200922796 九、發明說明 【發明所屬之技術領域】 本發明係關於列印機之該領域，特別係 本發明的開發主要是在改善高解析度列印頭 可靠性。 【先前技術】 已發明出許多不同的列印類型，目前有 印類型在使用中。該等已知的列印形式具有 標示媒體標示該列印媒體之方法。通常使用 按需噴墨及連續流動型二者，包含平版列印 複印裝置、點陣式撞擊列印機、熱紙列印機 臘列印機、熱昇華列印機及噴墨列印機。在 度、品質、可靠性、結構的簡化和操作等後 印機均有其自身的優點和問題。 在過去數年的噴墨列印之該領域中，因 的本質，由一或更多墨水噴嘴得到墨水之每 經逐漸變成主流。 已發明許多不同的噴墨列印技術。爲了 兹參考資料J Moore的論文「非撞擊式列印 回顧」（Ν ο η -1 mp ac t P r i n t i n g : I n t r 〇 du c t i ο η Perspective )，輸出硬拷貝裝置，編輯 r Sherr，第 2 0 7 -2 2 0 頁（1 9 8 8 )中。 噴墨列印機自身變化出許多不同形式。 噴墨列印頭。 的列印品質及 大量的該等列 多種以相關的 的列印形式係 、雷射列印及 、錄影機、熱 考慮成本、速 ，各形式的列 爲便宜及多向 個獨立像素已 探查該領域， :介紹及歷史 and Historical Dubeck 和 S 墨水連續串流 -4- 200922796 在噴墨列印機內的使用的出現至少可回溯至1 9 2 9年在美 國專利序號第1 94 1 00 1號中由Hanse11揭示之連續串流靜 電噴墨列印的簡單形式。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the field of printing machines, and in particular, the development of the present invention is mainly to improve the reliability of high-resolution print heads. [Prior Art] A number of different printing types have been invented, and currently there are printing types in use. These known print formats have a means of indicating that the media indicates the print medium. Both drop-on-demand and continuous-flow types are commonly used, including lithographic printing copying machines, dot matrix impact printers, hot paper printers, printers, sublimation printers, and inkjet printers. The printer has its own advantages and problems after the degree, quality, reliability, structural simplification and operation. In the field of inkjet printing in the past few years, the nature of ink obtained by one or more ink nozzles has gradually become mainstream. Many different ink jet printing techniques have been invented. For the reference of J Moore's paper "Non-impact printing review" (Ν ο η -1 mp ac t P rinting : I ntr 〇du cti ο η Perspective ), output hard copy device, edit r Sherr, 2 0 7 -2 2 0 pages (1 9 8 8 ). The inkjet printer itself varies in many different forms. Inkjet print head. Print quality and a large number of these columns are related to the printing format, laser printing and video recorders, thermal considerations, speed, various forms of cheap and multi-directional independent pixels have been explored Fields: Introduction and History, and Historical Dubeck and S Ink Continuous Streaming -4- 200922796 The use of inkjet printers can be traced back to at least 1 9 2 9 in US Patent No. 1 94 1 00 1 A simple form of continuous stream electrostatic inkjet printing disclosed by Hanse 11.
Sweet之美國專利序號第3 5 96275號也揭示連續噴墨 列印之程序，其包含以高頻靜電場調整該噴墨串流以導致 墨滴分隔之步驟。仍有數家使用製造商此技術，包含 E 1 mj e t及Scitex。（也可參閱Sweet等人之美國專利序號 第 3373437 號）。 壓電噴墨列印機也係一種通常使用噴墨列印裝置的形 式。使用隔膜操作模式之壓電系統係由Kyser等人於美國 專利序號第3946398 ( 1970)號中揭示、由Zolten在美國 專利序號第3 6 8 3 2 1 2 ( 1 9 7 0 )號中揭示之壓電晶體操作之 擠壓模式、Stemme在美國專利序號第3747120 ( 1972)號 中揭示之壓電操作的彎曲模式、Howkins在美國專利序號 第445 9 60 1號中揭示之該噴墨串流之壓電推擠模式活動、 及Fischbeck在美國專利序號第4584590號中揭示之壓電 轉換器元件的剪力模式類型。 最近，熱噴墨列印已變成非常流行的噴墨列印形式該 噴墨列印技術包含由Endo等人在GB 2007162 ( 1979)及 Vaught等人在美國專利序號第44 9 0 72 8號中之揭示。上述 二者參考資料揭示依靠電熱致動器之噴墨列印技術，該電 熱致動器導致氣泡在壓縮空間（諸如在噴嘴中）中產生而 引起墨水從連結至該狹窄空間之孔徑脫離至相關列印媒體 上。列印裝置使用由製造商（諸如佳能和惠普）製造之該 -5- 200922796 電熱致動器。 如前述內容可看出’有許多不同的列印技術類型可用 。理想上’列印技術應該有許多必要屬性。該等屬性包含 便宜的結構和操作、高速操作、安全和連續的時期操作等 。各技術在成本、速度、品質、可靠性、電力使用、結構 操作的簡化性、耐久性及可消費性上可能各有其自身的優 點和缺點。 將墨水從墨水貯存器提供至數千個緊密包裝的噴嘴在 高解析度頁寬列印中係特殊挑戰。在噴嘴停止列印時避免 壓力起伏係一個問題。在列印期間，各噴嘴以類似泵的方 式動作幾乎即時再塡充墨水至各噴嘴室。以親水性材料（ 例如氮化矽、二氧化矽等）形成該等噴嘴室以利於在列印 期間噴嘴室的再塡充。 然而’當列印終止時’墨水不會從噴嘴開口溢出並流 至該列印頭面上係同等重要的。此溢出性質在列印品質上 之效果係負面的且可能須要以列印頭維護站頻繁清理。滿 溢在相對大量的墨水在列印期間移向該列印頭的各噴嘴之 高速頁寬列印頭中係特殊問題。此墨水大量移動具有相連 慣性’即使列印停止仍可能引起墨水持續從噴嘴漏出。在 該墨水供應系統中的墨水的動量越大，溢出的危險越高。 爲此’已建議將壓力減緩結構放入該墨水供應系統中 ’其吸收提供至該噴嘴之墨水的該壓力波。迄今，該申請 者已描述與該墨水供應線路流體連通之氣箱，其對墨水壓 力波具有減緩效應。爲了完整討論墨水壓力減緩，參考資 -6- 200922796 料已揭示於『插入對照』中，其內容該以交互對照之方式 倂入本文中。實質上，希望在該墨水供應系統中容許一些 「彈性」，以在列印停止時能吸收與墨水之動體相關之該 壓力波。 然而，使用氣體吸收壓力起伏並不完全符合要求。用 氣體減緩結構以墨水除氣係特殊問題。因爲在該墨水中的 氣泡會在墨水供應線路中導致阻礙，甚至引發列印頭不整 齊之悲劇，因此除氣是不良的。此外，氣體減緩結構通常 在距該噴墨噴嘴相當長距離之上游處倂入墨水供應系統 中-典型係在安裝微機電系統列印頭之塑造墨水支管中。 任何此種氣體減緩結構的下游墨水仍會攜帶不爲該氣體減 緩結構吸收的顯著動量。再者’此問題在頁寬列印頭中惡 化，該列印頭相較於傳統掃描列印頭攜帶大量墨水。 提供已改善之減緩結構會係必要的，其能吸收提供給 噴墨噴嘴之墨水中的壓力起伏。有鑒於除氣之該等問題’ 避免以氣體減緩作爲減緩壓力起伏之機構會是必要的。另 外會必要的係將該等減緩結構和該等噴墨噴嘴間的墨水的 量最小化，以改善任何減緩系統的功效。 【發明內容】 在本發明之第一實施樣態中提供之噴墨列印頭包含： 複數噴嘴配件； 覆蓋該等複數噴嘴配件之噴嘴板； 用於供應墨水至該等複數噴嘴配件之墨水供應系統’ 200922796 該墨水供應系統包含至少一由該噴嘴板的一部分界定之導 管壁；及 至少一置於該噴嘴板之該部分中的壓力減緩結構，使 得該墨水供應系統中的墨水壓力起伏係由該壓力減緩結構 衰減。 亦可，該至少一壓力減緩結構包含： 一界定在該噴嘴板之該部分內之排出口；及 一緊密地覆蓋該排出口之彈性薄膜。 亦可，該彈性薄膜具有少於lOOOMPa之楊氏模量。 亦可，該彈性薄膜係由聚合物層所構成。 亦可，該聚合物層覆蓋該噴嘴板。 亦可，該聚合物層係疏水性的。 亦可，該聚合物層抗拒被氧化電漿移除。 亦可，該聚合物層係由聚二甲基矽氧烷（PDMS )構 成。 在另一實施樣態中該列印頭包含複數該壓力減緩結構 ’該聚合物層界定用於緊密地覆蓋各排出口之複數彈性薄 膜。 在另一實施樣態中該列印頭在每平方公分之該噴嘴板 包含至少1 00個壓力減緩結構。 亦可，該壓力減緩結構與至少一個該等噴嘴配件之間 的距離小於1 0 0微米。 亦可，各噴嘴配件包含： 具有噴嘴孔徑和墨水入口界定於其中之噴嘴室，該墨 -8- 200922796 水入口與墨水供應引道流體連通；及 用於經由該噴嘴孔徑脫離墨水之致動器。 亦可，各噴嘴室係形成於列印頭基材之表面上，各噴 嘴室包含與該基材分隔之頂部及在該頂部和該基材之間延 伸的側壁，該噴嘴孔徑係界定在該頂部內且各頂部界定該 噴嘴板之一部分。 亦可，該等噴嘴室係配置成列，各列噴嘴室均具有鄰 接著該列縱向延伸之相連墨水導管，該墨水導管係界定於 該噴嘴板和該基材之間，且該墨水導管至少部份地由該至 少一導管壁所界定。 亦可，該等墨水導管經由界定在各噴嘴室內之側壁墨 水入口將墨水提供至複數該墨水室。 