JPWO2023063431A5 - - Google Patents
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- JPWO2023063431A5 JPWO2023063431A5 JP2023504640A JP2023504640A JPWO2023063431A5 JP WO2023063431 A5 JPWO2023063431 A5 JP WO2023063431A5 JP 2023504640 A JP2023504640 A JP 2023504640A JP 2023504640 A JP2023504640 A JP 2023504640A JP WO2023063431 A5 JPWO2023063431 A5 JP WO2023063431A5
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本開示のボンディング装置は、Ｙ軸に沿って前後方向の後方から前方の前端部に向かって延びて、前端部にボンディングツールが取付けられる、超音波ホーンと、超音波ホーンに沿って位置し、ねじり振動を発生させて超音波ホーンにＹ軸の周りのトルクを発生させる、ねじり振動発生部と、を備え、ねじり振動発生部は、Ｙ軸に垂直なＸ軸に沿った幅方向にＹ軸から所定の距離をおいて位置する側面を少なくとも有する本体と、側面に隣接して位置する、少なくとも１つの第２積層体であって、せん断変形してトルクのための往復回転運動を発生させる少なくとも１組の第２圧電素子を有する第２積層体と、を備え、ねじり振動発生部がさらに、本体内に位置し、第２積層体のための側面を提供する角柱状部と、第２積層体の近辺に位置するウェイトであって、これにより、第２積層体がせん断変形した際に、超音波ホーンにおけるＹ軸の周りのトルクを増強するウェイトと、を備えること、を特徴とする。 The bonding device of the present disclosure includes an ultrasonic horn that extends from the rear in the front-rear direction along the Y-axis toward the front end, and a bonding tool is attached to the front end, and located along the ultrasonic horn, a torsional vibration generating section that generates torsional vibration to generate torque around the Y axis in the ultrasonic horn; a body having at least a side surface located a predetermined distance from the body; and at least one second laminate located adjacent the side surface, the at least one second laminate being shear deformed to generate reciprocating rotational motion for torque. a second laminate having a set of second piezoelectric elements, the torsional vibration generating section further comprising a prismatic section located within the main body and providing a side surface for the second laminate; A weight located near the laminate, which increases the torque around the Y axis in the ultrasonic horn when the second laminate is sheared. do.
本開示のボンディング装置は、Ｙ軸に沿って前後方向の後方から前方の前端部に向かって延びて、前端部にボンディングツールが取付けられる、超音波ホーンと、超音波ホーンに沿って位置し、ねじり振動を発生させて超音波ホーンにＹ軸の周りのトルクを発生させる、ねじり振動発生部と、を備え、ねじり振動発生部は、Ｙ軸に垂直なＸ軸に沿った幅方向にＹ軸から所定の距離をおいて位置する側面を少なくとも有する本体と、側面に隣接して位置する、少なくとも１つの第２積層体であって、せん断変形してトルクのための往復回転運動を発生させる少なくとも１組の第２圧電素子を有する第２積層体と、を備え、超音波ホーンは、超音波ホーンに沿って位置する縦振動発生部であって、電圧を印加した際に厚み方向に変形する複数の第１圧電素子を有する第１積層体を少なくとも備え、これにより、超音波ホーンにおいて前後方向の超音波振動を発生させる縦振動発生部を含み、縦振動発生部は、斜面を有する与圧楔であって、第１積層体の端面に位置し、複数の第１圧電素子を厚み方向に与圧する与圧楔を備えること、を特徴とする。 The bonding device of the present disclosure includes an ultrasonic horn that extends from the rear in the front-rear direction along the Y-axis toward the front end, and a bonding tool is attached to the front end, and located along the ultrasonic horn, a torsional vibration generating section that generates torsional vibration to generate torque around the Y axis in the ultrasonic horn; a body having at least a side surface located a predetermined distance from the body; and at least one second laminate located adjacent the side surface, the at least one second laminate being shear deformed to generate reciprocating rotational motion for torque. a second laminated body having a set of second piezoelectric elements, the ultrasonic horn is a longitudinal vibration generating part located along the ultrasonic horn, and deforms in the thickness direction when a voltage is applied. It includes at least a first laminate having a plurality of first piezoelectric elements, and includes a longitudinal vibration generating section that generates ultrasonic vibrations in the front-rear direction in an ultrasonic horn, and the longitudinal vibration generating section includes a first laminate having a slope. The present invention is characterized in that it includes a pressure wedge that is located on an end surface of the first laminate and pressurizes the plurality of first piezoelectric elements in the thickness direction.
