200928373 九、發明說明 【發明所屬之技術領域】 本發明是關於使用於LCD面板等的檢查對象板的簡 易點燈檢查的探針單元及檢查裝置。 【先前技術】 在平板顯示（FPD )，例如LCD面板的製程中，進行 φ 著該LCD面板的點燈檢査。在該檢查，一般使用著具備 備有複數探針的探針單元的檢查裝置。該情形，爲將檢查 裝置的各探針推向LCD面板的電極的狀態下，藉由將所 定的電性訊號供應於所定電極所進行。 將此種檢查裝置的一例表示於第2圖，所圖示的檢查 裝置1，主要是由面板組部2，及測定部3所構成。 面板組部2是將從外部所插入的LCD面板5搬運至 測定部3，而用將檢查完成後的LCD面板5搬運至外部的 φ 裝置。面板組部2是在開口部6的內深部具有面板組平台 7，以該面板組平台7支撐LC D面板5，被搬運到測定部 3。又’面板組平台7是在測定部3接受檢查完成後的 LCD面板5而朝外部搬運。 測定部3是支撐從面板組部2被交給的LCD面板5 所進行檢驗的裝置。測定部3是具備吸盤頭8或探針9等 所構成。 吸盤頭8是用以支撐LCD面板5的構件。該吸盤頭8 是被支撐於XYZ 0平台（未圖示），而被控制著對於 200928373 XYZ軸方向的移動及旋轉，使得LCD面板5的位置被調 整。探測器9主要是具備座板10，探針單元n所構成。 探針單元11是對於水平面被設成傾斜，該探針單元11是 在面臨於座板10的開口 10A的狀態下被支撐於座板1〇。 如第3圖所示地，探針單元11是具備：探針座12, 及支撐部13’及探針裝配體14，及連接電纜部15所構成 〇 ❹ 上述探針座12是將支撐探針裝配體14的複數支撐部 13予以一體地支撐的板材。在該探針座12，複數探針裝 配體14經由支撐部13，以面臨於工件台16上的LCD面 - 板5的狀態下被支撐。 上述支撐部13是在其基端側被支撐於上述探針座12 的狀態下，以其前端側來支撐上述探針裝配體1 4所用的 構件。如第4圖及第5圖所示地，該支撐部13是具備： 直接被安裝於上述探針座12而支撐全體的懸架塊18，及 〇 被支撐於該懸架塊18的前端部的滑動塊19，及一體地被 安裝於該滑動塊19的內側面（第4圖中的下側面）的探 針板20所構成。 探針裝配體14是接觸於LCD面板5的電路的電極， 而傳送檢查訊號所用的構件。探針裝配體14是被安裝於 探針板20的下側面。如第6圖至第8圖所示地，該探針 裝配體14是具備探針塊22，及探針23所構成。探針塊 22是直接被安裝於探針板20的下側面。在該探針塊22 的下側安裝有探針23。探針23是直接接觸於LCD面板5 200928373 的電路的電極的構件。探針23是在其前端部與基端部分 別具備探針23A ’ 23B ’前端部的探針23A被接觸於LCD 面板5的電路的電極，而基端部的探針23B被接觸於連接 電纜部15的端子。 連接電纜部15是電性地連接上述探針23與外部裝置 (未圖示）所用的構件。具體上，該連接電纜部15是直 接地被連接於上述探針23的探針23B與探針座12側的電 0 路，經由該探針12側的電路而與外部裝置電性地被連接 。亦即’該連接電纜部1 5是經由探針座2的印刷基板1 6 電性地連接上述探針裝配體14的探針23與外部裝置。該 連接電纜部15是由FPC板27，及驅動用積體電路28， 及FPC電纜29所構成。 上述FPC板27是將上述連接電纜部15固定於上述 探針裝配體14側所用的構件。FPC板27是被安裝於探針 板2 0的下側。 ❹ 驅動用積體電路28是進行隨著檢查的處理的電路。 驅動用積體電路28是被安裝於FPC板27的下側，驅動 用積體電路28的一方是連接於Fpc電纜29。驅動用積體 電路28的另一方是經由各配線3〇被連接於各端子。又， 該端子被連接於探針2 3的基端側的探針2 3 B。 FPC電纜29是用以傳送隨著檢查的電性訊號的電纜 。FPC電纜29是其配線30的一方被固定於FPC板27而 在電性地連接於驅動用積體電路28的狀態下，另一方被 連接於設在探針座12下側的印刷基板（未予圖示）。藉 200928373 此，FPC電纜29是經由該印刷基板而與外部裝置電性地 被連接。 在使用以上的檢查裝置1所進行的點燈檢查中有如專BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit and an inspection apparatus for easy lighting inspection of an inspection target panel such as an LCD panel. [Prior Art] In the process of flat panel display (FPD), such as an LCD panel, the lighting inspection of the LCD panel is performed. In this inspection, an inspection apparatus having a probe unit equipped with a plurality of probes is generally used. In this case, in order to push the probes of the inspection device toward the electrodes of the LCD panel, the predetermined electrical signals are supplied to the predetermined electrodes. An example of such an inspection apparatus is shown in Fig. 2, and the inspection apparatus 1 shown mainly consists of the panel unit 2 and the measurement unit 3. The panel unit 2 is a φ device that transports the LCD panel 5 inserted from the outside to the measuring unit 3 and transports the LCD panel 5 after the inspection to the outside. The panel group portion 2 has a panel group platform 7 in the inner deep portion of the opening portion 6, and the LC panel 5 is supported by the panel group platform 7, and is transported to the measuring portion 3. Further, the panel group platform 7 is transported to the outside by the LCD panel 5 after the measurement unit 3 receives the inspection. The measuring unit 3 is a device that supports inspection by the LCD panel 5 that is delivered from the panel group unit 2. The measuring unit 3 is configured to include a chucking head 8, a probe 9, and the like. The chucking head 8 is a member for supporting the LCD panel 5. The chuck head 8 is supported by the XYZ 0 platform (not shown) and is controlled to move and rotate in the XYZ axis direction of 200928373 so that the position of the LCD panel 5 is adjusted. The probe 9 is mainly provided with a seat plate 10 and a probe unit n. The probe unit 11 is inclined to the horizontal plane, and the probe unit 11 is supported by the seat plate 1 in a state of facing the opening 10A of the seat plate 10. As shown in Fig. 3, the probe unit 11 includes a probe holder 12, a support portion 13', a probe assembly 14, and a connection cable portion 15. The probe holder 12 is a support probe. The plurality of support portions 13 of the needle