200924565 九、發明說明 【發明所屬之技術領域】 本發明是關於使用介電質遮蔽放電燈（dielectric barrier discharge lamp)的照明裝置。 【先前技術】 已在進行液晶基板等之乾式洗淨的光洗淨裝置使用介 電質遮蔽放電燈。該光洗淨裝置是對將準分子生成氣體封 入石英玻璃管的準分子燈施加高頻電壓而使玻璃管內放電 ，使準分子生成氣體成爲準分子狀態，而照射波長172 nm的單一波長之光。藉由在大氣中照射波長1 72 nm的紫 外線，大氣中的氧會分解而生成活性氧。鍵結被切斷的有 機化合物會和活性氧反應，生成碳酸氣體（C02 )、水（ H2〇 )等，而進行有機化合物之除去。 習知上，雖然已在光洗淨裝置使用管徑大的介電質遮 蔽放電燈，但爲了使裝置小型化，亦已開發使用複數個管 徑小的介電質遮蔽放電燈，而以共同之點亮電路將它們點 亮的裝置（參照專利文獻1 )。 [專利文獻1]特開2006- 1 34705號公報 【發明內容】 [發明所欲解決之問題] 在光洗淨裝置，一般依據累計光量來管理照射。在具 備複數個燈之結構的光洗淨裝置之情況，一旦複數個燈之 -4- 200924565 中的一部份燈因某些原因變成不點亮（以下稱爲「不売」 。），便無法得到必要的累計光量，所以需要燈之不亮檢 出功能。 舉例來說，一般作爲不亮檢出功能的是使用照度計的 方法。然而，準分子燈在具有光洗淨作用這樣的性質上’ 在將照度計配置於燈附近的情況，會有照度計老化這樣的 問題。一旦爲了減少老化而將照度計設置於離開準分子燈 的位置，則由於準分子光在空氣中容易衰減’而不可能檢 出正確的照度。 其他作爲不亮檢出功能的有：檢出燈之電流變化’當 電流値變成預先設定之基準値以下時，判定爲出錯（不亮 )的方法。光洗淨裝置之燈通常多將照度維持率70%規 定爲壽命。由於照度和燈電流大致有相關關係，故有將燈 電流之基準値設定爲初期之燈電流的70 %來檢出壽命的 方法。 然而，在使用了複數個燈之光洗淨裝置的情況，有無 法明確地判斷燈電流値因壽命而低於基準、或是燈電流因 燈不亮而低於基準値的情況。 本發明是鑑於上述所做成，且作爲其課題之處在於， 提供以一個點亮裝置使複數個燈點亮而小型化，同時更確 實地進行燈之不亮檢出的照明裝置。 [用以解決問題之手段] 與本發明有關之照明裝置，其特徵爲具備：點亮電路 -5- 200924565 ，係施加高頻電壓；複數個介電質遮蔽放電燈，係與 亮電路並聯；電流檢出電路，係檢出流至該等介電質 放電燈的燈電流之値；以及不亮檢出電路，係當該電 出電路所檢出之燈電流値低於基準値le時，判定在 複數個介電質遮蔽放電燈中存在不亮一事，當令與前 亮電路並聯之介電質遮蔽放電燈的個數爲N，而點亮 N個全數之介電質遮蔽放電燈時的初期燈電流値爲： ，將前述基準値le設定爲滿足下式之條件 (N-1 )/N S le/ls。 又，與本發明有關之照明裝置，其特徵爲具備： 個點亮電路，係施加局頻電壓；N個（N爲2以上之 )介電質遮蔽放電燈，係分別與該等點亮電路並聯； 檢出電路，係爲了檢出流至該等N個介電質遮蔽放 的燈電流之値，而分別設於前述複數個點亮電路；以 亮檢出電路，係當該等電流檢出電路所檢出之燈電流 於基準値U時，判定在前述複數個介電質遮蔽放電 存在不亮一事，當令與前述點亮電路並聯之N個介 遮蔽放電燈全數點亮時的初期燈電流値爲1 s時，將 基準値le設定爲滿足下式之條件 (N-1 )/N S le/ls。 又，在與本發明有關之照明裝置，其特徵爲：相 前述初期之燈電流値Is，將前述基準値le設定爲對 該點 遮蔽 流檢 前述 述點 該等 s時 複數 整數 電流 電燈 及不 値低 燈中 電質 前述 對於 應於 -6 - 200924565 壽命維持率的預定比例。 另外，在與本發明有關之照明裝置，其特徵爲：相對 於前述初期之燈電流値Is，將前述基準値le設定爲70% 〇 另外，在與本發明有關之照明裝置，其特徵爲：前述 複數個介電質遮蔽放電燈爲準分子燈。 在這樣的本發明中，當具備N個介電質遮蔽放電燈 ，而令點亮全數之介電質遮蔽放電燈時的初期燈電流値爲 1 s時，設定滿足條件式（N - 1 ) /N S 1 e/1 s的基準値1 e，藉 由檢出燈電流値而和基準値le比對，能夠更確實地進行 介電質遮蔽放電燈的不亮檢出。 [發明之效果] 根據本發明，可提供以一個點亮裝置使複數個燈點亮 而小型化，同時更確實地進行燈之不亮檢出的照明裝置。 【實施方式】 以下將使用圖面來說明本發明之實施形態。 圖1是顯示本實施形態之照明裝置的結構之槪要圖。 同圖中所示之照明裝置1具備：長度大致相同的複數個介 電質遮蔽放電燈2、點亮電路3、燈電流檢出部4。 介電質遮蔽放電燈2是由將兩端封閉的石英玻璃管所 形成，且在玻璃管內封入有作爲放電介質的準分子生成氣 體。沿著玻璃管內部的中心軸配置內部電極，而內部電極 200924565 由兩端的封閉部所固定。在介電質遮蔽放電燈2之玻璃管 的外面形成外面電極。藉由對內部電極和外面電極施加高 頻電壓，激發所封閉之準分子生成氣體而產生紫外線。 三個介電質遮蔽放電燈2被並聯至點亮電路3。點亮 電路3具備有燈電流檢出部4，而檢出流至所連接之三個 介電質遮蔽放電燈2的燈電流之値。與分別檢出各個介電 質遮蔽放電燈的燈電流之値的情況相比，藉由以燈電流檢 出部4集體檢出流至三個介電質遮蔽放電燈2的燈電流之 値，能夠使裝置小型化。 在燈電流檢出部4設定用於檢出介電質遮蔽放電燈2 不亮的出錯基準値1 e。當所檢出之燈電流値低於出錯基準 値le時，檢出至少一個介電質遮蔽放電燈2不亮一事， 亦即，將其視爲出錯。 圖2是顯示出錯基準値le和介電質遮蔽放電燈2之 點亮數的關係之圖。同圖之縱軸顯示燈電流値，縱軸上之 數字顯示燈個數。又’同圖之橫軸爲點亮時間。在令介電 質遮蔽放電燈2的總個數爲N，而介電質遮蔽放電燈2全 部點亮時的初期之燈電流値爲1 s的情況，符號2 2所示之 出錯基準値le被設定成滿足（N-1 ) /NS le/ls之條件，而 成爲維持規定之壽命，也就是照度維持率的燈電流値。 在本實施形態’所連接之介電質遮蔽放電燈2的總個 數爲N = 3，故（N-1 ) /N = 2/3与0_67。以滿足上述條件 式之方式，將照度維持率70%規定爲壽命，而將出錯基 準値設定爲le = 〇.7xls。藉由以此方式設定規定燈之壽命 -8 - 200924565 的出錯基準値le，燈之壽命中，即使介電質遮蔽放電燈2 的燈電流値因長年變化而降低，也不會做出輸出不亮出錯 這樣的誤動作。 圖2之符號21顯示點亮三個介電質遮蔽放電燈2時 的初期之燈電流値。當一個介電質遮蔽放電燈2變成不胃 時，由於所檢出之燈電流値低於符號22所示之出錯基準 値le，故可檢出介電質遮蔽放電燈2變成不亮一事。又， 即使在介電質遮蔽放電燈2全部點亮的情況，雖然燈電流 値會因長年變化而降低，但壽命中也不會有低於出錯基準 値1 e —事。 以此方式’藉由將基準値le設定爲規定壽命之基準 値以下，可明確地判斷燈電流値因壽命而低於基準値le、 或是燈電流因燈不亮而低於基準値le。 圖3是顯不光洗淨裝置之結構的模式圖。同圖所示之 光洗淨裝置10是搭載有複數個圖1所示之照明裝置1而 將照射區域放大之物。爲了更正確地檢出介電質遮蔽放電 燈2不亮，必須將出錯基準値le設定爲滿足（N-1 ) /N S le/ls，所以在將多個介電質遮蔽放電燈2連接至點亮電路 3的情況，（N-1 ) /N之値會變大。因此，必須將作爲壽 命的照度維持率（出錯基準値le)規定得比70%還高。 所以，藉由搭載複數個照明裝置1，可構成不使照度維持 率更大，而可將燈之不亮區別檢出爲壽命的光洗淨裝置 10° 因此，根據本實施形態，能夠提供：具備並聯之複數 -9- 200924565 個（N個）介電質遮蔽放電燈2，且相對於初期之燈電流 値1 s，在滿足（N -1 ) /N $ 1 e/1 s之條件式的低於出錯基準 値le之燈電流被檢出時’檢出不亮之介電質遮蔽放電燈2 存在一事的照明裝置1。 