200925312 九、發明說明： •【發明所屬之技術領域】 - 本發明涉及鍍膜技術，尤其涉及一種應用於光學元件 之鍍膜治具及鍍膜裝置。 【先前技術】 隨著光學產品之發展，光學元件之應用範圍越來越 廣。相應地，業界採用各種方法製造光學元件，以適應市 場對不同規格光學元件之需求（請參閱“ Fabrication of Ο Diffractive Optical Lens for Beam Splitting Using LIGA Process” , Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference on, pp.1242-1247, 2006.06)。製造出之光學元件一般需經過後續處理以獲得適 於應用之良好性能。 鍍膜工序為後續處理中之重要步驟之一。鍍膜係指以 物理或化學方法於光學元件表面鍍上單層或多層薄膜，利 用入射、反射及透射光線於薄膜介面產生之干涉作用實現 胃聚焦、准直、濾光、反射及折射等效果。光學元件之鍍膜 製程為：首先，將光學元件安裝於鍍膜治具上，鍍膜治1具 設置於一容器中；其次，密閉容器，對容器抽真空；然後， 以蒸鍍或濺鍍等方法於光學元件需要鍍膜之部位進行鍍 膜；最後，對容器破真空，將經過鍍膜之光學元件從鍍膜 治具上拆抑下來。 然而，先前技術中，用於承載光學元件之鍍膜治具一 般為二維平面結構，該結構空間利用率低，單位空間中， 200925312 鍵膜治具承載之光學元件數量少，因此，難以減少鑛膜製 .程中對容器抽真空及破真空之次數，從而難以提高鑛膜治 "具及鍍膜裝置之生產效率以及降低生產成本。 【發明内容】 有鑒於此’提供一種能夠提高空間利用率，進而提高 生產效率以及降低生產成本之鑛膜治具及鐘膜裝置實為必 要。 —種鍍膜治具，其包括··至少-轉軸，及與該轉軸連 接之至v一具有立體結構之基片夾具模組，該轉軸用於帶 動該基片夹具模組轉動，該基片夾具模組由圍繞該轉轴排 佈之至少三個該基片夾具構成。 種鍍膜裝置，其包括：一個真空容器；至少一個設 置於該真空容器内之錢膜乾；及一個與該鏡膜乾相對設置 之鍍膜治具，·其中，該制治具包括至少—轉軸，及與該 轉軸連接之至 >、具有立體結構之基片夾具模組，該轉軸 ❹用於帶動該基片夾具模組轉動，該基片夾具模組由圍繞該 轉軸排佈之至少三個該基片夾具構成。 相對於先前技術，該鍍膜治具及鍍膜裝置採用立體結 構之基片夹具模組以承載待鍍膜之光學元件。該基片夾具 杈組為三維立體結構，其空間利用率高，單位空間中，承 載待鍍臈之光學元件數量多，因此，於一定程度上減少鍍 膜製程中對容器抽真空及破真空之次數，從❼提高鍵膜治 具及鍍膜裝置之生產效率以及降低生產成本。 【實施方式】 200925312 下面將結合圖式對本發明作進一步之詳細說明。 〇月參閱圖1及圖2，為本發明實施例提供之一種鑛膜治 具100，其包括：至少一個轉軸11〇，及與該轉軸11〇連接 之至少一具有立體結構之基片夹具模組120。 該轉轴110穿設於兩個相對之軸承142、144，該轉轴 110用於帶動該基片夾具模組120轉動》 該鍵膜治具100還包括一與該轉軸11〇連接之驅動裝 置130，該驅動裝置130用於驅動該轉軸no轉動。該驅動 ©裝置130包括一電機132，一固定於該電機132之輸出軸 1322之主動齒輪134’ 一固定於該轉軸11〇之從動齒輪 136,及一連接該主動齒輪134與從動齒輪136之鏈條138。 該電機132之輸出軸1322帶動該主動齒輪134轉動，該主 動齒輪134藉由該鏈條138’以帶動該從動齒輪136及該轉 軸110轉動，從而帶動該基片夾具模組120轉動。 該基片夾具模組120由圍繞該轉軸11〇排佈之三個基 Α片夾具124、126、128構成。該基片夾具124、126、128 均為一矩形框架，其用於夾持待鍵膜之光學元件（圖未 示）。該基片夾具124、126、128之邊緣互相連接，使得該 基片夾具模組120構成正三棱柱結構，其沿垂直於該轉軸 110方向之截面為正三角形。該轉軸110穿設於該基片夾具 模組120之中心軸線。構成該基片夾具模組120之三個該 基片夾具124、126、128藉由連接桿146與該轉軸110連 接0 使用時，首先，對處於水平位置之基片夾具124所夾 200925312 持之光學元件進行鍍膜；然後，啟動該電機132,藉由該電 • 機132之輸出軸1322之轉動，以使得該轉轴110轉動，而 帶動該基片夾具模組120轉動，當該基片夾具126轉動至 水平位置時，停止該電機132,以使得該基片夾具126停止 於水平位置，進而對該基片夾具126 .所夾持之光學元件進 行鍍膜；最後，重複上一步驟，以使得該基片夾具128轉 動至水平位置，並停止於水平位置，以對該基片夾具128 所夾持之光學元件進行鍍膜。 © 該鍍膜治具100還包括一與該電機132電連接之控制 裝置150,該控制裝置150用於控制該電機132之啟動與停 止，以實現對該基片夾具模組120轉動之精確控制，進而 確保該基片夾具模組120之基片夾具124、126、128所夾 持之光學元件之鍍膜品質。 可以理解，構成該基片夾具模組120之基片夾具之數 量亦可為多於三個，例如四個或五個，則該基片夾具模組 ▲ 120之沿垂直於該轉轴110方向之截面為正四邊形或正五邊 形。可以理解，構成該基片夾具模組120之基片夾具之尺 寸規格亦可不同，構成該基片夾具模組120之基片夾具之 邊緣亦可未互相連接。該基片夾具模組120之結構並無特 殊限制，只需要由圍繞該轉轴110排佈之至少三個基片夾 具構成一立體結構，以承載更多之待鍍膜之光學元件，並 可藉由該電機132之啟動與停止，以實現對該基片夾具模 組120轉動之精確控制即可。本實施例中，該基片夾具之 材料為銅。可以理解，該基片夾具之材料亦可為其他金屬， 9 200925312 例如銘或不錄鋼。 ' 請參閱圖3,為本發明實施例提供之一種採用上述鍍膜 ' 治具100之鍍膜裝置10，其包括··一個真空容器200 ;至 少一個設置於該真空容器200内之鍍膜靶300;及一個與該 鍍膜靶300相對設置之鍍膜治具100。. 採用該鍍膜裝置10對光學元件進行鍍膜之製程為：首 先，將光學元件安裝於該鍍膜治具100之基片夾具上；其 次，密閉該真空容器200，對該真空容器200抽真空；然後， ©激發該鍍膜靶300,對安裝於該鍍膜治具100之基片夾具上 之光學元件進行鍍膜；最後，對該真空容器200破真空， 將經過鍍膜之光學元件從該鍍膜治具100之基片夾具上拆 卸下來。 請進一步參閱圖4,優選地，該鍍膜裝置10進一步包 括一設置於該真空容器200内之轉盤模組400,該轉盤模組 400用於承載該鍍膜治具100,從而增加該鍍膜治具1〇〇夾 _持之光學元件之鍍膜厚度之均勻性。該轉盤模組400包括 ❹ 一主轴401，一個與該主軸401連接之第一轉盤402，兩個 第二轉盤404，及兩個副軸403。該第二轉盤404藉由該副 軸403與該第一轉盤402連接。該鍍膜治具100設置於該 第二轉盤404。該主轴401可轉動，以帶動該第一轉盤402 轉動，從而使得該第二轉盤404以該主軸401為中心轉動。 同時，該第二轉盤404亦可藉由該副軸403帶動，而以該 副軸403為中心自轉。該鍍膜治具100藉由該第二轉盤404 帶動，以該主轴401為中心轉動之同時，又可以該副轴403 200925312 ,為中心自轉，從而增加該鍍膜治具100夾持之光學元件之 .