亦可，該墨水導管係由一雙列所分享。 亦可，該墨水導管連結至一或更多墨水入口通道，各 墨水入口通道從該墨水導管延伸穿越該基材，且各墨水入 口通道相對於該噴嘴板和該墨水導管係實質上垂直地延伸 〇 亦可，各墨水入口通道在該噴嘴板中對準各自的壓力 減緩結構。 亦可，各墨水入口通道連接至由該基材界定之墨水供 應引道，該墨水供應引道從相對於該等噴嘴室之該基材對 側接收墨水。 在另一實施樣態中提供之列印頭積體電路包含： 基材； -9- 200922796 形成於該基材上之複數噴嘴配件，各噴嘴配件具有噴 嘴孔徑及用於使墨水經由該噴嘴孔徑脫離之致動器； 連結至該等致動器之電性驅動電路； 覆蓋該複數噴嘴配件之噴嘴板； 用於供應墨水至該複數噴嘴配件之墨水供應系統，該 墨水供應系統包含至少一由該噴嘴板的一部分界定之導管 壁；及 至少一置於該噴嘴板之該部分中的壓力減緩結構，使 得該墨水供應系統中的墨水壓力起伏係由該壓力減緩結構 衰減。 在本發明之第二實施樣態中提供之噴墨列印機包含： 一噴墨列印頭，具有複數個噴嘴； 至少一墨水貯存器； 一墨水供應系統，用於將墨水從該至少一墨水貯存器 提供至該複數噴嘴，該墨水供應系統包含至少一個用於減 緩該等噴嘴所承受之壓力變動之壓力減緩結構， 其中該至少一壓力減緩結構與至少一該等噴嘴之間的 距離小於100微米。 亦可，介於該至少一壓力減緩結構與至少一該等噴嘴 之間的該距離小於5 0微米。 亦可，介於該至少一壓力減緩結構與至少一該等噴嘴 之間的該距離小於2 5微米。 亦可，該列印頭包含該墨水供應系統之一部分。 亦可，該墨水供應系統包含至少1 0 0個壓力減緩結構 -10- 200922796 亦可’該墨水供應系統包含至少500個壓力減緩結構 〇 亦可，該墨水供應系統包含至少1 000個壓力減緩結 構。 亦可，該列印頭包含： 複數噴嘴室； 覆蓋該複數噴嘴室之噴嘴板； 用於供應墨水至該複數噴嘴室之列印頭墨水供應系統 ，該列印頭墨水供應系統包含至少一個由該噴嘴板的一部 分界定之導管壁；及 至少一壓力減緩結構，位於該噴嘴板之該部分內。 亦可，該至少一壓力減緩結構包含： 一排出口，界定在該噴嘴板之該部分內；及 一彈性薄膜，緊密地覆蓋該排出口。 亦可，該彈性薄膜具有少於lOOOMPa之楊氏模量。 亦可，該彈性薄膜係由聚合物層所構成。 亦可，該聚合物層覆蓋該噴嘴板。 亦可，該聚合物層係由聚二甲基矽氧烷（PDMS)構 成。 該噴墨列印機在其他實施樣態中包含複數該壓力減緩 結構，該聚合物層界定用於緊密地覆蓋各排出口之複數彈 性薄膜。 亦可’各噴嘴室係於列印頭基材的表面上形成，各噴 -11 - 200922796 嘴室包含與該基材分隔之頂部及在該頂部和該基材之間延 伸的側壁，該頂部具有界定於其中之噴嘴孔徑，且各頂部 界定該噴嘴板之一部分。 亦可，將該噴嘴室配置成列，各列噴嘴室均具有鄰接 著該列縱向延伸之相連墨水導管，該墨水導管係界定於該 噴嘴板和該基材之間，且該墨水導管至少部份地由該至少 一導管壁所界定。 亦可，該墨水導管經由界定在各噴嘴室內之側壁墨水 入口將墨水提供至複數個該墨水室。 亦可，該墨水導管連接至一或更多墨水入口通道，各 墨水入口通道從該墨水導管延伸穿越該基材，且各墨水入 口通道相對於該噴嘴板和該墨水導管係實質上垂直地延伸 〇 亦可，各墨水入口通道在該噴嘴板中對準各自的壓力 減緩結構。 亦可，各墨水入口通道連接至由該基材界定之墨水供 應引道，該墨水供應引道從相對於該等噴嘴室之該基材對 側接收墨水。 【實施方式】 本發明可能與任何形式之列印頭合用。本申請人已於 前文描述許多噴墨列印頭。此處並不須要描述所有該等列 印頭以理解本發明。然而，茲以與熱氣泡形成噴墨列印頭 相關的方式描述本發明。爲避免混淆，此處所有對「墨水 -12- 200922796 」的指稱應解釋爲表示任何可脫離之列印流體且包含’例 如傳統墨水、隱形墨水、定色劑、及其他可列印流體。 具有側壁噴嘴室入口之列印頭 迄今，係已描述熱氣泡形成噴墨列印頭，墨水在該列 印頭中係從墨水導管經由該噴嘴室之側壁供應至噴嘴室。 此種列印頭已描述過，例如，在我們的早期美國專利公報 第 2007/00 8 1 044中，該專利之教示以提及之方式倂入本 文中。 參考至圖1，其顯示於之前揭示包含複數個噴嘴配件 之列印頭1的一部份。圖2及3顯示此等噴嘴配件中之一 者之側視圖及剖面透視圖。 各噴嘴配件包含以微機電系統生產技術在矽晶圓基材 2上形成之噴嘴室24。該噴嘴室24由頂部21及側壁22 所界定，該側壁22係從該頂部2 1延伸至該矽基材2。如 圖1所示，各頂部係由噴嘴板5 6之一部分所界定，該噴 嘴板跨越該列印頭1之脫離面。該噴嘴板5 6及側壁22係 以該相同材料形成，其係在微機電系統生產期間以PECVD 沈積於光阻之犧牲架上。典型地，該噴嘴板5 6及側壁2 2 係由陶瓷材料形成，諸如二氧化砂或氮化砂。此等堅硬材 料具有提供列印頭堅固性之優良性質，且彼等固有之親水 性有益於以毛細作用供應墨水至該噴嘴室24。 回到該噴嘴室24之該細節，會看出噴嘴開口 26係界 定於各噴嘴室24之頂部中。各噴嘴開口 26通常係橢圓的 -13- 200922796 且具有相連之噴嘴邊框25。在列印期間該噴嘴邊框25輔 助產生墨滴定向性及至少在某種程度上減少從該噴嘴開口 26之墨水溢出。用於從該噴嘴室24脫離墨水之該致動器 係置於該噴嘴開口 26的下方及懸浮跨越坑道8之加熱元 件29。電流係經由連結至在下方的該基材2之CMOS層5 中的驅動電路之電極9提供至該加熱元件2 9。當電流通過 該加熱元件29時，其迅速地過熱周圍的墨水以形成氣泡 ，該氣泡將墨水推動穿過該噴嘴開口。經由暫停該加熱元 件29，當該噴嘴室24在塡充時該加熱元件係完全浸泡在 墨水中。此方法改善列印頭效率，因爲較少的熱散失至該 下方之基材2中且更多的輸入能量係用於產生氣泡。 圖1中能最清楚的看到，該等噴嘴係配置成列且沿著 該列印頭縱向延伸之墨水供應引道27將墨水供應至該列 中的各噴嘴。各噴嘴列具有沿著該列縱向延伸之相連墨水 導管23。該墨水導管23係界定於該噴嘴板56及該基材2 間。該墨水導管23經由墨水入口通道1 5從該墨水供應引 道27接收墨水，且經由界定在各噴嘴室之側壁22中之側 壁入口將墨水輸送至個別的噴嘴室24。 迄今，本發明人亦已說明可能如何以疏水性材料（諸 如聚二甲基矽氧烷（PDMS )及全氟聚乙烯（PFPE ))塗 佈該列印頭1之該噴嘴板5 6。此疏水表層提供該列印頭 1在列印頭維護上的卓越性質，及減少跨越該噴嘴板溢出 之危險。此種列印頭及其生產已於我們稍早在2007年3 月12日提出申請之美國專利申請案第11/685,084號中詳 -14 - 200922796 細描述’該專利之教示以參照之方式倂入本文中。此疏水 塗佈列印頭的製造之更多改善已於我們稍早在2 0 0 7年4 月27日提出申請之美國專利申請案第11/740,925號中詳 細描述’該專利之教示以交互參照之方式倂入本文中。 倂入壓力減緩結構之列印頭 現在將描述倂入壓力減緩結構之列印頭的製造程序。 部分生產之噴墨噴嘴配件（在圖4和圖5中顯示之生產階 段）已由本申請人詳細描述（參見美國專利公報第 2〇07/0〇 8 1 044號，該專利之教示以參照之方式倂入本文中 )。爲了清楚之故，在以下描述中會將相同的參考數字提 供給所描述的與列印頭丨相關之相似特性。 如圖4及圖5所示，該噴墨噴嘴配件包含噴嘴室24 和噴嘴導管23，該噴嘴導管由頂部2 1和側壁22所界定從 該頂部延伸至該基材2。該頂部21及側壁22係經由沈積 ’例如’氮化矽頂部材料20至光阻16之犧牲架上而建造 °此光阻1 6會在列印頭生產之稍後階段中以氧化電漿移 除。 參考至圖6與圖7，該次一階段經由蝕刻移除約2微 米之頂部材料20而在該頂部2 1中界定橢圓噴嘴邊框25。 圖7中能最清楚的看到，該橢圓邊框25包含二同軸邊框 唇 25a 及 25b 。 在美國專利公報第2007/0081044號中描述之該程序 中’生產的次一階段經由蝕刻通過由該噴嘴邊框2 5所限 -15- 200922796 定之該殘餘頂部材料20以界定橢圓形的噴嘴孔徑26。然 而，在本發明中’出口 60係與該噴嘴孔徑26同時蝕刻的 。如圖8及圖9中所示，該出口 60係界定在該頂部21中 且立即置於該墨水入口 1 5之上，在生產之此階段中仍以 光阻塡充該墨水入口。 參考至圖10及圖n，在生產之次一階段中，在該頂 部21 (且實際在該全部噴嘴板56 )上沈積聚合物材料ι〇〇 薄層（約1微米）。該聚合物1〇〇爲該出口 60提供覆蓋 並也暫時地覆蓋該噴嘴孔徑2 6。 此聚合物材料1 〇〇可能在以氧化電漿促進該光阻之晚 期灰化中抵抗灰化。然而，如該申請者在2007年4月27 曰提出申請之美國專利申請案第i 1 /740,925號中所描述的 ’可能經由使用該聚合物丨00之金屬保護膜以避開該聚合 物1 0 0對該灰化程序的任何不相容性。 該聚合物1 00應具有某種程度的韌性或彈性。亦可， 該聚合物1 0 〇具有相對低的剛性。亦可，該聚合物丨〇 〇具 有少於lOOOMPa之楊氏模量，且典型約爲5 00MPa之等級 方1 該聚合物也應係相對疏水的。該申請者已鑑 定過族付合上述需求之疏水、抵抗灰化、及具有低剛性 之聚合物材料。此等材料通常係經聚合矽氧烷類或經m化 聚燒煙類。更明確地說，聚二甲基矽氧烷（PDMs )及全 氣化聚乙烯（PFPE)二者已顯示係特別有益的。pdms係 較佳材料。此等材料之另一優點係具有與陶瓷黏著之優良 的黏著力，此等陶瓷係諸如通常用於形成該噴嘴板56之 -16- 200922796 二氧化矽及氮化矽。此種材料之另一優點係其爲可光圖案 成形的，使其特別適合使用在微機電程序中。例如’ PDMS係能以UV光固化的，因此PDMS的未曝光區域係 相對容易移除的。 在該聚合物100沈積後，且伴隨參考至圖12和圖13 ，該聚合物層係光圖案成形的以便移除沈積在該噴嘴孔徑 26內部之該材料。光圖案成形可能包含以UV光曝光該聚 合物層100，除了在該等噴嘴開口 26間之該等區域。 因此，如圖12和圖13中所示，各出口 60係以彈性 可變形之聚合物膜層100緊密地覆蓋，以在各墨水入口通 道1 5上的該頂部2 1中形成壓力減緩結構70。標準微機電 程序步驟（墨水供應引道27之回蝕、晶圓薄化及光阻1 6 之灰化）之後提供在圖1 4中顯示之該列印頭200。 相較於圖1中所示之該列印頭1，圖1 4所示之該列印 頭2 0 0因該壓力減緩結構7 0之功效具有經改善之墨水流 特徵。此等結構70在壓力起伏期間經由容許在該出口 60 上方之該彈性聚合物層1 0 0向外膨脹以吸收在該墨水中的 壓力起伏。因此，該減緩結構70在列印停止時能最小化 從該噴嘴孔徑26溢出之墨水量。當該聚合物1 00具有低 剛性（例如少於1 〇〇〇MPa之楊氏模量）時，該減緩結構 70係特別有效的。如上文所描述的，PDMS在此考量中係 特別有效的。 此外，該減緩結構70係放置成鄰近各噴嘴室24。亦 可，各減緩結構距噴嘴配件或噴嘴孔徑26在1 00微米距 -17- 200922796 離內、亦可在50微米距離內、又亦可係在25微米距離內 。因此，在該減緩結構70及該噴嘴孔徑26間的該墨水量 相較於先前技術之減緩結構係相對小的。此方法提供已改 善的減緩功效及最小化導因於壓力起伏之墨水溢出。 此外，因爲該減緩結構70係以該微機電至少生產程 序形成，能在單一列印頭上提供大量的此等結構。