200934589 九、發明說明： 【發明所屬之技術領域】 本發明係有關於超音波振動子的構造。 【先前技術】 在半導體裝置之製造中，有使用接線裝置，將半導體 晶片的墊部（pad)與導線架之導線以細金屬接線而予連接。 在該種接線裝置中，多使用藉接合工具將引線壓接於墊部 © 或導線之際，藉超音波振動來振動接合工具的方法。又， 在接線裝置中，設有使接合工具振動的超音波振動子。又， 超音波振動子之應用不限於接合裝置，亦可用於有利用超 音波的各種機器。200934589 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to the construction of ultrasonic vibrators. [Prior Art] In the manufacture of a semiconductor device, a wiring device is used to connect a pad of a semiconductor wafer and a lead of a lead frame with a thin metal wire. In such a wiring device, a method of vibrating the bonding tool by ultrasonic vibration is often used when the lead is crimped to the pad portion © or the wire. Further, in the wiring device, an ultrasonic vibrator for vibrating the bonding tool is provided. Further, the application of the ultrasonic vibrator is not limited to the bonding device, and can be applied to various devices using ultrasonic waves.
該種超音波振動+，多丨使用將壓電元件同轴地積層 在兩螺栓之心軸，從兩側將螺帽鎖緊以壓縮壓電元件的朗 之萬（langevin)型超音波振動子。但其問題點在於壓電元 件的熱膨脹係數，在許多情形下較用於心軸之金屬製的兩 螺栓之熱膨脹係數為小，即使在初期的組裝中有以對壓電 元件賦予既定壓力之方式而裝入螺栓、螺帽，但當溫度上 升則因熱膨脹差而造成上述料壓力降低，溫度下降則造 成該賦予壓力上升，對麼電元件所賦予壓力會因周圍溫度 而改變，導致因阻抗上升而降低振動。 此處，在專利文獻1所提出的方法，係在鎖進兩螺检 之螺巾目之與壓電兀件的接觸面，和螺絲部之間的内面設置 徑長較螺絲部為大的段部’使螺帽之構成材料有不同於兩 5 200934589 螺栓的熱膨脹係數，經考慮兩螺栓之熱膨脹係數、壓電元 件之熱膨脹係數、與螺帽之熱膨帳係數，慎選螺帽之段部 長度’藉此’對於螺栓與積層之壓電元件之溫度變化吸收 熱膨脹差’降低溫度變化造成之壓電元件之賦予壓力的變 化。 (專利文獻1)日本特開昭64-32800號公報 【發明内容】 ❹ 然而，在專利文獻1所載的方法中’需使螺帽與螺栓 有不同的熱膨脹係數，因此，雖然能夠降低壓電元件之賦 予壓力的變化，但在螺栓與螺帽之螺絲部卻因螺栓與螺帽 之熱膨脹係數之差而發生熱應力。又，若想要其既能降低 在螺絲部發生之熱應力亦能降低對壓電元件所賦予壓力的 變化，則必需使螺帽之段部有較長之長度，而造成超音波 振動子趨於大型化的問題；若欲將全體予以簡潔化，則需 Q 選擇螺帽之熱膨脹係數與兩螺栓之熱膨脹係數之差值較大 的材料，有導致螺絲部之熱應力變大的問題。特別是，發 生於螺絲部之熱應力變大後，在長時期使用的情形會有 因為金屬疲勞而造成螺絲部受損之虞。又，亦有因熱應力 而發生之應變使螺帽對壓f元件的接觸面產生微小的變 形，致超音波振動之阻抗上昇而造成振動降低的情形。 本發明之目的在於，在超音波振動子中，藉穩定之構 造而有效地降低因溫度變化造成之對壓電元件所賦予壓力 的變化。 6 200934589 本發明之超音波振動子，具備積層於厚度方向之複數 個St Μ牛，以及用以壓、縮已積㉟之壓電元件的壓縮機 構，其特徵在於，設有熱膨脹差吸收體，位在已積層之壓 電元件與壓縮機構之間，用以吸收在壓縮機構與壓電元件 之間之壓縮方向的熱膨脹差。 本發明之超音波振動子之較佳為，超音波振動子乃是 心軸-體型之朗之萬型振動子，係將同軸積層壓電元件之 ❹心軸、及外形較心軸為A的振動子本體，經—趙化而構成 者’壓縮機構係具有與心軸端部的螺絲部及心軸實質相等 的熱膨脹係數且被鎖入螺絲部以將愿電元件於與振動子本 體之間壓縮的賦壓用螺帽；熱膨脹吸收體係以同軸於壓電 疋件之方式而被積層壓縮至心轴，具有可吸收心轴與壓電 70件在軸向之熱膨脹差的熱膨脹係數與厚度。 本發明之超音波振動子之較佳為，超音波振動子係壓 電兀件内藏型振動子，豆白人 '、包3 ，s又置沿轴向伸展之内部空 ©間的振動子本體，以芬太# 及在轴向積層於内部空間内的壓電元 2 ;壓縮機構係'具有與設置在振動子本體之—端的螺絲部 動子本體實質相同的熱膨服係數且被鎖入螺 壓電元件於與振動子太 ^ ^ 本體之間壓縮的賦壓用螺栓；熱膨脹 及收體’與壓電元件—叔 千起被積層壓縮在内部空間内，具有 °吸收振動子本體與壓電 係數與厚度。 電70件在軸向之熱膨脹差的熱膨脹 本發明之超音波振動子之妨社失 電元件内藏型振動子H =難為，超音波振動子係壓 其包含’设置沿轴向伸展之開口的 200934589 人 +赞乃之超音波振動子之較佳為，在振動子本體 致=傳遞之音速與在熱膨脹吸收體之内部傳遞之音速大 本發明所能發揮的效果在 以穩定之構造而有效地降低因 予壓力的變化。 於’在超音波振動子中，能 溫度變化而對壓電元件所賦 【實施方式】 —f下參照圖面說明本發明之較佳實施形態。如圖"斤 π 之超音波放大器3G的超音波振動子1〇， 乃是心軸-體型之朗之萬型振動子，其包含：圓柱型之振 動子本體11;以較振動子本艘u之直徑為小的圓柱且與振 動子本體11同轴地設為—體之心轴12;具有與振動子本體 〇 11大致相同之外徑尺寸並具有較心軸12為大之孔的甜甜圈 狀平板的壓電元件14;外徑及内徑尺寸與壓電元件14大致 相同其厚度較壓電元件14為薄的電極板15;外徑及内 仅尺寸與壓電70件14大致相同之作為熱膨脹吸收體的背面 體16，s又置在心轴12之端部之螺絲部13 ;以及鎖進螺絲 部13之賦壓用螺帽17。 複數個壓電元件14與電極板15，係使其中心之孔進入 心轴12而與心軸12成同軸地交互積層。背面體16則是在 已積層之壓電το件14及電極板15之與振動子本體u成反 8 200934589 向之側積層成為與心轴12同軸。賦壓用螺帽丨7被鎖進設 置在心軸端部的螺絲部13，用以在與振動子本體〗丨之間壓 縮與心轴12成同轴積層之各壓電元件μ、各電極體ο、 及背面體16，賦予超音波振動子必要之壓力。 振動子本體11係連接於在前端安裝有作為接合工具的 毛細管31且在中間設有固定用凸緣32之超音波放大器 30。超音波放大器30與振動子本體u，可為經一體成形而 ❾製作者，亦可為藉螺栓等連接構件連接而構成者。又，在 接合之際，藉超音波振動子1〇而產生之超音波振動，係透 過超音波放大器30而使毛細管31振動。 振動子本艘11與心軸丨2例如由鈦所製作；賦壓用螺 饯1 7則是由與心軸〗2同樣的鈦或是熱膨脹係數與心軸12 實資相同的欽合金等所製作；壓電元件14由鍅鈦酸錯（ρζτ) 所構成，電極板15係由銅板所製作。又，背面體16可使 用例如杜拉鋁（duralumin)、沃斯田系不鏽鋼、及高張力鋼等。 © 如圖2所示’壓電元件14與電極板15及背面體16被 積層於心軸12，壓電元件14之厚度為d、電極板15之厚 度為b’壓電元件14與電極板15之積層厚度為[I ^又， 者面體16之厚度為L2，將心轴12之積層有壓電元件14、 電極板15、及背面體16之部分的長度設為l3，則溫度變 化造成之各部分的熱膨脹量分別為AL1、AL2、AL3。超音 皮振動子10之溫度若有變化，則各熱膨脹量AL卜AL2、AL3 亦會改變。在如本實施形態所示’心軸12使用鈦，壓電元 件使用錯鈦酸鉛（PZT)，在電極板15使用薄銅板之情形 9 200934589 枯，心軸12之熱膨脹量AL3會大於壓電元件14與電極板 15之積層部分的熱膨脹量Δί1。在此處係藉由背面體16之 熱膨脹量來抵銷其中之差之Δί3_ΔΙ^。亦即，背面體16之 熱膨脹量AL2係以下述式！之方式來設定以使相等於 △L3-AL1 ° △L2 = AL3 — AL1···(式 1) e 一此處，若設背面體16之熱膨脹係數為“乂，一片壓電 70件14的厚度為d，其熱膨脹係數為ad，一片電極板15 之厚度為b’其熱膨脹係數為心’心軸匕之熱膨脹係數為 aa，壓電元件14與電極板15各有^^片，則背面體“之 抵銷熱膨脹量所須厚度Lx能以下述式2來表示。