另外，當因長年變化而燈電流値降低時，由於變化緩 慢，故當燈電流値變成和出錯基準値1 e大致相等時，亦 可判定爲是介電質遮蔽放電燈2的壽命。 又，本發明不限於上述之實施形態，且可能有各種之 變體。例如’並聯至一個點亮電路的介電質遮蔽放電燈不 限於三個，而可依據和照度維持率之關係的調整，爲二個 以上之任意個數。 【圖式簡單說明】 圖1是顯示一實施形態之照明裝置的結構之槪要圖。 圖2是顯示於圖1之照明裝置設定的出錯基準値之說 明圖。 圖3是顯示搭載了複數個圖1之照明裝置的光洗淨裝 置之結構的模式圖。 【主要元件符號說明】 1 :照明裝置 2 :介電質遮蔽放電燈 3 :點亮電路 4 :燈電流檢出部 -10- 200924565 ι〇 :光洗淨裝置BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an illumination device using a dielectric barrier discharge lamp. [Prior Art] A dielectric cleaning discharge lamp has been used for a light cleaning device that performs dry cleaning of a liquid crystal substrate or the like. In the light cleaning device, a high-frequency voltage is applied to an excimer lamp in which an excimer-generating gas is sealed in a quartz glass tube to discharge the glass tube, and the excimer-forming gas is in an excimer state, and a single wavelength of 172 nm is irradiated. Light. By irradiating the ultraviolet rays having a wavelength of 1 72 nm in the atmosphere, oxygen in the atmosphere is decomposed to generate active oxygen. The organic compound whose bond is cleaved reacts with active oxygen to form carbonic acid gas (C02), water (H2〇), etc., and the organic compound is removed. Conventionally, although a dielectric-shielded discharge lamp having a large diameter is used in the optical cleaning device, in order to miniaturize the device, a plurality of dielectric-shielded discharge lamps having a small diameter have been developed, and A device for lighting the lighting circuit (see Patent Document 1). [Problem to be Solved by the Invention] In the optical cleaning device, the irradiation is generally managed in accordance with the cumulative amount of light. In the case of a light cleaning device having a plurality of lamps, once a part of the lamps -4-200924565 are turned off for some reason (hereinafter referred to as "not smashing"), The necessary accumulated light amount cannot be obtained, so the light detection function of the lamp is required. For example, it is generally a method of using a illuminometer as a non-lighting detection function. However, in the case where the excimer lamp has a light-cleaning effect, when the illuminometer is placed in the vicinity of the lamp, there is a problem that the illuminometer is aged. Once the illuminometer is placed at a position away from the excimer lamp in order to reduce aging, it is impossible to detect the correct illuminance because the excimer light is easily attenuated in the air. Others that do not emit the detection function are: a change in the current of the detected lamp. When the current 値 becomes equal to or lower than the preset reference 値, it is determined as an error (not lit). The lamp of the light cleaning device usually specifies the illuminance maintenance rate of 70% as the life. Since the illuminance and the lamp current are roughly related, there is a method in which the reference current of the lamp current is set to 70% of the initial lamp current to detect the life. However, in the case where a plurality of lamp light cleaning devices are used, is it possible to clearly judge whether the lamp current is lower than the reference due to the life or the lamp current is lower than the reference 因 because the lamp is not lit. The present invention has been made in view of the