與典型 上在該噴嘴室24的更上游處包含明顯較少數量之減緩結 構的先前技術相較，在該列印頭上大規模地增加減緩結構 70改善了壓力減緩的效能。該申請人之頁寬列印頭的典型 表面噴嘴密度係每平方公分之列印頭表面上有至少1 〇〇〇〇 個噴嘴。根據本發明，列印頭在每平方公分之列印頭表面 (或噴嘴板）上可能具有至少1 〇 〇個、至少5 〇 〇個或至少 1 0 0 〇個減緩結構。 根據本發明之列印頭的另一優點係保持具有疏水性列 印頭面之所有優點。此外，該列印頭面之疏水性結合該減 緩結構70協同將列印頭面之溢出最小化。另一方面，該 壓力減緩結構70將該噴嘴孔徑26經受之壓力起伏最小化 :另一方面，該列印頭面之疏水性結合該噴嘴室2 4之該 親水壁將從該噴嘴孔徑26洩出之墨水最小化，即使壓力 起伏到達該噴嘴孔徑26。會理解根據本發明之該列印頭提 供之相乘作用在最小化列印頭面溢出係特別有效的。 不證自明地，此處描述之列印頭可能使用在噴墨列印 機中。圖15及圖16顯示典型的頁寬噴墨列印機210，如 該申請人在美國專利公報第2005/0 1 68 5 43號中所描述的 -18- 200922796 。該列印機2 1 0包含複數墨水匣2 U，其與列印頭係流體 連通的（未圖示於圖15及圖16中）。各墨水匣2H將墨 水提供至該列印頭的不同顏色引道。一個顏色引道典型地 包含一列或更多列的噴嘴。 在此領域中之一般工作者會理解可能對如該等特定實 施例所示之本發明進行大量變動且/或修改，而不違反從 寬描述之本發明的精神或範圍。因此，該等實施例在各方 面可視爲係說明而非限制。 【圖式簡單說明】 本發明之可選的實施例現在會以僅參考至該等隨附圖 式之範例的方式描述，在圖式中： 圖1係噴嘴配件陣列及具有側壁墨水入口之噴嘴室的 部分透視圖； 圖2係圖1所示之噴嘴配件組件單元之側視圖； 圖3係圖2所示之該噴嘴配件的透視圖； 圖4係在沈積頂部物質至犧牲光阻架上後，立即部分 製造之噴墨噴嘴配件的側視圖。 圖5係圖4所示之該噴嘴配件之透視圖； 圖6係圖4所示之該噴嘴配件在噴嘴邊框蝕刻後之側 視圖； 圖7係圖6所示之該噴嘴配件之透視圖； 圖8係圖6所示之該噴嘴配件在噴嘴孔徑及壓力出口 蝕刻後之側視圖： -19- 200922796 圖9係圖8所示之該噴嘴配件之透視圖； 圖10係圖8所示之該噴嘴配件在聚合物層沈積後的 側視圖； 圖1 1係圖1 〇所示之該噴嘴配件之透視圖； 圖12係圖10所示之該噴嘴配件在以光圖案成形重界 定該噴嘴孔徑後的側視圖； 圖1 3係圖1 2所示之該噴嘴配件之透視圖； 圖1 4係圖1 3所示之該噴嘴配件陣列的部分透視圖； 圖1 5係噴墨列印機之透視圖；及 圖1 6係圖1 5所示之噴墨列印機及曝露之墨水匣的透 視圖。 【主要元件符號說明】 1 :列印頭 2 :基材 5 : CMOS 層 8 :坑道 9 :電極 1 5 :墨水入口通道 1 6 :光阻 2〇 :頂部材料 2 1 :頂部 22 :側壁 2 3 :墨水導管 -20- 200922796 2 4 :噴嘴室 2 5 :噴嘴邊框 25a、25b:邊框唇 2 6 :噴嘴開口 27 :墨水供應引道 29 :加熱元件 5 6 :噴嘴板 6 0 ··出口 7 〇 :壓力減緩結構 1 〇 〇 :聚合物 200 :列印頭 2 1 0 :頁寬噴墨列印機 2 1 1 :墨水匣 -21The procedure of continuous ink jet printing is also disclosed in U.S. Pat. There are still several manufacturers using this technology, including E 1 mj e t and Scitex. (See also U.S. Patent No. 3,373,437 to Sweet et al.). Piezoelectric ink jet printers are also a type that typically uses an ink jet printing device. A piezoelectric system using a diaphragm mode of operation is disclosed in U.S. Patent No. 3, 946,398, issued toK.S. Patent No. 3, s. Squeezing mode for piezoelectric crystal operation, bending mode of piezoelectric operation disclosed in US Pat. Piezo push mode activity, and the type of shear mode of the piezoelectric transducer element disclosed in U.S. Patent No. 4,584,590 to Fischbeck. Recently, thermal inkjet printing has become a very popular inkjet printing format. The inkjet printing technology is included in Endo et al. in GB 2007162 (1979) and Vaught et al. in U.S. Patent No. 44 9 0 72 8 Revealing. The above references disclose an ink jet printing technique that relies on an electrothermal actuator that causes bubbles to be created in a compression space, such as in a nozzle, causing the ink to detach from the aperture that is joined to the narrow space. Printed on the media. The printing device uses the -5-200922796 electrothermal actuator manufactured by a manufacturer such as Canon and Hewlett Packard. As can be seen from the foregoing, there are many different types of printing technologies available. Ideally, printing technology should have many essential attributes. These attributes include inexpensive construction and operation, high speed operation, safety and continuous period operation. Each technology may have its own advantages and disadvantages in terms of cost, speed, quality, reliability, power usage, simplicity of structural operation, durability, and consumability. Providing ink from an ink reservoir to thousands of tightly packed nozzles is a particular challenge in high resolution page width printing. Avoiding pressure fluctuations when the nozzle stops printing is a problem. During printing, the nozzles act in a pump-like manner to refill the nozzle chambers almost instantaneously. The nozzle chambers are formed of a hydrophilic material (e.g., tantalum nitride, hafnium oxide, etc.) to facilitate refilling of the nozzle chamber during printing. However, it is equally important that the ink does not overflow from the nozzle opening and flow to the print head surface when the printing is terminated. The effect of this spillover property on print quality is negative and may require frequent cleaning by the printhead maintenance station. A high speed page width printhead in which the overflow of a relatively large amount of ink moves toward the head of the printhead during printing is a particular problem. This large amount of movement of the ink has a connected inertia. Even if the printing is stopped, the ink may continue to leak from the nozzle. The greater the momentum of the ink in the ink supply system, the higher the risk of spillage. To this end, it has been proposed to place a pressure relieving structure in the ink supply system which absorbs the pressure wave of the ink supplied to the nozzle. To date, the Applicant has described a gas box in fluid communication with the ink supply line that has a mitigating effect on ink pressure waves. In order to fully discuss the ink pressure mitigation, reference -6-200922796 has been disclosed in the "Insert Control", the contents of which should be entered into this article in an interactive manner. Essentially, it is desirable to allow some "elasticity" in the ink supply system to absorb the pressure wave associated with the moving body of the ink when printing is stopped. However, the use of gas to absorb pressure fluctuations does not fully meet the requirements. The use of gas to slow down the structure is particularly problematic with ink degassing. Degassing is undesirable because the bubbles in the ink can cause obstructions in the ink supply line and even cause the tragedy of the print head to be untidy. In addition, the gas mitigation structure typically enters the ink supply system upstream of a relatively long distance from the ink jet nozzle - typically in a molded ink manifold that mounts the MEMS print head. The downstream ink of any such gas mitigation structure will still carry significant momentum that is not absorbed by the gas mitigation structure. Furthermore, this problem is degraded in the page wide print head, which carries a large amount of ink compared to a conventional scanning print head. It would be necessary to provide an improved mitigation structure that absorbs the pressure fluctuations in the ink supplied to the ink jet nozzle. In view of the problems of degassing, it is necessary to avoid gas mitigation as a mechanism to slow down the pressure. It will additionally be necessary to minimize the amount of ink between the mitigation structures and the ink jet nozzles to improve the efficacy of any mitigation system. SUMMARY OF THE INVENTION An inkjet printhead provided in a first embodiment of the present invention comprises: a plurality of nozzle fittings; a nozzle plate covering the plurality of nozzle fittings; and an ink supply for supplying ink to the plurality of nozzle fittings System '200922796 The ink supply system includes at least one conduit wall defined by a portion of the nozzle plate; and at least one pressure relief structure disposed in the portion of the nozzle plate such that ink pressure fluctuations in the ink supply system are This pressure slows down the structure attenuation. Alternatively, the at least one pressure relieving structure comprises: a discharge port defined in the portion of the nozzle plate; and an elastic film closely covering the discharge port. Alternatively, the elastic film has a Young's modulus of less than 1000 MPa. Alternatively, the elastic film is composed of a polymer layer. Alternatively, the polymer layer covers the nozzle plate. Alternatively, the polymer layer is hydrophobic. Alternatively, the polymer layer resists removal by the oxidizing plasma. Alternatively, the polymer layer is composed of polydimethyl siloxane (PDMS). In another embodiment, the printhead includes a plurality of the pressure relief structures. The polymer layer defines a plurality of elastic films for closely covering the discharge ports. In another embodiment, the printhead includes at least 100 pressure relief structures per square centimeter of the nozzle plate. Alternatively, the distance between the pressure relieving structure and the at least one of the nozzle fittings is less than 100 microns. Alternatively, each nozzle assembly includes: a nozzle chamber having a nozzle aperture and an ink inlet defined therein, the ink-8-200922796 water inlet being in fluid communication with the ink supply channel; and an actuator for separating ink through the nozzle aperture . Alternatively, each nozzle chamber is formed on a surface of the print head substrate, each nozzle chamber includes a top portion spaced apart from the substrate and a sidewall extending between the top portion and the substrate, the nozzle aperture being defined in the Inside the top and each top defines a portion of the nozzle plate. Alternatively, the nozzle chambers are arranged in a row, each row of nozzle chambers having a continuous ink conduit extending longitudinally adjacent the column, the ink conduit being defined between the nozzle plate and the substrate, and the ink conduit is at least Partially defined by the at least one conduit wall. Alternatively, the ink conduits provide ink to the plurality of ink chambers via ink inlets defined in the sidewalls of each of the nozzle chambers. Alternatively, the ink conduit is shared by a double column. Alternatively, the ink conduit is coupled to one or more ink inlet channels, each ink inlet channel extending from the ink conduit through the substrate, and each ink inlet channel extending substantially perpendicularly relative to the nozzle plate and the ink conduit system Alternatively, each ink inlet channel is aligned with the respective pressure relief structure in the nozzle plate. Alternatively, each ink inlet channel is coupled to an ink supply channel defined by the