This kind of ultrasonic vibration +, multi-turn uses a langevin type ultrasonic vibrator that coaxially laminates the piezoelectric element on the mandrel of the two bolts, and locks the nut from both sides to compress the piezoelectric element . However, the problem lies in the thermal expansion coefficient of the piezoelectric element. In many cases, the thermal expansion coefficient of the two bolts made of metal for the mandrel is small, even in the initial assembly, in a manner of imparting a predetermined pressure to the piezoelectric element. The bolts and nuts are installed, but when the temperature rises, the pressure of the material is lowered due to the difference in thermal expansion, and the temperature rise causes the pressure to rise, and the pressure applied to the electric component changes due to the ambient temperature, resulting in an increase in impedance. And reduce the vibration. Here, the method proposed in Patent Document 1 is to provide a section having a larger diameter than the screw portion on the inner surface between the screw surface and the screw portion of the screw thread. Department's material of the nut is different from the thermal expansion coefficient of the bolts of the two 5, 2009, 2009, 589. Considering the thermal expansion coefficient of the two bolts, the thermal expansion coefficient of the piezoelectric element, and the thermal expansion factor of the nut, the minister of the nut is carefully selected. The degree 'by this' absorbs the difference in thermal expansion between the bolt and the temperature change of the laminated piezoelectric element' to reduce the change in the applied pressure of the piezoelectric element caused by the temperature change. [Patent Document 1] Japanese Laid-Open Patent Publication No. SHO-64-32800 [Patent Document] However, in the method disclosed in Patent Document 1, the nut and the bolt are required to have different thermal expansion coefficients, and therefore, the piezoelectricity can be lowered. The component imparts a change in pressure, but the screw portion of the bolt and the nut is thermally stressed due to the difference in thermal expansion coefficient between the bolt and the nut. Moreover, if it is desired to reduce the thermal stress occurring in the screw portion and also reduce the pressure applied to the piezoelectric element, it is necessary to make the length of the nut portion have a long length, thereby causing ultrasonic vibration. For the problem of large-scale; if you want to simplify the whole, you need to select the material with a large difference between the thermal expansion coefficient of the nut and the thermal expansion coefficient of the two bolts, which causes the thermal stress of the screw to become large. In particular, when the thermal stress occurring in the screw portion becomes large, the use of the screw for a long period of time may cause damage to the screw portion due to fatigue of the metal. Further, strain due to thermal stress causes a slight deformation of the contact surface of the nut against the f element, and the impedance of the ultrasonic vibration rises to cause a decrease in vibration. SUMMARY OF THE INVENTION An object of the present invention is to effectively reduce a change in pressure applied to a piezoelectric element due to a temperature change in a supersonic vibrator. 