assembly 14 are integrally supported sheets. In the probe holder 12, the plurality of probe assemblies 14 are supported via the support portion 13 in a state facing the LCD panel 5 on the workpiece stage 16. The support portion 13 is a member for supporting the probe assembly 14 at the distal end side thereof while the proximal end side thereof is supported by the probe holder 12. As shown in FIGS. 4 and 5, the support portion 13 includes a suspension block 18 that is directly attached to the probe holder 12 and supports the entire suspension block 18, and is supported by the front end portion of the suspension block 18. The block 19 is integrally formed of a probe card 20 that is integrally attached to the inner side surface (the lower side in FIG. 4) of the slider 19. The probe assembly 14 is an electrode that contacts the circuit of the LCD panel 5, and transmits a member for checking the signal. The probe assembly 14 is mounted on the lower side of the probe card 20. As shown in Figs. 6 to 8, the probe assembly 14 is provided with a probe block 22 and a probe 23. The probe block 22 is directly attached to the lower side of the probe card 20. A probe 23 is attached to the lower side of the probe block 22. The probe 23 is a member that is in direct contact with the electrodes of the circuit of the LCD panel 5 200928373. The probe 23 is an electrode in which the probe 23A having the distal end portion of the probe 23A ' 23B ' at its distal end portion and the proximal end portion is in contact with the circuit of the LCD panel 5, and the probe 23B at the proximal end portion is in contact with the connecting cable. Terminal 15 of the terminal. The connecting cable portion 15 is a member for electrically connecting the probe 23 and an external device (not shown). Specifically, the connection cable portion 15 is an electric circuit that is directly connected to the probe 23B of the probe 23 and the probe holder 12 side, and is electrically connected to an external device via a circuit on the probe 12 side. . That is, the connecting cable portion 15 is a probe 23 electrically connected to the probe assembly 14 via the printed circuit board 16 of the probe holder 2, and an external device. The connecting cable portion 15 is composed of an FPC board 27, a driving integrated circuit 28, and an FPC cable 29. The FPC board 27 is a member for fixing the connecting cable portion 15 to the side of the probe assembly 14. The FPC board 27 is mounted on the lower side of the probe card 20. The driving integrated circuit 28 is a circuit that performs processing in accordance with the inspection. The drive integrated circuit 28 is mounted on the lower side of the FPC board 27, and one of the drive integrated circuits 28 is connected to the Fpc cable 29. The other of the driving integrated circuit 28 is connected to each terminal via each wiring 3〇. Further, the terminal is connected to the probe 2 3 B on the proximal end side of the probe 23. The FPC cable 29 is a cable for transmitting electrical signals along with the inspection. The FPC cable 29 is one in which one of the wirings 30 is fixed to the FPC board 27 and electrically connected to the driving integrated circuit 28, and the other is connected to the printed circuit board provided on the lower side of the probe holder 12. To the illustration). By 200928373, the FPC cable 29 is electrically connected to an external device via the printed circuit board. In the lighting inspection performed by the above inspection device 1, there is a special