Claims (23)
電圧を印加した際に厚み方向に変形する板状の複数の第１圧電素子を積層した第１積層体が内部に取付けられて前後方向の超音波振動を発生させる縦振動発生部と、
前記縦振動発生部から前方に向かって延びて前端部にボンディングツールが取付けられるホーン部と、
前記縦振動発生部から後方に向かって延びるねじり振動発生部と、を含み、
前記ねじり振動発生部は、
前記縦振動発生部から後方に向かって延びて、角柱状部を含む本体と、
電圧を印加した際にせん断変形する板状の複数の第２圧電素子を積層した第２積層体であって、積層方向が前後方向に直交する幅方向となるように前記角柱状部の両側面にそれぞれ取付けられる２つの第２積層体と、
各前記第２積層体の幅方向外側にそれぞれ積層されたウェイトと、
各前記ウェイトと各前記第２積層体と前記角柱状部とを囲み、各前記ウェイトを介して複数の前記第２圧電素子を前記角柱状部に押しつけて各前記第２圧電素子をそれぞれ厚み方向に与圧する与圧リングと、を備えること、
を特徴とする超音波ホーン。 An ultrasonic horn used in a bonding device,
a longitudinal vibration generating section in which a first laminate of a plurality of plate-shaped first piezoelectric elements that deforms in the thickness direction when a voltage is applied is attached therein to generate ultrasonic vibrations in the front-rear direction;
a horn portion extending forward from the longitudinal vibration generating portion and having a bonding tool attached to the front end portion;
a torsional vibration generating section extending rearward from the longitudinal vibration generating section;
The torsional vibration generating section is
a main body extending rearward from the longitudinal vibration generating section and including a prismatic section;
A second laminate in which a plurality of plate-shaped second piezoelectric elements are laminated to undergo shear deformation when a voltage is applied, and both sides of the prismatic portion are arranged such that the lamination direction is in the width direction perpendicular to the front-rear direction. two second laminates each attached to the
weights laminated on the outside in the width direction of each of the second laminates;
Each of the weights, each of the second laminates, and the prismatic part are surrounded, and the plurality of second piezoelectric elements are pressed against the prismatic part through each of the weights, and each of the second piezoelectric elements is moved in the thickness direction. a pressurizing ring for pressurizing the;
An ultrasonic horn featuring
各前記第２積層体は、高周波電源から高周波電力が印加された際に前後方向及び幅方向に直交する上下方向にせん断変形し、せん断変形の方向が互いに反対となるように前記角柱状部の両側面にそれぞれ取付けられるとともに前記高周波電源に接続されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 1,
Each of the second laminates undergoes shear deformation in the vertical direction perpendicular to the front-back direction and the width direction when high-frequency power is applied from a high-frequency power source, and the prismatic portions are sheared in such a way that the directions of shear deformation are opposite to each other. attached to each side and connected to the high frequency power source;
An ultrasonic horn featuring
前記第２積層体は、両端と各前記第２圧電素子の間とに電極板がそれぞれ積層されており、
複数の前記電極板は、積層方向に向かって前記高周波電源の出力端子とグランド端子とに交互に接続されており、
各前記第２圧電素子は、分極方向が交互に反対になるように積層されており、
前記第２積層体は、前記角柱状部に対して幅方向の対称位置に配置される各前記第２圧電素子の分極方向が上下反対となるように前記角柱状部の両側面にそれぞれ取付けられており、前記角柱状部に対して幅方向の対称位置に配置される各前記電極板が前記高周波電源の同一の端子に接続されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 2,
The second laminate has electrode plates laminated at both ends and between each of the second piezoelectric elements,
The plurality of electrode plates are alternately connected to the output terminal and the ground terminal of the high frequency power source in the stacking direction,
The second piezoelectric elements are stacked so that their polarization directions are alternately opposite,
The second laminate is attached to both side surfaces of the prismatic part such that the polarization directions of the second piezoelectric elements disposed at symmetrical positions in the width direction with respect to the prismatic part are vertically opposite. each of the electrode plates arranged at symmetrical positions in the width direction with respect to the prismatic portion is connected to the same terminal of the high frequency power source;
An ultrasonic horn featuring
前記第２積層体は、両端と各前記第２圧電素子の間とに電極板がそれぞれ積層されており、
複数の前記電極板は、積層方向に向かって前記高周波電源の出力端子とグランド端子とに交互に接続されており、
各前記第２圧電素子は、分極方向が交互に反対になるように積層されており、
前記第２積層体は、前記角柱状部に対して幅方向の対称位置に配置される各前記第２圧電素子の分極方向が同一となるように前記角柱状部の両側面にそれぞれ取付けられており、前記角柱状部に対して幅方向の対称位置に配置される各前記電極板が前記高周波電源の異なる端子に接続されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 2,
The second laminate has electrode plates laminated at both ends and between each of the second piezoelectric elements,
