200923070 六、發明說明： 【發明所屬之技術領域】 本發明係有關游離磨粒式線雜用之水溶性加工油劑、 漿液、以及使用該漿液之切斷方法。更詳細而言，本發明 係有關在將脆性材料以線鋸進行切斷加工時，供給至被切 斷材料且在調製含有油劑與游離磨粒之漿液時所使用的水 溶性加工油劑，並有關於含有該油劑與游離磨粒之漿液、 以及使用該漿液而切斷脆性材料之方法。 【先前技術】 在硬度高之脆性材料之切斷加工方面，從加工效率、 加工精度之觀點來看，近年來廣泛利用使用游離磨粒之線 鑛、片雜（blade saw，亦即手錯（hand saw))。此時，一般 係使用由磨粒與油劑混合而調製成之液體（漿液）。 就如此之油劑而言，已提案有如下述者，例如，一種 水溶性切斷加工用油劑，其含有：選自多元醇、多元醇縮 合物及多元醇衍生物所成群組中之至少一種化合物；芳香 族羧酸；將該芳香族羧酸中和且使其水溶性化之鹼性物 質；以及水（參照專利文獻1); 一種水溶性切斷加工用油 劑，其含有（A)選自多元醇、多元醇縮合物及多元醇衍生物 所成群組中之至少一種化合物、（B)芳香族多元羧酸鹽、（C) 烷二醇之環氧烷加成物、以及水；並提供含有此油劑與磨 粒之水溶性切斷加工用油劑、含有此油劑與磨粒之水溶性 切斷加工用漿液、以及使用該等而將脆性材料進行切斷加 工之方法（參照專利文獻2); —種線鋸用水溶性切削液， 3 320492 200923070 其係由將預定量之鐘膨潤石（hectorite)、多緩酸鹽、依需 求之非離子界面活性劑及水調配至水溶性溶劑中而成者 (參照專利文獻3)。 然而，當將此等水溶性加工油劑使用於作為石夕等跪性 材料之切斷加工油劑時，隨著最近的使用磨粒之細粒化及 使用線之細線化，磨粒對於使用線之附著性降低，而無法 使經切斷之石夕晶圓等獲得充分之加工精度、加工效率，另 外，由於比起一般之切斷加工，其油劑之流量必須要為較 多，故有使用液會發泡等缺點，現今仍未能獲得令使用者 滿意之油劑。 [專利文獻1]日本特開2003-238983號公報 [專利文獻2]日本特開2006-96951號公報 [專利文獻3]日本專利第3933748號公報 【發明内容】 (發明欲解決之課題） 本發明之目的係提供一種在矽等硬度高之脆性材料之 切斷加工中，顯示高加工精度與加工效率，並且不會引起 發泡等問題的游離磨粒式線鋸用之水溶性加工油劑。 本發明之另一目的係提供含有上述油劑與游離磨粒之 漿液。 本發明之再另一目的係提供使用上述漿液而將矽等脆 性材料進行切斷加工之方法，以及依據脆性材料切斷加工 方法而加工之脆性材料（尤其是矽系脆性材料）。 (解決課題之方法） 4 320492 200923070 本發明係提供以下所示之游離磨粒式線鋸用之水溶性 加工油劑、漿液、使用其而進行之切斷方法。 1. 一種游離磨粒式線鋸用之水溶性加工油劑，其含有：（A) 甘油5至80質量％、（B)二乙二醇及/或丙二醇3至60 質量％、（C)芳香族多元羧酸鹽0.3至20質量％、（D) 多元醇衍生物3至30質量％、以及（E)水3至88. 7質量 %。 2. 如上述1記載之游離磨粒式線鑛用之水溶性加工油劑， 其中，（C)芳香族多元羧酸鹽係選自碳數8至20之二、 三及四元酸所成群組中之至少1種之烷醇胺鹽。 3. —種切斷加工用漿液，其含有：上述1或2記載之游離 磨粒式線鑛用之水溶性加工油劑、以及磨粒。 4. 一種脆性材料之加工方法，其係使用上述3記載之漿液 來切斷脆性材料。 5. 如上述4記載之脆性材料之加工方法，其中，脆性材料 為硬系跪性材料。 6. —種脆性材料，其係藉由上述4或5記載之脆性材料之 加工方法而經加工者。 (發明之效果） 本發明之水溶性加工油劑係藉由組合使用（A)甘油、（B) 二乙二醇及/或丙二醇、（C)芳香族多元羧酸鹽、（D)多元醇 衍生物、以及（E)水，而可使磨粒對於線之附著性明顯地上 升，因此而可達成脆性材料之優異切斷精度。另外，漿液 中之磨粒之分散安定性亦為優異。再者，在切斷加工後之 5 320492 200923070 漿液去除之洗淨步驟中，可不使用溶劑等而容易地以水洗 淨，不需擔心引火性，即使漿液飛散、附著堆積於切斷加 工機之表面或地面亦可簡單地清掃，不會使作業環境惡 化，而有助於提升生產性。 【實施方式】 本發明之油劑中，成分（A)甘油之含量為5至80質量 %，較佳為10至6 0質量％，若未達5質量％則無法改善 磨粒對於線之附著性。另外，若超過80質量％，原液黏度 則會上升而難以處理。 本發明之油劑中，成分（B)二乙二醇及/或丙二醇之含 量為3至60質量％，較佳為20至50質量％。若未達3質 量％則無法改善磨粒對於線之附著性。另外，若超過60質 量％，則使磨粒對於線之附著性的提升效果降低。 本發明之油劑中，構成成分（C)芳香族多元羧酸鹽之芳 香族多元羧酸，可列舉如碳數8至20之二、三及四元酸。 具體例可列舉如鄰苯二曱酸、間苯二曱酸、對苯二甲酸、 偏苯三甲酸、均苯四甲酸等。 構成成分（C)芳香族多元羧酸鹽之鹽，可列舉如碳數2 至12之烷醇胺鹽。烷醇胺之具體例可列舉如單乙醇胺、二 乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺、三異丙醇 胺、單甲基乙醇胺、二乙基乙醇胺等。 本發明所使用之成分（C)芳香族多元羧酸鹽對於水之 溶解度於20°C中較佳為5g/100g水以上。若未達5g/100g 水，則芳香族多元羧酸鹽會容易析出而為不佳。 6 320492 200923070 本發明之油劑中，芳香族多元羧酸鹽之含量為〇 20質量％，較隹為〇. 3至1()質量％，更佳為〇 ^ . 3至 量％，若未達0.3質量％則漿液中之磨粒之分散性:質 效果為不充分，另外，即使超過20質量％，其分散升 效果亦為飽和，於經濟方面來看為不利。 月提升 本發明之油劑中，成分（D)多元醇衍生物可列舉如 醇單甲基醚、乙二醇單乙基醚、乙二醇二乙基醚:乙 單丁基醚、二乙二醇單甲基醚、二乙二醇二乙基鰱、二醇 二醇單丁基醚、甘油單曱基醚、甘油二乙基醚、甘油二乙 基醚、乙二醇環氧烷加成物、丙二醇環氡烷加成物’、—乙 醇環氧丙烷加成物之環氧乙烷加成物（環氧丙燒/環氣_ 質量比）等。環氧烷係表示環氧乙燒或環氧燒 乙二醇環氧烷加成物、丙二醇環氧烷加成物、及一 ，環氣丙烷加成物之環氣乙烷加成物.（環氧丙烷/環氣二 質量比）之分子量較佳為5〇〇至5〇〇〇〇 ,更 烷 至 WOOO，最佳為 1000 至 3000。 土’’、、 00 本發明之油劑中，成分多元醇衍生物之含量為3 質I%，較佳為10至25質量％。若含量未達3質量〆 ，磨粒對於線之附著性的提升效果低，即使超過3〇 0.其效果亦飽和而為不經濟。 ' 適合使用本發明油劑而進行切斷加工之加工材 y 之 可列舉如電子產業領域廣泛使用之脆性材料，其具體 例可列舉如：矽（單結晶、多結晶）、砷化鎵等半導體；氧 ^ 氧化錯專陶免質，石英玻璃、砍酸破璃等破填类員。 7 320492 200923070 當脆性材料為矽系時，油劑之pH較佳為5至9。此時，就 鹼性物質而言，比起無機鹼性物質，以使用有機鹼性物質 為較佳。尤其是以鹼性溫和之三乙醇胺、三異丙醇胺等三 級烧醇胺為更佳。 使用於本發明油劑中之水，可使用超純水、蒸鶴水、 離子交換水、自來水、都市用水、工業用水等之任一種’ 水之含量較佳為3至84質量％。若水之含量超過84質量 %，則漿液之黏度會變得過低，切斷加工性能有降低之情 形。另外，若未達3質量％，則會因切斷加工時之產熱而 使漿液中之水分（油劑中之水分）蒸發，而有使油劑本身產 生引火性而喪失作為水溶性油劑之特性之虞。 本發明之油劑係可藉由將成分（A)至（E)在適當溫度條 件下（例如40至70°C左右）混合溶解而容易地製造。