利文獻1的簡易點燈檢查。在該簡易點燈檢查中，在LCD '面板5必須具備短路用棒與接觸專用腳位（均未予圖示） 〇 短路用棒是分別短路LCD面板5的全像素的R彼此 φ 間，G彼此間及B彼此間，閘極彼此間而減少探針所接觸 的端子數的配線。接觸專用腳位是與訊號發生器（未予圖 示）連接上述短路用棒所用的專用腳位。 簡易點燈檢査的檢査訊號是在閘極側有共通的1個訊 號，而在資料側的RGB各個有共通的3個訊號。此些訊 號分別供應於各端子，進行著簡易點燈檢査。 但是，在此種簡易點燈檢査中，若LCD面板5的短 路用棒受損壞時，則成爲對應於此的LCD面板5的畫面 未能顯不的構造。這時fe ’未能顯不爲是否爲LCD面板5 的畫面不良，或是否爲短路用棒的受損壞所致者的判別成 爲困難。尤其是有關於自動檢查化，即使爲短路用棒的受 損壞，也會判別爲LCD面板5的畫面的不良。 短路用棒的缺陷本體’與作爲LCD面板5的成品的 良否無關而不會成爲問題者之故，因而必須避免被判別爲 L C D面板5的畫面不良的情形。所以，進行直接接觸於 OLB腳位，而在接觸單元側進行與訊號分離同一訊號的短 路，即使短路用棒受損壞的情形’也硏究出防止成爲未顯 - 8 - 200928373 示的檢查方式。此時，接觸與用腳位是成爲不需要。 在此種簡易點燈檢查用的檢查裝置’有使用探針塊 22的輸入側連接FPC配線，來進行訊號的分離’同一訊 的短路者。 又，在探針塊22的輸入側連接FPC形成凸塊’而分 別連接R的凸塊彼此間，G的凸塊彼此間，B的凸塊彼此 間的方式，熱壓接橫一列地排列配線的FPC而連接者。 φ 專利文獻1 ··日本特開平1 1 -1 4556號公報 【發明內容】 然而，使用探針塊22的輸入側連接FPC配線在作成 進行訊號的分離，同一訊號的短路的簡易點燈檢查用的檢 查裝置中，藉由FPC配線的拉入，配線變複雜化，多層 化，而且有增加成本，又增大配線部分的空間的問題。 又，在將各凸塊熱壓接於FPC而加以連接的簡易點 φ 燈檢查用的檢查裝置中，熱壓接所致的連接之故，因而修 理，維修很困難。又，熱壓接的構造上，有熱的影響所致 的鄰接壓接部位的剝落等的問題。還有，必須遠離各訊號 列的壓接部位’所以，成爲需要廣闊空間，而有增大配線 部分的空間的問題。 本發明是解決上述問題點所創作者，其目的是在於提 供謀求簡易點燈檢査所用的配線部分的省空間化，維修的 容易化及減低成本的探針單元及檢查裝置。 爲了解決上述課題’本發明的探針單元，其特徵爲： -9- 200928373 爲了簡易點燈檢査具備：接觸於檢查對象板的電路的電極 的探針裝配體，及電性地連接該探針裝配體與外部裝置的 連接電纜部，上述連接電纜部具備：傳送電性訊號的FPC 電纜，及將該FPC電纜的各配線電性地連接於上述探針 裝配體的各探針側的短路部，上述短路部具備：個別地設 於上述FPC電纜側或上述探針裝配體的各探針側的各配 線的短路凸塊，及一次接觸於排列成一列的全短路凸塊的 長狀短路棒，上述各短路凸塊中，對應於紅的短路凸塊， 對應於綠的短路凸塊及對應於藍的短路凸塊是分別配設於 排列成橫一列而且紅綠藍的各列互相錯開的位置，上述短 路棒對應於紅綠藍設置3支，而且各短路棒分別被設定成 一次接觸於紅列的全短路凸塊，綠列的全短路凸塊及藍列 的全短路凸塊的長度。 一種檢查裝置，係使用於檢查對象板的檢查的檢查裝 置，其特徵爲：具備：將從外部被插入的檢查對象板在檢 查完成後朝外部搬出的面板組部，及支撐從該面板組部被 交給的檢查對象板並進行實驗的測定部，作爲上述測定部 的探針單元，使用上述的探針單元。 如以上地，具備分別一次地接觸於紅列的短路凸塊， 綠列的短路凸塊及藍列的短路凸塊，與各列的全短路凸塊 的短路棒之故，因而可謀求簡易點燈所用的配線部分的省 空間化，維修的容易化及減少成本。 【實施方式】 -10- 200928373 以下，針對於本發明的實施形態的探針單元及檢查裝 置，一面參照圖式一面加以說明。 本實施形態的探針單元及檢查裝置，是整體上與上述 習知的探針單元及檢查裝置大約同樣。本實施形態的探針 單元及檢查裝置的特徵是設置將探針座12側的訊號電纜 的各配線電性地連接於探針裝配體的各探針側的短路部之 點。在該短路部中，形成有將所輸入的訊號分成種類別地 φ 所排列（鋸齒狀排列等）的凸塊，而對於此些壓接朝橫一 列方向並聯的短路橡膠使之短路，將與訊號分離同一訊號 短路作成可能者。該探針裝配體的部分以外的部分構成是 與上述習知的檢查裝置同樣之故，因而在此在同一構件賦 予同一符號加以說明。 本實施形態的探針單元，是具備與習知的探針單元 11同樣的探針座12與支撐部13，惟其他構件是不相同。 亦即，表示於第1圖的探針裝配體32及連接電纜部33是 〇 與習知的探針單元11不相同。 探針裝配體32是爲了簡易點燈檢查而接觸於LCD面 板5的電路的電極，用以傳送檢查訊號的構件。探針裝配 體32是被安裝於探針板20的下側面。該探針裝配體32 是具備與上述習知的探針單元11同樣的探針塊35與探針 3 6所構成。 連接電纜部33是經由探針座12的印刷基板電性地連 接上述探針裝配體32與外部裝置所用的構件。具體上， 連接電纜部3 3是具備，FPC板3 8，及傳送電性訊號的探 -11 - 200928373 針側FPC電纜39，及將該探針側FPC電纜 3 9A電性地連接於上述探針裝配體32的各探 短路部40所構成。 上述FPC板38是支撐探針側FPC電纜 40，用以連接探針36與外部裝置側。FPC板 部38A，及前方卡止部38B，及支撐板部38C 體部38A是形成配合於探針塊35的寬度的長 0 狀。前方卡止部38B是一體地安裝於本體部 ，卡止於探針塊35而構成與該探針塊35 —起 體。支撐板部38C是一體地支撐下述的各短ft 部分。支撐板部3 8C是一體地被支撐於本體f 端部。FPC板38是探針板20的下側，被安裝 體3 2的基端側。 探針側FPC電纜39是被安裝於FPC板 部3 8C，在探針3 6與短路部40之間傳送電性 Q 構件。探針側FPC電纜39是從面臨於支撐板 面的探針3 6的探針3 6Β的位置一直到上側面 又，短路部40設於支撐板部3 8C的上側面。 短路部40是僅對於LCD面板5的電路的 _ 針36，分成3個訊號所用的裝置。具體上， 點燈檢查之際，僅對於上述電極數的探針36 地選別共通於被供應於資料側的RGB各個的 號所用的裝置。 如第9圖至第12圖所示地，短路部40長 39的各配線 針3 6B側的 39及短路部 38是由本體 所構成。本 :度的長方體 38A的前方 ;連續的構造 |凸塊43的 部38A的基 :於探針裝配 38的支撐板 :訊號所用的 部3 8 C下側 沿著配設。 電極數的探 在進行簡易 分別選擇性 3個檢查訊 由下側承受 -12- 200928373 部41，及上側承受部42所構成。下側承受部41是藉由 鋸齒狀地排列的短路凸塊43所構成。該短路凸塊43是分 別個別地設置於配設在支撐板部38C的上側面的探針側 FPC電纜39的各配線39A。各短路凸塊43中，對應於紅 的短路凸塊43R，對應於綠的短路凸塊43G及對應於藍的 短路凸塊43 B分別排列成橫一列，而且配設在紅綠藍的各 列互相地錯開的位置。在此，排列成鋸齒狀。又，各短路 φ 凸塊43R，43G，43B是分別在錯開位置排列成橫一列就 可以，而不被限定於各列隔著一定間隔的鋸齒狀，其他形 態的排列也可以。 上側承受部42是由訊號電纜46，及連接器47，及短 路板48，及短路棒49所構成。 訊號電纜46是由探針座12側的電路所延伸的電纜。 在該訊號電纜46，設有將共通的3個訊號傳送到資料側 的RGB各個的3條配線（未予圖示）。連接器47是分別 φ 連接訊號電纜46的3條配線，及3支短路棒49所用的構 件。短路板48是用以支撐短路棒49的板材。短路板48 是形成可全部覆蓋排列成三列的短路凸塊43 R，43 G， 43B的寬度。短路板48是面臨於下側承受部41的狀態下 被安裝於探針座12的下側。藉此，當將探針裝配體32安 裝於探針板20，則互相接觸下側承受部41與上側承受部 42，而當從探針板20拆下探針安裝體32，則下側承受部 4 1與上側承受部42成爲互相地分離。 短路棒49是一次地接觸於排列成一列的全短路凸塊 -13- 200928373 43，而用以傳送共通的訊號的構件。短路棒49是對應於 紅綠藍（RGB ):並聯地配設3支。又，各短路棒49是 被設定成可一次地接觸於分別排列成一列的各短路凸塊 43R，43 G，43 B的長度。具體上，各短路棒49是分別被 設定成一次地接觸於紅的列的全短路凸塊43R，綠的列的 全短路凸塊34G，及藍的列的全短路凸塊43 B的長度。短 路棒49是由一次地可接觸於排列成橫一列的全短路凸塊 φ 43的長度的短路橡膠所構成。具體上，作爲該短路橡膠 爲由加壓導電橡膠所構成。該加壓導電橡膠爲彈性地以大 約均等壓接觸於全短路凸塊43，成爲可一次傳送共通訊 號。 在如以上所構成的探針單元，作用成如下。 將探針單元的探針裝配體32與連接電纜部33安裝於 探針板20的下側面，而在被固定於探針座12的支撐部 1 3側安裝探針裝配體1 4，則互相地接觸短路部40的下側 〇 承受部41與上側承受部42而互相重疊，藉此，下側承受 部41的各短路凸塊43，與上側承受部42的各短路棒49 互相地接觸。此時，3支短路棒49是彈性地以大約均等 壓分別接觸於對應於紅的全短路凸塊43R，對應於綠的全 短路凸塊43G及對應於藍的全短路凸塊43B。藉此，共通 於資料側的RGB各個的3個訊號，傳送至分別所對應的 探針側FPC電纜39的各配線39A，而經由該各配線39A 傳送至各探針3 6。 