above, and an object of the present invention is to provide an illumination device in which a plurality of lamps are lighted and reduced in size by one lighting device, and the lamp is not accurately detected. [Means for Solving the Problem] The lighting device according to the present invention is characterized in that: the lighting circuit-5-200924565 is applied with a high-frequency voltage; and the plurality of dielectric shielding discharge lamps are connected in parallel with the bright circuit; The current detecting circuit detects the illuminating current flowing to the dielectric discharge lamps; and the non-lighting detecting circuit is when the lamp current detected by the electric discharging circuit is lower than the reference 値le, Determining that there is no light in the plurality of dielectric shaded discharge lamps, when the number of dielectric shielded discharge lamps connected in parallel with the front bright circuit is N, and lighting all N dielectric shielded discharge lamps The initial lamp current 値 is: The reference 値le is set to satisfy the condition (N-1)/NS le/ls of the following formula. Further, an illumination device according to the present invention is characterized in that: one lighting circuit is provided to apply a local frequency voltage; and N (N is two or more) dielectric shielding discharge lamps are respectively associated with the lighting circuits Parallel; the detecting circuit is respectively disposed in the plurality of lighting circuits for detecting the current flowing to the N dielectric shielding lamps; and the detecting circuit is used to detect the current When the lamp current detected by the circuit is at the reference 値U, it is determined that the plurality of dielectric shielding discharges are not lit, and the initial lamps when the N dielectric discharge lamps connected in parallel with the lighting circuit are all lit are turned on. When the current 値 is 1 s, the reference 値le is set to satisfy the condition (N-1)/NS le/ls of the following formula. Further, in the illumination device according to the present invention, the initial lamp current 値Is is set to the reference 値le, and the s-time complex integer current lamp is not detected for the point occlusion flow. Degrading the power of the lamp in the foregoing is a predetermined ratio for the life maintenance rate of -6 - 200924565. Further, in the illuminating device according to the present invention, the reference 値le is set to 70% with respect to the initial lamp current 値Is, and the illuminating device according to the present invention is characterized in that: The plurality of dielectric shielded discharge lamps are excimer lamps. In the present invention, when the N dielectric shielding discharge lamps are provided and the initial lamp current 値 when the entire dielectric shielding discharge lamp is turned on is 1 s, the conditional expression (N - 1 ) is satisfied. The reference 値1 e of /NS 1 e/1 s can be compared with the reference 値le by detecting the lamp current 値, and the non-lighting detection of the dielectric shade discharge lamp can be performed more surely. [Effects of the Invention] According to the present invention, it is possible to provide an illumination device that illuminates a plurality of lamps with one lighting device and that is compacted, and more