此時， 亦可因應需要而在油劑中適當'添加界面活性劑（陰離子 系、非離子系）、水溶性增黏劑、防腐劑、防黴劑、非鐵金 屬防蝕劑、pH緩衝劑等。 本發明之油劑通常是相對於油劑1L混合磨粒1 kg (例 如GC綠色碳化矽磨粒）而使用作為脆性材料之切斷加工用 漿液。 (實施例） 以下，藉由實施例及比較例而更為詳細說明本發明之 水溶性油劑，但本發明不限定於此等例。 油劍之性狀測定試驗法 (a) pH測定試驗 320492 200923070 將各油劑以離子交換水稀釋成2倍，依據JIS-Z-8802 玻璃電極法進行測定。 漿液之性狀測定試驗法 依據下述之試驗條件、試驗方法，測定各油劑之漿液 (油劑：GC # 15 0 0磨粒=1 : 1)之性狀。 (b) 磨粒分散安定性試驗 將各油劑之漿液移往100mL之量筒，於室溫放置12小 . 時，以肉眼觀察磨粒分散安定性。評估係依據以下之基準。 〇：分離油份量係未達1 OmL □:分離油份量係10mL至未達20mL △:分離油份量係20mL至未達50mL X :分離油份量係5OmL以上 (c) 磨粒對於線之附著性試驗 在裝入容器内之漿液中使線浸潰5秒後拉起，以呈垂 直之狀態放置10秒，然後以顯微鏡觀察並加以評估。 ◎:磨粒非常良好地附著於線上 〇：磨粒良好地附著於線上 □:磨粒附著於線上 △:磨粒少量地附著於線上 X:磨粒幾乎沒有附著於線上 結果係示於表1及表2。 320492 200923070 [表1] 實施例 1 2 3 4 5 6 7 (A) 甘油 20 20 20 54 10 30 30 (B) 丙二醇 54 — 20 10 30 20 14 (B) 二乙二醇 — 54 34 10 34 20 15 (C) 間苯二甲酸鹽μ 1 1 1 1 1 5 1 (D) 聚乙二醇細 10 10 10 10 10 10 25 (E) 離子交換水 15 15 15 15 15 15 15 油劑 pH 7.3 7.3 7.3 7.3 7.4 7.3 7.3 漿液 磨粒分散安定性 〇 〇 〇 〇 〇 〇 〇 磨粒對於線之附著性 ◎ ◎ ◎ ◎ ◎ ◎ ◎ ※l :間苯二甲酸鹽：間苯二甲酸之三乙醇胺鹽（1 : 2莫耳 比）。 ※之：重量平均分子量1000之聚乙二醇。 10 320492 200923070 [表2]200923070 VI. OBJECTS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a water-soluble processing oil agent, a slurry, and a cutting method using the same, relating to a free abrasive grain line. More specifically, the present invention relates to a water-soluble processing oil agent which is supplied to a material to be cut and which is prepared for preparing a slurry containing an oil agent and a free abrasive grain when the brittle material is cut by a wire saw. There is also a method of containing a slurry of the oil agent and free abrasive grains, and cutting the brittle material using the slurry. [Prior Art] In terms of processing efficiency and processing accuracy, in the cutting process of high-hardness brittle materials, in recent years, the use of free abrasive grains and wire saws, that is, hand faults ( Hand saw)). In this case, a liquid (slurry) prepared by mixing abrasive grains and an oil agent is generally used. In the case of such an oil agent, there is proposed a water-soluble cutting processing oil agent containing, for example, a group selected from the group consisting of a polyol, a polyol condensate, and a polyol derivative. At least one compound; an aromatic carboxylic acid; a basic substance which neutralizes and is water-soluble by the aromatic carboxylic acid; and water (refer to Patent Document 1); and an oil agent for water-soluble cutting processing, which contains ( A) at least one compound selected from the group consisting of a polyol, a polyol condensate, and a polyol derivative, (B) an aromatic polycarboxylate, (C) an alkylene oxide adduct of an alkanediol, And water; and an oil agent for water-soluble cutting processing containing the oil agent and abrasive grains, a slurry for water-soluble cutting processing containing the oil agent and abrasive grains, and cutting the brittle material using the same Method (refer to Patent Document 2); - Water-soluble cutting fluid for wire saws, 3 320492 200923070 It is composed of a predetermined amount of clock hectorite, polyacid salt, non-ionic surfactant and water according to demand Formulated into a water-soluble solvent Patent Document 3). However, when such a water-soluble processing oil agent is used as a cutting processing oil agent which is an inert material such as Shixia, the abrasive