探針單元的探針裝配體32是面臨配設於LCD面板5 -14- ❹A simple lighting inspection of the document 1. In the simple lighting inspection, the LCD 'panel 5 must have a short-circuit bar and a contact-specific pin (none of which is not shown). The short-circuit bar is short-circuited between R and φ of the entire pixel of the LCD panel 5, respectively. Wiring between the gates and between the B and the gates is reduced by the number of terminals that the probe contacts. The contact-specific pin is a dedicated pin used to connect the short-circuit bar to a signal generator (not shown). The check signal for the simple lighting check is that there is a common signal on the gate side, and the RGB on the data side has three common signals. These signals are supplied to each terminal for simple lighting inspection. However, in the case of the simple lighting inspection, if the short-circuit bar of the LCD panel 5 is damaged, the screen of the LCD panel 5 corresponding thereto is not displayed. At this time, it is difficult to determine whether or not the screen of the LCD panel 5 is defective or whether the damage of the short-circuiting rod is caused. In particular, regarding the automatic inspection, even if the short-circuit bar is damaged, it is determined that the screen of the LCD panel 5 is defective. The defective main body of the short-circuit bar does not become a problem regardless of the quality of the finished product of the LCD panel 5. Therefore, it is necessary to avoid the case where the screen of the L C D panel 5 is defective. Therefore, a direct contact with the OLB pin and a short circuit that separates the same signal from the signal on the contact unit side, even if the short-circuit bar is damaged, is prevented from becoming an inspection mode as shown in Fig. 8 - 200928373. At this time, it is not necessary to contact and use the foot. In the inspection apparatus for simple lighting inspection, the FPC wiring is connected to the input side of the probe block 22 to separate the signal and the short circuit of the same signal. Further, a FPC is formed on the input side of the probe block 22 to form a bump ′, and bumps of R are respectively connected to each other, bumps of G are arranged to each other, and bumps of B are mutually arranged, and the wiring is arranged in a horizontal row by thermocompression bonding. The FPC is connected. 。 。 。 。 。 。 。 。 。 。 。 【 然而 1 1 1 1 1 1 1 1 1 1 1 1 1 F F F F F F F F F F F F F F F F F F F F F F F F F F F F F F F In the inspection apparatus, the wiring of the FPC wiring is complicated, and the wiring is complicated, and the cost is increased, and the space of the wiring portion is increased. Further, in the inspection apparatus for the inspection of the lamp φ, which is used for the thermal inspection of the bumps, the connection is made by thermocompression bonding, and it is difficult to repair and repair. Further, in the structure of the thermocompression bonding, there is a problem such as peeling of the adjacent pressure contact portion due to the influence of heat. Further, it is necessary to move away from the crimping portion of each of the signal rows. Therefore, there is a problem that a large space is required and the space of the wiring portion is increased. The present invention has been made to solve the above problems, and an object of the present invention is to provide a probe unit and an inspection apparatus which are easy to reduce the wiring and reduce the cost of the wiring portion for simple lighting inspection. In order to solve the above problem, the probe unit of the present invention is characterized in that: -9-200928373 includes a probe assembly that contacts an electrode of a circuit of the inspection target board and electrically connects the probe for simple lighting inspection. a connecting cable portion of the assembly and the external device, wherein the connecting cable portion includes: an FPC cable that transmits an electrical signal, and a short-circuit portion that electrically connects each wire of the FPC cable to each probe side of the probe assembly The short-circuit portion includes: short-circuit bumps that are individually provided on the FPC cable side or probe sides of the probe assembly, and long short-circuit bars that are once contacted with the short-circuit bumps arranged in a line Among the short-circuit bumps described above, the short-circuit bumps corresponding to red, the short-circuit bumps corresponding to