6 200934589 The ultrasonic vibrator of the present invention comprises a plurality of St yak stacked in a thickness direction, and a compression mechanism for pressing and contracting the piezoelectric element of 35, characterized in that a thermal expansion difference absorber is provided. It is located between the laminated piezoelectric element and the compression mechanism for absorbing the difference in thermal expansion between the compression mechanism and the piezoelectric element in the compression direction. Preferably, the ultrasonic vibrator of the present invention is a Langer-type vibrator of a mandrel-body type, which is a mandrel of a coaxial laminated piezoelectric element and a shape-centered axis. The vibrating sub-body, which consists of a vibrating mechanism, has a thermal expansion coefficient substantially equal to the screw portion and the mandrel at the end of the mandrel and is locked into the screw portion to connect the electric component to the vibrating sub-body The compression pressure-applying nut; the thermal expansion absorption system is laminated and compressed to the mandrel coaxially with the piezoelectric element, and has a thermal expansion coefficient and a thickness which can absorb the difference in thermal expansion between the mandrel and the piezoelectric 70 in the axial direction. Preferably, the ultrasonic vibrator of the present invention is a vibrator of the ultrasonic vibrator of the ultrasonic vibrator, and the vibrator of the white body of the bean, the package 3, and the internal cavity of the package extending axially. , with Fen Tai # and piezoelectric element 2 laminated in the inner space in the axial direction; the compression mechanism 'has substantially the same thermal expansion coefficient as the screw-moving body provided at the end of the vibrator body and is locked The stud piezoelectric element is compressed with a bolt for compressing between the vibrator and the body; the thermal expansion and the body's and the piezoelectric element are uncompressed and compressed in the internal space, and have a body of absorption and vibration. Electric coefficient and thickness. Thermal expansion of 70 pieces of thermal expansion difference in the axial direction of the present invention. The ultrasonic vibrator of the present invention has a built-in type of vibrator H = difficult, and the ultrasonic vibration sub-system includes 'providing an opening extending in the axial direction. 200934589 It is preferable that the supersonic vibrator of the human + praise is that the speed of sound transmitted by the vibrator is large and the speed of sound transmitted inside the thermal expansion absorber is large. The effect that the present invention can exert is effective in a stable structure. Reduce the change in stress. In the ultrasonic vibrator, the piezoelectric element can be imparted with temperature change. [Embodiment] A preferred embodiment of the present invention will be described with reference to the drawings. As shown in the figure, the ultrasonic vibrator 1G of the ultrasonic amplifier 3G is a mandrel-body type of Langevin vibrator, which includes: a cylindrical vibrator body 11; The diameter of u is a small cylinder and is coaxial with the vibrator body 11 as a body mandrel 12; has an outer diameter dimension substantially the same as that of the vibrator body 〇11 and has a sweetness compared to the mandrel 12 being a large hole The piezoelectric element 14 of the donut-shaped flat plate; the outer diameter and the inner diameter are substantially the same as the piezoelectric element 14 and the electrode plate 15 is thinner than the piezoelectric element 14; the outer diameter and the inner size are only approximately the same as the piezoelectric 70 piece 14 The back surface body 16, which is the same as the thermal expansion absorber, is screwed to the screw portion 13 at the end of the mandrel 12, and the pressure-receiving nut 17 of the screw portion 13 is locked. The plurality of piezoelectric elements 14 and the electrode plates 15 are such that their central holes enter the mandrel 12 and are alternately laminated coaxially with the mandrel 12. The back surface body 16 is laminated on the side of the piezoelectric element τ member 14 and the electrode plate 15 which is laminated with the vibrator