grains are used for the use of the fine graining of the abrasive grains and the thinning of the use line. The adhesion of the wire is lowered, and sufficient processing precision and processing efficiency cannot be obtained for the cut-off stone wafer, and the flow rate of the oil agent must be large compared to the general cutting process. There are shortcomings such as foaming of the use liquid, and it is still not possible to obtain an oil agent which is satisfactory to the user. [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A-2006-96951 (Patent Document 3) Japanese Patent No. 3933748 (Invention) The present invention has been made. It is an object of the present invention to provide a water-soluble processing oil for a free abrasive wire saw which exhibits high processing precision and processing efficiency in cutting processing of a brittle material having a high hardness such as enamel, and which does not cause problems such as foaming. Another object of the present invention is to provide a slurry containing the above oil agent and free abrasive particles. Still another object of the present invention is to provide a method of cutting a brittle material such as ruthenium using the above slurry, and a brittle material (especially an lanthanum brittle material) processed in accordance with a brittle material cutting method. (Means for Solving the Problem) 4 320492 200923070 The present invention provides a water-soluble processing oil agent for a free abrasive-grain type wire saw, a slurry, and a cutting method using the same. A water-soluble processing oil for a free abrasive wire saw comprising: (A) glycerin 5 to 80% by mass, (B) diethylene glycol and/or propylene glycol 3 to 60% by mass, (C) 7质量质量。 The aromatic polycarboxylate salt is from 0.3 to 20% by mass, (D) the polyol derivative is from 3 to 30% by mass, and (E) water is from 3 to 88.7 mass%. 2. The water-soluble processing oil agent for free abrasive granules according to the above 1, wherein the (C) aromatic polycarboxylate is selected from the group consisting of carbon number 8 to 20 bis, tri- and tetra-acids. At least one alkanolamine salt of the group. A slurry for cutting processing, comprising: the water-soluble processing oil agent for free abrasive granules described in the above 1 or 2, and abrasive grains. A method for processing a brittle material, which comprises cutting a brittle material using the slurry described in the above 3. 5. The method of processing a brittle material according to the above 4, wherein the brittle material is a hard-lined material. A brittle material which is processed by a method for processing a brittle material according to the above 4 or 5. (Effect of the Invention) The water-soluble processing oil agent of the present invention is a combination of (A) glycerin, (B) diethylene glycol and/or propylene glycol, (C) aromatic polycarboxylate, (D) polyol. The derivative and (E) water can significantly increase the adhesion of the abrasive grains to the wire, so that excellent cutting precision of the brittle material can be achieved. Further, the dispersion stability of the abrasive grains in the slurry is also excellent. In addition, in the washing step of 5 320492 200923070 slurry removal after the cutting