green, and the short-circuit bumps corresponding to blue are respectively arranged in a row arranged in a row and the columns of red, green and blue are staggered from each other. Position, the shorting bar is corresponding to three sets of red, green and blue, and each shorting bar is respectively set to be in contact with the full shorting bump of the red column, the short circuit of the green column and the short circuit of the blue column length. An inspection apparatus for an inspection of an inspection target panel, comprising: a panel group that is externally carried out after an inspection of an inspection target sheet inserted from the outside, and a support from the panel group The measurement unit that performs the test on the test target plate that has been delivered is used as the probe unit of the measurement unit, and the probe unit described above is used. As described above, it is possible to provide a short-circuit bump that is in contact with the red column once, a short-circuit bump of the green row, and a short-circuit bump of the blue column, and the short-circuit bar of the short-circuit bump of each column, so that a simple point can be obtained. The wiring portion used for the lamp is space-saving, the maintenance is easy, and the cost is reduced. [Embodiment] -10-200928373 Hereinafter, a probe unit and an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. The probe unit and the inspection apparatus of the present embodiment are substantially the same as the above-described conventional probe unit and inspection apparatus. The probe unit and the inspection apparatus according to the present embodiment are characterized in that each of the wires of the signal cable on the probe holder 12 side is electrically connected to the short-circuit portion on the probe side of the probe assembly. In the short-circuit portion, bumps in which the input signals are arranged in a type φ (saw-tooth arrangement, etc.) are formed, and short-circuited rubbers which are connected in parallel in the direction of the horizontal row are short-circuited, and The signal separates the same signal and makes a short circuit. The components other than the portion of the probe assembly are the same as those of the conventional inspection device described above, and therefore, the same members will be denoted by the same reference numerals. The probe unit of the present embodiment includes the probe holder 12 and the support portion 13 similar to those of the conventional probe unit 11, but the other members are different. That is, the probe assembly 32 and the connecting cable portion 33 shown in Fig. 1 are different from the conventional probe unit 11. The probe assembly 32 is an electrode that contacts the circuit of the LCD panel 5 for simple lighting inspection, and transmits a member for inspecting signals. The probe assembly 32 is mounted on the lower side of the probe card 20. The probe assembly 32 is composed of the probe block 35 and the probe 36 similar to the above-described conventional probe unit 11. The connecting cable portion 33 is a member for electrically connecting the probe assembly 32 and the external device via the printed circuit board of the probe holder 12. Specifically, the connection cable portion 3 3 is provided with an FPC board 3 8 and a probe-side - Fen cable 11 for transmitting an electrical signal, and the probe side FPC cable 39 A is electrically connected to the probe. Each of the probe short-circuit portions 40 of the needle assembly 32 is configured. The FPC board 38 is a support probe side FPC cable 40 for connecting the probe 36 to the external device side. The FPC plate portion 38A, the front locking portion 38B, and the support plate portion 38C body portion 38A are formed in a long shape that is fitted to the width of the probe block 35. The front locking portion 38B is integrally attached to the main body portion, and is locked to the probe block 35 to form a body with the probe block 35. The support plate portion 38C