reliably detects the non-lighting of the lamps. [Embodiment] Hereinafter, embodiments of the present invention will be described using the drawings. Fig. 1 is a schematic view showing the configuration of an illumination device of the present embodiment. The illuminating device 1 shown in the same figure includes a plurality of dielectric shade discharge lamps 2, a lighting circuit 3, and a lamp current detecting unit 4 having substantially the same length. The dielectric shielding discharge lamp 2 is formed of a quartz glass tube having both ends closed, and an excimer generating gas as a discharge medium is sealed in the glass tube. The internal electrodes are arranged along the central axis inside the glass tube, and the internal electrodes 200924565 are fixed by the closed portions at both ends. An outer electrode is formed on the outside of the glass tube of the dielectric shielding discharge lamp 2. Ultraviolet light is generated by exciting a closed excimer generating gas by applying a high frequency voltage to the internal electrode and the outer electrode. The three dielectric shade discharge lamps 2 are connected in parallel to the lighting circuit 3. The lighting circuit 3 is provided with the lamp current detecting portion 4, and detects the current flowing to the three dielectric-shielded discharge lamps 2 connected thereto. The collective detection of the lamp current flowing to the three dielectric shielding discharge lamps 2 is collectively detected by the lamp current detecting portion 4 as compared with the case where the lamp currents of the respective dielectric-shielded discharge lamps are detected. It is possible to miniaturize the device. The lamp current detecting unit 4 sets an error reference 値1 e for detecting that the dielectric shade discharge lamp 2 is not lit. When the detected lamp current 値 is lower than the error reference 値le, it is detected that at least one of the dielectric shade discharge lamps 2 is not lit, that is, it is regarded as an error. Fig. 2 is a view showing the relationship between the error reference 値le and the number of lighting of the dielectric shade discharge lamp 2. The vertical axis of the same figure shows the lamp current 値, and the number on the vertical axis shows the number of lamps. Also, the horizontal axis of the same figure is the lighting time. When the total number of dielectric shielding discharge lamps 2 is N, and the initial lamp current 値 when the dielectric shielding discharge lamps 2 are all turned on is 1 s, the error reference shown in symbol 2 is It is set to satisfy the condition of (N-1) / NS le/ls, and is a lamp current 维持 that maintains a predetermined life, that is, an illuminance maintenance rate. In the present embodiment, the total number of dielectric shielded discharge lamps 2 connected is N = 3, so (N-1) /N = 2/3 and 0_67. In order to satisfy the above condition, the illuminance maintenance rate of 70% is defined as the life, and the error reference 値 is set to le = 〇.7xls. By setting the error reference 値le of the specified lamp life -8 - 200924565 in this way, even if the lamp current of the dielectric shielding discharge lamp 2 is lowered due to long-term changes, the output will not be output. A malfunction such as a bright error. Reference numeral 21 of Fig. 2 shows the initial lamp current 时 when