process, it can be easily washed with water without using a solvent or the like, and there is no need to worry about the ignitability, even if the slurry scatters and adheres to the cutting machine. The surface or the ground can be easily cleaned without deteriorating the working environment, which helps to improve productivity. [Embodiment] In the oil agent of the present invention, the content of the component (A) glycerin is 5 to 80% by mass, preferably 10 to 60% by mass, and if it is less than 5% by mass, the adhesion of the abrasive grains to the wire cannot be improved. Sex. On the other hand, when it exceeds 80% by mass, the viscosity of the stock solution rises and it is difficult to handle. In the oil agent of the present invention, the content of the component (B) diethylene glycol and/or propylene glycol is from 3 to 60% by mass, preferably from 20 to 50% by mass. If it is less than 3% by mass, the adhesion of the abrasive grains to the wire cannot be improved. On the other hand, when it exceeds 60% by mass, the effect of improving the adhesion of the abrasive grains to the wire is lowered. In the oil agent of the present invention, the aromatic polycarboxylic acid constituting the component (C) aromatic polycarboxylate may, for example, be a carbon number of 8 to 20 bis, a tris or a tetrabasic acid. Specific examples thereof include phthalic acid, isophthalic acid, terephthalic acid, trimellitic acid, and pyromellitic acid. The salt of the aromatic polybasic carboxylate of the component (C) may, for example, be an alkanolamine salt having 2 to 12 carbon atoms. Specific examples of the alkanolamine include monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, monomethylethanolamine, diethylethanolamine and the like. The component (C) aromatic polycarboxylate used in the present invention has a solubility in water of preferably 5 g/100 g of water or more at 20 °C. If it is less than 5 g / 100 g of water, the aromatic polycarboxylate will be easily precipitated and is not preferable. 6 320492 200923070 In the oil agent of the present invention, the content of the aromatic polycarboxylate is 〇20% by mass, more preferably 〇. 3 to 1 ()% by mass, more preferably 〇^. 3 至%, if not When the amount is 0.3% by mass, the dispersibility of the abrasive grains in the slurry is insufficient, and the dispersion effect is saturated even if it exceeds 20% by mass, which is disadvantageous in terms of economy. In the oil agent of the present invention, the polyol (D) polyol derivative may, for example, be an alcohol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol diethyl ether: ethyl monobutyl ether, or diethyl ether. Glycol monomethyl ether, diethylene glycol diethyl hydrazine, glycol diol monobutyl ether, glycerol monodecyl ether, glyceryl diethyl ether, glycerin diethyl ether, ethylene glycol alkylene oxide plus The product, the propylene glycol cyclodecane adduct, the ethylene oxide adduct of the ethanol propylene oxide adduct (glycidrene/cyclohexane _ mass ratio), and the like. The alkylene oxide system represents an ethylene oxide or epoxy burned ethylene glycol alkylene oxide adduct, a propylene glycol alkylene oxide adduct, and a cyclohexane adduct of a cyclopropane adduct. The molecular weight of the