The plurality of electrode plates are alternately connected to the output terminal and the ground terminal of the high frequency power source in the stacking direction,
The second piezoelectric elements are stacked so that their polarization directions are alternately opposite,
The second laminate is attached to both side surfaces of the prismatic part so that the polarization directions of the second piezoelectric elements arranged at symmetrical positions in the width direction with respect to the prismatic part are the same. each of the electrode plates arranged at symmetrical positions in the width direction with respect to the prismatic portion is connected to different terminals of the high frequency power source;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 1,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 2,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 3,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 4,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記縦振動発生部は、
前後方向に延びる四角い枠体で、上下方向に貫通するとともに前後方向に延び、積層方向が前後方向となるように前記第１積層体が取付けられる開口を有するケーシングと、
前記開口の前後方向の端面と前記第１積層体との間に取付けられて複数の前記第１圧電素子を厚み方向に与圧する与圧楔と、を備えること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 1,
The longitudinal vibration generating section is
a casing that is a rectangular frame extending in the front-rear direction and has an opening that extends in the front-rear direction while penetrating in the up-down direction, and to which the first laminate is attached so that the stacking direction is in the front-rear direction;
a pressurizing wedge attached between an end surface of the opening in the front-rear direction and the first laminate to pressurize the plurality of first piezoelectric elements in the thickness direction;
An ultrasonic horn featuring
前記第１積層体は、両端と各前記第１圧電素子の間とに他の電極板がそれぞれ積層されており、
複数の前記他の電極板は、積層方向に向かって他の高周波電源の出力端子とグランド端子とに交互に接続されており、
各前記第１圧電素子は、分極方向が交互に反対になるように積層されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 9,
The first laminate has other electrode plates laminated at both ends and between each of the first piezoelectric elements,
The plurality of other electrode plates are alternately connected to output terminals and ground terminals of other high frequency power supplies in the stacking direction,
each of the first piezoelectric elements is stacked so that the polarization directions are alternately opposite;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 9,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 10,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記縦振動発生部は、
前後方向に延びる四角い枠体で、上下方向に貫通するとともに前後方向に延び、積層方向が前後方向となるように前記第１積層体が取付けられる開口を有するケーシングと、
前記開口の前後方向の端面と前記第１積層体との間に取付けられて複数の前記第１圧電素子を厚み方向に与圧する与圧楔と、を備え
前記第１積層体は、両端と各前記第１圧電素子の間とに他の電極板がそれぞれ積層されており、
複数の前記他の電極板は、積層方向に向かって他の高周波電源の出力端子とグランド端子とに交互に接続されており、
各前記第１圧電素子は、分極方向が交互に反対になるように積層されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 2,
The longitudinal vibration generating section is
a casing that is a rectangular frame extending in the front-rear direction and has an opening that extends in the front-rear direction while penetrating in the up-down direction, and to which the first laminate is attached so that the stacking direction is in the front-rear direction;
a pressurizing wedge attached between an end surface of the opening in the front-rear direction and the first laminate to pressurize the plurality of first piezoelectric elements in the thickness direction; Other electrode plates are laminated between the first piezoelectric elements, and
The plurality of other electrode plates are alternately connected to output terminals and ground terminals of other high frequency power supplies in the stacking direction,
each of the first piezoelectric elements is stacked so that the polarization directions are alternately opposite;
An ultrasonic horn featuring
前記縦振動発生部は、
前後方向に延びる四角い枠体で、上下方向に貫通するとともに前後方向に延び、積層方向が前後方向となるように前記第１積層体が取付けられる開口を有するケーシングと、
前記開口の前後方向の端面と前記第１積層体との間に取付けられて複数の前記第１圧電素子を厚み方向に与圧する与圧楔と、を備え
前記第１積層体は、両端と各前記第１圧電素子の間とに他の電極板がそれぞれ積層されており、
複数の前記他の電極板は、積層方向に向かって他の高周波電源の出力端子とグランド端子とに交互に接続されており、
各前記第１圧電素子は、分極方向が交互に反対になるように積層されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 3,
The longitudinal vibration generating section is