substrate, the ink supply channel receiving ink from opposite sides of the substrate relative to the nozzle chambers. A print head integrated circuit provided in another embodiment comprises: a substrate; -9- 200922796 a plurality of nozzle fittings formed on the substrate, each nozzle fitting having a nozzle aperture and for passing ink through the nozzle aperture An actuator that is detached; an electrical drive circuit coupled to the actuators; a nozzle plate covering the plurality of nozzle assemblies; an ink supply system for supplying ink to the plurality of nozzle assemblies, the ink supply system comprising at least one A portion of the nozzle plate defines a conduit wall; and at least one pressure relief structure disposed in the portion of the nozzle plate such that ink pressure fluctuations in the ink supply system are attenuated by the pressure relief structure. An ink jet printer provided in a second embodiment of the present invention comprises: an ink jet print head having a plurality of nozzles; at least one ink reservoir; an ink supply system for discharging ink from the at least one An ink reservoir is provided to the plurality of nozzles, the ink supply system including at least one pressure mitigation structure for mitigating pressure variations experienced by the nozzles, wherein a distance between the at least one pressure mitigation structure and the at least one of the nozzles is less than 100 microns. Alternatively, the distance between the at least one pressure relieving structure and the at least one of the nozzles is less than 50 microns. Alternatively, the distance between the at least one pressure relief structure and the at least one of the nozzles is less than 25 microns. Alternatively, the printhead includes a portion of the ink supply system. Alternatively, the ink supply system includes at least 10 pressure mitigation structures - -10-200922796. The ink supply system may also include at least 500 pressure mitigation structures, and the ink supply system includes at least 1 000 pressure mitigation structures. . Alternatively, the print head comprises: a plurality of nozzle chambers; a nozzle plate covering the plurality of nozzle chambers; a print head ink supply system for supplying ink to the plurality of nozzle chambers, the print head ink supply system comprising at least one A portion of the nozzle plate defines a conduit wall; and at least one pressure relief structure is located within the portion of the nozzle plate. Alternatively, the at least one pressure relieving structure comprises: a row of outlets defined in the portion of the nozzle plate; and an elastic film closely covering the discharge port. Alternatively, the elastic film has a Young's modulus of less than 1000 MPa. Alternatively, the elastic film is composed of a polymer layer. Alternatively, the polymer layer covers the nozzle plate. Alternatively, the polymer layer is composed of polydimethyl siloxane (PDMS). The ink jet printer, in other embodiments, includes a plurality of the pressure relief structures defining a plurality of elastic films for closely covering the discharge ports. Optionally, each nozzle chamber is formed on a surface of the print head substrate, and each of the nozzles 11 - 200922796 includes a top portion spaced apart from the substrate and a sidewall extending between the top portion and the substrate, the top portion There is a nozzle aperture defined therein, and each top defines a portion of the nozzle plate. Alternatively, the nozzle chambers are arranged in a row, each row of nozzle chambers having a continuous ink conduit extending longitudinally adjacent the column, the ink conduit being defined between the nozzle plate and the substrate, and the ink conduit being at least partially Part of the ground is defined by the at least one conduit wall. Alternatively, the ink conduit provides ink to the plurality of ink chambers via ink inlets defined in the sidewalls of each of the nozzle chambers. Alternatively, the ink conduit is coupled to one or more ink inlet channels, each ink inlet channel extending from the ink conduit through the substrate, and each ink inlet channel extending substantially perpendicularly relative to the nozzle plate and the ink conduit system Alternatively, each ink inlet channel is aligned with the respective pressure relief structure in the nozzle plate. Alternatively, each ink inlet channel is coupled to an ink supply channel defined by the substrate, the ink supply channel receiving ink from opposite sides of the substrate relative to the nozzle chambers. [Embodiment] The present invention may be used in combination with any type of print head. The Applicant has previously described a number of ink jet print heads. It is not necessary to describe all such print heads herein to understand the invention. However, the