propylene oxide/cyclohexane mass ratio is preferably from 5 Å to 5 Å, more from the alkane to WOOO, and most preferably from 1,000 to 3,000. In the oil agent of the present invention, the content of the component polyol derivative is 3 mass%, preferably 10 to 2 mass%. If the content is less than 3 mass 〆, the effect of the abrasive grains on the adhesion of the wire is low, even if it exceeds 3 〇 0. The effect is saturated and uneconomical. The raw material y which is suitable for the cutting process using the oil agent of the present invention may be a brittle material widely used in the field of the electronics industry, and specific examples thereof include semiconductors such as cerium (single crystal, polycrystalline) and gallium arsenide. Oxygen ^ Oxidation wrong ceramics to avoid quality, quartz glass, chopped acid and broken glass and other broken filling members. 7 320492 200923070 When the brittle material is a lanthanide, the pH of the oil is preferably from 5 to 9. In this case, in the case of an alkaline substance, it is preferred to use an organic basic substance as compared with the inorganic basic substance. In particular, a tertiary alcohol alcohol amine such as triethanolamine or triisopropanolamine which is mildly alkaline is more preferable. The water used in the oil agent of the present invention may be any one of ultrapure water, steamed crane water, ion exchange water, tap water, municipal water, industrial water, etc. The content of water is preferably from 3 to 84% by mass. If the water content exceeds 84% by mass, the viscosity of the slurry becomes too low, and the cutting workability is lowered. In addition, if it is less than 3% by mass, the moisture in the slurry (the moisture in the oil) evaporates due to the heat generation during the cutting process, and the oil itself is ignited and lost as a water-soluble oil agent. The characteristics of the characteristics. The oil agent of the present invention can be easily produced by mixing and dissolving the components (A) to (E) under appropriate temperature conditions (e.g., about 40 to 70 ° C). At this time, it is also possible to appropriately add a surfactant (anionic, nonionic), a water-soluble tackifier, a preservative, a mold inhibitor, a non-ferrous metal corrosion inhibitor, a pH buffer, etc. in the oil agent as needed. . The oil agent of the present invention is usually used as a slurry for cutting processing which is a brittle material, in an amount of 1 kg (for example, GC green tantalum carbide abrasive grains) mixed with 1 L of the oil agent. (Examples) Hereinafter, the water-soluble oil agent of the present invention will be described in more detail by way of Examples and Comparative Examples, but the present invention is not limited thereto. Test method for measuring the character of oil sword (a) pH measurement test 320492 200923070 Each oil agent was diluted twice with ion-exchanged water, and measured according to JIS-Z-8802 glass electrode method. Test method for measuring the properties of the slurry The properties of the slurry of each oil agent (oil agent: GC #15 0 0 abrasive grain = 1: 1) were measured according to the following test conditions and test methods. (b) Abrasive dispersion stability test The slurry of each oil agent was transferred to a 100 mL measuring cylinder and left at room temperature for 12 hours. The dispersion stability of the abrasive grains was visually observed. The assessment is based on the following benchmarks. 