a casing that is a rectangular frame extending in the front-rear direction and has an opening that extends in the front-rear direction while penetrating in the up-down direction, and to which the first laminate is attached so that the stacking direction is in the front-rear direction;
a pressurizing wedge attached between an end surface of the opening in the front-rear direction and the first laminate to pressurize the plurality of first piezoelectric elements in the thickness direction; Other electrode plates are laminated between the first piezoelectric elements, and
The plurality of other electrode plates are alternately connected to output terminals and ground terminals of other high frequency power supplies in the stacking direction,
each of the first piezoelectric elements is stacked so that the polarization directions are alternately opposite;
An ultrasonic horn featuring
前記縦振動発生部は、
前後方向に延びる四角い枠体で、上下方向に貫通するとともに前後方向に延び、積層方向が前後方向となるように前記第１積層体が取付けられる開口を有するケーシングと、
前記開口の前後方向の端面と前記第１積層体との間に取付けられて複数の前記第１圧電素子を厚み方向に与圧する与圧楔と、を備え
前記第１積層体は、両端と各前記第１圧電素子の間とに他の電極板がそれぞれ積層されており、
複数の前記他の電極板は、積層方向に向かって他の高周波電源の出力端子とグランド端子とに交互に接続されており、
各前記第１圧電素子は、分極方向が交互に反対になるように積層されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 4,
The longitudinal vibration generating section is
a casing that is a rectangular frame extending in the front-rear direction and has an opening that extends in the front-rear direction while penetrating in the up-down direction, and to which the first laminate is attached so that the stacking direction is in the front-rear direction;
a pressurizing wedge attached between an end surface of the opening in the front-rear direction and the first laminate to pressurize the plurality of first piezoelectric elements in the thickness direction; Other electrode plates are laminated between the first piezoelectric elements, and
The plurality of other electrode plates are alternately connected to output terminals and ground terminals of other high frequency power supplies in the stacking direction,
each of the first piezoelectric elements is stacked so that the polarization directions are alternately opposite;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 13,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 14,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とする超音波ホーン。 The ultrasonic horn according to claim 15,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
An ultrasonic horn featuring
Ｙ軸に沿って前後方向の後方から前方の前端部に向かって延びて、前記前端部にボンディングツールが取付けられる、超音波ホーンと、
前記超音波ホーンに沿って位置し、ねじり振動を発生させて前記超音波ホーンに前記Ｙ軸の周りのトルクを発生させる、ねじり振動発生部と、を備え、
前記ねじり振動発生部は、
前記Ｙ軸に垂直なＸ軸に沿った幅方向に前記Ｙ軸から所定の距離をおいて位置する側面を少なくとも有する本体と、
前記側面に隣接して位置する、少なくとも１つの第２積層体であって、せん断変形してトルクのための往復回転運動を発生させる少なくとも１組の第２圧電素子を有する第２積層体と、を備え、
前記ねじり振動発生部がさらに、
前記本体内に位置し、前記第２積層体のための前記側面を提供する角柱状部と、
前記第２積層体の近辺に位置するウェイトであって、これにより、前記第２積層体がせん断変形した際に、前記超音波ホーンにおける前記Ｙ軸の周りのトルクを増強するウェイトと、を備えること、
を特徴とするボンディング装置。 A bonding device,
an ultrasonic horn extending from the rear toward the front end in the front-rear direction along the Y axis, and having a bonding tool attached to the front end;
a torsional vibration generating section located along the ultrasonic horn and generating torsional vibration to cause the ultrasonic horn to generate torque around the Y axis;
The torsional vibration generating section is
a main body having at least a side surface located at a predetermined distance from the Y-axis in the width direction along the X-axis perpendicular to the Y-axis;
a second laminate located adjacent to the side surface, the second laminate having at least one set of second piezoelectric elements that are shear deformed to generate reciprocating rotational motion for torque; Equipped with
The torsional vibration generating section further includes:
a prismatic portion located within the body and providing the side surface for the second laminate;
A weight located near the second laminate, which increases the torque around the Y axis in the ultrasonic horn when the second laminate is sheared. That,
A bonding device featuring:
前記ねじり振動発生部がさらに、前記ウェイトと前記第２積層体と前記角柱状部とを囲み、前記ウェイトを介して前記第２圧電素子を前記角柱状部に押しつけて前記第２圧電素子を厚み方向に与圧する与圧リングを備えること、
を特徴とするボンディング装置。 20. The bonding device according to claim 19 ,
