TW200917358A - Atmospheric plasma reactor apparatus with a dual-working mode - Google Patents

Atmospheric plasma reactor apparatus with a dual-working mode Download PDF

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Publication number
TW200917358A
TW200917358A TW96138060A TW96138060A TW200917358A TW 200917358 A TW200917358 A TW 200917358A TW 96138060 A TW96138060 A TW 96138060A TW 96138060 A TW96138060 A TW 96138060A TW 200917358 A TW200917358 A TW 200917358A
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TW
Taiwan
Prior art keywords
gas
electrode
discharge
plasma
cavity
Prior art date
Application number
TW96138060A
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English (en)
Chinese (zh)
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TWI344179B (de
Inventor
zhi-ming Yan
yong-zhi Chen
xiao-hui Chen
Ming-Song Yang
Meng-Han Huang
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Atomic Energy Council
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Priority to TW96138060A priority Critical patent/TW200917358A/zh
Publication of TW200917358A publication Critical patent/TW200917358A/zh
Application granted granted Critical
Publication of TWI344179B publication Critical patent/TWI344179B/zh

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  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW96138060A 2007-10-11 2007-10-11 Atmospheric plasma reactor apparatus with a dual-working mode TW200917358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96138060A TW200917358A (en) 2007-10-11 2007-10-11 Atmospheric plasma reactor apparatus with a dual-working mode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96138060A TW200917358A (en) 2007-10-11 2007-10-11 Atmospheric plasma reactor apparatus with a dual-working mode

Publications (2)

Publication Number Publication Date
TW200917358A true TW200917358A (en) 2009-04-16
TWI344179B TWI344179B (de) 2011-06-21

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TW96138060A TW200917358A (en) 2007-10-11 2007-10-11 Atmospheric plasma reactor apparatus with a dual-working mode

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TW (1) TW200917358A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI449080B (zh) * 2012-07-25 2014-08-11 Au Optronics Corp 電漿反應機台

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5694543B2 (ja) * 2011-09-08 2015-04-01 東芝三菱電機産業システム株式会社 プラズマ発生装置、ｃｖｄ装置およびプラズマ処理粒子生成装置
WO2013035375A1 (ja) * 2011-09-09 2013-03-14 東芝三菱電機産業システム株式会社 プラズマ発生装置およびｃｖｄ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI449080B (zh) * 2012-07-25 2014-08-11 Au Optronics Corp 電漿反應機台

Also Published As

Publication number Publication date
TWI344179B (de) 2011-06-21

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