integrally supports the respective short ft portions described below. The support plate portion 3 8C is integrally supported at the end of the body f. The FPC board 38 is the lower side of the probe card 20 and is provided on the proximal end side of the mounting body 32. The probe side FPC cable 39 is attached to the FPC board portion 38C, and an electrical Q member is transferred between the probe 36 and the short-circuit portion 40. The probe side FPC cable 39 is provided from the position of the probe 36 6 of the probe 36 facing the support surface to the upper side, and the short circuit 40 is provided on the upper side of the support plate portion 38C. The short-circuit portion 40 is a device for dividing the signal into three signals only for the _ pin 36 of the circuit of the LCD panel 5. Specifically, in the case of the lighting inspection, only the probes 36 of the above-mentioned number of electrodes are selected to be common to the devices used for the respective numbers of RGB supplied to the data side. As shown in Figs. 9 to 12, each of the wiring pins 36B side 39 and the short-circuiting portion 38 of the short-circuit portion 40 length 39 is constituted by a main body. The front of the rectangular parallelepiped 38A; the continuous structure | the base of the portion 38A of the bump 43: the support plate of the probe assembly 38: the lower portion of the portion 3 8 C used for the signal is disposed along the lower side. The number of electrodes is easily selected, and each of the three inspections is supported by the lower side of the -12-200928373 portion 41 and the upper receiving portion 42. The lower receiving portion 41 is constituted by short-circuit bumps 43 arranged in a zigzag manner. The short-circuit bumps 43 are individually provided in the respective wirings 39A of the probe-side FPC cable 39 disposed on the upper side surface of the support plate portion 38C. In each of the short-circuit bumps 43 , the short-circuit bumps 43R corresponding to red, the short-circuit bumps 43G corresponding to green, and the short-circuit bumps 43 B corresponding to blue are arranged in a horizontal row, and are arranged in columns of red, green and blue. Positions that are staggered from each other. Here, they are arranged in a zigzag shape. Further, each of the short-circuited φ bumps 43R, 43G, and 43B may be arranged in a horizontal row at the shifted position, and is not limited to the zigzag shape in which the respective rows are spaced apart from each other, and the other shapes may be arranged. The upper receiving portion 42 is composed of a signal cable 46, a connector 47, a short plate 48, and a shorting bar 49. The signal cable 46 is a cable extending from the circuit on the probe holder 12 side. The signal cable 46 is provided with three wirings (not shown) for transmitting the three common signals to the RGB side of the data side. The connector 47 is a member for splicing the three wires of the signal cable 46 and three shorting bars 49, respectively. The short circuit plate 48 is a plate material for supporting the shorting bars 49. The short-circuiting plate 48 is formed to have a width which can cover all of the short-circuit bumps 43 R, 43 G, 43B which are arranged in three columns. The short-circuiting plate 48 is attached to the lower side of the probe holder 12 in a state of facing the lower receiving portion 41. Thereby, when the probe assembly 32 is attached to the probe card 20, the lower receiving portion 41 and the upper receiving portion 42 are brought into contact with each other, and when the probe mounting body 32 is detached from the probe card 20, the lower side is subjected to the lower side. The portion 41 and the upper receiving portion 42 are separated from each other. The shorting bar 49 is a member for contacting a fully short-circuited bump arranged in a row -13 - 200928373 43, for transmitting a common signal. The shorting bar 49 corresponds to red, green and blue (RGB): three branches are arranged in parallel. Further, each