the three dielectric shielding lamps 2 are lighted. When a dielectric shielding discharge lamp 2 becomes a stomachless, since the detected lamp current 値 is lower than the error reference 値le indicated by the reference numeral 22, it can be detected that the dielectric shielding discharge lamp 2 becomes unlit. Further, even when the dielectric shade discharge lamp 2 is completely turned on, the lamp current 値 is lowered due to the change over a long period of time, but the lifetime is not lower than the error reference 値1 e. In this way, by setting the reference 値le to the reference 规定 of the predetermined life, it is possible to clearly determine that the lamp current 低于 is lower than the reference 値le due to the life, or the lamp current is lower than the reference 因le because the lamp is not lit. Fig. 3 is a schematic view showing the structure of the non-light cleaning device. The optical cleaning device 10 shown in the same figure is a device in which a plurality of illumination devices 1 shown in Fig. 1 are mounted to enlarge an irradiation region. In order to more accurately detect that the dielectric shielded discharge lamp 2 is not lit, the error reference 値le must be set to satisfy (N-1) / NS le/ls, so that a plurality of dielectric shade discharge lamps 2 are connected to In the case of lighting circuit 3, (N-1) /N becomes larger. Therefore, it is necessary to set the illuminance maintenance rate (error criterion 値le) as the life to be higher than 70%. Therefore, by mounting a plurality of illuminating devices 1, it is possible to configure a light cleaning device that can detect the difference in illuminance without changing the illuminance maintenance rate by 10°. Therefore, according to the present embodiment, it is possible to provide: It has a parallel number of -9-200924565 (N) dielectric shaded discharge lamps 2, and the conditional expression of (N -1 ) /N $ 1 e/1 s is satisfied with respect to the initial lamp current 値1 s When the lamp current lower than the error reference 値le is detected, the illuminating device 1 that detects the presence of the dielectric opaque discharge lamp 2 that is not lit is detected. Further, when the lamp current 値 decreases due to the change over a long period of time, since the change is slow, when the lamp current 値 becomes substantially equal to the error reference 値1 e , it can be determined that the lifetime of the dielectric shade discharge lamp 2 is. Further, the present invention is not limited to the above embodiments, and various variations are possible. For example, the dielectric-shielded discharge lamps connected in parallel to one lighting circuit are not limited to three, and may be any number of two or more depending on the adjustment of the relationship with the illuminance maintenance rate. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of an illumination device according to an embodiment. Fig. 2 is an explanatory view showing an error reference 设定 set in the lighting device of Fig. 1. Fig. 3 is a schematic view showing the structure of a light washing device in which a plurality of illumination devices of Fig. 1 are mounted. [Description of main component symbols] 1 : Lighting device 2 : Dielectric shielding discharge lamp 3 : Lighting circuit 4 : Lamp current detection unit -10- 200924565 ι〇 : Light cleaning device