body unit. The pressing nut 7 is locked into the screw portion 13 provided at the end of the mandrel for compressing each piezoelectric element μ and each electrode body which are coaxially laminated with the mandrel 12 and the vibrator body. ο, and the back body 16, giving the necessary pressure to the ultrasonic vibrator. The vibrator body 11 is connected to an ultrasonic amplifier 30 in which a capillary 31 as a bonding tool is attached to the tip end and a fixing flange 32 is provided in the middle. The ultrasonic amplifier 30 and the vibrator body u may be formed by integral molding, or may be formed by connecting members such as bolts. Further, at the time of joining, the ultrasonic vibration generated by the ultrasonic vibrator is transmitted through the ultrasonic amplifier 30 to vibrate the capillary 31. The vibrator 11 and the mandrel 2 are made of, for example, titanium; the pressing screw 17 is made of the same titanium as the mandrel, or the alloy having the same coefficient of thermal expansion as that of the mandrel 12. The piezoelectric element 14 is made of barium titanate (ρζτ), and the electrode plate 15 is made of a copper plate. Further, as the back surface body 16, for example, duralumin, Vostian stainless steel, and high tensile steel can be used. © As shown in FIG. 2, 'the piezoelectric element 14 and the electrode plate 15 and the back surface body 16 are laminated on the mandrel 12, the piezoelectric element 14 has a thickness d, and the electrode plate 15 has a thickness b'. The piezoelectric element 14 and the electrode plate The thickness of the laminate of 15 is [I ^, and the thickness of the face body 16 is L2, and the length of the portion of the mandrel 12 in which the piezoelectric element 14, the electrode plate 15, and the back body 16 are laminated is set to l3, and the temperature changes. The amount of thermal expansion of each part is AL1, AL2, and AL3. If there is a change in the temperature of the supersonic vibrator 10, the respective thermal expansion amounts AL, AL2, AL3 will also change. As shown in the present embodiment, 'the mandrel 12 uses titanium, the piezoelectric element uses lead stannous titanate (PZT), and the electrode plate 15 uses a thin copper plate. In the case of 200934589, the thermal expansion amount AL3 of the mandrel 12 is larger than that of the piezoelectric element. The amount of thermal expansion Δί1 of the laminated portion of the element 14 and the electrode plate 15. Here, the difference Δί3_ΔΙ^ is offset by the amount of thermal expansion of the back body 16. That is, the amount of thermal expansion AL2 of the back body 16 is expressed by the following formula! The method is set so as to be equal to ΔL3-AL1 ° ΔL2 = AL3 - AL1 (1) e. Here, if the thermal expansion coefficient of the back body 16 is "乂, one piece of piezoelectric 70 pieces 14 The thickness is d, the thermal expansion coefficient is ad, the thickness of one electrode plate 15 is b', the thermal expansion coefficient is the thermal expansion coefficient of the heart 'mandrel 匕, and the piezoelectric element 14 and the electrode plate 15 each have a piece of film, and the back surface is The thickness Lx required for offsetting the amount of thermal expansion can be expressed by the following formula 2.