invention has been described in terms of the formation of an ink jet print head with thermal bubbles. To avoid confusion, all references herein to "Ink -12- 200922796" shall be interpreted to mean any detachable printing fluid and include 'for example, conventional inks, invisible inks, fixatives, and other printable fluids. Printhead with sidewall nozzle chamber inlets Heretofore, it has been described that thermal bubble formation inkjet printheads in which ink is supplied from the ink conduit to the nozzle chamber via the sidewalls of the nozzle chamber. Such a print head has been described, for example, in our earlier U.S. Patent Publication No. 2007/00 8 1 044, the teachings of which are incorporated herein by reference. Referring to Figure 1, there is shown a portion of the previously described print head 1 including a plurality of nozzle assemblies. Figures 2 and 3 show side and cross-sectional perspective views of one of these nozzle assemblies. Each nozzle assembly includes a nozzle chamber 24 formed on the crucible wafer substrate 2 by MEMS production techniques. The nozzle chamber 24 is defined by a top portion 21 and a side wall 22 that extends from the top portion 21 to the crucible substrate 2. As shown in Fig. 1, each top portion is defined by a portion of a nozzle plate 56 that spans the detachment surface of the print head 1. The nozzle plate 56 and the side wall 22 are formed of the same material which is deposited by PECVD on the sacrificial shelf of the photoresist during the production of the MEMS. Typically, the nozzle plate 56 and the side wall 22 are formed from a ceramic material such as silica sand or sand. These hard materials have excellent properties in providing the robustness of the print head, and their inherent hydrophilicity is beneficial for supplying ink to the nozzle chamber 24 by capillary action. Returning to this detail of the nozzle chamber 24, it will be seen that the nozzle openings 26 are bounded in the top of each nozzle chamber 24. Each nozzle opening 26 is generally elliptical -13-200922796 and has a connected nozzle frame 25. The nozzle frame 25 assists in producing ink droplet orientation during printing and at least somewhat reduces ink spillage from the nozzle opening 26. The actuator for escaping ink from the nozzle chamber 24 is placed below the nozzle opening 26 and floats across the heating element 29 of the tunnel 8. The current is supplied to the heating element 29 via an electrode 9 connected to a drive circuit in the CMOS layer 5 of the substrate 2 below. As current passes through the heating element 29, it rapidly overheats the surrounding ink to form a bubble that pushes the ink through the nozzle opening. By suspending the heating element 29, the heating element is completely immersed in the ink when the nozzle chamber 24 is primed. This method improves the efficiency of the printhead because less heat is lost to the underlying substrate 2 and more input energy is used to create bubbles. As best seen in Figure 1, the nozzles are arranged in columns and the ink supply channels 27 extending longitudinally along the printhead supply ink to the nozzles in the column. Each nozzle row has a connected ink conduit 23 extending longitudinally along the column. The ink conduit 23 is defined between the nozzle plate 56 and the substrate 2. The ink conduit 23 receives ink from the ink supply channel 27 via an ink inlet passage 15 and delivers ink to the individual nozzle chambers 24 via side wall inlets defined in the side walls 22 of each nozzle chamber. Heretofore, the inventors have also explained how it is possible to coat the nozzle plate 56 of the print head 1 with a hydrophobic material such as polydimethyl siloxane (PDMS) and perfluoropolyethylene (PFPE). This hydrophobic skin provides the superior properties of the printhead 1 in printhead maintenance and reduces the risk of spillage across the nozzle plate. Such a printhead and its production are described in detail in the U.S. Patent Application Serial No. 11/685,084, filed on March 12, 2007, the entire disclosure of which is incorporated by reference. Into this article. A further improvement in the manufacture of this hydrophobic coating printhead is described in detail in the U.S. Patent Application Serial No. 11/740,925, filed on Apr. 27, 2007. Refer to this article for reference. Indentation of the Intrusion Pressure Relief Structure The manufacturing procedure for the print head of the intrusion pressure relief structure will now be described. Partially produced inkjet nozzle fittings (the production stages shown in Figures 4 and 5) have been described in detail by the Applicant (see U.S. Patent No. 2,07/0,8, 044, the disclosure of which is incorporated herein by reference. The way to break into this article). For the sake of clarity, the same