鍍膜厚度之均勻性。可以理解，該轉盤模組400之第二轉 盤404之數量亦可為一個或多於兩個。該主轴及該副 軸403可藉由電機帶動而轉動。 “該鍍膜治具100及鍍膜裝置1〇採用立體結構之基片夾 具杈組120以承載光學元件。該基片夾具模組12〇為三維 立體結構，其空間利用率高，單位空間中，承載之光學元 ❹件數量多’因此，於-定程度上減少鍍膜製程中對該真空 容器勘抽真空及破真空之次數，從而提高鍍膜治具及鍵 臈裝置之生產效率以及降低生產成本。 β綜上所述，本發明確已符合發明專利之要件，遂依法 提出專利申請。惟，以上所述者僅為本發明之較佳實施方 式，自不能以此限制本案之申請專利範圍。舉凡熟悉本案 技藝之人士援依本發明之精神所作之等效修飾或變化，皆 應涵蓋於以下申請專利範圍内。 ❹【圖式簡單說明】 圖1係本發明實施例提供之一種鍍膜治具之立體圖。 圖2係圖1中沿線π-ll所示方向之剖視圖。 圖3係本發明實施例提供之一種鍍膜裝置之剖視圖。 圖4係本發明實施例提供之一種鍍膜襄置之轉盤模組 之結構示意圖。 【主要元件符號說明】 鍍膜裝置 10 轉軸 110 錄膜治具 100 基片夾具模细 120 11 200925312 +基片夾具 124,126,128 驅動裝置 130 電機 132 輸出軸 1322 主動齒輪 134 從動齒輪 136 鏈條 138 轴承 142,144 連接桿 146 控制裝置 150 真空容器 200 鍍膜靶 300 轉盤模組 400 主軸 401 第一轉盤 402 副軸 403 第二轉盤 404 φ 12200925312 IX. Description of the invention: • Technical field to which the invention pertains - The present invention relates to a coating technique, and more particularly to a coating fixture and a coating apparatus applied to an optical component. [Prior Art] With the development of optical products, the application range of optical components has become wider and wider. Accordingly, the industry uses a variety of methods to fabricate optical components to accommodate the market's demand for different optical components (see Fabrication of Ο Diffractive Optical Lens for Beam Splitting Using LIGA Process), Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference On, pp.1242-1247, 2006.06). The optical components produced are typically subjected to subsequent processing to achieve good performance for the application. The coating process is one of the important steps in the subsequent processing. Coating refers to the physical or chemical method of plating a single layer or a multilayer film on the surface of an optical element to achieve the effects of focusing, collimating, filtering, reflecting and refring the stomach by the interference of incident, reflected and transmitted light on the film interface. The coating process of the optical component is: first, the optical component is mounted on the coating fixture, the coating treatment is set in a container; secondly, the container is sealed, and the container is vacuumed; then, by evaporation or sputtering, etc. The optical component needs to be coated on the coated part; finally, the container is vacuumed, and the coated optical component is removed from the coating fixture. However, in the prior art, the coating jig for carrying the optical component is generally a two-dimensional planar structure, and the space utilization rate of the structure is low. In the unit space, the number of optical components carried by the key film fixture in the 200925312 is small, so it is difficult to reduce the ore. Membrane system. The number of vacuuming and vacuuming of the container during the process makes it difficult to improve the production efficiency of the ore film and the coating device and reduce the production cost. