1289609 九、發明說明： I發明所屬之技術領域】 本發明係有關於一種鍍膜治具，特別是有關於一種具有環 形波浪狀鐘膜載盤的鐘膜治具。 【先前技術】 由於現行的精密銑刀及鑽頭產品使用量隨著各類精密機械 加工產業的發展而快速增加，為能夠符合經濟效益需求，其品 質及特性的提昇以及製造成本的降低是必須的。而傳統鍍膜治 具的設計方式基本上無法有效運用鍍膜空間；使得鍍膜腔體中 之工件擺置數量無法達到更具競爭力之經濟效益；造成工件鍍 膜成本相當龐大而且昂貴。並且因工件擺置方式不正確，背離 鍍膜靶材區之工件表面可能會因粒子的能量不足，而造成薄膜 沉積不均勻現象。 本國專利第538975號揭露一種鍍膜治具，如第la、lb、 1 c圖所示，鏟膜治具10係呈傘狀的構造，在其圓錐面12上設 有複數個放置孔14,待鍍膜的工件5可插在放置孔14中，僅露 出待鍍膜的部分即可。由於靶材（未圖示）是從鍍膜治具10的 兩侧濺射而出，因此對於濺射的靶材而言，較接近靶材的工件 會遮蔽離靶材較遠的工件，造成較接近靶材的工件與較遠離靶 材的工件相對會具有不同的鍍膜厚度，因此會造成鍍膜厚度的 不均，而且工件的排列方式也無法有效運用鍍膜空間。 【發明内容】 有鑑於此，本發明之目的在於提供一種鍍膜治具，可以更 快速及簡便的排列工件產品，除了在有限之鍍膜區域中可以大 0178-A21195TWF(N2)；P05940024TW；chentf 5 1289609 4 里提昇鍍膜工件之數量外，並且易於控制依此高密度排列裝置 之鍍膜工件維持良好之鍍膜品質及其均勻性。 本發明之鍍膜治具的一較佳實施例包括複數個鍍膜載盤， 該等鍍膜載盤可經由組裝而形成一直立式的堆疊，每一鍍膜載 盤具有一盤體，在盤體的表面形成一波浪狀的構造，且盤體與 水平面具有一既定之傾斜角，待鍍之工件係置於盤體表面上之 波浪狀構造的凹處。 在上述之較佳實施例中，每一鍍膜載盤更具有一突緣，從 纟⑽®周向外延伸並與倾呈i定之角度。在突緣的外側 形成一直徑較小的縮頸部並在突緣的内側形成一肩部，藉由一 鍍膜載盤的縮頸部結合於另一鍍膜載盤的肩部，複數個鍍膜載 盤可藉由此组合方式而形成一直立式的堆疊。 為了讓本發明之上述和其他目的、特徵、和優點能更明顯 易懂，下文特舉-較佳實施例，並配合所附圖示，作詳細說明 如下。 【實施方式】 第2a圖為本發明之鍍膜治具中一鍍膜載盤的立體圖。第 2b圖為第2a圖的剖視圖。鍍膜載盤2〇包括一盤體&以及一突 緣24。盤體22呈環形，在盤體22的表面上形成波浪狀，而且 盤體22係向上方傾斜，而與水平面具有—傾斜角，在本實施例 中，傾斜角為G度至75度之間，最佳的傾斜角為15〜3〇度。突 緣24係從盤體22的内圓周侧向上方延伸，而與盤體22具有一 既定之角度。突緣24頂料外卿成-頸縮部26，突緣漏 内側形成-肩部28，藉由一鍍膜載盤2〇的頸縮部26卡合於另 一鍍膜載盤20的肩部28，複數個鍍膜載盤2〇可組合成一直立 0178-A21195TWF(N2)；P05940024TW；chentf 61289609 IX. INSTRUCTIONS: TECHNICAL FIELD OF THE INVENTION The present invention relates to a coating jig, and more particularly to a bell-shaped jig having a ring-shaped wavy bell-shaped carrier. [Prior Art] As the current use of precision milling cutters and drills increases rapidly with the development of various precision machining industries, it is necessary to meet the economic efficiency requirements, improve the quality and characteristics, and reduce the manufacturing cost. . However, the design of traditional coating tools is basically unable to effectively use the coating space; the number of workpieces placed in the coating cavity cannot achieve more competitive economic benefits; the cost of the workpiece coating is quite large and expensive. Moreover, due to the incorrect arrangement of the workpiece, the surface of the workpiece facing away from the target area of the coating may be caused by insufficient energy of the particles, resulting in uneven deposition of the film. Japanese Patent No. 538975 discloses a coating jig, as shown in Figures la, lb, and 1 c, the shovel film fixture 10 has an umbrella-like structure, and a plurality of placement holes 14 are provided on the conical surface 12 thereof. The coated workpiece 5 can be inserted into the placement hole 14 to expose only the portion to be coated. Since the target (not shown) is sputtered from both sides of the coating jig 10, for the sputtered target, the workpiece closer to the target will shield the workpiece farther from the target, resulting in The workpiece close to the target has a different coating thickness than the workpiece farther away from the target, so the thickness of the coating is uneven, and the arrangement of the workpiece cannot effectively utilize the coating space. SUMMARY OF THE INVENTION In view of the above, an object of the present invention is to provide a coating jig that can arrange workpiece products more quickly and easily, except that in a limited coating area, it can be large 0178-A21195TWF (N2); P05940024TW; chentf 5 1289609 In addition to increasing the number of coated workpieces in 4, it is easy to control the coated workpieces of the high-density alignment device to maintain good coating quality and uniformity. A preferred embodiment of the coating jig of the present invention comprises a plurality of coating carriers which can be assembled into an upright stack, each coated carrier having a disk body on the surface of the disk body A wavy configuration is formed, and the disk body and the horizontal mask have a predetermined inclination angle, and the workpiece to be plated is placed in a wavy configuration recess on the surface of the disk body. In the preferred embodiment described above, each coated carrier has a flange that extends outwardly from the circumference of the crucible (10)® and is at an angle to the tilt. A constricted neck having a smaller diameter is formed on the outer side of the flange and a shoulder is formed on the inner side of the flange, and a plurality of coatings are combined by the constricted portion of one coated disc to the shoulder of the other coated carrier. The discs can be formed into an upright stack by this combination. The above and other objects, features, and advantages of the present invention will become more apparent from the <RTIgt; [Embodiment] Fig. 2a is a perspective view of a coated carrier in the coating jig of the present invention. Figure 2b is a cross-sectional view of Figure 2a. The coated carrier 2 includes a disk & and a flange 24. The disk body 22 has a ring shape, and is formed in a wave shape on the surface of the disk body 22, and the disk body 22 is inclined upward and has an inclination angle with respect to the horizontal surface. In the present embodiment, the inclination angle is between G degrees and 75 degrees. The best tilt angle is 15~3 degrees. The flange 24 extends upward from the inner circumferential side of the disk body 22 and has a predetermined angle with the disk body 22. The flange 24 is ejector-necked and the neck portion 26 is formed, and the shoulder portion is formed on the inside of the flange. The neck portion 26 is engaged with the shoulder portion 28 of the other coating carrier 20 by the neck portion 26 of the coating carrier 2 , a plurality of coated carrier trays 2 can be combined into an upright 0178-A21195TWF (N2); P05940024TW; chentf 6