200919534 25311twf.doc/n 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種冷陰極燈管（cold cathode fluorescentlamp，CCFL)的製造方法，且特別是有關於一種 有效降低雜氣殘留之冷陰極燈管的製造方法。 【先前技術】 冷陰極燈管屬於低壓汞放電燈，具有燈管細小、結構 簡單、亮度高、具彎管加工成多種形狀等優點，所以經常 被用來作為液晶顯示器、掃瞄器、各式照明器材、燈箱、 藝術照明、霓虹燈等的光源。 一般而言，冷陰極燈管是透過在玻璃管内壁塗有一層 ，光體，並在玻璃管内部封入少量惰性氣體及微量的汞。 藉由在冷陰極燈管兩端的電極施加電壓，使玻璃管内的氣 體分子及|分子激發而產生氣體放電，放$紫外光以激發 榮光體，使螢光體產生可見光。 _，1Α至圖⑴是習知之―種冷陰極燈管的製造流程剖 面示^圖。如圖1Α所示，首先，提供坡璃管ι〇2。玻璃管 102具有腔室1〇4、—開放式的端口 1〇6以及一封止端 剛。在破璃管搬的端〇廳與封止端⑽分別設置有電 極110,且其腔室1〇4内表面上已塗佈有榮光層⑴。接著， 於玻璃管102之端D 1()6注入清除氣體12〇，以沖洗腔室 刚。在使用清除氣體12〇沖洗腔室1〇4後，於端口咖 進行抽真工的步驟，以將腔室刚内的氣體m排出。之 後再反覆進行沖洗腔室1〇4後抽真空的步驟數次(如3次 200919534 2>3iitwt.doc/n 至4次）。 之後，如圖1B所示，於開口 1〇6處燒封玻璃管1〇2， 並切除燒封處外側多餘的玻璃管材料，以暴露出部分電極 110，而形成冷陰極燈管。 由於在進行抽真空步驟時，隨著玻璃管102的長度增 加，封止端108處的雜氣124越不容易排出，因此使用上 述以單方向沖洗後抽真空的方式來降低腔室1〇4内的雜氣 124比例，往往難以有效控制雜氣124的殘留量。特別是， 隨著燈官長度越長，雜氣124殘留在封止端log的問題會 更加嚴重，進而造成所製造出來的冷陰極燈管之雜氣量偏 面等問題。 而且，為了要解決雜氣殘留的問題，習知方法通常會 藉由提尚真空泵的數量及真空能力，並增加沖洗及抽真空 步驟的次數，如此會造成設備成本的增加。此外，在製程 中:由於移動需求以及維持其高真空以排除雜氣的需求， 往往需要額外配置中心閥（center valve)來作真空度的分 j 配。當真空度提高至—定程度時，隔離在大氣與高真空區 ft間的油膜極容易回流至中心閥邊緣，而於氣體填充時 隨著氣體進入玻璃管中，造成後續製造出來的冷陰極燈管 受到汙染。 【發明内容】 有鑑於此，本發明提供一種冷陰極管的製造方法，能 夠有效地控制雜氣殘存量，並可進—步改善隨燈管長度越 長所造成雜氣量偏高的問題。 200919534 z^jiiTwr.aoc/n 本，明提出一種冷陰極燈管的製造方法。首先，提供 2有腔室及開放式兩端口之玻璃管。此玻璃管之兩端分別 〇又置有，極’且其腔室之内表面已形成有榮光層。接著， =玻，g之一端口注入清除氣體，以使清除氣體通過腔 ^並由破璃官之另—端口排出。之後，密封玻璃管之— X开^成封止端。繼之，於封止端外的另一端口抽 真空。接著，於玻璃管的腔室内填充惰性氣體與汞蒸氣。 P 祕’燒封玻璃管之電極處，並嫌玻璃管之燒封處的外 4 側’以暴露出部分電極。 本發明另提出一種冷陰極燈管的製造方法。首先，提 供=有腔室及開放式兩端口之玻璃管。此玻璃管之兩端分 別叹置^電極’且其腔室之内表面已形成有營光層。接著， =玻璃官之-端口注人清除氣體’以使清除氣體通過腔 ^並由破璃官之另一端口排出。之後，密封玻璃管之一 f口’以形成-封止端。繼之，於封止端外的另一端口抽 、工。此外，於以上製程過程中，在玻璃管周邊輔以加熱， υ 卩使雜氣加速排出。接著，於玻璃管的腔室内填充惰性氣 體與汞蒸氣。然後，燒封玻璃管之電極處，並切除玻璃管 之燒封處的外側，以暴露出部分電極。 在本發明之一實施例中，上述於玻璃管之一端口注入 清除氣體，以使清除氣體通過腔室，並由玻璃管之另一 口排出的步驟是在0.001 torr至丨t〇rr之壓力 在本發明之-實施例中，上述之玻璃管的長度是介丁於 850 mm 至 1500 mm 之間。 、 200919534 253ntwi.aoc/n 在本發明之—實施例中，上述之各電極位於腔室與各 端口之間。 在本發明之一實施例中，上述之清除氣體包括惰性氣 體，如氬氣或氖氬混合氣體。 在本發明之-實施例中，上述在玻璃管周邊輔以加孰 的溫度是介於300〜400¾。 μ 本發明之冷陰極燈管的製造方法藉由在具有兩開放 式端口的玻璃管-端注人清除氣齡在另—端排出氣體， 以有效稀釋玻璃管内_氣並排除之，再密封玻璃管的其 中-端口，並於另-端抽真空，因此可以有效降低玻璃管 内的雜氣殘留量。 此外，本發明之方法因採用持續注人清除氣體並排 出，因而能夠大幅減少進行雜氣清除步驟的次數。再者， 在清洗至抽真空過程中，燈管周圍輔以加熱至3〇〇〜4〇〇它 可以有效清除玻璃管_水氣轉氣，使製程真空度不隨 燈管變長而減低。 為讓本發明之上述特徵和優點能更明顯易懂，下文特 舉較佳實施例’並配合所附圖式，作詳細說明如下。 【實施方式】 圖2是依照本發明之一實施例之一種冷陰極燈管的製 造流程圖。圖3Α至圖3C分別是依照本發明—實施例之冷 陰極燈管的剖面示意圖。請同時參照圖2與圖3Α，在步ς S210中，提供一玻璃管3〇2。玻璃管3〇2的長度例如是介 於85〇111111至1500 mm之間。玻璃管302具有腔室3〇4與 200919534 /^jntwt.aoc/n 兩個開放式的端口 306a、3〇6b。 承上述，玻璃管302的兩端分別設置有電極31〇a、 310b。電極310a、310b例如是固定於腔室3〇4内，且分別 位於腔室304與端口 306a、306b之間。在一實施例中，電 極310a、310b各包括導絲314、電極杯316以及玻珠318。 導絲314位於玻璃管302兩側靠近端口 s〇6a、3〇6b的位 置。導絲314的材質例如是金屬。相對於導絲314，電極 杯316配置在較靠近腔t 3〇4中心内部的位置，且電極杯 316會與導絲314電性連接。電極杯316的材質例如是鎳、 銳或翻。詳言之，電極杯316為圓柱中空杯狀結構，且此 圓柱中空杯狀結構的底部會與導絲314電性連接。玻珠318 則疋包覆位於導絲3M與電極杯训連接處的部分導絲 314，並燒結在腔室3〇4兩端的位置3〇5處。 此外，在玻璃官302的腔室304内表面上已塗佈有螢 光層312。在一實施例中，螢光層312包括紅光螢光材料、 綠巧光㈣或藍光螢紐料。#然，熟f此領域之技術 人員還可以藉由调整螢光層312中的螢光材料成分，使後 續預完成之冷陰極燈管發出所需的可見光顏色，本發明於 此不作特別之限定。 、 請繼續參照圖2與圖3A，進行步驟S22〇，於玻璃管 3〇2之端口憑注入清除氣體WO，以使清除氣體3如通 過，室3。4’並從另—端口 3Q6b排出。清除氣體32。為惰 性氣體，其例如是氬氣或氖氬混合氣體。上述 320通過腔室3〇4内並由端口獅排出的步驟是在低壓的 200919534 1 ιι\νι.αυϋ/ιι 環境下進行的，其例如是在壓力條件為〇 〇〇lt〇rr 的環境下進行。 tQn： 特別就明的是，藉由使清除氣體320從玻璃管3〇2之 :端口 306a注入以通過腔室3〇4，再由另一端口 3〇叻排 以達到式清除雜氣之效果，㈣有助於徹底 殘留在腔室304内的雜氣。尤其，燈管的底部通常是最不 氣清除之位置’同樣也可以達到有效抑制雜氣 f i, 一 f參照圖2與圖3B，進行步驟S230，密封玻璃管3〇2 =二端口 306b，以形成一封止端3〇8。封止端3〇8的形 彻疋在玻璃官302之端σ 3〇6b處加熱而使玻璃管 #料軟化溶融，進而對端口遍處的玻璃材料塑 口^0=成—體以密合。