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide a mineral film jig and a bell film device which can improve space utilization, thereby improving production efficiency and reducing production cost. a coating fixture comprising: at least a rotating shaft, and a substrate clamping module having a three-dimensional structure connected to the rotating shaft, the rotating shaft is used for driving the substrate clamping module to rotate, the substrate fixture The module is constructed of at least three of the substrate holders arranged around the axis of rotation. The coating device comprises: a vacuum container; at least one dry film disposed in the vacuum container; and a coating fixture disposed opposite the mirror film, wherein the fixture comprises at least a rotating shaft, And a substrate clamping module having a three-dimensional structure, the rotating shaft ❹ is used for driving the substrate clamping module to rotate, and the substrate clamping module is arranged by at least three arranged around the rotating shaft The substrate holder is constructed. In contrast to the prior art, the coating jig and coating device employs a stereoscopic substrate jig module to carry the optical components to be coated. The substrate fixture set is a three-dimensional structure, and the space utilization ratio is high, and the number of optical components to be plated in the unit space is large, thereby reducing the number of times of vacuuming and vacuuming the container in the coating process to some extent. From ❼ to improve the production efficiency of the key film fixture and coating device and reduce production costs. [Embodiment] 200925312 The present invention will be further described in detail below with reference to the drawings. Referring to FIG. 1 and FIG. 2, a mineral film jig 100 according to an embodiment of the present invention includes: at least one rotating shaft 11〇, and at least one substrate clamp mold having a three-dimensional structure connected to the rotating shaft 11〇 Group 120. The rotating shaft 110 is disposed on two opposite bearings 142 and 144, and the rotating shaft 110 is used to drive the substrate clamp module 120 to rotate. The keying fixture 100 further includes a driving device connected to the rotating shaft 11〇. 130. The driving device 130 is configured to drive the rotation of the rotating shaft. The driving device 130 includes a motor 132, a driving gear 134' fixed to the output shaft 1322 of the motor 132, a driven gear 136 fixed to the rotating shaft 11b, and a driving gear 134 and a driven gear 136. Chain 138. The output shaft 1322 of the motor 132 drives the driving gear 134 to rotate. The driving gear 134 drives the driven gear 136 and the rotating shaft 110 to rotate by the chain 138', thereby driving the substrate clamp module 120 to rotate. The substrate chuck module 120 is composed of three base plate clamps 124, 126, 128 arranged around the rotating shaft 11?. The substrate holders 124, 126, 128 are each a rectangular frame for holding the optical elements (not shown) of the film to be bonded. The edges of the substrate holders 124, 126, 128 are interconnected such that the substrate holder module 120 constitutes a regular triangular prism structure having an equilateral triangle in a section perpendicular to the direction of the rotation axis 110. The rotating shaft 