〇: The amount of separated oil is less than 1 OmL □: The amount of separated oil is 10 mL to less than 20 mL. △: The amount of separated oil is 20 mL to less than 50 mL. X: The amount of separated oil is more than 5OmL. (c) Adhesion of abrasive grains to the wire The test was carried out by dipping the wire in a slurry placed in a container for 5 seconds, pulling it up, placing it in a vertical state for 10 seconds, and then observing it with a microscope and evaluating it. ◎: The abrasive grains adhered very well to the wire 〇: the abrasive grains adhered well to the wire □: the abrasive grains adhered to the wire △: the abrasive grains adhered to the wire in a small amount. X: The abrasive grains hardly adhered to the wire. The results are shown in Table 1. And Table 2. 320492 200923070 [Table 1] Example 1 2 3 4 5 6 7 (A) Glycerol 20 20 20 54 10 30 30 (B) Propylene glycol 54 - 20 10 30 20 14 (B) Diethylene glycol - 54 34 10 34 20 15 (C) Isophthalate μ 1 1 1 1 1 5 1 (D) Polyethylene glycol fine 10 10 10 10 10 10 25 (E) Ion exchange water 15 15 15 15 15 15 15 Oil pH 7.3 7.3 7.3 7.3 7.4 7.3 7.3 Slurry abrasive dispersion stability 〇〇〇〇〇〇〇 abrasive grain adhesion to the wire ◎ ◎ ◎ ◎ ◎ ◎ ◎ ※ l: isophthalate: triethanolamine of isophthalic acid Salt (1: 2 molar ratio). ※: Polyethylene glycol with a weight average molecular weight of 1000. 10 320492 200923070 [Table 2]
比較例 1 2 3 4 5 6 7 (A) 甘油 — — 20 30 74 ⑻ 丙二醇 54 20 20 20 — (B) 二乙二醇 20 54 35 34 — 市售物B (C) 間苯二曱酸鹽％ 1 1 — 1 1 邛售物A (D) 聚乙二醇w 10 10 10 — 10 (E) 離子交換水 15 15 15 15 15 油劑 pH 7.3 8.3 7.4 7.4 7.4 8.1 8.8 漿液 磨粒分散安定性 Δ Δ X X △ △ Δ 磨粒對於線之附著性 X X X X X △ X 比較例6及7為市售之水溶性加工油劑。 本發明之漿液係在磨粒對於線之附著性、磨粒分散安 定性方面為優異。 不含有成分（A)之比較例1及2、不含有成分（C)之比 較例3、不含有成分（D)之比較例4、不含有成分（B)之比較 例5、以及為市售物之比較例6及7的漿液係在磨粒分散 安定性、磨粒對於線之附著性方面的任一方面或兩方面為 較差。 【圖式簡單說明】 無 11 320492 200923070 【主要元件符號說明】Comparative Example 1 2 3 4 5 6 7 (A) Glycerol - 20 30 74 (8) Propylene glycol 54 20 20 20 - (B) Diethylene glycol 20 54 35 34 - Commercially available B (C) Isophthalic acid % 1 1 — 1 1 Sales A (D) Polyethylene glycol w 10 10 10 — 10 (E) Ion exchange water 15 15 15 15 15 Oil pH 7.3 8.3 7.4 7.4 7.4 8.1 8.8 Slurry abrasive dispersion stability Δ Δ XX Δ Δ Δ Adhesion of abrasive grains to the wire XXXXX Δ X Comparative Examples 6 and 7 are commercially available water-soluble processing oils. The slurry of the present invention is excellent in the adhesion of the abrasive grains to the wire and the dispersion stability of the abrasive grains. Comparative Example 1 and 2, which did not contain the component (A), Comparative Example 3 which did not contain the component (C), Comparative Example 4 which did not contain the component (D), Comparative Example 5 which did not contain the component (B), and a commercially available product The slurry of Comparative Examples 6 and 7 was inferior in either or both aspects of the abrasive dispersion stability and the adhesion of the abrasive particles to the wire. [Simple description of the diagram] None 11 320492 200923070 [Description of main component symbols]