reference numerals will be provided in the following description to the described similar characteristics associated with the print head. As shown in Figures 4 and 5, the ink jet nozzle assembly includes a nozzle chamber 24 and a nozzle conduit 23 extending from the top to the substrate 2 defined by a top portion 21 and a side wall 22. The top 21 and sidewalls 22 are constructed by depositing a 'for example, a tantalum nitride top material 20 to a sacrificial shelf of photoresist 16. This photoresist 16 will be oxidized by plasma in a later stage of print head production. except. Referring to Figures 6 and 7, the next stage removes about 2 micrometers of top material 20 by etching and defines an elliptical nozzle frame 25 in the top portion 21. As best seen in Figure 7, the elliptical bezel 25 includes two coaxial frame lips 25a and 25b. In the procedure described in U.S. Patent Publication No. 2007/0081044, the next stage of production is etched by etching the residual top material 20 by the nozzle frame 25 to -15-200922796 to define an elliptical nozzle aperture 26 . However, in the present invention, the 'outlet 60' is etched simultaneously with the nozzle aperture 26. As shown in Figures 8 and 9, the outlet 60 is defined in the top portion 21 and immediately placed over the ink inlet 15 and is still filled with photoresist by the photoresist during this stage of production. Referring to Figures 10 and n, a thin layer of polymeric material (about 1 micron) is deposited on the top portion 21 (and indeed on all of the nozzle plates 56) in a second stage of production. The polymer 1 提供 provides coverage for the outlet 60 and also temporarily covers the nozzle aperture 26 . This polymeric material may resist ashing in the late ashing that promotes the photoresist with oxidative plasma. However, it is possible to avoid the polymer 1 by using a metal protective film of the polymer 丨00 as described in the U.S. Patent Application Serial No. 1/740,925, filed on Apr. 27, 2007. 0 0 Any incompatibility of the ashing program. The polymer 100 should have some degree of toughness or elasticity. Alternatively, the polymer 10 〇 has a relatively low rigidity. Alternatively, the polymer crucible has a Young's modulus of less than 1000 MPa and is typically on the order of 500 MPa. The polymer should also be relatively hydrophobic. The Applicant has identified polymeric materials that are hydrophobic, resistant to ashing, and have low stiffness to meet the above requirements. These materials are usually polymerized oxiranes or m-linked poly-smoke. More specifically, both polydimethyl siloxanes (PDMs) and fully vaporized polyethylene (PFPE) have been shown to be particularly beneficial. Pdms is a preferred material. Another advantage of such materials is their excellent adhesion to ceramics, such as cerium oxide and tantalum nitride, which are commonly used to form the nozzle plate 56. Another advantage of this material is that it is photopatternable, making it particularly suitable for use in MEMS applications. For example, the 'PDMS system can be cured with UV light, so the unexposed areas of the PDMS are relatively easy to remove. After deposition of the polymer 100, and with reference to Figures 12 and 13, the polymer layer is patterned to remove the material deposited within the nozzle aperture 26. The patterning of the light pattern may comprise exposing the polymer layer 100 with UV light, except for such areas between the nozzle openings 26. Thus, as shown in Figures 12 and 13, each outlet 60 is tightly covered with an elastically deformable polymer film layer 100 to form a pressure relief structure 70 in the top portion 21 of each ink inlet passage 15 . The print head 200 shown in Figure 14 is provided after the standard MEMS process steps (etchback of the ink supply track 27, wafer thinning, and ashing of the photoresist 16). In contrast to the print head 1 shown in Figure 1, the print head 200 shown in Figure 14 has improved ink flow characteristics due to the efficacy of the pressure relief structure 70. These structures 70 expand outwardly during pressure fluctuations by allowing the elastic polymer layer 100 above the outlet 60 to absorb pressure fluctuations in the ink. Therefore, the mitigation structure 70 minimizes the amount of ink that overflows from the nozzle aperture 26 when printing is stopped. The slowing structure 70 is particularly effective when the polymer 100 has low rigidity (e.g., Young's modulus of less than 1 MPa). As described above, PDMS is particularly effective in this consideration. Additionally, the mitigation structure 70 is placed adjacent to each of the nozzle chambers 24. Alternatively, each mitigation structure may be within a distance of 100 microns from -17 to 200922796, or within a distance of 50 microns, or within a distance of 25 