Lx = N X (b X a b + dx a d - d X a a - b X a a)/ ( a a ^ α x)…式2 例如，振動子本體U及心、軸12係熱膨脹係數α ㈣翁6之鈦，麼電元件14乃是厚度d=4mm、熱膨服係數 ad=3xHr6之锆鈦酸鉛（PZT)，電極板15為厚度b=〇 4mm' 熱膨脹係數ab=18xl0-之銅板’壓電元件14、電極板15 之積層數為N=4之情形時1是背面體16之材質為熱膨脹 係數αΧ=23χ10-^杜拉銘，則背面體16之抵銷熱膨服量 所須厚度Lx約是又，若是背面體16之材質為熱 膨脹係數α Π7ΧΗ)-之沃斯田系不鏽鋼，則背面體16之抵 銷熱膨脹量所須厚度Lx約是"“；若是背面體16之材 質為熱膨脹係數…3xl0-之高張力鋼，則背面體16之抵 鎖熱膨脹量所須厚度Lx約是3.2mm。 200934589 述本實施形態中，就算超音波振動子ι〇之溫度有因 :\接合裝置之發熱源(如馬達、加熱器等)的熱而改變， 可藉由背面體16發揮使心軸12與麼電元件^及電極板 之積層體間之熱膨脹差抵鎖的效果。又，可抑制因周圍 :义造成對廢電元件所賦予廢力的變動、阻抗上升造成超 θ波振動降低的情形，因此，可料的使毛細管31振盈， :有可保持良好之接合品質的效果。又，在本實施形態中， 由於心轴！2與賦遷用螺帽17係由熱膨脹係數大致相同之 材料所構成，因此’在設置於心軸12之端部之螺絲部Η 的螺峰與賦壓用螺帽17之螺谷之間，幾乎不會因熱膨服差 而發生熱應力，具有可防止螺絲部13受損的效果。特別是， 就算接合時之衝擊力造成之振動長時間地傳遞至賦麼用螺 帽17與螺絲部13，仍具有可抑制螺絲部13受損的效果。 又，由於可減少在螺絲部13的熱應力，因此，就算是 在超音波振動子10之溫度發生變化的情形時，仍可抑制賦 〇 的面18之變形’抑制超音波振 動之阻抗上升或振動減少，具有可持續進行良好之接合的 效果。 本實施形態之振動子本體u，係由内部之傳遞音速在 大約侧_之鈦所構成。另一方面，在背面體Μ係使用 杜拉鋁、沃斯田系不鏽鋼、高張力鋼的情形，在各材料内 部之傳遞音速大約是4_〜湖m/s，接近於在振動子本體 U之内部的傳遞音速。因此，背面體16不會使超音 衰減’而能獲得同樣的超音波振動。再者’背面體Μ係由 11 200934589 • 杜拉鋁所構成的情形時，其尺寸及比書比丨 ^ ^ V , Λ A τ & tb重皆小’而能使超音 _ ,振動子10輕量化’具有能對應於高速接合的效果。 :下參照圖3及圖4說明本發明的其他實施形態"如 備μφΓ ’接線用之壓電元件内藏型超音波振動子100具 伸展於軸向之振動子本體5〇; 中本邱'，又置在振動子本體50之 、口 I5之轴向較長的長方形開 向並掛入42,在開口 42中積層於軸 甘入入的壓電元件44 ;與壓電 板的雷兴魘冤疋件料一起積層之金屬薄 電極板45;插入壓電元件44 © 件47 电# 44之間之第1、第2楔形構 之間之作Α以及’設置在第2楔形構件48與壓電元件44 :為熱膨脹吸收體的背面體46。又，振動子本體5。 仕再别端安裝有作為接合工具 用來闳^ , 丹幻乇細管5 1，在其兩側設有 用來固疋振動子本體50之凸緣52。 如圖4所示，開口 42在上下方 在其方向貫通振動子本體50， 、央配置有第1、第2之楔开ί M| 形構件47加 申心模$構件47、48。在第1楔 午47與開口 42之壁面之p， _ 45的積居配署， 有壓電元件44與電極板 ❹ 償增配置0第i楔形構件 v 越薄的抑刑咕 乃疋朝上方、前端越來 細的^ 模形構件48’乃是朝下方、前端越來越 片第：：开:t模形構件47、48之換形角度被設定成，將二 楔形47之47與一片帛2楔形構件48組合之際，第1 ^之各外側之面為平行的菡 構件4R 4; 角度。又’藉著將第2楔形 W插入二月第1楔形構件 44與雷托上 得千47之間，可將各壓電元件 °板45屢縮於第；1横形播彼 間，此 構件47與開口 42之壁面之 構成可對壓電元件44賦予既定壓力。 振動子本體50例如係由鈦等 寻所製作，各楔形構件47、 12 200934589 48,係由與振動子本體5〇相同的鈦所製作，壓電元件44 係由錘鈦酸鉛（PZT)所構成，電極板15係由銅板所製作。 又彦面體46可使用例如杜拉鋁或沃斯田系不鏽鋼、及高 張力鋼等。 在如上述構成之壓電元件内藏型超音波振動子1〇〇 中’若與前述之實施形態相同’設背面體46之熱膨脹係數 為αχ，一片壓電元件44之厚度為d，其熱膨脹係數為ad， 一片電極板45的厚度為15，其熱膨脹係數為ab，振動子本 體50之熱膨脹係數為〇^，壓電元件44與電極板45各有N 片，則背面體46之抵銷熱膨脹量所須厚度Lx能以之前所 不之式2來表示。又，在背面體46係使用杜拉鋁等各種材 料時，熱膨脹量抵銷所必需之厚度Lx能以相同於之前所述 實施形態之式2來表示。 上述之本實施形態中，就算壓電元件内藏型超音波振 動子1〇〇之溫度因為來自接合裝置之發熱源的熱而發生變 化，但可藉由背面體46抵銷在振動子本體5〇與壓電元件 44及電極板45之積層體之間的熱膨脹差，具有維持良好接 合品質的效果。又，與之前所述實施形態相同，在振動子 本體50與背面體46及第1、第2楔形構件47、48内部傳 遞的音速’大約是4000〜5200m/s ’接近於在振動子本體5〇 之内部傳遞的音速。因此，背面體46不會造成超音波振動 的衰減而可獲得同樣的超音波振動，持續良好的接合。 以下參照圖5說明本發明之其他實施形態。圖5所示 之構成’係以將加壓塊68鎖入之方式，以進行在圖3、圖 13 200934589 4所述之壓電元件内藏型超音波振動子1〇〇之壓電元件的加 壓。如圖5所示’本實施形態之壓電元件内藏型超音波振 動子100具備：沿轴向伸展之振動子本體6〇;在振動子本 體60之内部設置於軸向之作為内部空間的空洞62 ;在空洞 62之中積層於轴向之壓電元件64;與壓電元件64 一起積 層之金屬薄板的電極板65;與壓電元件64一起積層於軸向 之背面體66;以及’被鎖進設置在振動子本體6〇之一端之 螺絲孔67之作為賦壓用螺栓的加壓塊68 ^被鎖進螺絲孔 67之加壓塊68係構成為能加壓積層之壓電元件64、電極 板65、背面體66以賦予超音波振動子所需壓力。 在一端設有螺絲孔67之振動子本體60，例如係由鈦等 所製作，被鎖進螺絲孔6 7之加壓塊6 8，係由與振動子本體 60相同之鈦或是熱膨脹係數與振動子本體6〇實質相同的鈦 合金等所製作。壓電元件64、電極板65、及背面體66，係 使用與之前所述之實施形態相同的材料。 φ 在如上述構成之壓電元件内藏型超音波振動子100 中’若與之前所述實施形態相同，設背面體66之熱膨脹係 數為αχ，一片壓電元件64的厚度為d，其熱膨脹係數為α d’ —片電極板65的厚度為b，其熱膨脹係數gab，振動 子本體6〇之熱膨脹係數為aa’壓電元件64與電極板65 各有N片，則在背面體66使用杜拉鋁等各種材料時，抵銷 熱膨脹量所須厚度Lx能以相同於上述實施形態之式2來表 示又，本實施形態’具有與上述實施形態相同的效果。 以上所述之本發明之各實施形態，係將本發明應用在 200934589 接線用之超音波振動子以作為說明例，然而，本發明之應 不询限於接線用之超音波振動子，能廣泛的用在利用 音波振動之測量器械、機器等。 【圖式簡單說明】 圖1係本發明之實施形態之超音波振動子的立體圖。 圖2係本發明之實施形態之超音波振動子的截面圖。 © 圖 3係本發明之另一實施形態之超音波振動子的立體 ra*k 圖。4係本發明之另一實施形態之超音波振動子的截面 圖5係本發明之又一實施形態之超音波振動子的截面Lx = NX (b X ab + dx ad - d X aa - b X aa) / ( aa ^ α x) Equation 2 For example, the vibrator body U and the core, the shaft 12 is a coefficient of thermal expansion α (4) Titanium 6 The electric component 14 is a lead zirconate titanate (PZT) having a thickness d=4 mm, a thermal expansion coefficient ad=3×Hr6, and the electrode plate 15 is a thickness b=〇4 mm′ thermal expansion coefficient ab=18×10 − copper plate piezoelectric element 14 When the number of layers of the electrode plate 15 is N=4, 1 is that the material of the back surface body 16 is a thermal expansion coefficient αΧ=23χ10-^Du Laming, and the thickness Lx of the back surface body 16 for offsetting the thermal expansion amount is about Moreover, if the material of the back body 16 is a Vostian stainless steel having a coefficient of thermal expansion α Π 7 ΧΗ), the thickness Lx of the offset expansion amount of the back body 16 is about ""; if the material of the back body 16 is a coefficient of thermal expansion ...3xl0- high tensile steel, the thickness Lx of the back body 16 is about 3.2 mm. 200934589 In this embodiment, even if the temperature of the ultrasonic vibrator is :: \The heating of the joint device The heat of the source (such as a motor, a heater, etc.) is changed, and the back body 16 can be used to laminate the mandrel 12 with the electrical component and the electrode plate. In addition, it is possible to suppress the fluctuation of the waste force applied to the waste electrical component due to the surrounding meaning, and the vibration of the super-theta wave is lowered due to the increase in the impedance. Therefore, the capillary 31 can be vibrated. In addition, in the present embodiment, since the mandrel! 