此外，在本實施例中是以在端 =處形成封止# 3〇8為例來說明，但本發明並不限於 2 H在其他實施射，亦可以在端π遍a形成封止 编，，、要此將玻璃管302之—端口密封即可。 306 t著’進行步驟S24G，於封止端规外的另一端口 遠』直:括真空。進行抽真空的方式例如是於端口 306a 及排氣機(切示），真空泵及排氣 30 =厂的氣體322自端口施抽離，而使腔室 ，屢下降，達到所需的真空度，如ΐχΐ〇—3至 1x I u torr ° 一提的是’在使用清除氣體320清洗腔室304至 進订抽真空的過程中（步驟S220至步驟S24〇)，同時會在 10 200919534 1 iiwi.aoc/a 玻璃管302的周邊辅以加熱(步驟S27〇)，使雜氣易於脫離 管壁，加速雜氣排出。在玻璃管302的周邊辅以加熱的溫 度是介於300〜400°C。 請參照圖2與圖3C，在步驟S250中，於玻璃管3〇2 的腔室304内填充惰性氣體(未繪示)與汞蒸氣(未繪示）。在 二實施例中，填充於腔室304内的惰性氣體如氖氣、氬氣、 乳氣、亂氣或以上氣體混合所組成之群組。 / 之後，進行步驟S260，燒封玻璃管3〇2之電極31〇a、 310b處，並切除玻璃官3〇2之燒封處的外側，以暴露出部 分電極310a、3勘。更詳細的說明是，先在破珠318的位 置處燒封玻璃管302的兩端，以使腔室3〇4形成一密閉空 間，，著再將玻璃管3〇2之燒封處外側的兩端切除二而於 玻埚官302的兩末端暴露出部分導絲314。如此一來，即 I完成冷陰極燈管的製作。其中，電極杯训會位於玻璃 官302的腔室304内，導絲314會由玻璃管3〇2的腔室3〇4 内延輕玻璃管皿的外部，而玻珠318則是位於玻璃管 勺内表面302a與外表面3〇2b之間的區域。 ，上所述，本剌之冷陰極燈管㈣造找至少 下列優點： 丄·，由在具有兩開放式端口的破璃管内注入清除氣 Ϊ內^除氣魏財洗玻璃管的腔室，以稀釋玻璃 ’亚一併將雜氣排出玻璃管，因此開放式清除 有效的控制雜氣殘留量，並改善真空度不 200919534 ^3Utwt.doc/n 2. 由於開放式清除雜氣並伴隨燈管周邊加溫的 能夠有效降低雜氣附著於腔室壁上，因而可以加速降低雜 氣含量。 一 * 3. 利用本發明之方法所製造出來的燈管因具有低雜 氣殘留之特點，因此可有助於降低老化(aging)的 增加其使用年限。 曰 ^ 4.本發明之方法因藉由簡單手段即可有效降低玻璃 管内的雜氣殘留，而可以減低對製程真空度的需求以及減 少，空泵的制數量，還不需使財心_架構，因此可 以簡化製程所需的真空管路，並降低設備成本。 5.對於超長冷陰極燈管(長度超過85〇 mm)的製程而 5，亦可以藉由本發明之方法來改善雜氣殘留等問題。 —雖然本發明已以較佳實施例揭露如上，然其並非用以 限，本發明，任何所屬技術領域中具有通常知識者，在不 脫_本發明之精神和範圍内，當可作些許之更動與潤娜， 因此本發明之保護範圍當視後附之申請專利範圍所界定者 為準。 【圖式簡單說明】 —圖1A至圖1B是習知之一種冷陰極燈管的製造流程剖 面示意圖。 圖2是依照本發明之一實施例之一種冷陰極燈管的製 造流程圖。 ^ 圖3A至圖3C分別是依照本發明一實施例之冷陰極燈 管的剖面示意圖。 12 200919534 【主要元件符號說明】 102、302 :玻璃管 104、304 :腔室 106、306a、306b :端口 108、308 :封止端 110、310a、310b :電極 112、312 :螢光層 120 :清除氣體 122、322 :氣體 124 :雜氣 305 :位置 314 :導絲 316 :電極杯 318 :玻珠 320 :清除氣體 S210、S220、S230、S240、S250、S260、S270 :步驟 13The invention relates to a method for manufacturing a cold cathode fluorescent lamp (CCFL), and in particular to an effective method for reducing residual gas residues. A method of manufacturing a cold cathode lamp. [Prior Art] The cold cathode lamp is a low-pressure mercury discharge lamp, which has the advantages of small lamp tube, simple structure, high brightness, and curved tube processing into various shapes, so it is often used as a liquid crystal display, a scanner, and various types. Light source for lighting fixtures, light boxes, art lighting, neon lights, etc. In general, a cold cathode lamp is coated with a layer of light on the inner wall of the glass tube, and a small amount of inert gas and trace amount of mercury are sealed inside the glass tube. By applying a voltage to the electrodes at both ends of the cold cathode lamp, the gas molecules and the molecules in the glass tube are excited to generate a gas discharge, and ultraviolet light is emitted to excite the glory to generate visible light. _, 1Α to (1) is a cross-sectional view showing the manufacturing process of a conventional cold cathode lamp. As shown in FIG. 1A, first, a slate tube ι〇2 is provided. The glass tube 102 has a chamber 1〇4, an open port 1〇6, and a stop end. An electrode 110 is disposed at each of the end chamber and the sealing end (10) of the glass tube, and the inner surface of the chamber 1〇4 is coated with a glory layer (1). Next, a purge gas 12 注入 is injected at the end D 1 () 6 of the glass tube 102 to rinse the chamber. After flushing the chamber 1〇4 using the purge gas 12, the port is manually pumped to discharge the gas m immediately inside the chamber. Thereafter, the steps of evacuating the chamber 1〇4 and then evacuating are