of the shorting bars 49 is set to be once contactable to the length of each of the short-circuit bumps 43R, 43 G, 43 B which are arranged in a line. Specifically, each of the shorting bars 49 is a length of a full shorting bump 43R which is set to be in contact with the red row once, a full shorting bump 34G of a green row, and a full shorting bump 43 B of a row of blue. The short bar 49 is composed of a short-circuiting rubber which is once contactable to the length of the short-circuiting bump φ 43 arranged in a horizontal row. Specifically, the short-circuit rubber is composed of a pressurized conductive rubber. The pressurized conductive rubber elastically contacts the full short-circuit bumps 43 with approximately equal pressure, so that the common communication number can be transmitted at one time. The probe unit constructed as above functions as follows. The probe assembly 32 and the connecting cable portion 33 of the probe unit are attached to the lower side of the probe card 20, and the probe assembly 14 is attached to the side of the support portion 13 fixed to the probe holder 12, and then The lower side dam receiving portion 41 and the upper side receiving portion 42 of the ground contact short-circuit portion 40 are overlapped with each other, whereby the short-circuiting bumps 43 of the lower-side receiving portion 41 are in contact with each of the short-circuit bars 49 of the upper-side receiving portion 42. At this time, the three shorting bars 49 are elastically contacted to the full shorting bumps 43R corresponding to red, respectively, at approximately equal pressure, corresponding to the green full shorting bumps 43G and the full shorting bumps 43B corresponding to blue. Thereby, the three signals of the RGB common to the data side are transmitted to the respective wires 39A of the probe side FPC cable 39 corresponding thereto, and are transmitted to the respective probes 36 via the respective wires 39A. The probe assembly 32 of the probe unit is disposed on the LCD panel 5-14-❹
200928373 ，各探針36的前端側的探針36A被接觸於形成於 板5的表面的電路的各電極，而送訊對應於rgb 共通訊號。 該3個共通訊號是以短路部40的各短路凸塊 上側承受部42的各短路棒49，對應於RGB選捐 別被選別。 藉此，在LCD面板5的RGB的各元件，檢查 送訊至簡易點燈檢查用而進行著點燈檢查。 在維修時，僅從探針板20的下側面拆除探針 32及連接電纜部33，互相地分離下側承受部41的 凸塊43，及上側承受部42的各短路棒49。藉此， 針3 6等的維修。 如以上地，設置短路部40，對於該短路部40 路凸塊43，僅壓接各短路棒49，成爲容易地分離 訊號，可短路同一訊號。又，成爲可容易地分離化 功能的元件。藉此，可將短路部40的周圍作成省 又，對於探針板20僅裝卸探針裝配體32及: 部33，成爲容易進行與短路部40的電性連接，' 裝卸作業或維修的作業性。 又，短路部40是主要由短路凸塊43與短路 構成之故，因而以構造簡單，可謀求減低成本。 (變形例） LCD面 的3個 43，及 性地分 訊號被 裝配體 各短路 進行探 的各短 RGB的 具有各 空間化 接電纜 可提昇 ! 49所 -15- 200928373 作爲具備上述實施形態的探針單元的檢査裝置，並不 被限定於上述習知的檢查裝置者’對於可具備上述探針單 元的所有檢査裝置可適用本案發明。 在上述實施形態中，將短路凸塊43設於Fpc板38 側，而將短路棒49設於探針座1 2的電路側，惟將短路凸 塊43與短路棒49的位置作成相反也可以。此時，也可發 揮上述同樣的作用，及效果。 【圖式簡單說明】 第1圖是表示本發明的實施形態的探針單元的主要部 分的側面圖。 第2圖是習知的檢查裝置的前視圖。 第3圖是習知的檢查裝置的探針單元及工件台的立體 圖。 第4圖是習知的檢查裝置的探針單元的立體圖。 φ 第5圖是習知的檢查裝置的探針單元的俯視圖。 第6圖是習知的檢查裝置的探針單元的側面斷面圖（ 第5圖的A-A線箭視斷面圖）。 第7圖是表示習知的檢查裝置的探針單元的主要部分 的側面圖。 第8圖是表示習知的檢查裝置的探針單元的主要部分 的仰視圖。 第9圖是表示本發明的實施形態的短路部的上側承受 部的俯視圖。 -16- 200928373 第ι〇圖是表示本發明的實施形態的短路部的上側承 受部的前視圖。 第1 1圖是表示本發明的實施形態的短路部的下側承 受部的俯視圖。 第12圖是表示本發明的實施形態的短路部的前視圖 0 【主要元件符號說明】 5 : LCD面板 1 1 :探針單元 1 2 :探針座 1 3 :支撐部 2〇 :探針板 32 :探針裝配體 3 3 :連接電纜部 φ 35 :探針塊 3 6 :探針 3 6A，36B ：探針 38 : FPC 板 38A :本體部 38B :前方卡止部 38C :支撐板部 39 :探針FPC電纜 39A :各配線 -17- 200928373 40 :短路部 4 1 :下側承受部 42 :上側承受部 43 :短路凸塊 43R ’·對應於紅的短路凸塊 43G :對應於綠的短路凸塊 43B :對應於藍的短路凸塊 46 :訊號電纜 47 :連接器 4 8 :短路板 49 :短路棒In 200928373, the probe 36A on the distal end side of each probe 36 is brought into contact with each electrode of the circuit formed on the surface of the board 5, and the transmission corresponds to the rgb common communication number. The three common communication numbers are the shorting bars 49 of the short-side bump upper receiving portions 42 of the short-circuit portion 40, and are selected corresponding to the RGB selection. Thereby, in each of the RGB elements of the LCD panel 5, the inspection is sent to the simple lighting inspection, and the lighting inspection is performed. At the time of maintenance, the probe 32 and