2 and the retracting nut 17 are made of a material having substantially the same thermal expansion coefficient, they are disposed on the mandrel. Between the screw peak of the screw portion 端 at the end of 12 and the screw valley of the nut 17 for pressure-receiving, thermal stress is hardly generated due to poor thermal expansion, and the screw portion 13 can be prevented from being damaged. Even if the vibration caused by the impact force at the time of joining is transmitted to the nut 17 and the screw portion 13 for a long period of time, the screw portion 13 can be prevented from being damaged. Further, since the thermal stress at the screw portion 13 can be reduced Therefore, even when the temperature of the ultrasonic vibrator 10 changes, it is possible to suppress the deformation of the abutting surface 18, and to suppress the impedance increase or the vibration reduction of the ultrasonic vibration, and to have a good joint effect. . In the case of the vibrator body u of the present embodiment, the internal sound velocity is formed on the side of the titanium. On the other hand, in the case of the back body, Duralumin, Vostian stainless steel, and high-tensile steel are used. The transmitted sound velocity inside each material is about 4_~lake m/s, which is close to the transmitted sound velocity inside the vibrator body U. Therefore, the back surface body 16 does not attenuate the supersounds, and the same ultrasonic vibration can be obtained. In addition, when the 'back body Μ system is composed of 11 200934589 • Dura aluminum, its size and ratio are 丨^ ^ V , Λ A τ & tb are both small enough to make super sound _ , vibrator The 10 lightweighting has the effect of being able to correspond to high speed joining. Further, another embodiment of the present invention will be described with reference to Figs. 3 and 4, and the piezoelectric element built-in type ultrasonic vibrator 100 for the connection of the μφΓ' wiring has a vibrator body 5 extending in the axial direction; ', and placed in the vibrator body 50, the axial direction of the mouth I5 is long and the rectangle is opened and hung in 42, and the piezoelectric element 44 is laminated in the opening 42; The metal thin electrode plate 45 laminated together with the element material; the piezoelectric element 44 is inserted into the piezoelectric element 44, and the first and second wedge-shaped structures between the electric wires 44 are arranged and disposed on the second wedge-shaped member 48. The piezoelectric element 44 is a back surface body 46 of the thermal expansion absorber. Further, the vibrator body 5 is vibrated. The splicing tool is used as a joining tool for the squeezing, and the flange 52 of the vibrating sub-body 50 is fixed on both sides thereof. As shown in Fig. 4, the opening 42 penetrates the vibrator body 50 in the direction of the upper and lower sides, and the first and second wedge members are disposed at the center, and the core members $47, 48 are applied. In the first wedge-free 47 and the wall surface of the opening 42, the accumulation of p, _ 45, the piezoelectric element 44 and the electrode plate 偿 增 配置 0 第 第 第 第 第 第 第 第 第 越 越 越 越 越 越 越 越 越 越 越 越 越 越 越 越 越 越 越The front end of the thinner ^ mold member 48' is toward the lower side, the