repeated several times (e.g., 3 times 200919534 2> 3iitwt.doc/n to 4 times). Thereafter, as shown in Fig. 1B, the glass tube 1〇2 is fired at the opening 1〇6, and the excess glass tube material on the outside of the sealing portion is cut off to expose a portion of the electrode 110 to form a cold cathode lamp. Since the impurity 124 at the sealing end 108 is less likely to be discharged as the length of the glass tube 102 increases during the vacuuming step, the chamber 1 〇 4 is lowered by vacuuming in a single direction as described above. The proportion of the heterogas 124 inside is often difficult to effectively control the residual amount of the impurity 124. In particular, as the length of the lamp official is longer, the problem that the residual gas 124 remains on the sealing end log becomes more serious, which causes problems such as the misalignment of the generated cold cathode lamp tube. Moreover, in order to solve the problem of residual gas, the conventional method usually increases the number of vacuum pumps and the vacuum capacity, and increases the number of flushing and vacuuming steps, which causes an increase in equipment cost. In addition, in the process: due to the need for movement and the need to maintain its high vacuum to eliminate the need for miscellaneous gas, it is often necessary to additionally configure a center valve for the degree of vacuum. When the degree of vacuum is increased to a certain extent, the oil film isolated between the atmosphere and the high vacuum zone ft is extremely easy to flow back to the edge of the central valve, and as the gas enters the glass tube during gas filling, the subsequently produced cold cathode lamp is caused. The tube is contaminated. SUMMARY OF THE INVENTION In view of the above, the present invention provides a method for manufacturing a cold cathode tube, which can effectively control the amount of residual gas, and can further improve the problem that the amount of miscellaneous gas is high as the length of the tube is longer. 200919534 z^jiiTwr.aoc/n This is a method for manufacturing a cold cathode lamp. First, there are 2 glass tubes with chambers and open two ports. Both ends of the glass tube are respectively provided with a pole electrode and a glory layer is formed on the inner surface of the chamber. Next, = glass, one of the ports g is injected with purge gas to allow the purge gas to pass through the chamber and exit the port. After that, the sealing glass tube is opened to form a sealing end. Then, another port outside the blocking end is evacuated. Next, the chamber of the glass tube is filled with an inert gas and mercury vapor. P secret 'burns the electrode of the glass tube, and the outer side 4 of the glass tube is sealed to expose part of the electrode. The invention further provides a method of manufacturing a cold cathode lamp. First, a glass tube with a chamber and an open two port is provided. The ends of the glass tube are separated by electrodes and the inner surface of the chamber is formed with a camping layer. Next, the = glass officer - port injects the gas to remove the purge gas through the cavity ^ and exits the other port of the glass. Thereafter, one of the glass tubes is sealed to form a blocking end. Then, another port outside the blocking end is pumped and worked. In