the connecting cable portion 33 are removed only from the lower side of the probe card 20, and the bumps 43 of the lower receiving portion 41 and the shorting bars 49 of the upper receiving portion 42 are separated from each other. Thereby, the maintenance of the needle 3 6 and the like. As described above, the short-circuit portion 40 is provided, and only the short-circuit bars 49 are pressed against the bumps 40 of the short-circuit portion 40, so that the signals can be easily separated and the same signal can be short-circuited. Further, it is an element that can be easily separated. Thereby, the periphery of the short-circuit portion 40 can be made unnecessary, and only the probe assembly 32 and the portion 33 can be attached and detached to the probe card 20, and the electrical connection to the short-circuit portion 40 can be easily performed, and the work of loading and unloading work or maintenance can be performed. Sex. Further, since the short-circuit portion 40 is mainly composed of the short-circuit bumps 43 and the short-circuit, the structure is simple and the cost can be reduced. (Modification) Each of the three LCDs on the LCD surface and the short-distance RGB of each of the short-circuited components of the LCD surface can be improved by each of the short RGB cables. 49-15 - 200928373 As a probe with the above embodiment The inspection apparatus of the needle unit is not limited to the above-described conventional inspection apparatus. The invention of the present invention can be applied to all inspection apparatuses that can include the above-described probe unit. In the above embodiment, the shorting bumps 43 are provided on the Fpc board 38 side, and the shorting bars 49 are provided on the circuit side of the probe holder 12, but the shorting bumps 43 and the shorting bars 49 are oppositely arranged. . At this time, the same effects and effects as described above can also be performed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a main part of a probe unit according to an embodiment of the present invention. Figure 2 is a front elevational view of a conventional inspection device. Fig. 3 is a perspective view of a probe unit and a workpiece stage of a conventional inspection apparatus. Fig. 4 is a perspective view of a probe unit of a conventional inspection device. φ Fig. 5 is a plan view of a probe unit of a conventional inspection device. Fig. 6 is a side sectional view of the probe unit of the conventional inspection apparatus (arrow-sectional view taken along line A-A of Fig. 5). Fig. 7 is a side view showing a main part of a probe unit of a conventional inspection device. Fig. 8 is a bottom view showing a main part of a probe unit of a conventional inspection device. Fig. 9 is a plan view showing an upper receiving portion of the short-circuit portion in the embodiment of the present invention. -16- 200928373 The figure is a front view showing the upper receiving portion of the short-circuit portion of the embodiment of the present invention. Fig. 1 is a plan view showing a lower receiving portion of the short-circuit portion according to the embodiment of the present invention. Fig. 12 is a front view showing a short-circuit portion according to an embodiment of the present invention. [Description of main components and symbols] 5: LCD panel 1 1 : probe unit 1 2 : probe holder 1 3 : support portion 2 〇: probe card 32: probe assembly 3 3 : connection cable portion φ 35 : probe block 3 6 : probe 3 6A, 36B : probe 38 : FPC plate 38A : main body portion 38B : front locking portion 38C : support plate portion 39 : Probe FPC cable 39A : Each wiring -17- 200928373 40 : Short-circuit portion 4 1 : Lower-side receiving portion 42 : Upper-side receiving portion 43 : Short-circuit bump 43R '· Short-circuit bump 43G corresponding to red: Corresponding to green Shorting bump 43B: shorting bump 46 corresponding to blue: signal cable 47: connector 4 8 : shorting plate 49: shorting bar
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