200939307 九、發明說明： 【發明所屬之技術領域】 本發明係與化學氣相沉積的設備有關，特別是一真空 腔室的閥門組。 5【先前技術】 在太陽能電池的製造過程中有一段程序是必須要將破 璃基板置入一真空腔室中進行化學氣相沉積的加工動作， 目前的做法都是採取一次一片的加工方式，也就是說在— 片玻璃基板進行完化學氣相沉積的加工動作並由真空腔室 10取出後才會再放入另一片玻璃基板來進行化學氣相沉積。 這樣的加工效率實際上並不高’因為真空腔室要在一定的 真空度才能進行加工的動作，而要保持一定的真空度就必 ，花時間在抽氣上，所以真空腔室每打開—次就必須要再 花-次時間來抽氣’使真空腔室内的氣壓降低到可以進行 I5加工的真空度’並且在加工完成後又必須先充氣使腔室達 到-定的氣壓值才能開啟腔室，所以又必須花一次的時間 來進行充氣’這樣的做法就量產的角度來看並不經濟，因 此有其改進的必要。 2〇【發明内容】 —本發明之主要目的在於提供—閥門組，設置於二真空 ::::::該一真空腔室可以透過該閥門組連通並且被 4成-底真空區以及—高真空區， 的作業時間。 兴工紅至釉虱 4 200939307 λ為達成上述目的，本發明閥門組包含有：一殼體，内 部具有—容置空間，該殼體設有一貫通部，貫穿該殻體的 兩相對側面。該殼體之二侧面分別與一真空腔室連接，炎 且使各真空腔室與該貫通部相對。一閥門板，設於該殼艚 的容置空間内，可於該容置空間内移動並且可以橫斷封閉 該殼體的貫通部，該閥門板-側與該殼體之間設有〆土漏 件，使該閥門板在關閉後可以保持氣密阻隔。一掣動件， 設於該殼體的叫則，該掣動件與該閱門板連接可推動該闕 門板沿一軸向往覆移動。 【實施方式】 為了說明本發明之特徵及功效，以下兹舉一實施例配 合圖式詳細說明如後。 第一圖為本發明與二真空腔室組合後之立體圖。 第二圖第一圖之立體分解圖。 第三圖為本發明之立體圖。 如圖所示，本發明閥門組係設置於二真空腔室之間， 使該二真空腔室可以透過該閥門組的開啟而連通或關閉而 區隔開成二獨立且密閉的空間，該閥門組包含有： 一殼體10，内部具有一容置空間11，該殼體設有一貫 通部12’貫穿該殼體的兩相對侧面。該殼體丨〇之二侧面分 別與一真空腔室1連接，並且使各真空腔室與該貫通部相 對。 二止漏件2 0，分別設於該殼體10的兩相對側面並且環 5 200939307 繞於該貫通部12。 一閥門板30,設於該殼體1〇的容置空間内，可於該办 置空間11内移動並且可以橫斷封閉該殼體的貫通部12: 該殼體的兩侧不連通。關門板3G之_側與該殼體之 5 設有-止漏件3卜使闕門板在關後可以保持氣密阻 隔。 ❹ 一掣動件40，設於該殼體10的一侧，該掣動件40與 該閥門板30連接可推動關門板3()沿__轴向 ' 1。=件4。可以是一油壓缸、一氣壓缸或其他可線性:動 、本發明係以該殼體的兩側與二真空腔室丨分別接合， 並且該等止漏件2G來與真空腔室〗貼合氣密。以本發明之 結構可以使得原本二真空腔室1透過該閥門組而可以被連 =或被區隔成二相鄰但獨立的密閉空間，藉此，該二密閉 ❹15 =間便可被區隔成—低真空腔室與—高真空腔室，而使該 2真空腔室與外部空間之間如同形成—緩衝區（低真空腔 至）在進行加工時，待加工料件可由低真空腔室這一端先 進入該低真空腔室内，在關閉低真空腔室的腔門後進行初 20 ^抽ί動作’ 一段時間之後然後再打開該閥門板30使二 20、空腔室1連通’再將加工料件送人到高真空腔室内，由 於，時該一真空腔室内的存留氣體己被大量的抽出，所以 ，局真空腔室在關閉該閥門板30後所需的抽氣時間便可以 。然後，因為在低真空腔室内仍有餘留氣體，所以在 加工完成後高真空腔室在回充氣體的時間也不需太長即能 200939307 夠到可以開啟該二真空腔室間_板3㈣狀態，等到待加 工料件酬低真空腔室後，關_閥門板3()再於該低真空 腔室内充氣至-㈣壓力即可開啟低真空腔室的腔門，= 出加工料件。200939307 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to apparatus for chemical vapor deposition, particularly a valve block of a vacuum chamber. 5 [Prior Art] In the manufacturing process of solar cells, there is a procedure in which the glass substrate must be placed in a vacuum chamber for chemical vapor deposition. The current practice is to adopt one-time processing. That is to say, after the processing operation of the chemical vapor deposition is performed on the glass substrate and the vacuum chamber 10 is taken out, another glass substrate is placed for chemical vapor deposition. This processing efficiency is actually not high 'because the vacuum chamber has to be processed at a certain degree of vacuum, and it is necessary to maintain a certain degree of vacuum, and spend time on pumping, so every time the vacuum chamber is opened— The second time must be spent again - the next time to pump 'to reduce the pressure in the vacuum chamber to the vacuum that can be processed by I5' and after the processing is completed, it must be inflated to bring the chamber to a constant pressure value to open the chamber. The room, so it must take another time to inflate. This is not economical in terms of mass production, so there is a need for improvement. 2〇 [Summary of the Invention] - The main object of the present invention is to provide a valve group, which is disposed in two vacuums:::::: The vacuum chamber can communicate through the valve group and is connected to the bottom-bottom vacuum zone and - high Vacuum zone, working time. Xinggong Red to Glaze 4 200939307 λ In order to achieve the above object, the valve assembly of the present invention comprises: a housing having an accommodating space therein, the housing being provided with a through portion extending through opposite sides of the housing. The two sides of the housing are respectively connected to a vacuum chamber, and the vacuum chambers are opposed to the through portions. a valve plate disposed in the accommodating space of the casing, movable in the accommodating space and traversing the through portion of the casing, and the bauxite is disposed between the valve plate side and the casing The leakage member allows the valve plate to maintain a hermetic barrier after being closed. A squirrel member is disposed on the casing, and the swaying member is coupled to the louvering plate to urge the sill plate to move in an axial direction. [Embodiment] In order to explain the features and effects of the present invention, a detailed description of the embodiments will be given hereinafter. The first figure is a perspective view of the invention in combination with a two vacuum chamber. An exploded