addition, during the above process, the glass tube is supplemented with heating, and the enthalpy is accelerated to discharge. Next, the chamber of the glass tube is filled with an inert gas and mercury vapor. Then, the electrode of the glass tube was fired, and the outside of the sealing portion of the glass tube was cut to expose a part of the electrode. In an embodiment of the invention, the step of injecting a purge gas into one of the glass tubes to pass the purge gas through the chamber and discharging the other port of the glass tube is at a pressure of 0.001 torr to 丨t〇rr. In the embodiment of the invention, the length of the glass tube described above is between 850 mm and 1500 mm. 200919534 253ntwi.aoc/n In an embodiment of the invention, each of the electrodes is located between the chamber and each port. In an embodiment of the invention, the purge gas comprises an inert gas such as an argon or helium-argon mixed gas. In the embodiment of the invention, the temperature at which the periphery of the glass tube is additionally twisted is between 300 and 4003⁄4. μ The method for manufacturing the cold cathode lamp of the present invention is to effectively dilute the inside of the glass tube by removing the gas at the other end by removing the gas at the other end of the glass tube with the two open ports, and then sealing the glass. The tube is in the - port and is vacuumed at the other end, so the amount of residual gas in the glass tube can be effectively reduced. In addition, the method of the present invention can greatly reduce the number of times the heterogas removal step is performed by continuously purging and removing gas. Furthermore, during the cleaning to vacuuming process, the lamp is supplemented by heating to 3〇〇~4〇〇, which can effectively remove the glass tube _ water gas to gas, so that the process vacuum does not decrease as the lamp lengthens. The above described features and advantages of the present invention will become more apparent from the following description. [Embodiment] Fig. 2 is a flow chart showing the manufacture of a cold cathode lamp according to an embodiment of the present invention. 3A to 3C are schematic cross-sectional views of a cold cathode lamp according to an embodiment of the present invention, respectively. Referring to FIG. 2 and FIG. 3 simultaneously, in step S210, a glass tube 3〇2 is provided. The length of the glass tube 3〇2 is, for example, between 85 〇 111111 and 1500 mm. The glass tube 302 has chambers 3〇4 and 200919534 /^jntwt.aoc/n, two open ports 306a, 3〇6b. In the above, the ends of the glass tube 302 are respectively provided with electrodes 31A, 310b. The electrodes 310a, 310b are, for example, fixed within the chamber 3A4 and located between the chamber 304 and the ports 306a, 306b, respectively. In one embodiment, the electrodes 310a, 310b each include a guide wire 314, an electrode cup 316, and a bead 318. The guide wire 314 is located on both sides of the glass tube 302 near the ports s〇6a, 3〇6b. The material of the guide wire 314 is, for example, metal. With respect to the guide wire 314, the electrode cup 316 is disposed closer to the inside of the center of the cavity t3〇4, and the electrode cup 316 is electrically connected to the guide wire 314. The material of the electrode cup 316 is, for