fig. 3 (a) and (b) are cross-sectional views showing a state in which the cross-shaped V-groove of the transfer container of the first embodiment is engaged with the positioning pin of the cap loading/unloading device. 4(a) to 4(d) are explanatory diagrams for comparison between the transfer container and the conventional transfer container in the first embodiment. 098104801 23 200944449 Fig. 5 is a cross-sectional view showing a state in which the cross-section V-groove of the transport container of the second embodiment is engaged with the positioning pin of the lid attaching and detaching device. Fig. 6 is a cross-sectional view showing the state in which the positioning pin is engaged with the cross-section V-groove of the conventional transfer container in the second embodiment. Fig. 7 is a cross-sectional view showing a state in which the positioning pin which is attached to the third embodiment is engaged with the V-groove of the transfer container. Fig. 8 is a cross-sectional view showing a state in which a positioning pin which is placed against a cover of the fourth embodiment is engaged with a V-groove of a cross section of the transfer container. [Main component symbol description] 11 '101 compartment board 15, 815, 915, 1015 platform 15a, 15b, 15c, 104a, 104b, 815a, 9i5a, i〇i5a 15a-1, 15b-1, 15c-1, 205a -l, 2051η, 205c-1, 915a-1 15a-6' 915a-6 guide portion 15a-7, 1015a-7 plane portion 100 cover loading and unloading device 102, 202 opening portion 103 door 104 question lock mechanism 104c, 104d τ Word lock 105d lock lock 200, 300 transport container locating pin fixing surface 098104801 24 200944449 201 203 204a, 204b 204c, 204d, 205d 204e~204h 205, 205a-5 205a, 205b, 205c, 305a 205a_2, 205b_2, 205c_2 205a- 3, 205a-4 205a-6 205a-7 810 811 811-1 φ 811-2 815a-7, 1015a-9 816, 1016 817, 1017 818, 1018 818-1, 1018-1 818-2, 1018-2 915a-7 098104801 Container body cover pin hole lock hole bottom surface 305b > 305c section V-groove long hole two-end bevel plane positioning part base base guide thread part shading part urging member bottom cover light sensor light-emitting element Light receiving element upper section 25 200944449 915a-8 Lower section 1015a-8 Detection pin A High cleanliness Room B Low cleanliness space C Interior space L Light 098104801 26