The torsional vibration generating section further surrounds the weight, the second laminate, and the prismatic part, and presses the second piezoelectric element against the prismatic part via the weight to increase the thickness of the second piezoelectric element. comprising a pressurizing ring that pressurizes in the direction;
A bonding device featuring:
前記与圧リングは、熱を印加すると収縮する形状記憶合金で構成されていること、
を特徴とするボンディング装置。 21. The bonding device according to claim 20 ,
The pressurizing ring is made of a shape memory alloy that contracts when heat is applied;
A bonding device featuring:
前記与圧リングは、クランプ式与圧リングであること、
を特徴とするボンディング装置。 21. The bonding device according to claim 20 ,
The pressurization ring is a clamp type pressurization ring;
A bonding device featuring:
Ｙ軸に沿って前後方向の後方から前方の前端部に向かって延びて、前記前端部にボンディングツールが取付けられる、超音波ホーンと、
前記超音波ホーンに沿って位置し、ねじり振動を発生させて前記超音波ホーンに前記Ｙ軸の周りのトルクを発生させる、ねじり振動発生部と、を備え、
前記ねじり振動発生部は、
前記Ｙ軸に垂直なＸ軸に沿った幅方向に前記Ｙ軸から所定の距離をおいて位置する側面を少なくとも有する本体と、
前記側面に隣接して位置する、少なくとも１つの第２積層体であって、せん断変形してトルクのための往復回転運動を発生させる少なくとも１組の第２圧電素子を有する第２積層体と、を備え、
前記超音波ホーンは、前記超音波ホーンに沿って位置する縦振動発生部であって、電圧を印加した際に厚み方向に変形する複数の第１圧電素子を有する第１積層体を少なくとも備え、これにより、前記超音波ホーンにおいて前記前後方向の超音波振動を発生させる縦振動発生部を含み、
前記縦振動発生部は、斜面を有する与圧楔であって、前記第１積層体の端面に位置し、複数の前記第１圧電素子を厚み方向に与圧する与圧楔を備えること、
を特徴とするボンディング装置。 A bonding device,
an ultrasonic horn extending from the rear toward the front end in the front-rear direction along the Y axis, and having a bonding tool attached to the front end;
a torsional vibration generating section located along the ultrasonic horn and generating torsional vibration to cause the ultrasonic horn to generate torque around the Y axis;
The torsional vibration generating section is
a main body having at least a side surface located at a predetermined distance from the Y-axis in the width direction along the X-axis perpendicular to the Y-axis;
a second laminate located adjacent to the side surface, the second laminate having at least one set of second piezoelectric elements that are shear deformed to generate reciprocating rotational motion for torque; Equipped with
The ultrasonic horn is a longitudinal vibration generating part located along the ultrasonic horn, and includes at least a first laminate having a plurality of first piezoelectric elements that deform in the thickness direction when a voltage is applied. Thereby, the ultrasonic horn includes a longitudinal vibration generating section that generates ultrasonic vibrations in the longitudinal direction;
The longitudinal vibration generating section includes a pressurizing wedge having a slope, the pressurizing wedge being located at an end surface of the first laminate and pressurizing the plurality of first piezoelectric elements in the thickness direction;
A bonding device featuring:
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/503,343 US11691214B2 (en) | 2021-10-17 | 2021-10-17 | Ultrasound horn |
| US17/503,343 | 2021-10-17 | ||
| PCT/JP2022/038594 WO2023063431A1 (en) | 2021-10-17 | 2022-10-17 | Ultrasonic horn and bonding device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023063431A1 JPWO2023063431A1 (en) | 2023-04-20 |
| JPWO2023063431A5 true JPWO2023063431A5 (en) | 2023-09-21 |
| JP7349765B2 JP7349765B2 (en) | 2023-09-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023504640A Active JP7349765B2 (en) | 2021-10-17 | 2022-10-17 | Ultrasonic horn and bonding equipment |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11691214B2 (en) |
| JP (1) | JP7349765B2 (en) |
| KR (1) | KR20230093485A (en) |
| CN (1) | CN116438638A (en) |
| TW (1) | TWI829238B (en) |
| WO (1) | WO2023063431A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240116126A1 (en) * | 2022-10-11 | 2024-04-11 | Asmpt Singapore Pte. Ltd. | Ultrasonic transducer operable at multiple resonant frequencies |
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-
2021
- 2021-10-17 US US17/503,343 patent/US11691214B2/en active Active
-
2022
- 2022-07-08 TW TW111125770A patent/TWI829238B/en active
- 2022-10-17 KR KR1020237017693A patent/KR20230093485A/en not_active Application Discontinuation
- 2022-10-17 WO PCT/JP2022/038594 patent/WO2023063431A1/en active Application Filing
- 2022-10-17 CN CN202280007118.XA patent/CN116438638A/en active Pending
- 2022-10-17 JP JP2023504640A patent/JP7349765B2/en active Active
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