example, nickel, sharp or turned. In detail, the electrode cup 316 is a cylindrical hollow cup-like structure, and the bottom of the cylindrical hollow cup-shaped structure is electrically connected to the guide wire 314. The bead 318 is then covered with a portion of the guide wire 314 at the junction of the guide wire 3M and the electrode cup, and is sintered at a position 3〇5 at both ends of the chamber 3〇4. Further, a phosphor layer 312 is coated on the inner surface of the chamber 304 of the glass member 302. In one embodiment, the phosphor layer 312 comprises a red fluorescent material, a green light (four) or a blue fluorescent material. </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; . Referring to Fig. 2 and Fig. 3A, step S22 is performed, and the purge gas WO is injected at the port of the glass tube 3〇2 so that the purge gas 3 passes through the chamber 3. 4' and is discharged from the other port 3Q6b. The gas 32 is purged. It is an inert gas which is, for example, an argon gas or a helium-argon mixed gas. The above step 320 is carried out through the chamber 3〇4 and discharged by the port lion in a low pressure 200919534 1 ιι\νι.αυϋ/ιι environment, for example, under the pressure condition 〇〇〇lt〇rr get on. tQn: It is particularly clear that the purge gas 320 is injected from the glass tube 3〇2: port 306a to pass through the chamber 3〇4, and then the other port 3 is arranged to achieve the effect of removing the gas. (4) Helping the residual gas remaining in the chamber 304 completely. In particular, the bottom of the tube is usually the most air-cleaning position 'the same can also achieve effective suppression of the noise fi, a f with reference to Figure 2 and Figure 3B, step S230, sealing the glass tube 3 〇 2 = two ports 306b, Form a stop 3〇8. The shape of the sealing end 3〇8 is heated at the end σ 3〇6b of the glass official 302 to soften and melt the glass tube #, and then the glass material of the port is plasticized. . In addition, in the present embodiment, the sealing #3〇8 is formed at the end==, but the invention is not limited to 2H, and the sealing can be formed at the end π. Therefore, it is necessary to seal the port of the glass tube 302. 306 t is carried out in step S24G, and the other port outside the sealing end is far away: a vacuum is included. The way of vacuuming is, for example, at port 306a and the exhaust (cutting), the vacuum pump and the exhaust gas 30 = the gas 322 of the plant is pumped away from the port, and the chamber is repeatedly lowered to achieve the required degree of vacuum. For example, ΐχΐ〇-3 to 1x I u torr ° is mentioned in the process of cleaning the chamber 304 using the purge gas 320 to the process of vacuuming (step S220 to step S24), and at 10 200919534 1 iiwi. The periphery of the aoc/a glass tube 302 is additionally heated (step S27〇), so that the gas is easily separated from the tube wall to accelerate the discharge of the gas. The temperature at which the periphery of the glass tube 302 is supplemented with heating is between 300 and 400 °C. Referring to FIG. 2 and FIG. 3C, in step S250, the chamber 304 of the glass tube 3〇2 is filled with an inert gas (not shown) and mercury vapor (not shown). In the second embodiment, an inert gas such as helium gas, argon gas, milk gas, disordered gas or a mixture of the above