110 is disposed through a central axis of the substrate fixture module 120. The three substrate holders 124, 126, and 128 constituting the substrate holder module 120 are connected to the rotating shaft 110 by the connecting rod 146. First, the substrate holder 124 in the horizontal position is held by the 200925312. The optical component is coated; then, the motor 132 is activated, and the output shaft 1322 of the motor 132 is rotated to rotate the rotary shaft 110 to drive the substrate clamp module 120 to rotate. When the 126 is rotated to the horizontal position, the motor 132 is stopped to stop the substrate holder 126 in a horizontal position, thereby coating the optical component held by the substrate holder 126. Finally, the previous step is repeated to make The substrate holder 128 is rotated to a horizontal position and stopped at a horizontal position to coat the optical member held by the substrate holder 128. The coating fixture 100 further includes a control device 150 electrically connected to the motor 132. The control device 150 is used to control the starting and stopping of the motor 132 to achieve precise control of the rotation of the substrate fixture module 120. Further, the coating quality of the optical components held by the substrate holders 124, 126, and 128 of the substrate holder module 120 is ensured. It can be understood that the number of the substrate fixtures constituting the substrate fixture module 120 may be more than three, for example, four or five, and the substrate fixture module ▲ 120 is perpendicular to the rotation axis 110. The cross section is a regular quadrangle or a regular pentagon. It can be understood that the size of the substrate fixture constituting the substrate fixture module 120 may be different, and the edges of the substrate fixtures constituting the substrate fixture module 120 may not be connected to each other. The structure of the substrate fixture module 120 is not particularly limited, and only a three-dimensional structure disposed around the rotating shaft 110 is required to form a three-dimensional structure to carry more optical components to be coated, and can be borrowed. The starting and stopping of the motor 132 can be performed to achieve precise control of the rotation of the substrate holder module 120. In this embodiment, the material of the substrate holder is copper. It can be understood that the material of the substrate fixture can also be other metals, 9 200925312, for example, or not. Referring to FIG. 3, a coating apparatus 10 using the above-mentioned coating film jig 100 includes a vacuum container 200; at least one coating target 300 disposed in the vacuum container 200; and A coating jig 100 disposed opposite the coating target 300. The process of coating the optical component by using the coating device 10 is: first, the optical component is mounted on the substrate fixture of the coating fixture 100; secondly, the vacuum vessel 200 is sealed, and the vacuum vessel 200 is vacuumed; The excitation coating target 300 is used to coat the optical component mounted on the substrate holder of