front end is more and more piece:: open: the deforming angle of the t-shaped members 47, 48 is set to, the two wedges 47 and 47 When the 楔2 wedge members 48 are combined, the outer faces of the first ^^ are parallel 菡 members 4R 4; angles. Further, by inserting the second wedge W into between the first wedge member 44 in February and the Thunder 47, the piezoelectric element 45 can be contracted to the first; The configuration of the wall surface of the opening 42 can impart a predetermined pressure to the piezoelectric element 44. The vibrator body 50 is made, for example, of titanium or the like, and each of the wedge members 47, 12 200934589 48 is made of the same titanium as the vibrator body 5, and the piezoelectric element 44 is made of lead magnesium titanate (PZT). In the configuration, the electrode plate 15 is made of a copper plate. Further, for example, a Dura aluminum or a Worthian stainless steel, a high tensile steel, or the like can be used. In the piezoelectric element built-in type ultrasonic vibrator 1B having the above configuration, 'the same as the above-described embodiment', the thermal expansion coefficient of the back surface body 46 is αχ, and the thickness of one piezoelectric element 44 is d, and its thermal expansion is performed. The coefficient is ad, the thickness of one electrode plate 45 is 15, the thermal expansion coefficient is ab, the thermal expansion coefficient of the vibrator body 50 is 〇^, and the piezoelectric element 44 and the electrode plate 45 each have N pieces, and the back body 46 is offset. The thickness Lx required for the amount of thermal expansion can be expressed by the above formula 2. Further, when various materials such as duraluminum are used for the back surface body 46, the thickness Lx necessary for offsetting the amount of thermal expansion can be expressed by the same formula 2 as the above-described embodiment. In the above-described embodiment, even if the temperature of the piezoelectric element built-in ultrasonic vibrator 1 变化 changes due to heat from the heat source of the bonding device, it can be offset by the back surface body 46 in the vibrator body 5 The difference in thermal expansion between the crucible and the laminated body of the piezoelectric element 44 and the electrode plate 45 has an effect of maintaining good bonding quality. Further, similarly to the above-described embodiment, the speed of sound transmitted in the vibrator body 50, the back surface body 46, and the first and second wedge members 47, 48 is approximately 4000 to 5200 m/s, which is close to the vibrator body 5. The speed of sound transmitted internally. Therefore, the back surface body 46 does not cause the attenuation of the ultrasonic vibration, and the same ultrasonic vibration can be obtained, and the good joint is continued. Another embodiment of the present invention will be described below with reference to Fig. 5 . The configuration shown in FIG. 5 is a method of locking the pressing block 68 to perform the piezoelectric element of the piezoelectric element built-in type ultrasonic vibrator 1A described in FIG. 3, FIG. 13 and 200934589. Pressurize. As shown in FIG. 5, the piezoelectric element-embedded ultrasonic vibrator 100 of the present embodiment includes a vibrator body 6 that extends in the axial direction, and an inner space that is disposed in the axial direction inside the vibrator body 60. a cavity 62; an electrode member 64 laminated in the axial direction among the holes 62; an electrode plate 65 of a thin metal plate laminated with the piezoelectric element 64; and a back surface body 66 laminated with the piezoelectric element 64 in the axial direction; The pressurizing block 68, which is locked into the screw hole 67 provided at one end of the vibrator body 6〇, is a pressurizing block 68 that is locked into