gases is filled in the chamber 304. / Thereafter, in step S260, the electrodes 31〇a, 310b of the glass tube 3〇2 are baked, and the outside of the burnt portion of the glass member 3〇2 is cut off to expose the partial electrodes 310a and 3. In more detail, the two ends of the glass tube 302 are first sealed at the position of the broken beads 318, so that the chamber 3〇4 forms a closed space, and then the outer side of the glass tube 3〇2 is sealed. The two ends are cut away and a portion of the guide wire 314 is exposed at both ends of the glass bottle 302. In this way, I completed the fabrication of the cold cathode lamp. Wherein, the electrode cup training is located in the chamber 304 of the glass officer 302, and the guide wire 314 is extended from the outside of the light glass tube by the chamber 3〇4 of the glass tube 3〇2, and the glass bead 318 is located in the glass tube. The area between the inner surface 302a of the scoop and the outer surface 3〇2b. As mentioned above, the cold cathode lamp (4) of Benedictine has at least the following advantages: 丄·, by injecting a chamber in the glass tube with two open ports to remove the gas and clean the glass tube. Diluting the glass 'sub-a and exhausting the exhaust gas out of the glass tube, so the open-cut clearing effectively controls the residual amount of the gas, and improves the vacuum degree not 200919534 ^3Utwt.doc/n 2. Due to the open type of clear gas and accompanying the tube The peripheral heating can effectively reduce the adhesion of the gas to the chamber wall, thereby accelerating the reduction of the impurity content. A 3. The lamp produced by the method of the present invention has the characteristics of low impurity residue, and thus can contribute to reducing the aging and increasing the service life thereof.曰^ 4. The method of the invention can effectively reduce the residual gas in the glass tube by a simple means, and can reduce the demand for the process vacuum and reduce the number of air pumps, and does not need to make a fortune. This simplifies the vacuum lines required for the process and reduces equipment costs. 5. For the process of ultra-long cold cathode fluorescent tubes (length exceeding 85 mm), it is also possible to improve the problem of residual gas residues by the method of the present invention. The present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the scope of the invention, and any one of ordinary skill in the art may, in the spirit and scope of the invention, The scope of protection of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A to Fig. 1B are schematic cross-sectional views showing a manufacturing process of a conventional cold cathode lamp. 2 is a flow chart showing the manufacture of a cold cathode lamp in accordance with an embodiment of the present invention. 3A to 3C are schematic cross-sectional views of a cold cathode lamp according to an embodiment of the present invention, respectively. 12 200919534 [Description of main component symbols] 102, 302: glass tubes 104, 304: chambers 106, 306a, 306b: ports 108, 308: blocking ends 110, 310a, 310b: electrodes 112, 312: fluorescent layer 120: Scavenging gas 122, 322: gas 124: heterogas 305: position 314: guide wire 316: electrode cup 318: bead 320: scavenging gas S210, S220, S230, S240, S250, S260, S270: step 13