the coating fixture 100. Finally, the vacuum vessel 200 is vacuumed, and the coated optical component is removed from the coating fixture 100. Remove the substrate holder. The coating device 10 further includes a turntable module 400 disposed in the vacuum container 200, and the turntable module 400 is configured to carry the coating jig 100, thereby adding the coating jig 1 〇〇Clamp_The uniformity of the coating thickness of the optical components held. The turntable module 400 includes a first spindle 401, a first turntable 402 coupled to the spindle 401, two second turntables 404, and two countershafts 403. The second turntable 404 is coupled to the first turntable 402 by the sub-shaft 403. The coating jig 100 is disposed on the second turntable 404. The main shaft 401 is rotatable to drive the first turntable 402 to rotate, so that the second turntable 404 rotates around the main shaft 401. At the same time, the second turntable 404 can also be rotated by the counter shaft 403 and centered on the counter shaft 403. The coating jig 100 is driven by the second turntable 404, and rotates around the main axis 401, and the sub-axis 403 200925312 can be rotated as a center, thereby increasing the optical component clamped by the coating jig 100. Uniformity of coating thickness. It can be understood that the number of the second rotating disks 404 of the turntable module 400 can also be one or more than two. The main shaft and the counter shaft 403 are rotatable by a motor. "The coating jig 100 and the coating device 1" adopt a three-dimensional structure of the substrate jig set 120 to carry the optical element. The substrate jig module 12 is a three-dimensional structure, and the space utilization rate is high, and the unit space is carried. The number of optical element parts is large, so the number of vacuum and vacuum breaking of the vacuum container in the coating process is reduced to a certain extent, thereby improving the production efficiency of the coating jig and the key device and reducing the production cost. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. The equivalent modifications or variations of the present invention in the spirit of the present invention are intended to be included in the scope of the following claims. ❹ [Simple Description of the Drawings] FIG. 1 is a perspective view of a coating jig provided by an embodiment of the present invention. Figure 2 is a cross-sectional view taken along the line π-ll of Figure 1. Figure 3 is a cross-sectional view of a coating apparatus according to an embodiment of the present invention. A schematic diagram of the structure of a turntable module for coating a film is provided. [Main component symbol description] Coating device 10 Rotary shaft 110 Film film fixture 100 Substrate jig mold 120 11 200925312 + Substrate fixture 124, 126, 128 Drive device 130 Motor 132 Output shaft 1322 Drive gear 134 Drive gear 136 Chain 138 Bearing 142, 144 Connecting rod 146 Control device 150 Vacuum vessel 200 Coating target 300 Turntable module 400 Spindle 401 First turntable 402 Secondary shaft 403 Second turntable 404 φ 12