the screw hole 67. The pressurizing block 68 that is locked into the screw hole 67 is configured as a piezoelectric element capable of pressure-stacking 64. The electrode plate 65 and the back body 66 are required to impart pressure to the ultrasonic vibrator. The vibrator body 60 having a screw hole 67 at one end, for example, made of titanium or the like, and the pressurizing block 86 locked into the screw hole 67 is made of the same titanium as the vibrator body 60 or has a thermal expansion coefficient and The vibrator body 6 is made of a substantially identical titanium alloy or the like. The piezoelectric element 64, the electrode plate 65, and the back surface 66 are made of the same material as the embodiment described above. φ In the piezoelectric element built-in ultrasonic vibrator 100 configured as described above, 'when the embodiment is the same as the above-described embodiment, the thermal expansion coefficient of the back surface 66 is αχ, and the thickness of one piezoelectric element 64 is d, and its thermal expansion is performed. The coefficient is α d′—the thickness of the sheet electrode plate 65 is b, the coefficient of thermal expansion gab, the coefficient of thermal expansion of the vibrator body 6〇 is aa′, and the piezoelectric element 64 and the electrode plate 65 each have N pieces, and then the back body 66 is used. In the case of various materials such as Dura aluminum, the thickness Lx required to offset the amount of thermal expansion can be expressed by the same formula 2 as the above embodiment, and the present embodiment has the same effects as those of the above embodiment. The embodiments of the present invention described above are applied to the ultrasonic vibrator for wiring in 200934589 as an illustrative example. However, the present invention is not limited to the ultrasonic vibrator for wiring, and can be widely used. It is used in measuring instruments, machines, etc. that use sonic vibration. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of an ultrasonic vibrator according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing an ultrasonic vibrator according to an embodiment of the present invention. © Fig. 3 is a perspective ra*k diagram of an ultrasonic vibrator according to another embodiment of the present invention. 4 is a cross section of an ultrasonic vibrator according to another embodiment of the present invention. FIG. 5 is a cross section of an ultrasonic vibrator according to still another embodiment of the present invention.
【主 10 要元件符號說明】 超音波振動子 11 ' 50 > 60 12 13 14 、 44 、 64 15 、 45 、 65 16 、 46 、 66 17 18 振動子本體 心軸 螺絲部 壓電元件 電極板 背面體 職壓用螺帽 面 15 200934589[Main 10 main component symbol description] Ultrasonic vibrator 11 ' 50 > 60 12 13 14 , 44 , 64 15 , 45 , 65 16 , 46 , 66 17 18 Vibrator sub-mandrel screw part Piezoelectric element electrode plate back Body pressure nut face 15 200934589
30 超音波放大器 31 > 51 毛細管 32 > 52 固定用凸緣 42 開口 47 第1楔形構件 48 第2楔形構件 62 空洞 67 螺絲孔 68 加壓塊 100 壓電元件内藏型超音波振動子 b 電極板之厚度 d 壓電元件之厚度 Lx 抵銷背面體之熱膨脹量所須厚度 N 壓電元件與電極板之積層片數 a a 心軸及振動子本體之熱膨脹係數 a b 電極板之熱膨脹係數 a d 壓電元件之熱膨脹係數 a x 背面體之熱膨脹係數 1630 Ultrasonic Amplifier 31 > 51 Capillary 32 > 52 Fixing Flange 42 Opening 47 First Wedge Member 48 Second Wedge Member 62 Cavity 67 Screw Hole 68 Pressurizing Block 100 Piezoelectric Element Built-in Ultrasonic Vibrator b The thickness of the electrode plate d The thickness of the piezoelectric element Lx The thickness required to offset the amount of thermal expansion of the back body N The number of laminated sheets of the piezoelectric element and the electrode plate aa The thermal expansion coefficient of the mandrel and the vibrator body ab The thermal expansion coefficient of the electrode plate ad pressure Thermal expansion coefficient of electrical components ax Thermal expansion coefficient of the back body 16