perspective view of the first figure of the second figure. The third figure is a perspective view of the present invention. As shown in the figure, the valve assembly of the present invention is disposed between the two vacuum chambers, so that the two vacuum chambers can be connected or closed through the opening of the valve group to be separated into two independent and sealed spaces. The group includes: a casing 10 having an accommodating space 11 therein, the casing being provided with a through portion 12' extending through opposite sides of the casing. The two sides of the casing are connected to a vacuum chamber 1 respectively, and the vacuum chambers are opposed to the through portions. The two stop members 20 are respectively disposed on opposite sides of the casing 10 and the ring 5 200939307 is wound around the through portion 12. A valve plate 30 is disposed in the accommodating space of the casing 1 , and is movable in the installation space 11 and can traverse the through portion 12 of the casing: the two sides of the casing are not connected. The side of the door closing panel 3G and the housing 5 are provided with a stop member 3 to maintain a hermetic barrier after the door panel is closed. A raking member 40 is disposed on one side of the housing 10, and the connecting member 40 is coupled to the valve plate 30 to urge the door closing plate 3 () along the __axis '1. = piece 4. It can be a hydraulic cylinder, a pneumatic cylinder or other linearity: the invention is respectively engaged with the two vacuum chambers on both sides of the casing, and the leakage preventing members 2G are attached to the vacuum chamber. Airtight. With the structure of the present invention, the original two vacuum chambers 1 can be connected through the valve group to be connected or divided into two adjacent but independent sealed spaces, whereby the two closed ports 15 can be separated. Forming a low vacuum chamber and a high vacuum chamber, and forming a buffer zone (low vacuum chamber to) between the 2 vacuum chamber and the external space, the material to be processed can be made into a low vacuum chamber The end first enters the low vacuum chamber, and after the chamber door of the low vacuum chamber is closed, the initial 20 ^ pumping action is performed. After a period of time, the valve plate 30 is opened again to connect the second chamber 20 to the cavity chamber 1 The processed material is sent to the high vacuum chamber. Since the stored gas in the vacuum chamber has been largely extracted, the evacuation time required for the partial vacuum chamber to close the valve plate 30 is sufficient. Then, since there is still gas remaining in the low-vacuum chamber, the high-vacuum chamber does not need to be too long in the time of returning to the inflated body after the processing is completed, and it can reach 200939307 to reach the state of the two vacuum chambers_plate 3 (four) After the material to be processed is lowered into the vacuum chamber, the valve plate 3 () is inflated to the (4) pressure in the low vacuum chamber to open the chamber door of the low vacuum chamber, and the material is processed.
藉由本發明閥門組的設置可以使得高真空腔室在被開 啟取放基板時不會有太多的外部氣體的進入，如此不值可 以減少高真空腔室抽氣的時間與成本，以加快製程的時 間，也由於進入的氣體減少了所以也能降低腔室内被空二 中的懸浮微粒污染的可能，提升產品的品質與穩定性。虱By the arrangement of the valve group of the invention, the high vacuum chamber can be prevented from entering too much external gas when being opened and lowered, so that the time and cost of pumping the high vacuum chamber can be reduced, so as to speed up the process. The time, as well as the reduction of the incoming gas, can also reduce the possibility of contamination of the suspended particles in the chamber, and improve the quality and stability of the product. louse
7 200939307 【圖式簡單說明】 第一圖為本發明與二真空腔室組合後之立體圖。 第二圖第一圖之立體分解圖。 第三圖為本發明之立體圖。 5 【主要元件符號說明】 真空腔室1 殼體10 容置空間11 貫通部12 止漏件20 閥門板30 止漏件31 掣動件407 200939307 [Simple description of the drawings] The first figure is a perspective view of the combination of the invention and the two vacuum chambers. An exploded perspective view of the first figure of the second figure. The third figure is a perspective view of the present invention. 5 [Description of main component symbols] Vacuum chamber 1 Housing 10 accommodating space 11 Penetration portion 12 Stop member 20 Valve plate 30 Stop member 31 Flip member 40