microns from the nozzle fitting or nozzle aperture 26. Accordingly, the amount of ink between the mitigation structure 70 and the nozzle aperture 26 is relatively small compared to prior art mitigation structures. This method provides improved mitigation efficacy and minimizes ink spillage due to pressure fluctuations. Moreover, because the mitigation structure 70 is formed by the MEMS at least production process, a large number of such structures can be provided on a single print head. The large increase in the mitigation structure 70 on the print head improves the effectiveness of the pressure mitigation compared to prior art techniques that typically include a significantly lesser number of mitigation structures further upstream of the nozzle chamber 24. The Applicant's page wide printhead has a typical surface nozzle density of at least 1 nozzle per square centimeter of printhead surface. In accordance with the present invention, the printhead may have at least 1 、, at least 5 〇 or at least 100 减缓 mitigation structures per square centimeter of the print head surface (or nozzle plate). Another advantage of the printhead in accordance with the present invention is to maintain all of the advantages of having a hydrophobic print head. In addition, the hydrophobicity of the print head face in combination with the mitigation structure 70 cooperates to minimize spillage of the print head face. In another aspect, the pressure relief structure 70 minimizes pressure fluctuations experienced by the nozzle aperture 26: on the other hand, the hydrophobicity of the printhead surface combined with the hydrophilic wall of the nozzle chamber 24 will vent from the nozzle aperture 26. The ink is minimized even if the pressure fluctuations reach the nozzle aperture 26. It will be appreciated that the multiplication effect provided by the printhead in accordance with the present invention is particularly effective in minimizing print head overflow. It is self-evident that the printhead described herein may be used in an inkjet printer. Figures 15 and 16 show a typical page width ink jet printer 210, as described in U.S. Patent Application Serial No. 2005/0 1 687 s. The printer 2 10 includes a plurality of ink cartridges 2 U that are in fluid communication with the print head system (not shown in Figures 15 and 16). Each of the ink cartridges 2H supplies ink to the different color guides of the print head. A color approach typically includes one or more columns of nozzles. A person skilled in the art will understand that a number of variations and/or modifications may be made to the invention as shown in the specific embodiments without departing from the spirit or scope of the invention as broadly described. Accordingly, the embodiments are to be considered in all respects as illustrative and not limiting. BRIEF DESCRIPTION OF THE DRAWINGS Alternative embodiments of the present invention will now be described by way of example only with reference to the accompanying drawings in which: FIG. 1 is an array of nozzle fittings and a nozzle having a sidewall ink inlet Figure 2 is a side view of the nozzle fitting assembly unit shown in Figure 1; Figure 3 is a perspective view of the nozzle fitting shown in Figure 2; Figure 4 is attached to the top material to the sacrificial resist frame Immediately afterwards, a side view of the partially manufactured inkjet nozzle assembly. Figure 5 is a perspective view of the nozzle fitting shown in Figure 4; Figure 6 is a side view of the nozzle fitting shown in Figure 4 after the nozzle frame is etched; Figure 7 is a perspective view of the nozzle fitting shown in Figure 6; Figure 8 is a side view of the nozzle fitting shown in Figure 6 after the nozzle aperture and pressure outlet are etched: -19- 200922796 Figure 9 is a perspective view of the nozzle assembly shown in Figure 8; Figure 10 is shown in Figure 8. 1 is a perspective view of the nozzle assembly shown in FIG. 1; FIG. 12 is a perspective view of the nozzle assembly shown in FIG. Figure 1 is a perspective view of the nozzle assembly shown in Figure 12; Figure 14 is a partial perspective view of the nozzle assembly array shown in Figure 13; Figure 1 5 inkjet printing A perspective view of the machine; and Figure 1 is a perspective view of the ink jet printer and the exposed ink cartridge shown in Figure 15. [Main component symbol description] 1 : Print head 2 : Substrate 5 : CMOS layer 8 : Tunnel 9 : Electrode 1 5 : Ink inlet channel 1 6 : Photoresist 2 〇: Top material 2 1 : Top 22 : Side wall 2 3 : Ink duct -20- 200922796 2 4 : Nozzle chamber 2 5 : Nozzle frame 25a, 25b: Frame lip 2 6 : Nozzle opening 27 : Ink supply channel 29 : Heating element 5 6 : Nozzle plate 6 0 · · Exit 7 〇 : Pressure Relieving Structure 1 〇〇: Polymer 200: Print Head 2 1 0 : Page Width Inkjet Printer 2 1 1 : Ink 匣-21